CN112510037B - 3D logic chip capacitor circuit, logic chip and electronic equipment - Google Patents
3D logic chip capacitor circuit, logic chip and electronic equipment Download PDFInfo
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Abstract
Description
技术领域Technical Field
本发明实施例涉及芯片技术领域,具体地说,涉及一种3D逻辑芯片电容电路、逻辑芯片及电子设备。The embodiments of the present invention relate to the field of chip technology, and in particular, to a 3D logic chip capacitor circuit, a logic chip and an electronic device.
背景技术Background technique
随着ASIC芯片在AI人工智能,大数据中心,自动驾驶等科技领域的应用。市场对芯片的要求和功能也在显著提高。芯片上集成的电容是芯片各个功能电路的常用器件,逻辑芯片普遍使用的有CMOS(Complementary Metal Oxide Semiconductor,互补金属氧化物半导体)栅极电容,或者MOM(Metal Oxide Metal)金属-氧化物-金属电容及MIM(MetalInsulator Metal)金属-绝缘体-金属电容。其中,MOM电容和MIM电容单位面积电容都小于CMOS栅极电容,一般为CMOS栅极电容的1/3左右。而CMOS栅极电容,是使用CMOS器件的栅极gate、源极source,漏极drain和衬底substrate之间的电容,一般单位面积容值在11ff/um2左右,容值受电压影响明显。With the application of ASIC chips in AI, big data centers, autonomous driving and other technological fields, the market's requirements and functions for chips are also significantly improved. The capacitors integrated on the chip are common devices for various functional circuits of the chip. Logic chips commonly use CMOS (Complementary Metal Oxide Semiconductor) gate capacitors, or MOM (Metal Oxide Metal) metal-oxide-metal capacitors and MIM (Metal Insulator Metal) metal-insulator-metal capacitors. Among them, the capacitance per unit area of MOM capacitors and MIM capacitors is smaller than that of CMOS gate capacitors, generally about 1/3 of CMOS gate capacitors. The CMOS gate capacitor is the capacitance between the gate, source, drain and substrate of the CMOS device. The capacitance per unit area is generally around 11ff/ um2 , and the capacitance is significantly affected by voltage.
因此,在逻辑芯片中被广泛使用的CMOS栅极、MOM电容和MIM电容的单位面积电容值比较有限,并且不同于存储芯片,逻辑芯片的实现工艺限制逻辑芯片上很难集成高容值的片上电容,当逻辑芯片设计中需要使用大容量片上电容的时候,只能占用很大的逻辑芯片的面积,在逻辑芯片设计中实际可实现的电容值很难超过纳法数量级。Therefore, the capacitance per unit area of CMOS gates, MOM capacitors and MIM capacitors widely used in logic chips is relatively limited. Unlike memory chips, the implementation process of logic chips limits the integration of high-capacitance on-chip capacitors on logic chips. When large-capacity on-chip capacitors are needed in logic chip design, they can only occupy a large area of the logic chip. The actual achievable capacitance value in logic chip design is difficult to exceed the nanofarad order.
而目前,需要的高容值电容都需要通过片外电容来实现,这样既提高了成本,又由于需要外接管脚连线,而对芯片设计造成极大的限制。At present, the required high-capacitance capacitors must be realized through off-chip capacitors, which not only increases the cost, but also greatly restricts the chip design due to the need for external pin connections.
发明内容Summary of the invention
在发明内容部分中引入了一系列简化形式的概念,这将在具体实施方式部分中进一步详细说明。本申请实施例的发明内容部分并不意味着要试图限定出所要求保护的技术方案的关键特征和必要技术特征,更不意味着试图确定所要求保护的技术方案的保护范围。A series of simplified concepts are introduced in the summary of the invention, which will be further described in detail in the detailed description. The summary of the invention of the embodiment of the present application does not mean to attempt to define the key features and essential technical features of the technical solution claimed for protection, nor does it mean to attempt to determine the scope of protection of the technical solution claimed for protection.
本申请实施例通过提供一种3D逻辑芯片电容电路、逻辑芯片及电子设备,解决了逻辑芯片片上电容单位面积电容值有限,片外电容成本高、结构复杂的问题。The embodiments of the present application provide a 3D logic chip capacitor circuit, a logic chip and an electronic device, thereby solving the problem that the capacitance per unit area of the on-chip capacitor of the logic chip is limited, and the off-chip capacitor has high cost and complex structure.
为至少部分地解决上述问题,第一方面,本申请实施例提供了一种逻辑芯片电容电路,可以包括:逻辑芯片功能电路和存储芯片借用电容,To at least partially solve the above problems, in a first aspect, an embodiment of the present application provides a logic chip capacitor circuit, which may include: a logic chip functional circuit and a storage chip borrowing capacitor,
所述存储芯片借用电容设置在所述逻辑芯片上,用于为所述逻辑芯片功能电路的耗电元件提供电荷。The storage chip borrowing capacitor is arranged on the logic chip to provide charge for the power consumption components of the functional circuit of the logic chip.
在第一方面的第一种可能的实施方式中,所述存储芯片借用电容为设置有高介电常数介质层的高密度电容。In a first possible implementation of the first aspect, the storage chip borrowing capacitor is a high-density capacitor provided with a high dielectric constant dielectric layer.
在第一方面的第二种可能的实施方式中,所述存储芯片借用电容通过3D-IC三维集成电路技术靠近所述逻辑芯片功能电路的耗电元件设置。In a second possible implementation of the first aspect, the storage chip borrowing capacitor is arranged close to the power-consuming components of the logic chip functional circuit through 3D-IC three-dimensional integrated circuit technology.
在第一方面的第三种可能的实施方式中,所述存储芯片借用电容为一个或两个以上。In a third possible implementation of the first aspect, the storage chip borrows one or more capacitors.
在第一方面的第四种可能的实施方式中,所述逻辑芯片功能电路包括开关电容电路,所述存储芯片借用电容用于所述开关电容电路。In a fourth possible implementation of the first aspect, the logic chip functional circuit includes a switched capacitor circuit, and the storage chip borrows capacitors for the switched capacitor circuit.
