CN111834465B - Array substrate, display panel and display device - Google Patents
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- 239000003990 capacitor Substances 0.000 claims description 39
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6723—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device having light shields
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/481—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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Abstract
本发明实施例提供一种阵列基板、显示面板及显示装置,阵列基板包括:衬底;晶体管,晶体管包括设置于衬底上的有源层;遮光部件,至少部分遮光部件位于有源层上,且遮光部件覆盖至少部分有源层。本发明实施例的阵列基板能够减少或避免外部光在晶体管的沟道中产生的光生载流子,保证晶体管能够正常稳定运行,提高阵列基板的使用寿命。当本发明实施例的阵列基板应用于显示面板时,能够实现显示面板的可透光且可显示,便于感光组件的屏下集成。
The embodiment of the present invention provides an array substrate, a display panel and a display device, wherein the array substrate comprises: a substrate; a transistor, wherein the transistor comprises an active layer disposed on the substrate; and a light shielding component, wherein at least part of the light shielding component is located on the active layer, and the light shielding component covers at least part of the active layer. The array substrate of the embodiment of the present invention can reduce or avoid the photogenerated carriers generated in the channel of the transistor by external light, ensure that the transistor can operate normally and stably, and increase the service life of the array substrate. When the array substrate of the embodiment of the present invention is applied to a display panel, the display panel can be made light-transmissive and displayable, which is convenient for the under-screen integration of the photosensitive component.
Description
技术领域Technical Field
本发明涉及显示设备技术领域,尤其涉及一种阵列基板、显示面板及显示装置。The present invention relates to the technical field of display equipment, and in particular to an array substrate, a display panel and a display device.
背景技术Background technique
随着电子设备的快速发展,用户对屏占比的要求越来越高,使得电子设备的全面屏显示受到业界越来越多的关注。With the rapid development of electronic devices, users have higher and higher requirements for screen-to-body ratio, making the full-screen display of electronic devices receive more and more attention in the industry.
传统的电子设备如手机、平板电脑等,由于需要集成诸如前置摄像头、听筒以及红外感应元件等。现有技术中,可通过在显示屏上开槽(Notch)或开孔,外界光线可通过屏幕上的开槽或开孔进入位于屏幕下方的感光元件。但是这些电子设备均不是真正意义上的全面屏,并不能在整个屏幕的各个区域均进行显示,例如其前置摄像头对应区域不能显示画面。Traditional electronic devices such as mobile phones and tablets need to integrate front cameras, receivers, and infrared sensors. In the prior art, notches or holes can be made on the display screen, and external light can enter the photosensitive element below the screen through the notches or holes on the screen. However, these electronic devices are not true full screens and cannot display in all areas of the entire screen. For example, the area corresponding to the front camera cannot display images.
发明内容Summary of the invention
本发明实施例提供一种阵列基板、显示面板及显示装置,实现显示面板的可透光且可显示,便于感光组件的屏下集成。The embodiments of the present invention provide an array substrate, a display panel and a display device, which enable the display panel to be light-transmissive and capable of displaying, and facilitate under-screen integration of photosensitive components.
一方面,本发明实施例提供了一种阵列基板,包括:衬底;晶体管,晶体管包括设置于衬底上的有源层;遮光部件,至少部分遮光部件位于有源层上,且遮光部件覆盖至少部分有源层。通过遮光部件能够有效减少抵达至有源层的光量,进而减少或避免外部光在晶体管的沟道中产生的光生载流子,保证晶体管能够正常稳定运行,提高阵列基板的使用寿命。On the one hand, an embodiment of the present invention provides an array substrate, comprising: a substrate; a transistor, the transistor comprising an active layer disposed on the substrate; a light shielding component, at least part of the light shielding component is located on the active layer, and the light shielding component covers at least part of the active layer. The light shielding component can effectively reduce the amount of light reaching the active layer, thereby reducing or avoiding the photogenerated carriers generated by external light in the channel of the transistor, ensuring that the transistor can operate normally and stably, and improving the service life of the array substrate.
根据本发明一方面的实施方式,遮光部件包括第一遮挡部和第二遮挡部,第一遮挡部位于有源层上,第二遮挡部由第一遮挡部朝向衬底凸出形成;According to an embodiment of one aspect of the present invention, the light shielding member includes a first shielding portion and a second shielding portion, the first shielding portion is located on the active layer, and the second shielding portion is formed by the first shielding portion protruding toward the substrate;
优选的,第二遮挡部连接于第一遮挡部的周侧;Preferably, the second shielding portion is connected to the peripheral side of the first shielding portion;
优选的,第二遮挡部由第一遮挡部延伸至衬底。Preferably, the second shielding portion extends from the first shielding portion to the substrate.
根据本发明一方面前述任一实施方式,晶体管还包括依次位于有源层上的第一介质层和栅极层,至少部分遮光部件位于栅极层上。According to any of the aforementioned embodiments in one aspect of the present invention, the transistor further includes a first dielectric layer and a gate layer sequentially located on the active layer, and at least a portion of the light shielding component is located on the gate layer.
根据本发明一方面前述任一实施方式,遮光部件的材料包括金属材料,或者,遮光部件的材料为绝缘遮光材料。According to any of the aforementioned embodiments in one aspect of the present invention, the material of the light shielding component includes a metal material, or the material of the light shielding component is an insulating light shielding material.
根据本发明一方面前述任一实施方式,阵列基板还包括位于栅极层上的金属层;According to any of the aforementioned embodiments of one aspect of the present invention, the array substrate further comprises a metal layer located on the gate layer;
遮光部件的材料为金属材料时,至少部分遮光部件和金属层同层设置。When the light shielding component is made of metal material, at least part of the light shielding component and the metal layer are arranged on the same layer.
根据本发明一方面前述任一实施方式,金属层包括位于栅极层上的电容极板层,至少部分遮光部件和电容极板层同层设置。According to any of the aforementioned embodiments in one aspect of the present invention, the metal layer includes a capacitor plate layer located on the gate layer, and at least part of the light shielding component and the capacitor plate layer are arranged in the same layer.
根据本发明一方面前述任一实施方式,遮光部件和电容极板层在同一工艺步骤中形成;According to any of the aforementioned embodiments of one aspect of the present invention, the light shielding component and the capacitor plate layer are formed in the same process step;
优选的,金属层还包括位于电容极板层上的源漏电极层,晶体管包括设置于源漏电极层的源漏电极导体,遮光部件上开设有第二通孔,以使源漏电极导体穿过第二通孔连接于有源层;Preferably, the metal layer further includes a source-drain electrode layer located on the capacitor plate layer, the transistor includes a source-drain electrode conductor arranged on the source-drain electrode layer, and a second through hole is opened on the light shielding component so that the source-drain electrode conductor passes through the second through hole and is connected to the active layer;
进一步优选的,遮光部件朝向第二通孔的内壁涂覆有绝缘层,以保证遮光部件和源漏电极导体之间相互绝缘。Further preferably, an inner wall of the light shielding member facing the second through hole is coated with an insulating layer to ensure mutual insulation between the light shielding member and the source-drain electrode conductors.
