CN112782124B - High-resolution continuous terahertz wave lamination imaging method - Google Patents
High-resolution continuous terahertz wave lamination imaging method Download PDFInfo
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Abstract
本发明公开了一种高分辨率的连续太赫兹叠层成像方法,该方法包括用发散球面波照射物体,有效利用全部的光束能量,根据几何关系,面阵式探测器采集物体后放大了的衍射强度信息,从而增加采样,以此作为记录面约束条件,以ePIE算法流程为基础,将ePIE算法重建的物面物体复振幅透过率函数和探针函数作为初始猜测,获得衍射场的相位信息,因此可以获得足够的信息唯一地定义物体的出射光场。通过迭代数值计算的方式外推出面阵式探测器外围没有记录到的部分高衍射级次信息,扩大系统的数值孔径。该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。
The invention discloses a high-resolution continuous terahertz stack imaging method. The method includes irradiating objects with divergent spherical waves, effectively utilizing all beam energy, and amplifying the object after being collected by an area array detector according to the geometric relationship. Diffraction intensity information, so as to increase sampling, as the recording surface constraints, based on the ePIE algorithm process, the complex amplitude transmittance function and the probe function of the object surface object reconstructed by the ePIE algorithm are used as the initial guess to obtain the phase of the diffraction field information, so enough information can be obtained to uniquely define the outgoing light field of the object. Part of the high diffraction order information not recorded in the periphery of the area array detector is extrapolated by iterative numerical calculation, and the numerical aperture of the system is expanded. This method effectively improves the lateral resolution and imaging quality of the reconstructed object without increasing the complexity of the optical path, and reduces the requirements of the experimental resolution on the target size and pixel size of the area array detector.
Description
技术领域technical field
本发明涉及一种高分辨率的连续太赫兹波叠层扫描全场定量相衬成像方法,特别是涉及一种基于发散球面波探针加外推算法的高分辨率的连续太赫兹波叠层扫描全场定量相衬成像方法以提高成像的横向分辨率。The present invention relates to a high-resolution continuous terahertz wave stack scanning full-field quantitative phase contrast imaging method, in particular to a high-resolution continuous terahertz wave stack based on a divergent spherical wave probe plus an extrapolation algorithm Scanning full-field quantitative phase-contrast imaging method to improve lateral resolution of imaging.
背景技术Background technique
太赫兹波是频率在0.1-10THz之间的电磁波,对应波长为0.03到3mm,具有宽光谱、高穿透性、低能性、惧水性等多种重要特性,在医学成像、无损检测、安检反恐、宽带通信、生物传感等诸多领域都显示出其巨大的科学意义和应用价值,太赫兹成像技术作为太赫兹波段主要应用之一,扮演了越来越重要的角色。太赫兹叠层成像技术是一种通过交叠采集冗余的衍射图样信息恢复出样品复振幅分布的无透镜相干衍射成像技术,其原理为:在保证相邻两次照明光满足交叠率的基础上,改变照明光与样品的位置,通过采集阵列扫描的衍射图样信息,通过传统的叠层再现算法(ePIE,extendedptychographic iterativeengine),能够快速准确地重建出样品的复振幅透过率函数和照明光束的复振幅分布。叠层成像方法的重建物体相位分布不受除物体本身特性的其他因素影响,且成像光路简单,系统的分辨率只与系统的数值孔径和记录距离有关,在记录距离一定的情况下,更大的系统数值孔径可以获取更多的衍射信息。现阶段太赫兹波段的探测器受制备工艺的限制,无法扩大探测器的靶面尺寸和缩小探测器的像元尺寸,而合成孔径作为一种机械移动面阵式探测器位置来采集更多高频信息的方法会加大太赫兹叠层成像方法的数据量和记录时间,过长的记录时间对设备和环境的稳定性提出了更高的要求。为此我们提出了一种高分辨率的太赫兹叠层成像方法,采用发散球面波作为叠层探针可以有效利用全部的光束能量,且根据几何关系得到放大了的衍射信息,从而增加采样,提高系统的成像横向分辨率;将ePIE算法在物面重建的低分辨率物体复振幅透过率函数和探针函数作为初始猜测,面阵式探测器采集到的低衍射级次强度信息作为记录面约束条件,以迭代数值计算的方式外推出没有记录到的部分高衍射级次信息。该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。Terahertz wave is an electromagnetic wave with a frequency between 0.1-10THz, corresponding to a wavelength of 0.03 to 3mm. It has many important characteristics such as wide spectrum, high penetration, low energy, and fear of water. It is used in medical imaging, non-destructive testing, and security checks. Many fields such as terahertz, broadband communication, and biosensing have shown their great scientific significance and application value. As one of the main applications of terahertz band, terahertz imaging technology has played an increasingly important role. Terahertz stack imaging technology is a lensless coherent diffraction