CN112001036A - An accelerometer based on artificial intelligence design and distributed manufacturing - Google Patents
An accelerometer based on artificial intelligence design and distributed manufacturing Download PDFInfo
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Abstract
本发明公开了一种基于人工智能设计和分布式制造的加速度计,先使用仿真的方法生成器件的几何参数与响应结果之间一一对应的大数据集,再分别喂入双向人工智能网络进行训练,然后根据上述逆向检索得到的几何参数构建成三维模型,使用由云计算平台控制管理的可以同时提供多种材料的三维打印机进行制造,同时使用绝缘材料制作器件的机械结构,用导电材料制造器件的电极及引线互连,用可选择性去除的牺牲材料制造三维结构的临时支撑结构,一体化制造完成后选择性地去除支撑结构得到完整的器件,降低了设计和制造的难度和周期,实现了个性化和智能化制造。
The invention discloses an accelerometer based on artificial intelligence design and distributed manufacturing. First, a large data set of one-to-one correspondence between the geometric parameters of the device and the response results is generated by a simulation method, and then fed into a two-way artificial intelligence network for Training, and then build a 3D model according to the geometric parameters obtained by the above reverse retrieval, and use a 3D printer controlled and managed by a cloud computing platform that can provide multiple materials at the same time. The electrodes and leads of the device are interconnected, and the temporary support structure of the three-dimensional structure is made of the sacrificial material that can be selectively removed. After the integrated manufacturing is completed, the support structure is selectively removed to obtain a complete device, which reduces the difficulty and cycle of design and manufacture. Personalized and intelligent manufacturing is realized.
Description
技术领域technical field
本发明涉及电子技术领域,尤其涉及一种加速度计的人工智能设计方法和分布式制造方法。The invention relates to the field of electronic technology, in particular to an artificial intelligence design method and a distributed manufacturing method of an accelerometer.
背景技术Background technique
电子传感器如加速度计、压力传感器、陀螺仪等在工业生产和人们的日常生活中有广泛的应用。这些传感器的设计通常是由具有专业知识的技术人员完成,通常进行孤立的建模和仿真,一旦修改几何尺寸必须重新建模,通常需要数周时间,且对于难以写出解析式的逆向设计问题,即根据器件的响应结果确定几何参数往往难以有效解决。这些传感器的制造方法通常是基于硅基微电子工艺如淀积、光刻、刻蚀和金属化等制造的,通常需要数月时间。整个设计和制造工艺过程都是在集中化场所完成的,生产周期长、产品型号少、运输成本高......难以满足用户对个性化定制日益增长的需求。Electronic sensors such as accelerometers, pressure sensors, and gyroscopes are widely used in industrial production and people's daily life. The design of these sensors is usually done by technicians with specialized knowledge, usually with isolated modeling and simulation, once the geometry is modified, it must be remodeled, which usually takes several weeks, and it is difficult to write analytical reverse design problems. , that is, determining the geometric parameters based on the response of the device is often difficult to solve effectively. The fabrication methods for these sensors are typically based on silicon-based microelectronics processes such as deposition, lithography, etching, and metallization, which typically take months. The entire design and manufacturing process is completed in a centralized place, with long production cycles, few product models, and high transportation costs... It is difficult to meet users' growing demand for personalized customization.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于,提供了一种基于人工智能设计方法和分布式制造方法,并应用在典型器件加速度计的设计和制造领域。包括人工智能设计部分和分布式制造部分。The purpose of the present invention is to provide an artificial intelligence-based design method and a distributed manufacturing method, which are applied in the field of design and manufacture of typical device accelerometers. Including artificial intelligence design part and distributed manufacturing part.
所述人工智能设计部分是先使用仿真的方法生成器件的几何参数与响应结果之间一一对应的大数据集,再分别喂入双向人工智能网络进行训练,一旦训练完成,正向网络可以用来根据器件的几何参数快速地预测响应结果,逆向网络可以用来根据结果需求快速地检索器件的几何参数。The artificial intelligence design part first uses the simulation method to generate a large data set of one-to-one correspondence between the geometric parameters of the device and the response results, and then feeds the two-way artificial intelligence network respectively for training. Once the training is completed, the forward network can be used. In order to quickly predict the response results according to the geometric parameters of the device, the inverse network can be used to quickly retrieve the geometric parameters of the device according to the result requirements.
