CN112415366B - Structure for constructing test microenvironment - Google Patents

Abstract

The application relates to a structure for constructing a test microenvironment, which comprises a microporous matrix and at least two channels formed inside the microporous matrix, wherein the at least two channels comprise at least two of an electric heating channel, a gas circulation channel and a liquid circulation channel, and the microporous matrix is matched with the area of a region to be tested and can be supported above the region to be tested. The structure space of this application occupies for a short time, and can provide stable environmental parameter, is applicable to the test of small-size device.

Description

The structure used to build the test microenvironment

technical field

The present application relates to the technical field of testing, in particular to a structure for building a testing microenvironment.

Background technique

Reliability test refers to the determination and verification of the reliability of the product through the test, and to find out the weak link of the product under the limited sample, time and use cost. It is to understand, evaluate, analyze and improve the reliability of the product. The general term for all kinds of tests. In the chip reliability test method, the chip structure and performance stability under different usage environments are one of the important test items of the chip. In the current chip test, the temperature and humidity environment is mainly provided by the temperature and humidity chamber. Due to the small chip area, This kind of device not only takes up a lot of space, but also cannot guarantee the stability of environmental parameters, which affects the accuracy of test results.

Contents of the invention

In view of the above technical problems, the present application provides a structure for building a test microenvironment, which occupies a small space and can provide stable environmental parameters, and is suitable for testing small devices.

In order to solve the above technical problems, the present application provides a structure for constructing a test microenvironment, including a microporous matrix and at least two channels formed inside the microporous matrix, and the at least two channels include electric heating channels, At least two of the gas circulation channel and the liquid circulation channel, the microporous matrix matches the area of the area to be tested and can be supported above the area to be tested.

Optionally, each of the at least two flow channels includes interdigitated parts, and the interdigitated parts of the at least two flow channels are mutually misaligned; and/or, the at least two flow channels each include There are at least two annular parts, all the annular parts are concentrically arranged, and the annular parts of different flow channels are alternately arranged.

Optionally, the microporous matrix is one of hydrogel, microporous molecular sieve, microporous foam, and microporous ceramic; and/or, the micropore diameter of the microporous matrix is 0.1 nm-1 μm.

Optionally, the inner diameter of the channel is 0.1mm-5mm, and the thickness of the microporous matrix is 2mm-5cm.

Optionally, the at least two channels include an electric heating channel, and the electric heating channel is filled with liquid metal.

Optionally, the at least two channels include a gas circulation channel, and an inner wall of the gas circulation channel is provided with a gas separation membrane.

Optionally, a side of the microporous substrate facing the region to be tested is provided with a microprotrusion structure, and the microporous substrate contacts the surface of the region to be tested through the microprotrusion structure.

Optionally, at least one groove is provided on the side of the microporous substrate facing the region to be tested, the area of the groove is larger than the area of the region to be tested, and the depth of the groove is larger than that of the region to be tested. The thickness of the area to be tested.

Optionally, the structure for constructing the test microenvironment further includes a casing, the microporous matrix is housed in the casing, and one side of the casing is open toward the area to be tested.

Optionally, the area to be tested is a chip connection pin.

The structure used to construct the test microenvironment of the present application includes a microporous matrix and at least two channels formed inside the microporous matrix, and at least two channels include at least two of an electric heating channel, a gas circulation channel, and a liquid circulation channel. , the microporous matrix matches the area of the area to be tested and can be supported above the area to be tested. The structural space of the present application is small, can provide stable environmental parameters, and is suitable for testing small devices.

Description of drawings

Fig. 1 is a top view of a structure for constructing a test microenvironment shown according to a first embodiment;

Fig. 2 is a schematic view of the state of use of the structure for constructing the test microenvironment shown according to the first embodiment;

Fig. 3 is the sectional view of structure shown in Fig. 2 along I-I line;

Fig. 4 is a schematic diagram of another usage status of the structure for building a test microenvironment shown according to the first embodiment;

Fig. 5 is a top view of a structure for constructing a test microenvironment shown according to a second embodiment;

Fig. 6 is a cross-sectional view of the structure for constructing the test microenvironment according to the third embodiment when it is in use;

Fig. 7 is a cross-sectional view of the structure for constructing the test microenvironment according to the fourth embodiment when it is in use;

Fig. 8 is a cross-sectional view of the structure for constructing a test microenvironment according to the fifth embodiment when it is in use.

Detailed ways

The implementation of the present application will be described by specific specific examples below, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification.

In the following description, reference is made to the accompanying drawings, which illustrate several embodiments of the application. It is to be understood that other embodiments may be utilized, and mechanical, structural, electrical, and operational changes may be made without departing from the spirit and scope of the present application. The following detailed description should not be considered limiting, and the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application.

Although in some instances the terms first, second, etc. are used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another.

Furthermore, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context indicates otherwise. It should be further understood that the terms "comprising", "comprising" indicate the presence of stated features, steps, operations, elements, components, items, species, and/or groups, but do not exclude one or more other features, steps, operations, The existence, occurrence or addition of an element, component, item, species, and/or group. The terms "or" and "and/or" as used herein are to be construed as inclusive, or to mean either one or any combination. Thus, "A, B or C" or "A, B and/or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C" . Exceptions to this definition will only arise when combinations of elements, functions, steps or operations are inherently mutually exclusive in some way.

The structure used to construct the test microenvironment of the present application includes a microporous matrix and at least two channels formed inside the microporous matrix, and at least two channels include at least two of an electric heating channel, a gas circulation channel, and a liquid circulation channel. , the microporous matrix matches the area of the area to be tested and can be supported above the area to be tested.

Wherein, at least two kinds of electric heating channels, gas circulation channels and liquid circulation channels are arranged in the microporous matrix, and there may be one, two or more electric heating channels, gas circulation channels and liquid circulation channels respectively. The electric heating channel is used to heat the environment; the gas circulation channel can provide the required type of gas, such as corrosive gas, inert gas, ozone, etc., and different gas circulation channels can be fed with different gases; the liquid circulation channel can provide the required Types of liquids, such as pure water, corrosive liquids, etc., different liquid circulation channels can lead to different liquids. Different test environments can be provided through the combination of different channels, such as temperature and humidity environment, corrosive gas environment, temperature corrosive environment, etc., increasing the diversity of test items. In addition, the microporous matrix can make the distribution of temperature, gas concentration and humidity more uniform while providing gas and liquid diffusion micropores. By designing the microporous matrix to match the area of the area to be tested and supported on the area to be tested Above, it takes up less space and can provide a stable micro-environment, making the control of environmental parameters more precise. It is especially suitable for use in the reliability testing of small devices such as chips to improve the accuracy of testing.

The structure for constructing the test microenvironment of the present application will be described in detail below through different embodiments.

first embodiment

Fig. 1 is a top view of a structure for constructing a test microenvironment according to the first embodiment. As shown in FIG. 1 , the structure for constructing a test microenvironment in this embodiment includes a microporous matrix 1 and a first channel 11 and a second channel 12 formed inside the microporous matrix 1 .

The microporous matrix 1 is one of hydrogel, microporous molecular sieve, microporous foam, and microporous ceramics. Preferably, the microporous matrix 1 is a hydrogel, which is hydrophilic and provides suitable micropore size. Also flexible, hydrogel materials include, but are not limited to, hyaluronic acid, chitosan, polyacrylic acid, polymethacrylic acid, polyacrylamide, poly-N-polyacrylamide, and the like. Optionally, the micropore diameter of the microporous matrix 1 is 0.1 nm-1 μm, the inner diameters of the first channel 11 and the second channel 12 are 0.1 mm-5 mm, and the thickness of the microporous matrix 1 is 2 mm-5 cm.

The first channel 11 and the second channel 12 can be two types of electric heating channels, gas circulation channels, and liquid circulation channels. In this embodiment, the first channel 11 is an electric heating channel, and the electric heating channel is filled with liquid metal. Both ends of the first channel 11 are connected to a heating circuit 111 to realize temperature control, and the temperature control range is 0-90°C. Since the surface of the liquid metal is easy to form an oxide film, filling the first channel 11 with liquid metal will not cause the liquid metal to leak from the micropores of the microporous substrate 1, and it can normally play the role of heating the environment with electricity. At the same time, the use of liquid metal It can adapt to the flexibility of the microporous matrix 1, and the overall structure is flexible, which can better match the surface shape of the area to be tested and provide a stable and uniform microenvironment.

The second channel 12 is a liquid circulation channel, and pure water can be passed into the liquid circulation channel, and the two ends of the second channel 12 are connected with a microcirculation pump 121 or a water pump to realize controllable humidity, and the humidity range is 20%-100%. 0.9% physiological saline can also pass through the second channel 12 to provide a corrosive environment with temperature and humidity.

Optionally, the second channel 12 can also be a gas circulation channel, the inner wall of the gas circulation channel is provided with a gas separation membrane, the material of the gas separation membrane includes but not limited to polyimide material or polysulfone material, through the second channel 12 The inner wall is provided with a gas separation membrane, which can effectively control the speed of the gas entering the environment from the second channel 12 and improve the stability of the gas concentration. In actual implementation, a tube made of polyimide material or polysulfone material can be made first, and then coated with a hydrogel material, so that the gas separation membrane is formed on the inner wall of the second channel 12 . Inert gas, ozone or corrosive gas (such as chlorine) can be introduced into the gas circulation channel to change the oxygen content of the environment, the concentration of corrosive gas, etc., and can test the stability of the area to be tested under different gas atmospheres.

In this embodiment, the first channel 11 includes a first interdigitated portion 112, and the second channel 12 includes a second interdigitated portion 122, and the first interdigitated portion 112 and the second interdigitated portion 122 are mutually misaligned, and also That is, the fingers of the first finger portion 112 are correspondingly inserted into the gaps between the fingers of the second finger portion 122 to form a dislocation matching structure. The range of heating and humidification can be effectively limited by the first interdigitated part 112 and the second interdigitated part 122, and at the same time, the uniform cooperation between the temperature environment and the humidity environment can be ensured to form a stable and uniform microenvironment.

Please combine Fig. 2 and Fig. 3 together, microporous substrate 1 matches the area of the area to be tested and can be supported above the area to be tested. In this embodiment, the area to be tested is the chip wiring pin 21, and the chip wiring pin 21 are located on opposite sides of the chip 2 for electrical connection between the chip 2 and the circuit on the substrate 22 .

As shown in Figure 2, a microporous matrix 1 is respectively covered on the chip wiring pins 21 on both sides of the chip 2, and the area of the microporous matrix 1 is slightly larger than the area of the area where the chip wiring pins 21 are located. The first channel 11 and the second channel The interdigitated part of 12 is located above the pin 21 of the chip. The microporous matrix 1 of the present application is made of hydrogel, which can be prepared by 3D printing technology according to the size of the area where the chip wiring pin 21 is located. The method is simple and the size can be customized.

As shown in Figure 3, the side of the microporous substrate 1 towards the area to be tested is provided with a micro-protrusion structure 13, and the microporous substrate 1 contacts the surface of the area to be tested through the micro-protrusion structure 13, while ensuring that the microporous substrate 1 There is a certain micro space between the surface of the chip 2 and the chip wiring pin 21, so that the temperature and humidity are more uniform. The height of the micro-protrusion structure 13 is 0.5mm-20mm, the thickness of the microporous substrate 1 is 2mm-5cm (excluding the height of the micro-protrusion structure 13), and the projected area of each micro-protrusion structure 13 in the height direction is The projected area of the microporous matrix 1 in the thickness direction is 5%-10%, and the number of micro-protruding structures 13 can be adjusted according to the thickness and area of the microporous matrix 1 to achieve proper supporting force and microspace structure.

Fig. 4 is a schematic diagram of another use state of the structure for building a test microenvironment according to the first embodiment. As shown in Figure 4, the microporous substrate 1 can also cover the top of the chip 2 and the chip wiring pin 21 as a whole, and the interdigitated parts of the first channel 11 and the second channel 12 are located above the chip 2, and are used for connecting the chip 2 and the chip. Foot 21 provides a test microenvironment as a whole.

The structure used to construct the test microenvironment of the present application includes a microporous matrix and at least two channels formed inside the microporous matrix, and at least two channels include at least two of an electric heating channel, a gas circulation channel, and a liquid circulation channel. , the microporous matrix matches the area of the area to be tested and can be supported above the area to be tested. The structural space of the present application is small, and can provide stable environmental parameters for a narrow test space, and is suitable for testing small devices.

second embodiment

Fig. 5 is a top view of a structure for constructing a test microenvironment according to the second embodiment. As shown in FIG. 5 , the structure for constructing a test microenvironment in this embodiment includes a microporous matrix 3 and a first channel 31 and a second channel 32 formed inside the microporous matrix 3 .

The main difference from the first embodiment is that the first channel 31 and the second channel 32 of this embodiment each include an annular portion, and the annular portion of the first channel 31 and the annular portion of the second channel 32 are arranged concentrically. The annular portions of a channel 31 and the second channel 32 are arranged alternately, that is, there is a annular portion of the second channel 32 between two adjacent annular portions of the first channel 31 .

The range of heating and humidification can be effectively limited by the annular parts of the first passage 31 and the second passage 32, and at the same time, the uniform cooperation between the temperature environment and the humidity environment can be ensured to form a stable and uniform microenvironment.

For other features of the structure for constructing the test microenvironment in this embodiment, reference may be made to the relevant description of the first embodiment, which will not be repeated here.

third embodiment

Fig. 6 is a cross-sectional view of the structure for constructing the test microenvironment according to the third embodiment when it is in use. As shown in FIG. 6 , the structure for constructing the test microenvironment of this embodiment includes a housing. Side opening.

The side of the microporous substrate 4 facing the area to be tested is provided with a micro-protrusion structure 43, and the microporous substrate 4 contacts the surface of the chip 2 or the chip wiring pin through the micro-protrusion structure 43, while ensuring that the microporous substrate 4 and the chip 2 Or the surface of the chip wiring pin has a certain microspace, which improves the uniformity of the microenvironment.

The shell 42 can be prepared by chitosan material or organic material such as polydimethylsiloxane (PDMS), silica gel, etc., and the outer surface of the microporous matrix 4 is covered by the shell 42 to ensure the internal microenvironment It does not fluctuate due to changes in the external environment and improves the stability of the test microenvironment.

For other features of the structure for constructing the test microenvironment in this embodiment, reference may be made to the relevant description of the first embodiment, which will not be repeated here.

Fourth embodiment

Fig. 7 is a cross-sectional view of the structure for constructing a test microenvironment according to the fourth embodiment when it is in use. As shown in Figure 7, the difference between the structure used to build the test microenvironment of this embodiment and the first embodiment is that a groove 53 is provided on the side of the microporous substrate 5 towards the region to be tested, and the area of the groove 53 is Greater than the area of the area to be tested, the depth of the groove 53 is greater than the thickness of the area to be tested.

By setting the groove 53 with an area greater than the area to be tested and a depth greater than the thickness of the area to be tested, the microporous substrate 5 forms a frame structure, which can be directly mounted on the substrate 22 to cover the entire test area, such as covering the chip 2 at the same time. With the chip connection pin 21, the overall test of the chip 2 and the chip connection pin 21 is realized, and the stability of the test micro-environment is high at the same time.

In order to ensure the stability of the structure, the microporous substrate 5 can preferably be made of materials with certain structural strength such as microporous molecular sieves, microporous foams or microporous ceramics.

For other features of the structure for constructing the test microenvironment in this embodiment, reference may be made to the relevant description of the first embodiment, which will not be repeated here.

fifth embodiment

Fig. 8 is a cross-sectional view of the structure for constructing a test microenvironment according to the fifth embodiment when it is in use. As shown in Figure 8, the main difference between the structure used to build the test microenvironment of this embodiment and the fourth embodiment is that the side of the microporous substrate 6 facing the area to be tested is provided with a first groove 61 and a second groove. The area of the groove 62 , the first groove 61 and the second groove 62 are respectively larger than the area of the corresponding area to be tested, and the depths of the first groove 61 and the second groove 62 are respectively greater than the thickness of the corresponding area to be tested.

By setting the area of the groove larger than the area to be tested and the depth greater than the thickness of the area to be tested, the microporous substrate 6 forms a frame structure, which can be directly mounted on the substrate 22 to cover the entire test area, such as covering the chip 2 and the test area at the same time. The chip connection pin 21 realizes the overall test of the chip 2 and the chip connection pin 21, and at the same time, multiple grooves can be used for batch testing of multiple objects to improve the test efficiency. In actual implementation, the number of grooves may be greater than two and arranged in an array.

In order to ensure the stability of the structure, the microporous matrix 6 can preferably be made of materials with certain structural strength such as microporous molecular sieves, microporous foams or microporous ceramics.

For other features of the structure for constructing the test microenvironment in this embodiment, reference may be made to the relevant description of the first embodiment, which will not be repeated here.

The above-mentioned embodiments are only illustrative to illustrate the principles and effects of the present application, but are not intended to limit the present application. Any person familiar with the technology can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed in the application shall still be covered by the claims of the application.

Claims (11)

1. A structure for constructing a test microenvironment is characterized by being applied to chip reliability test, and comprising a microporous matrix and at least two channels formed in the microporous matrix, wherein the at least two channels comprise at least two of an electric heating channel, a gas circulation channel and a liquid circulation channel, the microporous matrix is matched with the area of a region to be tested and can be supported above the region to be tested, the microporous matrix is used for providing gas and liquid diffusion micropores, and the gas circulation channel is used for providing gas for forming a test atmosphere; the liquid circulation channel is used for providing liquid for adjusting humidity, or the liquid circulation channel is used for providing liquid for forming a humidity and corrosive environment.

2. The structure for constructing a test microenvironment of claim 1, wherein the at least two channels each include interdigitated portions, the interdigitated portions of the at least two channels being in a phase-to-phase mismatch; and/or the at least two channels each comprise at least two annular portions, all the annular portions are concentrically arranged, and the annular portions of different channels are alternately arranged.

3. The structure for constructing a test microenvironment of claim 1, wherein the microporous matrix is one of a hydrogel, a microporous molecular sieve, a microporous foam, a microporous ceramic.

4. The structure for constructing test microenvironments of claim 1, wherein said microporous matrix has micropores of 0.1nm-1 μm diameter.

5. The structure for constructing test microenvironments according to any one of claims 1 to 4, wherein the inner diameter of the channel is 0.1mm-5mm and the thickness of the microporous matrix is 2mm-5cm.

6. The structure for constructing a test microenvironment of claim 1, wherein the at least two channels include the electrical heating channel filled with a liquid metal.

7. The structure for constructing a test microenvironment of claim 1, wherein the at least two channels include the gas circulation channel, an inner wall of the gas circulation channel being provided with a gas separation membrane.

8. The structure for constructing a testing microenvironment of claim 1, wherein a side of the microporous matrix facing the area to be tested is provided with a microprotrusion structure, the microporous matrix contacting a surface of the area to be tested through the microprotrusion structure.

9. The structure for constructing test microenvironments of claim 1, wherein a side of said microporous matrix facing said area to be tested is provided with at least one groove, said groove having an area larger than the area of said area to be tested and a depth larger than the thickness of said area to be tested.

10. The structure for constructing a testing microenvironment of claim 1, further comprising a housing, wherein the microporous matrix is received in the housing, and a side of the housing facing the area to be tested is open.

11. The structure for constructing a test microenvironment of claim 1, wherein the areas to be tested are chip terminal pins.

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