imaging technology that restores the complex amplitude distribution of the sample by overlapping and collecting redundant diffraction pattern information. On the basis of changing the positions of the illumination light and the sample, the complex amplitude transmittance function and the illumination The complex amplitude distribution of the beam. The phase distribution of the reconstructed object by the stack imaging method is not affected by other factors except the characteristics of the object itself, and the imaging optical path is simple. The resolution of the system is only related to the numerical aperture of the system and the recording distance. The numerical aperture of the system can obtain more diffraction information. At present, the detectors in the terahertz band are limited by the manufacturing process, and it is impossible to expand the target size of the detector and reduce the pixel size of the detector. The synthetic aperture is used as a mechanical movement of the area array detector to collect more high-resolution images. The method of using high-frequency information will increase the data volume and recording time of the terahertz stack imaging method, and the long recording time puts forward higher requirements for the stability of the equipment and the environment. To this end, we propose a high-resolution terahertz stack imaging method. Using divergent spherical waves as a stack probe can effectively utilize all the beam energy, and obtain amplified diffraction information according to the geometric relationship, thereby increasing sampling. Improve the imaging lateral resolution of the system; use the low-resolution object complex amplitude transmittance function and probe function reconstructed by the ePIE algorithm on the object plane as the initial guess, and the low-diffraction order intensity information collected by the area array detector as the record Surface constraint conditions, extrapolation of part of the high diffraction order information that has not been recorded by iterative numerical calculation. This method effectively improves the lateral resolution and imaging quality of the reconstructed object without increasing the complexity of the optical path, and reduces the requirements of the experimental resolution on the target size and pixel size of the area array detector.
发明内容Contents of the invention
本发明的目的在于用发散球面波照射物体,面阵式探测器采集物体后的衍射强度信息,以此作为记录面约束条件,通过迭代数值计算的方式外推出面阵式探测器外围没有记录到的衍射强度信息。通过几何关系可以看出,物体的衍射信息在记录面被放大,实际上可以看作探测器的物理像元尺寸变小,且外推出更多的衍射强度信息有效增加了系统的数值孔径,有更多衍射强度信息重建物体的复振幅透过率函数,从而得到分辨率更高的重建像,在不改变光路复杂性的基础上,降低了对实验设备和实验环境的要求,有效提高了成像质量和保真度,重建获得高分辨率的物体复振幅透过率函数。The purpose of the present invention is to irradiate the object with divergent spherical waves, and the diffraction intensity information of the object is collected by the area array detector, which is used as the constraint condition of the recording surface. diffraction intensity information. It can be seen from the geometric relationship that the diffraction information of the object is amplified on the recording surface, which can actually be regarded as the physical pixel size of the detector becomes smaller, and the extrapolation of more diffraction intensity information effectively increases the numerical aperture of the system. More diffraction intensity information reconstructs the complex amplitude transmittance function of the object, thereby obtaining a reconstructed image with higher resolution. On the basis of not changing the complexity of the optical path, it reduces the requirements for experimental equipment and experimental environment, and effectively improves imaging. Quality and fidelity, the reconstruction obtains a high-resolution complex amplitude transmittance function of the object.
