CN112327576B - Nanometer impression soft mould fixing device and nanometer impression equipment - Google Patents

Abstract

The present invention discloses a nanoimprint soft mold fixing device and a nanoimprint equipment, wherein the nanoimprint soft film includes an imprinting part and two connecting parts respectively arranged at two opposite ends of the imprinting part, and the nanoimprint soft mold fixing device includes: at least one limit rod group, including two limit rods in parallel, each limit rod having an arc surface for the connecting part to be wound around; and two traction mechanisms, respectively connected to the two connecting parts; the imprinting part is located on one side of the limit rod group, and the two traction mechanisms are respectively used to stretch and pull the connecting part toward the other side of the limit rod group, so that the imprinting part is tensioned on the limit rod group. The technical solution of the present invention aims to flatten and fix the nanoimprint soft mold to improve the pattern transfer quality of nanoimprinting.

Description

Nanoimprint soft mold fixture and nanoimprint equipment

Technical Field

The invention relates to the field of nanoimprinting, and in particular to a nanoimprinting soft mold device and a nanoimprinting equipment.

Background technique

In industrial production, the imprinting soft molds suitable for large-area substrates are mostly soft molds based on polymer materials. However, the existing fixing methods are prone to cause local deformation of the nanoimprint soft mold when loading and fixing the nanoimprint soft mold, resulting in an uneven surface of the nanoimprint soft mold, which affects the quality of nanoimprint pattern transfer.

Summary of the invention

The main purpose of the present invention is to provide a nanoimprint soft mold device, which aims to flatten and fix the nanoimprint soft mold to improve the pattern transfer quality of nanoimprint.

To achieve the above-mentioned purpose, the present invention proposes a nanoimprint soft mold fixing device. The nanoimprint soft film includes an imprinting portion and two connecting portions respectively arranged at opposite ends of the imprinting portion, and the nanoimprint soft mold fixing device includes:

At least one limiting rod set, including two limiting rods in parallel, each limiting rod having an arc surface for the connecting portion to wrap around; and

The two traction mechanisms are respectively connected to the two connecting parts; the stamping part is located on one side of the limiting rod group, and the two traction mechanisms are respectively used to stretch and pull the connecting part toward the other side of the limiting rod group so that the stamping part is tensioned on the limiting rod group.

Optionally, the traction mechanism has a plurality of traction ends, and the plurality of traction ends are connected to the connecting portion at intervals.

Optionally, at least two groups of the limiting rod groups are arranged at intervals, and in a direction away from the stamping portion, the limiting rod groups with arcuate surfaces facing away from each other and the limiting rod groups with arcuate surfaces facing each other are alternately arranged in sequence.

Optionally, the limiting rod is a limiting round rod.

Optionally, the limiting circular rod is rotatably arranged.

Optionally, the nanoimprint soft mold fixing device further comprises:

A flatness detection device, comprising a detection light source, a light sensor, and a processor electrically connected to the light sensor, wherein the detection light source is used to emit a detection light to the stamping portion, the light sensor is used to receive a reflected light of the detection light, and the processor is used to determine whether the stamping portion is flat according to the reflected light; and

The motor is used to move the flatness detection device relative to the stamping portion so that the detection light emitted by the detection light source can traverse the stamping portion.

Optionally, the motor is drivingly connected to the flatness detection device, and is used to drive the flatness detection device to move, so that the flatness monitoring device moves relative to the stamping part.

Optionally, the detection light source is a line light source.

Optionally, the nanoimprint soft mold fixing device further comprises: an alarm module, configured to issue a warning when the processor determines that the surface of the imprinting part is uneven.

The present invention also provides a nanoimprinting device, comprising the aforementioned nanoimprinting soft mold fixing device.

