CN111867226A - A plasma jet generation system with recyclable gas - Google Patents

Abstract

The invention discloses a plasma jet generation system that can recycle gas, which comprises a plasma jet assembly, a gas mixing chamber, a working gas supply passage and a precursor gas supply passage, and the working gas supply passage is connected to the gas mixing chamber , used to provide the working gas, the precursor gas supply channel is connected to the gas mixing chamber, used to provide the precursor gas carrying the monomer material, and the gas mixing chamber mixes the working gas and the precursor gas to supply gas to the plasma jet assembly, so that the plasma The body jet assembly sprays the plasma jet, and also includes a protective cover and a return air passage. The protective cover is used to cover the surface of the material to be processed to form a closed space isolated from the outside air. The plasma jet can only be sprayed in the closed space. A return air port is provided, and the return air port is connected to the air mixing chamber through the return air passage. The invention can eliminate the interference of the external impurity gas on the surface treatment of the material, strengthen the plasma jet treatment effect, effectively reduce the gas waste, and improve the environmental protection economy.

Description

A plasma jet generation system with recyclable gas

technical field

The invention relates to the field of plasma technology, in particular to a plasma jet generation system that can recycle gas.

Background technique

With the rapid development of plasma technology, the application of plasma in the fields of material processing, energy chemical industry and biomedicine has been more and more popularized. The plasma jet transports the active particles in the discharge area to the treated area through the gas flow to complete the material modification. However, during the discharge process, the air at the nozzle of the jet tube is easily ionized to form various oxygen-containing particles, which is not conducive to the hydrophobic modification of the material and greatly limits the effect of plasma jet treatment. Therefore, it is necessary to further optimize the plasma device, isolate the external impurity gas (mainly air), and improve the treatment efficiency of the surface of the plasma-acting material.

At present, the gas flow rate required to generate the plasma jet is generally 3 liters/min, and the processing time is generally 150 seconds. On the one hand, the gas consumption of the working gas during the processing is large and the cost is high; The working gas is directly mixed into the air, which damages the air quality and greatly limits the practical application of material surface treatment with plasma jets. Therefore, it is an urgent problem to be solved at present to collect and recycle the working gas ejected from the jet tube.

SUMMARY OF THE INVENTION

In view of the above-mentioned defects of the prior art, the purpose of the present invention is to provide a plasma jet generation system that can recycle gas. The present invention can eliminate the interference of external impurity gas on the surface treatment of materials, strengthen the plasma jet treatment effect, and simultaneously. Effectively reduce gas waste and improve environmental protection and economy.

One of the objectives of the present invention is achieved through such a technical solution, a plasma jet generation system that can recycle gas, comprising a plasma jet assembly, a gas mixing chamber, a working gas supply passage and a precursor gas supply passage, The working gas supply passage is connected to the gas mixing chamber for providing working gas, and the precursor gas supply passage is connected to the gas mixing chamber for providing the precursor gas carrying the monomer material, and the gas mixing chamber will work After the gas and the precursor gas are mixed, the plasma jet assembly is supplied with gas, so that the plasma jet assembly sprays the plasma jet, and also includes a protective cover and a return gas passage. A closed space of air, the plasma jet can only be sprayed in the closed space, and the protective cover is provided with an air return port, and the air return port is connected to the air mixing chamber through the return air passage to connect the protective cover to the air. The working gas inside is recovered to the mixing chamber.

Further, the protective cover has a hollow space inside and an open bottom surface, so as to be in close contact with the surface of the material to be processed.

Further, the protective cover is made of insulating material.

Further, a drying bottle and an air pump are arranged on the return air passage in sequence from the air outlet. The working gas is discharged into the mixing chamber.

Further, the working gas supply passage is provided with a first flow valve, and the precursor gas supply passage is provided with a second flow valve.

Further, a first flow meter is arranged on the working gas supply passage, a second flow meter is arranged on the precursor gas supply passage, and a third flow meter is arranged on the return gas passage near the gas mixing chamber .

Further, it also includes a flow controller, the flow controller is used to read the flow data of the first flowmeter, the second flowmeter and the third flowmeter, and control the power of the air pump when the surface treatment of the material to be processed starts. , the opening degree of the first flow valve and the second flow valve, so that the flow data of the first flow meter reaches the first target flow, the flow data of the second flow meter is maintained at a predetermined value, and the flow data of the third flow meter reaches the first target flow target flow; and after maintaining for a preset time, closing the first flow valve, the second flow valve and the air pump.

Further, the plasma jet assembly includes a high-voltage power supply and at least one plasma jet tube, one end of the plasma jet tube extends into and is fixed with a needle-shaped electrode, the needle-shaped electrode is electrically connected to the high-voltage power supply, and the The other end of the plasma jet tube is open and extends into the closed space, the interior of the plasma jet tube near the opening is provided with a grounded ground electrode, and the gas mixing chamber supplies the plasma to the plasma by fixing one end of the needle-shaped electrode. Jet tube air supply.

Further, the plasma jet tube is made of high temperature resistant insulating material.

Further, the needle-shaped electrode is a tungsten needle, and the ground electrode is made of copper foil material.

Owing to adopting the above-mentioned technical scheme, the present invention has the following advantages:

1. Save the gas consumption of the working gas and improve the environmental protection and economy;

2. Since the outside air is isolated during the surface treatment of the material, the gas waste is effectively reduced and the processing speed is accelerated;

3. The recovered gas contains effective ions with a high concentration, which further reacts with the surface of the treated material when reused, which improves the modification effect of the plasma.

Other advantages, objects, and features of the present invention will be set forth in the description that follows, and will be apparent to those skilled in the art based on a study of the following, to the extent that is taught in the practice of the present invention.

Description of drawings

The accompanying drawings of the present invention are described as follows:

FIG. 1 is a schematic diagram of the connection of a plasma jet generation system for recyclable gas.

Detailed ways

The present invention will be further described below with reference to the accompanying drawings and embodiments.

Embodiment, as shown in Figure 1; a plasma jet generation system that can recycle gas, including a plasma jet assembly 10, a gas mixing chamber 20, a working gas supply passage 30 and a precursor gas supply passage 40, the working gas The gas supply passage 30 is connected to the gas mixing chamber 20 for providing working gas, and the precursor gas supply passage 40 is connected to the gas mixing chamber 20 for providing the precursor gas carrying the monomer material. The gas mixing chamber 20 combines the working gas and the precursor. After the gases are mixed, the plasma jet assembly 10 is supplied with gas, so that the plasma jet assembly 10 sprays the plasma jet. In addition, the system also includes a protective cover 50 and a return gas passage 60, and the protective cover 50 is used to cover the surface of the material to be processed. A closed space isolated from the outside air is formed on the upper surface, and the plasma jet can only be sprayed in the closed space. The protective cover 50 is provided with an air return port 51. The working gas inside is recovered to the gas mixing chamber 20 .

The gas supply source of the working gas supply passage 30 may be the first gas cylinder 70 , and the gas supply source of the precursor gas gas supply passage 40 may be the second gas cylinder 80 .

In this embodiment, the protective cover 50 has a hollow space inside and an open bottom surface, which is in close contact with the surface of the material to be processed. In this embodiment, the shape is hemispherical. In other embodiments, the protective cover 50 may be in a shape that can be closely combined with the surface of the material to be processed, such as a semi-ellipsoid and a rectangular parallelepiped. The protective cover 50 is usually made of insulating material, such as plastic or rubber, in this embodiment, plastic is used.

In order to speed up the recovery of the working gas, in this embodiment, a drying bottle 61 and an air pump 62 are arranged on the return gas passage 60 in sequence from the gas outlet 51, and the drying bottle 61 is used to dry and remove the working gas in the return gas passage 60. Oxygen, the air pump 62 is used to discharge the working gas in the return air passage 60 into the air mixing chamber 20 . Since the working gas can be recycled, the working gas supply passage 30 can reduce the amount of gas supplied.

In order to precisely control the gas flow of each passage, in this embodiment, the working gas supply passage 30 is provided with a first flow valve 31 , and the precursor gas supply passage 40 is provided with a second flow valve 41 . The working gas supply passage 30 is also provided with a first flow meter 32 , the precursor gas supply passage 40 is provided with a second flow meter 42 , and the return gas passage 60 is provided with a third flow meter 63 near the gas mixing chamber 20 . . The gas flow can be controlled by the first flow valve 31 , the second flow valve 41 and the air pump 62 , and the first flowmeter 32 , the second flowmeter 42 and the third flowmeter 63 can feedback the flow control effect.

When specifically controlling the flow, the system further includes a flow controller (not shown in the figure), the flow controller is used to read the flow data of the first flow meter 32, the second flow meter 42 and the third flow meter 63, and at the beginning of the flow control When the material to be treated is subjected to surface treatment, control the air pump 62 and the second flow valve 41 to close, and control the opening and closing degree of the first flow valve 31, so that the flow data of the first flow meter 32 reaches the first target flow; after maintaining the preset time , control the opening and closing degree of the second flow valve 41, so that the flow data of the second flow meter 42 is maintained at a predetermined value, and control the opening and closing degree of the first flow valve 31 and the exhaust speed of the air pump 62, so that the first flow meter 32 The flow data is reduced to half of the first target flow, while the flow data of the third flow meter 63 is slightly lower than the flow data of the first flow meter 32; and after continuing to maintain the preset time, close the first flow valve 31, the second flow Flow valve 41 and air pump 62 .

Hereinafter, the plasma jet generation system will be described in detail by taking the surface hydrophobic treatment of the epoxy resin plate as an example. In this example, argon is used as the working gas and the precursor gas, the monomer material carried by the precursor gas is hexamethyldisilazane (HMDSN), the preset time is 1 minute, and the first target flow rate is 1.5 liters/minute , the predetermined value is 20 ml/min.

The specific workflow is as follows:

1. Clean and dry the epoxy resin board;

2. Set the protective cover 50 on the surface of the epoxy resin board to form a closed space;

3. Open the first flow valve 31 and the air pump 62, feed the working gas (maintain at 3 liters/min), and keep it for 1 minute, until the air in each passage in the system is emptied;

4. Start the surface treatment of the epoxy resin board, control the power of the air pump 62, the opening and closing degrees of the first flow valve 31 and the second flow valve 41, so that the flow data of the first flow meter 32 reaches 1.5 liters/min, the second The flow data of the flow meter 42 is maintained at 20 ml/min, and the flow data of the third flow meter 63 is also 1.5 liters/min (that is, the working gas recovery rate is 1.5 liters/min), to ensure that the gas flow through the jet tube is still is about 3 liters/minute, and keep it for 1 minute;.

5. After holding for 1 minute, close the first flow valve 31, the second flow valve 41 and the air pump 62, and the surface treatment of the epoxy resin board is completed.

The plasma jet generation system of this embodiment is compared with the treatment process of the plasma jet generation system of the prior art, and the comparison results are shown in the following table:

By comparison, it can be seen that the plasma jet generation system of this embodiment not only saves the gas consumption of the working gas, but also shortens the processing time, speeds up the processing speed, and eliminates the interference of oxygen in the air during the processing process by recovering the working gas. , the processing effect is better.

The plasma jet assembly 10 is used as a device for generating plasma jets, and includes a high-voltage power supply 11 and at least one plasma jet tube 12 . In this embodiment, there is only one plasma jet tube 12 . If there are multiple plasma jet tubes 12 , a jet array structure can be formed.

One end of the plasma jet tube 12 protrudes into and is fixed with a needle-shaped electrode 13, the needle-shaped electrode 13 is electrically connected to the high-voltage power supply 11, the other end of the plasma jet tube 12 is opened and extends into the closed space, and the plasma jet tube 12 is close to The inside of the opening is provided with a grounded ground electrode 14 , and the gas mixing chamber 20 supplies gas to the plasma jet tube 12 through one end of the fixed needle electrode 13 .

The plasma jet tube 12 is usually made of a high temperature resistant insulating material, such as a quartz glass tube, the length may be 15-20 cm, and the diameter of the inner glass wall may be 0.5-0.8 mm.

The needle-shaped electrode 13 can be a tungsten needle or other needle-shaped conductor, the ground electrode 14 can be made of a conductive material such as copper foil, and the electrode width can be 1 cm.

In the above manner, the plasma jet generation system for recyclable gas according to the embodiment of the present invention isolates the outside air through the protective cover 50 , and recycles and reuses the working gas through the air return passage 60 . It can not only eliminate the interference of external impurity gas on the surface treatment of materials, but also strengthen the effect of plasma jet treatment, and at the same time effectively reduce gas waste and improve environmental protection and economy.

The above are only examples of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention are included in the application for pending approval of the present invention. within the scope of the claims.

It should be understood that the parts not described in detail in this specification belong to the prior art. Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be Modifications or equivalent replacements, without departing from the spirit and scope of the technical solution, should all be included in the scope of the claims of the present invention.

Claims (10)

1. A plasma jet generating system capable of recycling gas comprises a plasma jet component, a gas mixing cavity, a working gas supply passage and a precursor gas supply passage, wherein the working gas supply passage is connected into the gas mixing cavity and used for providing working gas, the precursor gas supply passage is connected into the gas mixing cavity and used for providing precursor gas carrying monomer materials, the gas mixing cavity mixes the working gas and the precursor gas and then supplies the gas to the plasma jet component, so that the plasma jet component sprays plasma jet, the plasma jet generating system is characterized by further comprising a protective cover and a gas return passage, the protective cover is used for covering a closed space which is formed on the surface of a material to be processed and used for isolating external air, the plasma jet can only be sprayed into the closed space, the protective cover is provided with a gas return port, and the gas return port is connected into the gas mixing cavity through the gas return passage, so as to recycle the working gas in the protective cover to the gas mixing cavity.

2. The plasma jet generating system as claimed in claim 1, wherein the shield is formed in a shape having a hollow space inside and an open bottom surface to be in close contact with a surface of a material to be treated.

3. A plasma-jet generating system, as claimed in claim 1 or 2, characterized in that the protective cover is made of an insulating material.

4. The plasma jet generating system according to claim 1, wherein a drying bottle and a gas pump are sequentially arranged on the air return passage from the gas outlet, the drying bottle is used for drying and deoxidizing the working gas in the air return passage, and the gas pump is used for discharging the working gas in the air return passage into the gas mixing chamber.

5. The plasma jet generating system of claim 4, wherein a first flow valve is disposed on the working gas supply passage and a second flow valve is disposed on the precursor gas supply passage.

6. The plasma jet generating system of claim 5, wherein a first flow meter is arranged on the working gas supply passage, a second flow meter is arranged on the precursor gas supply passage, and a third flow meter is arranged on the return gas passage and close to the gas mixing chamber.

7. The plasma jet generating system according to claim 6, further comprising a flow controller for reading flow data of the first flow meter, the second flow meter, and the third flow meter, and controlling the power of the air pump and the opening and closing degree of the first flow valve and the second flow valve so that the flow data of the first flow meter reaches a first target flow, the flow data of the second flow meter is maintained at a predetermined value, and the flow data of the third flow meter reaches a first target flow when surface treatment of the material to be treated is started; and closing the first flow valve, the second flow valve and the air pump after keeping the preset time.

8. The plasma jet generating system according to claim 1, wherein the plasma jet assembly includes a high voltage power supply and at least one plasma jet pipe, one end of the plasma jet pipe extends into and is fixed with a needle electrode, the needle electrode is electrically connected with the high voltage power supply, the other end of the plasma jet pipe is opened and extends into the closed space, a grounded ground electrode is arranged inside the plasma jet pipe close to the opening, and the gas mixing chamber supplies gas to the plasma jet pipe through one end of the fixed needle electrode.

9. The plasma jet generating system of claim 8, wherein the plasma jet pipe is made of a high temperature resistant insulating material.

10. The plasma-jet generating system of claim 8, wherein the needle electrode is a tungsten needle and the ground electrode is made of a copper foil material.

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