CN112361944A - Wireless measurement system and measurement method based on nano capacitive sensor - Google Patents
Wireless measurement system and measurement method based on nano capacitive sensor Download PDFInfo
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- CN112361944A CN112361944A CN202011097448.1A CN202011097448A CN112361944A CN 112361944 A CN112361944 A CN 112361944A CN 202011097448 A CN202011097448 A CN 202011097448A CN 112361944 A CN112361944 A CN 112361944A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
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Abstract
本发明提供了一种基于纳米电容传感器的无线测量系统及测量方法，所述基于纳米电容传感器的无线测量系统包括纳米电容传感器、信号放大模块、模数转换器、控制器模块、无线接收模块和上位机，所述控制器模块中包括无线射频模块，所述纳米电容传感器连接所述信号放大模块的输入端，所述信号放大模块的输出端连接所述模数转换器的输入端，所述模数转换器的输出端连接所述控制器模块的输入端，所述无线接收模块用于接收所述无线射频模块发射的射频信号，所述无线接收模块连接所述上位机。本发明将数据采集端采集的数据通过无线传输的方式发送给显示端，可以适应各种复杂、恶劣的环境，使测量系统的应用范围更广，尤其对于要求高精度，高带宽，低延时的工业应用领域。
The present invention provides a wireless measurement system and measurement method based on a nano-capacitive sensor. The wireless measurement system based on a nano-capacitance sensor includes a nano-capacitance sensor, a signal amplification module, an analog-to-digital converter, a controller module, a wireless receiving module, and a The host computer, the controller module includes a wireless radio frequency module, the nano-capacitive sensor is connected to the input end of the signal amplification module, the output end of the signal amplification module is connected to the input end of the analog-to-digital converter, the The output end of the analog-to-digital converter is connected to the input end of the controller module, the wireless receiving module is used for receiving the radio frequency signal transmitted by the wireless radio frequency module, and the wireless receiving module is connected to the upper computer. The invention sends the data collected by the data acquisition terminal to the display terminal by wireless transmission, which can adapt to various complex and harsh environments, and make the application range of the measurement system wider, especially for the requirements of high precision, high bandwidth and low delay. of industrial applications.
Description
Technical Field
The invention relates to the field of surveying and mapping, in particular to a wireless measurement system and a measurement method based on a nano capacitive sensor.
Background
Due to the ever-increasing demand for precision motion positioning in applications such as microscopy, lithography, chip processing inspection, precision machine tools, metrology instruments, aerospace and biomedical applications, there is a demand to control them to dimensions of 100nm or less. The accuracy of the positioning technology depends on sensors, and the feedback control is performed by accurate position sensors.
The capacitance displacement sensor is commonly used in the field of high-precision displacement measurement, is used as a commonly used micro-displacement measuring tool, and is widely popularized and applied in the fields of precision measurement and automatic control by virtue of the characteristics of simple structure, high resolution, high bandwidth, high sensitivity, large signal-to-noise ratio, good stability, strong anti-electromagnetic interference capability and the like. Capacitive position sensors have the following major advantages over other types of precision position sensors.
Nano-capacitive sensors can provide high resolution up to the picometer (pm) level over a short range (typically from 10um to 2 mm).
Capacitive sensors are completely contactless, without part deformation or probe wear, and the object to be measured can be a conductor or an insulator.
The nano-capacitive sensor provides high measurement bandwidth up to 10KHz, 20 KHz or even 100 KHz.
However, the existing measurement system based on the nano-capacitance sensor still has the following technical problems: the electric signal of the nano-capacitor sensor is transmitted to the signal processing circuit through the transmission cable, the transmission line is often an important source of noise and interference, and for the capacitor sensor, the capacitance is very small, the signal is weak, and then the interference of the transmission line can generate great influence on the signal. Especially when the nano-capacitor sensor is used in industrial equipment, the stability of the nano-capacitor sensor can be seriously affected by the movement of the cable in a drag chain. And the signal-to-noise ratio can be seriously influenced due to the overlong cable, so that the cable length of the nano capacitive sensor can not be overlong, generally about 2-3 meters, and the current measuring system based on the nano capacitive sensor has larger limitation in industrial application.
