CN112099319B - Sub-resolution auxiliary graph adding method and device and computer readable storage medium - Google Patents

Abstract

The invention discloses a sub-resolution auxiliary graphics adding method and device, and a computer-readable storage medium. The method includes: adding sub-resolution auxiliary graphics to the initial layout, calculating the evaluation values of the multiple sub-resolution auxiliary graphics respectively when the added multiple sub-resolution auxiliary graphics meet the set conditions, and based on the multiple sub-resolution auxiliary graphics. The evaluation value of the resolution auxiliary graphics clears the corresponding sub-resolution auxiliary graphics, otherwise, continue to add sub-resolution auxiliary graphics; finally output the layout. The device may include an auxiliary graphics adding module, an evaluation value calculation module, an auxiliary graphics cleaning module and a final layout output module. The present invention innovatively performs conflict cleanup in the process of adding sub-resolution auxiliary graphics, which can effectively avoid the workload and complexity of conflict cleanup after all sub-resolution auxiliary graphics are added. Moreover, the present invention can also obtain greater The photolithography process window can significantly improve the photolithography imaging contrast of the target pattern.

Description

Sub-resolution auxiliary graphics adding method and device, computer-readable storage medium

Technical field

The present invention relates to the technical field of photolithographic resolution enhancement. More specifically, the present invention relates to a sub-resolution auxiliary graphics adding method and device, and a computer-readable storage medium.

Background technique

In the lithography process, the lithography process window of dense patterns will be larger than that of sparse patterns. It can be seen that sparse graphics will limit the overall lithography process window. In order to solve this problem, some small graphics are added around the sparse graphics in the integrated circuit design layout, so that the sparse graphics look like dense graphics from an optical perspective, with the same characteristics as dense graphics. Similar geometric distribution of graphics can achieve the purpose of enhancing the imaging contrast of sparse graphics and improving the overall process window. These small graphics must be smaller than the resolution of the photolithography machine. Therefore, these small graphics only scatter the light during exposure and will not be transferred to the photoresist. These small graphics are generally called sub-resolution auxiliary graphics (SRAF). , Sub-Resolution Assistant Feature) or Scattering Bar; sparse graphics can be called target graphics.

The placement of sub-resolution auxiliary graphics needs to follow certain rules. Placing it in the correct position will improve the imaging contrast of the target pattern; but if it is placed in the wrong position, for example, the scattered light, diffracted light of the sub-resolution auxiliary pattern will be different from the target pattern. On the contrary, it will weaken the imaging contrast of the target graphics. In actual mass production, sub-resolution auxiliary graphics are often placed based on a series of established rules. The traditional way to formulate rules is model-based calculation. However, as the process nodes continue to shrink, the size and period of the target graphics are also constantly shrinking, and the placement accuracy requirements for sub-resolution auxiliary graphics are also getting higher and higher. Using The model-based calculation method consumes too much computing resources, takes a long time, and is difficult to be truly applied in actual production. Therefore, the rule-based sub-resolution auxiliary graphics placement scheme is increasingly used, but it is difficult to place sub-resolution graphics in this method. Conflicts between auxiliary graphics often occur when auxiliary graphics are used, which restricts the placement accuracy of sub-resolution auxiliary graphics. Therefore, there is an urgent need to improve and optimize the rule-based sub-resolution auxiliary graphics placement scheme.

Contents of the invention

In order to solve the problem of conflicts between auxiliary graphics and restricting the placement accuracy of sub-resolution auxiliary graphics in existing rule-based sub-resolution auxiliary graphics placement schemes, the present invention provides a method and device for adding sub-resolution auxiliary graphics. The computer-readable storage medium can effectively improve the placement accuracy of rule-based sub-resolution auxiliary graphics, and can significantly reduce errors in the conflict clearing process, so as to effectively solve at least one problem existing in the existing technology.

In order to achieve the above technical objectives, some embodiments of the present invention can provide a method for adding sub-resolution auxiliary graphics. The method for adding sub-resolution auxiliary graphics includes but is not limited to the following steps.

Add sub-resolution auxiliary graphics to the initial layout.

