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CN112720248B - Efficient polishing disc with shear expansion characteristic and preparation method thereof - Google Patents

Efficient polishing disc with shear expansion characteristic and preparation method thereof Download PDF

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CN112720248B
CN112720248B CN202011487724.5A CN202011487724A CN112720248B CN 112720248 B CN112720248 B CN 112720248B CN 202011487724 A CN202011487724 A CN 202011487724A CN 112720248 B CN112720248 B CN 112720248B
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polishing
fiber
rigid
newtonian fluid
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CN112720248A (en
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陈泓谕
许良
吕冰海
王国强
李鹏
徐绍振
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Zhejiang University of Technology ZJUT
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/12Lapping plates for working plane surfaces
    • B24B37/14Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/12Lapping plates for working plane surfaces
    • B24B37/16Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • B24D3/32Resins or natural or synthetic macromolecular compounds for porous or cellular structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/04Carbon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/36Sulfur-, selenium-, or tellurium-containing compounds
    • C08K5/41Compounds containing sulfur bound to oxygen
    • C08K5/42Sulfonic acids; Derivatives thereof

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

一种具有剪切膨胀特性的高效抛光盘,包括柔性固着磨具、抛光层、刚性层、粘合层和吸附层,所述柔性固着磨具由具有非牛顿流体特性的粘弹性胶基和磨粒组成,所述柔性固着磨具组分及其质量百分比为:粘弹性聚合物69%~85%,粒度在0.05~50μm之间的磨粒10%~30%,分散剂1%~5%;所述抛光层中填充有柔性固着磨具,所述刚性层位于抛光层下面,所述粘合层位于抛光层与刚性层之间且将抛光层与刚性层粘合在一起,所述吸附层粘合在刚性层的底面,所述吸附层吸附在抛光设备基盘上。以及提供一种具有剪切膨胀特性的高效抛光盘的制备方法。本发明可用于难加工硬脆材料的平面抛光,具有加工效率高,加工质量好,经济成本低等优点。

Figure 202011487724

A high-efficiency polishing disc with shear expansion characteristics, comprising a flexible fixed abrasive tool, a polishing layer, a rigid layer, an adhesive layer and an adsorption layer, the flexible fixed abrasive tool is composed of a viscoelastic gum base with non-Newtonian fluid properties and abrasives. The components of the flexible fixed abrasives and their mass percentages are: viscoelastic polymer 69%-85%, abrasive particles with particle size between 0.05-50 μm 10%-30%, dispersant 1%-5% ; The polishing layer is filled with a flexible fixed abrasive, the rigid layer is located below the polishing layer, the adhesive layer is located between the polishing layer and the rigid layer and bonds the polishing layer and the rigid layer together, the adsorption layer is The layer is bonded to the bottom surface of the rigid layer, and the adsorption layer is adsorbed on the polishing device substrate. And a preparation method of a high-efficiency polishing disc with shear expansion characteristics is provided. The invention can be used for plane polishing of hard and brittle materials difficult to process, and has the advantages of high processing efficiency, good processing quality, low economic cost and the like.

Figure 202011487724

Description

一种具有剪切膨胀特性的高效抛光盘及其制备方法A kind of high-efficiency polishing disc with shear expansion characteristics and preparation method thereof

技术领域technical field

本发明涉及超精密抛光领域,尤其是一种抛光盘及其制备方法,具体为一种具有剪切膨胀特性的高效抛光盘及其制备方法。The invention relates to the field of ultra-precision polishing, in particular to a polishing disc and a preparation method thereof, in particular to a high-efficiency polishing disc with shear expansion characteristics and a preparation method thereof.

背景技术Background technique

抛光盘可用于材料表面的打磨抛光,其种类繁多,主要包括铸铁盘、不锈钢抛光盘、绒布抛光盘和纯铁抛光盘等,可以根据抛光工件硬度不同选取合适的抛光盘。Polishing discs can be used for grinding and polishing the surface of materials. There are many kinds of them, including cast iron discs, stainless steel polishing discs, flannel polishing discs and pure iron polishing discs. The appropriate polishing disc can be selected according to the hardness of the polished workpiece.

目前,陶瓷材料、硬质合金、难熔金属等难加工硬脆材料被广泛应用于航天航空、半导体、车辆零部件等领域。在剧烈摩擦和高温高压情况下,粗糙度大的部位容易磨损,严重缩短材料使用寿命,通过抛光可提高其表面质量和光洁度,改善机械性能。然而,难加工硬脆材料被现有抛光盘加工后通常会出现表面平整度差、效率较低、加工损伤层大等问题。At present, ceramic materials, hard alloys, refractory metals and other hard-to-machine hard and brittle materials are widely used in aerospace, semiconductor, vehicle parts and other fields. In the case of severe friction and high temperature and high pressure, the parts with large roughness are easy to wear, which seriously shortens the service life of the material. By polishing, the surface quality and smoothness can be improved, and the mechanical properties can be improved. However, difficult-to-machine hard and brittle materials usually have problems such as poor surface flatness, low efficiency, and large processing damage layer after being processed by existing polishing discs.

