CN111830606A - Superhard material high-density microlens array manufacturing device and method - Google Patents

Abstract

The invention discloses a device and a method for manufacturing a high-density microlens array of a superhard material. The method comprises the following steps: the rotary sphere is contacted with the upper surface of the superhard material substrate; step two: the rotating ball body rotates to drive the grinding particle suspension to grind the surface of the superhard material substrate; step three: horizontally moving the moving platform, and contacting the rotary sphere with other positions on the upper surface of the superhard material substrate; step four: and repeating the second step and the third step to obtain the high-density micro-lens array. The invention can manufacture the micro-lens array with high density and small spacing on the surface of the superhard material, and has low cost and high manufacturing efficiency.

Description

Superhard material high-density microlens array manufacturing device and method

technical field

The invention relates to the technical field of microlens array manufacturing, in particular to a device and method for manufacturing a high-density microlens array of superhard materials.

Background technique

A lens is a very familiar optical element, which is a passive optical element used in optical systems to converge and diverge optical radiation. Usually the size of the lens is relatively large, which can be seen by the human eye. Following the law of refraction, the knowledge of geometric optics can be used to study their optical properties.

The same lenses are arranged on a plane according to a certain period to form a lens array, and the optical properties of the lens array composed of ordinary lenses are the synthesis of the functions of a single lens.

However, with the advancement of science and technology, the current instruments and equipment have been developing towards the trend of optical, mechanical and electrical integration. Optical elements manufactured by traditional methods not only have complicated manufacturing processes, but also have large size and weight, which cannot meet the needs of today's technological development. At present, people have been able to make lenses and lens arrays with very small diameters. Such lenses and lens arrays are usually not recognized by the human eye and can only be observed with microscopes, scanning electron microscopes, atomic force microscopes and other equipment. This is the microlens and microlens arrays.

At present, the methods for making microlens arrays include photoresist hot-melting method, photosensitive glass thermoforming method, ion exchange method, femtosecond laser method, turning method, milling method, photoelectric reactive etching method, focused ion beam etching method. Erosion and deposition methods and chemical vapor deposition methods.

Photolithography, etching and other methods are relatively mature and have good compatibility, and can also be mass-produced, but their processing equipment has high cost and low efficiency, and is only suitable for two-dimensional or simple three-dimensional structures; ion exchange method, femtosecond Energy processing methods such as laser method and focused ion beam can realize the processing of nano-scale precision structures, but they also have the disadvantages of high processing equipment cost, low processing efficiency, poor uniformity, and difficulty in mass production; single-point diamond turning methods and milling The method can complete the processing of complex structures with high surface precision, but the cost of processing lathes or milling machines is high. When the material to be processed is a superhard material (single crystal silicon, silicon carbide, tungsten carbide, etc.), the processing process on the reference plane In the process, the wear of the tool is serious, and it is difficult to ensure the cutting of the high-quality reference surface. If the high-density micro-nano array is processed, due to the serious wear of the tool, the tool needs to be replaced repeatedly, the processing cost is high, the processing efficiency is low, and it is impossible to guarantee high efficiency. Machining of high-quality, highly uniform micro-nano arrays.

Therefore, what kind of low-cost, high-efficiency processing device and processing method to use to manufacture and process the surface of the superhard material mold with a high-density microlens array is a technical problem to be solved by those skilled in the art.

SUMMARY OF THE INVENTION

The object of the present invention is to provide a high-density microlens array manufacturing device and method of superhard material, so as to solve the above-mentioned problems in the prior art, and can manufacture high-density, small-pitch microlens arrays on the surface of superhard materials, and Low cost and high production efficiency.

For achieving the above object, the present invention provides the following scheme:

The invention provides a superhard material high-density microlens array manufacturing device, comprising a mobile platform, a screen, a rotating sphere, a spray device and a rotary drive device, the mobile platform is used for installing a superhard material substrate, and the mobile platform It can move in the vertical direction and on the horizontal plane. The screen is fixed above the mobile platform. The screen is provided with through holes. The diameter of the through holes is not larger than the diameter of the rotating sphere. The rotating sphere can into the through hole, the spraying device is used for spraying the grinding particle suspension on the surface of the superhard material substrate, the rotation driving device is used for driving the rotating sphere to rotate in the through hole, the rotating The rotation of the sphere drives the grinding particle suspension to grind the surface of the superhard material substrate to obtain a high-density microlens array.

Preferably, the rotary drive device comprises a conveyor belt, a pulley and a motor, the conveyor belt is arranged above the screen and the rotating sphere and is in contact with the rotating sphere, and the pulley is used for tensioning the conveyor belt , the pulley is driven by the motor.

Preferably, the rotating sphere is a steel ball, and the grinding particle suspension is a diamond particle suspension.

Preferably, the through holes are distributed in an array on the screen.

Preferably, the spraying device is a nozzle, and the nozzle is arranged above the superhard material base.

The present invention also provides a method for manufacturing a high-density microlens array of superhard materials, using the device for manufacturing a high-density microlens array of superhard materials, comprising the following steps:

Step 1: Fix the superhard material base on the table top of the mobile platform, move the mobile platform vertically, and put the rotating sphere into the through hole, so that the rotating sphere and the superhard the contact of the upper surface of a machining location of the material matrix;

Step 2: Spray the grinding particle suspension on the surface of the superhard material substrate, turn on the rotary drive device to drive the rotating sphere to rotate in the through hole, and the rotating sphere rotates to drive the grinding particle suspension to grind superhard material substrate surface;

Step 3: move the moving platform horizontally, so that the rotating sphere contacts the upper surface of another processing position of the superhard material base;

Step 4: Repeat steps 2 and 3 until a high-density microlens array is obtained.

Preferably, the method further includes step 5: cleaning the processed high-density microlens array, and performing drying treatment after cleaning.

Preferably, the processing depth of the microlenses is controlled by adjusting the moving distance of the moving platform in the vertical direction.

Preferably, in step 5, the processed high-density microlens array is placed in acetone for cleaning.

The present invention has achieved the following technical effects with respect to the prior art:

The invention drives the grinding particle suspension to grind the surface of the superhard material substrate by rotating the rotating sphere, the grinding suspension can be reused, the cost is low, the rotating sphere can be replaced after it is damaged, the replacement cost of the rotating sphere is low, the replacement is convenient, and Timely replacement of the rotating sphere can ensure the processing quality of the microlenses and improve the production efficiency; through the horizontal movement of the mobile platform, a high-density, small-pitch microlens array can be fabricated on the surface of the superhard material substrate.

Description of drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings required in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some of the present invention. In the embodiments, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without any creative effort.

1 is a schematic diagram of a non-processed state of a partial structure of a device for manufacturing a high-density microlens array of superhard materials of the present invention;

2 is a schematic view of the processing state of the high-density microlens array manufacturing device of the superhard material of the present invention;

In the picture: 1-mobile platform, 2-screen, 3-rotating sphere, 4-jetting device, 5-rotating drive device, 6-conveyor belt, 7-belt wheel, 8-superhard material base.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

The purpose of the present invention is to provide a high-density microlens array manufacturing device and method of superhard material, so as to solve the problems existing in the prior art, and can manufacture high-density, small-pitch microlens arrays on the surface of superhard materials, and the cost is low. low and high production efficiency.

