CN112271053B - Gravity compensation device - Google Patents
Gravity compensation deviceInfo
- Publication number
- CN112271053B CN112271053B CN202011140862.6A CN202011140862A CN112271053B CN 112271053 B CN112271053 B CN 112271053B CN 202011140862 A CN202011140862 A CN 202011140862A CN 112271053 B CN112271053 B CN 112271053B
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- permanent magnet
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- gravity compensation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0231—Magnetic circuits with PM for power or force generation
- H01F7/0236—Magnetic suspension or levitation
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
本发明提供一种重力补偿装置，涉及超精密加工及测量技术领域。该重力补偿装置包括动子模块和定子模块，动子模块包括多个环形的动子永磁铁，多个动子永磁铁沿其轴向叠摞排布，每相邻两个所述动子永磁铁为一组，至少一组的两个定动子永磁铁之间夹设有调节挡件，调节挡件用于调节相应两个动子永磁铁的间距；定子模块包括围设于动子模块的定子永磁铁，且定子永磁铁与动子永磁铁沿径向间隙设置；定子永磁铁和动子永磁铁相互作用形成沿轴向向上的重力补偿力。该重力补偿装置通过调节动子永磁铁和调节挡件的数目以及调节挡件的厚度，实现重力补偿力大小的调节，使得重力补偿装置的适用范围广，且调节便捷、成本低。
This invention provides a gravity compensation device, relating to the field of ultra-precision machining and measurement technology. The gravity compensation device includes a moving element module and a stator module. The moving element module includes multiple annular moving permanent magnets stacked along its axial direction, with each pair of adjacent moving permanent magnets forming a group. An adjusting stop is sandwiched between at least two moving permanent magnets in each group, used to adjust the spacing between the corresponding two moving permanent magnets. The stator module includes stator permanent magnets surrounding the moving element module, with the stator and moving permanent magnets arranged radially with a gap. The interaction between the stator and moving permanent magnets generates an upward gravity compensation force along the axial direction. This gravity compensation device adjusts the magnitude of the gravity compensation force by adjusting the number of moving permanent magnets and adjusting stops, as well as the thickness of the adjusting stops. This makes the gravity compensation device widely applicable, convenient to adjust, and low in cost.
Description
Technical Field
The invention relates to the technical field of ultra-precise machining and measurement, in particular to a gravity compensation device.
Background
Along with the continuous improvement of the integration level of integrated circuit devices, the precision requirements on a workbench are continuously improved, such as photoetching equipment, film thickness detection equipment and the like, in order to reduce the adverse effects of vibration and the like caused by mechanical contact of the workbench, the conventional workbench can carry out non-contact support through a magnetic levitation gravity compensation device, however, the conventional magnetic levitation gravity compensation device can only be suitable for carriers with specific specifications, and has the advantages of small bearing range and poor applicability.
Disclosure of Invention
The invention aims to provide a gravity compensation device so as to solve the technical problems that the existing magnetic levitation gravity compensation device is only applicable to bearing objects with specific specifications, and has small bearing range and poor applicability.
In order to solve the problems, the invention provides a gravity compensation device which comprises a rotor module and a stator module, wherein the rotor module comprises a plurality of annular rotor permanent magnets, the rotor permanent magnets are axially stacked and distributed, every two adjacent rotor permanent magnets are in a group, an adjusting baffle piece is clamped between at least two rotor permanent magnets in a group, the adjusting baffle piece is used for adjusting the distance between the two corresponding rotor permanent magnets, the stator module comprises a stator permanent magnet which is enclosed in the rotor module, the stator permanent magnet and the rotor permanent magnet are arranged along a radial clearance, and the stator permanent magnet and the rotor permanent magnet interact to form gravity compensation force upwards along the axial direction.
Optionally, the magnetizing directions of the mover permanent magnets are axial magnetizing and consistent, the magnetizing directions of the stator permanent magnets are radial magnetizing, and the magnetic poles of the inner side walls of the stator permanent magnets are the same as the magnetic poles of the top wall of the mover permanent magnets.
Optionally, the rotor module further comprises a mandrel and a bearing table, the adjusting baffle piece comprises an adjusting gasket, the rotor permanent magnet and the adjusting gasket are sleeved on the mandrel to form a driving body, the top end of the driving body is connected with the bearing table, the bottom end of the mandrel is provided with a baffle piece, and the radial size of the baffle piece is larger than the inner diameter of the rotor permanent magnet.
