CN112611484B - A metal-based flexible frame quartz differential resonance pressure sensor - Google Patents
A metal-based flexible frame quartz differential resonance pressure sensor Download PDFInfo
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- CN112611484B CN112611484B CN202011453884.8A CN202011453884A CN112611484B CN 112611484 B CN112611484 B CN 112611484B CN 202011453884 A CN202011453884 A CN 202011453884A CN 112611484 B CN112611484 B CN 112611484B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
- G01L1/103—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings optical excitation or measuring of vibrations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
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Abstract
一种金属基柔性框架石英差动谐振式压力传感器，包括一体式金属压力差动转换元件，一体式金属压力差动转换元件上连接有两个石英双端固支音叉，一体式金属压力差动转换元件上侧及两个石英双端固支音叉外侧连接有上盖帽，形成真空密封；一体式金属压力差动转换元件下侧连接有下盖板，下盖板密封PCB安装腔室，完成普通气密；两个石英双端固执音叉垂直交叉平行地安装于柔性框架的左右两侧，柔性框架一端与待测压力通道一体固接，另一端与固定外框架一体固接；本发明通过测量个石英双端固执音叉的频率变化，可获得待测压力信息，不仅可以提高敏感度，还可以抑制温漂等共轭干扰，具有数字信号输出，精度高，抗干扰能力强等特点。
A metal-based flexible frame quartz differential resonance pressure sensor, comprising an integrated metal pressure differential conversion element, two quartz double-ended fixed support tuning forks are connected to the integrated metal pressure differential conversion element, and the integrated metal pressure differential The upper side of the conversion element and the outer side of the two quartz double-ended fixed support tuning forks are connected with an upper cap to form a vacuum seal; the lower side of the one-piece metal differential pressure conversion element is connected with a lower cover, which seals the PCB installation chamber to complete the common Airtight; two quartz double-ended stubborn tuning forks are vertically crossed and installed on the left and right sides of the flexible frame, one end of the flexible frame is integrally connected with the pressure channel to be measured, and the other end is integrally fixed with the fixed outer frame; The frequency change of the quartz double-ended stubborn tuning fork can obtain the pressure information to be measured. It can not only improve the sensitivity, but also suppress the conjugate interference such as temperature drift. It has the characteristics of digital signal output, high precision and strong anti-interference ability.
Description
Technical Field
The invention belongs to the technical field of micro-Mechanical Electronic (MEMS) digital pressure sensors, and particularly relates to a metal-based flexible frame quartz differential resonance type pressure sensor.
Background
In the field of resonant pressure sensors, the sensor structure is divided into a pressure conversion unit and a resonant unit; the pressure conversion unit generally adopts a pressure sensitive film, a corrugated pipe and the like, mechanical signal transmission structures such as a cantilever beam and a flexible lever are often introduced in order to form a differential output structure to inhibit conjugate interference on the sensor, an additional structure needs an additional connection design, the overall accuracy and reliability of the sensor can be influenced by alignment accuracy and connection strength, and if the pressure conversion structure is made of different materials, thermal mismatching can be caused, and the performance of the pressure sensor is further interfered.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a quartz differential resonance type pressure sensor with a metal-based flexible frame, which has the characteristics of digital signal output, high precision, strong anti-interference capability and the like.
In order to achieve the above object, the invention adopts the following technical scheme:
a metal-based flexible frame quartz differential resonance type pressure sensor comprises an integrated metal pressure differential conversion element 1, wherein two quartz double-end fixed-support tuning forks 4 are connected to the integrated metal pressure differential conversion element 1, and an upper cover cap 2 is connected to the upper side of the integrated metal pressure differential conversion element 1 and the outer sides of the two quartz double-end fixed-support tuning forks 4 to form vacuum sealing; the lower side of the integrated metal pressure differential conversion element 1 is connected with a lower cover plate 3, and the lower cover plate 3 seals the PCB installation chamber 1d to finish common air tightness;
the integrated metal pressure differential conversion element 1 is manufactured integrally and comprises a fixed outer frame 1b, the inner side of the upper part of the fixed outer frame 1b is connected with a flexible frame 1a, the flexible frame 1a is connected with two quartz double-end fixedly-supported tuning forks 4, the lower part of the fixed outer frame 1b is provided with a pressure channel 1c to be measured and a PCB installation chamber 1d, and the pressure channel 1c to be measured is located in the center; the electrical connection between the PCB installation chamber 1d and the two quartz resonators 4 installed on the flexible frame 1a is completed through the glass sintered gold column 1 e;
two quartz double-end fixed tuning forks 4 are vertically, crossly and parallelly arranged at the left side and the right side of the flexible frame 1a, one end of the flexible frame 1a is fixedly connected with a pressure channel 1c to be measured integrally, and the other end of the flexible frame 1a is fixedly connected with a fixed outer frame 1b integrally.
Two quartz double-ended clamped tuning forks 4 are vertically and parallelly arranged on the left side and the right side of the flexible frame 1a in a crossed mode, namely one quartz double-ended clamped tuning fork 4 is horizontally or vertically arranged on the 1a-1 surface of the flexible frame, the other quartz double-ended clamped tuning fork 4 is vertically and crossly arranged on the 1a-2 surface of the flexible frame, the 1a-1 surface and the 1a-2 surface are vertical, and the two surfaces of the flexible frame 1a are provided with alignment installation grooves for horizontally or vertically arranging the quartz resonant tuning forks.
Electrodes are arranged on the periphery of the surfaces of two fork arms 4e in the middle of the quartz double-end fixed-support tuning fork 4, the electrodes are electrically connected with each other and used for enabling the quartz tuning fork to start vibration, alternating voltage is applied under the action of inverse piezoelectric effect, and the quartz tuning fork beam is in a preset vibration mode; a detection electrode is arranged on the upper surface 4a of one end of the quartz double-end fixedly-supported tuning fork 4, and the lower surface 4c is an installation surface; a bonding pad connected with an external circuit is arranged on the upper surface 4b of the other end of the quartz double-end fixedly-supported tuning fork 4, and the lower surface 4d is a mounting surface; after power-on, the device can vibrate according to a preset mode.
The lower cover plate 3 is provided with a first outer connecting hole 3a and a second outer connecting hole 3b, and a power supply positive and negative wire and signal output wires of the two quartz double-end fixedly-supported tuning forks 4 are respectively led out.
The invention has the beneficial effects that:
according to the invention, the frequency change of the quartz double-end fixed tuning fork 4 is measured, so that the pressure information to be measured can be obtained, the sensitivity can be improved, and conjugate interference such as temperature drift and the like can be inhibited; the integrally manufactured integrated metal pressure differential conversion element avoids the adverse interference caused by the connection and alignment of an additional structure and the thermal mismatch of different materials; the pressure signal is output as a quasi-digital signal without digital-to-analog conversion in the measuring process.
Drawings
Fig. 1 is a schematic view of the general structure of the present invention.
Fig. 2 is a schematic sectional view of the general structure of the present invention, wherein (a) is a side view and (b) is a sectional view taken along line a-a of (a).
Fig. 3 is a schematic structural diagram of the integrated metal pressure differential conversion element of the present invention, wherein fig. (a) is a schematic structural diagram of a front surface, and fig. (b) is a perspective view of a side surface inclined angle.
Fig. 4 is a schematic structural diagram of the quartz double-ended clamped tuning fork resonator of the present invention.
Fig. 5 is a working principle diagram of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings.
Referring to fig. 1, 2 and 3, a metal-based flexible frame quartz differential resonance type pressure sensor comprises an integrated metal pressure differential conversion element 1, wherein two quartz double-ended fixed tuning forks 4 are connected to the integrated metal pressure differential conversion element 1, and upper caps 2 are connected to the upper side of the integrated metal pressure differential conversion element 1 and the outer sides of the two quartz double-ended fixed tuning forks 4 to form vacuum sealing and ensure the vacuum packaging effect of a resonance chamber; the lower side of the integrated metal pressure differential conversion element 1 is connected with a lower cover plate 3, and the lower cover plate 3 seals the PCB installation chamber 1d to complete common airtight packaging;
the integrated metal pressure differential conversion element 1 is manufactured integrally and comprises a fixed outer frame 1b, the inner side of the upper part of the fixed outer frame 1b is connected with a flexible frame 1a, the flexible frame 1a is connected with two quartz double-end fixedly-supported tuning forks 4, the lower part of the fixed outer frame 1b is provided with a pressure channel 1c to be measured and a PCB installation chamber 1d, and the pressure channel 1c to be measured is located in the center; the electrical connection between the PCB installation chamber 1d and the two quartz resonators 4 installed on the flexible frame 1a is completed through the glass sintered gold column 1 e;
two quartz double-end fixed tuning forks 4 are vertically, crossly and parallelly arranged at the left side and the right side of the flexible frame 1a, one end of the flexible frame 1a is fixedly connected with a pressure channel 1c to be measured integrally, and the other end of the flexible frame 1a is fixedly connected with a fixed outer frame 1b integrally.
Referring to fig. 3, two quartz double-ended stationary tuning forks 4 are vertically and crossly mounted on the left and right sides of the flexible frame 1a in parallel, i.e. one quartz double-ended stationary tuning fork 4 is horizontally or vertically mounted on the 1a-1 surface of the flexible frame, the other quartz double-ended stationary tuning fork 4 is vertically and crossly mounted on the 1a-2 surface of the flexible frame, the 1a-1 surface and the 1a-2 surface are vertical, and the two surfaces of the flexible frame 1a are provided with alignment mounting grooves for horizontally or vertically mounting the quartz resonant tuning forks.
Referring to fig. 4, electrodes are arranged on the periphery of the surfaces of two arms 4e in the middle of the quartz double-ended fixed-support tuning fork 4, the electrodes are electrically connected with each other and used for enabling the quartz tuning fork to start vibration, alternating voltage is applied under the action of inverse piezoelectric effect, and the quartz tuning fork beam is in a preset vibration mode; a detection electrode is arranged on the upper surface 4a of one end of the quartz double-end fixedly-supported tuning fork 4, and the lower surface 4c is an installation surface; a bonding pad connected with an external circuit is arranged on the upper surface 4b of the other end of the quartz double-end fixedly-supported tuning fork 4, and the lower surface 4d is a mounting surface; after power-on, the device can vibrate according to a preset mode.
Referring to fig. 1, the lower cover plate 3 is provided with a first external connection hole 3a and a second external connection hole 3b, and a power supply positive and negative wire and a signal output wire of two quartz double-ended clamped tuning forks 4 are respectively led out.
The working principle of the invention is as follows:
referring to fig. 5, when measuring pressure, the pressure to be measured acts on the metal film of the pressure channel 1c to be measured, so that the flexible frame 1a is displaced in the vertical diagonal direction. At the moment, two quartz double-end fixed tuning forks 4 which are respectively arranged in the horizontal diagonal direction and the vertical diagonal direction of the flexible frame 1 are pulled in the horizontal diagonal direction and pressed in the vertical diagonal direction, and the stress is equal in magnitude, so that differential output is formed, the resonance frequency of a quartz tuning fork beam is changed, and the information of the pressure to be measured can be obtained by measuring the frequency change, so that the sensitivity can be improved, and conjugate interference such as temperature drift can be inhibited;
after the inverse piezoelectric effect of the two quartz double-ended fixed tuning forks 4 is excited by the applied alternating voltage, the two quartz double-ended fixed tuning forks vibrate according to the preset natural mode vibration modes, after the metal film of the pressure channel 1c to be measured is influenced by the pressure to be measured, one end of the metal film, which is integrally and fixedly connected with the flexible frame 1a, is displaced along the vertical diagonal direction, the other end of the flexible frame 1a is integrally and fixedly connected with the fixed outer frame 1b, the two quartz double-ended fixed tuning forks 4 which are parallelly and vertically and crossly arranged on the flexible frame 1a are stressed and deformed, wherein the quartz double-ended fixed tuning forks 4 in the horizontal diagonal direction are stressed, the quartz double-ended fixed tuning forks 4 in the vertical diagonal direction are stressed, the stress of the two quartz double-ended fixed tuning forks is the same, the vibration frequency of the two quartz double-ended fixed tuning forks is changed, the frequency difference and the pressure are in a proportional relation, and the measured pressure difference is obtained by measuring the frequency difference.
Claims (3)
1. A quartz differential resonance type pressure sensor with a metal-based flexible frame is characterized in that: the integrated metal pressure differential conversion element comprises an integrated metal pressure differential conversion element (1), wherein two quartz double-end fixedly-supported tuning forks (4) are connected to the integrated metal pressure differential conversion element (1), and upper caps (2) are connected to the upper side of the integrated metal pressure differential conversion element (1) and the outer sides of the two quartz double-end fixedly-supported tuning forks (4) to form vacuum sealing; the lower side of the integrated metal pressure differential conversion element (1) is connected with a lower cover plate (3), and the lower cover plate (3) seals the PCB installation chamber (1d) to finish common air tightness;
the integrated metal pressure differential conversion element (1) is manufactured integrally and comprises a fixed outer frame (1b), the inner side of the upper part of the fixed outer frame (1b) is connected with a flexible frame (1a), the flexible frame (1a) is connected with two quartz double-end fixed tuning forks (4), a pressure channel to be measured (1c) and a PCB (printed circuit board) mounting chamber (1d) are arranged at the lower part of the fixed outer frame (1b), and the pressure channel to be measured (1c) is located in the center; the electrical connection between the PCB mounting chamber (1d) and two quartz double-end fixedly-supported tuning forks (4) mounted on the flexible frame (1a) is completed through a glass sintered gold column (1 e);
two quartz double-end fixedly-supported tuning forks (4) are vertically, crossly and parallelly arranged on the left side and the right side of a flexible frame (1a), one end of the flexible frame (1a) is fixedly connected with a pressure channel (1c) to be measured integrally, and the other end of the flexible frame (1a) is fixedly connected with a fixed outer frame (1b) integrally;
the two quartz double-end fixedly-supported tuning forks (4) are vertically, crossly and parallelly arranged on the left side and the right side of the flexible frame (1a), and alignment mounting grooves for horizontally or vertically mounting the quartz double-end fixedly-supported tuning forks are formed in the two sides of the flexible frame (1 a).
2. The metal-based flexible frame quartz differential resonant pressure sensor of claim 1, wherein: electrodes are arranged on the periphery of the surfaces of two fork arms (4e) in the middle of the quartz double-end fixed-support tuning fork (4), the electrodes are electrically connected with each other and used for enabling the quartz double-end fixed-support tuning fork to start vibration, alternating voltage is applied under the action of inverse piezoelectric effect, and a quartz tuning fork beam is in a preset vibration mode; a detection electrode is arranged on the upper surface (4a) of one end of the quartz double-end fixedly-supported tuning fork (4), and a first lower surface (4c) is a mounting surface; a bonding pad connected with an external circuit is arranged on the upper surface (4b) of the other end of the quartz double-end fixedly-supported tuning fork (4), and a second lower surface (4d) is a mounting surface; after power-on, the device can vibrate according to a preset mode.
3. The metal-based flexible frame quartz differential resonant pressure sensor of claim 1, wherein: and the lower cover plate (3) is provided with a first outer connecting hole (3a) and a second outer connecting hole (3b) for respectively leading out a power supply positive and negative wire and signal output wires of two quartz double-end fixedly-supported tuning forks (4).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011453884.8A CN112611484B (en) | 2020-12-12 | 2020-12-12 | A metal-based flexible frame quartz differential resonance pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011453884.8A CN112611484B (en) | 2020-12-12 | 2020-12-12 | A metal-based flexible frame quartz differential resonance pressure sensor |
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| CN112611484A CN112611484A (en) | 2021-04-06 |
| CN112611484B true CN112611484B (en) | 2021-12-28 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116046220B (en) * | 2022-12-28 | 2024-07-02 | 厦门大学 | Quartz resonance type pressure sensor based on single pressure conversion element |
| CN118687746A (en) * | 2024-08-01 | 2024-09-24 | 江苏奥力威传感高科股份有限公司 | Integrated surface differential metal film structure quartz resonant pressure sensor |
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