CN112642258B - A skid device and method for purifying inert gas - Google Patents
A skid device and method for purifying inert gas Download PDFInfo
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- CN112642258B CN112642258B CN202011506776.2A CN202011506776A CN112642258B CN 112642258 B CN112642258 B CN 112642258B CN 202011506776 A CN202011506776 A CN 202011506776A CN 112642258 B CN112642258 B CN 112642258B
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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Abstract
本发明涉及一种惰性气体纯化的撬块装置及方法，包括底座，安装在底座上的换热器、冷却器、吸附单元以及收集单元；换热器具有至少两组进气口和出气口，其中一个进气口与惰性气体进气端连通，其中一个出气口和另一个进气口分别与吸附单元的进口和出口相连通，另一个出气口与冷却器相连通。本发明提供的一种惰性气体纯化的撬块装置及方法，采用撬块设计，设备简单，解决了设备冗余、占地面积大的问题，同时具有纯化成本低的优点。
The present invention relates to a skid block device and method for inert gas purification, comprising a base, a heat exchanger, a cooler, an adsorption unit and a collection unit installed on the base; the heat exchanger has at least two groups of air inlets and air outlets, one of which is connected to the inlet end of the inert gas, one of which and the other are respectively connected to the inlet and outlet of the adsorption unit, and the other is connected to the cooler. The skid block device and method for inert gas purification provided by the present invention adopts a skid block design, has simple equipment, solves the problems of equipment redundancy and large floor space, and has the advantage of low purification cost.
Description
Technical Field
The invention relates to a device and a method for purifying gas, in particular to a device and a method for purifying inert gas.
Background
Inert gases, such as helium, argon, nitrogen, etc., are widely used in the aerospace, electronic chip, chemical industry, etc. industries due to their inactive chemical characteristics. The requirements on gas purity in the industries are high, and the mass concentration of inert gas is more than 99.999%. The inert gas is produced by cryogenic separation of air at low temperature, and is doped with trace impurity gases such as oxygen, hydrogen, carbon monoxide, carbon dioxide, hydrocarbons and the like, so that the purity of the inert gas cannot meet the requirement and needs to be purified.
The inert gases produced or used are doped with various trace gases, but the purity of the inert gases is still higher, and the mass concentration is generally over 99.99 percent, so the technical threshold of the purification process device is higher. The purification device used at present has complex process, large number of needed equipment, large volume, high requirements on sites, environment and the like, and high recovery and purification cost, and the limitations lead the recovery and purification development of domestic inert gas to be slow.
Disclosure of Invention
Aiming at the problems of complex inert gas purification process, equipment redundancy and high purification cost, the invention provides a skid device and a skid method for inert gas purification, which have the advantages of simple process, small equipment occupation and low purification cost.
In order to achieve the above purpose, the invention adopts the following technical scheme:
The invention provides a skid block device for an inert gas purification process, which comprises a base, a heat exchanger, a cooler, an adsorption unit and a collection unit, wherein the heat exchanger is arranged on the base and is provided with at least two groups of air inlets and air outlets, one air inlet is communicated with an inert gas inlet end, the other air outlet is respectively communicated with an inlet and an outlet of the adsorption unit, and the other air outlet is communicated with the cooler.
Preferably, the adsorption unit comprises an internal heating component, an external heating component sleeved outside the internal heating component, a heat preservation component sleeved outside the external heating component, a getter filled in a containing space formed by the internal heating component and the external heating component, an air inlet pipe inserted into the bottom of the containing space and an air outlet pipe communicated with the top of the containing space.
Preferably, the heat exchanger comprises two sets of air inlets and air outlets. According to the invention, the inert gas to be purified is introduced into the heat exchanger for preliminary heating, then is introduced into the adsorption unit, the adsorption unit is heated and filtered, and then the purified high-heat gas is introduced into the heat exchanger for cooling, and part of energy is transmitted to the unpurified inert gas through the heat exchanger, so that the cooling of the purified high-heat gas and the heating of the unpurified inert gas are realized, the heat energy is effectively utilized for the second time, the energy waste is avoided, and the energy is saved and the energy is economical.
