CN112661282A - Collecting and recycling device for semiconductor wafer cleaning pure water - Google Patents
Collecting and recycling device for semiconductor wafer cleaning pure water Download PDFInfo
- Publication number
- CN112661282A CN112661282A CN202011445088.XA CN202011445088A CN112661282A CN 112661282 A CN112661282 A CN 112661282A CN 202011445088 A CN202011445088 A CN 202011445088A CN 112661282 A CN112661282 A CN 112661282A
- Authority
- CN
- China
- Prior art keywords
- filter cover
- pure water
- filter
- cover
- box body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 122
- 238000004140 cleaning Methods 0.000 title claims abstract description 41
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 238000004064 recycling Methods 0.000 title claims abstract description 22
- 230000007704 transition Effects 0.000 claims abstract description 30
- 238000011084 recovery Methods 0.000 claims abstract description 8
- 239000012528 membrane Substances 0.000 claims abstract description 7
- 238000001728 nano-filtration Methods 0.000 claims abstract description 6
- 235000012431 wafers Nutrition 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 16
- 239000000523 sample Substances 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 11
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 238000001914 filtration Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011897 real-time detection Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a collecting and recycling device for semiconductor wafer cleaning pure water, which comprises a box body, wherein a recovery nozzle is arranged on the surface of one side of the box body, and a transition box is welded on the surface of the other side of the box body. Has the advantages that: according to the invention, the cylindrical first filter cover, the cylindrical second filter cover and the cylindrical third filter cover with sequentially reduced inner diameters are stretched into the box body, then the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are rotated by the handle, so that the external threads of the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are respectively and fixedly connected with the annular thread grooves on the bottom surface of the inner side of the box body, until the rubber rings adhered to the lower surfaces of the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are tightly attached to the bottom surface of the inner side of the box body, the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are installed, and the cleaning pure water is guided into the box body through the recovery nozzle, so that the cleaning pure water sequentially penetrates through the filter screens and the nanofiltration membranes of the first filter cover, the second filter cover and the third filter cover, and the pure water is conveniently reused.
Description
Technical Field
The invention relates to the technical field of pure water filtering and recycling, in particular to a collecting and recycling device for semiconductor wafer cleaning pure water.
Background
The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; the silicon wafer can be processed into various circuit device structures to become IC products with specific electrical functions, a layer of Al2O3 of about 2um and glycerin mixture is attached to the surface of the wafer for protection, and chemical etching and surface cleaning are required before the manufacturing.
At present, a large amount of pure water is needed to be used when the surface of a wafer is cleaned, and the pure water after the wafer is cleaned is often directly discharged, so that the wafer is cleaned to generate a large amount of consumption waste of the pure water, energy conservation and environmental protection are not facilitated, and the investment cost for cleaning the wafer is increased.
An effective solution to the problems in the related art has not been proposed yet.
Disclosure of Invention
Technical problem to be solved
In view of the deficiencies of the prior art, the present invention provides a device for collecting and recycling pure cleaning water for semiconductor wafers, which has the advantages of recycling and reusing pure cleaning water, and further solves the problems of the prior art.
(II) technical scheme
In order to realize the advantages of recycling and reusing the cleaning pure water, the invention adopts the following specific technical scheme:
a collecting and recycling device for semiconductor wafer cleaning pure water comprises a box body, wherein a recovery nozzle is arranged on the surface of one side of the box body, a transition box is welded on the surface of the other side of the box body, a first filter cover, a second filter cover and a third filter cover which are sequentially reduced in inner diameter are arranged on the inner side of the box body, handles are welded on the top surfaces of the first filter cover, the second filter cover and the third filter cover, two filter screens are arranged on the inner sides of the first filter cover, the second filter cover and the third filter cover respectively, a nanofiltration membrane is fixedly arranged between the two filter screens, external threads are arranged on the lower surfaces of the first filter cover, the second filter cover and the third filter cover respectively, the external threads are fixedly connected with the inner bottom surface of the box body through thread grooves, rubber rings are connected above the external threads in a gluing mode, and are tightly attached to the inner bottom surface of the box body, the water pump is characterized in that edge rings are welded on the surfaces of the upper portions of the first filter cover, the second filter cover and the third filter cover, the top surface of the transition box is communicated with a water guide pipe, a water pump is mounted on the surface of the water guide pipe, one end of the water guide pipe is connected with a metal hose in a flange mode, and one end of the metal hose extends to the inner side of the third filter cover.
