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CN112292627A - 远心镜头和激光加工设备 - Google Patents

远心镜头和激光加工设备 Download PDF

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Publication number
CN112292627A
CN112292627A CN201880094741.7A CN201880094741A CN112292627A CN 112292627 A CN112292627 A CN 112292627A CN 201880094741 A CN201880094741 A CN 201880094741A CN 112292627 A CN112292627 A CN 112292627A
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China
Prior art keywords
lens
curved surface
telecentric
telecentric lens
optical axis
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CN201880094741.7A
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CN112292627B (zh
Inventor
陈玉庆
周朝明
彭金明
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)

Abstract

一种用于紫外激光的远心镜头，包括沿光线的入射方向依次排列的第一透镜、第二透镜、第三透镜、第四透镜和第五透镜，第一透镜为双凹负透镜，第二透镜为弯月负透镜，第三透镜为弯月正透镜，第四透镜为平凸正透镜，第五透镜为平凸正透镜，远心镜头的焦距为254mm，允许公差为10％，上偏差为+5％，下偏差为‑5％，视场角为42°。

Description

PCT国内申请，说明书已公开。

Claims (10)

  1. PCT国内申请，权利要求书已公开。
CN201880094741.7A 2018-07-11 2018-07-11 远心镜头和激光加工设备 Active CN112292627B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/095233 WO2020010538A1 (zh) 2018-07-11 2018-07-11 远心镜头和激光加工设备

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CN112292627A true CN112292627A (zh) 2021-01-29
CN112292627B CN112292627B (zh) 2022-07-15

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WO (1) WO2020010538A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112817128A (zh) * 2021-02-01 2021-05-18 嘉兴谱鉴精密仪器有限公司 大孔径且低畸变的F-theta紫外场镜装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112558274B (zh) * 2020-12-15 2025-03-11 江门英讯通光电科技有限公司 一种远心激光场镜镜头及其激光扫描系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4189211A (en) * 1978-01-03 1980-02-19 Kollmorgen Corporation Wide angle telecentric projection lens assembly
JP2005258336A (ja) * 2004-03-15 2005-09-22 Nikon Corp レーザ加工用光学系及びこれを用いたレーザ加工装置
CN206696510U (zh) * 2017-03-08 2017-12-01 上海仪万光电科技有限公司 一种紫外激光远心F‑theta扫描场镜

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07287163A (ja) * 1994-04-19 1995-10-31 Nikon Corp テレセントリックｆθレンズ
DE202013006369U1 (de) * 2013-07-16 2013-09-03 Jenoptik Optical Systems Gmbh F-Theta-Objektiv
US10197777B2 (en) * 2014-08-29 2019-02-05 Han's Laser Technology Industry Group Co., Ltd. Optical lens
CN104317034B (zh) * 2014-09-10 2017-04-19 中国电子科技集团公司第四十五研究所 f‑theta光学镜头

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4189211A (en) * 1978-01-03 1980-02-19 Kollmorgen Corporation Wide angle telecentric projection lens assembly
JP2005258336A (ja) * 2004-03-15 2005-09-22 Nikon Corp レーザ加工用光学系及びこれを用いたレーザ加工装置
CN206696510U (zh) * 2017-03-08 2017-12-01 上海仪万光电科技有限公司 一种紫外激光远心F‑theta扫描场镜

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112817128A (zh) * 2021-02-01 2021-05-18 嘉兴谱鉴精密仪器有限公司 大孔径且低畸变的F-theta紫外场镜装置

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WO2020010538A1 (zh) 2020-01-16
CN112292627B (zh) 2022-07-15

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