CN112558265B

CN112558265B - Locking device for lens of gas excimer laser

Info

Publication number: CN112558265B
Application number: CN201910917494.2A
Authority: CN
Inventors: 赵靖
Original assignee: Zhangjiagang Ziyang Electronic Technology Co ltd
Current assignee: Zhangjiagang Ziyang Electronic Technology Co ltd
Priority date: 2019-09-26
Filing date: 2019-09-26
Publication date: 2022-04-19
Anticipated expiration: 2039-09-26
Also published as: CN112558265A

Abstract

The invention discloses a locking device for a gas excimer laser lens, which comprises a lens clamp, a lens, a gasket, a support ring and a backing ring are sequentially arranged in the lens clamp from bottom to top, a plurality of clamp grooves are arranged on the inner side of the lens clamp, a roller is rotationally arranged in the groove of the clamp, the bottom of the roller can be contacted with the backing ring, a locking plate is arranged in the lens clamp, a plurality of balls are rotatably arranged on the outer side of the locking plate, a fan-shaped groove is arranged on the roller, the balls can be contacted with the central angle of the fan-shaped groove, when the locking plate moves upwards, the ball can be driven to move vertically along the upper half part of the sector groove, the roller can rotate anticlockwise in the groove of the clamp and rotate on the backing ring, the device is simple in structure, and the locking stability of the lens can be improved while large pressure can be borne and air leakage can be avoided.

Description

Locking device for lens of gas excimer laser

Technical Field

The invention relates to the field of laser lenses, in particular to a locking device for a gas excimer laser lens.

Background

The optical lens of the gas excimer laser is usually required to be installed in a locking device, and the locking device is installed at two ends of the laser cavity of the laser to play a role in sealing. The existing locking device generally comprises a locking lens, a gasket, a support ring, a threaded ring and a sealing ring, and when the lens is fixed between a lens clamp and the support ring, the threaded ring needs to be screwed by using a special tool, and then the sealing ring and the gasket are used for sealing the lens.

In the prior art, a very large torsion is required when the threaded ring is locked, and a tool is easy to fall off to scratch a lens; when locking, the locking degree is different due to different applied forces, which results in poor sealing or deformation of the support ring.

Disclosure of Invention

In order to overcome the above disadvantages, the present invention provides a locking device for a lens of a gas excimer laser, which has a simple structure, can bear a large pressure, is airtight, and can improve the locking stability of the lens.

In order to achieve the above purposes, the invention adopts the technical scheme that: the utility model provides a locking device for gaseous excimer laser camera lens, includes the lens anchor clamps, supreme camera lens, gasket, support ring and the backing ring of having placed in proper order down is followed in the lens anchor clamps, lens anchor clamps inboard is provided with a plurality of anchor clamps recesses, anchor clamps recess internal rotation is provided with the roller, the roller bottom can contact with the backing ring, lockplate has been placed in the lens anchor clamps, the lockplate outside is rotated and is provided with a plurality of balls, be provided with fan-shaped recess on the roller, the ball can contact with the central angle of fan-shaped recess, works as during lockplate rebound, can drive the vertical removal is first at fan-shaped recess to the ball, the roller can be in anchor clamps recess counter-clockwise turning and be rotary motion on the backing ring.

The locking device for the gas excimer laser lens provided by the invention has the beneficial effects that: the roller with the sector groove is rotatably arranged on the inner side of the lens clamp, and the ball is rotatably arranged on the side surface of the locking plate, when the locking plate is lifted upwards, the ball moves upwards along the upper half part of the sector groove, and can push the roller to rotate anticlockwise in the clamp groove of the lens clamp while rotating, because the bottom of the roller is in contact with the backing ring placed in the lens clamp when the locking plate is not moved, the contact part of the roller and the backing ring is increased when the roller rotates, so that the pressure on the backing ring is increased, and the backing ring and a lens placed below the backing ring are locked; the cushion ring is used for replacing an original threaded ring, so that air leakage can be avoided under high pressure, the locking position is fixed, the effect of being not influenced by operation of personnel is achieved, and the stability of locking the lens is improved.

Further, the sector-shaped groove has a certain angle which is between 120 and 180 degrees, so that the roller can rotate in the clamp groove through the pushing of the ball.

Furthermore, a plurality of guide angles are arranged on the backing ring, the rollers can contact with the guide angles, and the guide angles are arc-shaped or round-angle-shaped, so that abrasion is reduced.

Further, backing ring thickness is greater than 5mm and has certain difference between the internal diameter and the external diameter, the difference is less than 10mm to guarantee that the size of backing ring does not influence laser output.

Furthermore, the locking plate top is provided with the handle, is convenient for remove the locking plate.

Further, be provided with the sealing washer in the lens anchor clamps, the sealing washer can contact with the camera lens, improves the leakproofness.

Furthermore, the lens and the gasket are both positioned inside the support ring and can be in contact with the inner side of the support ring, so that the stability and the sealing performance are improved.

Drawings

FIG. 1 is a schematic structural diagram of the present invention.

In the figure:

1-a lens clamp; 2-a lens; 3-a gasket; 4-a backing ring; 41-a guide angle; 5-a roller; 51-sector-shaped grooves; 6-clamp groove; 7-locking plate; 71-a handle; 8-a ball bearing; 9-sealing ring; 10-support ring.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.

Referring to the attached drawing 1, the locking device for the gas excimer laser lens comprises a lens clamp 1, wherein a lens 2, a gasket 3, a support ring 10 and a gasket 4 (the gasket 4 can be made of copper, nickel, steel and other metals, the thickness is greater than 5mm, a certain difference value exists between the inner diameter and the outer diameter, the difference value is less than 10mm) are sequentially placed in the lens clamp 1 from bottom to top, the lens 2 and the gasket 3 are both positioned in the support ring 10 and can be in contact with the inner side of the support ring, a sealing ring 9 is arranged in the lens clamp 1, and the sealing ring 9 can be in contact with the lens 2;

the inner side of the lens clamp 1 is provided with a plurality of clamp grooves 6, rollers 5 are rotationally arranged in the clamp grooves 6, the bottoms of the rollers 5 can be in contact with a backing ring 4, a plurality of guide angles 41 are arranged on the backing ring 4, the rollers 5 can be in contact with the guide angles 41, the guide angles 41 are arc-shaped or circular-angle-shaped, a locking plate 7 is placed in the lens clamp 1, a plurality of balls 8 are rotationally arranged on the outer side of the locking plate 7, a fan-shaped groove 51 is arranged on the rollers 5, the fan-shaped groove 51 has a certain angle, the angle is located between 120 and 180 degrees, the balls 8 can be in angular contact with the circle center of the fan-shaped groove 51, a handle 71 is arranged at the top of the locking plate 7, when the locking plate 7 is pulled upwards, the balls 8 can be driven to vertically move along the upper half part of the fan-shaped groove 51, and the rollers 5 can rotate anticlockwise in the clamp grooves 6 and rotate on the backing ring 4.

The specific working process is as follows: the part of the locking plate 7 with the ball 8 is placed in the lens clamp 1 in a staggered mode with the roller 5, then the locking plate 7 is transversely rotated to the center of the roller 5, the locking plate 7 is pulled upwards through the pull handle 71, the roller 5 rotates anticlockwise, the upper half portion rotates towards the outside of the lens clamp 1, the lower half portion rotates towards the inside of the lens clamp 1, the rotating axis fixed by the ball 8 is lower than the circle center of the roller 5, and when the lower half portion of the roller 5 rotates towards the inside, the backing ring 4 and the lens 2 below the backing ring can be locked.

By rotatably arranging the roller 5 with the fan-shaped groove 51 on the inner side of the lens clamp 1 and rotatably arranging the ball 8 on the side surface of the locking plate 7, when the locking plate 7 is pulled upwards, the ball 8 moves upwards along the upper half part of the fan-shaped groove 51, the roller 5 can be pushed to rotate anticlockwise in the clamp groove 6 of the lens clamp 1 while rotating, because the bottom of the roller 5 is contacted with the backing ring 4 placed in the lens clamp 1 when the locking plate 7 is not moved, the contact part of the roller 5 and the backing ring 4 is increased when the roller 5 rotates, and the pressure on the backing ring 4 is increased, so that the backing ring 4 and the lens 2 placed below the backing ring 4 are locked; the backing ring 4 is used for replacing the original threaded ring, so that air leakage can be avoided under high pressure, the locking position is fixed, the effect of being not influenced by operation of personnel is achieved, and the stability of locking the lens 2 is improved.

The above embodiments are merely illustrative of the technical concept and features of the present invention, and the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims

1. A locking device for a gas excimer laser lens, comprising a lens holder (1), characterized in that: a lens (2), a gasket (3), a support ring (10) and a backing ring (4) are sequentially arranged in the lens clamp (1) from bottom to top, a plurality of clamp grooves (6) are arranged on the inner side of the lens clamp (1), rollers (5) are rotationally arranged in the clamp grooves (6), the bottom of the roller (5) can be contacted with the backing ring (4), a locking plate (7) is arranged in the lens clamp (1), a plurality of balls (8) are rotatably arranged on the outer side of the locking plate (7), a fan-shaped groove (51) is arranged on the roller (5), the balls (8) can be in contact with the central angle of the fan-shaped groove (51), when the locking plate (7) moves upwards, the ball (8) can be driven to move vertically along the upper half part of the fan-shaped groove (51), the roller (5) can rotate anticlockwise in the clamp groove (6) and rotate on the backing ring (4).

2. A lock for a gas excimer laser lens according to claim 1, wherein: the fan-shaped groove (51) has an angle which is between 120 DEG and 180 deg.

3. A lock for a gas excimer laser lens according to claim 1, wherein: the cushion ring (4) is provided with a plurality of guide angles (41), the rollers (5) can be in contact with the guide angles (41), and the guide angles (41) are arc-shaped or round-angle-shaped.

4. A locking device for a gas excimer laser lens according to any one of claims 1 or 3, wherein: the thickness of the backing ring (4) is larger than 5mm, a certain difference value is formed between the inner diameter and the outer diameter, and the difference value is smaller than 10 mm.

5. A lock for a gas excimer laser lens according to claim 1, wherein: the top of the locking plate (7) is provided with a handle (71).

6. A lock for a gas excimer laser lens according to claim 1, wherein: a sealing ring (9) is arranged in the lens clamp (1), and the sealing ring (9) can be in contact with the lens (2).

7. A lock for a gas excimer laser lens according to claim 1, wherein: the lens (2) and the gasket (3) are both positioned in the support ring (10) and can be in contact with the inner side of the support ring.