The technical solution of the present invention effectively eliminates the uneven force on the surface of the nanoimprint soft mold by wrapping the connecting part of the nanoimprint soft mold around the curved surface of the limiting rod. In the prior art, the nanoimprint soft mold is generally fixed by a square fixing bar. In actual production, the square fixing bar and the connecting part are in line contact, which is easy to produce uneven friction on the surface of the nanoimprint soft mold, and cannot improve the uneven force on the surface of the nanoimprint soft mold. In the nanoimprint device of the present invention, when the nanoimprint soft mold is tensioned, the curved surface of the limiting rod abuts against the connecting part, and the contact surface of the two is a curved surface. The connecting part is subjected to the curved surface friction force of the limiting rod, which can adjust the force on the surface of the imprinting part. Under the action of the curved surface friction force of the limiting rod, the force direction on both sides of the imprinting part is parallel to the tensioning direction, and the force on both sides is uniform, so that the surface of the imprinting part can be kept flat, and the quality of nanoimprinting graphic transfer can also be improved.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

FIG1 is a schematic diagram of the force of an embodiment of a nanoimprint soft mold fixing device of the present invention;

FIG2 is a schematic diagram of the force of the nanoimprint soft mold in FIG1 ;

FIG3 is a schematic structural diagram of another embodiment of a nanoimprint soft mold fixing device according to the present invention;

FIG. 4 is a schematic structural diagram of an embodiment of a flatness detection device in a nanoimprint soft mold fixing device of the present invention.

Description of Figure Numbers:

Label name Label name 10 Nanoimprint Soft Mold 11 Connection 12 Pressing Department 20 Limit rod set 31 Detection light source 32 Light Sensor

The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings.

Detailed ways

The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if the meaning of "and/or" appearing in the full text is to include three parallel schemes, taking "A and/or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

The invention provides a nanoimprint soft mold fixing device.

1 , in one embodiment of the present invention, the nanoimprint soft film includes an imprinting portion 12 and two connecting portions 11 disposed at opposite ends of the imprinting portion 12. The nanoimprint soft mold fixing device includes:

At least one limiting rod set 20, including two limiting rods in parallel, each limiting rod having an arc surface for the connecting portion 11 to wrap around; and

Two traction mechanisms (not shown) are respectively connected to the two connecting parts 11; the stamping part 12 is located on one side of the limiting rod group 20, and the two traction mechanisms are respectively used to stretch and pull the connecting part 11 toward the other side of the limiting rod group 20 so that the stamping part 12 is tensioned on the limiting rod group 20.

If only a planar traction mechanism is provided, after the nanoimprint soft mold 10 is tensioned, the traction mechanism exerts traction on the connecting portion 11 of the nanoimprint soft mold 10. When the nanoimprint soft mold 10 is subjected to the traction force and cannot generate displacement, its geometric dimensions and shape will change. Also, because the connecting portion 11 has a limited number of fixed points or uneven pressure at the fixed points, the traction force it receives in the extension direction is not always constant. Under the condition of uneven force, the surface of the thin and soft nanoimprint soft mold 10 is prone to local deformation.

In the prior art, the nanoimprint soft mold is generally fixed with a square fixing bar. Only under ideal conditions, there is a planar contact between the square fixing bar and the connecting part. In actual production, due to the thin and soft characteristics of the nanoimprint soft mold, only line contact can be achieved between the square fixing bar and the connecting part, which easily generates uneven friction on the surface of the nanoimprint soft mold. Therefore, the existing fixing method not only cannot improve the uneven force on the surface of the nanoimprint soft mold, but may also aggravate the local deformation of the nanoimprint soft mold.

In the present invention, the connecting portion 11 of the nanoimprint soft mold 10 is wound around the arc surface of the limiting rod, which can effectively eliminate the uneven force on the surface of the nanoimprint soft mold 10. When the nanoimprint soft mold 10 is tensioned, the arc surface of the limiting rod abuts against the connecting portion, and the contact surface of the two is a curved surface. The connecting portion is subjected to the friction force of the curved surface of the limiting rod, which can adjust the force on the surface of the imprinting portion 12. Under the action of the friction force of the curved surface of the limiting rod, the force directions on both sides of the imprinting portion 12 are parallel to the tensioning direction, and the force on both sides is uniform, so that the surface of the imprinting portion 12 can be kept flat, and the quality of nanoimprinting pattern transfer can also be improved.

Furthermore, in this embodiment, as shown in FIG. 2 , each traction mechanism has a plurality of traction ends, which are connected to the connecting portion at intervals so that a plurality of traction forces at intervals act on the connecting portion. In this way, the traction force on the limiting portion is more uniform, and the tensioned imprinting portion 12 is also easier to adjust to a flat state under the action of the limiting rod. Of course, in other embodiments, the traction mechanism may be two clamps, and the connecting portion 11 of the nanoimprint soft mold 10 is clamped between the two clamps. After the traction mechanism clamps the connecting portion 11, it is stretched and pulled so that the imprinting portion 12 is tensioned on the limiting rod group 20.

