CN112556426B - Sintering furnace with gas-phase quenching function and quenching process thereof - Google Patents

Abstract

The invention discloses a sintering furnace with a gas-phase quenching function, which comprises a bell jar, a sintering cavity arranged in the bell jar, a quenching cavity communicated with the bell jar and a rotating device, wherein a bell jar door, an air inlet and an air outlet are arranged on the bell jar; the sintering chamber includes: the feeding door, the discharging door, the bearing table arranged at the bottom of the sintering cavity and the heating element are arranged on the heating element; a groove is arranged on the bearing table, and the heating element is embedded in the groove and the inner wall of the sintering cavity; the quenching cavity comprises a cavity door, a side wall door, a fork paddle device, a plurality of supporting pins and a profile sensor; the quenching cavity is provided with an air inlet channel and an air outlet channel; the fork paddle device includes: the fork paddle, the sliding device and the telescopic device; the supporting drill rod can stretch out and draw back. The atmosphere furnace sintering provided by the invention can realize atmosphere sintering and annealing treatment on the sample, and can also realize a gas phase quenching process on the sample, thereby providing the performance of the material.

Description

A sintering furnace with gas phase quenching function and its quenching process

technical field

The invention relates to the field of material heat treatment equipment, in particular to a sintering furnace with gas phase quenching function and a quenching process thereof.

Background technique

In the field of material thermal processing and processing technology, high temperature equipment such as box sintering furnace, atmosphere furnace and other equipment is required. Gas-phase quenching is one of the important processes for material heat treatment, especially for functional materials, gas-phase quenching in a specific atmosphere can improve the properties of the material. As in the document "Large reduction of dielectric losses of CaCu ₃ Ti ₄ O ₁₂ ceramics via air quenching [J]. Ceramics International, 2017, 43(8): 6618-6621 [J]", quenching in an air atmosphere can improve not only The dielectric constant of the dielectric ceramic can be increased, and the dielectric loss can also be effectively reduced. Patent 201711259380.0 improves the properties of the material by quenching the material under air.

Existing atmosphere furnaces are mostly tube furnaces or box furnaces with a bell jar structure. In the existing atmosphere furnace, gas is generally introduced into the cavity of the sintering furnace, and only processes such as heating, sintering, and annealing of samples can be realized. Since the furnace body of the existing atmosphere furnace has the functions of heat preservation and temperature storage, it is difficult to rapidly reduce the temperature of the furnace body chamber, so it is difficult to realize the gas phase quenching process of the material. Especially for the box-type sintering furnace, the heating element is in the furnace. When special gases such as H ₂ and O ₂ are introduced into the atmosphere furnace, the oxidation and aging of the heating element will be accelerated, which will shorten the service life of the sintering furnace. It is difficult for the existing atmosphere furnace or sintering furnace to meet the requirements of the gas phase quenching process under the special atmosphere of the material.

In order to solve the above problems, it is necessary to develop a sintering furnace with gas phase quenching function. Different from the traditional atmosphere furnace, the sintering furnace not only performs atmosphere sintering and annealing treatment on the sample, but also realizes the gas phase quenching process for the sample at the same time, providing the performance of the material. , to meet the quenching process requirements for materials under special atmosphere.

SUMMARY OF THE INVENTION

The invention overcomes the deficiencies of the prior art, and provides a sintering furnace with gas phase quenching function and a quenching process thereof.

In order to achieve the above purpose, the technical scheme adopted in the present invention is: a sintering furnace with gas phase quenching function, comprising a bell jar, a sintering chamber arranged inside the bell jar, a quenching chamber communicated with the bell jar, and a rotating The rotary device of the quenching chamber is characterized in that the bell jar is provided with a bell jar door, an air inlet and an exhaust port, and an annular cavity is also arranged in the bell jar to connect the sintering chamber and the sintering chamber. the quenching chamber;

The sintering chamber includes: a feeding door, a discharging door, a bearing platform arranged at the bottom of the sintering chamber, and a heating element; the bearing platform is provided with a groove, and the heating element is embedded in the groove and the heating element. the inner wall of the sintering chamber;

The quenching chamber includes: a chamber door communicating with the bell jar and the quenching chamber, a sidewall door for taking out the quenched sample, a fork paddle device, and a number of support drills and profile sensors arranged on the upper dome of the chamber; The quenching chamber is provided with an air inlet channel and an exhaust channel; the fork paddle device is fixed in the quenching chamber, and the fork paddle device includes: a fork paddle and a sliding device respectively controlling the fork paddle to move up and down and to telescopic forward and backward. and a retractor; the fork paddle moves and transfers the quenched sample on the groove into the quenching cavity; the support drill can be retracted.

