CN112212965A

CN112212965A - Acoustic wave sensor

Info

Publication number: CN112212965A
Application number: CN202011084732.5A
Authority: CN
Inventors: 不公告发明人
Original assignee: Jinhua Fuan Photoelectric Technology Co Ltd
Current assignee: Jinhua Fuan Photoelectric Technology Co Ltd
Priority date: 2020-10-12
Filing date: 2020-10-12
Publication date: 2021-01-12

Abstract

The invention relates to an acoustic wave sensor, which comprises a shell, a graphene layer, a laser detector and a pressure sensing film, wherein the graphene layer is arranged on the shell; the shell and the graphene layer form a closed cavity, the laser detector is arranged in the cavity, and the pressure sensing film is attached to one side of the graphene layer, which is far away from the laser detector; the graphene layer is a graphene array. According to the invention, different sound waves and different deformation of the pressure sensing film occur, so that different deformation of the graphene layer occurs, the transmission spectrum is changed differently, and the sound waves are detected according to the front and back changes of the transmission spectrum. Simple structure and high detection sensitivity.

Description

Acoustic wave sensor

Technical Field

The invention relates to the technical field of sound wave detection, in particular to a sound wave sensor.

Background

Acoustic wave sensors are very important today. The capacitive sensor is a conventional acoustic wave sensor which has two capacitor-defining diaphragms spaced apart from one another. One diaphragm is fixed and the other diaphragm is displaceable by the acoustic wave to be detected. The displacement of the movable diaphragm determines a change in the capacitance of the capacitor, which can be detected by a suitable read circuit and can be output as an electrical signal, from which a characteristic of the sound waves to be detected, for example the sound pressure, can be inferred. The capacitance acoustic wave sensor has high sensitivity, but its structure is very complicated.

Another commonly used acoustic wave sensor is a piezoelectric acoustic wave sensor, which is simple in structure and uses a membrane made of piezoelectric material that is deformable by the acoustic wave to be detected. The deformation of the piezoelectric film induces a voltage in the piezoelectric film, which can be detected by a suitable read circuit and can be output as an electrical signal, from which the characteristics of the acoustic wave to be detected can be deduced. Although the piezoelectric acoustic wave sensor has a simple structure, it has lower sensitivity than a capacitive acoustic wave sensor.

Disclosure of Invention

The invention aims to provide an acoustic wave sensor, which is used for simplifying the structure of the acoustic wave sensor and improving the detection sensitivity.

In order to achieve the purpose, the invention provides the following scheme:

an acoustic wave sensor comprises a shell, a graphene layer, a laser detector and a pressure sensing film; the shell and the graphene layer form a closed cavity, the laser detector is arranged in the cavity, and the pressure sensing film is attached to one side of the graphene layer, which is far away from the laser detector; the graphene layer is a graphene array.

Optionally, the pressure sensitive film is a transparent flexible film.

Optionally, the graphene array is a chiral structure.

Optionally, the cavity is filled with an optical gain medium.

An acoustic wave sensor comprises a shell, a laser detector, a pressure sensing film and a graphene layer; the laser and the laser detector are arranged on two sides in the shell, the pressure sensing film and the graphene layer are arranged in the shell, and the pressure sensing film is attached to one side, far away from the laser detector, of the graphene layer; the graphene layer is a graphene array; a sound inlet hole is formed in one side of the shell provided with the laser; when the sound inlet hole is not formed, the pressure sensing film and the graphene layer divide the shell into two closed cavities, and the laser detector are respectively arranged in one closed cavity.

Optionally, the sound inlet hole is provided in plurality.

Optionally, the pressure sensitive film is a transparent flexible film; the graphene array is of a chiral structure.

Optionally, the closed cavity provided with the laser detector is filled with an optical gain medium.

According to the specific embodiment provided by the invention, the invention discloses the following technical effects:

the invention discloses an acoustic wave sensor, which comprises a shell, a graphene layer, a laser detector and a pressure sensing film, wherein the graphene layer is arranged on the shell; the shell and the graphene layer form a closed cavity, the laser detector is arranged in the cavity, and the pressure sensing film is attached to one side of the graphene layer, which is far away from the laser detector; the graphene layer is a graphene array. According to the invention, different sound waves and different deformation of the pressure sensing film occur, so that different deformation of the graphene layer occurs, the transmission spectrum is changed differently, and sound wave information is detected according to the front and back changes of the transmission spectrum. Simple structure and high detection sensitivity.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.

Fig. 1 is a structural diagram of an acoustic wave sensor according to embodiment 1 of the present invention;

fig. 2 is a structural diagram of a graphene array provided in embodiment 1 of the present invention;

fig. 3 is another structural diagram of a graphene array provided in embodiment 1 of the present invention;

fig. 4 is a structural diagram of an acoustic wave sensor according to embodiment 2 of the present invention.

Description of the symbols: the method comprises the following steps of 1-shell, 2-graphene layer, 3-laser detector, 4-pressure sensing film, 5-graphene array, 6-shell, 7-laser and 8-sound inlet hole.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terms "first," "second," "third," and the like in the description and in the claims, as well as in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the objects so described are interchangeable under appropriate circumstances. Furthermore, the terms "comprising" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions.

In this patent document, the drawings discussed below and the embodiments used to describe the principles of the present disclosure are by way of illustration only and should not be construed in any way to limit the scope of the present disclosure. Those skilled in the art will understand that the principles of the present invention may be implemented in any suitably arranged system. Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. Further, a terminal according to an exemplary embodiment will be described in detail with reference to the accompanying drawings. Like reference symbols in the various drawings indicate like elements.

