CN112255758A - Device and method for realizing simultaneous focusing of screen and workpiece in deflection measurement - Google Patents
Device and method for realizing simultaneous focusing of screen and workpiece in deflection measurement Download PDFInfo
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- CN112255758A CN112255758A CN202011196294.1A CN202011196294A CN112255758A CN 112255758 A CN112255758 A CN 112255758A CN 202011196294 A CN202011196294 A CN 202011196294A CN 112255758 A CN112255758 A CN 112255758A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0187—Mechanical sequence of operations
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Abstract
The invention discloses a device and a method for realizing simultaneous focusing of a screen and a workpiece in deflection measurement, belonging to the field of precision manufacturing, wherein the device comprises a camera, a screen, a measured workpiece and a focusing mirror, the focusing mirror is a concave reflector, the focusing mirror is used for imaging the screen at the measured workpiece, and the positions of the camera, the measured workpiece, the focusing mirror and the screen are suitable for enabling a second image, reflected on the measured workpiece by the screen through the focusing mirror, to be reflected by the measured workpiece again to form a first image, and the first image is superposed with the measured workpiece so as to facilitate the camera to focus the screen and the measured workpiece simultaneously. The device has a simple structure and is convenient to use, and can overcome the difficulty of angle-position uncertainty of deflection measurement and overcome phase analysis errors caused by defocusing of a screen, thereby remarkably improving the measurement precision of a phase measurement deflection technique on a complex optical curved surface.
Description
Technical Field
The invention relates to the technical field of precision manufacturing, in particular to a device and a method for realizing simultaneous focusing of a screen and a workpiece in deflection measurement.
Background
In modern precision manufacturing, complex aspheric and free-form optical elements are widely applied, but surface shape quality measurement thereof presents a great problem in the field of precision engineering.
The principle of the deflectometry is that regular stripes are generated on a display screen, the stripes are deformed after being reflected by a measured surface, a CCD camera is used for shooting a deformation pattern, the surface gradient distribution of the measured surface can be calculated through geometric derivation, and the surface height is obtained through integration. In recent years, The measurement system has attracted attention because of its advantages of simple structure, accuracy up to nanoscale, range up to millimeter level, and 1000 times higher dynamic range than The interferometer, and can be used for measurement of complex curved surfaces [ made of Maidondo AV.
The deflection measurement is generally based on multi-step phase shift of screen stripes, and establishes an object-image correspondence relationship between each pixel in an acquired image and a screen pixel according to a demodulation phase of each pixel in the acquired image, so that the demodulation accuracy of each pixel in the image directly determines the measurement accuracy. Currently, the acquired image is generally in sharp focus on the workpiece to be detected, but this may cause the screen pattern to be out of focus relative to the camera, so the convolution effect introduced by the point spread function in the blurred imaging will cause the gray scale of the acquired image to be transformed, and thus cause a phase demodulation error, as shown in fig. 1; on the contrary, if the screen is clearly imaged in the camera, the detected workpiece is out of focus, the detection uncertainty of the measured position is increased, and the measurement uncertainty problem is a core factor [ Pavclicek P and Hausler G.int J Optomech 2014; 8:292-303].
Therefore, how to clearly image both the screen and the workpiece to be measured so as to overcome the contradiction between the measurement angle and the position uncertainty, and thus, improving the measurement accuracy of the complex curved surface is becoming a technical problem to be solved urgently.
Disclosure of Invention
Aiming at the problem that the imaging of a measured workpiece and a screen in a camera cannot be kept clear simultaneously in the deflection measurement in the prior art, the invention aims to provide a device and a method for realizing the simultaneous focusing of the screen and the workpiece in the deflection measurement.
In order to achieve the purpose, the technical scheme of the invention is as follows:
in one aspect, the invention provides a device for realizing simultaneous focusing of a screen and a workpiece in deflection measurement, which comprises a camera, the screen and the workpiece to be measured, and further comprises a focusing mirror, wherein the focusing mirror is a concave reflector, the focusing mirror is used for imaging the screen at the workpiece to be measured, the positions of the camera, the workpiece to be measured, the focusing mirror and the screen are suitable for enabling a second image, reflected on the workpiece to be measured by the screen through the focusing mirror, to be reflected into a first image through the workpiece to be measured again, and the first image is superposed with the workpiece to be measured so that the camera can focus the screen and the workpiece to be measured simultaneously.
