CN112564823A - Multi-port radio frequency microwave calibration method based on self-calibration algorithm - Google Patents
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Abstract
The invention provides a multi-port radio frequency microwave calibration method based on a self-calibration algorithm, which comprises the steps of setting initial parameters of a vector network analyzer; setting a pre-set parameter of a calibration standard; sequentially connecting a reflection open circuit, a reflection short circuit, a matched load and a dual-port calibration standard straight through, and collecting parallel testing S parameters and right-angle or differential port testing S parameters; acquiring a parallel correction parameter based on the pre-parameter and the parallel test S parameter, and calculating a reflection coefficient; obtaining a right-angle or differential port correction parameter based on the reflection coefficient and the right-angle or differential port test S parameter; generating an error correction matrix based on the parallel correction parameters and the right-angle direction or difference port correction parameters; and completing the calibration of the multi-port radio frequency microwave device to be tested based on the error correction matrix and the vector network analyzer. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm effectively solves the problem of insufficient calibration precision of the multi-port radio frequency microwave, and is convenient to operate and high in applicability.
Description
Technical Field
The invention relates to radio frequency microwave calibration, in particular to a multi-port radio frequency microwave calibration method based on a self-calibration algorithm.
Background
With the rapid development of new-generation communication technologies such as 5G and satellite communication and semiconductor manufacturing processes, the integration level of a multi-port radio frequency transceiver chip represented by a beam forming chip is higher and higher, the number of test ports is more and more, and the test frequency also extends from a radio frequency band to a microwave millimeter wave band. The current major on-chip multi-port (3-port and above) calibration techniques have difficulty meeting increasingly high test accuracy requirements in terms of test accuracy. Therefore, the development of a precise, reliable and conveniently operated multi-port radio frequency microwave calibration algorithm and a corresponding on-chip calibration piece have very urgent needs and very important practical significance.
At present, the main on-chip multiport calibration method is mainly a Short-Open-Load-Thru method using a 12-term error model based on a three-receiver architecture vector network analyzer, which is also called a TOSM (Thru-Open-Short-Match) method. Although the method is simple to operate, the method has high dependence on the accuracy of the calibration standard, and the parameters of the calibration standard must be completely and accurately defined. The precision of the calibration standard part is generally given by model parameters of zero order to three orders, but the model parameters are gradually out of alignment along with the rise of frequency, the precision of high-frequency testing is poor, and the abrasion of each connection brings certain deviation to the model parameters, especially the position of a probe pressing pin is sensitive in the chip calibration, so the method is not suitable for the high-frequency high-precision testing. While the Short-Open-Load-correct-true SOLR (Short-Open-Load-correct-true) based on 8-term error models of the four-receiver architecture vector network analyzer is improved to a certain extent on the basis of SOLT without knowing the parameters of Thru, the model parameters of Short, Open and Load calibration standard components still need to be known, and the precision is still limited by the model precision. While other algorithms such as TRL (thread-reflection-Line) or LRM (Line-reflection-Match) have small dependence on model parameters of Short, Open and Load calibration standard components, but the transmission Line (Line) is required to be an ideal structure, cannot cope with non-ideal structures such as a right-angle transmission Line and is not suitable for on-chip multi-port testing.
Therefore, due to the limitation of technical conditions, the multi-port radio frequency microwave calibration method still has the defects and shortcomings, and has great improvement space.
Disclosure of Invention
In view of the above disadvantages of the prior art, the present invention aims to provide a multi-port rf microwave calibration method based on a self-calibration algorithm, which effectively solves the problem of insufficient calibration accuracy of multi-port rf microwaves with three or more ports, and has the advantages of convenient operation and strong applicability.