Further, the side welding of transition case has the side pocket, and has laid the pure water resistivity monitor in the inboard activity of side pocket, the top surface of pure water resistivity monitor is connected with test probe through the wire, test probe's one end runs through and extends to the transition incasement portion.
Furthermore, the top surface of box has been seted up and has been placed the mouth, and places mouthful interior roof through fastening bolt fixedly connected with, the through hole has been seted up to the center department of roof top surface, the four corners of roof all corresponds fastening bolt and has seted up the through-hole.
Furthermore, the bottom surface of the transition box is communicated with a water outlet pipe, and the surface of the water outlet pipe is provided with a manual valve.
Furthermore, a supporting disc is fixedly arranged on the surface of the metal hose, a magnetic block is embedded and installed on the surface of one side of the supporting disc, and the magnetic block is connected with the side ring of the third filter cover in an adsorption mode.
Furthermore, the first filter cover, the second filter cover and the third filter cover are all of cylindrical structures, and two handles are welded on the top surfaces of the first filter cover, the second filter cover and the third filter cover.
Furthermore, the surface of transition box is provided with control panel, and control panel's output and water pump electric connection.
Furthermore, a plurality of thread grooves with annular structures are formed in the bottom surface of the inner side of the box body, and the thread grooves are in one-to-one correspondence with the first filter cover, the second filter cover and the third filter cover respectively.
Furthermore, a display screen is arranged on the surface of the pure water resistivity monitor, and a U-shaped through groove is formed in the surface of the side pocket corresponding to the display screen of the pure water resistivity monitor.
Furthermore, the surface of the lower part of the box body is welded with a push handle with a U-shaped structure, and the bottom surface of the box body is provided with a movable wheel.
(III) advantageous effects
Compared with the prior art, the invention provides a device for collecting and recycling pure water for cleaning semiconductor wafers, which has the following beneficial effects:
(1) the cylindrical first filter cover, the cylindrical second filter cover and the cylindrical third filter cover with the sequentially reduced inner diameters are stretched into the box body, then the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are rotated through the handle, the external threads of the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are respectively and fixedly connected with the annular thread grooves on the bottom surface of the inner side of the box body until the rubber rings adhered to the lower surfaces of the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are tightly attached to the bottom surface of the inner side of the box body, the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover are mounted, the cleaning pure water is guided into the box body through the recovery nozzle, the cleaning pure water is enabled to sequentially penetrate through the filter screens and the nanofiltration membranes of the first filter cover, the cylindrical second filter cover and the cylindrical third filter cover, and the cleaning cost of the semiconductor wafer is reduced.
(2) According to the invention, the pure water resistivity monitor is placed in the side pocket of the transition box, then the detection probe connected with the pure water resistivity monitor through the line is extended into the transition box, so that the detection of the filtered pure water is facilitated, the water pump is started through the control panel, the water guide pipe and the metal hose are promoted to introduce the pure water inside the third filter cover into the transition box, the detection probe is promoted to be in contact with the filtered cleaning pure water until the resistivity of the filtered cleaning pure water is displayed by the display screen of the pure water resistivity monitor, so that the real-time detection of the filtering effect of the cleaning pure water is facilitated, and the filtering quality of the cleaning pure water is ensured.
(3) According to the invention, the top plate is separated from the placing opening on the top surface of the box body by unlocking the fastening bolts at the four corners of the top plate, and then the first filter cover, the second filter cover and the third filter cover are rotated by the handle until the first filter cover, the second filter cover and the third filter cover are separated from the annular thread groove on the bottom surface of the box body, so that the placing opening of the box body is in an exposed state without obstacles, and the cleaning of the interior of the box body and the replacement of the filter covers are convenient.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic view showing the internal structure of a collection and reuse apparatus for cleaning pure water of a semiconductor wafer according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a transition box of the collection and reuse apparatus for cleaning pure water of semiconductor wafers according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a first filter cap of the pure water collecting and recycling apparatus for semiconductor wafer cleaning according to an embodiment of the present invention;
FIG. 4 is a schematic top plate structure of a collection and reuse apparatus for pure water for semiconductor wafer cleaning according to an embodiment of the present invention;
FIG. 5 is a sectional view of the inside of a tank of a collection and reuse apparatus for semiconductor wafer cleaning pure water according to an embodiment of the present invention;
FIG. 6 is a partial schematic structural view of a metal hose of a collection and reuse apparatus for pure water used for cleaning semiconductor wafers according to an embodiment of the present invention;
fig. 7 is an enlarged view a of a collection and reuse apparatus for semiconductor wafer cleaning pure water according to an embodiment of the present invention.
