[go: up one dir, main page]

CN112077638A - An integrated hydrostatic nut main drive screw pair linear feed unit - Google Patents

An integrated hydrostatic nut main drive screw pair linear feed unit Download PDF

Info

Publication number
CN112077638A
CN112077638A CN202010746545.2A CN202010746545A CN112077638A CN 112077638 A CN112077638 A CN 112077638A CN 202010746545 A CN202010746545 A CN 202010746545A CN 112077638 A CN112077638 A CN 112077638A
Authority
CN
China
Prior art keywords
oil
nut
hydrostatic
bearing
lead screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010746545.2A
Other languages
Chinese (zh)
Other versions
CN112077638B (en
Inventor
冯显英
刘延栋
苏哲
卢佳佳
孙宜田
韩兴昌
李沛刚
李慧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong University
Original Assignee
Shandong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong University filed Critical Shandong University
Priority to CN202010746545.2A priority Critical patent/CN112077638B/en
Publication of CN112077638A publication Critical patent/CN112077638A/en
Application granted granted Critical
Publication of CN112077638B publication Critical patent/CN112077638B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/26Fluid-pressure drives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Transmission Devices (AREA)

Abstract

The invention discloses a primary driving type screw pair linear feeding unit integrated with a hydrostatic nut, which adopts the technical scheme that: the hydrostatic guide rail is characterized by comprising a hydrostatic lead screw and a hydrostatic guide rail which are parallel to each other, wherein a nut component is axially arranged on the hydrostatic lead screw, and a hollow motor is arranged on one side of the nut component; the nut assembly is arranged below the workbench through a support frame, and the workbench is detachably connected with the hydrostatic guide rail; an oil collecting plate is coated on the outer side of the supporting frame to form an oil collecting space; the static pressure lead screw is arranged above the base, and the base is provided with a plurality of oil discharge grooves for discharging oil for the hydrostatic pressure guide rail and the oil collecting plate. The invention solves the problem that the machining precision is limited easily due to vibration, heating, deformation and the like caused by the fact that the lead screw drives the hydrostatic pressure lead screw pair in the current precision and ultra-precision machining process, and can realize the ultra-high precision linear motion with large stroke, high rigidity and high frequency response in the precision and ultra-precision machining process.

Description

一种集成液体静压螺母主驱动型丝杠副直线进给单元An integrated hydrostatic nut main drive screw pair linear feed unit

技术领域technical field

本发明涉及精密、超精密加工技术领域,尤其涉及一种集成液体静压螺母主驱动型丝杠副直线进给单元。The invention relates to the technical field of precision and ultra-precision machining, in particular to an integrated hydrostatic nut main drive type lead screw pair linear feed unit.

背景技术Background technique

超精密加工技术作为国防与高新技术的发展支撑,在现代制造业中起到越来越重要的作用。随着工业产品更新换代的速度不断加快,对精密与超精密机床的性能指标要求也逐步提高。超精密直线运动平台作为超精密加工设备重要实现部件,当前主要使用直线电机、滚珠丝杠副与液体静压丝杠副的形式。As the development support of national defense and high-tech, ultra-precision machining technology plays an increasingly important role in modern manufacturing. As the speed of upgrading of industrial products continues to accelerate, the performance requirements for precision and ultra-precision machine tools are gradually increasing. As an important realization component of ultra-precision machining equipment, the ultra-precision linear motion platform mainly uses the form of linear motor, ball screw pair and hydrostatic screw pair.

直线电机虽然刚度高、响应快,但抗干扰、阻尼性方面存在问题。滚珠丝杠副采用钢珠作为运转承载,自身重量大、钢珠易变形、承载能力较差、润滑要求较高。液体静压丝杠副由于静压丝杠螺母与丝杠之间使用流体润滑,具有刚度高、摩擦小、阻尼特性优越的特点,当前广泛应用在精密、超精密加工设备中。发明人发现,当前现有的液体静压丝杠副通常为丝杠旋转带动静压丝杠螺母实现直线运动,在大型应用场景中所需的静压丝杠尺寸、重量均比较大,丝杠高速旋转时易产生很大的惯性力而引起振动、发热、变形等现象,严重影响进给精度。Although the linear motor has high stiffness and fast response, there are problems in anti-interference and damping. The ball screw pair uses steel balls as the running load, which has large weight, easy deformation of steel balls, poor bearing capacity, and high lubrication requirements. Due to the fluid lubrication between the hydrostatic screw nut and the screw, the hydrostatic screw pair has the characteristics of high rigidity, low friction and superior damping characteristics, and is currently widely used in precision and ultra-precision machining equipment. The inventor found that the current existing hydrostatic screw pair is usually driven by the rotation of the screw to drive the hydrostatic screw nut to achieve linear motion. When rotating at high speed, it is easy to generate a large inertial force and cause vibration, heat generation, deformation and other phenomena, which seriously affect the feeding accuracy.

发明内容SUMMARY OF THE INVENTION

针对现有技术存在的不足,本发明的目的是提供一种集成液体静压螺母主驱动型丝杠副直线进给单元,解决了当前精密、超精密加工过程中由于丝杠驱动液体静压丝杠副而存在的振动、发热、变形等容易导致加工精度受限的问题,能够实现精密、超精密加工过程中大行程、高刚度、高频响的超高精度直线运动。In view of the deficiencies in the prior art, the purpose of the present invention is to provide an integrated hydrostatic nut main drive type lead screw pair linear feed unit, which solves the problem that the lead screw drives the hydrostatic wire in the current precision and ultra-precision machining process. The vibration, heat generation and deformation of the lever pair can easily lead to the problem of limited processing accuracy, which can realize ultra-high-precision linear motion with large stroke, high stiffness and high-frequency response in the process of precision and ultra-precision machining.