In order to achieve the above and other related objects, the present invention provides a multi-port rf microwave calibration method based on a self-calibration algorithm, comprising the following steps: setting initial parameters of a vector network analyzer; setting a pre-set parameter of a calibration standard; the calibration standard comprises a reflection open circuit, a reflection short circuit, a matched load and a dual-port calibration standard straight-through; sequentially connecting the reflection open circuit, the reflection short circuit, the matching load and the two-port calibration standard straight-through, and collecting parallel direction test S parameters, right angle direction or difference port test S parameters of the reflection open circuit, the reflection short circuit, the matching load and the two-port calibration standard straight-through; acquiring a parallel correction parameter based on the pre-parameter and the parallel test S parameter, and calculating reflection coefficients of the reflection open circuit, the reflection short circuit and the matched load; obtaining a right-angle or differential port correction parameter based on the reflection coefficient and the right-angle or differential port test S parameter; generating an error correction matrix based on the parallel direction correction parameters and the right angle direction or difference port correction parameters; and completing the calibration of the multi-port radio frequency microwave device to be tested based on the error correction matrix and the vector network analyzer.
In an embodiment of the present invention, the initial parameters include start-stop frequency point, frequency step, output power, intermediate frequency bandwidth, and average frequency.
In an embodiment of the present invention, the pre-parameters include a through delay and an insertion loss of the parallel to dual-port calibration standard, and a dc resistance of the matched load.
In an embodiment of the present invention, an LRRM algorithm is adopted to obtain parallel correction parameters based on the pre-parameter and the parallel test S parameter.
In an embodiment of the present invention, a calibration algorithm based on a 10-term error model is adopted in the LRRM algorithm.
In an embodiment of the present invention, an SOLR algorithm is adopted to obtain a dc angle or differential port correction parameter based on the reflection coefficient and the dc angle or differential port test S parameter.
In an embodiment of the present invention, a calibration algorithm based on a 10-term error model is adopted in the SOLR algorithm.
In an embodiment of the invention, the substrate material of the calibration standard is Al with a purity of 99.6% or more2O3Ceramic or fused silica; the resistive layer is formed by a sputtering process using NiCr or TaN to have a thickness of 100nm to 200 nm.
In an embodiment of the present invention, the dc resistance of the matched load is controlled within a range of 50 ± 0.1 Ω; the straight-through characteristic impedance of the dual-port calibration standard part is 50 +/-0.1 omega, and a 3-5 mu m gold layer is formed by using a sputtering process to form a microstrip line.
In an embodiment of the present invention, the physical dimensions and the processing techniques of the reflective open circuit, the reflective short circuit, the matched load, and the dual-port calibration standard pass through are the same.
As mentioned above, the multi-port radio frequency microwave calibration method based on the self-calibration algorithm has the following beneficial effects:
(1) the self-calibration algorithm based on LRRM and SOLR is adopted, the dependence degree on the model parameters of a calibration piece is weak, the probe pressing needle position is insensitive, the related parameters can be automatically calculated in the calibration process, and the calibration precision of the multi-port radio frequency microwave is effectively improved;
(2) the calibration process is convenient to operate and high in applicability.
Drawings
FIG. 1 is a flow chart illustrating a multi-port RF microwave calibration method based on a self-calibration algorithm according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an arrangement of three-port RF microwave on-chip test probes in one embodiment;
FIG. 3 is a schematic diagram showing the arrangement of four-port RF microwave on-chip test probes in one embodiment;
FIG. 4 is a schematic diagram of a parallel-oriented sheet calibration standard in one embodiment;
FIG. 5 shows a signal flow diagram of an embodiment of an 8-term error model;
FIG. 6 shows a signal flow diagram of a 10-term error model in one embodiment;
FIG. 7 is a schematic diagram of an embodiment of a vertical on-chip calibration standard;
FIG. 8 is a schematic diagram of a differential on-chip calibration standard in one embodiment;
FIG. 9 shows a signal flow diagram of a three-port error model in one embodiment.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The multi-port radio frequency microwave calibration method based on the self-calibration algorithm adopts the self-calibration algorithm based on LRRM and SOLR, effectively solves the problem of insufficient calibration precision of the multi-port radio frequency microwave based on three or more ports, and has weak dependence on the model parameters of a calibration piece, insensitivity to the position of a probe pressing pin, convenient operation and strong applicability.