The terms used in the description of the present invention are only used to describe specific embodiments, and are not intended to show the concept of the present invention. Unless the context clearly dictates otherwise, expressions used in the singular form encompass expressions in the plural form. In the present specification, it is to be understood that terms such as "comprising," "having," and "containing" are intended to specify the presence of stated features, integers, steps, acts, or combinations thereof, as taught in the present specification, and are not intended to preclude the presence or addition of one or more other features, integers, steps, acts, or combinations thereof. Like reference symbols in the various drawings indicate like elements.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Example 1

Fig. 1 is a structural diagram of an acoustic wave sensor according to embodiment 1 of the present invention, and as shown in fig. 1, the acoustic wave sensor includes a housing 1, a graphene layer 2, a laser detector 3, and a pressure sensing film 4. Casing 1 constitutes closed cavity with graphite alkene layer 2, and laser detector 3 sets up in the cavity, and pressure sensing membrane 4 adheres to in graphite alkene layer 2 one side of keeping away from laser detector 3. Graphene layer 2 is a graphene array 5. Fig. 2 is a structural diagram of a graphene array provided in embodiment 1 of the present invention.

Preferably, the pressure-sensitive film 4 is a transparent flexible film.

The principle of the invention is as follows:

when the acoustic wave sensor works, a laser is used for emitting laser to penetrate through the pressure sensing film 4 to irradiate the graphene layer 2, and the laser and the graphene array 5 in the graphene layer 2 generate plasmon resonance. When detecting the acoustic wave, the acoustic wave is used in pressure sensing membrane 4, and pressure sensing membrane 4 can take place deformation, and then leads to graphite alkene layer 2 also to take place deformation for 5's of graphite alkene array size, cycle all change, and the transmission spectrum that leads to producing also can change, detects the change of transmission spectrum through laser detector 3, can detect out the acoustic wave information.

Fig. 3 is another structural diagram of the graphene array provided in embodiment 1 of the present invention, and as shown in fig. 3, the graphene array 5 may be a chiral structure. The absorption difference of the left-handed circularly polarized light and the right-handed circularly polarized light can generate circular dichroism, and when the structure is deformed, the circular dichroism generated by the structure is changed more obviously, so that the detection accuracy and sensitivity are improved.

In this embodiment, the cavity is filled with an optical gain medium. The optical gain medium can improve the intensity of transmitted light, and further improve the detection accuracy.

Example 2

Fig. 4 is a structural diagram of an acoustic wave sensor according to embodiment 2 of the present invention, and as shown in fig. 4, the acoustic wave sensor includes a housing 6, a laser 7, a laser detector 3, a pressure sensing film 4, and a graphene layer 2. Laser instrument 7 and laser detector 3 set up both sides in shell 6, and pressure sensing membrane 4 and graphite alkene layer 2 set up in shell 6, and pressure sensing membrane 4 adheres to in the one side that laser detector 3 was kept away from on graphite alkene layer 2. Graphene layer 2 is a graphene array 5. A sound inlet hole 8 is arranged at one side of the shell 6 provided with the laser 7. When the sound inlet hole 8 is not formed, the shell 6 is divided into two closed cavities by the pressure sensing film 4 and the graphene layer 2, and the laser 7 and the laser detector 3 are respectively arranged in one closed cavity.

Preferably, the sound inlet hole 8 is provided in plurality.

Preferably, the pressure-sensitive film 4 is a transparent flexible film. The graphene array 5 is a chiral structure.

Preferably, the closed cavity in which the laser detector 3 is disposed is filled with an optical gain medium.

(1) the invention can detect the sound wave information by arranging the shell, the graphene layer, the laser detector and the pressure sensing film, has simple structure and reduces the production cost.

(2) According to the invention, different sound waves and different deformation of the pressure sensing film occur, so that different deformation of the graphene layer occurs, the transmission spectrum is changed differently, and the sound waves are detected according to the front and back changes of the transmission spectrum. The detection sensitivity is high.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to assist in understanding the core concepts of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims

1. An acoustic wave sensor is characterized by comprising a shell, a graphene layer, a laser detector and a pressure sensing film; the shell and the graphene layer form a closed cavity, the laser detector is arranged in the cavity, and the pressure sensing film is attached to one side of the graphene layer, which is far away from the laser detector; the graphene layer is a graphene array.

2. The acoustic wave sensor according to claim 1, wherein the pressure sensing membrane is a transparent flexible membrane.

3. The acoustic wave sensor according to claim 1, wherein the graphene array is a chiral structure.

4. The acoustic wave sensor according to claim 1, wherein the cavity is filled with an optical gain medium.

5. An acoustic wave sensor is characterized by comprising a shell, a laser detector, a pressure sensing film and a graphene layer; the laser and the laser detector are arranged on two sides in the shell, the pressure sensing film and the graphene layer are arranged in the shell, and the pressure sensing film is attached to one side, far away from the laser detector, of the graphene layer; the graphene layer is a graphene array; a sound inlet hole is formed in one side of the shell provided with the laser; when the sound inlet hole is not formed, the pressure sensing film and the graphene layer divide the shell into two closed cavities, and the laser detector are respectively arranged in one closed cavity.

6. The acoustic wave sensor according to claim 5, wherein the sound inlet hole is provided in plurality.

7. The acoustic wave sensor according to claim 5, wherein the pressure sensing membrane is a transparent flexible membrane; the graphene array is of a chiral structure.

8. The acoustic wave sensor according to claim 5, wherein the closed cavity in which the laser probe is disposed is filled with an optical gain medium.