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CN111897164B - Liquid crystal type radial polarized light converter and preparation method thereof - Google Patents

Liquid crystal type radial polarized light converter and preparation method thereof Download PDF

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Publication number
CN111897164B
CN111897164B CN202010929373.2A CN202010929373A CN111897164B CN 111897164 B CN111897164 B CN 111897164B CN 202010929373 A CN202010929373 A CN 202010929373A CN 111897164 B CN111897164 B CN 111897164B
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liquid crystal
layer
substrate
cofferdam
patterned
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CN111897164A (en
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徐苗
薛莹莹
陈翠芬
陆红波
邱龙臻
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Hefei University of Technology
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133707Structures for producing distorted electric fields, e.g. bumps, protrusions, recesses, slits in pixel electrodes
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528Polarisers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G02F1/133723Polyimide, polyamide-imide
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133753Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention provides a liquid crystal type radial polarized light converter and a preparation method thereof, wherein the converter comprises a first substrate and a second substrate which are arranged in parallel and at intervals; the patterning cofferdam layer is arranged on the surface of the first substrate facing the second substrate and provided with a circular cofferdam hole; the liquid crystal parallel alignment layer is arranged on the surface of the second substrate close to the first substrate; the liquid crystal layer is formed in a preset gap between the patterned cofferdam layer and the liquid crystal parallel arrangement alignment layer and the circular cofferdam hole, wherein liquid crystal molecules are radially distributed in the circular cofferdam hole, the liquid crystal molecules are parallelly arranged on the surface of the liquid crystal parallel arrangement alignment layer, and the liquid crystal molecules are twisted and radially arranged between the patterned cofferdam layer and the liquid crystal parallel arrangement alignment layer. The liquid crystal type radial polarized light converter can convert linear polarized light passing through the converter into radial polarized light, has simple structure, convenient operation and application and simple and easy preparation process, and can realize array production.

Description

液晶型径向偏振光转换器及其制备方法Liquid crystal type radially polarized light converter and preparation method thereof

技术领域technical field

本发明涉及液晶光电子技术领域,特别是涉及液晶型径向偏振光转换器及其制备方法。The invention relates to the technical field of liquid crystal optoelectronics, in particular to a liquid crystal type radially polarized light converter and a preparation method thereof.

背景技术Background technique

除常见的线偏振、圆偏振、椭圆偏振,光束偏振态还包括径向偏振态和方位角偏振态。径向偏振光因其电矢量的振动方向与光轴的对称性以及始终存在轴上光强为零等特点,广泛应用于粒子俘获、光学微操纵、光信息存储、光与物质相互作用、电子加速、显微系统、平板印刷术、激光加工、光镊子技术、超分辨领域等。In addition to the common linear polarization, circular polarization, and elliptical polarization, the beam polarization state also includes radial polarization state and azimuthal polarization state. Radially polarized light is widely used in particle trapping, optical micromanipulation, optical information storage, light-matter interaction, electronic Acceleration, microscopy systems, lithography, laser processing, optical tweezers technology, super-resolution fields, etc.

液晶具有光学各向异性,是制备偏振光转换器的极佳材料。在液晶偏振光转换器中,液晶分子在其中一个基板上需要形成径向排列。例如可采用电场诱导液晶分子排列,光控取向,圆形摩擦处理多种方法来实现液晶分子的径向排列,但这些方法都只能获得单个的液晶偏振光转换器,制备过程繁琐,难以实现阵列化生产。而液晶偏振光转换器阵列可实现对多束光的同时处理,且单个液晶偏振光转换器为微米级。Liquid crystal has optical anisotropy and is an excellent material for preparing polarized light converters. In the liquid crystal polarization converter, the liquid crystal molecules need to form radial alignment on one of the substrates. For example, various methods such as electric field-induced alignment of liquid crystal molecules, light-controlled alignment, and circular rubbing treatment can be used to realize the radial alignment of liquid crystal molecules, but these methods can only obtain a single liquid crystal polarized light converter, and the preparation process is cumbersome and difficult to achieve. Array production. The liquid crystal polarization converter array can realize simultaneous processing of multiple beams of light, and a single liquid crystal polarization converter is in the micrometer scale.

发明内容SUMMARY OF THE INVENTION

鉴于以上所述现有技术的缺点,本发明的目的在于提供一种液晶型径向偏振光转换器及其制备方法,用于解决现有的径向偏振光束的产生装置制备成本高、操作复杂,光束产生过程繁琐,影响工作效率且难以阵列化的技术问题。In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a liquid crystal type radially polarized light converter and a preparation method thereof, which are used to solve the problem that the existing radially polarized light beam generating device has high production cost and complicated operation. , the beam generation process is cumbersome, affects the work efficiency and is difficult to array the technical problems.

为实现上述目的及其他相关目的,本发明提供一种液晶型径向偏振光转换器,所述液晶型径向偏振光转换器包括:In order to achieve the above purpose and other related purposes, the present invention provides a liquid crystal type radially polarized light converter, and the liquid crystal type radially polarized light converter includes:

第一基板;a first substrate;

第二基板,平行且间隔设置于所述第一基板的一侧;a second substrate, arranged in parallel and at intervals on one side of the first substrate;

图案化围堰层,设置于所述第一基板的朝向所述第二基板的表面上,所述图案化围堰层具有至少一个贯穿所述图案化围堰层的圆形围堰孔;a patterned dam layer, disposed on the surface of the first substrate facing the second substrate, the patterned dam layer has at least one circular dam hole penetrating the patterned dam layer;

液晶平行排列配向层,设置于所述第二基板的靠近所述第一基板的表面上,且所述液晶平行排列配向层与所述图案化围堰层之间预留有预设间隙;The liquid crystal parallel alignment layer is disposed on the surface of the second substrate close to the first substrate, and a predetermined gap is reserved between the liquid crystal parallel alignment layer and the patterned bank layer;

液晶层,形成于所述图案化围堰层与所述液晶平行排列配向层之间的预设间隙以及所述圆形围堰孔中;a liquid crystal layer, formed in a predetermined gap between the patterned bank layer and the liquid crystal parallel alignment layer and in the circular bank hole;

其中,液晶分子在所述圆形围堰孔内呈径向分布,液晶分子在所述液晶平行排列配向层的表面呈平行排列,液晶分子在所述图案化围堰层与所述液晶平行排列配向层之间呈扭曲-径向排列。The liquid crystal molecules are radially distributed in the circular bank hole, the liquid crystal molecules are arranged in parallel on the surface of the liquid crystal parallel alignment layer, and the liquid crystal molecules are arranged in parallel with the liquid crystal in the patterned bank layer. The alignment layers are twisted-radially arranged.

在一可选实施例中,所述圆形围堰孔的直径介于10μm-2000μm之间。In an optional embodiment, the diameter of the circular cofferdam hole is between 10 μm and 2000 μm.

在一可选实施例中,所述图案化围堰层的厚度介于5nm-1μm之间。In an optional embodiment, the thickness of the patterned bank layer is between 5 nm and 1 μm.

在一可选实施例中,所述图案化围堰层的材料包括全氟(1-丁烯基乙烯基醚)、聚四氟乙烯、聚二甲基硅氧烷、十八烷基三氯硅烷或聚酰亚胺。In an optional embodiment, the material of the patterned bank layer includes perfluoro(1-butenyl vinyl ether), polytetrafluoroethylene, polydimethylsiloxane, octadecyl trichloride Silane or polyimide.

在一可选实施例中,所述液晶平行排列配向层包括经平行摩擦处理的聚酰亚胺或偶氮双苯液晶光配向剂。In an optional embodiment, the liquid crystal parallel alignment layer includes a polyimide or azobisphenyl liquid crystal photoalignment agent treated with parallel rubbing.