As shown in fig. 1, in an embodiment, the multi-port rf microwave calibration method based on the self-calibration algorithm of the present invention includes the following steps:
and step S1, setting initial parameters of the vector network analyzer.
The vector network analyzer is a kind of electromagnetic wave energy testing equipment, it can measure various parameter amplitudes of single-port network or two-port network, and can measure phase, and can display the testing data by using Smith chart. The multi-port radio frequency microwave device is measured based on a vector network analyzer. First, initial parameters of the vector network analyzer are set. In an embodiment of the present invention, the initial parameters include start-stop frequency point, frequency step, output power, intermediate frequency bandwidth, and average frequency.
Step S2, setting the pre-set parameters of the calibration standard; the calibration standard includes a reflective open circuit, a reflective short circuit, a matched load, and a two-port calibration standard pass-through.
In particular, the calibration standards of the present invention include single port standards and dual port calibration standard pass-throughs. The single-port standard component comprises a reflection Open circuit (Reflect _ Open), a reflection Short circuit (Reflect _ Short) and a matched Load (Match/Load). In an embodiment of the present invention, the pre-parameters include a through delay τ and an insertion loss IL of the parallel-to-dual-port calibration standard, and a dc resistance R of the matched loadM。
In an embodiment of the present invention, the physical dimensions and the processing techniques of the reflective open circuit, the reflective short circuit, the matching load, and the dual-port calibration standard are the same to ensure consistent parameters.
In an embodiment of the present invention, the calibration standard is manufactured and processed by using a thin film process, and has the following characteristics:
(1) the substrate material of the calibration standard part adopts Al with the purity of more than 99.6 percent2O3Ceramic or fused quartz to ensure electrical, thermal and mechanical properties;
(2) forming a resistance layer by NiCr or TaN with a sputtering process to be 100 nm-200 nm; a laser resistance trimming machine is combined with a high-precision digital multimeter to perform accurate resistance trimming by using a four-wire method, and the direct current resistance of the matched load is controlled within the range of 50 +/-0.1 omega;
(3) the straight-through characteristic impedance of the dual-port calibration standard part is 50 +/-0.1 omega, and a 3-5 mu m gold layer is formed by using a sputtering process to form a microstrip line.
In an embodiment of the present invention, the arrangement of the test probes of the calibration standard is any one of GS, SG, GSG, SGs, GSSG, and GSGSG. As shown in fig. 2 and 3, the three-port and four-port test probes are arranged as GSG and gsgsgsg, respectively.
And S3, sequentially connecting the reflection open circuit, the reflection short circuit, the matching load and the two-port calibration standard straight connection, and collecting parallel direction test S parameters, right angle direction or difference port test S parameters of the reflection open circuit, the reflection short circuit, the matching load and the two-port calibration standard straight connection.
Specifically, after the reflection open circuit, the reflection short circuit, the matching load and the dual-port calibration standard are directly connected in sequence, parallel direction test S parameters and right angle direction or difference port test S parameters are collected, so that the parallel direction test S parameters and the right angle direction or difference port test S parameters can be conveniently used subsequently.
Step S4, obtaining parallel correction parameters based on the pre-parameters and the parallel test S parameters, and calculating the reflection coefficients of the reflection open circuit, the reflection short circuit and the matched load.
Specifically, an LRRM algorithm is adopted, a parallel correction parameter is obtained based on the pre-parameter and the parallel test S parameter, and reflection coefficients Gamma of the reflection open circuit, the reflection short circuit and the matching load are respectively calculatedO、ГSAnd rL. In the LRRM algorithm, only the delay τ and insertion loss IL of the parallel calibration standard Thru and the DC resistance R of the matched load need to be knownMOther calibration standard parameters are automatically calculated during the calibration process. In an embodiment of the present invention, a calibration algorithm based on a 10-term error model is adopted in the LRRM algorithm.
And step S5, acquiring a right angle or differential port correction parameter based on the reflection coefficient and the right angle or differential port test S parameter.
In particular, an SOLR algorithm is adopted, based on the reflection coefficient fO、ГSAnd rLAnd the rectangular or differential port test S parameter obtains the rectangularAngular or differential port correction parameters. In an embodiment of the present invention, a calibration algorithm based on a 10-term error model is adopted in the SOLR algorithm. The invention additionally considers the influence of isolation terms E12 and E21 on the test result on the basis of an 8-term error model shown in FIG. 5, and adopts a self-calibration method of a 10-term error model shown in FIG. 6. Wherein, fig. 5 is a signal flow diagram of a dual-port S parameter test 8-term error model based on a four-receiver architecture, a1M、b1MRepresenting the incident wave and the reflected wave, a, calibrated to the end face of the radio frequency probe by a port 1 of the vector network analyzer1A、b1MRepresenting incident and reflected waves at the actual input end face of the measured piece, E00、E01、E10、E11The test error caused by the lead structure between the end face of the radio frequency probe and the end face of the tested piece to be represented needs to be corrected through a de-embedding algorithm, and the two ports are the same. FIG. 6 expands the 8-term error model based on FIG. 5 to take into account the influence of the isolation term and increase the forward isolation E21And reverse isolation E12. The method not only combines the convenience of SOLT operation, but also has low dependence on the calibration piece parameter similar to the TRL method, and is not limited by the test frequency bandwidth. The 10-term error model is compatible with the common 8-term error model, and meanwhile, the precision of the calibration result is further improved. The SOLR algorithm of the present invention does not need to know the Thru parameters between the vertical or other differential ports in FIGS. 7 and 8, but only needs Thru to satisfy the reciprocity condition, and the parameters can be automatically calculated in the calibration process.
And step S6, generating an error correction matrix based on the parallel correction parameters and the right-angle direction or difference port correction parameters.
Specifically, when an error correction matrix is composed of the parallel correction parameters and the right-angle direction or difference port correction parameters, all error items of an error model are calculated according to the parallel correction parameters and the right-angle direction or difference port correction parameters, and the error items form a matrix according to frequency points, namely the error correction matrix.
As shown in fig. 9, from the parallel test result and the pre-parameter, all error terms E00 to E33 that can be calculated by using the LRRM algorithm, and from the reflection coefficient of the single-port standard component and the right-angle test result that are calculated by using the LRRM algorithm, all error terms E44 to E55 can be calculated by using the SOLR algorithm, so as to obtain all error terms of the three-port error model of E00 to E55, and these error terms form the error correction matrix according to the frequency points.
And step S7, completing the calibration of the multi-port radio frequency microwave device to be tested based on the error correction matrix and the vector network analyzer.
Specifically, the error correction matrix is sent to the vector network analyzer to calibrate data acquired by the vector network analyzer, so that calibration of the multi-port radio frequency microwave device to be tested is completed, a test result is output through an sn format, and the test result is displayed through a graphical interface.
In the present invention, the multi-port calibration error model is a number of combinations satisfied
And (4) superposition of the two-port error model. Fig. 9 shows a three-port error model, which is a superposition of 3 two-port error models. FIG. 9 can be viewed as a combination of multiple FIG. 6, with 8 or 10 models between any two ports, i.e., three ports
The symbol naming is the same as that of fig. 5. Therefore, the error model is more complicated when the number of ports is larger, and the calibration of the multiple ports is generally needed
Thru-times are connected, and the operation is complex and tedious. When each test port meets the reciprocity condition, only N-1 times of Thru connection at most is needed by the multi-port radio frequency microwave calibration method based on the self-calibration algorithm. Taking fig. 8 as an example, only 1-2, 3-4Thru and 1-4, 2-3Thru need to be connected, so that the connection times are greatly reduced, the operation convenience is improved, the occupied area of the calibration unit is reduced, and the cost of the calibration piece is reduced.
In conclusion, the multi-port radio frequency microwave calibration method based on the self-calibration algorithm adopts the self-calibration algorithm based on the LRRM and the SOLR, has weak dependence on the model parameters of the calibration piece, is insensitive to the position of the probe pressing pin, can automatically calculate the related parameters in the calibration process, and effectively improves the calibration precision of the multi-port radio frequency microwave; the calibration process is convenient to operate and high in applicability. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A multi-port radio frequency microwave calibration method based on a self-calibration algorithm is characterized in that: the method comprises the following steps:
setting initial parameters of a vector network analyzer;
setting a pre-set parameter of a calibration standard; the calibration standard comprises a reflection open circuit, a reflection short circuit, a matched load and a dual-port calibration standard straight-through;
sequentially connecting the reflection open circuit, the reflection short circuit, the matching load and the two-port calibration standard straight-through, and collecting parallel direction test S parameters, right angle direction or difference port test S parameters of the reflection open circuit, the reflection short circuit, the matching load and the two-port calibration standard straight-through;
acquiring a parallel correction parameter based on the pre-parameter and the parallel test S parameter, and calculating reflection coefficients of the reflection open circuit, the reflection short circuit and the matched load;
obtaining a right-angle or differential port correction parameter based on the reflection coefficient and the right-angle or differential port test S parameter;
generating an error correction matrix based on the parallel direction correction parameters and the right angle direction or difference port correction parameters;
and completing the calibration of the multi-port radio frequency microwave device to be tested based on the error correction matrix and the vector network analyzer.
2. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 1, characterized in that: the initial parameters comprise start-stop frequency points, frequency stepping, output power, intermediate frequency bandwidth and average times.
3. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 1, characterized in that: the pre-parameters comprise the through delay and insertion loss of the parallel to dual-port calibration standard part and the direct current resistance of the matched load.
4. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 1, characterized in that: and acquiring a parallel correction parameter based on the pre-parameter and the parallel test S parameter by adopting an LRRM algorithm.
5. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 4, characterized in that: in the LRRM algorithm, a calibration algorithm based on a 10-term error model is adopted.
6. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 1, characterized in that: and obtaining a right angle direction or difference port correction parameter based on the reflection coefficient and the right angle direction or difference port test S parameter by adopting an SOLR algorithm.
7. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 6, characterized in that: in the SOLR algorithm, a calibration algorithm based on a 10-term error model is adopted.
8. According to the claimsThe multi-port radio frequency microwave calibration method based on the self-calibration algorithm is characterized by comprising the following steps: the substrate material of the calibration standard part adopts Al with the purity of more than 99.6 percent2O3Ceramic or fused silica; the resistive layer is formed by a sputtering process using NiCr or TaN to have a thickness of 100nm to 200 nm.
9. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 1, characterized in that: the direct current resistance of the matched load is controlled within the range of 50 +/-0.1 omega; the straight-through characteristic impedance of the dual-port calibration standard part is 50 +/-0.1 omega, and a 3-5 mu m gold layer is formed by using a sputtering process to form a microstrip line.
10. The multi-port radio frequency microwave calibration method based on the self-calibration algorithm according to claim 1, characterized in that: the physical dimensions and the processing technology of the reflection open circuit, the reflection short circuit, the matching load and the through of the two-port calibration standard are the same.
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| CN111751627A (en) * | 2020-06-05 | 2020-10-09 | 浙江铖昌科技有限公司 | Self-calibration method of vector network analyzer based on ten-term error model |
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| CN114325201A (en) * | 2022-01-10 | 2022-04-12 | 浙江铖昌科技股份有限公司 | Multi-port S-parameter de-embedding method, device and electronic device based on self-calibration |
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