根据本发明一方面前述任一实施方式,金属层包括位于栅极层上的源漏电极层,晶体管包括设置于源漏电极层的源漏电极导体;According to any of the aforementioned embodiments in one aspect of the present invention, the metal layer includes a source-drain electrode layer located on the gate layer, and the transistor includes a source-drain electrode conductor disposed in the source-drain electrode layer;
遮光部件的材料包括金属材料,至少部分遮光部件和源漏电极层同层设置。The material of the light shielding component includes a metal material, and at least a part of the light shielding component and the source-drain electrode layer are arranged in the same layer.
根据本发明一方面前述任一实施方式,遮光部件和源漏电极层在工艺步骤中形成。According to any one of the aforementioned embodiments in one aspect of the present invention, the light shielding member and the source-drain electrode layer are formed in a process step.
根据本发明一方面前述任一实施方式,阵列基板还包括位于栅极层上的源漏电极层;According to any of the aforementioned embodiments of one aspect of the present invention, the array substrate further comprises a source-drain electrode layer located on the gate layer;
遮光部件的材料为绝缘遮光材料时,至少部分遮光部件和源漏电极层相邻设置。When the material of the light shielding component is an insulating light shielding material, at least a part of the light shielding component and the source-drain electrode layer are arranged adjacent to each other.
另一方面,本发明实施例还提供了一种显示面板,显示面板至少具有透光显示区,显示面板包括:On the other hand, an embodiment of the present invention further provides a display panel, the display panel having at least a light-transmitting display area, and the display panel includes:
上述的阵列基板,位于透光显示区;The array substrate is located in the light-transmitting display area;
发光器件,设置于阵列基板上、并位于遮光部件背离有源层的一侧。The light emitting device is arranged on the array substrate and is located on the side of the light shielding component away from the active layer.
再一方面,本发明实施例还提供了一种显示装置,包括上述的阵列基板。On the other hand, an embodiment of the present invention further provides a display device, including the above-mentioned array substrate.
在本发明实施例的阵列基板中,阵列基板包括衬底、晶体管和遮光部件,且遮光部件覆盖晶体管的至少部分有源层。因此由遮光部件背离有源层的一侧透过的光首先经过遮光部件,然后才能抵达有源层。在本发明实施例的阵列基板中,通过遮光部件能够有效减少抵达至有源层的光量,进而减少或避免外部光在晶体管的沟道中产生的光生载流子,保证晶体管能够正常稳定运行,提高阵列基板的使用寿命。当本发明实施例的阵列基板应用于显示面板时,能够实现显示面板的可透光且可显示,便于感光组件的屏下集成。In the array substrate of the embodiment of the present invention, the array substrate includes a substrate, a transistor and a light shielding component, and the light shielding component covers at least a portion of the active layer of the transistor. Therefore, the light transmitted from the side of the light shielding component away from the active layer first passes through the light shielding component before reaching the active layer. In the array substrate of the embodiment of the present invention, the light shielding component can effectively reduce the amount of light reaching the active layer, thereby reducing or avoiding the photogenerated carriers generated by external light in the channel of the transistor, ensuring that the transistor can operate normally and stably, and improving the service life of the array substrate. When the array substrate of the embodiment of the present invention is applied to a display panel, it can realize that the display panel is light-transmissive and displayable, which is convenient for the under-screen integration of the photosensitive component.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
通过阅读以下参照附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显,其中,相同或相似的附图标记表示相同或相似的特征。Other features, objects and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings, in which the same or similar reference numerals represent the same or similar features.
图1是本发明实施例提供的一种显示面板的结构示意图;FIG1 is a schematic structural diagram of a display panel provided by an embodiment of the present invention;
图2是本发明实施例提供的一种显示面板的局部剖视图;FIG2 is a partial cross-sectional view of a display panel provided by an embodiment of the present invention;
图3是本发明实施例提供的一种阵列基板的局部剖视图;FIG3 is a partial cross-sectional view of an array substrate provided by an embodiment of the present invention;
图4是本发明另一实施例提供的一种阵列基板的局部剖视图;FIG4 is a partial cross-sectional view of an array substrate provided by another embodiment of the present invention;
图5是本发明又一实施例提供的一种阵列基板的局部剖视图;FIG5 is a partial cross-sectional view of an array substrate provided in yet another embodiment of the present invention;
图6是本发明再一实施例提供的一种阵列基板的局部剖视图。FIG. 6 is a partial cross-sectional view of an array substrate provided in yet another embodiment of the present invention.
附图标记说明:Description of reference numerals:
10、衬底;20、金属层;21、电容极板层;22、源漏电极层;10. substrate; 20. metal layer; 21. capacitor plate layer; 22. source and drain electrode layer;
100、晶体管;100. Transistor;
110、有源层;120、第一介质层;130、栅极层;140、源漏电极导体;141、源电极导体;142、漏电极导体;110, active layer; 120, first dielectric layer; 130, gate layer; 140, source-drain electrode conductor; 141, source electrode conductor; 142, drain electrode conductor;
200、遮光部件;200a、第一遮光部件;200b、第二遮光部件;200, light shielding member; 200a, first light shielding member; 200b, second light shielding member;
210、第一遮挡部;211、第一通孔;212、第二通孔;220、第二遮挡部;230、绝缘层;210, first shielding portion; 211, first through hole; 212, second through hole; 220, second shielding portion; 230, insulating layer;
300、发光器件;310、第一电极;320、发光结构;330、第二电极。300, light-emitting device; 310, first electrode; 320, light-emitting structure; 330, second electrode.
400、连接引线;400, connecting leads;
500、第二介质层;500, a second dielectric layer;
600、第三介质层。600. Third dielectric layer.
具体实施方式Detailed ways
下面将详细描述本发明的各个方面的特征和示例性实施例。在下面的详细描述中,提出了许多具体细节,以便提供对本发明的全面理解。但是,对于本领域技术人员来说很明显的是,本发明可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本发明的示例来提供对本发明的更好的理解。在附图和下面的描述中,至少部分的公知结构和技术没有被示出,以便避免对本发明造成不必要的模糊;并且,为了清晰,可能夸大了部分结构的尺寸。此外,下文中所描述的特征、结构或特性可以以任何合适的方式结合在一个或更多实施例中。The features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the detailed description below, many specific details are presented in order to provide a comprehensive understanding of the present invention. However, it is obvious to those skilled in the art that the present invention can be implemented without the need for some of these specific details. The following description of the embodiments is merely to provide a better understanding of the present invention by illustrating examples of the present invention. In the drawings and the following description, at least some of the known structures and techniques are not shown in order to avoid unnecessary ambiguity of the present invention; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.
在本发明的描述中,需要说明的是,除非另有说明,“多个”的含义是两个以上;术语“上”、“下”、“左”、“右”、“内”、“外”等指示的方位或位置关系仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”等仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that, unless otherwise specified, "plurality" means more than two; the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.
下述描述中出现的方位词均为图中示出的方向,并不是对本发明的实施例的具体结构进行限定。在本发明的描述中,还需要说明的是,除非另有明确的规定和限定,术语“安装”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接相连,也可以间接相连。对于本领域的普通技术人员而言,可视具体情况理解上述术语在本发明中的具体含义。The directional words appearing in the following description are all directions shown in the figures, and do not limit the specific structure of the embodiments of the present invention. In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.
在诸如手机和平板电脑等电子设备上,需要在设置显示面板的一侧集成诸如前置摄像头、红外光传感器、接近光传感器等感光组件。在一些实施例中,可以在上述电子设备上设置透光显示区,将感光组件设置在透光显示区背面,在保证感光组件正常工作的情况下,实现电子设备的全面屏显示。On electronic devices such as mobile phones and tablet computers, it is necessary to integrate photosensitive components such as a front camera, an infrared light sensor, a proximity light sensor, etc. on one side of the display panel. In some embodiments, a light-transmitting display area can be provided on the above electronic device, and the photosensitive component can be provided on the back of the light-transmitting display area, so as to realize full-screen display of the electronic device while ensuring the normal operation of the photosensitive component.
在透光显示区内,由于透光显示区的透光率较高,使得外部光能够透过发光器件照射于发光器件下发的薄膜晶体管上,有可能诱发薄膜晶体管沟道内产生光生载流子,导致薄膜晶体管的稳定性受到影响,从而降低显示面板的使用寿命。In the light-transmitting display area, due to the high light transmittance of the light-transmitting display area, external light can pass through the light-emitting device and illuminate the thin-film transistor emitted by the light-emitting device, which may induce the generation of photogenerated carriers in the channel of the thin-film transistor, causing the stability of the thin-film transistor to be affected, thereby reducing the service life of the display panel.
为解决上述问题,本发明实施例提供了一种阵列基板、显示面板及显示装置,以下将结合附图对显示面板及显示装置的各实施例进行说明。In order to solve the above problems, embodiments of the present invention provide an array substrate, a display panel and a display device. Embodiments of the display panel and the display device will be described below in conjunction with the accompanying drawings.
本发明提供一种显示装置,显示装置包括显示面板,显示装置可以但不仅限于为手机、平板电脑等电子设备。The present invention provides a display device, which includes a display panel. The display device can be, but is not limited to, electronic devices such as mobile phones and tablet computers.
显示面板的设置方式有多种,在一些可选的实施例中,如图1所示,显示面板包括第一显示区AA1和第二显示区AA2,第一显示区AA1的透光率大于第二显示区的透光率AA2,即第一显示区AA1为透光显示区。There are many ways to set up the display panel. In some optional embodiments, as shown in Figure 1, the display panel includes a first display area AA1 and a second display area AA2. The transmittance of the first display area AA1 is greater than the transmittance of the second display area AA2, that is, the first display area AA1 is a light-transmitting display area.
第一显示区AA1的形状设置有多种,例如第一显示区AA1区为圆形、矩形或其他异形。第一显示区AA1区的设置位置有多种,例如第一显示区AA1位于显示面板顶部的中间区域,或者第一显示区AA1靠近显示面板的拐角区域等。The first display area AA1 can be configured in various shapes, such as a circular, rectangular or other irregular shapes. The first display area AA1 can be configured in various positions, such as the first display area AA1 being located in the middle area at the top of the display panel, or the first display area AA1 being close to a corner area of the display panel.
本文中,第一显示区AA1的透光率大于等于15%。为确保第一显示区AA1的透光率大于15%,甚至大于40%,甚至具有更高的透光率,本实施例中第一显示区AA1的各个功能膜层的透光率均大于80%,甚至至少部分功能膜层的透光率均大于90%。Herein, the transmittance of the first display area AA1 is greater than or equal to 15%. To ensure that the transmittance of the first display area AA1 is greater than 15%, even greater than 40%, or even higher, the transmittance of each functional film layer of the first display area AA1 in this embodiment is greater than 80%, and even the transmittance of at least some functional film layers is greater than 90%.
根据本发明实施例的第一显示区AA1,第一显示区AA1的透光率大于15%,使得在第一显示区AA1的背面可以集成感光组件,实现例如摄像头的感光组件的屏下集成,同时第一显示区AA1还能够显示画面,能够实现显示面板或显示装置的全面屏设计。According to the first display area AA1 of the embodiment of the present invention, the transmittance of the first display area AA1 is greater than 15%, so that a photosensitive component can be integrated on the back of the first display area AA1, so as to realize under-screen integration of a photosensitive component of a camera, and at the same time, the first display area AA1 can also display images, so as to realize a full-screen design of a display panel or a display device.
在另一些可选的实施例中,显示面板为整面透光显示面板,即显示面板包括第一显示区AA1,但是显示面板不包括上述的第二显示区AA2。即显示面板仅包括透光显示区,而不包括非透光显示区。In some other optional embodiments, the display panel is a whole light-transmitting display panel, that is, the display panel includes the first display area AA1, but does not include the second display area AA2. That is, the display panel only includes the light-transmitting display area, but does not include the non-light-transmitting display area.
图2为本发明实施例提供的一种显示面板的结构示意图,显示面板包括:阵列基板,位于第一显示区AA1,即位于透光显示区。发光器件,设置于阵列基板上300。2 is a schematic diagram of the structure of a display panel provided by an embodiment of the present invention, the display panel comprises: an array substrate located in the first display area AA1, that is, located in the light-transmitting display area; and a light-emitting device 300 disposed on the array substrate.
发光器件300例如包括第一电极310、发光结构320和第二电极330。The light emitting device 300 includes, for example, a first electrode 310 , a light emitting structure 320 and a second electrode 330 .
发光结构320的形状不做限定,在一些可选的实施例中,每个发光结构320在衬底10上的正投影由一个第一图形单元组成或由两个以上第一图形单元拼接组成,第一图形单元包括从由圆形、椭圆形、哑铃形、葫芦形、矩形组成的群组中选择的至少一个,能够减少透光显示面板的衍射。The shape of the light-emitting structure 320 is not limited. In some optional embodiments, the orthographic projection of each light-emitting structure 320 on the substrate 10 is composed of one first graphic unit or two or more first graphic units. The first graphic unit includes at least one selected from the group consisting of a circle, an ellipse, a dumbbell, a gourd, and a rectangle, which can reduce the diffraction of the translucent display panel.
第一电极310的形状不做限定,在一些可选的实施例中,每个第一电极310在衬底10上的正投影由一个第二图形单元组成或由两个以上第二图形单元拼接组成,第二图形单元包括从由圆形、椭圆形、哑铃形、葫芦形、矩形组成的群组中选择的至少一个,能够减少透光显示面板的衍射。The shape of the first electrode 310 is not limited. In some optional embodiments, the orthographic projection of each first electrode 310 on the substrate 10 is composed of one second graphic unit or is composed of two or more second graphic units. The second graphic unit includes at least one selected from the group consisting of a circle, an ellipse, a dumbbell, a gourd, and a rectangle, which can reduce the diffraction of the translucent display panel.
在一些实施例中,第一电极310为透光电极。在一些实施例中,第一电极310包括氧化铟锡(Indium Tin Oxide,ITO)层或氧化铟锌层。在一些实施例中,第一电极310为反射电极,包括第一透光导电层、位于第一透光导电层上的反射层以及位于反射层上的第二透光导电层。其中第一透光导电层、第二透光导电层可以是ITO、氧化铟锌等,反射层可以是金属层20,例如是银材质制成。在一些实施例中,第二电极330包括镁银合金层。In some embodiments, the first electrode 310 is a light-transmitting electrode. In some embodiments, the first electrode 310 includes an indium tin oxide (ITO) layer or an indium zinc oxide layer. In some embodiments, the first electrode 310 is a reflective electrode, including a first light-transmitting conductive layer, a reflective layer located on the first light-transmitting conductive layer, and a second light-transmitting conductive layer located on the reflective layer. The first light-transmitting conductive layer and the second light-transmitting conductive layer may be ITO, indium zinc oxide, etc., and the reflective layer may be a metal layer 20, for example, made of silver. In some embodiments, the second electrode 330 includes a magnesium-silver alloy layer.
本发明还提供一种阵列基板,该阵列基板可用于上述显示面板,根据本发明一实施例的阵列基板,阵列基板包括衬底10;晶体管100,晶体管100包括设置于衬底10上的有源层110;遮光部件200,至少部分遮光部件200位于有源层110上,且遮光部件200覆盖至少部分有源层110。在显示面板中,发光器件300位于遮光部件200背离有源层110的一侧。The present invention further provides an array substrate, which can be used for the above-mentioned display panel. According to an array substrate of an embodiment of the present invention, the array substrate includes a substrate 10; a transistor 100, the transistor 100 includes an active layer 110 disposed on the substrate 10; and a light shielding member 200, at least part of the light shielding member 200 is located on the active layer 110, and the light shielding member 200 covers at least part of the active layer 110. In the display panel, the light emitting device 300 is located on a side of the light shielding member 200 away from the active layer 110.
在本发明一实施例的阵列基板中,阵列基板包括衬底10、晶体管100和遮光部件200,且遮光部件200覆盖晶体管100的至少部分有源层110。因此由遮光部件200背离有源层110的一侧透过的光首先经过遮光部件200,然后才能抵达有源层110。在本发明实施例的阵列基板中,通过遮光部件200能够有效减少抵达至有源层110的光量,进而减少或避免外部光在晶体管100的沟道中产生的光生载流子,保证晶体管100能够正常稳定运行,提高阵列基板的使用寿命。当本发明实施例的阵列基板应用于显示面板时,能够实现显示面板的可透光且可显示,便于感光组件的屏下集成。In an array substrate of an embodiment of the present invention, the array substrate includes a substrate 10, a transistor 100 and a light shielding component 200, and the light shielding component 200 covers at least a portion of the active layer 110 of the transistor 100. Therefore, the light transmitted from the side of the light shielding component 200 away from the active layer 110 first passes through the light shielding component 200, and then reaches the active layer 110. In the array substrate of the embodiment of the present invention, the light shielding component 200 can effectively reduce the amount of light reaching the active layer 110, thereby reducing or avoiding the photogenerated carriers generated by external light in the channel of the transistor 100, ensuring that the transistor 100 can operate normally and stably, and improving the service life of the array substrate. When the array substrate of the embodiment of the present invention is applied to a display panel, the display panel can be transparent and displayable, which is convenient for the under-screen integration of the photosensitive component.
可以理解的是,感光组件可以不限于是图像采集装置,例如在一些实施例中,感光组件也可以是红外传感器、接近传感器、红外镜头、泛光感应元件、环境光传感器以及点阵投影器等光传感器。此外,显示装置在显示面板的下表面还可以集成其它部件,例如是听筒、扬声器等。It is understandable that the photosensitive component may not be limited to an image acquisition device. For example, in some embodiments, the photosensitive component may also be an infrared sensor, a proximity sensor, an infrared lens, a floodlight sensing element, an ambient light sensor, a dot projector, or other optical sensors. In addition, the display device may also integrate other components on the lower surface of the display panel, such as an earpiece, a speaker, etc.
遮光部件200的透光率较低,以使遮光部件200能够阻挡光射入有源层110。例如遮光部件200的透光率小于40%,优选的,遮光部件200的透光率为40%、30%、20%或更低。例如当遮光部件200选用有机绝缘材料制成时,遮光部件200的透光率为20%~30%。当遮光部件200选用金属材料制成时,遮光部件200不透光。The light shielding member 200 has a low light transmittance so that the light shielding member 200 can block light from entering the active layer 110. For example, the light transmittance of the light shielding member 200 is less than 40%. Preferably, the light transmittance of the light shielding member 200 is 40%, 30%, 20% or lower. For example, when the light shielding member 200 is made of an organic insulating material, the light transmittance of the light shielding member 200 is 20% to 30%. When the light shielding member 200 is made of a metal material, the light shielding member 200 is opaque.
至少部分遮光部件200覆盖至少部分有源层110是指:在阵列基板的厚度方向(图3中的X方向)上,遮光部件200的正投影覆盖至少部分有源层110的正投影,可以理解的是,遮光部件200的正投影可以完全覆盖有源层110的正投影,遮光部件200在衬底10上的正投影区域面积大于或等于有源层110在衬底10上的正投影区域面积,且有源层110在衬底10上的正投影区域位于遮光部件200在衬底10上的正投影区域之内,其中一可选的结构如图3所示。遮光部件200的正投影也可以覆盖部分有源层110的正投影,其中一可选的结构如图3所示。遮光部件200在衬底10上的正投影区域是指:遮光部件200在衬底10上的正投影的外边缘以内的区域都属于遮光部件200在衬底10上的正投影区域At least part of the light-shielding component 200 covers at least part of the active layer 110, which means that in the thickness direction of the array substrate (the X direction in FIG. 3 ), the orthographic projection of the light-shielding component 200 covers at least part of the orthographic projection of the active layer 110. It can be understood that the orthographic projection of the light-shielding component 200 can completely cover the orthographic projection of the active layer 110, the orthographic projection area of the light-shielding component 200 on the substrate 10 is greater than or equal to the orthographic projection area of the active layer 110 on the substrate 10, and the orthographic projection area of the active layer 110 on the substrate 10 is located within the orthographic projection area of the light-shielding component 200 on the substrate 10, wherein an optional structure is shown in FIG. 3 . The orthographic projection of the light-shielding component 200 can also cover part of the orthographic projection of the active layer 110, wherein an optional structure is shown in FIG. 3 . The orthographic projection area of the light-shielding component 200 on the substrate 10 means that the area within the outer edge of the orthographic projection of the light-shielding component 200 on the substrate 10 belongs to the orthographic projection area of the light-shielding component 200 on the substrate 10
遮光部件200的形状设置有多种,例如遮光部件200和有源层110沿厚度方向间隔设置,遮光部件200在衬底10上的正投影面积大于或等于有源层110在衬底10上的正投影面积。在这些可选的实施例中,遮光部件200能够遮挡沿厚度方向垂直射入有源层110的外部光线,从而避免该部分光线影响晶体管100的正常运行。The light shielding member 200 may be arranged in a variety of shapes, for example, the light shielding member 200 and the active layer 110 are arranged at intervals along the thickness direction, and the orthographic projection area of the light shielding member 200 on the substrate 10 is greater than or equal to the orthographic projection area of the active layer 110 on the substrate 10. In these optional embodiments, the light shielding member 200 can block external light that vertically enters the active layer 110 along the thickness direction, thereby preventing this part of the light from affecting the normal operation of the transistor 100.
在另一些可选的实施例中,遮光部件200包括第一遮挡部210和第二遮挡部220,第一遮挡部210位于有源层110背离衬底10的一侧,第二遮挡部220由第一遮挡部210朝向衬底10凸出形成。In some other optional embodiments, the shading component 200 includes a first shading portion 210 and a second shading portion 220 , wherein the first shading portion 210 is located on a side of the active layer 110 away from the substrate 10 , and the second shading portion 220 is formed by the first shading portion 210 protruding toward the substrate 10 .
在一些实施例中,遮光部件200通过第一遮挡部210和第二遮挡部220能够罩设于有源层110的上方。遮光部件200通过第一遮挡部210能够遮挡沿厚度方向垂直射入有源层110的外部光线,遮光部件200通过第二遮挡部220能够遮挡从侧向射入有源层110的外部光线,从而提高遮光部件200的挡光效果,进一步保证晶体管100的稳定运行。In some embodiments, the light shielding member 200 can be covered above the active layer 110 through the first shielding portion 210 and the second shielding portion 220. The light shielding member 200 can shield the external light vertically incident on the active layer 110 along the thickness direction through the first shielding portion 210, and the light shielding member 200 can shield the external light incident on the active layer 110 from the side through the second shielding portion 220, thereby improving the light shielding effect of the light shielding member 200 and further ensuring the stable operation of the transistor 100.
第二遮挡部220的设置方式有多种,例如第二遮挡部220在第一遮挡部210的周侧间隔分布。There are many ways to dispose the second shielding portion 220 . For example, the second shielding portions 220 are distributed at intervals around the first shielding portion 210 .
优选的,第二遮挡部220连接于第一遮挡部210的周侧,即第二遮挡部220在第一遮挡部210的周侧连续分布。使得第二遮挡部220能够遮挡有源层110外周侧不同位置相对于厚度方向倾斜射入的光,进一步提高遮光部件200的挡光效果。Preferably, the second shielding portion 220 is connected to the peripheral side of the first shielding portion 210, that is, the second shielding portion 220 is continuously distributed on the peripheral side of the first shielding portion 210. The second shielding portion 220 can shield the light incident obliquely relative to the thickness direction at different positions on the peripheral side of the active layer 110, further improving the light shielding effect of the light shielding component 200.
在另一些可选的实施例中,第二遮挡部220由第一遮挡部210延伸至衬底10。令遮光部件200通过第一遮挡部210和第二遮挡部220罩设于有源层110的上方,进一步提高遮光部件200的挡光效果。In some other optional embodiments, the second shielding portion 220 extends from the first shielding portion 210 to the substrate 10. The light shielding component 200 is covered above the active layer 110 by the first shielding portion 210 and the second shielding portion 220, so as to further improve the light shielding effect of the light shielding component 200.
第二遮挡部220延伸至衬底10的方式有多种,例如在阵列基板成型的过程中,在衬底10和第一遮挡部210之间的中间层形成过程中,在中间层对应于第二遮挡部220的位置开设通孔,使得在形成第一遮挡部210时,材料渗透入通孔,从而在通孔内形成第二遮挡部220。There are many ways to extend the second shielding portion 220 to the substrate 10. For example, during the molding process of the array substrate, during the formation of the intermediate layer between the substrate 10 and the first shielding portion 210, a through hole is opened in the intermediate layer at a position corresponding to the second shielding portion 220, so that when the first shielding portion 210 is formed, the material penetrates into the through hole, thereby forming the second shielding portion 220 in the through hole.
在一些可选的实施例中,晶体管100还包括依次位于有源层110上的第一介质层120和栅极层130,至少部分遮光部件200位于栅极层130上。在这些可选的实施例中,遮光部件200位于栅极层130上,即遮光部件200位于有源层110、第一介质层120和栅极层130上,能够避免遮光部件200影响晶体管100的正常运行。In some optional embodiments, the transistor 100 further includes a first dielectric layer 120 and a gate layer 130 sequentially located on the active layer 110, and at least part of the light shielding component 200 is located on the gate layer 130. In these optional embodiments, the light shielding component 200 is located on the gate layer 130, that is, the light shielding component 200 is located on the active layer 110, the first dielectric layer 120 and the gate layer 130, which can prevent the light shielding component 200 from affecting the normal operation of the transistor 100.
晶体管100的设置方式有多种,晶体管100可以选用底栅型晶体管或者顶栅型晶体管。底栅型晶体管即栅极层130位于有源层110下方,即栅极层130位于有源层110朝向衬底10的一侧。顶栅型晶体管100即栅极层130位于有源层110上方,即栅极层130位于有源层110背离衬底10的一侧。如图3至图6所示,本文以顶栅型晶体管为例阐述本发明实施例的阵列基板。There are many ways to set up the transistor 100. The transistor 100 can be a bottom-gate transistor or a top-gate transistor. The bottom-gate transistor, that is, the gate layer 130 is located below the active layer 110, that is, the gate layer 130 is located on the side of the active layer 110 facing the substrate 10. The top-gate transistor 100, that is, the gate layer 130 is located above the active layer 110, that is, the gate layer 130 is located on the side of the active layer 110 facing away from the substrate 10. As shown in Figures 3 to 6, this article takes a top-gate transistor as an example to illustrate the array substrate of an embodiment of the present invention.
遮光部件200的材料选择有多种,在一些可选的实施例中,遮光部件200的材料为绝缘遮光材料,例如有机绝缘遮光材料;或者,遮光部件200的材料包括金属材料。There are many choices of materials for the light shielding component 200. In some optional embodiments, the material of the light shielding component 200 is an insulating light shielding material, such as an organic insulating light shielding material; or, the material of the light shielding component 200 includes a metal material.
在一些可选的实施例中,阵列基板还包括位于栅极层130上的金属层20;遮光部件200的材料为金属材料时,至少部分遮光部件200和金属层20同层设置例如第一遮挡部210和金属层20同层设置。进一步的,遮光部件200和金属层20可在同一工艺步骤中形成。In some optional embodiments, the array substrate further includes a metal layer 20 located on the gate layer 130; when the light shielding component 200 is made of a metal material, at least part of the light shielding component 200 and the metal layer 20 are arranged in the same layer, for example, the first shielding portion 210 and the metal layer 20 are arranged in the same layer. Further, the light shielding component 200 and the metal layer 20 can be formed in the same process step.
在这些实施例中,遮光部件200的材料为金属材料,因此至少部分遮光部件200可以和金属层20同层设置,遮光部件200和金属层20同时形成。在形成金属层20的同一工艺步骤中,例如通过改变掩膜板的形状,即可在相应的位置形成遮光部件200,从而能够简化阵列基板的成型工艺。In these embodiments, the material of the light shielding component 200 is a metal material, so at least part of the light shielding component 200 can be provided in the same layer as the metal layer 20, and the light shielding component 200 and the metal layer 20 are formed simultaneously. In the same process step of forming the metal layer 20, for example, by changing the shape of the mask plate, the light shielding component 200 can be formed at the corresponding position, thereby simplifying the molding process of the array substrate.
金属层20例如包括位于栅极层130上的电容极板层21,至少部分遮光部件200和电容极板层21同层设置例如第一遮光部210和电容极板层21同层设置。进一步的,遮光部件200和电容极板层21在同一工艺步骤中,及遮光部件200和电容极板层21同时形成。The metal layer 20, for example, includes a capacitor plate layer 21 located on the gate layer 130, and at least part of the light shielding component 200 and the capacitor plate layer 21 are arranged in the same layer, for example, the first light shielding portion 210 and the capacitor plate layer 21 are arranged in the same layer. Further, the light shielding component 200 and the capacitor plate layer 21 are in the same process step, and the light shielding component 200 and the capacitor plate layer 21 are formed at the same time.
电容极板层21包括电容极板,在对电容极板层21进行图案化处理形成电容极板时,可以同时形成遮光部件200,无需单独增加形成遮光部件200的工艺步骤,能够简化阵列基板的成型方法。The capacitor plate layer 21 includes capacitor plates. When the capacitor plate layer 21 is patterned to form the capacitor plates, the light shielding component 200 can be formed simultaneously. There is no need to add a separate process step for forming the light shielding component 200, which can simplify the molding method of the array substrate.
至少部分遮光部件200和电容极板层21同层设置的方式有多种,在一些可选的实施例中,至少部分遮光部件200和电容极板在电容极板层21间隔设置,或者至少部分遮光部件200连接于电容极板。There are many ways to set at least part of the shading component 200 and the capacitor plate layer 21 in the same layer. In some optional embodiments, at least part of the shading component 200 and the capacitor plate are spaced apart in the capacitor plate layer 21, or at least part of the shading component 200 is connected to the capacitor plate.
在一些可选的实施例中,如图3所示,金属层20包括位于电容极板层21上的源漏电极层22,电容极板层21和栅极层130之间还设置有第三介质层600。优选的,第三介质层600选用绝缘材料制成,以保证电容极板层21和栅极层130之间相互绝缘。In some optional embodiments, as shown in FIG3 , the metal layer 20 includes a source-drain electrode layer 22 located on the capacitor plate layer 21, and a third dielectric layer 600 is further provided between the capacitor plate layer 21 and the gate layer 130. Preferably, the third dielectric layer 600 is made of an insulating material to ensure that the capacitor plate layer 21 and the gate layer 130 are insulated from each other.
在一些可选的实施例中,晶体管100包括设置于源漏电极层22的源漏电极导体140,源漏电极导体140连接于有源层110。In some optional embodiments, the transistor 100 includes a source-drain electrode conductor 140 disposed in the source-drain electrode layer 22 , and the source-drain electrode conductor 140 is connected to the active layer 110 .
当至少部分遮光部件200设置于电容极板层21时,遮光部件200上设置有第二通孔212,以使源漏电极导体140穿过第二通孔212连接有源层110。例如当第一遮挡部210设置于电容极板层21时,第一遮挡部210上设置有第二通孔212,以使源漏电极导体140穿过第二通孔212连接有源层110。When at least part of the light shielding component 200 is disposed on the capacitor plate layer 21, the light shielding component 200 is provided with a second through hole 212, so that the source-drain electrode conductor 140 passes through the second through hole 212 to connect to the active layer 110. For example, when the first shielding portion 210 is disposed on the capacitor plate layer 21, the first shielding portion 210 is provided with a second through hole 212, so that the source-drain electrode conductor 140 passes through the second through hole 212 to connect to the active layer 110.
源漏电极导体140包括源电极导体141和漏电极导体142,源电极导体141连接于有源层110的源极端,漏电极导体142连接于有源层110的漏极端。The source-drain electrode conductor 140 includes a source electrode conductor 141 and a drain electrode conductor 142 . The source electrode conductor 141 is connected to the source terminal of the active layer 110 , and the drain electrode conductor 142 is connected to the drain terminal of the active layer 110 .
进一步优选的,遮光部件200朝向第二通孔212的内壁涂覆有绝缘层230,以保证遮光部件200和源漏电极导体140之间相互绝缘。Further preferably, the inner wall of the light shielding member 200 facing the second through hole 212 is coated with an insulating layer 230 to ensure mutual insulation between the light shielding member 200 and the source-drain electrode conductor 140 .
当遮光部件200包括第一遮挡部210和第二遮挡部220时,第一遮挡部210位于电容极板层21,第二遮挡部220由第一遮挡部210朝向衬底10延伸成型,即第二遮挡部220由电容极板层21朝向衬底10延伸成型。优选的,第二遮挡部220由电容极板层21延伸至衬底10。When the light shielding component 200 includes the first shielding portion 210 and the second shielding portion 220, the first shielding portion 210 is located at the capacitor plate layer 21, and the second shielding portion 220 is formed by extending from the first shielding portion 210 toward the substrate 10, that is, the second shielding portion 220 is formed by extending from the capacitor plate layer 21 toward the substrate 10. Preferably, the second shielding portion 220 extends from the capacitor plate layer 21 to the substrate 10.
请一并参阅图4,图4是本发明另一实施例提供的一种阵列基板的局部剖视图。在另一些可选的实施例中,遮光部件200材料为金属材料,至少部分遮光部件200和源漏电极层22同层设置。进一步的,遮光部件200和源漏电极层22在同一工艺步骤中形成,即遮光部件200和源漏电极层22同时形成。例如遮光部件200的第一遮挡部210设置于源漏电极层22。晶体管100包括设置于源漏电极层22的源漏电极导体140,源漏电极导体的一部分140可以作为遮光部件200的一部分,即形成第一遮挡部210。Please refer to Figure 4, which is a partial cross-sectional view of an array substrate provided by another embodiment of the present invention. In other optional embodiments, the material of the shading component 200 is a metal material, and at least part of the shading component 200 and the source-drain electrode layer 22 are arranged in the same layer. Furthermore, the shading component 200 and the source-drain electrode layer 22 are formed in the same process step, that is, the shading component 200 and the source-drain electrode layer 22 are formed at the same time. For example, the first shielding portion 210 of the shading component 200 is arranged in the source-drain electrode layer 22. The transistor 100 includes a source-drain electrode conductor 140 arranged in the source-drain electrode layer 22, and a portion of the source-drain electrode conductor 140 can be used as a part of the shading component 200, that is, forming the first shielding portion 210.
在这些实施例中,源漏电极导体140的材料通常包括遮光的金属材料,遮光部件200连接于源漏电极导体140,源漏电极导体140承担一部分遮光的效果,能够减小遮挡部件200的面积,进而节省材料。In these embodiments, the material of the source-drain electrode conductor 140 generally includes a light-shielding metal material. The light-shielding component 200 is connected to the source-drain electrode conductor 140. The source-drain electrode conductor 140 takes on a part of the light-shielding effect, which can reduce the area of the shielding component 200 and save materials.
当遮光部件200包括第一遮挡部210和第二遮挡部220时,第一遮挡部210位于源漏电极层22,即第一遮挡部210连接于源漏电极导体140,第二遮挡部220由第一遮挡部210朝向衬底10延伸成型,即第二遮挡部220由源漏电极层22朝向衬底10延伸成型。优选的,第二遮挡部220由源漏电极层22延伸至衬底10。When the light shielding component 200 includes the first shielding portion 210 and the second shielding portion 220, the first shielding portion 210 is located at the source-drain electrode layer 22, that is, the first shielding portion 210 is connected to the source-drain electrode conductor 140, and the second shielding portion 220 is formed by extending from the first shielding portion 210 toward the substrate 10, that is, the second shielding portion 220 is formed by extending from the source-drain electrode layer 22 toward the substrate 10. Preferably, the second shielding portion 220 extends from the source-drain electrode layer 22 to the substrate 10.
请一并参阅图5和图6,图5是本发明又一实施例提供的一种阵列基板的局部剖视图,图6是本发明再一实施例提供的一种阵列基板的局部剖视图。Please refer to FIG. 5 and FIG. 6 . FIG. 5 is a partial cross-sectional view of an array substrate provided by another embodiment of the present invention. FIG. 6 is a partial cross-sectional view of an array substrate provided by another embodiment of the present invention.
在又一些可选的实施例中,遮光部件200的材料为绝缘材料时,至少部分遮光部件200可以位于有源层110和栅极层130上,并位于电容极板层21下。当晶体管100选用顶栅型晶体管100时,至少部分遮光部件200可以位于栅极层130和电容极板层21之间。或者至少部分遮光部件200可以位于电容极板层21和源漏电极层22之间,或者,至少部分遮光部件200位于源漏电极层22上。In some other optional embodiments, when the material of the light shielding component 200 is an insulating material, at least part of the light shielding component 200 can be located on the active layer 110 and the gate layer 130, and under the capacitor plate layer 21. When the transistor 100 is a top-gate transistor 100, at least part of the light shielding component 200 can be located between the gate layer 130 and the capacitor plate layer 21. Or at least part of the light shielding component 200 can be located between the capacitor plate layer 21 and the source-drain electrode layer 22, or at least part of the light shielding component 200 is located on the source-drain electrode layer 22.
当遮光部件200包括第一遮挡部210和第二遮挡部220时,至少部分遮光部件200指的是第一遮挡部210,即第一遮挡部210可以位于有源层110和栅极层130上,并位于电容极板层21下。当晶体管100选用顶栅型晶体管100时,第一遮挡部210可以位于栅极层130和电容极板层21之间。或者第一遮挡部210可以位于电容极板层21和源漏电极层22之间,或者,第一遮挡部210位于源漏电极层22上。When the light shielding component 200 includes a first shielding portion 210 and a second shielding portion 220, at least part of the light shielding component 200 refers to the first shielding portion 210, that is, the first shielding portion 210 can be located on the active layer 110 and the gate layer 130, and under the capacitor plate layer 21. When the transistor 100 is a top-gate transistor 100, the first shielding portion 210 can be located between the gate layer 130 and the capacitor plate layer 21. Alternatively, the first shielding portion 210 can be located between the capacitor plate layer 21 and the source-drain electrode layer 22, or the first shielding portion 210 is located on the source-drain electrode layer 22.
在一些可选的实施例中,当阵列基板包括位于栅极层130上的源漏电极层22,遮光部件200的材料为绝缘材料时,至少部分遮光部件200和源漏电极层22相邻设置。In some optional embodiments, when the array substrate includes a source-drain electrode layer 22 located on the gate layer 130 and the light shielding component 200 is made of an insulating material, at least a portion of the light shielding component 200 and the source-drain electrode layer 22 are disposed adjacent to each other.
在这些实施例中,当阵列基板包括源漏电极层22时,源漏电极层22和栅极层130之间的介质层、及栅极层130和有源层110之间的第一介质层120通常为选用无机绝缘材料形成的无机介质层。无机介质层通常由无机绝缘材料选用高温制程形成。至少部分遮光部件200和源漏电极层22相邻设置,即至少部分遮光部件200位于源漏电极层22下或者至少部分遮光部件200位于源漏电极层22上,使得在阵列基板的成型的过程中,能够在无机介质层之后再形成遮光部件200,从而有效避免高温制程对遮光部件200形状造成的影响,保证遮光部件200的遮光效果。In these embodiments, when the array substrate includes a source-drain electrode layer 22, the dielectric layer between the source-drain electrode layer 22 and the gate layer 130, and the first dielectric layer 120 between the gate layer 130 and the active layer 110 are generally inorganic dielectric layers formed of inorganic insulating materials. The inorganic dielectric layer is generally formed of inorganic insulating materials using a high-temperature process. At least part of the shading component 200 is disposed adjacent to the source-drain electrode layer 22, that is, at least part of the shading component 200 is located under the source-drain electrode layer 22 or at least part of the shading component 200 is located on the source-drain electrode layer 22, so that during the molding process of the array substrate, the shading component 200 can be formed after the inorganic dielectric layer, thereby effectively avoiding the influence of the high-temperature process on the shape of the shading component 200, and ensuring the shading effect of the shading component 200.
例如,电容极板层21和源漏电极层22之间设置有第二介质层500。第二介质层500为无机绝缘介质层,第二介质层500采用高温制程形成。如图6所示,至少部分遮光部件200位于源漏电极层22和第二介质层500之间,例如第一遮挡部210位于源漏电极层22和第二介质层500之间;或者如图5所示,至少部分遮光部件200位于源漏电极层22上,例如第一遮挡部210位于源漏电极层22上。使得在形成第二介质层500之后再形成遮光部件200,能够避免高温制程影响遮光部件200的形状,防止遮光部件200受热熔化变形。For example, a second dielectric layer 500 is provided between the capacitor plate layer 21 and the source-drain electrode layer 22. The second dielectric layer 500 is an inorganic insulating dielectric layer, and the second dielectric layer 500 is formed by a high-temperature process. As shown in FIG6 , at least part of the light shielding component 200 is located between the source-drain electrode layer 22 and the second dielectric layer 500, for example, the first shielding portion 210 is located between the source-drain electrode layer 22 and the second dielectric layer 500; or as shown in FIG5 , at least part of the light shielding component 200 is located on the source-drain electrode layer 22, for example, the first shielding portion 210 is located on the source-drain electrode layer 22. By forming the light shielding component 200 after forming the second dielectric layer 500, it is possible to avoid the high-temperature process from affecting the shape of the light shielding component 200, and prevent the light shielding component 200 from melting and deforming due to heat.
在一些可选的实施例中,晶体管100包括第一晶体管和第二晶体管。第一晶体管例如为驱动晶体管,第二晶体管例如为开关晶体管。发光器件300包括第一电极310,第一电极310通过连接引线400和第一晶体管连接,使得第一晶体管能够驱动第一电极310。In some optional embodiments, the transistor 100 includes a first transistor and a second transistor. The first transistor is, for example, a driving transistor, and the second transistor is, for example, a switching transistor. The light emitting device 300 includes a first electrode 310, and the first electrode 310 is connected to the first transistor through a connecting wire 400, so that the first transistor can drive the first electrode 310.
当遮光部件200的材料为绝缘材料,且遮光部件200设置于源漏电极层22上时,遮光部件200包括对应于第一晶体管的第一遮光部件200a和对应于第二晶体管的第二遮光部件200b,第一遮光部件200a上开设有第一通孔211,以使连接引线400穿过第一通孔211连接于第一电极310和第一晶体管之间。从而避免遮光部件200影响第一电极310和第一晶体管之间相互连接。例如,第一遮挡部210上开设有第一通孔211,使得连接引线400穿过第一通孔211连接于第一电极310和第一晶体管之间。When the material of the light shielding component 200 is an insulating material, and the light shielding component 200 is disposed on the source-drain electrode layer 22, the light shielding component 200 includes a first light shielding component 200a corresponding to the first transistor and a second light shielding component 200b corresponding to the second transistor, and the first light shielding component 200a is provided with a first through hole 211, so that the connecting lead 400 passes through the first through hole 211 and is connected between the first electrode 310 and the first transistor. This prevents the light shielding component 200 from affecting the mutual connection between the first electrode 310 and the first transistor. For example, the first shielding portion 210 is provided with a first through hole 211, so that the connecting lead 400 passes through the first through hole 211 and is connected between the first electrode 310 and the first transistor.
当遮光部件200设置于源漏电极层22下时,遮光部件200上开设有第二通孔212,例如第一遮挡部210上开设有第二通孔212,以使源漏电极层22的源漏电极导体140穿过第二通孔212和有源层110相互连接。When the shading component 200 is disposed under the source-drain electrode layer 22 , a second through hole 212 is opened on the shading component 200 , for example, a second through hole 212 is opened on the first blocking portion 210 , so that the source-drain electrode conductor 140 of the source-drain electrode layer 22 passes through the second through hole 212 and is connected to the active layer 110 .
在上述任一实施例中,当遮光部件200为多个时,多个遮光部件200的设置方式可以相同或不同。例如多个遮光部件200中,一部分遮光部件200的材料为绝缘材料,另一部分遮光部件200的材料包括金属材料。或者当多个遮光部件200的材料均包括金属材料时,一部分遮光部件200和电容极板层21同层设置,另一部分遮光部件200和源漏电极层22同层设置。In any of the above embodiments, when there are multiple light shielding components 200, the multiple light shielding components 200 may be arranged in the same or different manners. For example, among the multiple light shielding components 200, the material of some of the light shielding components 200 is an insulating material, and the material of another part of the light shielding components 200 includes a metal material. Or when the materials of the multiple light shielding components 200 all include a metal material, some of the light shielding components 200 and the capacitor plate layer 21 are arranged in the same layer, and another part of the light shielding components 200 and the source-drain electrode layer 22 are arranged in the same layer.
虽然已经参考优选实施例对本申请进行了描述,但在不脱离本申请的范围的情况下,可以对其进行各种改进并且可以用等效物替换其中的部件。尤其是,只要不存在结构冲突,各个实施例中所提到的各项技术特征均可以任意方式组合起来。本申请并不局限于文中公开的特定实施例,而是包括落入权利要求的范围内的所有技术方案。Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
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JP2003229578A (en) * | 2001-06-01 | 2003-08-15 | Semiconductor Energy Lab Co Ltd | Semiconductor device, display device and manufacturing method therefor |
KR20140069896A (en) * | 2012-11-30 | 2014-06-10 | 엘지디스플레이 주식회사 | Thin film transistor substrate and Display Device using the same |
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