已公开中国发明专利(CN 101428404A),专利名称:固结磨料研磨抛光垫及其制备方法,采用图形转移法制备抛光盘。该抛光盘研磨抛光性能稳定,效率较高,适用加工材料范围广。但制备工艺复杂,抛光后的工件表面平整度较差,加工损伤层大。A Chinese invention patent (CN 101428404A) has been published, the patent name: a fixed abrasive grinding and polishing pad and a preparation method thereof, and a polishing disc is prepared by a pattern transfer method. The polishing disc has stable grinding and polishing performance, high efficiency, and is suitable for a wide range of processing materials. However, the preparation process is complicated, the surface flatness of the polished workpiece is poor, and the processing damage layer is large.

已授权中国发明专利(CN 108747869B),专利名称:抛光盘及其制作方法,提出了一种对陶瓷制品进行抛光的抛光盘。使用该抛光盘抛光陶瓷、石英等硬脆材料可显著降低粗糙度,提高抛光效率。但适用加工材料范围小,且存在被抛工件表面平整度差的问题。An authorized Chinese invention patent (CN 108747869B), patent name: polishing disc and its manufacturing method, proposes a polishing disc for polishing ceramic products. Using the polishing disc to polish hard and brittle materials such as ceramics and quartz can significantly reduce the roughness and improve the polishing efficiency. However, the range of applicable processing materials is small, and there is a problem of poor surface flatness of the workpiece being thrown.

发明内容SUMMARY OF THE INVENTION

为了克服已有技术的不足,本发明提出一种具有剪切膨胀特性的高效抛光盘及其制备方法。抛光过程中,具有非牛顿流体特性的磨具与工件接触区域受剪切力作用产生剪切膨胀效应,呈现出瞬间膨胀顶出现象和固化效果,磨具材料的粘度、硬度和内部阻力增大,增强对磨粒的把持作用的同时提高了工件表面的受力均匀性,磨具中具有抛光作用的磨粒对工件表面产生微切削作用实现工件材料去除并达到抛光的效果。该抛光盘旨在提高加工效率的同时保证加工精度,可减少材料表面变质层,适用加工材料范围广,加工成本较低。In order to overcome the deficiencies of the prior art, the present invention proposes a high-efficiency polishing disc with shear expansion characteristics and a preparation method thereof. During the polishing process, the contact area between the abrasive tool and the workpiece with the characteristics of non-Newtonian fluid is subjected to shear force to produce a shear expansion effect, showing an instant expansion and ejection phenomenon and a curing effect, and the viscosity, hardness and internal resistance of the abrasive tool material increase. , enhance the holding effect of abrasive particles and improve the uniformity of force on the surface of the workpiece. The abrasive particles with polishing effect in the abrasive tool have a micro-cutting effect on the surface of the workpiece to remove the workpiece material and achieve the effect of polishing. The polishing disc is designed to improve processing efficiency while ensuring processing accuracy, can reduce the metamorphic layer on the surface of the material, is suitable for a wide range of processing materials, and has low processing cost.

本发明解决其技术问题所采用的技术方案是:The technical scheme adopted by the present invention to solve its technical problems is:

一种具有剪切膨胀特性的高效抛光盘,包括柔性固着磨具、抛光层、刚性层、粘合层和吸附层,所述柔性固着磨具由具有非牛顿流体特性的粘弹性胶基和磨粒组成,所述柔性固着磨具组分及其质量百分比为:粘弹性聚合物69%~85%,粒度在0.05~50μm之间的磨粒10%~30%,分散剂1%~5%;所述抛光层中填充有柔性固着磨具,所述刚性层位于抛光层下面,所述粘合层位于抛光层与刚性层之间且将抛光层与刚性层粘合在一起,所述吸附层粘合在刚性层的底面,所述吸附层吸附在抛光设备基盘上。A high-efficiency polishing disc with shear expansion characteristics, comprising a flexible fixed abrasive tool, a polishing layer, a rigid layer, an adhesive layer and an adsorption layer, the flexible fixed abrasive tool is composed of a viscoelastic gum base with non-Newtonian fluid properties and abrasives. The composition of particles, the components of the flexible fixed abrasive and their mass percentages are: viscoelastic polymer 69%-85%, abrasive particles with particle size between 0.05-50 μm 10%-30%, dispersant 1%-5% ; The polishing layer is filled with flexible fixed abrasives, the rigid layer is located below the polishing layer, the adhesive layer is located between the polishing layer and the rigid layer and bonds the polishing layer and the rigid layer together, the adsorption The layer is bonded to the bottom surface of the rigid layer, and the adsorption layer is adsorbed on the polishing device substrate.

进一步,所述抛光层为以下之一:具有凹槽的基底和填充在所述凹槽中的具有非牛顿流体特性的材料组成的抛光层;片状纤维基材和浸没在纤维基材中的具有非牛顿流体特性的材料组成的抛光层。Further, the polishing layer is one of the following: a substrate with grooves and a polishing layer composed of a material with non-Newtonian fluid properties filled in the grooves; a sheet-like fiber substrate and a substrate immersed in the fiber substrate Polishing layer composed of materials with non-Newtonian fluid properties.

优选的,所述具有凹槽的基底由胶粘剂、固化剂构成,所述具有凹槽的基底的组分及其质量百分比如下:胶粘剂50%~90%,固化剂10%~50%。Preferably, the substrate with grooves is composed of an adhesive and a curing agent, and the components and mass percentages of the substrate with grooves are as follows: adhesive 50%-90%, curing agent 10%-50%.

再优选的,所述具有凹槽的基底上表面划有沟槽,所述沟槽为网格状或螺旋状,用来排出去离子水和工件废屑。Further preferably, the upper surface of the substrate with grooves is delineated with grooves, and the grooves are grid-shaped or spiral-shaped for discharging deionized water and workpiece waste.

再进一步,所述的粘弹性聚合物为硅硼聚合物,所述的分散剂为无机分散剂、有机分散剂或有机分散剂和无机分散剂的混合物;所述无机分散剂为碳酸盐类和碱金属磷酸盐类;所述有机分散剂为聚乙烯醇及其衍生物、甲基戊醇或聚丙烯酰胺。Still further, the viscoelastic polymer is a silicon boron polymer, and the dispersant is an inorganic dispersant, an organic dispersant or a mixture of an organic dispersant and an inorganic dispersant; the inorganic dispersant is carbonate and Alkali metal phosphates; the organic dispersant is polyvinyl alcohol and its derivatives, methyl amyl alcohol or polyacrylamide.

所述的胶粘剂为以下一种或至少两种的混合物:有机硅、聚氨酯、环氧树脂等。The adhesive is one or a mixture of at least two of the following: silicone, polyurethane, epoxy resin and the like.

所述的磨粒为以下一种或至少两种的混合物:金刚石、氧化铝、氧化镁、氧化铈、立方氮化硼、碳化硼、碳化硅、氧化铈、氧化硅等。The abrasive particles are one or a mixture of at least two of the following: diamond, aluminum oxide, magnesium oxide, cerium oxide, cubic boron nitride, boron carbide, silicon carbide, cerium oxide, silicon oxide, and the like.

所述片状纤维基材为以下一种或至少两种的混合物:天然纤维、合成纤维、人造纤维;所述的天然纤维为棉纤维、麻纤维、毛纤维或蚕丝等;所述的合成纤维为聚对苯二甲酸乙二酯、聚酰胺纤维、聚丙烯腈纤维、聚乙烯醇缩甲醛纤维、聚氯乙烯纤维、聚氨酯弹性纤维或聚烯烃弹力纤维等;所述的人造纤维为再生纤维素纤维、纤维素酯纤维或再生蛋白质纤维等。The sheet-like fiber base material is one or a mixture of at least two of the following: natural fibers, synthetic fibers, man-made fibers; the natural fibers are cotton fibers, hemp fibers, wool fibers or silk, etc.; the synthetic fibers It is polyethylene terephthalate, polyamide fiber, polyacrylonitrile fiber, polyvinyl formal fiber, polyvinyl chloride fiber, polyurethane elastic fiber or polyolefin elastic fiber, etc.; the man-made fiber is regenerated cellulose fiber, cellulose ester fiber or regenerated protein fiber, etc.

所述粘合层为以下一种或至少两种的混合物:天然高分子、合成树脂、橡胶等;具体可为胶粘剂或双面胶带。The adhesive layer is one or a mixture of at least two of the following: natural polymer, synthetic resin, rubber, etc.; specifically, it can be an adhesive or a double-sided tape.

所述刚性层为刚性聚合物;所述吸附层为粘性磁力贴或双面胶带,贴合在刚性层下面。The rigid layer is a rigid polymer; the adsorption layer is a sticky magnetic sticker or a double-sided adhesive tape, and is attached under the rigid layer.

一种具有剪切膨胀特性的高效抛光盘的制备方法,包括如下步骤:A preparation method of a high-efficiency polishing disc with shear expansion characteristics, comprising the following steps:

1)制备具有非牛顿流体特性的材料:将粘弹性聚合物、磨粒、分散剂等按比例充分机械搅拌均匀后,其质量百分比为:粘弹性聚合物69%~85%,粒度在0.05~50μm之间的磨粒10%~30%,分散剂1%~5%,在烘箱中以120~200℃静置2~5h,制备得到具有非牛顿流体特性的材料。1) Preparation of materials with non-Newtonian fluid properties: After fully mechanically stirring viscoelastic polymer, abrasive particles, dispersant, etc. in proportion, the mass percentage is: viscoelastic polymer 69%-85%, particle size 0.05- 10% to 30% of abrasive grains between 50 μm, 1% to 5% of dispersant, and stand at 120 to 200° C. for 2 to 5 hours in an oven to prepare a material with non-Newtonian fluid properties.

2)制备抛光层。方法一:将胶粘剂、固化剂组分按照按比例充分机械搅拌均匀后放入模具中,质量百分比如下:胶粘剂50%~90%,固化剂10%~50%,在烘箱中加热,冷却后得到具有凹槽的基盘,将上述具有非牛顿流体特性的材料填入得到抛光层;方法二:将上述具有非牛顿流体特性的材料在烘箱中加热熔化后填入片状纤维基材,冷却后得到抛光层;2) Preparation of polishing layer. Method 1: The adhesive and curing agent components are fully mechanically stirred in proportion and put into the mold. The mass percentages are as follows: 50% to 90% of the adhesive and 10% to 50% of the curing agent, heated in an oven, and cooled to obtain The base plate with grooves is filled with the above-mentioned material with non-Newtonian fluid characteristics to obtain a polishing layer; Method 2: the above-mentioned material with non-Newtonian fluid characteristics is heated and melted in an oven and filled into the sheet-like fiber base material, and after cooling to obtain a polishing layer;

3)以刚性聚合物作为刚性层,通过粘合层与抛光层粘合贴附;3) Use rigid polymer as rigid layer, and adhere to the polishing layer through the adhesive layer;

4)将吸附层与刚性层粘合;4) Adhere the adsorption layer to the rigid layer;

5)通过低速修盘去除具有非牛顿流体特性的材料高出基底的部分,保证具有非牛顿流体特性的材料的高度与基底一致。5) Remove the part of the material with non-Newtonian fluid properties that is higher than the substrate by trimming the disc at a low speed to ensure that the height of the material with non-Newtonian fluid properties is consistent with the substrate.