Optionally, at least one of the bearing table and the baffle member is detachably fixedly connected with the mandrel.
Optionally, the stator module further comprises a base, an annular protection cylinder is fixedly arranged on the top surface of the base, an accommodating cavity is formed in the protection cylinder, the rotor permanent magnet is located in the accommodating cavity, an annular cavity is formed in the inner portion of the cylinder wall of the protection cylinder along the circumferential direction of the rotor permanent magnet, and the stator permanent magnet is accommodated in the cavity along the circumferential direction of the stator permanent magnet.
Optionally, the protection section of thick bamboo includes the interior fender piece and encloses and locate the peripheral fender piece in the interior fender piece outside, the interior fender piece includes interior side wall portion and encloses and locate the bottom of interior side wall portion outside encloses, the peripheral fender piece includes the outer side wall portion and encloses and locate the inboard top of outside side wall portion encloses, the inside wall of top enclose with the inboard side wall portion is connected, the bottom of outside side wall portion with the bottom is enclosed the portion and is connected, interior fender piece with the peripheral fender piece encloses jointly and becomes the cavity.
Optionally, the gravity compensation device further comprises an actuation coil, and the actuation coil is accommodated in the cavity along the circumferential direction.
Optionally, the inside surrounding part, the bottom surrounding part, the outside surrounding part and the top surrounding part are all provided with cooling liquid channels along the circumference of the inside of at least one, and the cooling liquid channels are used for circulating cooling liquid to cool the actuating coil.
Optionally, the inner surrounding part comprises an inner cylinder body and a first side surrounding plate body surrounding the outer side of the inner cylinder body, the first side surrounding plate body and the bottom surrounding part are integrally formed, one of the outer side wall of the inner cylinder body and the inner side wall of the first side surrounding plate body is provided with a communication groove along the circumferential direction, and the communication groove and the other one jointly enclose the cooling liquid channel;
And/or, the outside surrounding part comprises an outer cylinder body and a second side surrounding plate body which is arranged outside the outer cylinder body in a surrounding mode, the outer cylinder body and the top surrounding part are integrally formed, one of the outer side wall of the outer cylinder body and the inner side wall of the second side surrounding plate body is provided with a communication groove along the circumferential direction of the outer side wall of the outer cylinder body, and the communication groove and the other are jointly surrounded to form the cooling liquid channel.
Optionally, the rotor module further comprises a bearing table, the stator module further comprises a base, the rotor permanent magnets and the magnetic compensation structures formed by the stator permanent magnets are multiple groups, the multiple groups of the magnetic compensation structures are distributed between the bearing table and the base in a dispersed manner, the multiple groups of the rotor permanent magnets of the magnetic compensation structures are fixedly arranged at the bottom of the bearing table, and the stator permanent magnets are fixedly arranged at the top of the base.
According to the gravity compensation device provided by the invention, when the gravity compensation needs to be carried out on the objects to be supported with different weights, the number of the rotor permanent magnets, the number of the adjusting baffle pieces and the thickness of the adjusting baffle pieces can be adjusted, and the gravity compensation force generated by the coupling of the first magnetic field and the second magnetic field is equal to the weight of the changed objects to be supported by changing the first magnetic field of the rotor module, so that the application range of the gravity compensation device is enlarged, and the gravity compensation on the objects to be supported with different specifications is realized. The gravity compensation device has wide application range, convenient adjustment and low cost.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a gravity compensation device according to the present invention;
FIG. 2 is an exploded view of the gravity compensation device provided by the present invention;
FIG. 3 is a partial axial cross-sectional view of the gravity compensation device provided by the invention, wherein the number of the mover permanent magnets is two;
FIG. 4 is a schematic diagram showing the distribution of first magnetic poles of the mover permanent magnet and the stator permanent magnet in the gravity compensation device according to the present invention;
FIG. 5 is a schematic diagram showing the distribution of the second magnetic poles of the mover permanent magnet and the stator permanent magnet in the gravity compensation device according to the present invention;
Fig. 6 is a magnetic force line distribution diagram of the gravity compensation device provided by the invention when the electric coil is electrified.