在一可选实施例中,所述预设间隙介于5μm-100μm之间。In an optional embodiment, the preset gap is between 5 μm and 100 μm.

在一可选实施例中,所述液晶型径向偏振光转换器还包括用于控制所述第一基板和所述第二基板之间间距的且位于所述第一基板和第二基板之间的间隔粒子或聚酯间隔膜。In an optional embodiment, the liquid crystal type radially polarized light converter further comprises a spacer for controlling the distance between the first substrate and the second substrate and located between the first substrate and the second substrate. spacer particles or polyester spacer films.

在一可选实施例中,所述图案化围堰层具有包含由若干所述圆形围堰孔构成的围堰孔阵列。In an optional embodiment, the patterned bank layer has a bank hole array comprising a plurality of the circular bank holes.

在一可选实施例中,在所述圆形围堰孔阵列中相邻两个圆形围堰孔之间的间距大于3μm。In an optional embodiment, the distance between two adjacent circular cofferdam holes in the circular cofferdam hole array is greater than 3 μm.

为实现上述目的及其他相关目的,本发明还提供一种液晶型径向偏振光转换器的制备方法,所述制备方法包括:In order to achieve the above purpose and other related purposes, the present invention also provides a preparation method of a liquid crystal type radially polarized light converter, the preparation method comprising:

提供一第一基板,并于所述第一基板的的表面上形成有图案化围堰层,所述图案化围堰层具有至少一个贯穿所述图案化围堰层的圆形围堰孔;A first substrate is provided, and a patterned dam layer is formed on the surface of the first substrate, the patterned dam layer has at least one circular dam hole penetrating the patterned dam layer;

于所述图案化围堰层上涂覆液晶以于所述圆形围堰孔中形成液晶微滴;coating liquid crystal on the patterned dam layer to form liquid crystal droplets in the circular dam hole;

提供一第二基板,并于所述第二基板的表面上形成液晶平行排列配向层;a second substrate is provided, and a liquid crystal parallel alignment layer is formed on the surface of the second substrate;

将所述第一基板和所述第二基板贴合、密封,所述液晶平行排列配向层与所述图案化围堰层相对设置且预留有一预设间隙,以形成液晶型径向偏振光转换器;The first substrate and the second substrate are laminated and sealed, and the liquid crystal parallel alignment layer and the patterned dam layer are arranged opposite to each other and a preset gap is reserved to form a liquid crystal radially polarized light converter;

其中,所述液晶微滴在基板贴合、密封过程中展开并布置于所述图案化围堰层与所述液晶平行排列配向层之间的所述预设间隙以及所述圆形围堰孔中,液晶分子在所述圆形围堰孔内呈径向分布,液晶分子在所述液晶平行排列配向层的表面呈平行排列,液晶分子在所述图案化围堰层与所述液晶平行排列配向层之间呈扭曲-径向排列。Wherein, the liquid crystal droplets are spread out and arranged in the predetermined gap between the patterned bank layer and the liquid crystal parallel alignment layer and the circular bank hole during the substrate bonding and sealing process. The liquid crystal molecules are radially distributed in the circular bank hole, the liquid crystal molecules are arranged in parallel on the surface of the liquid crystal parallel alignment layer, and the liquid crystal molecules are arranged in parallel with the liquid crystal in the patterned bank layer. The alignment layers are twisted-radially arranged.

在一可选实施例中,所述于所述第一基板的表面上形成有图案化围堰层的步骤包括:In an optional embodiment, the step of forming a patterned bank layer on the surface of the first substrate includes:

于所述第一基板表面上形成光刻胶层;forming a photoresist layer on the surface of the first substrate;

对所述光刻胶层进行曝光、显影以及后烘处理,以形成图案化光刻胶层,所述图案化光刻胶层包括至少一个圆柱状凸起部;exposing, developing and post-baking the photoresist layer to form a patterned photoresist layer, the patterned photoresist layer comprising at least one cylindrical protrusion;

在形成有所述图案化光阻层的所述第一基板的表面形成围堰材料层;forming a dam material layer on the surface of the first substrate on which the patterned photoresist layer is formed;

去除所述图案化光阻层及位于所述图案化光阻层上的围堰材料层,以于所述第一基板的表面形成图案化围堰层,所述图案化围堰层具有至少一个贯穿所述图案化围堰层的圆形围堰孔,其中,所述圆形围堰孔与所述圆形凸起部的位置相对应。removing the patterned photoresist layer and the dam material layer on the patterned photoresist layer to form a patterned dam layer on the surface of the first substrate, the patterned dam layer having at least one A circular cofferdam hole penetrates the patterned cofferdam layer, wherein the circular cofferdam hole corresponds to the position of the circular raised portion.

本发明利用液晶的光电特性,将液晶涂覆在围堰层(具有围堰孔阵列)修饰的上基板上,液晶分子在围堰层的圆形围堰孔内呈径向排列,下基板涂覆配向层使液晶分子平行排列,上下基板组成液晶盒使得液晶分子呈扭曲-径向排列,从而制备出扭曲-径向排列的液晶型径向偏振光转换器,当线性偏振光透过该液晶型径向偏振光转换器时,将被转换成径向偏振光阵列;The present invention utilizes the optoelectronic properties of liquid crystal to coat the liquid crystal on the upper substrate modified by the cofferdam layer (having an array of cofferdam holes), the liquid crystal molecules are arranged radially in the circular cofferdam holes of the cofferdam layer, and the lower substrate is coated with The alignment layer makes the liquid crystal molecules arranged in parallel, and the upper and lower substrates form a liquid crystal cell, so that the liquid crystal molecules are arranged in a twist-radial arrangement, thereby preparing a twist-radial arrangement of liquid crystal radially polarized light converters. When the linearly polarized light passes through the liquid crystal When the type radially polarized light converter is used, it will be converted into a radially polarized light array;

本发明的液晶型径向偏振光转换器,结构简单、操作方便、应用方便、制备过程简单易行,易于阵列化,可解决现有径向偏振光束的产生装置制备成本高、操作复杂,光束产生过程繁琐,影响工作效率且难以阵列化的问题。The liquid crystal type radially polarized light converter of the invention has the advantages of simple structure, convenient operation, convenient application, simple and easy preparation process, and easy arraying, and can solve the problem that the existing radially polarized beam generating device has high manufacturing cost, complicated operation, and beam The problem is that the process is cumbersome, affects work efficiency and is difficult to array.

附图说明Description of drawings

图1显示为本发明的液晶型径向偏振光转换器的结构示意图。FIG. 1 is a schematic diagram showing the structure of the liquid crystal radially polarized light converter of the present invention.

图2显示为沿图1中沿YOZ截面的液晶分子排列情况示意图。FIG. 2 is a schematic diagram showing the arrangement of liquid crystal molecules along the YOZ section in FIG. 1 .

图3显示为沿图1中沿XOZ截面的液晶分子排列情况示意图。FIG. 3 is a schematic diagram showing the arrangement of liquid crystal molecules along the XOZ section in FIG. 1 .

图4显示为本发明的液晶型径向偏振光转换器将线性偏振光转换为径向偏振光的原理图。FIG. 4 is a schematic diagram showing the liquid crystal type radially polarized light converter of the present invention converting linearly polarized light into radially polarized light.

图5显示为本发明的液晶型径向偏振光转换器的制备流程图。FIG. 5 is a flow chart showing the preparation of the liquid crystal radially polarized light converter of the present invention.

图6显示为本发明的液晶型径向偏振光转换器的制备过程中于上基板上形成光刻胶层的示意图。FIG. 6 is a schematic diagram illustrating the formation of a photoresist layer on the upper substrate during the preparation process of the liquid crystal radially polarized light converter of the present invention.

图7显示为本发明的液晶型径向偏振光转换器的制备过程中对所述光刻胶层进行紫外曝光的示意图。FIG. 7 is a schematic diagram showing the ultraviolet exposure of the photoresist layer during the preparation process of the liquid crystal radially polarized light converter of the present invention.

图8显示为本发明的液晶型径向偏振光转换器的制备过程中对曝光后的所述光刻胶层进行显影以获取图案化光刻胶层的示意图。FIG. 8 is a schematic diagram of developing the exposed photoresist layer to obtain a patterned photoresist layer during the preparation process of the liquid crystal radially polarized light converter of the present invention.

图9显示为本发明的液晶型径向偏振光转换器的制备过程中于所述图案化光刻胶层的表面涂覆全氟(1-丁烯基乙烯基醚)/全氟三丁胺溶液的示意图。FIG. 9 shows that the surface of the patterned photoresist layer is coated with perfluoro(1-butenyl vinyl ether)/perfluorotributylamine during the preparation process of the liquid crystal radially polarized light converter of the present invention Schematic of the solution.

图10显示为本发明的液晶型径向偏振光转换器的制备过程中加热使全氟(1-丁烯基乙烯基醚)溶液中溶剂全氟三丁胺挥发的示意图。FIG. 10 is a schematic diagram showing the volatilization of the solvent perfluorotributylamine in the perfluoro(1-butenyl vinyl ether) solution by heating during the preparation of the liquid crystal type radially polarized light converter of the present invention.

图11显示为本发明的液晶型径向偏振光转换器的制备过程中去除所述图案化光阻层及位于所述图案化光阻层上的围堰材料层,以于所述上基板的表面形成图案化围堰层的示意图。11 shows the removal of the patterned photoresist layer and the dam material layer on the patterned photoresist layer during the preparation process of the liquid crystal radially polarized light converter of the present invention, so that the upper substrate can be Schematic diagram of the patterned dam layer formed on the surface.

附图中,各标号所代表的部件列表如下:In the accompanying drawings, the list of components represented by each number is as follows:

1-下基板,2-液晶平行排列配向层,3-液晶层,4-图案化围堰层,5-上基板,6-圆形围堰孔,7-线性偏振光,8-液晶型径向偏振光转换器,9-偏振片,10明暗交替扇形图案,11-疏水,12-掩膜版,13-紫外光,14-图案化光刻胶层,15-CYTOP疏水溶液,16-溶剂挥发。1-lower substrate, 2-liquid crystal parallel alignment layer, 3-liquid crystal layer, 4-patterned bank layer, 5-upper substrate, 6-circular bank hole, 7-linearly polarized light, 8-liquid crystal diameter Polarized light converter, 9-polarizer, 10-light and dark alternating fan pattern, 11-hydrophobic, 12-mask, 13-ultraviolet, 14-patterned photoresist layer, 15-CYTOP hydrophobic solution, 16-solvent volatilize.

具体实施方式Detailed ways

以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

请参阅图1-图11,在本发明的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。Please refer to FIG. 1 to FIG. 11. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", The orientation or positional relationship indicated by "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have The particular orientation, construction and operation in the particular orientation are therefore not to be construed as limitations of the invention.

在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

请参阅图1-3,本发明的实施例介绍一种液晶型径向偏振光转换器8,所述液晶型径向偏振光转换器8包括由相对设置的上基板5(第一基板)、下基板1(第二基板)构成的液晶盒以及设置于所述液晶盒内的液晶层3,液晶具有光学各向异性,是制备偏振光转换器的极佳材料。其中,图1为液晶型径向偏振光转换器8的结构示意图,图2显示为沿图1中YOZ截面的液晶分子排列情况示意图,图3显示为沿图1中沿XOZ截面的液晶分子排列情况示意图,其中,Z方向是指从所述上基板5到下基板1的方向,Y方向是指后文将要介绍的所述液晶平行排列配向层2的摩擦方向,X方向垂直于Y方向。1-3, the embodiment of the present invention introduces a liquid crystal type radially polarized light converter 8, the liquid crystal type radially polarized light converter 8 includes an upper substrate 5 (first substrate), The liquid crystal cell composed of the lower substrate 1 (the second substrate) and the liquid crystal layer 3 disposed in the liquid crystal cell, the liquid crystal has optical anisotropy and is an excellent material for preparing a polarized light converter. 1 is a schematic structural diagram of a liquid crystal radially polarized light converter 8, FIG. 2 is a schematic diagram of the arrangement of liquid crystal molecules along the YOZ cross-section in FIG. 1, and FIG. 3 is a schematic diagram of the liquid crystal molecular arrangement along the XOZ cross-section in FIG. 1 A schematic diagram of the situation, wherein the Z direction refers to the direction from the upper substrate 5 to the lower substrate 1, the Y direction refers to the rubbing direction of the liquid crystal parallel alignment layer 2 to be described later, and the X direction is perpendicular to the Y direction.

请参阅图1-3,在本实施例中,所述上基板5例如可以是玻璃基板,所述上基板5的朝向所述下基板1的表面上形成有图案化围堰层4,所述图案化围堰层4的形成方法详见下文的制备过程,在此不做赘述。所述图案化围堰层4包含由若干贯穿所述图案化围堰层4的圆形围堰孔6构成的围堰孔阵列,图1中示出了包含四个圆形围堰孔6的情形,可以理解的是,所述围堰孔阵列中的圆形围堰孔6的个数可以根据需要进行调整,其个数例如还可以是1个、2个、3个以及多于4个。由于所述图案化围堰层4的材料选用液晶分子能在其表面垂直排列的材料,例如全氟(1-丁烯基乙烯基醚)、聚四氟乙烯、聚二甲基硅氧烷、十八烷基三氯硅烷、聚酰亚胺垂直取向剂等材料,譬如全氟(1-丁烯基乙烯基醚)的全氟三丁胺溶液,全氟(1-丁烯基乙烯基醚)和全氟三丁胺的体积比为1:5-40,例如1:5、1:10、1:20、1:30……,从而所述圆形围堰孔6可使位于其内部的液晶分子呈径向分布。作为示例,所述圆形围堰孔6的直径介于10μm-2000μm之间,例如10μm、100μm、300μm、500μm、700μm、900μm、1100μm、1500μm或2000μm,可以理解的是,所述圆形围堰孔6的也可取10μm-2000μm之间其他合适的值。作为示例,在所述圆形围堰孔6阵列中相邻两个圆形围堰孔6之间的间距大于3μm,例如10μm、20μm、30μm、40μm、50μm、60μm、……,可以理解的是,邻两个圆形围堰孔6之间的间距可以根据需要进行调整,并不限于上述数值。作为示例,所述图案化围堰层4的厚度介于5nm-1μm之间,例如10nm、30nm、50nm、70nm、90nm、110nm、300nm、500nm、700nm或900nm,可以理解的是,所述图案化围堰层4的厚度也可取介于5nm-1μm之间其他合适的值。Referring to FIGS. 1-3 , in this embodiment, the upper substrate 5 may be, for example, a glass substrate, and a patterned dam layer 4 is formed on the surface of the upper substrate 5 facing the lower substrate 1 . The formation method of the patterned cofferdam layer 4 is detailed in the preparation process below, which will not be repeated here. The patterned cofferdam layer 4 includes a cofferdam hole array composed of a plurality of circular cofferdam holes 6 penetrating the patterned cofferdam layer 4 , and FIG. It can be understood that the number of circular cofferdam holes 6 in the cofferdam hole array can be adjusted as required, and the number of the circular cofferdam holes 6 can be, for example, 1, 2, 3 or more than 4 . Because the material of the patterned bank layer 4 is selected from the material that liquid crystal molecules can be vertically aligned on the surface, such as perfluoro(1-butenyl vinyl ether), polytetrafluoroethylene, polydimethylsiloxane, Octadecyltrichlorosilane, polyimide vertical alignment agent and other materials, such as perfluoro(1-butenyl vinyl ether) perfluorotributylamine solution, perfluoro(1-butenyl vinyl ether) ) and perfluorotributylamine in a volume ratio of 1:5-40, such as 1:5, 1:10, 1:20, 1:30..., so that the circular cofferdam hole 6 can be located inside it The liquid crystal molecules are radially distributed. As an example, the diameter of the circular cofferdam hole 6 is between 10 μm and 2000 μm, such as 10 μm, 100 μm, 300 μm, 500 μm, 700 μm, 900 μm, 1100 μm, 1500 μm or 2000 μm. The weir hole 6 can also take other suitable values between 10 μm and 2000 μm. As an example, in the array of circular cofferdam holes 6, the distance between two adjacent circular cofferdam holes 6 is greater than 3 μm, such as 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, 60 μm, . . . It can be understood that Yes, the distance between two adjacent circular cofferdam holes 6 can be adjusted as required, and is not limited to the above-mentioned values. As an example, the thickness of the patterned bank layer 4 is between 5 nm and 1 μm, such as 10 nm, 30 nm, 50 nm, 70 nm, 90 nm, 110 nm, 300 nm, 500 nm, 700 nm or 900 nm, it is understood that the pattern The thickness of the chemical bank layer 4 may also take other suitable values between 5 nm and 1 μm.

请参阅图1-3,在本实施例中,所述下基板1例如可以是玻璃基板,所述下基板1的靠近所述上基板5的表面上设置有使液晶分子平行排列的液晶平行排列配向层2,所述液晶平行排列配向层2可以是经平行摩擦处理的聚酰亚胺配向层,所述液晶平行排列配向层2的形成方法详见下文的制备流程,在此不做赘述。可以理解的是,在一些实施例中,所述液晶平行排列配向层2也可以是光控液晶配向层。Referring to FIGS. 1-3 , in this embodiment, the lower substrate 1 may be, for example, a glass substrate, and a surface of the lower substrate 1 close to the upper substrate 5 is provided with a liquid crystal parallel arrangement for aligning liquid crystal molecules in parallel Alignment layer 2, the liquid crystal parallel alignment alignment layer 2 may be a polyimide alignment layer treated by parallel rubbing, and the formation method of the liquid crystal parallel alignment alignment layer 2 is detailed in the preparation process below, which will not be repeated here. It can be understood that, in some embodiments, the liquid crystal parallel alignment layer 2 may also be a light control liquid crystal alignment layer.

请参阅图1-3,在本实施例中,所述液晶层3形成于所述图案化围堰层4与所述液晶平行排列配向层2之间的预设间隙以及所述圆形围堰孔6中。例如可采用刮涂法(当然也可以是旋涂法或提拉法)将液晶(所述的液晶可以是纯液晶、也可以是液晶与聚合物单体的混合物)涂覆于所述图案化围堰层4上,液晶将留在图案化围堰层4的每个圆形围堰孔6内从而形成液晶微滴阵列,所述液晶微滴的顶部高于所述图案化围堰层4的表面;然后控制液晶盒厚度,将所述上基板5与所述下基板1贴合、密封,以是所述液晶平行排列配向层2与所述图案化围堰层4相对设置且预留有一预设间隙。需要说明的是,在基板贴合的过程中,所述液晶微滴会沿平行于基板的方向展开并布置于所述图案化围堰层4与所述液晶平行排列配向层2之间的所述预设间隙以及所述圆形围堰孔6中,以形成液晶层3。1-3, in this embodiment, the liquid crystal layer 3 is formed at a predetermined gap between the patterned bank layer 4 and the liquid crystal parallel alignment layer 2 and the circular bank in hole 6. For example, a blade coating method (of course, a spin coating method or a pulling method) can be used to coat the liquid crystal (the liquid crystal can be pure liquid crystal, or a mixture of liquid crystal and polymer monomer) on the patterned pattern. On the bank layer 4 , the liquid crystal will remain in each circular bank hole 6 of the patterned bank layer 4 to form an array of liquid crystal droplets whose tops are higher than the patterned bank layer 4 Then control the thickness of the liquid crystal cell, and attach and seal the upper substrate 5 and the lower substrate 1, so that the liquid crystal parallel alignment layer 2 and the patterned bank layer 4 are oppositely arranged and reserved There is a preset gap. It should be noted that, in the process of laminating the substrates, the liquid crystal droplets will be spread out in a direction parallel to the substrate and arranged in all areas between the patterned bank layer 4 and the liquid crystal parallel alignment layer 2 . The predetermined gap and the circular bank hole 6 are formed to form the liquid crystal layer 3 .

请参阅图1-3,在本实施例中,液晶分子在所述液晶平行排列配向层2的表面上沿Y方向呈平行排列,而液晶分子在所述圆形围堰孔6内呈径向分布,从而可以使在所述图案化围堰层4与所述液晶平行排列配向层2之间的液晶分子呈扭曲-径向排列,液晶分子在YOZ平面上保持一致,均沿Y方向排布(见图2),而液晶分子在XOZ平面上从平行于Y方向逐渐过渡到平行于X方向(见图3),从而在每个圆形围堰孔6对应位置处形成一个液晶偏振光转换单元,也即每个所述液晶型径向偏振光转换器8是由若干个(图1中示出了四个)液晶偏振光转换单元组成的液晶偏振光转换单元阵列。图4示出了本实施例的液晶型径向偏振光转换器8将线性偏振光转换为径向偏振光的原理,将液晶型径向偏振光转换器8放置在正交的偏振片之间时,经过液晶型径向偏振光转换器8和检偏器(偏振片9)时,线性偏振光7被转换层径向偏振光。Referring to FIGS. 1-3 , in this embodiment, the liquid crystal molecules are arranged in parallel along the Y direction on the surface of the liquid crystal parallel alignment layer 2 , and the liquid crystal molecules are arranged in a radial direction in the circular bank hole 6 distribution, so that the liquid crystal molecules between the patterned dam layer 4 and the liquid crystal parallel alignment layer 2 are in a twist-radial alignment, and the liquid crystal molecules are consistent on the YOZ plane and are arranged in the Y direction. (see Figure 2), and the liquid crystal molecules gradually transition from parallel to the Y direction to parallel to the X direction on the XOZ plane (see Figure 3), thereby forming a liquid crystal polarized light conversion at the corresponding position of each circular bank hole 6 The unit, that is, each of the liquid crystal type radial polarization converters 8 is an array of liquid crystal polarization conversion units composed of several (four are shown in FIG. 1 ) liquid crystal polarization conversion units. FIG. 4 shows the principle of converting the linearly polarized light into radially polarized light by the liquid crystal type radially polarized light converter 8 in this embodiment, and the liquid crystal type radially polarized light converter 8 is placed between orthogonal polarizers When passing through the liquid crystal radially polarized light converter 8 and the analyzer (polarizer 9), the linearly polarized light 7 is radially polarized by the conversion layer.

需要说明的是,为了控制液晶盒的厚度,在所述液晶型径向偏振光转换器8还包括用于控制所述上基板5和所述下基板1之间间距的聚酯间隔膜(当然也可采用间隔粒子),所述聚酯间隔膜设置于所述图案化围堰层4与所述液晶平行排列配向层2之间,所述聚酯间隔膜的厚度(也即所述预设间隙的厚度)介于5μm-100μm之间,例如5μm、10μm、12μm、15μm、18μm、20μm、50μm或80μm。所述聚酯间隔膜的厚度可根据摩根条件确定,即公式(1):It should be noted that, in order to control the thickness of the liquid crystal cell, the liquid crystal radially polarized light converter 8 further includes a polyester spacer film (of course) for controlling the distance between the upper substrate 5 and the lower substrate 1 Spacer particles can also be used), the polyester spacer film is disposed between the patterned bank layer 4 and the liquid crystal parallel alignment layer 2, the thickness of the polyester spacer film (that is, the preset The thickness of the gap) is between 5 μm and 100 μm, such as 5 μm, 10 μm, 12 μm, 15 μm, 18 μm, 20 μm, 50 μm or 80 μm. The thickness of the polyester spacer film can be determined according to the Morgan condition, that is, formula (1):

Figure BDA0002669666350000061
Figure BDA0002669666350000061

其中,

Figure BDA0002669666350000062
为液晶分子总扭曲角度,d为液晶层厚度,Δn为双折射,也就是光学各向异性(即Δn=ne-no,ne为非寻常光的折射率,no为寻常光的折射率),λ为波长;in,
Figure BDA0002669666350000062
is the total twist angle of the liquid crystal molecules, d is the thickness of the liquid crystal layer, Δn is the birefringence, that is, the optical anisotropy (that is, Δn= ne -no , ne is the refractive index of extraordinary light, and n o is the refractive index of ordinary light refractive index), λ is the wavelength;

对于扭曲90°的扭曲-向列相液晶盒

Figure BDA0002669666350000063
公式(1)可简化为公式(2):For a twist-nematic liquid crystal cell with a twist of 90°
Figure BDA0002669666350000063
Equation (1) can be simplified to Equation (2):

d>>λ/4Δn (2)d>>λ/4Δn (2)

请参阅图5,本实施例还介绍一种上述的液晶型径向偏振光转换器8的制备方法,其中,图5示出了液晶型径向偏振光转换器8的制备方法的流程示意图。请参阅图5,所述制备方法包括:步骤S10、提供一第一基板,并于所述第一基板的的表面上形成有图案化围堰层4,所述图案化围堰层4具有至少一个贯穿所述图案化围堰层4的圆形围堰孔6;步骤S20、于所述图案化围堰层4上涂覆液晶以于所述圆形围堰孔6中形成液晶微滴;步骤S30、提供一第二基板,并于所述第二基板的表面上形成液晶平行排列配向层2;步骤S40、将所述第一基板和所述第二基板贴合、密封,所述液晶平行排列配向层2与所述图案化围堰层4相对设置且预留有一预设间隙,所述液晶微滴在贴合、密封过程中展开并布置于所述图案化围堰层4与所述液晶平行排列配向层2之间的所述预设间隙以及所述圆形围堰孔6中,以形成液晶层3。Referring to FIG. 5 , this embodiment also introduces a method for manufacturing the above-mentioned liquid crystal radially polarized light converter 8 , wherein FIG. 5 shows a schematic flowchart of the manufacturing method of the liquid crystal radially polarized light converter 8 . Please refer to FIG. 5 , the preparation method includes: step S10 , providing a first substrate, and forming a patterned dam layer 4 on the surface of the first substrate, the patterned dam layer 4 having at least a circular cofferdam hole 6 running through the patterned cofferdam layer 4; step S20, coating liquid crystal on the patterned cofferdam layer 4 to form liquid crystal droplets in the circular cofferdam hole 6; Step S30, providing a second substrate, and forming a liquid crystal parallel alignment layer 2 on the surface of the second substrate; Step S40, laminating and sealing the first substrate and the second substrate, the liquid crystal The parallel alignment layer 2 is disposed opposite the patterned dam layer 4 with a preset gap reserved, and the liquid crystal droplets are spread and arranged on the patterned dam layer 4 and the patterned dam layer 4 during the lamination and sealing process. The liquid crystals are arranged in parallel in the predetermined gaps between the alignment layers 2 and in the circular bank holes 6 to form the liquid crystal layer 3 .

请参阅图6-11,步骤S10进一步包括如下步骤:Please refer to Fig. 6-11, step S10 further includes the following steps:

步骤S11、提供上基板5,于该上基板5的表面上涂覆光刻胶,所述上基板5例如可以是2cm×2cm大小的玻璃基板;步骤S12、对涂覆有光刻胶的上基板5进行前烘处理,以于所述上基板5的表面形成光刻胶层11,通过控制温度和前烘时间,可以将光刻胶中的溶剂尽可能地挥发除去,提高光刻胶层的粘附性和均匀性(见图6);步骤S13、使用紫外光13透过掩模板照射对形成有光刻胶层11的上基板5进行曝光处理(见图7);步骤S14、对曝光处理的光刻胶层11进行显影处理,以于所述上基板5的表面形成图案化光刻胶层14,所述图案化光刻胶层14包含若干个圆形凸起部(图8中显示有4个),可通过控制显影液浓度和显影时间控制图案精度(对应图8);步骤S15、对形成有图案化光刻胶层14的上基板5进行后烘处理,通过控制温度和后烘时间,蒸发掉图案化光刻胶层14中剩余的溶剂使图案化光刻胶层14变硬(对应图8);步骤S16、于所述图案化光刻胶层14表面涂覆全氟(1-丁烯基乙烯基醚)的全氟三丁胺溶液15(当然也可以是聚四氟乙烯溶液、聚二甲基硅氧烷溶液、十八烷基三氯硅烷溶液、聚酰亚胺等垂直取向剂溶液,在全氟(1-丁烯基乙烯基醚)疏水溶液15中,全氟(1-丁烯基乙烯基醚)与溶剂全氟三丁胺的体积比为1:20(对应图9),例如可在180℃加热10分钟以使全氟(1-丁烯基乙烯基醚)/全氟三丁胺疏水层溶液15中的溶剂全氟三丁胺挥发16,以于形成有所述图案化光刻胶层14的所述上基板5的表面形成围堰材料层,可以理解的是,加热温度和时间可根据实际情况进行调整(对应图10);步骤S17、使用专用溶剂去除剩余光刻胶(也即图案化光阻层),在该过程中,位于所述图案化光刻胶层14上的围堰材料层也同时被去除,从而可于所述上基板5的表面形成图案化围堰层4,该图案化围堰层4包含由若干贯穿所述图案化围堰层4的圆形围堰孔6构成的围堰孔阵列(步骤S17,如图11)。作为示例,所述圆形围堰孔6的直径介于10μm-2000μm之间,例如10μm、100μm、300μm、500μm、700μm、900μm、1100μm、1500μm或2000μm,可以理解的是,所述圆形围堰孔6的也可取10μm-2000μm之间其他合适的值。作为示例,在所述围堰孔阵列中相邻两个圆形围堰孔6之间的间距大于3μm,例如10μm、20μm、30μm、40μm、50μm、60μm、……,可以理解的是,相邻两个圆形围堰孔6之间的间距可以根据需要进行调整,并不限于上述数值。作为示例,所述图案化围堰层4的厚度介于5nm-1μm之间,例如10nm、30nm、50nm、70nm、90nm、110nm、300nm、500nm、700nm或900nm,可以理解的是,所述图案化围堰层4的厚度也可取介于5nm-1μm之间其他合适的值。需要说明的是,虽然图11中示出了包含四个圆形围堰孔6的情形,但可以理解的是,所述围堰孔阵列中的圆形围堰孔6的个数可以根据需要进行调整,其个数例如还可以是1个、2个、3个以及多于4个。In step S11, an upper substrate 5 is provided, and photoresist is coated on the surface of the upper substrate 5, and the upper substrate 5 can be, for example, a glass substrate with a size of 2 cm×2 cm; step S12, the upper substrate coated with photoresist is applied. The substrate 5 is subjected to pre-baking treatment to form a photoresist layer 11 on the surface of the upper substrate 5. By controlling the temperature and the pre-baking time, the solvent in the photoresist can be volatilized and removed as much as possible to improve the photoresist layer. (see FIG. 6 ); step S13 , using ultraviolet light 13 to irradiate the upper substrate 5 with the photoresist layer 11 through the mask to expose the upper substrate 5 (see FIG. 7 ); step S14 , to The exposed photoresist layer 11 is developed to form a patterned photoresist layer 14 on the surface of the upper substrate 5, and the patterned photoresist layer 14 includes a plurality of circular protrusions ( FIG. 8 ). In step S15, the upper substrate 5 on which the patterned photoresist layer 14 is formed is subjected to post-baking treatment, and the temperature is controlled by controlling the temperature of the upper substrate 5. and post-baking time, evaporate the remaining solvent in the patterned photoresist layer 14 to harden the patterned photoresist layer 14 (corresponding to FIG. 8 ); step S16 , coat the surface of the patterned photoresist layer 14 Perfluoro(1-butenyl vinyl ether) perfluorotributylamine solution 15 (of course, it can also be polytetrafluoroethylene solution, polydimethylsiloxane solution, octadecyltrichlorosilane solution, poly Imide and other vertical alignment agent solutions, in the perfluoro(1-butenyl vinyl ether) hydrophobic solution 15, the volume ratio of perfluoro(1-butenyl vinyl ether) to the solvent perfluorotributylamine is 1:20 (corresponding to Figure 9), for example, it can be heated at 180°C for 10 minutes to volatilize the solvent perfluorotributylamine in the perfluoro(1-butenyl vinyl ether)/perfluorotributylamine hydrophobic layer solution 15 16, to form a dam material layer on the surface of the upper substrate 5 on which the patterned photoresist layer 14 is formed, it is understood that the heating temperature and time can be adjusted according to the actual situation (corresponding to FIG. 10 ); Step S17, using a special solvent to remove the remaining photoresist (ie, the patterned photoresist layer), during this process, the dam material layer on the patterned photoresist layer 14 is also removed at the same time, so that the A patterned dam layer 4 is formed on the surface of the upper substrate 5 , and the patterned dam layer 4 includes a dam hole array composed of a plurality of circular dam holes 6 penetrating the patterned dam layer 4 (step S17 ) 11 ). As an example, the diameter of the circular cofferdam hole 6 is between 10 μm and 2000 μm, such as 10 μm, 100 μm, 300 μm, 500 μm, 700 μm, 900 μm, 1100 μm, 1500 μm or 2000 μm, it can be understood that , the circular cofferdam hole 6 can also take other suitable values between 10 μm and 2000 μm. As an example, in the cofferdam hole array, the distance between two adjacent circular cofferdam holes 6 is greater than 3 μm, For example, 10μm, 20μm, 30μm, 40μm, 50μm, 60μm, ..., can be It should be understood that the distance between two adjacent circular cofferdam holes 6 can be adjusted as required, and is not limited to the above-mentioned values. As an example, the thickness of the patterned bank layer 4 is between 5 nm and 1 μm, such as 10 nm, 30 nm, 50 nm, 70 nm, 90 nm, 110 nm, 300 nm, 500 nm, 700 nm or 900 nm, it is understood that the pattern The thickness of the chemical bank layer 4 may also take other suitable values between 5 nm and 1 μm. It should be noted that although FIG. 11 shows a situation where four circular cofferdam holes 6 are included, it can be understood that the number of circular cofferdam holes 6 in the cofferdam hole array can be as required. For adjustment, the number may be 1, 2, 3, or more than 4, for example.

在步骤S20中,例如可采用刮涂法(当然也可以是旋涂法或提拉法)将液晶(所述液晶可以是纯液晶E7、也可以是液晶与聚合物单体的混合物)涂覆于所述图案化围堰层4上,液晶将留在图案化围堰层4的每个圆形围堰孔6内从而形成液晶微滴阵列,每个液晶微滴形成于一圆形围堰孔6中,且所述液晶微滴的顶部高于所述图案化围堰层4的表面。由于所述图案化围堰层4的材料选用的是液晶分子能在其表面垂直排列的材料,例如全氟(1-丁烯基乙烯基醚)、聚四氟乙烯、聚二甲基硅氧烷、十八烷基三氯硅烷、聚酰亚胺垂直取向剂等材料,譬如全氟(1-丁烯基乙烯基醚),从而所述圆形围堰孔6可使位于其内部的液晶分子呈径向分布。In step S20, the liquid crystal (the liquid crystal can be pure liquid crystal E7, or a mixture of liquid crystal and polymer monomer) can be coated by, for example, a blade coating method (of course it can also be a spin coating method or a pulling method). On the patterned bank layer 4, the liquid crystal will remain in each circular bank hole 6 of the patterned bank layer 4 to form an array of liquid crystal droplets, each liquid crystal droplet is formed in a circular bank in the hole 6 , and the top of the liquid crystal droplet is higher than the surface of the patterned bank layer 4 . Because the material of the patterned bank layer 4 is selected from the material that liquid crystal molecules can be vertically aligned on its surface, such as perfluoro(1-butenyl vinyl ether), polytetrafluoroethylene, polydimethylsiloxane alkane, octadecyltrichlorosilane, polyimide vertical alignment agent and other materials, such as perfluoro(1-butenyl vinyl ether), so that the circular bank hole 6 can make the liquid crystal inside it The molecules are distributed radially.

在步骤S30中,所述液晶平行排列配向层2可以是经平行摩擦处理的聚酰亚胺配向层,所述聚酰亚胺配向层可使液晶分子在所述下基板1(聚酰亚胺配向层)的表面平行排列。聚酰亚胺配向层的制备过程包括:首先,于所述下基板1的表面涂覆聚酰亚胺溶液(由体积比为1:10的聚酰亚胺与N甲基吡咯烷酮构成);接着,在220℃加热2h使聚酰亚胺溶液中的溶剂挥发,以于所述下基板1的表面形成聚酰亚胺层;然后对下基板1上的聚酰亚胺层进行平行摩擦处理,以于所述下基板1的表面形成聚酰亚胺配向层。可以理解的是,在一些实施例中,所述液晶平行排列配向层2也可以是光控液晶配向层。In step S30, the liquid crystal parallel alignment alignment layer 2 may be a polyimide alignment layer subjected to parallel rubbing treatment, and the polyimide alignment layer enables liquid crystal molecules to be arranged on the lower substrate 1 (polyimide alignment layer). The surfaces of the alignment layer) are arranged in parallel. The preparation process of the polyimide alignment layer includes: first, coating the surface of the lower substrate 1 with a polyimide solution (consisting of polyimide and N-methylpyrrolidone with a volume ratio of 1:10); then , heated at 220°C for 2 hours to volatilize the solvent in the polyimide solution, so as to form a polyimide layer on the surface of the lower substrate 1; A polyimide alignment layer is formed on the surface of the lower substrate 1 . It can be understood that, in some embodiments, the liquid crystal parallel alignment layer 2 may also be a light control liquid crystal alignment layer.

在步骤S40中,控制液晶盒(由相对设置的上基板5、下基板1构成)厚度,将所述上基板5与所述下基板1贴合、密封,以形成图1-3所示的液晶型径向偏振光转换器8,其中,所述液晶平行排列配向层2与所述图案化围堰层4相对设置且预留有一预设间隙,该预设间隙由后文将要介绍的聚酯间隔膜的厚度来限制。需要说明的是,在基板贴合的过程中,所述液晶微滴会沿平行于基板的方向展开并布置于所述图案化围堰层4与所述液晶平行排列配向层2之间的所述预设间隙以及所述圆形围堰孔6中,以形成液晶层3。In step S40, the thickness of the liquid crystal cell (composed of the oppositely arranged upper substrate 5 and lower substrate 1) is controlled, and the upper substrate 5 and the lower substrate 1 are attached and sealed to form the structure shown in Figs. 1-3. The liquid crystal type radially polarized light converter 8, wherein the liquid crystal parallel alignment layer 2 and the patterned dam layer 4 are arranged opposite to each other and a preset gap is reserved. The thickness of the ester spacer film is limited. It should be noted that, in the process of laminating the substrates, the liquid crystal droplets will be spread out in a direction parallel to the substrate and arranged in all areas between the patterned bank layer 4 and the liquid crystal parallel alignment layer 2 . The predetermined gap and the circular bank hole 6 are formed to form the liquid crystal layer 3 .

在步骤S40中,例如可通过在所述上基板5和所述下基板1之间设置聚酯间隔膜来控制两者的间距来控制的液晶盒的厚度,所述聚酯间隔膜设置于所述图案化围堰层4与所述液晶平行排列配向层2之间,所述聚酯间隔膜的厚度(也即所述预设间隙的厚度)介于5μm-100μm之间,例如5μm、10μm、12μm、15μm、18μm、20μm、50μm或80μm,可以理解的是,所述聚酯间隔膜的厚度也可以是其他适合的值。In step S40, for example, the thickness of the liquid crystal cell can be controlled by arranging a polyester spacer film between the upper substrate 5 and the lower substrate 1 to control the distance between the two. Between the patterned bank layer 4 and the liquid crystal parallel alignment layer 2, the thickness of the polyester spacer film (that is, the thickness of the preset gap) is between 5 μm and 100 μm, such as 5 μm, 10 μm , 12 μm, 15 μm, 18 μm, 20 μm, 50 μm or 80 μm, it can be understood that the thickness of the polyester spacer film can also be other suitable values.

请参阅图1-3,在形成的液晶型径向偏振光转换器8中,液晶分子在所述液晶平行排列配向层2的表面上沿Y方向呈平行排列,而液晶分子在所述圆形围堰孔6内呈径向分布,从而可以使在所述图案化围堰层4与所述液晶平行排列配向层2之间的液晶分子呈扭曲-径向排列,液晶分子在YOZ平面上保持一致,均沿Y方向排布(见图2),而液晶分子在XOZ平面上从平行于Y方向逐渐过渡到平行于X方向(见图3),从而在每个圆形围堰孔6对应位置处形成一个液晶偏振光转换单元,也即每个所述液晶型径向偏振光转换器8是由若干个(图1中示出了四个)液晶偏振光转换单元组成的液晶偏振光转换单元阵列,当线性偏振光透过该液晶偏振光转换单元阵列时,将被转换成径向偏振光阵列。1-3, in the formed liquid crystal type radially polarized light converter 8, the liquid crystal molecules are arranged in parallel along the Y direction on the surface of the liquid crystal parallel alignment layer 2, and the liquid crystal molecules are arranged in the circular The cofferdam holes 6 are radially distributed, so that the liquid crystal molecules between the patterned cofferdam layer 4 and the liquid crystal parallel alignment layer 2 are in a twist-radial alignment, and the liquid crystal molecules remain on the YOZ plane. Consistent, all are arranged along the Y direction (see Figure 2), and the liquid crystal molecules gradually transition from parallel to the Y direction to parallel to the X direction (see Figure 3) on the XOZ plane, so that each circular cofferdam hole 6 corresponds to A liquid crystal polarized light conversion unit is formed at the position, that is, each of the liquid crystal type radial polarized light converters 8 is a liquid crystal polarized light conversion unit composed of several (four are shown in FIG. 1 ) liquid crystal polarized light conversion units. The unit array, when linearly polarized light is transmitted through the liquid crystal polarized light converting unit array, will be converted into a radially polarized light array.

在液晶型径向偏振光转换器8制备完成后,还包括通过正交偏光显微镜来对该液晶型径向偏振光转换器8进行验证的步骤。具体地,请参阅图4,将本实施例的液晶型偏振光转换器8放置在正交偏光显微镜的载物台上,当线性偏振的入射光(线性偏振光7)透过下基板1照射液晶型偏振光转换器8,且入射光的偏振方向与下基板1的液晶平行排列配向层2的摩擦方向平行,可观察到明暗交替的扇形图案阵列10,说明该装置可将线性偏振光转换为径向偏振光阵列。After the preparation of the liquid crystal radially polarized light converter 8 is completed, a step of verifying the liquid crystal radially polarized light converter 8 is also included by means of a crossed polarized light microscope. Specifically, referring to FIG. 4 , the liquid crystal polarized light converter 8 of the present embodiment is placed on the stage of the crossed polarized light microscope, and when the linearly polarized incident light (linearly polarized light 7 ) is irradiated through the lower substrate 1 The liquid crystal type polarization converter 8, and the polarization direction of the incident light is parallel to the rubbing direction of the liquid crystal parallel alignment layer 2 of the lower substrate 1, and a fan-shaped pattern array 10 with alternating light and dark can be observed, indicating that the device can convert linearly polarized light. is a radially polarized light array.

综上所述,本实施例中,利用液晶的光电特性,将液晶涂覆在围堰层(具有围堰孔阵列)修饰的上基板上,液晶分子在围堰层的圆形围堰孔内呈径向排列,下基板涂覆配向层使液晶分子平行排列,上下基板组成液晶盒使得液晶分子呈扭曲-径向排列,从而制备出扭曲-径向排列的液晶型径向偏振光转换器。当线性偏振光透过该液晶型径向偏振光转换器时,将被转换成径向偏振光阵列。该装置结构简单、操作方便、应用方便、制备过程简单易行,并且易于阵列化。To sum up, in this embodiment, using the optoelectronic properties of liquid crystal, the liquid crystal is coated on the upper substrate modified by the cofferdam layer (with the cofferdam hole array), and the liquid crystal molecules are in the circular cofferdam holes of the cofferdam layer. In radial arrangement, the lower substrate is coated with an alignment layer to make the liquid crystal molecules align in parallel, and the upper and lower substrates form a liquid crystal cell so that the liquid crystal molecules are arranged in a twist-radial arrangement, thereby preparing a twist-radial arrangement of liquid crystal radially polarized light converters. When the linearly polarized light is transmitted through the liquid crystal type radially polarized light converter, it will be converted into a radially polarized light array. The device has simple structure, convenient operation, convenient application, simple and easy preparation process, and is easy to be arrayed.

在本文的描述中,提供了许多特定细节,诸如部件和/或方法的实例,以提供对本发明实施例的完全理解。然而,本领域技术人员将认识到可以在没有一项或多项具体细节的情况下或通过其他设备、系统、组件、方法、部件、材料、零件等等来实践本发明的实施例。在其他情况下,未具体示出或详细描述公知的结构、材料或操作,以避免使本发明实施例的方面变模糊。In the description herein, numerous specific details are provided, such as examples of components and/or methods, in order to provide a thorough understanding of embodiments of the present invention. However, one skilled in the art will recognize that embodiments of the invention may be practiced without one or more of the specific details or with other devices, systems, assemblies, methods, components, materials, parts, and the like. In other instances, well-known structures, materials, or operations are not specifically shown or described in detail to avoid obscuring aspects of the embodiments of the invention.

本发明所示实施例的上述描述(包括在说明书摘要中所述的内容)并非意在详尽列举或将本发明限制到本文所公开的精确形式。尽管在本文仅为说明的目的而描述了本发明的具体实施例和本发明的实例,但是正如本领域技术人员将认识和理解的,各种等效修改是可以在本发明的精神和范围内的。如所指出的,可以按照本发明所述实施例的上述描述来对本发明进行这些修改,并且这些修改将在本发明的精神和范围内。The above description of illustrated embodiments of the present invention, including what is described in the Abstract, is not intended to be exhaustive or to limit the invention to the precise form disclosed herein. While specific embodiments of, and examples for, the invention are described herein for illustrative purposes only, various equivalent modifications are possible within the spirit and scope of the invention, as those skilled in the art will recognize and appreciate of. As indicated, these modifications may be made to the present invention in light of the foregoing description of the described embodiments of the present invention and are intended to be within the spirit and scope of the present invention.

本文已经在总体上将系统和方法描述为有助于理解本发明的细节。此外,已经给出了各种具体细节以提供本发明实施例的总体理解。然而,相关领域的技术人员将会认识到,本发明的实施例可以在没有一个或多个具体细节的情况下进行实践,或者利用其它装置、系统、配件、方法、组件、材料、部分等进行实践。在其它情况下,并未特别示出或详细描述公知结构、材料和/或操作以避免对本发明实施例的各方面造成混淆。The systems and methods have generally been described herein with details that are helpful in understanding the invention. Furthermore, various specific details have been set forth in order to provide a general understanding of embodiments of the present invention. One skilled in the relevant art will recognize, however, that embodiments of the invention may be practiced without one or more of the specific details, or with other devices, systems, accessories, methods, components, materials, parts, etc. practice. In other instances, well-known structures, materials and/or operations have not been specifically shown or described in detail to avoid obscuring aspects of the embodiments of the invention.

因而,尽管本发明在本文已参照其具体实施例进行描述,但是修改自由、各种改变和替换意在上述公开内,并且应当理解,在某些情况下,在未背离所提出发明的范围和精神的前提下,在没有对应使用其他特征的情况下将采用本发明的一些特征。因此,可以进行许多修改,以使特定环境或材料适应本发明的实质范围和精神。本发明并非意在限制到在下面权利要求书中使用的特定术语和/或作为设想用以执行本发明的最佳方式公开的具体实施例,但是本发明将包括落入所附权利要求书范围内的任何和所有实施例及等同物。因而,本发明的范围将只由所附的权利要求书进行确定。Thus, although the invention has been described herein with reference to specific embodiments thereof, freedom of modification, various changes and substitutions are intended to be within the above disclosure, and it should be understood that, in certain circumstances, without departing from the scope and scope of the proposed invention, Some features of the present invention will be employed without the corresponding use of other features in the spirit of the present invention. Therefore, many modifications may be made to adapt a particular environment or material to the essential scope and spirit of the invention. It is not intended that the invention be limited to the specific terms used in the following claims and/or the specific embodiments disclosed as the best modes contemplated for carrying out the invention, but the invention is to be included within the scope of the appended claims any and all embodiments and equivalents within. Accordingly, the scope of the present invention should be determined only by the appended claims.

Claims (10)

1. A liquid crystal-form radial polarized light converter, comprising:
a first substrate;
the second substrate is arranged on one side of the first substrate in parallel at intervals;
the patterning cofferdam layer is arranged on the surface of the first substrate, facing the second substrate, and is provided with at least one circular cofferdam hole which penetrates through the patterning cofferdam layer and exposes the surface of the first substrate;
the liquid crystal parallel arrangement alignment layer is arranged on the surface, close to the first substrate, of the second substrate, and a preset gap is reserved between the liquid crystal parallel arrangement alignment layer and the patterned cofferdam layer;
the liquid crystal layer is formed in a preset gap between the patterned cofferdam layer and the liquid crystal parallel arrangement alignment layer and the circular cofferdam hole;
the liquid crystal molecules are distributed in the circular cofferdam holes in a radial direction, the liquid crystal molecules are arranged on the surface of the liquid crystal parallel arrangement alignment layer in a parallel manner, and the liquid crystal molecules are arranged between the patterned cofferdam layer and the liquid crystal parallel arrangement alignment layer in a twisting-radial direction.
2. A liquid crystal-type radial polarization light converter according to claim 1, wherein the diameter of the circular weir aperture is between 10-2000 μ ι η.
3. A liquid crystal-type radial polarization light converter according to claim 1, wherein the thickness of the patterned bank layer is between 5nm-1 μm.
4. A liquid crystal-type radial polarization light converter according to claim 1, wherein the material of the patterned bank layer comprises perfluoro (1-butenyl vinyl ether) polymer, teflon, polydimethylsiloxane, or polyimide homeotropic alignment agent.
5. The liquid crystal-type radial polarization light converter of claim 1, wherein the liquid crystal parallel alignment layer comprises a parallel rubbed polyimide alignment layer or a light-operated liquid crystal alignment layer.
6. A liquid crystal-type radial polarization light converter according to claim 1, wherein the predetermined gap is between 10 μ ι η -20 μ ι η.
7. The liquid crystal-type radial polarization light converter of claim 1, further comprising a spacer or a polyester spacer film for controlling a spacing between the first substrate and the second substrate.
8. A liquid crystal-type radially polarized light converter according to any of claims 1-7, wherein said patterned bank layer has an array of bank holes comprising a plurality of said circular bank holes.
9. A preparation method of a liquid crystal type radial polarized light converter is characterized by comprising the following steps:
providing a first substrate, and forming a patterned cofferdam layer on the surface of the first substrate, wherein the patterned cofferdam layer is provided with at least one circular cofferdam hole which penetrates through the patterned cofferdam layer and exposes the surface of the first substrate;
coating liquid crystal on the patterned cofferdam layer to form liquid crystal microdroplets in the circular cofferdam holes;
providing a second substrate, and forming a liquid crystal parallel alignment layer on the surface of the second substrate;
the first substrate and the second substrate are attached and sealed, the liquid crystal parallel arrangement alignment layer and the patterned cofferdam layer are arranged oppositely, and a preset gap is reserved to form a liquid crystal type radial polarized light converter;
the liquid crystal droplets are unfolded and arranged in the preset gap between the patterned cofferdam layer and the liquid crystal parallel arrangement alignment layer and the circular cofferdam hole in the process of laminating and sealing the substrate, liquid crystal molecules are radially distributed in the circular cofferdam hole, the liquid crystal molecules are parallelly arranged on the surface of the liquid crystal parallel arrangement alignment layer, and the liquid crystal molecules are twisted-radially arranged between the patterned cofferdam layer and the liquid crystal parallel arrangement alignment layer.
10. The method of claim 9, wherein the step of forming a patterned bank layer on the surface of the first substrate comprises:
forming a photoresist layer on the surface of the first substrate;
carrying out exposure, development and post-baking treatment on the photoresist layer to form a patterned photoresist layer, wherein the patterned photoresist layer comprises at least one circular convex part;
forming a cofferdam material layer on the surface of the first substrate with the patterned photoresist layer;
and removing the cofferdam material layer on the patterned photoresist layer so as to form a patterned cofferdam layer on the surface of the first substrate, wherein the patterned cofferdam layer is provided with at least one circular cofferdam hole penetrating through the patterned cofferdam layer, and the circular cofferdam hole corresponds to the position of the circular bulge.
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