为实现上述目的,本发明采用的技术方案为一种高分辨率的连续太赫兹叠层成像方法,实现该方法的成像系统光路包括二氧化碳泵浦连续太赫兹激光器,两个镀金离轴抛物面镜,太赫兹透镜,被测物体,二维电动平移台,面阵式热释电探测器。二氧化碳泵浦连续太赫兹激光器作为辐射源;离轴抛物面镜将激光器辐射出的连续太赫兹波扩束准直成平行光;太赫兹透镜对平行光进行汇聚;被测物体固定在二维电动平移台上,且置于太赫兹透镜后焦面之后,二维电动平移台的x轴、y轴用以水平、垂直移动被测物体;面阵式热释电探测器放置在被测物体后,用以采集衍射强度信息。太赫兹波由激光器生成后,通过两个离轴抛物面镜进行扩束准直,太赫兹透镜将平行光进行汇聚,被测物体放在太赫兹透镜后焦面之后,面阵式热释电探测器记录物体后的衍射信息。通过移动二维电动平移台,面阵式热释电探测器采集到物平面有交叠区域的物体衍射图Ij(u),其中j=1,2,3…J,J是扫描位置的总数。In order to achieve the above purpose, the technical solution adopted by the present invention is a high-resolution continuous terahertz stack imaging method. The optical path of the imaging system for realizing this method includes a carbon dioxide pumped continuous terahertz laser, two gold-plated off-axis parabolic mirrors, Terahertz lens, measured object, two-dimensional electric translation stage, area array pyroelectric detector. The carbon dioxide pumped continuous terahertz laser is used as the radiation source; the off-axis parabolic mirror expands and collimates the continuous terahertz wave beam radiated by the laser into parallel light; the terahertz lens converges the parallel light; the measured object is fixed in a two-dimensional electric translation On the stage, and placed behind the back focal plane of the terahertz lens, the x-axis and y-axis of the two-dimensional electric translation stage are used to move the measured object horizontally and vertically; the area array pyroelectric detector is placed behind the measured object, Used to collect diffraction intensity information. After the terahertz wave is generated by the laser, it is expanded and collimated by two off-axis parabolic mirrors. The terahertz lens converges the parallel light. The measured object is placed behind the back focal plane of the terahertz lens. The detector records the diffraction information of the object. By moving the two-dimensional electric translation stage, the area array pyroelectric detector collects the object diffraction pattern I j (u) with overlapping areas on the object plane, where j=1,2,3...J, J is the scanning position total.
该方法包括用发散球面波照射物体,有效利用全部的光束能量,根据几何关系面阵式探测器采集物体后放大了的衍射强度信息,从而增加采样,以此作为记录面约束条件,以ePIE算法流程为基础,将ePIE算法重建的物体复振幅透过率函数和探针函数作为初始猜测,获得衍射场的相位信息,因此可以获得足够的信息唯一地定义物体的出射光场。通过迭代数值计算的方式外推出面阵式探测器外围没有记录到的部分高衍射级次信息,扩大系统的数值孔径。该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。The method includes irradiating the object with divergent spherical waves, effectively utilizing all the beam energy, and collecting the amplified diffraction intensity information of the object according to the geometric relationship of the surface array detector, thereby increasing the sampling, which is used as the recording surface constraint condition, and the ePIE algorithm Based on the process, the complex amplitude transmittance function and the probe function of the object reconstructed by the ePIE algorithm are used as the initial guess to obtain the phase information of the diffraction field, so sufficient information can be obtained to uniquely define the outgoing light field of the object. The part of the high diffraction order information not recorded in the periphery of the area array detector is extrapolated by iterative numerical calculation, and the numerical aperture of the system is expanded. This method effectively improves the lateral resolution and imaging quality of the reconstructed object without increasing the complexity of the optical path, and reduces the requirements of the experimental resolution on the target size and pixel size of the area array detector.
一种高分辨率的连续太赫兹叠层成像方法,其提高重建物体的横向分辨率、提高成像质量的过程分为五个步骤:A high-resolution continuous terahertz stack imaging method, the process of improving the lateral resolution of the reconstructed object and improving the imaging quality is divided into five steps:
S1扩束准直后的平行光被太赫兹透镜汇聚,调节焦距为f的太赫兹透镜与被测物体间距为d0,使得被测物体位于太赫兹透镜后焦面之后d0-f处,假设物面坐标为r=(x,y),记录面的坐标为u=(ξ,η),被测物体表面的复振幅分布和探针(照明光束)函数分别表示为O(r)和P(r)。被测物体与探测器间距为d,去掉被测物体,用探测器记录发散球面波探针的强度图I0(u),作为以发散球面波为探针的ePIE算法的初始探针猜测。The parallel light after S1 beam expansion and collimation is converged by the terahertz lens, and the distance between the terahertz lens with focal length f and the measured object is adjusted to d 0 , so that the measured object is located at d 0 -f behind the back focal plane of the terahertz lens, Assuming that the coordinates of the object plane are r=(x, y), and the coordinates of the recording surface are u=(ξ, η), the complex amplitude distribution on the surface of the measured object and the function of the probe (illumination beam) are expressed as O(r) and P(r). The distance between the measured object and the detector is d, remove the measured object, and use the detector to record the intensity map I 0 (u) of the divergent spherical wave probe, which is used as the initial probe guess of the ePIE algorithm using the divergent spherical wave as the probe.