In the figure:
1. a box body; 2. a recovery nozzle; 3. a first filter housing; 4. a second filter housing; 5. a third filter housing; 6. a moving wheel; 7. a pushing handle; 8. a water outlet pipe; 9. a transition box; 10. a side pocket; 11. detecting a probe; 12. a water pump; 13. a water conduit; 14. a top plate; 15. a grip; 16. a metal hose; 17. a support disc; 18. a control panel; 19. a pure water resistivity monitor; 20. an edge ring; 21. filtering with a screen; 22. an external thread; 23. a rubber ring; 24. fastening a bolt; 25. a through hole; 26. a through hole; 27. a thread groove; 28. a magnetic block; 29. a nanofiltration membrane; 30. the mouth is placed.
Detailed Description
For further explanation of the various embodiments, the drawings which form a part of the disclosure and which are incorporated in and constitute a part of this specification, illustrate embodiments and, together with the description, serve to explain the principles of operation of the embodiments, and to enable others of ordinary skill in the art to understand the various embodiments and advantages of the invention, and, by reference to these figures, reference is made to the accompanying drawings, which are not to scale and wherein like reference numerals generally refer to like elements.
According to an embodiment of the present invention, there is provided a collection and reuse apparatus for cleaning pure water for a semiconductor wafer.
Referring to the drawings and the detailed description, the invention will be further described, as shown in fig. 1-7, according to an embodiment of the invention, a collecting and recycling device for pure water used for cleaning semiconductor wafers comprises a box body 1, a recycling nozzle 2 is arranged on one side surface of the box body 1, a transition box 9 is welded on the other side surface of the box body 1, a first filter mantle 3, a second filter mantle 4 and a third filter mantle 5 with successively reduced inner diameters are arranged inside the box body 1, a handle 15 is welded on the top surfaces of the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5, two filter nets 21 are arranged on the inner sides of the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5, a nanofiltration membrane 29 is fixedly arranged between the two filter nets 21, external threads 22 are arranged on the lower surfaces of the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5, and the external threads 22 are fixedly connected with the bottom surface of the inner side of the box body 1 through thread grooves, the lower surfaces of the first filter cover 3, the second filter cover 4 and the third filter cover 5 are positioned above the external thread 22 and are connected with a rubber ring 23 in a gluing way, the rubber ring 23 is tightly attached to the inner bottom surface of the box body 1, the upper surfaces of the first filter cover 3, the second filter cover 4 and the third filter cover 5 are welded with an edge ring 20, the cylindrical first filter cover 3, the second filter cover 4 and the third filter cover 5 with sequentially reduced inner diameters extend into the box body 1, then the first filter cover 3, the second filter cover 4 and the third filter cover 5 are rotated through a handle 15 to ensure that the external thread 22 of the first filter cover 3, the second filter cover 4 and the third filter cover 5 are respectively and fixedly connected with a plurality of annular thread grooves 27 on the inner bottom surface of the box body 1 until the rubber ring 23 bonded to the lower surfaces of the first filter cover 3, the second filter cover 4 and the third filter cover 5 is tightly attached to the inner bottom surface of the box body 1, and the installation of the first filter cover 3, the second filter cover 4 and the third filter cover 5 is realized, when filtering the pure water of collection, through washing inside the pure water is leading-in box 1 by recovery mouth 2, make and wash the pure water and pass through first filter mantle 3 in proper order, the filter screen 21 and the receive filter membrane 29 of second filter mantle 4 and third filter mantle 5, make and wash the pure water and obtain the multiple filtration, make things convenient for the reuse of pure water, wherein, first filter mantle 3, the limit ring 20 of second filter mantle 4 and third filter mantle 5 has the spacing effect of certain degree, can avoid first filter mantle 3, take place excessive relative slope between second filter mantle 4 and the third filter mantle 5, first filter mantle 3, second filter mantle 4 and third filter mantle 5 are all the same except that other structures of different sizes.
In one embodiment, a side pocket 10 is welded on the side surface of the transition box 9, a pure water resistivity monitor 19 is movably placed on the inner side of the side pocket 10, the top surface of the pure water resistivity monitor 19 is connected with a detection probe 11 through a lead, one end of the detection probe 11 penetrates through and extends into the transition box 9, the top surface of the transition box 9 is communicated with a water guide pipe 13, a water pump 12 is installed on the surface of the water guide pipe 13, one end of the water guide pipe 13 is connected with a metal hose 16 in a flange mode, one end of the metal hose 16 extends into the third filter cover 5, a control panel 18 is arranged on the outer surface of the transition box 9, the output end of the control panel 18 is electrically connected with the water pump 12, the pure water resistivity monitor 19 is placed in the side pocket 10 of the transition box 9, then the detection probe 11 connected with a line on the pure water resistivity monitor 19 extends into the transition box 9, and turn on the water pump 12 through the control panel 18, impel aqueduct 13 and metal collapsible tube 16 to introduce the inboard pure water of third filter mantle 5 into the transition box 9, impel the measuring probe 11 to contact with the washing pure water after filtering, the washing pure water resistivity after filtering is shown by the display screen of pure water resistivity monitor 19 own, thereby conveniently wash the real-time detection of pure water filter effect, the filtration quality of guarantee washing pure water (the numerical value that accessible pure water resistivity monitor 19 detected judges first filter mantle 3, the filtration quality of second filter mantle 4 and third filter mantle 5, and then conveniently in time change first filter mantle 3, second filter mantle 4 and third filter mantle 5), wherein, pure water resistivity monitor 19 does not do excessive redundant description for prior art.
In one embodiment, a placing opening 30 is formed in the top surface of the box body 1, a top plate 14 is fixedly connected in the placing opening 30 through a fastening bolt 24, a through hole 26 is formed in the center of the top surface of the top plate 14, through holes 25 are formed in four corners of the top plate 14 corresponding to the fastening bolt 24, the top plate 14 is enabled to be separated from the placing opening 30 in the top surface of the box body 1 by unlocking the fastening bolt 24 in the four corners of the top plate 14, then the first filter cover 3, the second filter cover 4 and the third filter cover 5 are rotated through the handle 15 until the first filter cover 3, the second filter cover 4 and the third filter cover 5 are separated from the annular thread groove 27 in the bottom surface of the box body 1, so that the placing opening 30 of the box body 1 is in an obstacle-free exposed state, and the inside of.
In one embodiment, the bottom surface of the transition box 9 is communicated with the water outlet pipe 8, the surface of the water outlet pipe 8 is provided with a manual valve, and the filtered pure water is driven to be discharged from the water outlet pipe 8 by opening the manual valve, so that secondary utilization is facilitated.
In one embodiment, the supporting plate 17 is fixedly arranged on the surface of the metal hose 16, the magnet 28 is embedded and installed on one side surface of the supporting plate 17, the magnet 28 is in adsorption connection with the edge ring 20 of the third filter cover 5, and the magnet 28 is in adsorption connection with the edge ring 20 of the third filter cover 5, so that the stability of the metal hose 16 in the inner side of the third filter cover 5 can be increased, and the metal hose 16 is prevented from being separated from the third filter cover 5 when pure water is led out.
In one embodiment, the first filter cover 3, the second filter cover 4 and the third filter cover 5 are all in a cylindrical structure, two handles 15 are welded on the top surfaces of the first filter cover 3, the second filter cover 4 and the third filter cover 5, and the first filter cover 3, the second filter cover 4 and the third filter cover 5 in the cylindrical structure can perform multi-layer filtration on cleaning pure water, so that the filtering effect is ensured, and the filter covers are convenient to disassemble and assemble through the handles 15.
In one embodiment, the bottom surface of the inner side of the box body 1 is provided with a plurality of thread grooves 27 with an annular structure, and the plurality of thread grooves 27 respectively correspond to the first filter housing 3, the second filter housing 4 and the third filter housing 5 one by one, wherein the inner sides of the plurality of thread grooves 27 are provided with internal threads corresponding to the external threads 22, which facilitates the installation of the first filter housing 3, the second filter housing 4 and the third filter housing 5.
In one embodiment, a display screen is arranged on the surface of the pure water resistivity monitor 19, a U-shaped through groove is formed in the surface of the side pocket 10 corresponding to the display screen of the pure water resistivity monitor 19, the display screen of the pure water resistivity monitor 19 can be conveniently moved through the U-shaped through groove of the side pocket 10, and the display screen can be observed conveniently.
In one embodiment, a push handle 7 with a U-shaped structure is welded on the surface of the lower portion of the box body 1, the moving wheels 6 are arranged on the bottom surface of the box body 1, and the box body 1 is convenient to move through the moving wheels 6 and the push handle 7, so that the use flexibility is improved.
The working principle is as follows:
when the device is used, the box body 1 is moved to a proper position through the push handle 7 and the moving wheel 6, then the power is switched on, the cylindrical first filter mantle 3, the second filter mantle 4 and the third filter mantle 5 with sequentially reduced inner diameters are stretched into the box body 1, then the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5 are rotated through the handle 15, the external threads 22 of the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5 are respectively and fixedly connected with the plurality of annular thread grooves 27 on the inner bottom surface of the box body 1 until the rubber rings 23 adhered to the lower surfaces of the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5 are tightly adhered to the inner bottom surface of the box body 1, so that the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5 are installed, when the collected pure water is filtered, the pure water is guided into the box body 1 through the recovery nozzle 2, so that the pure water is sequentially permeated through the filter screens 21 and 29 of the first filter mantle 3, the second filter mantle 4 and the third filter mantle 5, the pure water is filtered in multiple layers, the pure water is convenient to recycle, when water is discharged and detected, the pure water resistivity monitor 19 is placed in the side pocket 10 of the transition box 9, the detection probe 11 connected with a line on the pure water resistivity monitor 19 extends into the transition box 9, the detection after the pure water is filtered is convenient, the water pump 12 is started through the control panel 18, the water guide pipe 13 and the metal hose 16 are prompted to introduce the pure water inside the third filter cover 5 into the transition box 9, the detection probe 11 is prompted to be contacted with the filtered pure water until the resistivity of the filtered pure water is displayed by the display screen of the pure water resistivity monitor 19, the filtering effect of the pure water is convenient to detect in real time, the filtering quality of the pure water is ensured (the filtering quality of the first filter cover 3, the second filter cover 4 and the third filter cover 5 can be judged through the value detected by the pure water resistivity monitor 19, and then conveniently in time change first filter mantle 3, second filter mantle 4 and third filter mantle 5), when needs clearance box 1 or change the filter mantle, through the fastening bolt 24 of unblock roof 14 four corners, make roof 14 break away from the mouth 30 of placing of box 1 top surface, then rotate first filter mantle 3 through handle 15, second filter mantle 4 and third filter mantle 5, until first filter mantle 3, second filter mantle 4 and third filter mantle 5 all break away from the annular thread groove 27 of box 1 bottom surface, make the mouth 30 of placing of box 1 be in accessible exposed state, make things convenient for the clearance and the filter mantle change of box 1 inside.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The collecting and recycling device for the semiconductor wafer cleaning pure water is characterized by comprising a box body (1), wherein a recovery nozzle (2) is arranged on one side surface of the box body (1), a transition box (9) is welded on the other side surface of the box body (1), a first filter cover (3), a second filter cover (4) and a third filter cover (5) with sequentially reduced inner diameters are arranged on the inner side of the box body (1), handles (15) are welded on the top surfaces of the first filter cover (3), the second filter cover (4) and the third filter cover (5), two filter screens (21) are arranged on the inner sides of the first filter cover (3), the second filter cover (4) and the third filter cover (5), a nanofiltration membrane (29) is fixedly arranged between the two filter screens (21), external threads (22) are arranged on the lower surfaces of the first filter cover (3), the second filter cover (4) and the third filter cover (5), and external screw thread (22) are through thread groove (27) and the inboard bottom surface fixed connection of box (1), the top veneer that the lower part surface of first straining cover (3), second straining cover (4) and third straining cover (5) is located external screw thread (22) is connected with rubber ring (23), and rubber ring (23) and the inboard bottom surface of box (1) closely laminate, there are limit ring (20) first straining cover (3), second straining cover (4) and third straining cover (5) upper portion skin weld, the top surface intercommunication of transition box (9) has aqueduct (13), and the surface mounting of aqueduct (13) has water pump (12), the one end flange joint of aqueduct (13) has metal collapsible tube (16), and the one end of metal collapsible tube (16) extends to third straining cover (5) inboardly.
2. The device for collecting and recycling pure water for cleaning semiconductor wafers as claimed in claim 1, wherein a side pocket (10) is welded on the side surface of the transition box (9), a pure water resistivity monitor (19) is movably arranged inside the side pocket (10), the top surface of the pure water resistivity monitor (19) is connected with a detection probe (11) through a wire, and one end of the detection probe (11) penetrates through and extends into the transition box (9).
3. The device for collecting and recycling pure water for cleaning semiconductor wafers as claimed in claim 1, wherein a placing opening (30) is formed in the top surface of the box body (1), a top plate (14) is fixedly connected in the placing opening (30) through a fastening bolt (24), a through hole (26) is formed in the center of the top surface of the top plate (14), and through holes (25) are formed in four corners of the top plate (14) corresponding to the fastening bolt (24).
4. A collecting and recycling device for pure water used for cleaning semiconductor wafers as claimed in claim 1, wherein the bottom surface of the transition box (9) is communicated with a water outlet pipe (8), and a manual valve is arranged on the surface of the water outlet pipe (8).
5. The device for collecting and recycling pure water for cleaning the semiconductor wafer as claimed in claim 1, wherein a support plate (17) is fixedly arranged on the surface of the metal hose (16), a magnetic block (28) is embedded and mounted on one side surface of the support plate (17), and the magnetic block (28) is in adsorption connection with the edge ring (20) of the third filter cover (5).
6. The device for collecting and recycling pure water for cleaning semiconductor wafers as claimed in claim 1, wherein the first filter cover (3), the second filter cover (4) and the third filter cover (5) are all cylindrical structures, and two handles (15) are welded on the top surfaces of the first filter cover (3), the second filter cover (4) and the third filter cover (5).
7. A collection and reuse apparatus for pure water used for semiconductor wafer cleaning according to claim 1, characterized in that said transition box (9) is provided with a control panel (18) on its outer surface, and the output end of the control panel (18) is electrically connected to the water pump (12).
8. The device for collecting and recycling pure water for cleaning semiconductor wafers as claimed in claim 1, wherein the bottom surface of the inner side of the box body (1) is provided with a plurality of thread grooves (27) with annular structures, and the plurality of thread grooves (27) are respectively in one-to-one correspondence with the first filter housing (3), the second filter housing (4) and the third filter housing (5).
9. The device for collecting and recycling pure water for cleaning semiconductor wafers as claimed in claim 2, wherein a display screen is arranged on the surface of the pure water resistivity monitor (19), and a U-shaped through groove is formed on the surface of the side pocket (10) corresponding to the display screen of the pure water resistivity monitor (19).
10. The device for collecting and recycling pure water for cleaning semiconductor wafers as claimed in claim 1, wherein a push handle (7) with a U-shaped structure is welded on the lower surface of the box body (1), and a moving wheel (6) is arranged on the bottom surface of the box body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011445088.XA CN112661282A (en) | 2020-12-08 | 2020-12-08 | Collecting and recycling device for semiconductor wafer cleaning pure water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011445088.XA CN112661282A (en) | 2020-12-08 | 2020-12-08 | Collecting and recycling device for semiconductor wafer cleaning pure water |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112661282A true CN112661282A (en) | 2021-04-16 |
Family
ID=75402018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011445088.XA Pending CN112661282A (en) | 2020-12-08 | 2020-12-08 | Collecting and recycling device for semiconductor wafer cleaning pure water |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112661282A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2481392Y (en) * | 2001-05-23 | 2002-03-13 | 董振山 | Disposable filtering cover |
| CN201333380Y (en) * | 2008-07-06 | 2009-10-28 | 蔺爱国 | Folded filter element with high filtration flux |
| US20100163477A1 (en) * | 2007-06-14 | 2010-07-01 | Jin Hwan Noh | Filter Assembly |
| CN208406263U (en) * | 2018-04-12 | 2019-01-22 | 郑州光之源电子科技有限公司 | A kind of sewage-treatment plant being conveniently replaceable strainer |
| CN208684696U (en) * | 2018-06-19 | 2019-04-02 | 浙江宏电环保股份有限公司 | A kind of rural area pond sewage water filtration processing unit |
| CN109607840A (en) * | 2018-12-03 | 2019-04-12 | 湖南文理学院 | An ecological filter tank in water ecological restoration |
| CN209270941U (en) * | 2018-08-17 | 2019-08-20 | 滦县天申粮油有限公司 | A kind of high density cloth chip primary filter machine |
| CN110354599A (en) * | 2019-06-20 | 2019-10-22 | 武汉得力仕实业有限公司 | A kind of dustproof filtering cover being conveniently replaceable filter plate |
| CN210079031U (en) * | 2019-05-05 | 2020-02-18 | 无锡德工机械制造有限公司 | Filtering circulation liquid changing device |
| CN211328489U (en) * | 2019-12-17 | 2020-08-25 | 孙家伟 | Sewage treatment plant for hydraulic engineering |
-
2020
- 2020-12-08 CN CN202011445088.XA patent/CN112661282A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2481392Y (en) * | 2001-05-23 | 2002-03-13 | 董振山 | Disposable filtering cover |
| US20100163477A1 (en) * | 2007-06-14 | 2010-07-01 | Jin Hwan Noh | Filter Assembly |
| CN201333380Y (en) * | 2008-07-06 | 2009-10-28 | 蔺爱国 | Folded filter element with high filtration flux |
| CN208406263U (en) * | 2018-04-12 | 2019-01-22 | 郑州光之源电子科技有限公司 | A kind of sewage-treatment plant being conveniently replaceable strainer |
| CN208684696U (en) * | 2018-06-19 | 2019-04-02 | 浙江宏电环保股份有限公司 | A kind of rural area pond sewage water filtration processing unit |
| CN209270941U (en) * | 2018-08-17 | 2019-08-20 | 滦县天申粮油有限公司 | A kind of high density cloth chip primary filter machine |
| CN109607840A (en) * | 2018-12-03 | 2019-04-12 | 湖南文理学院 | An ecological filter tank in water ecological restoration |
| CN210079031U (en) * | 2019-05-05 | 2020-02-18 | 无锡德工机械制造有限公司 | Filtering circulation liquid changing device |
| CN110354599A (en) * | 2019-06-20 | 2019-10-22 | 武汉得力仕实业有限公司 | A kind of dustproof filtering cover being conveniently replaceable filter plate |
| CN211328489U (en) * | 2019-12-17 | 2020-08-25 | 孙家伟 | Sewage treatment plant for hydraulic engineering |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101481957B (en) | Remote control ordered swimming pool cleaning robot and ordered cleaning method thereof | |
| CN112661282A (en) | Collecting and recycling device for semiconductor wafer cleaning pure water | |
| CN201358597Y (en) | Remote-control ordered swimming pool cleaning robot | |
| CN206793160U (en) | A kind of multifunctional domestic filtration water clarifier | |
| CN209412059U (en) | A kind of sewage treatment sludge press filtration device | |
| CN211734116U (en) | Integrated sewage treatment equipment | |
| CN108721971A (en) | A kind of water filtering device | |
| CN107804935A (en) | A kind of automatic intelligent for carwash shop controls sewage recovery reutilization device | |
| CN210534134U (en) | Portable sewage treatment detection device | |
| CN210713062U (en) | Automatic cleaning vehicle | |
| CN103028491B (en) | Dismountable full-automatic secondary backwashing lubricating oil filter | |
| CN216614216U (en) | Drainage device for semiconductor cleaning equipment | |
| CN219319700U (en) | Quick detection device of tubular membrane leak source | |
| CN206507076U (en) | A kind of marine park seawater circulation filter | |
| CN221157323U (en) | Paint spraying equipment with waste gas collection structure | |
| CN212506571U (en) | Wall-mounted water tank convenient to clean for clean room | |
| CN218990103U (en) | Full-automatic collection device for floating oil in water collecting well of power station | |
| CN219376377U (en) | Suspended matter separator in sewage | |
| CN221453693U (en) | Rubber tube cleaning machine | |
| CN215939222U (en) | Spherical filter equipment of dissolving tank | |
| CN218248856U (en) | Rural water supply integration water purification unit | |
| CN217156031U (en) | Chemical industry detects and filters detection device with impurity | |
| CN219462922U (en) | Nitrogen making machine convenient for waste gas recovery | |
| CN212872432U (en) | Water treatment on-line monitoring equipment | |
| CN210356334U (en) | Blowdown device for differential pressure transmitter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210416 |