CN111855695B - Workpiece side periphery imaging system - Google Patents
Workpiece side periphery imaging system Download PDFInfo
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- CN111855695B CN111855695B CN202010723160.4A CN202010723160A CN111855695B CN 111855695 B CN111855695 B CN 111855695B CN 202010723160 A CN202010723160 A CN 202010723160A CN 111855695 B CN111855695 B CN 111855695B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 43
- 230000003287 optical effect Effects 0.000 claims description 31
- 239000011521 glass Substances 0.000 claims description 4
- 230000007547 defect Effects 0.000 description 25
- 238000010586 diagram Methods 0.000 description 25
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 230000006978 adaptation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
- G03B15/02—Illuminating scene
- G03B15/06—Special arrangements of screening, diffusing, or reflecting devices, e.g. in studio
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
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- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present disclosure provides a workpiece side periphery imaging system, comprising: a super telecentric lens; a cone, comprising: the inner wall capable of reflecting light and the first opening face the super-telecentric lens; and the illuminant is arranged inside the cone.
Description
Technical Field
The disclosure relates to the technical field of workpiece defect detection, in particular to a workpiece side circumference imaging system.
Background
Currently, in defect detection of cylindrical surfaces (e.g., the side edges of a wafer-shaped workpiece), it is often necessary to image the side edges of the workpiece with multiple cameras, respectively, which results in a system that is overly complex and costly. Or, an ultra-telecentric lens is used, and the side periphery of the workpiece is imaged in a polishing mode through a plane plate light source or a common annular light source, but the defect of the smaller side periphery surface of the workpiece cannot be imaged clearly in the mode, so that the higher miss probability is caused.
It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art.
Disclosure of Invention
It is an object of the present disclosure to provide a workpiece side imaging system.
Other features and advantages of the present disclosure will be apparent from the following detailed description, or may be learned in part by the practice of the disclosure.
According to one aspect of the present disclosure, there is provided a workpiece side periphery imaging system comprising: a super telecentric lens; a cone, comprising: the inner wall capable of reflecting light and the first opening face the super-telecentric lens; and the illuminant is arranged inside the cone.
According to an embodiment of the disclosure, the optical axis of the super-telecentric lens is collinear with the central axis of the cone; or, an included angle formed by the optical axis of the super-telecentric lens and the central axis of the cone is smaller than or equal to 10 degrees, and a cone point formed by the cone is smaller than or equal to 10 millimeters from the optical axis of the super-telecentric lens.
According to one embodiment of the present disclosure, the center of the illuminant is located at the center of the entrance pupil of the super-telecentric lens with respect to the cone shape.
According to an embodiment of the present disclosure, the light emitting body includes two light emitting regions or three light emitting regions, respectively emitting red, green or blue light.
According to an embodiment of the present disclosure, the light emitter comprises one of the following light emitters: spherical light emitters, cylindrical light emitters or planar light emitters.
According to an embodiment of the present disclosure, the light emitting body includes two light emitting regions or three light emitting regions, respectively emitting red, green or blue light.
According to an embodiment of the present disclosure, the luminaire is centrally arranged in the circumferential direction of the cone.
According to an embodiment of the present disclosure, the centerline of the illuminant is collinear with the centerline of the cone.
According to one embodiment of the disclosure, the included angle between the conical surface of the cone and the central axis is 45 degrees.
According to an embodiment of the present disclosure, the inner wall of the cone is mirrored.
According to an embodiment of the disclosure, the cone further comprises a second opening, the second opening is arranged at the bottom of the cone, and the area of the second opening is smaller than the area of the first opening.
According to an embodiment of the present disclosure, the workpiece side periphery imaging system further includes: and the glass table is arranged between the ultra-telecentric lens and the cone.
According to one embodiment of the present disclosure, when the surface to be imaged is cylindrical and the cylindrical axis is collinear with the optical axis of the super-telecentric lens, the radius of the annular virtual image is set to be twice the radius of curvature of the cylindrical surface.
According to the workpiece side periphery imaging system provided by the embodiment of the disclosure, when the ultra-telecentric lens is used for imaging the side periphery of the workpiece, the conventional common annular light source or the plate light source is replaced by the combination of the conical cup with the inner wall capable of reflecting light rays and the illuminant, so that the imaging showing force of the side periphery defect of the workpiece can be remarkably improved, and particularly, the imaging showing force of the 0.1 mm-level fine defect on the cylindrical surface is remarkably improved. When a common annular light source or a plate light source is used for providing a light source for photographing an ultra-telecentric lens, fine defects on the side periphery of a workpiece, particularly on a cylindrical surface (such as a wafer side surface) cannot be clearly imaged, a cone-shaped cup with a reflective light inner wall and a illuminant are used for providing the light source required for photographing the ultra-telecentric lens, the reflection characteristic of the cone-shaped cup is utilized, the light angle reflected to the side periphery of the workpiece to be measured is limited and concentrated, the display of the fine defects is prevented from being inhibited by excessive angle light, and meanwhile, the light angle further reflected to the ultra-telecentric lens via the side periphery of the workpiece to be measured is matched with the ultra-telecentric lens, so that the imaging display capability of the side periphery defects of the workpiece can be remarkably improved, and particularly the imaging display capability of the 0.1mm level fine defects on the cylindrical surface is remarkably improved. Further, when detecting the peripheral defect of the workpiece based on the peripheral image of the workpiece, the defect of the workpiece side Zhou Xiwei can be prevented from being missed, and the probability of missing detection can be reduced.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure. It will be apparent to those of ordinary skill in the art that the drawings in the following description are merely examples of the disclosure and that other drawings may be derived from them without undue effort.
Fig. 1 is an imaging schematic diagram of a super-telecentric lens according to an example.
Fig. 2A is a schematic perspective view of a workpiece side perimeter imaging system, according to an example embodiment.
Fig. 2B is a side view of a workpiece side perimeter imaging system, according to an example embodiment.
Fig. 2C is a schematic diagram of a cone, according to an example embodiment.
Fig. 3A is a schematic diagram showing a relationship between an optical axis L1 of the super telecentric lens 21 and a central axis L2 of the cone 22 according to an exemplary embodiment.
Fig. 3B is a schematic diagram showing a relationship between an optical axis L1 of the super telecentric lens 21 and a central axis L2 of the cone 22 according to another exemplary embodiment.
Fig. 3C is a schematic diagram showing a relationship between an optical axis L1 of the super telecentric lens 21 and a central axis L2 of the cone 22 according to still another exemplary embodiment.
Fig. 3D is a schematic diagram showing a relationship between an optical axis L1 of the super telecentric lens 21 and a central axis L2 of the cone 22 according to still another exemplary embodiment.
Fig. 4A is a top view of annular virtual images of the illuminant versus the cone, respectively, according to an example embodiment.
Fig. 4B is a side view of annular virtual images of the illuminant versus a cone, respectively, according to an example embodiment.
Fig. 4C is a schematic diagram illustrating a case where the surface of the workpiece to be measured is cylindrical, according to an exemplary embodiment.
Fig. 4D is a schematic diagram illustrating a workpiece to be measured as a wafer according to an exemplary embodiment.
Fig. 5A is a schematic diagram of a light 23 shown according to an exemplary embodiment.
Fig. 5B is a schematic view of a light 23 shown according to another exemplary embodiment.
Fig. 5C is a schematic view of a light emitter 23 shown according to yet another exemplary embodiment.
Fig. 6A is a schematic diagram showing a relationship between a center line L4 of the luminous body 23 and a center line L2 of the cone 22 according to an exemplary embodiment.
Fig. 6B is a schematic diagram showing a relationship between a center line L4 of the luminous body 23 and a center line L2 of the cone 22 according to another exemplary embodiment.
Fig. 6C is a schematic diagram showing a relationship between a center line L4 of the luminous body 23 and a center line L2 of the cone 22 according to still another exemplary embodiment.
Fig. 7A is a schematic diagram showing that the light emitting surface of the light emitter 23 includes two color patches according to an exemplary embodiment.
Fig. 7B is a schematic diagram showing that the light emitting surface of the light emitter 23 includes two color patches according to another exemplary embodiment.
Fig. 8A is a schematic diagram showing that the light emitting surface of the light emitter 23 includes three color patches according to an exemplary embodiment.
Fig. 8B is a schematic diagram showing that the light emitting surface of the light emitter 23 includes three color patches according to another exemplary embodiment.
Fig. 9 is a side view of another cone shown according to an exemplary embodiment.
Fig. 10 is a schematic perspective view of another workpiece side perimeter imaging system, shown according to an example embodiment.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments may be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus a repetitive description thereof will be omitted. Some of the block diagrams shown in the figures are functional entities and do not necessarily correspond to physically or logically separate entities. These functional entities may be implemented in software or in one or more hardware modules or integrated circuits or in different networks and/or processor devices and/or microcontroller devices.
In the description of the present disclosure, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present disclosure and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present disclosure.
In this disclosure, unless expressly stated or limited otherwise, a first feature being "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
Furthermore, in the description of the present disclosure, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature.
Common lenses (including human eyes) image objects at divergent angles of view, and telecentric lenses image objects at parallel angles of view. While a super telecentric Lens (Hypercentric Lens/Pericentric Lens) provides a converging view of the subject, i.e., the captured images are converging. Unlike other lenses, super-telecentric lenses can image the surface of an object parallel to the optical axis, i.e., can see both the top and sides of the subject in the image.
Fig. 1 is an imaging schematic diagram of a super-telecentric lens according to an example. As shown in fig. 1, when an object 2 (a bottle cap is taken as an example in the drawing) is imaged by using an ultra-telecentric lens 1, a captured image 3 includes not only a top image 301 corresponding to the top 201 of the object 2 but also a side periphery image 302 corresponding to the side periphery 202 of the object 2. The side circumference 202 of the subject 2 is parallel to the optical axis 4.
This functionality of the super telecentric lens avoids the need for multiple cameras or multiple mirrors in machine vision inspection or authentication applications, which can effectively reduce the complexity of the workpiece inspection system.
As an emerging technology, ultra-telecentric lenses are beginning to be used in workpiece side-week imaging or defect detection systems. However, although the super-telecentric lens has the advantages when applied to the detection of the side peripheral defects of the workpiece, the inventor of the present disclosure finds that if the super-telecentric lens is used in combination with a common annular light source or a plate light source commonly used in a system of the side peripheral defects of the workpiece, the photographed side peripheral images of the workpiece (particularly a wafer-shaped workpiece) are not clear, and defects on the side peripheral surface of the workpiece, particularly small defects on the side periphery, cannot be clearly imaged, resulting in missing detection of the defects; sometimes even images of the workpiece side periphery are not taken at all.
Therefore, there is a need to design a workpiece imaging system that effectively utilizes the advantages of an ultra-telecentric lens to provide high quality images of the workpiece side perimeter, particularly cylindrical surfaces (e.g., wafer side perimeter, arcuate side perimeter portions of a semi-wafer), by using a light source that is adaptable to various types of workpieces.
A workpiece imaging system provided by embodiments of the present disclosure is described below with reference to the accompanying drawings.
Fig. 2A is a schematic perspective view of a workpiece side perimeter imaging system, according to an example embodiment. Fig. 2B is a side view of a workpiece side perimeter imaging system, according to an example embodiment.
Referring to fig. 2A and 2B, the workpiece imaging system 20 includes: a super telecentric lens 21, a cone 22 and a illuminant 23. Wherein the super telecentric lens 21 is vertically placed.
As shown in fig. 2A, the cone 22 is cone-shaped, including: the inner wall 221 and the opening 222 can reflect light. Wherein the opening 222 is directed towards the super telecentric lens 21.
The inner wall 221 of the cone 22 is made of a material that reflects light, for example, the inner wall 221 may be a mirror surface, but the disclosure is not limited thereto, and the inner wall 221 of the cone 22 may be made of other materials that reflect light, and have uniform roughness on the inner wall 221.
In some embodiments, as shown in FIG. 2C, the angle θ between the conical surface 224 of the cone 22 and its central axis L2 may be set at 45 degrees, for example.
The workpiece Wp to be measured may be placed between the illuminant 23 and the super-telecentric lens 21. The light emitter 23 is disposed inside the cone 22, and light emitted from the light emitter 23 is reflected by the inner wall 221 of the cone 22 and is directed to the workpiece Wp to be measured through the opening 222, so as to provide a light source when the workpiece Wp to be measured is imaged through the ultra-telecentric lens.
According to the workpiece side periphery imaging system provided by the embodiment of the disclosure, when the ultra-telecentric lens is used for imaging the workpiece side periphery, the conventional common annular light source or plate light source is replaced by the combination of the cone cup with the inner wall capable of reflecting light rays and the illuminant, so that the imaging showing force of the workpiece side periphery defect can be remarkably improved, particularly, the imaging showing force of the 0.1 mm-level fine defect on the cylindrical surface is remarkably improved, the common annular light source or plate light source can not clearly image the workpiece side periphery, particularly, the fine defect on the cylindrical surface (such as a wafer side surface) when the light source is provided for photographing the ultra-telecentric lens, the light source required for photographing is provided for the ultra-telecentric lens by the cone cup with the inner wall capable of reflecting light rays and the illuminant, the light rays reflected to the workpiece side periphery to be detected are limited and concentrated by the reflection characteristic of the cone cup, the light rays at the excessive angles are prevented from inhibiting the showing of the fine defect, and meanwhile, the imaging showing force of the workpiece side periphery defect can be remarkably improved through the fact that the light rays angle reflected to the workpiece side periphery to the ultra-telecentric lens to be matched with the ultra-telecentric lens, and the imaging showing force of the 0.1 mm-level fine defect on the cylindrical surface can be remarkably improved. Further, when detecting the peripheral defect of the workpiece based on the peripheral image of the workpiece, the defect of the workpiece side Zhou Xiwei can be prevented from being missed, and the probability of missing detection can be reduced.
Fig. 3A-3D are schematic diagrams illustrating a relationship between an optical axis L1 of the super telecentric lens 21 and a central axis L2 of the cone 22, respectively, according to an exemplary embodiment.
In some embodiments, the optical axis L1 of the super telecentric lens 21 is substantially aligned with the central axis L2 of the cone 22. The substantially straight line may be, for example, as shown in fig. 3A, where the optical axis L1 of the super-telecentric lens 21 completely coincides with the central axis L2 of the cone 22, that is, the optical axis L1 is aligned with the central axis L2. Alternatively, as shown in fig. 3B, the optical axis L1 of the super-telecentric lens 21 and the central axis L2 of the cone 22 may be arranged in parallel, and the distance D1 therebetween does not exceed a first preset distance, and the first preset distance may be, for example, a value between 1mm and 10mm, and the size of the first preset distance may be set according to practical requirements during practical application.
In some embodiments, the optical axis L1 of the super-telecentric lens 21 and the central axis L2 of the cone 22 may also be intersected, for example, as shown in fig. 3C, an included angle α formed between the two may be smaller than or equal to a first preset angle, for example, the first preset angle may be 10 degrees, meanwhile, as shown in fig. 3D, a distance D2 between the cone tip O1 of the cone 22 and the optical axis L1 of the super-telecentric lens does not exceed a second preset distance, for example, the second preset distance is 10 millimeters, but the disclosure is not limited thereto.
Fig. 4A and 4B are top and side views, respectively, of an annular virtual image of an illuminant versus a cone, according to an example embodiment.
Referring to fig. 4A and 4B, the center O2 of the light emitter 23 forms an annular virtual image G1 with respect to the cone 22. As shown in the side view of the cone in fig. 4B, the center O3 of the annular virtual image G1 is located substantially at the entrance pupil center Cp of the super-telecentric lens 21, that is, the center O3 of the annular virtual image G1 is substantially coincident with the entrance pupil center Cp of the super-telecentric lens 21, and at this time, the plane of the annular virtual image G1 is substantially perpendicular to the optical axis L1 of the super-telecentric lens 21. The substantial coincidence means that the center O3 of the annular virtual image G1 and the center Cp of the entrance pupil of the super-telecentric lens 21 may be completely coincident, or may also be separated by no more than a third preset distance, for example, the third preset distance may be a value between 1mm and 10mm, and the size of the third preset distance may be set according to practical requirements in practical application. The approximately perpendicular plane refers to that the plane in which the annular virtual image G1 is located is completely perpendicular to the optical axis L1 of the super-telecentric lens 21, or the angle between the plane and the super-telecentric lens may not exceed a second preset angle, for example, the second preset angle may be a value between 1 degree and 10 degrees, and the fourth preset distance may be set according to actual requirements during practical application.
The entrance pupil center Cp of the super-telecentric lens 21 may also be referred to as a focal point (Convergence Point, cp), which may be determined experimentally, for example. For example, a flat light source is alternatively installed at the position of the super telecentric lens 21 where the CCD target surface is installed, and the lens is in a light emitting structure. A piece of white paper is placed in front of the lens, the distance between the white paper and the front end of the lens is different, and the light spot size is also different. When the spot diameter approaches the spot (i.e., the minimum area), the spot (spot) position is the position of the entrance pupil center Cp as shown in fig. 4B.
Fig. 4C is a schematic diagram illustrating a case where the surface of the workpiece to be measured is cylindrical, according to an exemplary embodiment.
In some embodiments, taking the surface of the workpiece to be measured as a cylindrical surface (S2 in fig. 4C) with an axis L5, the radius Rg of the annular virtual image G1 is set to twice the radius of curvature Rs of the cylindrical surface S2 when the axis L5 is substantially collinear with the optical axis L1 of the super-telecentric lens 21. For example, it may be set by adjusting the position of the light emitter 23 in the cone 22, or it may be set by adjusting the taper angle (angle of the taper surface with respect to the central axis) of the cone 22.
The radius Rg of the annular virtual image G1 is set to be twice the radius Rs of the curvature of the cylindrical surface S2, which means about twice, and may be an accurate twice relationship, or may have a certain deviation, for example, 1mm to 10mm, and specific numerical values may be adjusted and set according to actual requirements or according to imaging effects.
The substantially collinear, for example, may be entirely coincident; or the two can be arranged in parallel, the distance between the two can not exceed a preset distance, the preset distance can be a value between 1mm and 10mm, and the size of the preset distance can be set according to actual requirements in actual application; or the two can be intersected to form an included angle smaller than or equal to a preset angle, the preset angle can be 10 degrees for example, meanwhile, the intersection point of the cross section of the workpiece Wp to be detected, which is perpendicular to the optical axis, and the cylindrical axis is not more than a preset distance from the optical axis of the super-telecentric lens, the preset distance is 10 millimeters for example, but the disclosure is not limited thereto, and the size of the preset angle and the preset distance can be set according to actual requirements in actual application.
Fig. 4D is a schematic diagram illustrating a workpiece to be measured as a wafer according to an exemplary embodiment.
In some embodiments, as a specific example of a workpiece having a cylindrical surface, when the workpiece Wp to be measured is in the shape of a wafer and the center line L3 of the wafer workpiece Wp is substantially collinear with the optical axis L1 of the super telecentric lens 21, the radius Rg of the annular virtual image G1 is set to be twice the radius Rw of the wafer workpiece Wp. For example, it may be set by adjusting the position of the light emitter 23 in the cone 22, or it may be set by adjusting the taper angle (angle of the taper surface with respect to the central axis) of the cone 22.
The radius Rg of the annular virtual image G1 is set to be twice the radius Rw of the wafer workpiece Wp, which means about twice, and may be an accurate twice relationship, or may have a certain deviation, for example, 1mm to 10mm, and specific numerical values may be adjusted and set according to actual requirements or according to imaging effects.
The two parts are approximately collinear, for example, the two parts can be completely overlapped or can be arranged in parallel, the distance between the two parts does not exceed a preset distance, the preset distance can be a value between 1mm and 10mm, and the size of the preset distance can be set according to actual requirements in actual application; or the two can be intersected to form an included angle smaller than or equal to a preset angle, the preset angle can be 10 degrees for example, meanwhile, the intersection point of the cross section of the workpiece Wp to be detected, which is perpendicular to the optical axis, and the cylindrical axis is not more than a preset distance from the optical axis of the super-telecentric lens, the preset distance is 10 millimeters for example, but the disclosure is not limited thereto, and the size of the preset angle and the preset distance can be set according to actual requirements in actual application.
Fig. 5A-5C are schematic diagrams of several light emitters 23, respectively, shown according to an exemplary embodiment.
In some embodiments, the light emitters 23 may be, for example, spherical light emitters as shown in fig. 5A, cylindrical light emitters as shown in fig. 5B, planar light emitters as shown in fig. 5C, or the like, respectively.
Fig. 6A-6C are schematic diagrams illustrating a relationship between a center line L4 of the luminous body 23 and a center line L2 of the cone 22, respectively, according to an exemplary embodiment.
In some embodiments, the luminous body 23 may be arranged centrally in the circumferential direction of the cone 21, for example. The center line L4 of the light emitter 23 is disposed parallel to the center line L2 of the cone 22 and is substantially on the same line. The lines may be substantially collinear, for example, as shown in fig. 6A, where the centerline L4 of the light emitter 23 is substantially collinear with the centerline L2 of the cone 22. Alternatively, as shown in fig. 6B, the center line L4 of the light emitter 23 may be disposed parallel to the cone 22, and the distance D3 therebetween may be a predetermined distance, for example, a value between 1mm and 10mm, and the predetermined distance may be set according to practical requirements in practical applications.
In some embodiments, the optical axis L1 of the super-telecentric lens 21 and the center line L4 of the illuminant 23 may also be intersected, for example, as shown in fig. 6C, an included angle β formed between the two may be smaller than or equal to a preset angle, for example, the preset angle may be 10 degrees, meanwhile, as shown in fig. 6C, a distance D4 between the cone tip O1 of the cone 22 and the optical axis L1 of the super-telecentric lens does not exceed a preset distance, for example, the preset distance is 10 millimeters, but the disclosure is not limited thereto, and the magnitude of the preset angle and the preset distance may be set according to practical requirements in practical applications.
The light emitter 23 may include a plurality of light emitting regions, for example, two light emitting regions or three light emitting regions, respectively emitting red, green or blue light.
Fig. 7A and 7B are schematic diagrams each showing that the light emitting surface of the light emitter 23 includes two color patches according to an exemplary embodiment.
As shown in fig. 7A, the light emitting surface of the light emitter 23 is exemplified by a circle, and includes two color patches A1 and A2. The color blocks A1 and A2 may be, for example, a red color block and a green color block, or may also be a red color block and a blue color block, a blue color block and a green color block, which is not limited in this disclosure. The two color patches A1 and A2 are arranged side by side as shown. Similarly, the light emitting surface of the light emitter 23 in fig. 7B is exemplified by a square, and two color patches A1 and A2 are arranged side by side as shown.
Both color patches A1 and A2 shown in fig. 7A and 7B are asymmetric with respect to the geometric center Cr of the light emitting surface of the light emitter 23.
Fig. 8A and 8B are schematic diagrams each showing that the light emitting surface of the light emitter 23 includes three color patches according to an exemplary embodiment. As shown in fig. 8A, the light emitting surface of the light emitter 23 is still exemplified by a circle, including three color patches A1, A2, and A3. The color patches A1, A2, and A3 may be, for example, red color patches, green color patches, and blue color patches. The three color patches A1, A2 and A3 are arranged in a Y-shape as shown. Similarly, the light emitting surface of the light emitter 23 in fig. 8B is exemplified by a square, and the three color patches A1, A2, and A3 are arranged in a Y-shape as shown.
The three color patches A1, A2 and A3 shown in fig. 8A and 8B are each asymmetric with respect to the geometric center Cr of the light emitting surface of the light emitter 23 in a Y-shaped arrangement as shown.
Further, when the light-emitting body 23 is not a planar light-emitting body, but a three-dimensional light-emitting body such as a sphere, a cube, or the like, the arrangement of the two or three light-emitting regions may be: the luminous body 23 is regarded as a plane in the direction of the central axis L2 of the cone 22, and then the two or three luminous regions are arranged according to fig. 7A, 7B, 8A, 8B.
Fig. 9 is a side view of another cone shown according to an exemplary embodiment. As shown in fig. 9, the cone 92 includes an opening 923 in addition to the inner wall 221 and the opening 222, which reflect light. Wherein the opening 923 is disposed at the bottom of the cone 92, so the area of the opening 923 is smaller than the area of the opening 222. In this embodiment, the tip O1 of the cone 92 is located at the virtual intersection point where the cone wall is elongated.
Fig. 10 is a schematic perspective view of another workpiece side perimeter imaging system, shown according to an example embodiment. As shown in fig. 10, the workpiece side periphery imaging system 100 further includes: the glass table 104 is disposed between the super-telecentric lens 21 and the cone 22, and is used for carrying a workpiece to be measured. The glass stage 104 can be moved up and down or translated left and right, for example, so that the position of the workpiece to be measured carried thereon can be adjusted.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This disclosure is intended to cover any adaptations, uses, or adaptations of the disclosure following the general principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
Claims (9)
1. A workpiece side perimeter imaging system, comprising:
a super telecentric lens;
a cone, comprising: the inner wall capable of reflecting light and the first opening face the super-telecentric lens; and
the illuminant is arranged inside the cone;
the optical axis of the super-telecentric lens and the central axis of the cone are on the same straight line; or, an included angle formed by the optical axis of the super-telecentric lens and the central axis of the cone is smaller than or equal to 10 degrees, and a cone point formed by the cone is smaller than or equal to 10 millimeters from the optical axis of the super-telecentric lens;
the luminous body is arranged in the middle in the circumferential direction of the cone, and the included angle between the conical surface of the cone and the central axis is 45 degrees.
2. The workpiece side perimeter imaging system of claim 1, wherein a center of the illuminant forms an annular virtual image with respect to the cone, the annular virtual image center being located at an entrance pupil center of the super-telecentric lens.
3. The workpiece side perimeter imaging system of claim 1, wherein the illuminant comprises two illuminant areas that emit red and green, red and blue, or blue and green light, respectively.
4. A workpiece side perimeter imaging system according to any one of claims 1-3, wherein the illuminant comprises one of the following illuminants: spherical light emitters, cylindrical light emitters or planar light emitters.
5. The workpiece side perimeter imaging system of claim 1, wherein the illuminant comprises three illuminant areas, each emitting red, green, or blue light.
6. A workpiece side perimeter imaging system according to any one of claims 1-3, wherein the inner wall of the cone is mirrored.
7. The workpiece side perimeter imaging system of any one of claims 1-3, wherein the cone further comprises a second opening, the second opening being disposed at a bottom of the cone, and wherein an area of the second opening is smaller than an area of the first opening.
8. The workpiece side perimeter imaging system of any one of claims 1-3, further comprising: and the glass table is arranged between the ultra-telecentric lens and the cone.
9. The workpiece side periphery imaging system of claim 2, wherein the radius of the annular virtual image is set to twice the radius of curvature of the cylinder when the surface to be imaged is a cylinder and the cylinder axis is collinear with the optical axis of the super telecentric lens.
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| CN112098426B (en) * | 2020-11-17 | 2021-06-29 | 北京领邦智能装备股份公司 | High-precision imaging system and method, image acquisition device and detection equipment |
| CN115436375A (en) * | 2021-06-02 | 2022-12-06 | 泰科电子(上海)有限公司 | Product inspection system, imaging system and mirror |
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