On the other hand, in modern routine testing, sensor data collected at the industrial site is often required and then sent to a data processing center or host for analysis and processing. It is now conventional to transmit useful data via a cable between the sensor and the computer. However, in a complex industrial field, wiring is inconvenient to be a great problem, the cable itself has hidden troubles of short circuit and disconnection, the cable has the defects of high cost, easy aging and the like, and the complex and complicated lines also make debugging and maintenance of the system more difficult.
Furthermore, in many cases, such as a highly corrosive environment, or attachment to moving objects, it is not possible to make cable connections. In such cases, the wired measurement may cause trouble to the measurement, and even make the measurement impossible.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a wireless measurement system and a measurement method based on a nano-capacitance sensor, wherein the resolution of the sensor can reach 0.1nmHz-1/2The high-bandwidth (10 kHz) sampling and low-delay (200 us) transmission of input signals are achieved, data collected by the data collection end are sent to the display end in a wireless transmission mode, and the high-bandwidth low-delay data acquisition system can adapt to various complex and severe environments and is wider in application range.
The purpose of the invention is realized by the following technical scheme:
in a first aspect, the present invention provides a wireless measurement system based on a nano-capacitive sensor, including: nanometer capacitive sensor, signal amplification module, analog-to-digital converter, controller module, wireless receiving module and host computer, including wireless radio frequency module in the controller module, nanometer capacitive sensor connects the input of signal amplification module, the output of signal amplification module is connected analog-to-digital converter's input, analog-to-digital converter's output is connected the input of controller module, wireless receiving module is used for receiving the radio frequency signal of wireless radio frequency module transmission, wireless receiving module connects the host computer.
Further, the nano capacitance sensor is one of a variable-pole-distance type nano capacitance sensor, a variable-area type nano capacitance sensor and a variable-medium type nano capacitance sensor.
Further, the controller module and the wireless radio frequency module communicate with each other through any one of serial communication protocols of I2C, UART, and SPI.
Further, the controller module and the radio frequency module communicate with each other through an SDIO parallel communication protocol.
Further, the analog-to-digital converter is one of a 12-bit analog-to-digital conversion module, an 18-bit analog-to-digital conversion module, and a 24-bit analog-to-digital conversion module.
Further, the wireless radio frequency module is one of a WIFI radio frequency module, a bluetooth module, an nRF24L01 module, and an LoRa module.
Further, the wireless receiving module comprises a wireless network card.
In a second aspect, the present invention further provides a measurement method based on a nano-capacitive sensor, where the measurement method based on a nano-capacitive sensor is applied to the wireless measurement system based on a nano-capacitive sensor in the first aspect.
Further, the method comprises the following steps:
collecting data through a nano-capacitance sensor, and amplifying the data through a signal amplification module;
the analog-to-digital converter acquires the amplified data and converts the data of the analog quantity into the data of the digital quantity;
the controller module sends out the data of the digital quantity through the wireless radio frequency module;
the wireless receiving module receives the data and then transmits the data to the upper computer for display.
Further, when the data are collected through the nano-capacitance sensor, the bandwidth of the nano-capacitance sensor is 1-10 kHz.
The invention has the beneficial effects that: the invention provides a wireless measurement system and a measurement method based on a nano-capacitance sensor, which can acquire data with high precision through the nano-capacitance sensor, and the precision of an ADC (analog to digital converter) can reach 10-9v, the positioning precision reaches the nanometer level, and the analog quantity is amplified by the signal amplification moduleAfter the signal is amplified, the analog-to-digital converter converts the data of the analog quantity into the data of the digital quantity, the controller collects the converted data and sends the data of the digital quantity through a Direct Memory Access (DMA) channel, and a wireless receiving module receives the data and then transmits the data to an upper computer for displaying.
Drawings
The invention is further illustrated by means of the attached drawings, but the embodiments in the drawings do not constitute any limitation to the invention, and for a person skilled in the art, other drawings can be derived on the basis of the following drawings without inventive effort.
Fig. 1 is a schematic system structure diagram of a wireless measurement system based on a nano-capacitance sensor according to the present invention.
Fig. 2 is a schematic control logic diagram of a wireless measurement system based on a nano-capacitive sensor according to the present invention.
Fig. 3 is a sine wave schematic diagram collected by an upper computer of a wireless measurement system based on a nano-capacitance sensor according to the present invention.
FIG. 4 is a schematic diagram of square sine waves collected by an upper computer of a wireless measurement system based on a nano-capacitance sensor according to the present invention.
Fig. 5 is a schematic diagram of triangular sine waves acquired by an upper computer of a wireless measurement system based on a nano-capacitance sensor.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-5, the wireless measurement system based on the nano-capacitor sensor of this embodiment includes a nano-capacitor sensor, a signal amplification module, an analog-to-digital converter, a controller module, a wireless receiving module and an upper computer, the controller module includes a wireless radio frequency module therein, the nano-capacitor sensor is connected to the input of the signal amplification module, the output of the signal amplification module is connected to the input of the analog-to-digital converter, the output of the analog-to-digital converter is connected to the input of the controller module, the wireless receiving module is used for receiving the radio frequency signal transmitted by the wireless radio frequency module, and the wireless receiving module is connected to the upper computer.
Specifically, the nano capacitive sensor in this embodiment may be one of a variable-pole-distance type nano capacitive sensor, a variable-area type nano capacitive sensor, and a variable-medium type of a nano capacitive sensor, and the measured object may be any physical quantity that can be converted into capacitance change, such as displacement, size, pressure, temperature, humidity, and speed.
The bandwidth of the variable-pole-pitch nano capacitive sensor is 1-10kHz, voltage of-10V-10V/-5V- +5V/0-10V is output, and the gain of the preamplifier can be adjusted according to the specific voltage.
In this embodiment, the analog-to-digital converter may be one of a 12-bit analog-to-digital conversion module, an 18-bit analog-to-digital conversion module, and a 24-bit analog-to-digital conversion module, the precision of the analog-to-digital converter depends on the number of bits of the ADC, the analog-to-digital converter may perform multi-channel acquisition, the analog-to-digital converter is configured to convert analog signals with continuous time and continuous amplitude into digital signals with discrete time and discrete amplitude, and the analog signal output by the nano-capacitor sensor is sampled by the analog-to-digital converter, which is exemplified by the 12-bit analog-to-digital conversion module in this embodiment.
Specifically, the controller is mainly used for data processing including a low-pass filter, band-stop filtering, linear correction and the like, and then sends the processed signals to the radio frequency module through one of serial communication protocols such as I2C, UART, SPI and the like or parallel protocols such as SDIO and the like, and the controller module of the embodiment specifically adopts a single chip microcomputer of STM32 as a controller.
When the controller of this embodiment performs AD sampling, the sampling frequency is set to be at least 2 times the bandwidth, and the sampling frequency of this embodiment is described by taking 1Mhz as an example.
Specifically, the wireless radio frequency module in this embodiment is one of a WIFI radio frequency module, a bluetooth module, an nRF24L01 module, and an LoRa module, and this embodiment takes the WIFI radio frequency module as an example for description.
Specifically, the wireless receiving module in this embodiment includes a wireless network card, the wireless network card can receive data sent by the wireless network card, the upper computer in this embodiment may use programming languages VB, VC, C + +, C #, and the like, and may also use graphical programming software such as matlab, labview, and the like, and the upper computer in this embodiment is described as labview by way of example.
The working principle of the embodiment is as follows: the utility model provides a wireless measurement system based on nanometer capacitance sensor, gather temperature data through pole-changing distance type nanometer capacitance sensor, after preamplifier enlargies temperature data, 12 bit analog-to-digital converter converts the temperature data of analog quantity into the temperature data of digital quantity, and send temperature data through the WIFI module through the STM32 singlechip, wireless network card among the wireless receiving module transmits after receiving data and shows for the host computer, the data that this embodiment was gathered the data acquisition end through wireless transmission's mode is sent for the display end, can adapt to various complicacies, abominable environment, make measurement system's range of application wider.
Embodiment 2, a measurement method based on a nanocapacitive sensor.
The embodiment provides a measurement method based on a nano-capacitance sensor, which is applied to the wireless measurement system based on the nano-capacitance sensor in embodiment 1, and includes the following steps:
collecting data through a nano-capacitance sensor, and amplifying the data through a signal amplification module;
the analog-to-digital converter acquires the amplified data and converts the data of the analog quantity into the data of the digital quantity;
the controller module sends out the data of the digital quantity through the wireless radio frequency module;
the wireless receiving module receives the data and then transmits the data to the upper computer for display.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the protection scope of the present invention, although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. A wireless measurement system based on a nanocapacitive sensor, comprising: nanometer capacitive sensor, signal amplification module, analog-to-digital converter, controller module, wireless receiving module and host computer, including wireless radio frequency module in the controller module, nanometer capacitive sensor connects the input of signal amplification module, the output of signal amplification module is connected analog-to-digital converter's input, analog-to-digital converter's output is connected the input of controller module, wireless receiving module is used for receiving the radio frequency signal of wireless radio frequency module transmission, wireless receiving module connects the host computer.
2. The wireless measurement system based on the nanocapacitive sensor as recited in claim 1, wherein the nanocapacitive sensor is one of a variable-pole-pitch type nanocapacitive sensor, a variable-area type nanocapacitive sensor and a variable-dielectric type nanocapacitive sensor.
3. The wireless measurement system based on the nano-capacitive sensor as claimed in claim 1, wherein the controller module and the wireless radio frequency module communicate with each other through any one of serial communication protocols I2C, UART, SPI.
4. The wireless measurement system based on the nanocapacitive sensor as recited in claim 1, wherein the controller module and the wireless radio frequency module communicate with each other via SDIO parallel communication protocol.
5. The wireless measurement system based on the nanocapacitive sensor as recited in claim 1, wherein said analog-to-digital converter is one of a 12-bit analog-to-digital conversion module, an 18-bit analog-to-digital conversion module, and a 24-bit analog-to-digital conversion module.
6. The wireless measurement system based on the nanocapacitive sensor as claimed in claim 1, wherein the wireless radio frequency module is one of a WIFI radio frequency module, a bluetooth module, an nRF24L01 module, and an LoRa module.
7. The wireless measurement system based on the nano-capacitive sensor as claimed in claim 1, wherein the wireless receiving module comprises a wireless network card.
8. A measurement method based on a nano-capacitance sensor, which is characterized in that the measurement method based on the nano-capacitance sensor is applied to the wireless measurement system based on the nano-capacitance sensor of any one of claims 1 to 7.
9. The method of claim 8, comprising the steps of:
collecting data through a nano-capacitance sensor, and amplifying the data through a signal amplification module;
the analog-to-digital converter acquires the amplified data and converts the data of the analog quantity into the data of the digital quantity;
the controller module sends out the data of the digital quantity through the wireless radio frequency module;
the wireless receiving module receives the data and then transmits the data to the upper computer for display.
10. The method as claimed in claim 9, wherein the bandwidth of the nanocapacitive sensor is 1-10kHz when the nanocapacitive sensor is used to collect data.
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| US20070222462A1 (en) * | 2006-02-21 | 2007-09-27 | Gardner Delrae H | Capacitive distance sensing in semiconductor processing tools |
| US20120249164A1 (en) * | 2011-03-30 | 2012-10-04 | Sean Kelly Summers | Sensor assembly for detecting materials using a microwave emitter and method |
| US20140312018A1 (en) * | 2011-11-10 | 2014-10-23 | Ipg Photonics Corporation | Dynamic Height Adjusting System and Method for Head Assembly of Laser Processing System |
| CN213481234U (en) * | 2020-10-14 | 2021-06-18 | 广东工业大学 | Wireless measurement system based on nano capacitive sensor |
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- 2020-10-14 CN CN202011097448.1A patent/CN112361944A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004023645A1 (en) * | 2004-05-08 | 2005-12-08 | Carl Mahr Holding Gmbh | Computer compatible length probe and probe system |
| US20070222462A1 (en) * | 2006-02-21 | 2007-09-27 | Gardner Delrae H | Capacitive distance sensing in semiconductor processing tools |
| US20120249164A1 (en) * | 2011-03-30 | 2012-10-04 | Sean Kelly Summers | Sensor assembly for detecting materials using a microwave emitter and method |
| US20140312018A1 (en) * | 2011-11-10 | 2014-10-23 | Ipg Photonics Corporation | Dynamic Height Adjusting System and Method for Head Assembly of Laser Processing System |
| CN213481234U (en) * | 2020-10-14 | 2021-06-18 | 广东工业大学 | Wireless measurement system based on nano capacitive sensor |
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