为了实现上述目的,本发明是通过如下的技术方案来实现:In order to achieve the above object, the present invention is realized by the following technical solutions:

本发明的实施例提供了一种集成液体静压螺母主驱动型丝杠副直线进给单元,包括相互平行的静压丝杠、液体静压导轨,静压丝杠轴向安装螺母组件,螺母组件一侧安装空心电机;所述螺母组件通过支撑架安装于工作台下方,工作台与液体静压导轨可拆卸连接;所述支撑架外侧包覆有集油板以形成集油空间;所述静压丝杠安装于底座上方,底座开设有用于为液体静压导轨、集油板排油的多个排油槽。The embodiment of the present invention provides an integrated hydrostatic nut main drive type lead screw pair linear feed unit, including a hydrostatic lead screw parallel to each other, a hydrostatic guide rail, an axially mounted nut assembly for the hydrostatic lead screw, and a nut assembly. A hollow motor is installed on one side of the assembly; the nut assembly is installed under the workbench through a support frame, and the workbench is detachably connected to the hydrostatic guide rail; the outer side of the support frame is covered with an oil collecting plate to form an oil collecting space; the The static pressure screw is installed above the base, and the base is provided with a plurality of oil drain grooves for draining oil for the hydrostatic guide rail and the oil collecting plate.

作为进一步的实现方式,所述螺母组件包括轴承和静压丝杠螺母,静压丝杠螺母两端分别安装轴承;其中一个轴承的轴承外圈通过轴承法兰与空心电机的电机定子相连,电机转子通过螺母法兰与静压丝杠螺母配合。As a further implementation, the nut assembly includes a bearing and a hydrostatic screw nut, and bearings are respectively installed at both ends of the hydrostatic screw nut; the bearing outer ring of one of the bearings is connected to the motor stator of the hollow motor through the bearing flange, and the motor The rotor is mated with the hydrostatic screw nut through the nut flange.

作为进一步的实现方式,所述静压丝杠螺母内表面与静压丝杠螺纹啮合,静压丝杠螺母外表面两端分别与轴承内圈过盈配合;位于静压丝杠螺母两端的轴承内圈与轴承外圈之间通过液体油膜支撑。As a further implementation, the inner surface of the static pressure screw nut is engaged with the static pressure screw thread, and the two ends of the outer surface of the static pressure screw nut are respectively in interference fit with the inner ring of the bearing; the bearings located at both ends of the static pressure screw nut The inner ring and the bearing outer ring are supported by a liquid oil film.

作为进一步的实现方式,所述轴承外圈周向均匀设有螺母进油口A,轴承外圈内部设有环形内槽,螺母进油口A与环形内槽连通。As a further implementation, the outer ring of the bearing is uniformly provided with a nut oil inlet A in the circumferential direction, an annular inner groove is arranged inside the outer ring of the bearing, and the nut oil inlet A is communicated with the annular inner groove.

作为进一步的实现方式,所述轴承外圈还设有沿着圆周方向均匀分布的轴承进油口,轴承外圈靠近轴承内圈一侧设有环形油腔;轴承外圈与轴承内圈之间留有缝隙设有环形排油口,环形排油口、轴承进油口分别与环形排油口连通。As a further implementation, the bearing outer ring is also provided with bearing oil inlets evenly distributed along the circumferential direction, and an annular oil cavity is provided on the side of the bearing outer ring close to the bearing inner ring; between the bearing outer ring and the bearing inner ring An annular oil outlet is provided with a gap left, and the annular oil outlet and the bearing oil inlet are respectively communicated with the annular oil outlet.

作为进一步的实现方式,所述静压丝杠螺母内设有与环形内槽相对应的进油环形槽,进油环形槽连接有多个沿静压丝杠螺母圆周方向布置的螺母进油口B;所述螺母进油口B与节流器连通。As a further implementation, the hydrostatic screw nut is provided with an oil inlet annular groove corresponding to the annular inner groove, and the oil inlet annular groove is connected with a plurality of nut oil inlets arranged along the circumferential direction of the hydrostatic screw nut B; the nut oil inlet B is communicated with the throttle.

作为进一步的实现方式,所述静压丝杠螺母内部靠近轴承内圈位置开设有出油环形槽,出油环形槽与多个沿其周向分布的螺母出油孔连通。As a further implementation manner, an oil outlet annular groove is provided inside the static pressure screw nut at a position close to the inner ring of the bearing, and the oil outlet annular groove communicates with a plurality of nut oil outlet holes distributed along the circumferential direction thereof.

作为进一步的实现方式,所述底座侧壁设有导轨排油槽,底座长度方向设置有螺母组件排油槽A,螺母组件排油槽A两侧对称设有底座排油槽;螺母组件排油槽A、底座排油槽与螺母组件排油槽B连通,导轨排油槽与底座排油槽连通。As a further implementation, the side wall of the base is provided with a guide rail oil drain groove, the length direction of the base is provided with a nut assembly oil discharge groove A, and the nut assembly oil discharge groove A is symmetrically provided with a base oil discharge groove on both sides; The oil groove is communicated with the oil discharge groove B of the nut assembly, and the guide rail oil discharge groove is communicated with the base oil discharge groove.

作为进一步的实现方式,所述集油板内表面设有挡油板,集油板的底面设有收油孔。As a further implementation manner, an oil baffle is arranged on the inner surface of the oil collecting plate, and an oil collecting hole is arranged on the bottom surface of the oil collecting plate.

作为进一步的实现方式,所述支撑架包括连接为一体支撑板和安装板,支撑板与工作台相连,安装板与集油板、轴承外圈相连。As a further implementation manner, the support frame includes a support plate and a mounting plate that are connected in one piece, the support plate is connected with the worktable, and the mounting plate is connected with the oil collecting plate and the bearing outer ring.

