CN112729601A - Sapphire F-P optical fiber temperature sensor prepared by femtosecond laser - Google Patents
Sapphire F-P optical fiber temperature sensor prepared by femtosecond laser Download PDFInfo
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- CN112729601A CN112729601A CN202011444496.3A CN202011444496A CN112729601A CN 112729601 A CN112729601 A CN 112729601A CN 202011444496 A CN202011444496 A CN 202011444496A CN 112729601 A CN112729601 A CN 112729601A
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- sapphire
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 77
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 73
- 239000010980 sapphire Substances 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 238000005253 cladding Methods 0.000 claims abstract description 7
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 5
- 238000005498 polishing Methods 0.000 claims description 32
- 239000000835 fiber Substances 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000005245 sintering Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 238000010147 laser engraving Methods 0.000 claims description 5
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 238000004616 Pyrometry Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention provides a method for manufacturing a sapphire Fabry-Perot optical fiber temperature sensor by adopting femtosecond laser. The F-P microstructure is carved in the sapphire optical fiber by using femtosecond laser as a carving light source, and a sapphire cladding is formed by coating sol to form the high-sensitivity and high-temperature-resistant sapphire F-P high-temperature sensor. The sapphire optical fiber F-P sensor prepared by adopting the femtosecond laser has simple manufacture and wide application and has important significance for the field of high-temperature measurement in the future.
Description
Technical Field
The invention belongs to the field of optical fiber sensing, and particularly relates to a sapphire F-P optical fiber temperature sensor prepared by femtosecond laser.
Background
In the measurement for ultra-high temperature, the temperature resistance of a common sensor is poor, and the sensitivity is poor in a complex and ultra-high temperature environment, so that the measurement of ultra-high temperature by aerospace and oil wells, for example, is influenced and restricted. High temperature sensors made of sapphire fibers have been produced and are regarded by people. Compared with the traditional optical fiber device, the sapphire optical fiber is widely used in the field of optical fiber measurement due to the high intrinsic characteristic melting point and the high transmission efficiency of infrared band signals. However, the conventional engraved fiber bragg grating is easily erased at high temperature, and loses its high-temperature measurement effect, so that a method for manufacturing a high-temperature sensor using femtosecond laser to manufacture an F-P structure in a sapphire fiber is proposed herein. The Fabry-Perot (F-P) optical sensor is a typical optical sensor structure and is suitable for measuring temperature under severe conditions of violent vibration, flammability and explosiveness, strong magnetic interference, high temperature and high pressure and the like.
F-P devices are collectively known as Fabry-Perot resonators (Fabry-Perot cavities), also known as plane-parallel cavities. The structure in the optical fiber is generally composed of reflectors with high reflectivity plated on both sides, or is made by coating films on both end faces of the optical fiber and packaging or butting. However, since the diameter of the optical fiber is in the micrometer scale, the coating material is difficult to select, the coating difficulty is high, and the coated optical fiber and the precise connection optical fiber need to be precisely controlled to reduce the coupling loss during packaging or butt joint, so that the operation difficulty is high. The method is based on the method that strong laser causes the material property to change, thereby influencing the material refractive index.
Due to the unique growth mode of the sapphire optical fiber, the manufactured finished product of the sapphire optical fiber is of a cladding-free structure, and the structure greatly influences the signal transmission performance of the optical fiber sensor. To solve this problem, a chemical coating method is proposed herein, which uses a polycrystalline alumina solution for sapphire surface coating, has compatible thermal expansion coefficients, and is effective in forming totally reflected optical signal transmission characteristics.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides a sapphire F-P optical fiber temperature sensor prepared by using femtosecond laser and improves the applicability of the device.
In order to solve the technical problems, the invention adopts the technical scheme that: a sapphire F-P fiber optic temperature sensor fabricated using a femtosecond laser, the method comprising the steps of: step a, sequentially putting the sapphire optical fiber into 36% concentrated hydrochloric acid, acetone and alcohol, respectively cleaning for 10 minutes, drying for 10 minutes after cleaning, and carrying out chemical mechanical polishing on the dried sapphire optical fiber; b, carrying out ultrasonic cleaning on the polished sapphire optical fiber, and placing the cleaned sapphire optical fiber on a femtosecond laser engraving table; c, enabling the sapphire optical fiber to be vertical to the femtosecond laser engraving platform, opening femtosecond laser, focusing the femtosecond laser on the top of a fiber core, increasing the power of the femtosecond laser, and engraving downwards along the vertical direction of the sapphire optical fiber to manufacture a first reflector; d, moving the femtosecond laser by 500um to etch a second reflector to form a Fabry-Perot structure; e, cleaning the carved sapphire optical fiber by using ultrasonic waves, and coating the cladding of the carved sapphire optical fiber; and F, sintering the coated sapphire optical fiber to obtain the sapphire F-P optical fiber, wherein the refractive index of the sapphire F-P optical fiber is 1.6.
