CN1127771C - Energy storage device and manufacturing method thereof - Google Patents
Energy storage device and manufacturing method thereof Download PDFInfo
- Publication number
- CN1127771C CN1127771C CN93119348A CN93119348A CN1127771C CN 1127771 C CN1127771 C CN 1127771C CN 93119348 A CN93119348 A CN 93119348A CN 93119348 A CN93119348 A CN 93119348A CN 1127771 C CN1127771 C CN 1127771C
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- electrode
- conductive
- coating
- capacitor
- electrodes
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Abstract
Description
技术领域technical field
本发明总地涉及能量存储装置,更具体他讲是涉及双极型双层电容器型能量存储装置及制造该装置的方法。This invention relates generally to energy storage devices, and more particularly to bipolar double layer capacitor type energy storage devices and methods of making the same.
背景技术Background technique
能量存储装——近几年来,对于实用的可靠的电存储装置,如电容量或电池,已做了充分的研究。电池通常具有很高的能量存储能力;不过,电池也呈现出低的功率密度。与此相反,电解电容器具有根高的功率密度和一个有限的能量密度。而且,以碳为基础的双层电容器具有高的能量密度,但由于其高的等效串联电阻(ESR.),碳电极具有低的功率容量。固此非常希望得到同时具有高的能量密度和高的功率密度的电存储器件。Energy Storage Devices - Practical and reliable electrical storage devices, such as capacitors or batteries, have been well researched in recent years. Batteries typically have high energy storage capabilities; however, batteries also exhibit low power density. In contrast, electrolytic capacitors have a high power density and a limited energy density. Also, carbon-based double-layer capacitors have high energy density, but carbon electrodes have low power capacity due to their high equivalent series resistance (ESR.). Accordingly, it is highly desirable to have electrical storage devices having both high energy density and high power density.
B.E.Conway有J.Eletrochem.SOC.(电化学学会杂志)138(#6)卷第1539页(1991年6月)新近发表的文章讨论了在电化学能量存储时从“超级电容”向“电池”的转换,并确定了各种电容装置的工作特性。B.E.Conway has a newly published article in J.Eletrochem.SOC. (Journal of the Electrochemical Society) 138 (#6) page 1539 (June 1991) discussing the transition from "supercapacitor" to "battery" in electrochemical energy storage. ” conversion, and determined the operating characteristics of various capacitive devices.
D.Craig的1985年11月的加拿大专利1,196,683讨论了以氧化物陶瓷涂覆的电极为基础的电存储装置的使用和伪电容量。然而,采用此发明得到的电容器具有不一致的电特性,且往往是不可靠的。这些装置不能被充电至每电容芯片1.0伏,并且具有大到不能令人满意的漏电流。另外,这些装置具有低的循环寿命。此外,所公开的封装是低效的。Canadian Patent 1,196,683, November 1985, to D. Craig discusses the use and pseudocapacitance of electrical storage devices based on oxide ceramic coated electrodes. However, capacitors obtained using this invention have inconsistent electrical characteristics and are often unreliable. These devices cannot be charged to 1.0 volts per capacitor chip and have unsatisfactorily large leakage currents. Additionally, these devices have low cycle life. Furthermore, the disclosed packaging is inefficient.
M.Matroks和R.Hackbart上的美国专利5,121,288讨论了一种以Craig的专利为基础的电容性电源,此电源不能用于本发明。作为无线电话的电源的电容器结构在此专利中做了描述;但是,没有描述电容器。US Patent 5,121,288 to M. Matroks and R. Hackbart discusses a capacitive power supply based on Craig's patent, which cannot be used in the present invention. The structure of a capacitor as a power source for a radiotelephone is described in this patent; however, the capacitor is not described.
J.KalenoWsky的美国专利,5,063,340讨论了一种具有充电均衡电路的电容性电源。此电路容许多个单个电容器芯片充电,且不使各个单个电容芯片过充电。本发明不需要充电均衡电路来实现对多个单个电容芯片层叠结构的完全充电,且不使中间电容芯片过充电。US Patent 5,063,340 to J. KalenoWsky discusses a capacitive power supply with a charge equalization circuit. This circuit allows charging of multiple individual capacitor chips without overcharging each individual capacitor chip. The present invention does not require a charging equalization circuit to fully charge the laminated structure of multiple individual capacitor chips without overcharging the intermediate capacitor chips.
H.Lee等人在IEEE Transactions on Magnetics(电气与电子工程师协会,磁学学报)25(#1)卷第324页(1989年1月)和G.Bullard等人在IEEE Transaction on Magnetics25(#1)卷第102页(1989年1月)讨论了高能氧化物陶瓷为基的双层电容器的脉冲电功率特性。在此参考文献中讨论了各种工作特性,但未讨论制造工艺。本发明提供了带有更有效封装的更为可靠的装置。H. Lee et al. in IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers, Magnetism) 25 (#1) p. 324 (January 1989) and G. Bullard et al. in IEEE Transactions on Magnetics 25 (#1 ) Volume 102 (January 1989) discusses the pulse electric power characteristics of high-energy oxide ceramic-based double-layer capacitors. Various operating characteristics are discussed in this reference, but the manufacturing process is not discussed. The present invention provides a more reliable device with more efficient packaging.
以碳电极为基础的双层电容器已在Rightmhe的英国专利3,288,641的早期工作的基础上有了多方面的改进。A.Yoshida等人在IEEE Transactions on Components,Hybrids and ManufacturingTechnology(电气与电子工程师协会,元件、混合电路及制造技术学报)CHMH-10卷#1第100-103页(1987年3月)讨论了一种由活性碳纤维电极和无水电解质构成的双层电容器。此外,还展示了这种双层电容器的封装。这种装置的体积在0.4-1cc量级,能量存储能力大约为1-10J/cc。Double layer capacitors based on carbon electrodes have been improved in various ways on the earlier work of Rightmhe, UK Patent 3,288,641. A.Yoshida et al. discussed in IEEE Transactions on Components, Hybrids and Manufacturing Technology (Institute of Electrical and Electronics Engineers, Components, Hybrid Circuits and Manufacturing Technology Journal) CHMH-10
J.Suzuki等人在NEC Research and Devolopment(日本电气公司研究与开发期刊)82号第118-123页(1986年7月)讨论了采用0.004时厚度量级的多孔隔离材料的碳双层电容器的改善的自放电特性。以碳为基础的电极的一个固有问题是,材料的低电导率使这些装置产生低的电流密度小。第二个难题是,多个电容器芯片层叠加结构不是按真正的双极电极结构形成的。这些难题导致低效封装和较低的能量和功率密度。People such as J.Suzuki discussed in NEC Research and Devolopment (Japan Electric Company Research and Development Journal) No. 82, pp. 118-123 (July 1986) the carbon double-layer capacitor adopting a porous separator material with a thickness order of 0.004. Improved self-discharge characteristics. An inherent problem with carbon-based electrodes is that the low electrical conductivity of the material allows these devices to generate low current densities. The second difficulty is that the stacked structure of multiple capacitor chips is not formed in a true bipolar electrode structure. These challenges lead to inefficient packaging and lower energy and power densities.
其它有价值的参考文献包括,例如:Other valuable references include, for example:
S.Sekido在Solid State lonics(固态离子)9,10卷第777-782(1983)发表的“固体微形电源的评述”。"Review of Solid Micro Power Sources" published by S. Sekido in Solid State Lonics (Solid State Ions) 9, Vol. 10, No. 777-782 (1983).
M.Pham-Thi等人在Journal of Materials Science Letters(材料科学学报)5卷第415页(1986年)讨论了以碳为基础的固态电解质双层电容器的渗透阈值和界面最佳化问题。M.Pham-Thi et al discussed the permeation threshold and interface optimization of carbon-based solid electrolyte double-layer capacitors in Journal of Materials Science Letters (Journal of Materials Science) 5, p. 415 (1986).
多种公开物讨论了氧化物涂覆电极的制造,和这些电极在电化学制氯的氯-碱工业中的应用。可参见例如:1991年10月8日颁布的V.Hook等人的美国专利5,055,169;1977年10月4日颂布的H.Beer的美国专利4,052,271;和1971年2月9日颂布的A.Martinsons等人的美国专利3,562,008。不过,这些电极通常不具备高效双层电容器电极所要求的大的表面面积。Various publications discuss the fabrication of oxide-coated electrodes, and the use of these electrodes in the chlor-alkali industry for electrochemical chlorine production. See, for example: U.S. Patent 5,055,169 to V. Hook et al., issued October 8, 1991; U.S. Patent 4,052,271 to H. Beer, issued October 4, 1977; and A . US Patent 3,562,008 to Martinsons et al. However, these electrodes generally do not possess the large surface area required for efficient double layer capacitor electrodes.
具有可靠的长寿命电存储装置和改进后的制造方法是有益的。还希望具有一种改进的能量存储装置,它的能量密度至少为20-90J/cc。It would be beneficial to have reliable long-life electrical storage devices and improved fabrication methods. It would also be desirable to have an improved energy storage device having an energy density of at least 20-90 J/cc.
能量存储装置的封闭——如上所述,近几年来,对高能量和高功率密度的电存储装置已做了充分的研究,为达到这些目的,以最少的耗费实现活性材料的有效封装是重要的。在电容器或电池中,将两电极隔开的空间必需使这两个电极电绝缘,然而,对于有效封装而言,此空间或间隙应尽可能小。因此非常希望有一种能形成一个空间隔离器或间隙的方法,所述隔离器或间隙基本上是均匀的且具有小的尺寸(小于5密耳(0.0127cm))。 Encapsulation of Energy Storage Devices - As mentioned above, high energy and high power density electrical storage devices have been extensively studied in recent years, and for these purposes efficient encapsulation of active materials with minimal expense is important of. In a capacitor or battery, the space separating the two electrodes must electrically insulate the two electrodes, however, for effective packaging this space or gap should be as small as possible. It is therefore highly desirable to have a method of forming a spacer or gap that is substantially uniform and of small size (less than 5 mils (0.0127 cm)).
在具有电解质的电存储装置(如电池或电容器)中,维持电极间的隔离的一种通用方法是采用一个可透过离子的电绝缘多孔隔层。此隔层通常位于电极之间并维持两电级间所需的空间间隔。多孔隔离材料,如纸或玻璃,对此应用是有益的,并且被用于铝电解电容器和双电层电容器中,然而,对于1或2密耳(0.00254-0.00508Cm)以下的隔离尺寸而言,材料加工是困难的,并且电容器的材料强度通常很低。此外,这些多孔隔层式隔离器的孔的截面积通常为50-70%量级。In electrical storage devices with electrolytes, such as batteries or capacitors, a common method of maintaining separation between electrodes is to employ an ion-permeable, electrically insulating porous separator. This spacer is usually located between the electrodes and maintains the desired spatial separation between the two electrodes. Porous separator materials, such as paper or glass, are beneficial for this application and are used in aluminum electrolytic capacitors and electric double layer capacitors, however, for isolation dimensions below 1 or 2 mils (0.00254-0.00508 cm) , material processing is difficult, and the material strength of capacitors is usually low. Furthermore, the cross-sectional area of the pores of these porous barrier separators is typically on the order of 50-70%.
聚合物的离子可透多孔隔离板已被用于碳双层电容器,如Sannada等人在IEEE第224-230页(1982年)和Suzuki等人在NEC Research and Deaelopment82号第118-123页(1986年7月)中所讨论的。这些类型隔离板存在孔面积小的问题,从而导致电阻增加。Ionically permeable porous separator plates of polymers have been used in carbon double-layer capacitors, such as Sannada et al. IEEE pp. 224-230 (1982) and Suzuki et al. NEC Research and Deaelopment No. 82 pp. 118-123 ( as discussed in July 1986). These types of separators suffer from a small hole area, resulting in increased electrical resistance.
在1988年8月16日颁布的美国专利4764181 Haruyama等人公开了一种采用光敏聚合物树脂溶液形成带薄隔层的电解电容器的方法。在多孔双层电容器电极中采用所述的溶液使用方法会导致多孔电极的不希望的填充。U.S. Patent 4,764,181 Haruyama et al. issued on August 16, 1988 discloses a method for forming an electrolytic capacitor with a thin barrier layer using a photosensitive polymer resin solution. Use of the described solution use method in porous double layer capacitor electrodes can lead to undesired filling of the porous electrodes.
一般相关的其它参考文献包括美国专利3,718,551,4,052,271;和5055169。在本申请中引用的所有申请、专利、文章、参考文献、标准、等等的全部内容在此引作参考。Other references of general relevance include US Patents 3,718,551, 4,052,271; and 5,055,169. All applications, patents, articles, references, standards, etc. cited in this application are hereby incorporated by reference in their entirety.
鉴于上述情况,具有一种在带大的孔截面积的电存储装置中的电极间形成可靠的小空间隔离的方法是有益的。In view of the foregoing, it would be beneficial to have a method of forming reliable small space separations between electrodes in electrical storage devices with large pore cross-sectional areas.
发明内容Contents of the invention
本发明涉及一种既具有高的能量密度,并具有高的功率密度的新型电存储装置。The present invention relates to a novel electrical storage device having both high energy density and high power density.
本发明的目的是提供用于制造这种电存储装置的新方法。The object of the present invention is to provide a new method for manufacturing such electrical storage devices.
本发明的另一目的是提供一种可靠的长寿命电存储装置以及其改进的制造方法。Another object of the present invention is to provide a reliable long-life electric storage device and an improved manufacturing method thereof.
本发明的再一目的是通过减小阳极和阴极之间的间隙提供电存储装置的有效封装,减小所述间隙能降低离子性导电电解质的电阻值。Yet another object of the present invention is to provide efficient packaging of electrical storage devices by reducing the gap between the anode and cathode, which reduces the resistance value of the ionically conductive electrolyte.
简要他说,上述目的和其它目的由一个能量存储装置如电容器来实现,此装置包括多个双极型结构的电容芯片。这些电容芯片叠置并粘连在一起,以使此装置成为一个整体的和单一的结构。Briefly he states that the above objects and others are achieved by an energy storage device such as a capacitor comprising a plurality of capacitive chips in a bipolar configuration. These capacitive chips are stacked and glued together to make the device an integral and unitary structure.
每个电容芯片包括两个按预定距离隔开的导电电极。此电容芯片还包括至少一个介电垫片,它插在电极之间,用于隔离这些电极并使它们电绝缘。Each capacitive chip includes two conductive electrodes separated by a predetermined distance. The capacitive chip also includes at least one dielectric spacer interposed between the electrodes for isolating and electrically insulating the electrodes.
当电极和垫片粘在一起时,对于每一电容芯片至少形成一个填充间隙。每个电容芯片还包括在每一电极的一个(或更多)表面上形成的大表面面积(多孔的)导电涂层。此涂层最好包括一组近距离隔开的周边微凸头和一组远距离隔开的中心微凸头。这些微凸头可由新的丝网印刷或照相制版印刷方法形成。这些微凸头提供电容器芯片的结构支撑,并在电极间提供附加绝缘。When the electrodes and pads are glued together, at least one filling gap is formed for each capacitor chip. Each capacitive chip also includes a high surface area (porous) conductive coating formed on one (or more) surfaces of each electrode. The coating preferably includes a set of closely spaced peripheral microprotrusions and a set of remotely spaced central microprotrusions. These microprotrusions can be formed by novel screen printing or photolithography methods. These microbumps provide structural support for the capacitor chip and provide additional insulation between electrodes.
离子性导电介质填充电容器芯片间隙和大表面面积涂层的孔。The ionically conductive medium fills capacitor chip gaps and pores in large surface area coatings.
附图说明Description of drawings
通过参考下面的说明及附图,本发明的上述和其它特征以及实现这些特征的方法将变得更为清楚,发明本身也将得到更好地理解。The above and other features of the present invention and methods of achieving them will become more apparent, and the invention itself will be better understood, by reference to the following specification and accompanying drawings.
图1是根据本发明构成的一种干式能量存储装置的组件10的透视图;1 is a perspective view of an
图1A是本发明的填充电解质的能量存储装置10A的透视图;FIG. 1A is a perspective view of an electrolyte-filled energy storage device 10A of the present invention;
图2是图1的存储装置的沿线2-2的剖面图,它示出一个在存储装置内的可拆卸导电带1117A。Figure 2 is a cross-sectional view of the memory device of Figure 1 taken along line 2-2 showing a removable conductive strap 1117A within the memory device.
图2A是图1的存储装置的沿线2A-2A的剖面图;2A is a cross-sectional view of the memory device of FIG. 1 along line 2A-2A;
图3是图1的组件的分解示意图,其中描绘出三个电容芯片;Figure 3 is an exploded schematic view of the assembly of Figure 1, wherein three capacitor chips are depicted;
图4是存储装置10A的制造工序的方框图;FIG. 4 is a block diagram of a manufacturing process of the memory device 10A;
图5是带微凸头的多孔涂层的顶视图,此涂层构成图1-4的存储装置的一部分;Figure 5 is a top view of a porous coating with microprotrusions forming part of the memory device of Figures 1-4;
图6是装置10A的一个电容性等效电路的示意图。FIG. 6 is a schematic diagram of a capacitive equivalent circuit of device 10A.
图7是用来在本发明的能量存储装置的涂层上制造微凸头的丝网印刷方法的方框图;Figure 7 is a block diagram of the screen printing process used to fabricate microprotrusions on the coating of an energy storage device of the present invention;
图8是在图7的制造方法中使用的电极支架的透视图;8 is a perspective view of an electrode holder used in the manufacturing method of FIG. 7;
图9是以照相制版方式制造本发明的微凸头的方法的方框图;Fig. 9 is the block diagram of the method for making the microprotrusion head of the present invention in the photoengraving mode;
图10是在照相制版之前向电极层压光致抗蚀剂的一对热辊的等角视图;Figure 10 is an isometric view of a pair of heated rollers laminating photoresist to electrodes prior to photolithography;
图11是置于图10的光致抗蚀剂上方的掩模的等角视图;Figure 11 is an isometric view of a mask placed over the photoresist of Figure 10;
图12是一个等角视图,它示出图10和11的光致抗蚀剂的未保护部分的曝光情况;Figure 12 is an isometric view showing exposure of unprotected portions of the photoresist of Figures 10 and 11;
图13是沿图3的线13-13截取的构成能量存储装置的一部分的电极的剖视图;13 is a cross-sectional view of an electrode forming part of an energy storage device taken along line 13-13 of FIG. 3;
图14是在导电衬底上形成一个电容器芯片的具有大表面面积多孔涂层的两个双极型电极剖面图:Figure 14 is a cross-sectional view of two bipolar electrodes with a large surface area porous coating forming a capacitor chip on a conductive substrate:
图15是在浸渍涂覆工艺中用于固定薄支撑材料的框架的示意图;Figure 15 is a schematic diagram of a frame used to hold a thin support material in a dip coating process;
图15A是图15的框架中使用的线的示意图。FIG. 15A is a schematic illustration of the wires used in the framework of FIG. 15 .
