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CN111960379A - A kind of preparation method of biomimetic controllable adsorption - Google Patents

A kind of preparation method of biomimetic controllable adsorption Download PDF

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CN111960379A
CN111960379A CN202010858431.7A CN202010858431A CN111960379A CN 111960379 A CN111960379 A CN 111960379A CN 202010858431 A CN202010858431 A CN 202010858431A CN 111960379 A CN111960379 A CN 111960379A
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wedge
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王伟
谢宗武
刘宏
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Harbin Institute of Technology Shenzhen
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices

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Abstract

一种仿生可控吸附的制备方法,属于微纳工程中仿生微结构制造技术领域,具体方案包括以下步骤:步骤一:金属主模具的制备;步骤二:主模具的硅烷化处理;步骤三:套设框架的组装;步骤四:聚合物的浇筑;步骤五:聚合物表面平整度控制;步骤六:仿生可控吸附的恒温固化与剥离。本发明工艺过程简单,不涉及复杂的化学反应,环保高效,相关工艺参数也可控,制备的主模具经久耐用,能多次重复使用,获得的仿生可控吸附具有明显的可控吸附和动态吸附特性;基于该制备方法,也能灵活改变楔形微结构的特征尺寸(如垂直高度、尖端角以及倾角),这些特征尺寸的修改或者优化对于改善仿生可控吸附的吸附性能是有益的。

Figure 202010858431

A preparation method for biomimetic controllable adsorption belongs to the technical field of biomimetic microstructure manufacturing in micro-nano engineering. The specific scheme includes the following steps: step 1: preparation of a metal master mold; step 2: silanization of the master mold; step 3: Assembling the sleeve; Step 4: pouring the polymer; Step 5: Controlling the surface flatness of the polymer; Step 6: Constant temperature curing and peeling of bionic controllable adsorption. The process of the invention is simple, does not involve complex chemical reactions, is environmentally friendly and efficient, and the relevant process parameters are also controllable. The prepared main mold is durable and can be used repeatedly for many times. Adsorption characteristics: Based on this preparation method, the characteristic dimensions (such as vertical height, tip angle, and inclination angle) of the wedge-shaped microstructure can also be flexibly changed. The modification or optimization of these characteristic dimensions is beneficial for improving the adsorption performance of biomimetic controllable adsorption.

Figure 202010858431

Description

一种仿生可控吸附的制备方法A kind of preparation method of biomimetic controllable adsorption

技术领域technical field

本发明属于微纳工程中仿生微结构制造技术领域,具体涉及一种基于连续倾斜楔形The invention belongs to the technical field of bionic microstructure manufacturing in micro-nano engineering, and in particular relates to a continuous inclined wedge-shaped

微结构阵列的仿生可控吸附的制备方法。Preparation method of biomimetic controllable adsorption of microstructure array.

背景技术Background technique

壁虎脚掌可控吸附系统是当前自然界中已知的最通用、最有效的生物功能吸附系统,其独特的多尺度分层刚毛纤维基于范德华力交互不仅赋予了壁虎脚掌强大的吸附力,而且还赋予了其独特的吸附特性,进而拥有轻易在各种表面快速攀爬的能力。The controllable adsorption system of gecko feet is currently the most versatile and effective biological function adsorption system known in nature. Due to its unique adsorption characteristics, it has the ability to easily and quickly climb on various surfaces.

当前已有许多基于微结构的仿生功能吸附被开发出来,但在这些已有的研究中能有效复现壁虎脚掌可控吸附特性的仿生功能吸附并不多,而恰恰仿生功能吸附的可控性对于其有效应用于机器人攀爬、目标抓持等领域具有重要意义。At present, many biomimetic functional adsorption based on microstructure have been developed, but in these existing studies, there are not many biomimetic functional adsorption that can effectively reproduce the controllable adsorption characteristics of gecko feet, and it is precisely the controllability of bionic functional adsorption. It is of great significance for its effective application in robot climbing, target grasping and other fields.

倾斜的楔形微结构因为与壁虎的刚毛具有极大的相似性已被证明拥有突出的可控吸附特性,其因为可控性而拥有面向空间漂浮目标捕获的潜力也被证实。虽然当前已有少数加工工艺被开发出来用于制备楔形微结构阵列,但其均存在不同程度的问题:双边和双角度光刻工艺只能制备直立楔形微结构,而且其尚要求高精度的曝光对准,工艺耗时长、昂贵、成品率也相对低;两步倾斜曝光工艺虽能制备倾斜的楔形微结构,但其与双边和双角度光刻工艺一样,制备门槛高,工艺也相对复杂,对应的成本也高,而且二者创建的成型模具均不具备好的耐用性;基于传统机械压痕的微加工工艺虽然弥补了光刻工艺存在的工艺复杂,成本高等问题,但其仍面临着成型模具不具备好的耐用性的问题;超精密金刚石飞切方法虽然从一定程度上提高了成型模具的耐用性,但因为飞切工艺的固有特性,实际的楔形微腔体在模具表面是沿圆周径向分布的,因而基于该模具制备的楔形微结构阵列仅能以很小的尺寸去使用,这极大约束了楔形微结构阵列的应用潜力。据此,当前如何高效、保质、批量化地将具有楔形微结构的阵列加工出来仍是亟待解决的一个问题。The inclined wedge-shaped microstructure has been shown to possess outstanding controllable adsorption properties due to its great similarity to gecko bristles, and its potential for space-oriented floating target capture due to its controllability has also been confirmed. Although a few processing techniques have been developed to fabricate wedge-shaped microstructure arrays, they all suffer from varying degrees of problems: bilateral and dual-angle lithography processes can only produce upright wedge-shaped microstructures, and they still require high-precision exposure. Alignment, the process is time-consuming, expensive, and the yield is relatively low; although the two-step oblique exposure process can produce inclined wedge-shaped microstructures, it is the same as the bilateral and dual-angle lithography processes. The preparation threshold is high, and the process is relatively complex. The corresponding cost is also high, and the forming molds created by the two do not have good durability; although the micromachining process based on traditional mechanical indentation makes up for the complex process and high cost of the lithography process, it still faces the problem of high cost. The problem that the forming mold does not have good durability; although the ultra-precision diamond fly-cutting method improves the durability of the forming mold to a certain extent, due to the inherent characteristics of the fly-cutting process, the actual wedge-shaped micro-cavity is along the mold surface. The circumference is radially distributed, so the wedge-shaped microstructure array prepared based on the mold can only be used in a small size, which greatly restricts the application potential of the wedge-shaped microstructure array. Accordingly, how to process arrays with wedge-shaped microstructures efficiently, with high quality, and in batches is still an urgent problem to be solved.

发明内容SUMMARY OF THE INVENTION

本发明的目的是为了解决现有技术中存在的问题,提供了一种仿生可控吸附的制备方法。The purpose of the present invention is to provide a preparation method of bionic controllable adsorption in order to solve the problems existing in the prior art.

本发明的目的是通过以下技术方案实现的:The purpose of this invention is to realize through the following technical solutions:

一种仿生可控吸附的制备方法,包括以下步骤:A preparation method of bionic controllable adsorption, comprising the following steps:

步骤一:采用超精密多步分层刻划策略制备具有连续倾斜楔形腔阵列的主模具;Step 1: Using an ultra-precise multi-step layered scribing strategy to prepare a master mold with a continuous inclined wedge-shaped cavity array;

步骤二:将制备好的主模具进行硅烷化处理;Step 2: silanizing the prepared master mold;

步骤三:在主模具的外周边套设框架;Step 3: Set a frame on the outer periphery of the main mold;

步骤四:将搅拌均匀且脱气后的聚合物浇筑到套设框架后的主模具内并再次做脱气处理;Step 4: pour the polymer that is uniformly stirred and degassed into the main mold after the frame is set and degassed again;

步骤五:在聚合物上铺上一层薄膜,再盖上一块盖板并加上平衡荷载;Step 5: Lay a layer of film on the polymer, then cover with a cover plate and add a balance load;

步骤六:恒温固化聚合物后将其从主模具上剥离得到具备连续倾斜楔形微结构阵列的仿生可控吸附。Step 6: After the polymer is cured at a constant temperature, it is peeled off from the main mold to obtain a biomimetic controllable adsorption with a continuous inclined wedge-shaped microstructure array.

进一步的,步骤一中,所述超精密多步分层刻划策略包括以下步骤:Further, in step 1, the ultra-precise multi-step hierarchical scribing strategy includes the following steps:

步骤1:将模具胚件和V形的刀具装夹在超精密机床上,并完成对刀;Step 1: Clamp the mold blank and the V-shaped tool on the ultra-precision machine tool, and complete the tool setting;

步骤2:所述刀具刻划模具胚件时,刀具与模具胚件的上表面根据楔形腔的期望倾斜角呈相应的倾斜角度,刻划方向与刀具的V形横截面垂直;Step 2: When the tool scribes the mold blank, the upper surface of the tool and the mold blank form a corresponding inclination angle according to the expected inclination angle of the wedge-shaped cavity, and the scribing direction is perpendicular to the V-shaped cross section of the tool;

步骤3:V形刀具的尖端层层刻划累加形成一个连续倾斜的楔形腔;Step 3: The tip of the V-shaped tool is scored layer by layer to form a continuous inclined wedge-shaped cavity;

步骤4:按照楔形腔的设计间距,模具胚件依次递进,从而加工下一个楔形腔,直至完成若干个楔形腔的刻划,得到具有若干个连续倾斜楔形腔阵列的主模具;其中模具胚件依次递进的方向与刀具刻划方向垂直。Step 4: According to the design spacing of the wedge-shaped cavity, the mold blanks are sequentially advanced, so as to process the next wedge-shaped cavity, until the scribing of several wedge-shaped cavities is completed, and a master mold with several continuous inclined wedge-shaped cavity arrays is obtained; The progressive direction of the pieces is perpendicular to the scribing direction of the tool.

进一步的,步骤2中,刀具的中心对称面相对模具胚件的上表面的倾角范围为22.5°-90°,刀具的尖端角度范围为15°-30°。Further, in step 2, the inclination angle of the center symmetry plane of the tool relative to the upper surface of the mold blank is in the range of 22.5°-90°, and the angle of the tip of the tool is in the range of 15°-30°.

进一步的,步骤3中,所述刀具的尖端角与楔形腔的尖端角相同。Further, in step 3, the tip angle of the tool is the same as the tip angle of the wedge-shaped cavity.

进一步的,步骤3中,所述楔形腔的垂直高度为50-150μm。Further, in step 3, the vertical height of the wedge-shaped cavity is 50-150 μm.

进一步的,步骤一中,所述连续倾斜楔形腔阵列包括多个并列设置的长条状的楔形腔,每个所述楔形腔均倾斜设置。Further, in step 1, the continuous inclined wedge-shaped cavity array includes a plurality of elongated wedge-shaped cavities arranged in parallel, and each of the wedge-shaped cavities is arranged obliquely.

进一步的,步骤一中,所述主模具的形状为方形。Further, in step 1, the shape of the main mold is square.

进一步的,步骤四中,所述聚合物为硅橡胶或聚氨酯。Further, in step 4, the polymer is silicone rubber or polyurethane.

进一步的,步骤六中,仿生可控吸附包括基底和设置在基底上的连续倾斜楔形微结构阵列,所述连续倾斜楔形微结构阵列包括多个并列设置的长条状的楔形微结构,每个所述楔形微结构均倾斜设置,所述楔形微结构与楔形腔的腔体形状一致。Further, in step 6, the biomimetic controllable adsorption includes a substrate and a continuous inclined wedge-shaped microstructure array disposed on the substrate, and the continuous inclined wedge-shaped microstructure array includes a plurality of juxtaposed elongated wedge-shaped microstructures, each The wedge-shaped microstructures are all arranged obliquely, and the wedge-shaped microstructures are consistent with the cavity shape of the wedge-shaped cavity.

进一步的,所述框架的高度为主模具的高度和仿生可控吸附的基底厚度之和。Further, the height of the frame is the sum of the height of the main mold and the thickness of the bionic controllable adsorption substrate.

相比于现有技术,本发明具有如下优点:Compared with the prior art, the present invention has the following advantages:

本发明基于提出的超精密多步分层刻划策略制备出具有连续倾斜楔形微腔体阵列的金属主模具,该主模具不仅能够实现多次重复使用,还能够复制出几厘米乃至几十厘米大小的连续倾斜楔形微结构阵列,连续倾斜的楔形微结构阵列使得仿生可控吸附具有明显的可控吸附、动态吸附等突出的壁虎脚掌吸附特性,可控吸附特性能够助力实现对目标表面的无损及无扰吸附抓持;而动态吸附特性能够助力实现在吸附界面滑动过程中对吸附状态的动态调整,从而避免突然性的吸附失效。此外,本发明涉及的整个工艺过程操作简单,不涉及任何复杂的化学反应,环保高效,相关工艺参数也可控,制备的主模具经久耐用,能多次重复使用,获得的仿生可控吸附具有明显的可控吸附和动态吸附特性;基于该制备方法,也能灵活改变楔形微结构的特征尺寸(如垂直高度、尖端角以及倾角),这些特征尺寸的修改或者优化对于改善仿生可控吸附的吸附性能是有益的。该仿生可控吸附有望应用于机器人攀爬、空间目标吸附抓持等领域。Based on the proposed ultra-precise multi-step layered scribing strategy, the present invention prepares a metal master mold with a continuous inclined wedge-shaped microcavity array. The master mold can not only be reused many times, but also replicate several centimeters or even tens of centimeters. The continuous inclined wedge-shaped microstructure array of large and small size, the continuously inclined wedge-shaped microstructure array enables the bionic controllable adsorption to have obvious controllable adsorption, dynamic adsorption and other outstanding adsorption characteristics of gecko feet, and the controllable adsorption characteristics can help achieve non-destructive to the target surface. and undisturbed adsorption and grip; and the dynamic adsorption feature can help realize the dynamic adjustment of the adsorption state during the sliding process of the adsorption interface, thereby avoiding sudden adsorption failure. In addition, the whole process involved in the present invention is simple to operate, does not involve any complex chemical reaction, is environmentally friendly and efficient, and the relevant process parameters are also controllable, the prepared main mold is durable and can be reused many times, and the obtained bionic controllable adsorption has Obvious controllable adsorption and dynamic adsorption characteristics; based on this preparation method, the characteristic dimensions (such as vertical height, tip angle and inclination angle) of the wedge-shaped microstructure can also be flexibly changed. Adsorption properties are beneficial. The bionic controllable adsorption is expected to be applied to fields such as robot climbing, space target adsorption and grasping.

附图说明Description of drawings

图1为基于连续倾斜楔形微结构阵列的仿生可控吸附的吸附原理示意图;其中,A为仿生可控吸附与交互界面间的初始接触状态,B为仿生可控吸附与交互界面间的紧密接触状态;其中,a为正向载荷,b为切向载荷;该仿生可控吸附在正向载荷a的辅助作用下主要通过切向载荷b来激活吸附功能;Figure 1 is a schematic diagram of the adsorption principle of biomimetic controllable adsorption based on a continuous inclined wedge-shaped microstructure array; in which, A is the initial contact state between the biomimetic controllable adsorption and the interactive interface, and B is the close contact between the biomimetic controllable adsorption and the interactive interface state; where a is the positive load, and b is the tangential load; the bionic controllable adsorption mainly activates the adsorption function through the tangential load b under the auxiliary action of the positive load a;

图2为视频捕获的仿生可控吸附的被动吸附过程,包括图1中仿生可控吸附与交互界面间的初始接触状态(c)、中间接触状态(d)和紧密接触状态(e);Figure 2 shows the passive adsorption process of the bionic controllable adsorption captured by the video, including the initial contact state (c), the intermediate contact state (d) and the close contact state (e) between the bionic controllable adsorption and the interactive interface in Figure 1;

图3为超精密机床的运动配置示意图;Figure 3 is a schematic diagram of the motion configuration of an ultra-precision machine tool;

图4为超精密多步分层刻划策略的示意图;图中,C为刀具刻划方向,D为退刀方向,E为刀具回初始位方向,F为刀具的进给方向,G为已刻划的区域,H为模具胚件递进方向;Figure 4 is a schematic diagram of the ultra-precision multi-step layered scribing strategy; in the figure, C is the cutting direction of the tool, D is the retracting direction, E is the direction of the tool returning to the initial position, F is the feeding direction of the tool, and G is the cutting direction. The scribed area, H is the progressive direction of the mold blank;

图5为刻划一个楔形腔时,刀具的进给方向和刻划次数示意图,图中,1~n为刀具刻划次数,I为每层刻划截面对应的刀印,J为刀具的进给方向;Figure 5 is a schematic diagram of the feeding direction and the number of times of the cutting tool when a wedge-shaped cavity is cut. In the figure, 1 to n are the cutting times of the tool, I is the cutting mark corresponding to the cut section of each layer, and J is the feed of the cutting tool. give direction;

图6为具有连续倾斜楔形微腔体阵列的主模具结构示意图;6 is a schematic structural diagram of a master mold having a continuous inclined wedge-shaped microcavity array;

图7为具有连续倾斜楔形微腔体阵列的主模具的扫描电镜图;7 is a scanning electron microscope image of a master mold with a continuous inclined wedge-shaped microcavity array;

图8为仿生可控吸附的浇筑成型工艺示意图;(I)主模具表面硅烷化处理;(Ⅱ)组装主模具、框架和玻璃底板;(Ⅲ)浇筑聚合物并铺上薄膜;(Ⅳ)恒温固化过程,(Ⅴ)剥离聚合物;(Ⅵ)制备的仿生可控吸附。Fig. 8 is a schematic diagram of the casting molding process of bionic controlled adsorption; (I) silanization of the surface of the main mold; (II) assembling the main mold, frame and glass bottom plate; (III) pouring polymer and laying a film; (IV) constant temperature Curing process, (V) exfoliation of the polymer; (VI) biomimetic controllable adsorption prepared.

图9为具有连续倾斜楔形微结构阵列的仿生可控吸附的扫描电镜图;Figure 9 is a scanning electron microscope image of biomimetic controllable adsorption with a continuous inclined wedge-shaped microstructure array;

图10为反应仿生可控吸附可控吸附特性的力空间散点图;K为最大正向吸附=4.048KPa,L为最大切向摩擦=64.39KPa。Fig. 10 is a force space scatter plot reflecting the controllable adsorption characteristics of bionic controllable adsorption; K is the maximum positive adsorption = 4.048KPa, L is the maximum tangential friction = 64.39KPa.

图11为反应仿生可控吸附动态吸附特性的力时间曲线;M为动态摩擦区域;N为切向摩擦;O为预加载;P为水平拖拽;Q为剥离;R为动态吸附区域;S为正向吸附;Fig. 11 is the force-time curve reflecting the dynamic adsorption characteristics of bionic controllable adsorption; M is the dynamic friction area; N is the tangential friction; O is the preload; P is the horizontal drag; Q is the peeling; R is the dynamic adsorption area; S is positive adsorption;

图中,1、主模具,2、框架,3、薄膜,4、盖板,5、平衡荷载,6、仿生可控吸附,7、玻璃基底,8、聚合物,11、楔形腔,01、模具胚件,02、刀具,03、超精密机床,61、基底,62、楔形微结构。In the figure, 1. Main mold, 2. Frame, 3. Film, 4. Cover plate, 5. Balanced load, 6. Bionic controllable adsorption, 7. Glass substrate, 8. Polymer, 11. Wedge-shaped cavity, 01, Mold blanks, 02, tools, 03, ultra-precision machine tools, 61, substrate, 62, wedge-shaped microstructure.

具体实施方式Detailed ways

下面结合附图1-11和具体实施方式对本发明的技术方案作进一步的说明,但并不局限于此,凡是对本发明技术方案进行修改或者等同替换(如采用具有更小或更大尖端角的金刚石刀具、改变楔形微结构的垂直高度/倾斜角等),而不脱离本发明技术方案的范围,均应涵盖在本发明的保护范围中。The technical solution of the present invention will be further described below in conjunction with the accompanying drawings 1-11 and the specific embodiments, but is not limited to this, any modification or equivalent replacement of the technical solution of the present invention (such as adopting a smaller or larger tip angle) diamond cutters, changing the vertical height/inclined angle of the wedge-shaped microstructure, etc.) without departing from the scope of the technical solution of the present invention, should all be included in the protection scope of the present invention.

具体实施方式一Specific implementation one

一种仿生可控吸附的制备方法,包括以下步骤:A preparation method of bionic controllable adsorption, comprising the following steps:

步骤一:采用超精密多步分层刻划策略制备具有连续倾斜楔形腔阵列的主模具1;所述连续倾斜楔形腔阵列包括多个并列设置的长条状的楔形腔11,每个所述楔形腔11均倾斜设置;所述主模具1的形状为方形,优选的材质为黄铜;Step 1: Using an ultra-precise multi-step layered scribing strategy to prepare a master mold 1 with a continuous inclined wedge-shaped cavity array; the continuous inclined wedge-shaped cavity array The wedge-shaped cavities 11 are all inclined; the shape of the main mold 1 is square, and the preferred material is brass;

步骤二:将制备好的主模具1置于充满氟硅烷蒸汽的环境中进行硅烷化处理;Step 2: place the prepared master mold 1 in an environment full of fluorosilane vapor for silanization treatment;

步骤三:在主模具1的外周边套设金属材质的框架2;优选的,所述框架2的材质为铝合金;Step 3: a frame 2 made of metal is sleeved on the outer periphery of the main mold 1; preferably, the material of the frame 2 is aluminum alloy;

步骤四:将搅拌均匀且脱气后的聚合物8浇筑到套设框架2后的主模具1内并再次做脱气处理;优选的,所述聚合物8为硅橡胶或聚氨酯,但并不仅限于此,凡不与主模具材质反应且不与主模具表面产生强粘结的聚合物均适用于本发明;Step 4: The polymer 8 after being stirred evenly and degassed is poured into the main mold 1 after the frame 2 is set and degassed again; preferably, the polymer 8 is silicone rubber or polyurethane, but not only Limited to this, any polymer that does not react with the material of the main mold and does not strongly bond with the surface of the main mold is applicable to the present invention;

步骤五:在聚合物8上铺上一层PET薄膜3,再盖上一块光滑平整的盖板4并加上平衡荷载5;Step 5: Spread a layer of PET film 3 on the polymer 8, then cover with a smooth and flat cover plate 4 and add a balance load 5;

步骤六:恒温固化聚合物8后将其从主模具1上剥离得到具备连续倾斜楔形微结构阵列的仿生可控吸附6;仿生可控吸附6包括基底61和设置在基底61上的连续倾斜楔形微结构阵列,所述连续倾斜楔形微结构阵列包括多个并列设置的长条状的楔形微结构62,每个所述楔形微结构62均倾斜设置,所述楔形微结构62与楔形腔11的腔体形状一致;所述框架2的高度为主模具1的高度和仿生可控吸附6的基底61厚度之和。Step 6: After the polymer 8 is cured at a constant temperature, it is peeled off from the main mold 1 to obtain a bionic controllable adsorption 6 with a continuous inclined wedge-shaped microstructure array; The microstructure array, the continuous inclined wedge-shaped microstructure array includes a plurality of long wedge-shaped microstructures 62 arranged in parallel, each of the wedge-shaped microstructures 62 is arranged obliquely, the wedge-shaped microstructures 62 and the wedge-shaped cavity 11 The shape of the cavity is consistent; the height of the frame 2 is the sum of the height of the main mold 1 and the thickness of the substrate 61 of the bionic controllable adsorption 6 .

进一步的,步骤一中,所述超精密多步分层刻划策略包括以下步骤:Further, in step 1, the ultra-precise multi-step hierarchical scribing strategy includes the following steps:

步骤1:将模具胚件01和V形的金刚石刀具02装夹在超精密机床03上,并完成对刀;Step 1: Clamp the mold blank 01 and the V-shaped diamond tool 02 on the ultra-precision machine tool 03, and complete the tool setting;

步骤2:所述金刚石刀具02刻划模具胚件01时,金刚石刀具02与模具胚件01的上表面根据楔形腔11的期望倾斜角呈相应的倾斜角度,刻划方向与金刚石刀具02的V形横截面垂直;具体沿超精密机床03坐标系的Y轴方向,所述金刚石刀具02的中心对称面与模具胚件01上表面之间的夹角范围为22.5°-90°,优选45-90°;金刚石刀具02的尖端角度范围为15°-30°,优选的,金刚石刀具02的中心对称面与模具胚件01上表面之间的夹角为60°,金刚石刀具02的尖端角度为20°。Step 2: When the diamond tool 02 scribes the mold blank 01, the upper surface of the diamond tool 02 and the mold blank 01 are at a corresponding inclination angle according to the expected inclination angle of the wedge-shaped cavity 11, and the scribing direction is the same as the V of the diamond tool 02. The shape cross section is vertical; specifically along the Y-axis direction of the ultra-precision machine tool 03 coordinate system, the angle range between the center symmetry plane of the diamond tool 02 and the upper surface of the mold blank 01 is 22.5°-90°, preferably 45- 90°; the range of the tip angle of the diamond tool 02 is 15°-30°, preferably, the angle between the center symmetry plane of the diamond tool 02 and the upper surface of the die blank 01 is 60°, and the tip angle of the diamond tool 02 is 20°.

步骤3:V型金刚石刀具02的尖端层层刻划累加形成一个长条状的连续倾斜的楔形腔11;所述金刚石刀具02的尖端角与楔形腔11的尖端角相同;所述楔形腔11的垂直高度为50-150μm,优选的,所述楔形腔11的垂直高度为100μm;Step 3: The tip of the V-shaped diamond tool 02 is scribed and accumulated layer by layer to form a long continuous inclined wedge-shaped cavity 11; the tip angle of the diamond tool 02 is the same as the tip angle of the wedge-shaped cavity 11; the wedge-shaped cavity 11 The vertical height of the wedge-shaped cavity 11 is 50-150 μm, preferably, the vertical height of the wedge-shaped cavity 11 is 100 μm;

步骤4:按照楔形腔11的设计间距,模具胚件01依次递进,进一步加工下一个楔形腔11,直至完成若干个楔形腔11的刻划,得到具有若干个连续倾斜楔形腔阵列的主模具1;其中模具胚件01依次递进的方向与金刚石刀具02刻划的方向垂直,具体为沿超精密机床03坐标系的X轴方向。Step 4: According to the design spacing of the wedge-shaped cavities 11, the mold blanks 01 are successively advanced, and the next wedge-shaped cavity 11 is further processed until the scribing of several wedge-shaped cavities 11 is completed, and a master mold with several continuous inclined wedge-shaped cavity arrays is obtained. 1; wherein the progressive direction of the mold blanks 01 is perpendicular to the direction of the diamond tool 02 scribing, specifically along the X-axis direction of the ultra-precision machine tool 03 coordinate system.

实施例1Example 1

一种仿生可控吸附的制备方法,包括以下两大步骤:A preparation method for biomimetic controllable adsorption comprises the following two major steps:

第一步,基于超精密多步分层刻划策略制备具有连续倾斜楔形腔阵列的金属主模具1。首先,基于铣削工艺获得模具的方形半成品件,即模具胚件01,模具胚件01的长×宽尺寸由超精密机床03的线性运动极限、所需仿生可控吸附6的宏观尺寸以及尖点V形金刚石刀具02的寿命共同折衷决定。然后,准备超精密机床03(至少具备如图3所示意的X、Y和Z三个线性运动轴),将模具胚件01和金刚石刀具02按期望位姿装夹,并完成对刀。最后,超精密多步分层刻划开始,如图4所示,刻划时,金刚石刀具02的V形截面与待成型的楔形腔11截面平行,而刻划方向与金刚石刀具02的V形截面垂直;一个成形的楔形腔11通过尖点V形金刚石刀具02层层刻划累加而成,层层刻划过程中金刚石刀具的实际进给轨迹沿楔形腔11的下表面,而每层刻划只有金刚石刀具02的部分截面参与刻划,如图5所示;当设计的楔形腔11深度达到了,即一个楔形腔11加工完成,模具胚件01便按楔形腔11的设计间距逐步递进一次,进而加工下一个楔形腔11,模具胚件01逐步递进的方向与金刚石刀具02刻划方向垂直。如此循环,最终成形的具有连续倾斜楔形腔阵列的金属主模具1示意图如图6所示,而实际成形的楔形腔11的正面和顶端扫描电镜图如图7所示。In the first step, a metal master mold 1 with a continuous inclined wedge-shaped cavity array was fabricated based on an ultra-precise multi-step hierarchical scribing strategy. First, a square semi-finished part of the mold is obtained based on the milling process, that is, the mold blank 01. The length × width of the mold blank 01 is determined by the linear motion limit of the ultra-precision machine tool 03, the macro size of the required bionic controllable adsorption 6, and the sharp point The life of the V-shaped diamond tool 02 is determined by a common trade-off. Then, prepare an ultra-precision machine tool 03 (with at least three linear motion axes X, Y and Z as shown in FIG. 3 ), clamp the mold blank 01 and the diamond tool 02 according to the desired posture, and complete the tool setting. Finally, the ultra-precision multi-step layered scribing begins. As shown in Figure 4, during scribing, the V-shaped section of the diamond tool 02 is parallel to the section of the wedge-shaped cavity 11 to be formed, and the scribing direction is the same as the V-shaped section of the diamond tool 02. The cross section is vertical; a formed wedge-shaped cavity 11 is formed by scribing and accumulating layer by layer by the sharp-point V-shaped diamond tool 02. Only part of the cross-section of the diamond tool 02 is involved in the scribing, as shown in Figure 5; when the designed wedge-shaped cavity 11 depth is reached, that is, one wedge-shaped cavity 11 is processed, the mold blank 01 will gradually increase according to the design spacing of the wedge-shaped cavity 11. One more time, and then the next wedge-shaped cavity 11 is processed, and the progressive direction of the mold blank 01 is perpendicular to the scribing direction of the diamond tool 02 . In this cycle, the schematic diagram of the finally formed metal master mold 1 with a continuous inclined wedge-shaped cavity array is shown in FIG. 6 , and the front and top SEM images of the actually formed wedge-shaped cavity 11 are shown in FIG.

第二步,基于浇筑成型工艺制备具有连续倾斜楔形微结构阵列的仿生可控吸附,如图8所示。首先,将制备好的金属主模具1至于充满氟硅烷蒸汽的环境中进行硅烷化处理,处理时间为16-24h即可。然后,将控制仿生可控吸附基底61厚度的金属框架2与金属主模具1组装,并用玻璃基底7进行封底;接着,将搅拌均匀且脱气后的聚合物8浇筑到组装后的金属主模具1内并再次做脱气处理,脱气处理时间一般为10-15min。其次,将事先准备好的PET薄膜3平铺于聚合物8之上,并随即盖上一块光滑平整的玻璃盖板4并加上平衡荷载5。再接着,将整个组件至于恒温箱内使聚合物8固化。最后,将固化后的聚合物8从金属主模具1内顺序剥离即可得到具有连续倾斜楔形微结构阵列的仿生可控吸附6。如图9所示为仿生可控吸附的扫描电镜图,图10和图11分别展现了本发明涉及的仿生可控吸附所具备的可控吸附特性和动态吸附特性。In the second step, biomimetic controllable adsorption with a continuous inclined wedge-shaped microstructure array was prepared based on the casting molding process, as shown in Figure 8. First, the prepared metal master mold 1 is subjected to silanization treatment in an environment filled with fluorosilane vapor, and the treatment time is 16-24 hours. Then, the metal frame 2 that controls the thickness of the bionic controllable adsorption substrate 61 is assembled with the metal master mold 1, and the glass substrate 7 is used to cover the back; then, the polymer 8 after uniform stirring and degassing is poured into the assembled metal master mold 1 and do degassing again, the degassing time is generally 10-15min. Next, lay the PET film 3 prepared in advance on the polymer 8 , and then cover with a smooth and flat glass cover plate 4 and add a balance load 5 . Next, the polymer 8 is cured by placing the entire assembly in an incubator. Finally, the cured polymer 8 is sequentially peeled off from the metal master mold 1 to obtain a biomimetic controllable adsorption 6 with a continuous inclined wedge-shaped microstructure array. FIG. 9 is a scanning electron microscope image of the biomimetic controllable adsorption, and FIGS. 10 and 11 respectively show the controllable adsorption characteristics and the dynamic adsorption characteristics of the biomimetic controllable adsorption involved in the present invention.

如图1和图2所示,一种基于连续倾斜楔形微结构阵列的仿生可控吸附的吸附原理为:As shown in Figures 1 and 2, the adsorption principle of a biomimetic controllable adsorption based on a continuous inclined wedge-shaped microstructure array is as follows:

仿生可控吸附6的吸附过程实质为在外部正向及切向载荷作用下的被动吸附过程:当没有施加外部载荷时,仿生可控吸附6的连续倾斜楔形微结构保持自然状态,其仅在自身重力的作用下与待交互界面间形成尖端点接触,因为没有足够的接触面积来产生有效吸附,此时仿生可控吸附6处于无吸附状态;当施加正向和切向外部载荷时,仿生可控吸附6的连续倾斜楔形微结构顺应外部载荷作用而逐渐弯曲,从而最终与待交互界面间形成紧密的面接触,因为大的接触面积产生了有效的吸附力,此时仿生可控吸附6处于有效吸附状态。从初始的点接触到最终的面接触,楔形微结构的变形逐渐增大,最终形成紧密接触,实现强附着力;楔形微结构的变形越大,所形成的界面相互作用区域越大,所获得的粘结能力也越强。此外,在仿生可控吸附6能够实现的最大正向吸附力范围内,其正向吸附力能够通过外部切向载荷(切向力/切向位移)来调控,即外部切向载荷越大对应形成的正向吸附力也越大。The adsorption process of biomimetic controllable adsorption 6 is essentially a passive adsorption process under the action of external positive and tangential loads: when no external load is applied, the continuous inclined wedge-shaped microstructure of biomimetic controllable adsorption 6 remains in a natural state, which is only in the natural state. Under the action of its own gravity, a point contact is formed between the interface to be interacted with, because there is not enough contact area to generate effective adsorption, and the bionic controllable adsorption 6 is in a non-adsorption state at this time; when positive and tangential external loads are applied, the bionic The continuous inclined wedge-shaped microstructure of the controllable adsorption 6 gradually bends in response to the external load, so as to finally form a close surface contact with the interface to be interacted, because the large contact area generates an effective adsorption force, at this time, the bionic controllable adsorption 6 in an effective adsorption state. From the initial point contact to the final surface contact, the deformation of the wedge-shaped microstructure gradually increases, and finally a close contact is formed to achieve strong adhesion; the greater the deformation of the wedge-shaped microstructure, the larger the formed interface interaction area, and the obtained The bonding ability is also stronger. In addition, within the range of the maximum positive adsorption force that can be achieved by the bionic controllable adsorption 6, its positive adsorption force can be regulated by the external tangential load (tangential force/tangential displacement), that is, the larger the external tangential load, the corresponding The positive adsorption force formed is also greater.

Claims (10)

1. A preparation method of bionic controllable adsorption is characterized by comprising the following steps:
the method comprises the following steps: preparing a main die (1) with a continuous inclined wedge-shaped cavity array by adopting an ultra-precise multi-step layered scribing strategy;
step two: performing silanization treatment on the prepared main die (1);
step three: a frame (2) is sleeved on the outer periphery of the main die (1);
step four: pouring the polymer which is uniformly stirred and degassed into the main mould (1) after the frame (2) is sleeved and degassing again;
step five: laying a layer of film (3) on the polymer, covering a cover plate (4) and adding a balance load (5);
step six: and (3) after the polymer is solidified at constant temperature, peeling the polymer from the main mold (1) to obtain the bionic controllable adsorption (6) with the continuous inclined wedge-shaped microstructure array.
2. The preparation method of biomimetic controllable adsorption according to claim 1, characterized in that: in the first step, the ultra-precise multi-step layered scribing strategy comprises the following steps:
step 1: clamping a die blank (01) and a V-shaped cutter (02) on an ultra-precision machine tool (03), and finishing tool setting;
step 2: when the cutter (02) scores the die blank (01), the cutter (02) and the upper surface of the die blank (01) are in corresponding inclination angles according to the expected inclination angle of the wedge-shaped cavity, and the scoring direction is vertical to the V-shaped cross section of the cutter (02);
and step 3: the tip of the V-shaped cutter (02) is scribed and accumulated layer by layer to form a continuously inclined wedge-shaped cavity (11);
and 4, step 4: according to the design interval of the wedge-shaped cavities (11), sequentially advancing the mould blank (01) so as to process the next wedge-shaped cavity (11) until the scribing of a plurality of wedge-shaped cavities (11) is completed, and obtaining a main mould (1) with a plurality of continuous inclined wedge-shaped cavity arrays; wherein the progressive direction of the die blanks (01) is vertical to the scribing direction of the cutter (02).
3. The preparation method of biomimetic controllable adsorption according to claim 1, characterized in that: in the first step, the continuous inclined wedge-shaped cavity array comprises a plurality of strip-shaped wedge-shaped cavities (11) which are arranged in parallel, and each wedge-shaped cavity (11) is arranged in an inclined manner.
4. The preparation method of biomimetic controllable adsorption according to claim 1, characterized in that: in the first step, the main die (1) is square.
5. The preparation method of biomimetic controllable adsorption according to claim 2, characterized in that: in the step 2, the inclination angle range of the central symmetry plane of the cutter (02) relative to the upper surface of the die blank (01) is 22.5-90 degrees, and the angle range of the tip of the cutter (02) is 15-30 degrees.
6. The preparation method of biomimetic controllable adsorption according to claim 2, characterized in that: in step 3, the tip angle of the cutter (02) is the same as the tip angle of the wedge-shaped cavity (11).
7. The preparation method of biomimetic controllable adsorption according to claim 2, characterized in that: in step 3, the vertical height of the wedge-shaped cavity (11) is 50-150 μm.
8. The preparation method of biomimetic controllable adsorption according to claim 1, characterized in that: in the fourth step, the polymer is silicon rubber or polyurethane.
9. The preparation method of biomimetic controllable adsorption according to claim 1, characterized in that: in the sixth step, the bionic controllable adsorption device (6) comprises a substrate (61) and a continuous inclined wedge-shaped microstructure array arranged on the substrate (61), the continuous inclined wedge-shaped microstructure array comprises a plurality of strip-shaped wedge-shaped microstructures (62) which are arranged in parallel, each wedge-shaped microstructure (62) is arranged in an inclined mode, and the shape of each wedge-shaped microstructure is consistent with that of a cavity of the wedge-shaped cavity (11).
10. The method for preparing biomimetic controllable adsorption according to claim 9, characterized in that: the height of the frame (2) is the sum of the height of the main die (1) and the thickness of the substrate (61) of the bionic controllable adsorption device (6).
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