In order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

Example 1

As shown in FIG. 1 and FIG. 2 , the present embodiment provides a high-density microlens array manufacturing device of superhard material, including a mobile platform 1, a screen 2, a rotating sphere 3, a spray device 4 and a rotary drive device 5, The mobile platform 1 is used to install the superhard material base 8, the mobile platform 1 can move in the vertical direction and the horizontal plane, the screen 2 is fixedly arranged above the mobile platform 1, and the screen 2 is provided with a through hole, and the diameter of the through hole is not larger than The diameter of the rotating sphere 3, the rotating sphere 3 can enter the through hole, the spraying device 4 is used to spray the grinding particle suspension on the surface of the superhard material base 8, the rotating driving device 5 is used to drive the rotating sphere 3 to rotate in the through hole, The rotation of the rotating sphere 3 drives the grinding particle suspension to grind the surface of the superhard material substrate 8 to obtain a high-density microlens array.

Using the device of this embodiment, the grinding particle suspension is driven by the rotating sphere 3 to grind the surface of the superhard material substrate 8, the grinding suspension can be reused, and the cost is low. When grinding the surface of the superhard material base 8, if the rotating sphere 3 is worn out and becomes unusable, replace the damaged rotating sphere 3, and put the intact rotating sphere 3 back into the through hole in the screen 2 to continue processing. Yes, the replacement cost of the rotating sphere 3 is low and the replacement is convenient, and the timely replacement of the rotating sphere 3 can ensure the processing quality of the microlenses and improve the production efficiency; After the processing of the processing position is completed, it can be moved to any next processing position, and a high-density, small-pitch microlens array can be fabricated on the surface of the superhard material base 8 .

When selecting the rotating sphere 3, the diameter of the rotating sphere 3 corresponds to the radius of curvature of the microlens, so that a high-density microlens array of the required specification can be processed.

When the surface of the superhard material substrate 8 is processed, the rotating sphere 3 is restricted by the through holes on the screen 2 and can only rotate around the center of the rotating sphere 3 in the through hole, so that the rotating sphere 3 is more stable during processing. In order to ensure the processing quality of the micro lens.

As shown in FIG. 2, the rotary drive device 5 includes a conveyor belt 6, a pulley 7 and a motor. The conveyor belt 6 is arranged above the screen 2 and the rotating sphere 3 and is in contact with the rotating sphere 3. The pulley 7 is used to tension the conveyor belt 6. The wheel 7 is driven by an electric motor.

The rotating sphere 3 is a steel ball, and the grinding particle suspension is a diamond particle suspension. The rotating sphere 3 is selected as a steel ball, so that the rotating sphere 3 has certain hardness and wear resistance, and at the same time, the cost is low. Choosing the grinding particle suspension as the diamond particle suspension can grind the surface of the superhard material substrate 8 Machining. However, the present invention is not limited to the above-selected materials of the rotating sphere 3 and the grinding particle suspension, and other corresponding materials can be selected according to actual needs.

The through holes are distributed in an array on the screen mesh 2, and when a rotating sphere 3 is placed in the through holes to process the microlenses, the arrayed microlenses can be obtained by one processing, which improves the processing efficiency. However, in the present invention, the number and distribution of the through holes can also be set according to actual needs, and are not limited to the array distribution.

The spray device 4 is a nozzle, which is arranged above the superhard material base 8 , and sprays the grinding particle suspension on the surface of the superhard material base 8 through the nozzle.

Embodiment 2

This embodiment provides a method for manufacturing a high-density microlens array of superhard materials, using the device for manufacturing a high-density microlens array of superhard materials in Embodiment 1, including the following steps:

Step 1: Fix the superhard material base 8 on the table top of the mobile platform 1, move the mobile platform 1 in the vertical direction, and put the rotating sphere 3 in the through hole, so that one of the rotating sphere 3 and the superhard material base 8 The upper surface of the machining position is in contact;

Step 2: Spray the grinding particle suspension on the surface of the superhard material base 8, turn on the rotary drive device 5 to drive the rotating sphere 3 to rotate in the through hole, and the rotating sphere 3 rotates to drive the grinding particle suspension to grind the surface of the superhard material base 8 ;

Step 3: move the mobile platform 1 horizontally, so that the rotating sphere 3 is in contact with the upper surface of another processing position of the superhard material base body 8;

Step 4: Repeat steps 2 and 3 until a high-density microlens array is obtained;

Step 5: cleaning the processed high-density microlens array, and performing drying treatment after cleaning.

When processing the microlens, the processing depth of the microlens is controlled by adjusting the moving distance of the mobile platform 1 in the vertical direction, and the mobile platform 1 with corresponding precision can be selected according to the processing precision requirements of the microlens.

In step 5, the processed high-density microlens array is placed in acetone for cleaning, or other organic solvents can be selected to clean the processed high-density microlens array.

In the present invention, specific examples are used to illustrate the principles and implementations of the present invention, and the descriptions of the above embodiments are only used to help understand the method and the core idea of the present invention; There will be changes in the specific implementation manner and application scope of the idea of the invention. In conclusion, the contents of this specification should not be construed as limiting the present invention.

Claims (9)

1. a high-density microlens array manufacturing device of a superhard material, is characterized in that: comprising a mobile platform, a screen, a rotating sphere, a jetting device and a rotary drive device, and the mobile platform is used to install a superhard material matrix, so the The mobile platform can move in the vertical direction and the horizontal plane, the screen is fixedly arranged above the mobile platform, the screen is provided with through holes, the diameter of the through holes is not larger than the diameter of the rotating sphere, the The rotating sphere can enter into the through hole, the spraying device is used for spraying the grinding particle suspension on the surface of the superhard material substrate, and the rotating driving device is used for driving the rotating sphere to rotate in the through hole, The rotation of the rotating sphere drives the grinding particle suspension to grind the surface of the superhard material substrate to obtain a high-density microlens array. 2. The superhard material high-density microlens array manufacturing device according to claim 1, wherein the rotary drive device comprises a conveyor belt, a pulley and a motor, and the conveyor belt is arranged on the screen and the Above and in contact with the rotating sphere, the pulley is used to tension the conveyor belt, and the pulley is driven by the motor. 3. The superhard material high-density microlens array manufacturing device according to claim 1, wherein the rotating sphere is a steel ball, and the grinding particle suspension is a diamond particle suspension. 4 . The superhard material high-density microlens array manufacturing device according to claim 1 , wherein the through holes are distributed in an array on the screen. 5 . 5 . The superhard material high-density microlens array manufacturing device according to claim 1 , wherein the spraying device is a nozzle, and the nozzle is arranged above the superhard material base. 6 . 6. A method for manufacturing a high-density microlens array of a superhard material, characterized in that: using the device for manufacturing a high-density microlens array of a superhard material according to any one of claims 1 to 5, comprising the following steps: Step 1: Fix the superhard material base on the table top of the mobile platform, move the mobile platform vertically, and put the rotating sphere into the through hole, so that the rotating sphere and the superhard the contact of the upper surface of a machining location of the material matrix; Step 2: Spray the grinding particle suspension on the surface of the superhard material substrate, turn on the rotary drive device to drive the rotating sphere to rotate in the through hole, and the rotating sphere rotates to drive the grinding particle suspension to grind superhard material substrate surface; Step 3: move the moving platform horizontally, so that the rotating sphere contacts the upper surface of another processing position of the superhard material base; Step 4: Repeat steps 2 and 3 until a high-density microlens array is obtained. 7 . The method for manufacturing a high-density microlens array of superhard materials according to claim 6 , further comprising step 5: cleaning the processed high-density microlens array, and drying the processed high-density microlens array. 8 . 8 . The method for manufacturing a high-density microlens array of superhard materials according to claim 6 , wherein the processing depth of the microlens is controlled by adjusting the moving distance of the moving platform in the vertical direction. 9 . 9 . The method for manufacturing a high-density microlens array of superhard materials according to claim 7 , wherein in step 5, the processed high-density microlens array is placed in acetone for cleaning. 10 .

Images