Preferably, the getter is one or more of ZrAl getter, zrVFe getter, baTi getter, baAl getter.
Further preferably, the ZrAl getter includes, but is not limited to, a ZrAl16 type ZrAl getter.
Preferably, the internal heating assembly comprises one or more heaters and the external heating assembly comprises one or more heaters.
Further preferably, the heater is a U-tube heater.
Further preferably, the number of external heaters is greater than the number of internal heaters. The heater in the invention can be increased or decreased along with the size of the adsorption unit, and when the heater is a U-shaped tube heater, the external heater is uniformly distributed to surround the uniformly distributed internal heater.
Specifically and preferably, the number of the internal heaters is 4-8, and the number of the external heaters is 24-30.
Further preferably, the internal heaters are uniformly arranged in a cylindrical shape and inserted into the center of the adsorption unit.
Preferably, the outside of the internal heating assembly and the inside of the external heating assembly are respectively provided with a separation plate for separating the internal heating assembly, the getter and the external heating assembly, and the adsorption unit is internally provided with a bottom plate and a top plate which are enclosed together to form the accommodating space. The getter is filled in the accommodating space, and the external heating component and the internal heating component are not in direct contact with the getter, so that the getter is heated through heat radiation and heat conduction.
Preferably, the adsorption unit further comprises a shell sleeved outside the heat insulation assembly, the shell is provided with a top shell capable of being opened and closed and a bottom shell capable of being opened or closed, and the heat insulation assembly comprises a top heat insulation layer capable of being opened and closed, a bottom heat insulation layer capable of being opened and closed and a side heat insulation layer. Because the getter is used at high temperature for a long time, the getter can not be bonded together and can not be split, the purification effect of inert gas is affected, and the continuous use of the getter can be in a saturated state, and the getter needs to be replaced periodically.
Further preferably, the side heat-insulating layer, the top heat-insulating layer and the bottom heat-insulating layer enclose a closed container, the external heating component, the getter and the internal heating component are arranged in the closed container, the air inlet pipe penetrates through the top heat-insulating layer and is communicated with one outlet of the heat exchanger, and the air outlet pipe penetrates through the top heat-insulating layer and is communicated with the other air inlet of the heat exchanger.
Further preferably, the heat insulation component is formed by splicing a plurality of arc blocks.
Further preferably, the side heat-insulating layer is formed by splicing three annular arc columns of 120 degrees.
Preferably, the collecting unit comprises a buffer tank and a vacuum pump which are respectively connected with the cooler, and air outlets are formed in the buffer tank and the vacuum pump.
Preferably, the skid device further comprises an electric cabinet installed on the bottom plate, and the electric cabinet is respectively connected with the heat exchanger, the adsorption unit and the cooler.
Further preferably, the heat exchanger, the adsorption unit and the cooler are provided with a pressure gauge and a thermometer, and the pressure gauge and the thermometer are respectively connected with the electric cabinet.
Preferably, a first valve is arranged at the air inlet end of the heat exchanger communicated with the inert gas, and the first valve is connected with the electric cabinet.
Preferably, the air inlet end of the vacuum pump is provided with a second valve, and the second valve is connected with the electric cabinet.
Preferably, a third valve is arranged at the air inlet end of the buffer tank, and the third valve is connected with the electric cabinet.
Further preferably, a fourth valve is arranged at the air outlet end of the buffer tank, and the fourth valve is connected with the electric cabinet.
Preferably, the first valve, the second valve, the third valve and the fourth valve are pneumatic valves.
Preferably, the outlet end of the cooler is further provided with a sampling unit, the sampling unit comprises a ball valve, a pressure reducing valve and a purity measuring instrument, and the ball valve, the pressure reducing valve and the purity measuring instrument are respectively connected with the electric cabinet.
Further preferably, the sampling unit is disposed at front ends of the second valve and the third valve.
The vacuum pump can be used for exhausting air and controlling the vacuum degree of the skid block device, and can also be used for exhausting air, and when purified gas detected by the sampling unit does not meet the requirement, the gas is exhausted from the vacuum pump. The buffer tank is used for collecting qualified purified gas, and when the purified gas detected by the sampling unit meets the requirement, the purified gas enters the buffer tank.
Preferably, the inert gas to be purified is an inert gas with a mass concentration of more than or equal to 99.99%, and the inert gas after purification is an inert gas with a mass concentration of more than or equal to 99.999%.
In another aspect of the present invention, a method for purifying an inert gas is provided, wherein an unpurified inert gas is introduced into a skid device as described above for purification.
Due to the application of the technical scheme, the skid block device and the method for purifying the inert gas have the advantages that the skid block design is adopted, the equipment is simple, the problems of equipment redundancy and large occupied area are solved, and meanwhile, the purification cost is low.
Drawings
Fig. 1 is a connection diagram of each unit of a skid device provided in embodiment 1 of the present invention;
FIG. 2 is a schematic top view of a skid device according to embodiment 1 of the present invention;
fig. 3 is a cross-sectional view of an adsorption unit 2 according to embodiment 1 of the present invention;
fig. 4 is a top view of an adsorption unit 2 according to embodiment 1 of the present invention;
The device comprises a heat exchanger 1, an adsorption unit 2, an adsorption unit 3, a cooler 4, a buffer tank 5, a vacuum pump 6, an electric cabinet 7, a base 8, an internal heating component 9, a getter 10, an external heating component 11, a heat preservation component 12, a shell 13, a pressure gauge 14, a first valve 15, a second valve 16, a third valve 17, a fourth valve 18, a ball valve 19, a pressure reducing valve 20 and a purity measuring instrument;
a. the device comprises an air inlet, an air outlet, an unqualified gas outlet, an air inlet of an adsorption unit and an air outlet of the adsorption unit.
Detailed Description
The invention is further described below with reference to examples. The present invention is not limited to the following examples. The implementation conditions adopted in the embodiments can be further adjusted according to different requirements of specific use, and the implementation conditions which are not noted are conventional conditions in the industry. The technical features of the various embodiments of the present invention may be combined with each other as long as they do not collide with each other.
Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in numerous different ways without departing from the spirit or scope of the embodiments of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.
In the description of the embodiments of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "inner", etc. are based on the directions or positional relationships shown in fig. 3, are merely for convenience in describing the embodiments of the present invention and simplifying the description, and are not indicative or implying that the apparatus or elements being referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present invention, the meaning of "plurality" is two or more, unless explicitly defined otherwise.
In the embodiments of the present invention, unless explicitly specified and limited otherwise, the term "coupled" and the like are to be construed broadly, and may be mechanically coupled, electrically coupled, in communication, directly coupled, indirectly coupled through an intervening medium, in communication, or in an interaction relationship between two elements, for example. The specific meaning of the above terms in the embodiments of the present invention will be understood by those of ordinary skill in the art according to specific circumstances.
In order to simplify the disclosure of embodiments of the present invention, components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit embodiments of the present invention. Furthermore, embodiments of the present invention may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed.
Example 1
As shown in fig. 1 and 2, a skid device for an inert gas purification process comprises a base 7, a heat exchanger 1, a cooler 3, an adsorption unit 2 and a collection unit, wherein the heat exchanger 1, the cooler 3, the adsorption unit 2 and the collection unit are installed on the base 7. The heat exchanger 1 has at least two sets of gas inlets and gas outlets, one of which communicates with the inert gas inlet end, one of which communicates with the inlet and outlet of the adsorption unit 2, respectively, and the other of which communicates with the cooler 3. The heat exchanger 1 in this embodiment has two groups of air inlets and air outlets, the 1-1 air inlet is communicated with the inert gas inlet end, the 1-2 air outlet is communicated with the air inlet of the adsorption unit 2, the 2-1 air inlet is communicated with the air outlet of the adsorption unit 2, and the 2-2 air outlet is communicated with the air inlet of the cooler 3.
