CN112129730A - Terahertz wave refractive index sensor based on sunflower photonic crystal structure - Google Patents
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Abstract
本发明公开了一种基于向日葵型光子晶体结构的太赫兹波折射率传感器,它包括衬底区域、信号输入端、信号输出端、空气区域、中心样品池区域;衬底区域由聚合物构成;空气区域由第一、二层环形周期等间距排列的空气孔和第三、四、五层中心对称半环形周期等间距排列的空气孔组成,中心样品池区域由对称空气孔样品单元组成。太赫兹波从信号输入端输入,依次经过信号输入端、空气区域、中心样品池区域,在信号输出端输出,通过光子晶体结构的作用实现对样品池中不同样品折射率的传感功能。本发明具有高灵敏度,易于加工等特点,在生物化学等领域具有广阔应用前景等优点。
The invention discloses a terahertz wave refractive index sensor based on a sunflower photonic crystal structure, which comprises a substrate area, a signal input end, a signal output end, an air area and a central sample pool area; the substrate area is composed of a polymer; The air area is composed of air holes arranged at equal intervals in the first and second layers, and air holes arranged at equal intervals in the third, fourth, and fifth layers of center symmetrical semi-annular period. The central sample pool area is composed of symmetrical air hole sample units. The terahertz wave is input from the signal input end, passes through the signal input end, the air area, and the central sample cell area in turn, and is output at the signal output end. The sensing function of the refractive index of different samples in the sample cell is realized through the function of the photonic crystal structure. The invention has the characteristics of high sensitivity, easy processing and the like, and has the advantages of broad application prospects in the fields of biochemistry and the like.
Description
技术领域technical field
本发明涉及太赫兹波折射率传感器,尤其涉及基于向日葵型光子晶体结构的太赫兹波折射率传感器。The present invention relates to a terahertz wave refractive index sensor, in particular to a terahertz wave refractive index sensor based on a sunflower-type photonic crystal structure.
背景技术Background technique
太赫兹波是位于毫米波与红外线之间,波长在30μm-3mm范围内的一段电磁波区域,又被称为T-射线。太赫兹技术的发展要依靠电子学科学技术和光子学科学技术,太赫兹波处于宏观电子学与微观光子学研究的交叉领域,对太赫兹的研究可以从电子学和光子学两个领域开展,填补电磁波谱的这一空白区域,具有非常重要的科学意义和研究价值。太赫兹系统主要由辐射源、探测器件和各种功能器件组成。在实际应用中,利用不同材料折射率与太赫兹波产生的共振效应,从而引起太赫兹波不同的响应,为太赫兹波的进一步应用奠定基础,具有良好性能的太赫兹波折射率传感器吸引了大量研究人员的关注。Terahertz waves are an electromagnetic wave region located between millimeter waves and infrared rays with wavelengths in the range of 30μm-3mm, also known as T-rays. The development of terahertz technology depends on the science and technology of electronics and photonics. Terahertz waves are in the intersection of macro-electronics and micro-photonics research. The research on terahertz can be carried out from the two fields of electronics and photonics. Filling this blank area of the electromagnetic spectrum has very important scientific significance and research value. Terahertz systems are mainly composed of radiation sources, detection devices and various functional devices. In practical applications, the resonant effect of the refractive index of different materials and the terahertz wave is used to cause different responses of the terahertz wave, which lays the foundation for the further application of the terahertz wave. The terahertz wave refractive index sensor with good performance attracts the attention of a large number of researchers.
太赫兹波折射率传感器在太赫兹系统中的重要作用使得不同结构的太赫兹波折射率传感器相继被提出。然而现有的太赫兹波折射率传感器大都存在着结构复杂、性能低、成本高、难加工等诸多缺点,所以研究结构简单、成本低、易制作的太赫兹波折射率传感器意义重大。The important role of terahertz wave refractive index sensors in terahertz systems has led to the successive proposals of terahertz wave refractive index sensors with different structures. However, most of the existing terahertz wave refractive index sensors have many shortcomings such as complex structure, low performance, high cost, and difficult processing. Therefore, it is of great significance to study the simple structure, low cost and easy fabrication of terahertz wave refractive index sensors.
发明内容SUMMARY OF THE INVENTION
本发明为了克服现有技术不足,提供一种结构简单、传感性能高、易加工的基于向日葵型光子晶体结构的太赫兹波折射率传感器。In order to overcome the deficiencies of the prior art, the present invention provides a terahertz wave refractive index sensor based on a sunflower photonic crystal structure with a simple structure, high sensing performance and easy processing.
为了达到上述目的,本发明的技术方案如下:In order to achieve the above object, technical scheme of the present invention is as follows:
一种基于向日葵型光子晶体结构的太赫兹波折射率传感器,其包括信号输入端、信号输出端、空气孔区域、衬底材料区域、中心样品池单元区域;所述空气孔区域由5层共114个开设于衬底材料区域上的空气孔单元组成,5层空气孔单元逐层布置于5个同心圆上,第一层由圆环形周期等间距排列的12个空气孔组成,第二层由圆环形周期等间距排列的18个空气孔组成,第三、四、五层均由两个呈镜像对称布置的半环形空气孔阵列组成,且两个半环形空气孔阵列的两端之间均留有间隔空间,第三、四、五层空气孔单元中包含的空气孔数量分别为22个、28个、34个;第三、四、五层空气孔单元的间隔空间沿径向相连,使得在衬底材料区域两侧分别形成信号输入端和信号输出端;所述中心样品池单元区域布置于第一层空气孔单元的圆环内,由中心上样品池单元和中心下样品池单元组成;所述中心上样品池单元的样品腔以第一高密度聚乙烯壁为界分为内外两层互不连通的空腔区域,第一高密度聚乙烯壁由第一半圆弧形段和第一劣弧形段首尾相连组成;所述中心下样品池单元的样品腔以第二高密度聚乙烯壁为界分为内外两层互不连通的空腔区域,第二高密度聚乙烯壁由第二劣弧形段和第二半圆弧形段首尾相连组成;所述中心下样品池单元与中心上样品池单元以镜像对称形式布置;太赫兹波从信号输入端输入,依次经过衬底材料区域和空气孔区域进入中心样品池单元区域,最后从信号输出端输出,通过空气孔区域光子晶体结构的作用实现对中心上样品池单元和中心下样品池单元中不同样品折射率的传感功能。上述技术方案可采用如下优选方式:A terahertz wave refractive index sensor based on a sunflower photonic crystal structure, which includes a signal input end, a signal output end, an air hole area, a substrate material area, and a central sample cell unit area; the air hole area is composed of 5 layers in total. It consists of 114 air hole units opened on the substrate material area, and 5 layers of air hole units are arranged layer by layer on 5 concentric circles. The third, fourth and fifth layers are composed of two semi-circular air hole arrays arranged in mirror symmetry, and the two ends of the two semi-circular air hole arrays are composed of 18 air holes arranged at equal intervals. There is a space between them. The number of air holes included in the third, fourth and fifth layers of air hole units is 22, 28 and 34 respectively; the space between the third, fourth and fifth layers of air hole units is along the diameter are connected to each other, so that a signal input end and a signal output end are respectively formed on both sides of the substrate material area; the central sample cell unit area is arranged in the ring of the air hole unit of the first layer, and consists of an upper sample cell unit in the center and a lower center sample cell unit. The sample cell unit is composed of a sample cell unit; the sample cavity of the sample cell unit on the center is divided into two layers of cavity areas that are not connected to each other with the first high-density polyethylene wall as the boundary, and the first high-density polyethylene wall is formed by a first semicircular arc. The sample cavity of the lower sample cell unit in the center is divided into two layers of inner and outer unconnected cavity areas with the second high-density polyethylene wall as the boundary, and the second high-density polyethylene The polyethylene wall is composed of a second inferior arc section and a second semi-circular arc section connected end to end; the lower center sample cell unit and the center upper sample cell unit are arranged in a mirror-symmetrical form; the terahertz wave is input from the signal input end, and sequentially It enters the central sample cell unit area through the substrate material area and the air hole area, and finally outputs from the signal output end. Through the action of the photonic crystal structure in the air hole area, the refractive index of the different samples in the central upper sample cell unit and the central lower sample cell unit is realized. sensing function. The above-mentioned technical scheme can adopt the following preferred ways:
作为优选,所述的空气孔区域中的每一个空气孔半径均为40~44μm,同一层以及相邻层空气孔单元的两个相邻空气孔之间的间距均为14~18μmPreferably, the radius of each air hole in the air hole area is 40-44 μm, and the distance between two adjacent air holes of the same layer and the air hole unit of the adjacent layer is 14-18 μm
作为优选,所述的空气孔区域中,以所述同心圆的圆心作为原点,空气孔位置排布方式表示为:Preferably, in the air hole area, the center of the concentric circles is taken as the origin, and the arrangement of the air holes is expressed as:
其中,a是晶格常数,M是空气孔单元的层数,m是一层空气孔单元中空气孔的序数,1≤m≤6M,x(M,m)是第M层空气孔单元第m个空气孔的x轴坐标,y(M,m)是第M层空气孔单元中第m个空气孔的y轴坐标。where a is the lattice constant, M is the number of layers of air hole units, m is the number of air holes in a layer of air hole units, 1≤m≤6M, x(M,m) is the number of air hole units in the Mth layer. The x-axis coordinates of the m air holes, y(M,m) is the y-axis coordinate of the mth air hole in the M-th layer of air hole units.
作为优选,所述的衬底材料区域的材质为高密度聚乙烯。Preferably, the material of the substrate material region is high-density polyethylene.
作为优选,所述的衬底材料区域折射率n为1.535。Preferably, the refractive index n of the substrate material region is 1.535.
作为优选,所述的中心上样品池单元和中心下样品池单元之间的间距为0。Preferably, the distance between the sample cell unit above the center and the sample cell unit below the center is 0.
作为优选,所述的中心上样品池单元中,第一半圆弧形段的内半径为78~82μm,外半径为98~102μm;第一劣弧形段的内半径和外半径均为123~127μm;第一高密度聚乙烯壁厚度为10μm。Preferably, in the sample cell unit on the center, the inner radius of the first semi-circular arc segment is 78-82 μm, and the outer radius is 98-102 μm; the inner radius and outer radius of the first inferior arc segment are both 123-82 μm 127 μm; the first HDPE wall thickness is 10 μm.
作为优选,所述的中心下样品池单元中,第二劣弧形段的内半径和外半径均为123~127μm;第二半圆弧形段的内半径为78~82μm,外半径为98~102μm;第二高密度聚乙烯壁厚度为10μm。Preferably, in the sample cell unit under the center, the inner radius and outer radius of the second inferior arc segment are both 123-127 μm; the inner radius of the second semi-circular arc segment is 78-82 μm, and the outer radius is 98- 102 μm; the second HDPE wall thickness is 10 μm.
作为优选,整个传感器通过3D打印成型。Preferably, the entire sensor is formed by 3D printing.
相对于现有技术而言,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
本发明可由较为常见的高密度聚乙烯等有机高分子聚合物替代硅材料作为衬底材料,使用成熟廉价的3D打印技术替代硅刻蚀技术制作传感器,通过3D打印技术,使用聚合物材料打印折射率传感器,可以在获得高精度高性能器件的同时降低制造成本;在中间样品区域使用较大的样品池设计,增加了太赫兹波与样品的作用面积,能够实现更高的灵敏度。本发明的折射率传感器具有性能高,易于加工等优点,可以在生物、化学传感等太赫兹应用系统中发挥重要作用。In the present invention, silicon materials can be replaced by organic macromolecular polymers such as relatively common high-density polyethylene as substrate materials, and mature and inexpensive 3D printing technology is used to replace silicon etching technology to make sensors, and the 3D printing technology is used to print refraction using polymer materials. The rate sensor can reduce the manufacturing cost while obtaining high-precision and high-performance devices; using a larger sample cell design in the middle sample area increases the interaction area between the terahertz wave and the sample, and can achieve higher sensitivity. The refractive index sensor of the invention has the advantages of high performance, easy processing and the like, and can play an important role in terahertz application systems such as biological and chemical sensing.
附图说明Description of drawings
图1是基于向日葵型光子晶体结构的太赫兹波折射率传感器的结构示意图;1 is a schematic structural diagram of a terahertz wave refractive index sensor based on a sunflower-type photonic crystal structure;
图2是基于向日葵型光子晶体结构的太赫兹波折射率传感器的样品池结构单元;Fig. 2 is the sample cell structure unit of the terahertz wave refractive index sensor based on the sunflower type photonic crystal structure;
图3为基于向日葵型光子晶体结构的太赫兹波折射率传感器在分析不同样品折射率时的透射光谱。Fig. 3 is the transmission spectrum of the terahertz wave refractive index sensor based on the sunflower photonic crystal structure when analyzing the refractive index of different samples.
具体实施方式Detailed ways
如图1~2所示,本发明的一个实施例中提供了一种基于向日葵型光子晶体结构的太赫兹波折射率传感器,其包括信号输入端1、信号输出端2、空气孔区域3、衬底材料区域4、中心样品池单元区域7。其中衬底材料区域4即整个传感器的衬底,信号输入端1、信号输出端2、空气孔区域3和中心样品池单元区域7均设置于衬底上。整个传感器可以采用衬底材料,通过3D打印成型。As shown in Figures 1-2, an embodiment of the present invention provides a terahertz wave refractive index sensor based on a sunflower photonic crystal structure, which includes a signal input end 1, a signal output end 2, an
空气孔区域3由5层共114个开设于衬底材料区域4上的空气孔单元组成,5层空气孔单元逐层布置于5个同心圆上,每一层空气孔单元中的所有空气孔圆心位于同一圆上。第一层空气孔单元由圆环形周期等间距排列的12个空气孔组成,12个空气孔围绕成一个完整的圆环。第二层由圆环形周期等间距排列的18个空气孔组成,18个空气孔围绕成一个完整的圆环。第三、四、五层均由两个呈镜像对称布置的半环形空气孔阵列组成,且两个半环形空气孔阵列的两端之间均留有间隔空间。因此第三、四、五层的空气孔并非完整的圆环,而是相隔一定的间距。第三、四、五层空气孔单元中包含的空气孔数量分别为22个、28个、34个。第三、四、五层空气孔单元的间隔空间沿径向相连,使得在衬底材料区域4两侧分别形成信号输入端1和信号输出端2。在实际加工时,信号输入端1和信号输出端2位置的衬底不开孔,保持衬底材料的连续即可。The
中心样品池单元区域7布置于第一层空气孔单元的圆环内,由中心上样品池单元5和中心下样品池单元6组成。整个中心样品池单元区域7的中心与前述同心圆的圆心重合。中心上样品池单元5和中心下样品池单元6均为开设于衬底上的样品池,其样品腔用于添加不同折射率的待测试样品。参见图2所示,中心上样品池单元5的样品腔以第一高密度聚乙烯壁为界分为内外两层互不连通的空腔区域,且第一高密度聚乙烯壁由第一半圆弧形段8和第一劣弧形段9首尾相连组成。同样的,中心下样品池单元6的样品腔以第二高密度聚乙烯壁为界分为内外两层互不连通的空腔区域,第二高密度聚乙烯壁由第二劣弧形段10和第二半圆弧形段11首尾相连组成。中心下样品池单元6与中心上样品池单元5以镜像对称形式布置。The central sample
在该传感器中,太赫兹波从信号输入端1输入,依次经过衬底材料区域4、空气孔区域3进入中心样品池单元区域7,经过样品池内的样品折射后再经过空气孔区域3、衬底材料区域4从信号输出端2输出,在该过程中通过空气孔区域3光子晶体结构的作用实现对中心上样品池单元5和中心下样品池单元6中不同样品折射率的传感功能。In this sensor, the terahertz wave is input from the signal input end 1, passes through the
本发明中各部件的具体材料和参数可以设置如下:The specific materials and parameters of each component in the present invention can be set as follows:
空气孔区域3中的每一个空气孔半径均为40~44μm,同一层以及相邻层空气孔单元的两个相邻空气孔之间的间距均为14~18μm。空气孔区域3中,以所述同心圆的圆心作为原点,空气孔位置排布方式表示为:The radius of each air hole in the
其中,a是晶格常数,M是空气孔单元的层数,m是一层空气孔单元中空气孔的序数,1≤m≤6M,x(M,m)是第M层空气孔单元中第m个空气孔的x轴坐标,y(M,m)是第M层空气孔单元中第m个空气孔的y轴坐标。Among them, a is the lattice constant, M is the number of layers of air holes, m is the number of air holes in a layer of air holes, 1≤m≤6M, x(M,m) is the number of air holes in the M-th layer of air holes The x-axis coordinate of the m-th air hole, y(M,m) is the y-axis coordinate of the m-th air hole in the M-th air hole unit.
衬底材料区域4的材质为高密度聚乙烯。衬底材料区域4折射率n为1.535。中心上样品池单元5和中心下样品池单元6之间的间距为0,即第一劣弧形段9和第二劣弧形段10贴合。中心上样品池单元5中,第一半圆弧形段8的内半径为78~82μm,外半径为98~102μm;第一劣弧形段9的内半径和外半径均为123~127μm;第一高密度聚乙烯壁厚度为10μm。中心下样品池单元6中,第二劣弧形段10的内半径和外半径均为123~127μm;第二半圆弧形段11的内半径为78~82μm,外半径为98~102μm;第二高密度聚乙烯壁厚度为10μm。整个传感器以信号输入端1和信号输出端2的中心连线为中心呈镜像对称。The material of the
下面在基于向日葵型光子晶体结构的太赫兹波折射率传感器的基础上,通过一个实施例说明其具体技术效果。In the following, on the basis of the terahertz wave refractive index sensor based on the sunflower photonic crystal structure, its specific technical effect will be described through an embodiment.
实施例1Example 1
本实施例中,基于向日葵型光子晶体结构的太赫兹波折射率传感器的结构和材料应用均在上述内容详细叙述,因此在本实施例中不再赘述。基于向日葵型光子晶体结构的太赫兹波折射率传感器的结构参数具体为:In this embodiment, the structure and material application of the terahertz wave refractive index sensor based on the sunflower-type photonic crystal structure are described in detail in the above content, and therefore are not repeated in this embodiment. The structural parameters of the terahertz wave refractive index sensor based on the sunflower photonic crystal structure are as follows:
空气孔区域3中的每一个空气孔半径均为42μm,同一层以及相邻层空气孔单元的两个相邻空气孔之间的间距均为16μm。空气孔区域3中,以所述同心圆的圆心作为原点,空气孔位置排布方式表示为:其中,a是晶格常数,M是空气孔单元的层数,m是一层空气孔单元中空气孔的序数,1≤m≤6M,x(M,m)是第M层空气孔单元中第m个空气孔的x轴坐标,y(M,m)是第M层空气孔单元中第m个空气孔的y轴坐标。衬底材料区域4的材质为高密度聚乙烯。衬底材料区域4折射率n为1.535。中心上样品池单元5和中心下样品池单元6之间的间距为0。中心上样品池单元5中,第一半圆弧形段8的内半径为80μm,外半径为100μm;第一劣弧形段9的内半径和外半径均为125μm;第一高密度聚乙烯壁厚度为10μm。中心下样品池单元6中,第二劣弧形段10的内半径和外半径均为125μm;第二半圆弧形段11的内半径为80μm,外半径为100μm;第二高密度聚乙烯壁厚度为10μm。中心下样品池单元6与中心上样品池单元5镜像对称。中心下样品池单元6与中心上样品池单元5中可填充不同折射率的样品。图3为填充不同折射率样品时的太赫兹波透射谱。由图3可知,当待测试样品折射率在1.0到1.7之间变化时,传感器的谐振频率从1.154THz降低到1.141THz,可以通过谐振峰的频率实现不同的折射率结果。The radius of each air hole in the
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