S2将被测物体加入光路中,按照电动平移台的扫描路径依次采集物体的衍射强度Ij(u),表达式如下:S2 adds the measured object into the optical path, and sequentially collects the diffraction intensity I j (u) of the object according to the scanning path of the electric translation stage, and the expression is as follows:
Ij(u)=|Gd{O(r)P(r-Rj)}|2, (1)I j (u)=|G d {O(r)P(rR j )}| 2 , (1)
其中Rj=(xj,yj)表示样品的第j个平移向量,j=1,2,3…J,J是衍射图样的总数,G{}为衍射传播算子,我们采用角谱衍射传播。Where R j =(x j ,y j ) represents the jth translation vector of the sample, j=1,2,3...J, J is the total number of diffraction patterns, G{} is the diffraction propagation operator, we use the angle spectrum Diffraction propagation.
S3利用ePIE算法重建物面低分辨率的物体复振幅透过率函数和探针函数。S3 uses the ePIE algorithm to reconstruct the low-resolution complex amplitude transmittance function and probe function of the object plane.
S4利用外推算法扩大衍射图的尺寸,重建物面高分辨率的物体复振幅透过率函数。外推算法的具体流程分为以下七个步骤:S4 uses the extrapolation algorithm to expand the size of the diffraction pattern, and reconstructs the complex amplitude transmittance function of the object plane with high resolution. The specific process of the extrapolation algorithm is divided into the following seven steps:
S4.1以第j个位置的一次重建为例,将第j个衍射强度图Ij(u)、探针尺寸、平移向量、衍射距离作为已知量,衍射强度图的矩阵大小为M0×N0,以ePIE算法重建物面的物体复振幅透过率函数作为初始猜测物函数OjX,其中物函数OjX的矩阵大小为K×L,X=(k,l)代表物体的像素位置,将ePIE算法重建物面的探针函数外围填充随机数至M×N大小,作为初始猜测探针Pjr,其中K>M,L>N,表示局域照明光扫描样品区域,M>M0,N>N0。S4.1 Taking a reconstruction of the jth position as an example, take the jth diffraction intensity map I j (u), probe size, translation vector, and diffraction distance as known quantities, and the matrix size of the diffraction intensity map is M 0 ×N 0 , using the ePIE algorithm to reconstruct the complex amplitude transmittance function of the object plane as the initial guess object function O jX , where the matrix size of the object function O jX is K×L, and X=(k,l) represents the pixel of the object Position, fill the periphery of the probe function of the ePIE algorithm to reconstruct the object surface with random numbers to the size of M×N, as the initial guess probe P jr , where K>M, L>N, indicating that the local illumination light scans the sample area, M> M 0 , N>N 0 .
S4.2在OjX中以Rj=(Rxj,Ryj)位置为中心截取M0×N0区域,在M0×N0区域外围填充随机数至M×N大小,作为部分物函数objjr,则第j个位置的样品出射波为:S4.2 Intercept the M 0 ×N 0 area centered on the position R j = (R xj , R yj ) in O jX , and fill the periphery of the M 0 ×N 0 area with random numbers to the size of M×N as a partial function obj jr , then the outgoing wave of the sample at the jth position is:
ψjr=objjr×Pjr. (2)ψ jr =obj jr ×P jr . (2)
S4.3样品的出射波乘上一个汉宁窗以消除孔径效应,然后利用角谱衍射传播距离d到记录面,得到记录面的衍射场复振幅分布:S4.3 The outgoing wave of the sample is multiplied by a Hanning window to eliminate the aperture effect, and then use the angular spectrum diffraction to propagate the distance d to the recording surface to obtain the complex amplitude distribution of the diffraction field on the recording surface:
Φjr=Gd{Hanning(ψjr)}. (3)Φ jr =G d {Hanning(ψ jr )}. (3)
S4.4用探测器采集的衍射强度Ij(u)的均方根代替(3)式中Φjr中心位置M0×N0区域的振幅,M0×N0区域外的振幅和全部相位保留,得到新的复振幅分布:S4.4 Use the root mean square of the diffraction intensity I j (u) collected by the detector to replace the amplitude in the M 0 × N 0 area at the central position of Φ jr in the formula (3), and the amplitude and all phases outside the M 0 × N 0 area Retaining, the new complex amplitude distribution is obtained:
其中,S0为M0×N0区域。Wherein, S 0 is the M 0 ×N 0 area.
