CN112197728A - Monitoring device in growth process of single crystal diamond - Google Patents
Monitoring device in growth process of single crystal diamond Download PDFInfo
- Publication number
- CN112197728A CN112197728A CN202010976204.4A CN202010976204A CN112197728A CN 112197728 A CN112197728 A CN 112197728A CN 202010976204 A CN202010976204 A CN 202010976204A CN 112197728 A CN112197728 A CN 112197728A
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- monitoring
- single crystal
- mixing cavity
- crystal diamond
- deposition chamber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
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- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention is suitable for the technical field of single crystal diamond production equipment, and provides a monitoring device in the growth process of single crystal diamond; the method comprises the following steps: a base; the Venturi tube, the first mixing cavity, the second mixing cavity, the ionization chamber and the deposition chamber are fixedly arranged on the base; an observation window is arranged on the deposition chamber, a bracket is fixedly arranged on the base, and monitoring equipment with adjustable positions is arranged on the bracket and is arranged above the observation window; the Venturi tube, the first mixing cavity, the second mixing cavity, the ionization chamber and the deposition chamber are communicated in sequence; the neck of venturi is provided with the first input rather than inside intercommunication. The invention realizes the detection of the growth condition of the diamond and ensures the growth quality of the diamond.
Description
Technical Field
The invention relates to the technical field of single crystal diamond production equipment, in particular to a monitoring device in a single crystal diamond growth process.
Background
When the Clara-grade single crystal diamond is grown by adopting microwave plasma chemical vapor deposition equipment, long-time growth of about 10-15 days is needed after the seed crystal is placed in the CVD equipment, and the problems of polycrystalline growth, black carbon inclusion and internal stress are easily caused at a certain time node due to the influence of various conditions such as technical process level, seed crystal quality, external environmental factors and the like in the growth process, so that the product yield is influenced, and the cost is increased.
Need set up monitoring devices and monitor the growth condition of diamond, and current monitoring devices only can monitor the diamond, can not guarantee the growth quality of diamond, consequently provides a monitoring devices among the single crystal diamond growth process and solves this technical problem now.
Disclosure of Invention
The invention aims to provide a monitoring device in the growth process of single crystal diamond, which aims to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
a monitoring device during growth of single crystal diamond, comprising: a base; the Venturi tube, the first mixing cavity, the second mixing cavity, the ionization chamber and the deposition chamber are fixedly arranged on the base;
an observation window is arranged on the deposition chamber, a bracket is fixedly arranged on the base, and monitoring equipment with adjustable positions is arranged on the bracket and is arranged above the observation window;
the Venturi tube, the first mixing cavity, the second mixing cavity, the ionization chamber and the deposition chamber are communicated in sequence;
the neck of venturi is provided with the first input rather than inside intercommunication.
As a further scheme of the invention: a dispersing piece is arranged at the communication position of the first mixing cavity and the Venturi tube.
As a still further scheme of the invention: the dispersion piece comprises a conical piece arranged at the bottom and a cylindrical piece arranged on the conical piece, and a plurality of helical blades are arranged on the outer side of the cylindrical piece in an array mode.
As a still further scheme of the invention: three angles inside the second mixing cavity are provided with inclined reflection angles, and the other angle is provided with an output end; one of the reflection angles is opposite to the input end of the second mixing cavity.
As a still further scheme of the invention: and a microwave generator is arranged in the ionization chamber.
As a still further scheme of the invention: the deposition chamber is internally provided with a deposition platform with adjustable height, and the deposition chamber is internally provided with an adjusting component for adjusting the height of the deposition platform.
As a still further scheme of the invention: the adjusting assembly comprises L-shaped connecting pieces fixedly arranged on two sides of the bottom of the deposition platform, screw rods matched with threaded holes of the L-shaped connecting pieces are arranged on the L-shaped connecting pieces, the screw rods are rotatably arranged on a support inside the deposition chamber, first gears are further sleeved on the screw rods, the first gears are meshed with second gears, the second gears are arranged at the output ends of adjusting motors, and the adjusting motors are fixedly arranged inside the deposition chamber.