上述本发明的实施例的有益效果如下:The beneficial effects of the above embodiments of the present invention are as follows:

(1)本发明的一个或多个实施方式因液体静压螺母直接主驱动,大幅减少了传统驱动方式造成的振动、发热、变形等问题,同时降低了所需的旋转惯性力,结合液体静压导轨可实现精密、超精密加工中大行程、高刚度、高效能、快响应的超高精度直线运动;(1) In one or more embodiments of the present invention, due to the direct main drive of the hydrostatic nut, the problems such as vibration, heat generation, and deformation caused by the traditional driving method are greatly reduced, and the required rotational inertial force is also reduced. The pressure guide rail can realize ultra-high-precision linear motion with large stroke, high rigidity, high efficiency and fast response in precision and ultra-precision machining;

(2)本发明的一个或多个实施方式的电机定子通过轴承法兰与轴承外圈配合,电机转子通过螺母法兰与静压丝杠螺母配合,轴承兼起径向及轴向支撑作用,由于通过液压油膜支撑和传动,大大减少了摩擦;(2) In one or more embodiments of the present invention, the stator of the motor is matched with the outer ring of the bearing through the bearing flange, the rotor of the motor is matched with the static pressure screw nut through the nut flange, and the bearing also plays the role of radial and axial support, Due to the support and transmission through the hydraulic oil film, the friction is greatly reduced;

(3)本发明的一个或多个实施方式解决了螺母自转型液体静压丝杠副油道缠绕问题,螺母驱动型静压丝杠副进给单元中静压轴承与静压丝杠螺母无需单独供油,油道结构简单,降低了成本。(3) One or more embodiments of the present invention solve the problem of entanglement of the oil passage of the nut auto-type hydrostatic screw pair, and the hydrostatic bearing and the hydrostatic screw nut in the nut-driven type hydrostatic screw pair feed unit do not need to be Separate oil supply, simple structure of oil passage, reduce cost.

附图说明Description of drawings

构成本发明的一部分的说明书附图用来提供对本发明的进一步理解,本发明的示意性实施例及其说明用于解释本发明,并不构成对本发明的不当限定。The accompanying drawings forming a part of the present invention are used to provide further understanding of the present invention, and the exemplary embodiments of the present invention and their descriptions are used to explain the present invention, and do not constitute an improper limitation of the present invention.

图1是本发明根据一个或多个实施方式的剖面图;1 is a cross-sectional view of the present invention according to one or more embodiments;

图2是本发明根据一个或多个实施方式的液体静压导轨结构示意图;2 is a schematic structural diagram of a hydrostatic guide rail according to one or more embodiments of the present invention;

图3是本发明根据一个或多个实施方式的轴承供油及静压丝杠螺母进油剖视图;3 is a cross-sectional view of bearing oil supply and hydrostatic screw nut oil inlet according to one or more embodiments of the present invention;

图4是图3绕轴线旋转45°的静压丝杠螺母进油剖视图;Figure 4 is a sectional view of the oil inlet of the hydrostatic screw nut rotated 45° around the axis of Figure 3;

图5是本发明根据一个或多个实施方式的轴承与静压丝杠螺母装配剖视图;5 is a cross-sectional view of a bearing and a hydrostatic screw nut assembled according to one or more embodiments of the present invention;

图6是本发明根据一个或多个实施方式的集油板结构示意图;6 is a schematic structural diagram of an oil collecting plate according to one or more embodiments of the present invention;

图7是本发明根据一个或多个实施方式的支撑架的结构示意图;7 is a schematic structural diagram of a support frame according to one or more embodiments of the present invention;

图8是本发明根据一个或多个实施方式的底座结构示意图;FIG. 8 is a schematic diagram of a base structure according to one or more embodiments of the present invention;

其中,1、底座;101、导轨排油槽;102、螺母组件排油槽A;103、螺母组件排油槽B;104、底座排油槽;2、轴承内圈A;3、轴承外圈A;301、轴承进油口;302、环形油腔;303、环形排油口;304、螺母进油口A;305、环形内槽;306、轴承法兰;4、电机定子;5、电机转子;6、固定座A;7、静压丝杠;8、直线导轨;9、导轨滑块A;10、工作台;11、支撑架;1101、安装孔A,1102、支撑板,1103、安装板,1104、配合孔;12、静压丝杠螺母;1201、进油环形槽;1202、螺母进油口B;1203、出油环形槽;1204、螺母出油孔;1205、螺母法兰;1206、节流器;13、轴承内圈B;14、轴承外圈B;15、导轨滑块B;16、固定座B;17、密封环;18、集油板;1801、安装孔B;1802、收油孔;1803、挡油板。Among them, 1, the base; 101, the guide rail oil drain; 102, the nut assembly oil drain A; 103, the nut assembly oil drain B; 104, the base oil drain; 2, the bearing inner ring A; 3, the bearing outer ring A; 301, Bearing oil inlet; 302, annular oil cavity; 303, annular oil outlet; 304, nut oil inlet A; 305, annular inner groove; 306, bearing flange; 4, motor stator; 5, motor rotor; 6, Fixed seat A; 7. Static pressure screw; 8. Linear guide rail; 9. Guide rail slider A; 10. Workbench; 11. Support frame; , matching hole; 12, static pressure screw nut; 1201, oil inlet ring groove; 1202, nut oil inlet B; 1203, oil outlet ring groove; 1204, nut oil outlet hole; 1205, nut flange; 1206, section flow device; 13, bearing inner ring B; 14, bearing outer ring B; 15, guide rail slider B; 16, fixing seat B; 17, sealing ring; 18, oil collecting plate; 1801, mounting hole B; 1802, receiving Oil hole; 1803, oil baffle.

具体实施方式Detailed ways

应该指出,以下详细说明都是例示性的,旨在对本申请提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed description is exemplary and intended to provide further explanation of the application. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合;It should be noted that the terminology used herein is for the purpose of describing specific embodiments only, and is not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural as well, furthermore, it is to be understood that when the terms "comprising" and/or "including" are used in this specification, it indicates that the presence of features, steps, operations, devices, components and/or combinations thereof;

为了方便叙述,本申请中如果出现“上”、“下”、“左”“右”字样,仅表示与附图本身的上、下、左、右方向一致,并不对结构起限定作用,仅仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的设备或元件必须具有特定的方位,以特定的方位构造和操作,因此不能理解为对本申请的限制。For the convenience of description, if the words "up", "down", "left" and "right" appear in this application, it only means that the directions of up, down, left and right are consistent with the drawings themselves, and do not limit the structure. It is to facilitate the description of the present invention and to simplify the description, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as a limitation on the application.