Further, in this embodiment, as shown in FIG1 , the nanoimprint soft mold fixing device is provided with only one set of limit rods 20, that is, one limit rod is provided near each of the two traction mechanisms. It can be understood that since the surface of the limit rods cannot be smooth, the connecting portion will be subjected to the friction force from the limit rods when being stretched by the traction mechanism. The nanoimprint soft mold fixing device provided with only one set of limit rods 20 can reduce the friction force on the connecting portion 11 when the nanoimprint soft mold 10 is tensioned, thereby reducing the wear of the limit rods on the connecting portion 11.

In another embodiment, as shown in FIG. 3 , at least two groups of limit rod groups 20 are arranged at intervals, and in the direction away from the stamping portion 12 , the limit rod groups 20 with arcuate surfaces facing away from each other and the limit rod groups 20 with arcuate surfaces facing each other are arranged alternately in sequence.

It can be understood that the more the number of limiting rod groups 20 is, the better the effect of improving the uniformity of the pulling force is. Therefore, the two groups of limiting rod groups arranged at intervals in this embodiment are more conducive to making the surface of the stamping part 12 smooth than the single limiting rod group in one embodiment.

In actual production, technicians can determine the number of applicable limit rod groups 20 according to different needs. However, it should be noted that the more the number of limit rod groups 20, the greater the cumulative friction. When the number of limit rod groups 20 exceeds a certain number (for example, three groups), the connection part will be subjected to excessive friction during the process of the traction mechanism pulling and stretching the connection part, which will hinder the tension of the stamping part 12 and is not conducive to adjusting the stamping part 12 to a flat state. In this embodiment, two groups of limit rod groups 20 are arranged at intervals, which can not only have a good effect on improving the uniformity of the pulling force, but also prevent the tension of the stamping part 12 from being affected due to excessive cumulative friction.

Specifically, in this embodiment, the axes of the two limit rods close to the same traction mechanism are located in the same vertical plane or near vertical plane, and the two connecting parts 11 first abut against the opposite arc surface of a limit rod group 20 closer to the stamping part 12, and then pass through the interval between the two limit rod groups 20, and then abut against the opposite arc surface of the other limit rod group 20, and finally, the ends of the two connecting parts 11 are respectively connected to the two traction mechanisms. Therefore, the interval between the two limit rods close to the same traction mechanism should not be too small, and at least it is necessary to ensure that the connecting part 11 can move smoothly therein so as not to affect the tension of the stamping part 12.

Optionally, the two ends of each limit rod can be respectively arranged in two slide grooves, and the extension direction of the slide groove is parallel to the tensioning direction of the nanoimprint soft mold 10. In this way, when fixing different nanoimprint soft molds 10, the limit rod can be moved according to the different sizes of the imprinting parts 12, so that the arc surface thereon abuts against the connecting part after the nanoimprint soft mold 10 is tensioned, so that the nanoimprint soft mold fixing device can be used to fix different nanoimprint soft molds 10, thereby improving the versatility of the present invention.

Furthermore, in this embodiment, the limiting rod is set as a limiting round rod, so that the connecting portion 11 of the nanoimprint soft mold 10 can abut against any part of the side of the limiting round rod without having to make additional adjustments to ensure that the connecting portion 11 abuts against the curved surface on the limiting rod, thereby greatly improving the fool-proof performance of the nanoimprint soft mold fixing device.

Furthermore, in this embodiment, the limiting rod is rotatably arranged. In this way, when the traction mechanism pulls and stretches the nanoimprint soft mold, the limiting rod can rotate with the stretching of the connecting portion, so that the friction force on the connecting portion 11 changes from sliding friction to rolling friction, further reducing the wear of the connecting portion 11 by the friction force of the limiting rod, thereby improving the durability of the nanoimprint soft mold 10.

Furthermore, in this embodiment, as shown in FIG4 , the nanoimprint soft mold fixing device further includes:

A flatness detection device, comprising a detection light source 31, a light sensor 32, and a processor (not shown) electrically connected to the light sensor 32, wherein the detection light source 31 is used to emit detection light to the stamping portion 12, the light sensor 32 is used to receive reflected light of the detection light, and the processor is used to determine whether the stamping portion 12 is flat according to the reflected light; and

The motor (not shown) is used to move the flatness detection device relative to the stamping portion 12 so that the detection light emitted by the detection light source 31 can traverse the stamping portion 12 .

The nanoimprint soft mold 10 is thin, light and soft, and the prior art cannot detect the flatness of the tensioned nanoimprint soft mold 10. The flatness detection device of the present invention can move relative to the imprinting part 12 under the action of the motor, and the detection light emitted by the detection light source 31 can traverse the imprinting part 12, thereby performing a contactless detection on the entire imprinting part 12. While confirming the surface flatness of the imprinting part 12, it will not affect the original state of the nanoimprint soft mold 10.

Specifically, under the action of the motor, when the flatness detection device moves to different positions relative to the nanoimprint soft mold 10, the detection light source 31 will emit detection light to the imprinting part 12 at a certain angle. If the surface of the imprinting part 12 is flat, the detection light will be reflected at the same incident angle and the same reflection angle at any position of the imprinting part 12. Within the allowable error range, the reflected light will reach a specific area of the light sensor 32; if the surface of the imprinting part 12 is uneven, the detection light will reach the surface of the uneven area at different incident angles, and the path of the reflected light will also change accordingly, and the reflected light will be projected to other areas of the light sensor 32. The processor electrically connected to the light sensor 32 can analyze the position information of the received reflected light. If the reflected light at different positions is located in a specific area, the processor determines that the surface of the imprinting part 12 is flat; if the reflected light exceeds the range of the specific area, the processor determines that the surface of the imprinting part 12 is uneven. Of course, in other embodiments, if the precision requirement for the nanoimprint process is not high, it is not necessary to use a flatness detection device to detect the flatness of the imprinting portion 12. The reason is that the nanoimprint soft mold 10 is fixed on the nanoimprint soft mold fixing device by the above-mentioned fixing method, which can ensure that the imprinting portion 12 has a certain flatness, that is, some products with low precision requirements can be directly produced.

Furthermore, in the present embodiment, the motor is connected to the flatness detection device for driving the flatness detection device to move so that the flatness monitoring device moves relative to the imprinting portion 12. The detection method in the present embodiment is to fix the nanoimprint soft mold 10 and drive the flatness detection device to move by the motor, thereby avoiding directly moving the nanoimprint soft mold 10 and preventing it from deforming during the movement. Of course, in other embodiments, the motor may be connected to the traction mechanism and the limit rod group 20 for driving the nanoimprint soft mold 10 to move so that the flatness monitoring device moves relative to the imprinting portion 12. In this way, it can be ensured that each detection light emitted by the detection light source is consistent, so as to improve the accuracy of the flatness detection device.

Furthermore, in the present embodiment, the detection light source 31 is a line light source. The detection light emitted by the line light source is projected as a line on the surface of the stamping portion 12, so that the flatness of the portion of the stamping portion 12 located on the line projection can be detected at one time to improve the efficiency of the flatness detection. Of course, in other embodiments, the detection light source 31 can also include a row of point light sources. When detecting the flatness of the stamping portion 12, the row of point light sources can emit a plurality of spaced light spots to form a light spot band projection on the stamping portion 12. In this way, the point light source can also detect the portion of the light spot band projection at one time.

Optionally, the flatness detection device of the present invention can also be used to detect the flatness of the imprinting part 12 of the nanoimprint soft mold 10 in the production of the nanoimprint process. It can be understood that even if the nanoimprint soft mold 10 is flatly fixed to the nanoimprint fixing device before the start of production, the nanoimprint soft mold 10 may be deformed during the production of the nanoimprint process. Specifically, there are some unavoidable mechanical processes in the process of nanoimprinting, which include: the contact between the imprinting part 12 of the nanoimprint soft mold 10 and the imprinting glue under pressure, the deformation of the imprinting glue surface and the filling of the nanostructure of the imprinting part 12, and the separation process of the imprinting part 12 from the imprinting glue. In these mechanical processes, the nanoimprint soft mold 10 will be subjected to local stress, and the surface of the imprinting part 12 may be stretched twice, so that the nanoimprint soft mold 10 cannot maintain the initial tension state before nanoimprinting, thereby, the connecting part 11 cannot abut against the arc surface of the limit rod, and the surface of the imprinting part 12 will no longer be flat. The flatness detection device of the present invention can perform non-contact, real-time and rapid flatness detection on the nanoimprint soft mold 10 after each nanoimprint process is completed without affecting the imprint process flow, so that technicians can make timely adjustments to the imprinted part when it is no longer flat, so as to avoid affecting the quality of the finished product of the next nanoimprint.

Furthermore, in this embodiment, the nanoimprint soft mold fixing device further includes: an alarm module, which is used to issue a warning when the processor determines that the surface of the imprinting part 12 is uneven. In this way, the attention of the operator or technician can be immediately drawn to avoid using the imprinting part 12 with an uneven surface for nanoimprinting, which can greatly reduce the product defect rate and reduce the waste of materials and energy.

Optionally, the alarm module includes at least one of a sound alarm module, a light alarm module, a vibration alarm module and an electronic information alarm module; wherein the electronic information alarm module is used to send alarm information to an external terminal. It can be understood that there are multiple warning methods, and technicians can select at least one of the above-mentioned many alarm modules according to actual needs to meet the alarm requirements. For example, in the andon system commonly used in workshops, the alarm module of the nanoimprint soft mold fixture can be an alarm module that combines a sound alarm module with a light alarm module.

The present invention also proposes a nanoimprint device, which includes a nanoimprint soft mold fixing device. The specific structure of the nanoimprint soft mold fixing device refers to the above-mentioned embodiment. Since the nanoimprint device adopts all the technical solutions of all the above-mentioned embodiments, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here one by one.

The above descriptions are only optional embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention's specification and drawings, or directly/indirectly applied in other related technical fields, are included in the patent protection scope of the present invention.

Claims (8)

1. A nanoimprint soft mold fixing device, wherein the nanoimprint soft film comprises an imprinting portion and two connecting portions respectively arranged at two opposite ends of the imprinting portion, wherein the nanoimprint soft mold fixing device comprises: At least one limiting rod set, including two limiting rods in parallel, each limiting rod having an arc surface for the connecting portion to wrap around; and Two traction mechanisms are respectively connected to the two connecting parts; the stamping part is located on one side of the limiting rod group, and the two traction mechanisms are respectively used to pull the connecting part toward the other side of the limiting rod group, so that the stamping part is tightened on the limiting rod group; The limiting rod is a limiting round rod, and the limiting round rod is rotatably arranged. 2 . The nanoimprint soft mold fixing device as described in claim 1 , characterized in that the traction mechanism has a plurality of traction ends, and the plurality of traction ends are connected to the connecting portion at intervals. 3. The nanoimprint soft mold fixing device as described in claim 1 is characterized in that at least two groups of the limit rod groups are arranged at intervals, and in the direction away from the imprinting part, the limit rod groups with arcuate surfaces facing away from each other and the limit rod groups with arcuate surfaces facing each other are arranged alternately in sequence. 4. The nanoimprint soft mold fixing device according to any one of claims 1 to 3, characterized in that the nanoimprint soft mold fixing device further comprises: A flatness detection device, comprising a detection light source, a light sensor, and a processor electrically connected to the light sensor, wherein the detection light source is used to emit a detection light to the stamping portion, the light sensor is used to receive a reflected light of the detection light, and the processor is used to determine whether the stamping portion is flat according to the reflected light; and The motor is used to move the flatness detection device relative to the stamping portion so that the detection light emitted by the detection light source can traverse the stamping portion. 5. The nanoimprint soft mold fixing device according to claim 4 is characterized in that the motor is drivingly connected to the flatness detection device and is used to drive the flatness detection device to move so that the flatness monitoring device moves relative to the imprinting part. 6 . The nanoimprint soft mold fixing device according to claim 4 , wherein the detection light source is a linear light source. 7. The nanoimprint soft mold fixing device according to claim 4, characterized in that the nanoimprint soft mold fixing device further comprises: The alarm module is used to issue a warning when the processor determines that the surface of the stamping part is uneven. 8. A nanoimprinting device, characterized in that it comprises the nanoimprinting soft mold fixing device according to any one of claims 1 to 7.