具体实施方式Detailed ways
定义definition
下列术语的定义不是专用的:The definitions of the following terms are not exclusive:
“带”是指在制造干式组件的方法中所用的薄材料带。在初始加热后,除去此带形成孔的填充部分。"Tape" means a thin strip of material used in a method of making a dry module. After the initial heating, the tape is removed to form the filled portion of the pores.
“导电支撑材料”是指任何一种导电金属或金属合金、导电聚合物、导电陶瓷、导电玻璃、或它们的组合。金属和金属合金最好用于制造基体部件,支撑材料应具有大于约10-4S/cm(西门子/厘米)的电导率。"Conductive support material" refers to any conductive metal or metal alloy, conductive polymer, conductive ceramic, conductive glass, or a combination thereof. Metals and metal alloys are preferably used to fabricate the base components, and the support material should have an electrical conductivity greater than about 10 -4 S/cm (Siemens/centimeter).
“第二导电材料”(具有大的表面面积)是指多孔电极涂层,在支撑材料各侧它们可以是相同的也可以是不同的成份,本发明的优选的金属氧化物包括从下列材料中任意选择的那些金属的氧化物:锡、铅、钒、钛、钌、钽、铑、锇、铱、铁、钴、镍、铜、钼、铌、铬、锰、镧或镧系金属或其合金或其组合物,并且为提高电导率可能含有象钙这样的添加物。"Second conductive material" (having a large surface area) refers to the porous electrode coating, which may be of the same or different composition on each side of the support material. Preferred metal oxides of the present invention include those selected from Oxides of any selected metals: tin, lead, vanadium, titanium, ruthenium, tantalum, rhodium, osmium, iridium, iron, cobalt, nickel, copper, molybdenum, niobium, chromium, manganese, lanthanum or metals of the lanthanide series or their Alloys or combinations thereof, and may contain additives such as calcium to increase electrical conductivity.
“电解质”是指离子性导电的含水或无水溶液或材料,它能使干式组件被充电。"Electrolyte" means an ionically conductive aqueous or anhydrous solution or material which enables a dry module to be charged.
“Cab-O-Sil”是指可以illinois州的Tuscola的CabotCorporation获得的硅石填充物。有多种尺寸供选择。"Cab-O-Sil (R) " refers to a silica filler available from Cabot Corporation of Tuscola, Illinois. Available in a variety of sizes.
“环氧树脂”是指掺有特定固化剂的环氧树脂产品的常规定义,通常为掺有聚胺固化剂的或混合有聚胺的聚环氧化物固化剂的环氧树脂。"Epoxy resin" is the general definition of an epoxy resin product incorporating a specific curing agent, typically an epoxy resin incorporating a polyamine curing agent or a polyepoxide curing agent mixed with a polyamine.
“MYLAR”是指Wilmington Delaware的Dupont,Inc生产的聚对苯二甲酸乙酯的聚酯材料,聚酯通常可以用厚度很薄的形式大批供应。"MYLAR (R) " refers to a polyester material of polyethylene terephthalate produced by Dupont, Inc. of Wilmington Delaware. Polyester is generally available in bulk in very thin gauges.
“金属氧化物”是指任何一种导电金属氧化物。"Metal oxide" means any conductive metal oxide.
“混合金属氧化物”是指由两种或多种金属氧化物组成的导电氧化物混合物。"Mixed metal oxide" means a conductive oxide mixture consisting of two or more metal oxides.
“光致抗蚀剂”是任一种光固化材料,通常是环氧化物或丙烯酸酯或它们的组合物。A "photoresist" is any photocurable material, usually an epoxy or acrylate or a combination thereof.
“ConforMASK”是一种可从California州的Tustin的Dynachem购到的负性光聚台物。此聚合物应在50%或更低的相对湿度下使用。能量存储装置的干式预制组件 "ConforMASK" is a negative-working photopolymer commercially available from Dynachem of Tustin, California. This polymer should be used at 50% relative humidity or less. Dry prefabricated components for energy storage devices
参照附图,尤其是图1,2和3,这里示出了根据本发明构成的能量存储装置的干式预制组件10,该能量存储装置首先装配成干式预制组件10。在用电解质充填所设的各电容器芯片之后,表面被加热至靠近并熔合至外表面,以形成装置10A,该装置尔后被充电。Referring to the drawings, and in particular Figures 1, 2 and 3, there is shown a dry
该装置预制组件10一般包括多个电容器芯片,如电容器芯片110,112和114,它们根据本发明的教导来形成、制备和叠置。图1A示出了由12个层叠的电容器芯片形成的电存储装置预制组件10A的装配后的示意图,不过,应当理解,对于本领域的技术人员来说,在阅读了此说明书后,可采用任何不同数目的电容器芯片。The device prefabricated
为描绘简便起见,图3是预制组件10的分解示意图,它仅示出3个电容器芯片110,112和114。这些电容器芯片具有大体上相同的设计和构造,因此仅参照图2、2A、3和13。对电容器芯片114和112进行详细描述。For ease of illustration, FIG. 3 is an exploded schematic diagram of the
电容器芯片114包括第一导电外电极或端面板111A和第二内导电双极型电极111B。电极111A和111B在边缘处借助两个介电的或电绝缘衬垫层121和123隔开。
当第一和第二电极111A和111B、绝缘衬垫层121和123。以及导电多孔材料(氧化物)层119和120粘连在一起形成电容器芯片114时,由这些元件形成一个中央空气填充间隙130(图2A)。当组件10可以使用时,用电解质(未示出)填充间隙130,以制成装置10A。When the first and
为此,一个示例性凹口或填充口122示于图2A中,仅便于描绘之用,并该填充口形成于衬垫层121和123之间,以容许电解质充填间隙130。填充口122由插在填充层121和123之间的薄片或带117A,在熔合和粘结衬垫层121和123之前形成。当衬垫层121和123被加热时,带117A变为由回流的衬垫层材料围绕,这就使填充口122的外形得以形成。这两个衬垫层变成熔融态的聚合物片,它覆盖活性导电涂层119和120的一个尽可能小的区域。To this end, an exemplary recess or fill
现在更详细地研究电极111A和111B,制造这些电极的方法将在后面描述。电极111A和111B之间的一个不同点是,电极111A可选择地包括一个接头片160A,以便连接至电源(未示出)。Now examining the
电极111A和111B之间的另一个可选择的区别在于,电极111A包括一个多孔导电涂层119,它淀积在支撑材料或结构116上,而双极型电极111B包括两个多孔涂层120和131,它们淀积在支撑材料或结构111B的任一侧或两侧。因此,电极111B是一个真正的双极型电极。应当理解,电极111A的两侧均可涂覆多孔导电层。Another optional difference between
电极111A和111B之间的再一个选择性区别在于支撑结构111A和111B的刚性。作为外端面板的电极111A最好具有一个更为刚性的结构,以便它能给予能量存储装置10A的整体结构以足够的刚性。电极111B和其它相似的内电极不必具有象外电极111A那样的刚性,尽管如此,当装置10A较大时,需要辅助的支撑结构,因此内电极即111B被用作辅助支撑结构,在这种情况下,希望内电极即111B刚性化。Yet another optional difference between
结果,支撑材料116比支撑材料118厚。在此优选实施例中,支撑材料116具有约10密耳(0.0254cm)的厚度,而支撑材料118具有约1密耳(0.00254cm)的厚度,其它值也是可以选择的。As a result,
在不脱离本发明的范围的情况下,电极111A、111B和存储装置10A的其余电极的尺寸根据所希望的应用确定。例如,在一种应用中,装置10A是小型的,例如用于心脏起搏器。而在另一种应用中,装置的整个体积是1立方米或更大,例如用于电动车辆。电极的尺寸决定存储装置10A的总电容量。The dimensions of
在此优选实施例中,电极即111A和111B是矩形的,不过,这些电极和相应预制组件10也可为各种其它形状,例如圆形、方形等。组件10的一个重要特征是其设计的适应牲,这使它能用于各种应用中。In this preferred embodiment, the electrodes,
现在更详细地研究涂层119和120,形成这些涂层的方法将在以后描述。在此优选实施例中,涂层119包括多个微凸头,而涂层120不包括这种微凸头。不过,应当理解,在不脱离本发明的范围的情况下,涂层120可选择与涂层119相似的设计。Now examining
图5是涂层119的顶视平面图,它包括一个微凸实阵列,并且是被淀积在支撑材料116的内面或平坦侧面,涂层119是具有大表面面积的多孔结构的、导电的和较薄的。阵列包括两组微凸头。第一组包括多个圆周形微凸头125,第二组包括多个位于中央的微凸头127。5 is a top plan view of
在此优选实施例中,园周形凸头125和中央凸头127具有相似的设计结构,并大致呈半球形,不过,其它形状,例如矩形,也属于本发明的范围。每个凸头125或127的直径约为6密耳(0.01524cm),装置10的不同应用可能要求微凸头125和127具有不同设计结构。园周形微凸头125的中心-中心间隔约为20密耳(0.0508cm),而中央微凸头127的中心-中心间隔约为40密耳(0.1016cm)。In the preferred embodiment, the
园周形微凸头125具有较高密度的一个原因是防止边缘短路。中央微凸头127具有较低密度的一个原因是在电极111A和111B之间形成隔离,同时电极表面带有极小的掩模。为此,容许衬垫层121覆盖微凸头125的至少一部分,但最好不覆盖微凸头127。One reason for the higher density of
园周形微凸头125沿涂层119的外缘相邻设置。尽管只绘出四排微凸头,但本领域的技术人员应当理解,根据装置10的尺寸和应用,可以增加排数。中央微凸头127以阵列布局相似地相邻设置于涂层119的中心部分132内。如图5所示,中央微凸头127由园周形微凸头125围绕。
微凸头125和127形成于涂层119上,以给第一和第二电极111A和111B提供附加的结构支撑。例如,如果第二电极111B开始向第一电极111A下垂或弯曲,微凸头127将防止这些电极111A和111B之间的接触。
图5进一步示出,涂层119还包括多个开口即133A-133G,带,即1117A设置于此开口中,以最终形成填充口122。正如针对大电极尺寸所绘出的,凹口(即开口)仅部分延伸至中心部分132。对于小电极尺寸,凹口横跨电极表面,且其两端向相对侧伸出,从而同时形成填充口133C和133D,在这种情况下,带的宽度小于或等于中央微凸头127间的中心-中心间隔,不过,带(的宽度)大于园周形微凸头125间的中心-中心间隔,以防止园周形微凸头挤压该带,并防止其移出,在园周形微凸头中增加开口。此外,带的宽度可类似于园周形微凸头间隔,并且在微凸头图形中不必进行调整。FIG. 5 further shows that coating 119 also includes a plurality of
现在研究涂层120,它起到与涂层119相似的功能,并被淀积在电极111B的面对第一电极111A的内侧的一侧面上。在此优选实施例中,涂层120不包括凸头。在预制组件10的另一实施例中,涂层119和120具有相似结构,并包括微凸头层。Considering now the
现在研究衬垫层121和123,制造这些衬垫层的方法将在后面描述。衬垫层121和123通常是相同的,并以彼此重合(相邻且叠置)的方式排列。为简便起见,仅对衬垫层121进行详细描述衬垫层121包括一个连续的园周部分143和一个空心中央部分144。Considering now the backing layers 121 and 123, the method of making these backing layers will be described later. Backing layers 121 and 123 are generally identical and arranged to overlap (adjacent and overlap) each other. For brevity, only the
在此优选实施例中,带117A或其部分位于衬垫层121和123之间,并穿越衬垫层的空心部分即144,而且伸至周边部分即143之外。在另一实施例中,带不穿越衬垫层的整体宽度,只有带的一部分夹置于这些衬垫层之间,并伸过衬垫层一侧面的两边缘。In the preferred embodiment, the
现回到图1,对下一个相邻电容器芯片112进行简单描述。电容器芯片112在设计和构造方面与电容器芯片114大致相同。电容器芯片112包括作为第一电极的双极型电极111B和第二双极型电极111C。电极111B和111C基本相同,并按相互对正方式彼此隔开。Now returning to FIG. 1 , the next
与涂层119相同的多孔涂层131淀积在支撑材料118的面对电极111C的表面上,与涂层120相似的涂层133淀积在支撑材料或结构140上,它构成电极111C的一部分。
电容器芯片112还包括两个衬垫层135和137,它们与电容器芯片114的衬垫层121和123彼此相同。带117B在衬垫层135和137之间形成填充口142。The
电容器芯片110与电容器芯片114基本相同,并包括第一双极型电极111Y、第二电极1112、两个衬垫层157和159、带117C、接头片160和填充口162。应注意图3未示出内电极111Y。The
现转到图6,这里绘出一个代表装置10A的电容性等效电路200。此电路200将电容器芯片114表示为两个电容C1和C2,将电容器芯片112表示为两个电容C3和C4。将电容器芯片110表示为两个电容C5和C6。结果,装置10大致等效于一组串连电容器。Turning now to FIG. 6, there is depicted a capacitive
多孔导电涂层119与电容器芯片114内的离子性导电介质(未示出)结合构成电容器C1。此离子性导电介质与涂层120构成电容器C2。涂层131与电容器芯片112内的离子性导电介质构成电容器C3。电容器芯片112内的离子性导电介质与涂层133构成电容器C4。相似地,电容器芯片110由两容器c5和C6表示。Porous
本发明的一个重要方面是能量存储装置的双极型结构。采用单电极,如电极111B,形成两个串联电容器,如电容器C2和C3,从而形成一个双极型电极B。这种设计显著地降低了装置10A的总体尺寸。An important aspect of the invention is the bipolar configuration of the energy storage device. Using a single electrode, such as
尽管不想受到理论约束,但对于分子级的电容性能量存储装置的工作情况的解释会有助于理解带电双层的巨大价值。为简便起见,为描述图14,用图3作参考,其中采用了相同参考数字(且多孔材料为混合金属氧化物)。While not wanting to be bound by theory, an explanation of how capacitive energy storage devices work at the molecular level would help to understand the enormous value of a charged double layer. For simplicity, to describe Fig. 14, reference is made to Fig. 3, where the same reference numerals are used (and the porous material is a mixed metal oxide).
图14是支撑结构118、148A和导电涂层(120、131、133、133B)的放大的边缘的剖面示意图。14 is an enlarged schematic cross-sectional view of the edges of
被描绘的中心支撑结构118为金属的,但它可以是任一种导电的并为涂层提供支撑的材料。具有大表面面积的涂层提供了用于能量存储的结构和几何形状。正如从图14中所看到的,层120等具有带许多裂隙、微孔和间隙孔的非连续表面,它们形成了大表面面积。The
因此,多孔涂层120和131被涂覆在支撑结构118上而形成双极型电极111B,涂层133和133B则被涂覆在支撑结构148A上而形成双极型电极111c。在预制组件10装配后,拉带被除去,形成填充口,并且预制组件10由电解质190填充,尔后填充口即177D被密封,从而形成了装置10A。Thus,
随后装置10A被充电,同时产生下列结果:Device 10A is then charged with the following results:
涂层120变成带负电的。导电支撑结构118相应地传输电子。因此,多孔涂层131变成带正电的。离子牲导电的电解质相应地离子化。在电极-电解质界面上便形成一个双电层,它构成电路200中的各个单个电容。因此,涂层133的表面变成带负电的,而涂层133B的表面变成带正电的。由于多孔大表面面积氧化物容许电极的有效表面积变得很大,因此该装置的相应的电存储能力急剧增强。制造能量存储装置的方法 Coating 120 becomes negatively charged. The
参照图1-5,对于制造能量存储装置10A的预制组件10的优选方法总体上做如下说明:Referring to Figures 1-5, the preferred method of manufacturing the
(A)支撑材料制备(A) Support material preparation
支撑材料可通过各种常规的腐蚀或清洗工艺进行选择性蚀刻或清洗。The support material can be selectively etched or cleaned by various conventional etching or cleaning processes.
在某些实验中,如果金属表面未蚀刻,它是很平滑的。平滑的表面有时会导致多孔涂层的不充分粘着。蚀刻可形成适当粗糙的表面。In some experiments, if the metal surface was not etched, it was smooth. Smooth surfaces can sometimes lead to insufficient adhesion of porous coatings. Etching creates a suitably rough surface.
1.湿法蚀刻:一种优选工艺是使金属支撑与含水的无机强酸接触,例如,硫酸、盐酸。氢氟酸、硝酸,高氯酸或它们的组合物。蚀刻通常在50至95℃(最好为75℃)的高温下进行约0.1至5小时(最好为0.5小时),接着用水漂洗。室温酸蚀刻是可能的。也可采用碱蚀刻或草酸蚀刻。1. Wet etching: A preferred process is to contact the metal support with an aqueous strong inorganic acid, eg sulfuric acid, hydrochloric acid. Hydrofluoric acid, nitric acid, perchloric acid or combinations thereof. Etching is usually carried out at an elevated temperature of 50 to 95°C (preferably 75°C) for about 0.1 to 5 hours (preferably 0.5 hour), followed by rinsing with water. Room temperature acid etching is possible. Alkaline etching or oxalic acid etching can also be used.
2.干法蚀刻:粗糙的支撑表面可通过溅射,等离子体处理、和/或离子研磨获得。一种优选工艺是ArRF(氩气射频)溅射蚀刻,蚀刻条件是0.001-1torr的压强、约1Kev的能量和13.5MHz的频率。通常,采用0.1-10watts/cm2的功率密度在1-60分钟的时间内进行清洗和使表面粗糙,另一种工艺是在0.1-30torr的压强下用反应气体对支撑材料进行1-60分钟的等离子体蚀刻,反应气体为,例如,氧、四氟化碳、和/或六氟化硫。2. Dry etching: Rough support surfaces can be obtained by sputtering, plasma treatment, and/or ion milling. A preferred process is ArRF (Argon Radio Frequency) sputter etching, the etching conditions are a pressure of 0.001-1 Torr, an energy of about 1 KeV and a frequency of 13.5 MHz. Usually, the power density of 0.1-10watts/ cm2 is used to clean and roughen the surface within 1-60 minutes, another process is to use the reaction gas to support the material under the pressure of 0.1-30torr for 1-60 minutes For plasma etching, the reactive gas is, for example, oxygen, carbon tetrafluoride, and/or sulfur hexafluoride.
