CN111934193B - 一种ld芯片无机封装结构及其制备方法 - Google Patents
一种ld芯片无机封装结构及其制备方法 Download PDFInfo
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- CN111934193B CN111934193B CN202011093259.7A CN202011093259A CN111934193B CN 111934193 B CN111934193 B CN 111934193B CN 202011093259 A CN202011093259 A CN 202011093259A CN 111934193 B CN111934193 B CN 111934193B
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- chip
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- ceramic substrate
- optical fiber
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims abstract description 150
- 239000002184 metal Substances 0.000 claims abstract description 150
- 239000000919 ceramic Substances 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 239000013307 optical fiber Substances 0.000 claims abstract description 48
- 230000017525 heat dissipation Effects 0.000 claims abstract description 39
- 238000009434 installation Methods 0.000 claims abstract description 13
- 230000000694 effects Effects 0.000 claims abstract description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims description 25
- 238000005476 soldering Methods 0.000 claims description 23
- 230000002093 peripheral effect Effects 0.000 claims description 17
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 238000003466 welding Methods 0.000 claims description 14
- WSNMPAVSZJSIMT-UHFFFAOYSA-N COc1c(C)c2COC(=O)c2c(O)c1CC(O)C1(C)CCC(=O)O1 Chemical compound COc1c(C)c2COC(=O)c2c(O)c1CC(O)C1(C)CCC(=O)O1 WSNMPAVSZJSIMT-UHFFFAOYSA-N 0.000 claims description 10
- 238000009713 electroplating Methods 0.000 claims description 8
- 239000003292 glue Substances 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 229910000679 solder Inorganic materials 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 4
- 238000011161 development Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000010583 slow cooling Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000005538 encapsulation Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011093259.7A CN111934193B (zh) | 2020-10-14 | 2020-10-14 | 一种ld芯片无机封装结构及其制备方法 |
Applications Claiming Priority (1)
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CN202011093259.7A CN111934193B (zh) | 2020-10-14 | 2020-10-14 | 一种ld芯片无机封装结构及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN111934193A CN111934193A (zh) | 2020-11-13 |
CN111934193B true CN111934193B (zh) | 2021-01-05 |
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Family Applications (1)
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CN202011093259.7A Active CN111934193B (zh) | 2020-10-14 | 2020-10-14 | 一种ld芯片无机封装结构及其制备方法 |
Country Status (1)
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CN (1) | CN111934193B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112688159A (zh) * | 2021-03-19 | 2021-04-20 | 武汉仟目激光有限公司 | 基于双波长的半导体激光器芯片封装 |
CN114156389B (zh) * | 2022-02-10 | 2022-05-31 | 元旭半导体科技股份有限公司 | 一种紫外灯珠封装结构及其制备方法 |
CN115459048B (zh) * | 2022-09-24 | 2024-01-02 | 深圳市佑明光电有限公司 | 一种ld芯片无机封装结构 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107166179A (zh) * | 2017-06-14 | 2017-09-15 | 杨毅 | 灯具 |
CN108183389A (zh) * | 2018-01-30 | 2018-06-19 | 广东省半导体产业技术研究院 | 一种激光二极管与激光二极管封装方法 |
WO2019061371A1 (zh) * | 2017-09-30 | 2019-04-04 | 厦门市三安光电科技有限公司 | 一种激光器封装结构 |
CN109600876A (zh) * | 2017-09-27 | 2019-04-09 | 日月光半导体制造股份有限公司 | 光学封装结构、光学模块及其制造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6998691B2 (en) * | 2003-09-19 | 2006-02-14 | Agilent Technologies, Inc. | Optoelectronic device packaging with hermetically sealed cavity and integrated optical element |
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2020
- 2020-10-14 CN CN202011093259.7A patent/CN111934193B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107166179A (zh) * | 2017-06-14 | 2017-09-15 | 杨毅 | 灯具 |
CN109600876A (zh) * | 2017-09-27 | 2019-04-09 | 日月光半导体制造股份有限公司 | 光学封装结构、光学模块及其制造方法 |
WO2019061371A1 (zh) * | 2017-09-30 | 2019-04-04 | 厦门市三安光电科技有限公司 | 一种激光器封装结构 |
CN108183389A (zh) * | 2018-01-30 | 2018-06-19 | 广东省半导体产业技术研究院 | 一种激光二极管与激光二极管封装方法 |
Non-Patent Citations (1)
Title |
---|
电子封装陶瓷基板;程浩 等;《现代技术陶瓷》;20190831;第40卷(第4期);第265-292页,图13 * |
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Address after: 261000 west area of the third photoelectric Park, north of Yuqing street, west of Yinfeng Road, high tech Zone, Weifang City, Shandong Province Patentee after: Yuanxu Semiconductor Technology Co.,Ltd. Address before: 261000 west area of the third photoelectric Park, north of Yuqing street, west of Yinfeng Road, high tech Zone, Weifang City, Shandong Province Patentee before: SHANDONG NOVOSHINE OPTOELECTRONICS Co.,Ltd. |
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Effective date of registration: 20220810 Address after: Room 801, 8th Floor, Building 1, Jin'an Bridge, No. 68, Shijingshan Road, Shijingshan District, Beijing 100043 Patentee after: Star Vision Technology (Beijing) Co., Ltd. Address before: 261000 west area of the third photoelectric Park, north of Yuqing street, west of Yinfeng Road, high tech Zone, Weifang City, Shandong Province Patentee before: Yuanxu Semiconductor Technology Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder |
Address after: Room 801, 8th Floor, Building 1, Jin'an Bridge, No. 68, Shijingshan Road, Shijingshan District, Beijing 100043 Patentee after: Yuanxu Semiconductor Technology (Beijing) Co.,Ltd. Address before: Room 801, 8th Floor, Building 1, Jin'an Bridge, No. 68, Shijingshan Road, Shijingshan District, Beijing 100043 Patentee before: Star Vision Technology (Beijing) Co.,Ltd. |
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Address after: Room 801, 8th Floor, Building 1, Jin'an Bridge, No. 68, Shijingshan Road, Shijingshan District, Beijing 100043 Patentee after: Beijing Xingcan Zhixian Technology Co.,Ltd. Country or region after: China Address before: Room 801, 8th Floor, Building 1, Jin'an Bridge, No. 68, Shijingshan Road, Shijingshan District, Beijing 100043 Patentee before: Yuanxu Semiconductor Technology (Beijing) Co.,Ltd. Country or region before: China |
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