S4.5将新的记录面衍射场复振幅分布乘上汉宁窗后衍射回传距离d至物面,得到更新后的物体出射光场ψ'jr。S4.5 Multiply the complex amplitude distribution of the diffraction field on the new recording surface by the Hanning window, and then diffract back the distance d to the object surface to obtain the updated object exit light field ψ' jr .
S4.6通过更新函数更新初始猜测的部分物函数和探针函数,更新函数如下:S4.6 Update the initial guessed partial object function and probe function through the update function, the update function is as follows:
其中α,β为权重系数,取值一般在0.9-1之间;ε为调节系数,用以调节分母不等于0,取值为0.01。Among them, α and β are weight coefficients, and the value is generally between 0.9-1; ε is an adjustment coefficient, which is used to adjust the denominator to be different from 0, and the value is 0.01.
S4.7截取更新后的部分物函数矩阵obj'jr的中心M0×N0区域,放回S4.2中截取的位置,得到更新后的物函数分布Oj'X。S4.7 Intercept the center M 0 ×N 0 area of the updated part of the object function matrix obj' jr , put it back to the intercepted position in S4.2, and obtain the updated object function distribution O j ' X .
S5采用更新后的物函数作为初始物函数猜测,更新后的探针函数作为初始探针函数猜测,对下一样品位置的衍射图依次进行S4.2-S4.7的处理,直至更新完整个物面一次。对整个物面迭代n次,算法收敛后便可以得到最终重建物面的高分辨率物体透过率函数和探针函数分布。S5 adopts the updated physical function as the initial physical function guess, and the updated probe function as the initial probe function guess, and performs the processing of S4.2-S4.7 on the diffraction pattern of the next sample position in sequence until the whole is updated. surface once. The entire object surface is iterated n times, and after the algorithm converges, the high-resolution object transmittance function and probe function distribution of the final reconstructed object surface can be obtained.
本发明的典型实施例的实验结果表明,利用发散球面波作为叠层探针照射样品,面阵式探测器采集被放大的衍射场强度信息,通过将ePIE算法重建的物体复振幅透过率函数和探针函数作为初始猜,探测器采集到的低衍射级次强度信息作为记录面约束条件,以迭代数值计算的方式外推出探测器周围没有记录到的更高级次的衍射信息,该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。The experimental results of a typical embodiment of the present invention show that the divergent spherical wave is used as a laminated probe to irradiate the sample, the area array detector collects the amplified diffraction field intensity information, and the complex amplitude transmittance function of the object reconstructed by the ePIE algorithm and the probe function as the initial guess, the low-diffraction-order intensity information collected by the detector is used as the constraint condition of the recording surface, and the higher-order diffraction information that is not recorded around the detector is extrapolated by iterative numerical calculation. Without increasing the complexity of the optical path, the lateral resolution and imaging quality of the reconstructed object are effectively improved, and the requirements for the experimental resolution on the target size and pixel size of the area array detector are reduced.
与现有技术相比,本发明提出的一种高分辨率的连续太赫兹叠层成像方法,利用发散球面波作为叠层探针照射样品,面阵式探测器采集被放大的衍射场强度信息,有效利用了全部的光束能量,且根据几何关系得到放大的衍射信息,增加了衍射图的采样,提高了系统的成像分辨率;将ePIE算法重建的物体复振幅透过率函数和探针函数作为初始猜,探测器采集到的低衍射级次强度信息作为记录面约束条件,以迭代数值计算的方式外推出探测器周围没有记录到的更高级次的衍射信息,该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。Compared with the prior art, the present invention proposes a high-resolution continuous terahertz stack imaging method, using divergent spherical waves as a stack probe to irradiate the sample, and an area array detector to collect the amplified diffraction field intensity information , effectively utilizes all beam energy, and obtains amplified diffraction information according to the geometric relationship, increases the sampling of the diffraction pattern, and improves the imaging resolution of the system; the complex amplitude transmittance function and the probe function of the object reconstructed by the ePIE algorithm As an initial guess, the low-diffraction-order intensity information collected by the detector is used as the constraint condition of the recording surface, and the higher-order diffraction information that is not recorded around the detector is extrapolated by iterative numerical calculation. This method does not increase the complexity of the optical path. Under the premise of stability, the lateral resolution and imaging quality of the reconstructed object are effectively improved, and the requirements of the experimental resolution on the target size and pixel size of the area array detector are reduced.
附图说明Description of drawings
图1是一种高分辨率的连续太赫兹叠层成像方法的系统光路。图中:1、FIRL295型二氧化碳泵浦连续太赫兹激光器,2、第一离轴抛物面镜,3、第二离轴抛物面镜,4、太赫兹透镜,5、被测物体,6、二维电动平移台,7、PY-Ⅳ面阵式热释电探测器。Figure 1 is a system optical path of a high-resolution continuous terahertz stack imaging method. In the figure: 1. FIRL295 carbon dioxide pumped continuous terahertz laser, 2. The first off-axis parabolic mirror, 3. The second off-axis parabolic mirror, 4. Terahertz lens, 5. The measured object, 6. Two-dimensional electric motor Translation stage, 7. PY-Ⅳ area array pyroelectric detector.
具体实施方式detailed description
如图1所示,一种高分辨率的连续太赫兹叠层成像方法,其特征在于:实现该方法的成像系统光路包括FIRL295型二氧化碳泵浦连续太赫兹激光器1,焦距为50.8mm的第一镀金离轴抛物面镜2,焦距为152.4mm的第二镀金离轴抛物面镜3,太赫兹TPX透镜4,被测物体5,二维电动平移台6,PY-Ⅳ面阵式热释电探测器7。FIRL295型二氧化碳泵浦连续太赫兹激光器1作为辐射源,工作气体为甲醇,输出频率为2.52THz,对应中心波长为118.83μm,输出功率最大为500mW;第一离轴抛物面镜2,第二离轴抛物面镜3组成的系统将激光器1辐射出的连续太赫兹波扩束三倍,并准直成直径为21mm的平行光;太赫兹透镜4焦距为100mm,对平行光进行汇聚;被测物体5固定在二维电动平移台6上,且置于太赫兹透镜4焦平面后16mm的位置,二维电动平移台6最大量程为25mm,x轴、y轴用以水平、垂直移动待测样品,实验中所设步长为0.8mm,扫描路径为蛇形顺序,保证相邻衍射图的交叠面积约为75%;PY-Ⅳ面阵式热释电探测器7放置在被测物体后,采集样品交叠的衍射图,像素个数为320×320,像元尺寸为80×80μm。As shown in Figure 1, a high-resolution continuous terahertz stack imaging method is characterized in that: the optical path of the imaging system for realizing the method includes a FIRL295 carbon dioxide pumped continuous terahertz laser 1, and the first laser beam with a focal length of 50.8mm Gold-plated off-axis
该方法包括用发散球面波照射物体,有效利用全部的光束能量,根据几何关系面阵式探测器采集物体后放大了的衍射强度信息,从而增加采样,以此作为记录面约束条件,以ePIE算法流程为基础,将ePIE算法重建的物体复振幅透过率函数和探针函数作为初始猜测,获得衍射场的相位信息,因此可以获得足够的信息唯一地定义物体的出射光场。通过迭代数值计算的方式外推出面阵式探测器外围没有记录到的部分高衍射级次信息,扩大系统的数值孔径。该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。The method includes irradiating the object with divergent spherical waves, effectively utilizing all the beam energy, and collecting the amplified diffraction intensity information of the object according to the geometric relationship of the surface array detector, thereby increasing the sampling, which is used as the recording surface constraint condition, and the ePIE algorithm Based on the process, the complex amplitude transmittance function and the probe function of the object reconstructed by the ePIE algorithm are used as the initial guess to obtain the phase information of the diffraction field, so sufficient information can be obtained to uniquely define the outgoing light field of the object. The part of the high diffraction order information not recorded in the periphery of the area array detector is extrapolated by iterative numerical calculation, and the numerical aperture of the system is expanded. This method effectively improves the lateral resolution and imaging quality of the reconstructed object without increasing the complexity of the optical path, and reduces the requirements of the experimental resolution on the target size and pixel size of the area array detector.
一种高分辨率的连续太赫兹叠层成像方法,其提高重建物体的横向分辨率、提高成像质量的过程分为五个步骤:A high-resolution continuous terahertz stack imaging method, the process of improving the lateral resolution of the reconstructed object and improving the imaging quality is divided into five steps:
S1扩束准直后的平行光被太赫兹透镜汇聚,调节焦距为f的太赫兹透镜与被测物体间距为d0,使得被测物体位于太赫兹透镜后焦面之后d0-f处,假设物面坐标为r=(x,y),记录面的坐标为u=(ξ,η),被测物体表面的复振幅分布和探针(照明光束)函数分别表示为O(r)和P(r)。被测物体与探测器间距为d,去掉被测物体,用探测器记录发散球面波探针的强度图I0(u),作为以发散球面波为探针的ePIE算法的初始探针猜测。The parallel light after S1 beam expansion and collimation is converged by the terahertz lens, and the distance between the terahertz lens with focal length f and the measured object is adjusted to d 0 , so that the measured object is located at d 0 -f behind the back focal plane of the terahertz lens, Assuming that the coordinates of the object plane are r=(x, y), and the coordinates of the recording surface are u=(ξ, η), the complex amplitude distribution on the surface of the measured object and the function of the probe (illumination beam) are expressed as O(r) and P(r). The distance between the measured object and the detector is d, remove the measured object, and use the detector to record the intensity map I 0 (u) of the divergent spherical wave probe as the initial probe guess of the ePIE algorithm using the divergent spherical wave as the probe.
S2将被测物体加入光路中,按照电动平移台的扫描路径依次采集物体的衍射强度Ij(u),表达式如下:S2 adds the measured object into the optical path, and sequentially collects the diffraction intensity I j (u) of the object according to the scanning path of the electric translation stage, and the expression is as follows:
Ij(u)=|Gd{O(r)P(r-Rj)}|2, (1)I j (u)=|G d {O(r)P(rR j )}| 2 , (1)
其中Rj=(xj,yj)表示样品的第j个平移向量,j=1,2,3…J,J是衍射图样的总数,G{}为衍射传播算子,我们采用角谱衍射传播。Where R j =(x j ,y j ) represents the jth translation vector of the sample, j=1,2,3...J, J is the total number of diffraction patterns, G{} is the diffraction propagation operator, we use the angle spectrum Diffraction propagation.
S3利用ePIE算法重建物面低分辨率的物体复振幅透过率函数和探针函数。S3 uses the ePIE algorithm to reconstruct the low-resolution complex amplitude transmittance function and probe function of the object plane.
S4利用外推算法扩大衍射图的尺寸,重建物面高分辨率的物体复振幅透过率函数。外推算法的具体流程分为以下七个步骤:S4 uses the extrapolation algorithm to expand the size of the diffraction pattern, and reconstructs the complex amplitude transmittance function of the object plane with high resolution. The specific process of the extrapolation algorithm is divided into the following seven steps:
S4.1以第j个位置的一次重建为例,将第j个衍射强度图Ij(u)、探针尺寸、平移向量、衍射距离作为已知量,衍射强度图的矩阵大小为M0×N0,以ePIE算法重建物面的物体复振幅透过率函数作为初始猜测物函数OjX,其中物函数OjX的矩阵大小为K×L,X=(k,l)代表物体的像素位置,将ePIE算法重建物面的探针函数外围填充随机数至M×N大小,作为初始猜测探针Pjr,其中K>M,L>N,表示局域照明光扫描样品区域,M>M0,N>N0。S4.1 Taking a reconstruction of the jth position as an example, take the jth diffraction intensity map I j (u), probe size, translation vector, and diffraction distance as known quantities, and the matrix size of the diffraction intensity map is M 0 ×N 0 , using the ePIE algorithm to reconstruct the complex amplitude transmittance function of the object plane as the initial guess object function O jX , where the matrix size of the object function O jX is K×L, and X=(k,l) represents the pixel of the object Position, fill the periphery of the probe function of the ePIE algorithm to reconstruct the object surface with random numbers to the size of M×N, as the initial guess probe P jr , where K>M, L>N, indicating that the local illumination light scans the sample area, M> M 0 , N>N 0 .
