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CN112068228B - Plane focusing lens device based on phonon polarized waves - Google Patents

Plane focusing lens device based on phonon polarized waves Download PDF

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CN112068228B
CN112068228B CN202010766024.3A CN202010766024A CN112068228B CN 112068228 B CN112068228 B CN 112068228B CN 202010766024 A CN202010766024 A CN 202010766024A CN 112068228 B CN112068228 B CN 112068228B
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metal antenna
focal length
phonon
molybdenum oxide
focusing lens
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CN112068228A (en
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戴庆
陈娜
胡海
滕汉超
胡德波
秦亚灵
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National Center for Nanosccience and Technology China
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Abstract

The invention provides a plane focusing lens device based on phonon polarized waves, which comprises a substrate layer, a focusing lens and a focusing lens, wherein a molybdenum oxide thin layer is arranged on the substrate layer; covering a metal antenna on one side of the molybdenum oxide thin layer; and irradiating the metal antenna by using scattered light or infrared light to excite hyperbolic phonon excimer, and adjusting the focal length of nano focusing by changing the size of the metal antenna or the wavelength of incident light. The size of the wave vector of the phonon excimer is regulated and controlled by controlling the size of the metal antenna or the wave number of incident infrared light, so that the focal length regulation and control of the planar lens focusing are realized. The method is simple and easy to implement, and has a wider range and lower cost.

Description

一种基于声子极化波的平面聚焦透镜器件A Planar Focusing Lens Device Based on Phonon Polarized Waves

技术领域technical field

本发明涉及纳米聚焦技术领域,特别涉及一种基于声子极化波的平面聚焦透镜器件。The invention relates to the technical field of nano-focusing, in particular to a plane focusing lens device based on phonon polarized waves.

背景技术Background technique

氧化钼是一种双轴材料且具有强烈的各向异性。其在不同剩余射线带内,沿不同光轴的介电函数相反,产生的声子激元具有明显的平面双曲特性,可以控制光沿某一特殊方向传播,因而在纳米光学中控制与调控光领域具有重要的应用。Molybdenum oxide is a biaxial material and is strongly anisotropic. In different residual ray bands, the dielectric functions along different optical axes are opposite, and the generated phonon polaritons have obvious plane hyperbolic properties, which can control the propagation of light along a special direction, so it can be controlled and regulated in nano-optics. The field of light has important applications.

双曲声子激元是一类特殊的激元,相比较其他传导类型的激元(如等离激元,激子激元),其具有明显的各向异性以及低损耗特性。在现有技术中,依靠天然氧化钼材料可以实现片内双曲声子激元的激发。Hyperbolic phonon polaritons are a special kind of polaritons, which have obvious anisotropy and low loss characteristics compared with other conduction types of polaritons (such as plasmons, excitons). In the prior art, the excitation of intra-chip hyperbolic phonon polaritons can be achieved by relying on natural molybdenum oxide materials.

构建平面透镜,实现纳米聚焦对于微纳光学,光控制与调节领域具有重要的应用价值。现有技术中,人们主要依靠超结构,表面构造纳米聚焦的透镜。但是由于微纳加工的影响,会造成较大的光损耗,且由于尺寸的影响,聚集光的范围比较窄。此外,依靠超结构,表面构造纳米聚焦的透镜,制造的成本较高,不利于实际生产应用。Constructing a flat lens and realizing nano-focusing has important application value in the fields of micro-nano optics, light control and regulation. In the prior art, people mainly rely on the superstructure, the surface structure of the nano-focusing lens. However, due to the influence of micro-nano processing, large light loss will be caused, and due to the influence of size, the range of concentrated light is relatively narrow. In addition, relying on superstructures to construct nano-focusing lenses on the surface is expensive to manufacture, which is not conducive to practical production applications.

因此,为了解决上述问题,需要一种基于声子极化波的平面聚焦透镜器件,实现降低损耗且简单易行的进行焦距调控。Therefore, in order to solve the above problems, a plane focusing lens device based on phonon polarized waves is required, which can realize the simple and easy focal length control with reduced loss.