3.电化学蚀刻:粗糙表面可通过在氯化物或氟化物溶液中的电化学氧化处理获得。3. Electrochemical etching: The rough surface can be obtained by electrochemical oxidation treatment in chloride or fluoride solution.
(B)支撑材料的涂层(B) Coating of support material
此涂层(例如氧化物)是多孔的并且主要由微孔(直径<17A)组成。在表面上存在0.1-1μm宽的大裂隙,它们的深度与涂层厚度相当。不过,99%以上的表面积是由这些微孔形成的,这些微孔的平均直径在6-12A范围内。This coating (eg oxide) is porous and mainly consists of micropores (diameter < 17A). There are large cracks 0.1-1 μm wide on the surface, and their depth is comparable to the thickness of the coating. However, more than 99% of the surface area is formed by these micropores, which have an average diameter in the range of 6-12A.
在各种后处理之后,孔结构可改变,以增大平均孔尺寸。例如,蒸汽后处理形成双峰孔分布。除微孔外,形成了具有约35A的直径的间隙孔(直径<17-1000A)的窄区分布。这些处理后的电极涂层的表面积的85-95%是由微孔结构形成的。After various post-treatments, the pore structure can be altered to increase the average pore size. For example, steam post-treatment creates a bimodal pore distribution. In addition to micropores, a narrow distribution of mesopores (diameter < 17-1000A) with a diameter of about 35A formed. 85-95% of the surface area of these treated electrode coatings is formed by the microporous structure.
采用其它电极构造方法,这种孔尺寸分布可以改变,采用表面活性剂增加涂层溶液中的晶子或其它组织结构,可使平均孔尺寸增加到100-200A,而且只有5-10%的表面积源于微孔。因此涂层的有效的大表面面积比电极的设计表面积大1000至100,000倍。Using other electrode construction methods, this pore size distribution can be changed, and the use of surfactants to increase crystals or other organizational structures in the coating solution can increase the average pore size to 100-200A, and only 5-10% of the surface area source in micropores. The effective large surface area of the coating is thus 1000 to 100,000 times greater than the design surface area of the electrode.
如图13所示,电极111A包括多孔导电涂层119,它形成于支撑材料116的至少一个表面,支撑材料116是导电的,并具有足够的刚性,以支撑涂层119并给装置10以足够强的结构刚性。As shown in FIG. 13, the
本发明的一个目标是选择装置10的最佳能量密度和功率密度。此目标是通过减小支撑材116的厚度和使涂层119的表面积最大化来实现的。装置10的功能密度进一步通过维持低电阻使之最佳化。One goal of the present invention is to select the optimum energy density and power density of
涂层119的表面积用本领域公知的BET方法确定。表示涂层119的表面最佳化的表面增加率根据下式确定:The surface area of
表面增加率=(BET表面积/设计表面积)Surface increase rate = (BET surface area / design surface area)
在本发明中,表面增大率可达10,000至100,000。In the present invention, the surface enlargement ratio can be as high as 10,000 to 100,000.
涂层119是多孔的,其孔隙率在约5%至95%的范围内,对于有效的能量存储而言,典型的孔隙率范围为约20%至25%。Coating 119 is porous with a porosity in the range of about 5% to 95%, with a typical porosity range of about 20% to 25% for efficient energy storage.
在常规的双电层电容器中,主要装置电阻源于碳涂层。在本发明中,装置电阻主要源于电解质,电解质具有比多孔导电涂层更高的电阻。In conventional electric double layer capacitors, the main device resistance is derived from the carbon coating. In the present invention, the device resistance is mainly derived from the electrolyte, which has a higher resistance than the porous conductive coating.
当预制组件10填充电解质后,它就可以被充电而变成装置10A。对于电解质而言,主要标准是它是离子性导电的并具有双极型特性。电极和电解质之间的边界或界面区在本领域被称作“双电层”,并用于描述此区域的电荷排列。双电层理论的更详细的描述记载于Bokrls等人的“现代电化学”第2卷第六次印刷本第7章(1977年)。Once prefabricated
涂层的表面积影响装置10A的电容量,如果(例如)表面增大系数为1000至20000,并且双电层电容量密度为每厘米2的界面表面积(即BET表面积)大约10至500微法,那么可获得大约为每厘米2电极0.1至10法拉的表面增大电容量密度。The surface area of the coating affects the capacitance of the device 10A if, for example, the surface enlargement factor is 1000 to 20,000 and the electric double layer capacitance density is about 10 to 500 microfarads per centimeter of interfacial surface area (i.e., BET surface area), Surface augmented capacitance densities of about 0.1 to 10 Farads per cm <2> of electrode are then achievable.
尽管在此说明了双电层理论,但应当理解,其它理论或模式,如质子注入模式,也是可以选用的。Although the electric double layer theory is described here, it should be understood that other theories or models, such as the proton injection model, are alternatives.
大表面面积(多孔)导电涂层材料被涂覆到支撑材料。A high surface area (porous) conductive coating material is applied to the support material.
1.溶液方法:多孔涂层材料可以由溶液或溶胶-凝胶成分中的各种反应原料化合物形成。这些原料化合物成分的多种应用方法均是可行的,而不限于下述方法,固化、水解和/或热解工艺通常用于在支撑材料上形成涂层。金属盐的热解通常在受控气氛(氮气、氧气、水、和/或其它惰性和氧化牲气体)下借助炉具或红外源来进行。1. Solution method: Porous coating materials can be formed from various reactive starting compounds in solution or sol-gel compositions. Various methods of application of these raw compound components are possible, without limitation, curing, hydrolysis and/or pyrolysis processes are typically used to form coatings on support materials. Pyrolysis of metal salts is typically performed under a controlled atmosphere (nitrogen, oxygen, water, and/or other inert and oxidizing gases) with the aid of a furnace or an infrared source.
(a)浸渍涂覆:电极或支撑结构被浸渍于溶液或溶胶-凝胶,用原料化合物涂层覆盖支撑结构,并接着用热解法或其它方法固化。此工艺可重复,以增加涂层厚度。优选,将支撑材料浸渍于金属氯化物/酒精溶液中,并接着在5-100%的氧气氛中在约250至500℃的温度下热解处理5-20分钟。(a) Dip coating: The electrode or support structure is dipped in a solution or sol-gel, the support structure is covered with a coating of raw compound, and then cured by pyrolysis or other methods. This process can be repeated to increase coating thickness. Preferably, the support material is dipped in a metal chloride/alcohol solution and then pyrolytically treated at a temperature of about 250 to 500° C. for 5-20 minutes in an oxygen atmosphere of 5-100%.
重复此工艺,直至得到所希望的涂层重量。最终的热解处理是在250至450℃下进行1-10小时,典型值约为1-30mg/cm2的涂层淀积于支撑材料上,以获得每平方厘米电极截面积约1-10F的电容量密度。另一种方法是,用钉、硅、钛和/或其它金属的氧化物制备溶胶-凝胶溶液,并按上述方法涂覆支撑材料。通过调整pH值、水浓度、溶剂和/或草酸、甲酰胺和/或表面活性剂这样的添加物的含量,可调节涂层的放电频率特性。This process is repeated until the desired coat weight is obtained. The final pyrolysis treatment is carried out at 250 to 450°C for 1-10 hours, with a typical value of about 1-30mg/ cm2 coating deposited on the support material to obtain an electrode cross-sectional area of about 1-10F per square centimeter capacitance density. Alternatively, a sol-gel solution is prepared with oxides of nail, silicon, titanium and/or other metals and the support material is coated as described above. By adjusting the pH value, water concentration, solvent and/or content of additives such as oxalic acid, formamide and/or surfactants, the discharge frequency characteristics of the coating can be adjusted.
在热解步骤中可采用较高的相对湿度,以便在较低温度下实现原材料向氧化物的转变。优选方法是,在低于400℃的温度下进行热解的过程中,维持约50%以上的相对湿度。Higher relative humidity can be used during the pyrolysis step to achieve conversion of the raw materials to oxides at lower temperatures. A preferred method is to maintain a relative humidity above about 50% during the pyrolysis at a temperature below 400°C.
浸渍涂覆薄的(例如1密耳)支撑结构的一种优选方法是,采用一个线状框架结构300来保持支撑材料118于绷紧状态(图15和15A)。A preferred method of dip coating thin (eg, 1 mil) support structures is to use a
线状框架结构300包括至少两根线301和301A,它们的长度大于支撑材料118的宽度。每根线301和301A包括一单独的线段,此线段在其各端紧密卷绕约360°而形成两个圈302和303。这两个圈如此卷绕,即,其端头在此线平面之上的约1cm处,圈302和303分别穿过支撑材料中的孔304和305设置。孔304和305位于支撑材料的相邻侧面的两个角上。The
另外两根线301B和301C以相似方式装于支撑材料的其余两侧面,以提供附加支撑。Two
(b)喷涂:涂覆溶液通过喷涂方法涂覆在支撑材料上,并固化和选择性地重复,用于增加涂层厚度。优选方法是,在0-150℃的温度下将涂覆溶液喷涂至衬底,喷涂采用超声喷咀或其它的喷咀,以约0.1-5ml/min的流速,在由氮、氧和/或其它反应和惰性气体组成的载气中进行。涂覆特性可通过氧和其它反应气体的分压强来控制。(b) Spray coating: The coating solution is coated on the support material by a spray coating method, and cured and selectively repeated for increasing the coating thickness. A preferred method is to spray the coating solution onto the substrate at a temperature of 0-150° C., using an ultrasonic nozzle or other nozzles for spraying, at a flow rate of about 0.1-5 ml/min, in the presence of nitrogen, oxygen and/or Other reactions are carried out in a carrier gas composed of inert gas. Coating characteristics can be controlled by the partial pressure of oxygen and other reactive gases.
(c)滚涂:采用滚涂方法涂覆原料化合物涂层,然后固化并选择性地重复,用于增加涂层厚度。这里可用上面描述的用于浸渍涂覆的涂料。(c) Roll coating: The raw material compound coating is applied by the roll coating method, then cured and selectively repeated for increasing the coating thickness. The coatings described above for dip coating can be used here.
(d)旋涂:用现有技术中的旋涂方法涂覆原料化合物,并选择性重复。(d) Spin coating: the raw material compound is coated by the spin coating method in the prior art, and selectively repeated.
(e)刮刀涂覆:用刮刀涂覆方法涂覆原料化合物,并选择性重复。(e) Blade coating: The raw material compound is coated by the blade coating method and selectively repeated.
2.电泳淀积:用电泳淀积技术在支撑材料上形成多孔涂层或原料化合物涂层,并选择性重复。2. Electrophoretic deposition: use electrophoretic deposition technology to form a porous coating or raw material compound coating on the support material, and selectively repeat.
3.化学汽相淀积:用公知的化学汽相淀积技术形成多孔涂层或原料化合物涂层。3. Chemical Vapor Deposition: A porous coating or a raw material compound coating is formed using a known chemical vapor deposition technique.
(c)电极预处理(c) Electrode pretreatment
业已发现,多种预处理(调理)或其组合对改进涂层的电特性(例如,电化学惰牲、电导率、工作特性等)是有益的。这些处理包括例如:Various pretreatments (conditioning) or combinations thereof have been found to be beneficial in improving the electrical properties (eg, electrochemical inertness, electrical conductivity, performance characteristics, etc.) of the coating. These treatments include, for example:
1.蒸汽处理:在一个密闭容器中,在150至320℃之间,在自生压力下,被涂覆的电极与水饱和蒸汽接触1-6小时。1. Steam treatment: In a closed container, between 150 and 320 ° C, under autogenous pressure, the coated electrode is in contact with water-saturated steam for 1-6 hours.
2.反应气体处理:在室温至300℃之间,在减压或低压下,被涂覆的电极与反应气体进行一次或多次接触,反应气体如氧气、臭氧、氢气、过氧化气体、一氧化碳、一氧化二氮、二氧化氮、或一氧化氮,优选方法是,在室温至100℃之间,在0.1-2000torr压力下,让被涂覆电极与含臭氧的5-20wt%的流动空气接触0.1-3小时。2. Reactive gas treatment: Between room temperature and 300°C, under reduced pressure or low pressure, the coated electrode is in contact with the reactive gas one or more times, such as oxygen, ozone, hydrogen, peroxide gas, carbon monoxide , nitrous oxide, nitrogen dioxide, or nitric oxide, preferably, between room temperature and 100°C, under a pressure of 0.1-2000torr, allow the coated electrode to be mixed with 5-20wt% of ozone-containing flowing air Contact 0.1-3 hours.
3.超临界液流处理:使电极与诸如二氧化碳、有机溶剂、和/或水之类的超临界液流接触。优选方法是,通过首先升高压强尔后升高温度来达到超临界条件,用超临界水或二氧化碳处理0.1-5小时。3. Supercritical fluid treatment: The electrodes are contacted with a supercritical fluid such as carbon dioxide, organic solvents, and/or water. The preferred method is to achieve supercritical conditions by first increasing the pressure and then increasing the temperature, and treat with supercritical water or carbon dioxide for 0.1-5 hours.
4.电化学处理:被涂覆的电极置于硫酸电解液中,并通以足以使氧气放出的阳极电流,接着通以阴极电流。在一个实施例中,电极在0.5M硫酸中通10mA/cm2电流约5分钟,以产生氧气。电极随后被转接至阴极电流,并驱使开路电位降回至0.5V(相对正常氢电极)的有氢气释出电位。4. Electrochemical treatment: The coated electrode is placed in a sulfuric acid electrolyte, and an anodic current sufficient to release oxygen is passed through, and then a cathodic current is passed through. In one embodiment, the electrodes are subjected to a current of 10 mA/cm 2 in 0.5 M sulfuric acid for about 5 minutes to generate oxygen. The electrode was then switched to a cathodic current and the open circuit potential was driven back down to a hydrogen evolution potential of 0.5 V (vs. a normal hydrogen electrode).
5.反应液体处理:在约为室温至100℃的温度下使被涂覆的电极与氧化性液体接触0.1-6小时,诸如过氧化氢、臭氧、亚砜、高锰酸钾、高氯酸钠、铬(VI)同位素和/或它们的组合物的水溶液。优选的方法是,用10-100mg/l的臭氧水溶液,在20-50℃处理约0.5-2小时,接着进行水冲洗,另一种方法是在铬酸盐或重铬酸盐溶液中处理被涂覆的电极。5. Reactive liquid treatment: contact the coated electrode with an oxidizing liquid such as hydrogen peroxide, ozone, sulfoxide, potassium permanganate, perchloric acid at a temperature of about room temperature to 100°C for 0.1-6 hours Aqueous solutions of sodium, chromium (VI) isotopes and/or combinations thereof. The preferred method is to treat with 10-100 mg/l ozone aqueous solution at 20-50 ° C for about 0.5-2 hours, followed by water washing, another method is to treat the treated in chromate or dichromate solution. coated electrodes.
(D)电极间的隔离(D) Isolation between electrodes
为在电极间获得电绝缘和适当限定的间隔,多种方法是可行的。这些方法包括,例如:To obtain electrical isolation and a properly defined spacing between the electrodes, various methods are possible. These methods include, for example:
1.微凸头:涂层119和120之间的隔离层125和127包括在电极的至少一侧表面上的一个小(在面积和高度方面)凸头的阵列,即125和127,这些微凸头可由热固性材料、热塑性材料、弹性材料、陶瓷材料、或其它电绝缘材料构成。1. Microprotrusions: The isolation layers 125 and 127 between the
形成这些微凸头的方法有下列几种,但不限于这几种方法:There are several methods for forming these micro-protrusions, but not limited to these methods:
(a)丝网印刷法:微凸头通过常规的丝网印刷法被设置在电极表面上,正如后面在:丝网印刷“标题下所详细描述的那样,在这种方法中可采用各种弹性材料。光固化塑料和热塑性材料。优选方法是采用耐酸的环氧或VITON溶液。(a) Screen printing method: Microprotrusions are provided on the electrode surface by conventional screen printing methods, as described in detail later under the heading of "Screen Printing", in which various Elastomeric materials. Light curable plastics and thermoplastics. The preferred method is to use acid resistant epoxy or VITON( R) solutions.
(b)化学汽相淀积法:微凸头还可通过透过一掩模淀积二氧化硅、二氧化钛和/或其它绝缘氧化物或材料被设置于电极表面上。(b) Chemical Vapor Deposition: Microprotrusions can also be placed on the electrode surface by depositing silicon dioxide, titanium dioxide and/or other insulating oxides or materials through a mask.
(c)光刻法:微凸头也可通过光刻法制成,正如后面在“微凸头的光刻制造”标题下所详细描述的那样。(c) Photolithography: Microprotrusions can also be fabricated by photolithography, as described in detail below under the heading "Photolithographic Fabrication of Microprotrusions".
2.物理性薄隔离片:电极间的隔离板是薄的、实质上为开放结构材料,例如玻璃。优选材料是可从位于NJ州的Clifiton的WhatmanPaper Ltd购得的0.001-0.005时(0.00254-0.01270cm)厚的多孔玻璃片。2. Physically thin separator: The separator between electrodes is a thin, substantially open-structure material, such as glass. A preferred material is a 0.001-0.005 inch (0.00254-0.01270 cm) thick porous glass sheet commercially available from Whatman Paper Ltd of Clifiton, NJ.
3.注塑隔离板:多孔材料之间的隔离板还可通过注塑一层薄的、实质上为开放结构的薄膜得到,例如NAFION、聚砜,或各种气体和溶胶-凝胶。3. Injection molded separator: The separator between porous materials can also be obtained by injection molding a thin, substantially open-structure film, such as NAFION® , polysulfone, or various gases and sol-gels.
4.空气隔离:电极之间的隔离体为空气隙,它尔后由无水或含水电解质填充。4. Air isolation: The separator between the electrodes is an air gap, which is then filled with anhydrous or aqueous electrolyte.
