CN112684206A - Permanent magnet type surface flow field sensor and sensor array - Google Patents
Permanent magnet type surface flow field sensor and sensor array Download PDFInfo
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Abstract
The invention relates to a permanent magnet type surface flow field sensor and a sensor array. The sensor includes: an electrode, a conductive base, an insulating layer, a substrate, and a magnet; the electrode is fixed on the conductive base, the conductive base is fixed on the first part of the substrate, the insulating layer is fixed on the second part of the substrate, and the magnet is attached to the bottom surface of the substrate. The invention can reduce the size of the underwater speedometer and realize surface installation.
Description
Technical Field
The invention relates to the field of flow field sensors, in particular to a permanent magnet type surface flow field sensor and a sensor array.
Background
The sensor is used as an important component device of underwater equipment such as an underwater robot, an underwater vehicle, an underwater glider and the like, directly determines the performance of the underwater equipment, and is different from the land or air equipment, and the underwater speed measurement is a more complex process. Because navigation systems such as GPS/GNASS/Beidou and the like cannot be used and a radio navigation method cannot be used, the existing underwater equipment navigation and guidance depend on devices such as a heavy inertial guidance component, a magnetic compass and the like; the underwater speedometer and the underwater mileometer play an important role in navigation and guidance of underwater equipment. Because the equipment such as underwater robots, underwater gliders and the like has extremely high requirements on the power consumption, the size and the weight of the sensor, in order to reduce energy consumption, the streamline appearance of the surface of the equipment needs to be protected as far as possible, and the existing underwater odometer cannot realize surface installation.
Disclosure of Invention
The invention aims to provide a permanent magnet type surface flow field sensor and a sensor array, which can realize the measurement of flow velocity by measuring the flow field distribution on the surface of a fluid so as to reduce the size of an underwater speedometer and realize surface installation.
In order to achieve the purpose, the invention provides the following scheme:
a permanent magnet surface flow field sensor comprising: an electrode, a conductive base, an insulating layer, a substrate, and a magnet; the electrode is fixed on the conductive base, the conductive base is fixed on the first part of the substrate, the insulating layer is fixed on the second part of the substrate, and the magnet is attached to the bottom surface of the substrate.
Optionally, the electrode is a silver electrode, a silver chloride electrode or a gold electrode.
Optionally, the electrode is deposited on the conductive substrate by an electroless plating process.
Optionally, the conductive substrate is a copper foil substrate, and the copper foil substrate deposits metal copper on the first portion of the surface of the substrate by a mask exposure pattern transfer method.
Optionally, the substrate is made of polymer resin or glass fiber composite material.
Optionally, the magnet is a rare earth neodymium magnet, and the rare earth neodymium magnet is attached to the substrate through epoxy resin.
The present invention also provides a permanent magnetic surface flow field sensor array, comprising: the common mode voltage suppression device comprises a plurality of electrode groups, a plurality of common mode voltage suppression electrodes, a conductive substrate, an insulating layer, a substrate and a magnet;
the plurality of electrode sets are fixed on the first part of the conductive substrate; the insulating layer is fixed on the second part of the conductive substrate, and the insulating layer is in a hollow state at the first part of the conductive substrate; the conductive substrate is fixed on the substrate, and the magnet is attached to the bottom surface of the substrate;
the structure of a plurality of electrode groups is the same, each electrode group corresponds to one common-mode voltage suppression electrode, and each electrode group comprises a first electrode, a second electrode, a third electrode and a fourth electrode; common mode voltage suppression electrodes corresponding to the electrode group are positioned in the middle positions of the first electrode, the second electrode, the third electrode and the fourth electrode and are fixed on the conductive substrate; the first electrode and the second electrode are located in a first measurement direction and are symmetrical with respect to the common mode voltage rejection electrode; the third electrode and the fourth electrode are located in a second measurement direction and are symmetrical with respect to the common mode voltage rejection electrode, and the first measurement direction is perpendicular to the second measurement direction.
Optionally, the insulating layer and all the electrode sets together form a measurement surface of the permanent magnet surface flow field sensor array.
Optionally, the conductive substrate is a copper foil substrate, and the copper foil substrate deposits metal copper on the surface of the substrate by a mask exposure pattern transfer method.