发明内容SUMMARY OF THE INVENTION

本发明的一个目的在于提供一种基于声子极化波的平面聚焦透镜器件,所述器件包括,基底层,在所述基底层上布置一层氧化钼薄层;One object of the present invention is to provide a plane focusing lens device based on phonon polarized waves, the device includes a base layer, and a molybdenum oxide thin layer is arranged on the base layer;

在所述氧化钼薄层的一侧覆盖金属天线,散射光或红外光照射所述金属天线激发双曲声子激元,通过改变金属天线的尺寸或入射光的波长,调整纳米聚焦的焦距。A metal antenna is covered on one side of the thin molybdenum oxide layer, and the metal antenna is irradiated with scattered light or infrared light to excite hyperbolic phonon polaritons.

优选地,所述基底层材料为无机介电材料或有机高分子材料。Preferably, the base layer material is an inorganic dielectric material or an organic polymer material.

优选地,所述氧化钼薄层的平面几何尺寸为1μm-500μm,厚度为2nm-5000nm;所述金属天线的几何尺寸为10nm-300μm,厚度为20nm-50μm。Preferably, the planar geometric size of the molybdenum oxide thin layer is 1 μm-500 μm, and the thickness is 2 nm-5000 nm; the geometric size of the metal antenna is 10 nm-300 μm, and the thickness is 20 nm-50 μm.

本发明的另一个目的在于提供一种基于声子极化波的平面聚焦透镜器件的制备方法,所述方法包括:Another object of the present invention is to provide a preparation method of a plane focusing lens device based on phonon polarized waves, the method comprising:

制备氧化钼薄层;Preparation of molybdenum oxide thin layer;

选择天线的形状与尺寸,制作金属天线;Select the shape and size of the antenna to make a metal antenna;

选择基底层材料,并制备基底层,将氧化钼薄层贴合在所述基底层上,在所述氧化钼薄层上一侧覆盖所述金属天线。A base layer material is selected, a base layer is prepared, a molybdenum oxide thin layer is attached on the base layer, and the metal antenna is covered on one side of the molybdenum oxide thin layer.

本发明的又一个目的在于提供一种基于声子极化波的平面聚焦透镜器件调整纳米聚焦的焦距的方法,所述方法包括:Another object of the present invention is to provide a method for adjusting the focal length of nano-focusing based on a plane focusing lens device based on phonon polarized waves, the method comprising:

步骤1),通过中红外散射型扫描近场光学显微镜针尖的散射光直接照射金属天线,激发氧化钼声子激元;Step 1), directly irradiating the metal antenna with the scattered light from the tip of the mid-infrared scattering scanning near-field optical microscope to excite the molybdenum oxide phonon polariton;

得到电场分布,测量焦距的长度;Obtain the electric field distribution and measure the length of the focal length;

步骤2),改变金属天线尺寸,重复步骤1),得到电场分布,测量焦距的长度;Step 2), changing the size of the metal antenna, repeating step 1), obtaining the electric field distribution, and measuring the length of the focal length;

步骤3),重复步骤2),直至焦距调整到合适的位置。Step 3), repeat step 2) until the focal length is adjusted to an appropriate position.

本发明的又一个目的在于提供一种基于声子极化波的平面聚焦透镜器件调整纳米聚焦的焦距的方法,所述方法包括:Another object of the present invention is to provide a method for adjusting the focal length of nano-focusing based on a plane focusing lens device based on phonon polarized waves, the method comprising:

步骤a),使用入射红外光照射所述金属天线,在金属天线边界处激发声子激元;Step a), irradiating the metal antenna with incident infrared light to excite phonons at the boundary of the metal antenna;

得到电场分布,测量焦距的长度;Obtain the electric field distribution and measure the length of the focal length;

步骤b),改变入射红外光的波数,重复步骤a)得到电场分布,测量焦距的长度;Step b), changing the wave number of the incident infrared light, repeating step a) to obtain the electric field distribution, and measuring the length of the focal length;

步骤c),重复步骤b),直至焦距调整到合适的位置。Step c), repeat step b) until the focal length is adjusted to an appropriate position.

本发明提供的一种基于声子极化波的平面聚焦透镜器件及调整纳米聚焦的焦距的方法,通过控制金属天线的尺寸大小或者入射红外光的波数,调控声子激元的波矢大小,从而实现焦距的调控。The invention provides a plane focusing lens device based on phonon polarized waves and a method for adjusting the focal length of nano-focusing. By controlling the size of the metal antenna or the wave number of the incident infrared light, the size of the wave vector of the phonon polariton is regulated. To achieve the control of the focal length.

本发明提供的一种基于声子极化波的平面聚焦透镜器件及调整纳米聚焦的焦距的方法,改变金属天线的尺寸大小,可以调控焦点的位置。本发明提供的一种基于声子极化波的平面聚焦透镜器件及调整纳米聚焦的焦距的方法,改变入射红外光的波数,也可以动态调控焦距的位置,从而实现平面透镜聚焦的焦距调控。本发明简单易行,且范围更广,成本更低。The invention provides a plane focusing lens device based on phonon polarized waves and a method for adjusting the focal length of nano-focusing, which can change the size of the metal antenna and adjust the position of the focal point. The invention provides a plane focusing lens device based on phonon polarized waves and a method for adjusting the focal length of nano-focusing, which can change the wave number of incident infrared light, and can also dynamically adjust the position of the focal length, thereby realizing the focal length adjustment of the plane lens focusing. The invention is simple and easy to implement, has wider scope and lower cost.

应当理解,前述大体的描述和后续详尽的描述均为示例性说明和解释,并不应当用作对本发明所要求保护内容的限制。It is to be understood that both the foregoing general description and the following detailed description are exemplary illustrations and explanations, and should not be used as limitations on what is claimed in the present invention.

附图说明Description of drawings

参考随附的附图,本发明更多的目的、功能和优点将通过本发明实施方式的如下描述得以阐明,其中:Further objects, functions and advantages of the present invention will be elucidated by the following description of embodiments of the present invention with reference to the accompanying drawings, wherein:

图1示意性示出了本发明一种基于声子极化波的平面聚焦透镜器件的结构示意图。FIG. 1 schematically shows a schematic structural diagram of a plane focusing lens device based on phonon polarized waves according to the present invention.

图2示出了本发明一种基于声子极化波的平面聚焦透镜器件聚焦的实验图像和模拟图像。FIG. 2 shows the experimental and simulated images of a phonon-polarized wave-based plane focusing lens device of the present invention.

图3示出了本发明一种基于声子极化波的平面聚焦透镜器件的不同尺寸的金属天线的光学显微镜照片。FIG. 3 shows optical microscope pictures of metal antennas of different sizes of a phonon polarized wave-based plane focusing lens device of the present invention.

图4示出了本发明一种基于声子极化波的平面聚焦透镜器件的不同尺寸的金属天线对应的聚焦图像。FIG. 4 shows focused images corresponding to metal antennas of different sizes of a planar focusing lens device based on phonon polarized waves of the present invention.

图5示出了本发明一种基于声子极化波的平面聚焦透镜器件的三组金属天线尺寸在不同入射波数照射下的聚焦图像。FIG. 5 shows the focused images of three groups of metal antenna sizes of a phonon polarized wave-based plane focusing lens device of the present invention under the illumination of different incident wave numbers.

图6示出了本发明一种基于声子极化波的平面聚焦透镜器件不同入射波数与焦距的关系示意图。FIG. 6 is a schematic diagram showing the relationship between different incident wave numbers and focal lengths of a plane focusing lens device based on phonon polarized waves of the present invention.

图7示出了本发明在一个实施例中一种基于声子极化波的平面聚焦透镜器件调整纳米聚焦的焦距的方法流程图。FIG. 7 shows a flow chart of a method for adjusting the focal length of nano-focusing based on a planar focusing lens device based on phonon polarized waves in one embodiment of the present invention.

具体实施方式Detailed ways

通过参考示范性实施例,本发明的目的和功能以及用于实现这些目的和功能的方法将得以阐明。然而,本发明并不受限于以下所公开的示范性实施例;可以通过不同形式来对其加以实现。说明书的实质仅仅是帮助相关领域技术人员综合理解本发明的具体细节。Objects and functions of the present invention and methods for achieving these objects and functions will be elucidated by referring to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it may be implemented in various forms. The essence of the description is merely to assist those skilled in the relevant art to comprehensively understand the specific details of the present invention.

在下文中,将参考附图描述本发明的实施例,相关技术术语应当是本领域技术人员所熟知的。在附图中,相同的附图标记代表相同或类似的部件,或者相同或类似的步骤,除非另有说明。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings, and related technical terms should be well known to those skilled in the art. In the drawings, the same reference numbers represent the same or similar parts, or the same or similar steps, unless otherwise stated.

下面结合具体的实施例对本发明的内容进行详细的阐述,如图1所示本发明一种基于声子极化波的平面聚焦透镜器件的结构示意图,根据本发明的实施例,一种基于声子极化波的平面聚焦透镜器件包括,基底层101,在基底层101上布置一层氧化钼薄层102。在氧化钼薄层102的一侧覆盖金属天线103,散射光或红外光照射金属天线103激发双曲声子激元,通过改变金属天线的尺寸或入射光的波长,调整纳米聚焦的焦距f。The content of the present invention will be described in detail below in conjunction with specific embodiments. As shown in FIG. 1, a schematic structural diagram of a plane focusing lens device based on phonon polarized waves of the present invention is shown. According to an embodiment of the present invention, a The sub-polarized wave plane focusing lens device includes a base layer 101 , and a molybdenum oxide thin layer 102 is arranged on the base layer 101 . A metal antenna 103 is covered on one side of the molybdenum oxide thin layer 102, and the scattered light or infrared light illuminates the metal antenna 103 to excite hyperbolic phonon polaritons.

在一些实施例中,通过中红外散射型扫描近场光学显微镜针尖105的散射光直接照射金属天线103,激发氧化钼声子激元。In some embodiments, the metal antenna 103 is directly illuminated by the scattered light from the mid-infrared scattering type scanning near-field optical microscope tip 105 to excite the molybdenum oxide phonon polaritons.

在另一些实施例中,使用入射红外光104照射金属天线103,在金属天线103边界处激发声子激元。In other embodiments, the metal antenna 103 is illuminated with incident infrared light 104 to excite phonon polaritons at the boundary of the metal antenna 103 .

根据本发明的实施例,基底层101材料为无机介电材料或有机高分子材料。例如,在一些实施例中,无机介电材料可以选自二氧化硅、硅、石英、蓝宝石、锗、氧化铝、氮化硼、氟化钙、氟化镁、砷化镓、氮化镓。在一些实施例中,有机高分子材料可以选自PET、PMMA、PDMS和塑料。According to an embodiment of the present invention, the material of the base layer 101 is an inorganic dielectric material or an organic polymer material. For example, in some embodiments, the inorganic dielectric material may be selected from the group consisting of silicon dioxide, silicon, quartz, sapphire, germanium, aluminum oxide, boron nitride, calcium fluoride, magnesium fluoride, gallium arsenide, gallium nitride. In some embodiments, the organic polymeric material may be selected from PET, PMMA, PDMS, and plastics.

氧化钼晶面取向为(010),根据本发明的实施例,氧化钼薄层102的平面几何尺寸为1μm-500μm,厚度为2nm-5000nm。例如氧化钼薄层102的长度范围为1μm-500μm,宽度范围为1μm-500μm。The crystal plane orientation of molybdenum oxide is (010). According to the embodiment of the present invention, the planar geometric size of the molybdenum oxide thin layer 102 is 1 μm-500 μm, and the thickness is 2 nm-5000 nm. For example, the length of the molybdenum oxide thin layer 102 ranges from 1 μm to 500 μm, and the width ranges from 1 μm to 500 μm.

金属天线103材料可以选择铁、铝、铜、金、银、铂、钢。金属天线103形状可以为圆形,半圆形,椭圆形,半椭圆形,金属天线103的几何尺寸为10nm-300μm,厚度为20nm-50μm。The material of the metal antenna 103 can be selected from iron, aluminum, copper, gold, silver, platinum, and steel. The shape of the metal antenna 103 can be a circle, a semi-circle, an ellipse, or a semi-ellipse. The geometric size of the metal antenna 103 is 10 nm-300 μm, and the thickness is 20 nm-50 μm.

本实施例中示例性的以圆形金属天线(圆盘)为例,金属天线的直径为10nm-300μm,厚度为20nm-50μm。In this embodiment, a circular metal antenna (disk) is exemplified as an example. The diameter of the metal antenna is 10 nm-300 μm, and the thickness is 20 nm-50 μm.

通过激发氧化钼中双曲声子激元,依靠金属天线实现平面透镜聚焦,通过改变金属天线的尺寸或者入射光的波数动态调控焦距。激发氧化钼所使用的入射的电磁波集中在红外区域,区域主要波数为400-980cm-1By exciting the hyperbolic phonon polariton in molybdenum oxide, the metal antenna is used to realize the focusing of the plane lens, and the focal length is dynamically adjusted by changing the size of the metal antenna or the wave number of the incident light. The incident electromagnetic waves used to excite molybdenum oxide are concentrated in the infrared region, and the main wave number in the region is 400-980 cm -1 .

根据本发明的实施例,一种基于声子极化波的平面聚焦透镜器件器件的制备方法,包括:According to an embodiment of the present invention, a preparation method of a plane focusing lens device based on a phonon polarized wave includes:

制备氧化钼薄层;Preparation of molybdenum oxide thin layer;

选择天线的形状与尺寸,制作金属天线;Select the shape and size of the antenna to make a metal antenna;

选择基底层材料,并制备基底层,将氧化钼薄层贴合在所述基底层上,在所述氧化钼薄层上一侧覆盖所述金属天线。A base layer material is selected, a base layer is prepared, a molybdenum oxide thin layer is attached on the base layer, and the metal antenna is covered on one side of the molybdenum oxide thin layer.

下面通过具体的实验和模拟对本发明提供的一种基于声子极化波的平面聚焦透镜器件器件的聚焦进行分析。The focusing of a plane focusing lens device based on phonon polarized waves provided by the present invention is analyzed below through specific experiments and simulations.

如图2所示本发明一种基于声子极化波的平面聚焦透镜器件聚焦的实验图像和模拟图像。As shown in FIG. 2 , the experimental and simulated images of a plane focusing lens device based on phonon polarized waves of the present invention are focused.

本发明提供的种平面透镜聚焦器件通过金属天线来激发氧化钼的声子激元从而进行平面聚焦,在图2中,(a)为在入射波数为900cm-1下,直径为2.4um金属天线(圆盘)的实验图像,f为图像显示的焦距。(b)为在入射波数为900cm-1下,直径为2.4um金属天线(半圆盘)的实验图像,f为图像显示的焦距。The plane lens focusing device provided by the present invention excites the phonon polariton of molybdenum oxide through a metal antenna to perform plane focusing. In Figure 2, (a) is a metal antenna with a diameter of 2.4um under the incident wave number of 900cm -1 (disk) experimental image, f is the focal length shown in the image. (b) is the experimental image of a metal antenna (half-disk) with a diameter of 2.4um under the incident wave number of 900cm -1 , and f is the focal length displayed by the image.

实施例中,使用COMSOL软件进行仿真模拟,在图2中,(c)为在入射波数为900cm-1下,直径为2.4um金属天线(圆盘)的模拟图像,f为图像显示的焦距。(d)为在入射波数为900cm-1下,直径为2.4um金属天线(半圆盘)的模拟图像,f为图像显示的焦距。In the embodiment, COMSOL software is used for simulation. In Figure 2, (c) is a simulated image of a metal antenna (disk) with a diameter of 2.4um under the incident wave number of 900cm -1 , and f is the focal length displayed by the image. (d) is a simulated image of a metal antenna (half-disk) with a diameter of 2.4um under the incident wave number of 900cm -1 , and f is the focal length displayed by the image.

如图3所述本发明一种基于声子极化波的平面聚焦透镜器件的不同尺寸的金属天线的光学显微镜照片。实施例中,通过光纤显微镜拍摄直径为0.5μm-22μm的金属天线的图片,图3中右侧圆形白色的区域是金属天线,左侧是金属天线的直径大小。As shown in FIG. 3 , optical microscope pictures of metal antennas of different sizes of a plane focusing lens device based on phonon polarized waves of the present invention. In the embodiment, a picture of a metal antenna with a diameter of 0.5 μm-22 μm is taken by an optical fiber microscope. In Figure 3, the circular white area on the right side is the metal antenna, and the left side is the diameter of the metal antenna.

如图4所示本发明一种基于声子极化波的平面聚焦透镜器件的不同尺寸的金属天线对应的聚焦图像。实施例中,在红外光照射下,在不同金属天线尺寸大小下,进行声子激元聚焦。图4中左侧为金属天线尺寸与聚焦尺寸的关系,右侧对应不同金属天线的平面透镜聚焦图像。As shown in FIG. 4 , the focused images corresponding to metal antennas of different sizes of a plane focusing lens device based on phonon polarized waves of the present invention. In the embodiment, under the irradiation of infrared light, under different sizes of metal antennas, phonon polariton focusing is performed. In Figure 4, the left side shows the relationship between the size of the metal antenna and the focus size, and the right side corresponds to the focused image of the plane lens of different metal antennas.

根据图4,通过逐渐减小金属天线直径,聚焦的焦距逐渐减小,焦点越来越靠近金属天线边界。因此本发明提供的一种基于声子极化波的平面聚焦透镜器件可通过调整圆盘直径,进而调节焦距,效果非常明显。According to Figure 4, by gradually reducing the diameter of the metal antenna, the focal length of the focus is gradually reduced, and the focus is getting closer and closer to the boundary of the metal antenna. Therefore, a plane focusing lens device based on phonon polarized waves provided by the present invention can adjust the focal length by adjusting the diameter of the disk, and the effect is very obvious.

如图5所示本发明一种基于声子极化波的平面聚焦透镜器件的三组金属天线尺寸在不同入射波数照射下的聚焦图像。实施例中给出三组不同金属天线直径下不同入射波数的平面透镜的聚焦图像。可以明显看到,随着波数的增加,焦距逐渐变小。As shown in FIG. 5 , the focused images of three groups of metal antenna sizes of a plane focusing lens device based on phonon polarized waves of the present invention under the illumination of different incident wave numbers. In the embodiment, the focused images of three groups of plane lenses with different incident wave numbers under different metal antenna diameters are given. It can be clearly seen that as the wave number increases, the focal length gradually decreases.

图6示出了本发明一种基于声子极化波的平面聚焦透镜器件不同入射波数与焦距的关系示意图。以金作为金属天线,金属天线直径分别为100nm、255nm和450nm三组尺寸,随着入射光波数的增加,焦距逐渐变小。FIG. 6 is a schematic diagram showing the relationship between different incident wave numbers and focal lengths of a plane focusing lens device based on phonon polarized waves of the present invention. Gold is used as the metal antenna, and the diameter of the metal antenna is 100nm, 255nm and 450nm, and the focal length gradually decreases with the increase of the incident light wave number.

本发明提供的一种基于声子极化波的平面聚焦透镜器件,通过激发氧化钼中双曲声子激元,依靠金属天线实现平面透镜聚焦,通过改变金属天线的尺寸或者入射光的波数动态调控焦距。The invention provides a plane focusing lens device based on phonon polarized waves, by exciting the hyperbolic phonon polariton in molybdenum oxide, relying on a metal antenna to realize the focusing of the plane lens, and by changing the size of the metal antenna or the wave number dynamics of the incident light Adjust the focus.

根据本发明的一个实施例,通过改变金属天线的尺寸调整纳米聚焦的焦距,具体地,一种利用平面透镜聚焦器件调整纳米聚焦的焦距的方法,包括:According to an embodiment of the present invention, the focal length of nano-focusing is adjusted by changing the size of the metal antenna. Specifically, a method for adjusting the focal length of nano-focusing by using a plane lens focusing device includes:

步骤1、制备氧化钼薄层。Step 1. Prepare a thin layer of molybdenum oxide.

步骤2、选择天线的形状与尺寸,制作金属天线。Step 2. Select the shape and size of the antenna to make a metal antenna.

步骤3、选择基底层材料,并制备基底层,将氧化钼薄层贴合在所述基底层上,在所述氧化钼薄层上一侧覆盖所述金属天线(金属圆盘)。Step 3: Select the material of the base layer, prepare the base layer, stick a molybdenum oxide thin layer on the base layer, and cover the metal antenna (metal disc) on one side of the molybdenum oxide thin layer.

步骤4、通过中红外散射型扫描近场光学显微镜针尖的散射光直接照射金属天线,激发氧化钼声子激元。Step 4. The metal antenna is directly irradiated by the scattered light from the tip of the mid-infrared scattering type scanning near-field optical microscope to excite the molybdenum oxide phonon polaritons.

步骤5、得到电场分布,测量焦距的长度。Step 5. Obtain the electric field distribution and measure the length of the focal length.

步骤6、改变金属天线尺寸,重复步骤4,得到电场分布,测量焦距的长度。Step 6. Change the size of the metal antenna and repeat step 4 to obtain the electric field distribution and measure the length of the focal length.

步骤7、重复步骤6,直至焦距调整到合适的位置。Step 7. Repeat step 6 until the focal length is adjusted to an appropriate position.

在一些优选的实施例中,制备的金属天线的尺寸大小(圆盘直径大小)变化是连续的,以对焦距进行连续调控。In some preferred embodiments, the size (diameter of the disk) of the prepared metal antenna changes continuously, so as to continuously adjust the focal length.

图7示出了本发明在一个实施例中一种基于声子极化波的平面聚焦透镜器件调整纳米聚焦的焦距的方法流程图。根据本发明的一个实施例,通过改变红外光的入射光波数调整纳米聚焦的焦距,具体地,一种利用平面透镜聚焦器件调整纳米聚焦的焦距的方法,包括:FIG. 7 shows a flow chart of a method for adjusting the focal length of nano-focusing based on a planar focusing lens device based on phonon polarized waves in one embodiment of the present invention. According to an embodiment of the present invention, the focal length of nano-focusing is adjusted by changing the incident light wave number of infrared light. Specifically, a method for adjusting the focal length of nano-focusing by using a plane lens focusing device includes:

步骤S101、制备氧化钼薄层。Step S101, preparing a molybdenum oxide thin layer.

步骤S102、选择天线的形状与尺寸,制作金属天线。Step S102 , selecting the shape and size of the antenna to manufacture a metal antenna.

步骤S103、选择基底层材料,并制备基底层,将氧化钼薄层贴合在所述基底层上,在所述氧化钼薄层上一侧覆盖所述金属天线(金属圆盘)。Step S103 , selecting a base layer material, preparing a base layer, pasting a molybdenum oxide thin layer on the base layer, and covering the metal antenna (metal disc) on one side of the molybdenum oxide thin layer.

步骤S104、使用入射红外光照射所述金属天线,在金属天线边界处激发声子激元。Step S104 , irradiating the metal antenna with incident infrared light to excite phonon polaritons at the boundary of the metal antenna.

步骤S105、得到电场分布,测量焦距的长度。In step S105, the electric field distribution is obtained, and the length of the focal length is measured.

根据本发明的实施例,在得到测量焦距的长度后,还包括:According to an embodiment of the present invention, after obtaining the length of the measurement focal length, the method further includes:

步骤S106、改变入射红外光的波数,重复步骤S104得到电场分布,测量焦距的长度。Step S106 , changing the wave number of the incident infrared light, repeating step S104 to obtain the electric field distribution, and measuring the length of the focal length.

步骤S107、重复步骤S106,直至焦距调整到合适的位置。In step S107, step S106 is repeated until the focal length is adjusted to an appropriate position.

本发明提供的一种基于声子极化波的平面聚焦透镜器件及调整纳米聚焦的焦距的方法,通过控制金属天线的尺寸大小或者入射红外光的波数,调控声子激元的波矢大小,从而实现焦距的调控。The invention provides a plane focusing lens device based on phonon polarized waves and a method for adjusting the focal length of nano-focusing. By controlling the size of the metal antenna or the wave number of the incident infrared light, the size of the wave vector of the phonon polariton is regulated. To achieve the control of the focal length.

本发明提供的一种基于声子极化波的平面聚焦透镜器件及调整纳米聚焦的焦距的方法,改变金属天线的尺寸大小,可以调控焦点的位置。本发明提供的一种基于声子极化波的平面聚焦透镜器件及调整纳米聚焦的焦距的方法,改变入射红外光的波数,也可以动态调控焦距的位置,从而实现平面透镜聚焦的焦距调控。本发明简单易行,且范围更广,成本更低。The invention provides a plane focusing lens device based on phonon polarized waves and a method for adjusting the focal length of nano-focusing, which can change the size of the metal antenna and adjust the position of the focal point. The invention provides a plane focusing lens device based on phonon polarized waves and a method for adjusting the focal length of nano-focusing, which can change the wave number of incident infrared light, and can also dynamically adjust the position of the focal length, thereby realizing the focal length adjustment of the plane lens focusing. The invention is simple and easy to implement, has wider scope and lower cost.

结合这里披露的本发明的说明和实践,本发明的其他实施例对于本领域技术人员都是易于想到和理解的。说明和实施例仅被认为是示例性的,本发明的真正范围和主旨均由权利要求所限定。Other embodiments of the present invention will be readily apparent to and understood by those skilled in the art in conjunction with the specification and practice of the present invention disclosed herein. The description and examples are to be regarded as exemplary only, with the true scope and spirit of the invention being defined by the claims.

Claims (4)

1. A plane focusing lens device based on phonon polarized waves is characterized by comprising a substrate layer, a focusing lens and a focusing lens, wherein the substrate layer is made of an inorganic dielectric material or an organic polymer material, and a molybdenum oxide thin layer is arranged on the substrate layer;
covering a metal antenna on one side of the molybdenum oxide thin layer; irradiating the metal antenna by scattered light or infrared light to excite hyperbolic phonon excimer, and adjusting the focal length of nano focusing by changing the size of the metal antenna or the wavelength of incident light;
the plane geometric dimension of the molybdenum oxide thin layer is 1-500 mu m, and the thickness is 2-5000 nm; the geometric dimension of the metal antenna is 10nm-300 mu m, and the thickness of the metal antenna is 20nm-50 mu m.
2. A method of making the device of claim 1, the method comprising:
preparing a molybdenum oxide thin layer;
selecting the shape and size of the antenna, and manufacturing a metal antenna;
selecting a substrate layer material, preparing a substrate layer, attaching a molybdenum oxide thin layer on the substrate layer, and covering the metal antenna on one side of the molybdenum oxide thin layer.
3. A method for adjusting the focal length of a nano-focus using the device of claim 1, the method comprising:
step 1), directly irradiating a metal antenna by scattered light of a needle point of a mid-infrared scattering type scanning near-field optical microscope to excite a molybdenum oxide phonon excimer;
obtaining electric field distribution and measuring the length of the focal length;
step 2), changing the size of the metal antenna, repeating the step 1) to obtain electric field distribution, and measuring the length of the focal length;
and 3) repeating the step 2) until the focal length is adjusted to a proper position.
4. A method for adjusting the focal length of a nano-focus using the device of claim 1, the method comprising:
step a), irradiating the metal antenna by using incident infrared light, and exciting phonon excimer at the boundary of the metal antenna;
obtaining electric field distribution and measuring the length of the focal length;
step b), changing the wave number of incident infrared light, repeating the step a) to obtain electric field distribution, and measuring the length of the focal length;
and c), repeating the step b) until the focal length is adjusted to a proper position.
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