本发明的有益效果主要表现在:1、属于柔性加工,加工接触面积大,去除均匀性好;2、制备过程简单,成本较低,可加工材料范围广;The beneficial effects of the present invention are mainly manifested in: 1. It belongs to flexible processing, with large processing contact area and good removal uniformity; 2. The preparation process is simple, the cost is low, and the range of processable materials is wide;

3、无需更换抛光盘,通过调节抛光压力和抛光线速度可实现抛光工艺的多阶可控,既节约了时间,又提高了抛光效率;4、所需的加工设备整体结构简单。3. There is no need to replace the polishing disc, and the multi-step controllability of the polishing process can be realized by adjusting the polishing pressure and polishing line speed, which not only saves time, but also improves the polishing efficiency; 4. The overall structure of the required processing equipment is simple.

附图说明Description of drawings

图1是基于本发明原理的一种抛光盘Ⅰ结构示意图。1 is a schematic structural diagram of a polishing disc I based on the principle of the present invention.

图2是利用抛光盘Ⅰ加工工件的示意图。Fig. 2 is a schematic diagram of processing a workpiece using the polishing disc I.

图3是基于本发明原理的另一种小型抛光盘Ⅱ加工工件的示意图。Fig. 3 is a schematic diagram of another small polishing disc II processing a workpiece based on the principle of the present invention.

具体实施方式Detailed ways

下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.

参照图1~图3,一种具有剪切膨胀特性的高效抛光盘,包括柔性固着磨具1、抛光层2、刚性层4、粘合层3和吸附层5,所述柔性固着磨具1由具有非牛顿流体特性的粘弹性胶基和磨粒组成,所述柔性固着磨具1组分及其质量百分比为:粘弹性聚合物69%~85%,粒度在0.05~50μm之间的磨粒10%~30%,分散剂1%~5%;所述抛光层2中填充有柔性固着磨具1,所述刚性层4位于抛光层2下面,所述粘合层3位于抛光层2与刚性层4之间且将抛光层与刚性层粘合在一起,所述吸附层5粘合在刚性层4的底面,所述吸附层5吸附在抛光设备基盘上。1 to 3, a high-efficiency polishing disc with shear expansion characteristics includes a flexible fixed abrasive 1, a polishing layer 2, a rigid layer 4, an adhesive layer 3 and an adsorption layer 5. The flexible fixed abrasive 1 It is composed of a viscoelastic gum base with non-Newtonian fluid properties and abrasive particles. The first component of the flexible fixed abrasive tool and its mass percentage are: viscoelastic polymer 69% to 85%, and the particle size is between 0.05 and 50 μm. The polishing layer 2 is filled with a flexible fixed abrasive tool 1, the rigid layer 4 is located under the polishing layer 2, and the adhesive layer 3 is located in the polishing layer 2 Between the rigid layer 4 and the polishing layer and the rigid layer, the adsorption layer 5 is adhered to the bottom surface of the rigid layer 4, and the adsorption layer 5 is adsorbed on the base plate of the polishing equipment.

所述具有剪切膨胀特性的高效抛光盘的制备方法,包括如下步骤:The preparation method of the high-efficiency polishing disc with shear expansion characteristics comprises the following steps:

1)制备具有非牛顿流体特性的材料:将粘弹性聚合物、磨粒7、分散剂8等按比例充分机械搅拌均匀后,其质量百分比为:粘弹性聚合物69%~85%,粒度在0.05~50μm之间的磨粒10%~30%,分散剂1%~5%,在烘箱中以120~200℃静置2~5h,制备得到具有非牛顿流体特性的材料;1) Preparation of materials with non-Newtonian fluid properties: after fully mechanically stirring viscoelastic polymer, abrasive particles 7, dispersant 8, etc. in proportion, the mass percentage is: viscoelastic polymer 69% to 85%, particle size in 10% to 30% of abrasive grains between 0.05 and 50 μm, 1% to 5% of dispersant, and let stand at 120 to 200°C for 2 to 5 hours in an oven to prepare materials with non-Newtonian fluid properties;

2)制备抛光层2。方法一:将胶粘剂、固化剂等组分按照按比例充分机械搅拌均匀后放入模具中,在烘箱中加热,冷却后得到具有凹槽的基盘,将上述具有非牛顿流体特性的材料填入得到抛光层2;方法二:将上述具有非牛顿流体特性的材料在烘箱中加热熔化后填入片状纤维基材,冷却后得到抛光层2;2) Preparation of polishing layer 2. Method 1: The adhesive, curing agent and other components are fully mechanically stirred in proportion and placed into the mold, heated in an oven, and cooled to obtain a base plate with grooves, and the above materials with non-Newtonian fluid properties are filled into the mold. A polishing layer 2 is obtained; Method 2: the above-mentioned material with non-Newtonian fluid properties is heated and melted in an oven and then filled into a sheet-like fiber base material, and the polishing layer 2 is obtained after cooling;

3)以刚性聚合物作为刚性层4,通过粘合层3与抛光层2粘合贴附;3) use rigid polymer as rigid layer 4, and adhere to polishing layer 2 through adhesive layer 3;

4)将粘性磁力贴5与刚性层4粘合;4) Adhere the sticky magnetic sticker 5 to the rigid layer 4;

5)通过低速修盘去除具有非牛顿流体特性的材料高出基底的部分,保证具有非牛顿流体特性的材料高度与基底一致。5) Remove the part of the material with non-Newtonian fluid properties that is higher than the substrate by trimming the disc at a low speed to ensure that the height of the material with non-Newtonian fluid properties is consistent with the substrate.