Optionally, the magnet is a rare earth neodymium magnet, and the rare earth neodymium magnet is attached to the substrate through epoxy resin.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the sensor and the sensor array belong to open boundary measurement, and have no limitation on flow field environment and no additional flow resistance. Because all the components in the sensor and the sensor array are on the same surface, the sensor and the sensor array have no interference to a flow field, and the special fluid line shape on the surface of an installation object can not be damaged. Compared with the traditional alternating current coil excitation electromagnetic flowmeter, the invention uses the permanent magnet for excitation and has the advantages of low power consumption, light weight, convenient manufacture, simple signal processing and the like. Compared with all electromagnetic flowmeters, the invention uses the surface magnetic field to carry out open boundary measurement, can obtain flow field distribution signals including the flow velocity on the surface of the fluid, and can realize the flow field distribution measurement in a specific area through a plurality of planar electrode arrays.
Compared with a permanent magnetic flowmeter applied to the environment of reactor liquid metal and the like, the sensor array introduces the common-mode voltage suppression electrode, and solves the problem of drift voltage signal interference when the permanent magnetic excitation electromagnetic fluid sensor is applied to the ionic conductive liquid. Common mode voltage at the two measuring electrodes is eliminated through the common mode voltage suppression electrode in an opposite phase mode, and differential mode voltage drift caused by unbalanced differential impedance when the common mode voltage exists is suppressed.
Moreover, the invention does not need to destroy the streamline shape of the surface of the equipment, does not generate additional flow resistance, does not need excitation current to bring ultra-low power consumption, has extremely low weight and volume, and is very easy to carry out mass production with low cost through a circuit board or a flexible circuit technology
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a perspective view of the structure of embodiment 1 of the present invention;
FIG. 2 is an exploded view of example 1 of the present invention;
FIG. 3 is a perspective view of embodiment 2 of the present invention;
fig. 4 is an exploded view of example 2 of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example 1
The present embodiment provides a permanent magnet type surface flow field sensor, as shown in fig. 1 and 2, comprising an electrode 1, a conductive substrate 2, an insulating layer 3, a substrate 4 and a magnet 5. The electrode 1 is fixed on the conductive base 2, the conductive base 2 is fixed on a first portion of the substrate 4, the insulating layer 3 is fixed on a second portion of the substrate 4, and the magnet 5 is attached to the bottom surface of the substrate 4.
Specifically, the electrode 1 is a silver electrode, a silver chloride electrode or a gold electrode, and is deposited on the surface of the conductive substrate 2 by an electroless plating method for directly contacting an ion conductive fluid such as water, a sodium chloride solution, seawater, or the like. The conductive base 2 is a copper foil base, metal copper is deposited on the surface of the substrate 4 according to a required pattern by a mask exposure pattern transfer method to form a conductive loop, an electric signal is transmitted to a signal amplifier, and the voltage difference of the electrode 1 is in direct proportion to the flow speed at the position. The copper foil bases illustrated in fig. 1 and 2 are rectangular, wherein the number of the electrodes 1 and the number of the conductive bases 2 are 2, the electrodes 1 correspond to the conductive bases 2 one by one, and the two conductive bases 2 are respectively located on two sides of the substrate 4, which is the first portion.
The insulating layer 3 is formed by a mask exposure pattern transfer method using an ultraviolet curable resin to form a surface insulating layer 3 between the electrodes 1, the insulating layer 3 is attached to a second portion of the substrate 4, the insulating layer 3 is located on the outermost layer of the sensor and on the same surface as the electrodes 1, and the insulating layer 3 illustrated in fig. 1 and 2 is located in the middle portion of the substrate 4. In this embodiment, the substrate 4 is made of polymer resin or glass fiber composite material. The magnet 5 is a rare earth neodymium magnet, has a surface magnetic field strength of 0.4T or more, and is attached to the substrate 4 using a material such as epoxy resin.
In this embodiment, the rare earth neodymium strong magnet is attached to the sensor substrate 4 to generate a strong magnetic field B perpendicular to the surface of the substrate 4, the ionic conduction fluid flows through the sensor measurement surface formed by the electrodes 1 and the inter-electrode insulating layer 3, the redistribution of ionic charges on the fluid surface due to the maxwell force action forms a surface potential difference E, the surface potential difference E acts on the electrode 1 with the distance D between the two electrodes, the potential difference is proportional to the component of the fluid flow velocity V at the electrode 1 in the direction perpendicular to the distance D between the two electrodes, and the proportionality coefficient is related to not only the magnetic field strength B of the sensor, the distance D between the electrodes, but also the distribution of the flow. The surface potential difference E is conducted to an amplifier through the copper foil substrate for subsequent measurement and processing.
