CN112327503A - Light path pointing precision adjusting device - Google Patents
Light path pointing precision adjusting device Download PDFInfo
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- CN112327503A CN112327503A CN202011251005.3A CN202011251005A CN112327503A CN 112327503 A CN112327503 A CN 112327503A CN 202011251005 A CN202011251005 A CN 202011251005A CN 112327503 A CN112327503 A CN 112327503A
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- flexible hinge
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- optical path
- adjusting device
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- 239000000919 ceramic Substances 0.000 claims abstract description 33
- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910000906 Bronze Inorganic materials 0.000 claims description 2
- 229910052790 beryllium Inorganic materials 0.000 claims description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010974 bronze Substances 0.000 claims description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 14
- 125000006850 spacer group Chemical group 0.000 abstract description 4
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical group [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
一种光路指向精密调节装置，包括支撑座、四个驱动器、两个刚性杆、四个柔性铰链、柔性片、转接板以及反射镜。驱动器包括菱形壳体、三个压电陶瓷、两个垫片。第一、第三驱动器对称位于支撑座第一平面上，第二、第四驱动器对称位于支撑座第二平面上，均通过螺钉连接。两个刚性杆的一端通过螺纹与第一、第三驱动器连接，另一端与柔性铰链通过螺纹连接。第二与第四驱动器分别与柔性铰链通过螺纹连接。四个柔性铰链分别与转接板通过螺母连接。柔性片、转接板、反射镜通过螺钉螺母连接，柔性片与支撑座通过螺钉连接。对四组驱动器施加不同的电压，四个柔性铰链会表现出不同的位移变化，从而驱动反射镜实现二维偏转，进而对光路指向进行精密调节。
A precision adjustment device for optical path direction, comprising a support seat, four drivers, two rigid rods, four flexible hinges, a flexible sheet, an adapter plate and a reflector. The driver consists of a diamond-shaped housing, three piezoelectric ceramics, and two spacers. The first and third drivers are symmetrically located on the first plane of the support base, and the second and fourth drivers are symmetrically located on the second plane of the support base, both of which are connected by screws. One end of the two rigid rods is connected to the first and third drivers through threads, and the other end is connected to the flexible hinge through threads. The second and fourth drivers are respectively connected to the flexible hinge through threads. The four flexible hinges are respectively connected with the adapter plate through nuts. The flexible sheet, the adapter board, and the reflector are connected by screws and nuts, and the flexible sheet is connected to the support seat by screws. When different voltages are applied to the four sets of drivers, the four flexible hinges will exhibit different displacement changes, thereby driving the mirror to achieve two-dimensional deflection, and then precisely adjusting the direction of the optical path.
Description
Technical Field
The invention belongs to the technical field of precision optical mechanical structure design, and particularly relates to a light path pointing precision adjusting device which can realize light path pointing precision adjustment in an optical system.
Background
The light path pointing precision adjusting device is a precision optical device for light beam pointing precision adjustment in an optical system, and is required to have the characteristics of high reliability, high pointing precision, good stability and the like.
With the urgent need of precise positioning and pointing reflectors in the fields of space laser radars, space laser communication technology, optics and the like, particularly, a high-precision light path pointing adjusting device applied in a space environment plays an important role in inter-satellite laser communication, space laser remote sensing and remote measurement and the like.
Prior art 1: the invention discloses a symmetric piezoelectric drive two-dimensional pointing adjusting mechanism and a rotating platform angle adjusting method, and discloses a publication number CN 109546887A. The four sets of displacement amplification units are symmetrically distributed on the base, and each piezoelectric ceramic actuator is controlled to drive the upper platform to rotate. And the platform lacks a pivot point for rotation in the middle, which causes the linearity of the mechanism to be poor, and the stability and precision of the platform to be affected.
Disclosure of Invention
The invention provides the light path pointing precision adjusting device for overcoming the defects of the prior art, can realize light path pointing precision adjustment, and has the characteristics of high pointing precision, good stability and excellent linearity.
The technical solution of the invention is as follows:
a light path pointing precision adjusting device comprises a supporting seat, a first driver, a second driver, a third driver, a fourth driver, a first rigid rod, a second rigid rod, a first flexible hinge, a second flexible hinge, a third flexible hinge, a fourth flexible hinge, a flexible sheet, an adapter plate and a reflector. The first driver and the third driver are symmetrically fixed on the first plane of the supporting seat through screws respectively. The second driver and the fourth driver are symmetrically fixed on the second plane of the supporting seat through screws respectively. The first and second rigid rods are secured to the first and third actuators, respectively, by threaded ends of the rigid rods, and the other ends of the first and second rigid rods are secured to the first and third flexible hinges, respectively, by threads. The second and fourth drivers are respectively fixed with the second and fourth flexible hinges through threads. The flexible sheet is connected with the supporting seat through a screw. The adapter plate is positioned between the flexible sheet and the reflector and is fixedly connected through threads. The first, second, third and fourth flexible hinges are fixed with the four through holes on the periphery of the adapter plate through threads.
Preferably, the actuator is bonded by three piezo-ceramic stacks.
Preferably, concave surfaces which are symmetrically distributed in pairs are distributed on the supporting seat and used for limiting the positions of the four rhombic piezoelectric ceramic drivers.
Preferably, the two rigid rods adopt a structure that one end of each rigid rod extends out and is provided with a threaded rod, and the other end of each rigid rod is provided with a threaded hole.
Preferably, the two ends of the four flexible hinges are threaded rods, and the middle of the four flexible hinges is a 0.8mm thin rod.
Preferably, the thickness of the rotating flexible sheet is 0.2 mm.
Preferably, the material of the rotationally flexible sheet is beryllium copper.
Preferably, the reflector is a metal mirror made of 6061-T651, and the reflecting surface is of an oval structure.
Preferably, the section of the reflector is in an I-shaped structure, and the mechanical interface of the reflector is 4 threaded holes which are symmetrically distributed.
Compared with the prior art, the invention has the beneficial effects that:
(1) the driving mode of the piezoelectric ceramic drivers which are symmetrically distributed is adopted, and the piezoelectric ceramic driver has the characteristics of large output, quick response and high resolution.
(2) The actuator is formed by stacking and bonding three piezoelectric ceramics in series, and the displacement of the actuator can be increased.
(3) The horizontal displacement of the piezoelectric ceramic is converted into the displacement in the vertical direction through the rhombic shell, and the displacement can be amplified by 6-10 times.
(4) According to the driver provided by the invention, the first gasket and the second gasket are positioned between the rhombic shell and the piezoelectric ceramic, and different pretightening forces can be applied to the piezoelectric ceramic by changing the thickness of the gaskets, so that the efficiency of the piezoelectric ceramic can be maximized.
(5) Four drivers are distributed on different planes of the central supporting seat in a pairwise symmetrical mode, 4 flexible hinges are located on the same plane through two rigid rods, the design enables the diameter of a circle formed by 4 supporting points not to be limited by the size of piezoelectric ceramics, and then the adjustment angle of the platform can be enlarged.
(6) The middle of the flexible sheet provided by the invention is connected with the supporting seat through the screw, the periphery of the flexible sheet is connected with the adapter plate, the design can enable the reflector to have a fulcrum rotating around the center, the thickness of the flexible sheet is 0.2mm, the material is beryllium bronze made of high-strength elastic material, the design can ensure that the deflection angle of the reflector is in a linear relation with the change of driving voltage, and meanwhile, the reflector can be ensured to have the characteristics of high precision, good stability and excellent linearity in the deflection process.
Drawings
Fig. 1 is an isometric view of an optical path pointing fine adjustment apparatus according to an embodiment of the present invention.
Fig. 2 is a front view of an optical path pointing precision adjusting apparatus according to an embodiment of the present invention.
Fig. 3 is a left side view of an optical path pointing precision adjusting apparatus according to an embodiment of the present invention.
Fig. 4 is a sectional view of a plane a-a in a front view of an optical path pointing fine adjustment apparatus according to an embodiment of the present invention.
Fig. 5 is a top view of an optical path pointing fine adjustment apparatus according to an embodiment of the present invention, with a metal aluminum mirror removed.
Fig. 6 is a schematic structural diagram of a rhombus piezoelectric ceramic driver in an optical path pointing precision adjusting device according to an embodiment of the present invention.
Fig. 7 is a schematic diagram of the displacement change of the rhombus piezoelectric ceramic actuator in the optical path pointing precision adjusting device according to the embodiment of the invention.
Fig. 8 is a schematic view of a structure of a central supporting seat of an optical path pointing precision adjusting apparatus according to an embodiment of the present invention.
Fig. 9 is a top view of a center supporting base of the optical path pointing fine adjustment apparatus according to an embodiment of the present invention.
Reference numbers in the figures: 1-a support seat; 2-a first driver; 3-a second driver; 4-a third driver; 5-a fourth drive; 6-a first rigid rod; 7-a second rigid rod; 8-a first flexible hinge; 9-a second flexible hinge; 10-a third flexible hinge; 11-a fourth flexible hinge; 12-a flexible sheet; 13-an adapter plate; 14-a mirror; 15-outer hexagon screw; 16-a nut; 111-a diamond-shaped shell; 112-a first shim; 113-a second gasket; 114-a first piezoelectric ceramic; 115-a second piezoelectric ceramic; 116-a third piezoelectric ceramic.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The technical solution of the present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in fig. 1, 2, 3, and 4, the optical path pointing precision adjustment device provided by the present invention includes a support base 1, a first driver 2, a second driver 3, a third driver 4, a fourth driver 5, a first rigid rod 6, a second rigid rod 7, a first flexible hinge 8, a second flexible hinge 9, a third flexible hinge 10, a fourth flexible hinge 11, a flexible sheet 12, an adapter plate 13, a reflector 14, an outer hexagon screw 15, and a nut 16.
The first, second, third and fourth drivers are structurally schematically illustrated in fig. 6, and include a diamond-shaped housing 111, a first spacer 112, a second spacer 113, a first piezoelectric ceramic 114, a second piezoelectric ceramic 115 and a third piezoelectric ceramic 116, the three piezoelectric ceramics are bonded together and placed in the diamond-shaped housing together with the two spacers, and a certain pre-tightening force is applied to the piezoelectric ceramics by deformation of the diamond-shaped housing.
The structural schematic diagram of the supporting seat 1 is shown in fig. 8 and 9, four drivers are mounted on concave surfaces on two planes of the central supporting seat through four screws M3, and the positions of the ceramic drivers are limited through the four concave surfaces.
The threaded projecting ends of the first rigid rod 6 and the second rigid rod 7 are fixed to the first actuator 2 and the third actuator 4, respectively. The four flexible hinges are sequentially connected to the second driver 3, the fourth driver 5, the first rigid rod 6 and the second rigid rod 7 through threads. The flexible sheet 12 is positioned between the support seat 1 and the adapter plate 13, and the flexible sheet 12 and the support seat are connected together through screws. Four through holes symmetrically distributed on the adapter plate 13 respectively penetrate through the other ends of the four flexible hinges and are locked through nuts. As shown in fig. 5, fixed point A, C is defined to constitute the X-axis and fixed point B, D constitutes the Y-axis. The adapter plate 13 is located between the rotating flexible sheet 12 and the reflector 14 and is fixed together by means of outer hexagonal screws 15.
The invention provides a working process of a light path pointing precision adjusting device, which comprises the following steps:
the light path direction precise adjusting device is placed in an optical system, a reflecting mirror 14 of a light path aligning device is arranged, a light path passes through the reflecting mirror, and then is reflected back to a certain direction according to the light reflection principle, and when the reflected light path has certain tiny deviation from the required ideal light path, the direction adjusting device needs to be precisely adjusted in a two-dimensional mode.
The piezoelectric ceramic is an information functional material capable of interchanging mechanical energy and electric energy, and can be deformed differently when different voltages are applied to the piezoelectric ceramic, as shown in fig. 7, which is a schematic diagram of the displacement change of a single actuator, when the piezoelectric ceramic is appliedAfter a certain voltage is applied, the two ends of the piezoelectric ceramic can generate a displacement of s1Is deformed and acts on the rhombic shell 111, and the rhombic shell 111 generates 2s in the horizontal direction1The displacement change can cause the displacement change of s in the vertical direction, wherein s is approximately equal to (6-10) × 2s1. Namely, the displacement magnification of the rhombic shell is 6 to 10 times.
Two-dimensional adjustment of the device is defined as X and Y directions, with the long axis corresponding to the mirror 14 being the X axis and the short axis being the Y axis, as shown in fig. 1. The support point corresponding to the X-axis direction is A, C points and the support point corresponding to the Y-axis direction is B, D points, as shown in fig. 5. When the optical path adjustment needs to deflect the reflecting mirror along the X axis, only B, D points are required to be driven, namely, the first driver 2 and the third driver 4 corresponding to the supporting point B, D points are driven. The different displacement changes of the support point B, D can be caused by adjusting the voltage of the piezoelectric ceramic, so that the reflector 14 can be deflected along the X-axis, and similarly, if the reflector is deflected along the Y-axis, only A, C points need to be driven. The light path precision adjusting device can also adjust the voltage corresponding to the four diamond drivers simultaneously, so that the displacement change of the supporting point A, B, C, D is different, and the two-dimensional adjustment of the reflector can be realized.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011251005.3A CN112327503B (en) | 2020-11-11 | 2020-11-11 | An optical path pointing precision adjustment device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011251005.3A CN112327503B (en) | 2020-11-11 | 2020-11-11 | An optical path pointing precision adjustment device |
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| CN112327503A true CN112327503A (en) | 2021-02-05 |
| CN112327503B CN112327503B (en) | 2022-07-08 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113189737A (en) * | 2021-04-27 | 2021-07-30 | 重庆大学 | Slide rail assembled composite control type quick reflector |
| CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113189737A (en) * | 2021-04-27 | 2021-07-30 | 重庆大学 | Slide rail assembled composite control type quick reflector |
| CN113189737B (en) * | 2021-04-27 | 2022-12-30 | 重庆大学 | Slide rail assembled composite control type quick reflector |
| CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
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