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CN111883415A - Mass Analyzers for Mass Spectrometers - Google Patents

Mass Analyzers for Mass Spectrometers Download PDF

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CN111883415A
CN111883415A CN202010910603.0A CN202010910603A CN111883415A CN 111883415 A CN111883415 A CN 111883415A CN 202010910603 A CN202010910603 A CN 202010910603A CN 111883415 A CN111883415 A CN 111883415A
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grid
drift tube
ion drift
magnetic ion
mass
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李向广
蔡克亚
尚元贺
韩乐乐
李康康
张子奇
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Autobio Experimental Instrument Zhengzhou Co Ltd
Autobio Labtec Instruments Zhengzhou Co Ltd
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Autobio Experimental Instrument Zhengzhou Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • H01J49/065Ion guides having stacked electrodes, e.g. ring stack, plate stack
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/443Dynamic spectrometers
    • H01J49/446Time-of-flight spectrometers

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  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

本发明公开了一种适于质谱仪的质量分析器,包括钛或钛合金材料制成的无磁离子漂移管,所述无磁离子漂移管内设置有至少一个栅极,所述栅极用于加载负电压。本发明优点在于设置在所述无磁离子漂移管内的栅极,通过对栅极加载负电压,对进入无磁离子漂移管内的带正电荷的样品离子吸引以提高样品离子的飞行速度;同时如图2所示,利用栅极6阻止自检测器4溅射出的二次电子5进入无磁离子漂移管内,以降低检测信号产生的波动和噪声,达到提高质谱仪整体分辨率之目的。通过设置多层栅极进行层层阻拦,使二次电子对样品离子的影响降至最低,最大限度的消除了检测信号产生的波动和噪声。

Figure 202010910603

The invention discloses a mass analyzer suitable for a mass spectrometer, comprising a non-magnetic ion drift tube made of titanium or titanium alloy material, wherein at least one grid is arranged in the non-magnetic ion drift tube, and the grid is used for Load negative voltage. The advantage of the present invention lies in that the grid arranged in the non-magnetic ion drift tube, by applying a negative voltage to the grid, attracts the positively charged sample ions entering the non-magnetic ion drift tube to improve the flight speed of the sample ions; As shown in FIG. 2 , the grid 6 is used to prevent the secondary electrons 5 sputtered from the detector 4 from entering the non-magnetic ion drift tube, so as to reduce the fluctuation and noise of the detection signal and improve the overall resolution of the mass spectrometer. By setting up multi-layer gates for layer-by-layer blocking, the influence of secondary electrons on sample ions is minimized, and the fluctuation and noise generated by the detection signal are eliminated to the greatest extent.

Figure 202010910603

Description

适于质谱仪的质量分析器Mass Analyzers for Mass Spectrometers

技术领域technical field

本发明涉及飞行时间质谱仪,尤其是涉及适于质谱仪的质量分析器。The present invention relates to time-of-flight mass spectrometers, and more particularly to mass analyzers suitable for mass spectrometers.

背景技术Background technique

在基质辅助激光解析电离飞行时间质谱仪(MALDI-TOF MS;以下简称质谱仪)中,被鉴定样品是通过脉冲激光轰击样品,使样品离子化。通过电场控制离子的运行轨迹,使离子按设计路径运动;离子由离子源开始运行,不同质量的离子在电场控制下经由质量分析器进行筛选后进入检测器,检测器将不同强度的电信号转换为相应的图谱信号用于对鉴定结果的区分。In matrix-assisted laser desorption ionization time-of-flight mass spectrometer (MALDI-TOF MS; hereinafter referred to as mass spectrometer), the identified sample is ionized by bombarding the sample with a pulsed laser. The trajectory of the ions is controlled by the electric field, so that the ions move according to the designed path; the ions start to run from the ion source, and the ions of different masses are screened by the mass analyzer under the control of the electric field and then enter the detector, and the detector converts the electrical signals of different intensities. The corresponding spectral signals are used to distinguish the identification results.

如图3所示,样品离子3从离子源1获得初始动能后以极高的速度进入质量分析器2(离子漂移管道)内飞行漂移,离子飞行漂移的时间与离子质荷比m/z的平方根成正比,质荷比越大,飞行的速度越慢,到达检测器4的时间越长。根据这一原则,可以把不同质荷比的离子因其飞行速度不同而分离,依次按顺序到达检测器4;质量分析器2的长度L越长,分辨率越高。但是实际工程实践中,受空间及加工难度的限制,质量分析器2的长度L一般在0.5m~1.5m之间,所以离子在质量分析器2中的飞行时间受质量分析器长度限制是存在极限的,若需要继续提高不同质荷比(m/z)的离子对应的漂移时间差异,以提高质谱仪的分辨率,则只能提高加速电场电压U1;但是在工程实践中,目前的加速电场电压U1已经达到了+20KV的极限强度。同时,如图4所示,检测器4受到离子撞击之后,会产生二次电子5反射回质量分析器2内,能量大的二次电子5甚至会冲击到离子源1,对质谱仪的信号产生较大的干扰。因此,如何在受限于质量分析器长度L和加速电场电压U1的清况下,进一步提升质谱仪的分辨率,是本领域技术人员研究的课题。As shown in Figure 3, the sample ion 3 obtains the initial kinetic energy from the ion source 1 and enters the mass analyzer 2 (ion drift pipe) at a very high speed to fly and drift. The time of ion flight drift is related to the ion mass-to-charge ratio m/z The square root is proportional. The larger the mass-to-charge ratio, the slower the flight speed and the longer the time to reach the detector 4. According to this principle, ions with different mass-to-charge ratios can be separated due to their different flight speeds, and arrive at the detector 4 in sequence; the longer the length L of the mass analyzer 2, the higher the resolution. However, in actual engineering practice, due to the limitation of space and processing difficulty, the length L of the mass analyzer 2 is generally between 0.5m and 1.5m, so the flight time of ions in the mass analyzer 2 is limited by the length of the mass analyzer. Ultimately, if it is necessary to continue to improve the drift time difference corresponding to ions with different mass-to-charge ratios (m/z) to improve the resolution of the mass spectrometer, only the accelerating electric field voltage U 1 can be increased; but in engineering practice, the current The accelerating electric field voltage U 1 has reached the ultimate strength of +20KV. At the same time, as shown in FIG. 4 , after the detector 4 is hit by ions, secondary electrons 5 will be generated and reflected back into the mass analyzer 2 , and the secondary electrons 5 with high energy will even impact the ion source 1 , which will affect the signal of the mass spectrometer. cause greater interference. Therefore, how to further improve the resolution of the mass spectrometer under the condition of being limited by the length L of the mass analyzer and the accelerating electric field voltage U 1 is a subject of research by those skilled in the art.

发明内容SUMMARY OF THE INVENTION

本发明目的在于提供一种适于质谱仪的质量分析器,达到提升质量分析器的时间分辨,从而实现质谱仪整体分辨率的提升。The purpose of the present invention is to provide a mass analyzer suitable for a mass spectrometer, so as to improve the time resolution of the mass analyzer, thereby improving the overall resolution of the mass spectrometer.

为实现上述目的,本发明采取下述技术方案:To achieve the above object, the present invention adopts the following technical solutions:

本发明所述适于质谱仪的质量分析器,包括钛或钛合金材料制成的无磁离子漂移管,所述无磁离子漂移管内设置有至少一个栅极,所述栅极用于加载负电压。The mass analyzer suitable for mass spectrometers of the present invention includes a non-magnetic ion drift tube made of titanium or titanium alloy material, and at least one grid is arranged in the non-magnetic ion drift tube, and the grid is used to load negative Voltage.

所述栅极为筛网状结构,垂直于样品离子飞行方向设置所述无磁离子漂移管内。The grid is a mesh-like structure, and is arranged in the non-magnetic ion drift tube perpendicular to the flight direction of the sample ions.

所述栅极为一个,设置在所述无磁离子漂移管内距离检测器1~10mm位置处。There is one grid, which is arranged in the non-magnetic ion drift tube at a distance of 1 to 10 mm from the detector.

所述栅极为二个,第一所述栅极设置在所述无磁离子漂移管内距离检测器1~10mm位置处,第二所述栅极设置在所述无磁离子漂移管内的中部。There are two grids, the first grid is arranged in the non-magnetic ion drift tube at a distance of 1 to 10 mm from the detector, and the second grid is arranged in the middle of the non-magnetic ion drift tube.

两个所述栅极的网孔在样品离子飞行方向上对应重叠。The meshes of the two grids overlap correspondingly in the flight direction of the sample ions.

所述栅极加载的电压为-100~-1000V,所述栅极的网孔面积率大于或等于80%。The voltage loaded by the gate is -100~-1000V, and the mesh area ratio of the gate is greater than or equal to 80%.

作为优选方案,所述栅极加载的电压为-550~-800V,所述栅极的网孔面积率大于或等于90%。As a preferred solution, the voltage applied to the gate is -550~-800V, and the mesh area ratio of the gate is greater than or equal to 90%.

作为优选方案,所述栅极为多个,第一所述栅极设置在所述无磁离子漂移管内距离检测器1~10mm位置处,其余所述栅极间隔设置在所述无磁离子漂移管内第一所述栅极的下方。As a preferred solution, there are multiple grids, the first grid is arranged in the non-magnetic ion drift tube at a distance of 1 to 10 mm from the detector, and the rest of the grids are arranged in the non-magnetic ion drift tube at intervals below the first gate.

第一所述栅极加载有负电压;位于第一所述栅极下方的所述栅极不加载电压。The first said gate is loaded with a negative voltage; the gate below the first said gate is not loaded with a voltage.

所有所述栅极的网孔在样品离子飞行方向上对应重叠。The meshes of all the grids overlap correspondingly in the flight direction of the sample ions.

本发明优点在于设置在所述无磁离子漂移管内的栅极,通过对栅极加载负电压,对进入无磁离子漂移管内的带正电荷的样品离子吸引以提高样品离子的飞行速度;同时如图2所示,利用栅极6阻止自检测器4溅射出的二次电子5进入无磁离子漂移管内,以降低检测信号产生的波动和噪声,达到提高质谱仪整体分辨率之目的。通过设置多层栅极进行层层阻拦,使二次电子对样品离子的影响降至最低,最大限度的消除了检测信号产生的波动和噪声。The advantage of the present invention lies in that the grid arranged in the non-magnetic ion drift tube, by applying a negative voltage to the grid, attracts the positively charged sample ions entering the non-magnetic ion drift tube to improve the flight speed of the sample ions; As shown in FIG. 2 , the grid 6 is used to prevent the secondary electrons 5 sputtered from the detector 4 from entering the non-magnetic ion drift tube, so as to reduce the fluctuation and noise of the detection signal and improve the overall resolution of the mass spectrometer. By setting up multi-layer gates for layer-by-layer blocking, the influence of secondary electrons on sample ions is minimized, and the fluctuation and noise generated by the detection signal are eliminated to the greatest extent.

附图说明Description of drawings

图1是本发明质量分析器组成的质谱仪的结构示意图。FIG. 1 is a schematic structural diagram of a mass spectrometer composed of a mass analyzer of the present invention.

图2是本发明质量分析器的栅极抑制二次电子的示意图。FIG. 2 is a schematic diagram of the grid of the mass analyzer of the present invention suppressing secondary electrons.

图3是现有质谱仪的结构示意图。FIG. 3 is a schematic structural diagram of a conventional mass spectrometer.

图4是现有质谱仪的检测器产生二次电子的示意图。FIG. 4 is a schematic diagram of the generation of secondary electrons by a detector of a conventional mass spectrometer.

具体实施方式Detailed ways

下面结合附图对本发明的实施例作详细说明,本实施例在以本发明技术方案为前提下进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述实施例。The embodiments of the present invention will be described in detail below with reference to the accompanying drawings. This embodiment is implemented on the premise of the technical solution of the present invention, and provides detailed implementation modes and specific operation processes, but the protection scope of the present invention is not limited to the following described embodiment.

如图1、2所示,本发明所述适于质谱仪的质量分析器,包括钛或钛合金材料制成的无磁离子漂移管2.1,无磁离子漂移管2.1内设置有一个栅极6,栅极6用于加载与样品离子3极性相反的电压U2。在本实施例中,样品离子3带正电荷,因此栅极6上加载有负电压U2As shown in Figures 1 and 2, the mass analyzer suitable for mass spectrometers according to the present invention includes a non-magnetic ion drift tube 2.1 made of titanium or titanium alloy material, and a grid 6 is arranged in the non-magnetic ion drift tube 2.1. , the grid 6 is used to load the voltage U 2 with the opposite polarity to the sample ion 3 . In this embodiment, the sample ions 3 are positively charged, so the gate 6 is loaded with a negative voltage U 2 .

在使用时,样品离子3以一定的速度飞过栅极6,并到达检测器4,当检测器4受到样品离子3撞击产生二次电子5时,二次电子5散射至无磁离子漂移管2.1内,在到达栅极6时,由于栅极6上加载有负电压而二次电子5带负电荷,因此对二次电子5产生排斥作用,从而阻止二次电子5穿过栅极6在无磁离子漂移管2.1内飞行,确保样品离子3的正常飞行,避免了二次电子5对仪器检测产生干扰。When in use, the sample ions 3 fly over the grid 6 at a certain speed and reach the detector 4. When the detector 4 is hit by the sample ions 3 to generate secondary electrons 5, the secondary electrons 5 are scattered to the non-magnetic ion drift tube In 2.1, when reaching the grid 6, the secondary electrons 5 are negatively charged due to the negative voltage loaded on the grid 6, so the secondary electrons 5 are repelled, thereby preventing the secondary electrons 5 from passing through the grid 6. The non-magnetic ion drift tube 2.1 flies inside to ensure the normal flight of the sample ions 3 and avoids the interference of the secondary electron 5 to the instrument detection.

在本实施例中,栅极6设置有一个,栅极6选择筛网状结构,垂直于样品离子3飞行方向设置在无磁离子漂移管2.1内距检测器4的距离为1~10mm位置处。从而及时将产生的二次电子5阻止并反射分散,尽可能避免二次电子5干扰样品离子3的飞行。加载在栅极6上的电压U2在-100~-1000V选择,优选-550~-800V。In this embodiment, one grid 6 is provided, and the grid 6 selects a mesh-like structure, which is perpendicular to the flight direction of the sample ions 3 and is arranged in the non-magnetic ion drift tube 2.1 at a distance of 1~10mm from the detector 4 . Therefore, the generated secondary electrons 5 are prevented, reflected and dispersed in time, so as to prevent the secondary electrons 5 from interfering with the flight of the sample ions 3 as much as possible. The voltage U 2 loaded on the gate 6 is selected from -100 to -1000V, preferably -550 to -800V.

进一步地,为了避免栅极6阻挡过多的样品离子3通过而影响检测器4的检测信号强度,栅极6的网孔面积率大于或等于80%,优选大于或等于90%。Further, in order to prevent the grid 6 from blocking the passage of too many sample ions 3 and affecting the detection signal intensity of the detector 4, the mesh area ratio of the grid 6 is greater than or equal to 80%, preferably greater than or equal to 90%.

当然,在本发明的其他实施例中,在无磁离子漂移管2.1内也可以设置两个或多个栅极,第一栅极6设置在无磁离子漂移管2.1内,与检测器4的距离为1~10mm,其余栅极间隔设置在无磁离子漂移管2.1内第一栅极6的下方。例如图2所示,设置有两个栅极,第一栅极6设置在无磁离子漂移管2.1内距检测器4的距离为1~10mm(例如1.5mm、2 mm、3 mm、4 mm、5mm、6 mm、5mm、8 mm、9 mm)位置处,第二栅极7设置在无磁离子漂移管2.1内的中部位置。两个栅极6、7的网孔在样品离子3飞行方向上对应重叠,以避免样品离子3飞行过程中受阻过大,确保样品离子3的通过率。在使用时,两个或多个栅极重叠设计,其网孔对应重叠,不会因为栅极多而影响样品离子3的通过率,由于二次电子5是散射状,当少量二次电子5由于初速度过大而穿过第一栅极6后,其以原飞行方向在无磁离子漂移管2.1内飞行,部分撞击在无磁离子漂移管2.1内壁,另一部分飞行至第二栅极处而被第二栅极7拦截。Of course, in other embodiments of the present invention, two or more grids may also be arranged in the non-magnetic ion drift tube 2.1, and the first grid 6 is arranged in the non-magnetic ion drift tube 2.1, which is connected to the detector 4. The distance is 1-10 mm, and the remaining grid spacings are arranged below the first grid 6 in the non-magnetic ion drift tube 2.1. For example, as shown in FIG. 2 , two grids are provided, and the first grid 6 is arranged in the non-magnetic ion drift tube 2.1 and the distance from the detector 4 is 1-10 mm (for example, 1.5 mm, 2 mm, 3 mm, 4 mm) , 5 mm, 6 mm, 5 mm, 8 mm, 9 mm), the second grid 7 is arranged in the middle of the non-magnetic ion drift tube 2.1. The meshes of the two grids 6 and 7 overlap correspondingly in the flight direction of the sample ions 3 , so as to prevent the sample ions 3 from being hindered too much during the flight and ensure the pass rate of the sample ions 3 . When in use, two or more grids are designed to overlap, and their meshes overlap correspondingly, so that the pass rate of sample ions 3 will not be affected due to the large number of grids. Since the secondary electrons 5 are scattered, when a small amount of secondary electrons 5 After passing through the first grid 6 due to its too large initial velocity, it flies in the non-magnetic ion drift tube 2.1 in the original flight direction, part of it hits the inner wall of the non-magnetic ion drift tube 2.1, and the other part flies to the second grid Instead, it is intercepted by the second grid 7 .

在本发明的其他实施例中,第一栅极加载有负电压;位于第一栅极下方的栅极不加载电压。利用第一栅极6的负电压阻止二次电子5扩散并吸引飞行的样品离子。其下方的栅极利用与第一栅极网孔的重叠,不会影响样品离子3的通过率,同时又可以利用其非网孔部分拦截倾斜飞行的二次电子5。在本实施例中,第一栅极6为金属筛网状,其下方的栅极可以采用导电材料或绝缘材料。In other embodiments of the present invention, the first gate is loaded with a negative voltage; the gate under the first gate is not loaded with a voltage. The negative voltage of the first grid 6 prevents the diffusion of the secondary electrons 5 and attracts the flying sample ions. The grid below it overlaps with the mesh of the first grid, which will not affect the pass rate of the sample ions 3, and at the same time, the non-mesh portion of the grid can intercept the secondary electrons 5 flying obliquely. In this embodiment, the first grid 6 is in the shape of a metal mesh, and the grid below the grid can be made of conductive material or insulating material.

Claims (10)

1.一种适于质谱仪的质量分析器,其特征在于:包括钛或钛合金材料制成的无磁离子漂移管,所述无磁离子漂移管内设置有至少一个栅极,所述栅极用于加载负电压。1. A mass analyzer suitable for a mass spectrometer, characterized in that it comprises a non-magnetic ion drift tube made of titanium or titanium alloy material, wherein at least one grid is provided in the non-magnetic ion drift tube, and the grid For loading negative voltages. 2.根据权利要求1所述适于质谱仪的质量分析器,其特征在于:所述栅极为筛网状结构,垂直于样品离子飞行方向设置所述无磁离子漂移管内。2 . The mass analyzer suitable for a mass spectrometer according to claim 1 , wherein the grid is a mesh-like structure, and is arranged in the non-magnetic ion drift tube perpendicular to the flight direction of the sample ions. 3 . 3.根据权利要求2所述适于质谱仪的质量分析器,其特征在于:所述栅极为一个,设置在所述无磁离子漂移管内距离检测器1~10mm位置处。3 . The mass analyzer suitable for mass spectrometer according to claim 2 , wherein the grid is one, which is arranged in the non-magnetic ion drift tube at a distance of 1-10 mm from the detector. 4 . 4.根据权利要求2所述适于质谱仪的质量分析器,其特征在于:所述栅极为二个,第一所述栅极设置在所述无磁离子漂移管内距离检测器1~10mm位置处,第二所述栅极设置在所述无磁离子漂移管内的中部。4 . The mass analyzer suitable for a mass spectrometer according to claim 2 , wherein there are two grids, and the first grid is arranged in the non-magnetic ion drift tube at a distance of 1 to 10 mm from the detector. 5 . where the second grid is arranged in the middle of the non-magnetic ion drift tube. 5.根据权利要求4所述适于质谱仪的质量分析器,其特征在于:两个所述栅极的网孔在样品离子飞行方向上对应重叠。5. The mass analyzer suitable for a mass spectrometer according to claim 4, wherein the meshes of the two grids overlap correspondingly in the flight direction of the sample ions. 6.根据权利要求2-5任一项所述适于质谱仪的质量分析器,其特征在于:所述栅极加载的电压为-100~-1000V,所述栅极的网孔面积率大于或等于80%。6. The mass analyzer suitable for a mass spectrometer according to any one of claims 2-5, wherein the voltage applied to the grid is -100~-1000V, and the mesh area ratio of the grid is greater than or equal to 80%. 7.根据权利要求6所述适于质谱仪的质量分析器,其特征在于:所述栅极加载的电压为-550~-800V,所述栅极的网孔面积率大于或等于90%。7 . The mass analyzer suitable for a mass spectrometer according to claim 6 , wherein the voltage applied to the grid is -550~-800V, and the mesh area ratio of the grid is greater than or equal to 90%. 8 . 8.根据权利要求2所述适于质谱仪的质量分析器,其特征在于:所述栅极为多个,第一所述栅极设置在所述无磁离子漂移管内距离检测器1~10mm位置处,其余所述栅极间隔设置在所述无磁离子漂移管内第一所述栅极的下方。8 . The mass analyzer suitable for a mass spectrometer according to claim 2 , wherein there are multiple grids, and the first grid is arranged in the non-magnetic ion drift tube at a distance of 1 to 10 mm from the detector. 9 . and the rest of the grids are spaced below the first grid in the non-magnetic ion drift tube. 9.根据权利要求8所述适于质谱仪的质量分析器,其特征在于:第一所述栅极加载有负电压;位于第一所述栅极下方的所述栅极无电压。9 . The mass analyzer suitable for a mass spectrometer according to claim 8 , wherein: the first grid is loaded with a negative voltage; the grid below the first grid has no voltage. 10 . 10.根据权利要求8或9所述适于质谱仪的质量分析器,其特征在于:所有所述栅极的网孔在样品离子飞行方向上对应重叠。10. The mass analyzer suitable for a mass spectrometer according to claim 8 or 9, wherein the meshes of all the grids are correspondingly overlapped in the flight direction of the sample ions.
CN202010910603.0A 2020-09-02 2020-09-02 Mass Analyzers for Mass Spectrometers Pending CN111883415A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1288493A (en) * 1970-03-05 1972-09-13
US4458149A (en) * 1981-07-14 1984-07-03 Patrick Luis Muga Time-of-flight mass spectrometer
US20020020817A1 (en) * 2000-01-20 2002-02-21 Feller W. Bruce Mass spectrometry detector
CN103314427A (en) * 2011-01-10 2013-09-18 瓦里安半导体设备公司 Technique and apparatus for monitoring ion mass, energy, and angle in processing systems
CN212412000U (en) * 2020-09-02 2021-01-26 安图实验仪器(郑州)有限公司 Mass analyser for mass spectrometer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1288493A (en) * 1970-03-05 1972-09-13
US4458149A (en) * 1981-07-14 1984-07-03 Patrick Luis Muga Time-of-flight mass spectrometer
US20020020817A1 (en) * 2000-01-20 2002-02-21 Feller W. Bruce Mass spectrometry detector
CN103314427A (en) * 2011-01-10 2013-09-18 瓦里安半导体设备公司 Technique and apparatus for monitoring ion mass, energy, and angle in processing systems
CN212412000U (en) * 2020-09-02 2021-01-26 安图实验仪器(郑州)有限公司 Mass analyser for mass spectrometer

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