(E)加衬垫(E) Padded
用作活性电极表面的边缘处的衬垫层,例如衬垫层121、123、135。137、157和159的材料包括任何一种在电/化学环境和加工条件下稳定的有机聚合物,合适的聚合物包括,例如,聚酰亚胺、亚胺、TEFZEL、聚乙烯(高和低密度)、聚丙烯、其它聚烯烃、聚砜、KRATON、其它氟化的或部分氟化的聚合物或它们的组合。衬垫层可通过丝网印刷方法或其它方法形成,作为预成型材料。Used as a liner layer at the edge of the active electrode surface, such as
(F)用于填充口的带(F) Tape for filling port
用于形成填充口,例如填充口122和142的带(117A、117B和117C)是任何一种具有某些特殊性能的适用材料,例如,它不同于衬垫层材料,它具有比衬垫层材料更高的熔化温度(Tm),并且在本文所描述的加热条件下,它不会熔化、流动或粘连至衬垫层材料。通常采用玻璃、金属、陶瓷、和有机聚合物或它们的组合。The strips (117A, 117B, and 117C) used to form fill ports, such as fill
(G)叠置(G) Overlap
叠置结构是由这样构成的,开始放一个端面板,尔后是交替排列衬垫层材料、带、电极,直至形成所希望的电容器芯片数,最后以放置第二端面板结束,并可选择一衬垫材料层位于叠置结构的顶部外侧。The stacked structure is formed by placing an end plate at the beginning, then alternately arranging the liner material, strips, and electrodes until the desired number of capacitor chips is formed, and finally ending with the placement of the second end plate, and optionally a A layer of gasket material is located on the top outer side of the stacked structure.
(H)装配(加热和冷却)(H) Assembly (heating and cooling)
在低压下加热叠置结构,使衬垫层材料回流,将电极材料的周边粘结和密封至叠置结构中的相邻电极;由此形成相互绝缘的电容器芯片和一个装配好的叠置组件。Heating the stack at low pressure reflows the liner material and bonds and seals the perimeter of the electrode material to adjacent electrodes in the stack; thereby forming mutually insulated capacitor chips and an assembled stack assembly .
(a)用射频感应加热法(RFIH)加热叠置结构,使衬垫层材料回流。(a) The stacked structure is heated by radio frequency induction heating (RFIH) to reflow the liner material.
(b)用辐射加热(RH)法均匀加热叠置结构,使衬垫层材料回流,优选方法是用(0.5-10Watts/cm2的1-100μm辐射加热1-20分钟。(b) Uniformly heat the superimposed structure by radiant heating (RH) to reflow the material of the liner layer. The preferred method is to use (0.5-10Watts/cm 2 1-100μm radiant heating for 1-20 minutes.
(c)采用在炉中选择性地在惰性气氛中的传导和/或对流加热法来加热叠置结构,使衬垫层材料回流。(c) heating the stacked structure by conduction and/or convection heating in a furnace, optionally in an inert atmosphere, to reflow the liner material.
(I)形成填充口(I) Forming the filling port
将带从装配好的组件上拉出,以形成每个电容器芯片具有至少一个填充口的干式预制组件。The tape is pulled from the assembled assembly to form a dry prefabricated assembly having at least one fill port per capacitor chip.
(J)后处理(J) post-processing
对叠置结构或装配好的叠置结构或它们的组合进行多种后续的反应气体处理,对改善电极和所形成的装置的全部的和长期的电特性是有益的。这些处理包括在步骤(H)之前和/或步骤(I)之后,用氢气、氧化氮、一氧化碳、氨气、和其它还原气体或其组合,在室温至衬垫层材料的熔化温度Tm之间,在减压或低压下进行的处理。Various subsequent reactive gas treatments of the stack or assembled stack, or combinations thereof, are beneficial in improving the overall and long-term electrical properties of the electrodes and resulting devices. These treatments include hydrogen, nitrogen oxides, carbon monoxide, ammonia, and other reducing gases or combinations thereof, between room temperature and the melting temperature Tm of the liner material, before step (H) and/or after step (I). , treatment under reduced or reduced pressure.
(K)干式预制组件的填充(K) Filling of dry prefabricated components
干式预制组件要用离子性导电的含水或无水电解质填充。Dry prefabricated components are filled with ionically conductive aqueous or anhydrous electrolytes.
优选电解质是约含30%的硫酸的水溶液,因为它具有高电导率。以聚丙烯和碳酸亚乙酯为基础的无水电解质也可用来获得大于1.2V/电容器芯片的电位。The preferred electrolyte is about 30% sulfuric acid in water because of its high conductivity. Non-aqueous electrolytes based on polypropylene and ethylene carbonate can also be used to achieve potentials greater than 1.2 V/capacitor chip.
用液态电解质填充干式预制组件的优选方法是,将预制组件放于操作室中,将操作室抽至低于1torr,并注入电解质;由此使电解质通过填充口填充至电容器芯片的间隙。另一种方法是,可将预制组件置于电解质中并抽真空。从而除去电容器芯片的间隙中的气体并以电解质代之。The preferred method of filling dry prefabricated components with liquid electrolyte is to place the prefabricated components in the operating chamber, pump the operating chamber to less than 1 torr, and inject the electrolyte; thereby allowing the electrolyte to fill the gaps of the capacitor chips through the filling port. Alternatively, prefabricated components can be placed in the electrolyte and evacuated. The gas in the interstices of the capacitor chips is thereby removed and replaced by electrolyte.
此外,也可采用非液态电解质(例如,固态和聚合物)。在回流前电极已涂覆电解质的情况下,不需要填充口。In addition, non-liquid electrolytes (eg, solid and polymers) may also be employed. In cases where the electrodes are coated with electrolyte prior to reflow, no fill port is required.
(L)填充口的密封(L) Sealing of filling port
填充口是通过在开口上回流形成一层相同或不同的聚合物辅助薄膜而密封的,从而形成密封的装置。这通常用感应加热器来进行,加热器局部加热覆盖填充口的薄膜。The fill port is sealed by reflowing a secondary film of the same or a different polymer over the opening to form a hermetic device. This is usually done with an induction heater, which locally heats the film covering the fill opening.
(M)老化(M) aging
通过按约4mA/cm2的充电电流开始将装置充电至0.1V、电容器芯片促使装置完全充电。The capacitor chip causes the device to fully charge by starting charging the device to 0.1 V at a charge current of approximately 4 mA/ cm2 .
(N)测试(N) test
端接方法:有好几种方法可用于实现电容器顶端引出电极板的电连接,这些方法描述如下。Termination Methods: There are several methods that can be used to make the electrical connection to the top lead-off plates of the capacitor, and these methods are described below.
1.端面引出电极接头片(160和160A):端面引出电极板(111A和111Z)本身已被切成延伸超过正常衬垫层周边的形状。这些伸出部分容许安装线或带。典型情况下,伸出部分是一导电片,其上的所有氧化物被除去得到裸露的支撑材料;5密耳(0.0127cm)厚的镍带点焊至此导电片上,1. End-exit electrode tabs (160 and 160A): The end-exit electrode plates (111A and 111Z) themselves have been cut into shapes that extend beyond the perimeter of the normal backing layer. These protrusions allow the installation of wires or straps. Typically, the protruding portion is a conductive sheet from which all oxides have been removed to expose the support material; 5 mil (0.0127 cm) thick nickel tape is spot welded to this conductive sheet,
2.掺银环氧树脂2. Silver doped epoxy resin
除去端面板的暴露面上的氧化物涂层或只在一侧涂覆端面板。通过用导电的掺银环氧树脂粘结,使干净的镍箔或铜板电连接至曝露面。氧化物涂层存在也是可以选择的。Remove the oxide coating on the exposed face of the end plate or coat the end plate on one side only. A clean nickel foil or copper plate is electrically connected to the exposed surface by bonding with a conductive silver-doped epoxy. The presence of an oxide coating is also optional.
3.接线头:带螺纹的钛螺母在涂覆前焊至厚的钛板上。通过用螺栓实现与钛螺母的电连接。3. Lugs: Threaded titanium nuts are welded to thick titanium plates before coating. The electrical connection with the titanium nut is achieved by using bolts.
4.压力接触:在装配成装置的叠置结构之前,除去端面板曝露侧面的氧化物,或仅在一侧涂覆端面板。反向溅射裸露的支撑材料,例如钛,以清洁表面,溅射时应慎重,不要使衬底过热。清洁的表面尔后用钛溅射,以铺设一清洁的粘结层,接着用金溅射。金用作低接触电阻表面,可通过加压或线粘合实现与此表面的电接触。4. Pressure contact: Remove the oxide on the exposed side of the end panels, or coat the end panels on one side only, prior to assembly into a stacked structure of devices. Back-sputter the exposed support material, such as titanium, to clean the surface, being careful not to overheat the substrate when sputtering. The cleaned surface was then sputtered with titanium to lay down a clean bond layer, followed by sputtering with gold. Gold serves as a low contact resistance surface to which electrical contact can be made by pressing or wire bonding.
5.通过CVD或其它方法所进行的合适介质如铝、金、银、等的外部淀积。5. External deposition of a suitable medium such as aluminum, gold, silver, etc. by CVD or other methods.
装置电阻是在1KHz条件下测量的。装置电容量是通过测量使装置完全充电所需的库仑数来确定的,充电电流约为每平方厘米电极面积4mA。漏电流是按充电30分钟后为维持完全充电所需的电流来测量的。Device resistance was measured at 1KHz. Device capacitance was determined by measuring the number of coulombs required to fully charge the device at approximately 4 mA per square centimeter of electrode area. Leakage current is measured as the current required to maintain a full charge after 30 minutes of charging.
根据所希望的应用,这些装置可制成各种构形,通过调整装置电压、电容器芯片电压、电极面积和/或涂层厚度之间的关系,可构造出适于特定要求的装置结构。Depending on the desired application, these devices can be fabricated in a variety of configurations, and by adjusting the relationship between device voltage, capacitor chip voltage, electrode area, and/or coating thickness, device structures can be constructed to suit specific requirements.
对于每10μm厚的涂层,电极电容量密度(C’,单位为F/cm2)约为1F/cm2。因此,为得到大的电容量要用较厚的涂层。装置电容量(C)等于电极电容量密度乘以电极面积(A,单位cm2)再除以2倍的电容器芯片数(n)(等式1)。For every 10 μm thick coating, the electrode capacitance density (C′, in F/cm 2 ) is about 1 F/cm 2 . Therefore, a thicker coating is used to obtain a large capacitance. The device capacitance (C) is equal to the electrode capacitance density multiplied by the electrode area (A, in cm 2 ) divided by twice the number of capacitor chips (n) (Equation 1).
漏电流(i”)与电极面积成正比,而等效串联电阻(ESR)与电极面积成反比(等式2)。漏导电流(1”)的典型值为小于20μA/cm2。The leakage current (i") is directly proportional to the electrode area, while the equivalent series resistance (ESR) is inversely proportional to the electrode area (Equation 2). Typical values for the leakage conduction current (1") are less than 20 μA/cm 2 .
装置中电容器芯片的总数量(n)等于总装置电压(V)除以电容器芯片电压(V’)(等式3)。高达约1.2V的电容器芯片电压可采用含水电解质获得。The total number of capacitor chips (n) in the device is equal to the total device voltage (V) divided by the capacitor chip voltage (V') (Equation 3). Capacitor chip voltages as high as about 1.2V can be achieved with aqueous electrolytes.
装置高度取决于电容器芯片间隙(h’)和支撑结构厚度(h”),由电容器芯片数量和电极的电容量密度(单位:F/cm2)确定,见等式4。The device height depends on the capacitor chip gap (h') and the support structure thickness (h"), determined by the number of capacitor chips and the capacitance density of the electrodes (unit: F/cm 2 ), see Equation 4.
装置的等效串联电阻(ESR)为电容器芯片数量、电容器芯片间隙(h’),电解质的电阻率(r)和约为2的常数的乘积除以面积的函数(等式5)。The equivalent series resistance (ESR) of the device is a function of the product of the number of capacitor chips, the capacitor chip gap (h'), the resistivity of the electrolyte (r), and a constant of about 2 divided by the area (Equation 5).
等式1 C=C’A/2nEquation 1 C=C'A/2n
等式2 i”αAα1/ESREquation 2 i"αAα1/ESR
等式3 n=v/v’Equation 3 n=v/v'
等式4 h/cm=n(0.002C’+h’+h”)Equation 4 h/cm=n(0.002C’+h’+h”)
等式5 ESR=2nh’r/AEquation 5 ESR=2nh’r/A
通过研究电压、能量和电阻等必需条件,装置被构造成能满足各种应用的需要。下列例子并不意味着受到任何限制:By studying the necessary conditions such as voltage, energy and resistance, devices are constructed to meet the needs of various applications. The following examples are not meant to be limiting:
对于电动车辆应用而言,采用100KJ至3MJ的装置。采用具有约100至10000cm2的电极面积的高电压(约100至1000V)大能量(1-5F/cm2)存储装置。For electric vehicle applications, 100KJ to 3MJ devices are used. A high voltage (about 100 to 1000 V) high energy (1-5 F/cm 2 ) storage device with an electrode area of about 100 to 10000 cm 2 is employed.
对于用于降低汽车冷起动发动的电热催化转换器应用而言,采用10至80KJ的装置。此装置大约为12至50V,并具有面积为100至1000cm2的1-5F/cm2的电极。还可这样选择,由并联的几个装置来构成一个装置,以满足电气要求。For electrothermal catalytic converter applications to reduce automotive cold cranking, 10 to 80 KJ units are used. This device is approximately 12 to 50 V and has electrodes of 1-5 F/ cm2 with an area of 100 to 1000 cm2 . It is also possible to choose to form a device by connecting several devices in parallel to meet the electrical requirements.
对于电震发生器应用而言,采用具有面积为0.5至10cm2的1-3F/cm2的电极的约200至400V的装置。For shock generator applications, about 200 to 400 V devices are employed with electrodes of 1-3 F/cm 2 with an area of 0.5 to 10 cm 2 .
对于不间断电源应用而言,可采用各种串/并联装置结构。For UPS applications, various series/parallel device configurations are available.
丝网印刷screen printing
现在研究丝网印刷方法250,参照图7和8,方法250主要用于在涂层表面上制备一系列微凸头125和127,以在通常如电容器或电池之类的电存储装置中,并且尤其是在于式预制组件能量存储装置10中用作间隙隔离层。Studying screen printing method 250 now, with reference to Figures 7 and 8, method 250 is mainly used in the preparation of a series of
衬底通常是薄的金属,如钛、锆、或其合金,衬底通常为薄金属板状,就象现有电容器中常用的那样。The substrate is usually a thin metal, such as titanium, zirconium, or alloys thereof, and the substrate is usually in the form of a thin metal plate, as is commonly used in existing capacitors.
衬底的一侧或两侧涂敷有多孔的碳化合物或多孔的氧化物涂层。此步骤由本领域常用的方法完成。氧化物涂层作为此装置的电荷存储面积。The substrate is coated on one or both sides with a porous carbon compound or porous oxide coating. This step is accomplished by methods commonly used in the art. The oxide coating serves as the charge storage area of the device.
另外,可制造一组叠置的电池电极(例如铅酸用的铅)和电解电容器电极(例如氧化铝和钽)。Additionally, a stack of stacked battery electrodes (such as lead for lead acid) and electrolytic capacitor electrodes (such as alumina and tantalum) can be fabricated.
重要的是,相邻的被涂覆衬底或电极的平坦表面不能相互接触,并且是均匀隔离的。用环氧树脂微凸头实现所希望的均匀隔离。It is important that the planar surfaces of adjacent coated substrates or electrodes do not touch each other and are uniformly isolated. The desired uniform isolation was achieved with epoxy microprotrusions.
样品支撑:被涂覆的薄的平坦衬底要被固定(或支撑),这样在衬底的平表面上,微凸头的形成是精密和准确的。对于薄金属片(0.1至5密耳)(0.000254至0.0127cm),尤其是约1密耳(0.00254cm))而言,电极支架275尤为重要,如果对薄片抽高真空,在片中常会形成有害的凹痕,它会使最终装置的物理和电气性能产生显著的不希望的变化。Sample support: The thin flat substrate to be coated is held (or supported) so that microprotrusion formation is precise and precise on the flat surface of the substrate. The electrode holder 275 is especially important for thin metal sheets (0.1 to 5 mils) (0.000254 to 0.0127 cm), especially around 1 mil (0.00254 cm), where a Detrimental dents which can cause significant and undesirable changes in the physical and electrical properties of the final device.
电极支架275包括一个多孔陶瓷支架276,它是有益的,因为孔尺寸小至足以在抽至中等的或较高的真空时使凹痕不出现。在不使金属变形或不破坏涂层的条件下,陶瓷支架276的平坦陶瓷表面必须与电极111A的表面紧密接触。对多孔陶瓷较好的真空度至少25英寸汞柱。真空度最好在约25至30英寸汞柱之间,尤其是26至29英寸汞柱。Electrode holder 275 includes a porous ceramic holder 276, which is beneficial because the pore size is small enough that dents do not appear when pumped to a moderate or high vacuum. The flat ceramic surface of the ceramic holder 276 must be in intimate contact with the surface of the
另外,陶瓷衬底应与任一机械支架的表面齐平,以保证环氧树脂穿过丝网孔产生均匀突出,在这里齐平是指,支架表面与用于电存储的涂层表面之间没有明显差别,每6英寸长的两个表面之间的差为±6密尔(0.0127cm)。In addition, the ceramic substrate should be flush with the surface of any mechanical support to ensure uniform protrusion of the epoxy resin through the mesh holes, where flush means between the surface of the support and the coating surface for electrical storage. No significant difference, ± 6 mils (0.0127 cm) between the two surfaces per 6 inches of length.
电极支架275还包括金属框架277,它也应尽可能的平坦,以便从电极一侧向另一侧形成均匀尺寸的凸头。The electrode holder 275 also includes a metal frame 277, which should also be as flat as possible to form uniformly sized bumps from one side of the electrode to the other.
电极支架275可从许多商业机构购到,例如Coloradl州的Ceramicon Designs。另外,样品支架276可采用商业上可得到的金属、合金或陶瓷制造。Electrode holders 275 are available from a number of commercial establishments, such as Ceramicon Designs, Colorado. Additionally, sample holder 276 can be fabricated from commercially available metals, alloys, or ceramics.
通常,形成一个5英寸(12.7cm)×7英寸(17.78cm)的被涂覆片状电极。Typically, a 5 inch (12.7 cm) by 7 inch (17.78 cm) coated sheet electrode is formed.
金属支架277具有多个处于关键位置的定位销,如三个定位销278、279和280,它们分别与相应的孔281、282和283配合,将电极111A校准和定位。孔281、282和283通常尽可能靠近电极111A的周边,以节省有用的电极表面,另一种方式是,不采用校准孔,定位销与电极边缘对准。The metal bracket 277 has a plurality of positioning pins at key positions, such as three positioning pins 278, 279 and 280, which cooperate with corresponding holes 281, 282 and 283 respectively to align and position the
一个具有预定的开放图形的模片(未示出)铺设并固定在常规的丝网印刷架(未示出)中,丝网被除去。A die (not shown) having a predetermined open pattern is laid and fixed in a conventional screen printing frame (not shown), and the screen is removed.
将已混合的环氧成分和流体环氧树脂置于模版的表面上,随后铺开,以获得平坦的涂霍层。这可采用压力棒、刮棒或橡皮滚子完成。The mixed epoxy components and fluid epoxy resin are placed on the surface of the stencil and then spread to obtain a flat coating. This can be done with a pressure bar, scraper or squeegee.
一般说来,恒定的温度和湿度对获得平坦涂层是重要的。In general, constant temperature and humidity are important to obtain a flat coating.
随后小心地取出模版,在氧化物的表面上留下流体环氧树脂凸头。接着采用大气下100至150℃的快速加热或光照使环氧化物凸头固化。The stencil is then carefully removed, leaving fluid epoxy bumps on the surface of the oxide. The epoxy bumps are then cured using rapid heating at 100 to 150° C. or light in the atmosphere.
然后将具有微凸头的电极与其它电极组合,并按湿法或干法装配。如果采用干法,在要充电前,干式组件10要填充电解质。The electrodes with microprotrusions are then combined with other electrodes and assembled either wet or dry. If dry, the
固化的环氧树脂不与最后用于制造具有多层电极的电容器的液态电解质反应是重要的。It is important that the cured epoxy resin does not react with the liquid electrolyte that is ultimately used to fabricate capacitors with multilayer electrodes.
固化的微凸头起到保持电极间均匀间隔的作用。The cured micro-protrusions play a role in maintaining uniform spacing between electrodes.
正如可从图6中看到的,电极平坦表面的边缘具有凸头125,它们比电极的有效部分或中央部分的那些凸头127更为密集。这些凸头125增强边缘处的支撑,从而维持均匀隔离。另外,也可采用棒。As can be seen from Figure 6, the edges of the flat surface of the electrode have
从这些教导中可明确知道,下列情况是可能的:From these teachings it is clear that the following are possible:
因为支撑刚度会变化,增大或减小衬底电极厚度将容许微凸头隔离空间的增大或减小。Since the support stiffness will vary, increasing or decreasing the thickness of the substrate electrode will allow for an increase or decrease in the microprotrusion isolation space.
可采用本领域中常用的其它热固性材料、热弹性材料、光固化环氧树脂或环氧树脂衍生物。Other thermosetting materials, thermoelastic materials, light curing epoxies or epoxy resin derivatives commonly used in the art may be used.
可采用其它的微凸头图形元件,例如方形、线状、十字形、等等。尤其是,边缘处的棒可增加机械支撑。Other microprotrusion pattern elements may be used, such as squares, lines, crosses, and the like. In particular, the rods at the edges add mechanical support.
如果需要使可流动环氧树脂达到其粘度适于短时印刷的温度,也可选择加热丝网。Optionally, the screen can be heated if necessary to bring the flowable epoxy to a temperature where its viscosity is suitable for short-term printing.
紧接着进行可流动环氧树脂的丝网印刷的此加热步骤必须快速进行,因为环氧树脂的工作时间明显降低。This heating step followed by screen printing of the flowable epoxy has to be done quickly because the working time of the epoxy is significantly reduced.
所制造的具有微凸头125和127的电存储装置作为电池、电容器或类似器件是有益的。The fabricated electrical storage
微凸头的光刻制造Lithographic Fabrication of Microprotrusions
本方法主要是采用光刻技术,在电极衬底的或合金表面上制造一系列微凸头,参照图10、11和12。衬底通常为象现有电容器中常用的薄金属板形状。This method mainly uses photolithography technology to manufacture a series of micro-protrusions on the surface of the electrode substrate or the alloy, referring to FIGS. 10 , 11 and 12 . The substrate is usually in the form of a thin metal plate as is commonly used in prior art capacitors.
光刻胶薄膜381涂覆至电极111A的表面上,所述涂覆通过采用商业上可得到的Dynachem ConforMASK薄膜涂覆器和型号为724/30的Dynachem真空涂覆器真空敷设,或通过让光刻胶薄膜381和电极111A穿过一对加热的辊子384和385来实现。A thin film of
曝光是采用标准的1-7KW高电压曝光光源实施的,例如汞蒸汽灯389。Exposure is performed using a standard 1-7KW high voltage exposure light source, such as a
采用标准条件,例如0.5-1.0%的碳酸钠或碳酸钾单水化物,在显影罐或传送带式含水显影液中,使ConforMask薄膜涂覆器显显影。显影后,可将带微凸头的电极在10%的稀硫酸溶液中进行中和处理。这可除去所有的不想要的未反应的薄膜,而留下粘至电极表面的反应后的微凸头。ConforMask film applicators are developed using standard conditions, such as 0.5-1.0% sodium carbonate or potassium carbonate monohydrate, in a developing tank or a conveyorized aqueous developer. After developing, the electrodes with micro-protrusions can be neutralized in 10% dilute sulfuric acid solution. This removes any unwanted unreacted film leaving reacted microprotrusions stuck to the electrode surface.
为获得最佳的物理和电气工作特性,对所得到的材料进行最终的固化工艺处理,此固化工艺包括采用常规的高电压固化设备和对流空气炉的进行高电压照射和热处理。The resulting material is subjected to a final curing process that includes high voltage irradiation and heat treatment using conventional high voltage curing equipment and convection air ovens for optimum physical and electrical performance characteristics.
将多个电极装配起来制成(例如)一个电容器,如上所述。微凸头实现所希望的均匀隔离。商业应用 A plurality of electrodes are assembled to make, for example, a capacitor, as described above. The microprotrusions achieve the desired uniform isolation. business application
作为主要的或辅助的电源,和/或作为电容器,能量存储装置10A具有多种应用。其规格为0.1V至100000V或0.1cm3至105cm3。典型电压范围包括在汽车和其它应用中的使用范围的组合。As a primary or secondary power source, and/or as a capacitor, energy storage device 10A has a variety of applications. Its specification is 0.1V to 100000V or 0.1cm 3 to 10 5 cm 3 . Typical voltage ranges include a combination of ranges used in automotive and other applications.
这些应用中包括下列应用:汽车应用 典型电压范围 典型尺寸(cm3)内胎和座椅减震器 1-100 1-1000座椅取暖器 1-100 1-100电子加热催化器 1-1000 1-1000000电动汽车发动机 100-1000 100-1000000混合式电动汽车发动机 1-1000 10-100000内燃机/超电容发动机 1-100 100-100000电动换向器 1-1000 1-100再生刹车/冲击吸收 1-1000 5-100点灯和用电池点火 1-1000 2-100点灯和仅维持点火 1-100 1-100医学应用心脏电震发生器 10-500 0.1-100起搏器 1-300 0.1-300神经激励器或类似装置 0.1-300 0.1-300可植入式的和外用的装置 0.1-300 0.1-300外科电动工具 10-700 1-10流动监护设备 1-100 1-100自动液体色谱分析 1-100 1-20自动临床实验分析 1-100 1-20计算机层析X射线(CT)扫描器 1-1000 1-100牙科设备 1-200 1-10数字式X射线照相设备 1-500 1-1000电子外科设备 1-100 1-10光导纤维 1-100 1-100检查 1-10 1-10助听 1-10 0.1-1.0灌输装置 1-100 0.1-10磁共振成像(MRI) 1-1000 1-1000核医学诊断设备 1-1000 1-100电气式患者监护系统 1-200 1-100呼吸治疗设备 1-500 1-100外科用激光器 1-1000 1-1000电气外科支撑系统 1-100 1-1000超声诊断设备 1-100 1-100汽车发动机系统换档 1-1000 100-10000高尔夫车 1-1000 100-10000农具、地铁 1-1000 100-100000再生刹车 1-1000 1-100办公/商用电子应用计算器 1-120 0.5-10网络通讯 1-120 1-100商用音响放大器 1-1000 1-10商用闪光/频闪灯 1-1000 1-10商用电动工具 1-1000 1-100商用摄像机 1-120 1-10计算机 1-120 1-10复制器 1-120 1-10口授指令录音设备 1-100 1-1000电机 1-1000 1-1000电子锁 1-120 1-10电子合成器/PDAs 1-100 1-5应急照明系统 1-440 1-1000传真设备 1-120 1-10麦克风 1-120 1-3标页机 1-120 1-2打印机 1-120 1-10安全系统 1-120 1-100透射式幻灯 1-120 1-100不间断电源 1-1000 1-100000振动防止器 1-1000 1-100000无线网络 1-1000 1-1000消费电子应用音响系统袖珍型/家用型 1-120 1-10例携式录音机/CD 1-120 1-5随身听/袖珍立体声机 1-120 1-5CB无线电装置 1-120 1-10业余无线电收发报用装置 1-120 1-100凸轮式磁带回线自动记录器 1-120 1-10家用卫星天线反射器 1-120 1-10麦克风 1-120 1-3监视器和阴极射线管 1-1000 1-100闪光灯 1-1000 1-3接收机、收发机 1-1000 1-10电话应答装置 1-120 1-5网络、无线电话 1-120 1-3玩具和游戏机 1-120 1-10电视设备 1-1000 1-10家用型 1-1000 1-10便携型 1-1000 1-10盒式磁带录像机(VCRs) 1-120 1-10视盘放像机 1-120 1-10视频游戏机 1-120 1-10表/钟 1-120 1-100消费类家电应用空气净化器 1-120 1-100袋口密封器 1-150 1-100搅拌器 1-120 1-10全时钟(Clocks-Total) 1-120 1-100报警器和控制台 1-120 1-10咖啡磨 1-120 1-10咖啡加工机 1-120 1-10对流炉 1-1000 1-1000爆玉米机 1-120 1-10卷发铬铁/刷 1-120 1-5深油炸锅 1-230 1-100电毯 1-120 1-10手电筒 1-100 1-10地板擦光机 1-220 1-100食品加工机 1-120 1-10干发器 1-120 1-5加热垫 1-120 1-5家庭安全系统 1-120 1-100熨斗 1-120 1-5切割机 1-120 1-3美容器 1-120 1-5混合器 1-120 1-5微波炉 1-230 1-10电动工具 1-230 1-100安全系统 1-230 1-100剃须 1-120 1-3烟雾探测器 1-120 1-5计时器 1-120 1-3烤面包器/烘烤炉 1-120 1-5牙刷(电动的) 1-120 1-3汽化器 1-120 1-10水断续器 1-120 1-10涡流器(便拎式的) 1-120 1-100主要家用消费器械压实机 1-120 1-10洗碗机 1-220 1-100烘干器 1-120 1-100冰柜 1-220 1-100利用余热的多功能炉灶 1-220 1-1000(Ranges)冰箱 1-120 1-100洗衣机 1-220 1-100热水器 1-220 1-100户外器械杀虫器 1-120 1-10室外栅栏 1-120 1-100电动割草机 1-220 1-100乘坐式割草机 1-1000 1-1000乘坐式拖拉机 1-1000 1-10000旋转耕作机 1-1000 1-10000扫雪机/鼓风机 1-220 1-1000草地修剪器 1-220 1-100其它应用电动除冰机 1-1000 1-100电子熔断器 1-1000 1-10激光器 1-1000 1-100相列雷达 1-1000 1-1000远程喷灌器 1-1000 1-10000用于发电厂均化负荷即存储交替产生的能量的存储器(太阳能、燃料电池、风力涡 1-1000 1-10,000,000轮/等)These applications include the following applications: Typical voltage range for automotive applications Typical dimensions (cm 3 ) Inner tubes and seat shock absorbers 1-100 1-1000 Seat heaters 1-100 1-100 Electronic heating catalysts 1-1000 1- 1,000,000 Electric Vehicle Engine 100-1000 100-1,000,000 Hybrid Electric Vehicle Engine 1-1,000 10-100,000 Internal Combustion Engine/Ultracapacitor Engine 1-100 100-100,000 Electric Commutator 1-1,000 1-100 Regenerative Brake/Shock Absorption 1-1000 5-100 light and battery ignition 1-1000 2-100 light and ignition only 1-100 1-100 medical application cardiac shock generator 10-500 0.1-100 pacemaker 1-300 0.1-300 nerve stimulator or similar devices 0.1-300 0.1-300 implantable and external devices 0.1-300 0.1-300 surgical power tools 10-700 1-10 ambulatory monitoring equipment 1-100 1-100 automated liquid chromatography 1-100 1 -20 Automated clinical laboratory analysis 1-100 1-20 Computed tomography (CT) scanner 1-1000 1-100 Dental equipment 1-200 1-10 Digital radiography equipment 1-500 1-1000 Electronic surgery Equipment 1-100 1-10 Optical Fiber 1-100 1-100 Inspection 1-10 1-10 Hearing Aid 1-10 0.1-1.0 Infusion Device 1-100 0.1-10 Magnetic Resonance Imaging (MRI) 1-1000 1-1000 Nuclear Medicine Diagnostic Equipment 1-1000 1-100 Electrical Patient Monitoring System 1-200 1-100 Respiratory Therapy Equipment 1-500 1-100 Surgical Laser 1-1000 1-1000 Electrical Surgical Support System 1-100 1-1000 Ultrasound Diagnostic Equipment 1-100 1-100 Automotive Engine System Gear Shift 1-1000 100-10000 Golf Cart 1-1000 100-10000 Farm Tools, Subway 1-1000 100-100000 Regenerative Brake 1-1000 1-100 Office/Commercial Electronic Application Computing Device 1-120 0.5-10 Network communication 1-120 1-100 Commercial audio amplifier 1-1000 1-10 Commercial flash/strobe light 1-1000 1-10 Commercial power tool 1-1000 1-100 Commercial camera 1-120 1-10 Computer 1-120 1-10 Duplicator 1-120 1-10 Dictation Recording Equipment 1-100 1-1000 Motor 1-1000 1-1000 Electronic Lock 1-120 1-10 Electronic Synthesizer/PDAs 1- 100 1-5 Emergency lighting system 1-440 1-1000 Fax equipment 1-120 1-10 Microphone 1-120 1-3 Pagination machine 1-120 1-2 Printer 1-120 1-10 Security system 1-120 1 -100 Transmissive slide lamp 1-120 1-100 Uninterruptible power supply 1-1000 1-100000 Vibration preventer 1-1000 1-100000 Wireless network 1-1000 1-1000 Consumer electronics application audio system Pocket/household type 1-120 1-10 Portable recorder/CD 1-120 1-5 Walkman/Pocket stereo 1-120 1-5CB radio device 1-120 1-10 Amateur radio transceiver device 1-120 1-100 Cam tape Loop Automatic Recorder 1-120 1-10 Home Satellite Dish Reflector 1-120 1-10 Microphone 1-120 1-3 Monitor and CRT 1-1000 1-100 Flashlight 1-1000 1-3 Receiver , Transceiver 1-1000 1-10 Telephone answering device 1-120 1-5 Network, wireless phone 1-120 1-3 Toys and game consoles 1-120 1-10 Television equipment 1-1000 1-10 Household type 1- 1000 1-10 Portable 1-1000 1-10 Video Cassette Recorders (VCRs) 1-120 1-10 Video Disc Players 1-120 1-10 Video Game Consoles 1-120 1-10 Watches/Clocks 1-120 1- 100 Consumer Appliances Air Purifiers 1-120 1-100 Pocket Sealers 1-150 1-100 Agitators 1-120 1-10 Clocks-Total 1-120 1-100 Alarms and Consoles 1-120 1-10 Coffee Mill 1-120 1-10 Coffee Processor 1-120 1-10 Convection Oven 1-1000 1-1000 Corn Popper 1-120 1-10 Curl Iron/Brush 1-120 1- 5 Deep Fryer 1-230 1-100 Electric Blanket 1-120 1-10 Flashlight 1-100 1-10 Floor Polisher 1-220 1-100 Food Processor 1-120 1-10 Hair Dryer 1- 120 1-5 heating pad 1-120 1-5 home security system 1-120 1-100 iron 1-120 1-5 cutting machine 1-120 1-3 beauty appliance 1-120 1-5 mixer 1-120 1 -5 Microwave 1-230 1-10 Power Tools 1-230 1-100 Security System 1-230 1-100 Shaving 1-120 1-3 Smoke Detector 1-120 1-5 Timer 1-120 1-3 Toaster/Oven 1-120 1-5 Toothbrush (electric) 1-120 1-3 Vaporizer 1-120 1-10 Water interrupter 1-120 1-10 Vortex (handy) 1 -120 1-100 Main household consumer appliances Compactors 1-120 1-10 Dishwashers 1-220 1-100 Dryers 1-120 1-100 Freezers 1-220 1-100 Multifunctional stoves utilizing waste heat 1 -220 1-1000 (Ranges) Refrigerator 1-120 1-100 Washing Machine 1-220 1-100 Water Heater 1-220 1-100 Outdoor Equipment Insect Killer 1-120 1-10 Outdoor Fence 1-120 1-100 Electric Mower Grass Mower 1-220 1-100 Ride-On Mower 1-1000 1-1000 Ride-On Tractor 1-1000 1-10000 Rotary Tiller 1-1000 1-10000 Snowplow/Blower 1-220 1-1000 Lawn Mowing Device 1-220 1-100 Other applications Electric deicer 1-1000 1-100 Electronic fuse 1-1000 1-10 Laser 1-1000 1-100 Phase radar 1-1000 1-1000 Remote sprinkler 1-1000 1-10000 Storage for load leveling in power plants, i.e. storage of alternately generated energy (solar, fuel cells, wind turbines 1-1000 1-10,000,000 rounds/etc.)
军事应用防务 1-10,000 0.1-10.000.000Military Application Defense 1-10,000 0.1-10.000.000
对于特定应用而言,将多个装置串联和/或并联来达到所希望的性能。For a particular application, multiple devices are connected in series and/or in parallel to achieve the desired performance.
干式预制组件的制造Manufacture of dry precast components
下列例子仅用于描述和示范,它们不能被认为是以任何方式对发明的限制。The following examples are for illustration and demonstration only, and they should not be considered as limiting the invention in any way.
例1 example 1
干式预制组件的制造 Manufacture of dry precast components
(A)涂覆方法(A) Coating method
用35%HNO3/1.5%HF在60℃对1mil(0.00254cm)的钛片进行5分钟蚀刻,由此制成支撑结构。端极板是5mil(0.0127cm)的钛。The support structure was fabricated by etching a 1 mil (0.00254 cm) piece of titanium with 35% HNO3 /1.5% HF at 60°C for 5 minutes. The end plates are 5 mil (0.0127 cm) titanium.
氧化物涂层溶液是叔丁醇(试剂级)中含有0.2M的三氯化钌三水合物和0.2M的五氯化铌。The oxide coating solution was 0.2M ruthenium trichloride trihydrate and 0.2M niobium pentachloride in t-butanol (reagent grade).
通过在环境条件下在溶液中浸渍,对蚀刻后的Ti片进行浸涂。涂覆后的片侵入溶液保持约1秒然后取出。The etched Ti flakes were dip-coated by dipping in the solution under ambient conditions. The coated sheet was left in the solution for about 1 second and then removed.
每次涂覆后,在70℃对氧化物干燥10分钟,在350℃进行10分钟的热分解,然后取出冷却至室温,所有这一切均在环境气氛中进行。After each coating, the oxide was dried at 70°C for 10 minutes, thermally decomposed at 350°C for 10 minutes, and then removed to cool to room temperature, all in ambient atmosphere.
重复浸涂步骤达10层涂层(或任何期望的数量),旋转Ti片以便交替浸入各面。厚度达10微米左右。Repeat the dipping step for up to 10 coats (or any desired number), rotating the Ti sheet to dip each side alternately. The thickness is about 10 microns.
完全涂覆后的钛片在环境气氛中于350℃进行3小时的最终退火。The fully coated titanium sheets were subjected to a final anneal at 350°C for 3 hours in ambient atmosphere.
(B)电极予处理(B) Electrode pretreatment
在自身压力下,涂覆后的电极于密封容器中在280℃下与饱和蒸汽接触3小时。Under its own pressure, the coated electrode was exposed to saturated steam at 280° C. for 3 hours in a sealed container.
(C)间隔(C) Interval
在电极的一面上丝网印刷成微凸头,如以下标题为“丝网印刷”所详述的。环氧化合物是EP21AR,取自Masterbond of Hackensack,新泽西。Microprotrusions were screen printed on one side of the electrodes as detailed below under the heading "Screen Printing". The epoxy compound was EP21AR, obtained from Masterbond of Hackensack, NJ.
在空气中,环氧凸头在150℃固化4小时。接着把涂覆后的电极模压成期望的形状。The epoxy bumps were cured at 150°C for 4 hours in air. The coated electrode is then molded into the desired shape.
(D)加衬垫(D) Padded
在电极具有微凸头的一侧,设置厚1.5mil(0.00381cm)、宽30mil(0.0762cm)的改性高密度聚乙烯(HDPE,在抗穿孔和粘合力方面改性),其外围边界与电极相同,然后脉冲加热叠层。HDPE是PJX2242等级,取自Phillips-Joannaof Ladd,伊利诺斯。On the side of the electrode with a micro-protrusion, a modified high-density polyethylene (HDPE, modified in terms of anti-puncture and adhesion) with a thickness of 1.5mil (0.00381cm) and a width of 30mil (0.0762cm) is set. Same with the electrodes, then pulse heat the stack. HDPE (R) is the PJX2242 grade available from Phillips-Joanna of Ladd, Illinois.
(E)带(E) belt
设置一条厚0.9mil(0.00229cm)、宽10mil(0.0254cm)的带在机器方向纵切的Dupont T2TEFZEL膜90ZM,横跨衬垫和电极表面的窄尺寸并在微凸头之间对准。带可定位于中心、中心左测或中心右侧这三种位置之一。A 0.9 mil (0.00229 cm) thick, 10 mil (0.0254 cm) wide strip of Dupont T2 TEFZEL® film 90ZM slit in the machine direction was placed across the narrow dimension of the pad and electrode surfaces and aligned between the microprotrusions. allow. The band can be positioned in one of three positions, center, center left, or center right.
在第一衬垫上设置第二HDPE把带夹在两层衬垫之间。A second HDPE is placed on the first backing to sandwich the tape between the two backings.
对第二衬垫进行脉冲加热使其与第一衬垫粘合,并使带固定就位。Pulse heat is applied to the second liner to bond to the first liner and hold the tape in place.
(F)叠置(F) Overlap
在非金属(陶瓷)上对准夹具由5mil(0.0127cm)的端极板开始,叠置电极/微凸头/衬垫/带/衬垫组件,使组件达到期望的电容器芯片数量,最后并用5mil(0.0127cm)的平滑端极板终止组件叠置,带设置在一个以三单元为重复周期按左、中、右交错定位的位置(端部透视),光压通过一个陶瓷压板块施加在叠置组件的顶部,以使光压能在整个叠置组件上保持均匀的直线对准和接触。Alignment fixtures on non-metallic (ceramic) start with 5mil (0.0127cm) end plate, stack electrode/micro-protrusion/pad/tape/pad assembly, make the assembly reach the desired number of capacitor chips, and finally use The 5mil (0.0127cm) smooth end plate termination assembly is superimposed, and the tape is set in a three-unit repeating cycle in a position staggered to the left, center, and right (end perspective), and the light pressure is applied through a ceramic pressure plate on the The top of the stack so that the light pressure can maintain uniform alignment and contact across the stack.
(C)回流(C) reflow
使用射频感应加热器(2.5KW)对叠置组件进行加热。在三次转动中把叠置组件设置在直径为3英寸(7.62cm)的线圈中心,并以设定功率的32%加热90秒。使熔合的组件冷却至室温。The stacked assembly was heated using a radio frequency induction heater (2.5KW). The stacked assembly was centered on a 3 inch (7.62 cm) diameter coil over three revolutions and heated at 32% of the set power for 90 seconds. Allow the fused assembly to cool to room temperature.
(H)去除线带(H) Remove the tape
小心地拉线带的曝露端除去线带,留下敞开的填充孔。Carefully pull on the exposed end of the tape to remove the tape, leaving an open fill hole.
实施例2Example 2
干式预制组件的另一种制法Another method of making dry prefabricated components
(A)涂覆方法(A) Coating method
用50%HCl在75℃对1mil(0.00254cm)的钛片进行30分钟的蚀刻,由此制备成支撑结构。端极板是2mil(0.00508cm)的钛。A support structure was prepared by etching a 1 mil (0.00254 cm) piece of titanium with 50% HCl at 75°C for 30 minutes. The end plates are 2 mil (0.00508 cm) titanium.
氧化物涂层溶液是在异丙醇(试剂级)中含有0.3M的三氯化钌三水合物和0.2M的五氯化钽。The oxide coating solution was 0.3M ruthenium trichloride trihydrate and 0.2M tantalum pentachloride in isopropanol (reagent grade).
通过在环境条件下在溶液中浸渍,对蚀刻后的Ti片进行浸涂。涂覆后的片浸入溶液保持约1秒然后取出。The etched Ti flakes were dip-coated by dipping in the solution under ambient conditions. The coated sheet was dipped into the solution for about 1 second and then removed.
每次涂覆后,在环境气氛中70℃下对氧化物干燥10分钟,在每小时3立方英尺的50体积%氧和50体积%氮的气流中于330℃下进行15分钟的热分解,然后取出在环境气氛中冷却至室温。After each coating, the oxide was dried at 70°C for 10 minutes in ambient atmosphere and thermally decomposed at 330°C for 15 minutes in a flow of 50 vol% oxygen and 50 vol% nitrogen at 3 cubic feet per hour, Then remove and cool to room temperature in ambient atmosphere.
重复浸涂步骤达30层涂层(或任何期望的数量),旋转Ti片以便交替浸入各面。Repeat the dipping step for up to 30 coats (or any desired number), rotating the Ti sheet to alternately dip each side.
完全涂覆后的钛片在上述条件下进行3小时的最终退火。The fully coated titanium sheets were subjected to final annealing for 3 hours under the above conditions.
(C)间隔(C) Interval
在电极的一面上丝网印刷成VITON微凸头,如以下标题“VII、丝网印刷”所详述的。VITON (R) microprotrusions were screen printed on one side of the electrodes as detailed below under heading "VII. Screen Printing".
在空气中,VITON微凸头在150℃固化30分钟。接着把涂覆后的电极模压成期望的形状。The VITON® microprotrusions were cured at 150°C for 30 minutes in air. The coated electrode is then molded into the desired shape.
(D)加衬垫(D) Padded
在电极两侧设置厚1.0mil(0.00254cm)、宽20mil(0.0508cm)的改性高密度聚乙烯(HDPE,在抗穿孔和粘合力方面改性),其外围边界与电极相同,然后脉冲加热叠层,HDPE是PJX2242等级,取自Phillips-Joanna of Ladd,伊利诺斯。A modified high-density polyethylene (HDPE, modified in terms of anti-puncture and adhesion) with a thickness of 1.0mil (0.00254cm) and a width of 20mil (0.0508cm) is set on both sides of the electrode, and its peripheral boundary is the same as that of the electrode, and then the pulse Heating Laminate, HDPE is PJX2242 grade, obtained from Phillips-Joanna of Ladd, Illinois.
(E)带(E) belt
设置一条直径为1mil(0.00254cm)涂覆TEFLON的钨线的带,横穿衬垫和电极表面的窄尺寸并在微凸头之间对准,带可定位于中心、中心左侧或中心右侧这三种位置之一。A strip of 1 mil (0.00254 cm) diameter TEFLON® coated tungsten wire is provided across the narrow dimension of the pad and electrode surface and aligned between the microprotrusions, the strip can be positioned center, left of center, or center One of these three positions on the right.
(F)叠置(F) Overlap
叠置电极/微凸头/衬垫/带/衬垫组件,组件由2mil(0.00508cm)的端极板开始,达到所期望的电容器芯片数量,由2mil(0.00508cm)的平坦端极板终止,线带设置在一个以三个单元为重复周期按左、中、右交错定位(端部透视)的位置。Stacked electrode/microbump/pad/tape/pad assembly, assembly starts with 2mil (0.00508cm) end plate to desired number of capacitor chips and ends with 2mil (0.00508cm) flat end plate , the line belt is set in a position with three units as the repeating period according to the left, middle and right staggered positioning (end perspective).
(C)回流(C) reflow
HDPE衬垫在氮气中125℃下经120分钟,使热塑性塑料回流。组件在氮气中冷却至室温。The HDPE liner was subjected to reflow of the thermoplastic at 125°C for 120 minutes in nitrogen. The assembly was cooled to room temperature under nitrogen.
(H)线带去除(H) Ribbon removal
拉出暴露端去除线带,留下敞开的填充孔。Pull the exposed end to remove the cord, leaving an open fill hole.
实施例3Example 3
干式预制组件的又一种制法Another manufacturing method of dry prefabricated components
(A)涂覆方法(A) Coating method
用50%HCl在75℃对1mil(0.00254cm)的钛片进行30分钟的蚀刻,由此制备成支撑结构。端极板是10mil(0.0254cm)的钛。A support structure was prepared by etching a 1 mil (0.00254 cm) piece of titanium with 50% HCl at 75°C for 30 minutes. The end plates are 10 mil (0.0254 cm) titanium.
氧化物涂层溶液是在异丙醇(试剂级)中合有0.2M的三氯化钌三水合物和0.2M的五氯化钽。The oxide coating solution was 0.2M ruthenium trichloride trihydrate and 0.2M tantalum pentachloride in isopropanol (reagent grade).
通过在环境条件下,在溶液中浸渍,对蚀刻后的Ti片进行浸涂。涂敷后的片浸入溶液保持约1秒然后取出。The etched Ti flakes were dip-coated by immersion in the solution under ambient conditions. The coated sheet was dipped into the solution for about 1 second and then removed.
每次涂覆之后,在70℃对氧化物干燥10分钟,在300℃进行5分钟的热分解,然后取出冷却至室温,所有步骤均在环境气氛中进行。After each coating, the oxide was dried at 70°C for 10 minutes, thermally decomposed at 300°C for 5 minutes, and then removed to cool to room temperature, all in ambient atmosphere.
重复浸涂步骤达10层涂层(或任何期望的数量),旋转Ti片以便交替浸入各面。Repeat the dipping step for up to 10 coats (or any desired number), rotating the Ti sheet to dip each side alternately.
完全涂覆后的片在环境气氛中于300℃进行3小时的最终退火。The fully coated sheets were subjected to a final anneal at 300° C. for 3 hours in ambient atmosphere.
(B)电极予处理(B) Electrode pretreatment
在自身压力下,涂覆后的电极于密封容器中260℃下与饱和蒸汽接触2小时。Under its own pressure, the coated electrode was exposed to saturated steam at 260° C. for 2 hours in a sealed container.
(C)间隔(C) Interval
在电极的一侧丝网印刷成微凸头,加以下标题为“VII,丝网印刷”所详述的。环氧化合物是EP21AR等级,取自Masterboud,Hackensack,新泽西。Microprotrusions were screen printed on one side of the electrode, as detailed below under the heading "VII, Screen Printing". The epoxy compound was grade EP21AR from Masterboud, Hackensack, NJ.
在空气中,环氧凸头在150℃固化4小时。接着把涂覆后的电极模压成期望的形状。The epoxy bumps were cured at 150°C for 4 hours in air. The coated electrode is then molded into the desired shape.
(D)加衬垫(D) Padded
在电极具有微凸头的一侧,设置厚1.5mil(0.00381cm)、宽30mil(0.0762cm)的改性高密度聚乙烯(HDPE,在抗穿孔和粘合力方面改性),其外围边界与电极相同,然后脉冲加热叠层。HDPE是PJX2242等级,取自Phillips-Joanna of Ladd,伊利诺斯。On the side of the electrode with a micro-protrusion, a modified high-density polyethylene (HDPE, modified in terms of anti-puncture and adhesion) with a thickness of 1.5mil (0.00381cm) and a width of 30mil (0.0762cm) is set. Same with the electrodes, then pulse heat the stack. HDPE (R) is a PJX2242 grade available from Phillips-Joanna of Ladd, Illinois.
(E)带(E) belt
设置一条厚1mil(0.00254cm)、宽10mil(0.0254cm)的带(TEFZEL),横跨衬垫和电极表面的窄尺寸并在微凸头之间对准。带可定位于中心、中心左侧或中心右侧这三种位置之一。A strip (TEFZEL (R) ) 1 mil (0.00254 cm) thick by 10 mil (0.0254 cm) wide was placed across the narrow dimension of the pad and electrode surface and aligned between the microprotrusions. The band can be positioned in one of three positions: center, left of center, or right of center.
在第一衬垫上设置第二层HDPE衬垫把带夹在两层衬垫之间。A second layer of HDPE (R) liner is placed over the first liner to sandwich the tape between the two layers of liner.
对第二衬垫进行脉冲加热使其与第一衬垫粘合,并使带固定就位。Pulse heat is applied to the second liner to bond to the first liner and hold the tape in place.
(F)叠置(F) Overlap
叠置电极/微凸头/衬垫/带/衬垫组件,组件由10mil(0.0254cm)的端极板开始,达到所期望的电容器芯片数量。由10mil(0.0254cm)的端极板开始,达到所期望的电容器芯片数量,由10mil(0.0254cm)的平坦端极板终止叠置,带设置在一个以三单元为重复周期按左、中、右交错定位(端部透视)。Stack electrode/microbump/pad/tape/pad assemblies starting with 10 mil (0.0254cm) end plates to the desired number of capacitor chips. Start with a 10mil (0.0254cm) terminal plate, reach the desired number of capacitor chips, and terminate the stack with a 10mil (0.0254cm) flat terminal plate, with a three-unit repeating cycle according to left, middle, Right staggered positioning (end perspective).
(G)回流(G) reflow
衬垫在氮气中160℃下经45分钟,使热塑牲塑料回流。组件在氮气中冷却至室温。The gasket was subjected to reflow of the thermoplastic at 160°C for 45 minutes in nitrogen. The assembly was cooled to room temperature under nitrogen.
(H)去除带(H) Removal belt
小心拉曝露端去除带,留下敞开的填充孔。Carefully pull the exposed end to remove the tape, leaving the fill hole open.
实施例4Example 4
干式预制组件的又一种制法Another manufacturing method of dry prefabricated components
(A)涂覆方法(A) Coating method
用50%HCl在75℃对1mil(0.00254cm)的钛片进行30分钟的蚀刻,由此制成支撑结构。端极板是5mil(0.0127cm)的钛。The support structure was made by etching a 1 mil (0.00254 cm) piece of titanium with 50% HCl at 75°C for 30 minutes. The end plates are 5 mil (0.0127 cm) titanium.
氧化物涂层溶液是在乙醇(试剂级)中含有0.2M(三氯化钌三水合物和0.2M的(二-异丙氧化物(di-isopropxide))双(2,4-戊二酸(Pent-anedinate))钛。The oxide coating solution was 0.2 M (ruthenium trichloride trihydrate and 0.2 M (di-isopropxide)) bis(2,4-pentanedioic acid) in ethanol (reagent grade). (Pent-anedinate)) Titanium.
通过在环境条件下在溶液中浸渍,对蚀刻后的Ti片进行浸涂,涂覆后的钛片浸入溶液保持约1秒然后取出。The etched Ti flakes were dip-coated by dipping in the solution at ambient conditions, the coated Ti flakes were immersed in the solution for about 1 second and then removed.
每次涂覆之后,在70℃对氧化物干燥10分钟,在氧气中于350℃进行5分钟的热分解,然后取出冷却至室温,所有步骤均在环境气氛中进行。After each coating, the oxide was dried at 70°C for 10 minutes, thermally decomposed in oxygen at 350°C for 5 minutes, and then removed to cool to room temperature, all in ambient atmosphere.
重复浸涂步骤达30层涂层(或者任何期望的数量),旋转Ti片以便交替侵入各面。The dip coating step is repeated for up to 30 coats (or any desired number), rotating the Ti sheet to alternately invade each side.
完全涂覆后的钛片在氧气氛中于350℃进行3小时的最终退火。The fully coated titanium sheets were subjected to final annealing at 350°C for 3 hours in an oxygen atmosphere.
(C)间隔(C) Interval
在电极的一侧上通过掩模热喷涂形成微凸头。热喷涂材料是TEFLON,取自E.I.Du Pont de Nemoure & Co,,Wilmington,特拉华。Microprotrusions were formed by thermal spraying through a mask on one side of the electrode. The thermal spray material was TEFLON (R) , available from EI Du Pont de Nemoure & Co, Wilmington, Delaware.
在空气中TEFLON微凸头于300℃固化0.5小时,接着把涂覆后的电极模压成期望的形状。The TEFLON® microprotrusions were cured at 300°C for 0.5 hour in air, followed by molding the coated electrode into the desired shape.
(D)加衬垫(D) Padded
在电极具有微凸头的一侧,设置厚1.5mil(0.00381cm)、宽30mil(0.0762cm)的改性高密度聚乙烯(HDPE,在抗穿孔和粘合力方面改性),其外围边界与电极相同,然后脉冲加热叠层。HDPE是PJX2242等级,取自Phillips-Joanna of Ladd,伊利诺斯。On the side of the electrode with a micro-protrusion, a modified high-density polyethylene (HDPE, modified in terms of anti-puncture and adhesion) with a thickness of 1.5mil (0.00381cm) and a width of 30mil (0.0762cm) is set. Same with the electrodes, then pulse heat the stack. HDPE is PJX2242 grade, obtained from Phillips-Joanna of Ladd, Illinois.
(E)带(E) belt
设置一条厚1mil(0.00254cm)、宽10mil(0,0254cm)的带(TEFZEL),横跨衬垫和电极表面的窄尺寸并在微凸头之间对准。带可定位于中心。中心左侧或中心右侧这三种位置之一。A strip (TEFZEL (R) ) 1 mil (0.00254 cm) thick by 10 mil (0,0254 cm) wide was placed across the narrow dimension of the pad and electrode surface and aligned between the microprotrusions. The band can be positioned in the center. One of three positions left of center or right of center.
在第一衬垫上设置第二HDPE衬垫,把线带夹在两层衬垫之间。A second HDPE (R) liner was placed over the first liner, with the tape sandwiched between the two liners.
对第二衬垫进行脉冲加热,使其与第一衬垫粘合并使带固定就位。Pulse heat is applied to the second liner to bond it to the first liner and hold the tape in place.
(F)叠置(F) Overlap
叠置电极/微凸头/衬垫/线带/衬垫组件,由5mil(0.0127cm)的端极板元件开始,达到期望的电容器芯片数量,并由5mil(0.0217cm)的平坦端极板终止组件,带设置在一个以三单元为重复周期按左、中、右交错定位(端部透视)的位置。Stacked electrode/microbump/pad/wire tape/pad assembly starting with 5mil (0.0127cm) end plate elements to desired number of capacitor chips and ending with 5mil (0.0217cm) flat end plate Termination assembly, band set in a three-unit repeating cycle left, center and right staggered positioning (end perspective).
(G)回流(G) reflow
在氮气中于190℃衬垫经30分钟,使热塑性塑料回流,在氮气中组件冷至室温。The thermoplastic was reflowed at 190°C for 30 minutes in the pad under nitrogen, and the assembly was cooled to room temperature under nitrogen.
(H)线带去除(H) Ribbon removal
小心拉曝露端去除线带,留下敞开的填充孔。Carefully pull on the exposed end to remove the tape, leaving an open fill hole.
实施例5Example 5
干式预制组件的又一种制法Another method of making dry prefabricated components
(A)涂覆方法(A) Coating method
用1%HF/20%HNO3在20℃对0.8mil(0.002032cm)的锆片进行1分钟的蚀刻,由此制成支撑结构。端极板是2mil(0.00508cm)的锆。The support structure was made by etching a 0.8 mil (0.002032 cm) piece of zirconium with 1% HF/20% HNO 3 at 20° C. for 1 minute. The end plate is 2 mil (0.00508 cm) zirconium.
氧化物涂层溶液是在异丙醇(试剂缀)中含有0.2M的三氯化钌三水合物和0.1M的五氯化钽。The oxide coating solution was 0.2M ruthenium trichloride trihydrate and 0.1M tantalum pentachloride in isopropanol (reagent).
通过在环境条件下在溶液中浸渍,对蚀刻后的Ti片进行浸涂。涂覆后的Ti片浸入溶液保持约1秒然后取出。The etched Ti flakes were dip-coated by dipping in the solution under ambient conditions. The coated Ti sheets were immersed in the solution for about 1 second and then removed.
每次涂覆之后,在85℃对氧化物干燥10分钟,于301℃进行7分钟的热分解,然后取出冷至室温,所有步骤均在环境气氛中进行。After each coating, the oxide was dried at 85°C for 10 minutes, thermally decomposed at 301°C for 7 minutes, and then removed to cool to room temperature, all in ambient atmosphere.
重复浸敷步骤达10层涂层(或任何期望的数量),旋转Ti片以便交替浸入各面。Repeat the dipping step for up to 10 coats (or any desired number), rotating the Ti sheet to dip each side alternately.
在环境气氛中310℃下对完全涂覆的Ti片进行2小时的最终退火。The fully coated Ti flakes were subjected to a final anneal at 310 °C for 2 h in ambient atmosphere.
(C)间隔(C) Interval
在电极的一侧通过掩模热喷涂形成微凸头。热喷涂材料是TEFLON,取自E.I.DuPont de Nemours & co.,Wilmington,特拉华。Microprotrusions were formed on one side of the electrode by thermal spraying through a mask. The thermal spray material was TEFLON (R) , available from EI DuPont de Nemours & co., Wilmington, Delaware.
在空气中310℃下将TEFLON微凸头固化1小时。接着把涂覆后的电极模压成期望的形状。The TEFLON® microprotrusions were cured in air at 310°C for 1 hour. The coated electrode is then molded into the desired shape.
(D)加衬垫(D) Padded
在电极具有微凸头的一侧设置厚1.5mil(0.00381cm),宽30mil(0.0762cm)的聚丙烯衬垫,其外围边界与电极相同,然后脉冲加热叠层。A 1.5 mil (0.00381 cm) thick, 30 mil (0.0762 cm) wide polypropylene liner is placed on the side of the electrode with a micro-protrusion, and its peripheral boundary is the same as that of the electrode, and then pulsed to heat the stack.
(E)带(E) belt
设置一条涂覆TEFLON的直径为1mil(0.00254cm)的钨带,横跨衬垫和电极表面的窄尺寸,并在微凸头之间对准。带可定位于中心、中心左侧或中心右侧这三种位置之一。A 1 mil (0.00254 cm) diameter tungsten strip coated with TEFLON® was placed across the narrow dimension of the pad and electrode surface and aligned between the microprotrusions. The band can be positioned in one of three positions: center, left of center, or right of center.
在第一衬垫上设置第二聚丙烯衬垫,把线带夹在两层衬垫之间。A second polypropylene backing was placed over the first backing, with the cord tape sandwiched between the two backings.
对第二衬垫进行脉冲加热使其与第一衬垫粘合,并使线带固定就位。Pulse heat is applied to the second liner to bond to the first liner and hold the tape in place.
(F)叠置(F) Overlap
叠置电极/微凸头/衬垫/线带/衬垫组件,由2mil(0,00508cm)的端极板元件开始,达到期望的电容器芯片数量,并由2mil(0.00508cm)的平坦端极板终止组件,带设置在一个以三单元为重复周期按左、中、右交错定位(端部透视)的位置。Stacked electrode/microbump/pad/wire tape/pad assembly starting with 2mil (0,00508cm) termination plate elements to desired number of capacitor chips and progressing from 2mil (0.00508cm) flat termination Plate termination assembly, band set in a position staggered left, center and right (end perspective) with a repeating cycle of three units.
(G)回流(G) reflow
在氮气中195℃对衬垫60分钟,使热塑性塑料回流。在氮气中组件冷至室温。The thermoplastic was reflowed at 195°C for 60 minutes against the liner under nitrogen. The assembly was cooled to room temperature under nitrogen.
(H)线带去除(H) Ribbon removal
拉出暴露端去涂线带,留下敞开的充孔。Pull the exposed end to apply the tape, leaving the fill hole open.
实施例6Example 6
电容器芯片气隙间隔的填充Filling of Capacitor Chip Air Gap Intervals
按下列步骤用电解液充入干式预制组件10。可以采用许多可能的干式预制组件构形中的任一种。The dry
(H)回填(H) backfill
人工去除线带,敞开填充孔,把叠置的组件放入真空室,抽真空至35毫乇以下达5至60分钟。把由氮除去空气,将3.8M的H2SO4液态电解质引入真空室并填充入电极之间的真空间隔。The tape is manually removed, the fill hole is opened, and the stacked assembly is placed in a vacuum chamber and evacuated to below 35 mTorr for 5 to 60 minutes. The air was removed by nitrogen, and the 3.8M H2SO4 liquid electrolyte was introduced into the vacuum chamber and filled into the vacuum space between the electrodes.
(I)密封填充孔开口(I) Seal fill hole opening
从真空室中取出已充入电解液的组件,用去离子水漂洗,除去多余的电解液并干燥。在整个填充孔口上设置HDPE膜((厚1.5mil(0.00381cm)),并通过脉冲加热封住整个孔。Remove the electrolyte-filled assembly from the vacuum chamber, rinse with deionized water, remove excess electrolyte, and dry. A HDPE film ((1.5 mil (0.00381 cm) thick)) was placed over the entire fill orifice and the entire orifice was sealed by pulse heating.
(J)调整(J) adjust
对该装置充电直到完全充电,由0.1V/电容器芯片开始,按0.1V/电容器芯片增大,直至1V/电容器芯片。The device was charged until fully charged, starting at 0.1 V/capacitor chip and increasing by 0.1 V/capacitor chip, up to 1 V/capacitor chip.
(K)测试(K) test
按传统方式测试该装置,1V/电容器芯片的泄漏电流小于25μA/cm2,每个电容器芯片的电容密度大于0.1F/cm2。一个10V装置的高度不大于0.05英寸,一个40V装置其高度不大于0.13英寸,一个100V装置其高度不大于0.27英寸。The device was tested in a conventional manner, and the leakage current of 1V/capacitor chip was less than 25 μA/cm 2 , and the capacitance density per capacitor chip was greater than 0.1 F/cm 2 . The height of a 10V device is 0.05 inches or less, the height of a 40V device is 0.13 inches or less, and the height of a 100V device is 0.27 inches or less.
基于硫酸电解液的各种几何形状和构形的性能如表1所示The properties of various geometries and configurations based on sulfuric acid electrolyte are shown in Table 1
表1Table 1
超级电容器装置的性能
实施例7Example 7
干式预制组件的另一种填充方法Another filling method for dry prefabricated components
按以下步骤用电解液充入干式预制组件10。可以采用许多可能的干式预制组件构形中的任一种。The dry
(H)回填(H) backfill
除去线敞开填充孔。把叠置的组件放入真空室并抽真空至35毫乇以下达5至60分钟,由氮除去空气,将碳酸丙烯酯(propylenecarbonate)中含0.5MKPF6的液态无水电解质引入真空室并充入电极之间的真空间隔。Remove the wire to open the fill hole. Put the stacked assembly into a vacuum chamber and evacuate to 35 millitorr for 5 to 60 minutes, remove the air by nitrogen, introduce a liquid anhydrous electrolyte containing 0.5MKPF6 in propylene carbonate (propylene carbonate) into the vacuum chamber and fill it with Vacuum space between electrodes.
(I)密封填充孔开口(I) Seal fill hole opening
从真空室取出已充电解液的组件,除去多余的电解液。在整个填充孔开口上设置HDPE膜(厚1.5mil(0.00381))并脉冲加热封住整个孔。Remove the electrolyte-charged components from the vacuum chamber and remove excess electrolyte. A HDPE film (1.5 mil (0.00381) thick) was placed over the entire fill hole opening and pulsed heat sealed the entire hole.
(J)调整(J) adjust
对该装置充由直到完全充电,由0.1V/电容器芯片开始增大,直至1.5V/电容器芯片。Charge the device until fully charged, starting at 0.1V/capacitor chip and increasing to 1.5V/capacitor chip.
(K)测试(K) test
按传统方法测试该装置,1.5V/电容器芯片的泄漏电流约为100μA/cm2,对于有10个电容器芯片的装置,电容密度约为4mf/cm2。The device was tested conventionally, and the leakage current was about 100 μA/cm 2 at 1.5 V/capacitor chip, and the capacitance density was about 4 mf/cm 2 for a device with 10 capacitor chips.
实施例8Example 8
装置的后处理条件The post-processing conditions of the device
以下是利用各种气体后调整技术来调节电极静止电势的装置的电性能表(表3),由此可使充有4.6M硫酸电解液的多个电容器芯片装置至少充电至1V/电容器芯片,并可观察到泄漏电流降低。这种处理是在衬垫材料的回流之前、之中和/或之后进行的。气体处理温度低于衬垫回流所用温度,回流中气氛改为惰性气体如氮气或氩气。为了衬垫材料回流之后的处理,在处理前除去接头,在处理过程中,周期地抽真空并充入反应气体。The following is a table (Table 3) of the electrical properties of devices utilizing various gas post-conditioning techniques to adjust the resting potential of electrodes, whereby multiple capacitor chip devices filled with 4.6M sulfuric acid electrolyte can be charged to at least 1V/capacitor chip, A decrease in leakage current can be observed. This treatment is performed before, during and/or after reflow of the liner material. The gas treatment temperature is lower than that used for the reflow of the liner, and the atmosphere in the reflow is changed to an inert gas such as nitrogen or argon. For processing after reflow of the gasket material, the joints are removed prior to processing, during which the vacuum is periodically evacuated and the reactive gas charged.
表3 table 3
对应于各种后调整的装置性能
利用丝网印刷形成微凸头 Forming micro-protrusions using screen printing
实施例9Example 9
利用丝网印刷在薄基片上的多孔涂层上制成环氧树脂微凸头Fabrication of Epoxy Microprotrusions on Porous Coatings on Thin Substrates by Screen Printing
(A)丝网制备-把一个325目的不锈钢丝网铺设在一个标准丝网印刷框架上。该丝网边缘粘合(Dexer环氧608净料)于一个较小的厚1-1.5mil(0.00254-0.00381cm)的黄铜片上,该黄铜片有钻成的孔(直径6.3mil(0.016cm))或蚀刻成期望的图形。除去被黄铜片覆盖区域筛孔,使粘合到网孔上的剩下的黄铜片边缘安装在框架上。(A) Screen Preparation - A 325 mesh stainless steel screen was laid on a standard screen printing frame. The screen is edge bonded (Dexer Epoxy 608 clear) to a smaller 1-1.5 mil (0.00254-0.00381 cm) thick brass sheet with drilled holes (diameter 6.3 mil (0.016 cm) cm)) or etched into the desired pattern. Remove the screen mesh in the area covered by the brass sheet, leaving the remaining edge of the brass sheet bonded to the mesh to fit on the frame.
(B)样品夹持-在一块多孔铝夹持板上抽真空,该夹持板上的孔的平均孔直径为10μm,在印刷过程中使用该板夹持厚1mil(0.00254cm)的多孔氧化物涂料。(B) Sample Holder - Vacuum is drawn on a porous aluminum holder plate with an average pore diameter of 10 μm, which is used to hold a 1 mil (0.00254 cm) thick porous oxide film during the printing process. object coating.
(C)环氧树脂-添加二氧化硅填料,把双组分环氧树脂MasterBond EP21AR改性至所需粘度(能变性:300000~400000cps)。从Master Bond,Inc.of Haokensack,新泽西可买到具有所需粘度的填充的环氧树脂。按说明制备该环氧树脂,作为可流动的流体的有效有留时间约为30分钟。(C) Epoxy resin - add silica filler, modify the two-component epoxy resin MasterBond EP21AR to the required viscosity (can be denatured: 300000 ~ 400000cps). Filled epoxy resins of the desired viscosity are commercially available from Master Bond, Inc. of Haokensack, New Jersey. The epoxy was prepared as directed and had an effective dwell time of about 30 minutes as a flowable fluid.
(D)丝网印刷参数(D) Screen printing parameters
辗滚速度:1-2英寸/秒Rolling speed: 1-2 inches/second
涂点(snap off):20-30mil(0.0508-0.0762cm)Paint point (snap off): 20-30mil (0.0508-0.0762cm)
为保证均匀涂覆,环氧树脂的恒温和恒湿是重要的。典型的条件是约40~70%相对湿度和约20-25℃的温度。Constant temperature and humidity of the epoxy resin is important to ensure uniform coating. Typical conditions are about 40-70% relative humidity and a temperature of about 20-25°C.
(E)印刷环氧树脂图形-制成高度基本上是1mil(0.00254cm)、直径约为7.5mil(0.019cm)的环氧树脂凸起阵列,电极上的典型图形由按40mil(0.1016cm)中心距间隔淀积的微凸头阵列构成。此外,通过把中心一中心间距减小至20mil(0.508cm),使电极外围处的微凸头密度增大,丝网印刷的环氧树脂构形在150℃最少固化4小时。(E) Printing epoxy resin pattern - make an epoxy resin bump array with a height of 1mil (0.00254cm) and a diameter of about 7.5mil (0.019cm), and a typical pattern on the electrode is by 40mil (0.1016cm) The array of micro-protrusions deposited at intervals between centers is formed. In addition, the screen-printed epoxy topography was cured at 150°C for a minimum of 4 hours by reducing the center-to-center spacing to 20 mil (0.508 cm) and increasing the density of microprotrusions at the periphery of the electrodes.
实施例10Example 10
丝网印刷形成环氧树脂微凸头 Epoxy resin micro-protrusions formed by screen printing
(A)丝网制备——将表面上无乳胶的230或325目丝网(8×10英寸不锈钢)安装在标准印刷框架上,用作基块。用取自Dexter的Dexter环氧树脂608净料把蚀刻、钻成或冲成的模版(6.0×8.5的钼)边缘粘合定位于丝网的后侧。在整个横版丝网构件上设置MYLAR,并施加压力使环氧树脂平滑形成均匀层。(A) Screen Preparation - 230 or 325 mesh screens (8 x 10 inch stainless steel) with a latex-free surface were mounted on standard printing frames and used as base blocks. An etched, drilled or punched stencil (6.0 x 8.5 molybdenum) was edge bond positioned on the back side of the screen using Dexter Epoxy 608 Clear from Dexter. MYLAR® was placed over the entire cross screen member and pressure was applied to smooth the epoxy into a uniform layer.
然后轻打丝网、在丝网顶面施加环氧树脂、在整个区域设置MYLAR片,使环氧树脂平滑。然后除去丝网顶面上的MYLRAR片。然后把丝网模片版组合件放置于120℃的烘箱,在环境气氛中固化环氧树脂5分钟。也可以在环境温度固化环氧树脂30-60分钟。The screen was then tapped, epoxy was applied to the top surface of the screen, and a MYLAR( R) sheet was placed over the entire area to smooth the epoxy. The MYLRAR (R) sheet on top of the screen was then removed. The screen stencil assembly was then placed in an oven at 120°C to cure the epoxy in ambient atmosphere for 5 minutes. The epoxy can also be cured at ambient temperature for 30-60 minutes.
从烘箱取出丝网模版后,立即把丝网后侧的MYLAR小心剥形。随后用锋利的刃口切去顶面的网筛,必须小心避免模版的暴出。由于从模版图形上移走网筛,任何热稳定的热固性粘合剂如环氧树脂可施加于切后的网筛模版外围,用MYLAR复盖,使环氧树脂平滑,保证丝网边缘固定于模版。在烘箱中使环氧树脂固化5分钟。所得构件是由丝网展开绷紧的模版,准备印刷。Immediately after removing the screen stencil from the oven, carefully peel off the MYLAR® on the back side of the screen. Then use a sharp edge to cut off the top mesh screen, care must be taken to avoid the stencil bursting out. Since the screen is removed from the stencil pattern, any thermally stable thermosetting adhesive such as epoxy can be applied to the periphery of the cut screen stencil and covered with MYLAR® to smooth the epoxy and secure the edges of the screen on the template. Allow the epoxy to cure for 5 minutes in the oven. The resulting component is a stencil that is stretched taut from the screen, ready for printing.
(B)样品夹持——使用孔隙率为36.5%(30-60%的孔隙率是可接受的)、孔直径为4.5-6μ的多孔陶瓷夹持(如图8)板(CeramiconDesigns,Golden,科罗拉多,P-6-C材料),在印刷过程中夹持厚1mil)0.00254cm)的多孔氧化物涂料,经多孔陶瓷板抽真空。陶瓷板切成适当尺寸(待印刷的基片的尺寸和形状)。该陶瓷板然后插入可安装于丝网印刷机的铝(钢等)架277和环氧树脂或其它粘合剂。然后小心地研磨磨光陶瓷板至与金属架尽可能地齐平。加定位销278、279和280,利用孔281、282和283把基片111A夹持在适当的位置。(B) Sample holder—use a porous ceramic holder (as shown in Figure 8) plate (CeramiconDesigns, Golden, Colorado, P-6-C material), a porous oxide coating with a thickness of 1 mil) and 0.00254 cm) was clamped during the printing process, and vacuum was drawn through a porous ceramic plate. The ceramic plate is cut to size (the size and shape of the substrate to be printed). The ceramic plate is then inserted into an aluminum (steel, etc.) frame 277 and epoxy or other adhesive that can be mounted to a screen printer. The ceramic plate is then carefully ground to be as flush as possible with the metal frame. Locating pins 278, 279 and 280 are added and holes 281, 282 and 283 are used to hold
(C)环氧树脂-Master Bond EP21ART(一种双组分环氧树脂(33wt%的聚胺固化剂和67wt%的液态环氧树脂)粘度约为150000~600000cps)。按说明制备该环氧树脂。作为可流动的流体的有效存留时间约为30分钟。(C) Epoxy Resin - Master Bond EP21ART® (a two-component epoxy resin (33 wt% polyamine curing agent and 67 wt% liquid epoxy resin) with a viscosity of about 150000-600000 cps). The epoxy resin was prepared as directed. The effective residence time as a flowable fluid is about 30 minutes.
(D)丝网印刷参数(D) Screen printing parameters
辗滚速度:1-2英寸/秒(取决于环氧树脂的粘度)Rolling speed: 1-2 inches/second (depending on the viscosity of the epoxy resin)
涂点(snap off):20-30mil(0.0050-0.0076cm)(与丝网张力有关,并能适当调节)Snap off: 20-30mil (0.0050-0.0076cm) (related to the tension of the screen and can be adjusted appropriately)
(E)印刷的环氧树脂图形——制成高度基本为1~1.25mil(0.00254~0.00316cm)、直径为7.5mil(0.019cm)的环氧树脂凸头阵列。电极上的一个典型图形由按中心-中心间隔40mil(0.1cm)淀积的微凸头阵列构成。此外,通过把中心-中心间距减小至20mil(0.0508cm),使围绕电极外围的微凸头的密度增大。丝网印刷后的环氧树脂构形在环境气氛中于150℃固化4~12小时。(E) Printed epoxy resin pattern—make an epoxy resin bump array with a height of 1-1.25 mil (0.00254-0.00316 cm) and a diameter of 7.5 mil (0.019 cm). A typical pattern on the electrode consists of an array of microprotrusions deposited at 40 mil (0.1 cm) center-to-center spacing. In addition, by reducing the center-to-center spacing to 20 mil (0.0508 cm), the density of microprotrusions around the periphery of the electrode was increased. The screen-printed epoxy resin configuration was cured at 150° C. for 4-12 hours in ambient atmosphere.
实施例11Example 11
另一种丝网印刷的参数Another screen printing parameter
(A)隔离凸头一一隔离凸头的高度范围在0.001~0.004英寸(0.00254~0.01016cm),宽0.006~0.012英寸(0.01524~0.03038cm)。隔离凸头可以是圆点、方形、矩形或这些形状的组合。凸头的宽度随凸头高度的增高而增大。(A) Spacer Protrusions—The spacer protrusions have a height ranging from 0.001 to 0.004 inches (0.00254 to 0.01016 cm) and a width of 0.006 to 0.012 inches (0.01524 to 0.03038 cm). Spacer tabs can be dots, squares, rectangles, or a combination of these shapes. The width of the bump increases with the height of the bump.
(B)隔离图形一一在电极基片上采用两种图形,有效区域和粘合边界区域,有效区域的隔离凸按0.040×0.040英寸(0.1016×0.1016cm)的中心-中心间隔定位并且通常是圆点。粘合边界区域具有增大的凸头密度,其中心-中心间隔为0.020×0.020英寸(0.0508×0.0508cm)。矩形的行交替位于圆点的列之间。(B) Isolation pattern—two patterns are used on the electrode substrate, the active area and the bonded border area. The isolation protrusions in the active area are positioned at a center-to-center interval of 0.040×0.040 inches (0.1016×0.1016cm) and are usually circular point. The bonded border region had increased bump density with a center-to-center spacing of 0.020 x 0.020 inches (0.0508 x 0.0508 cm). Rows of rectangles alternate between columns of dots.
(C)丝网制备一一在一个CAD(计算机辅助设计)系统完成隔离构形的设计。该CAD电子数据被转换成Gerber图案文件,在丝网制造中使用该图案文件来产生原图,为丝网印刷机制成期望厚度的模版。该丝网准备采用SMT(加利福尼亚,Santa Clara的丝网制造技术)。(C) Screen preparation—the design of the isolation configuration was done in a CAD (Computer Aided Design) system. This CAD electronic data is converted into a Gerber pattern file, which is used in screen manufacturing to generate artwork to make stencils of the desired thickness for the screen printing machine. The screen is ready for SMT (Screen Manufacturing Technology, Santa Clara, California).
(D)电极真空板(工件夹具)——一块多孔陶瓷板(GeramlconDesigns,Goden,科罗拉多,P-G-C材料)修整成比电极外围小0.050,并装配进设计好的铝板中,并用环氧树脂粘合,将铝板安装在丝网印刷机中。把顶表面和底表面研磨磨光并使其平行,用多个销围绕居中的电极边缘插入,从而形成用于电极基片定产位的角挡。(D) Electrode vacuum plate (workpiece fixture)—a porous ceramic plate (GeramlconDesigns, Goden, Colorado, P-G-C material) trimmed to be 0.050 smaller than the periphery of the electrode and fitted into the designed aluminum plate and bonded with epoxy resin, Mount the aluminum plate in the screen printing machine. The top and bottom surfaces are ground and parallel, and a plurality of pins are inserted around the centered electrode edge to form corner stops for positioning the electrode substrate.
(E)环氧树脂——通过添加二氧化硅填充物,把双组分环氧树脂Master Bond EP21AR改性至期望的粘度(触变的300000~400000CPS)。由新译西的Master Bond,Inc.of Hackeusack可买到具有期望粘度的加填充料后的环氧树脂。按说明制备环氧树脂,作为可流动流体的有效留存时间约为30分钟。(E) Epoxy resin - by adding silica filler, modify the two-component epoxy resin Master Bond EP21AR to the desired viscosity (thixotropic 300000 ~ 400000CPS). Filled epoxy resins of the desired viscosity are commercially available from Master Bond, Inc. of Hackeusack of New Transit. Epoxy was prepared according to the instructions, and the potable time as a flowable fluid was about 30 minutes.
(F)丝网印刷参数(F) Screen printing parameters
厚膜丝网印刷机Thick film screen printing machine
辗滚硬度计 40~100型ARolling hardness tester 40~100 type A
辗滚速度 1~2英寸/秒
辗滚压力 10~15磅Rolling pressure 10-15 lbs
辗滚向下制动 0.010~最大,英寸Roll down brake 0.010~maximum, inches
涂点(snap off) 0.010~0.030英寸(0.0254~0.0762cm)Paint point (snap off) 0.010~0.030 inches (0.0254~0.0762cm)
实施例12Example 12
微凸头的热辊光刻制造Thermal roll lithography fabrication of microprotrusions
(A)把厚1.5mil(0.0038cm)的高一致性焊接掩模ConforMASK2000切成与电极相同的尺寸。(A) A 1.5 mil (0.0038 cm) high conformance solder mask, ConforMASK® 2000, was cut to the same size as the electrodes.
(B)除去光刻胶膜381与电极111A之间的分离片382之后,在电极材料表面111A上设置Confor MASK膜由此施加光刻胶膜381,在150°F使该叠层通过加热辊(384和385),使光刻胶膜381与电极表面111A粘合。然后除去光刻胶膜外侧上的聚酯覆盖片382A。(B) After removing the
(C)含有透明孔(开口388)行的暗区掩膜387设置在光刻胶381上。典型的图形由直径为6mil(0.0212cm)、中心-中心间隔为40mil(0.1cm)的孔阵列构成,该图形在电极的边界处有三行为高密度(中心-中心间距为20mil(0.0508cm)。(C) A
(D)膜381通过孔388和掩模387在传统紫外线光源即水银蒸汽灯389下曝光约20秒。然后除去掩模。(D)
(E)通过置入含1%碳酸钾的液体槽内,经1.5分钟将光刻胶未曝光的区域显影或剥离。(E) Develop or strip the unexposed areas of the photoresist by placing in a bath containing 1% potassium carbonate for 1.5 minutes.
(F)然后用去离子水对具有微凸头(离散小点)的电极表面进行情洗,在10%的硫酸液槽内放置1.5分钟,最后用去离子水漂洗。(F) Then wash the surface of the electrode with micro-protrusions (discrete dots) with deionized water, place it in a 10% sulfuric acid tank for 1.5 minutes, and finally rinse with deionized water.
(G)首先将微凸头13在紫外光下曝光,在传统的空气烘箱中300°F下对微凸头(离散小点)进行1小时的最终固化。(G) The
制成后的电极111A可直接使用或按上述那样处理。The fabricated
实施例13Example 13
光刻胶的真空叠积Vacuum deposition of photoresist
(A)把厚2.3mil(0.0058cm)的高性能焊接掩模Confor MASK2000切成稍大于电极。(A) A 2.3 mil (0.0058 cm) high performance solder mask, Confor MASK® 2000, was cut slightly larger than the electrodes.
(B)使用724或730型Dynachem真空敷料机,采用标准操作条件(160℃,0.3毫巴)把光刻胶膜381真空叠积于电极111A,并置于支承背板上。除去聚酯覆盖层382A。(B) Using a Dynachem Vacuum Applicator Model 724 or 730, a
(C)在光刻胶膜831上设置含有多行透明孔388的暗区掩模387。典型的图形包括直径为6mil(0.0015cm)、中心-中间隔为40mil(0.102cm)的孔的阵列,该图形在电极边界处有三行为高密度(中心-中心间距为20mil(0.0054cm))的孔。(C) A
(D)在功率为3~7KW的非平行紫外光源下对该薄膜曝光20~40秒。(D) exposing the film to a non-parallel ultraviolet light source with a power of 3-7KW for 20-40 seconds.
(E)在一个传送带式喷涂显影装置中,使用0.5%的碳酸钾对光刻胶未曝光区域进行显影和剥离,然后用去离子水漂洗及涡轮干燥。(E) The unexposed areas of the photoresist were developed and stripped with 0.5% potassium carbonate in a conveyorized spray developer, rinsed with deionized water, and turbo dried.
(F)按两步工艺进行微凸头拉线钉的最终固化,首先在Dynachem UVCS933装置中把微凸头曝光于紫外光,然后把其置于强制送风烘箱中干燥,在300~310°F持续75分钟。(F) The final curing of the micro-protrusion pull staples is carried out in a two-step process. First, the micro-protrusions are exposed to ultraviolet light in a Dynachem UVCS933 device, and then placed in a forced-air oven to dry at 300-310°F. for 75 minutes.
制成的电极可以直接使用,或者按上述那样进一步处理。The fabricated electrodes can be used directly, or further processed as described above.
实施例14Example 14
用于控制孔隙率的表面活性剂 Surfactants for porosity control
在搅拌和轻微加热的同时,向1升的异丙醇中加入32克十六烷基三甲基溴化铵。大约1小时之后,在该透明溶液中加入73克TaCl5和47克RuCl3·H2O。由300℃下5分钟的中间热解和300℃下3小时的最终热解来完成标准的涂覆工艺。涂层的平均孔直径增大至约45A。在260℃、680磅/英寸2的蒸汽中经2小时的后处理之后,平均孔径增大至120A。With stirring and slight heating, 32 grams of cetyltrimethylammonium bromide were added to 1 liter of isopropanol. After about 1 hour, 73 grams of TaCl 5 and 47 grams of RuCl 3 ·H 2 O were added to the clear solution. The standard coating process was accomplished with an intermediate pyrolysis at 300°C for 5 minutes and a final pyrolysis at 300°C for 3 hours. The average pore diameter of the coating increased to about 45A. After 2 hours post treatment at 260°C in 680 psig steam, the average pore size increased to 120A.
也可以用25wt%十六烷基三甲基铵氯化物的水溶液来改善制成的涂层的孔径。A 25 wt% aqueous solution of cetyltrimethylammonium chloride can also be used to improve the pore size of the resulting coating.
实施例15Example 15
热弹性材料衬垫
另一种结构的制造工艺是把热弹性材料衬垫(如KRATON)夹在两层HDPE衬垫之间。器件特性与前述相同。Another construction is made by sandwiching a liner of thermoelastic material such as KRATON (R ) between two layers of HDPE liner. The device characteristics are the same as before.
实施例16Example 16
包含第二材料来调节电解质使其体积增大Inclusion of a second material to condition the electrolyte to increase its volume
在每个电容器芯片增加多孔疏水材料,对因温度升高而导致的电解质的任何体积增大进行调节。The addition of porous hydrophobic material to each capacitor chip accommodates any increase in the volume of the electrolyte due to increased temperature.
这种材料设置在电容器芯片内,或是作为边界HDPE衬垫内的衬垫材料,或是作为隔离物材料的园片替换部分。This material is provided within the capacitor die, either as liner material within the border HDPE liner, or as a wafer replacement part of the spacer material.
通常使用的材料是取自W.L.Gore & Associates,Inc.的PTFE材料,厚1-3mil。PTFE材料的水进入压最好是20~100磅/英寸2。A commonly used material is PTFE material from WL Gore & Associates, Inc., 1-3 mil thick. The water inlet pressure of the PTFE material is preferably 20-100 psi .
实施例17Example 17
另一种电极予处理Another Electrode Pretreatment
在电极具有微凸头、衬垫和拉线带(步骤E之后)之后,把电极置于1M硫酸中,利用无氢气产生的阴极电流把开路电势调至约0.5V(相对于正常氢电极),把浸在去离子水中的电极转运至惰性气氛(如氩)中,在那里进行干燥和组装。After the electrode has micro-protrusions, pads and pull tape (after step E), the electrode is placed in 1M sulfuric acid, and the open circuit potential is adjusted to about 0.5 V (relative to a normal hydrogen electrode) using a cathodic current generated without hydrogen, Electrodes immersed in deionized water are transferred to an inert atmosphere such as argon, where they are dried and assembled.
尽管这里只对本发明的几个实施例做了展示和说明,但应该了解,对于该领域的技术人员,可以按改进的方法做出各种改进和变化,制成电存储器件如电池或电容器,在寿命、充电/再充电性能和低漏电流方面有所改进,而不脱离本发明的精神和范围。所有这类改进和变化均属于后附的权利要求的范围内。Although only a few embodiments of the present invention have been shown and described here, it should be understood that for those skilled in the art, various improvements and changes can be made according to improved methods to make electric storage devices such as batteries or capacitors, Improvements are made in life, charging/recharging performance, and low leakage current without departing from the spirit and scope of the present invention. All such improvements and changes are intended to come within the scope of the appended claims.
Claims (42)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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US07/947,294 US5464453A (en) | 1992-09-18 | 1992-09-18 | Method to fabricate a reliable electrical storage device and the device thereof |
US07/947,294 | 1992-09-18 | ||
US07/947,414 | 1992-09-18 | ||
US07/947,414 US5384685A (en) | 1992-09-18 | 1992-09-18 | Screen printing of microprotrusions for use as a space separator in an electrical storage device |
US95850692A | 1992-10-07 | 1992-10-07 | |
US07/958,506 | 1992-10-07 |
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CN1096611A CN1096611A (en) | 1994-12-21 |
CN1127771C true CN1127771C (en) | 2003-11-12 |
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EP (1) | EP0662248A4 (en) |
JP (1) | JPH08501660A (en) |
CN (1) | CN1127771C (en) |
AU (1) | AU681351B2 (en) |
CA (1) | CA2144657A1 (en) |
NO (1) | NO951045L (en) |
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WO (1) | WO1994007272A1 (en) |
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- 1993-09-17 CA CA002144657A patent/CA2144657A1/en not_active Abandoned
- 1993-09-17 EP EP93921652A patent/EP0662248A4/en not_active Withdrawn
- 1993-09-17 AU AU49277/93A patent/AU681351B2/en not_active Ceased
- 1993-09-17 NZ NZ256329A patent/NZ256329A/en unknown
- 1993-09-17 JP JP6508339A patent/JPH08501660A/en not_active Ceased
- 1993-09-18 CN CN93119348A patent/CN1127771C/en not_active Expired - Fee Related
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1995
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CN1096611A (en) | 1994-12-21 |
NO951045L (en) | 1995-05-16 |
JPH08501660A (en) | 1996-02-20 |
AU4927793A (en) | 1994-04-12 |
EP0662248A1 (en) | 1995-07-12 |
NZ256329A (en) | 1997-05-26 |
EP0662248A4 (en) | 2000-10-25 |
WO1994007272A1 (en) | 1994-03-31 |
AU681351B2 (en) | 1997-08-28 |
NO951045D0 (en) | 1995-03-17 |
CA2144657A1 (en) | 1994-03-31 |
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