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CN111897173A - 2×2 Optical Switch and N×N Optical Switch Array with Low Loss and Low Random Phase Error - Google Patents

2×2 Optical Switch and N×N Optical Switch Array with Low Loss and Low Random Phase Error Download PDF

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CN111897173A
CN111897173A CN202010767515.XA CN202010767515A CN111897173A CN 111897173 A CN111897173 A CN 111897173A CN 202010767515 A CN202010767515 A CN 202010767515A CN 111897173 A CN111897173 A CN 111897173A
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waveguide
graded
bending
optical switch
waveguides
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戴道锌
刘大建
宋立甲
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Zhejiang University ZJU
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31Digital deflection, i.e. optical switching
    • G02F1/313Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3136Digital deflection, i.e. optical switching in an optical waveguide structure of interferometric switch type
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31Digital deflection, i.e. optical switching
    • G02F1/313Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3137Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
    • G02F1/3138Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions the optical waveguides being made of semiconducting materials

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明公开了一种低损耗低随机相位误差的2×2光开关及N×N光开关阵列。第一第二输入波导经第一功分器后分别与第一第二前弯曲渐变波导连接,两组干涉臂中前弯曲渐变波导经前端渐变波导、相移波导、后端渐变波导后和后弯曲渐变波导依次连接,第一第二后弯曲渐变波导经第二功分器与第一第二输出波导相连。本发明通过采用绝热耦合或弯曲定向耦合的形式获得低损耗超宽带的功分器,通过引入宽波导降低了干涉臂出现的随机相位误差,并加入弯曲渐变波导和渐变波导进一步降低了干涉臂出现的随机相位误差,最终实现了低损耗低随机相位误差的2×2光开关及N×N光开关阵列,具有结构简单、工艺简单、性能优越等优点。

Figure 202010767515

The invention discloses a 2×2 optical switch and an N×N optical switch array with low loss and low random phase error. The first and second input waveguides are respectively connected to the first and second front-bending graded waveguides after passing through the first power divider, and the front-bending graded waveguides in the two groups of interference arms pass through the front-end graded waveguide, the phase-shifting waveguide, the rear-end graded waveguide and the rear. The curved graded waveguides are connected in sequence, and the first and second rear curved graded waveguides are connected to the first and second output waveguides through the second power divider. The invention obtains a low-loss ultra-broadband power splitter by adopting adiabatic coupling or bending directional coupling, reduces random phase errors of interference arms by introducing wide waveguides, and further reduces the occurrence of interference arms by adding curved graded waveguides and graded waveguides Finally, a 2×2 optical switch and an N×N optical switch array with low loss and low random phase error are realized, which have the advantages of simple structure, simple process and superior performance.

Figure 202010767515

Description

低损耗低随机相位误差的2×2光开关及N×N光开关阵列2×2 Optical Switch and N×N Optical Switch Array with Low Loss and Low Random Phase Error

技术领域technical field

本发明属于集成光电子器件领域,具体涉及一种低损耗低随机相位误差的2×2光开关及N×N光开关阵列。The invention belongs to the field of integrated optoelectronic devices, and in particular relates to a 2×2 optical switch and an N×N optical switch array with low loss and low random phase error.

背景技术Background technique

随着大数据、智慧物联网和云计算等的迅猛发展,超大容量光网络的需求日益增长,同时对下一代光网络的灵活性和智能化也提出了更高的要求。2×2光开关是光互联和光路由的核心部件,可自由选择集成光芯片的信号传输通道,对于提高光网络的灵活性、可扩展性有着重要的作用。在众多集成平台中,硅集成器件具有尺寸小、功耗低、兼容CMOS工艺等突出优点。因此硅基光开关器件受到了极大关注,其中以2×2马赫-泽德干涉仪(MZI)光开关最具代表性。With the rapid development of big data, smart Internet of Things and cloud computing, the demand for ultra-large-capacity optical networks is increasing, and higher requirements are also placed on the flexibility and intelligence of the next-generation optical networks. The 2×2 optical switch is the core component of optical interconnection and optical routing. It can freely select the signal transmission channel of the integrated optical chip, which plays an important role in improving the flexibility and scalability of the optical network. Among many integrated platforms, silicon integrated devices have outstanding advantages such as small size, low power consumption, and compatibility with CMOS technology. Therefore, silicon-based optical switching devices have received great attention, among which 2×2 Mach-Zehnder interferometer (MZI) optical switches are the most representative.

目前,基于MZI的2×2光开关单元已经实现了较高性能。但是,在数据中心、可编程逻辑光路等实际应用场景中,往往需要集成大量2×2光开关并通过开关拓扑结构实现大端口数的N×N光开关阵列。此时,作为单个2×2光开关单元器件必须具备极低插入损耗等高性能。同时,由于硅光波导具有极高折射率差,其单模波导往往仅有450nm左右。然而,实际加工制造中不可避免地会引入了一定随机尺寸偏差。因此,2×2MZI光开关中两个相移器往往存在较大随机相位差,致使其工作零点的随机偏移。为了解决这一难题,往往需要引入额外的功率监测器并对每个光开关单元逐一进行非常繁琐的偏压校准等工作,这使得N×N光开关阵列的发展在功耗、结构及测试复杂度等方面面临极大挑战。At present, MZI-based 2×2 optical switch units have achieved high performance. However, in practical application scenarios such as data centers and programmable logic optical circuits, it is often necessary to integrate a large number of 2×2 optical switches and realize an N×N optical switch array with a large number of ports through the switch topology. At this time, as a single 2×2 optical switch unit device, it must have high performance such as extremely low insertion loss. At the same time, due to the extremely high refractive index difference of silicon optical waveguides, its single-mode waveguides are often only about 450 nm. However, a certain random dimensional deviation will inevitably be introduced in actual manufacturing. Therefore, there is often a large random phase difference between the two phase shifters in the 2×2MZI optical switch, resulting in a random shift of the zero point of its operation. In order to solve this problem, it is often necessary to introduce an additional power monitor and perform very tedious work such as bias voltage calibration for each optical switch unit one by one, which makes the development of N×N optical switch arrays complicated in power consumption, structure and testing. face great challenges.