术语解释部分:本申请中的术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或为一体;可以是直接连接,也可以是通过中间媒介间接相连,可以是两个元件内部连接,或者两个元件的相互作用关系,对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明的具体含义。Terminology explanation part: Terms such as "installation", "connection", "connection", "fixation" in this application should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated; It can be a direct connection, or an indirect connection through an intermediate medium, an internal connection between two elements, or an interaction relationship between two elements. specific meaning.

实施例一:Example 1:

本实施例提供了一种集成液体静压螺母主驱动型丝杠副直线进给单元,如图1所示,包括空心电机、螺母组件、静压丝杠7、液体静压导轨、工作台10、静压丝杠固定座和底座1,静压丝杠固定座有两个,分别为固定座A6、固定座B16;固定座A6安装于底座1一端,固定座B16安装于底座1另一端。螺母组件与静压丝杠7螺纹连接,且空心电机安装于螺母组件一侧。静压丝杠7一端连接固定座A6,另一端连接固定座B16。所述螺母组件通过支撑架11连接工作台10,工作台10连接液体静压导轨。This embodiment provides an integrated hydrostatic nut main drive type lead screw pair linear feed unit, as shown in FIG. 1 , including a hollow motor, a nut assembly, a hydrostatic lead screw 7 , a hydrostatic guide rail, and a workbench 10 , Static pressure screw fixing seat and base 1, there are two static pressure screw fixing seats, namely fixing seat A6 and fixing seat B16; The nut assembly is threadedly connected with the static pressure screw 7, and the hollow motor is installed on one side of the nut assembly. One end of the static pressure screw 7 is connected to the fixed seat A6, and the other end is connected to the fixed seat B16. The nut assembly is connected to the workbench 10 through the support frame 11, and the workbench 10 is connected to the hydrostatic guide rail.

具体的,如图2所示,液体静压导轨包括导轨滑块A9、导轨滑块B15、直线导轨8,直线导轨8与静压丝杠7相互平行,导轨滑块A9、导轨滑块B15与直线导轨8滑动连接。工作台10连接于导轨滑块A9、导轨滑块B15上方。Specifically, as shown in FIG. 2, the hydrostatic guide rail includes a guide rail slider A9, a guide rail slider B15, and a linear guide rail 8. The linear guide rail 8 and the static pressure screw 7 are parallel to each other. The guide rail slider A9, the guide rail slider B15 and the Linear guides 8 are slidingly connected. The worktable 10 is connected above the guide rail slider A9 and the guide rail slider B15.

螺母组件包括轴承和静压丝杠螺母12,静压丝杠螺母12的两端分别安装一个轴承,即轴承A、轴承B。轴承A包括轴承内圈A2、轴承外圈A3,轴承B包括轴承内圈B13、轴承外圈B14。在本实施例中,所述轴承为液体静压复合轴承。The nut assembly includes a bearing and a hydrostatic screw nut 12 , and two ends of the hydrostatic screw nut 12 are respectively installed with a bearing, that is, a bearing A and a bearing B. Bearing A includes a bearing inner ring A2 and a bearing outer ring A3, and bearing B includes a bearing inner ring B13 and a bearing outer ring B14. In this embodiment, the bearing is a hydrostatic composite bearing.

静压丝杠7与液体静压螺母12螺纹啮合,静压丝杠螺母12外表面两端分别与轴承内圈A2和轴承内圈B13过盈配合,轴承内圈A2与轴承外圈A 3通过液体油膜支撑;轴承内圈B13与轴承外圈B14通过液体油膜支撑。轴承外圈A3与支撑架11一侧颗拆卸连接,轴承外圈B14与支撑架11另一侧可拆卸连接。The static pressure screw 7 is threadedly engaged with the hydrostatic pressure nut 12, and the two ends of the outer surface of the static pressure screw nut 12 are respectively in interference fit with the bearing inner ring A2 and the bearing inner ring B13, and the bearing inner ring A2 and the bearing outer ring A3 pass through Supported by liquid oil film; bearing inner ring B13 and bearing outer ring B14 are supported by liquid oil film. The bearing outer ring A3 is detachably connected to one side of the support frame 11 , and the bearing outer ring B14 is detachably connected to the other side of the support frame 11 .

空心电机包括电机定子4和电机转子5,电机定子4呈空心圆柱形,静压丝杠7可由电机定子4的空心部分穿过。如图3-图5所示,电机定子4通过轴承法兰306与轴承外圈A3配合,电机转子5通过螺母法兰1205与静压丝杠螺母12连接。电机定子4和电机转子5结构形成闭环伺服驱动控制。由于两个轴承本身对静压丝杠螺母12起到径向及轴向支撑作用,所以空心电机自身无需再安装轴承.The hollow motor includes a motor stator 4 and a motor rotor 5 . The motor stator 4 is in the form of a hollow cylinder, and the static pressure screw 7 can pass through the hollow part of the motor stator 4 . As shown in FIGS. 3-5 , the motor stator 4 is matched with the bearing outer ring A3 through the bearing flange 306 , and the motor rotor 5 is connected with the static pressure screw nut 12 through the nut flange 1205 . The structure of the motor stator 4 and the motor rotor 5 forms a closed-loop servo drive control. Since the two bearings themselves play a radial and axial support role for the hydrostatic screw nut 12, the hollow motor itself does not need to install bearings.

所述轴承外圈A3上设有螺母进油口A304,螺母进油口A304沿轴承外圈A3圆周方向均匀分布,且每个螺母进油口A304的开设方向沿轴承外圈A3径向。轴承外圈A3内部设有环形内槽305,螺母进油口A304与环形内槽305连通。轴承外圈A3还设有沿着圆周方向均匀分布的轴承进油口301,轴承进油口301的开设方向沿轴承外圈A3径向。The bearing outer ring A3 is provided with a nut oil inlet A304, the nut oil inlet A304 is evenly distributed along the circumferential direction of the bearing outer ring A3, and the opening direction of each nut oil inlet A304 is along the radial direction of the bearing outer ring A3. An annular inner groove 305 is provided inside the bearing outer ring A3, and the nut oil inlet A304 communicates with the annular inner groove 305. The bearing outer ring A3 is also provided with bearing oil inlets 301 evenly distributed along the circumferential direction, and the opening direction of the bearing oil inlets 301 is along the radial direction of the bearing outer ring A3.

轴承外圈A3靠近轴承内圈A2一侧设有环形油腔302,环形油腔302可为环形腔体,也可为多个扇形腔体间隔排列成一个环形。环形油腔302与轴承外圈A3轴线呈一定夹角,为静压丝杠螺母12提供径向及轴向支撑。An annular oil cavity 302 is provided on the side of the bearing outer ring A3 close to the bearing inner ring A2. The annular oil cavity 302 may be an annular cavity, or a plurality of fan-shaped cavities may be arranged in an annular shape at intervals. The annular oil cavity 302 forms a certain angle with the axis of the bearing outer ring A3 , and provides radial and axial support for the static pressure screw nut 12 .

轴承外圈A3与轴承内圈A2之间留有缝隙设有环形排油口303,环形排油口303、轴承进油口301分别与环形排油口303连通。轴承外圈A3通过轴承进油口301为环形油腔302供油,经由环形排油口303将油排至集油板18进行回收。There is a gap between the bearing outer ring A3 and the bearing inner ring A2, and an annular oil outlet 303 is provided. The annular oil outlet 303 and the bearing oil inlet 301 communicate with the annular oil outlet 303 respectively. The bearing outer ring A3 supplies oil to the annular oil cavity 302 through the bearing oil inlet 301 , and discharges the oil to the oil collecting plate 18 through the annular oil outlet 303 for recovery.

轴承外圈B14无轴承法兰306,其它结构均与轴承外圈A3相同,此处不再赘述。The bearing outer ring B14 has no bearing flange 306, and other structures are the same as the bearing outer ring A3, which will not be repeated here.

所述静压丝杠螺母12内设有与环形内槽305宽度一致的进油环形槽1201,进油环形槽1201与环形内槽305完全对应吻合,并能够发生相对转动。轴承外圈A3与轴承外圈B14均装有密封环17来保证良好密封性,以实现螺母进油口A304至螺母进油口B1202的供油。The hydrostatic screw nut 12 is provided with an oil inlet annular groove 1201 having the same width as the annular inner groove 305 . Both the bearing outer ring A3 and the bearing outer ring B14 are equipped with a sealing ring 17 to ensure good sealing, so as to realize the oil supply from the nut oil inlet A304 to the nut oil inlet B1202.

静压丝杠螺母12内部还设有螺母进油口B1202,螺母进油口B1202沿静压丝杠螺母12圆周方向均匀分布。螺母进油口B1202远离进油环形槽1201的一端设置节流器1206,节流器1206与螺母进油口B1202数目一致且相对应。螺母进油口A304、环形内槽305、进油环形槽1201、螺母进油口B1202和节流器1206依次连通,最终将液压油传送至静压丝杠螺母12螺纹两侧,为静压丝杠螺母12供油。The inside of the static pressure screw nut 12 is further provided with a nut oil inlet B1202 , and the nut oil inlet B1202 is evenly distributed along the circumferential direction of the static pressure screw nut 12 . An end of the nut oil inlet B1202 away from the oil inlet annular groove 1201 is provided with a restrictor 1206, and the number of the restrictors 1206 and the nut oil inlet B1202 is the same and corresponding. The nut oil inlet A304, the annular inner groove 305, the oil inlet annular groove 1201, the nut oil inlet B1202 and the restrictor 1206 are connected in sequence, and finally the hydraulic oil is transmitted to both sides of the thread of the static pressure screw nut 12, which is a static pressure wire Lever nut 12 supplies oil.

静压丝杠螺母12内部靠近轴承内圈A2、轴承内圈B13端面位置分别开设有出油环形槽1203,出油环形槽1203与多个沿其周向分布的螺母出油孔1204连通。静压丝杠螺母12中的液压油经由静压丝杠7与静压丝杠螺母12之间的微小缝隙流出至出油环形槽1203,液体静压螺母12旋转时由于离心力作用,出油环形槽1203中的液体油很容易通过螺母出油孔1204排出至集油板18。An oil outlet annular groove 1203 is formed in the hydrostatic screw nut 12 near the end surfaces of the bearing inner ring A2 and the bearing inner ring B13, respectively. The oil outlet annular groove 1203 communicates with a plurality of nut oil outlet holes 1204 distributed along its circumference. The hydraulic oil in the static pressure screw nut 12 flows out to the oil outlet annular groove 1203 through the tiny gap between the static pressure screw 7 and the static pressure screw nut 12. When the hydrostatic pressure nut 12 rotates, due to the centrifugal force, the oil outlet ring The liquid oil in the groove 1203 is easily discharged to the oil collecting plate 18 through the oil outlet hole 1204 of the nut.

如图6所示,集油板18呈U型,集油板18内表面设有与其形状相适应的挡油板1803。在本实施例中,设置两个挡油板1803,挡油板1803之间设有收油孔802。集油板18侧面靠近端部位置开设有安装孔B1801,以与支撑架11连接。集油板18通过挡油板1803实现轴向定位,收油孔1802位于集油板18最下侧(以远离其开口端一侧为下侧),液压油受自身重力作用流淌至集油板18最下方,实现集油。As shown in FIG. 6 , the oil collecting plate 18 is U-shaped, and the inner surface of the oil collecting plate 18 is provided with an oil baffle 1803 suitable for its shape. In this embodiment, two oil baffles 1803 are provided, and an oil receiving hole 802 is provided between the oil baffles 1803 . A mounting hole B1801 is formed on the side of the oil collecting plate 18 near the end to connect with the support frame 11 . The oil collecting plate 18 is positioned axially through the oil baffle plate 1803. The oil collecting hole 1802 is located on the lowermost side of the oil collecting plate 18 (the side away from its open end is the lower side), and the hydraulic oil flows to the oil collecting plate by its own gravity. At the bottom of 18, oil collection is realized.

为了保证同轴度,支撑架11设计为一体结构。如图7所示,支撑架11包括连接为一体的支撑板1102、安装板1103,在本实施例中,安装板1103有两个,两个安装板1103垂直连接于支撑板1102侧面;支撑板1102为矩形板。可以理解的,在其他实施例中,支撑板1102也可以为其他形状。两个安装板1103之间间隔一定距离,二者间距与集油板18尺寸相适应。In order to ensure the coaxiality, the support frame 11 is designed as an integral structure. As shown in FIG. 7 , the supporting frame 11 includes a supporting plate 1102 and a mounting plate 1103 that are connected as a whole. In this embodiment, there are two mounting plates 1103, and the two mounting plates 1103 are vertically connected to the side surfaces of the supporting plate 1102; the supporting plate 1102 is a rectangular plate. It can be understood that, in other embodiments, the support plate 1102 may also have other shapes. There is a certain distance between the two mounting plates 1103 , and the distance between the two is adapted to the size of the oil collecting plate 18 .

进一步的,安装板1103的形状与集油板18相适应,安装板1103开设有配合孔1104,配合孔1104直径与轴承内圈A2(轴承内圈B13)相适应,轴承外圈A3(轴承外圈B14)通过螺栓与安装板1103相连。安装板1103侧面开设有安装孔A1101,安装孔A1101与集油板18的安装孔B1801位置对应,二者通过螺栓固定。集油板18包覆于安装板1103的轴向外侧,支撑架11与集油板18配合形成集油空间。Further, the shape of the mounting plate 1103 is adapted to the oil collecting plate 18, the mounting plate 1103 is provided with a matching hole 1104, the diameter of the matching hole 1104 is adapted to the bearing inner ring A2 (bearing inner ring B13), the bearing outer ring A3 (bearing outer ring Ring B14) is connected to the mounting plate 1103 by means of bolts. A mounting hole A1101 is formed on the side of the mounting plate 1103. The mounting hole A1101 corresponds to the mounting hole B1801 of the oil collecting plate 18, and the two are fixed by bolts. The oil collecting plate 18 is covered on the axial outer side of the mounting plate 1103, and the support frame 11 cooperates with the oil collecting plate 18 to form an oil collecting space.

如图8所示,底座1的纵向截面呈U型,底座1侧壁设有导轨排油槽101,底座1内侧表面设有螺母组件排油槽A102、螺母组件排油槽B103、底座排油槽104,螺母组件排油槽A102沿底座1长度方向设置,底座排油槽104对称设于螺母组件排油槽A102两侧。所述螺母组件排油槽B103垂直于螺母组件排油槽A102、底座排油槽104,并与二者连通;导轨排油槽101与底座排油槽104连通。As shown in Fig. 8, the longitudinal section of the base 1 is U-shaped, the side wall of the base 1 is provided with a guide rail oil drain groove 101, the inner surface of the base 1 is provided with a nut assembly oil discharge groove A102, a nut assembly oil discharge groove B103, a base oil discharge groove 104, and a nut assembly oil discharge groove A102. The oil discharge grooves A102 of the assembly are arranged along the length direction of the base 1, and the oil discharge grooves 104 of the base are symmetrically arranged on both sides of the oil discharge grooves A102 of the nut assembly. The nut assembly oil discharge groove B103 is perpendicular to the nut assembly oil discharge groove A102 and the base oil discharge groove 104, and communicates with them; the guide rail oil discharge groove 101 communicates with the base oil discharge groove 104.

液体静压导轨排出的液压油经由导轨排油槽101排至底座排油槽104,螺母组件在沿静压丝杠7轴向移动时,集油板18将回收的油通过收油孔1802排放至螺母组件排油槽A102,之后经螺母组件排油槽B103汇聚至底座排油槽104,而后完成液压油回收。The hydraulic oil discharged from the hydrostatic guide rail is discharged to the base oil discharge groove 104 through the guide oil discharge groove 101. When the nut assembly moves axially along the hydrostatic screw 7, the oil collecting plate 18 discharges the recovered oil to the nut through the oil collecting hole 1802. The assembly oil discharge groove A102 is then converged to the base oil discharge groove 104 through the nut assembly oil discharge groove B103, and then the hydraulic oil recovery is completed.

以上所述仅为本申请的优选实施例而已,并不用于限制本申请,对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的保护范围之内。The above descriptions are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims (10)

1.一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,包括相互平行的静压丝杠、液体静压导轨,静压丝杠轴向安装螺母组件,螺母组件一侧安装空心电机;所述螺母组件通过支撑架安装于工作台下方,工作台与液体静压导轨可拆卸连接;所述支撑架外侧包覆有集油板以形成集油空间;所述静压丝杠安装于底座上方,底座开设有用于为液体静压导轨、集油板排油的多个排油槽。1. An integrated hydrostatic nut main drive type lead screw pair linear feed unit, characterized in that it comprises a hydrostatic lead screw and a hydrostatic guide rail that are parallel to each other, the hydrostatic lead screw is axially installed with a nut assembly, and the nut assembly A hollow motor is installed on one side; the nut assembly is installed under the worktable through a support frame, and the worktable is detachably connected to the hydrostatic guide rail; the outer side of the support frame is covered with an oil collecting plate to form an oil collecting space; the static The pressure screw is installed above the base, and the base is provided with a plurality of oil drain grooves for draining oil for the hydrostatic guide rail and the oil collecting plate. 2.根据权利要求1所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述螺母组件包括轴承和静压丝杠螺母,静压丝杠螺母两端分别安装轴承;其中一个轴承的轴承外圈通过轴承法兰与空心电机的电机定子相连,电机转子通过螺母法兰与静压丝杠螺母配合。2. An integrated hydrostatic nut main drive type lead screw pair linear feed unit according to claim 1, wherein the nut assembly comprises a bearing and a hydrostatic lead screw nut, and the hydrostatic lead screw nut has two parts. Bearings are installed at the ends respectively; the bearing outer ring of one of the bearings is connected with the motor stator of the hollow motor through the bearing flange, and the motor rotor is matched with the static pressure screw nut through the nut flange. 3.根据权利要求2所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述静压丝杠螺母内表面与静压丝杠螺纹啮合,静压丝杠螺母外表面两端分别与轴承内圈过盈配合;位于静压丝杠螺母两端的轴承内圈与轴承外圈之间通过液体油膜支撑。3. An integrated hydrostatic nut main drive type lead screw pair linear feed unit according to claim 2, characterized in that the inner surface of the hydrostatic lead screw nut is threadedly engaged with the hydrostatic lead screw, and the static pressure The two ends of the outer surface of the screw nut are respectively in interference fit with the inner ring of the bearing; the inner ring of the bearing located at both ends of the static pressure screw nut and the outer ring of the bearing are supported by a liquid oil film. 4.根据权利要求2所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述轴承外圈周向均匀设有螺母进油口A,轴承外圈内部设有环形内槽,螺母进油口A与环形内槽连通。4. An integrated hydrostatic nut main drive type lead screw pair linear feed unit according to claim 2, wherein the outer ring of the bearing is evenly provided with a nut oil inlet A in the circumferential direction, and the outer ring of the bearing is provided with a nut oil inlet A evenly in the circumferential direction. There is an annular inner groove inside, and the nut oil inlet A is communicated with the annular inner groove. 5.根据权利要求4所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述轴承外圈还设有沿着圆周方向均匀分布的轴承进油口,轴承外圈靠近轴承内圈一侧设有环形油腔;轴承外圈与轴承内圈之间留有缝隙设有环形排油口,环形排油口、轴承进油口分别与环形排油口连通。5 . The integrated hydrostatic nut main drive type linear feed unit of the lead screw pair according to claim 4 , wherein the bearing outer ring is further provided with bearing oil inlets evenly distributed along the circumferential direction. 6 . , the outer ring of the bearing is provided with an annular oil cavity on the side close to the inner ring of the bearing; there is a gap between the outer ring of the bearing and the inner ring of the bearing with an annular oil outlet, and the annular oil outlet and the bearing oil inlet are respectively connected with the annular oil outlet. Connected. 6.根据权利要求4所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述静压丝杠螺母内设有与环形内槽相对应的进油环形槽,进油环形槽连接有多个沿静压丝杠螺母圆周方向布置的螺母进油口B;所述螺母进油口B与节流器连通。6 . An integrated hydrostatic nut main drive type lead screw pair linear feed unit according to claim 4 , wherein the hydrostatic lead screw nut is provided with an oil inlet corresponding to the annular inner groove. 7 . An annular groove, the oil inlet annular groove is connected with a plurality of nut oil inlets B arranged along the circumferential direction of the static pressure screw nut; the nut oil inlet B is communicated with the restrictor. 7.根据权利要求6所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述静压丝杠螺母内部靠近轴承内圈位置开设有出油环形槽,出油环形槽与多个沿其周向分布的螺母出油孔连通。7 . The integrated hydrostatic nut main drive type linear feed unit of the lead screw pair according to claim 6 , wherein an oil outlet annular groove is provided inside the hydrostatic lead screw nut at a position close to the inner ring of the bearing. 8 . , the oil outlet annular groove is communicated with a plurality of nut oil outlet holes distributed along its circumferential direction. 8.根据权利要求1所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述底座侧壁设有导轨排油槽,底座长度方向设置有螺母组件排油槽A,螺母组件排油槽A两侧对称设有底座排油槽;螺母组件排油槽A、底座排油槽与螺母组件排油槽B连通,导轨排油槽与底座排油槽连通。8. An integrated hydrostatic nut main drive type lead screw pair linear feed unit according to claim 1, wherein the side wall of the base is provided with a guide rail oil drain groove, and the length direction of the base is provided with a nut assembly row Oil tank A and nut component oil drain tank A are symmetrically provided with base oil drain tanks on both sides; nut component oil drain tank A and base oil drain tank are connected with nut component oil drain tank B, and the guide rail oil drain tank is connected with the base oil drain tank. 9.根据权利要求1所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述集油板内表面设有挡油板,集油板的底面设有收油孔。9 . The integrated hydrostatic nut main drive type linear feed unit of the lead screw pair according to claim 1 , wherein an oil baffle is provided on the inner surface of the oil collecting plate, and a bottom surface of the oil collecting plate is provided with an oil baffle plate. 10 . There are oil collecting holes. 10.根据权利要求1所述的一种集成液体静压螺母主驱动型丝杠副直线进给单元,其特征在于,所述支撑架包括连接为一体支撑板和安装板,支撑板与工作台相连,安装板与集油板、轴承外圈相连。10. An integrated hydrostatic nut main drive type lead screw pair linear feed unit according to claim 1, wherein the support frame comprises a support plate and a mounting plate that are connected as a whole, the support plate and the worktable The mounting plate is connected with the oil collecting plate and the outer ring of the bearing.
CN202010746545.2A 2020-07-29 2020-07-29 An integrated hydrostatic nut main drive screw pair linear feed unit Active CN112077638B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010746545.2A CN112077638B (en) 2020-07-29 2020-07-29 An integrated hydrostatic nut main drive screw pair linear feed unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010746545.2A CN112077638B (en) 2020-07-29 2020-07-29 An integrated hydrostatic nut main drive screw pair linear feed unit

Publications (2)

Publication Number Publication Date
CN112077638A true CN112077638A (en) 2020-12-15
CN112077638B CN112077638B (en) 2021-05-11

Family

ID=73735102

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010746545.2A Active CN112077638B (en) 2020-07-29 2020-07-29 An integrated hydrostatic nut main drive screw pair linear feed unit

Country Status (1)

Country Link
CN (1) CN112077638B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113894594A (en) * 2021-12-08 2022-01-07 山东大学 Combined nut-driven hydrostatic lead screw pair, servo feeding system and method
CN113938061A (en) * 2021-09-15 2022-01-14 安徽理工大学 Method for reducing speed fluctuation of linear feeding system
WO2023237062A1 (en) * 2022-06-09 2023-12-14 北京博鲁斯潘精密机床有限公司 Machine tool for machining aircraft blade tenon

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719961B1 (en) * 2006-04-27 2007-05-21 한국정밀기계(주) Feeding and Lubrication System Using Hydrostatic Worm Rack
JP2015196232A (en) * 2014-04-03 2015-11-09 株式会社北村製作所 Processing device, and processing system
CN105598732A (en) * 2016-02-29 2016-05-25 山东大学 Electric linear feeding unit and assembling method thereof
CN106695352A (en) * 2015-07-23 2017-05-24 洪子涵 Stage displacement device
CN207710294U (en) * 2018-01-08 2018-08-10 甘肃机电职业技术学院(甘肃省机械工业学校、甘肃省机械高级技工学校) A kind of machine tool fluid pressure guide rail oil return apparatus
CN108788878A (en) * 2018-05-04 2018-11-13 青岛科技大学 A kind of driving static-pressure lead screw pair of nut
CN110554659A (en) * 2019-08-07 2019-12-10 山东大学 large-stroke high-precision micro-nano motion servo feeding system and control method
CN110594379A (en) * 2019-08-07 2019-12-20 山东大学 A nut-driven hydrostatic screw screw transmission pair and machine tool
CN209887101U (en) * 2019-06-04 2020-01-03 江西江重机床有限公司 Plastic belt and static pressure type composite guide rail
CN210649471U (en) * 2019-08-24 2020-06-02 浙江瓯赛汽车部件铸造有限公司 Machine tool body

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719961B1 (en) * 2006-04-27 2007-05-21 한국정밀기계(주) Feeding and Lubrication System Using Hydrostatic Worm Rack
JP2015196232A (en) * 2014-04-03 2015-11-09 株式会社北村製作所 Processing device, and processing system
CN106695352A (en) * 2015-07-23 2017-05-24 洪子涵 Stage displacement device
CN105598732A (en) * 2016-02-29 2016-05-25 山东大学 Electric linear feeding unit and assembling method thereof
CN207710294U (en) * 2018-01-08 2018-08-10 甘肃机电职业技术学院(甘肃省机械工业学校、甘肃省机械高级技工学校) A kind of machine tool fluid pressure guide rail oil return apparatus
CN108788878A (en) * 2018-05-04 2018-11-13 青岛科技大学 A kind of driving static-pressure lead screw pair of nut
CN209887101U (en) * 2019-06-04 2020-01-03 江西江重机床有限公司 Plastic belt and static pressure type composite guide rail
CN110554659A (en) * 2019-08-07 2019-12-10 山东大学 large-stroke high-precision micro-nano motion servo feeding system and control method
CN110594379A (en) * 2019-08-07 2019-12-20 山东大学 A nut-driven hydrostatic screw screw transmission pair and machine tool
CN210649471U (en) * 2019-08-24 2020-06-02 浙江瓯赛汽车部件铸造有限公司 Machine tool body

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113938061A (en) * 2021-09-15 2022-01-14 安徽理工大学 Method for reducing speed fluctuation of linear feeding system
CN113938061B (en) * 2021-09-15 2023-10-27 安徽理工大学 A method to reduce the speed fluctuation of linear feed system
CN113894594A (en) * 2021-12-08 2022-01-07 山东大学 Combined nut-driven hydrostatic lead screw pair, servo feeding system and method
CN113894594B (en) * 2021-12-08 2022-04-01 山东大学 Combined nut-driven hydrostatic screw pair, servo feeding system and method
WO2023237062A1 (en) * 2022-06-09 2023-12-14 北京博鲁斯潘精密机床有限公司 Machine tool for machining aircraft blade tenon

Also Published As

Publication number Publication date
CN112077638B (en) 2021-05-11

Similar Documents

Publication Publication Date Title
CN112077638A (en) An integrated hydrostatic nut main drive screw pair linear feed unit
CN103084588B (en) Motorized spindle device supported by high-speed hybrid bearings and lubricated by two phases of gas and liquid
CN108788878B (en) A nut-driven hydrostatic screw pair
CN102078974A (en) Air floatation high-speed electric main shaft
CN105458306B (en) Use ultraprecise angular contact ball and the high-speed electric main shaft device of cylinder roller bearing
CN102886534B (en) High-speed and high-rigidity dynamic and static pressure built-in electric main shaft
US20230126883A1 (en) Micro hydraulic suspension mechanical pump and assembling method thereof
CN201044389Y (en) Electric motor built-in type activity piezo-electricity principal axis
CN107524654B (en) A kind of vane type servo oscillating hydraulic cylinder and apply its mechanical equipment
CN113864213A (en) A cooling channel for a magnetic levitation blower
CN110293415B (en) Electric spindle pipeline layout system
KR20120099946A (en) Thrust bearing cooling structure of superhigh speed air bearing
CN104551812A (en) Built-in machine tool spindle drive device
CN204413721U (en) A kind of built-in machine tool main spindle driving device
CN216813405U (en) Variable damping vibration damper for diesel engine pipeline
CN114770148B (en) Auxiliary driving device of spindle motor
CN103100729A (en) High-speed electric main shaft device using sliding bearing and rolling bearing for composite support
CN103394711B (en) Large-size precise direct-drive spindle structure of numerical-control lathe
CN110270879B (en) High-precision heavy floor type numerical control boring and milling machine and working method
CN216199123U (en) Heat dissipation channel of magnetic suspension air blower
CN216199124U (en) Magnetic suspension air blower using passive bearing
CN210451818U (en) Electric spindle pipeline layout system
CN116608133A (en) Short cantilever seal built-in self-balancing centrifugal pump
CN210451007U (en) Ultra-precise liquid dynamic and static piezoelectric main shaft
CN207377891U (en) A kind of end cap of servo oscillating formula hydraulic cylinder

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant