CN111969114B - Display panel, method for manufacturing display panel, and mask plate - Google Patents
Display panel, method for manufacturing display panel, and mask plate Download PDFInfo
- Publication number
- CN111969114B CN111969114B CN201910418662.3A CN201910418662A CN111969114B CN 111969114 B CN111969114 B CN 111969114B CN 201910418662 A CN201910418662 A CN 201910418662A CN 111969114 B CN111969114 B CN 111969114B
- Authority
- CN
- China
- Prior art keywords
- light
- emitting layer
- emitting
- emitting layers
- corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000000034 method Methods 0.000 title description 18
- 239000000463 material Substances 0.000 claims description 27
- 238000001704 evaporation Methods 0.000 claims description 20
- 238000000059 patterning Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 16
- 239000011800 void material Substances 0.000 description 12
- 238000005530 etching Methods 0.000 description 11
- 230000008020 evaporation Effects 0.000 description 7
- 238000002161 passivation Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 101710167800 Capsid assembly scaffolding protein Proteins 0.000 description 3
- 101710086578 Chaperone protein gp12 Proteins 0.000 description 3
- 101700012268 Holin Proteins 0.000 description 3
- 101710102575 Pre-neck appendage protein Proteins 0.000 description 3
- 101710159453 Proximal tail tube connector protein Proteins 0.000 description 3
- 101710199973 Tail tube protein Proteins 0.000 description 3
- 101800000385 Transmembrane protein Proteins 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/352—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels the areas of the RGB subpixels being different
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/353—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
一种显示面板,包括:多个第一发光层、多个第二发光层、多个第三发光层、以及像素界定层,包括:由相应第一发光层覆盖的多个第一开口、由相应第二发光层覆盖的多个第二开口、以及由相应第三发光层覆盖的多个第三开口。各第一、第二发光层在第一方向和与第一方向交叉的第二方向上交替排列,并且各第三发光层散布在各第一发光层和各第二发光层之间。各第一、第二发光层中的每一个均包括在所述第一方向上彼此相对的两个角部和在所述第二方向上彼此相对的两个角部,每个角部具有被倒角的边缘以使得各第一、第二发光层彼此不交叠。
A display panel, comprising: a plurality of first light-emitting layers, a plurality of second light-emitting layers, a plurality of third light-emitting layers, and a pixel defining layer, comprising: a plurality of first openings covered by the corresponding first light-emitting layers; A plurality of second openings covered by respective second light emitting layers, and a plurality of third openings covered by respective third light emitting layers. The first and second light-emitting layers are alternately arranged in the first direction and the second direction crossing the first direction, and the third light-emitting layers are interspersed between the first light-emitting layers and the second light-emitting layers. Each of the first and second light-emitting layers includes two corners facing each other in the first direction and two corners facing each other in the second direction, each corner having a The edges are chamfered so that the first and second light emitting layers do not overlap each other.
Description
技术领域technical field
本发明涉及显示技术领域,具体来说涉及一种显示面板、一种制造显示面板的方法以及一组用于制造显示面板的掩模板。The present invention relates to the field of display technology, and in particular, to a display panel, a method for manufacturing the display panel, and a set of mask plates for manufacturing the display panel.
背景技术Background technique
有机发光材料的蒸镀是有机发光二极管(OLED)显示面板的制造工艺中的关键一环。蒸镀过程中,采用带有穿孔的超精细金属掩模板(FMM)来获得高分辨率的子像素图案。随着像素密度变得越来越高,保证OLED显示面板的良率成为挑战。Evaporation of organic light-emitting materials is a key part of the manufacturing process of organic light-emitting diode (OLED) display panels. During the evaporation process, an ultra-fine metal mask (FMM) with perforations is used to obtain high-resolution sub-pixel patterns. As pixel density becomes higher and higher, ensuring the yield of OLED display panels becomes a challenge.
发明内容SUMMARY OF THE INVENTION
获得一种可以缓解、减轻或甚至消除上述问题中的一个或多个的解决方案将是有利的。It would be advantageous to have a solution that alleviates, alleviates or even eliminates one or more of the above problems.
根据本发明的第一方面,提供了一种显示面板,包括:多个第一发光层,被配置成在被激发时发射第一颜色的光;多个第二发光层,被配置成在被激发时发射第二颜色的光;多个第三发光层,被配置成在被激发时发射第三颜色的光;以及像素界定层,包括:由相应第一发光层覆盖的多个第一开口,所述多个第一开口与相应第一发光层的相应区重叠以限定所述多个第一发光层各自的第一发光区;由相应第二发光层覆盖的多个第二开口,所述多个第二开口与相应第二发光层的相应区重叠以限定所述多个第二发光层各自的第二发光区;以及由相应第三发光层覆盖的多个第三开口,所述多个第三开口与相应第三发光层的相应区重叠以限定所述多个第三发光层各自的第三发光区。各第一、第二发光层在第一方向和与第一方向交叉的第二方向上交替排列,并且各第三发光层散布在各第一发光层和各第二发光层之间。各第一、第二发光层中的每一个均包括在所述第一方向上彼此相对的两个角部和在所述第二方向上彼此相对的两个角部,每个角部具有被倒角的边缘以使得各第一、第二发光层彼此不交叠。According to a first aspect of the present invention, there is provided a display panel comprising: a plurality of first light-emitting layers configured to emit light of a first color when excited; and a plurality of second light-emitting layers configured to emit light of a first color when excited a plurality of third light emitting layers configured to emit light of a third color when excited; and a pixel defining layer comprising: a plurality of first openings covered by respective first light emitting layers , the plurality of first openings overlap with the corresponding regions of the corresponding first light-emitting layers to define the respective first light-emitting regions of the plurality of first light-emitting layers; the plurality of second openings covered by the corresponding second light-emitting layers, so the plurality of second openings overlap with corresponding regions of the corresponding second light emitting layers to define respective second light emitting regions of the plurality of second light emitting layers; and the plurality of third openings covered by the corresponding third light emitting layers, the The plurality of third openings overlap with corresponding regions of the corresponding third light emitting layers to define respective third light emitting regions of the plurality of third light emitting layers. The first and second light-emitting layers are alternately arranged in the first direction and the second direction crossing the first direction, and the third light-emitting layers are interspersed between the first light-emitting layers and the second light-emitting layers. Each of the first and second light-emitting layers includes two corners facing each other in the first direction and two corners facing each other in the second direction, each corner having a The edges are chamfered so that the first and second light emitting layers do not overlap each other.
在一些实施例中,每个第一发光层的所述两个第一角部中的一个第一角部与对应的第二发光层的所述两个第一角部中的一个第一角部直接相邻,所述对应的第二发光层在所述第一方向上与该第一发光层直接相邻。该第一发光层的所述一个第一角部与所述对应的第二发光层的所述一个第一角部之间的距离为该第一发光层与所述对应的第二发光层之间的最小距离。In some embodiments, one of the two first corners of each first light-emitting layer and one of the two first corners of the corresponding second light-emitting layer The corresponding second light-emitting layer is directly adjacent to the first light-emitting layer in the first direction. The distance between the one first corner of the first light-emitting layer and the one first corner of the corresponding second light-emitting layer is the distance between the first light-emitting layer and the corresponding second light-emitting layer minimum distance between.
在一些实施例中,形成该第一发光层的所述一个第一角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第一虚拟角部。形成所述对应的第二发光层的所述一个第一角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第二虚拟角部。所述第一虚拟角部与所述第二虚拟角部部分地交叠。In some embodiments, the two sides forming the one first corner portion of the first light emitting layer include respective linear portions, and respective imaginary extension lines of the linear portions intersect to form a first imaginary corner portion. The two sides of the one first corner portion forming the corresponding second light emitting layer include respective straight line portions, and respective imaginary extension lines of the straight line portions intersect to form a second imaginary corner portion. The first virtual corner partially overlaps the second virtual corner.
在一些实施例中,每个第一发光层的所述两个第二角部中的一个第二角部与对应的第二发光层的所述两个第二角部中的一个第二角部直接相邻,所述对应的第二发光层在所述第二方向上与该第一发光层直接相邻。该第一发光层的所述一个第二角部与所述对应的第二发光层的所述一个第二角部之间的距离为该第一发光层与所述对应的第二发光层之间的最小距离。In some embodiments, one of the two second corners of each first light-emitting layer and one of the two second corners of the corresponding second light-emitting layer The corresponding second light-emitting layer is directly adjacent to the first light-emitting layer in the second direction. The distance between the one second corner of the first light-emitting layer and the one second corner of the corresponding second light-emitting layer is the distance between the first light-emitting layer and the corresponding second light-emitting layer minimum distance between.
在一些实施例中,形成该第一发光层的所述一个第二角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第三虚拟角部。形成所述对应的第二发光层的所述一个第二角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第四虚拟角部。所述第三虚拟角部与所述第四虚拟角部部分地交叠。In some embodiments, the two sides forming the one second corner portion of the first light emitting layer include respective straight portions, and respective imaginary extension lines of the straight portions intersect to form a third imaginary corner portion. The two sides forming the one second corner portion of the corresponding second light emitting layer include respective linear portions, and respective imaginary extension lines of the linear portions intersect to form a fourth imaginary corner portion. The third virtual corner partially overlaps the fourth virtual corner.
在一些实施例中,每个第一发光层的每个角部的所述边缘上的任意点到相应第一发光区的距离大于或等于偏移容差值。每个第二发光层的每个角部的所述边缘上的任意点到相应第二发光区的距离大于或等于所述偏移容差值。In some embodiments, the distance from any point on the edge of each corner of each first light-emitting layer to the corresponding first light-emitting region is greater than or equal to the offset tolerance value. The distance from any point on the edge of each corner of each second light-emitting layer to the corresponding second light-emitting region is greater than or equal to the offset tolerance value.
在一些实施例中,每个第一发光层的第一和第二角部被倒平切角或以第一半径被倒圆角。所述第一半径大于或等于10 um。In some embodiments, the first and second corners of each first light emitting layer are chamfered or rounded with a first radius. The first radius is greater than or equal to 10 um.
在一些实施例中,每个第二发光层的第一和第二角部被倒平切角或以第二半径被倒圆角。所述第二半径大于或等于10 um。In some embodiments, the first and second corners of each second light emitting layer are chamfered or rounded with a second radius. The second radius is greater than or equal to 10 um.
在一些实施例中,每个第三发光层具有圆角多边形的形状。每个第三发光区具有与相应第三发光层的形状适形的形状,使得相应第三发光层的边缘上的任意点到该第三发光区的边界的最小距离基本上等于所述偏移容差值。In some embodiments, each of the third light emitting layers has the shape of a rounded polygon. Each third light-emitting region has a shape conforming to the shape of the corresponding third light-emitting layer such that the minimum distance from any point on the edge of the corresponding third light-emitting layer to the boundary of the third light-emitting region is substantially equal to the offset tolerance value.
在一些实施例中,各第一、第二和第三发光层被布置成形成在第一和第二方向上重复排列的多个重复单元,每个重复单元包括两个第一发光层、两个第二发光层和四个第三发光层。两个第一发光层被分别布置在第i行和第j+2列以及第i+2行和第j列,两个第二发光层被分别布置在第i行和第j列以及第i+2行和第j+2列,并且四个第三发光层被分别布置在第i+1行和第j+1列、第i+1行和第j+3列、第i+3行和第j+1列、以及第i+3行和第j+3列,其中i和j为自然数。In some embodiments, each of the first, second, and third light-emitting layers is arranged to form a plurality of repeating units that are repeatedly arranged in the first and second directions, each repeating unit comprising two first light-emitting layers, two two second light-emitting layers and four third light-emitting layers. The two first light-emitting layers are arranged at the i-th row and the j+2-th column and the i+2-th row and the j-th column, respectively, and the two second light-emitting layers are arranged at the i-th row and the j-th column and the i-th row, respectively. +2 row and j+2th column, and four third light emitting layers are arranged at i+1th row and j+1th column, i+1th row and j+3th column, i+3th row, respectively and column j+1, and row i+3 and column j+3, where i and j are natural numbers.