Reference numerals illustrate:
10-rotor module, 20-stator module, 100-rotor permanent magnet, 200-adjusting gasket, 300-mandrel, 310-baffle, 400-bearing table, 500-stator permanent magnet, 600-base, 700-protection cylinder, 711-inner circumference, 711 a-inner cylinder, 711 b-first side wall plate, 712-bottom circumference, 721-outer circumference, 721 a-outer cylinder, 721 b-second side wall plate, 721 c-fixing edge, 722-top circumference, 730-containing cavity, 740-cavity, 750-cooling liquid channel and 800-actuating coil.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The embodiment provides a gravity compensation device, as shown in fig. 1-3, comprising a rotor module 10 and a stator module 20, wherein the rotor module 10 comprises a plurality of annular rotor permanent magnets 100, the rotor permanent magnets 100 are axially stacked and arranged, every two adjacent rotor permanent magnets 100 are in a group, an adjusting baffle is clamped between at least one group of two stator permanent magnets 100 and is used for adjusting the distance between the two corresponding rotor permanent magnets 100, the stator module 20 comprises a stator permanent magnet 500 enclosed in the rotor module 10, the stator permanent magnet 500 and the rotor permanent magnet 100 are arranged in a radial gap, and the stator permanent magnet 500 and the rotor permanent magnet 100 interact to form a gravity compensation force upwards along the axial direction.
The gravity compensation device provided by the embodiment comprises a movable sub-module 10 capable of generating a first magnetic field and moving, and a fixed stator module 20 capable of generating a second magnetic field, wherein the first magnetic field and the second magnetic field interact in the same space to generate acting force which is approximately unchanged in size and upward in the axial direction on the sub-module 10, the acting force can serve as the gravity compensation force of the sub-module 10 for supporting a piece to be supported, and an adjusting baffle is arranged between one group or a plurality of groups of two adjacent sub-permanent magnets 100 in the plurality of sub-module 10, and the adjusting baffle adjusts the distribution of magnetic force lines in the first magnetic field formed by the plurality of sub-permanent magnets 100 by adjusting the distance between the sub-permanent magnets 100, so that the size of the gravity compensation force generated by the interaction of the first magnetic field and the second magnetic field is changed.
When the vibration support device is used, the number of the rotor permanent magnets 100 can be selected according to the magnetic field properties (magnetic field intensity, magnetic force line distribution and the like) of the rotor permanent magnets 100, the magnetic field properties of the rotor permanent magnets 100 and the weight level of a piece to be supported, then the number of the adjusting baffle pieces is determined according to the weight of the piece to be supported, the thickness of the adjusting baffle pieces between the rotor permanent magnets 100 is determined, the distance between the rotor permanent magnets 100 is correspondingly determined, and then the first magnetic field generated by the rotor permanent magnets 100 and the adjusting baffle pieces forming the rotor module 10 is determined, the rotor module 10 and the stator module 20 are sleeved, the first magnetic field generated by the rotor module 10 and the second magnetic field generated by the stator module 20 are coupled to form a gravity compensation force for the axial upward direction of the rotor module 10, the piece to be supported is placed on the top of the rotor module 10, the gravity compensation force is equal to the gravity of the piece to be supported, so that the gravity compensation device is in a suspension state between the rotor module 10 and the stator module 20, accordingly, the rigidity upwards formed in the axial direction is approximately zero, the rigidity formed between the rotor module 10 and the stator module 20 is not rigidly connected, the corresponding rigidity is approximately zero, the influence on the work table for fixing the stator module to the piece to be supported, and the vibration stability of the corresponding support device is ensured, and the vibration stability is ensured.
When the gravity compensation needs to be carried out on the objects to be supported with different weights, the number of the adjusting baffle pieces and the thickness of the adjusting baffle pieces can be adjusted, and the gravity compensation force generated by the coupling of the first magnetic field and the second magnetic field is equal to the weight of the changed objects to be supported by changing the first magnetic field of the sub-module 10, so that the application range of the gravity compensation device is enlarged, and the gravity compensation on the objects to be supported with different specifications is realized. Of course, when the weight of the object to be supported is greatly changed, the number of the mover permanent magnets 100 of the same specification can be increased or decreased to realize the large-range adjustment of the gravity compensation force, and then the adjustment of the distance between the mover permanent magnets 100 by selecting the proper number and thickness of the adjustment stoppers can realize the small-range adjustment of the gravity compensation force. Compared with the prior art, when the weight of the to-be-supported piece changes, the weight compensation device with different specifications is required to be selected, the application range of the weight compensation device is single, or when the weight of the to-be-supported piece changes within a small range, the mover permanent magnet 100 with different specifications is required to be selected to be matched for realizing the small-range adjustment of the weight compensation force, and the replaced mover permanent magnet 100 can only be abandoned and can not be reused after repair, so that the time and the cost are increased simultaneously by reprocessing, and the waste is caused. The gravity compensation device can select the mover permanent magnet 100 with the same specification to realize large-scale adjustment of gravity compensation force, and can realize small-scale adjustment of the gravity compensation force through the selection of the number and the thickness of the adjusting baffle pieces, so that the gravity compensation device has wide application range, convenient adjustment and low cost.