Calculate the evaluation values of the multiple sub-resolution auxiliary graphics respectively when the added sub-resolution auxiliary graphics meet the set conditions, and clean up the corresponding sub-resolution auxiliary graphics based on the evaluation values of the multiple sub-resolution auxiliary graphics. Resolution assist graphics. Otherwise continue adding sub-resolution auxiliary graphics.

Output the layout after adding sub-resolution auxiliary graphics at all locations.

Further, the set conditions include: at least two adjacent sub-resolution auxiliary patterns overlap or the sub-resolution auxiliary patterns violate mask manufacturing rules.

Further, the method also includes the step of setting at least one detection point on the edge of the target pattern of the initial layout, and the target pattern is the pattern to be transferred to the wafer.

The step of calculating the evaluation values of the plurality of sub-resolution auxiliary graphics respectively includes: calculating the logarithmic slope value of the light intensity at surrounding detection points of the plurality of sub-resolution auxiliary graphics, and then using the light intensity The logarithmic slope value calculates the evaluation value of the sub-resolution auxiliary graphics.

Further, the step of calculating the evaluation value of the sub-resolution auxiliary graphics using the light intensity logarithmic slope value includes:

The logarithmic slope value of the light intensity at all surrounding detection points of the sub-resolution auxiliary graphics to be calculated is calculated.

The weighted sum of the logarithmic slope values of the light intensity at all surrounding detection points is calculated to obtain the evaluation value of the sub-resolution auxiliary graphic.

Further, the step of cleaning up the corresponding sub-resolution auxiliary graphics includes:

Select the sub-resolution auxiliary graphics with the smallest evaluation value among the plurality of sub-resolution auxiliary graphics.

The sub-resolution auxiliary graphics with the minimum evaluation value are moved, reduced in area, or cleared.

Further, the step of setting at least one detection point at the edge of the target graphic of the initial layout includes:

Get the coordinates of the inflection point of the target graphic.

The position of the detection point is selected so that the distance between the position coordinates of the detection point and the position coordinates of the inflection point is greater than the first preset distance.

Further, the step of setting at least one detection point at the edge of the target graphic of the initial layout includes:

Get the endpoint position coordinates of the target shape.

The position of the detection point is selected so that the distance between the position coordinates of the detection point and the position coordinates of the end point is greater than the second preset distance.

Further, the steps for adding sub-resolution auxiliary graphics include:

Read the rule list.

Add sub-resolution auxiliary graphics according to the content in the rule list.

The content in the rule list includes geometric information, position information and applicable condition information of sub-resolution auxiliary graphics to be added.

In order to achieve the above technical objectives, other embodiments of the present invention can also provide a device for adding sub-resolution auxiliary graphics. The device for adding sub-resolution auxiliary graphics may include but is not limited to an auxiliary graphics adding module, an evaluation value calculation module, and an auxiliary graphics adding module. Cleaning module and final layout output module.

The auxiliary graphics adding module is used to add sub-resolution auxiliary graphics to the initial layout and to continue adding sub-resolution auxiliary graphics when the multiple added sub-resolution auxiliary graphics do not meet the set conditions.

An evaluation value calculation module is used to respectively calculate the evaluation values of the multiple sub-resolution auxiliary graphics when the multiple added sub-resolution auxiliary graphics meet the set conditions.

The auxiliary graphics cleaning module is used to clean the corresponding sub-resolution auxiliary graphics based on the evaluation values of the plurality of sub-resolution auxiliary graphics.

The final layout output module is used to output the layout after adding sub-resolution auxiliary graphics at all locations.

In order to achieve the above technical objectives, one or more embodiments of the present invention can also provide a computer-readable storage medium, the computer-readable storage medium stores computer-readable instructions, and the computer-readable instructions are stored in a computer-readable storage medium. When executed by or multiple processors, one or more processors are caused to execute the steps of the sub-resolution auxiliary graphics adding method as described in any one or more embodiments of the present invention.