所述的分布式制造部分是先根据所述逆向检索得到的几何参数构建成三维模型,然后使用由云计算平台控制管理的,可以同时提供多种材料的三维打印机进行一体化制造,打印材料至少同时包括绝缘材料,导电材料,可选择性去除的支撑材料,打印制造时同时使用绝缘材料制作器件的机械结构,用导电材料制造器件的电极及引线互连,用可选择性去除的牺牲材料制造三维结构的临时支撑结构,一体化制造完成后选择性地去除支撑结构得到完整的器件。The distributed manufacturing part is first constructed into a three-dimensional model according to the geometric parameters obtained by the reverse retrieval, and then integrated with a three-dimensional printer controlled and managed by a cloud computing platform that can provide multiple materials at the same time, and the printing materials are at least At the same time, it includes insulating materials, conductive materials, and selectively removable supporting materials. In the printing process, insulating materials are used to make the mechanical structure of the device, and conductive materials are used to make the electrodes and lead interconnects of the device. The temporary support structure of the three-dimensional structure, after the integrated manufacturing is completed, the support structure is selectively removed to obtain a complete device.
所述加速度计具有差分电容式结构,用所述人工智能设计方法建立所述加速度计的双向网络,用逆向检索得到的几何参数构建三维模型,用所述多喷头三维打印机的绝缘材料打印器件的机械结构,用所述三维打印机的导电材料打印器件的电极及引线互连,用所述三维打印机的可去除的支撑材料打印器件的支撑结构,制造完成后选择性去除支撑结构得到。The accelerometer has a differential capacitive structure, the artificial intelligence design method is used to establish a bidirectional network of the accelerometer, a three-dimensional model is constructed using the geometric parameters obtained by reverse retrieval, and the insulating material of the multi-nozzle three-dimensional printer is used to print the part of the device. The mechanical structure is obtained by printing the electrodes and leads of the device with the conductive material of the 3D printer, printing the supporting structure of the device with the removable supporting material of the 3D printer, and selectively removing the supporting structure after the manufacturing is completed.
相对于现有技术,本发明具有如下优点:Compared with the prior art, the present invention has the following advantages:
第一,本发明的设计部分使用电学仿真或有限元仿真得到器件的几何参数与响应结果之间一一对应的大数据集,数据充分且准确程度高。一旦把数据集喂入双向人工智能网络并训练完成后,设计人员即使修改几何参数也不必重新建模而能使用训练好的正向网络快速地根据器件的几何参数预测响应结果;一般用户即使没有相关设计经验难以写出逆向问题的解析式也能使用训练好的逆向网络快速地按照需求的结果检索器件的几何参数。First, the design part of the present invention uses electrical simulation or finite element simulation to obtain a large data set of one-to-one correspondence between the geometric parameters of the device and the response results, and the data is sufficient and accurate. Once the data set is fed into the bidirectional AI network and the training is completed, the designer can use the trained forward network to quickly predict the response result based on the geometric parameters of the device without remodeling even if the geometric parameters are modified; It is difficult to write the analytical formula of the inverse problem with relevant design experience, and the trained inverse network can be used to quickly retrieve the geometric parameters of the device according to the required results.
第二,本发明的制造部分使用分布式一体化三维打印方法,同时打印器件的机械结构、导电电极、悬浮支撑,不仅比传统的减材制造节省材料,而且在制造过程中不需要任何对准和装配过程,此外还能制造传统微电子工艺难以实现的复杂几何结构。Second, the manufacturing part of the present invention uses a distributed integrated three-dimensional printing method, and simultaneously prints the mechanical structure, conductive electrodes, and suspension supports of the device, which not only saves materials compared to traditional subtractive manufacturing, but also does not require any alignment during the manufacturing process. and assembly processes, in addition to the ability to fabricate complex geometries that are difficult to achieve with conventional microelectronics processes.
第三,联合使用本发明的人工智能设计方法和分布式制造方法,一般用户即使没有相关器件的专业知识和动手制造能力,只需要把个性化需求结果输入到训练好的逆向网络就可以快速地检索到相应的几何参数并构建出三维模型,并由分布式多喷头三维打印机一体化制造成型,降低了设计和制造的难度和周期,实现了个性化和智能化制造。Third, using the artificial intelligence design method and distributed manufacturing method of the present invention in combination, even if the general user does not have the professional knowledge and hands-on manufacturing ability of the relevant device, he only needs to input the personalized demand result into the trained reverse network to quickly Corresponding geometric parameters are retrieved and a 3D model is constructed, which is integrally manufactured by a distributed multi-nozzle 3D printer, which reduces the difficulty and cycle of design and manufacturing, and realizes personalized and intelligent manufacturing.
附图说明Description of drawings
图1为本发明中人工智能设计方法和分布式制造方法原理图;1 is a schematic diagram of an artificial intelligence design method and a distributed manufacturing method in the present invention;
图2(a)~(c)为本发明中加速度计的结构示意图,其中(a)为三维结构图,(b)为梁-质量块结构的俯视图,(c)为剖面图;2(a)-(c) are schematic diagrams of the structure of the accelerometer in the present invention, wherein (a) is a three-dimensional structural diagram, (b) is a top view of the beam-mass block structure, and (c) is a cross-sectional view;
图3(a)~(b)为本发明双向人工智能网络示意图,其中(a)为正向预测网络,(b)为逆向检索网络;3(a)~(b) are schematic diagrams of the bidirectional artificial intelligence network of the present invention, wherein (a) is a forward prediction network, and (b) is a reverse retrieval network;
图4(a)~(1)为本发明一体化三维打印流程示意图;4(a)-(1) are schematic diagrams of the integrated three-dimensional printing process of the present invention;
图5为本发明加速度计实物照片;Fig. 5 is the real photo of the accelerometer of the present invention;
图6为本发明加速度计电路系统在重力场中翻转测试的输出电压曲线;FIG. 6 is the output voltage curve of the accelerometer circuit system of the present invention flipping test in the gravitational field;
图7为本发明加速度计电路系统的动态响应曲线。FIG. 7 is a dynamic response curve of the accelerometer circuit system of the present invention.
具体实施方式Detailed ways
为使本发明的上述目的,特征和优点能够更加明显易懂,下面结合附图及具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.
图1为本发明的人工智能设计方法和分布式制造方法原理图。所述人工智能设计部分是首先使用云平台管理的具有强大运算能力的计算机对电子器件模型进行电学仿真或有限元仿真得到器件的几何参数与响应结果之间一一对应的大数据集。再把大数据集分别喂入双向人工智能网络进行训练,训练完成后把数据和网络参数保存在云计算平台。使用时,用户可以在用户端把几何参数输入正向网络快速得到器件的响应结果;用户可以在用户端把想要实现的结果输入逆向网络快速得到器件的几何参数。所述的分布式制造部分是用户在用户端把所需结果输入逆向网络检索得到器件的几何参数并构建成三维模型,然后使用由云计算平台控制管理的分布式三维打印机一体化制造。数据传输可以采用高速通信方式(如5G)以提升效率降低延迟。FIG. 1 is a schematic diagram of an artificial intelligence design method and a distributed manufacturing method of the present invention. The artificial intelligence design part is to first use a computer with powerful computing power managed by the cloud platform to perform electrical simulation or finite element simulation on the electronic device model to obtain a large data set of one-to-one correspondence between the geometric parameters of the device and the response results. Then, the large data sets are fed into the two-way artificial intelligence network for training. After the training is completed, the data and network parameters are saved in the cloud computing platform. When in use, the user can input the geometric parameters into the forward network at the user end to quickly get the response result of the device; the user can input the desired result into the reverse network at the user end to quickly obtain the geometric parameters of the device. The distributed manufacturing part is that the user inputs the required results into the reverse network at the user terminal to retrieve the geometric parameters of the device and builds a three-dimensional model, and then uses the distributed three-dimensional printer controlled and managed by the cloud computing platform to integrate manufacturing. Data transmission can use high-speed communication methods (such as 5G) to improve efficiency and reduce latency.
图2为本发明中加速度计的结构示意图。将本发明所述的人工智能设计方法和分布式制造方法应用于所述加速度计的制造,图2(a)所示为所述加速计的三维结构图。所述加速度计为“三明治”结构的差分电容式工作原理,即上下两个可变平行板电容器构成差分电容,其中下电容器由下平板1、下平板电极2、下电容间隙3、梁-质量块下电极5、梁-质量块6组成,下支撑4为制造下电容器时的临时结构,整个器件制造完成后去除。上电容器由上平板11、上平板电极10、上电容间隙8、梁-质量块上电极7、梁-质量块6组成,上支撑9为制造上电容器时的临时结构,整个器件制造完成后去除。为了实现上述功能,可以采用绝缘材料如聚乳酸(PLA)制造电容器的下平板1、上平板11、下间隙3、上间隙8、梁-质量块6;可以采用导电材料如掺有炭黑、石墨烯、碳纳米管等的PLA制造下平板电极2、上平板电极10、梁-质量块下电极5、梁-质量块上电极7;可以采用可溶性高抗冲聚苯乙烯(HIPS)或聚乙烯醇(PVA)等制造下支撑4、上支撑9。FIG. 2 is a schematic structural diagram of an accelerometer in the present invention. The artificial intelligence design method and distributed manufacturing method of the present invention are applied to the manufacture of the accelerometer, and FIG. 2( a ) shows a three-dimensional structure diagram of the accelerometer. The accelerometer is based on the differential capacitive working principle of the "sandwich" structure, that is, the upper and lower variable parallel plate capacitors form a differential capacitor, wherein the lower capacitor consists of the
图2(b)所示为梁-质量块结构5、6、7的俯视图。质量块12被四根对称分布的梁弹簧13悬挂组成所述加速度计的梁-质量块结构,每一个梁弹簧由三段L型梁组成,每根梁都具有相同的长度和宽度。质量块和所有的弹簧梁的厚度相同。FIG. 2( b ) shows a top view of the beam-
图2(c)所示为所述加速度计的剖面图。为了简化模型,优选所述加速度计的侧壁14厚度和板厚15为固定的2000μm。Figure 2(c) shows a cross-sectional view of the accelerometer. In order to simplify the model, the thickness of the
图3为本发明双向人工智能网络示意图。所述加速度计的几何参数有弹簧梁长(BL)、弹簧梁宽(BW)、弹簧梁-质量块厚(MT)、质量块边长(MW)、质量块与侧边框的间距(SD)、平板电容间隙(CD);所述加速度计的结果有电容差(DC)、一阶振动频率(F)、初始电容(C0)、极板位移(x)、总体宽度(OW)、总体高度(OH)。优选弹簧梁长(BL)的范围7000~19000μm,优选弹簧梁宽(BW)的范围740~900μm、优选弹簧梁-质量块厚(MT)的范围1000~3000μm、优选质量块边长(MW)的范围10000~22000μm、优选质量块与侧边框的间距(SD)的范围5400~7000μm、优选平板电容间隙(CD)的范围700~900μm。优选11875组几何参数组合,施加10m/s2的加速度载荷,进行有限元仿真得到与之一一对应的结果。把所述几何参数和对应结果归一化后组成的数据集喂入图3所述的双向人工智能网络进行训练和测试。图3(a)所示为正向预测网络,即由几何参数预测结果。图3(b)所示为逆向检索网络,即由结果检索几何参数。优选双向网络的参数,得到训练后的正向网络的均方误差为4.4×10-7,训练后的逆向网络的均方误差为3.1×10-5。FIG. 3 is a schematic diagram of a bidirectional artificial intelligence network according to the present invention. The geometric parameters of the accelerometer include the length of the spring beam (BL), the width of the spring beam (BW), the thickness of the spring beam-mass block (MT), the side length of the mass block (MW), and the distance between the mass block and the side frame (SD) , plate capacitance gap (CD); the results of the accelerometer are capacitance difference (DC), first-order vibration frequency (F), initial capacitance (C 0 ), plate displacement (x), overall width (OW), overall Height (OH). The preferred spring beam length (BL) is in the range of 7000-19000 μm, the preferred spring beam width (BW) is in the range of 740-900 μm, the preferred spring beam-mass thickness (MT) is in the range of 1000-3000 μm, and the preferred mass side length (MW) The range of 10000-22000 μm, the preferred range of the distance (SD) between the mass block and the side frame is 5400-7000 μm, and the preferred range of the plate capacitance gap (CD) is 700-900 μm. The combination of 11875 sets of geometric parameters is preferred, the acceleration load of 10m/s 2 is applied, and the finite element simulation is carried out to obtain the corresponding results. The data set composed of the normalized geometric parameters and corresponding results is fed into the bidirectional artificial intelligence network described in Figure 3 for training and testing. Figure 3(a) shows the forward prediction network, which predicts the results by geometric parameters. Figure 3(b) shows the reverse retrieval network, that is, the geometric parameters are retrieved from the results. By optimizing the parameters of the bidirectional network, the mean square error of the forward network after training is 4.4×10 -7 , and the mean square error of the reverse network after training is 3.1×10 -5 .
优选用户使用逆向网络示例,用户需要重力场中的加速度计结果为电容差(DC)为0.05pF、一阶振动频率(F)为220Hz、初始电容(C0)为0.05pF、质量块位移5.4μm、总体宽度(OW)为38mm、总体高度(OH)为7.9mm,把所述结果值输入所述训练好的逆向网络可以快速得到几何参数为弹簧梁长(BL)为17600μm、弹簧梁宽(BW)为800μm、弹簧梁-质量块厚(MT)为2100μm、质量块边长(MW)为21000μm、质量块与侧边框的间距(SD)为6500μm、平板电容间隙(CD)为900μm。根据检索得到的几何参数构建器件的三维数字模型,并输入所述分布式多喷头三维打印机一体化制造。It is preferable for the user to use the inverse network example. The user needs the accelerometer in the gravitational field to have a capacitance difference (DC) of 0.05pF, a first-order vibration frequency (F) of 220Hz, an initial capacitance (C 0 ) of 0.05pF, and a mass displacement of 5.4 μm, the overall width (OW) is 38mm, and the overall height (OH) is 7.9mm. Inputting the result value into the trained inverse network can quickly obtain the geometric parameters as the spring beam length (BL) is 17600μm, the spring beam width is 17600μm (BW) is 800 μm, the spring beam-mass thickness (MT) is 2100 μm, the mass side length (MW) is 21000 μm, the distance (SD) between the mass and the side frame is 6500 μm, and the plate capacitance gap (CD) is 900 μm. A three-dimensional digital model of the device is constructed according to the retrieved geometric parameters, and input to the distributed multi-nozzle three-dimensional printer for integrated manufacturing.
图4为本发明一体化三维打印流程示意图。图4(a)为打印所述加速度计的下平板1,优选材料PLA,优选打印温度为190℃,优选打印速度为40mm/s。FIG. 4 is a schematic diagram of the integrated three-dimensional printing process of the present invention. Figure 4(a) shows the
图4(b)为打印所述加速度计的下平板电极2,优选掺有石墨烯的导电PLA,优选打印温度为240℃,优选打印速度为40mm/s。Figure 4(b) shows the
图4(c)为打印所述加速度计的下电容间隙3,优选材料PLA,优选打印温度为190℃,优选打印速度为40mm/s。Figure 4(c) shows the
图4(d)为打印所述加速度计的下支撑4,优选可溶性材料HIPS,优选打印温度为230℃,优选打印速度为40mm/s。Figure 4(d) shows the
图4(e)为打印所述加速度计的梁-质量块下电极5,优选掺有石墨烯的导电PLA,优选打印温度为240℃,优选打印速度为40mm/s。Figure 4(e) shows the
图4(f)为打印所述加速度计的梁-质量块6,优选材料PLA,优选打印温度为190℃,优选打印速度为40mm/s。Figure 4(f) shows the beam-mass block 6 for printing the accelerometer, preferably the material PLA, the preferred printing temperature is 190°C, and the preferred printing speed is 40 mm/s.
图4(g)为打印所述加速度计的梁-质量块上电极7,优选掺有石墨烯的导电PLA,优选打印温度为240℃,优选打印速度为40mm/s。Figure 4(g) shows the
图4(h)为打印所述加速度计的上电容间隙8,优选材料PLA,优选打印温度为190℃,优选打印速度为40mm/s。Figure 4(h) shows the
图4(i)为打印所述加速度计的上支撑9,优选可溶性材料HIPS,优选打印温度为230℃,优选打印速度为40mm/s。Figure 4(i) shows the
图4(j)为打印所述加速度计的上平板电极10,优选掺有石墨烯的导电PLA,优选打印温度为240℃,优选打印速度为40mm/s。FIG. 4(j) shows the
图4(k)为打印所述加速度计的上平板11,优选材料PLA,优选打印温度为190℃,优选打印速度为40mm/s。Figure 4(k) shows the
图4(1)为选择性溶解所述下支撑4和上支撑9的HIPS后得到所述加速度计,优选溶解液为D-柠檬烯。Figure 4(1) shows the accelerometer obtained by selectively dissolving the HIPS of the
图5为本发明加速度计实物照片,实现了所述用户个性化定制的需求。FIG. 5 is a real photo of the accelerometer of the present invention, which realizes the requirement of the user's personalized customization.
图6为本发明加速度计电路系统在重力场中翻转测试的输出电压曲线。把所述差分电容式加速度计接入优选电容放大读出电路MS3110,把加速度作用下的微小的电容变化转化、放大成电压信号,并在重力场中用分度头翻转测试正负一个重力加速度载荷下的所述加速度计电路系统的输出电压。得到加速度计系统具有较低的非线性误差4.3%和灵敏度75mV/g。FIG. 6 is an output voltage curve of the accelerometer circuit system of the present invention in a flip test in a gravitational field. Connect the differential capacitive accelerometer to the optimal capacitance amplifying readout circuit MS3110, convert and amplify the tiny capacitance change under the action of acceleration into a voltage signal, and use the indexing head to flip in the gravitational field to test positive and negative gravitational acceleration The output voltage of the accelerometer circuitry under load. The obtained accelerometer system has a low nonlinear error of 4.3% and a sensitivity of 75mV/g.
图7为本发明加速度计电路系统的动态响应曲线。优选一位成年人穿戴所述加速度计电路系统并进行跑步以测试动态性能。图7所示为两秒内的输出电压变化的实时记录。所述动态响应曲线有6个明显的波峰表明所述成年人在过去的两秒钟内跑了6步。证明所述的加速度计具有良好的动态性能。FIG. 7 is a dynamic response curve of the accelerometer circuit system of the present invention. Preferably an adult wears the accelerometer circuitry and runs to test dynamic performance. Figure 7 shows a real-time recording of the output voltage change over two seconds. The dynamic response curve has 6 distinct peaks indicating that the adult has run 6 steps in the past two seconds. It is proved that the described accelerometer has good dynamic performance.
以上对本发明所提供的一种基于人工智能设计和分布式制造的加速度计进行了详细介绍,本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的一般技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本发明的限制。An accelerometer based on artificial intelligence design and distributed manufacturing provided by the present invention has been introduced in detail above. Specific examples are used in this paper to illustrate the principles and implementations of the present invention. The descriptions of the above embodiments are only used for Help to understand the method of the present invention and its core idea; at the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation and application scope. In summary, the content of this specification It should not be construed as a limitation of the present invention.
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