发明内容SUMMARY OF THE INVENTION

为了解决背景技术中存在的问题,本发明提出了一种低损耗低随机相位误差的2×2光开关及N×N光开关阵列。In order to solve the problems existing in the background art, the present invention proposes a 2×2 optical switch and an N×N optical switch array with low loss and low random phase error.

本发明采用的技术方案是:The technical scheme adopted in the present invention is:

一、一种低损耗低随机相位误差的2×2光开关:1. A 2×2 optical switch with low loss and low random phase error:

结构包括第一输入波导、第二输入波导、第一功分器、第一前弯曲渐变波导、第二前弯曲渐变波导、第一前端渐变波导、第二前端渐变波导、第一相移波导、第二相移波导、第一后端渐变波导、第二后端渐变波导、第一后弯曲渐变波导、第二后弯曲渐变波导、第二功分器、第一输出波导和第二输出波导;第一输入波导、第二输入波导分别和第一功分器的两个输入端连接,第一功分器的两个输出端后分别与第一前弯曲渐变波导、第二前弯曲渐变波导一端连接,第一前弯曲渐变波导另一端经第一前端渐变波导和第一相移波导一端连接,第一相移波导另一端经第一后端渐变波导和第一后弯曲渐变波导一端连接;第二前弯曲渐变波导另一端经第二前端渐变波导和第二相移波导的一端连接,第二相移波导另一端经第二后端渐变波导和第二后弯曲渐变波导一端连接;第一后弯曲渐变波导和第二后弯曲渐变波导的另一端连接到第二功分器的两个输入端,第二功分器的两个输出端分别与第一输出波导、第二输出波导相连;所述的第一前弯曲渐变波导、第二前弯曲渐变波导、第一后弯曲渐变波导和第二后弯曲渐变波导均为宽度渐变的弯曲渐变结构,弯曲渐变波导在靠近功分器一端的宽度与功分器输出端波导的宽度相同,弯曲渐变波导在靠近相移波导一端的宽度大于自身在靠近功分器一端的宽度;所述的相移波导为宽波导,宽度大于功分器输出端波导的宽度。The structure includes a first input waveguide, a second input waveguide, a first power divider, a first front-bending graded waveguide, a second front-bending graded waveguide, a first front-end graded waveguide, a second front-end graded waveguide, a first phase-shifted waveguide, a second phase-shifted waveguide, a first back-end graded waveguide, a second back-end graded waveguide, a first post-bend graded waveguide, a second post-bend graded waveguide, a second power splitter, a first output waveguide, and a second output waveguide; The first input waveguide and the second input waveguide are respectively connected to the two input ends of the first power splitter, and the two output ends of the first power splitter are respectively connected to one end of the first front bending graded waveguide and the second front bending graded waveguide. connection, the other end of the first front-curved graded waveguide is connected to one end of the first phase-shifted waveguide via the first front-end graded waveguide, and the other end of the first phase-shifted waveguide is connected to one end of the first back-curved graded waveguide via the first rear-end graded waveguide; The other end of the two front-bending graded waveguides is connected to one end of the second phase-shifting waveguide through the second front-end graded waveguide, and the other end of the second phase-shifting waveguide is connected to one end of the second rear-bending graded waveguide through the second rear-end graded waveguide; The other ends of the curved graded waveguide and the second post-curved graded waveguide are connected to the two input ends of the second power divider, and the two output ends of the second power divider are respectively connected to the first output waveguide and the second output waveguide; The first front-bending graded waveguide, the second front-bending graded waveguide, the first rear-bending graded waveguide, and the second rear-bending graded waveguide are all bending graded structures with a graded width. The width of the waveguide at the output end of the power splitter is the same, and the width of the curved graded waveguide at the end close to the phase-shifted waveguide is greater than the width of itself at the end close to the power divider; the phase-shifted waveguide is a wide waveguide, and the width is greater than that of the waveguide at the output end of the power divider width.

所述的第一相移区和第二相移区均是等同于相移波导的宽波导的相移结构,采用基于热光效应或电光效应的位相调控。The first phase shift region and the second phase shift region are both phase shift structures of wide waveguides equivalent to phase shift waveguides, and adopt phase regulation based on thermo-optic effect or electro-optic effect.

所述的第一功分器和第二功分器采用但不限于绝热渐变结构或弯曲定向耦合结构。The first power divider and the second power divider adopt but are not limited to an adiabatic gradient structure or a curved directional coupling structure.

所述的第一前弯曲渐变波导、第二前弯曲渐变波导、第一后弯曲渐变波导和第二后弯曲渐变波导采用但不限于基于欧拉曲线型或S型圆弧的弯曲渐变结构。The first front-bending graded waveguide, the second front-bending graded waveguide, the first rear-bending graded waveguide, and the second back-bending graded waveguide adopt, but are not limited to, a bend-graded structure based on an Euler curve or an S-shaped arc.

所述的第一前端渐变波导、第二前端渐变波导、第一后端渐变波导和第二后端渐变波导采用线性渐变结构或非线性渐变结构。The first front-end tapered waveguide, the second front-end tapered waveguide, the first back-end tapered waveguide and the second back-end tapered waveguide adopt a linear tapered structure or a nonlinear tapered structure.

二、一种N×N光开关阵列:2. An N×N optical switch array:

所述N×N光开关阵列包括至少四个级联的如权利要求1~权利要求5任一所述的2×2光开关。The N×N optical switch array includes at least four cascaded 2×2 optical switches according to any one of claims 1 to 5 .

相邻前后级的所述2×2光开关通过直波导和交叉波导连接。The 2×2 optical switches of adjacent front and rear stages are connected by straight waveguides and crossed waveguides.

以两个光开关一组,将四个光开关分为两组,多个光开关组之间依次串接。A group of two optical switches is used to divide the four optical switches into two groups, and multiple optical switch groups are connected in series in sequence.

以两个光开关一组,将四个光开关分为两组,前一组光开关中两个光开关的各自其中一个输出波导分别和后一组光开关中两个光开关的各自其中一个输入波导连接,前一组光开关中两个光开关的各自另一个输出波导分别连接到交叉波导一侧的两端,后一组光开关中两个光开关的各自另一个输入波导分别连接到交叉波导另一侧的两端。A group of two optical switches is used to divide the four optical switches into two groups. One of the output waveguides of the two optical switches in the former group of optical switches and one of the two optical switches in the latter group of optical switches are respectively. The input waveguides are connected, the other output waveguides of the two optical switches in the former group of optical switches are respectively connected to two ends of one side of the crossed waveguide, and the other input waveguides of the two optical switches in the latter group of optical switches are respectively connected to Cross the ends of the other side of the waveguide.

所述的直波导和交叉波导采用单模波导。The straight waveguides and the crossed waveguides are single-mode waveguides.

本发明的有益效果是:The beneficial effects of the present invention are:

本发明通过在相移区引入宽波导设计,并通过弯曲渐变波导及渐变波导与功分器输入端或输出端波导相连,显著降低了2×2光开关相移区随机相位误差,几乎消除了其工作零点偏差,避免了传统2×2光开关所需的逐一校准。不仅大大简化了N×N光开关阵列架构,显著降低了N×N光开关阵列测试的复杂度,而且也避免了2×2光开关器件工作零点校准所带来的能耗。The invention significantly reduces the random phase error in the phase shift region of the 2×2 optical switch by introducing a wide waveguide design in the phase shift region, and connecting the input end or the output end waveguide of the power divider through the curved gradient waveguide and the gradient waveguide, and almost eliminates the Its working zero offset avoids the one-by-one calibration required by traditional 2×2 optical switches. It not only greatly simplifies the N×N optical switch array structure, but also significantly reduces the complexity of N×N optical switch array testing, but also avoids the energy consumption caused by the zero-point calibration of the 2×2 optical switch device.

本发明通过采用弯曲定向耦合器或绝热渐变耦合器,实现了具有超低损耗、超大工作带宽的功分器,进而大大降低了单个2×2光开关器件的损耗,同时还具有大工作带宽。The invention realizes a power divider with ultra-low loss and ultra-large working bandwidth by adopting a curved directional coupler or adiabatic gradient coupler, thereby greatly reducing the loss of a single 2×2 optical switch device, and also having a large working bandwidth.

本发明基于上述的低损耗低随机相位误差的2×2光开关,采用特定或通用拓扑结构可实现大端口数N×N光开关阵列,无需对各开关单元逐一进行复杂的工作零点校准环节,也可避免传统N×N光开关阵列通常所需的额外的功率监测器。Based on the above-mentioned 2×2 optical switch with low loss and low random phase error, the present invention can realize a large number of ports N×N optical switch array by adopting a specific or general topology structure, and it is not necessary to perform complicated work zero point calibration for each switch unit one by one. The additional power monitors typically required for conventional NxN optical switch arrays can also be avoided.

本发明可用标准平面集成光波导工艺制作,工艺简便、成本低、损耗小、消光比高,与CMOS工艺兼容,具有大规模生产潜力。The invention can be fabricated by a standard plane integrated optical waveguide process, and has the advantages of simple process, low cost, low loss, high extinction ratio, compatibility with CMOS process, and large-scale production potential.

综合来说,本发明通过采用低随机相位误差的相移区波导及低损耗功分器,实现了具有低损耗低随机相位误差的2×2光开关及N×N光开关阵列,具有结构简单、工艺简单、性能优越等优点。To sum up, the present invention realizes a 2×2 optical switch and an N×N optical switch array with low loss and low random phase error by using a phase-shift region waveguide with low random phase error and a low-loss power divider, and has a simple structure. , simple process, superior performance and so on.

附图说明Description of drawings

图1是本发明的2×2光开关整体示意图。FIG. 1 is an overall schematic diagram of a 2×2 optical switch of the present invention.

图2是本发明可采用的功分器结构示意图,其中图2(a)是基于绝热渐变结构的功分器,图2(b)是基于弯曲波导耦合的功分器。Fig. 2 is a schematic structural diagram of a power splitter that can be used in the present invention, wherein Fig. 2(a) is a power splitter based on adiabatic gradient structure, and Fig. 2(b) is a power splitter based on curved waveguide coupling.

图3是本发明可采用的基于欧拉曲线的弯曲渐变波导示意图。FIG. 3 is a schematic diagram of a bend graded waveguide based on an Euler curve that can be used in the present invention.

图4是本发明可采用的渐变波导示意图,其中图4(a)是线性渐变波导,图4(b)是非线性渐变波导。Fig. 4 is a schematic diagram of a graded waveguide that can be used in the present invention, wherein Fig. 4(a) is a linearly graded waveguide, and Fig. 4(b) is a nonlinear graded waveguide.

图5是本发明的一种N×N光开关阵列示意图。FIG. 5 is a schematic diagram of an N×N optical switch array of the present invention.

图6是实施例基于弯曲定向耦合器的功分器的仿真结果图。6 is a graph of simulation results of a power splitter based on a curved directional coupler according to an embodiment.

图7是实施例基于欧拉曲线的弯曲渐变波导的仿真结果图。FIG. 7 is a simulation result diagram of the bending graded waveguide based on the Euler curve according to the embodiment.

图中:11为第一输入波导,12为第二输入波导,2为第一功分器,31为第一前弯曲渐变波导,32为第二前弯曲渐变波导,41为第一前端渐变波导,42为第二前端渐变波导,51为第一相移波导,52为第二相移波导,61为第一后端渐变波导,62为第二后端渐变波导,71为第一后弯曲渐变波导,72为第二后弯曲渐变波导,8为第二功分器,91为第一输出波导,92为第二输出波导。In the figure: 11 is the first input waveguide, 12 is the second input waveguide, 2 is the first power divider, 31 is the first front-bending graded waveguide, 32 is the second front-bending graded waveguide, and 41 is the first front-end graded waveguide , 42 is the second front-end graded waveguide, 51 is the first phase-shifted waveguide, 52 is the second phase-shifted waveguide, 61 is the first rear-end graded waveguide, 62 is the second rear-end graded waveguide, and 71 is the first back-bend graded waveguide Waveguide, 72 is the second post-bending graded waveguide, 8 is the second power splitter, 91 is the first output waveguide, and 92 is the second output waveguide.

具体实施方式Detailed ways

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below with reference to the accompanying drawings and embodiments.

如图1所示,具体实施包括第一输入波导11、第二输入波导12、第一功分器2、第一前弯曲渐变波导31、第二前弯曲渐变波导32、第一前端渐变波导41、第二前端渐变波导42、第一相移波导51、第二相移波导52、第一后端渐变波导61、第二后端渐变波导62、第一后弯曲渐变波导71、第二后弯曲渐变波导72、第二功分器8、第一输出波导91和第二输出波导92;第一输入波导11、第二输入波导12分别和第一功分器2的两个输入端连接,第一功分器2的两个输出端后分别与第一前弯曲渐变波导31、第二前弯曲渐变波导32一端连接,第一前弯曲渐变波导31另一端经第一前端渐变波导41和第一相移波导51一端连接,第一相移波导51另一端经第一后端渐变波导61和第一后弯曲渐变波导71一端连接;第二前弯曲渐变波导32另一端经第二前端渐变波导42和第二相移波导52的一端连接,第二相移波导52另一端经第二后端渐变波导62和第二后弯曲渐变波导72一端连接;第一后弯曲渐变波导71和第二后弯曲渐变波导72的另一端连接到第二功分器8的两个输入端,第二功分器8的两个输出端分别与第一输出波导91、第二输出波导92相连;第一前弯曲渐变波导31、第二前弯曲渐变波导32、第一后弯曲渐变波导71和第二后弯曲渐变波导72均为宽度渐变的弯曲渐变结构,每个弯曲渐变波导在靠近功分器2/8一端的宽度小于自身靠近相移波导51/52一端的宽度,相移波导51/52的宽度大于弯曲渐变波导31/32/71/72在靠近功分器2/8一端的宽度的两倍以上。As shown in FIG. 1 , the specific implementation includes a first input waveguide 11 , a second input waveguide 12 , a first power divider 2 , a first front-bending graded waveguide 31 , a second front-bending graded waveguide 32 , and a first front-end graded waveguide 41 . , the second front-end graded waveguide 42, the first phase-shifted waveguide 51, the second phase-shifted waveguide 52, the first back-end graded waveguide 61, the second back-end graded waveguide 62, the first back-bending graded waveguide 71, the second back-bending The graded waveguide 72 , the second power divider 8 , the first output waveguide 91 and the second output waveguide 92 ; the first input waveguide 11 and the second input waveguide 12 are respectively connected to the two input ends of the first power divider 2 . The two output ends of a power divider 2 are respectively connected to one end of the first front-bending graded waveguide 31 and the second front-bending graded waveguide 32, and the other end of the first front-bending graded waveguide 31 passes through the first front-end graded waveguide 41 and the first One end of the phase-shifting waveguide 51 is connected, and the other end of the first phase-shifting waveguide 51 is connected through the first rear-end graded waveguide 61 and one end of the first back-bending graded waveguide 71 ; the other end of the second front-bending graded waveguide 32 is connected through the second front-end graded waveguide 42 is connected to one end of the second phase-shift waveguide 52, and the other end of the second phase-shift waveguide 52 is connected to one end of the second rear-end graded waveguide 62 and one end of the second post-bending graded waveguide 72; the first post-bending graded waveguide 71 and the second post-bend graded waveguide 71 The other end of the graded waveguide 72 is connected to the two input ends of the second power divider 8, and the two output ends of the second power divider 8 are respectively connected to the first output waveguide 91 and the second output waveguide 92; the first front bend The graded waveguide 31 , the second front curved graded waveguide 32 , the first rear curved graded waveguide 71 and the second rear curved graded waveguide 72 are all curved graded structures with graded widths, and each curved graded waveguide is located at one end close to 2/8 of the power divider The width of the phase shift waveguide 51/52 is smaller than that of the end of the phase shift waveguide 51/52, and the width of the phase shift waveguide 51/52 is more than twice the width of the curved graded waveguide 31/32/71/72 at the end close to the power divider 2/8.

主要由第一前弯曲渐变波导31、第一前端渐变波导41、第一相移波导51、第一后端渐变波导61、第一后弯曲渐变波导71构成了第一个干涉臂,主要由第二前弯曲渐变波导32、第二前端渐变波导42、第二相移波导52、第二后端渐变波导62、第二后弯曲渐变波导72构成了第二个干涉臂。The first interference arm is mainly composed of the first front-bending graded waveguide 31 , the first front-end graded waveguide 41 , the first phase-shifting waveguide 51 , the first rear-end graded waveguide 61 , and the first back-bending graded waveguide 71 . The two front-bending graded waveguides 32 , the second front-end graded waveguide 42 , the second phase-shifting waveguide 52 , the second rear-end graded waveguide 62 , and the second rear-bending graded waveguide 72 constitute the second interference arm.

具体实施中,第一功分器2和第二功分器8可采用但不限于绝热渐变结构或弯曲定向耦合结构。In specific implementation, the first power divider 2 and the second power divider 8 may adopt but are not limited to an adiabatic gradient structure or a curved directional coupling structure.

第一前弯曲渐变波导31、第二前弯曲渐变波导32、第一后弯曲渐变波导71和第二后弯曲渐变波导72采用但不限于基于欧拉曲线型的弯曲渐变结构。The first front bend graded waveguide 31 , the second front bend graded waveguide 32 , the first back bend graded waveguide 71 and the second back bend graded waveguide 72 adopt but are not limited to a bend graded structure based on an Euler curve type.

第一前端渐变波导41、第二前端渐变波导42、第一后端渐变波导61和第二后端渐变波导62采用但不限于线性渐变结构或非线性渐变结构。The first front-end graded waveguide 41 , the second front-end graded waveguide 42 , the first back-end graded waveguide 61 and the second back-end graded waveguide 62 adopt but are not limited to linearly graded structures or non-linearly graded structures.

第一相移波导51和第二相移波导52均是宽波导的相移结构,采用但不限于基于热光效应或电光效应的位相调控。Both the first phase-shift waveguide 51 and the second phase-shift waveguide 52 are phase-shift structures of wide waveguides, and adopt, but are not limited to, phase regulation based on thermo-optic effect or electro-optic effect.

本发明的工作过程如下:通过热光效应或电光效应,能控制两条干涉臂的相位差;当两条干涉臂的相位差为0时,即2×2光开关处于“关”状态时,从第一输入波导11进入的光将从第二输出波导92输出,从第二输入波导12进入的光将从第一输出波导91输出;而当两条干涉臂的相位差为π时,即2×2光开关处于“开”状态时,从第一输入波导11进入的光将从第一输出波导91输出,从第二输入波导12进入的光将从第二输出波导92输出,从而实现2×2光开关的功能。The working process of the present invention is as follows: the phase difference of the two interference arms can be controlled by the thermo-optic effect or the electro-optic effect; when the phase difference of the two interference arms is 0, that is, when the 2×2 optical switch is in the “off” state, The light entering from the first input waveguide 11 will be output from the second output waveguide 92, and the light entering from the second input waveguide 12 will be output from the first output waveguide 91; and when the phase difference between the two interference arms is π, that is When the 2×2 optical switch is in the "on" state, the light entering from the first input waveguide 11 will be output from the first output waveguide 91, and the light entering from the second input waveguide 12 will be output from the second output waveguide 92, thereby realizing 2×2 optical switch function.

如图2所示,第一功分器2和第二功分器8均采用大带宽低损耗的绝热渐变耦合器(如图2(a)所示)或弯曲定向耦合器(如图2(b)所示)。As shown in FIG. 2 , the first power divider 2 and the second power divider 8 both use adiabatic gradient couplers with large bandwidth and low loss (as shown in FIG. 2( a )) or curved directional couplers (as shown in FIG. 2 ( b) shown).

如图3所示,弯曲渐变波导采用基于欧拉曲线的波导结构,并设置了宽度渐变,利用欧拉曲线结合曲率、宽度渐变的特性,减小波导弯曲损耗,同时增大波导宽度,进一步降低因窄波导所导致的随机相位误差。As shown in Figure 3, the curved gradient waveguide adopts a waveguide structure based on the Euler curve, and sets the width gradient. The Euler curve combines the characteristics of curvature and width gradient to reduce the bending loss of the waveguide, while increasing the waveguide width to further reduce the Random phase errors due to narrow waveguides.

如图4所示,渐变波导可以采用线性渐变波导(如图4(a)所示)或非线性渐变波导(如图4(b)所示),其中非线性渐变波导可采用函数y=x2优化长度与损耗,x表示平行于波导传输的方向,y表示垂直于波导传输的方向。As shown in Figure 4, the graded waveguide can be a linear graded waveguide (as shown in Figure 4(a)) or a nonlinear graded waveguide (as shown in Figure 4(b)), where the nonlinear graded waveguide can use the function y=x 2 Optimize the length and loss, x represents the direction of transmission parallel to the waveguide, and y represents the direction of transmission perpendicular to the waveguide.

如图5所示,是基于上述的低损耗低随机相位误差2×2光开关单元构成的4×4光开关阵列(N=4),图中展示了采用Benes拓扑结构的4×4光开关阵列;针对不同应用场景,采用不同的拓扑结构,通过级联更多的光开光单元,即可获得更多端口数的N×N光开关阵列。As shown in Figure 5, it is a 4×4 optical switch array (N=4) composed of the above-mentioned low-loss and low-random phase error 2×2 optical switch units. The figure shows the 4×4 optical switch using the Benes topology. Arrays; for different application scenarios, different topologies are used, and N×N optical switch arrays with more ports can be obtained by cascading more optical switch units.

4×4光开关阵列包括六个2×2光开关,以两个2×2光开关一组,将六个2×2光开关分为两组,多个2×2光开关组之间依次串接。前一组2×2光开关中两个2×2光开关的各自其中一个输出波导分别和后一组2×2光开关中两个2×2光开关的各自其中一个输入波导连接,前一组2×2光开关中两个2×2光开关的各自另一个输出波导分别连接到交叉波导一侧的两端,后一组2×2光开关中两个2×2光开关的各自另一个输入波导分别连接到交叉波导另一侧的两端。The 4×4 optical switch array includes six 2×2 optical switches, and the six 2×2 optical switches are divided into two groups in a group of two 2×2 optical switches, and the multiple 2×2 optical switch groups are arranged in sequence. concatenate. One of the respective output waveguides of the two 2×2 optical switches in the former group of 2×2 optical switches is respectively connected with one of the respective input waveguides of the two 2×2 optical switches in the latter group of 2×2 optical switches. The other output waveguides of the two 2×2 optical switches in the group of 2×2 optical switches are respectively connected to two ends of one side of the cross waveguide, and the other output waveguides of the two 2×2 optical switches in the latter group of 2×2 optical switches are respectively connected to An input waveguide is connected to both ends on the other side of the crossed waveguide, respectively.

如图5所示,具体地,相邻四个2×2光开关之间连接方式如下:As shown in Figure 5, specifically, the connection between four adjacent 2×2 optical switches is as follows:

以两个2×2光开关一组,将四个2×2光开关分为两组,前一组2×2光开关的第一个2×2光开关的第一输出波导91经直波导和后一组2×2光开关的第一个2×2光开关的第一输入波导11连接,前一组2×2光开关的第二个2×2光开关的第二输出波导92经直波导和后一组2×2光开关的第二个2×2光开关的第二输入波导12连接,前一组2×2光开关的第一个2×2光开关的第二输出波导92和前一组2×2光开关的第二个2×2光开关的第一输出波导91分别连接到交叉波导一侧的两端,后一组2×2光开关的第一个2×2光开关的第二输入波导12和后一组2×2光开关的第二个2×2光开关的第一输入波导11分别连接到交叉波导另一侧的两端。A group of two 2×2 optical switches is used to divide the four 2×2 optical switches into two groups. The first output waveguide 91 of the first 2×2 optical switch of the former group of 2×2 optical switches is guided by a straight It is connected with the first input waveguide 11 of the first 2×2 optical switch of the latter group of 2×2 optical switches, and the second output waveguide 92 of the second 2×2 optical switch of the former group of 2×2 optical switches is The straight waveguide is connected to the second input waveguide 12 of the second 2×2 optical switch of the latter group of 2×2 optical switches, and the second output waveguide of the first 2×2 optical switch of the former group of 2×2 optical switches 92 and the first output waveguide 91 of the second 2×2 optical switch of the former group of 2×2 optical switches are respectively connected to two ends of one side of the cross waveguide, and the first 2×2 optical switch of the latter group of 2×2 optical switches are respectively connected The second input waveguide 12 of the 2 optical switch and the first input waveguide 11 of the second 2×2 optical switch of the latter group of 2×2 optical switches are respectively connected to two ends of the other side of the cross waveguide.

本发明具体实施例如下:Specific embodiments of the present invention are as follows:

选用基于硅绝缘体(SOI)材料的硅纳米线光波导:其芯层是硅材料,厚度为220nm、折射率为3.4744;其下/上包层材料均为SiO2,下包层SiO2厚度为2μm、上包层SiO2厚度为1μm、折射率为1.4404。The silicon nanowire optical waveguide based on silicon on insulator (SOI) material is selected: the core layer is silicon material, the thickness is 220nm, and the refractive index is 3.4744 ; 2 μm, the upper cladding SiO 2 thickness is 1 μm, and the refractive index is 1.4404.

对于如图2(b)所示的弯曲波导定向耦合器,其相关参数为:内侧、外侧的两条弯曲波导的宽度均为450nm,两波导的间距为200nm,内侧波导的弯曲半径为58μm,弯曲的耦合角度为21°。For the curved waveguide directional coupler shown in Figure 2(b), the relevant parameters are: the width of the two curved waveguides on the inner side and the outer side are both 450nm, the spacing between the two waveguides is 200nm, and the bending radius of the inner waveguide is 58μm, The coupling angle of the bend is 21°.

对于如图3所示的欧拉弯曲渐变波导,其相关参数为:最窄、最宽的波导宽度分别为450nm和850nm,基于欧拉曲线的弯曲波导的最大弯曲半径为25μm,最小弯曲半径为20μm。For the Euler curved graded waveguide as shown in Figure 3, the relevant parameters are: the narrowest and widest waveguide widths are 450 nm and 850 nm, respectively, the maximum bending radius of the Euler curve-based curved waveguide is 25 μm, and the minimum bending radius is 20μm.

经三维时域有限差分方法对器件的弯曲波导定向耦合器和欧拉弯曲渐变波导进行了仿真验证。图6(a)是对左侧一端输入的光在右侧交叉端和直通端输出的光谱响应,可见在1500-1600nm范围内弯曲波导定向耦合器的分光比均约为50%:50%。同时,耦合器损耗也仅0.0005左右,如图6(b)所示。因此,本发明的所采用的功分器具有低插损大带宽的特点。图7是对如图3所示的欧拉弯曲渐变波导,左侧输入的光,在右侧输出的频谱响应。可见基于欧拉曲线的弯曲渐变波导可以保证在低损耗的情况下实现宽度渐变,不激发出高阶模。The device's curved waveguide directional coupler and Euler curved graded waveguide are simulated and verified by three-dimensional finite-difference time-domain method. Figure 6(a) is the spectral response of the light input at the left end at the right cross end and the straight end. It can be seen that in the range of 1500-1600 nm, the splitting ratio of the curved waveguide directional coupler is about 50%:50%. At the same time, the coupler loss is only about 0.0005, as shown in Figure 6(b). Therefore, the power divider used in the present invention has the characteristics of low insertion loss and large bandwidth. Fig. 7 is the spectral response of light input on the left side and output on the right side for the Euler bending graded waveguide shown in Fig. 3 . It can be seen that the curved graded waveguide based on the Euler curve can ensure that the width gradient can be achieved in the case of low loss, and high-order modes are not excited.

由此,本发明通过采用绝热耦合或弯曲定向耦合的形式获得低损耗超宽带的功分器,通过引入宽多模波导降低了干涉臂出现的随机相位误差,并加入弯曲渐变波导和渐变波导进一步降低了干涉臂出现的随机相位误差,最终实现了低损耗低随机相位误差的2×2光开关N×N光开关阵列2×2光开关及N×N光开关阵列,具有结构简单、工艺简单、性能优越等优点。Therefore, the present invention obtains a low-loss ultra-broadband power divider in the form of adiabatic coupling or bending directional coupling, reduces the random phase error of the interference arm by introducing a wide multi-mode waveguide, and adds a curved graded waveguide and a graded waveguide to further The random phase error of the interference arm is reduced, and the 2×2 optical switch N×N optical switch array 2×2 optical switch and the N×N optical switch array with low loss and low random phase error are finally realized, which has the advantages of simple structure and simple process. , superior performance and so on.

上述实施例用来解释说明本发明,而不是对本发明进行限制,在本发明的精神和权利要求的保护范围内,对本发明作出的任何修改和改变,都落入本发明的保护范围。The above-mentioned embodiments are used to explain the present invention, rather than limit the present invention. Within the spirit of the present invention and the protection scope of the claims, any modifications and changes made to the present invention all fall into the protection scope of the present invention.

Claims (9)

1.一种低损耗低随机相位误差的2×2光开关,其特征在于:包括第一输入波导(11)、第二输入波导(12)、第一功分器(2)、第一前弯曲渐变波导(31)、第二前弯曲渐变波导(32)、第一前端渐变波导(41)、第二前端渐变波导(42)、第一相移波导(51)、第二相移波导(52)、第一后端渐变波导(61)、第二后端渐变波导(62)、第一后弯曲渐变波导(71)、第二后弯曲渐变波导(72)、第二功分器(8)、第一输出波导(91)和第二输出波导(92);第一输入波导(11)、第二输入波导(12)分别和第一功分器(2)的两个输入端连接,第一功分器(2)的两个输出端后分别与第一前弯曲渐变波导(31)、第二前弯曲渐变波导(32)一端连接,第一前弯曲渐变波导(31)另一端经第一前端渐变波导(41)和第一相移波导(51)一端连接,第一相移波导(51)另一端经第一后端渐变波导(61)和第一后弯曲渐变波导(71)一端连接;第二前弯曲渐变波导(32)另一端经第二前端渐变波导(42)和第二相移波导(52)的一端连接,第二相移波导(52)另一端经第二后端渐变波导(62)和第二后弯曲渐变波导(72)一端连接;第一后弯曲渐变波导(71)和第二后弯曲渐变波导(72)的另一端连接到第二功分器(8)的两个输入端,第二功分器(8)的两个输出端分别与第一输出波导(91)、第二输出波导(92)相连;所述的第一前弯曲渐变波导(31)、第二前弯曲渐变波导(32)、第一后弯曲渐变波导(71)和第二后弯曲渐变波导(72)均为宽度渐变的弯曲渐变结构,弯曲渐变波导在靠近功分器(2、8)一端的宽度与功分器(2、8)输出端波导的宽度相同,弯曲渐变波导在靠近相移波导(51、52)一端的宽度大于自身在靠近功分器(2、8)一端的宽度;所述的相移波导(51、52)为宽波导,宽度大于功分器(2、8)输出端波导的宽度。1. A 2×2 optical switch with low loss and low random phase error, characterized in that it comprises a first input waveguide (11), a second input waveguide (12), a first power divider (2), a first front A curved graded waveguide (31), a second front curved graded waveguide (32), a first front-end graded waveguide (41), a second front-end graded waveguide (42), a first phase-shifted waveguide (51), a second phase-shifted waveguide ( 52), a first rear-end graded waveguide (61), a second rear-end graded waveguide (62), a first post-curved graded waveguide (71), a second post-curved graded waveguide (72), and a second power divider (8) ), a first output waveguide (91) and a second output waveguide (92); the first input waveguide (11) and the second input waveguide (12) are respectively connected to the two input ends of the first power divider (2), The two output ends of the first power divider (2) are respectively connected to one end of the first front bending graded waveguide (31) and the second front bending graded waveguide (32), and the other end of the first front bending graded waveguide (31) is One end of the first front-end graded waveguide (41) is connected to the first phase-shifted waveguide (51), and the other end of the first phase-shifted waveguide (51) passes through the first rear-end graded waveguide (61) and the first back-bending graded waveguide (71) One end is connected; the other end of the second front-curved graded waveguide (32) is connected to one end of the second phase-shifted waveguide (52) through the second front-end graded waveguide (42), and the other end of the second phase-shifted waveguide (52) is connected through the second rear One end of the end graded waveguide (62) and the second post-curved graded waveguide (72) are connected at one end; the other ends of the first post-curved graded waveguide (71) and the second post-curved graded waveguide (72) are connected to the second power divider (8) ), and the two output ends of the second power divider (8) are respectively connected to the first output waveguide (91) and the second output waveguide (92); the first forward bending graded waveguide (31) ), the second front bending graded waveguide (32), the first back bending graded waveguide (71) and the second back bending graded waveguide (72) are all bending graded structures with a graded width, and the bending graded waveguide is close to the power divider (2). , 8) The width of one end is the same as the width of the waveguide at the output end of the power divider (2, 8), and the width of the curved graded waveguide at one end near the phase-shift waveguide (51, 52) is greater than that at the end near the power divider (2, 8) The width of one end; the phase-shift waveguides (51, 52) are wide waveguides, and the width is greater than the width of the waveguide at the output end of the power divider (2, 8). 2.根据权利要求1所述的一种低损耗低随机相位误差的2×2光开关,其特征在于:所述的第一相移区(51)和第二相移区(52)均是宽波导的相移结构,采用基于热光效应或电光效应的位相调控。2 . The 2×2 optical switch with low loss and low random phase error according to claim 1 , wherein the first phase shift region ( 51 ) and the second phase shift region ( 52 ) are both The phase-shift structure of the broad waveguide adopts the phase control based on the thermo-optic effect or the electro-optic effect. 3.根据权利要求1所述的一种低损耗低随机相位误差的2×2光开关,其特征在于:所述的第一功分器(2)和第二功分器(8)采用但不限于绝热渐变结构或弯曲定向耦合结构。3. A 2×2 optical switch with low loss and low random phase error according to claim 1, characterized in that: the first power divider (2) and the second power divider (8) adopt but Not limited to adiabatic gradient structures or curved directional coupling structures. 4.根据权利要求1所述的一种低损耗低随机相位误差的2×2光开关,其特征在于:所述的第一前弯曲渐变波导(31)、第二前弯曲渐变波导(32)、第一后弯曲渐变波导(71)和第二后弯曲渐变波导(72)采用但不限于基于欧拉曲线型或S型圆弧的弯曲渐变结构。4. The 2×2 optical switch with low loss and low random phase error according to claim 1, characterized in that: the first front bending graded waveguide (31) and the second front bending graded waveguide (32) , The first post-bending graded waveguide (71) and the second post-bending graded waveguide (72) adopt, but are not limited to, a bending graded structure based on an Euler curve or an S-shaped arc. 5.根据权利要求1所述的一种低损耗低随机相位误差的2×2光开关,其特征在于:所述的第一前端渐变波导(41)、第二前端渐变波导(42)、第一后端渐变波导(61)和第二后端渐变波导(62)采用线性渐变结构或非线性渐变结构。5. The 2×2 optical switch with low loss and low random phase error according to claim 1, characterized in that: the first front-end tapered waveguide (41), the second front-end tapered waveguide (42), the first front-end tapered waveguide (42), the A back-end graded waveguide (61) and a second back-end graded waveguide (62) adopt a linear gradient structure or a non-linear gradient structure. 6.一种N×N光开关阵列,其特征在于:6. An N×N optical switch array, characterized in that: 所述N×N光开关阵列包括至少四个级联的如权利要求1~权利要求5任一所述的2×2光开关。The N×N optical switch array includes at least four cascaded 2×2 optical switches according to any one of claims 1 to 5 . 7.根据权利要求6所述的一种N×N光开关阵列,其特征在于:7. An N×N optical switch array according to claim 6, wherein: 相邻前后级的所述2×2光开关通过直波导和交叉波导连接。The 2×2 optical switches of adjacent front and rear stages are connected by straight waveguides and crossed waveguides. 8.根据权利要求6所述的一种N×N光开关阵列,其特征在于:8. An N×N optical switch array according to claim 6, characterized in that: 以两个光开关一组,将四个光开关分为两组,多个光开关组之间依次串接。A group of two optical switches is used to divide the four optical switches into two groups, and multiple optical switch groups are connected in series in sequence. 9.根据权利要求6所述的一种光开关阵列,其特征在于:以两个光开关一组,将四个光开关分为两组,前一组光开关中两个光开关的各自其中一个输出波导分别和后一组光开关中两个光开关的各自其中一个输入波导连接,前一组光开关中两个光开关的各自另一个输出波导分别连接到交叉波导一侧的两端,后一组光开关中两个光开关的各自另一个输入波导分别连接到交叉波导另一侧的两端。9 . The optical switch array according to claim 6 , wherein the four optical switches are divided into two groups by using a group of two optical switches, and each of the two optical switches in the former group of optical switches is among the two groups. 10 . An output waveguide is respectively connected with one of the input waveguides of the two optical switches in the latter group of optical switches, and the other output waveguides of the two optical switches in the former group of optical switches are respectively connected to two ends of one side of the cross waveguide, The other input waveguides of the two optical switches in the latter group of optical switches are respectively connected to two ends of the other side of the crossed waveguides.
CN202010767515.XA 2020-08-03 2020-08-03 2×2 Optical Switch and N×N Optical Switch Array with Low Loss and Low Random Phase Error Pending CN111897173A (en)

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