The beneficial effects of the present invention are: the present invention innovatively performs conflict cleanup on sub-resolution auxiliary graphics during the process of adding sub-resolution auxiliary graphics. This method can not only effectively avoid conflict cleanup after all sub-resolution auxiliary graphics are added. The workload and complexity of the process are reduced, and the present invention can also enable the target pattern to obtain a larger photolithography process window, thereby significantly improving the photolithography imaging contrast of the target pattern. On the premise of effectively clearing the conflicts between at least two sub-resolution auxiliary graphics, the present invention can fully ensure that the sub-resolution auxiliary graphics left after cleaning have the effect of enhancing the imaging contrast of the target graphics; therefore, the present invention significantly improves the imaging contrast of the target graphics. Rule-based sub-resolution assists graphics placement accuracy, and can greatly reduce errors in the conflict cleanup process, with good reliability.

This invention innovatively uses the logarithmic slope of the light intensity at the detection point of the target pattern to calculate the evaluation value of the sub-resolution auxiliary graphics, so that the impact of the sub-resolution auxiliary graphics on the surrounding target graphics can be judged more accurately and objectively, thereby ensuring placement accuracy. and improve the imaging contrast of the target graphics.

Description of the drawings

Figure 1 shows a schematic flowchart of a method for adding sub-resolution auxiliary graphics in some embodiments of the present invention.

Figure 2 shows a schematic distribution diagram of target graphics and added uncleaned sub-resolution auxiliary graphics in some embodiments of the present invention.

Figure 3 shows a schematic distribution diagram of the target graphics and the sub-resolution auxiliary graphics after cleaning the sub-resolution auxiliary graphics in Figure 2 in some embodiments of the present invention.

Detailed ways

The sub-resolution auxiliary graphics adding method and device and the computer-readable storage medium provided by the present invention will be explained and described in detail below with reference to the accompanying drawings.

As shown in Figure 1, some embodiments of the present invention can provide a method for adding sub-resolution auxiliary graphics and performing conflict cleanup based on evaluation values. The method for adding sub-resolution auxiliary graphics may include but is not limited to the following steps.

First provide an initial layout of sub-resolution auxiliary graphics to be added, and prepare a list of rules for adding sub-resolution auxiliary graphics. Before setting the auxiliary pattern, the method further includes the step of setting at least one detection point on the edge of the target pattern of the initial layout, and the target pattern is the pattern to be transferred to the wafer. In some embodiments of the present invention, the step of setting at least one detection point on the edge of the target graphic of the initial layout may include: obtaining the inflection point position coordinates of the target graphic; selecting the position of the detection point so that the position coordinates of the detection point are between the position coordinates of the detection point and the inflection point position coordinates. The distance is greater than the first preset distance. As a simultaneous or parallel solution, the step of setting at least one detection point on the edge of the target graphic of the initial layout may include: obtaining the end point position coordinates of the target graphic; selecting the position of the detection point so that the detection point position coordinates are consistent with the end point position coordinates The distance between them is greater than the second preset distance. The specific values of the first preset distance and the second preset distance can be reasonably set according to the actual situation, for example, any value between 10 nm and 30 nm. In some embodiments of the present invention, it is preferable to set the detection point at the midpoint of the four sides of the target figure to avoid inflection points and/or endpoints to reduce errors, thereby improving the stability and reliability of subsequent calculations and improving placement accuracy.

As shown in Figure 2, sub-resolution auxiliary graphics are added to the initial layout. The target graphics in some embodiments of the present invention may include but are not limited to the first target graphics 101, the second target graphics 102, and the third target graphics 103. , the fourth target graphic 104, and the fifth target graphic 105, wherein the first target graphic 101, the second target graphic 102, and the third target graphic 103 may constitute a periodically arranged one-dimensional line structure graphic. The first target graphic 101 and The fourth target graphic 104 can form a one-dimensional line structure with opposite end points, and the second target graphic 102, the third target graphic 103, and the fifth target graphic 105 can form a one-dimensional line structure with opposite end points and edges; the detection points can include, for example, but The invention is not limited to the detection point 301 (marked black square) in Figure 2. The present invention can set detection points 301 at the midpoint of the four sides of the target figure and at the position close to the end point. It should be understood that not all detection points are included in the figure. All points are marked, and only the detection points adjacent to the conflicting sub-resolution auxiliary graphics are shown; the sub-resolution auxiliary graphics in some embodiments of the present invention may include but are not limited to the first auxiliary graphics 201, the second auxiliary graphics 202. The third auxiliary graphic 203, the fourth auxiliary graphic 204, the fifth auxiliary graphic 205, the sixth auxiliary graphic 206, the seventh auxiliary graphic 207, the eighth auxiliary graphic 208, the ninth auxiliary graphic 209 and the tenth auxiliary graphic 210. In some embodiments of the present invention, the line width of each target pattern may be 45 nm, for example.