Preferably, when the sapphire optical fiber is subjected to chemical mechanical polishing operation in the step a, the rotation speed of the polishing head and the polishing pad is 70r/min, the polishing pressure polishing solution is silicon dioxide polishing solution, the flow rate of the polishing solution is 90ml/min, and the polishing pressure is 49 kpa.
Preferably, step e is as describedWhen the sapphire optical fiber is subjected to cladding coating operation, Al is used2O3The polycrystalline alumina solution was coated at 80 ℃ for 1 hour.
Preferably, when the sapphire optical fiber is sintered in step f, the sintering temperature is 500 ℃.
A high-temperature measuring method of a sapphire F-P optical fiber sensor comprises the following steps: placing a sapphire F-P optical fiber sensor in a high-temperature furnace, wherein three interfaces of a circulator are sequentially connected with a broadband light source, a spectrometer and the sapphire F-P optical fiber sensor; and step two, adjusting the temperature of the high-temperature furnace during measurement, transmitting light to an F-P end of the sapphire F-P optical fiber sensor through the circulator by the broadband light source, reflecting the light with a specific wavelength to the spectrometer through the circulator by the F-P end, and analyzing by the spectrometer.
Preferably, the sapphire F-P optical fiber sensor has good linearity within the temperature range of 100-1500 ℃.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention uses the sapphire optical fiber, and has good performance at high temperature;
2. the sapphire optical fiber cladding is obtained by using a sol coating method, so that the signal-to-noise ratio of the sensor is greatly increased;
3. the F-P sensor is sensitive, simple in manufacturing mode, good in repeatability and suitable for large-scale manufacturing and processing.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
Further objects, features and advantages of the present invention will become apparent from the following description of embodiments of the invention, with reference to the accompanying drawings, in which:
FIG. 1 schematically illustrates a schematic of the F-P structure of an optical fiber of the present invention;
FIG. 2 is a schematic diagram illustrating the F-P pyrometry method of sapphire fiber according to the present invention;
FIG. 3 is a schematic diagram showing F-P reflection spectra of a sapphire fiber of the present invention;
FIG. 4 is a schematic diagram showing F-P wavelength-temperature linearity of a sapphire optical fiber of the present invention.
In the figure:
1. sapphire optical fiber F-P sensor 2 and reflector
3. Broadband light source 4 and spectrometer
5. Circulator 6 and high-temperature furnace
Detailed Description
The objects and functions of the present invention and methods for accomplishing the same will be apparent by reference to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it can be implemented in different forms. The nature of the description is merely to assist those skilled in the relevant art in a comprehensive understanding of the specific details of the invention.
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numerals denote the same or similar parts, or the same or similar steps.
The invention relates to a high-temperature optical fiber F-P sensor manufactured by femtosecond laser and a sol coating method, belonging to the field of optical fiber sensing. Compared with the existing optical fiber F-P sensor, the sapphire optical fiber F-P sensor is greatly superior to the common optical fiber in the temperature measurement range.
In order to achieve the above-listed purposes, the technical scheme adopted by the invention is as follows:
the femtosecond laser used in the invention is produced by coherent company, the central wavelength is 800nm, the pulse width is 50fs, and the repetition frequency is 1000 hz. The structural schematic diagram of the sapphire optical fiber F-P sensor 1 is shown in FIG. 1.
Firstly, cutting a sapphire optical fiber according to a required length, sequentially putting the single crystal optical fiber into 36% concentrated hydrochloric acid, acetone and alcohol for cleaning for ten minutes, drying for 10 minutes after cleaning, and carrying out chemical mechanical polishing, wherein a polishing head in a polishing method is in contact with a polishing pad and polishing liquid under certain pressure and rotates in the same direction with the polishing pad, the rotating speed of the polishing head and the polishing pad in the experiment is 70r/min, the polishing pressure polishing liquid adopts silicon dioxide polishing liquid, the flow rate of the polishing liquid is 90ml/min, the polishing pressure is 49kpa, finally, the sapphire chemical mechanical polishing is realized, and the polished sapphire optical fiber is subjected to ultrasonic cleaning. And finally, placing the cleaned sapphire optical fiber on a femtosecond laser engraving table.
Then, the femtosecond laser is focused on the top of the fiber core, the power of the femtosecond laser is adjusted to be high, the femtosecond laser is perpendicular to the optical fiber, writing is carried out downwards along the vertical direction of the optical fiber, after one line is etched, the shading device is opened, meanwhile, the laser focusing area is moved to be arranged on the top of the second line, then the shading device is opened, and the steps are repeated. The first reflector 2 shown in fig. 1 is etched, and then the second reflector 2 is etched by repeating the above steps by moving 500um, so as to form the fabry-perot structure.
And finally, after the etching is finished, cleaning the sapphire optical fiber by using ultrasonic. And cladding the sapphire fiber with the carved microstructure, and using Al2O3Coating the polycrystalline alumina solution at 80 ℃, soaking for 1 hour, then drawing out the sapphire optical fiber for sintering, and controlling the sintering temperature at about 500 ℃. The refractive index of the film layer is 1.35 before sintering, and the refractive index after sintering is about 1.6, so that the transmission condition of optical fiber total reflection optical signals is met.
The sapphire fiber grating high-temperature measurement system is shown in fig. 2, a sapphire fiber F-P sensor 1 is arranged in a high-temperature furnace 6 and is connected with a broadband light source 3 and a spectrometer 4 through a circulator 5, an optical fiber sensing analyzer produced by Yokogawa company is adopted as analysis equipment of the spectrometer 4, and the reflection spectrum of the sensor is measured in the experiment. The broadband light source 3 transmits light to the F-P end of the sapphire optical fiber, and the F-P end reflects light with specific wavelength back to the spectrometer 4 for analysis. The measured reflection spectrogram is shown in FIG. 3, the temperature calibration is from 100 and 1500 degrees, and the corresponding wavelength is shown in FIG. 4.
Within the temperature range of 100-1500 ℃, the temperature of the sensor is kept, the wavelength is recorded at intervals of 100 ℃, and a wavelength-temperature relation curve is drawn, as shown in fig. 4, which shows that the sensor has good linearity when measuring the temperature.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011444496.3A CN112729601B (en) | 2020-12-08 | 2020-12-08 | A Sapphire F-P Optical Fiber Temperature Sensor Prepared by Femtosecond Laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011444496.3A CN112729601B (en) | 2020-12-08 | 2020-12-08 | A Sapphire F-P Optical Fiber Temperature Sensor Prepared by Femtosecond Laser |
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| CN112729601A true CN112729601A (en) | 2021-04-30 |
| CN112729601B CN112729601B (en) | 2023-04-21 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7762720B1 (en) * | 2006-08-08 | 2010-07-27 | Virginia Tech Intellectual Properties, Inc. | Fabrication of miniature fiber-optic temperature sensors |
| CN103412366A (en) * | 2013-08-23 | 2013-11-27 | 西安电子科技大学 | Sapphire photonic crystal fiber and preparation method thereof |
| CN108947233A (en) * | 2018-06-28 | 2018-12-07 | 华南理工大学 | A kind of titanium-doped sapphire amorphous optical fiber and its preparation method and application |
| CN109596243A (en) * | 2018-11-06 | 2019-04-09 | 天津大学 | Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching |
| CN109695025A (en) * | 2019-02-01 | 2019-04-30 | 吉林大学 | A kind of covering and preparation method thereof that refractive index is radially successively decreased along sapphire fiber |
-
2020
- 2020-12-08 CN CN202011444496.3A patent/CN112729601B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7762720B1 (en) * | 2006-08-08 | 2010-07-27 | Virginia Tech Intellectual Properties, Inc. | Fabrication of miniature fiber-optic temperature sensors |
| CN103412366A (en) * | 2013-08-23 | 2013-11-27 | 西安电子科技大学 | Sapphire photonic crystal fiber and preparation method thereof |
| CN108947233A (en) * | 2018-06-28 | 2018-12-07 | 华南理工大学 | A kind of titanium-doped sapphire amorphous optical fiber and its preparation method and application |
| CN109596243A (en) * | 2018-11-06 | 2019-04-09 | 天津大学 | Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching |
| CN109695025A (en) * | 2019-02-01 | 2019-04-30 | 吉林大学 | A kind of covering and preparation method thereof that refractive index is radially successively decreased along sapphire fiber |
Non-Patent Citations (1)
| Title |
|---|
| 吴天等: "用于高温测量的蓝宝石光纤光栅的制备研究", 《计测技术》 * |
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