In a preferred embodiment of the present invention, a thermocouple probe is further provided inside the sintering chamber, and the thermocouple probe is connected to a heating and temperature control system to monitor the temperature in the sintering chamber.

In a preferred embodiment of the present invention, the fork paddle has a U-shaped or V-shaped structure, and the fork paddle matches the shape of the groove.

In a preferred embodiment of the present invention, the quenching chamber is further provided with a gas temperature regulator for adjusting the temperature of the incoming gas, an infrared temperature measuring probe for testing the temperature of the sample, and a barometer for monitoring the air pressure in the quenching chamber.

In a preferred embodiment of the present invention, the annular cavity is arranged on the side of the chamber door close to the bell jar, the shape of the annular cavity is consistent with the shape of the chamber door, and the annular cavity has a built-in vacuum pump or a There are vacuum lines to generate vacuum negative pressure.

In a preferred embodiment of the present invention, the profile sensor detects the profile of the sample surface, and the profile sensor transmits the profile signal of the sample to the height adjustment system.

In a preferred embodiment of the present invention, the height adjustment system independently adjusts the telescopic height of each of the support pins so as to match different sample sizes and resist the samples.

The present invention also provides a quenching process of a sintering furnace with gas phase quenching function, characterized in that it comprises the following steps:

S1. Place the sample above the groove of the sintering chamber bearing platform. When the heating element heats the sample, close the door of the bell jar and introduce gas into the bell jar, so that the sintering chamber is in the atmosphere of the introduced gas, and Monitor the temperature and air pressure parameters of the bell jar and sintering chamber;

S2. After the sample is heated, when the sample needs to be gas-phase quenched, the chamber door is opened, and a predetermined temperature and a predetermined type of gas are introduced into the quenching chamber;

S3. Open the discharge door of the sintering chamber upward, and the fork paddle moves up and down and retracts back and forth, so that the fork paddle extends into the groove of the bearing platform, lifts up the sample, and then transfers it to the quenching chamber for gas phase quenching, and when When the sample completely enters the quenching chamber, close the chamber door;

S4. Adjust the telescopic height of each support drill according to the signal of the profile sensor to resist the sample; the rotary device drives the quenching chamber to rotate 0-360°. The placement posture of the sample, after the gas phase quenching of the sample is completed, the sample is taken out through the side wall door of the quenching chamber.

In a preferred embodiment of the present invention, in the step S2, the chamber door is opened, and a vacuum negative pressure is generated in the annular chamber to prevent the gas in the quenching chamber from flowing into the bell jar and the sintering chamber.

In a preferred embodiment of the present invention, by controlling the temperature and gas pressure parameters of the gas introduced into the quenching chamber, it is possible to set process parameters with a wider temperature range, so that the high temperature sample is directly placed in the gas of -150℃～800℃ atmosphere.

In a preferred embodiment of the present invention, the feed door can be opened sideways or slid upwards.

In a preferred embodiment of the present invention, the discharge door is opened upward through a set corresponding track, and the height of the upward opening is adjusted according to the size of the sample.

In a preferred embodiment of the present invention, the exhaust passage is used for exhaust, and the exhaust passage ensures that the gas only goes out and does not enter through the one-way gas valve.

In a preferred embodiment of the present invention, the gas temperature regulator uses a liquid nitrogen-heating combined system to adjust the temperature of the gas to -150°C to 800°C.

In a preferred embodiment of the present invention, the chamber door is arranged at the connection between the quenching chamber and the bell jar, and the door can be opened sideways or translated upward.

In a preferred embodiment of the present invention, the turning device is a driving motor or a turning rudder.

The present invention solves the defects existing in the background technology, and the present invention has the following beneficial effects:

(1) The present invention provides a sintering furnace with gas phase quenching function. The sintering furnace is mainly composed of a bell jar, a sintering cavity and a quenching cavity, which can not only realize the atmosphere sintering and annealing treatment of the sample, but also realize the sintering and annealing of the sample. The gas phase quenching process provides the performance of the material and meets the quenching process requirements for the material in a special atmosphere.

(2) The gas introduced in the present invention can slow down the aging of the heating element of the sintering furnace caused by the strong oxidizing atmosphere through the negative pressure of the annular cavity; at the same time, the negative pressure of the annular cavity can also prevent the gas in the bell jar from entering the quenching chamber. , so as to ensure the accuracy of the gas in the quenching chamber.

(3) The present invention adjusts the telescopic height of each support drill according to the signal of the profile sensor to resist the sample; the rotary device drives the quenching chamber to rotate 0-360°, and after gas phase quenching for a certain period of time, the rotary device adjusts the quenching chamber to rotate by a certain angle , to adjust the placement posture of the sample to ensure that each part of the sample is fully in contact with the gas atmosphere and fully cooled.

(4) In the present invention, through the cooperation of the bearing platform of the sintering chamber and the fork paddle, the fork paddle can move forwards and backwards, up and down: forward and downward into the groove set on the bearing platform, and then rise and retreat to the quenching chamber to complete the sample. The transfer from the sintering chamber to the quenching chamber is easy to operate and can reduce the influence of external factors.

(5) In the quenching process of the present invention, when the sample is gas-phase quenched, the temperature of the gas can be monitored, and at the same time, the temperature of the sample is monitored by an infrared test method.

(6) In terms of the control of the gas phase quenching process of the present invention, the process parameters of a wider temperature range can be set through the temperature control of the gas introduced, so that the high-temperature samples and the high-temperature samples are directly placed in the gas of -150 ℃ ~ 800 ℃ atmosphere.

Description of drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative work;

Figure 1 is a perspective view of a preferred embodiment of the present invention;

Figure 2 is a perspective view of the sintering chamber of the preferred embodiment of the present invention;

Figure 3 is a perspective view of the quench chamber of the preferred embodiment of the present invention;

FIG. 4 is a perspective structural view of the fork paddle device according to the preferred embodiment of the present invention;

In the picture: 100, bell jar; 110, bell jar door; 120, air inlet; 130, exhaust outlet;

200, sintering chamber; 210, feeding door; 220, bearing platform; 221, groove; 222, heating element; 230, thermocouple probe; 240, discharging door;

300, annular cavity; 400, quenching cavity; 410, chamber door; 420, fork paddle device; 421, fork paddle; 422, sliding device; 423, retractor; 430, support drill; 440, profile sensor; Air channel; 451, gas temperature regulator; 460, barometer; 470, exhaust channel; 480, infrared temperature probe; 490, side wall door; 500, rotary device.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited by the specific implementation disclosed below. example limitations.

In the description of this application, it should be understood that the terms "center", "portrait", "horizontal", "top", "bottom", "front", "rear", "left", "right", " The orientations or positional relationships indicated by vertical, horizontal, top, bottom, inner, and outer are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and The description is simplified rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second" etc. may expressly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; it can be mechanical connection or electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood through specific situations.

As shown in FIG. 1, a sintering furnace with gas phase quenching function includes a box-type sealed bell 100, a sintering cavity 200 arranged inside the bell 100, a quenching cavity 400 communicating with the bell 100, and a rotary quenching The rotary device 500 of the cavity 400 and the bell jar 100 are also provided with an annular cavity 300 to connect the sintering cavity 200 and the quenching cavity 400 . The box bell 100 plays a role of sealing and thermal insulation. Box sintering furnaces are capable of heating sintered samples. The shape of the annular cavity 300 is consistent with the shape of the chamber door 410 . The annular cavity 300 has a built-in vacuum pump to generate vacuum negative pressure to prevent the gas in the quenching cavity 400 from flowing into the area of the bell jar 100 and the sintering cavity 200 . The negative pressure effect can slow down the aging of the heating element 222 of the sintering furnace caused by the strong oxidizing atmosphere; at the same time, the negative pressure effect of the annular cavity 300 can also prevent the gas in the bell jar 100 from entering the quenching cavity 400, thereby ensuring the gas in the quenching cavity 400. accuracy. The quenching chamber 400 provides atmosphere quenching, and the rotary device 500 is a driving motor or a rotary rudder.

The bell jar 100 is provided with a bell door 110 , an air inlet 120 and an air outlet 130 . The annular chamber 300 is disposed on the side of the chamber door 410 close to the bell jar 100 . The bell door 110 is used for the inlet of the sample feeding channel, the air inlet 120 is used for introducing gas, the exhaust port 130 is used for the interface of exhausting or vacuuming, and a barometer 460 is provided on the bell 100 for monitoring the bell 100 air pressure.

As shown in FIG. 2 , the sintering chamber 200 includes: a feeding door 210, a discharging door 240, a bearing platform 220 disposed at the bottom of the sintering chamber 200, and a heating element 222; The door 240 is opened upward through the corresponding track provided, and the height of the upward opening is adjusted according to the size of the sample. A groove 221 is provided on the bearing platform 220 at the bottom of the sintering chamber 200, and the groove 221 allows the front fork of the fork paddle 421 to be inserted to take out the sintered sample. The heating element 222 is embedded in the groove 221 or arranged on four sides of the cavity wall or arranged on the left and right opposite sides of the cavity wall. A thermocouple probe 230 is also provided inside the sintering cavity 200 , and the thermocouple probe 230 is connected with the heating and temperature control system to monitor the temperature in the sintering cavity 200 .

As shown in FIG. 3 , the quenching chamber 400 includes: a chamber door 410 that communicates with the bell jar 100 and the quenching chamber 400 , a side wall door 490 for taking out the quenched sample, a fork paddle device 420 , and a plurality of domes disposed on the upper dome of the chamber. Support drill 430 and profile sensor 440; support drill 430 can be extended and retracted.

The quenching chamber 400 is provided with an intake channel 450 and an exhaust channel 470. The intake channel 450 is used to introduce the quenched gas, the exhaust channel 470 is used for exhaust, and the exhaust channel 470 ensures that the gas only exits through a one-way gas valve. Do not enter.

The quenching chamber 400 is also provided with a gas temperature regulator 451 for adjusting the temperature of the incoming gas, an infrared temperature measuring probe 480 for testing the temperature of the sample, and a barometer 460 for monitoring the air pressure of the quenching chamber 400 . The gas temperature regulator 451 uses a combined liquid nitrogen-heating system to adjust the temperature of the gas to -150°C to 800°C. The chamber door 410 is disposed at the connection between the quenching chamber 400 and the bell jar 100, and the door can be opened sideways or translated upward.

The contour sensor 440 detects the surface contour of the sample, and the contour sensor 440 transmits the sample contour signal to the height adjustment system, and the height adjustment system independently adjusts the telescopic height of each support pin 430 to match different sample sizes and resist the sample. The rotary device 500 drives the quenching chamber 400 to rotate by 0-360°. After gas phase quenching for a certain period of time, the rotary device 500 adjusts the quenching chamber 400 to rotate by a certain angle to adjust the placement posture of the sample and ensure that each part of the sample is fully in contact with the gas atmosphere and fully cooled.

As shown in FIG. 4 , the fork paddle device 420 is fixed in the quenching chamber 400 , and the fork paddle device 420 includes a fork paddle 421 , a sliding device 422 and a retractor 423 for respectively controlling the up and down movement and front and rear extension of the fork paddle 421 ; The supporting platform 220 and the fork paddle 421 cooperate with each other, the fork paddle 421 can move back and forth, up and down: forward and downward into the groove 221 set on the bearing platform 220, then rise and retreat to the quenching chamber 400, and complete the sintering of the sample from the quenching chamber 400. The cavity 200 is transferred to the quenching cavity 400, which is easy to operate and can reduce the influence of external factors. The fork paddle 421 is a U-shaped or V-shaped structure, and the fork paddle 421 matches the shape of the groove 221 .

The present invention also provides a quenching process of a sintering furnace with gas phase quenching function, characterized in that it comprises the following steps:

S1. Place the sample above the groove 221 on the bearing platform 220 of the sintering chamber 200. When the heating element 222 heats the sample, the bell door 110 is closed and gas is introduced into the bell 100, so that the sintering chamber 200 is in the desired position. The gas is introduced into the atmosphere, and the temperature and pressure parameters of the bell jar 100 and the sintering chamber 200 are monitored;

S2. After the sample is heated, when the sample needs to be gas-phase quenched, the chamber door 410 is opened, and a predetermined temperature and a predetermined type of gas are introduced into the quenching chamber 400;

S3. Open the discharge door 240 of the sintering chamber 200 upward, and the fork paddle 421 moves up and down and stretches forward and backward, so that the fork paddle 421 extends into the groove 221 of the bearing platform 220, lifts up the sample, and then transfers it to the quenching chamber 400 Gas-phase quenching is performed indoors, and when the sample completely enters the quenching chamber 400, the chamber door 410 is closed;

S4. Adjust the telescopic height of each support drill 430 according to the signal of the profile sensor 440 to resist the sample; the rotary device 500 drives the quenching chamber 400 to rotate 0-360°, and after gas phase quenching for a certain period of time, the rotary device 500 adjusts the quenching chamber 400 Rotate a certain angle to adjust the placement posture of the sample. After the gas phase quenching of the sample is completed, the sample is taken out through the side wall door 490 of the quenching chamber 400 .

It should be noted that, in S1, in order to ensure the temperature of the sintering chamber, the opening and closing degrees of the feeding door and the discharging door can be adjusted, or after the doors are closed, the sintering chamber 200 can be placed in the bell jar 100 through the gap at the door. in a gas atmosphere. In S2 , the chamber door 410 is opened, and a negative vacuum pressure is generated in the annular chamber 300 to prevent the gas in the quenching chamber 400 from flowing into the bell jar and the sintering chamber 200 . By controlling the temperature and gas pressure parameters of the gas introduced into the quenching chamber 400, process parameters with a wider temperature range can be set, so that the high temperature sample can be directly placed in a gas atmosphere of -150°C to 800°C.

The ideal embodiments of the present invention are inspired by the above, and relevant persons can make various changes and modifications without departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.

Claims (8)

1. a sintering furnace with gas-phase quenching function, comprising a bell jar, a sintering chamber arranged inside the bell jar, a quenching chamber communicated with the bell jar and a rotary device that rotates the quenching chamber, it is characterized in that , the bell jar is provided with a bell door, an air inlet and an exhaust port, and an annular cavity is also arranged in the bell jar to connect the sintering cavity and the quenching cavity; The sintering chamber includes: a feeding door, a discharging door, a bearing platform arranged at the bottom of the sintering chamber, and a heating element; the bearing platform is provided with a groove, and the heating element is embedded in the groove and the heating element. the inner wall of the sintering cavity; a thermocouple probe is also arranged inside the sintering cavity, and the thermocouple probe is connected with a heating temperature control system to monitor the temperature in the sintering cavity; The quenching chamber includes: a chamber door communicating with the bell jar and the quenching chamber, a sidewall door for taking out the quenched sample, a fork paddle device, and a number of support drills and profile sensors arranged on the upper dome of the chamber; The quenching chamber is provided with an air inlet channel and an exhaust channel; the fork paddle device is fixed in the quenching chamber, and the fork paddle device includes: a fork paddle and a sliding device respectively controlling the fork paddle to move up and down and to telescopic forward and backward. and a retractor; the fork paddle moves and transfers the quenched sample on the groove to the quenching cavity; the support drill can be telescopic; the fork paddle is a U-shaped or V-shaped structure, and the fork paddle match the shape of the groove. 2. The sintering furnace with gas-phase quenching function according to claim 1, characterized in that: the quenching chamber is also provided with a gas temperature regulator for adjusting the temperature of the incoming gas, and an infrared temperature measuring probe for testing the temperature of the sample and a barometer for monitoring the air pressure of the quenching chamber. 3 . The sintering furnace with gas phase quenching function according to claim 1 , wherein the annular cavity is arranged on the side of the cavity door close to the bell jar, and the shape of the annular cavity is the same as that of the cavity. 4 . The shape of the chamber door is the same, and the annular chamber has a built-in vacuum pump or a vacuum pipeline to generate vacuum negative pressure. 4 . The sintering furnace with gas phase quenching function according to claim 1 , wherein the profile sensor detects the profile of the sample surface, and the profile sensor transmits the profile signal of the sample to the height adjustment system. 5 . 5 . The sintering furnace with gas phase quenching function according to claim 4 , wherein the height adjustment system independently adjusts the telescopic height of each of the support rods to match different sample sizes and resist the samples. 6 . . 6. The quenching process based on any one of the sintering furnaces with gas phase quenching function described in claims 1-5, is characterized in that, comprises the following steps: S1. Place the sample above the groove of the sintering chamber bearing platform. When the heating element heats the sample, close the door of the bell jar and introduce gas into the bell jar, so that the sintering chamber is in the atmosphere of the introduced gas, and Monitor the temperature and air pressure parameters of the bell jar and sintering chamber; S2. After the sample is heated, when the sample needs to be gas-phase quenched, the chamber door is opened, and a predetermined temperature and a predetermined type of gas are introduced into the quenching chamber; S3. Open the discharge door of the sintering chamber upward, and the fork paddle moves up and down and retracts back and forth, so that the fork paddle extends into the groove of the bearing platform, lifts up the sample, and then transfers it to the quenching chamber for gas phase quenching, and when When the sample completely enters the quenching chamber, close the chamber door; S4. Adjust the telescopic height of each support drill according to the signal of the profile sensor to resist the sample; the rotary device drives the quenching chamber to rotate 0-360°. The placement posture of the sample, after the gas phase quenching of the sample is completed, the sample is taken out through the side wall door of the quenching chamber. 7 . The quenching process according to claim 6 , wherein in the step S2 , the chamber door is opened and a vacuum negative pressure is generated in the annular chamber to prevent the gas in the quenching chamber from flowing into the bell jar and the sintering chamber. 8 . 8. quenching process according to claim 6 is characterized in that: by controlling the temperature and gas pressure parameters of the gas introduced into the quenching chamber, the process parameters of a wider temperature range can be set, so that the high temperature sample is directly placed in - 150 ℃ ~ 800 ℃ gas atmosphere.

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