The step of adding sub-resolution auxiliary graphics includes: reading the rule list according to the geometric distribution characteristics of the target graphics, so as to add the sub-resolution auxiliary graphics according to the content in the selected rule list (that is, according to the rules). The content in the rule list may include, but is not limited to, sub-resolution auxiliary graphic geometry information, position information and applicable condition information to be added. The layout in the present invention refers to the integrated circuit design layout. More specifically, the geometric information includes information such as the number, length, width, and angle of the sub-resolution auxiliary graphics; the position information includes the positional relationship information between the sub-resolution auxiliary graphics and the target graphics, for example, including the sub-resolution auxiliary graphics and the target graphics. The width of the space between target graphics, or the distance between the center line of the sub-resolution auxiliary graphics and the center line of the target graphics; the applicable condition information includes the scenario in which the current rule is used, for example, for a one-dimensional periodic line structure, the applicable condition information is specified in The current rules can only be used within a certain period.

The method for determining whether the added sub-resolution auxiliary graphics conflicts with the present invention is specifically: determining whether the added multiple sub-resolution auxiliary graphics meet the set conditions, wherein the set conditions in some embodiments of the present invention Including but not limited to: there is an overlap between at least two adjacent sub-resolution auxiliary graphics or the sub-resolution auxiliary graphics violates the mask manufacturing rules. That is, when there is overlap or violation of the mask manufacturing rules, it is determined that a conflict occurs and needs to be corrected. Clean up. As shown in Figure 2, there is an overlapping area between the fifth auxiliary graphic 205 and the sixth auxiliary graphic 206, and the space between the second target graphic 102 and the fifth target graphic 105 cannot retain two auxiliary graphics at the same time (i.e., the second auxiliary graphic). Five auxiliary graphics 205 and sixth auxiliary graphics 206), it can be seen that the fifth auxiliary graphics 205 and the sixth auxiliary graphics 206 meet the set conditions, and the conflicts between the fifth auxiliary graphics 205 and the sixth auxiliary graphics 206 need to be cleared.

When the multiple added sub-resolution auxiliary graphics meet the set conditions, that is, when there is a conflict, the evaluation values of the multiple sub-resolution auxiliary graphics are calculated respectively. Therefore, the present invention innovatively uses the evaluation values to determine the pair of sub-resolution auxiliary graphics. Depending on the contribution of surrounding target graphics, sub-resolution auxiliary graphics with appropriate positions will significantly enhance the imaging of the target graphics, while sub-resolution auxiliary graphics with inappropriate locations may weaken the imaging of the target graphics. In some embodiments of the present invention, the step of calculating the evaluation values of multiple sub-resolution auxiliary graphics respectively includes: calculating the logarithmic slope (Image Log Slope, ILS) values of the multiple sub-resolution auxiliary graphics at surrounding detection points. , and then use the logarithmic slope value of the light intensity to calculate the evaluation value of the sub-resolution auxiliary graphics.

More specifically, the logarithmic slope of the light intensity is a more effective and intuitive evaluation index. The steps of using the logarithmic slope value of the light intensity to calculate the evaluation value of the sub-resolution auxiliary graphics may include but are not limited to: statistics of the evaluation value to be calculated. The logarithmic slope value of the light intensity at all surrounding detection points of the sub-resolution auxiliary graphics; the weighted sum of the logarithmic slope values of the light intensity at all surrounding detection points is calculated to obtain the evaluation value of the sub-resolution auxiliary graphics. Therefore, the present invention innovatively adopts the logarithmic slope calculation method of light intensity in the conflict clearing process of sub-resolution auxiliary graphics, thereby achieving more accurate placement accuracy of sub-resolution auxiliary graphics.