As a still further scheme of the invention: the array is provided with a plurality of air inlets all around the deposit chamber, the air inlet all inclines to set up, should set up and then makes to enter into the rotatory setting of the inside ionized gas of deposit chamber, and a plurality of air inlets pass through the pipeline and set up the air feed ring intercommunication in the deposit chamber outside with the cover, the air feed ring communicates with the output of ionization chamber.
As a still further scheme of the invention: the support is provided with a moving assembly used for adjusting the position of the monitoring equipment.
As a still further scheme of the invention: the movable assembly comprises a sliding rod and a lead screw, the sliding rod and the lead screw are respectively rotatably installed on the support, the sliding rod and the lead screw penetrate through the upper portion of the monitoring device and are matched with threaded openings in the monitoring device, and a rotating motor connected with transmission is further arranged on the support.
Compared with the prior art, the invention has the beneficial effects that: the growth condition in the deposition chamber can be observed conveniently by arranging the monitoring equipment and the observation window; the monitoring equipment is movably arranged, so that the diamond in the deposition chamber can be comprehensively observed; the venturi tube inputs two gases, and the two gases are processed by the first mixing cavity, the second mixing cavity and the ionization chamber in sequence and enter the deposition chamber; an upper ionization chamber for ionizing the gas; the first mixing cavity and the second mixing cavity are arranged to facilitate the uniform mixing of the two gases, so that the quality of the diamond is ensured; the first input end is arranged at the neck part of the Venturi tube, and gas is sucked by using the suction force at the neck part of the Venturi tube, so that the gas at the input end of the Venturi tube and the gas input by the first input end are uniformly input in a certain proportion, the uniform feeding of the gas and the gas is further ensured, and the two gases enter the Venturi tube to be preliminarily mixed, so that the mixing effect is improved; the invention realizes the detection of the growth condition of the diamond and ensures the growth quality of the diamond.
Drawings
Fig. 1 is a schematic structural diagram of a monitoring device in the process of growing single crystal diamond.
Fig. 2 is a schematic view of the structure of a dispersion in the monitoring device during the growth of single crystal diamond.
FIG. 3 is a schematic diagram of the structure of a venturi in a monitoring device during the growth of single crystal diamond.
In the figure: the device comprises a base-1, a Venturi tube-2, a first input end-3, a first mixing cavity-4, a dispersing piece-5, a second mixing cavity-6, a reflection angle-7, an ionization chamber-8, a microwave generator-9, a support-10, a monitoring device-11, a slide bar-12, a lead screw-13, a rotating motor-14, an air supply ring-15, an air inlet-16, an observation window-17, a deposition platform-18, an L-shaped connecting piece-19, a screw-20, a first gear-21, a second gear-22, an adjusting motor-23, a helical blade-24, a conical piece-25, a deposition chamber-26 and a cylindrical piece-27.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1 to 3, in embodiment 1 of the present invention, a structure diagram of a monitoring device in a single crystal diamond growth process provided in an embodiment of the present invention includes: a base 1; the Venturi tube 2, the first mixing cavity 4, the second mixing cavity 6, the ionization chamber 8 and the deposition chamber 26 are fixedly arranged on the base 1;
an observation window 17 is arranged on the deposition chamber 26, a support 10 is fixedly installed on the base 1, a monitoring device 11 with an adjustable position is arranged on the support 10, the monitoring device 11 is arranged above the observation window 17, and the growth condition in the deposition chamber 26 can be observed conveniently by arranging the observation window 17;
the Venturi tube 2, the first mixing cavity 4, the second mixing cavity 6, the ionization chamber 8 and the deposition chamber 26 are communicated in sequence;
the neck of the Venturi tube 2 is provided with a first input end 3 communicated with the interior of the Venturi tube, and different gas media are respectively input into the Venturi tube 2 and the first input end 3; gaseous medium sets up first input 3 for diamond growth, through the neck at venturi 2, utilizes 2 neck suction of venturi to inhale gas, and this setting and then guarantees that the gas of inputting through 2 input gas of venturi and first input 3 inputs is with the even input of certain proportion, and then guarantees that both feeds are even, and two kinds of gas enter into and carry out the primary mixing in venturi 2 simultaneously, improve mixed effect.
In the embodiment of the invention, the monitoring device 11 and the observation window 17 are arranged to facilitate observation of the growth condition inside the deposition chamber 26; the monitoring device 11 is movably arranged so as to be convenient for comprehensively observing the diamond in the deposition chamber 26; the venturi tube 2 inputs two gases, and the two gases are processed by the first mixing cavity 4, the second mixing cavity 6 and the ionization chamber 8 in sequence and enter the deposition chamber 26; through the upper ionization chamber 8 for ionizing the gas; the first mixing cavity 4 and the second mixing cavity 6 are arranged to facilitate the uniform mixing of the two gases, thereby ensuring the quality of the diamond; the first input end 3 is arranged at the neck part of the Venturi tube 2, gas is sucked by utilizing the suction force of the neck part of the Venturi tube 2, the arrangement further ensures that the gas at the input end of the Venturi tube 2 and the gas input by the first input end 3 are uniformly input in a certain proportion, so that the uniform feeding of the gas and the gas is ensured, and the two gases enter the Venturi tube 2 to be primarily mixed, so that the mixing effect is improved; the invention realizes the detection of the growth condition of the diamond and ensures the growth quality of the diamond.
Example 2
Referring to fig. 1 to 3, the main difference between the embodiment 2 and the embodiment 1 is that, as a preferred embodiment of the present invention, a dispersing member 5 is disposed at a communication position of the first mixing chamber 4 and the venturi tube 2, and the dispersing member 5 is configured to disperse the gas entering the first mixing chamber 4, so that the gas is decelerated and mixed in the first mixing chamber 4; providing mixing quality.
The dispersion member 5 comprises a conical member 25 arranged at the bottom and a cylindrical member 27 arranged on the conical member 25, and a plurality of helical blades 24 are arranged outside the cylindrical member 27 in an array manner; first, the conical piece 25 disperses the two gases, and then the helical blades 24 rotate the gases in the first mixing chamber 4, so that the collision chance between the gases is increased, and the mixing effect is improved.
Three angles in the second mixing cavity 6 are provided with inclined reflection angles 7, and the other angle is provided with an output end; one of the reflection angles 7 is opposite to the input end of the second mixing cavity 6, so that when gas enters the second mixing cavity 6 through the input end, the gas is reflected and collided through the three reflection angles 7 in sequence and then is discharged through the output end; the mixed gases are reflected and collided inside the second mixing chamber 6, and the uniformity among the mixed gases is further improved.
The ionization chamber 8 is internally provided with a microwave generator 9, and the microwave generator 9 is used for carrying out microwave ionization on the gas entering the ionization chamber 8.
The deposition chamber 26 is provided with a deposition platform 18 with adjustable height inside, and the deposition chamber 26 is also provided with an adjusting component for adjusting the height of the deposition platform 18 inside.
The adjusting assembly comprises L-shaped connecting pieces 19 fixedly arranged on two sides of the bottom of the deposition platform 18, screw rods 20 matched with threaded holes of the L-shaped connecting pieces 19 are arranged on the two sides of the L-shaped connecting pieces 19, the screw rods 20 are rotatably arranged on a support inside the deposition chamber 26, first gears 21 are further sleeved on the screw rods 20, the first gears 21 are arranged on the two sides of the L-shaped connecting pieces and are meshed with second gears 22, the second gears 22 are arranged at the output end of an adjusting motor 23, and the adjusting motor 23 is fixedly arranged inside the deposition chamber 26. Specifically, when the adjusting motor 23 is powered on, the adjusting motor 23 drives the first gear 21 to rotate through the second gear 22, the first gear 21 drives the screw rod 20 to rotate, and the screw rod 20 is matched with the L-shaped connecting piece 19, so that the height of the L-shaped connecting piece 19 is adjusted, and the requirements for different heights are met.
The array is provided with a plurality of air inlets 16 around the deposit room 26, air inlet 16 all inclines to set up, and this setting then makes and enters into the rotatory setting of the inside ionized gas of deposit room 26, and a plurality of air inlets 16 put the air feed ring 15 intercommunication in the deposit room 26 outside through pipeline and cover, air feed ring 15 and ionization chamber 8's output intercommunication. So that ionized gas can enter the deposition chamber 26 to ensure the growth quality of the diamond.
A moving assembly for adjusting the position of the monitoring equipment 11 is arranged on the bracket 10; the moving assembly comprises a sliding rod 12 and a lead screw 13, the sliding rod 12 and the lead screw 13 are respectively rotatably mounted on the support 10, the sliding rod 12 and the lead screw 13 both penetrate through the upper portion of the monitoring device 11, the lead screw 13 is matched with a threaded port on the monitoring device 11, a rotating motor 14 in transmission connection with the lead screw 13 is further arranged on the support 10, the rotating motor 14 is electrified to enable the lead screw 13 to rotate, the monitoring device 11 is further made to move, and then the thickness of each position of diamond on the deposition platform 18 is detected.
The working principle of the invention is as follows: the monitoring device 11 and the observation window 17 are arranged to facilitate observation of the growth condition inside the deposition chamber 26; the rotating motor 14 is electrified to enable the lead screw 13 to rotate, so that the monitoring device 11 moves, and the thickness of each position of the diamond on the deposition platform 18 is detected; the monitoring device 11 is movably arranged so as to be convenient for comprehensively observing the diamond in the deposition chamber 26; the venturi tube 2 inputs two gases, and the two gases are processed by the first mixing cavity 4, the second mixing cavity 6 and the ionization chamber 8 in sequence and enter the deposition chamber 26; the gas enters the first mixing cavity 4, is subjected to dispersion spiral mixing through the dispersion piece 5, then enters the second mixing cavity 6 to be subjected to reflection impact mixing, then enters the ionization chamber 8 to be ionized, and finally is input into the deposition chamber 26 through the gas supply ring 15 and the gas inlet 16; the first mixing cavity 4 and the second mixing cavity 6 are arranged to facilitate the uniform mixing of the two gases, thereby ensuring the quality of the diamond; the first input end 3 is arranged at the neck part of the Venturi tube 2, gas is sucked by utilizing the suction force of the neck part of the Venturi tube 2, the arrangement further ensures that the gas at the input end of the Venturi tube 2 and the gas input by the first input end 3 are uniformly input in a certain proportion, so that the uniform feeding of the gas and the gas is ensured, and the two gases enter the Venturi tube 2 to be primarily mixed, so that the mixing effect is improved; the height of the deposition platform 18 can be adjusted conveniently by arranging the adjusting assembly, so that requirements of different heights can be met. The invention realizes the detection of the growth condition of the diamond and ensures the growth quality of the diamond.
In the description of the present invention, it is to be understood that the terms "first", "second", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, in the description of the present invention, "a plurality" means two or more unless otherwise specified. A feature defined as "first," "second," etc. may explicitly or implicitly include one or more of the feature.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A monitoring device during growth of a single crystal diamond, comprising: a base (1); the device comprises a Venturi tube (2), a first mixing cavity (4), a second mixing cavity (6), an ionization chamber (8) and a deposition chamber (26), wherein the Venturi tube, the first mixing cavity, the second mixing cavity and the ionization chamber are fixedly arranged on a base (1);
an observation window (17) is arranged on the deposition chamber (26), a support (10) is fixedly installed on the base (1), a monitoring device (11) with an adjustable position is arranged on the support (10), and the monitoring device (11) is arranged above the observation window (17);
the Venturi tube (2), the first mixing cavity (4), the second mixing cavity (6), the ionization chamber (8) and the deposition chamber (26) are communicated in sequence;
the neck of venturi (2) is provided with first input (3) rather than inside intercommunication.
2. A device for monitoring the growth of single crystal diamond according to claim 1, wherein a dispersion member (5) is provided at the connection of the first mixing chamber (4) and the venturi tube (2).
3. A device for monitoring the growth of single crystal diamond according to claim 2, wherein the dispersion member (5) comprises a conical member (25) disposed at the bottom and a cylindrical member (27) mounted on the conical member (25), and the cylindrical member (27) is provided with a plurality of helical blades (24) in an array on the outer side thereof.
4. A device for monitoring the growth process of a single crystal diamond according to claim 1, wherein three corners inside the second mixing cavity (6) are provided with obliquely arranged reflection angles (7), and the other corner is provided with an output end; one of the reflection angles (7) is opposite to the input end of the second mixing cavity (6).
5. A device for monitoring the growth of single crystal diamond according to claim 1, characterised in that the ionization chamber (8) is internally provided with a microwave generator (9).
6. The device for monitoring the growth process of the single crystal diamond according to claim 1, wherein the deposition chamber (26) is internally provided with the deposition platform (18) with adjustable height, and the deposition chamber (26) is internally provided with an adjusting component for adjusting the height of the deposition platform (18).
7. The device for monitoring the growth process of the single crystal diamond according to claim 6, wherein the adjusting assembly comprises L-shaped connecting pieces (19) fixedly arranged at two sides of the bottom of the deposition platform (18), screw rods (20) matched with threaded holes of the L-shaped connecting pieces (19) are arranged at two sides of the bottom, the screw rods (20) are rotatably arranged on a support inside the deposition chamber (26), first gears (21) are further sleeved on the screw rods (20), the first gears (21) at two sides are meshed with second gears (22), the second gears (22) are arranged at the output end of an adjusting motor (23), and the adjusting motor (23) is fixedly arranged inside the deposition chamber (26).
8. The device for monitoring the growth process of the single crystal diamond according to claim 1, wherein a plurality of air inlets (16) are arranged around the deposition chamber (26) in an array mode, the air inlets (16) are all arranged in an inclined mode, the arrangement enables ionized air entering the deposition chamber (26) to rotate, the air inlets (16) are communicated with an air supply ring (15) sleeved outside the deposition chamber (26) through a pipeline, and the air supply ring (15) is communicated with an output end of the ionization chamber (8).
9. A monitoring device in the growth process of single crystal diamond according to any one of claims 1 to 8, characterized in that the bracket (10) is provided with a moving component for adjusting the position of the monitoring device (11).
10. The device for monitoring the growth process of the single crystal diamond according to claim 9, wherein the moving assembly comprises a sliding rod (12) and a lead screw (13), the sliding rod (12) and the lead screw (13) are respectively rotatably mounted on the bracket (10), the sliding rod (12) and the lead screw (13) are both arranged through the upper part of the monitoring equipment (11), the lead screw (13) is matched with a threaded port on the monitoring equipment (11), and the bracket (10) is further provided with a rotating motor (14) in transmission connection with the lead screw (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010976204.4A CN112197728A (en) | 2020-09-16 | 2020-09-16 | Monitoring device in growth process of single crystal diamond |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010976204.4A CN112197728A (en) | 2020-09-16 | 2020-09-16 | Monitoring device in growth process of single crystal diamond |
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| CN112197728A true CN112197728A (en) | 2021-01-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010976204.4A Pending CN112197728A (en) | 2020-09-16 | 2020-09-16 | Monitoring device in growth process of single crystal diamond |
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Citations (10)
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| JP2006199989A (en) * | 2005-01-19 | 2006-08-03 | Ulvac Japan Ltd | Film deposition apparatus |
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| CN111321392A (en) * | 2020-04-22 | 2020-06-23 | 西安航空制动科技有限公司 | Gas stirring device of chemical vapor deposition furnace |
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| CN111560603A (en) * | 2020-06-15 | 2020-08-21 | 无锡盈芯半导体科技有限公司 | Spraying type air inlet CVD dynamic gas mixing device |
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2020
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Application publication date: 20210108 |