Example 2
The present embodiment provides a permanent magnet surface flow field sensor array, as shown in fig. 2 and 3, including: a plurality of electrode groups, a plurality of common mode voltage suppression electrodes 10, a conductive base 2, an insulating layer 3, a substrate 4, and a magnet 5. The plurality of electrode sets are fixed on a first portion of the conductive substrate 2; the insulating layer 3 is fixed on the second part of the conductive substrate 2, and the insulating layer 3 is in a hollow state at the first part of the conductive substrate 2; the conductive base 2 is fixed on the substrate 4, and the magnet 5 is attached to the bottom surface of the substrate 4. The same as the embodiment 1, the base is a copper foil base, metal copper is deposited on the surface of the substrate 4 according to a required pattern by a mask exposure pattern transfer method, a conductive circuit is formed, and an electric signal is transmitted to a signal amplifier; the substrate 4 is a substrate of a sensor and is made of polymer resin, glass fiber composite material substrate, or the like; the magnet 5 is a rare earth neodymium magnet, the surface magnetic field intensity can reach more than 0.4T, and materials such as epoxy resin and the like are attached to the sensor substrate 4.
In this embodiment, the structure of a plurality of electrode groups is the same, each electrode group corresponds to one common mode voltage suppression electrode, each electrode group includes a first electrode 6, a second electrode 8, a third electrode 7 and a fourth electrode 9, and the first electrode 6, the second electrode 8, the third electrode 7 and the fourth electrode 9 are deposited on the copper foil substrate by using an electroless gold plating and immersion process. The common mode voltage suppression electrode corresponding to the electrode group is located in the middle of the first electrode, the second electrode, the third electrode and the fourth electrode, is fixed on the conductive substrate 2, and is used for suppressing polarization drift voltage interference caused by differential mode voltage components due to common mode voltage. The first electrode and the second electrode are located in a first measurement direction and are symmetrical with respect to the common mode voltage rejection electrode; the third electrode and the fourth electrode are located in a second measurement direction and are symmetrical with respect to the common mode voltage rejection electrode, and the first measurement direction is perpendicular to the second measurement direction.
In the embodiment, a rare earth neodymium strong magnet is attached to a sensor substrate 4 to generate a strong magnetic field B vertical to the substrate surface, an ion conductive fluid flows through a sensor measurement surface formed by electrodes 6, 7, 8, 9 and 10 and an inter-electrode insulating layer 3, the redistribution of ionic charges on the fluid surface forms surface potential distribution due to the action of maxwell force, the potentials at the measurement electrodes 6, 7, 8 and 9 are respectively P6, P7, P8 and P9), the potential difference E1 between the two electrodes at the printing electrodes 6 and 8 with the distance D1 is P6-P8, and the potential difference E1 is proportional to the component of the fluid flow velocity V at the printing electrodes 6 and 8 in the direction vertical to the distance D1 between the two electrodes; acting on the printed electrodes 7 and 9 with the distance D2 between the two electrodes, the potential difference E2-P7-P9 is proportional to the component of the fluid flow speed V at the printed electrodes 7 and 9 in the direction perpendicular to the distance D2 between the two electrodes, and the proportionality coefficient is not only related to the magnetic field intensity B of the sensor, the distances D1 and D2 between the two electrodes, but also related to the distribution of the flow field in the direction perpendicular to the surface of the sensor. The surface potentials P6, P7, P8, P9 were conducted to an amplifier via the copper foil substrate 2 for subsequent measurement and processing.
Due to the existence of the electric double layer (DEL), the polarization voltage on the surface of the metal electrode is applied to the input end of the differential amplifier in the form of the common mode voltage, and due to unbalanced differential impedance, the common mode voltage causes the differential mode voltage component to form a polarization drift voltage interference measurement result, so the invention provides a common mode voltage suppression electrode method, which outputs the common mode voltage E3 (P6+ P7+ P8+ P9)/4 to the common mode voltage suppression electrode 10 through an inverter to realize active suppression of the polarization drift voltage, thereby effectively improving the measurement accuracy and reliability.
Compared with the traditional cylindrical closed boundary electromagnetic flowmeter, the sensor belongs to open boundary measurement, has no limitation on the flow field environment, and does not generate additional flow resistance. Because all components are arranged on the measuring surface of the sensor consisting of the measuring electrode 1 and the interelectrode insulating layer 3, the flow field is not interfered, and the special fluid line shape of the surface of the mounting object is not damaged.
Compared with the traditional alternating current coil excitation electromagnetic flowmeter, the permanent magnet excitation electromagnetic flowmeter has the advantages of being excited by the permanent magnet 5, free of current excitation, light in weight, convenient to manufacture, simple in signal processing and the like, meanwhile, the surface magnetic field intensity of the permanent magnet 5 can easily reach more than 0.4T and is far higher than 0.04T which can be reached by current coil excitation, and the measurement sensitivity is more than 10 times that of the traditional current coil excitation.
Compared with all electromagnetic flowmeters, the open boundary measurement is carried out by using the surface magnetic field, flow field distribution signals including the flow velocity on the surface of the fluid can be obtained, the flow field distribution measurement in a specific area can be realized through a plurality of planar electrode arrays (6, 7, 8, 9 and 10), the ratio of the potential difference E1 to E2 is a flow velocity vector signal, the flow velocity at a certain position can be measured, and the vector direction of the flow velocity at the certain position can also be measured.
Compared with a permanent magnetic flowmeter applied to the environment of reactor liquid metal and the like, the invention introduces the common mode voltage suppression electrode 10, and solves the problem of drift voltage signal interference when the permanent magnetic excitation electromagnetic fluid sensor is applied to the ionic conductive liquid. The common mode voltage E3 at the two measuring electrodes is eliminated in an opposite phase mode through the common mode voltage suppression electrode, namely (P6+ P7+ P8+ P9)/4, and differential mode voltage drift caused by differential impedance imbalance when the common mode voltage exists is suppressed.
Compared with a Doppler flowmeter, the invention can realize fine measurement of the flow velocity of the surface flow field, the volume/weight of the flow field sensor is far lower than that of the traditional flow field sensor, and the power consumption of the flow field sensor is lower than 10mA current because the excitation coil is not needed.
Compared with a towed anemometer, the invention can be installed on any surface of an underwater vehicle/underwater robot/torpedo weapon/underwater glider detector, does not destroy the original fluid linearity, and does not bring additional flow resistance. The polymer resin material used for the sensor substrate has good flexibility, and an elastic material substrate such as polyurethane/polyimide can be used for the surface with larger curvature.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A permanent magnet surface flow field sensor, comprising: an electrode, a conductive base, an insulating layer, a substrate, and a magnet; the electrode is fixed on the conductive base, the conductive base is fixed on the first part of the substrate, the insulating layer is fixed on the second part of the substrate, and the magnet is attached to the bottom surface of the substrate.
2. The permanent magnet surface flow field sensor of claim 1, wherein said electrode is a silver electrode, a silver chloride electrode, or a gold electrode.
3. A permanent magnet surface flow field sensor according to claim 2, wherein said electrodes are deposited on said electrically conductive substrate by electroless plating.
4. The permanent magnet surface flow field sensor of claim 1, wherein said electrically conductive substrate is a copper foil substrate, said copper foil substrate having metallic copper deposited on said first portion of said substrate surface by a mask exposure pattern transfer process.
5. The permanent magnet surface flow field sensor according to claim 1, wherein the substrate is made of polymer resin or glass fiber composite material.
6. The permanent magnet surface flow field sensor of claim 1, wherein said magnet is a rare earth neodymium magnet attached to said substrate by epoxy.
7. A permanent magnet surface flow field sensor array, comprising: the common mode voltage suppression device comprises a plurality of electrode groups, a plurality of common mode voltage suppression electrodes, a conductive substrate, an insulating layer, a substrate and a magnet;
the plurality of electrode sets are fixed on the first part of the conductive substrate; the insulating layer is fixed on the second part of the conductive substrate, and the insulating layer is in a hollow state at the first part of the conductive substrate; the conductive substrate is fixed on the substrate, and the magnet is attached to the bottom surface of the substrate;
the structure of a plurality of electrode groups is the same, each electrode group corresponds to one common-mode voltage suppression electrode, and each electrode group comprises a first electrode, a second electrode, a third electrode and a fourth electrode; common mode voltage suppression electrodes corresponding to the electrode group are positioned in the middle positions of the first electrode, the second electrode, the third electrode and the fourth electrode and are fixed on the conductive substrate; the first electrode and the second electrode are located in a first measurement direction and are symmetrical with respect to the common mode voltage rejection electrode; the third electrode and the fourth electrode are located in a second measurement direction and are symmetrical with respect to the common mode voltage rejection electrode, and the first measurement direction is perpendicular to the second measurement direction.
8. The array of permanent magnet surface flow field sensors of claim 7 wherein said insulating layer and all of said electrode sets together form a measuring surface of said array of permanent magnet surface flow field sensors.
9. The array of permanent magnet surface flow field sensors of claim 7 wherein the electrically conductive substrate is a copper foil substrate, the copper foil substrate having metallic copper deposited onto the substrate surface by a mask exposure pattern transfer process.
10. The array of permanent magnet surface flow field sensors of claim 7 wherein said magnets are rare earth neodymium magnets attached to said substrate by epoxy.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114089232A (en) * | 2021-11-25 | 2022-02-25 | 西安电子科技大学 | Magnetic field sensor and magnetic field measurement method |
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