As shown in Figure 3, when there is a conflict between auxiliary graphics, the corresponding sub-resolution auxiliary graphics are cleared based on the evaluation values of multiple sub-resolution auxiliary graphics. In some embodiments of the present invention, the step of cleaning up corresponding sub-resolution auxiliary graphics includes: selecting the sub-resolution auxiliary graphics with the smallest evaluation value among multiple sub-resolution auxiliary graphics; and then selecting the sub-resolution auxiliary graphics with the minimum evaluation value. Perform a moving operation, an area reduction operation, a clearing operation, etc., for example, if one of them must be discarded, the sub-resolution auxiliary graphics with the smallest evaluation value will be discarded. In some preferred embodiments of the present invention, another conflict check is performed after the conflict clearing is completed, that is, it is judged again whether the multiple sub-resolution auxiliary graphics that have been added meet the set conditions. Therefore, the present invention will perform a conflict check after the conflict is indeed resolved. , before proceeding with subsequent operations.

The formula for calculating the weighted sum of the logarithmic slope values of the light intensity at all detection points around the sub-resolution auxiliary graphics (the fifth auxiliary graphics 205 and the sixth auxiliary graphics 206) shown in Figure 2 is as follows:

Among them, P _SRAF represents the evaluation value, w _i represents the weight of the i-th detection point, and ILS _i represents the logarithmic slope value of the light intensity of the i-th detection point. The detection point weight can be adjusted accordingly according to the importance of the target graphic.

In this embodiment, the same weight can be set for five detection points. After calculation, it can be obtained that: the evaluation value of the fifth auxiliary graphic 205 is 17.6, and the evaluation value of the sixth auxiliary graphic 206 is 18.2. It can be seen from this that the sixth auxiliary pattern 206 contributes more to the imaging contrast of the target pattern, so the fifth auxiliary pattern 205 needs to be cleaned. The fifth auxiliary pattern 205 in the illustration simultaneously contributes to the first target pattern 101 and the fourth The target pattern 104 plays a role, so in this embodiment, you can choose to perform an area reduction operation on the fifth auxiliary pattern 205. Specifically, the fifth auxiliary pattern 205 can be shortened to a distance between the right end point and the left end point of the sixth auxiliary pattern 206 that meets the mask manufacturing rules. length, the final result can be shown in Figure 3. At this time, the fifth auxiliary graphic 205 and the sixth auxiliary graphic 206 no longer meet the set conditions, and there is currently no conflict.

When multiple added sub-resolution auxiliary graphics do not meet the set conditions, that is, when it is determined that there is no conflict, continue to add sub-resolution auxiliary graphics. More specifically, when the multiple added sub-resolution auxiliary graphics do not meet the set conditions, it is judged whether all the sub-resolution auxiliary graphics have been added, and continue when the addition of all sub-resolution auxiliary graphics has not been completed. Add sub-resolution auxiliary graphics or output the layout after adding sub-resolution auxiliary graphics at all locations. The output layout does not contain any form of sub-resolution auxiliary graphics conflicts. During specific implementation, the sub-resolution auxiliary graphics addition simulation of the present invention can be performed on a computer or after the test is completed, the sub-resolution auxiliary graphics to be added around the target graphics on the initial layout are determined.

There are also some embodiments of the present invention that can provide a device for adding sub-resolution auxiliary graphics. The device for adding sub-resolution auxiliary graphics includes but is not limited to an auxiliary graphics adding module, an evaluation value calculation module, an auxiliary graphics cleaning module and a final layout output module. .

The auxiliary graphics adding module is used to add sub-resolution auxiliary graphics to the initial layout and to continue adding sub-resolution auxiliary graphics when the multiple added sub-resolution auxiliary graphics do not meet the set conditions. The set conditions in one or more embodiments of the present invention include: at least two adjacent sub-resolution auxiliary patterns overlap or the sub-resolution auxiliary patterns violate mask manufacturing rules. The auxiliary graphics adding module is specifically used to read the rule list and add sub-resolution auxiliary graphics according to the content in the rule list. The content in the rule list includes the geometric information, position information and applicable condition information of the sub-resolution auxiliary graphics to be added. .

The evaluation value calculation module is used to calculate the evaluation values of multiple sub-resolution auxiliary graphics respectively when the multiple added sub-resolution auxiliary graphics meet the set conditions.