在第一方面的第五种可能的实施方式中,所述逻辑芯片功能电路包括线性稳压电路,所述存储芯片借用电容设置在所述线性稳压电路的电压输出端。In a fifth possible implementation of the first aspect, the logic chip functional circuit includes a linear voltage regulator circuit, and the storage chip borrows a capacitor disposed at a voltage output end of the linear voltage regulator circuit.
在第一方面的第六种可能的实施方式中,所述逻辑芯片功能电路包括电荷泵电路,所述存储芯片借用电容为所述电荷泵电路的自举电容。In a sixth possible implementation of the first aspect, the logic chip functional circuit includes a charge pump circuit, and the storage chip borrowed capacitor is a bootstrap capacitor of the charge pump circuit.
第二方面,本申请实施例提供了一种逻辑芯片,可以包括:In a second aspect, an embodiment of the present application provides a logic chip, which may include:
上述的逻辑芯片电容电路。The above-mentioned logic chip capacitor circuit.
第三方面,本申请实施例提供了一种电子设备,可以包括:In a third aspect, an embodiment of the present application provides an electronic device, which may include:
上述的逻辑芯片和与设置有所述存储芯片借用电容的存储芯片,所述逻辑芯片与所述存储芯片相连接。The above-mentioned logic chip and the memory chip provided with the memory chip borrowing capacitor, the logic chip is connected to the memory chip.
在第三方面的第一种可能的实施方式中,所述逻辑芯片和所述存储芯片通过3D-IC三维集成电路技术相连接,其中,为所述耗电元件提供电荷的存储芯片借用电容设置在所述逻辑芯片与所述耗电元件的对应位置。In a first possible implementation of the third aspect, the logic chip and the memory chip are connected via 3D-IC three-dimensional integrated circuit technology, wherein a memory chip borrowing capacitor for providing charge to the power-consuming element is arranged at corresponding positions of the logic chip and the power-consuming element.
相比现有技术,本发明实施例中提供的逻辑芯片电容电路至少包括以下有益效果:Compared with the prior art, the logic chip capacitor circuit provided in the embodiment of the present invention has at least the following beneficial effects:
本发明实施例提供的逻辑芯片电容电路,包括:逻辑芯片功能电路和存储芯片借用电容,上述存储芯片借用电容设置在所述逻辑芯片上,用于为上述逻辑芯片功能电路的耗电元件提供电荷。由于逻辑芯片使用了存储芯片中的电容,作为借用电容为逻辑芯片自身的耗电元件提供电荷。非常好的解决了,片上电容单位面积电容值有限的问题,同时节省了原件成本并改善了电源信号的响应及其他功能电路的功能实现。另外,由于借用了存储芯片中与逻辑芯片待提供电荷的功能电路对应的片上电容,从而避免为了提高逻辑芯片片上电容容值需外加片外电容而带来的成本高、结构复杂的问题。The logic chip capacitor circuit provided by the embodiment of the present invention includes: a logic chip functional circuit and a memory chip borrowing capacitor, wherein the memory chip borrowing capacitor is arranged on the logic chip and is used to provide charge for the power-consuming components of the logic chip functional circuit. Since the logic chip uses the capacitor in the memory chip as a borrowing capacitor to provide charge for the power-consuming components of the logic chip itself. This solves the problem of limited capacitance per unit area of on-chip capacitors very well, while saving the cost of components and improving the response of power supply signals and the functional realization of other functional circuits. In addition, since the on-chip capacitor corresponding to the functional circuit to be provided with charge in the logic chip is borrowed, the problem of high cost and complex structure caused by the need to add external capacitors to increase the capacitance of the on-chip capacitors of the logic chip is avoided.
相应地,本发明实施例提供的逻辑芯片和电子设备,也同样具有上述技术效果。Correspondingly, the logic chip and electronic device provided by the embodiments of the present invention also have the above technical effects.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图:In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:
图1为本发明实施例提供的一种逻辑芯片电容电路的示意性结构框图;FIG1 is a schematic structural block diagram of a logic chip capacitor circuit provided by an embodiment of the present invention;
图2为本发明实施例提供的一种逻辑芯片电容电路的电路拓扑图;FIG2 is a circuit topology diagram of a logic chip capacitor circuit provided by an embodiment of the present invention;
图3为本发明实施例提供的又一种逻辑芯片电容电路的电路拓扑图;FIG3 is a circuit topology diagram of another logic chip capacitor circuit provided by an embodiment of the present invention;
图4为本发明实施例提供的另一种逻辑芯片电容电路的电路拓扑图;FIG4 is a circuit topology diagram of another logic chip capacitor circuit provided by an embodiment of the present invention;
图5为本发明实施例提供的一种逻辑芯片的示意性结构框图;FIG5 is a schematic structural block diagram of a logic chip provided in an embodiment of the present invention;
图6为本发明实施例提供的一种电子设备的示意性结构框图;FIG6 is a schematic structural block diagram of an electronic device provided by an embodiment of the present invention;
图7为本发明实施例提供的一种电子设备的示意性结构图。FIG. 7 is a schematic structural diagram of an electronic device provided by an embodiment of the present invention.
具体实施方式Detailed ways
下面结合附图以及实施例对本发明做进一步的详细说明,以令本领域技术人员参照说明书文字能够据以实施。The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments so that those skilled in the art can implement the invention with reference to the description.
应当理解,本文所使用的诸如“具有”、“包含”以及“包括”术语并不排除一个或多个其它元件或其组合的存在或添加。It should be understood that terms such as “having”, “including” and “comprising” used herein do not exclude the existence or addition of one or more other elements or combinations thereof.
除此之外,还需要说明的是,除非另有明确的规定和限定,术语“设置”、“连接”应做广义理解。例如,可以是固定连接,也可以是可拆卸连接;可以是直接相连,也可以通过中间媒介间接相连;可以是一体地连接,也可以是两个元件内部的连通。也可以是两个元件之间可以进行信号传递、数据通信。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本申请中的具体含义。In addition, it should be noted that, unless otherwise clearly specified and limited, the terms "setting" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an integral connection or the internal connection of two elements. It can also be that signal transmission and data communication can be carried out between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
目前,在逻辑芯片中被广泛使用的CMOS栅极、MOM电容和MIM电容的单位面积电容值比较有限。其中,MOM电容和MIM电容单位面积电容都小于CMOS栅极电容,一般为CMOS电容的1/3左右。而CMOS栅极电容,是使用CMOS器件的栅极gate、源极source,漏极drain和衬底substrate之间的电容,一般单位面积容值在11ff/um2左右,容值受电压影响明显。所以,并且不同于存储芯片,逻辑芯片的实现工艺限制逻辑芯片上很难集成高容值的片上电容,基于现有的电容解决方案,当逻辑芯片设计中需要使用大容量片上电容的时候,需要占用很大的逻辑芯片的面积,在逻辑芯片设计中实际可实现的电容值很难超过纳法数量级。At present, the unit area capacitance values of CMOS gate, MOM capacitor and MIM capacitor widely used in logic chips are relatively limited. Among them, the unit area capacitance of MOM capacitor and MIM capacitor is less than CMOS gate capacitance, generally about 1/3 of CMOS capacitance. And CMOS gate capacitance is the capacitance between gate, source, drain and substrate of CMOS device, generally the unit area capacitance value is about 11ff/ um2 , and the capacitance value is obviously affected by voltage. Therefore, and unlike memory chip, the realization process of logic chip limits that it is difficult to integrate high capacitance on-chip capacitor on logic chip. Based on the existing capacitance solution, when large-capacity on-chip capacitor is needed in logic chip design, it is necessary to occupy a large area of logic chip, and the capacitance value that can be actually realized in logic chip design is difficult to exceed the nanofarad order of magnitude.
针对上述问题,本申请实施例提供一种3D逻辑芯片电容电路,解决了逻辑芯片片上电容单位面积电容值有限,片外电容成本高、结构复杂的问题。In view of the above problems, the embodiments of the present application provide a 3D logic chip capacitor circuit, which solves the problem that the capacitance per unit area of the on-chip capacitor of the logic chip is limited, and the off-chip capacitor has high cost and complex structure.
图1为本发明实施例提供的一种逻辑芯片电容电路的示意性结构框图,如图1所示,上述逻辑芯片电容电路100,可以包括:逻辑芯片功能电路110和存储芯片借用电容120。FIG1 is a schematic structural block diagram of a logic chip capacitor circuit provided by an embodiment of the present invention. As shown in FIG1 , the logic chip capacitor circuit 100 may include: a logic chip functional circuit 110 and a storage chip borrowing capacitor 120 .
上述存储芯片借用电容120设置在上述逻辑芯片上,用于为上述逻辑芯片功能电路110的耗电元件提供电荷。The storage chip borrowing capacitor 120 is disposed on the logic chip to provide charges for the power-consuming components of the logic chip functional circuit 110 .
示例性的,上述存储芯片借用电容120可以是存储芯片的片上电容,例如,可以是DRAM中的片上电容。在满足一定条件时,上述DRAM中的片上电容可以被设置在上述逻辑芯片中,作为上述逻辑芯片的电容使用。也就是说,此方案中,上述芯片借用电容120是在上述逻辑芯片和存储芯片满足一定位置及连接条件下时,由上述存储芯片提供给逻辑芯片使用。另外,示例性的,为了实现电容的高利用率,上述芯片借用电容120在上述逻辑芯片和上述存储芯片满足一定位置及连接条件下,也可以为上述存储芯片和逻辑芯片共用。Exemplarily, the memory chip borrowing capacitor 120 may be an on-chip capacitor of the memory chip, for example, an on-chip capacitor in a DRAM. When certain conditions are met, the on-chip capacitor in the DRAM may be set in the logic chip and used as a capacitor of the logic chip. That is to say, in this solution, the chip borrowing capacitor 120 is provided by the memory chip to the logic chip for use when the logic chip and the memory chip meet certain position and connection conditions. In addition, exemplarily, in order to achieve high utilization of the capacitor, the chip borrowing capacitor 120 may also be shared by the memory chip and the logic chip when the logic chip and the memory chip meet certain position and connection conditions.
示例性的,上述存储芯片借用电容120可以靠近上述逻辑芯片功能电路110的耗电元件设置,可以是存储芯片借用电容120的引脚设置在上述逻辑芯片功能电路110的耗电元件周围,也即物理位置上靠近逻辑芯片表面的此功能电路模块或模块中的耗电元件。也可以是元件引脚之间的连接,也即将存储芯片借用电容120的引脚连接进相应的上述逻辑芯片功能电路110的电路中,起到为上述逻辑芯片功能电路110中的耗电元件提供电荷以使上述逻辑芯片功能电路110能够正常工作的作用。Exemplarily, the storage chip borrowing capacitor 120 can be arranged close to the power-consuming element of the logic chip functional circuit 110, and the pins of the storage chip borrowing capacitor 120 can be arranged around the power-consuming element of the logic chip functional circuit 110, that is, the functional circuit module or the power-consuming element in the module is physically close to the surface of the logic chip. It can also be a connection between element pins, that is, the pins of the storage chip borrowing capacitor 120 are connected to the circuit of the corresponding logic chip functional circuit 110, which plays the role of providing charge to the power-consuming element in the logic chip functional circuit 110 so that the logic chip functional circuit 110 can work normally.
另外,需要说明是的,无论是上述物理位置上靠近逻辑芯片表面的此功能电路模块或模块中的耗电元件,还是上述将存储芯片借用电容120的引脚连接进相应的上述逻辑芯片功能电路110的电路中,上述芯片借用电容120是在上述逻辑芯片和存储芯片满足一定位置及连接条件下时,由上述存储芯片提供给逻辑芯片使用。另外,为了提高具有高容值的上述借用电容的利用效率,上述芯片借用电容120在上述逻辑芯片和上述存储芯片满足一定位置及连接条件下,也可以为上述存储芯片和逻辑芯片共用。具体地,上述方案需要满足,上述芯片借用电容120的引脚,同时需连接至上述逻辑芯片和上述存储芯片。In addition, it should be noted that, whether it is the functional circuit module or the power-consuming element in the module that is physically close to the surface of the logic chip, or the pin of the storage chip borrowing capacitor 120 connected to the corresponding circuit of the logic chip functional circuit 110, the chip borrowing capacitor 120 is provided by the storage chip to the logic chip for use when the logic chip and the storage chip meet certain position and connection conditions. In addition, in order to improve the utilization efficiency of the borrowing capacitor with high capacitance, the chip borrowing capacitor 120 can also be shared by the storage chip and the logic chip when the logic chip and the storage chip meet certain position and connection conditions. Specifically, the above scheme needs to meet the requirement that the pin of the chip borrowing capacitor 120 needs to be connected to the logic chip and the storage chip at the same time.
因此,本发明实施例提供的上述逻辑芯片电容电路,包括:逻辑芯片功能电路和存储芯片借用电容,上述存储芯片借用电容设置在上述逻辑芯片上,用于为上述逻辑芯片功能电路的耗电元件提供电荷。由于逻辑芯片使用了存储芯片中的电容,作为借用电容为逻辑芯片自身的耗电元件提供电荷。非常好的解决了,片上电容单位面积电容值有限的问题,同时节省了原件成本并改善了电源信号的响应及其他功能电路的功能实现。另外,由于采用了存储芯片中与逻辑芯片待提供电荷的功能电路对应的片上电容,从而避免为了提高逻辑芯片片上电容容值需外加片外电容而带来的成本高、结构复杂的问题。Therefore, the above-mentioned logic chip capacitor circuit provided by the embodiment of the present invention includes: a logic chip functional circuit and a memory chip borrowing capacitor, and the above-mentioned memory chip borrowing capacitor is arranged on the above-mentioned logic chip, and is used to provide charge for the power-consuming components of the above-mentioned logic chip functional circuit. Since the logic chip uses the capacitor in the memory chip as a borrowing capacitor to provide charge for the power-consuming components of the logic chip itself. The problem of limited capacitance per unit area of on-chip capacitors is solved very well, while saving the cost of original parts and improving the response of power supply signals and the functional realization of other functional circuits. In addition, since the on-chip capacitor corresponding to the functional circuit to be provided with charge in the logic chip is adopted, the problem of high cost and complex structure caused by the need to add external capacitors to increase the capacitance of the on-chip capacitors of the logic chip is avoided.
根据一些实施例,上述存储芯片借用电容为设置有高介电常数介质层的高密度电容。介质在外加电场时会产生感应电荷而削弱电场,原外加电场(真空中)与最终介质中电场比值即为介电常数(permittivity),又称诱电率,与频率相关。介电常数是相对介电常数与真空中绝对介电常数乘积。如果有高介电常数的材料放在电场中,电场的强度会在电介质内有可观的下降。根据物质的介电常数可以判别高分子材料的极性大小。通常,相对介电常数大于3.6的物质为极性物质;相对介电常数在2.8~3.6范围内的物质为弱极性物质;相对介电常数小于2.8为非极性物质。According to some embodiments, the storage chip borrows capacitors that are high-density capacitors provided with a high-dielectric constant dielectric layer. When an external electric field is applied to the dielectric, an induced charge will be generated to weaken the electric field. The ratio of the original external electric field (in a vacuum) to the electric field in the final dielectric is the dielectric constant (permittivity), also known as the permittivity, which is related to the frequency. The dielectric constant is the product of the relative dielectric constant and the absolute dielectric constant in a vacuum. If a material with a high dielectric constant is placed in an electric field, the strength of the electric field will drop significantly in the dielectric. The polarity of a polymer material can be determined based on the dielectric constant of the substance. Generally, substances with a relative dielectric constant greater than 3.6 are polar substances; substances with a relative dielectric constant in the range of 2.8 to 3.6 are weakly polar substances; and substances with a relative dielectric constant less than 2.8 are non-polar substances.
在一些示例中,可以选择介电常数远大于3.6的介质层构造的高密度电容,例如,可以是二氧化锆高密度电容。通过使用高介电常数的介质层实现的高密度电容,单位电容密度可以达到1.8pf/um2。采用上述高密度电容,能够使方案具有单位面积容值高的优点,节省空间并能达到芯片的容值要求。并且,需要说明的是,上述高密度电容可以通过立体折叠技术在存储芯片制造工艺中集成入存储芯片中,目前并不具备实施条件使得在逻辑芯片的制造环节将上述高密度电容集成入逻辑芯片中,并通过逻辑芯片提供给存储芯片使用。In some examples, a high-density capacitor constructed with a dielectric layer having a dielectric constant much greater than 3.6 can be selected, for example, a zirconium dioxide high-density capacitor. The high-density capacitor achieved by using a dielectric layer with a high dielectric constant can achieve a unit capacitance density of 1.8pf/ um2 . The use of the above-mentioned high-density capacitor can enable the solution to have the advantages of high capacitance per unit area, save space and meet the capacitance requirements of the chip. In addition, it should be noted that the above-mentioned high-density capacitor can be integrated into the memory chip in the memory chip manufacturing process through three-dimensional folding technology. At present, there are no implementation conditions to integrate the above-mentioned high-density capacitor into the logic chip in the manufacturing process of the logic chip, and provide it to the memory chip through the logic chip.
需要说明的是,由于存储芯片借用电容提供给逻辑芯片使用,上述存储芯片和逻辑芯片需要满足一定的位置及连接条件下,以保障存储芯片借用电容与逻辑芯片之间不会生成过高的电阻值,也就是说,借用电容和功能电路的连接要求他们之间的电阻很小,基于上述问题,本申请实施例还提供了一下方案:It should be noted that, since the memory chip borrows the capacitor to provide it to the logic chip, the memory chip and the logic chip need to meet certain position and connection conditions to ensure that the memory chip borrows the capacitor and the logic chip does not generate an excessively high resistance value. In other words, the connection between the borrowed capacitor and the functional circuit requires that the resistance between them is very small. Based on the above problem, the embodiment of the present application also provides the following solutions:
示例性的,上述存储芯片借用电容通过3D-IC三维集成电路技术靠近所述逻辑芯片功能电路的耗电元件设置。需要说明的是,3D-IC技术是一种不需要将芯片穿通的技术,即,可以将存储芯片中某金属层的电容的引脚与逻辑芯片中功能电路连接在一起的技术,例如Hyper-bonding技术。通过使用3D-IC技术,能够使得存储芯片借用电容和逻辑芯片功能电路的垂直连接,最大程度减小了存储芯片借用电容和逻辑芯片功能电路之间的电阻值,以使得上述存储芯片的存储芯片借用电容可以直接提供给任何逻辑芯片内部的功能电路使用。Exemplarily, the above-mentioned storage chip borrowing capacitor is set close to the power-consuming components of the functional circuit of the logic chip through 3D-IC three-dimensional integrated circuit technology. It should be noted that 3D-IC technology is a technology that does not require the chip to be punched through, that is, the pins of the capacitor of a certain metal layer in the storage chip can be connected to the functional circuit in the logic chip, such as Hyper-bonding technology. By using 3D-IC technology, the vertical connection between the storage chip borrowing capacitor and the logic chip functional circuit can be achieved, which minimizes the resistance value between the storage chip borrowing capacitor and the logic chip functional circuit, so that the storage chip borrowing capacitor of the above-mentioned storage chip can be directly provided to any functional circuit inside the logic chip for use.
根据一些实施例,上述存储芯片借用电容为一个或两个以上,可以根据存储芯片与逻辑芯片连接够的位置关系和逻辑芯片功能电路的需求,选择选用几个存现芯片中的片上电容作为存储芯片借用电容使用。例如,通过3D-IC工艺技术连接后的存储芯片和逻辑芯片,存储芯片片上电容中与逻辑芯片功能电路位置对应的片上电容有两个,那么可以用上述两个片上电容作为存储芯片借用电容,与上述逻辑芯片功能电路连接,以提供给上述逻辑芯片功能电路使用。或者,虽然通过3D-IC工艺技术连接后的存储芯片和逻辑芯片,存储芯片片上电容中与逻辑芯片功能电路位置对应的片上电容有两个,但是上述逻辑芯片功能电路只需要其中一个片上电容的容值即可满足功能要求,那么可以选择上述两个片上电容中距离上述逻辑芯片功能电路的耗电元件较近的电容作为存储芯片借用电容,与上述逻辑芯片功能电路连接,以提供给上述逻辑芯片功能电路使用。According to some embodiments, the above-mentioned storage chip borrowing capacitor is one or more than two, and according to the positional relationship between the storage chip and the logic chip and the requirements of the logic chip functional circuit, several on-chip capacitors in the storage chip can be selected as the storage chip borrowing capacitors. For example, after the storage chip and the logic chip are connected by 3D-IC process technology, there are two on-chip capacitors in the storage chip on-chip capacitors corresponding to the position of the logic chip functional circuit, then the above-mentioned two on-chip capacitors can be used as storage chip borrowing capacitors, connected to the above-mentioned logic chip functional circuit, to provide the above-mentioned logic chip functional circuit for use. Alternatively, although the storage chip and the logic chip are connected by 3D-IC process technology, there are two on-chip capacitors in the storage chip on-chip capacitors corresponding to the position of the logic chip functional circuit, but the above-mentioned logic chip functional circuit only needs the capacitance of one of the on-chip capacitors to meet the functional requirements, then the capacitor closer to the power-consuming components of the above-mentioned logic chip functional circuit can be selected as the storage chip borrowing capacitor, connected to the above-mentioned logic chip functional circuit, to provide the above-mentioned logic chip functional circuit for use.
下面通过图2至图4在一些具体功能电路场景下,描述本申请实施例的逻辑芯片电容电路。The following describes the logic chip capacitor circuit of the embodiment of the present application in some specific functional circuit scenarios through Figures 2 to 4.
如图2所示,逻辑芯片功能电路unit可以是逻辑芯片中的一个高耗电功能模块,可以通过3D-IC技术将存储芯片上的电容C1和C2分别连接至上述逻辑芯片表面的上述该逻辑芯片功能电路unit附近,以为上述逻辑芯片功能电路unit提供满足要求的电容,进而改善该逻辑芯片功能电路unit电源信号响应,改善电路的瞬时压降。其中,电容C1和C2的引脚在存储芯片中的原连接关系不变,仍然能够为存储芯片提供相应的电容功能。As shown in FIG2 , the logic chip functional circuit unit can be a high power consumption functional module in the logic chip. The capacitors C1 and C2 on the memory chip can be connected to the vicinity of the logic chip functional circuit unit on the surface of the logic chip through 3D-IC technology to provide the logic chip functional circuit unit with a capacitance that meets the requirements, thereby improving the power signal response of the logic chip functional circuit unit and improving the instantaneous voltage drop of the circuit. Among them, the original connection relationship of the pins of the capacitors C1 and C2 in the memory chip remains unchanged, and can still provide the corresponding capacitor function for the memory chip.
在一些示例中,逻辑芯片功能电路可以为线性稳压电路,上述存储芯片借用电容设置在上述线性稳压电路的电压输出端。如图3所示,上述逻辑芯片功能电路为线性稳压电路,目前的线性稳压电路采用CMOS栅极电容提供电容功能,但由于CMOS栅极电容单位面积容值较低,可以通过本实施例提供的存储芯片借用电容替换,以满足上述线性稳压电路的功能。在该线性稳压电路中,当输出电压一侧上的负载电流变化的时候,通过比较输出电压和反馈到运放amplifier的输入端的输出电压,来调整闸极电压vgate,使输出电压保持稳定在输入电压一侧的电平上。其中,Bleeder nmos用来保持该支路的静态电流。该线性稳压电路形成了负反馈的电路环路,负反馈电路稳定的条件是,当增益下降为1(单位增益)的时候,相位移动小于180度,电路环路的稳定性和极点P1(主极点),P2的位置相关,线性稳压电路的设计通常P1位于输出端,这样会在保持环路稳定的同时,可以降低输入电压的纹波,改进系统的电源抑制特性。而通过公式P1=1/(R1×C11),可知当C11越大,P1越小,线性稳压电路稳压效果越好,其中,R1和C11分别为输出电压一侧的小信号电阻和电容,参考图3,通过将存储芯片借用电容C3替换原线性稳压电路中的电容C11,能够提高上述线性稳压电路的稳压效果。In some examples, the logic chip functional circuit may be a linear voltage regulator circuit, and the storage chip borrowing capacitor is set at the voltage output end of the linear voltage regulator circuit. As shown in FIG3 , the logic chip functional circuit is a linear voltage regulator circuit. The current linear voltage regulator circuit uses CMOS gate capacitors to provide capacitance functions. However, since the capacitance per unit area of CMOS gate capacitors is relatively low, the storage chip borrowing capacitor provided in this embodiment can be used to replace it to meet the function of the linear voltage regulator circuit. In the linear voltage regulator circuit, when the load current on one side of the output voltage changes, the gate voltage vgate is adjusted by comparing the output voltage and the output voltage fed back to the input end of the operational amplifier, so that the output voltage remains stable at the level on the input voltage side. Among them, Bleeder nmos is used to maintain the static current of the branch. The linear voltage regulator circuit forms a negative feedback circuit loop. The condition for the stability of the negative feedback circuit is that when the gain drops to 1 (unit gain), the phase shift is less than 180 degrees. The stability of the circuit loop is related to the position of the poles P1 (main pole) and P2. The design of the linear voltage regulator circuit usually places P1 at the output end, which can reduce the ripple of the input voltage while maintaining the stability of the loop and improve the power supply rejection characteristics of the system. According to the formula P1=1/(R1×C11), it can be seen that the larger the C11, the smaller the P1, and the better the voltage stabilization effect of the linear voltage regulator circuit. Among them, R1 and C11 are the small signal resistor and capacitor on the output voltage side, respectively. Referring to FIG3, by replacing the capacitor C11 in the original linear voltage regulator circuit with the capacitor C3 of the storage chip, the voltage stabilization effect of the above-mentioned linear voltage regulator circuit can be improved.
在一些示例中,上述逻辑芯片功能电路可以为电荷泵电路,上述存储芯片借用电容为上述电荷泵电路的自举电容,其中,电荷泵电路中的自举电容能够利用电容两端电压不能突变的特性,与通过cmos构成的开关切换电容端的电平,达到升压的目的。如图4所示,上述逻辑芯片功能电路为电荷泵电路,结构为左右对称,随时钟变化,电荷分别被传入vpp节点和vdd1节点,重复进行,每个时钟周期T里面,有2次电荷传递的过程。可以求出电荷泵电路的输出电流为I=2×C×(2×vdd1-vpp)/T。因此可以看出,如果需要更高的电流输出能力,就需要增加电容值。参考图4,通过将存储芯片借用电容C4和C5替换原线性稳压电路中的自举电容,能够提高上述电荷泵电路的电流输出能力。In some examples, the above-mentioned logic chip functional circuit can be a charge pump circuit, and the above-mentioned storage chip borrowed capacitor is the bootstrap capacitor of the above-mentioned charge pump circuit, wherein the bootstrap capacitor in the charge pump circuit can utilize the characteristic that the voltage across the capacitor cannot change suddenly, and the level of the capacitor end is switched by the switch formed by CMOS to achieve the purpose of boosting. As shown in Figure 4, the above-mentioned logic chip functional circuit is a charge pump circuit, and the structure is bilaterally symmetrical. As the clock changes, the charge is respectively transferred to the vpp node and the vdd1 node, and repeated. In each clock cycle T, there are 2 charge transfer processes. The output current of the charge pump circuit can be calculated as I=2×C×(2×vdd1-vpp)/T. Therefore, it can be seen that if a higher current output capacity is required, the capacitance value needs to be increased. Referring to Figure 4, by replacing the bootstrap capacitor in the original linear voltage regulator circuit with the storage chip borrowed capacitors C4 and C5, the current output capacity of the above-mentioned charge pump circuit can be improved.
根据一些实施例,上述逻辑芯片功能电路可以包括开关电容电路,上述存储芯片借用电容用于上述开关电容电路。示例性的,上述开关电容电路可以是开关电容滤波电路或开关电容模数转换电路,在此不做限定。均可以采用上述存储芯片借用电容作为上述开关电容电路的电容使用,来满足电路功能要求。According to some embodiments, the logic chip functional circuit may include a switched capacitor circuit, and the memory chip borrowed capacitor is used in the switched capacitor circuit. Exemplarily, the switched capacitor circuit may be a switched capacitor filter circuit or a switched capacitor analog-to-digital conversion circuit, which is not limited here. The memory chip borrowed capacitor may be used as the capacitor of the switched capacitor circuit to meet the circuit function requirements.
需要说明的是,上述逻辑芯片功能电路,只是作为具体的功能电路示例以便说明本发明实施例的逻辑芯片提供电荷。逻辑芯片中需要电容功能的其他的功能电路一样可以通过上述逻辑芯片电容电路来改善电路及芯片的功能,在此不做限定。It should be noted that the above logic chip functional circuit is only used as a specific functional circuit example to illustrate that the logic chip of the embodiment of the present invention provides charge. Other functional circuits in the logic chip that require capacitor functions can also improve the functions of the circuit and chip through the above logic chip capacitor circuit, which is not limited here.
上文中结合图1至图4,详细描述了根据本发明实施例的逻辑芯片电容电路,下面将结合图5详细描述根据本发明实施例的逻辑芯片。The logic chip capacitor circuit according to the embodiment of the present invention is described in detail above in conjunction with FIG. 1 to FIG. 4 . The logic chip according to the embodiment of the present invention will be described in detail below in conjunction with FIG. 5 .
图5为本发明实施例提供的一种逻辑芯片的示意性结构框图。如图5所示,逻辑芯片500,可以包括:FIG5 is a schematic structural block diagram of a logic chip provided by an embodiment of the present invention. As shown in FIG5 , a logic chip 500 may include:
上述的逻辑芯片电容电路510。The above-mentioned logic chip capacitor circuit 510.
上述存储芯片借用电容可以靠近上述逻辑芯片功能电路的耗电元件设置,用于为上述耗电元件提供电荷,其中,上述存储芯片借用电容还用于为存储芯片提供电荷。The storage chip borrowing capacitor may be arranged close to the power-consuming components of the logic chip functional circuit to provide charge to the power-consuming components, wherein the storage chip borrowing capacitor is also used to provide charge to the storage chip.
在一些示例中,上述存储芯片借用电容可以是存储芯片的片上电容。在满足一定条件时,上述存储芯片中的片上电容可以借用给上述逻辑芯片,作为上述逻辑芯片的电容使用。也就是说,此方案中,上述芯片借用电容是在上述逻辑芯片和存储芯片满足一定位置及连接条件下时,由上述存储芯片提供给上述逻辑芯片使用的,当然,在一些示例中,上述存储芯片自身也可以使用其上的借用电容,即,上述借用电容由上述存储芯片和上述逻辑芯片共同使用。In some examples, the borrowed capacitor of the memory chip may be an on-chip capacitor of the memory chip. When certain conditions are met, the on-chip capacitor in the memory chip may be borrowed to the logic chip and used as the capacitor of the logic chip. That is to say, in this scheme, the borrowed capacitor of the chip is provided by the memory chip to the logic chip for use when the logic chip and the memory chip meet certain position and connection conditions. Of course, in some examples, the memory chip itself may also use the borrowed capacitor thereon, that is, the borrowed capacitor is used by the memory chip and the logic chip.
在一些示例中,上述存储芯片借用电容可以靠近上述逻辑芯片功能电路的耗电元件设置,可以是存储芯片借用电容的引脚设置在上述逻辑芯片功能电路的耗电元件周围,也即物理位置上靠近逻辑芯片表面的此功能电路模块或模块中的耗电元件。也可以是元件引脚之间的连接,也即将存储芯片借用电容的引脚连接进相应的上述逻辑芯片功能电路的电路中,起到为上述逻辑芯片功能电路中的耗电元件提供电荷以使上述逻辑芯片功能电路能够正常工作的作用。In some examples, the storage chip borrowing capacitor can be arranged close to the power-consuming element of the logic chip functional circuit, and the pins of the storage chip borrowing capacitor can be arranged around the power-consuming element of the logic chip functional circuit, that is, the functional circuit module or the power-consuming element in the module is physically close to the surface of the logic chip. It can also be a connection between the pins of the element, that is, the pins of the storage chip borrowing capacitor are connected to the circuit of the corresponding logic chip functional circuit, which plays the role of providing charge to the power-consuming element in the logic chip functional circuit so that the logic chip functional circuit can work normally.
相应的,本发明实施例提供的上述逻辑芯片,由于包括上述逻辑芯片电容电路,而上述逻辑芯片电容电路又包括:逻辑芯片功能电路和存储芯片借用电容,上述存储芯片借用电容设置在所述逻辑芯片上,用于为上述逻辑芯片功能电路的耗电元件提供电荷。由于逻辑芯片使用了存储芯片中的电容,作为借用电容为逻辑芯片自身的耗电元件提供电荷。非常好的解决了,片上电容单位面积电容值有限的问题,同时节省了原件成本并改善了电源信号的响应及其他功能电路的功能实现。另外,由于采用了存储芯片中与逻辑芯片待提供电荷的功能电路对应的片上电容,从而避免为了提高逻辑芯片片上电容容值需外加片外电容而带来的成本高、结构复杂的问题。Accordingly, the above-mentioned logic chip provided by the embodiment of the present invention includes the above-mentioned logic chip capacitor circuit, and the above-mentioned logic chip capacitor circuit includes: a logic chip functional circuit and a storage chip borrowing capacitor, and the above-mentioned storage chip borrowing capacitor is arranged on the logic chip to provide charge for the power-consuming components of the above-mentioned logic chip functional circuit. Since the logic chip uses the capacitor in the storage chip as a borrowing capacitor to provide charge for the power-consuming components of the logic chip itself. The problem of limited capacitance per unit area of on-chip capacitors is solved very well, while saving the cost of original parts and improving the response of power supply signals and the functional realization of other functional circuits. In addition, since the on-chip capacitor corresponding to the functional circuit to be provided with charge in the logic chip is used in the storage chip, the problem of high cost and complex structure caused by the need to add external capacitors to increase the capacitance of the on-chip capacitor of the logic chip is avoided.
根据一些实施例,如图6所示,本申请实施例还提供一种电子设备700,可以包括:According to some embodiments, as shown in FIG6 , the present application embodiment further provides an electronic device 700, which may include:
上述的逻辑芯片710和设置有上述存储芯片借用电容的存储芯片720,上述逻辑芯片710与上述存储芯片720相连接。The logic chip 710 and the memory chip 720 provided with the memory chip borrowing capacitor are connected to each other.
相应的,本发明实施例提供的上述电子设备,由于包括上述逻辑芯片,而上述逻辑芯片的电容电路又包括:逻辑芯片功能电路和存储芯片借用电容,上述存储芯片借用电容设置在上述逻辑芯片上,用于为上述逻辑芯片功能电路的耗电元件提供电荷。由于逻辑芯片使用了存储芯片中的电容,作为借用电容为逻辑芯片自身的耗电元件提供电荷。非常好的解决了,片上电容单位面积电容值有限的问题,同时节省了原件成本并改善了电源信号的响应及其他功能电路的功能实现。另外,由于采用了存储芯片中与逻辑芯片待提供电荷的功能电路对应的片上电容,从而避免为了提高逻辑芯片片上电容容值需外加片外电容而带来的成本高、结构复杂的问题。Accordingly, the electronic device provided by the embodiment of the present invention includes the above-mentioned logic chip, and the capacitor circuit of the above-mentioned logic chip includes: a logic chip functional circuit and a storage chip borrowing capacitor, and the above-mentioned storage chip borrowing capacitor is arranged on the above-mentioned logic chip, and is used to provide charge for the power-consuming components of the above-mentioned logic chip functional circuit. Since the logic chip uses the capacitor in the memory chip as a borrowing capacitor to provide charge for the power-consuming components of the logic chip itself. The problem of limited capacitance per unit area of on-chip capacitors is solved very well, while saving the cost of components and improving the response of power supply signals and the functional realization of other functional circuits. In addition, since the on-chip capacitor corresponding to the functional circuit to be provided with charge in the logic chip is used, the problem of high cost and complex structure caused by the need to add external capacitors to increase the capacitance of the on-chip capacitors of the logic chip is avoided.
根据一些实施例,如图7所示,本申请实施例还提供一种电子设备,可以包括逻辑芯片610和存储芯片620。According to some embodiments, as shown in FIG. 7 , an embodiment of the present application further provides an electronic device, which may include a logic chip 610 and a memory chip 620 .
上述逻辑芯片610和上述存储芯片620可以通过3D-IC三维集成电路技术相连接,其中,为上述耗电元件提供电荷的存储芯片借用电容设置在上述逻辑芯片与上述耗电元件的对应位置。The logic chip 610 and the memory chip 620 may be connected via 3D-IC three-dimensional integrated circuit technology, wherein a memory chip borrowing capacitor for providing charge to the power-consuming element is disposed at corresponding positions of the logic chip and the power-consuming element.
通过使用3D-IC工艺技术,能够使得存储芯片借用电容和逻辑芯片功能电路的垂直连接,最大程度减小了存储芯片借用电容和逻辑芯片功能电路之间的电阻值,以使得上述存储芯片的存储芯片借用电容可以直接提供给任何逻辑芯片内部的功能电路使用。By using 3D-IC process technology, the memory chip borrowing capacitor and the logic chip functional circuit can be vertically connected, minimizing the resistance value between the memory chip borrowing capacitor and the logic chip functional circuit, so that the memory chip borrowing capacitor of the above-mentioned memory chip can be directly provided to any functional circuit inside the logic chip.
上述存储芯片借用电容可以靠近上述逻辑芯片功能电路的耗电元件设置,用于为上述耗电元件提供电荷,其中,上述存储芯片借用电容还用于为存储芯片提供电荷。The storage chip borrowing capacitor may be arranged close to the power-consuming components of the logic chip functional circuit to provide charge to the power-consuming components, wherein the storage chip borrowing capacitor is also used to provide charge to the storage chip.
在一些示例中,上述存储芯片借用电容可以是存储芯片的片上电容,例如,可以是存储芯片中的片上电容。在满足一定条件时,上述存储芯片中的片上电容可以被设置在上述逻辑芯片中,作为上述逻辑芯片的电容使用。也就是说,此方案中,上述芯片借用电容是在上述逻辑芯片和上述存储芯片满足一定位置及连接条件下,由上述存储芯片提供给逻辑芯片使用。另外,为了实现电容的利用效率,上述芯片借用电容是在上述逻辑芯片和上述存储芯片满足一定位置及连接条件下,也可以为上述存储芯片和逻辑芯片共用。In some examples, the above-mentioned storage chip borrowing capacitor can be an on-chip capacitor of the storage chip, for example, it can be an on-chip capacitor in the storage chip. When certain conditions are met, the on-chip capacitor in the above-mentioned storage chip can be set in the above-mentioned logic chip and used as the capacitor of the above-mentioned logic chip. That is to say, in this scheme, the above-mentioned chip borrowing capacitor is provided by the above-mentioned storage chip to the logic chip for use when the above-mentioned logic chip and the above-mentioned storage chip meet certain position and connection conditions. In addition, in order to achieve the utilization efficiency of the capacitor, the above-mentioned chip borrowing capacitor is when the above-mentioned logic chip and the above-mentioned storage chip meet certain position and connection conditions, and can also be shared by the above-mentioned storage chip and the logic chip.
在一些示例中,上述存储芯片借用电容可以靠近上述逻辑芯片功能电路的耗电元件设置,可以是存储芯片借用电容的引脚设置在上述逻辑芯片功能电路的耗电元件周围,也即物理位置上靠近逻辑芯片表面的此功能电路模块或模块中的耗电元件。也可以是元件引脚之间的连接,也即将存储芯片借用电容的引脚连接进相应的上述逻辑芯片功能电路的电路中,起到为上述逻辑芯片功能电路中的耗电元件提供电荷,以使上述逻辑芯片功能电路能够正常工作的作用。In some examples, the storage chip borrowing capacitor can be arranged close to the power-consuming element of the logic chip functional circuit, and the pins of the storage chip borrowing capacitor can be arranged around the power-consuming element of the logic chip functional circuit, that is, the functional circuit module or the power-consuming element in the module is physically close to the surface of the logic chip. It can also be a connection between the pins of the element, that is, the pins of the storage chip borrowing capacitor are connected to the circuit of the corresponding logic chip functional circuit, which plays the role of providing charge for the power-consuming element in the logic chip functional circuit so that the logic chip functional circuit can work normally.
另外,需要说明是的,无论是上述物理位置上靠近逻辑芯片表面的此功能电路模块或模块中的耗电元件,还是上述将存储芯片借用电容的引脚连接进相应的上述逻辑芯片功能电路的电路中,上述芯片借用电容是在上述逻辑芯片和存储芯片满足一定位置及连接条件下时,由上述存储芯片借用给上述逻辑芯片使用。另外,为了实现电容的利用效率,上述芯片借用电容是在上述逻辑芯片Logicarea和上述存储芯片Memoryarea满足一定位置及连接条件下,也可以为上述存储芯片和逻辑芯片共用。具体地,上述方案需要满足,上述芯片借用电容的引脚,同时需连接至上述逻辑芯片和上述存储芯片。In addition, it should be noted that, whether it is the functional circuit module or the power-consuming element in the module that is physically close to the surface of the logic chip, or the pin of the memory chip borrowing capacitor is connected to the circuit of the corresponding logic chip functional circuit, the chip borrowing capacitor is borrowed by the memory chip to the logic chip when the logic chip and the memory chip meet certain position and connection conditions. In addition, in order to achieve the utilization efficiency of the capacitor, the chip borrowing capacitor is shared by the memory chip and the logic chip when the logic chip Logicarea and the memory chip Memoryarea meet certain position and connection conditions. Specifically, the above scheme needs to meet the requirement that the pin of the chip borrowing capacitor needs to be connected to the logic chip and the memory chip at the same time.
在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接或彼此可通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
尽管本发明的实施方案已公开如上,但其并不仅仅限于说明书和实施方式中所列运用,它完全可以被适用于各种适合本发明的领域,对于熟悉本领域的人员而言,可容易地实现另外的修改,因此在不背离权利要求及等同范围所限定的一般概念下,本发明并不限于特定的细节与这里示出与描述的图例。Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and implementation modes. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.
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