S4.2在OjX中以Rj=(Rxj,Ryj)位置为中心截取M0×N0区域,在M0×N0区域外围填充随机数至M×N大小,作为部分物函数objjr,则第j个位置的样品出射波为:S4.2 Intercept the M 0 ×N 0 area centered on the position R j = (R xj , R yj ) in O jX , and fill the periphery of the M 0 ×N 0 area with random numbers to the size of M×N as a partial function obj jr , then the outgoing wave of the sample at the jth position is:
ψjr=objjr×Pjr. (2)ψ jr =obj jr ×P jr . (2)
S4.3样品的出射波乘上一个汉宁窗以消除孔径效应,然后利用角谱衍射传播距离d到记录面,得到记录面的衍射场复振幅分布:S4.3 The outgoing wave of the sample is multiplied by a Hanning window to eliminate the aperture effect, and then use the angular spectrum diffraction to propagate the distance d to the recording surface to obtain the complex amplitude distribution of the diffraction field on the recording surface:
Φjr=Gd{Hanning(ψjr)}. (3)Φ jr =G d {Hanning(ψ jr )}. (3)
S4.4用探测器采集的衍射强度Ij(u)的均方根代替(3)式中Φjr中心位置M0×N0区域的振幅,M0×N0区域外的振幅和全部相位保留,得到新的复振幅分布:S4.4 Use the root mean square of the diffraction intensity I j (u) collected by the detector to replace the amplitude in the M 0 × N 0 area at the central position of Φ jr in the formula (3), and the amplitude and all phases outside the M 0 × N 0 area Retaining, the new complex amplitude distribution is obtained:
其中,S0为M0×N0区域。Wherein, S 0 is the M 0 ×N 0 area.
S4.5将新的记录面衍射场复振幅分布乘上汉宁窗后衍射回传距离d至物面,得到更新后的物体出射光场ψ'jr。S4.5 Multiply the complex amplitude distribution of the diffraction field on the new recording surface by the Hanning window, and then diffract back the distance d to the object surface to obtain the updated object exit light field ψ' jr .
S4.6通过更新函数更新初始猜测的部分物函数和探针函数,更新函数如下:S4.6 Update the initial guessed partial object function and probe function through the update function, the update function is as follows:
其中α,β为权重系数,取值一般在0.9-1之间;ε为调节系数,用以调节分母不等于0,取值为0.01。Among them, α and β are weight coefficients, and the value is generally between 0.9-1; ε is an adjustment coefficient, which is used to adjust the denominator to be different from 0, and the value is 0.01.
S4.7截取更新后的部分物函数矩阵obj'jr的中心M0×N0区域,放回S4.2中截取的位置,得到更新后的物函数分布O′jX。S4.7 Intercept the center M 0 ×N 0 area of the updated part of the object function matrix obj' jr , put it back to the intercepted position in S4.2, and obtain the updated object function distribution O′ jX .
S5采用更新后的物函数作为初始物函数猜测,更新后的探针函数作为初始探针函数猜测,对下一样品位置的衍射图依次进行S4.2-S4.7的处理,直至更新完整个物面一次。对整个物面迭代n次,算法收敛后便可以得到最终重建物面的高分辨率物体透过率函数和探针函数分布。S5 adopts the updated physical function as the initial physical function guess, and the updated probe function as the initial probe function guess, and performs the processing of S4.2-S4.7 on the diffraction pattern of the next sample position in sequence until the whole is updated. surface once. The entire object surface is iterated n times, and after the algorithm converges, the high-resolution object transmittance function and probe function distribution of the final reconstructed object surface can be obtained.
本发明的典型实施例的实验结果表明,利用发散球面波作为叠层探针照射样品,面阵式探测器采集被放大的衍射场强度信息,通过将ePIE算法重建的物体复振幅透过率函数和探针函数作为初始猜,探测器采集到的低衍射级次强度信息作为记录面约束条件,以迭代数值计算的方式外推出探测器周围没有记录到的更高级次的衍射信息,该方法在不增加光路复杂性的前提下,有效提高了重建物体的横向分辨率和成像质量,降低了实验分辨率对面阵式探测器靶面尺寸和像元尺寸的要求。The experimental results of a typical embodiment of the present invention show that the divergent spherical wave is used as a laminated probe to irradiate the sample, the area array detector collects the amplified diffraction field intensity information, and the complex amplitude transmittance function of the object reconstructed by the ePIE algorithm and the probe function as the initial guess, the low-diffraction-order intensity information collected by the detector is used as the constraint condition of the recording surface, and the higher-order diffraction information that is not recorded around the detector is extrapolated by iterative numerical calculation. Without increasing the complexity of the optical path, the lateral resolution and imaging quality of the reconstructed object are effectively improved, and the requirements for the experimental resolution on the target size and pixel size of the area array detector are reduced.
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