所述的具有非牛顿流体特性的材料组分及其质量百分比:粘弹性聚合物69%~85%,粒度在0.05~50μm之间的磨粒10%~30%,分散剂1%~5%。The material components with non-Newtonian fluid properties and their mass percentages: 69% to 85% of viscoelastic polymers, 10% to 30% of abrasive particles with a particle size of 0.05 to 50 μm, and 1% to 5% of dispersant .

所述的粘弹性聚合物为硅硼聚合物,所述的分散剂为无机分散剂、有机分散剂或有机分散剂和无机分散剂的混合物。所述无机分散剂为碳酸盐类和碱金属磷酸盐类。所述有机分散剂为聚乙烯醇及其衍生物、甲基戊醇或聚丙烯酰胺。The viscoelastic polymer is a silicon boron polymer, and the dispersant is an inorganic dispersant, an organic dispersant or a mixture of an organic dispersant and an inorganic dispersant. The inorganic dispersants are carbonates and alkali metal phosphates. The organic dispersant is polyvinyl alcohol and its derivatives, methyl amyl alcohol or polyacrylamide.

所述磨粒7为以下一种或至少两种的混合物:金刚石、氧化铝、氧化镁、氧化铈、立方氮化硼、碳化硼、碳化硅、氧化铈、氧化硅等。The abrasive particles 7 are one or a mixture of at least two of the following: diamond, aluminum oxide, magnesium oxide, cerium oxide, cubic boron nitride, boron carbide, silicon carbide, cerium oxide, silicon oxide, and the like.

所述片状纤维基材为以下一种或至少两种的混合物:天然纤维、合成纤维、人造纤维。所述的天然纤维为棉纤维、麻纤维、毛纤维或蚕丝等。所述的合成纤维为聚对苯二甲酸乙二酯、聚酰胺纤维、聚丙烯腈纤维、聚乙烯醇缩甲醛纤维、聚氯乙烯纤维、聚氨酯弹性纤维或聚烯烃弹力纤维等。所述的人造纤维为再生纤维素纤维、纤维素酯纤维或再生蛋白质纤维等。The sheet-like fiber base material is one or a mixture of at least two of the following: natural fibers, synthetic fibers, and man-made fibers. The natural fibers are cotton fibers, hemp fibers, wool fibers or silk and the like. The synthetic fibers are polyethylene terephthalate, polyamide fibers, polyacrylonitrile fibers, polyvinyl formal fibers, polyvinyl chloride fibers, polyurethane elastic fibers or polyolefin elastic fibers. The man-made fibers are regenerated cellulose fibers, cellulose ester fibers or regenerated protein fibers.

所述粘合层3为以下一种或至少两种的混合物:天然高分子、合成树脂、橡胶等。具体可为胶粘剂或双面胶带,所述的抛光层2和所述的刚性层4由所述的胶粘剂或双面胶带粘合贴附。The adhesive layer 3 is one or a mixture of at least two of the following: natural polymer, synthetic resin, rubber, and the like. Specifically, it can be an adhesive or a double-sided tape, and the polishing layer 2 and the rigid layer 4 are adhered and attached by the adhesive or the double-sided tape.

本发明还提供了一种具有凹槽的基底的制备方法,过程如下:The present invention also provides a kind of preparation method of the substrate with groove, and the process is as follows:

1)将占比50%~90%胶粘剂和占比10%~50%的固化剂均匀混合,形成一种粘稠混合物。1) Evenly mix 50%-90% adhesive and 10%-50% curing agent to form a viscous mixture.

2)将粘稠混合物装入模具中,在热压机下加热加压,静置24h,得到胚体。2) Put the viscous mixture into a mold, heat and pressurize it under a hot press, and let it stand for 24 hours to obtain an embryo body.

3)将胚体连同模具放入烘箱中,在120℃下加热烘干,使其充分固化。3) Put the embryo body together with the mold into an oven, and heat and dry it at 120° C. to fully solidify it.

4)对制备得到的胚体置于研磨机上,对其上表面进行修整,直至达到极好的平面度。4) The prepared embryo body is placed on a grinding machine, and its upper surface is trimmed until it reaches an excellent flatness.