The adsorption unit 2 comprises an internal heating component 8, an external heating component 10 sleeved outside the internal heating component 8, a heat preservation component 11 sleeved outside the external heating component 10, a getter 9 filled in an accommodating space formed by the internal heating component 8 and the external heating component 10, an air inlet pipe inserted into the bottom of the accommodating space and an air outlet pipe communicated with the top of the accommodating space. The getter is one or more of a ZrAl getter, zrVFe getter, a BaTi getter and a BaAl getter. The getter adopted in the embodiment is a ZrAl16 type ZrAl getter, and inert gas enters the bottom of the accommodating space from the gas inlet pipe and is purified by the getter 9 from bottom to top and then is discharged from the gas outlet pipe. The adsorption unit 2 of the present invention adopts a cylindrical structure, and it should be noted that the structural shape of the adsorption unit 2 of the present invention is not limited to a cylindrical shape, and may be a hexagonal prism shape or an octaprism shape, and is not limited thereto.
The outside of the internal heating component 8 and the inside of the external heating component 10 of the adsorption unit 2 are respectively provided with a separation plate for separating the internal heating component 8 and the getter 9 and separating the getter 9 and the external heating component 10, and the adsorption unit 2 is internally provided with a bottom plate and a top plate which are jointly enclosed into an accommodating space. The getter 9 is filled in the accommodating space, and the external heating unit 10 and the internal heating unit 8 are not in direct contact with the getter 9, and the getter 9 is heated by heat radiation and heat conduction. The adsorption unit 2 further comprises a shell 12 sleeved outside the heat insulation assembly 11, the shell 12 is provided with a top shell capable of being opened or closed and a bottom shell capable of being opened or closed, and the heat insulation assembly 11 comprises a top heat insulation layer capable of being opened or closed, a bottom heat insulation layer capable of being opened or closed and a side heat insulation layer. The side heat preservation, the top heat preservation and the bottom heat preservation are enclosed to form a closed container, the external heating component 10, the getter 9 and the internal heating component 8 are arranged in the closed container, the air inlet pipe penetrates through the top heat preservation and is communicated with the 1-2 outlet of the heat exchanger 1, and the air outlet pipe penetrates through the top heat preservation and is communicated with the 2-1 air inlet of the heat exchanger 1. The side heat-insulating layer is formed by splicing three annular arc columns of 120 degrees.
The internal heating assembly 8 of the adsorption unit 2 comprises one or more heaters and the external heating assembly 10 comprises one or more heaters. The heaters are U-tube heaters and the number of external heaters is greater than the number of internal heaters. The number of the heaters in the present invention is not particularly limited, and the number of the heaters may be increased or decreased according to the size of the adsorption unit 2, and when the heaters are U-shaped tube heaters, the external heaters are uniformly distributed to surround the uniformly distributed internal heating assemblies 8. The inner heating assembly 8 in this embodiment employs 6U-shaped heating pipes, and the outer heating assembly 10 employs 27U-shaped heating pipes. 6U-shaped heating pipes in the internal heating component 8 are uniformly enclosed into a cylinder and penetrate through the shell 12 and the top heat insulation layer to be inserted into the middle position of the adsorption unit 2, and the axis of the internal heating component 8 is coincident with the axis of the adsorption unit 2. In this embodiment, the adsorption unit 2 is further provided with a pressure gauge 13 and a thermometer.
The collecting unit comprises a buffer tank 4 and a vacuum pump 5 which are respectively connected with a cooler 3, and air outlets are arranged on the buffer tank 4 and the vacuum pump 5. The skid block device also comprises an electric cabinet 6 arranged on the bottom plate, and the electric cabinet 6 is respectively connected with the heat exchanger 1, the adsorption unit 2 and the cooler 3. The air inlet end of the heat exchanger 1 communicated with inert gas is provided with a first valve 14, the air inlet end of the vacuum pump 5 is provided with a second valve 15, the first valve 14 is connected with the electric cabinet 6, the air inlet end of the buffer tank 4 is provided with a third valve 16, and the air outlet end of the buffer tank 4 is provided with a fourth valve 17. The first valve 14, the second valve 15, the third valve 16 and the fourth valve 17 in this embodiment are all pneumatic valves. The outlet end of the heat exchanger 1 is also provided with a sampling unit which comprises a ball valve 18, a pressure reducing valve 19 and a purity measuring instrument 20. In this example, the sampling unit is disposed at the front ends of the second valve 15 and the third valve 16, and the first valve 14, the second valve 15, the third valve 16, the fourth valve 17, the ball valve 18, the pressure reducing valve 19, and the purity measuring instrument 20 are all connected with the electric cabinet 6, and the heat exchanger 1, the adsorption unit 2, and the cooler 3 are all provided with pressure gauges and temperature gauges and are all connected with the electric cabinet 6.
The use process of the prying block device is as follows:
Firstly, activating equipment through a preparation stage, then introducing gas to be purified into a first group of gas inlets 1-1 of a heat exchanger 1 from a gas inlet a, heating, discharging from a first group of gas outlets 1-2, introducing the gas into an air inlet A of an adsorption unit 2, discharging purified gas from a gas outlet B of the adsorption unit 2, introducing the gas into a second group of gas inlets 2-1 of the heat exchanger 1, discharging from a second group of gas outlets 2-2 after cooling, and introducing the gas into a cooler 3 to cool to obtain purified gas.
1) Preparation stage
Vacuumizing, namely, the first valve 14, the second valve 15 and the fourth valve 17 are in a closed state, the third valve 16 is in an open state, the vacuum pump 5 pumps air, the skid device is pumped to below 5kPa (abs), and the adsorption unit 2 is heated to 800 ℃.
The first valve 14 is opened and the apparatus is replenished with the gas to be purified and then evacuated.
The device is activated by repeating 2-3 times. (this is required both when the equipment is first used and when it is restarted after a long downtime).
2) Purification stage
The temperature of the adsorption unit 2 is reduced to 400-600 ℃, the first valve 14 is opened to introduce inert gas with the pressure of 1.2MPa and the purity of about 99.99wt percent, the inert gas is heated to 100 ℃ through the heat exchanger 1 and then is sent into the adsorption unit 2, the high-temperature purified gas from the adsorption unit 2 enters the cooler 3 after being cooled to 200 ℃ again, the temperature is cooled to below 50 ℃, the gas is detected by the sampling unit, when the purity of the gas detected by the purity measuring instrument 20 is less than 99.999wt percent, the gas is unqualified, the third valve 16 is opened to discharge the gas through the exhaust port C of the vacuum pump 5, when the purity of the gas detected by the purity measuring instrument 20 is greater than 99.999wt percent, the gas is qualified, the second valve 15 is opened to enter the buffer tank 4, and the fourth valve 17 is opened to the gas outlet b for equipment.
4) Stage of changing material
The getter 9 is a metal alloy in which the ZrAl16 type getter 9 is incorporated in the adsorption unit 2, and the getter 9 is bonded together slowly and cannot be divided when operated at high temperature for a long period of time, so that the ZrAl16 type getter 9 needs to be replaced every year.
5) Shutdown phase
The key parts of the system, including the heat exchanger 1, the adsorption unit 2 and the cooler 3 are provided with pressure and temperature monitoring, and can monitor in real time from the electric cabinet 6, and when the parameters exceed preset values, alarm action is executed and then the system is stopped.
The present invention has been described in detail with the purpose of enabling those skilled in the art to understand the contents of the present invention and to implement the same, but not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
Claims (10)
1. The skid block device for purifying inert gas is characterized by comprising a base (7), a heat exchanger (1), a cooler (3), an adsorption unit (2) and a collection unit, wherein the heat exchanger (7) is arranged on the base (7), the heat exchanger (1) is provided with at least two groups of air inlets and air outlets, one air inlet is communicated with an inert gas inlet end, the other air outlet is communicated with an inlet and an outlet of the adsorption unit (2), the other air outlet is communicated with the cooler (3), the adsorption unit (2) comprises an inner heating component (8), an outer heating component (10) sleeved outside the inner heating component (8), a heat preservation component (11) sleeved outside the outer heating component (10), a getter (9) filled in a containing space formed by the inner heating component (8) and the outer heating component (10), an air inlet pipe inserted into the bottom of the containing space, and an air outlet pipe communicated with the top of the containing space.
2. The skid device for inert gas purification according to claim 1, said heat exchanger (1) comprising two sets of gas inlet and gas outlet.
3. The skid device for purifying inert gas according to claim 1, wherein said getter (9) is one or more of ZrAl getter, zrVFe getter, baTi getter and BaAl getter.
4. The inert gas purification skid device of claim 1, wherein said internal heating assembly (8) comprises one or more internal heaters and said external heating assembly (10) comprises one or more external heaters, said external heaters being greater in number than said internal heaters.
5. The skid device for purifying inert gas according to claim 1, wherein the outside of the internal heating component (8) and the inside of the external heating component (10) are respectively provided with a separation plate for separating the internal heating component (8), the getter (9) and the external heating component (10), and a bottom plate and a top plate are also arranged in the adsorption unit (2) and jointly enclose the accommodation space with the separation plate.
6. The skid device for purifying inert gas according to claim 1, wherein the adsorption unit (2) further comprises a shell (12) sleeved outside the heat preservation assembly (11), the shell (12) is provided with a top shell capable of being opened and closed and a bottom shell capable of being opened and closed, and the heat preservation assembly (11) comprises a top heat preservation layer capable of being opened and closed, a bottom heat preservation layer capable of being opened and closed and a side heat preservation layer.
7. The skid device for purifying inert gas according to claim 1, wherein said collection unit comprises a buffer tank (4) and a vacuum pump (5) respectively connected with said cooler (3), and air outlets are provided on said buffer tank (4) and said vacuum pump (5).
8. The skid device for purifying inert gas according to claim 1 or 7, further comprising an electric cabinet (6) mounted on said base (7), wherein said electric cabinet (6) is connected to said heat exchanger (1), said adsorption unit (2) and said cooler (3), respectively.
9. The skid device for purifying inert gas according to claim 8, wherein the outlet end of the cooler (3) is further provided with a sampling unit, the sampling unit comprises a ball valve (18), a pressure reducing valve (19) and a purity measuring instrument (20), and the ball valve (18), the pressure reducing valve (19) and the purity measuring instrument (20) are respectively connected with the electric cabinet (6).
10. A method for purifying inert gas, characterized in that unpurified inert gas is introduced into the skid device as claimed in any one of claims 1 to 9 for purification.
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| US6733571B1 (en) * | 1999-07-12 | 2004-05-11 | Saes Pure Gas, Inc. | Gas purification system with an integrated hydrogen sorption and filter assembly |
| CN107362683A (en) * | 2017-08-21 | 2017-11-21 | 昆明鹏翼达气体产品有限公司 | A kind of ultra-pure gases purification devices and purification process |
| CN208536494U (en) * | 2018-06-23 | 2019-02-22 | 浙江智海化工设备工程有限公司 | Skid-mounted type Internal-compression flow air separation plant |
| CN108744866A (en) * | 2018-08-31 | 2018-11-06 | 江苏新久扬环保设备科技有限公司 | A kind of combined type oil gas purifier and purification technique |
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