The device for adding sub-resolution auxiliary graphics in other embodiments of the present invention may also include a detection point setting module. The detection point setting module is used to set at least one detection point on the edge of the target graphic of the initial layout. The target graphic is to be transferred to the crystal. Figure on the circle. The detection point setting module is also used to obtain the inflection point position coordinates of the target graphic and select the position of the detection point, so that the distance between the detection point position coordinates and the inflection point position coordinates is greater than the first preset distance, and/or the detection point position coordinates are The distance from the endpoint position coordinate is greater than the second preset distance.

More specifically, the evaluation value calculation module is also used to calculate the light intensity logarithmic slope values of multiple sub-resolution auxiliary graphics at surrounding detection points, and to use these light intensity logarithmic slope values to calculate sub-resolution The evaluation value of the auxiliary graphics; among which, the evaluation value calculation module can be specifically used to count the logarithmic slope value of the light intensity at all surrounding detection points of the sub-resolution auxiliary graphics to be calculated, and is used to calculate the logarithmic slope value of the light intensity at all surrounding detection points. The logarithmic slope values of the light intensity are weighted and calculated to obtain the evaluation value of the sub-resolution auxiliary graphics.

The auxiliary graphics cleaning module is used to clean the corresponding sub-resolution auxiliary graphics based on the evaluation values of multiple sub-resolution auxiliary graphics. Among them, the auxiliary graphics cleaning module can be specifically used to select the sub-resolution auxiliary graphics with the smallest evaluation value among multiple sub-resolution auxiliary graphics, and is used to move or reduce the area of the sub-resolution auxiliary graphics with the minimum evaluation value. or clear operation.

The final layout output module is used to output the final layout after adding sub-resolution auxiliary graphics at all locations.

One or more embodiments of the present invention can provide a computer-readable storage medium, and computer-readable instructions are stored on the computer-readable storage medium. When executed by one or more processors, the computer-readable instructions cause one or more Multiple processors execute the steps of the sub-resolution auxiliary graphics adding method in any embodiment of the present invention. More specifically, the sub-resolution auxiliary graphics adding method in some embodiments of the present invention may include but is not limited to the following: Steps: Add sub-resolution auxiliary graphics to the initial layout. The steps for adding sub-resolution auxiliary graphics include: reading the rule list and adding the sub-resolution auxiliary graphics according to the content in the rule list. Among them, the content in the rule list includes the geometric information, position information and applicable condition information of the sub-resolution auxiliary graphics to be added. Determine whether the multiple added sub-resolution auxiliary graphics meet the set conditions. The set conditions include but are not limited to: at least two adjacent sub-resolution auxiliary graphics overlap or the sub-resolution auxiliary graphics violate the mask. Manufacturing rules. Calculate the evaluation values of the multiple sub-resolution auxiliary graphics respectively when the multiple added sub-resolution auxiliary graphics meet the set conditions. Before calculating the evaluation value, for example before setting the auxiliary pattern, the method further includes the step of setting at least one detection point on the edge of the target pattern of the initial layout, and the target pattern is the pattern to be transferred to the wafer. The step of setting at least one detection point on the edge of the target graphic of the initial layout includes: obtaining the inflection point position coordinates of the target graphic; selecting the position of the detection point so that the distance between the detection point position coordinates and the inflection point position coordinates is greater than the first preset distance. As a simultaneous or parallel solution, the steps of setting at least one detection point on the edge of the target graphic of the initial layout include: obtaining the endpoint position coordinates of the target graphic; selecting the position of the detection point so that the position coordinates of the detection point are equal to the endpoint position coordinates. The distance between them is greater than the second preset distance. The steps of calculating the evaluation values of multiple sub-resolution auxiliary graphics respectively include: calculating the logarithmic slope value of the light intensity at the surrounding detection points of the multiple sub-resolution auxiliary graphics, and then using the logarithmic slope value of the light intensity to calculate the sub-resolution The evaluation value of rate auxiliary graphics. More specifically, the step of calculating the evaluation value of the sub-resolution auxiliary graphics using the logarithmic slope value of the light intensity may include: counting the logarithmic slope values of the light intensity at all surrounding detection points of the sub-resolution auxiliary graphics for which the evaluation value is to be calculated. ; Calculate the weighted sum of the logarithmic slope values of the light intensity at all surrounding detection points to obtain the evaluation value of the sub-resolution auxiliary graphic. Then the corresponding sub-resolution auxiliary graphics are cleaned based on the evaluation values of the multiple sub-resolution auxiliary graphics. The steps to clean up the corresponding sub-resolution auxiliary graphics include: selecting the sub-resolution auxiliary graphics with the smallest evaluation value among multiple sub-resolution auxiliary graphics; moving or reducing the area of the sub-resolution auxiliary graphics with the minimum evaluation value. or clear operation. Continue to add sub-resolution auxiliary graphics when the multiple added sub-resolution auxiliary graphics do not meet the set conditions. More specifically, when the multiple added sub-resolution auxiliary graphics do not meet the set conditions, it is judged whether all the sub-resolution auxiliary graphics have been added, and continue when the addition of all sub-resolution auxiliary graphics has not been completed. Add sub-resolution auxiliary graphics; or output the layout after adding sub-resolution auxiliary graphics at all locations.