实施例1Example 1

参照图1和图2,一种具有剪切膨胀特性的高效抛光盘,包括抛光层2、刚性层4和吸附层5,所述高效抛光盘的制备方法,包括如下步骤:1 and 2, a high-efficiency polishing disc with shear expansion characteristics includes a polishing layer 2, a rigid layer 4 and an adsorption layer 5, and the preparation method of the high-efficiency polishing disc includes the following steps:

1)将85g粘弹性聚合物、10g粒径1.5μm的金刚石磨粒7、5g十二烷基苯磺酸钠8充分机械搅拌均匀后,在烘箱中120℃下加热2h,制备得到具有非牛顿流体特性的材料;1) After fully mechanically stirring 85g viscoelastic polymer, 10g diamond abrasive particles 7 with a particle size of 1.5μm, and 5g sodium dodecylbenzenesulfonate 8, heat it in an oven at 120 ° C for 2 hours to prepare a non-Newtonian product. material of fluid properties;

2)将占比90%的聚氨酯结合剂和占比10%固化剂均匀混合,形成一种粘稠混合物,将粘稠混合物装入模具中,在热压机下加热加压,静置24h后得到胚体。将胚体连同模具放入烘箱中,在120℃下加热烘干2h,使其充分固化成为所需的基底。将基底置于研磨机上,对其上表面进行修整以致达到极好的平面度。将上述步骤1)中制备的具有非牛顿流体特性的材料填入基底得到抛光层2;2) Mix 90% of the polyurethane binder and 10% of the curing agent evenly to form a viscous mixture, put the viscous mixture into the mold, heat and pressurize it under a hot press, and leave it for 24 hours. Obtain embryos. Put the embryo body together with the mold into an oven, and heat and dry it at 120 °C for 2 h to fully solidify it into the desired substrate. The substrate is placed on a grinder and its upper surface is trimmed to excellent flatness. Filling the substrate with the material with non-Newtonian fluid properties prepared in the above step 1) to obtain a polishing layer 2;

3)选取刚性聚合物作为刚性层4,通过树脂结合剂3与抛光层2黏合。3) Select a rigid polymer as the rigid layer 4, and bond with the polishing layer 2 through the resin binder 3.

4)将吸附层5(粘性磁力贴)与刚性层4粘合。4) Adhere the adsorption layer 5 (adhesive magnetic sticker) to the rigid layer 4.

5)通过低速修盘去除具有非牛顿流体特性材料高出基底的部分,保证非牛顿流体特性材料高度与基底一致。5) Remove the part of the material with non-Newtonian fluid properties that is higher than the substrate by trimming the disc at a low speed to ensure that the height of the material with non-Newtonian fluid properties is consistent with the substrate.

将工件6置于抛光盘上表面,通过加压装置施加适当的压力F,使工件6与抛光盘紧密贴合。The workpiece 6 is placed on the upper surface of the polishing disc, and an appropriate pressure F is applied by a pressing device to make the workpiece 6 closely fit with the polishing disc.

在驱动装置带动下,工件6与抛光盘做相对运动,从而实现工件6表面的高效高质量抛光。Driven by the driving device, the workpiece 6 and the polishing disc move relative to each other, thereby realizing efficient and high-quality polishing of the surface of the workpiece 6 .

实施例2Example 2

参照图3,一种具有剪切膨胀特性的高效抛光盘,包括抛光层2、刚性层4和吸附层5,所述高效抛光盘的制备方法,包括如下步骤:3, a high-efficiency polishing disc with shear expansion characteristics includes a polishing layer 2, a rigid layer 4 and an adsorption layer 5, and the preparation method of the high-efficiency polishing disc includes the following steps:

1)将78g粘弹性聚合物、20g粒径1.5μm的氧化铝磨粒7、2g十二烷基苯磺酸钠8充分机械搅拌均匀后,在烘箱中150℃下加热3h,制备得到熔化状态的具有非牛顿流体特性的材料。1) After fully mechanically stirring 78g viscoelastic polymer, 20g alumina abrasive particles 7 with a particle size of 1.5μm, and 2g sodium dodecylbenzene sulfonate 8, heat it in an oven at 150 ° C for 3 hours to prepare a molten state materials with non-Newtonian fluid properties.

2)准备一块无纺布,将上述步骤1)熔化状态的具有非牛顿流体特性的材料均匀填埋在无纺布中,冷却后得到抛光层2;2) prepare a piece of non-woven fabric, evenly fill the material with non-Newtonian fluid properties in the molten state in the above step 1) in the non-woven fabric, and obtain polishing layer 2 after cooling;

3)选取刚性聚合物作为刚性层4,通过树脂结合剂3与抛光层黏合;3) Select rigid polymer as rigid layer 4, and bond with polishing layer through resin binder 3;

4)通过双面胶5将抛光盘贴合在抛光工具上;4) Attach the polishing disc to the polishing tool through double-sided tape 5;

将抛光盘置于工件6上表面,通过抛光工具施加适当的压力F,使抛光盘与工件6紧密贴合;The polishing disc is placed on the upper surface of the workpiece 6, and an appropriate pressure F is applied by the polishing tool to make the polishing disc closely fit the workpiece 6;

在驱动装置带动下,抛光盘与工件6做相对运动,从而实现工件6表面的高效高质量抛光。Driven by the driving device, the polishing disc and the workpiece 6 move relative to each other, so as to achieve high-efficiency and high-quality polishing of the surface of the workpiece 6 .

实施例3Example 3

参照图1和图2,一种具有剪切膨胀特性的高效抛光盘,包括抛光层2、刚性层4和吸附层5,所述高效抛光盘的制备方法,包括如下步骤:1 and 2, a high-efficiency polishing disc with shear expansion characteristics includes a polishing layer 2, a rigid layer 4 and an adsorption layer 5, and the preparation method of the high-efficiency polishing disc includes the following steps:

1)将72g粘弹性聚合物、25g粒径1.5μm的氧化铝磨粒7、3g十二烷基苯磺酸钠8充分机械搅拌均匀后,在烘箱中160℃下加热4h,制备得到具有非牛顿流体特性的材料;1) After fully mechanically stirring 72g viscoelastic polymer, 25g alumina abrasive particles 7 with a particle size of 1.5μm, and 3g sodium dodecylbenzenesulfonate 8, heat it in an oven at 160°C for 4h to prepare Materials with Newtonian fluid properties;

2)将占比70%的环氧树脂结合剂和占比30%固化剂均匀混合,形成一种粘稠混合物,将粘稠混合物装入模具中,在热压机下加热加压,静置24h后得到胚体。将胚体连同模具放入烘箱中,在120℃下加热烘干2h,使其充分固化成为所需的基底。将基底置于研磨机上,对其上表面进行修整以致达到极好的平面度。将上述步骤1)中制备的具有非牛顿流体特性的材料填入基底得到抛光层2;2) Evenly mix 70% epoxy resin binder and 30% curing agent to form a viscous mixture, put the viscous mixture into the mold, heat and pressurize it under a hot press, and let it stand Embryos were obtained after 24 h. Put the embryo body together with the mold into an oven, and heat and dry it at 120 °C for 2 h to fully solidify it into the desired substrate. The substrate is placed on a grinder and its upper surface is trimmed to excellent flatness. Filling the substrate with the material with non-Newtonian fluid properties prepared in the above step 1) to obtain a polishing layer 2;

3)选取刚性聚合物作为刚性层4,通过树脂结合剂3与抛光层2黏合。3) Select a rigid polymer as the rigid layer 4, and bond with the polishing layer 2 through the resin binder 3.

4)将吸附层5(粘性磁力贴)与刚性层4粘合。4) Adhere the adsorption layer 5 (adhesive magnetic sticker) to the rigid layer 4.

5)通过低速修盘去除具有非牛顿流体特性材料高出基底的部分,保证非牛顿流体特性材料高度与基底一致。5) Remove the part of the material with non-Newtonian fluid properties that is higher than the substrate by trimming the disc at a low speed to ensure that the height of the material with non-Newtonian fluid properties is consistent with the substrate.

将工件6置于抛光盘上表面,通过加压装置施加适当的压力F,使工件6与抛光盘紧密贴合。The workpiece 6 is placed on the upper surface of the polishing disc, and an appropriate pressure F is applied by a pressing device to make the workpiece 6 closely fit with the polishing disc.

在驱动装置带动下,工件6与抛光盘做相对运动,从而实现工件6表面的高效高质量抛光。Driven by the driving device, the workpiece 6 and the polishing disc move relative to each other, thereby realizing efficient and high-quality polishing of the surface of the workpiece 6 .

实施例4Example 4

参照图1和图2,一种具有剪切膨胀特性的高效抛光盘,包括抛光层2、刚性层4和吸附层5,所述高效抛光盘的制备方法,包括如下步骤:1 and 2, a high-efficiency polishing disc with shear expansion characteristics includes a polishing layer 2, a rigid layer 4 and an adsorption layer 5, and the preparation method of the high-efficiency polishing disc includes the following steps:

1)将69g粘弹性聚合物、30g粒径1.5μm的金刚石磨粒7、1g十二烷基苯磺酸钠8充分机械搅拌均匀后,在烘箱中200℃下加热5h,制备得到具有非牛顿流体特性的材料;1) After fully mechanically stirring 69g viscoelastic polymer, 30g diamond abrasive particles 7 with a particle size of 1.5μm, and 1g sodium dodecylbenzene sulfonate 8, heat it in an oven at 200°C for 5h to prepare a non-Newtonian product. material of fluid properties;

2)将占比50%的有机硅结合剂和占比50%固化剂均匀混合,形成一种粘稠混合物,将粘稠混合物装入模具中,在热压机下加热加压,静置24h后得到胚体。将胚体连同模具放入烘箱中,在120℃下加热烘干2h,使其充分固化成为所需的基底。将基底置于研磨机上,对其上表面进行修整以致达到极好的平面度。将上述步骤1)中制备的具有非牛顿流体特性的材料填入基底得到抛光层2;2) Evenly mix 50% silicone binder and 50% curing agent to form a viscous mixture, put the viscous mixture into the mold, heat and pressurize it under a hot press, and let it stand for 24 hours Embryos are obtained. Put the embryo body together with the mold into an oven, and heat and dry it at 120 °C for 2 h to fully solidify it into the desired substrate. The substrate is placed on a grinder and its upper surface is trimmed to excellent flatness. Filling the substrate with the material with non-Newtonian fluid properties prepared in the above step 1) to obtain a polishing layer 2;

3)选取刚性聚合物作为刚性层4,通过树脂结合剂3与抛光层2黏合。3) Select a rigid polymer as the rigid layer 4, and bond with the polishing layer 2 through the resin binder 3.

4)将吸附层5(粘性磁力贴)与刚性层4粘合。4) Adhere the adsorption layer 5 (adhesive magnetic sticker) to the rigid layer 4.

5)通过低速修盘去除具有非牛顿流体特性材料高出基底的部分,保证非牛顿流体特性材料高度与基底一致。5) Remove the part of the material with non-Newtonian fluid properties that is higher than the substrate by trimming the disc at a low speed to ensure that the height of the material with non-Newtonian fluid properties is consistent with the substrate.

将工件6置于抛光盘上表面,通过加压装置施加适当的压力F,使工件6与抛光盘紧密贴合。The workpiece 6 is placed on the upper surface of the polishing disc, and an appropriate pressure F is applied by a pressing device to make the workpiece 6 closely fit with the polishing disc.

在驱动装置带动下,工件6与抛光盘做相对运动,从而实现工件6表面的高效高质量抛光。Driven by the driving device, the workpiece 6 and the polishing disc move relative to each other, thereby realizing efficient and high-quality polishing of the surface of the workpiece 6 .

本说明书的实施例所述的内容仅仅是对发明构思的实现形式的列举,仅作说明用途。本发明的保护范围不应当被视为仅限于本实施例所陈述的具体形式,本发明的保护范围也及于本领域的普通技术人员根据本发明构思所能想到的等同技术手段。The content described in the embodiments of the present specification is merely an enumeration of the implementation forms of the inventive concept, and is only used for illustration purposes. The protection scope of the present invention should not be construed as being limited to the specific forms stated in this embodiment, and the protection scope of the present invention also extends to equivalent technical means that those of ordinary skill in the art can think of according to the inventive concept.

Claims (5)

1. A high efficiency polishing disk having shear expansion properties, comprising a flexible fixed abrasive article comprised of a viscoelastic gum base having non-newtonian fluid properties and abrasive particles, a polishing layer, a rigid layer, an adhesive layer, and an absorbent layer, the flexible fixed abrasive article comprising, in weight percent: 69-85% of viscoelastic polymer, 10-30% of abrasive particles with the granularity of 0.05-50 mu m and 1-5% of dispersing agent; the polishing device comprises a polishing layer, a rigid layer, an adhesive layer, an adsorption layer and a polishing equipment base plate, wherein the polishing layer is filled with a flexible fixing abrasive tool, the rigid layer is positioned below the polishing layer, the adhesive layer is positioned between the polishing layer and the rigid layer and adheres the polishing layer and the rigid layer together, the adsorption layer is adhered to the bottom surface of the rigid layer, and the adsorption layer is adsorbed on the polishing equipment base plate; the polishing layer is composed of a sheet-shaped fiber substrate and a material with non-Newtonian fluid characteristics, wherein the sheet-shaped fiber substrate is immersed in the fiber substrate, and the sheet-shaped fiber substrate is one or a mixture of at least two of the following materials: natural fibers, synthetic fibers, artificial fibers; the natural fiber is cotton fiber, hemp fiber, wool fiber or silk; the synthetic fiber is polyethylene terephthalate, polyamide fiber, polyacrylonitrile fiber, polyvinyl formal fiber, polyvinyl chloride fiber, polyurethane elastic fiber or polyolefin elastic fiber; the artificial fiber is regenerated cellulose fiber, cellulose ester fiber or regenerated protein fiber.
2. A high efficiency polishing pad having shear-expansive characteristics as recited in claim 1, wherein said viscoelastic polymer is a silicon-boron polymer and said dispersant is an inorganic dispersant, an organic dispersant or a mixture of an organic dispersant and an inorganic dispersant; the inorganic dispersant is carbonate and alkali metal phosphate; the organic dispersing agent is polyvinyl alcohol and derivatives thereof, methyl amyl alcohol or polyacrylamide.
3. A high efficiency polishing pad having shear-expansion characteristics as recited in claim 1, wherein said abrasive particles are one or a mixture of at least two of: diamond, alumina, magnesia, ceria, cubic boron nitride, boron carbide, silicon oxide.
4. A high efficiency polishing disk having shear expansion characteristics as recited in claim 1, wherein said adhesive layer is one or a mixture of at least two of: natural polymers, synthetic resins, rubbers;
the rigid layer is a rigid polymer; the adsorption layer is a viscous magnetic sticker or a double-sided adhesive tape and is attached to the lower surface of the rigid layer.
5. A method of making a high efficiency polishing disk having shear expansion characteristics as recited in claim 1, comprising the steps of:
1) preparation of a material with non-Newtonian fluid characteristics: fully and mechanically stirring the viscoelastic polymer, the abrasive particles, the dispersing agent and the like uniformly according to the proportion, wherein the mass percentage of the viscoelastic polymer, the abrasive particles and the dispersing agent is as follows: 69% -85% of viscoelastic polymer, 10% -30% of abrasive particles with the particle size of 0.05-50 mu m and 1% -5% of dispersing agent, and standing the mixture in an oven for 2-5 hours at 120-200 ℃ to obtain a material with non-Newtonian fluid characteristics;
2) preparing a polishing layer; the method comprises the following steps: the adhesive and the curing agent are fully and mechanically stirred uniformly according to the proportion and then put into a die, wherein the mass percentage is as follows: 50% -90% of adhesive and 10% -50% of curing agent, heating in an oven, cooling to obtain a base plate with a groove, and filling the material with the non-Newtonian fluid characteristic into the base plate to obtain a polishing layer; the second method comprises the following steps: heating and melting the material with the non-Newtonian fluid characteristic in an oven, filling the material into a flaky fiber base material, and cooling to obtain a polishing layer;
3) taking a rigid polymer as a rigid layer, and adhering and attaching the rigid polymer to the polishing layer through an adhesive layer;
4) bonding the absorbent layer to the rigid layer;
5) and removing the part of the material with the non-Newtonian fluid characteristic higher than the substrate through the low-speed repair disc to ensure that the height of the material with the non-Newtonian fluid characteristic is consistent with that of the substrate.
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