CN112217415B - Frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof - Google Patents
Frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof Download PDFInfo
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- CN112217415B CN112217415B CN201910614592.9A CN201910614592A CN112217415B CN 112217415 B CN112217415 B CN 112217415B CN 201910614592 A CN201910614592 A CN 201910614592A CN 112217415 B CN112217415 B CN 112217415B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 72
- 230000005284 excitation Effects 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims description 42
- 230000033001 locomotion Effects 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims 2
- 230000010287 polarization Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
The invention relates to a frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism and an excitation method thereof, which belong to the field of piezoelectric driving and can be used in the fields of precision driving, medical treatment, micro machinery and the like. The invention aims to solve the problems of small output force, high cost and insufficient actuation capability of the existing three-degree-of-freedom piezoelectric self-actuation device. The three-degree-of-freedom piezoelectric resonance self-actuating mechanism is of a frame structure and comprises four groups of serial columnar longitudinal vibration piezoelectric transducers with identical structures and a connecting device thereof, wherein each group of serial columnar longitudinal vibration piezoelectric transducers can be regarded as two columnar longitudinal vibration piezoelectric transducers connected by two triangular beams. The excitation method of the self-actuating mechanism is to excite longitudinal vibration of four groups of serial columnar longitudinal vibration piezoelectric transducers respectively through two-phase voltage excitation signals, so that the three-degree-of-freedom actuating function of the self-actuating mechanism on a plane is realized.
Description
Technical Field
The invention relates to a frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism and an excitation method thereof, in particular to a piezoelectric resonance self-actuating mechanism with four groups of identical serial columnar longitudinal vibration piezoelectric transducers and connecting mechanisms thereof, and the frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism can realize the three-degree-of-freedom actuating function on a plane by adopting the excitation method thereof.
Background
The piezoelectric self-actuating mechanism converts electric energy into vibration energy of the vibration body by utilizing the inverse piezoelectric effect of the piezoelectric material, and converts the vibration energy into movement energy of the self-actuating mechanism body by the contact friction force of the driving foot and the working surface, so that linear or rotary movement of the self-actuating mechanism is realized.
The remarkable advantages of the piezoelectric self-actuating mechanism are: the miniature mechanism is easy to realize, has high positioning precision and high response speed (microsecond level), has simple and flexible structure, does not need transmission links, does not need lubrication, can be applied in vacuum, does not generate a magnetic field, and is not influenced by the magnetic field. Therefore, the piezoelectric actuation method has been widely used in microminiature moving mechanisms in the fields of robots, precision machinery, biomedical engineering, and the like.
At present, most of piezoelectric self-actuating mechanisms adopt a non-resonant excitation mode, the mechanism is driven to move by utilizing the telescopic deformation of piezoelectric materials, and a single piezoelectric device is generally adopted to directly replace an actuating mechanism, so that the mechanism structure is greatly simplified. The non-resonant excitation mode has the advantages of nanoscale high precision, but has the disadvantages of small driving force and low speed.
The piezoelectric self-actuating mechanism can also adopt a resonant excitation mode, wherein the mechanism works at a resonant frequency, and the motion mechanism is a piezoelectric transducer which works at a resonant state and has the maximum driving foot amplitude. Compared with a non-resonant excitation mode, the resonant piezoelectric excitation mode can remarkably improve driving performance such as driving force of a mechanism. The piezoelectric self-actuating mechanism adopting the resonance excitation mode has good development prospect in the field of microminiature piezoelectric robots.
Piezoelectric resonant self-actuating mechanisms employing a single piezoelectric device typically achieve only one degree of freedom, and even only one direction of motion. In order to realize the planar three-degree-of-freedom motion of the motion mechanism, namely the linear motion and the rotary motion along two coordinate axes of the plane, a self-actuating mechanism is generally constructed by adopting a mode that a plurality of piezoelectric devices are combined to drive a plurality of driving feet, and the combined driving force or driving moment of the plurality of driving feet is adjusted by the combined excitation of a plurality of transducers to realize the multi-degree-of-freedom self-actuating functions such as the linear translation and the rotation of the motion mechanism in the plane.
The realization of the driving of multiple degrees of freedom and the simplification of a self-actuating system and the improvement of the driving performance of the system are all important directions of the development of the microminiature robot and are also technical difficulties. Because the piezoelectric transducer has the advantages of flexible structure, development prospect in the field of multi-degree-of-freedom driving and resonant excitation mode, the novel motion mechanism for constructing the microminiature robot by combining a plurality of resonant piezoelectric transducers with multi-degree-of-freedom driving functions becomes a certain, and the method is an effective method for meeting the targets of multi-degree-of-freedom self-actuation function, motor system simplification, motion performance improvement and the like of the mechanism.
Disclosure of Invention
The invention provides a frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism and an excitation method thereof, which aim to realize the plane three-degree-of-freedom actuating function of the piezoelectric self-actuating mechanism and simultaneously avoid the problems of smaller output force, high cost and insufficient actuating capability of a non-resonance type piezoelectric self-actuating mechanism.
The invention provides a frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism, which comprises four groups of serial columnar longitudinal vibration piezoelectric transducers and a connecting device thereof, wherein the four groups of serial columnar longitudinal vibration piezoelectric transducers are sequentially connected through the connecting device to form a frame type structure.
The four groups of serial columnar longitudinal vibration piezoelectric transducers have the same structure and symmetrical structure, and each group of serial columnar longitudinal vibration piezoelectric transducers can be regarded as two columnar longitudinal vibration piezoelectric transducers connected by two triangular beams.
The working principle and the excitation method of the frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism are as follows: selecting a rectangular coordinate system, wherein three axes are x, y and z, o are coordinate system origins, an xoy plane is a horizontal working surface, and when two groups of serial columnar longitudinal vibration piezoelectric transducers parallel to the x axis are excited to generate combined longitudinal vibration, friction thrust generated at the contact points of the driving feet of the two groups of serial columnar longitudinal vibration piezoelectric transducers and the working plane along the x axis direction pushes the self-actuating mechanism to linearly move along the x axis direction; when two groups of serial columnar longitudinal vibration piezoelectric transducers parallel to the y axis are excited to generate combined longitudinal vibration, the self-actuating mechanism is pushed to linearly move along the y axis direction by friction thrust generated at the contact point of the driving foot of the two groups of serial columnar longitudinal vibration piezoelectric transducers and the working plane along the y axis direction; when four groups of serial columnar longitudinal vibration piezoelectric transducers are excited to generate combined longitudinal vibration, the driving feet of the four groups of serial columnar longitudinal vibration piezoelectric transducers and the friction thrust with the same rotation direction around the z axis generated at the contact point of the working plane push the self-actuating mechanism to rotate around the z axis, the magnitude of the thrust and the movement speed of the movement mechanism are adjusted by adjusting the voltage amplitude of the voltage excitation signal, and the three-degree-of-freedom movement of the self-actuating mechanism is realized by the method.
Drawings
FIG. 1 is a schematic diagram of a frame-type planar three-degree-of-freedom piezoelectric resonant self-actuating mechanism according to the present invention;
fig. 2 is a cross-sectional view of the tandem type columnar longitudinal vibration piezoelectric transducer 1 in fig. 1;
fig. 3 is an exploded view of the piezoelectric ceramic component 1-1-3 of fig. 2 and a schematic view of the polarization direction of the piezoelectric ceramic sheet, "+" represents the positive direction of the polarization of the ceramic sheet, and "-" represents the negative direction of the polarization of the ceramic sheet.
Detailed Description
The first embodiment, referring to fig. 1 to 3, describes the present embodiment, the frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism according to the present embodiment includes four groups of tandem columnar longitudinal vibration piezoelectric transducers 1,2,3 and 4 having identical structures and common connection beams 5, 6, 7 and 8 thereof,
The structure of the tandem type columnar longitudinal vibration piezoelectric transducer can be illustrated by taking the tandem type columnar longitudinal vibration piezoelectric transducer 1 as an example, the tandem type columnar longitudinal vibration piezoelectric transducer 1 comprises two identical screws 1-1-1 and 1-2-1 for fixing, two end posts 1-1-2 and 1-2 with identical structures, four groups of piezoelectric ceramic components 1-1-3, 1-1-4, 1-2-3 and 1-2-4, two connecting beams 5 and 8 and an intermediate beam 1-1-5, wherein the connecting beam 5 is a shared piece of the two groups of tandem type columnar longitudinal vibration piezoelectric transducers 1 and 2, and the connecting beam 8 is a shared piece of the two groups of tandem type columnar longitudinal vibration piezoelectric transducers 1 and 4. The serial columnar longitudinal vibration piezoelectric transducers can be divided into a left columnar longitudinal vibration piezoelectric transducer, a right columnar longitudinal vibration piezoelectric transducer, an upper triangular beam and a lower triangular beam which are identical in structure, and accordingly, the serial columnar longitudinal vibration piezoelectric transducer 1 can be divided into a left columnar longitudinal vibration piezoelectric transducer 1-1, a right columnar longitudinal vibration piezoelectric transducer 1-2, an upper triangular beam 1-3 and a lower triangular beam 1-4, wherein the upper triangular beam 1-3 and the lower triangular beam 1-4 are part structures of a part middle beam 1-1-5.
The frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism comprises sixteen groups of piezoelectric ceramic components with identical structures, each group of serial columnar longitudinal vibration piezoelectric transducers comprises four groups of piezoelectric ceramic components, each group of piezoelectric ceramic components comprises a piezoelectric ceramic plate 9 with identical left and right structures and opposite polarization directions and a centrally placed electrode plate 10, and the structures and the polarization directions of the piezoelectric ceramic components are shown in figure 3.
The frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism is made of metal except a piezoelectric ceramic plate.
The four groups of series columnar longitudinal vibration piezoelectric transducers comprise four lower triangular beams, and the contact point of each lower triangular beam and the xoy plane is set as one driving foot, so that the frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism comprises four driving feet.
The second embodiment, the difference between the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism and the first embodiment is that a periodic sinusoidal voltage signal V a、Vb with a phase difference of pi/2 is provided to the columnar longitudinal vibration piezoelectric transducer, the two phase voltage signals may be V a＝Vmsin(ωt)、Vb＝Vm sin (ωt+pi/2), where V m represents the amplitude of the voltage signal, and the frequency ω of the voltage signal approaches or corresponds to the first-order longitudinal vibration natural frequency of the columnar longitudinal vibration piezoelectric transducer to be excited.
In this embodiment, the working plane is set: a Cartesian rectangular coordinate system is set firstly, three axes are x, y, z and o respectively as coordinate system origins, an xoy plane is selected as a horizontal working surface, and the frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism is placed on the xoy working plane and is contacted with the working plane through four driving feet.
In this embodiment, the excitation method of translational motion of the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism along the x-axis direction on the xoy working plane is as follows: applying a voltage signal V a (or V b) to all piezoelectric ceramic components contained in two columnar longitudinal vibration piezoelectric transducers on the same side of two groups of columnar longitudinal vibration piezoelectric transducers parallel to the x-axis, namely all piezoelectric ceramic components contained in a left columnar longitudinal vibration piezoelectric transducer 1-1 of the columnar longitudinal vibration piezoelectric transducer 1 and a right columnar longitudinal vibration piezoelectric transducer 3-2 of the columnar longitudinal vibration piezoelectric transducer 3; the voltage signal V b (or V a) is applied to all piezoelectric ceramic components contained in two columnar longitudinal vibration piezoelectric transducers on the other side of two groups of columnar longitudinal vibration piezoelectric transducers parallel to the x axis, namely the right columnar longitudinal vibration piezoelectric transducer 1-2 of the columnar longitudinal vibration piezoelectric transducer 1 and all piezoelectric ceramic components contained in the left columnar longitudinal vibration piezoelectric transducer 3-1 of the columnar longitudinal vibration piezoelectric transducer 3, other metal parts of the columnar longitudinal vibration piezoelectric transducers are grounded, the voltage signal excites each columnar longitudinal vibration piezoelectric transducer to generate periodic telescopic deformation along the axial direction of the columnar longitudinal vibration piezoelectric transducer, the first-order longitudinal vibration excitation is realized, and because the excitation voltage signals of the columnar longitudinal vibration piezoelectric transducers on the left side and the right side have phase differences, the vibration time sequences are different, the vertexes of two triangular beams positioned between the left and right side column-shaped longitudinal vibration piezoelectric transducers generate elliptical motion tracks, the driving foot of the lower triangular beam is contacted and rubbed with the xoy working surface to generate driving force along the x-axis direction, so that the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism is pushed to move in a translational mode along the x-axis direction, the vibration amplitude of the column-shaped longitudinal vibration piezoelectric transducer can be changed by adjusting the amplitude of a voltage signal, the driving force and the motion speed of the self-actuating mechanism can be further changed, and the motion direction of the self-actuating mechanism can be changed by adjusting the piezoelectric ceramic components connected with the voltage signals V a and V b;
In this embodiment, the excitation method of translational motion of the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism along the y-axis direction on the xoy working plane is as follows: applying a voltage signal V a (or V b) to all piezoelectric ceramic components contained in two columnar longitudinal vibration piezoelectric transducers on the same side of two groups of columnar longitudinal vibration piezoelectric transducers parallel to the y axis, namely all piezoelectric ceramic components contained in a left columnar longitudinal vibration piezoelectric transducer 2-1 of the columnar longitudinal vibration piezoelectric transducer 2 and a right columnar longitudinal vibration piezoelectric transducer 4-2 of the columnar longitudinal vibration piezoelectric transducer 4; applying a voltage signal V b (or V a) to all piezoelectric ceramic components contained in two groups of columnar longitudinal vibration piezoelectric transducers on the other side of the two groups of columnar longitudinal vibration piezoelectric transducers parallel to the y axis, namely all piezoelectric ceramic components contained in a right columnar longitudinal vibration piezoelectric transducer 2-2 of the columnar longitudinal vibration piezoelectric transducer 2 and a left columnar longitudinal vibration piezoelectric transducer 4-1 of the columnar longitudinal vibration piezoelectric transducer 4 in series, wherein other metal parts of the columnar longitudinal vibration piezoelectric transducers are grounded, the voltage signal excites each columnar longitudinal vibration piezoelectric transducer to generate periodic telescopic deformation along the axis direction of the columnar longitudinal vibration piezoelectric transducer so as to realize first-order longitudinal vibration excitation, and as the exciting voltage signals of the left and right columnar longitudinal vibration piezoelectric transducers have different vibration time sequences, the apexes of two triangular beams between the left and right columnar longitudinal vibration piezoelectric transducers generate elliptical motion tracks, the driving feet of the lower triangular beams are in contact friction with the working faces of the xoy working faces so as to generate driving force along the y axis direction, thereby pushing a frame type plane self-actuating mechanism to move in a translational mode along the y axis direction, and the amplitude of the self-actuating mechanism can be changed by adjusting the voltage signal to realize self-actuating amplitude of the piezoelectric vibration of the columnar longitudinal vibration piezoelectric transducer to be further changed by adjusting the vibration of the piezoelectric transducer 35, and the vibration amplitude of the piezoelectric transducer can be changed by adjusting the amplitude of the piezoelectric transducer to be driven by the vibration transducer;
In this embodiment, the excitation method of the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism on the xoy working plane around the z axis is as follows: applying a voltage signal V a (or V b) to all piezoelectric ceramic components contained in the left columnar longitudinal vibration piezoelectric transducers 1-1, 2-1, 3-1 and 4-1 of the four groups of serial columnar longitudinal vibration piezoelectric transducers 1,2,3 and 4; the voltage signal V b (or V a) is applied to all piezoelectric ceramic components contained in the right side columnar longitudinal vibration piezoelectric transducers 1-2, 2-2, 3-2 and 4-2 of the four groups of columnar longitudinal vibration piezoelectric transducers 1,2,3 and 4, other metal parts of the columnar longitudinal vibration piezoelectric transducers are grounded, the voltage signal excites each longitudinal vibration transducer to generate periodic telescopic deformation along the axial direction of the columnar longitudinal vibration piezoelectric transducer, first-order longitudinal vibration excitation is realized, as the excitation voltage signals of the left side columnar longitudinal vibration piezoelectric transducer and the right side columnar longitudinal vibration piezoelectric transducer have phase differences, vibration time sequences are different, the apexes of two triangular beams between the left side columnar longitudinal vibration piezoelectric transducer and the right side columnar longitudinal vibration piezoelectric transducer generate elliptic motion tracks, driving feet of the lower triangular beam are in contact with an xoy working face to generate driving force, driving forces generated by the four driving feet form combined moment, so that a frame type plane three-degree-of-freedom piezoelectric resonant self-actuating mechanism is pushed to rotate around a z-axis, the vibration amplitude of the columnar longitudinal vibration piezoelectric transducer can be changed through adjusting the amplitude of the voltage signal, and the amplitude of the self-actuating mechanism can be changed through adjusting the amplitude of the piezoelectric resonant self-actuating mechanism, and the rotating speed of the piezoelectric ceramic components connected with the voltage signal V b can be changed through the voltage signal a.
The third embodiment is different from the frame type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism in the first embodiment in that each piezoelectric ceramic plate is composed of a piezoelectric body and a pair of electrode coatings, and the two coatings forming the pair of electrode coatings are respectively located on two side square surfaces of the piezoelectric body.
The piezoelectric body according to the present embodiment is made of lead zirconate titanate piezoelectric ceramics, but the piezoelectric body is not limited to lead zirconate titanate piezoelectric ceramics, and may be made of other piezoelectric materials such as polyvinylidene fluoride and aluminum nitride. The electrode coating is realized by adopting a Al, cu, ag, ag-Pd alloy and other proper metal material coating arranged on the surface of the piezoelectric ceramic plate.
The fourth embodiment is different from the first embodiment in that the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism according to the fourth embodiment is that the four groups of serial columnar longitudinal vibration piezoelectric transducers according to the fourth embodiment are connected by a common connecting beam to form a rectangular frame, but the connection mode is not limited, and the four groups of independent columnar longitudinal vibration piezoelectric transducers can also adopt other effective connection modes to form a rectangular frame structure.
The fifth embodiment is different from the first embodiment in that the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism in the fifth embodiment is that the tandem columnar longitudinal vibration piezoelectric transducers 1,2, 3 and 4 in the first embodiment have square cross-sectional shapes, but are not limited to square cross-sectional shapes, and circular cross-sectional shapes can be adopted, the corresponding ceramic plates have circular sheet structures with inner holes, and the inner diameters and the outer diameters of the ceramic plates are identical to those of the circular end posts.
The sixth embodiment is different from the first embodiment in that the frame-type planar three-degree-of-freedom piezoelectric resonance self-actuating mechanism is that the columnar longitudinal vibration piezoelectric transducer in the first embodiment is a sandwich-type columnar longitudinal vibration piezoelectric transducer, but the fixing mode of the piezoelectric ceramic is not limited to a sandwich structure, and can be a patch type, a deposition or other effective connection modes.
Claims (1)
1. The excitation method of the frame type plane three-degree-of-freedom piezoelectric resonance self-actuating mechanism is characterized by comprising a frame type structure self-actuating mechanism formed by four groups of serial columnar longitudinal vibration piezoelectric transducers with identical structures and shared connecting beams, wherein each group of serial columnar longitudinal vibration piezoelectric transducers comprises two screws for fixing, two end posts, four groups of piezoelectric ceramic components, two connecting beams and a middle beam, wherein the two connecting beams are shared parts of two adjacent groups of serial columnar longitudinal vibration piezoelectric transducers, each serial columnar longitudinal vibration piezoelectric transducer can be split into a left columnar longitudinal vibration piezoelectric transducer, a right columnar longitudinal vibration piezoelectric transducer and an upper triangular beam and a lower triangular beam which are respectively connected between the left columnar longitudinal vibration piezoelectric transducer and the right columnar longitudinal vibration piezoelectric transducer, the contact point of the lower triangular beam and a working plane is used as a driving foot, each piezoelectric ceramic component consists of two piezoelectric ceramic pieces and electrode pieces placed in the middle, all piezoelectric ceramic pieces form a square electrode coating layer along the thickness direction, and each piezoelectric ceramic piece is respectively positioned on the surfaces of two pairs of piezoelectric coatings along the two sides of the electrode coating layers;
Setting a Cartesian rectangular coordinate system, wherein three axes are x, y and z respectively, o are the origin of the coordinate system, an xoy plane is a horizontal working surface, two periodic sinusoidal voltage signals with pi/2 phase difference are provided, two groups of serial columnar longitudinal vibration piezoelectric transducers parallel to the x axis are selected, the voltage signals of the above phases are applied to all piezoelectric ceramic components contained in the left columnar longitudinal vibration piezoelectric transducer of the group and the right columnar longitudinal vibration piezoelectric transducer of the other group, the other phase voltage signals are applied to all piezoelectric ceramic components contained in the right columnar longitudinal vibration piezoelectric transducer of the group and all piezoelectric ceramic components contained in the left columnar longitudinal vibration piezoelectric transducer of the other group, other metal pieces of the serial columnar longitudinal vibration piezoelectric transducers are grounded, the phase difference of the excitation voltage signals of the left columnar longitudinal vibration piezoelectric transducer and the right columnar longitudinal vibration piezoelectric transducer of each group causes the left columnar longitudinal vibration piezoelectric transducer and the right columnar longitudinal vibration piezoelectric transducer to move along the angular motion path of the x-shaped triangular motion triangle, and the vibration beam is driven by the vibration motion of the vibration of the triangular motion degree of freedom of the triangular motion of the vibration of the left triangular piezoelectric transducer along the x axis;
Or two groups of serial columnar longitudinal vibration piezoelectric transducers parallel to the y axis are selected, one phase voltage signal is applied to all piezoelectric ceramic components contained in the left columnar longitudinal vibration piezoelectric transducer of the group of serial columnar longitudinal vibration piezoelectric transducers and the right columnar longitudinal vibration piezoelectric transducer of the other group of serial columnar longitudinal vibration piezoelectric transducers, the other phase voltage signal is applied to all piezoelectric ceramic components contained in the right columnar longitudinal vibration piezoelectric transducer of the group of serial columnar longitudinal vibration piezoelectric transducers and the left columnar longitudinal vibration piezoelectric transducer of the other group of serial columnar longitudinal vibration piezoelectric transducers, other metal pieces of the serial columnar longitudinal vibration piezoelectric transducers are grounded, the vibration time sequence of the left columnar longitudinal vibration piezoelectric transducer and the right columnar longitudinal vibration piezoelectric transducer of each group of serial columnar longitudinal vibration piezoelectric transducers is different, so that the vertex of an angle beam between the left columnar longitudinal vibration piezoelectric transducer and the right columnar longitudinal vibration piezoelectric transducer of each group of serial columnar longitudinal vibration piezoelectric transducers generates an elliptical motion track, and the lower triangular foot is in contact with the driving force of the x-axis to drive the y-axis to move along the y-axis direction, so that the y-axis motion mechanism is driven by the driving force of the triangular foot;
Or one phase voltage signal is applied to all piezoelectric ceramic components contained in the left side columnar longitudinal vibration piezoelectric transducers of the four groups of columnar longitudinal vibration piezoelectric transducers, the other phase voltage signal is applied to all piezoelectric ceramic components contained in the right side columnar longitudinal vibration piezoelectric transducers of the four groups of columnar longitudinal vibration piezoelectric transducers, other metal pieces of the columnar longitudinal vibration piezoelectric transducers are grounded, the vibration time sequence of the left side columnar longitudinal vibration piezoelectric transducer and the right side columnar longitudinal vibration piezoelectric transducer of each group of columnar longitudinal vibration piezoelectric transducers is different due to the phase difference of excitation voltage signals of the left side columnar longitudinal vibration piezoelectric transducer and the right side columnar longitudinal vibration piezoelectric transducer, elliptical motion tracks are generated at the vertexes of triangular beams between the left side columnar longitudinal vibration piezoelectric transducer and the right side columnar longitudinal vibration piezoelectric transducer of each group of columnar longitudinal vibration piezoelectric transducers, and a combined moment is formed by driving force generated by contact friction between driving feet of the triangular beams and an xoy working face, so that a frame type plane three-degree-of-freedom piezoelectric resonant self-actuating mechanism is pushed to rotate around a z-axis, the vibration amplitude of the columnar longitudinal vibration piezoelectric transducers can be changed, and then the amplitude of the self-actuating mechanism or the amplitude of the two-actuating mechanism can be changed, or the amplitude of the self-actuating mechanism can be changed, and the motion direction of the self-actuating motion of the two-actuating mechanism can be changed through the method of the three-freedom motion of the vibration mechanism can be changed.
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