The logic and/or steps represented in the flowchart diagrams or otherwise described herein, for example, may be considered a sequenced list of executable instructions for implementing the logical functions, and may be embodied in any computer-readable storage medium , for use by, or in conjunction with, instruction execution systems, devices or equipment (such as computer-based systems, systems including processors, or other systems that can fetch instructions from and execute instructions from the instruction execution system, device or equipment), device or equipment. For the purposes of this specification, a "computer-readable storage medium" may be any device that can contain, store, communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device . More specific examples (non-exhaustive list) of computer-readable storage media include the following: electrical connections with one or more wires (electronic device), portable computer disk cartridges (magnetic device), random access memory (RAM, Random Access Memory), read-only memory (ROM, Read-Only Memory), erasable programmable read-only memory (EPROM, Erasable Programmable Read-Only Memory, or flash memory), fiber optic devices, and portable optical disk read-only memory (CDROM, Compact Disc Read-Only Memory). Additionally, the computer-readable storage medium may even be paper or other suitable medium on which the program may be printed, as the paper or other medium may be optically scanned, for example, and subsequently edited, interpreted, or otherwise used as necessary. Processing is performed in a suitable manner to obtain the program electronically and then to store it in computer memory.

It should be understood that various parts of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if it is implemented in hardware, as in another embodiment, it can be implemented by any one or a combination of the following technologies known in the art: a logic gate circuit with a logic gate circuit for implementing a logic function on a data signal. Discrete logic circuits, application-specific integrated circuits with appropriate combinational logic gates, programmable gate arrays (PGA, Programmable Gate Array), field programmable gate arrays (FPGA, Field Programmable Gate Array), etc.

In the description of this specification, reference to the description of the terms "this embodiment," "one embodiment," "some embodiments," "example," "specific examples," or "some examples" is intended to be in conjunction with the embodiment. or examples describe specific features, structures, materials, or characteristics that are included in at least one embodiment or example of the invention. In this specification, the schematic expressions of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and combine different embodiments or examples and features of different embodiments or examples described in this specification unless they are inconsistent with each other.

In addition, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise expressly and specifically limited.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inside", "Outside", "Clockwise", "Counterclockwise", "Axis", The orientations or positional relationships indicated by "radial direction", "circumferential direction", etc. are based on the orientations or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply the referred devices or components. Must have a specific orientation, be constructed and operate in a specific orientation and are therefore not to be construed as limitations of the invention.

The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, simple improvements, etc. made on the essential content of the present invention shall be included in the protection scope of the present invention. Inside.

Claims (8)

1. A method for adding sub-resolution auxiliary graphics, which is characterized by including: Add sub-resolution auxiliary graphics to the initial layout; Calculate the evaluation values of the multiple sub-resolution auxiliary graphics respectively when the added sub-resolution auxiliary graphics meet the set conditions, and clean up the corresponding sub-resolution auxiliary graphics based on the evaluation values of the multiple sub-resolution auxiliary graphics. Resolution auxiliary graphics; otherwise continue to add sub-resolution auxiliary graphics; Output the layout after adding sub-resolution auxiliary graphics at all locations; The set conditions include: at least two adjacent sub-resolution auxiliary graphics overlap or the sub-resolution auxiliary graphics violates mask manufacturing rules; The method further includes the step of setting at least one detection point on the edge of a target pattern of the initial layout, the target pattern being a pattern to be transferred to the wafer; The step of calculating the evaluation values of the plurality of sub-resolution auxiliary graphics respectively includes: calculating the logarithmic slope value of the light intensity at surrounding detection points of the plurality of sub-resolution auxiliary graphics, and then using the light intensity The logarithmic slope value calculates the evaluation value of the sub-resolution auxiliary graphics. 2. The sub-resolution auxiliary graphics adding method according to claim 1, characterized in that the step of calculating the evaluation value of the sub-resolution auxiliary graphics using the light intensity logarithmic slope value includes: Statistics of the logarithmic slope value of the light intensity at all surrounding detection points of the sub-resolution auxiliary graphics to be calculated evaluation value; The weighted sum of the logarithmic slope values of the light intensity at all surrounding detection points is calculated to obtain the evaluation value of the sub-resolution auxiliary graphic. 3. The method for adding sub-resolution auxiliary graphics according to claim 1 or 2, characterized in that the step of cleaning up the corresponding sub-resolution auxiliary graphics includes: Select the sub-resolution auxiliary graphics with the smallest evaluation value among the plurality of sub-resolution auxiliary graphics; The sub-resolution auxiliary graphics with the minimum evaluation value are moved, reduced in area, or cleared. 4. The sub-resolution auxiliary graphics adding method according to claim 1, characterized in that the step of setting at least one detection point at the edge of the target graphics of the initial layout includes: Obtain the inflection point position coordinates of the target graphic; The position of the detection point is selected so that the distance between the position coordinates of the detection point and the position coordinates of the inflection point is greater than the first preset distance. 5. The sub-resolution auxiliary graphics adding method according to claim 1, characterized in that the step of setting at least one detection point at the edge of the target graphics of the initial layout includes: Get the endpoint position coordinates of the target graphic; The position of the detection point is selected so that the distance between the position coordinates of the detection point and the position coordinates of the end point is greater than the second preset distance. 6. The method for adding sub-resolution auxiliary graphics according to claim 1, wherein the step of adding sub-resolution auxiliary graphics includes: Read the rule list; Add sub-resolution auxiliary graphics according to the content in the rule list; The content in the rule list includes geometric information, position information and applicable condition information of sub-resolution auxiliary graphics to be added. 7. A device for adding sub-resolution auxiliary graphics, characterized in that it includes: The auxiliary graphics adding module is used to add sub-resolution auxiliary graphics to the initial layout and to continue adding sub-resolution auxiliary graphics when the multiple added sub-resolution auxiliary graphics do not meet the set conditions; An evaluation value calculation module, configured to respectively calculate the evaluation values of the multiple sub-resolution auxiliary graphics when the added sub-resolution auxiliary graphics meet the set conditions; An auxiliary graphics cleaning module, configured to clean corresponding sub-resolution auxiliary graphics based on the evaluation values of the plurality of sub-resolution auxiliary graphics; The final layout output module is used to output the layout after adding sub-resolution auxiliary graphics at all locations; Wherein, the set conditions include: at least two adjacent sub-resolution auxiliary graphics overlap or the sub-resolution auxiliary graphics violate mask manufacturing rules; The device further includes an initial pattern edge setting module, which is used to set at least one detection point on the edge of a target pattern of the initial layout, where the target pattern is a pattern to be transferred to the wafer; The evaluation value calculation module also specifically performs the following steps: Calculate the logarithmic slope value of the light intensity at the surrounding detection points of the plurality of sub-resolution auxiliary graphics, and then use the logarithmic slope value of the light intensity to calculate the evaluation value of the sub-resolution auxiliary graphics. 8. A computer-readable storage medium, characterized in that computer-readable instructions are stored thereon, and when the computer-readable instructions are executed by a processor, they cause the processor to execute any one of claims 1-6. The steps of the sub-resolution auxiliary graphics adding method are claimed.