在一些实施例中,所述第一方向基本上垂直于所述第二方向。每个第一发光层具有通过对第一正方形的四个角部中的每一角部进行倒角而得到的形状,所述第一正方形的第一和第二对角线分别平行于第一和第二方向。每个第二发光层具有通过对第二正方形的四个角部中的每一角部进行倒角而得到的形状,所述第二正方形的第一和第二对角线分别平行于第一和第二方向。每个第三发光层具有通过对长方形的四个角部中的每一角部进行倒圆角而得到的形状,该长方形的一长边与该第三发光层所直接相邻的一对应第一发光层的一侧边相对并且基本上平行于该对应第一发光层的该侧边,并且该长方形的一短边与该第三发光层所直接相邻的一对应第二发光层的一侧边相对并且基本上平行于该对应第二发光层的该侧边。In some embodiments, the first direction is substantially perpendicular to the second direction. Each of the first light-emitting layers has a shape obtained by chamfering each of four corners of a first square whose first and second diagonals are parallel to the first and second direction. Each of the second light-emitting layers has a shape obtained by chamfering each of four corners of a second square whose first and second diagonals are parallel to the first and second direction. Each third light-emitting layer has a shape obtained by rounding each of the four corners of a rectangle, one long side of the rectangle being directly adjacent to a corresponding first light-emitting layer One side of the light-emitting layer is opposite and substantially parallel to the side of the corresponding first light-emitting layer, and a short side of the rectangle is directly adjacent to the third light-emitting layer. One side of the corresponding second light-emitting layer The side is opposite and substantially parallel to the side of the corresponding second light-emitting layer.
在一些实施例中,每个第一发光层的几何中心和与该第一发光层在所述第一方向上直接相邻的对应第二发光层的几何中心位于平行于所述第一方向的直线上。每个第一发光层的几何中心和与该第一发光层在所述第二方向上直接相邻的对应第二发光层的几何中心位于平行于所述第二方向的直线上。In some embodiments, the geometric center of each first light-emitting layer and the geometric center of the corresponding second light-emitting layer directly adjacent to the first light-emitting layer in the first direction are located parallel to the first direction in a straight line. The geometric center of each first light-emitting layer and the geometric center of the corresponding second light-emitting layer directly adjacent to the first light-emitting layer in the second direction are located on a line parallel to the second direction.
根据本公开的另一方面,提供了一种制造显示面板的方法,包括:图案化第一导电层以形成多个第一电极,其中所述第一电极在第一方向和与第一方向交叉的第二方向上呈阵列布置;在图案化的第一导电层上形成像素界定层;图案化像素界定层以形成分别暴露所述多个第一电极的多个开口,其中每个开口暴露相应第一电极的至少一部分,所述多个第一电极中的第一多个第一电极分别由所述多个开口中的第一多个开口暴露,所述多个第一电极中的第二多个第一电极分别由所述多个开口中的第二多个开口暴露,并且所述多个第一电极中的第三多个第一电极分别由所述多个开口中的第三多个开口暴露;形成分别覆盖所述第一多个开口的多个第一发光层、分别覆盖所述第二多个开口的多个第二发光层、以及分别覆盖所述第三多个开口的多个第三发光层;以及在各第一、第二和第三发光层上形成第二导电层。各第一、第二发光层在所述第一方向和所述第二方向上交替排列,并且各第三发光层散布在各第一发光层和各第二发光层之间。各第一、第二发光层中的每一个均包括在所述第一方向上彼此相对的两个第一角部和在所述第二方向上彼此相对的两个第二角部,第一、第二角部中的每个角部具有被倒角的边缘以使得各第一、第二发光层彼此不交叠。According to another aspect of the present disclosure, there is provided a method of manufacturing a display panel, comprising: patterning a first conductive layer to form a plurality of first electrodes, wherein the first electrodes are in a first direction and cross the first direction are arranged in an array in the second direction of at least a portion of a first electrode, a first plurality of first electrodes of the plurality of first electrodes are respectively exposed by a first plurality of openings of the plurality of openings, a second plurality of the plurality of first electrodes A plurality of first electrodes are respectively exposed by a second plurality of openings of the plurality of openings, and a third plurality of first electrodes of the plurality of first electrodes are respectively exposed by a third plurality of the plurality of openings. openings are exposed; forming a plurality of first light emitting layers covering the first plurality of openings respectively, a plurality of second light emitting layers covering the second plurality of openings respectively, and forming a plurality of second light emitting layers covering the third plurality of openings respectively a plurality of third light emitting layers; and forming a second conductive layer on each of the first, second and third light emitting layers. The first and second light-emitting layers are alternately arranged in the first direction and the second direction, and the third light-emitting layers are interspersed between the first light-emitting layers and the second light-emitting layers. Each of the first and second light emitting layers includes two first corners facing each other in the first direction and two second corners facing each other in the second direction, the first and each of the second corners has a chamfered edge so that the respective first and second light emitting layers do not overlap each other.
根据本公开的又另一方面,提供了用于在显示面板的制造过程中蒸镀有机发光材料的一组掩模板,包括:第一掩模板,被图案化为包括第一穿孔的阵列,每个第一穿孔包括在第一方向上彼此相对的两个被倒角的角部和在与第一方向交叉的第二方向上彼此相对的两个被倒角的角部;以及第二掩模板,被图案化为包括第二穿孔的阵列,每个第二穿孔包括在所述第一方向上彼此相对的两个被倒角的角部和在所述第二方向上彼此相对的两个被倒角的角部。各第一、第二穿孔在第一、第二掩模板中被分别定位以使得当第一、第二掩模板层叠且彼此对齐时,第一、第二穿孔在所述第一方向和所述第二方向上交替排列且彼此不交叠。According to yet another aspect of the present disclosure, there is provided a set of masks for evaporating organic light-emitting materials in a manufacturing process of a display panel, comprising: a first mask patterned to include an array of first through holes, each the first through holes include two chamfered corners facing each other in a first direction and two chamfered corners facing each other in a second direction crossing the first direction; and a second mask , is patterned to include an array of second perforations, each second perforation including two chamfered corners facing each other in the first direction and two chamfered corners facing each other in the second direction Chamfered corners. Each of the first and second through holes is positioned in the first and second masks, respectively, such that when the first and second masks are stacked and aligned with each other, the first and second through holes are in the first direction and the They are alternately arranged in the second direction and do not overlap each other.
在一些实施例中,每个第一穿孔的各个角部被倒平切角或以第一半径被倒圆角。所述第一半径大于或等于10 um。In some embodiments, respective corners of each first perforation are chamfered or rounded with a first radius. The first radius is greater than or equal to 10 um.
在一些实施例中,每个第二穿孔的各个角部被倒平切角或以第二半径被倒圆角。所述第二半径大于或等于10 um。In some embodiments, respective corners of each second perforation are chamfered or rounded with a second radius. The second radius is greater than or equal to 10 um.
在一些实施例中,各第一、第二穿孔在第一、第二掩模板中被分别定位以使得当第一、第二掩模板层叠且彼此对齐时,每个第一穿孔的几何中心和与该第一穿孔在所述第一方向上直接相邻的对应第二穿孔的几何中心位于平行于所述第一方向的直线上,并且每个第一穿孔的几何中心和与该第一穿孔在所述第二方向上直接相邻的对应第二穿孔的几何中心位于平行于所述第二方向的直线上。In some embodiments, each of the first and second through-holes is positioned in the first and second masks, respectively, such that when the first and second masks are stacked and aligned with each other, the geometric center of each first through-hole and the The geometric center of the corresponding second perforation directly adjacent to the first perforation in the first direction is located on a line parallel to the first direction, and the geometric center of each first perforation is the same as the first perforation. The geometric centers of the directly adjacent corresponding second through holes in the second direction are located on a line parallel to the second direction.
在一些实施例中,所述第一掩模板包括在各第一穿孔之间的未穿孔区域,其中每个未穿孔区域在所述第一方向上沿直线延伸且跨越所述第一掩模板在所述第一方向上的整个尺寸。In some embodiments, the first mask includes non-perforated regions between each of the first perforations, wherein each non-perforated region extends linearly in the first direction and spans the first mask at the entire dimension in the first direction.
在一些实施例中,所述第二掩模板包括在各第二穿孔之间的未穿孔区域,其中每个未穿孔区域在所述第一方向上沿直线延伸且跨越所述第二掩模板在所述第一方向上的整个尺寸。In some embodiments, the second mask includes non-perforated regions between each of the second perforations, wherein each non-perforated region extends linearly in the first direction and spans the second mask at the entire dimension in the first direction.
在一些实施例中,所述一组掩模板还包括:第三掩模板,被图案化为包括第三穿孔的阵列。各第三穿孔在第三掩模板中被定位以使得当第一、第二和第三掩模板层叠且彼此对齐时,各第三穿孔散布在各第一穿孔和各第二穿孔之间。每个第三穿孔具有圆角多边形的形状。In some embodiments, the set of masks further includes: a third mask patterned to include an array of third perforations. The third perforations are positioned in the third reticle such that when the first, second and third masks are stacked and aligned with each other, the third perforations are interspersed between the first perforations and the second perforations. Each third perforation has the shape of a rounded polygon.
根据本公开的再另一方面,提供了一种显示面板,包括:多个第一发光层,被配置成在被激发时发射第一颜色的光;多个第二发光层,被配置成在被激发时发射第二颜色的光;以及多个第三发光层,被配置成在被激发时发射第三颜色的光。各第一、第二发光层在第一方向和与第一方向交叉的第二方向上交替排列,并且各第三发光层散布在各第一发光层和各第二发光层之间。各第一、第二发光层中的每一个均包括在所述第一方向上彼此相对的两个第一角部和在所述第二方向上彼此相对的两个第二角部。每个第一发光层的所述两个第二角部被倒角以在各第一发光层之间提供第一空隙区域,并且每个第一空隙区域在所述第一方向上沿直线延伸而不与各个第一发光层交叠,且跨越所述显示面板在所述第一方向上的整个尺寸。每个第二发光层的所述两个第二角部被倒角以在各第二发光层之间提供第二空隙区域,并且每个第二空隙区域在所述第一方向上沿直线延伸而不与各个第二发光层交叠,且跨越所述显示面板在所述第一方向上的整个尺寸。According to yet another aspect of the present disclosure, there is provided a display panel including: a plurality of first light-emitting layers configured to emit light of a first color when excited; and a plurality of second light-emitting layers configured to emit light of a first color when excited when excited to emit light of a second color; and a plurality of third light emitting layers configured to emit light of a third color when excited. The first and second light-emitting layers are alternately arranged in the first direction and the second direction crossing the first direction, and the third light-emitting layers are interspersed between the first light-emitting layers and the second light-emitting layers. Each of the first and second light emitting layers includes two first corners facing each other in the first direction and two second corners facing each other in the second direction. The two second corners of each of the first light-emitting layers are chamfered to provide a first void region between the respective first light-emitting layers, and each first void region extends in a straight line in the first direction without overlapping with each of the first light emitting layers, and spanning the entire size of the display panel in the first direction. The two second corners of each second light emitting layer are chamfered to provide second void regions between the second light emitting layers, and each second void region extends in a straight line in the first direction without overlapping with the respective second light emitting layers, and spanning the entire size of the display panel in the first direction.
在一些实施例中,每个第一发光层的所述两个第一角部被倒角以在各第一发光层之间提供第三空隙区域,并且每个第三空隙区域在所述第二方向上沿直线延伸而不与各个第一发光层交叠,且跨越所述显示面板在所述第二方向上的整个尺寸。每个第二发光层的所述两个第一角部被倒角以在各第二发光层之间提供第四空隙区域,并且每个第四空隙区域在所述第二方向上沿直线延伸而不与各个第二发光层交叠,且跨越所述显示面板在所述第二方向上的整个尺寸。In some embodiments, the two first corners of each first light emitting layer are chamfered to provide third void regions between the respective first light emitting layers, and each third void region is in the first light emitting layer. The two directions extend along a straight line without overlapping each of the first light emitting layers, and span the entire size of the display panel in the second direction. The two first corners of each second light emitting layer are chamfered to provide fourth void regions between the second light emitting layers, and each fourth void region extends linearly in the second direction without overlapping each second light emitting layer, and spanning the entire size of the display panel in the second direction.
在一些实施例中,所述显示面板具有基本上矩形的外形轮廓,所述外形轮廓包括沿所述第一方向延伸的两条第一边和沿所述第二方向延伸的两条第二边。In some embodiments, the display panel has a substantially rectangular profile including two first sides extending in the first direction and two second sides extending in the second direction .
根据在下文中所描述的实施例,本发明的这些和其它方面将是清楚明白的,并且将参考在下文中所描述的实施例而被阐明。These and other aspects of the invention will be apparent from and elucidated with reference to the embodiments described hereinafter.
附图说明Description of drawings
在下面结合附图对于示例性实施例的描述中,本发明的更多细节、特征和优点被公开,在附图中:Further details, features and advantages of the present invention are disclosed in the following description of exemplary embodiments in conjunction with the accompanying drawings, in which:
图1示意性地示出了典型OLED显示面板中的子像素区域的布置的平面图;FIG. 1 is a plan view schematically showing the arrangement of sub-pixel regions in a typical OLED display panel;
图2A示意性地示出了用于蒸镀有机发光材料以形成发光层的图案的典型掩模板的平面图;FIG. 2A schematically shows a plan view of a typical mask used for evaporating organic light-emitting materials to form patterns of light-emitting layers;
图2B示意性地示出了在蒸镀过程中掩模板200相对于母基板MSB的布置关系;FIG. 2B schematically shows the arrangement relationship of the
图3A示意性地示出了根据本发明实施例的显示面板中的五个子像素区域的布置的平面图;3A schematically shows a plan view of the arrangement of five sub-pixel regions in a display panel according to an embodiment of the present invention;
图3B示意性地示出了图3A的子像素区域的布置中的第一和第二子像素区域的平面图;3B schematically shows a plan view of first and second sub-pixel regions in the arrangement of sub-pixel regions of FIG. 3A;
图4示意性地示出了图3A的显示面板中的子像素区域的布置的示例像素电路;FIG. 4 schematically illustrates an example pixel circuit of the arrangement of sub-pixel regions in the display panel of FIG. 3A;
图5示意性地示出了图3A的显示面板的截面图;FIG. 5 schematically shows a cross-sectional view of the display panel of FIG. 3A;
图6示意性地示出了图3A的显示面板中的子像素区域的布置的变型的平面图;FIG. 6 is a plan view schematically showing a modification of the arrangement of sub-pixel regions in the display panel of FIG. 3A;
图7示意性地示出了图3A的显示面板中的子像素区域的布置的另一变型的平面图;7 schematically shows a plan view of another modification of the arrangement of sub-pixel regions in the display panel of FIG. 3A;
图8A示意性地示出了根据本发明实施例的显示面板的多个子像素区域的平面图;8A schematically shows a plan view of a plurality of sub-pixel regions of a display panel according to an embodiment of the present invention;
图8B示意性地示出了图8A的显示面板的外形轮廓;FIG. 8B schematically shows the outline of the display panel of FIG. 8A;
图9示意性地示出了根据本发明实施例的制造显示面板的方法的流程图;FIG. 9 schematically shows a flowchart of a method for manufacturing a display panel according to an embodiment of the present invention;
图10A至10F示意性地示出了在图9的方法的各步骤中得到的显示面板的截面图;Figures 10A to 10F schematically show cross-sectional views of the display panel obtained in the various steps of the method of Figure 9;
图11A和11B示意性地示出了根据本发明实施例的用于在图3A的显示面板的制造过程中蒸镀有机发光材料的第一掩模板和第二掩模板的平面图;11A and 11B schematically illustrate plan views of a first mask plate and a second mask plate for evaporating organic light-emitting materials during the manufacturing process of the display panel of FIG. 3A according to an embodiment of the present invention;
图11C示意性地示出了将图11A和11B中的第一和第二掩模板层叠且彼此对齐的示意图;Figure 11C schematically shows a schematic diagram of stacking and aligning the first and second masks of Figures 11A and 11B with each other;
图12A和12B示意性地示出了根据本发明实施例的用于在图6的显示面板的制造过程中蒸镀有机发光材料的第一掩模板和第二掩模板的平面图;12A and 12B schematically illustrate plan views of a first mask plate and a second mask plate for evaporating organic light-emitting materials during the manufacturing process of the display panel of FIG. 6 according to an embodiment of the present invention;
图12C示意性地示出了将图12A和12B中的第一和第二掩模板层叠且彼此对齐的示意图;并且Figure 12C schematically shows a schematic diagram of stacking and aligning the first and second masks of Figures 12A and 12B with each other; and
图13示意性地示出了根据本发明实施例的用于在图7的显示面板的制造过程中蒸镀有机发光材料的第三掩模板的平面图。FIG. 13 schematically illustrates a plan view of a third mask for evaporating organic light-emitting materials during the manufacturing process of the display panel of FIG. 7 according to an embodiment of the present invention.
具体实施方式Detailed ways
将理解的是,尽管术语第一、第二、第三等等在本文中可以用来描述各种元件、部件、区、层和/或部分,但是这些元件、部件、区、层和/或部分不应当由这些术语限制。这些术语仅用来将一个元件、部件、区、层或部分与另一个区、层或部分相区分。因此,下面讨论的第一元件、部件、区、层或部分可以被称为第二元件、部件、区、层或部分而不偏离本公开的教导。It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or Sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present disclosure.
诸如“行”、“列”、“在…下面”、“在…之下”、“较下”、“在…下方”、“在…之上”、“较上”等等之类的空间相对术语在本文中可以为了便于描述而用来描述如图中所图示的一个元件或特征与另一个(些)元件或特征的关系。将理解的是,这些空间相对术语意图涵盖除了图中描绘的取向之外在使用或操作中的器件的不同取向。例如,如果翻转图中的器件,那么被描述为“在其他元件或特征之下”或“在其他元件或特征下面”或“在其他元件或特征下方”的元件将取向为“在其他元件或特征之上”。因此,示例性术语“在…之下”和“在…下方”可以涵盖在…之上和在…之下的取向两者。诸如“在…之前”或“在…前”和“在…之后”或“接着是”之类的术语可以类似地例如用来指示光穿过元件所依的次序。器件可以取向为其他方式(旋转90度或以其他取向)并且相应地解释本文中使用的空间相对描述符。另外,还将理解的是,当层被称为“在两个层之间”时,其可以是在该两个层之间的唯一的层,或者也可以存在一个或多个中间层。Spaces such as "row", "column", "below", "below", "below", "below", "above", "above", etc. Relative terms may be used herein for convenience of description to describe the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that these spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" or "beneath" other elements or features would then be oriented "under the other elements or features" above the characteristics". Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. Terms such as "before" or "before" and "after" or "followed by" may similarly be used, for example, to indicate the order in which light travels through elements. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly. In addition, it will also be understood that when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.
本文中使用的术语仅出于描述特定实施例的目的并且不意图限制本公开。如本文中使用的,单数形式“一个”、“一”和“该”意图也包括复数形式,除非上下文清楚地另有指示。将进一步理解的是,术语“包括”和/或“包含”当在本说明书中使用时指定所述及特征、整体、步骤、操作、元件和/或部件的存在,但不排除一个或多个其他特征、整体、步骤、操作、元件、部件和/或其群组的存在或添加一个或多个其他特征、整体、步骤、操作、元件、部件和/或其群组。如本文中使用的,术语“和/或”包括相关联的列出项目中的一个或多个的任意和全部组合。The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the present disclosure. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will be further understood that the terms "comprising" and/or "comprising" when used in this specification designate the presence of stated features, integers, steps, operations, elements and/or parts, but do not exclude one or more The presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof, of other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
将理解的是,当元件或层被称为“在另一个元件或层上”、“连接到另一个元件或层”、“耦合到另一个元件或层”或“邻近另一个元件或层”时,其可以直接在另一个元件或层上、直接连接到另一个元件或层、直接耦合到另一个元件或层或者直接邻近另一个元件或层,或者可以存在中间元件或层。相反,当元件被称为“直接在另一个元件或层上”、“直接连接到另一个元件或层”、“直接耦合到另一个元件或层”、“直接邻近另一个元件或层”时,没有中间元件或层存在。然而,在任何情况下“在…上”或“直接在…上”都不应当被解释为要求一个层完全覆盖下面的层。It will be understood that when an element or layer is referred to as being "on," "connected to," "coupled to," or "adjacent to another element or layer" When present, it may be directly on, directly connected to, directly coupled to, or directly adjacent to another element or layer, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly connected to," "directly coupled to," "directly adjacent to" another element or layer , with no intervening elements or layers present. However, in no case should "on" or "directly on" be interpreted as requiring a layer to completely cover the layer below.
本文中参考本公开的理想化实施例的示意性图示(以及中间结构)描述本公开的实施例。正因为如此,应预期例如作为制造技术和/或公差的结果而对于图示形状的变化。因此,本公开的实施例不应当被解释为限于本文中图示的区的特定形状,而应包括例如由于制造导致的形状偏差。因此,图中图示的区本质上是示意性的,并且其形状不意图图示器件的区的实际形状并且不意图限制本公开的范围。Embodiments of the disclosure are described herein with reference to schematic illustrations (and intermediate structures) of idealized embodiments of the disclosure. As such, variations to the shapes of the illustrations are to be expected, eg, as a result of manufacturing techniques and/or tolerances. Accordingly, embodiments of the present disclosure should not be construed as limited to the particular shapes of the regions illustrated herein, but are to include deviations in shapes due, for example, to manufacturing. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the present disclosure.
除非另有定义,本文中使用的所有术语(包括技术术语和科学术语)具有与本公开所属领域的普通技术人员所通常理解的相同含义。将进一步理解的是,诸如那些在通常使用的字典中定义的之类的术语应当被解释为具有与其在相关领域和/或本说明书上下文中的含义相一致的含义,并且将不在理想化或过于正式的意义上进行解释,除非本文中明确地如此定义。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be construed to have meanings consistent with their meanings in the relevant art and/or the context of this specification, and will not be idealized or overly interpreted in a formal sense, unless expressly defined as such herein.
图1示意性地示出了典型OLED显示面板中的子像素区域的布置100的平面图。Figure 1 schematically shows a plan view of an
参考图1,两个第一子像素区域101、两个第二子像素区域102和一个第三子像素区域103被示出。这些子像素区域101、102和103被布置成阵列,并且包括各自的发光层EL1、EL2和EL3、以及由像素界定层(未示出)的相应开口限定的位于它们各自中心区域的各自的发光区EZ1、EZ2和EZ3。发光区EZ1、EZ2和EZ3的轮廓线可以被认为大致与像素界定层的开口的边界相重合。当第一、第二和第三发光层EL1、EL2和EL3被激发时,各自的发光区EZ1、EZ2和EZ3将发射不同颜色的光。Referring to FIG. 1 , two
由于第一和第二发光层EL1和EL2具有水平方向上彼此相对的角部,水平相邻的第一和第二发光层EL1和EL2会彼此部分地交叠。类似地,由于第一和第二发光层EL1和EL2具有垂直方向上彼此相对的角部,垂直相邻的第一和第二发光层EL1和EL2也会彼此部分地交叠,如图1中的虚线椭圆所指示的。这容易导致载流子串扰的问题。例如,当第一发光层EL1需要被点亮且第二发光层EL2需要被熄灭时,第一发光层EL1中的载流子可能漂移到第二发光层EL2,使得第二发光层EL2微微发亮,产生不期望的混色。Since the first and second light emitting layers EL1 and EL2 have corners opposite to each other in the horizontal direction, the horizontally adjacent first and second light emitting layers EL1 and EL2 may partially overlap each other. Similarly, since the first and second light emitting layers EL1 and EL2 have corners opposite to each other in the vertical direction, the vertically adjacent first and second light emitting layers EL1 and EL2 also partially overlap each other, as shown in FIG. 1 indicated by the dashed ellipse. This easily leads to the problem of carrier crosstalk. For example, when the first light-emitting layer EL1 needs to be turned on and the second light-emitting layer EL2 needs to be turned off, the carriers in the first light-emitting layer EL1 may drift to the second light-emitting layer EL2, causing the second light-emitting layer EL2 to emit light slightly bright, resulting in undesired color mixing.
图2A示意性地示出了用于蒸镀有机发光材料以形成发光层的图案的典型掩模板200的平面图。为了图示的方便,掩模板200的仅一个局部区域被示出。FIG. 2A schematically shows a plan view of a
参考图2A,掩模板200被图案化为包括穿孔201的阵列,其中穿孔201的图案可以例如对应于图1中的第一发光层EL1或第二发光层EL2的图案。也即,掩模板200可以用于形成图1中所示的第一发光层EL1或第二发光层EL2。Referring to FIG. 2A , the
为了保证形成的图案的位置精度和尺寸精度,掩模板在使用过程中需要以一定的拉伸力在预定方向上被张紧以便防止掩模板受重力或热影响而变形。拉伸力被施加的预定方向与蒸镀时使用的母基板的尺寸和掩模板的穿孔(或同样地,要形成的发光层)的形状有关。一般情况下,拉伸力被沿着与母基板的短边平行的方向施加。例如,母基板具有750 mm×650 mm的尺寸,那么拉伸力被沿着与母基板的650 mm的边平行的方向施加。在一些情况下,拉伸力被沿着掩模板的穿孔的角的方向施加。In order to ensure the positional accuracy and dimensional accuracy of the formed pattern, the mask plate needs to be tensioned in a predetermined direction with a certain tensile force during use to prevent the mask plate from being deformed by gravity or heat. The predetermined direction in which the tensile force is applied is related to the size of the mother substrate used in vapor deposition and the shape of the perforation of the mask (or, similarly, the light emitting layer to be formed). Generally, the tensile force is applied in a direction parallel to the short sides of the mother substrate. For example, if the mother substrate has a size of 750 mm×650 mm, then a tensile force is applied in a direction parallel to a side of 650 mm of the mother substrate. In some cases, the tensile force is applied in the direction of the corners of the perforations of the mask.
图2B示意性地示出了在蒸镀过程中掩模板200相对于母基板MSB的布置关系。FIG. 2B schematically shows the arrangement relationship of the
参考图2B,掩模板200布置于母基板MSB(被示出为虚线矩形框)的上方,并且被蒸发的发光材料被驱使穿过掩模板200中的穿孔201(为了图示的方便,在图2B中未被示出)而沉积到母基板MSB上,形成对应的发光层的图案。在这个过程中,掩模板200被沿着与母基板MSB的短边平行的方向张紧,如图2B中的空心箭头所指示的。在后续工艺中,母基板MSB可以沿交叉的虚线被单片化切割成3×4个显示面板。Referring to FIG. 2B , the
返回参考图2A,在掩模板200的情况下,拉伸力被沿着空心箭头所指示的方向施加。拉伸力在掩模板200的内部传导,并且由于穿孔201的阵列的存在,传导路径必须绕开这些穿孔,如图2A中的实心箭头所指示的。这导致拉伸力的传导路径偏离拉伸力被施加的预定方向,影响掩模板200的拉伸效果。Referring back to FIG. 2A, in the case of the
此外,穿孔201的四个直角对于掩模板200的制造工艺提出了较高的要求。掩模板200的穿孔201通常通过利用刻蚀液对金属片进行刻蚀来形成,并且刻蚀液在直角处的刻蚀负载较直边处不同。在相同刻蚀液浓度的情况下,直角处的刻蚀负载为直边处刻蚀负载的两倍。也就是说,在相同刻蚀液浓度的情况下,如果要确保直边的精度,则直角的刻蚀精度无法保证,并且如果要确保直角的精度,则直边会被过刻蚀。In addition, the four right angles of the through
图3A示意性地示出了根据本发明实施例的显示面板DP中的五个子像素区域的布置300的平面图。3A schematically shows a plan view of an
参考图3A,第一子像素区域301、第二子像素区域302和第三子像素区域303被示出。这些子像素区域301、302和303包括各自的发光层EL1、EL2和EL3以及各自的发光区EZ1、EZ2和EZ3。Referring to FIG. 3A, a
第一和第二发光层EL1和EL2在第一方向D1和与第一方向D1交叉的第二方向D2上交替排列。在该示例中,第二方向D2基本上垂直于第一方向D1,尽管这不是必须的。如本文使用的术语“基本上”意图涵盖由于例如制造工艺引入的相对于理想情况的偏差。The first and second light emitting layers EL1 and EL2 are alternately arranged in the first direction D1 and the second direction D2 crossing the first direction D1. In this example, the second direction D2 is substantially perpendicular to the first direction D1, although this is not required. The term "substantially" as used herein is intended to encompass deviations from ideal due, for example, to manufacturing processes.
各第三发光层EL3散布(dispersed among)在各第一发光层EL1和各第二发光层EL2之间。具体地,如图3A所示,每个第三发光层EL3被与其直接相邻的两个第一发光层EL1(一个右上,一个左下)和两个第二发光层EL2(一个左上,一个右下)包围。更具体地,该第三发光层EL3位于左上第二发光层EL2的几何中心、右上第一发光层EL1的几何中心、右下第二发光层EL2的几何中心、以及左下第一发光层EL1的几何中心依次连线所形成的四边形内部。Each third light emitting layer EL3 is dispersed among each first light emitting layer EL1 and each second light emitting layer EL2. Specifically, as shown in FIG. 3A, each third light emitting layer EL3 is directly adjacent to it by two first light emitting layers EL1 (one upper right, one lower left) and two second light emitting layers EL2 (one upper left, one right below) surrounded. More specifically, the third light emitting layer EL3 is located at the geometric center of the upper left second light emitting layer EL2, the geometric center of the upper right first light emitting layer EL1, the geometric center of the lower right second light emitting layer EL2, and the lower left first light emitting layer EL1. The interior of the quadrilateral formed by connecting the geometric centers in turn.
第一和第二发光层EL1和EL2中的每一个均包括在第一方向D1上彼此相对的两个第一角部(具体地,一个上角部和一个下角部)和在第二方向D2上彼此相对的两个第二角部(具体地,一个左角部和一个右角部)。第一和第二角部中的每个角部具有被倒角(chamfered)的边缘以使得第一和第二发光层EL1和EL2彼此不交叠。如本文使用的短语“发光层的第一角部”是指该发光层的相对于该发光层的其他区域在第一方向D1上更加突出(protruding)的区域,并且如本文使用的短语“发光层的第二角部”是指该发光层的相对于该发光层的其他区域在第二方向D2上更加突出的区域。如本文使用的短语“A和B彼此不交叠”意指A的占用区域(footprint)与B的占用区域之间没有交集。Each of the first and second light emitting layers EL1 and EL2 includes two first corners (specifically, one upper corner and one lower corner) opposite to each other in the first direction D1 and two in the second direction D2 two second corners (specifically, a left corner and a right corner) opposite each other. Each of the first and second corners has a chamfered edge so that the first and second light emitting layers EL1 and EL2 do not overlap each other. The phrase "first corner of the light-emitting layer" as used herein refers to a region of the light-emitting layer that is more protruding in the first direction D1 relative to other regions of the light-emitting layer, and as used herein, the phrase "emitting light" The "second corner portion of the layer" refers to a region of the light-emitting layer that is more protruded in the second direction D2 relative to other regions of the light-emitting layer. The phrase "A and B do not overlap each other" as used herein means that there is no intersection between A's footprint and B's footprint.
每个第一发光层EL1的一个第一角部与对应的第二发光层EL2的一个第一角部直接相邻,所述对应的第二发光层EL2在所述第一方向D1上与该第一发光层EL1直接相邻,并且该第一发光层EL1的所述一个第一角部与所述对应的第二发光层EL2的所述一个第一角部之间的距离为该第一发光层EL1与所述对应的第二发光层EL2之间的最小距离。如本文中使用的短语“一个角部与另一角部之间的距离”意指该角部上各个点与该另一角部上各个点之间的距离中最小的那个距离。在图3A的示例中,右上第一发光层EL1的下角部与右下第二发光层EL2的上角部直接相邻,并且该右上第一发光层EL1的下角部与该右下第二发光层EL2的上角部之间的距离为该右上第一发光层EL1与该右下第二发光层EL2之间的最小距离。将理解的是,如本文使用的短语“A与B部分地交叠”涵盖了其中A与B彼此相接触(即,A与B共用边界)的情形。A first corner portion of each first light-emitting layer EL1 is directly adjacent to a first corner portion of the corresponding second light-emitting layer EL2, and the corresponding second light-emitting layer EL2 is in the first direction D1. The first light-emitting layer EL1 is directly adjacent, and the distance between the one first corner portion of the first light-emitting layer EL1 and the one first corner portion of the corresponding second light-emitting layer EL2 is the first The minimum distance between the light-emitting layer EL1 and the corresponding second light-emitting layer EL2. The phrase "the distance between one corner and the other corner" as used herein means the smallest of the distances between each point on the corner and each point on the other corner. In the example of FIG. 3A , the lower corner portion of the upper right first light emitting layer EL1 is directly adjacent to the upper corner portion of the lower right second light emitting layer EL2 , and the lower corner portion of the upper right first light emitting layer EL1 and the lower right second light emitting layer EL1 emit light directly. The distance between the upper corners of the layer EL2 is the minimum distance between the upper right first light emitting layer EL1 and the lower right second light emitting layer EL2. It will be understood that the phrase "A and B partially overlap" as used herein covers the situation where A and B are in contact with each other (ie, A and B share a boundary).
形成该右上第一发光层EL1的下角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第一虚拟角部,如图3A中的虚线所示。形成该右下第二发光层EL2的上角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第二虚拟角部,如图3A中的虚线所示。所述第一虚拟角部与所述第二虚拟角部部分地交叠。这同样适用于显示面板DP中的其他第一和第二发光层EL1和EL2,并且有助于第一和第二发光层EL1和EL2具有尽量大的面积。The two sides forming the lower corner portion of the upper right first light emitting layer EL1 include respective straight line portions whose respective imaginary extension lines intersect to form a first imaginary corner portion, as shown by dotted lines in FIG. 3A . The two sides forming the upper corner of the lower right second light emitting layer EL2 include respective straight portions whose respective imaginary extension lines intersect to form a second imaginary corner, as shown by the dotted lines in FIG. 3A . The first virtual corner partially overlaps the second virtual corner. The same applies to the other first and second light emitting layers EL1 and EL2 in the display panel DP, and helps the first and second light emitting layers EL1 and EL2 to have as large an area as possible.
每个第一发光层EL1的一个第二角部与对应的第二发光层EL2的一个第二角部直接相邻,所述对应的第二发光层EL2在所述第二方向D2上与该第一发光层EL1直接相邻,并且该第一发光层EL1的所述一个第二角部与所述对应的第二发光层EL2的所述一个第二角部之间的距离为该第一发光层EL1与所述对应的第二发光层EL2之间的最小距离。在图3A的示例中,左下第一发光层EL1的右角部与右下第二发光层EL2的左角部直接相邻,并且该左下第一发光层EL1的右角部与该右下第二发光层EL2的左角部之间的距离为该左下第一发光层EL1与该右下第二发光层EL2之间的最小距离。A second corner portion of each first light-emitting layer EL1 is directly adjacent to a second corner portion of the corresponding second light-emitting layer EL2, and the corresponding second light-emitting layer EL2 is adjacent to the second light-emitting layer EL2 in the second direction D2. The first light-emitting layer EL1 is directly adjacent, and the distance between the one second corner portion of the first light-emitting layer EL1 and the one second corner portion of the corresponding second light-emitting layer EL2 is the first The minimum distance between the light-emitting layer EL1 and the corresponding second light-emitting layer EL2. In the example of FIG. 3A , the right corner of the lower left first light emitting layer EL1 is directly adjacent to the left corner of the lower right second light emitting layer EL2 , and the right corner of the lower left first light emitting layer EL1 and the lower right second light emitting layer are directly adjacent to each other. The distance between the left corners of the layer EL2 is the minimum distance between the lower left first light emitting layer EL1 and the lower right second light emitting layer EL2.
形成该左下第一发光层EL1的右角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第三虚拟角部,如图3A中的虚线所示。形成该右下第二发光层EL2的左角部的两条边包括各自的直线部分,所述直线部分各自的假想延伸线相交以形成第四虚拟角部,如图3A中的虚线所示。所述第三虚拟角部与所述第四虚拟角部部分地交叠。这同样适用于显示面板DP中的其他第一和第二发光层EL1和EL2,并且有助于第一和第二发光层EL1和EL2具有尽量大的面积。The two sides forming the right corner of the lower left first light emitting layer EL1 include respective straight portions whose respective imaginary extension lines intersect to form a third imaginary corner, as shown by dotted lines in FIG. 3A . The two sides forming the left corner of the lower right second light emitting layer EL2 include respective straight portions whose respective imaginary extension lines intersect to form a fourth imaginary corner, as shown by dotted lines in FIG. 3A . The third virtual corner partially overlaps the fourth virtual corner. The same applies to the other first and second light emitting layers EL1 and EL2 in the display panel DP, and helps the first and second light emitting layers EL1 and EL2 to have as large an area as possible.
在图3A的示例中,每个第一发光层EL1的第一和第二角部中的每个角部被以第一半径r1倒圆角,所述第一半径典型地大于或等于10 微米(um),并且每个第二发光层EL2的第一和第二角部中的每个角部被以第二半径r2倒圆角,所述第二半径典型地大于或等于10um。在其他实施例中,可以以其他数值的半径来进行倒圆角。In the example of FIG. 3A, each of the first and second corners of each first light emitting layer EL1 is rounded with a first radius r1, which is typically greater than or equal to 10 microns (um), and each of the first and second corners of each second light-emitting layer EL2 is rounded with a second radius r2, which is typically greater than or equal to 10 um. In other embodiments, the corners may be rounded with other numerical radii.
作为倒角的结果,在第一方向D1上直接相邻的第一和第二发光层EL1和EL2彼此空间分隔开,并且在第二方向D1上直接相邻的第一和第二发光层EL1和EL2之间也彼此空间分隔开。这避免了载流子串扰的问题,并且因此避免了不期望的混色。而且,这种具有圆角的第一和第二发光层EL1和EL2不要求它们的掩模板具有带有尖角的穿孔,增大了掩膜板材料和刻蚀液的接触面积。这有助于缓解或消除由于刻蚀负载引起的尖角处的较差的刻蚀精度。As a result of the chamfering, the first and second light emitting layers EL1 and EL2 directly adjacent in the first direction D1 are spaced apart from each other, and the first and second light emitting layers directly adjacent in the second direction D1 EL1 and EL2 are also spaced apart from each other. This avoids the problem of carrier crosstalk and thus avoids undesired color mixing. Moreover, the first and second light emitting layers EL1 and EL2 with rounded corners do not require their masks to have through holes with sharp corners, which increases the contact area between the mask material and the etching solution. This helps mitigate or eliminate poor etch accuracy at sharp corners due to etch loading.
在一些实施例中,每个第一发光层EL1的第一和第二角部中的每个角部的所述边缘上的任意点p1到相应第一发光区EZ1的边界的最小距离d1大于或等于偏移容差值dt,并且每个第二发光层EL2的第一和第二角部中的每个角部的所述边缘上的任意点p2到相应第二发光区EZ2的边界的最小距离d2大于或等于所述偏移容差值dt。偏移容差值dt是一个计及工艺误差的设计值,其典型地为9至12 um。在该示例中,在设计像素排列时,发光层的直边缘与发光区的直边缘之间的最小距离被期望等于偏移容差值dt。In some embodiments, the minimum distance d1 from any point p1 on the edge of each of the first and second corners of each first light emitting layer EL1 to the boundary of the corresponding first light emitting zone EZ1 is greater than or equal to the offset tolerance value dt, and an arbitrary point p2 on the edge of each of the first and second corners of each second light-emitting layer EL2 to the boundary of the corresponding second light-emitting zone EZ2 The minimum distance d2 is greater than or equal to the offset tolerance value dt. The offset tolerance value dt is a design value that takes into account process errors and is typically 9 to 12 um. In this example, when designing the pixel arrangement, the minimum distance between the straight edge of the light-emitting layer and the straight edge of the light-emitting region is expected to be equal to the offset tolerance value dt.
在一些实施例中,每个第一发光层EL1的几何中心和与该第一发光层EL1在所述第一方向D1上直接相邻的对应第二发光层EL2的几何中心位于平行于所述第一方向D1的直线s1上,并且每个第一发光层EL1的几何中心和与该第一发光层EL1在所述第二方向D2上直接相邻的对应第二发光层EL2的几何中心位于平行于所述第二方向D2的直线s2上。散布在各第一发光层EL1和各第二发光层EL2之间的各第三发光层EL3与直线s1和s2无交叠。In some embodiments, the geometric center of each first light emitting layer EL1 and the geometric center of the corresponding second light emitting layer EL2 directly adjacent to the first light emitting layer EL1 in the first direction D1 are located parallel to the On the straight line s1 in the first direction D1, and the geometric center of each first light-emitting layer EL1 and the geometric center of the corresponding second light-emitting layer EL2 directly adjacent to the first light-emitting layer EL1 in the second direction D2 are located at On the straight line s2 parallel to the second direction D2. The third light emitting layers EL3 interspersed between the first light emitting layers EL1 and the second light emitting layers EL2 do not overlap the straight lines s1 and s2.
将理解的是,图3A中所示的发光层和发光区的形状是示例性的,并且其他实施例是可能的。例如,每个第一发光层EL1可以包括在不同于第一和第二方向D1和D2的方向上突出的另外的角部,并且这些另外的角部可以或可以不被倒角。It will be appreciated that the shapes of the light emitting layers and light emitting regions shown in Figure 3A are exemplary and that other embodiments are possible. For example, each of the first light emitting layers EL1 may include additional corners protruding in directions different from the first and second directions D1 and D2, and these additional corners may or may not be chamfered.
更一般地,根据本发明实施例的显示面板DP可以参考图3B被描述如下。图3B更清楚地示出了图3A的子像素区域的布置300中的第一和第二子像素区域301和302,其中子像素区域303为了图示的清楚性起见被省略。More generally, the display panel DP according to the embodiment of the present invention may be described as follows with reference to FIG. 3B . Figure 3B more clearly shows the first and
参考图3B,每个第一发光层EL1的在第二方向D2上彼此相对的两个第二角部被倒角以在各所述第一发光层EL1之间(among)提供空隙区域gp11。每个空隙区域gp11在第一方向D1上沿直线延伸而没有弯折部分,并且跨越所述显示面板DP在第一方向D1上的整个尺寸。而且,每个第二发光层EL2的在第二方向D2上彼此相对的两个第二角部被倒角以在各所述第二发光层EL2之间提供空隙区域gp12。每个空隙区域gp12在第一方向D1上沿直线延伸而没有弯折部分,并且跨越所述显示面板DP在第一方向D1上的整个尺寸。空隙区域gp11不与任何第一发光层EL1交叠,并且空隙区域gp12不与任何第二发光层EL2交叠。如稍后将更详细解释的,这可以通过修改用于形成这些发光层的掩模板的穿孔图案来实现。Referring to FIG. 3B , two second corners of each of the first light emitting layers EL1 opposite to each other in the second direction D2 are chamfered to provide gap regions gp11 among the first light emitting layers EL1 . Each gap region gp11 extends in a straight line without a bent portion in the first direction D1, and spans the entire size of the display panel DP in the first direction D1. Also, two second corners of each of the second light emitting layers EL2 opposite to each other in the second direction D2 are chamfered to provide a gap region gp12 between each of the second light emitting layers EL2. Each gap region gp12 extends in a straight line without a bent portion in the first direction D1, and spans the entire size of the display panel DP in the first direction D1. The void region gp11 does not overlap with any of the first light emitting layers EL1, and the void region gp12 does not overlap with any second light emitting layer EL2. As will be explained in more detail later, this can be achieved by modifying the perforation pattern of the mask used to form these light emitting layers.
类似地,每个第一发光层EL1的在第一方向D1上彼此相对的两个第一角部被倒角以在各所述第一发光层EL1之间(among)提供空隙区域gp21。每个空隙区域gp21在第二方向D2上沿直线延伸而没有弯折部分,并且跨越所述显示面板DP在第二方向D2上的整个尺寸。而且,每个第二发光层EL2的在第一方向D1上彼此相对的两个第一角部被倒角以在各所述第二发光层EL2之间提供空隙区域gp22。每个空隙区域gp22在第二方向D2上沿直线延伸而没有弯折部分,并且跨越所述显示面板DP在第二方向D2上的整个尺寸。空隙区域gp21不与任何第一发光层EL1交叠,并且空隙区域gp22不与任何第二发光层EL2交叠。Similarly, two first corners of each of the first light emitting layers EL1 opposite to each other in the first direction D1 are chamfered to provide gap regions gp21 among the first light emitting layers EL1 . Each gap region gp21 extends in a straight line without a bent portion in the second direction D2, and spans the entire size of the display panel DP in the second direction D2. Also, two first corners of each of the second light emitting layers EL2 opposite to each other in the first direction D1 are chamfered to provide a gap region gp22 between each of the second light emitting layers EL2. Each gap region gp22 extends in a straight line without a bent portion in the second direction D2, and spans the entire size of the display panel DP in the second direction D2. The void region gp21 does not overlap with any of the first light emitting layers EL1, and the void region gp22 does not overlap with any second light emitting layer EL2.
图4示意性地示出了图3A的显示面板DP的子像素区域的布置300的示例像素电路。FIG. 4 schematically shows an example pixel circuit of an
参考图4,显示面板DP包括第一和第二栅线GL1和GL2、第一至第三数据线DL1、DL2和DL3、以及第一至第三电源线PL1、PL2和PL3。第一子像素区域301形成在第一栅线GL1和第三数据线DL3的交叉处,第二子像素区域302形成在第一栅线GL1和第一数据线DL1的交叉处,并且第三子像素区域303形成在第一栅线GL1和第二数据线DL2的交叉处。另外,另一第一子像素区域301形成在第二栅线GL2和第三数据线DL3的交叉处,并且另一第二子像素区域302形成在第二栅线GL2和第三数据线DL3的交叉处。4, the display panel DP includes first and second gate lines GL1 and GL2, first to third data lines DL1, DL2 and DL3, and first to third power supply lines PL1, PL2 and PL3. The first
子像素区域301、302和303中的每一个包括开关晶体管Ts、驱动晶体管Td、存储电容器Cst和发光二极管Del。这是一种典型的两个晶体管一个电容器(“2T1C”)的像素电路。将理解的是,图4中所示的像素电路仅仅是示例性和示意性的。在其他实施例中,可以提供有其他形式的像素电路。例如,第三子像素区域303中的开关晶体管Ts的栅极可以连接到除了第一栅线GL1之外还有的第二栅线GL2。替换地,第三子像素区域303中的开关晶体管Ts的栅极可以连接到不同于第一和第二栅线GL1和GL2的单独的栅线。还可以采用任何其他适当的像素电路。Each of the
图5示意性地示出了图3A的显示面板DP的截面图。为了描述方便,假定在显示面板DP中采用如图4中所示的像素电路。FIG. 5 schematically shows a cross-sectional view of the display panel DP of FIG. 3A . For the convenience of description, it is assumed that the pixel circuit as shown in FIG. 4 is employed in the display panel DP.
参考图5,显示面板DP包括衬底基板510,其上驱动晶体管Td、开关晶体管Ts和存储电容器Cst(未示出)形成在每个子像素区域中。虽然未示出,驱动晶体管Td和开关晶体管Ts中的每一个包括栅电极、半导体层、源电极和漏电极。例如,顶栅型驱动晶体管Td包括多晶硅的半导体层、半导体层上的栅绝缘层、栅绝缘层上的栅电极、栅电极上方的源和漏电极。半导体层的中心用作沟道,并且杂质被掺杂到半导体层的两端。源和漏电极接触半导体层的两端。Referring to FIG. 5 , the display panel DP includes a
钝化层520形成在衬底基板510的整个表面上以覆盖驱动晶体管Td、开关晶体管Ts和存储电容器Cst(未示出)。钝化层520可以由无机绝缘材料(例如,氧化硅或氮化硅)或有机绝缘材料(例如,苯并环丁烯或丙烯酸树脂)形成。The
第一电极541形成在钝化层520上。第一电极541用作发光二极管Del的阳极,并且连接到驱动晶体管Td(未示出)的漏电极。将理解的是,虽然仅一个第一电极541在图4中被标记出,但是有多个第一电极形成在钝化层520上。这些第一电极属于各自的子像素区域SP,并且可以通过图案化一导电层(例如,由氧化铟锡(ITO)制成)来形成。图5中标记出的子像素区域SP可以是图3A中的第一、第二和第三子像素区域301、302和303中的任一个。The
像素界定层530形成在第一电极541的边界处以便对不同的子像素区域SP定界。像素界定层530包括图案化的挡墙(bank)530a和由挡墙分隔出的多个开口530b。开口530b的位置、尺寸和形状决定了第一电极541被暴露的部分的尺寸和形状,并且因此限定了子像素区域SP的发光区EZ的位置、尺寸和形状。将理解的是,虽然仅一个开口530b在图4中被标记出,但是有多个开口被形成在各个子像素区域中的相应子像素区域中以暴露对应的第一电极。像素界定层530可以由无机绝缘材料(例如,氧化硅或氮化硅)或有机绝缘材料(例如,苯并环丁烯或丙烯酸树脂)形成。The
发光层542形成在第一电极541的被暴露的部分上且覆盖开口530b。发光层542的面积一般大于开口530b的面积,使得开口530b在衬底基板510上的正投影典型地落入发光层542在衬底基板510上的正投影内。替换地,在一些实施例中,发光层542可以仅填充开口530b而不超出开口530b。发光层542可以包括电子注入层(EIL)、发射材料层(EML)和空穴注入层(HIL)以改善发射效率。将理解的是,虽然仅一个发光层542在图5中被标记出,但是有多个发光层形成在各个第一电极中的相应第一电极上,如图5中的各斜线区域所示的。图5中标记出的发光层542可以是图3A中的第一、第二和第三发光层EL1、EL2和EL3中的任一个。The
第二电极543整体地形成在各个发光层542上。第二电极543用作发光二极管Del的阴极,并且可以由一导电层(例如,由铝制成)来形成。The
第一电极541、发光层542和第二电极543形成发光二极管Del。当发光二极管Del被激发时,发光层542的与开口530b相重叠的区能够有效地发射光,并且可以被定义为发光区EZ。如图5所示,发光区EZ的轮廓由开口530b的形状决定。The
图6示意性地示出了图3A的显示面板DP中的子像素区域的布置的变型600的平面图。FIG. 6 schematically shows a plan view of a
参考图6,第一子像素区域601、第二子像素区域602和第三子像素区域603包括各自的发光层EL1、EL2和EL3,并且第一和第二发光层EL1和EL2具有不同于图3A中所示出的那些的形状的形状。6, the
具体地,每个第一发光层EL1的第一和第二角部中的每个角部被倒平切角(flattened),并且每个第二发光层EL2的第一和第二角部中的每个角部也被倒平切角。作为结果,在第一方向D1上直接相邻的第一和第二发光层EL1和EL2彼此空间分隔开,并且在第二方向D1上直接相邻的第一和第二发光层EL1和EL2之间也彼此空间分隔开。这避免了载流子串扰的问题,并且因此避免了不期望的混色。Specifically, each of the first and second corners of each of the first light-emitting layers EL1 is flattened, and each of the first and second corners of each of the second light-emitting layers EL2 is flattened. Each corner of the is also chamfered. As a result, the first and second light emitting layers EL1 and EL2 directly adjacent in the first direction D1 are spaced apart from each other, and the first and second light emitting layers EL1 and EL2 directly adjacent in the second direction D1 They are also spaced apart from each other. This avoids the problem of carrier crosstalk and thus avoids undesired color mixing.
子像素区域的布置600在其他方面可以采用与图3A的布置300相同的配置。例如,每个第一发光层EL1的第一和第二角部中的每个角部的所述边缘上的任意点p1到相应第一发光区EZ1的边界的最小距离d1大于或等于偏移容差值dt,并且每个第二发光层EL2的第一和第二角部中的每个角部的所述边缘上的任意点p2到相应第二发光区EZ2的边界的最小距离d2大于或等于所述偏移容差值dt。The
将理解的是,虽然被倒平切角的第一和第二发光层EL1和EL2中的每一个在图6中被示出为具有平整的边缘,但是在实践中这些平整边缘在它们的交界处由于工艺原因可能是圆角的。也即,每个平整的边缘在其两端处可能是圆角的。这仍然落入本申请的范围之内。It will be appreciated that although each of the chamfered first and second light emitting layers EL1 and EL2 is shown in FIG. 6 as having flat edges, in practice these flat edges are at their junctions. The corners may be rounded due to process reasons. That is, each flat edge may be rounded at its two ends. This still falls within the scope of this application.
图7示意性地示出了图3A的显示面板DP中的子像素区域的布置的另一变型700的平面图。FIG. 7 schematically shows a plan view of another
参考图7,第一子像素区域701和第二子像素区域702包括各自的发光层EL1和EL2,所述发光层具有与图3A中所示出的那些相同的配置。子像素区域的布置700不同于布置300在于,第三子像素区域703中的第三发光层EL3现在具有圆角多边形(在该示例中,圆角矩形)的形状。与图3A中的八边形的第三发光层EL3相比,这种圆角多边形的第三发光层EL3不要求掩模板具有带有尖角的穿孔,有助于缓解或消除由于刻蚀负载引起的尖角处的较差的精度。将理解的是,图7中所示的第三发光层EL3是示例性的,并且在其他实施例中,第三发光层EL3可以具有其他圆角多边形的形状。Referring to FIG. 7 , the
在一些实施例中,每个第三发光区EZ3具有与相应第三发光层EL3的形状适形(conformal)的形状,使得相应第三发光层EL3的边缘上的任意点到该第三发光区EZ3的距离基本上等于所述偏移容差值dt。在图7的示例中,第三发光区EZ3具有跟随对应的第三发光层EL3的形状的圆角矩形形状,并且被以小于第三发光层EL3的倒角半径的适当的倒角半径进行倒圆角。更具体地,第三发光层EL3的边缘上的任意点到该第三发光区EZ3的边界的最小距离基本上等于所述偏移容差值dt。这允许第三子像素区域在各个方向上具有一致的偏移容差值。也即,工艺裕量(margin)在所有方向上是相同的,从而有利于工艺管控。In some embodiments, each third light emitting zone EZ3 has a shape conformal to the shape of the corresponding third light emitting layer EL3 such that any point on the edge of the corresponding third light emitting layer EL3 reaches the third light emitting zone The distance of EZ3 is substantially equal to the offset tolerance value dt. In the example of FIG. 7 , the third light emitting zone EZ3 has a rounded rectangular shape following the shape of the corresponding third light emitting layer EL3 and is chamfered with an appropriate chamfering radius smaller than that of the third light emitting layer EL3 rounded corners. More specifically, the minimum distance from any point on the edge of the third light-emitting layer EL3 to the boundary of the third light-emitting zone EZ3 is substantially equal to the offset tolerance value dt. This allows the third sub-pixel region to have a consistent offset tolerance value in all directions. That is, the process margins are the same in all directions, thereby facilitating process control.
图8A示意性地示出了根据本发明实施例的显示面板DP的多个子像素区域的平面图。8A schematically shows a plan view of a plurality of sub-pixel regions of a display panel DP according to an embodiment of the present invention.
参考图8A,第一、第二和第三子像素区域701、702和703具有与上面关于图7所描述的那些相同的配置。具体地,每个第一发光层EL1的上角部、下角部、左角部和右角部被以第一半径倒圆角,每个第二发光层EL2的上角部、下角部、左角部和右角部被以第二半径倒圆角,并且每个第三发光层EL3具有圆角多边形(具体地圆角矩形)的形状。Referring to FIG. 8A , the first, second and third
在该示例中,第一方向D1基本上垂直于第二方向D2。每个第一发光层EL1具有通过对第一正方形的四个角部中的每一角部进行倒角而得到的形状,所述第一正方形的第一和第二对角线分别平行于第一和第二方向D1和D2。每个第二发光层EL2具有通过对第二正方形的四个角部中的每一角部进行倒角而得到的形状,所述第二正方形的第一和第二对角线分别平行于第一和第二方向D1和D2。每个第三发光层EL3具有通过对长方形的四个角部中的每一角部进行倒圆角而得到的形状,该长方形的一长边与该第三发光层EL3所直接相邻的一对应第一发光层EL1的一侧边相对并且基本上平行于该对应第一发光层EL1的该侧边,并且该长方形的一短边与该第三发光层EL3所直接相邻的一对应第二发光层EL2的一侧边相对并且基本上平行于该对应第二发光层EL2的该侧边。In this example, the first direction D1 is substantially perpendicular to the second direction D2. Each of the first light emitting layers EL1 has a shape obtained by chamfering each of four corners of a first square whose first and second diagonals are parallel to the first and second directions D1 and D2. Each of the second light emitting layers EL2 has a shape obtained by chamfering each of four corners of a second square whose first and second diagonals are parallel to the first and second directions D1 and D2. Each third light emitting layer EL3 has a shape obtained by rounding each of four corners of a rectangle, one long side of the rectangle corresponding to the one directly adjacent to the third light emitting layer EL3 One side of the first light-emitting layer EL1 is opposite and substantially parallel to the side of the corresponding first light-emitting layer EL1, and a short side of the rectangle is directly adjacent to a corresponding second light-emitting layer EL3. One side of the light-emitting layer EL2 is opposite to and substantially parallel to the side of the corresponding second light-emitting layer EL2.
图8A中所示的两个第一子像素区域701、两个第二子像素区域702和四个第三子像素区域703形成一个重复单元。两个第一子像素区域被分别布置在第i行和第j+2列以及第i+2行和第j列。两个第二子像素区域被分别布置在第i行和第j列以及第i+2行和第j+2列。四个第三子像素区域被分别布置在第i+1行和第j+1列、第i+1行和第j+3列、第i+3行和第j+1列、以及第i+3行和第j+3列(i和j为自然数)。此处,术语“行”和“列”参考图8A中的第一方向D1和第二方向D2而被使用,即,平行于第一方向D1的方向被称为行方向,并且平行于第二方向D2的方向被称为列方向。The two
多个这样的重复单元在第一和第二方向D1和D2上跨整个显示面板DP被重复地排列。这种像素排列已知为Diamond像素排列,其中第一子像素区域701为蓝色子像素,第二子像素区域702为红色子像素,并且第三子像素区域703为绿色子像素。A plurality of such repeating units are repeatedly arranged across the entire display panel DP in the first and second directions D1 and D2. This pixel arrangement is known as a Diamond pixel arrangement, wherein the
红色、绿色和蓝色子像素的发光区的面积由发光材料的特性决定。蓝色发光材料的使用寿命较短,所以蓝色发光区通常被制作为具有较大的面积以便延缓老化。比起蓝色和红色而言,人眼对绿色更为敏感,并且因此绿色发光区通常被制作为具有较小的面积。在一些实施例中,红色、绿色和蓝色子像素的发光区的面积比为设定为Sr: Sg: Sb=1: (1.2~1.5): (1.4~1.8),其中Sr为红色发光区的面积,Sg为绿色发光区的面积,并且Sb为蓝色发光区的面积。The areas of the light-emitting regions of the red, green and blue sub-pixels are determined by the properties of the light-emitting material. The blue light-emitting material has a shorter lifetime, so the blue light-emitting region is usually made to have a larger area in order to delay aging. The human eye is more sensitive to green than blue and red, and thus green light-emitting regions are usually made to have a smaller area. In some embodiments, the area ratio of the light-emitting regions of the red, green and blue sub-pixels is set as Sr:Sg:Sb=1:(1.2~1.5):(1.4~1.8), wherein Sr is the red light-emitting region , Sg is the area of the green light-emitting region, and Sb is the area of the blue light-emitting region.
将理解的是,虽然图8A中未示出,但是第一和第二发光层EL1和EL2可以采用与图6中描述的那些相同的配置。替换地或附加地,在一些实施例中,第三发光层EL3可以采用与图3A或6中描述的那些相同的配置。在一些实施例中,第三发光层EL3还可以被倒角成具有基本上椭圆的形状而没有直边,并且这样的形状仍然被认为是通过对长方形的四个角部中的每一角部进行倒圆角而得到的形状。It will be appreciated that, although not shown in FIG. 8A , the first and second light emitting layers EL1 and EL2 may adopt the same configurations as those described in FIG. 6 . Alternatively or additionally, in some embodiments, the third light emitting layer EL3 may adopt the same configurations as those described in FIGS. 3A or 6 . In some embodiments, the third light emitting layer EL3 may also be chamfered to have a substantially elliptical shape without straight sides, and such a shape is still considered to be obtained by making each of the four corners of the rectangle The shape obtained by rounding the corners.
更一般地,根据本发明实施例的显示面板DP可以被描述为包括多个在第三方向D3上排列的多个第一组发光层和在所述第三方向D3上排列的多个第二组发光层,其中所述多个第一组中的每一组包括交替排列的多个第一发光层EL1和多个第三发光层EL3,并且所述多个第二组中的每一组包括交替排列的多个第三发光层EL3和多个第二发光层EL2。所述多个第一组和所述多个第二组在与所述第三方向D3交叉(例如,基本上垂直于)的第四方向D4上交替排列。所述多个第一组和所述多个第二组被排列使得形成在所述第四方向D4上排列的多个第三组发光层和在所述第四方向D4上排列的多个第四组发光层,其中所述多个第三组和所述多个第四组在所述第三方向D3上交替排列。所述多个第三组中的每一组包括交替排列的多个第一发光层EL1和多个第三发光层EL3,并且所述多个第四组中的每一组包括交替排列的多个第三发光层EL3和多个第二发光层EL2。More generally, the display panel DP according to the embodiment of the present invention can be described as including a plurality of first-group light-emitting layers arranged in the third direction D3 and a plurality of second light-emitting layers arranged in the third direction D3. groups of light-emitting layers, wherein each of the plurality of first groups includes a plurality of first light-emitting layers EL1 and a plurality of third light-emitting layers EL3 arranged alternately, and each of the plurality of second groups It includes a plurality of third light emitting layers EL3 and a plurality of second light emitting layers EL2 which are alternately arranged. The plurality of first groups and the plurality of second groups are alternately arranged in a fourth direction D4 crossing (eg, substantially perpendicular to) the third direction D3. The plurality of first groups and the plurality of second groups are arranged such that a plurality of third groups of light emitting layers arranged in the fourth direction D4 and a plurality of first groups arranged in the fourth direction D4 are formed. Four groups of light-emitting layers, wherein the plurality of third groups and the plurality of fourth groups are alternately arranged in the third direction D3. Each of the plurality of third groups includes a plurality of first light emitting layers EL1 and a plurality of third light emitting layers EL3 arranged alternately, and each of the plurality of fourth groups includes a plurality of alternately arranged A third light emitting layer EL3 and a plurality of second light emitting layers EL2.
图8B示意性地示出了图8A的显示面板DP的外形轮廓。FIG. 8B schematically shows the outline of the display panel DP of FIG. 8A .
参考图8B,显示面板DP具有基本上矩形的外形轮廓,所述外形轮廓包括沿第一方向D1延伸的两条第一边和沿第二方向D2延伸的两条第二边。多个如图8A中所示的重复单元在第一和第二方向D1和D2上跨整个显示面板DP被重复地排列,形成子像素的阵列。Referring to FIG. 8B , the display panel DP has a substantially rectangular outline including two first sides extending along the first direction D1 and two second sides extending along the second direction D2. A plurality of repeating units as shown in FIG. 8A are repeatedly arranged across the entire display panel DP in the first and second directions D1 and D2, forming an array of sub-pixels.
将理解的是,在其他实施例中,显示面板DP可以具有相对于图8B中所示出的那个顺时针或逆时针被旋转90度的外形轮廓。也就是说,显示面板DP的矩形外形轮廓可以具有沿第一方向D1延伸的较长边和沿第二方向D2延伸的较短边。It will be appreciated that in other embodiments, the display panel DP may have a profile that is rotated 90 degrees clockwise or counterclockwise relative to that shown in FIG. 8B . That is, the rectangular outline of the display panel DP may have longer sides extending along the first direction D1 and shorter sides extending along the second direction D2.
图9示意性地示出了根据本发明实施例的制造显示面板的方法900的流程图,并且图10A至10F示意性地示出了在方法900的各步骤中得到的显示面板DP的截面图。9 schematically shows a flowchart of a
在步骤910,图案化第一导电层以形成多个第一电极。如图10A所示,钝化层1020形成在衬底基板1010上以覆盖像素电路中的电子元件(例如,图4中示出的晶体管Ts和Td以及电容器Cst),并且在钝化层1020上形成第一导电层1041。第一导电层1041例如由ITO制成。如图10B所示,第一导电层1041被图案化为多个第一电极,所述第一电极在第一方向D1和第二方向D2上呈阵列布置以对应于各自的子像素区域。这可以通过任何适当的手段来实现,例如光刻或激光刻蚀。At
在步骤920,在图案化的第一导电层上形成像素界定层。如图10C所示,像素界定层1030形成在图案化的第一导电层1041上以覆盖各个第一电极。At
在步骤930,图案化像素界定层以形成分别暴露所述多个第一电极的多个开口。如图10D所示,像素界定层1030被图案化以形成暴露各个第一电极1041中的相应第一电极的多个开口1030b,其中每个开口1030b暴露对应的第一电极1041的至少一部分。各第一电极1041中的第一多个第一电极分别由所述多个开口1030b中的第一多个开口暴露,各第一电极1041中的第二多个第一电极分别由所述多个开口1030b中的第二多个开口暴露,并且各第一电极1041中的第三多个第一电极分别由所述多个开口1103中的第三多个开口暴露。At
这可以通过任何适当的手段来实现,例如光刻工艺。在一个示例中,首先在图10C中所示的像素界定层1030上通过例如旋涂形成光刻胶层,并且然后利用紫外光通过具有与所述多个开口1030b对应的图案的光掩模板照射光刻胶层,引起曝光区域中的光刻胶发生化学反应。然后,通过显影去除曝光区域中的光刻胶,使光掩模板的图案被复制到光刻胶层。最后,利用刻蚀将图案转移到像素界定层1030,并且去除残余的光刻胶,得到图案化的挡墙1030a和由挡墙1030a分隔出的开口1030b,如图10D所示。This can be achieved by any suitable means, such as a photolithographic process. In one example, a photoresist layer is first formed on the
在步骤940,形成分别覆盖所述第一多个开口的多个第一发光层、分别覆盖所述第二多个开口的多个第二发光层、以及分别覆盖所述第三多个开口的多个第三发光层。At
第一发光层的形成通过利用第一蒸镀掩模板蒸镀第一发光材料而实现。第一发光材料例如为在被激发时发射蓝光的有机发光材料。第二发光层的形成通过利用第二蒸镀掩模板蒸镀第二发光材料而实现。第二发光材料例如为在被激发时发射红光的有机发光材料。第三发光层的形成通过利用第三蒸镀掩模板蒸镀第三发光材料而实现。第三发光材料例如为在被激发时发射绿光的有机发光材料。The formation of the first light-emitting layer is realized by evaporating the first light-emitting material by using the first evaporation mask. The first light-emitting material is, for example, an organic light-emitting material that emits blue light when excited. The formation of the second light-emitting layer is achieved by evaporating the second light-emitting material using the second evaporation mask. The second light-emitting material is, for example, an organic light-emitting material that emits red light when excited. The formation of the third light-emitting layer is realized by evaporating the third light-emitting material by using the third evaporation mask. The third light-emitting material is, for example, an organic light-emitting material that emits green light when excited.
如图10E所示,发光层1042形成在第一电极1041上且覆盖开口1030b,并且发光层1042的与开口1030b相重叠的区形成发光区EZ。发光层1042代表了上面关于图3A至8B描述的第一、第二和第三发光层EL1、EL2和EL3中的任一个。另外,开口1030b的形状的修改可以通过在图案化像素界定层1030时修改光掩模板的图案来实现,从而赋予结果得到的发光区EZ期望的轮廓。As shown in FIG. 10E , the
在步骤950,在各第一、第二和第三发光层上形成第二导电层。如图10F所示,第二导电层1043形成在各个发光层1042上。第二导电层1043可以由例如铝制成。第一电极1041、发光层1042和第二电极1043形成发光二极管Del。At
方法900提供了与上面关于显示面板实施例描述的那些相同的优点,其在此不再赘述。The
图11A和11B示意性地示出了根据本发明实施例的用于在图3A的显示面板DP的制造过程中蒸镀有机发光材料的第一掩模板1100A和第二掩模板1100B的平面图。FIGS. 11A and 11B schematically illustrate plan views of a
参考图11A,第一掩模板1100A被图案化为包括第一穿孔1101a的阵列,每个第一穿孔1101a包括在第一方向D1上彼此相对的两个被倒角的角部和在与第一方向D1交叉的第二方向D2上彼此相对的两个被倒角的角部。在该实施例中,每个第一穿孔1101a的每个角部被以第一半径倒圆角,其中所述第一半径例如大于或等于10 um。第一掩模板1100A被用于形成图3A中的第一发光层EL1的图案。11A, the
参考图11B,第二掩模板1100B被图案化为包括第二穿孔1101b的阵列,每个第二穿孔1101b包括在所述第一方向D1上彼此相对的两个被倒角的角部和在所述第二方向D2上彼此相对的两个被倒角的角部。在该实施例中,每个第二穿孔1101b的每个角部被以第二半径倒圆角,其中所述第二半径例如大于或等于10 um。第二掩模板1100B被用于形成图3A中的第二发光层EL2的图案。Referring to FIG. 11B, the
图11C示意性地示出了将图11A和11B中的第一和第二掩模板1100A和1100B层叠且彼此对齐的示意图。FIG. 11C schematically shows a schematic view of stacking and aligning the first and
参考图11C,第二掩模板1100B被层叠到第一掩模板1100A之上。各第一和第二穿孔1101a和1101b在第一和第二掩模板1100A和1100B中被分别定位以使得当第一和第二掩模板1100A和1100B层叠且彼此对齐时,第一和第二穿孔1101a和1101b在所述第一方向D1和所述第二方向D2上交替排列且彼此不交叠。这使得能够实现图3A中所示的第一和第二发光层EL1和EL2的布置。Referring to FIG. 11C , the
在一些实施例中,各第一和第二穿孔1101a和1101b在第一和第二掩模板1100A和1100B中被分别定位以使得当第一和第二掩模板1100A和1100B层叠且彼此对齐时,每个第一穿孔1101a的几何中心和与该第一穿孔1101a在所述第一方向D1上直接相邻的对应第二穿孔1101b的几何中心位于平行于所述第一方向D1的直线s1上,并且每个第一穿孔1101a的几何中心和与该第一穿孔1101a在所述第二方向D2上直接相邻的对应第二穿孔1101b的几何中心位于平行于所述第二方向D2的直线s2上。In some embodiments, the respective first and
在一些实施例中,每个第一穿孔1101a的在所述第二方向D2上彼此相对的所述两个角部被倒角,以在各第一穿孔1101a之间提供未穿孔区域1110a。每一个未穿孔区域1110a在第一方向D1上沿直线延伸而没有弯折部分,并且跨越所述第一掩模板1100A在第一方向D1上的整个尺寸,如图11A所示。这使得第一掩模板1100A在被拉伸力(如空心箭头所指示的)张紧时,拉伸力在第一掩模板1100A内部的传导路径能够沿着这些未穿孔区域1110a(如实心箭头所指示的),从而避开各个第一穿孔1101a。替换地或附加地,在各第一穿孔1101a之间提供未穿孔区域1120a,其每一个在第二方向D2上沿直线延伸而没有任何弯折,并且跨越所述第一掩模板1100A在第二方向D2上的整个尺寸。这有利于改善第一掩模板1100A的张网效果,从而提高结果得到的第一发光层EL1的位置精度和尺寸精度。而且,倒角的穿孔也减小了穿孔区域的面积,提高了掩模板的机械强度。In some embodiments, the two corners of each of the first through
类似地,每个第二穿孔1101b的在所述第二方向D2上彼此相对的所述两个角部被倒角,以在各第二穿孔1101b之间提供未穿孔区域1110b。每一个未穿孔区域1110b在第一方向D1上沿直线延伸而没有任何弯折,并且跨越所述第二掩模板1100B在第一方向D1上的整个尺寸,如图11B所示。这使得第二掩模板1100B在被拉伸力(如空心箭头所指示的)张紧时,拉伸力在第二掩模板1100B内部的传导路径能够沿着这些未穿孔区域1110b(如实心箭头所指示的),从而避开各个第二穿孔1101b。替换地或附加地,在各第二穿孔1101b之间提供未穿孔区域1120b,其每一个在第二方向D2上沿直线延伸而没有任何弯折,并且跨越所述第二掩模板1100B在第二方向D2上的整个尺寸。这有利于改善第二掩模板1100B的张网效果,从而提高结果得到的第二发光层EL2的位置精度和尺寸精度。Similarly, the two corners of each
图12A和12B示意性地示出了根据本发明实施例的用于在图6的显示面板DP的制造过程中蒸镀有机发光材料的第一掩模板1200A和第二掩模板1200B的平面图。FIGS. 12A and 12B schematically illustrate plan views of a
参考图12A,第一掩模板1200A被图案化为包括第一穿孔1201a的阵列,每个第一穿孔1201a包括在第一方向D1上彼此相对的两个被倒角的角部和在与第一方向D1交叉的第二方向D2上彼此相对的两个被倒角的角部。在该实施例中,每个第一穿孔1201a的每个角部被倒平切角。第一掩模板1200A被用于形成图6中的第一发光层EL1的图案。Referring to FIG. 12A, the
参考图12B,第二掩模板1200B被图案化为包括第二穿孔1201b的阵列,每个第二穿孔1201b包括在所述第一方向D1上彼此相对的两个被倒角的角部和在所述第二方向D2上彼此相对的两个被倒角的角部。在该实施例中,每个第二穿孔1201b的每个角部被倒平切角。第二掩模板1200B被用于形成图6中的第二发光层EL2的图案。Referring to FIG. 12B , the
第一和第二掩模板1200A和1200B在其他方面可以具有与第一和第二掩模板1100A和1100B的那些相同的配置。例如,在各第一穿孔1201a之间提供未穿孔区域1210a和1220a,并且在各第二穿孔1201b之间提供未穿孔区域1210b和1220b。这提供了与上面关于图11A和11B描述的那些相同的优点。The first and
图12C示意性地示出了将图12A和12B中的第一和第二掩模板1200A和1200B层叠且彼此对齐的示意图。FIG. 12C schematically shows a schematic diagram of stacking and aligning the first and
参考图12C,第二掩模板1200B被层叠到第一掩模板1200A之上。各第一和第二穿孔1201a和1201b在第一和第二掩模板1200A和1200B中被分别定位以使得当第一和第二掩模板1200A和1200B层叠且彼此对齐时,第一和第二穿孔1201a和1201b在所述第一方向D1和所述第二方向D2上交替排列且彼此不交叠。这使得能够实现图6中所示的第一和第二发光层EL1和EL2的布置。Referring to FIG. 12C, the
在一些实施例中,各第一和第二穿孔1201a和1201b在第一和第二掩模板1200A和1200B中被分别定位以使得当第一和第二掩模板1200A和1200B层叠且彼此对齐时,每个第一穿孔1201a的几何中心和与该第一穿孔1201a在所述第一方向D1上直接相邻的对应第二穿孔1201b的几何中心位于平行于所述第一方向D1的直线s1上,并且每个第一穿孔1201a的几何中心和与该第一穿孔1201a在所述第二方向D2上直接相邻的对应第二穿孔1201b的几何中心位于平行于所述第二方向D2的直线s2上。In some embodiments, the respective first and second through-
图13示意性地示出了根据本发明实施例的用于在图7的显示面板DP的制造过程中蒸镀有机发光材料的第三掩模板1300的平面图。FIG. 13 schematically shows a plan view of a
参考图13,第三掩模板1300被图案化为包括第三穿孔1301的阵列,每个第三穿孔1301具有圆角多边形的形状。在该实施例中,每个第三穿孔1301具有圆角矩形的形状。第三掩模板1300不被要求具有带有尖角的穿孔,有助于缓解或消除由于刻蚀负载引起的尖角处的较差的刻蚀精度。Referring to FIG. 13 , the
第三掩模板1300被用于形成图7中的第三发光层EL3的图案。为此目的,各第三穿孔1301在第三掩模板1300中被定位以使得当第一和第二掩模板(例如,1100A和1100B)和第三掩模板1300层叠且彼此对齐时,各第三穿孔1301散布在各第一和第二穿孔(例如,图13中用虚线指示的1101a和1101b)之间。这样,当第一、第二和第三发光材料分别通过第一、第二和第三掩模板1100A、1100B和1300被蒸镀到基板上之后,得到如图7所示的第一、第二和第三发光层EL1、EL2和EL3的图案。The
在一些实施例中,第三掩模板1300可以与第一和第二掩模板1200A和1200B相组合地使用以得到由图6中所示的第一和第二发光层EL1和EL2与图7中所示的第三发光层EL3相组合而成的图案。In some embodiments, the
在一些实施例中,每个第三穿孔1301可以具有其他圆角多边形的形状以得到具有对应形状的第三发光层EL3。In some embodiments, each of the third through
虽然前面的讨论包含若干特定的实现细节,但是这些不应解释为对任何发明或者可能要求保护的范围的限制,而应解释为对可能仅限于特定发明的特定实施例的特征的描述。在本说明书中不同的实施例中描述的特定特征也可以在单个实施例中以组合形式实现。与此相反,在单个实施例中描述的不同特征也可以在多个实施例中分别地或者以任何适当的子组合形式实现。例如,第一和第二子像素区域中的一些可以具有关于图3A所描述的配置,而第一和第二子像素区域中的另一些可以具有关于图6所描述的配置。又例如,同一个发光层各角部中的一些可以被倒圆角,而各角部中的另一些可以被倒平切角。类似地,虽然各个操作在附图中被描绘为按照特定的顺序,但是这不应理解为要求这些操作必须以所示的特定顺序或者按顺行次序执行,也不应理解为要求必须执行所有示出的操作以获得期望的结果。While the foregoing discussion contains several specific implementation details, these should not be construed as limitations on the scope of any invention or what may be claimed, but rather as descriptions of features that may be limited to particular embodiments of particular inventions. Certain features that are described in this specification in different embodiments can also be implemented in combination in a single embodiment. Conversely, various features that are described in the context of a single embodiment can also be implemented in multiple embodiments separately or in any suitable subcombination. For example, some of the first and second sub-pixel regions may have the configuration described with respect to FIG. 3A , while others of the first and second sub-pixel regions may have the configuration described with respect to FIG. 6 . For another example, some of the corners of the same light-emitting layer may be rounded, and some of the corners may be chamfered. Similarly, although various operations are depicted in the figures as being in a particular order, this should not be construed as a requirement that the operations be performed in the particular order shown or in a sequential order, nor should it be construed as a requirement that all operations be performed operations shown to obtain the desired result.
鉴于前面的描述并结合阅读附图,对前述本发明的示例性实施例的各种修改和改动对于相关领域的技术人员可以变得清楚明白。任何和所有修改仍将落入本发明的非限制性和示例性实施例的范围内。此外,属于本发明的这些实施例所属领域的技术人员,在得益于前面的描述和相关附图所给出的教导后,将会想到在此描述的本发明的其他实施例。Various modifications and adaptations to the foregoing exemplary embodiments of the invention may become apparent to those skilled in the relevant arts in view of the foregoing description, taken in conjunction with reading the accompanying drawings. Any and all modifications will still fall within the scope of the non-limiting and exemplary embodiments of this invention. Furthermore, other embodiments of the inventions described herein will come to mind to one skilled in the art to which these embodiments of the invention pertain having the benefit of the teachings presented in the foregoing descriptions and the associated drawings.
Claims (20)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910418662.3A CN111969114B (en) | 2019-05-20 | 2019-05-20 | Display panel, method for manufacturing display panel, and mask plate |
US16/981,921 US11532673B2 (en) | 2019-05-20 | 2020-04-17 | Display panel, method of manufacturing display panel, and mask plate |
PCT/CN2020/085367 WO2020233300A1 (en) | 2019-05-20 | 2020-04-17 | Display panel, method of manufacturing display panel, and mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910418662.3A CN111969114B (en) | 2019-05-20 | 2019-05-20 | Display panel, method for manufacturing display panel, and mask plate |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111969114A CN111969114A (en) | 2020-11-20 |
CN111969114B true CN111969114B (en) | 2022-04-12 |
Family
ID=73358150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910418662.3A Active CN111969114B (en) | 2019-05-20 | 2019-05-20 | Display panel, method for manufacturing display panel, and mask plate |
Country Status (3)
Country | Link |
---|---|
US (1) | US11532673B2 (en) |
CN (1) | CN111969114B (en) |
WO (1) | WO2020233300A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111969005B (en) * | 2019-05-20 | 2021-09-17 | 京东方科技集团股份有限公司 | Display panel and method of manufacturing the same |
CN112968135B (en) * | 2021-02-01 | 2024-06-04 | 京东方科技集团股份有限公司 | Display substrate and related device |
CN114122230B (en) * | 2021-11-01 | 2023-08-22 | 深圳市华星光电半导体显示技术有限公司 | Mask plate, display panel and manufacturing method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104124265A (en) * | 2013-04-25 | 2014-10-29 | 三星显示有限公司 | Organic light emitting diode display and mask unit |
CN104466007A (en) * | 2014-12-30 | 2015-03-25 | 京东方科技集团股份有限公司 | Pixel structure, display method of pixel structure and display device |
CN208077981U (en) * | 2018-02-09 | 2018-11-09 | 京东方科技集团股份有限公司 | pixel arrangement structure, display panel, high-precision metal mask plate and display device |
CN109004010A (en) * | 2013-03-11 | 2018-12-14 | 三星显示有限公司 | Organic light-emitting display device |
CN208722880U (en) * | 2018-02-09 | 2019-04-09 | 京东方科技集团股份有限公司 | A kind of pixel arrangement structure, high-precision metal mask plate and display device |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101615332B1 (en) * | 2012-03-06 | 2016-04-26 | 삼성디스플레이 주식회사 | Pixel arrangement structure for organic light emitting display device |
KR102103499B1 (en) * | 2013-10-16 | 2020-04-23 | 삼성디스플레이 주식회사 | Organic light emitting diode display device |
KR102205401B1 (en) * | 2014-01-14 | 2021-01-21 | 삼성디스플레이 주식회사 | Organic luminescence emitting display device |
US11004905B2 (en) * | 2014-09-11 | 2021-05-11 | Boe Technology Group Co., Ltd. | Display panel and display device |
CN104465714B (en) | 2014-12-30 | 2017-04-26 | 京东方科技集团股份有限公司 | Pixel structure, display method of pixel structure and display device |
US20180097043A1 (en) * | 2016-10-05 | 2018-04-05 | Samsung Display Co., Ltd. | Head-mounted display device |
KR102515814B1 (en) * | 2017-05-25 | 2023-03-31 | 삼성디스플레이 주식회사 | Display device |
KR102367247B1 (en) * | 2017-07-04 | 2022-02-25 | 삼성디스플레이 주식회사 | Display device |
KR102448031B1 (en) * | 2017-07-28 | 2022-09-28 | 삼성디스플레이 주식회사 | Sensor-integrated display device |
KR102520710B1 (en) * | 2017-09-05 | 2023-04-12 | 삼성디스플레이 주식회사 | Display device and method of manufacturing the same |
KR102532307B1 (en) * | 2017-11-02 | 2023-05-15 | 삼성디스플레이 주식회사 | Display device |
KR102433274B1 (en) * | 2017-11-28 | 2022-08-18 | 삼성디스플레이 주식회사 | Organic light emitting display device |
CN207966988U (en) | 2018-01-02 | 2018-10-12 | 京东方科技集团股份有限公司 | A kind of pixel arrangement structure, high-precision metal mask plate and display device |
KR102439307B1 (en) * | 2018-01-29 | 2022-09-02 | 삼성디스플레이 주식회사 | Organic light emitting display device and manufacturing method thereof |
CN110137211A (en) * | 2018-02-09 | 2019-08-16 | 京东方科技集团股份有限公司 | A kind of pixel arrangement structure, high-precision metal mask plate and display device |
KR102508724B1 (en) * | 2018-02-14 | 2023-03-14 | 삼성디스플레이 주식회사 | Fingerprint sensing unit and display device including the same |
KR102492199B1 (en) * | 2018-03-09 | 2023-01-26 | 삼성디스플레이 주식회사 | Display device |
WO2019218606A1 (en) * | 2018-05-14 | 2019-11-21 | 昆山国显光电有限公司 | Mask, display device, display panel, and display terminal |
KR102607577B1 (en) * | 2018-11-12 | 2023-11-30 | 삼성디스플레이 주식회사 | Display panel and organic light emitting display device including the same |
US20200357877A1 (en) * | 2019-05-09 | 2020-11-12 | Samsung Display Co., Ltd. | Display device |
-
2019
- 2019-05-20 CN CN201910418662.3A patent/CN111969114B/en active Active
-
2020
- 2020-04-17 US US16/981,921 patent/US11532673B2/en active Active
- 2020-04-17 WO PCT/CN2020/085367 patent/WO2020233300A1/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109004010A (en) * | 2013-03-11 | 2018-12-14 | 三星显示有限公司 | Organic light-emitting display device |
CN104124265A (en) * | 2013-04-25 | 2014-10-29 | 三星显示有限公司 | Organic light emitting diode display and mask unit |
CN104466007A (en) * | 2014-12-30 | 2015-03-25 | 京东方科技集团股份有限公司 | Pixel structure, display method of pixel structure and display device |
CN208077981U (en) * | 2018-02-09 | 2018-11-09 | 京东方科技集团股份有限公司 | pixel arrangement structure, display panel, high-precision metal mask plate and display device |
CN208722880U (en) * | 2018-02-09 | 2019-04-09 | 京东方科技集团股份有限公司 | A kind of pixel arrangement structure, high-precision metal mask plate and display device |
Also Published As
Publication number | Publication date |
---|---|
US11532673B2 (en) | 2022-12-20 |
WO2020233300A1 (en) | 2020-11-26 |
CN111969114A (en) | 2020-11-20 |
US20210273028A1 (en) | 2021-09-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10686018B2 (en) | Display device and manufacturing method thereof | |
US11716877B2 (en) | Organic light-emitting display device and method of manufacturing the same | |
CN107565041B (en) | Organic light-emitting display device and method of manufacturing the same | |
US9825111B2 (en) | Method of forming thin film transistor array substrate | |
CN112534583B (en) | Display substrate, display device and high-precision metal mask | |
CN111969114B (en) | Display panel, method for manufacturing display panel, and mask plate | |
JP5677435B2 (en) | Organic EL display panel and manufacturing method thereof | |
CN111969005B (en) | Display panel and method of manufacturing the same | |
CN102405686B (en) | Organic el display panel and organic el display device equipped with same, and production method for organic el display panel | |
CN110854176B (en) | Array substrate and preparation method thereof | |
TWI527209B (en) | Display device, method of manufacturing the same, electronic device, and method of driving display device | |
CN107086233B (en) | Display substrate, method of manufacturing the same, and display device including the same | |
CN107836041B (en) | Large-area OLED (organic light emitting diode) micro-display and manufacturing method thereof | |
TW201633582A (en) | Thin film transistor array substrate and manufacturing method thereof | |
KR20180003965A (en) | Organic light emitting display device and method for manufacturing the same | |
CN110752220B (en) | Display substrate, preparation method thereof and display panel | |
TWI765788B (en) | Display panel and manufacturing method thereof | |
KR101663743B1 (en) | Organic electroluminescent display device | |
CN115428162B (en) | Display panel and manufacturing method thereof, and display device | |
TW202247452A (en) | Light emitting device | |
TWI803161B (en) | Organic light-emitting diode device and manufacturing method thereof | |
KR101096719B1 (en) | Organic Electroluminescence Display Device And Method For Fabricating The Same | |
KR20140080598A (en) | Organic Light Emitting Diode Display And Method For Manufacturing The Same | |
TWI649734B (en) | Manufacturing method of organic light emitting diode panel and pixels arrangement | |
KR20170119006A (en) | Display panel and method of manufacturing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |