CN111826620A - Gradient Coatings for Glass Molding Moulds that Inhibit Element Diffusion and Anti-Stick - Google Patents
Gradient Coatings for Glass Molding Moulds that Inhibit Element Diffusion and Anti-Stick Download PDFInfo
- Publication number
- CN111826620A CN111826620A CN201910309244.0A CN201910309244A CN111826620A CN 111826620 A CN111826620 A CN 111826620A CN 201910309244 A CN201910309244 A CN 201910309244A CN 111826620 A CN111826620 A CN 111826620A
- Authority
- CN
- China
- Prior art keywords
- deposition
- gradient coating
- substrate
- glass molding
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5062—Borides, Nitrides or Silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/10—Die base materials
- C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/22—Non-oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/31—Two or more distinct intermediate layers or zones
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/34—Intermediate layers, e.g. graded zone of base/top material of ceramic or cermet material, e.g. diamond-like carbon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
- C04B41/90—Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0084—Producing gradient compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
技术领域technical field
本发明属于仅含无机材料的玻璃模具涂层技术领域,具体涉及一种抑制元素扩散、防黏着的玻璃模压模具梯度涂层。The invention belongs to the technical field of glass mold coatings containing only inorganic materials, and in particular relates to a gradient coating for glass molding molds that inhibits element diffusion and prevents sticking.
背景技术Background technique
玻璃精密模压成型是一种高效率、环保的先进光学元件制造技术,近年来得到了飞速发展(“玻璃精密模压成形的研究进展”,龚峰等,光学精密工程,2018年第26卷第6期,第1380页,摘要,公开日2018年06月30日)。光学玻璃模压成型技术利用的是玻璃从熔融态向固态转化中连续可逆的热加工性质,在玻璃的转变温度Tg附近,无氧条件下,对玻璃和模具进行加温加压,一次性将光学玻璃模压成型。由于光学玻璃模压成型法摒弃了传统的粗磨、精磨、抛光以及定心磨边等工序,直接一次成型,大大节省了材料、时间、设备及人力,且能模压出复杂形状的光学元件,尤其是在非球面光学玻璃零件和小型、微型光学元件制造方面,有着广阔的应用前景(“光学玻璃模压成型技术”,王丽荣,科技传播,2012年第7期,第105页,公开日2012年07月23日)。因此,光学玻璃模压成型技术特别适用于批量生产各种具有特殊结构的高精度中小口径透镜,尤其是那些用传统加工手段难以实现的光学玻璃元件,如小口径薄型透镜、高次非球面镜片、微透镜阵列、衍射光学元件和自由曲面光学元件等。由于光学玻璃模压成型技术能够大批量生产精密的非球面或自由曲面光学元件,推进了非球面玻璃光学元件的应用(“精密模压技术于光学玻璃的制造研究”,吴澄,市场周刊:理论研究,2012年第2期,第111页,公开日2012年06月01日)。Glass precision molding is a high-efficiency and environmentally friendly advanced optical component manufacturing technology, which has developed rapidly in recent years ("Research Progress in Glass Precision Molding", Gong Feng et al., Optical Precision Engineering, 2018 Vol. 26 No. 6 , p. 1380, abstract, published on June 30, 2018). Optical glass molding technology utilizes the continuous and reversible thermal processing properties of glass in the transformation from molten state to solid state. Near the transition temperature T g of glass, under oxygen-free conditions, the glass and mold are heated and pressurized, and the glass and mold are heated and pressurized at one time. Optical glass molding. Because the optical glass molding method abandons the traditional rough grinding, fine grinding, polishing and centering edging and other processes, it can be directly formed at one time, which greatly saves materials, time, equipment and labor, and can mold optical components with complex shapes. Especially in the manufacture of aspherical optical glass parts and small and micro optical components, it has broad application prospects ("Optical Glass Molding Technology", Wang Lirong, Science and Technology Communication, No. 7, 2012, p. 105, published in 2012. July 23). Therefore, the optical glass molding technology is especially suitable for mass production of various high-precision medium and small-diameter lenses with special structures, especially those optical glass components that are difficult to achieve with traditional processing methods, such as small-diameter thin lenses, high-order aspherical lenses, Microlens arrays, diffractive optical elements and freeform optical elements, etc. Since optical glass molding technology can produce precise aspheric or free-form surface optical components in large quantities, the application of aspheric glass optical components is promoted ("Precision molding technology in optical glass manufacturing research", Wu Cheng, Market Weekly: Theoretical Research , No. 2, 2012, p. 111, published on June 1, 2012).
模具的使用寿命及表面质量一直限制着玻璃精密模压技术的发展。其主要原因在于,在玻璃制品的成型过程中,模具频繁的与高温的熔融玻璃接触,发生氧化反应、热疲劳、动态磨损、黏着等协同作用(“玻璃模具材料的发展和应用”,韦玉屏等,机械设计与制造,2008年第3期,第201页,公开日2008年03月31日;“新玻璃模具材料的开发与应用”,肖明,玻璃与搪瓷,2006年第34卷第2期,第19页,公开日2006年04月30日)。此外,模具表面质量对玻璃元件的成型质量息息相关。因此,玻璃模压模具需要具备优异的耐高温、抗氧化、抗黏着、抗热疲劳、耐腐蚀、耐磨损性能。The service life and surface quality of the mold have always limited the development of glass precision molding technology. The main reason is that in the molding process of glass products, the mold frequently contacts with high-temperature molten glass, resulting in synergistic effects such as oxidation reaction, thermal fatigue, dynamic wear, and adhesion ("Development and Application of Glass Mold Materials", Wei Yuping). et al, Mechanical Design and Manufacturing, No.3, 2008, p. 201, published on March 31, 2008; "Development and Application of New Glass Mould Materials", Xiao Ming, Glass and Enamel, Vol. 34, 2006
因此,为延长模具的使用寿命,改善光学元件的质量,应采用在模具表面镀膜的方式来提高玻璃模压模具的耐高温、抗氧化、抗黏着、抗热疲劳、耐腐蚀、耐磨损等方面的性能。但是,由于缺少模具涂层的使用,我国所用的加工方式依然以传统的数控切削、磨削、抛光等方法为主,急需寻找一种抑制元素扩散、防黏着的玻璃模压模具涂层。Therefore, in order to prolong the service life of the mold and improve the quality of optical components, the method of coating the surface of the mold should be used to improve the high temperature resistance, oxidation resistance, adhesion resistance, thermal fatigue resistance, corrosion resistance, wear resistance, etc. performance. However, due to the lack of the use of mold coatings, the processing methods used in my country are still dominated by traditional CNC cutting, grinding, polishing and other methods. It is urgent to find a glass mold coating that inhibits element diffusion and prevents adhesion.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本发明的目的在于提供一种玻璃模压模具梯度涂层,该梯度涂层在抑制元素扩散方面及防黏着性能方面优异,且成本低廉。In view of this, an object of the present invention is to provide a gradient coating for a glass molding die, which is excellent in inhibiting element diffusion and anti-adhesion performance, and has a low cost.
为实现上述目的,本发明的技术方案为:For achieving the above object, the technical scheme of the present invention is:
玻璃模压模具梯度涂层,包括与基体链接的Cr结合层、CrN中间过渡层及表面CrxWyN(1-x-y)层,且0.15<x<0.4,0.2≤y<0.45。Gradient coating for glass molding die, including Cr bonding layer linked with substrate, CrN intermediate transition layer and surface Cr x W y N (1-xy) layer, and 0.15<x<0.4, 0.2≤y<0.45.
进一步,所述Cr结合层的厚度为50-100nm,CrN中间过渡层厚度为150-300nm,表面CrxWyN(1-x-y)层厚度为1300-1500nm。Further, the thickness of the Cr bonding layer is 50-100 nm, the thickness of the CrN intermediate transition layer is 150-300 nm, and the thickness of the surface Cr x W y N (1-xy) layer is 1300-1500 nm.
进一步,所述梯度涂层在1000℃的高温润湿角为125°。Further, the high temperature wetting angle of the gradient coating at 1000°C is 125°.
进一步,所述基体为掺杂8%Co的碳化钨模具,以质量百分比计。Further, the substrate is a tungsten carbide mold doped with 8% Co, in mass percentage.
本发明的目的之二在于保护所述玻璃模压模具梯度涂层的制备方法,包括以下步骤:The second object of the present invention is to protect the preparation method of the gradient coating of the glass molding die, comprising the following steps:
A.在真空、惰性气体的气氛下,对待沉积基体和靶材进行溅射清洗;A. Under the atmosphere of vacuum and inert gas, the substrate to be deposited and the target are cleaned by sputtering;
B.在惰性气体、真空气氛下,采用Cr靶和W靶在经过步骤A处理的待沉积基体表面依次沉积Cr结合层、CrN中间过渡层和CrxWyN(1-x-y)层。B. Under inert gas and vacuum atmosphere, use Cr target and W target to sequentially deposit Cr bonding layer, CrN intermediate transition layer and Cr x W y N (1-xy) layer on the surface of the substrate to be deposited processed in step A.
进一步,所述惰性气体为氩气、氮气或二者的混合物。Further, the inert gas is argon, nitrogen or a mixture of the two.
进一步,步骤A中,流量为100-180sccm,溅射时真空度为0.4-0.5Pa,基体预热至200-400℃,优选300-400℃,沉积偏压为-30~-70V,基体溅射清洗时间为30-120分钟,优选60-120分钟,靶材溅射清洗时间为1-5分钟,优选2-5分钟。Further, in step A, the flow rate is 100-180sccm, the vacuum degree during sputtering is 0.4-0.5Pa, the substrate is preheated to 200-400°C, preferably 300-400°C, the deposition bias is -30--70V, and the substrate is sputtered. The sputtering cleaning time is 30-120 minutes, preferably 60-120 minutes, and the target sputtering cleaning time is 1-5 minutes, preferably 2-5 minutes.
进一步,步骤B中,Cr结合层的沉积条件为:真空室基底真空度3×10-3-6×10-3Pa,工作气体为氩气,沉积处理时反应室真空度为0.4-0.5Pa,沉积偏压为-30~-70V,Cr靶功率为3-6kW,沉积温度为300-400℃,沉积时间为2-5分钟。Further, in step B, the deposition conditions of the Cr bonding layer are as follows: the vacuum degree of the vacuum chamber substrate is 3×10 -3 -6×10 -3 Pa, the working gas is argon, and the vacuum degree of the reaction chamber is 0.4-0.5Pa during the deposition process , the deposition bias voltage is -30--70V, the Cr target power is 3-6kW, the deposition temperature is 300-400°C, and the deposition time is 2-5 minutes.
进一步,步骤B中,CrN中间过渡层的沉积条件为:工作气体为氩气、氮气混合气体,溅射时真空度为0.4-0.5Pa,沉积偏压为-30~-70V,Cr靶功率为3-6kW,沉积温度为300-400℃,沉积时间为20-40分钟。Further, in step B, the deposition conditions of the CrN intermediate transition layer are as follows: the working gas is a mixed gas of argon and nitrogen, the vacuum degree during sputtering is 0.4-0.5Pa, the deposition bias is -30--70V, and the Cr target power is 3-6kW, deposition temperature is 300-400℃, deposition time is 20-40 minutes.
进一步,步骤B中,CrxWyN(1-x-y)层的沉积条件为:工作气体为氩气、氮气混合气体,溅射时真空度为0.4-0.5Pa,沉积偏压为-30~-70V,Cr靶功率为3-6kW,W靶功率为4-6kW,沉积温度为300-400℃,沉积时间为60-100分钟。Further, in step B, the deposition conditions of the Cr x W y N (1-xy) layer are as follows: the working gas is a mixed gas of argon and nitrogen, the vacuum degree during sputtering is 0.4-0.5Pa, and the deposition bias is -30~ -70V, Cr target power is 3-6kW, W target power is 4-6kW, deposition temperature is 300-400°C, and deposition time is 60-100 minutes.
进一步,所述沉积为等离子增强磁控溅射。Further, the deposition is plasma enhanced magnetron sputtering.
进一步,在步骤A之前,还包括以下步骤:Further, before step A, the following steps are also included:
(1)对待沉积基体进行抛光处理;(1) Polish the substrate to be deposited;
(2)将经过抛光处理的待沉积基体在去离子水和/或丙酮和/或乙醇中进行超声清洗。(2) ultrasonically clean the polished substrate to be deposited in deionized water and/or acetone and/or ethanol.
进一步,溅射清洗靶材时,靶材用衬板遮挡。Furthermore, when the target is sputtered and cleaned, the target is shielded by a backing plate.
本发明的目的之三在于保护所述玻璃模压模具梯度涂层在制备玻璃模压模具中的应用。The third object of the present invention is to protect the application of the glass molding mold gradient coating in the preparation of glass molding molds.
本发明的目的还在于保护一种玻璃模压模具,所述模具包含玻璃模压模具梯度涂层,所述梯度涂层包括与基体链接的Cr结合层、CrN中间过渡层及表面CrxWyN(1-x-y)层,且0.15<x<0.4,0.2≤y<0.45。The object of the present invention is also to protect a glass molding mold, the mold comprises a glass molding mold gradient coating, and the gradient coating includes a Cr bonding layer linked with a substrate, a CrN intermediate transition layer and a surface Cr x W y N ( 1-xy) layer, and 0.15<x<0.4, 0.2≤y<0.45.
进一步,所述基体为掺杂8%Co的碳化钨模具,以质量百分比计。Further, the substrate is a tungsten carbide mold doped with 8% Co, in mass percentage.
本发明的有益效果在于:The beneficial effects of the present invention are:
本发明的梯度涂层表面形貌呈现为大小不一的菜花状团簇,表面呈现细小裂纹及孔洞等缺陷。通过涂层断面可观察到涂层生长方式为柱状晶体结构;各层之间结合紧密。The surface morphology of the gradient coating of the present invention presents cauliflower-like clusters of different sizes, and the surface presents defects such as fine cracks and holes. From the cross section of the coating, it can be observed that the growth mode of the coating is a columnar crystal structure; the layers are tightly bonded.
本发明的梯度涂层表现出优异的机械性能,满足玻璃模压涂层硬度使用标准。The gradient coating of the present invention exhibits excellent mechanical properties and meets the hardness usage standard for glass molded coatings.
本发明的涂层表面粗糙低,具有优异的表面质量,满足精密玻璃模压涂层表面质量的使用要求。The coating of the invention has low surface roughness, excellent surface quality, and meets the application requirements of the surface quality of precision glass molding coating.
本发明的梯度涂层具有优异的耐高温、防黏着特性,该梯度涂层经过热压成型后的玻璃及模具涂层表面无明显变化,玻璃体无变色反应、无气泡产生,表面未出现黏着现象,涂层表面与玻璃接触的部分未发生剥落。The gradient coating of the present invention has excellent high temperature resistance and anti-adhesion properties. The surface of the glass and mold coating of the gradient coating after hot pressing has no obvious change, no discoloration reaction of the glass body, no bubble generation, and no adhesion phenomenon on the surface. , the part of the coating surface in contact with the glass did not peel off.
本发明的梯度涂层抗高温及抗黏着性能优异。The gradient coating of the present invention has excellent high temperature resistance and anti-adhesion properties.
本发明的梯度涂层抑制裂纹扩展方面性能优异。The gradient coating of the present invention is excellent in suppressing crack propagation.
本发明的梯度涂层成本低。The gradient coating of the present invention is low cost.
附图说明Description of drawings
图1为本发明的梯度涂层的结构示意图;Fig. 1 is the structural representation of the gradient coating of the present invention;
图2为实施例1制得的梯度涂层的SEM表面及断面图,其中,2A为涂层的表面图,2B为涂层的断面图;Fig. 2 is the SEM surface and cross-sectional view of the gradient coating obtained in Example 1, wherein, 2A is the surface view of the coating, and 2B is the cross-sectional view of the coating;
图3为实施例1制得的梯度涂层的硬度测试结果;Fig. 3 is the hardness test result of the gradient coating obtained in Example 1;
图4为实施例1制得的梯度涂层的表面粗糙度测试结果;Fig. 4 is the surface roughness test result of the gradient coating obtained in Example 1;
图5为实施例1制得的梯度涂层的模压后梯度涂层及玻璃表面形貌图;Fig. 5 is the gradient coating and glass surface topography diagram of the gradient coating obtained in Example 1 after molding;
图6为实施例1制得的梯度涂层表面元素检测结果图(即能谱图);Fig. 6 is a graph of the detection results (i.e., energy spectrum) of the surface elements of the gradient coating obtained in Example 1;
图7为实施例1制得的梯度涂层的物相结构检测结果图;Fig. 7 is the phase structure detection result diagram of the gradient coating obtained in Example 1;
图8为实施例1制得的梯度涂层的高温润湿性能检测结果图;Fig. 8 is the high temperature wetting performance test result diagram of the gradient coating obtained in Example 1;
图9为梯度涂层的抑制裂纹扩展检测结果图;其中,9A为实施例1制得的梯度涂层的抑制裂纹扩展检测结果图;9B为对比例1制得的梯度涂层的抑制裂纹扩展检测结果图;9C为对比例2制得的涂层的抑制裂纹扩展检测结果图。Fig. 9 is a graph showing the crack growth inhibition test result of the gradient coating; wherein, 9A is the crack growth inhibition test result graph of the gradient coating obtained in Example 1; 9B is the crack growth inhibition test result of the gradient coating obtained in Comparative Example 1 9C is a graph of the detection result of inhibiting crack growth of the coating prepared in Comparative Example 2.
具体实施方式Detailed ways
所举实施例是为了更好地对本发明的内容进行说明,但并不是本发明的内容仅限于所举实施例。所以熟悉本领域的技术人员根据上述发明内容对实施方案进行非本质的改进和调整,仍属于本发明的保护范围。The cited embodiments are used to better illustrate the content of the present invention, but the content of the present invention is not limited to the cited embodiments. Therefore, those skilled in the art make non-essential improvements and adjustments to the embodiments according to the above-mentioned contents of the invention, which still belong to the protection scope of the present invention.
实施例1Example 1
玻璃模压模具梯度涂层,其具体制备步骤为:Glass molding mold gradient coating, its specific preparation steps are:
(1)镀前处理(1) Pre-plating treatment
对待沉积基体(掺杂8%Co的碳化钨模具,以质量百分比计)进行机械研磨抛光,然后依次在去离子水、丙酮、乙醇溶液中进行超声波震荡清洗,各20min,清洗后样品置于烘箱中于80℃烘干30min;The substrate to be deposited (tungsten carbide mold doped with 8% Co, in mass percentage) was mechanically ground and polished, and then cleaned by ultrasonic vibration in deionized water, acetone, and ethanol solution for 20 minutes each, and the samples were placed in an oven after cleaning. Dry at 80℃ for 30min;
(2)溅射清洗(2) Sputter cleaning
将经镀前处理的待沉积基体装入真空室,真空室进行预抽真空,基底真空度为5×10-3Pa,并在此过程中对真空室进行加热,加热温度至300℃。通入高纯氩气(纯度>99.99%,由外包装获知)对基体和靶材进行离子溅射刻蚀清洗,流量为120sccm,溅射时真空度为0.4Pa,沉积偏压为-70V,基体溅射清洗时间为60分钟,靶材溅射清洗时间为5分钟;溅射清洗靶材时,靶材用衬板遮挡;The pre-plated substrate to be deposited is loaded into a vacuum chamber, and the vacuum chamber is pre-evacuated, the vacuum degree of the substrate is 5×10 -3 Pa, and the vacuum chamber is heated to 300°C during this process. High-purity argon gas (purity>99.99%, known from the outer packaging) was introduced to clean the substrate and target by ion sputtering etching, the flow rate was 120sccm, the vacuum degree during sputtering was 0.4Pa, and the deposition bias was -70V. The substrate sputtering cleaning time is 60 minutes, and the target sputtering cleaning time is 5 minutes; when the target is sputtered and cleaned, the target is covered with a liner;
(3)沉积Cr结合层(3) Deposition of Cr bonding layer
采用等离子增强磁控溅射系统,将上述待沉积基体预先沉积Cr结合层;真空室基底真空度5×10-3Pa,工作气体为高纯氩气(纯度>99.99%,由外包装获知),所用靶材为一块高纯Cr靶(纯度>99.9%,由外包装获知),溅射时真空度为0.4Pa,沉积偏压为-30V,Cr靶功率为5kW,沉积温度为300℃,沉积时间为5分钟。A plasma-enhanced magnetron sputtering system is used to pre-deposit a Cr bonding layer on the substrate to be deposited; the vacuum degree of the vacuum chamber substrate is 5×10 -3 Pa, and the working gas is high-purity argon (purity>99.99%, known from the outer packaging) , the target used is a high-purity Cr target (purity > 99.9%, known from the outer packaging), the vacuum degree during sputtering is 0.4Pa, the deposition bias is -30V, the Cr target power is 5kW, and the deposition temperature is 300 ℃, The deposition time was 5 minutes.
(4)沉积CrN中间过渡层(4) Deposition of CrN intermediate transition layer
采用等离子增强磁控溅射系统,将上述沉积Cr结合层基体表面再沉积CrN过渡层;工作气体为高纯氩气(纯度>99.99%,由外包装获知)、高纯氮气(纯度>99.99%,由外包装获知)混合气体,所用靶材为一块高纯Cr靶(纯度>99.9%,由外包装获知),溅射时保持真空度为0.4Pa,沉积偏压为-30V,Cr靶功率为5kW,沉积温度为300℃,沉积时间为20分钟。Plasma-enhanced magnetron sputtering system is used to re-deposit a CrN transition layer on the surface of the above-deposited Cr bonding layer substrate; the working gas is high-purity argon (purity>99.99%, known from the outer packaging), high-purity nitrogen (purity>99.99% , known from the outer packaging) mixed gas, the target used is a high-purity Cr target (purity > 99.9%, known from the outer packaging), the vacuum degree is kept at 0.4Pa during sputtering, the deposition bias is -30V, and the power of the Cr target is was 5kW, the deposition temperature was 300°C, and the deposition time was 20 minutes.
(5)沉积CrxWyN(1-x-y)表面层(5) Deposition of Cr x W y N (1-xy) surface layer
采用等离子增强磁控溅射系统,将上述沉积Cr结合层及CrN过渡层基体表面再沉积CrxWyN(1-x-y)表面层;工作气体为高纯氩气(纯度>99.99%,由外包装获知)、高纯氮气(纯度>99.99%,由外包装获知)混合气体,所用靶材为一块高纯Cr靶(纯度为99.9%,由外包装获知)和一块高纯W靶(纯度为99.6%,由外包装获知),溅射时保持真空度为0.4Pa,沉积偏压为-30V,Cr靶功率为3kW,W靶功率为4kW,沉积温度为300℃,沉积时间为60分钟。Plasma-enhanced magnetron sputtering system was used to re-deposit a Cr x W y N (1-xy) surface layer on the surface of the above-deposited Cr bonding layer and CrN transition layer. The working gas was high-purity argon (purity >99.99%, with Known from the outer packaging), high-purity nitrogen (purity>99.99%, known from the outer packaging) mixed gas, the target materials used are a high-purity Cr target (purity of 99.9%, known from the outer packaging) and a high-purity W target (purity is 99.6%, known from the outer packaging), the vacuum degree is kept at 0.4Pa during sputtering, the deposition bias is -30V, the Cr target power is 3kW, the W target power is 4kW, the deposition temperature is 300°C, and the deposition time is 60 minutes .
对比例1Comparative Example 1
玻璃模压模具梯度涂层,其具体制备步骤为:Glass molding mold gradient coating, its specific preparation steps are:
(1)镀前处理(1) Pre-plating treatment
对待沉积基体(掺杂8%Co的碳化钨模具,以质量百分比计)进行机械研磨抛光,然后依次在去离子水、丙酮、乙醇溶液中进行超声波震荡清洗,各20min,清洗后样品置于烘箱中于80℃烘干30min;The substrate to be deposited (tungsten carbide mold doped with 8% Co, in mass percentage) was mechanically ground and polished, and then cleaned by ultrasonic vibration in deionized water, acetone, and ethanol solution for 20 minutes each, and the samples were placed in an oven after cleaning. Dry at 80℃ for 30min;
(2)溅射清洗(2) Sputter cleaning
将经镀前处理的待沉积基体装入真空室,真空室进行预抽真空,基底真空度为5×10-3Pa,并在此过程中对真空室进行加热,加热温度至300℃。通入高纯氩气(纯度>99.99%,由外包装获知)对基体和靶材进行离子溅射刻蚀清洗,流量为120sccm,溅射时真空度为0.4Pa,沉积偏压为-70V,基体溅射清洗时间为60分钟,靶材溅射清洗时间为5分钟;溅射清洗靶材时,靶材用衬板遮挡;The pre-plated substrate to be deposited is loaded into a vacuum chamber, and the vacuum chamber is pre-evacuated, the vacuum degree of the substrate is 5×10 -3 Pa, and the vacuum chamber is heated to 300°C during this process. High-purity argon gas (purity>99.99%, known from the outer packaging) was introduced to clean the substrate and target by ion sputtering etching, the flow rate was 120sccm, the vacuum degree during sputtering was 0.4Pa, and the deposition bias was -70V. The substrate sputtering cleaning time is 60 minutes, and the target sputtering cleaning time is 5 minutes; when the target is sputtered and cleaned, the target is covered with a liner;
(3)沉积Cr结合层(3) Deposition of Cr bonding layer
采用磁控溅射系统,将上述待沉积基体预先沉积Cr结合层;真空室基底真空度5×10-3Pa,工作气体为高纯氩气(纯度>99.99%,由外包装获知),所用靶材为一块高纯Cr靶(纯度>99.9%,由外包装获知),溅射时真空度为0.4Pa,沉积偏压为-30V,Cr靶功率为5kW,沉积温度为300℃,沉积时间为5分钟。A magnetron sputtering system was used to pre-deposit a Cr bonding layer on the substrate to be deposited; the vacuum degree of the vacuum chamber substrate was 5×10 -3 Pa, and the working gas was high-purity argon (purity>99.99%, known from the outer packaging), and the The target material is a high-purity Cr target (purity>99.9%, known from the outer packaging), the vacuum degree during sputtering is 0.4Pa, the deposition bias is -30V, the Cr target power is 5kW, the deposition temperature is 300℃, and the deposition time is for 5 minutes.
(4)沉积CrxWyN(1-x-y)表面层(4) Deposition of Cr x W y N (1-xy) surface layer
采用磁控溅射系统,将上述沉积Cr结合层基体表面再沉积CrxWyN(1-x-y)表面层;工作气体为高纯氩气(纯度>99.99%,由外包装获知)、高纯氮气(纯度>99.99%,由外包装获知)混合气体,所用靶材为一块高纯Cr靶(纯度为99.9%,由外包装获知)和一块高纯W靶(纯度为99.6%,由外包装获知),溅射时保持真空度为0.4Pa,沉积偏压为-30V,Cr靶功率为3kW,W靶功率为4kW,沉积温度为300℃,沉积时间为60分钟。A magnetron sputtering system was used to redeposit a Cr x W y N (1-xy) surface layer on the surface of the above-deposited Cr bonding layer substrate; Pure nitrogen (purity>99.99%, known from the outer packaging) mixed gas, the target materials used are a high-purity Cr target (purity 99.9%, known from the outer packaging) and a high-purity W target (purity 99.6%, known from the outer packaging) Packaging information), keep the vacuum degree at 0.4Pa during sputtering, the deposition bias voltage is -30V, the Cr target power is 3kW, the W target power is 4kW, the deposition temperature is 300°C, and the deposition time is 60 minutes.
对比例2Comparative Example 2
玻璃模压模具涂层,其具体制备步骤为:Glass molding die coating, its specific preparation steps are:
(1)镀前处理(1) Pre-plating treatment
对待沉积基体(掺杂8%Co的碳化钨模具,以质量百分比计)进行机械研磨抛光,然后依次在去离子水、丙酮、乙醇溶液中进行超声波震荡清洗,各20min,清洗后样品置于烘箱中于80℃烘干30min;The substrate to be deposited (tungsten carbide mold doped with 8% Co, in mass percentage) was mechanically ground and polished, and then cleaned by ultrasonic vibration in deionized water, acetone, and ethanol solution for 20 minutes each, and the samples were placed in an oven after cleaning. Dry at 80℃ for 30min;
(2)溅射清洗(2) Sputter cleaning
将经镀前处理的待沉积基体装入真空室,真空室进行预抽真空,基底真空度为5×10-3Pa,并在此过程中对真空室进行加热,加热温度至300℃。通入高纯氩气(纯度>99.99%,由外包装获知)对基体和靶材进行离子溅射刻蚀清洗,流量为120sccm,溅射时真空度为0.4Pa,沉积偏压为-70V,基体溅射清洗时间为60分钟,靶材溅射清洗时间为5分钟;溅射清洗靶材时,靶材用衬板遮挡;The pre-plated substrate to be deposited is loaded into a vacuum chamber, and the vacuum chamber is pre-evacuated, the vacuum degree of the substrate is 5×10 -3 Pa, and the vacuum chamber is heated to 300°C during this process. High-purity argon gas (purity>99.99%, known from the outer packaging) was introduced to clean the substrate and target by ion sputtering etching, the flow rate was 120sccm, the vacuum degree during sputtering was 0.4Pa, and the deposition bias was -70V. The substrate sputtering cleaning time is 60 minutes, and the target sputtering cleaning time is 5 minutes; when the target is sputtered and cleaned, the target is covered with a liner;
(3)沉积CrxWyN(1-x-y)层(3) Deposition of Cr x W y N (1-xy) layer
采用磁控溅射系统,将上述待沉积基体沉积CrxWyN(1-x-y)表面层;工作气体为高纯氩气(纯度>99.99%,由外包装获知)、高纯氮气(纯度>99.99%,由外包装获知)混合气体,所用靶材为一块高纯Cr靶(纯度为99.9%,由外包装获知)和一块高纯W靶(纯度为99.6%,由外包装获知),溅射时保持真空度为0.4Pa,沉积偏压为-30V,Cr靶功率为4kW,W靶功率为4kW,沉积温度为300℃,沉积时间为60分钟。A magnetron sputtering system is used to deposit a Cr x W y N (1-xy) surface layer on the substrate to be deposited; the working gas is high-purity argon (purity>99.99%, known from the outer packaging), high-purity nitrogen (purity >99.99%, known from the outer packaging) mixed gas, the target materials used are a high-purity Cr target (99.9% purity, known from the outer packaging) and a high-purity W target (purity 99.6%, known from the outer packaging), During sputtering, the vacuum degree was kept at 0.4Pa, the deposition bias was -30V, the Cr target power was 4kW, the W target power was 4kW, the deposition temperature was 300°C, and the deposition time was 60 minutes.
性能检测Performance testing
对实施例1制得的涂层进行涂层表面及断面形貌、硬度、表面粗糙度、模压、涂层表面元素、涂层物相结构、高温润湿性能等性能检测,结果如图2-图8所示;The coating obtained in Example 1 is subjected to performance tests such as coating surface and cross-sectional morphology, hardness, surface roughness, molding, coating surface elements, coating phase structure, high temperature wetting performance, and the results are shown in Figure 2- As shown in Figure 8;
同时,对实施例1和对比例1制得的梯度涂层、对比例2制得的涂层进行抑制裂纹扩展方面性能检测,结果图9所示,其中图9A为实施例1制得的梯度涂层,图9B为对比例1制得的梯度涂层,图9C为对比例2制得的涂层;At the same time, the gradient coatings prepared in Example 1 and Comparative Example 1 and the coatings prepared in Comparative Example 2 were tested for their performance in inhibiting crack growth. The results are shown in Figure 9, of which Figure 9A is the gradient coating prepared in Example 1. Coating, Figure 9B is the gradient coating prepared by Comparative Example 1, and Figure 9C is the coating prepared by Comparative Example 2;
其中,图2为实施例1所得梯度涂层的SEM表面及断面图,其中,2A为涂层的表面图,2B为涂层的断面图;图3为硬度测试结果,其中横坐标为压入深度,纵坐标为压入载荷;图4为表面粗糙度测试结果;图5为模压测试结果;图6为梯度涂层表面元素检测结果图(即能谱图);图7为梯度涂层的物相结构检测结果图;图8为高温润湿性能检测结果图;Wherein, Fig. 2 is the SEM surface and sectional view of the gradient coating obtained in Example 1, wherein, 2A is the surface view of the coating, 2B is the sectional view of the coating; Fig. 3 is the hardness test result, wherein the abscissa is the indentation Depth, the ordinate is the indentation load; Figure 4 is the surface roughness test result; Figure 5 is the molding test result; Figure 6 is the surface element detection result of the gradient coating (ie, energy spectrum); Phase structure test result chart; Figure 8 is a high temperature wettability test result chart;
其中,硬度的检测方法为:采用纳米压痕仪进行测试,测试模式为连续刚度法(CSM),其中,为排除基体对测量结果的影响,纳米压痕深度设定为100nm,为保证数据准确可靠,在样品上选择5个不同区域,对得到的硬度及弹性模量取平均值;Among them, the hardness detection method is: using a nano-indenter to test, the test mode is continuous stiffness method (CSM), wherein, in order to exclude the influence of the matrix on the measurement results, the nano-indentation depth is set to 100nm, in order to ensure the accuracy of the data Reliable, choose 5 different areas on the sample, and take the average value of the obtained hardness and elastic modulus;
表面粗糙度的检测方法为:采用原子力显微镜进行测试,测试样品区域为2×2μm;The detection method of surface roughness is: use atomic force microscope to test, and the test sample area is 2 × 2 μm;
模压的检测方法为:利用自行设计的光学非球面玻璃模压成型设备(申请号:CN201710124489.7;公开号:CN106946441A),对BK7光学玻璃进行模压;其中,模压力为0.5kN,模压温度为650℃;对模压后模具涂层及BK7玻璃表面形貌颜色进行观察;The detection method of molding is as follows: using self-designed optical aspheric glass molding equipment (application number: CN201710124489.7; publication number: CN106946441A), molding BK7 optical glass; wherein, the molding pressure is 0.5kN, and the molding temperature is 650 ℃; observe the surface morphology and color of the mold coating and BK7 glass after molding;
涂层表面元素的检测方法为:利用场发射扫描电子显微镜(FESEM)自带的X射线能谱仪(EDS)对涂层表面元素进行定性分析;The detection method of the coating surface elements is: qualitative analysis of the coating surface elements by using the X-ray energy dispersive spectrometer (EDS) of the Field Emission Scanning Electron Microscope (FESEM);
物相相结构的检测方法为:采用X射线衍射仪(XRD)进行检测,为避免基体因素的影响采用小角衍射的方式对涂层晶体结构进行分析;The detection method of the phase structure is as follows: X-ray diffractometer (XRD) is used for detection, in order to avoid the influence of the matrix factor, the crystal structure of the coating is analyzed by means of small angle diffraction;
高温润湿性能的检测方法为:采用通管滴落法在1000℃下进行高温润湿实验,真空度为5×10-3Pa,玻璃材料BK7光学玻璃;The testing method of high temperature wetting performance is as follows: the high temperature wetting experiment is carried out at 1000 ℃ by the drop method through the pipe, the vacuum degree is 5×10 -3 Pa, and the glass material is BK7 optical glass;
抑制裂纹扩展性能的检测方法为:使用洛氏硬度仪对待测涂层抑制裂纹扩展的能力进行测试,采用圆锥角120°金刚石压头对涂层施加60N的载荷。对压后涂层表面使用超景深显微镜观察。The testing method for inhibiting crack growth performance is as follows: use a Rockwell hardness tester to test the ability of the coating to be tested to inhibit crack growth, and apply a load of 60N to the coating using a diamond indenter with a cone angle of 120°. The surface of the coating after pressing was observed using a super-depth of field microscope.
由图2可知,实施例1制得的梯度涂层表面形貌呈现为大小不一的菜花状团簇,表面呈现细小裂纹及等缺陷。通过涂层断面可观察到涂层生长方式为柱状晶体结构,Cr层厚度为96nm,CrN层厚度为297nm,CrxWyN(1-x-y)层厚度为1375nm;各层之间结合紧密。It can be seen from Figure 2 that the surface morphology of the gradient coating prepared in Example 1 is cauliflower-like clusters of different sizes, and the surface presents fine cracks and other defects. From the cross section of the coating, it can be observed that the growth mode of the coating is a columnar crystal structure, the thickness of the Cr layer is 96 nm, the thickness of the CrN layer is 297 nm, and the thickness of the Cr x W y N (1-xy) layer is 1375 nm; the layers are tightly bonded.
由图3可知,实施例1制得的梯度涂层的硬度为16GPa。由此证明,本发明的梯度涂层表现出优异的机械性能,满足玻璃模压涂层使用标准。It can be seen from Figure 3 that the hardness of the gradient coating prepared in Example 1 is 16GPa. Thus, it is proved that the gradient coating of the present invention exhibits excellent mechanical properties and meets the use standard of glass molding coating.
由图4可知,实施例1制得的梯度涂层表面粗糙度为4nm,表现出优异的表面质量,可用于精密玻璃模压涂层使用。It can be seen from FIG. 4 that the surface roughness of the gradient coating prepared in Example 1 is 4 nm, showing excellent surface quality, and can be used for precision glass molding coating.
由5可知,实施例1制得的梯度涂层经过热压成型后的玻璃及模具涂层表面无明显变化,玻璃体无变色反应、无气泡产生,表面未出现黏着现象,涂层表面与玻璃接触的部分未发生剥落。由此证明,本发明的梯度涂层具有优异的耐高温、防黏着特性。It can be seen from 5 that the surface of the glass and mold coating of the gradient coating prepared in Example 1 after hot pressing has no obvious change, the glass body has no discoloration reaction, no bubbles are generated, the surface does not stick, and the coating surface is in contact with the glass. part did not peel off. It is thus proved that the gradient coating of the present invention has excellent high temperature resistance and anti-adhesion properties.
由图6可知,实施例1制得的梯度涂层表面主要元素为Cr元素、W元素及N元素。It can be seen from FIG. 6 that the main elements on the surface of the gradient coating prepared in Example 1 are Cr element, W element and N element.
由图7可知,实施例1制得的梯度涂层表面层具有明显的CrN相,主要晶体取向为(111)、(200)、(220)、(311)、(222)取向,且表面层中Cr元素质量百分含量为35%,W元素的质量百分含量为20%,N元素质量百分含量为45%。It can be seen from Figure 7 that the surface layer of the gradient coating prepared in Example 1 has obvious CrN phase, the main crystal orientations are (111), (200), (220), (311), (222) orientation, and the surface layer The mass percentage of Cr element is 35%, the mass percentage of W element is 20%, and the mass percentage of N element is 45%.
由图8可知,实施例1制得的梯度涂层在环境温度为1000度、真空度为5×10-3Pa时,熔融光学玻璃与梯度涂层表面未发生铺展,熔融玻璃与涂层的高温接触角为125°。由此证明,本发明的梯度涂层抗高温及抗黏着性能优异。It can be seen from Figure 8 that the gradient coating prepared in Example 1 did not spread on the surface of the molten optical glass and the gradient coating when the ambient temperature was 1000 degrees and the vacuum degree was 5 × 10 -3 Pa, and the surface of the molten glass and the coating did not spread. The high temperature contact angle is 125°. This proves that the gradient coating of the present invention has excellent high temperature resistance and anti-adhesion properties.
由图9可知,与对比例1的梯度涂层和对比例2的涂层相比,实施例1的梯度涂层的裂纹数量得到了显著降低。由此证明,本发明的梯度涂层对抑制裂纹扩展方面性能得到了显著提高。It can be seen from FIG. 9 that, compared with the gradient coating of Comparative Example 1 and the coating of Comparative Example 2, the number of cracks in the gradient coating of Example 1 is significantly reduced. It is thus proved that the gradient coating of the present invention has significantly improved performance in inhibiting crack propagation.
此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910309244.0A CN111826620A (en) | 2019-04-17 | 2019-04-17 | Gradient Coatings for Glass Molding Moulds that Inhibit Element Diffusion and Anti-Stick |
US16/579,807 US11339100B2 (en) | 2019-04-17 | 2019-09-23 | Graded coating of element diffusion inhibition and adhesion resistance on mold for glass molding |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910309244.0A CN111826620A (en) | 2019-04-17 | 2019-04-17 | Gradient Coatings for Glass Molding Moulds that Inhibit Element Diffusion and Anti-Stick |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111826620A true CN111826620A (en) | 2020-10-27 |
Family
ID=72833008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910309244.0A Pending CN111826620A (en) | 2019-04-17 | 2019-04-17 | Gradient Coatings for Glass Molding Moulds that Inhibit Element Diffusion and Anti-Stick |
Country Status (2)
Country | Link |
---|---|
US (1) | US11339100B2 (en) |
CN (1) | CN111826620A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113628982A (en) * | 2021-08-06 | 2021-11-09 | 纳狮新材料有限公司 | Packaging mold and preparation method thereof |
CN115321836A (en) * | 2022-06-29 | 2022-11-11 | 张敏 | Anti-reflection hard glass and preparation method thereof |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111826621A (en) * | 2019-04-17 | 2020-10-27 | 中国兵器工业第五九研究所 | Glass molding die coating and preparation method and application thereof |
CN115044866B (en) * | 2022-05-16 | 2024-04-26 | 烟台大学 | Multilayer gradient structure coating and preparation method thereof |
CN115074677B (en) * | 2022-05-16 | 2023-06-23 | 清华大学 | CrWZrN multilayer gradient structure coating and its preparation method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103160797A (en) * | 2013-04-09 | 2013-06-19 | 东莞市浩瀚纳米科技有限公司 | Nano ceramic coating, coating-deposited die-casting mold and preparation method thereof |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7867633B2 (en) * | 2004-06-07 | 2011-01-11 | Colorado School Of Mines | Coatings for glass molding dies and forming tools |
JP5077251B2 (en) * | 2009-01-20 | 2012-11-21 | コニカミノルタアドバンストレイヤー株式会社 | Mold, mold manufacturing method, glass gob manufacturing method, and glass molded body manufacturing method |
-
2019
- 2019-04-17 CN CN201910309244.0A patent/CN111826620A/en active Pending
- 2019-09-23 US US16/579,807 patent/US11339100B2/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103160797A (en) * | 2013-04-09 | 2013-06-19 | 东莞市浩瀚纳米科技有限公司 | Nano ceramic coating, coating-deposited die-casting mold and preparation method thereof |
Non-Patent Citations (2)
Title |
---|
YUNG-I CHEN, ET AL.: "Chemical inertness of Cr-W-N coatings in glass molding", 《THIN SOLID FILMS》 * |
张昕等: "膜层厚比对CrNx/TiyCr1-yN多层膜硬度与结合力影响研究", 《航空制造技术》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113628982A (en) * | 2021-08-06 | 2021-11-09 | 纳狮新材料有限公司 | Packaging mold and preparation method thereof |
CN115321836A (en) * | 2022-06-29 | 2022-11-11 | 张敏 | Anti-reflection hard glass and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
US20200331798A1 (en) | 2020-10-22 |
US11339100B2 (en) | 2022-05-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN111826620A (en) | Gradient Coatings for Glass Molding Moulds that Inhibit Element Diffusion and Anti-Stick | |
CN101921982A (en) | Method for preparing nanostructure nitrogen silicon zirconium coating on the surface of cemented carbide substrate | |
CN103334082B (en) | Ti/TiN/TiAlN composite deposite of a kind of cutting tool material surface and preparation method thereof | |
CN110106483B (en) | Graphite-like particle composite diamond-like coating and preparation method and application thereof | |
CN108642445A (en) | A kind of AlCrTaTiZr high-entropy alloys nitride film and preparation method thereof | |
CN108977775B (en) | A kind of preparation technology of TiAlSiN coating tool | |
CN100523273C (en) | Nano-stack TiN gradient film and preparation thereof | |
CN110482852A (en) | Glass die coating and preparation method thereof, application, mold | |
CN109397549A (en) | The application of diamond coatings silicon nitride ceramics solid tool and preparation method thereof and cutter in graphite | |
Bernhardt et al. | Development of a ta‐C diamond‐like carbon (DLC) coating by magnetron sputtering for use in precision glass molding | |
CN106893987A (en) | The preparation method and Ta C coatings of a kind of physical vapour deposition (PVD) Ta C coatings | |
CN106987800B (en) | A titanium diboride-zirconium diboride coating with a periodic multilayer structure and its preparation method and application | |
CN102330062B (en) | Preparation method of titanium/nickel nitride nano multilayer film | |
CN108914048A (en) | The method that the micro- molten reaction in-situ of laser prepares titanium nitride coating | |
Huang et al. | Effect of annealing environment on the microstructure and mechanical property of CrWN glass molding coating | |
CN111826621A (en) | Glass molding die coating and preparation method and application thereof | |
CN107012424B (en) | A kind of TiZrB2 hard coating and its preparation method and application | |
CN108018524B (en) | A kind of low stress WB2The preparation method of hard multi-layer coating | |
JP7360202B2 (en) | Manufacturing method of diamond coated silicon nitride ceramic whole tool | |
CN107900309A (en) | A kind of surface double-decker die casting and preparation method thereof | |
Ohmori et al. | Investigation of substrate finishing conditions to improve adhesive strength of DLC films | |
CN106591784A (en) | Method for preparing TiAlSiCN coating by ion plating | |
CN203360554U (en) | Composite coating on surface of cutting tool material | |
CN104697918A (en) | Test method for high-temperature oxidation resistance of CrTiAlN coating | |
CN102634793A (en) | Flexible substrate nanometer diamond thin film as well as preparation method and application thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |