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CN112433447B - Automatic material conveying system and method for exposure machine - Google Patents

Automatic material conveying system and method for exposure machine Download PDF

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Publication number
CN112433447B
CN112433447B CN202011143590.5A CN202011143590A CN112433447B CN 112433447 B CN112433447 B CN 112433447B CN 202011143590 A CN202011143590 A CN 202011143590A CN 112433447 B CN112433447 B CN 112433447B
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exposed
exposure machine
feeding
tray
exposure
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CN112433447A (en
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周超
陈国军
吴景舟
马迪
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Disheng Wuhan Microelectronics Technology Co ltd
Dishengwei (Jiangsu) Equipment Technology Co.,Ltd.
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Jiangsu Desheng Intelligent Technology Co ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08Control devices operated by article or material being fed, conveyed or discharged
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

本发明揭示了一种曝光机自动输料系统及方法,所述系统与曝光机相连,其包括料架及设置于料架上的料盘和输料口,料盘上承载且限位有至少一个被曝光物体,料盘带动被曝光物体在料架上沿运料方向移动,且自输料口沿与运料方向相垂直的输料方向将被曝光物体输送给曝光机或者接收经曝光机曝光后的被曝光物体,被曝光物体在料盘上的放置方向与运料方向和输料方向均垂直。本发明实现了曝光机上下料过程的全自动化,自动化程度高,生产效率高,且减少了生产时的人力成本。

Figure 202011143590

The invention discloses an automatic feeding system and method for an exposure machine. The system is connected with the exposure machine and comprises a material rack, a material tray and a material feeding port arranged on the material rack. The material tray is carried and limited by at least For an object to be exposed, the material tray drives the object to be exposed on the material rack to move along the conveying direction, and the exposed object is conveyed to the exposure machine or received by the exposure machine from the conveying port along the conveying direction perpendicular to the conveying direction. For the exposed object after exposure, the placement direction of the exposed object on the material tray is perpendicular to both the conveying direction and the conveying direction. The invention realizes full automation of the loading and unloading process of the exposure machine, has a high degree of automation, high production efficiency, and reduces labor costs during production.

Figure 202011143590

Description

一种曝光机自动输料系统及方法A system and method for automatic feeding of exposure machine

技术领域technical field

本发明涉及一种曝光机的上下料技术,尤其是涉及一种曝光机自动输料系统及方法。The invention relates to a material loading and unloading technology of an exposure machine, in particular to an automatic material feeding system and method of the exposure machine.

背景技术Background technique

现有曝光机的上下料流程,基本是通过人工手动操作分别进行上料、下料的,自动化程度低,生产效率低,且人工操作容易出现差错,可靠性低。另外,企业需要雇佣员工,因此人力成本高,且因员工流动性高而导致的企业人员的不稳定以及企业招工困难等现象,都会影响曝光机的生产效率。The loading and unloading process of the existing exposure machine is basically carried out by manual manual operation for loading and unloading, which has a low degree of automation, low production efficiency, and manual operation is prone to errors and low reliability. In addition, enterprises need to hire employees, so the labor cost is high, and the instability of enterprise personnel and the difficulty of recruiting employees caused by high employee mobility will affect the production efficiency of exposure machines.

鉴于上述现有曝光机的上下料存在的自动化程度低、生产效率低、人力成本高等缺陷,所以有必要对此进行改进。In view of the defects of low automation, low production efficiency, and high labor cost in the above-mentioned existing exposure machines for loading and unloading, it is necessary to improve this.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于克服现有技术的缺陷,提供一种曝光机自动输料系统及方法。The purpose of the present invention is to overcome the defects of the prior art, and to provide an automatic feeding system and method for an exposure machine.

为实现上述目的,本发明提出如下技术方案:一种曝光机自动输料系统,其与曝光机相连,所述系统包括料架及设置于所述料架上的料盘和输料口,所述料盘上承载且限位有至少一个被曝光物体,所述料盘带动被曝光物体在料架上沿运料方向移动,且自所述输料口沿与运料方向相垂直的输料方向将被曝光物体输送给曝光机或者接收经曝光机曝光后的被曝光物体,所述被曝光物体在料盘上的放置方向与所述运料方向和输料方向均垂直。In order to achieve the above purpose, the present invention proposes the following technical scheme: an automatic feeding system for an exposure machine, which is connected to the exposure machine, and the system includes a material rack, a material tray and a material feeding port arranged on the material rack, so At least one object to be exposed is carried and limited on the material tray. The material tray drives the exposed object to move on the material rack along the material conveying direction, and the material is conveyed from the material conveying port in a direction perpendicular to the material conveying direction. The direction conveys the object to be exposed to the exposure machine or receives the object to be exposed after being exposed by the exposure machine, and the placement direction of the object to be exposed on the tray is perpendicular to both the conveying direction and the conveying direction.

优选地,所述料盘包括底盘和侧盘,所述被曝光物体限位于所述底盘和侧盘之间。Preferably, the feeding tray includes a bottom tray and a side tray, and the object to be exposed is confined between the bottom tray and the side tray.

优选地,所述底盘和侧盘上均对应设置有料槽,所述底盘上的料槽沿输料方向延伸设置,所述被曝光物体限位于所述料槽内。Preferably, the bottom plate and the side plate are provided with material troughs correspondingly, the material troughs on the bottom plate are extended along the feeding direction, and the exposed objects are limited to the material troughs.

优选地,所述底盘设置于所述料架上,所述侧盘的一端与底盘靠近输料口的一端相固定连接。Preferably, the bottom plate is arranged on the material rack, and one end of the side plate is fixedly connected to the end of the bottom plate close to the feeding port.

优选地,所述侧盘向靠近底盘的方向倾斜设置。Preferably, the side plates are inclined in a direction close to the chassis.

优选地,所述系统还包括第一驱动件和用于驱动被曝光物体沿输料方向移动的第二驱动件,所述第一驱动件与料盘相连,驱动料盘在料架上沿运料方向移动。Preferably, the system further comprises a first driving member and a second driving member for driving the exposed object to move along the conveying direction, the first driving member is connected with the material tray, and drives the material tray along the transporting direction on the material rack. moving in the direction of the material.

优选地,所述系统还包括导轨,所述导轨在料架上沿运料方向延伸设置,所述料盘滑动设置于所述导轨上。Preferably, the system further comprises a guide rail, the guide rail is extended on the material rack along the material transporting direction, and the material tray is slidably arranged on the guide rail.

优选地,所述料槽为U型导槽。Preferably, the material trough is a U-shaped guide trough.

本发明还揭示了另外一种技术方案:一种曝光机自动输料方法,包括:料盘带动被曝光物体在料架上沿运料方向移动到输料口,自所述输料口沿与运料方向相垂直的输料方向将被曝光物体输送给曝光机。The invention also discloses another technical solution: an automatic material conveying method for an exposure machine, comprising: a material tray drives an object to be exposed on a material rack to move along the material conveying direction to a material conveying port, and from the conveying port along the The conveying direction perpendicular to the conveying direction conveys the exposed objects to the exposure machine.

本发明还揭示了另外一种技术方案:一种曝光机自动输料方法,包括:经曝光机曝光后的被曝光物体自料架上的输料口沿输料方向输送给料盘,料盘带动被曝光物体在料架上沿与输料方向相垂直的运料方向下料。The invention also discloses another technical solution: an automatic feeding method for an exposure machine, comprising: the exposed objects exposed by the exposure machine are transported from a feeding port on a feeding rack to a feeding tray along the feeding direction, and the feeding tray Drive the exposed objects to unload on the rack along the conveying direction perpendicular to the conveying direction.

本发明的有益效果是:The beneficial effects of the present invention are:

1、本发明可以实现曝光机上下料过程的全自动化,自动化程度高,生产效率高,且减少了生产时的人力成本,方便对接工厂流水线。1. The present invention can realize the full automation of the loading and unloading process of the exposure machine, has a high degree of automation, high production efficiency, and reduces the labor cost during production, which is convenient for docking with the factory assembly line.

2、本发明将被曝光物体的上料方向和下料方向设置为与其被曝光面的方向相垂直的方向,使得曝光机中的网版竖直设置,减少了网版占据的空间,且与输料系统配合,使得整个自动化的曝光流水线占据的空间都减少了。2. In the present invention, the feeding direction and the feeding direction of the exposed object are set to the direction perpendicular to the direction of the exposed surface, so that the screen plate in the exposure machine is set vertically, which reduces the space occupied by the screen plate, and is consistent with the direction of the exposed surface. The coordination of the feeding system reduces the space occupied by the entire automated exposure line.

3、本发明将被曝光物体限位于料盘中,可以防止被曝光物体在输料过程中发生倾倒、侧翻等现象,确保被曝光物体在运送和输料时均保持竖直。3. The present invention limits the object to be exposed in the material tray, which can prevent the object to be exposed from tipping, rollover and other phenomena during the conveying process, and ensure that the object to be exposed remains vertical during conveying and conveying.

附图说明Description of drawings

图1是本发明实施例曝光机自动上下料系统的原理框图示意图;Fig. 1 is the principle block diagram schematic diagram of the automatic loading and unloading system of the exposure machine according to the embodiment of the present invention;

图2是本发明实施例曝光机自动上下料系统的结构示意图;2 is a schematic structural diagram of an automatic loading and unloading system of an exposure machine according to an embodiment of the present invention;

图3是本发明上料机的立体结构示意图;Fig. 3 is the three-dimensional structure schematic diagram of the feeder of the present invention;

图4是本发明上料机的上料流程示意图;Fig. 4 is the schematic diagram of the feeding process of the feeding machine of the present invention;

图5是本发明曝光机的结构示意图;Fig. 5 is the structural representation of the exposure machine of the present invention;

图6是本发明曝光机的立体结构示意图;Fig. 6 is the three-dimensional structure schematic diagram of the exposure machine of the present invention;

图7是本发明曝光机的曝光流程示意图;Fig. 7 is the exposure flow schematic diagram of the exposure machine of the present invention;

图8是本发明下料机的立体结构示意图;Fig. 8 is the three-dimensional structure schematic diagram of the blanking machine of the present invention;

图9是本发明下料机的下料流程示意图;Fig. 9 is the blanking flow schematic diagram of blanking machine of the present invention;

图10是本发明实施例曝光机自动上下料方法的流程示意图。FIG. 10 is a schematic flowchart of an automatic loading and unloading method of an exposure machine according to an embodiment of the present invention.

附图标记:Reference number:

10、上料机,11、上料架,12、上料盘,121、第一底盘,1211、第一导槽,122、第一侧盘,1221、第一卡槽,13、第一驱动件,14、第一导轨,15、第一上料口,20、曝光机,21、预上料区,22、曝光区,23、下料区,24、梁架,25、曝光光源,26、固定夹板,27、移动夹板,30、下料机,31、下料架,32、下料盘,321、第二底盘,3211、第二导槽,322、第二侧盘,3221、第二卡槽,33、第三驱动件,34、第二导轨,35、第一下料口,a/c、运料方向,b/d、输料方向,40、曝光物体,41、曝光面。10. Feeder, 11, Feeding rack, 12, Feeding tray, 121, First chassis, 1211, First guide groove, 122, First side plate, 1221, First card slot, 13, First drive Pieces, 14, First guide rail, 15, First feeding port, 20, Exposure machine, 21, Pre-loading area, 22, Exposure area, 23, Unloading area, 24, Beam frame, 25, Exposure light source, 26 , Fixed splint, 27, Moving splint, 30, Unloader, 31, Unloading rack, 32, Unloading tray, 321, Second chassis, 3211, Second guide groove, 322, Second side plate, 3221, No. Two card slots, 33, Third drive member, 34, Second guide rail, 35, First discharge port, a/c, material conveying direction, b/d, material conveying direction, 40, exposure object, 41, exposure surface .

具体实施方式Detailed ways

下面将结合本发明的附图,对本发明实施例的技术方案进行清楚、完整的描述。The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention.

本发明所揭示的一种曝光机自动输料系统及方法,实现了曝光机上下料过程的全自动化,自动化程度高,生产效率高,且减少了生产时的人力成本。实施时,本发明的曝光机自动输料系统可以是与曝光机配合的上料机,也可以是与曝光机配合的下料机,上料机和下料机的结构相同。The automatic material feeding system and method of the exposure machine disclosed by the invention realizes the full automation of the unloading and unloading process of the exposure machine, has a high degree of automation, high production efficiency, and reduces the labor cost during production. When implemented, the automatic feeding system of the exposure machine of the present invention may be a feeding machine matched with the exposure machine, or a feeding machine matched with the exposure machine, and the structures of the feeding machine and the feeding machine are the same.

结合图1和图2所示,本发明实施例所揭示的一种曝光机自动上下料系统,包括上料机10、曝光机20、下料机30和上下料控制装置,上料机10、曝光机20和下料机30均与上下料控制装置相连,在上下料控制装置的控制下,配合完成曝光机20的上料、曝光和下料全过程。1 and 2, an automatic loading and unloading system for an exposure machine disclosed in an embodiment of the present invention includes a loading machine 10, an exposure machine 20, a loading machine 30 and a loading and unloading control device, the loading machine 10, The exposure machine 20 and the unloading machine 30 are both connected to the loading and unloading control device, and under the control of the loading and unloading control device, the whole process of loading, exposing and unloading of the exposure machine 20 is completed.

结合图3和图4所示,上料机10具体包括上料架11、上料盘12、第一导轨14、第一上料口15、第一驱动件13和第二驱动件(图未示),其中,第一导轨14在上料架11上沿运料方向a延伸设置,用于提供上料盘12沿运料方向a上料的导向作用,上料架11上可以设置一根或多根第一导轨14,本实施例中,上料架11上设置了多根第一导轨14。上料盘12滑动设置于第一导轨14上,可沿第一导轨14来回滑动,用于容纳待上料的被曝光物体40(如网版),并将被曝光物体40移送到第一上料口15(即上料机10上的输料口)。第一驱动件13与上料盘12相连,用于驱动上料盘12沿第一导轨14滑动,实施时,第一驱动件13可采用驱动电机。第一上料口15设置于上料架11的一侧端上,该侧端所在方向与运料方向a相同。上料盘12在第一驱动件13的驱动下,带动其上的被曝光物体40沿第一导轨14移动到第一上料口15处,且被曝光物体40在第二驱动件的驱动下自第一上料口15沿与运料方向a相垂直的输料方向b输送给曝光机20。第一驱动件13和第二驱动件分别驱动被曝光物体40在运料方向a和输料方向b上的运动,实施时,第二驱动件也可以采用驱动电机。3 and 4, the feeding machine 10 specifically includes a feeding rack 11, a feeding tray 12, a first guide rail 14, a first feeding port 15, a first driving member 13 and a second driving member (not shown in the figure). shown), wherein, the first guide rail 14 is extended along the conveying direction a on the feeding rack 11 to provide the guiding function of the feeding tray 12 for feeding material along the conveying direction a. The feeding rack 11 can be provided with a Or a plurality of first guide rails 14 , in this embodiment, a plurality of first guide rails 14 are arranged on the feeding rack 11 . The feeding tray 12 is slidably arranged on the first guide rail 14 and can slide back and forth along the first guide rail 14 for accommodating the exposed object 40 (such as a screen plate) to be loaded, and moving the exposed object 40 to the first upper Material port 15 (ie, the material feeding port on the feeding machine 10). The first driving member 13 is connected to the feeding tray 12 and is used to drive the feeding tray 12 to slide along the first guide rail 14 . During implementation, the first driving member 13 may use a driving motor. The first feeding port 15 is arranged on one side end of the feeding rack 11, and the direction of the side end is the same as the material conveying direction a. Driven by the first drive member 13, the loading tray 12 drives the exposed object 40 on it to move along the first guide rail 14 to the first loading port 15, and the exposed object 40 is driven by the second drive member. It is conveyed to the exposure machine 20 from the first feeding port 15 along the conveying direction b perpendicular to the conveying direction a. The first driving member 13 and the second driving member respectively drive the movement of the exposed object 40 in the material conveying direction a and the material conveying direction b. During implementation, the second driving member may also use a driving motor.

本实施例中,上料盘12具体包括第一底盘121和第一侧盘122,其中,第一底盘121滑动位于第一导轨14上,第一底盘121上设置多个第一导槽1211(即第一底盘121上的料槽),多个第一导槽1211在上料架11上沿运料方向a延伸,且每个第一导槽1211沿输料方向b延伸。第一侧盘122的一端与第一底盘121靠近第一上料口15的一端相固定连接,且第一侧盘122向靠近第一底盘121的方向倾斜设置,第一侧盘122上设置多个与第一导槽1211一一对应的第一卡槽1221(即第一侧盘122上的料槽),每个被曝光物体40的底端和与底端相邻的一侧端分别卡置于第一导槽1211和对应的第一卡槽1221内。In this embodiment, the feeding tray 12 specifically includes a first chassis 121 and a first side plate 122, wherein the first chassis 121 slides on the first guide rail 14, and a plurality of first guide grooves 1211 ( That is, the material trough on the first chassis 121 ), a plurality of first guide grooves 1211 extend along the material conveying direction a on the loading rack 11 , and each first guide groove 1211 extends along the material conveying direction b. One end of the first side plate 122 is fixedly connected with the end of the first base plate 121 close to the first feeding port 15 , and the first side plate 122 is inclined in the direction close to the first base plate 121 , and many There are two first locking grooves 1221 corresponding to the first guiding grooves 1211 one-to-one (ie, the feeding grooves on the first side plate 122), and the bottom end of each exposed object 40 and the side end adjacent to the bottom end are respectively locked It is placed in the first guide groove 1211 and the corresponding first card groove 1221 .

本实施例中,第一底盘121上设置了10个第一导槽1211,第一导槽1211为U型导槽,第一侧盘122上对应设置了10个第一卡槽1221,也就是说,每个上料盘12一次最多可以上料10个被曝光物体40。被曝光物体40在料槽内的放置方向与运料方向a和输料方向b均垂直,即每个被曝光物体40竖直设置于上料架11上,上料盘12上的多个被曝光物体40沿运料方向a分布。多个料槽中,有的料槽可以放置被曝光物体40,有的可不放置被曝光物体40,即可以是空的。本发明的上料盘12上第一侧盘122的设置可以防止被曝光物体40在输送过程中发生倾倒或侧翻等问题,确保被曝光物体40在运送和上料时能够保持竖直。在其他实施例中,第一底盘121和第一侧盘122的连接结构不限于这里所限定的,只要能将被曝光物体40限位于第一底盘121和第一侧盘122之间即可。In this embodiment, ten first guide grooves 1211 are set on the first chassis 121 , the first guide grooves 1211 are U-shaped guide grooves, and ten first card grooves 1221 are correspondingly set on the first side plate 122 , that is, That is to say, each feeding tray 12 can feed up to 10 exposed objects 40 at a time. The placement direction of the objects to be exposed 40 in the trough is perpendicular to both the conveying direction a and the conveying direction b, that is, each object to be exposed 40 is vertically arranged on the feeding rack 11, and a plurality of objects on the feeding tray 12 are placed vertically. The exposure objects 40 are distributed along the conveying direction a. Among the multiple troughs, some of the troughs can be placed with the object to be exposed 40, and some of the troughs may not be placed with the object to be exposed 40, that is, they can be empty. The arrangement of the first side plate 122 on the feeding tray 12 of the present invention can prevent the object to be exposed 40 from tipping or rollover during transportation, and ensure that the object to be exposed 40 can remain vertical during transportation and feeding. In other embodiments, the connection structure of the first chassis 121 and the first side plate 122 is not limited to the one here, as long as the object to be exposed 40 can be confined between the first chassis 121 and the first side plate 122 .

上料机10上还包括上料传感器(图未示),用于检测料槽内是否有被曝光物体40。The feeding machine 10 also includes a feeding sensor (not shown) for detecting whether there is an exposed object 40 in the feeding trough.

结合图4所示,上料机10的工作原理具体为:将被曝光物体40放入上料盘12的料槽中,按动启动按钮,上料传感器判断上料盘12上的第一导槽1211有无被曝光物体40,若有,则将有被曝光物体40的第一导槽1211移动到第一上料口15处,等待上料,之后将第一导槽1211内的被曝光物体40经第一上料口15沿输料方向b输送给曝光机20;之后上料盘12沿运料方向a移动到下一个第一导槽1211,并重复上述步骤,直至上料盘12上所有有被曝光物体40的第一导槽1211全部上料结束后,上料盘12回到初始位置,等待被曝光物体40重新装入。As shown in FIG. 4 , the working principle of the feeding machine 10 is as follows: put the exposed object 40 into the feeding trough of the feeding tray 12 , press the start button, and the feeding sensor determines the first guide on the feeding tray 12 . Whether the groove 1211 has the object to be exposed 40, if so, move the first guide groove 1211 with the object to be exposed 40 to the first feeding port 15, wait for the material to be loaded, and then expose the exposed object 40 in the first guide groove 1211. The object 40 is conveyed to the exposure machine 20 through the first feeding port 15 along the feeding direction b; then the feeding tray 12 is moved to the next first guide groove 1211 along the feeding direction a, and the above steps are repeated until the feeding tray 12 After all the first guide grooves 1211 with the objects to be exposed 40 are fully loaded, the loading tray 12 returns to the initial position and waits for the objects to be exposed 40 to be reloaded.

结合图2、图5和图6所示,曝光机20具体包括预上料区21、曝光区22和下料区23,其中,预上料区21、曝光区22和下料区23在曝光机20上沿与输料方向b相同的方向依次分布,且曝光机20靠近预上料区21的一侧设置有第二上料口(图未示),第二上料口与上料机10的第一上料口15对接;曝光机20靠近下料区23的一侧设置有第二下料口(图未示),第二下料口与下料机30的第一下料口对接。2, 5 and 6, the exposure machine 20 specifically includes a pre-loading area 21, an exposure area 22 and a blanking area 23, wherein the pre-loading area 21, the exposure area 22 and the blanking area 23 are exposed to The top of the machine 20 is sequentially distributed along the same direction as the feeding direction b, and the side of the exposure machine 20 close to the pre-loading area 21 is provided with a second feeding port (not shown in the figure), and the second feeding port is connected to the feeding machine. The first feeding port 15 of 10 is docked; the side of the exposure machine 20 close to the feeding area 23 is provided with a second feeding port (not shown in the figure), and the second feeding port is connected with the first feeding port of the feeding machine 30. docking.

本实施例中,曝光机20为无菲林的立式LDI激光直写式曝光机,具体包括梁架24、曝光光源25、固定夹板26和移动夹板27,其中,曝光光源25固定于梁架24上,梁架24在曝光机20上可沿竖直方向移动,固定夹板26固定设置,移动夹板27可相对固定夹板26上下移动。移动夹板27和固定夹板26之间形成了工作区域,工作区域包含了预上料区21、曝光区22和下料区23,工作区域与安装基面呈角度设置。安装基面是曝光机布置、摆放的平面,通常是地面。在本实施例中,工作区域与安装基面垂直。曝光机20上的被曝光物体40竖直设置,且固定于固定夹板26和移动夹板27之间。曝光光源25照射出的光源与被曝光物体40的曝光面41相垂直。曝光光源25在梁架24的带动下对固持于固定夹板26和移动夹板27之间的被曝光物体40进行曝光。对于梁架24在曝光机20上如何实现沿水平方向和竖直方向移动的驱动结构,本发明对此不做描述,只要能驱动梁架在曝光机20上沿水平方向和竖直方向移动的驱动结构均适用本发明。In this embodiment, the exposure machine 20 is a vertical LDI laser direct writing exposure machine without film, and specifically includes a beam frame 24 , an exposure light source 25 , a fixed splint 26 and a movable splint 27 , wherein the exposure light source 25 is fixed on the beam frame 24 Above, the beam frame 24 can move in the vertical direction on the exposure machine 20 , the fixed splint 26 is fixedly arranged, and the movable splint 27 can move up and down relative to the fixed splint 26 . A working area is formed between the movable splint 27 and the fixed splint 26 . The working area includes a pre-loading area 21 , an exposure area 22 and an unloading area 23 , and the working area is arranged at an angle to the installation base. The installation base is the plane where the exposure machine is arranged and placed, usually the ground. In this embodiment, the working area is perpendicular to the mounting base. The exposed object 40 on the exposure machine 20 is vertically arranged and fixed between the fixed clamping plate 26 and the moving clamping plate 27 . The light source radiated by the exposure light source 25 is perpendicular to the exposure surface 41 of the object to be exposed 40 . The exposure light source 25 exposes the object to be exposed 40 held between the fixed clamping plate 26 and the moving clamping plate 27 under the driving of the beam frame 24 . The present invention does not describe how the beam frame 24 on the exposure machine 20 realizes the driving structure to move in the horizontal and vertical directions, as long as the beam frame can be driven to move in the horizontal and vertical directions on the exposure machine 20. The driving structure is applicable to the present invention.

预上料区21、曝光区22和下料区23分别设置是否有被曝光物体40的预上料传感器(图未示)、到位传感器(图未示)和下料传感器(图未示)。The pre-loading area 21 , the exposure area 22 and the unloading area 23 are respectively provided with a pre-loading sensor (not shown), an in-position sensor (not shown) and a blanking sensor (not shown) for the exposed object 40 .

曝光机20的预上料区21在曝光区22工作时可预放一枚或多枚待曝光的被曝光物体40,并配合其预上料传感器检测被曝光物体40的有无情况;待曝光区22的被曝光物体40被曝光完成后,曝光区22的被曝光物体40移至下料区23,预上料区21的被曝光物体40则同步移至曝光区22。曝光区22的到位传感器用于检测被曝光物体40是否到位,若到位则将被曝光物体40固定于固定夹板26和移动夹板27之间,并自动执行曝光工作。下料区23配合下料传感器,将曝光完成的被曝光物体40移送至下料机10或暂存在下料区23。The pre-loading area 21 of the exposure machine 20 can pre-place one or more exposed objects 40 to be exposed when the exposure area 22 is working, and cooperate with its pre-loading sensor to detect the presence or absence of the exposed objects 40; After the exposed objects 40 in the area 22 are exposed, the exposed objects 40 in the exposure area 22 move to the unloading area 23 , and the exposed objects 40 in the pre-loading area 21 move to the exposure area 22 synchronously. The in-position sensor in the exposure area 22 is used to detect whether the exposed object 40 is in place. If it is in place, the exposed object 40 is fixed between the fixed clamping plate 26 and the moving clamping plate 27, and the exposure work is performed automatically. The blanking area 23 cooperates with the blanking sensor to transfer the exposed object 40 after exposure to the blanking machine 10 or temporarily store it in the blanking area 23 .

结合图7所示,曝光机20的工作原理具体为:曝光机20的曝光区22对被曝光物体40进行曝光,曝光完成后,通过预上料传感器判断预上料区21是否有被曝光物体40,及通过下料区23的下料传感器判断下料区23是否有被曝光物体40,若预上料区21和下料区23均有被曝光物体40,则预上料区21、曝光区22和下料区23同时移动,具体地,下料区23将被曝光物体40移至下料机30,曝光区22的被曝光物体40移至下料区23,预上料区21的被曝光物体40则同步移送到曝光区22,曝光区22的到位传感器检测到有被曝光物体40后,则执行曝光动作。若预上料区21有被曝光物体40及下料区23没有被曝光物体40,则预上料区21、曝光区22同时移动,具体地,曝光区22的被曝光物体40移至下料区23,预上料区21的被曝光物体40则同步移送到曝光区22,曝光区22的到位传感器检测到有被曝光物体40后,则执行曝光动作。若预上料区21没有被曝光物体40及下料区23有被曝光物体40,则预上料区21提示上料机10上料,曝光区22和下料区23同时移动,具体地,下料区23将被曝光物体40移至下料机30,曝光区22的被曝光物体40移至下料区30,曝光区22的到位传感器检测到无被曝光物体后,则提示预上料区21移动上料。7, the working principle of the exposure machine 20 is as follows: the exposure area 22 of the exposure machine 20 exposes the object to be exposed 40, and after the exposure is completed, the pre-loading sensor is used to determine whether there is an exposed object in the pre-loading area 21. 40, and judge whether there is an exposed object 40 in the unloading area 23 through the unloading sensor of the unloading area 23, if both the pre-loading area 21 and the unloading area 23 have the exposed object 40, then the pre-loading area 21, the exposure The area 22 and the blanking area 23 move at the same time. Specifically, the blanking area 23 moves the exposed object 40 to the blanking machine 30, the exposed object 40 in the exposure area 22 moves to the blanking area 23, and the pre-loading area 21 The object 40 to be exposed is moved to the exposure area 22 synchronously. After the in-position sensor in the exposure area 22 detects the object 40 to be exposed, the exposure operation is performed. If the pre-loading area 21 has the exposed object 40 and the blanking area 23 has no exposed object 40, the pre-loading area 21 and the exposure area 22 move at the same time. Specifically, the exposed object 40 in the exposure area 22 moves to the blanking area. In area 23, the exposed objects 40 in the pre-loading area 21 are synchronously transferred to the exposure area 22. After the in-position sensor in the exposure area 22 detects the exposed objects 40, the exposure operation is performed. If there is no exposed object 40 in the pre-loading area 21 and there is an exposed object 40 in the blanking area 23, the pre-loading area 21 prompts the loading machine 10 to load, and the exposure area 22 and the blanking area 23 move at the same time. Specifically, The unloading area 23 moves the exposed object 40 to the unloading machine 30, the exposed object 40 in the exposure area 22 moves to the unloading area 30, and the in-position sensor in the exposure area 22 detects that there is no exposed object, it will prompt pre-loading Zone 21 moves the feed.

下料机30的结构与上料机10结构相同,结合图8和图9所示,具体包括下料架31、下料盘32、第二导轨34、第一下料口35、第三驱动件33和第四驱动件(图未示),其中,第二导轨34在下料架31上沿运料方向c延伸设置,用于提供下料盘32沿运料方向c下料的导向作用,下料架31上可以设置一根或多根第二导轨34,本实施例中,下料架31上设置了多根第二导轨34。下料盘32滑动设置于第二导轨34上,可沿第二导轨34来回滑动,用于自第一下料口35(即下料机30上的输料口)收纳下料的被曝光物体40。第三驱动件33与下料盘32相连,用于驱动下料盘32沿第二导轨34滑动,实施时,第三驱动件33可采用驱动电机。第一下料口35设置于下料架31的一侧端上,该侧端所在方向与运料方向c相同。下料盘32在第三驱动件33的驱动下,沿第二导轨34移动到第一下料口35处,且在第四驱动件的驱动下自第一下料口35沿与运料方向c相垂直的输料方向d收纳自下料区23下料下来的被曝光物体40。第三驱动件33和第四驱动件分别驱动被曝光物体40在运料方向c和输料方向d上的运动,实施时,第四驱动件也可以采用驱动电机。The structure of the unloading machine 30 is the same as that of the loading machine 10, and as shown in FIG. 8 and FIG. 9, it specifically includes the unloading rack 31, the unloading tray 32, the second guide rail 34, the first unloading port 35, the third drive component 33 and a fourth driving component (not shown), wherein the second guide rail 34 is extended on the unloading rack 31 along the material conveying direction c, and is used to provide a guiding function for the unloading tray 32 to unload along the material conveying direction c, One or more second guide rails 34 may be provided on the unloading rack 31 . In this embodiment, a plurality of second guide rails 34 are set on the unloading rack 31 . The unloading tray 32 is slidably arranged on the second guide rail 34, and can slide back and forth along the second guide rail 34, and is used for receiving the unloaded exposed objects from the first unloading port 35 (ie, the feeding port on the unloading machine 30). 40. The third driving member 33 is connected to the unloading tray 32 and is used to drive the blanking tray 32 to slide along the second guide rail 34. In implementation, the third driving member 33 may use a driving motor. The first discharging port 35 is disposed on one side end of the discharging rack 31 , and the direction of the side end is the same as the material conveying direction c. The unloading tray 32 moves along the second guide rail 34 to the first unloading port 35 under the driving of the third driving member 33, and is driven from the first unloading port 35 along the conveying direction by the fourth driving member. The conveying direction d perpendicular to the c-phase accommodates the exposed objects 40 unloaded from the unloading area 23 . The third driving member 33 and the fourth driving member respectively drive the movement of the exposed object 40 in the material conveying direction c and the material conveying direction d. During implementation, the fourth driving member may also use a driving motor.

本实施例中,下料盘32具体包括第二底盘321和第二侧盘322,其中,第二底盘321滑动位于第二导轨34上,第二底盘321上设置多个第二导槽3211(即第二底盘321上的料槽),多个第二导槽3211在上料架11上沿运料方向c延伸,且每个第二导槽3211沿输料方向d延伸。第二侧盘322的一端与第二底盘321靠近第一下料口35的一端相固定连接,且第二侧盘322向靠近第二底盘321的方向倾斜设置,第二侧盘322上设置多个与第二导槽3211一一对应的第二卡槽3221(即第二侧盘322上的料槽),每个被曝光物体40的底端和与底端相邻的一侧端分别卡置于第二导槽3211和对应的第二卡槽3221内。In this embodiment, the unloading tray 32 specifically includes a second chassis 321 and a second side plate 322, wherein the second chassis 321 slides on the second guide rail 34, and the second chassis 321 is provided with a plurality of second guide grooves 3211 ( That is, the material trough on the second chassis 321), a plurality of second guide grooves 3211 extend along the material conveying direction c on the loading rack 11, and each second guide groove 3211 extends along the material conveying direction d. One end of the second side plate 322 is fixedly connected to the end of the second base plate 321 close to the first discharge opening 35 , and the second side plate 322 is inclined in the direction close to the second base plate 321 . There are two second clamping grooves 3221 (that is, the feeding grooves on the second side plate 322 ) corresponding to the second guide grooves 3211 one-to-one, and the bottom end of each exposed object 40 and the side end adjacent to the bottom end are respectively clamped It is placed in the second guide groove 3211 and the corresponding second card groove 3221 .

本实施例中,第二底盘321上设置了10个第二导槽3211,第二导槽3211为U型导槽,第二侧盘322上对应设置了10个第二卡槽3221,也就是说,每个下料盘32一次最多可以上料10个被曝光物体40。每个第二导槽3211和对应的第二卡槽3221形成一用于容纳一个被曝光物体40的料槽,被曝光物体40在料槽内的放置方向与运料方向c和输料方向d均垂直,即每个被曝光物体40竖直设置于下料架31上,下料盘32上的多个被曝光物体40沿运料方向c分布。多个料槽中,有的料槽可以放置被曝光物体40,有的可不放置被曝光物体40。本发明的下料盘32上第二侧盘322的设置可以防止被曝光物体40在输送过程中发生倾倒或侧翻等问题,确保被曝光物体40在运送和上料时能够保持竖直。在其他实施例中,第二底盘321和第二侧盘322的连接结构不限于这里所限定的,只要能将被曝光物体40限位于第三底盘321和第三侧盘322之间即可。In this embodiment, ten second guide grooves 3211 are set on the second chassis 321, the second guide grooves 3211 are U-shaped guide grooves, and ten second card grooves 3221 are correspondingly set on the second side plate 322, that is, That is to say, each unloading tray 32 can load up to 10 exposed objects 40 at a time. Each of the second guide grooves 3211 and the corresponding second clamping grooves 3221 form a trough for accommodating an object to be exposed 40. The placement direction of the object to be exposed 40 in the trough is related to the material conveying direction c and the material conveying direction d. All are vertical, that is, each exposed object 40 is vertically arranged on the unloading rack 31, and the multiple exposed objects 40 on the unloading tray 32 are distributed along the conveying direction c. Among the plurality of troughs, some of the troughs can be placed with the object to be exposed 40 , and some of the troughs may not be placed with the object to be exposed 40 . The disposition of the second side plate 322 on the unloading plate 32 of the present invention can prevent the object to be exposed 40 from tipping or rollover during transportation, and ensure that the object to be exposed 40 can remain vertical during transportation and loading. In other embodiments, the connection structure of the second chassis 321 and the second side plate 322 is not limited to the one here, as long as the object to be exposed 40 can be confined between the third chassis 321 and the third side plate 322 .

下料机30上还包括下料传感器(图未示),用于检测料槽内是否有被曝光物体40。The feeding machine 30 also includes a feeding sensor (not shown) for detecting whether there is an exposed object 40 in the feeding trough.

如图9所示,下料机30的工作原理具体为:按动启动按钮,下料传感器判断下料盘32上的第二导槽3211有无被曝光物体40,若无,则该第二导槽3211移动到第一下料口35处,等待收料,之后将曝光机下料区23的被曝光物体40经第一下料口35沿输料方向d输送给下料盘32上的第二导槽3211;之后下料盘32沿运料方向c移动到下一个第二导槽3211,并重复上述步骤,直至下料盘32上所有无被曝光物体40的第二导槽3211全部收料结束。As shown in FIG. 9 , the working principle of the blanking machine 30 is as follows: when the start button is pressed, the blanking sensor determines whether the second guide groove 3211 on the blanking tray 32 has the exposed object 40 or not. The guide groove 3211 is moved to the first feeding port 35, waiting for the material to be received, and then the exposed object 40 in the feeding area 23 of the exposure machine is conveyed to the material on the feeding tray 32 through the first feeding port 35 along the feeding direction d. The second guide groove 3211; then the unloading tray 32 moves to the next second guide groove 3211 along the conveying direction c, and repeats the above steps until all the second guide grooves 3211 on the unloading tray 32 without the exposed object 40 are all Receipt is over.

结合图10所示,本发明所揭示的一种曝光机自动上下料方法,包括以下步骤:10, an automatic loading and unloading method of an exposure machine disclosed by the present invention includes the following steps:

S100,上料机10将上料架11上的被曝光物体40沿运料方向a移动到第一上料口15,自第一上料口15沿与运料方向a相垂直的输料方向b输送给曝光机20的预上料区21。S100, the feeding machine 10 moves the exposed object 40 on the feeding rack 11 to the first feeding port 15 along the feeding direction a, and from the first feeding port 15 along the feeding direction perpendicular to the feeding direction a b is conveyed to the pre-loading area 21 of the exposure machine 20 .

具体地,S100包括以下步骤:Specifically, S100 includes the following steps:

将被曝光物体40放入上料盘12的料槽中,按动启动按钮,上料传感器判断上料盘12上的第一导槽1211有无被曝光物体40,若有,则将有被曝光物体40的第一导槽1211移动到第一上料口15处,等待上料,之后将第一导槽1211内的被曝光物体40经第一上料口15沿输料方向b输送给曝光机20;之后上料盘12沿运料方向a移动到下一个第一导槽1211,并重复上述步骤,直至上料盘12上所有有被曝光物体40的第一导槽1211全部上料结束后,上料盘12回到初始位置,等待被曝光物体40重新装入。Put the object 40 to be exposed into the trough of the feeding tray 12, press the start button, and the feeding sensor determines whether the first guide groove 1211 on the feeding tray 12 has the object 40 to be exposed, and if so, there will be an exposed object 40. The first guide groove 1211 of the exposed object 40 moves to the first feeding port 15 and waits for the material to be loaded, and then the exposed object 40 in the first guide groove 1211 is conveyed to the first feeding port 15 along the feeding direction b. Exposure machine 20; then the feeding tray 12 moves to the next first guide groove 1211 along the conveying direction a, and repeats the above steps until all the first guide grooves 1211 with the exposed objects 40 on the feeding tray 12 are fully loaded After the end, the loading tray 12 returns to the initial position and waits for the exposed object 40 to be reloaded.

S200,曝光机的预上料区将被曝光物体输送到曝光区进行曝光,曝光后经曝光机的下料区输送给下料机。S200, the pre-loading area of the exposure machine transports the object to be exposed to the exposure area for exposure, and after exposure, the object is conveyed to the blanking machine through the unloading area of the exposure machine.

具体地,S200包括以下步骤:Specifically, S200 includes the following steps:

曝光机20的曝光区22对被曝光物体40进行曝光,曝光完成后,通过预上料传感器判断预上料区21是否有被曝光物体40,及通过下料区23的下料传感器判断下料区23是否有被曝光物体40,若预上料区21和下料区23均有被曝光物体40,则预上料区21、曝光区22和下料区23同时移动,具体地,下料区23将被曝光物体40移至下料机30,曝光区22的被曝光物体40移至下料区23,预上料区21的被曝光物体40则同步移送到曝光区22,曝光区22的到位传感器检测到有被曝光物体40后,则执行曝光动作。若预上料区21有被曝光物体40及下料区23没有被曝光物体40,则预上料区21、曝光区22同时移动,具体地,曝光区22的被曝光物体40移至下料区23,预上料区21的被曝光物体40则同步移送到曝光区22,曝光区22的到位传感器检测到有被曝光物体40后,则执行曝光动作。若预上料区21没有被曝光物体40及下料区23有被曝光物体40,则预上料区21提示上料机10上料,曝光区22和下料区23同时移动,具体地,下料区23将被曝光物体40移至下料机30,曝光区22的被曝光物体40移至下料区30,曝光区22的到位传感器检测到无被曝光物体后,则提示预上料区21移动上料。The exposure area 22 of the exposure machine 20 exposes the object to be exposed 40. After the exposure is completed, the pre-loading sensor determines whether there is an exposed object 40 in the pre-loading area 21, and the blanking sensor in the unloading area 23 judges the blanking Whether there is an exposed object 40 in the area 23, if both the pre-loading area 21 and the unloading area 23 have the exposed object 40, then the pre-loading area 21, the exposure area 22 and the unloading area 23 move at the same time, specifically, the unloading area Area 23 moves the exposed objects 40 to the unloader 30, the exposed objects 40 in the exposure area 22 are moved to the unloading area 23, and the exposed objects 40 in the pre-loading area 21 are simultaneously moved to the exposure area 22, and the exposure area 22 After the in-position sensor detects that there is an exposed object 40, the exposure action is performed. If the pre-loading area 21 has the exposed object 40 and the blanking area 23 has no exposed object 40, the pre-loading area 21 and the exposure area 22 move at the same time. Specifically, the exposed object 40 in the exposure area 22 moves to the blanking area. In area 23, the exposed objects 40 in the pre-loading area 21 are synchronously transferred to the exposure area 22. After the in-position sensor in the exposure area 22 detects the exposed objects 40, the exposure operation is performed. If there is no exposed object 40 in the pre-loading area 21 and there is an exposed object 40 in the blanking area 23, the pre-loading area 21 prompts the loading machine 10 to load, and the exposure area 22 and the blanking area 23 move at the same time. Specifically, The unloading area 23 moves the exposed object 40 to the unloading machine 30, the exposed object 40 in the exposure area 22 moves to the unloading area 30, and the in-position sensor in the exposure area 22 detects that there is no exposed object, it will prompt pre-loading Zone 21 moves the feed.

S300,曝光后的被曝光物体40自下料机30的第一下料口35沿与输料方向b相同的输料方向d输送给下料架31,在下料架31上沿与输料方向d相垂直的运料方向d下料。S300 , the exposed object 40 after exposure is conveyed to the unloading rack 31 from the first unloading port 35 of the unloading machine 30 along the same conveying direction d as the conveying direction b, and on the unloading stand 31 along the same conveying direction The d-phase vertical conveying direction d is unloading.

具体地,S300包括以下步骤:Specifically, S300 includes the following steps:

按动启动按钮,下料传感器判断下料盘32上的第二导槽3211有无被曝光物体40,若无,则该第二导槽3211移动到第一下料口35处,等待收料,之后将曝光机下料区23的被曝光物体40经第一下料口35沿输料方向d输送给下料盘32上的第二导槽3211;之后下料盘32沿运料方向c移动到下一个第二导槽3211,并重复上述步骤,直至下料盘32上所有无被曝光物体40的第二导槽3211全部收料结束。Press the start button, the feeding sensor determines whether the second guide groove 3211 on the feeding tray 32 has the exposed object 40 or not, if not, the second guide groove 3211 moves to the first feeding port 35 and waits for receiving the material Then, the exposed objects 40 in the unloading area 23 of the exposure machine are conveyed to the second guide groove 3211 on the unloading tray 32 through the first unloading port 35 along the conveying direction d; then the unloading tray 32 is along the conveying direction c. Move to the next second guide groove 3211, and repeat the above steps until all the second guide grooves 3211 on the unloading tray 32 without the exposed object 40 are all received.

本发明的技术内容及技术特征已揭示如上,然而熟悉本领域的技术人员仍可能基于本发明的教示及揭示而作种种不背离本发明精神的替换及修饰,因此,本发明保护范围应不限于实施例所揭示的内容,而应包括各种不背离本发明的替换及修饰,并为本专利申请权利要求所涵盖。The technical content and technical features of the present invention have been disclosed as above. However, those skilled in the art may still make various replacements and modifications based on the teaching and disclosure of the present invention without departing from the spirit of the present invention. Therefore, the protection scope of the present invention should not be limited to The contents disclosed in the embodiments should include various substitutions and modifications without departing from the present invention, and are covered by the claims of this patent application.

Claims (7)

1. An automatic material conveying system of an exposure machine is connected with the exposure machine and is characterized by comprising a material rack, a material tray and a material conveying opening, wherein the material tray and the material conveying opening are arranged on the material rack; at least one object to be exposed bears and is spacing in between chassis and the side dish, the charging tray drives the object to be exposed and removes along the fortune material direction on the work or material rest, all correspond on chassis and the side dish and be provided with the silo, the silo on the chassis extends the setting along defeated material direction, the object to be exposed spacing in the silo, and certainly the defeated material mouth will be exposed the object and carry for the exposure machine or receive the object to be exposed after the exposure of exposure machine along defeated material direction mutually vertically with fortune material direction, the object to be exposed on the charging tray place the direction with fortune material direction is all perpendicular with defeated material direction.
2. The automatic feeding system of exposure machine as claimed in claim 1, wherein the side tray is inclined in a direction approaching the bottom tray.
3. The system of claim 1, further comprising a first driving member and a second driving member for driving the object to be exposed to move along the feeding direction, wherein the first driving member is connected to the tray for driving the tray to move along the feeding direction on the rack.
4. The automatic feeding system of exposure machine as claimed in claim 1, further comprising a guide rail extending along the feeding direction on the rack, wherein the tray is slidably disposed on the guide rail.
5. The automatic feeding system of exposure machine as claimed in claim 1, wherein the trough is a U-shaped guide groove.
6. An automatic material conveying method of an exposure machine based on the automatic material conveying system of the exposure machine according to any one of claims 1 to 5, the method comprising: the charging tray drives the exposed object to move to the material conveying opening on the material rack along the material conveying direction, and the exposed object is conveyed to the exposure machine along the material conveying direction which is vertical to the material conveying direction from the material conveying opening.
7. An automatic material conveying method of an exposure machine based on the automatic material conveying system of the exposure machine according to any one of claims 1 to 5, the method comprising: the exposed object exposed by the exposure machine is conveyed to the feeding disc from the material conveying port on the material frame along the material conveying direction, and the material disc drives the exposed object to be discharged on the material frame along the material conveying direction vertical to the material conveying direction.
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JPH08167567A (en) * 1994-12-14 1996-06-25 Nikon Corp Scanning exposure device
US6211942B1 (en) * 2000-03-10 2001-04-03 Howa Machinery Ltd. Double-sided exposure system
JP4018516B2 (en) * 2002-11-26 2007-12-05 富士フイルム株式会社 Image exposure device
CN103019041B (en) * 2012-11-26 2014-10-22 京东方科技集团股份有限公司 Exposure machine

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