Of course, the mover permanent magnet 100 in the gravity compensation device may have different specifications, and small-range adjustment of the gravity compensation force may be realized by adjusting the number and thickness of the adjusting blocks. Specifically, in the mover module 10, the number of the mover permanent magnets 100 may be two, three, four, or the like, as needed.
Specifically, in this embodiment, as shown in fig. 4 and 5, the magnetizing directions of the mover permanent magnets 100 may be all axial magnetizing and the magnetizing directions are identical, the magnetizing directions of the stator permanent magnets 500 are radial magnetizing, and the magnetic poles of the inner wall of the stator permanent magnets 500 are the same as the magnetic poles of the top wall of the mover permanent magnets 100. The magnetizing directions of the plurality of mover permanent magnets 100 in the mover module 10 are consistent, so that the magnetic field coupling formed by the plurality of mover permanent magnets 100 is enhanced, a first magnetic field with higher consistency and magnetic field strength is formed, the second magnetic field generated by the stator permanent magnet 500 of the stator module 20 interacts with the first magnetic field to form a gravity compensation force for the axial direction of the mover module 10, and the rigidity acting force between the stator permanent magnet 500 and the mover permanent magnet 100 along the radial direction and the tangential direction is approximately zero, and accordingly, the vibration force transmitted to the mover permanent magnet 100 through the stator permanent magnet 500 and further transmitted to the workbench and a to-be-supported piece on the workbench is approximately zero, so that the stability of the to-be-supported piece is ensured, and the position accuracy of the to-be-supported piece is ensured.
Specifically, as shown in fig. 4, the number of the mover permanent magnets 100 in the mover module 10 is two, the two mover permanent magnets 100 are stacked and spaced along the axial direction (the adjusting block between the two mover permanent magnets 100 is not shown), the top ends of the two mover permanent magnets 100 are all S poles, the bottom ends are all N poles, the inner ring wall of the stator permanent magnet 500 of the stator module 20 is S pole, and the outer ring wall is N pole. Or, as shown in fig. 5, the top ends of the two mover permanent magnets 100 are both N poles, the bottom ends are both S poles, the inner ring wall of the stator permanent magnet 500 of the stator module 20 is the N pole, and the outer ring wall is the S pole.
Optionally, in this embodiment, as shown in fig. 3, the mover module 10 may further include a mandrel 300 and a bearing platform 400, the adjusting blocking member includes an adjusting washer 200, the mover permanent magnet 100 and the adjusting washer 200 are both sleeved on the mandrel 300 to form a driving body, the top end of the driving body is connected with the bearing platform 400, the bottom end of the mandrel 300 is provided with a blocking member 310, and the radial dimension of the blocking member 310 is greater than the ring inner diameter of the mover permanent magnet 100. The movable element permanent magnet 100 and the adjusting baffle member in the movable element module 10 are in a specific arrangement mode, the mandrel 300 is used as an installation base body to fix the movable element permanent magnet 100 and the adjusting washer 200 which are axially stacked, the baffle member 310 is arranged at the bottom to limit the movable element permanent magnet 100 on the mandrel to prevent the movable element permanent magnet 100 from falling off from the bottom end of the mandrel 300, the movable element permanent magnet 100, the adjusting washer 200 and the mandrel 300 jointly form a driving body, the top end of the driving body is connected with the bearing table 400, the bearing table 400 is used for bearing a piece to be supported, the second magnetic field is coupled with the first magnetic field to generate an axial upward gravity compensation force on the driving body and the bearing table 400, so that gravity compensation of the piece to be supported is achieved, the mandrel 300 and the bearing table 400 can limit and fix the stacking position of the movable element permanent magnet 100 and the adjusting washer 200, and the bearing table 400 bears the piece to be supported with higher stability.
In this embodiment, the adjustable replacement of the adjusting washer 200 may be performed by detachably fixing at least one of the bearing table 400 and the spacer 310 to the mandrel 300, including three cases, in which the mandrel 300 is detached from the bearing table 400 when the number of the mover permanent magnets 100, the number of the adjusting washers 200 and the thickness of the adjusting washers 200 need to be adjusted, the mandrel 300 is adjusted or replaced by the length of the mandrel 300 according to the required length of the mandrel 300, then the determined mover permanent magnet 100 and the adjusting washer 200 are sleeved, the top end of the mandrel 300 is connected to the bearing table 400 again, in which the spacer 310 is detachably fixed to the mandrel 300, in which the length of the mandrel 300 is adjusted and the determined mover permanent magnet 100 and the adjusting washer 200 are sleeved, in which the spacer 310 is connected to the mandrel 300 again, in which the top end of the mandrel 300 is detachably fixed to the bearing table 400, and the bottom end of the mandrel 300 is detachably fixed to the spacer 310. The length of the mandrel 300 may be adjusted, the mandrel 300 may be replaced, the length of the shaft body of the mandrel 300 may be adjusted, or the connection position between the barrier 310 and the bottom end of the mandrel 300 may be adjusted, so as to achieve the length adjustment of the mandrel 300, for example, the barrier 310 is screwed to the bottom end of the mandrel 300.
For the second form, the top end of the mandrel 300 may be fixedly connected with the bearing platform 400 or integrally formed, as shown in fig. 3, the top mover permanent magnet 100 may be fixedly connected with the mandrel 300 and detachably connected with the bearing platform 400, and specifically, the top mover permanent magnet 100 may be fixedly connected with the mandrel 300 and the bearing platform 400 by gluing.
In this embodiment, as shown in fig. 2 and 3, the stator module 20 may further include a base 600, an annular protection tube 700 is fixedly disposed on the top surface of the base 600, a receiving cavity 730 is formed in the ring of the protection tube 700, the rotor permanent magnet 100 is located in the receiving cavity 730, an annular cavity 740 is disposed in the inner wall of the protection tube 700 along the circumferential direction thereof, and the stator permanent magnet 500 is circumferentially accommodated in the cavity 740. The base 600 can be used as a bottom mounting table for mounting the stator permanent magnet 500 and other parts and for connecting with a workbench and the like, the protection cylinder 700 fixedly arranged on the top surface of the base 600 is used for fixing the stator permanent magnet 500 in the protection cylinder to improve the matching position precision of the stator permanent magnet 500 and the rotor module 10, the stator permanent magnet 500 is positioned in the cavity 740 in the protection cylinder 700, and the protection cylinder 700 can perform barrier protection on the stator permanent magnet 500 to reduce damage to the stator permanent magnet 500 caused by external factors.
Specifically, in this embodiment, as shown in fig. 3, the protection cylinder 700 may include an inner peripheral member and an outer peripheral member surrounding the outer side of the inner peripheral member, the inner peripheral member includes an inner peripheral portion 711 and a bottom peripheral portion 712 surrounding the outer side of the inner peripheral portion 711, the outer peripheral member includes an outer peripheral portion 721 and a top peripheral portion 722 surrounding the inner side of the outer peripheral portion 721, the inner side wall of the top peripheral portion 722 is connected with the inner peripheral portion 711, the bottom end of the outer peripheral portion 721 is connected with the bottom peripheral portion 712, and the inner peripheral member and the outer peripheral member together enclose a cavity 740. The protection cylinder 700 is a specific form of the protection cylinder 700, the protection cylinder 700 comprises two relatively independent components, namely an inner surrounding baffle and an outer surrounding baffle, wherein the inner surrounding baffle is approximately L-shaped, the outer surrounding baffle is approximately L-shaped, the inner surrounding part 711 of the inner surrounding baffle is cylindrical during installation, the stator permanent magnet 500 can be sleeved outside the inner surrounding part 711, then the outer surrounding baffle and the inner surrounding baffle are assembled in a matched manner, the stator permanent magnet 500 is surrounded in a cavity 740 formed by the inner surrounding part and the outer surrounding baffle, during the installation process, the inner surrounding part 711 can guide and limit the installation of the stator permanent magnet 500, the inner surrounding baffle and the outer surrounding baffle are assembled, and the installation precision and the operation convenience of the stator permanent magnet 500 are high.
In this embodiment, as shown in fig. 3, the gravity compensation device may further include an actuating coil 800, where the actuating coil 800 is circumferentially accommodated in the cavity 740. When the actuating coil 800 is in the power-off state, the sub-module 10 and the stator module 20 together form a stable magnetic field to correspondingly form a stable gravity compensation force, as shown in fig. 6, when the axial supporting position of the sub-module 10 needs to be adjusted, the actuating coil 800 can be energized, the third magnetic field generated by the actuating coil 800 is coupled with the first magnetic field to generate an axial upward or downward acting force on the sub-module 10 (also can be understood that after the first magnetic field, the second magnetic field and the third magnetic field are coupled, the formed axial acting force on the sub-module 10 is greater than or less than the gravity compensation force formed by coupling the first magnetic field and the second magnetic field), the sub-module 10 moves upwards or downwards along the axial direction under the action of acting force, the gravity compensation force and self gravity until reaching a target position, the energizing of the actuating coil 800 is stopped, the sub-module 10 is in the stable state again under the action of the stator module 20, thereby realizing the axial position adjustment of the piece to be supported, and further improving the applicability of the gravity compensation device, and preferably determining that the cylindrical body formed by the plurality of the sub-permanent magnets 100 and the cylindrical body formed by the stator permanent magnet 500 and the central horizontal section formed by the stator permanent magnet 500 are coplanar as the initial module 10. The protective cylinder 700 can position and protect the actuating coil 800 therein.
In this embodiment, a cooling fluid channel 750 is provided in the periphery of at least one of the inner wall portion 711, the bottom wall portion 712, the outer wall portion 721, and the top wall portion 722, and the cooling fluid channel 750 is used for circulating cooling fluid to cool the actuation coil 800. The actuating coil 800 can generate heat in the process of being electrified, the cooling liquid channel 750 is provided with a water inlet and a water outlet, an external water supply device can be communicated with the water inlet, cooling liquid is filled into the cooling liquid channel 750, and the cooling liquid takes away the heat generated by the actuating coil 800 in the process of flowing in the cooling liquid channel 750, so that the actuating coil 800 is cooled, normal use of the actuating coil 800 is ensured, and adverse effects on the position accuracy of a to-be-supported object caused by a high-temperature environment are reduced. Specifically, the cooling fluid channel 750 may be spirally wound around the protection cylinder 700 or a plurality of annular channels communicating with the water inlet and the water outlet, and preferably, the cooling fluid channel 750 may be provided in each of the inner side wall 711, the bottom wall 712, the outer side wall 721, and the top wall 722.
Specifically, in this embodiment, as shown in fig. 3, the inner surrounding portion 711 may include an inner cylinder 711a and a first side surrounding plate 711b surrounding the outer side of the inner cylinder 711a, and the first side surrounding plate 711b is integrally formed with the bottom surrounding portion 712, and one of the outer side wall of the inner cylinder 711a and the inner side wall of the first side surrounding plate 711b is provided with a communication groove along its circumference, and the communication groove and the other together enclose the cooling liquid channel 750. Here, in a specific assembly form of the inner side wall part 711, the accommodating cavity 730 for accommodating the mover module 10 is formed inside the inner cylinder body 711a, and when in machining, a communication groove can be machined on the outer side wall of the inner cylinder body 711a or the inner side wall of the first side wall plate body 711b in an exposed state, and then the inner cylinder body 711a and the first side wall plate body 711b are glued or screwed to form the inner side wall part 711, wherein the first side wall plate body 711b and the bottom wall part 712 are integrally formed, so that not only the operation convenience of assembling the inner wall part can be improved, but also the connection firmness of the bottom wall part 712 and the inner side wall part 711 can be improved.
Alternatively, in the present embodiment, as shown in fig. 3, the outer surrounding portion 721 may include an outer cylinder 721a and a second side surrounding plate 721b surrounding the outer cylinder 721a, and the outer cylinder 721a is integrally formed with the top surrounding portion 722, and one of the outer side wall of the outer cylinder 721a and the inner side wall of the second side surrounding plate 721b is provided with a communication groove along the circumferential direction thereof, which together with the other forms the cooling liquid passage 750. Here, in a specific assembly form of the outer side wall portion 721, during machining, a communication groove may be machined in the outer side wall of the outer cylinder 721a or the inner side wall of the second side wall plate 721b in an exposed state, and then the outer cylinder 721a and the second side wall plate 721b are glued or screwed to form the outer side wall portion 721, wherein the outer cylinder 721a and the top wall portion 722 are integrally formed, so that not only the operation convenience of assembling the outer side wall member but also the connection firmness of the top wall portion 722 and the outer side wall portion 721 can be improved.
Preferably, as shown in fig. 1 and 3, the bottom portion 712 may extend out of the outer cylinder 721a along a radial direction thereof, and the bottom end outer side of the second side wall 721b may further be provided with a fixing edge 721c along a circumferential direction thereof, the fixing edge 721c may be connected with a portion of the bottom portion 712 extending out of the outer cylinder 721a to improve connection firmness of the two, and in addition, the fixing edge 721c and the portion of the bottom portion 712 extending out of the outer cylinder 721a may increase a base area of the protection cylinder 700 to improve stability of mounting the protection cylinder 700 on the base 600.
In this embodiment, the rotor module 10 may further include a carrying platform 400, the stator module 20 may further include a base 600, the magnetic compensation structures formed by the rotor permanent magnets and the stator permanent magnets may be multiple groups, the multiple groups of magnetic compensation structures are distributed between the carrying platform 400 and the base 600, the rotor permanent magnets 100 of the multiple groups of magnetic compensation structures are all fixedly arranged at the bottom of the carrying platform 400, and the stator permanent magnets 500 are all fixedly arranged at the top of the base 600. When a plurality of groups of magnetic compensation structures are arranged, the resultant force of the axial upward supporting forces formed by the plurality of groups of magnetic compensation structures is used as gravity compensation force, the plurality of supporting forces support different positions of the bearing table 400, the supporting stability is higher, the gravity compensation stability of a piece to be supported is correspondingly higher, in addition, when one part of the plurality of groups of magnetic compensation structures is subjected to axial position adjustment, or the plurality of groups of magnetic compensation structures are subjected to axial position adjustment, but the position adjustment is inconsistent, the plurality of groups of magnetic compensation structures can drive the bearing table 400 to deflect in the direction, so that the adjustment range of the gravity compensation device is improved, and in addition, the adjustment range of the gravity compensation force can be further enlarged under the combined action of the plurality of groups of magnetic compensation structures, so that the application range of the gravity compensation device is further improved. Specifically, as shown in fig. 1 and 2, the magnetic compensation structures may be three groups, and the three groups of magnetic compensation structures are arranged between the carrying platform 400 and the base 600 in a regular triangle, and when the axial positions of two groups of magnetic compensation structures are adjusted upwards or unchanged and the axial positions of the other group of magnetic compensation structures are adjusted downwards, the carrying platform 400 is correspondingly deflected angularly, and of course, the above operation is only an example, and the axial positions of the multiple groups of magnetic compensation structures may be adjusted according to actual requirements to realize the angular deflection adjustment of the carrying platform 400, and in addition, the magnetic compensation structures may be two groups, four groups, and so on.
Specifically, the gravity compensation device can be used for gravity compensation of optical elements, masks and the like in a photoetching machine or other elements with high requirements on position accuracy and vibration influence.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (6)
1. The gravity compensation device is characterized by comprising a rotor module (10) and a stator module (20), wherein the rotor module (10) comprises a plurality of annular rotor permanent magnets (100), the rotor permanent magnets (100) are axially stacked and arranged, every two adjacent rotor permanent magnets (100) are in a group, an adjusting baffle is clamped between at least two rotor permanent magnets (100) of one group and is used for adjusting the distance between the two corresponding rotor permanent magnets (100), the stator module (20) comprises a stator permanent magnet (500) surrounding the rotor module (10), the stator permanent magnet (500) and the rotor permanent magnets (100) are arranged in a radial gap, and the stator permanent magnet (500) and the rotor permanent magnet (100) interact to form gravity compensation force upwards along the axial direction;
The rotor module (10) further comprises a mandrel (300) with adjustable shaft body length and a bearing table (400), the adjusting baffle piece comprises an adjusting gasket (200), the rotor permanent magnet (100) and the adjusting gasket (200) are sleeved on the mandrel (300) to form a driving body, the top end of the driving body is connected with the bearing table (400), the bottom end of the mandrel (300) is in threaded connection with a baffle piece (310), and the radial size of the baffle piece (310) is larger than the inner diameter of the rotor permanent magnet (100);
The stator module (20) further comprises a base (600), an annular protection barrel (700) is fixedly arranged on the top surface of the base (600), the protection barrel (700) comprises an inner surrounding baffle and a peripheral baffle arranged on the outer side of the inner surrounding baffle, the inner surrounding baffle comprises an inner surrounding portion (711) and a bottom surrounding portion (712) arranged on the outer side of the inner surrounding portion (711), the peripheral baffle comprises an outer surrounding portion (721) and a top surrounding portion (722) arranged on the inner side of the outer surrounding portion (721), the inner side wall of the top surrounding portion (722) is connected with the inner surrounding portion (711), the bottom end of the outer surrounding portion (721) is connected with the bottom surrounding portion (712), a containing cavity (730) is formed in the ring of the inner surrounding portion (711), the inner surrounding baffle and the peripheral baffle jointly form a cavity (740), the rotor permanent magnet (100) is arranged in the containing cavity (730), and the stator permanent magnet (500) is contained in the cavity (740) along the circumferential direction.
2. The gravity compensation device according to claim 1, wherein the magnetizing direction of each mover permanent magnet (100) is axial magnetizing and the magnetizing directions are identical, the magnetizing direction of the stator permanent magnet (500) is radial magnetizing, and the magnetic pole of the inner ring wall of the stator permanent magnet (500) is identical to the magnetic pole of the top wall of the mover permanent magnet (100).
3. The gravity compensation device according to claim 1, further comprising an actuation coil (800), the actuation coil (800) being circumferentially housed within the cavity (740).
4. A gravity compensation device according to claim 3, characterized in that at least one of the inner peripheral part (711), the bottom peripheral part (712), the outer peripheral part (721) and the top peripheral part (722) is provided with a cooling liquid channel (750) along its circumference, said cooling liquid channel (750) being adapted to circulate a cooling liquid for cooling the actuation coil (800).
5. The gravity compensation device according to claim 4, wherein the inner surrounding part (711) comprises an inner cylinder body (711 a) and a first side surrounding plate body (711 b) surrounding the outer side of the inner cylinder body (711 a), the first side surrounding plate body (711 b) and the bottom surrounding part (712) are integrally formed, and one of the outer side wall of the inner cylinder body (711 a) and the inner side wall of the first side surrounding plate body (711 b) is provided with a communication groove along the circumferential direction thereof, and the communication groove and the other are jointly surrounded into the cooling liquid channel (750);
And/or, the outer surrounding part (721) comprises an outer cylinder (721 a) and a second side surrounding plate (721 b) surrounding the outer cylinder (721 a), the outer cylinder (721 a) and the top surrounding part (722) are integrally formed, one of the outer side wall of the outer cylinder (721 a) and the inner side wall of the second side surrounding plate (721 b) is provided with a communication groove along the circumferential direction, and the communication groove and the other jointly surround the cooling liquid channel (750).
6. The gravity compensation device according to claim 1 or 2, wherein the magnetic compensation structures formed by the mover permanent magnet (100) and the stator permanent magnet (500) are multiple groups, and the multiple groups of magnetic compensation structures are distributed between the bearing table (400) and the base (600).
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| CN202011140862.6A CN112271053B (en) | 2020-10-22 | 2020-10-22 | Gravity compensation device |
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| CN202011140862.6A CN112271053B (en) | 2020-10-22 | 2020-10-22 | Gravity compensation device |
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| CN115411906B (en) * | 2022-08-02 | 2024-06-04 | 清华大学 | Linear motor device and gravity compensation assembly thereof |
| CN116247973B (en) * | 2023-03-30 | 2023-09-29 | 哈尔滨工业大学 | A large levitation force magnetic levitation gravity compensator with separable dynamic and static forces |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1505067A (en) * | 2002-11-29 | 2004-06-16 | Asml | Magnetic actuator under piezoelectric control |
| CN102200689A (en) * | 2010-03-23 | 2011-09-28 | 上海微电子装备有限公司 | Hybrid maglev gravity compensation apparatus |
| CN110939683A (en) * | 2019-12-05 | 2020-03-31 | 哈尔滨工业大学 | Large load and low power consumption magnetic suspension vibration isolation platform |
| CN214152601U (en) * | 2020-10-22 | 2021-09-07 | 北京华卓精科科技股份有限公司 | Gravity compensation device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105988304B (en) * | 2015-02-28 | 2018-10-16 | 上海微电子装备（集团）股份有限公司 | A kind of adjustable magnetic buoyancy gravity compensator |
-
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- 2020-10-22 CN CN202011140862.6A patent/CN112271053B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1505067A (en) * | 2002-11-29 | 2004-06-16 | Asml | Magnetic actuator under piezoelectric control |
| CN102200689A (en) * | 2010-03-23 | 2011-09-28 | 上海微电子装备有限公司 | Hybrid maglev gravity compensation apparatus |
| CN110939683A (en) * | 2019-12-05 | 2020-03-31 | 哈尔滨工业大学 | Large load and low power consumption magnetic suspension vibration isolation platform |
| CN214152601U (en) * | 2020-10-22 | 2021-09-07 | 北京华卓精科科技股份有限公司 | Gravity compensation device |
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