In another aspect, the present invention further provides a method for realizing simultaneous focusing of a screen and a workpiece in deflection measurement, the method being realized based on a focusing mirror, the method comprising the following steps,
adjusting the focal length of the camera and the distance between the workpiece to be measured and the camera to enable the workpiece to be measured to be clearly imaged on an image surface of the camera, and enabling the whole caliber of the workpiece to be measured to be seen from the image surface of the camera;
selecting a concave reflector with a known curvature radius R as a focusing mirror, setting the central points of a screen, the focusing mirror, a workpiece to be measured and a camera as A, B, C and O respectively, and adjusting the positions of the screen and the focusing mirror to ensure that the included angle between the connection line of the point AB and the normal line at the point B of the focusing mirror, the included angle between the connection line of the point BC and the normal line at the point C of the workpiece to be measured and the included angle between the connection line of the point OC and the normal line at the point C of the workpiece to be measured.
And adjusting the distance between the screen and the focusing mirror relative to the workpiece to be measured, so that the second image of the screen, reflected on the workpiece to be measured through the focusing mirror, can be reflected out of the first image through the workpiece to be measured again, and the image of the first image in the camera is matched with the target surface size of the camera.
Further, the step of adjusting the distance between the screen and the focusing mirror relative to the workpiece to be measured to enable the second image of the screen reflected on the workpiece to be measured through the focusing mirror to be reflected into the first image through the workpiece to be measured again, and enabling the image of the first image in the camera to be matched with the size of the target surface of the camera comprises the steps of,
determining the distance L from the screen to the focusing lens along the optical axis1；
According to the curvature radius R of the focusing mirror and the formula
Determining the distance L between the workpiece to be measured and the focusing lens along the optical axis direction2；
Determining the distance S from the center of the camera target surface to the optical center of the camera along the optical axis2According to the focal length f of the camera lens and the formula
Determining the distance S between the center of the workpiece to be measured and the focusing lens along the optical axis direction1。
Preferably, the step of adjusting the focal length of the camera and the distance between the workpiece to be measured and the camera to enable the workpiece to be measured to be clearly imaged on the image plane of the camera comprises,
setting a label on a workpiece to be detected;
and adjusting the focal length of the camera and the distance between the workpiece to be measured and the camera to ensure that the label of the workpiece to be measured is clearly imaged on the image surface of the camera.
By adopting the technical scheme, the focusing lens is arranged, so that the camera does not directly focus and image the screen, but reflects the screen to the workpiece to be detected through the focusing lens, and the camera can focus the screen when focusing the workpiece to be detected; in addition, due to the fact that the position of the screen is adjusted, the second image of the screen, reflected on the workpiece to be detected through the focusing mirror, can be reflected to form the first image through the workpiece to be detected again, and on the basis that the coincidence of the first image and the workpiece to be detected is guaranteed, when the camera focuses on the workpiece to be detected, the original image of the screen can be truly reflected through the imaging of the screen in the camera, and the authenticity of the imaging is guaranteed.
Drawings
FIG. 1 is a schematic diagram of a point spread function for each point of an off-axis measurement screen in the prior art;
FIG. 2 is a schematic structural diagram according to a first embodiment of the present invention;
FIG. 3 is a flowchart of a method according to a second embodiment of the present invention;
FIG. 4 is a schematic diagram of the point spread function of the points on the simultaneous focusing measurement optical path screen according to the present invention.
In the figure, 1-camera, 2-screen, 3-workpiece to be measured and 4-focusing lens.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear", and the like indicate orientations or positional relationships based on structures shown in the drawings, and are only used for convenience in describing the present invention, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the technical scheme, the terms "first" and "second" are only used for referring to the same or similar structures or corresponding structures with similar functions, and are not used for ranking the importance of the structures, or comparing the sizes or other meanings.
In addition, unless expressly stated or limited otherwise, the terms "mounted" and "connected" are to be construed broadly, e.g., the connection may be a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two structures can be directly connected or indirectly connected through an intermediate medium, and the two structures can be communicated with each other. To those skilled in the art, the specific meanings of the above terms in the present invention can be understood in light of the present general concepts, in connection with the specific context of the scheme.
Example one
A device for realizing simultaneous focusing of a screen and a workpiece in deflection measurement is provided, and comprises a camera 1, the screen 2, a workpiece 3 to be measured and a focusing lens 4, as shown in FIG. 2.
Wherein the focusing mirror 4 is used for imaging the screen 2 at the workpiece 3 to be tested. In the present embodiment, the positions of the camera 1, the workpiece 3 to be measured, the focusing lens 4, and the screen 2 are configured to be suitable for: the second image (i.e. the image 2) reflected by the screen 2 on the workpiece 3 to be measured through the focusing mirror 4 can be reflected to form the first image (i.e. the image 1) through the workpiece 3 to be measured again, and the first image is overlapped with the workpiece 3 to be measured, so that the camera 1 can focus on the screen 2 and the workpiece 3 to be measured simultaneously, that is, when the camera 1 focuses on the workpiece 3 to be measured, the screen 2 can also be synchronously focused by the camera 1 through the image 1 reflected by the focusing mirror 4 and the workpiece 3 to be measured, and the problem that the camera 1 cannot focus on the screen 2 and the workpiece 3 to be measured simultaneously in the prior art is solved.
Specifically, in this embodiment, the focusing mirror 4 is a concave mirror, and the workpiece 3 to be measured is also a concave surface. On one hand, an included angle between a connecting line of the center of the screen 2 and the center of the focusing mirror 4 and a normal line at the center of the focusing mirror 4, an included angle between a connecting line of the center of the focusing mirror 4 and the center of the workpiece 3 to be measured and a normal line at the center of the workpiece 3 to be measured, and an included angle between a connecting line of the center of the workpiece 3 to be measured and the center of the camera 1 and a normal line at the center of the workpiece 3 to be measured are configured to be equal, as shown by an angle theta in; on the other hand, the distance L from the screen 2 to the focusing mirror 4 in the optical axis direction is arranged1Of focusing lens 4Radius of curvature R and distance L between the workpiece 3 to be measured and the focusing lens 4 in the optical axis direction2Satisfy the formula
Finally, the distance from the center of the camera target surface to the optical center of the camera along the optical axis is configured to be S2And the distance S from the center of the workpiece to be measured to the focusing lens along the optical axis direction1Is calculated according to the formula
Since the focal length f of the camera lens is known, another parameter value can be calculated to determine the position of each component.
Through the configuration of the three aspects, when in use, the parameters of the camera 1, the shape and the size of the workpiece 3 to be measured, the theta value and the L are determined1And L2One of them, S1And S2On the basis of one of the above, the device provided by the present embodiment can be arranged according to the above configuration.
That is, when the camera focuses on the workpiece to be measured, the second image of the screen reflected on the workpiece to be measured through the focusing mirror can reflect the first image through the workpiece to be measured again, the first image can be focused by the camera on the basis that the first image is superposed with the workpiece to be measured, and the imaging of the first image in the camera and the direct imaging of the screen in the camera have no error, so that the camera can focus the screen and the workpiece to be measured simultaneously.
Example two
The method for realizing simultaneous focusing of the screen and the workpiece in deflection measurement is provided, and based on the device in the first embodiment, the method can design an optical path suitable for use through the steps provided by the method, so that the screen and the workpiece to be measured can be focused simultaneously by the camera, and specifically, the method comprises the steps of S202, S204 and S206.
And S202, adjusting the focal length of the camera and the distance between the workpiece to be measured and the camera to enable the workpiece to be measured to be clearly imaged on the image surface of the camera, and enabling the whole caliber of the workpiece to be measured to be seen from the image surface of the camera.
During specific operation, a highlighted label can be pasted on a workpiece to be detected; and then adjusting the focal length of the camera and the distance between the measured workpiece and the camera to enable the label of the measured workpiece to be clearly imaged on the image surface of the camera, wherein at the moment, the relative position relation between the camera and the measured workpiece is determined, and the camera finishes focusing on the measured workpiece.
Step S204, selecting a concave reflector with a known curvature radius R as a focusing mirror, setting the central points of the screen, the focusing mirror, the workpiece to be measured and the camera as A, B, C and O respectively, and adjusting the positions of the screen and the focusing mirror to ensure that the included angle between the AB point connecting line and the normal line at the B point of the focusing mirror, the included angle between the BC point connecting line and the normal line at the C point of the workpiece to be measured and the included angle between the OC point connecting line and the normal line at the C point of the workpiece to be measured are equal.
Because the workpiece to be measured is a concave surface with a certain curvature, the technicians in the field can ensure that the four included angles are all equal by reasonably arranging the positions of the focusing lens and the screen.
And S206, adjusting the distance between the screen and the focusing mirror relative to the workpiece to be measured, so that the second image of the screen reflected on the workpiece to be measured through the focusing mirror can be reflected to form a first image through the workpiece to be measured again, and the image of the first image in the camera is matched with the target surface size of the camera.
In specific operation, firstly, the distance L from the screen to the focusing lens along the optical axis direction is determined1；
Secondly, according to the curvature radius R of the focusing lens and a formula
The distance L from the measured workpiece to the focusing lens along the optical axis direction can be determined2(ii) a Alternatively, in one embodiment, L may also be determined first2Then obtaining L by calculation according to R and the formula1。
And finally, enabling the center point of the workpiece to be detected to coincide with the center of the first image.
During specific operation, the optical axis from the center of the camera target surface to the optical center of the camera is determinedS distance of2；
Secondly, according to the known focal length f of the camera lens and the formula
The distance S from the center of the workpiece to be measured to the focusing lens along the optical axis direction can be determined1(ii) a Thereby completely determining the positions of the camera 1, the screen 2, the workpiece 3 to be measured, and the focusing lens 4. Alternatively, in one embodiment, S may also be determined first1Then obtaining S by calculating according to f and the formula2。
For example, the parameters configuring the camera are: the focal length is 35mm, and the size of the target surface is 18 mm; configuring the size parameters of the measured workpiece as follows: the caliber is 596mm, and the curvature radius is 776 mm; the size of the configuration screen was 95 mm.
Then when arranging the light path: as shown in fig. 3, first, according to the object image magnification relationship y'/y 600/18-33.3, when the camera position is fixed, the position where the workpiece to be measured is placed can be obtained. For example, the origin of the coordinate system is established at the bottom center of the workpiece to be measured, and the coordinates of the center of the target surface of the camera are (287.7mm,1151.5 mm);
secondly, reversely tracing from a camera target surface, wherein the caliber of an image 1 obtained through a lens is 600mm, tracing by adopting light rays, re-imaging the detected workpiece to obtain an image 2 with the size of 526.4mm, and knowing the imaging relation of the screen relative to the focusing lens according to the size amplification relation y'/y between the image and the screen, namely 526.4/95, namely 5.54;
and adjusting the position of the focusing lens according to the size of the actual optical path element to obtain the focusing lens with the curvature radius of 150mm, the central coordinate of (-161.6mm,638.3mm) and the central coordinate of (-247.6mm,561 mm).
When the device provided by the invention and comprising the focusing mirror is used, the obtained point spread function is shown in figure 4, obviously, the screen can be clearly imaged at the target surface of the camera, and the blurring effect caused by the defocusing effect is obviously reduced.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, and the scope of protection is still within the scope of the invention.
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| PCT/CN2021/082640 WO2022088596A1 (en) | 2020-10-30 | 2021-03-24 | Apparatus and method for achieving simultaneous focusing of screen and workpiece in deflection measurement |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113362399A (en) * | 2021-07-02 | 2021-09-07 | 复旦大学 | Calibration method for positions and postures of focusing mirror and screen in deflection measurement system |
| CN113654765A (en) * | 2021-07-19 | 2021-11-16 | 中国科学院深圳先进技术研究院 | A method, system and terminal for measuring phase deflection based on curved screen |
| CN114353699A (en) * | 2022-01-07 | 2022-04-15 | 中国科学院长春光学精密机械与物理研究所 | High-frequency-band aberration detection system and detection method for large-gradient convex optical free-form surface |
| WO2022088596A1 (en) * | 2020-10-30 | 2022-05-05 | 复旦大学 | Apparatus and method for achieving simultaneous focusing of screen and workpiece in deflection measurement |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030184740A1 (en) * | 2000-03-14 | 2003-10-02 | Francois Paradis | Device and method for optical control of crockery items such as enamelled plates or and enamelled ceramic product |
| CN104501741A (en) * | 2014-12-22 | 2015-04-08 | 四川大学 | Orthogonal grating phase shift method for three-dimensional surface shape measurement |
| CN105180835A (en) * | 2015-05-11 | 2015-12-23 | 中国科学院国家天文台南京天文光学技术研究所 | Method for obtaining unpacking phase rapidly in fringe reflection measurement |
| CN107941168A (en) * | 2018-01-17 | 2018-04-20 | 杨佳苗 | Reflective stripe surface shape measuring method and device based on speckle position calibration |
| CN108151674A (en) * | 2017-12-27 | 2018-06-12 | 大连鉴影光学科技有限公司 | A kind of method and apparatus for improving optical detecting instrument precision |
| US20180352163A1 (en) * | 2017-05-31 | 2018-12-06 | Keyence Corporation | Image Inspection Apparatus And Image Inspection Method |
| CN110411376A (en) * | 2019-07-03 | 2019-11-05 | 复旦大学 | A Method for Phase Separation of Front and Back Surfaces of Transparent Elements for Phase Deflection Measurement |
| CN110966935A (en) * | 2019-12-15 | 2020-04-07 | 复旦大学 | An integrated geometric calibration method of deflection measurement system based on marker points |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010001715B4 (en) * | 2010-02-09 | 2023-08-24 | Robert Bosch Gmbh | Method and device for surface testing |
| WO2016035055A1 (en) * | 2014-09-05 | 2016-03-10 | Hoya Corporation | Wide depth of focus vortex intraocular lenses and associated methods |
| CN107144240A (en) * | 2017-05-12 | 2017-09-08 | 电子科技大学 | A kind of system and method for detecting glass panel surface defect |
| CN109141290A (en) * | 2018-08-28 | 2019-01-04 | 西安工业大学 | A kind of detection method of big bias freeform optics surface face shape |
| CN110986829A (en) * | 2019-12-22 | 2020-04-10 | 复旦大学 | High-precision measurement method for large-curvature complex mirror surface by using compensation mirror |
| CN112255758B (en) * | 2020-10-30 | 2022-07-12 | 复旦大学 | Device and method for realizing simultaneous focusing of screen and workpiece in deflection measurement |
-
2020
- 2020-10-30 CN CN202011196294.1A patent/CN112255758B/en active Active
-
2021
- 2021-03-24 WO PCT/CN2021/082640 patent/WO2022088596A1/en active Application Filing
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030184740A1 (en) * | 2000-03-14 | 2003-10-02 | Francois Paradis | Device and method for optical control of crockery items such as enamelled plates or and enamelled ceramic product |
| CN104501741A (en) * | 2014-12-22 | 2015-04-08 | 四川大学 | Orthogonal grating phase shift method for three-dimensional surface shape measurement |
| CN105180835A (en) * | 2015-05-11 | 2015-12-23 | 中国科学院国家天文台南京天文光学技术研究所 | Method for obtaining unpacking phase rapidly in fringe reflection measurement |
| US20180352163A1 (en) * | 2017-05-31 | 2018-12-06 | Keyence Corporation | Image Inspection Apparatus And Image Inspection Method |
| CN108151674A (en) * | 2017-12-27 | 2018-06-12 | 大连鉴影光学科技有限公司 | A kind of method and apparatus for improving optical detecting instrument precision |
| CN107941168A (en) * | 2018-01-17 | 2018-04-20 | 杨佳苗 | Reflective stripe surface shape measuring method and device based on speckle position calibration |
| CN110411376A (en) * | 2019-07-03 | 2019-11-05 | 复旦大学 | A Method for Phase Separation of Front and Back Surfaces of Transparent Elements for Phase Deflection Measurement |
| CN110966935A (en) * | 2019-12-15 | 2020-04-07 | 复旦大学 | An integrated geometric calibration method of deflection measurement system based on marker points |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022088596A1 (en) * | 2020-10-30 | 2022-05-05 | 复旦大学 | Apparatus and method for achieving simultaneous focusing of screen and workpiece in deflection measurement |
| CN113362399A (en) * | 2021-07-02 | 2021-09-07 | 复旦大学 | Calibration method for positions and postures of focusing mirror and screen in deflection measurement system |
| CN113362399B (en) * | 2021-07-02 | 2022-08-30 | 复旦大学 | Calibration method for positions and postures of focusing mirror and screen in deflection measurement system |
| CN113654765A (en) * | 2021-07-19 | 2021-11-16 | 中国科学院深圳先进技术研究院 | A method, system and terminal for measuring phase deflection based on curved screen |
| CN113654765B (en) * | 2021-07-19 | 2023-05-05 | 中国科学院深圳先进技术研究院 | Phase deflection measurement method, system and terminal based on curved screen |
| CN114353699A (en) * | 2022-01-07 | 2022-04-15 | 中国科学院长春光学精密机械与物理研究所 | High-frequency-band aberration detection system and detection method for large-gradient convex optical free-form surface |
| CN114353699B (en) * | 2022-01-07 | 2022-12-16 | 中国科学院长春光学精密机械与物理研究所 | High-frequency-band aberration detection system and detection method for large-gradient convex optical free-form surface |
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