CN111825444B - Method for introducing columnar defects into ex-situ high-temperature superconducting thin film - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及一种在异位法高温超导薄膜中引入柱状缺陷的方法,即在制备过程中进行中间产品表面的垂直方向的飞秒激光辐照,产生择优取向的缺陷,进而在最终产品中引入柱状缺陷,属于材料设计与加工领域。The invention relates to a method for introducing columnar defects in an ex-situ high-temperature superconducting thin film, that is, in the preparation process, femtosecond laser irradiation in the vertical direction of the surface of an intermediate product is performed to generate defects of preferential orientation, and then in the final product The introduction of columnar defects belongs to the field of material design and processing.
背景技术Background technique
钇钡铜氧(YBa2Cu3O7-δ,以下简称YBCO)高温超导薄膜因其自身的优良性能以及潜在的价格优势,一直是实用超导领域研究的热点。但目前YBCO超导薄膜的实用还面临着两大问题:一是YBCO超导薄膜晶界间存在约瑟夫森型弱连接现象,导致超导体晶粒内部和晶界具有不同的载流能力,限制了临界电流密度的提高;二是外加磁场下较低的临界电流密度也限制了YBCO超导薄膜在很多领域的应用,因此提高其在场性能十分有必要。Yttrium barium copper oxide (YBa 2 Cu 3 O 7-δ , hereinafter referred to as YBCO) high-temperature superconducting thin films has always been a research hotspot in the field of practical superconductivity due to its excellent performance and potential price advantage. However, at present, the practical application of YBCO superconducting films still faces two major problems: First, there is a Josephson-type weak connection between the grain boundaries of the YBCO superconducting film, which leads to different current-carrying capacities inside the superconducting grains and grain boundaries, which limits the critical The improvement of the current density; second, the lower critical current density under the external magnetic field also limits the application of YBCO superconducting films in many fields, so it is necessary to improve its field performance.
作为第二类超导体,YBCO 在外磁场H 大于下临界场时会呈现出具有磁通涡旋线的混合态,涡旋线在洛伦兹力下的运动会导致超导体临界电流密度( Jc) 的急剧下降。对于未掺杂的YBCO 超导体来说:ab 面内存在本征钉扎中心,J(θ) 会在H‖ab 面时有一个强的峰值;对于c 轴来说,由于缺少相应的本征钉扎中心,H‖c 轴方向上的Jc则要小很多;所以未掺杂的YBCO 薄膜中临界电流密度呈现出较大的各向异性。As the second type of superconductor, YBCO exhibits a mixed state with magnetic flux vortex lines when the external magnetic field H is greater than the lower critical field, and the motion of the vortex lines under the Lorentz force leads to a sharp drop in the critical current density ( Jc ) of the superconductor . For the undoped YBCO superconductor: there is an intrinsic pinning center in the ab plane, J ( θ ) will have a strong peak at the H‖ab plane; for the c axis, due to the lack of the corresponding intrinsic pinning The Jc in the direction of the H‖c axis is much smaller; therefore, the critical current density in the undoped YBCO film exhibits a large anisotropy.
为了提高YBCO超导薄膜处于外加磁场中的电输运性能,研究者们通过人工手段在YBCO超导薄膜内引入磁通钉扎中心,用于钉扎磁通涡旋线的移动。人工钉扎中心(artificial pinning centers,APCs)分类有:(1) 零维APCs,超导体内部存在的氧空位、元素取代等点缺陷;(2) 一维APCs,包括超导体内部出现的线形位错或人工形成的纳米柱;(3) 二维APCs,超导体内部存在的堆垛层错,纳米片、孪晶界等能成为钉扎中心的缺陷;(4) 三维APCs,以弥散分布在超导体内的纳米尺度的异相颗粒为主的钉扎中心。In order to improve the electrical transport performance of the YBCO superconducting film in an external magnetic field, the researchers introduced a magnetic flux pinning center in the YBCO superconducting film by artificial means to pin the movement of the magnetic flux vortex lines. Artificial pinning centers (APCs) are classified into: (1) zero-dimensional APCs, point defects such as oxygen vacancies and element substitutions in superconductors; (2) one-dimensional APCs, including linear dislocations or Artificially formed nanopillars; (3) 2D APCs, the stacking faults existing in the superconductor, nanosheets, twin boundaries and other defects that can become pinning centers; (4) 3D APCs, dispersed in the superconductor with Nanoscale heterogeneous particles dominated by pinning centers.
引入人工钉扎中心的方法包括:(1) 高能重粒子束辐射高温YBCO超导体,产生c轴排列的线缺陷;(2) 添加第二相纳米粒子,包括BaMO3(M=Zr, Hf, Sm等)钙钛矿结构化合物;(3)在金属衬底上沉积一层纳米颗粒再外延生长YBCO。目前,添加第二相纳米粒子是有效的手段。但不管采用原位法还是异位法添加第二相纳米粒子,首先都会直接影响YBCO薄膜的制备生长,需要及时调整工艺参数,其次纳米颗粒的尺寸和分布对YBCO超导薄膜性能影响非常大,对制备工艺较为敏感。高能重粒子束辐射作为一种纯净、无添加的手段,是直接在已经生长好的YBCO超导薄膜上进行重粒子轰击,制造出平行于c轴方向的尺寸小、分布均匀的柱状物理缺陷。研究表明,辐照形成的缺陷能十分有效的提高H‖c 轴方向上的Jc,提高YBCO涂层导体的实际应用潜力价值。Methods for introducing artificial pinning centers include: (1) high-energy heavy particle beam irradiation of high-temperature YBCO superconductors to generate c -axis aligned line defects; (2) addition of second-phase nanoparticles, including BaMO 3 (M=Zr, Hf, Sm) etc.) perovskite structure compounds; (3) depositing a layer of nanoparticles on the metal substrate and then epitaxially growing YBCO. Currently, adding second-phase nanoparticles is an effective means. However, whether the second-phase nanoparticles are added by in-situ or ex-situ methods, firstly, it will directly affect the preparation and growth of YBCO thin films, and the process parameters need to be adjusted in time. Secondly, the size and distribution of nanoparticles have a great influence on the performance of YBCO superconducting thin films. It is more sensitive to the preparation process. High-energy heavy particle beam radiation, as a pure and additive-free method, directly bombards the grown YBCO superconducting film with heavy particles to create columnar physical defects with small size and uniform distribution parallel to the c -axis. The research shows that the defects formed by irradiation can effectively increase the Jc in the H‖c axis direction, and improve the practical application potential value of YBCO coated conductors.
在金属有机溶液化学法(TFA-MOD)制备YBCO超导带材过程中,原料分别经过前驱液配制、低温涂敷及热解、中温预烧、高温成相烧结、吸氧、镀银保护层和封装等步骤,最终形成可商业使用YBCO高温超导带材。在整个过程中,低温涂敷膜从胶体到热解膜会发生~100%厚度的收缩;中温预烧后,薄膜再次收缩~10%;最后经过高温烧结,薄膜再次发生~50%厚度的收缩。在引入人工钉扎中心的手段中,衬底表面修饰发生在YBCO原料涂敷步骤之前,第二相纳米颗粒添加是发生在YBCO前驱液配制过程,而目前的高能粒子辐射都是直接作用在高温晶化薄膜上。通常高能重粒子辐照在高温烧结成相的YBCO致密陶瓷薄膜上可有效轰击出柱状缺陷,但需要的能量级别很大,能量级别通常高达GeV以上。通过调节高能粒子辐射的粒子束能量级别,可直接有效地控制薄膜中缺陷尺寸和密度分布。这是目前其他手段难以实现的。但高能粒子辐照也有其局限性,即用于制造柱状缺陷的能量量级很高。若将粒子辐照手段应用于YBCO超导带材的大规模工业化制造上,设备和能量成本太大。In the process of preparing YBCO superconducting tapes by metal-organic solution chemical method (TFA-MOD), the raw materials are prepared through precursor solution, low-temperature coating and pyrolysis, medium-temperature pre-sintering, high-temperature phase-forming sintering, oxygen absorption, and silver-plated protective layer. And packaging and other steps, and finally form a commercially available YBCO high temperature superconducting tape. During the whole process, the low temperature coating film will shrink by ~100% thickness from colloid to pyrolysis film; after pre-sintering at medium temperature, the film will shrink again by ~10%; finally, after high temperature sintering, the film will shrink by ~50% thickness again . In the method of introducing artificial pinning centers, the substrate surface modification occurs before the YBCO raw material coating step, the second-phase nanoparticles are added during the preparation of the YBCO precursor solution, and the current high-energy particle radiation directly acts on high temperature on the crystallized film. Usually high-energy heavy particle irradiation can effectively bombard columnar defects on the YBCO dense ceramic thin film sintered at high temperature, but the energy level required is very large, and the energy level is usually as high as GeV or more. By adjusting the particle beam energy level of the high-energy particle radiation, the defect size and density distribution in thin films can be directly and effectively controlled. This is currently difficult to achieve by other means. But high-energy particle irradiation also has its limitations, that is, the energy levels used to create columnar defects are high. If the particle irradiation method is applied to the large-scale industrial manufacturing of YBCO superconducting tapes, the equipment and energy costs are too high.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种在异位法高温超导薄膜中引入柱状缺陷的方法,主要解决激光辐照用于制造柱状缺陷需要能量量级很高的技术问题。本发明的思路是:开创性地提供了一种在YBCO超导薄膜带材成相中间过程,通过飞秒激光辐照引入柱状缺陷的方法。即在制备过程中进行中间产品表面的垂直方向的各类辐照,产生择优取向的缺陷,进而在最终产品中引入柱状缺陷,属于材料设计与加工领域。The purpose of the present invention is to provide a method for introducing columnar defects in an ex-situ high temperature superconducting thin film, which mainly solves the technical problem that laser irradiation requires a high energy level to manufacture columnar defects. The idea of the present invention is to provide a pioneering method for introducing columnar defects by femtosecond laser irradiation in the intermediate process of YBCO superconducting thin film strip phase formation. That is, various types of irradiation in the vertical direction of the surface of the intermediate product are carried out during the preparation process, resulting in defects of preferential orientation, and then columnar defects are introduced into the final product, which belongs to the field of material design and processing.
本发明的技术方案:在异位法高温超导薄膜中引入柱状缺陷的方法,包括以下步骤:Technical scheme of the present invention: a method for introducing columnar defects in an ex-situ high temperature superconducting film, comprising the following steps:
(1)配置YBCO前驱液:称取原料乙酸钇、乙酸钡、乙酸铜,将乙酸钇和乙酸钡溶解在去离子水和三氟乙酸中搅拌,将乙酸铜溶解在去离子水和丙酸中搅拌;在这两份溶液中加入甲醇进行降压蒸馏三次,然后混合,加入甲醇定容,配制成YBCO前驱液;(1) Configure YBCO precursor solution: weigh the raw materials yttrium acetate, barium acetate and copper acetate, dissolve yttrium acetate and barium acetate in deionized water and trifluoroacetic acid and stir, and dissolve copper acetate in deionized water and propionic acid Stir; add methanol to the two solutions for three times of reduced pressure distillation, then mix, add methanol to volume, and prepare a YBCO precursor solution;
(2)旋涂:在旋涂机上在哈斯勒合金基底上旋涂上TFA-YBCO前驱液得到前驱膜;(2) Spin coating: spin coating the TFA-YBCO precursor solution on the Hassler alloy substrate on a spin coater to obtain a precursor film;
(3)低温处理:旋涂得到的薄膜放置于马弗炉中进行低温热解,将氧气先通入室温去离子水,再通入炉膛中,薄膜在炉膛中经历低温处理;(3) Low-temperature treatment: The spin-coated film is placed in a muffle furnace for low-temperature pyrolysis, and oxygen is first introduced into room temperature deionized water, and then into the furnace, and the film undergoes low-temperature treatment in the furnace;
(4)中温处理:低温处理过的热解膜在氧气和水汽的气氛下,经中温处理,得到中温处理薄膜;(4) Medium temperature treatment: The pyrolysis film treated at low temperature is subjected to medium temperature treatment in an atmosphere of oxygen and water vapor to obtain a medium temperature treatment film;
(5)飞秒激光辐照打孔:将低温热解膜或者中温处理膜水平放置,涂敷有原料的面朝上放置,飞秒激光垂直于薄膜平面进行辐照打孔;(5) Femtosecond laser irradiation drilling: place the low-temperature pyrolysis film or the medium-temperature treatment film horizontally, and place the surface coated with the raw material upward, and irradiate the hole with the femtosecond laser perpendicular to the film plane;
(6)高温处理:辐照后的薄膜接着在高温炉膛中,经历高温热处理,其中气氛为氮气,氧气,水汽;接着在氮气和氧气氛围下降温,得到有辐照柱状物理缺陷的高温晶化的YBCO薄膜;(6) High temperature treatment: The irradiated film is then subjected to high temperature heat treatment in a high temperature furnace, in which the atmosphere is nitrogen, oxygen and water vapor; then the temperature is lowered in nitrogen and oxygen atmosphere to obtain high temperature crystallization with irradiated columnar physical defects the YBCO film;
(7)后处理:高温晶化膜随后进入吸氧处理,在纯氧中保温一段时间,得到钇钡铜氧超导薄膜带材。(7) Post-treatment: the high-temperature crystallization film is then subjected to oxygen absorption treatment, and is kept in pure oxygen for a period of time to obtain a yttrium barium copper oxide superconducting thin film strip.
所述步骤(1),乙酸钇、乙酸钡、乙酸铜按化学计量比1:2:3称取;所述搅拌时间为1-2 h,配制成YBCO前驱液总阳离子浓度为2.5 mol/L。In the step (1), yttrium acetate, barium acetate and copper acetate are weighed in a stoichiometric ratio of 1:2:3; the stirring time is 1-2 h, and the total cation concentration of the YBCO precursor solution is 2.5 mol/L .
所述步骤(2),旋涂机采用3000-6000 rpm的转速,旋涂时长1 min。In the step (2), the spin coating machine adopts a rotational speed of 3000-6000 rpm, and the spin coating time is 1 min.
所述步骤(3),低温处理为40min内炉膛温度350 ℃降至150 ℃。In the step (3), the low temperature treatment is to reduce the furnace temperature from 350°C to 150°C within 40 minutes.
所述步骤(4),中温处理为600 ℃热处理10 min,水汽和氧气气氛总压约为20-23Pa,优选氧气压为13 Pa,水汽压为10 Pa。In the step (4), the medium temperature treatment is heat treatment at 600 °C for 10 min, the total pressure of water vapor and oxygen atmosphere is about 20-23 Pa, preferably the oxygen pressure is 13 Pa, and the water vapor pressure is 10 Pa.
所述步骤(5),所述飞秒激光能量4-10 μJ,优选5 μJ,光斑直径约2 μm。In the step (5), the femtosecond laser energy is 4-10 μJ , preferably 5 μJ , and the spot diameter is about 2 μm .
所述步骤(6),高温处理为从室温以25℃升温速率升至780℃,保温120 min,其中前60 min的保温时间内的气氛为氧含量为150 ppm的氮氧混合气(气压为1 atm),且混合气先通入35℃的水浴中再进入马弗炉炉膛;后60 min的保温时间的气氛为干的氮氧混合气。In the step (6), the high temperature treatment is to raise the temperature from room temperature to 780°C at a heating rate of 25°C, and keep the temperature for 120 minutes, wherein the atmosphere during the first 60 minutes of holding time is a nitrogen-oxygen mixture with an oxygen content of 150 ppm (the pressure is 150 ppm). 1 atm), and the mixed gas was first introduced into a water bath at 35 °C and then into the muffle furnace; the atmosphere for the last 60 min of holding time was a dry nitrogen-oxygen mixture.
所述步骤(7),所述后处理中,在步骤(6)中的保温结束后,随炉降温至450℃,保温60 min,此过程反应气氛从氮氧混合气换成纯氧气氛;保温结束后随炉降温至室温。In the step (7) and the post-treatment, after the heat preservation in the step (6) is completed, the temperature is lowered to 450° C. with the furnace, and the temperature is maintained for 60 min, and the reaction atmosphere in this process is changed from a nitrogen-oxygen mixture to a pure oxygen atmosphere; After the heat preservation is completed, the temperature is lowered to room temperature with the furnace.
带有柱状缺陷的热解薄膜随后经过高温烧结,可得到带有柱状缺陷的高温晶化YBCO超导薄膜。飞秒激光垂直样品的表面进行辐射,在YBCO低温热解薄膜上形成的柱状缺陷,还会击穿薄膜,形成一道道垂直于薄膜表面的柱状缺陷。The pyrolyzed films with columnar defects are then sintered at high temperature to obtain high-temperature crystallized YBCO superconducting films with columnar defects. The femtosecond laser is irradiated perpendicular to the surface of the sample, and the columnar defects formed on the YBCO low-temperature pyrolysis film will also break down the film to form columnar defects perpendicular to the surface of the film.
所述用于制造柱状缺陷的YBCO低温热解膜厚度范围为100-3000 nm。The thickness of the YBCO low-temperature pyrolysis film used to manufacture columnar defects ranges from 100 to 3000 nm.
所述的柱状缺陷通过调节飞秒激光的能量和强度,可直接有效地控制其尺寸和密度分布。The size and density distribution of the columnar defects can be directly and effectively controlled by adjusting the energy and intensity of the femtosecond laser.
本发明的有益效果:在YBCO超导薄膜及其涂层导体制备的中间环节引入缺陷,研究发现高温晶化步骤之前的低温热解膜和中温预烧膜在结构上较疏松,所以采用能级较低的飞秒激光辐照即可在薄膜上轰击制造出柱状缺陷,进而最终形成有效的人工钉扎中心,属于创新性的方法,对大规模提高YBCO超导带材实际应用的在场性能有非常重要的意义。The beneficial effects of the present invention are as follows: defects are introduced in the intermediate link of the preparation of the YBCO superconducting thin film and its coated conductor, and it is found that the low-temperature pyrolysis film and the medium-temperature pre-fired film before the high-temperature crystallization step are relatively loose in structure, so the use of energy level The low femtosecond laser irradiation can bombard the film to create columnar defects, and finally form an effective artificial pinning center. very important meaning.
附图说明Description of drawings
图1为本发明工艺流程图。Fig. 1 is the process flow diagram of the present invention.
图2是本发明实施例1所得低温热解膜经飞秒激光打孔后的表面形貌图(SEM)。Fig. 2 is a surface topography (SEM) of the low-temperature pyrolysis film obtained in Example 1 of the present invention after being perforated by a femtosecond laser.
图3是本发明实施例1所得中温处理膜经飞秒激光打孔后的表面形貌图(SEM)。Fig. 3 is a surface topography (SEM) of the medium-temperature treated film obtained in Example 1 of the present invention after being perforated by a femtosecond laser.
图4是本发明实施例1所得打孔的低温热解膜经高温晶化后的表面形貌图(SEM)。4 is a surface topography (SEM) of the perforated low-temperature pyrolysis film obtained in Example 1 of the present invention after high-temperature crystallization.
图5是本发明实施例1所得打孔的中温处理膜经高温晶化后的表面形貌图(SEM)。FIG. 5 is the surface topography (SEM) of the perforated medium temperature treated film obtained in Example 1 of the present invention after high temperature crystallization.
具体实施方式Detailed ways
以下通过下述实施方式进一步说明本发明,应理解,下述实施方式仅用于说明本发明,而非限制本发明。参照图1,The present invention is further described below through the following embodiments, and it should be understood that the following embodiments are only used to illustrate the present invention, but not to limit the present invention. Referring to Figure 1,
TFA-MOD法制备YBCO超导薄膜过程如下:The preparation process of YBCO superconducting thin film by TFA-MOD method is as follows:
1.原料乙酸钇、乙酸钡、乙酸铜按化学计量比(1:2:3.3)称取,将乙酸钇和乙酸钡溶解在适量的去离子水和过量的三氟乙酸中搅拌1-2 h,而乙酸铜溶解在适量的去离子水和过量的丙酸中搅拌1-2 h。在这两份溶液中加入甲醇进行降压蒸馏三次,然后混合,加入甲醇定容,配制成总阳离子浓度为2.5 mol/L的YBCO前驱液。1. Weigh the raw materials yttrium acetate, barium acetate and copper acetate according to the stoichiometric ratio (1:2:3.3), dissolve the yttrium acetate and barium acetate in an appropriate amount of deionized water and excess trifluoroacetic acid and stir for 1-2 h , while copper acetate was dissolved in an appropriate amount of deionized water and excess propionic acid and stirred for 1-2 h. Methanol was added to the two solutions for three times of reduced pressure distillation, then mixed, and methanol was added to the volume to prepare a YBCO precursor solution with a total cation concentration of 2.5 mol/L.
2.在旋涂机上采用3000-6000 rpm的转速将总阳离子浓度为2.5 mol/L的YBCO前驱液旋涂到哈斯勒合金基底表面,旋涂时长1 min。2. Spin-coat the YBCO precursor solution with a total cation concentration of 2.5 mol/L on the surface of the Hassler alloy substrate at a speed of 3000-6000 rpm on a spin coater for 1 min.
3.旋涂后的薄膜放入马弗炉中进行低温热解,流量为1.5 L/min的氧气先通入室温去离子水,再通入炉膛中,薄膜在炉膛中经历40 min低温处理,在该时间内温度由350 ℃降至150 ℃。3. The spin-coated film was put into a muffle furnace for low-temperature pyrolysis. Oxygen with a flow rate of 1.5 L/min was first introduced into deionized water at room temperature, and then into the furnace. The film was subjected to low-temperature treatment for 40 minutes in the furnace. The temperature dropped from 350 °C to 150 °C during this time.
4.低温处理过的热解膜在13 Pa氧气和10 Pa水汽的气氛下,在600 ℃热处理10min,得到中温处理薄膜。4. The pyrolysis film treated at low temperature was heat-treated at 600 °C for 10 min in an atmosphere of 13 Pa oxygen and 10 Pa water vapor to obtain a medium temperature treated film.
5.将低温热解膜或者中温处理膜水平放置,涂敷有原料的面朝上放置,放置于飞秒激光下进行垂直辐照打孔;所述飞秒激光能量为5 μJ,光斑直径2 μm。低温热解膜经飞秒激光打孔后的表面形貌图见图2,中温处理膜经飞秒激光打孔后的表面形貌图见图3。5. The low-temperature pyrolysis film or the middle-temperature treatment film is placed horizontally, and the surface coated with the raw material is placed upward, and placed under the femtosecond laser to carry out vertical irradiation and perforation; the femtosecond laser energy is 5 μ J, and the spot diameter is 5 μ J. 2 μm . Figure 2 shows the surface topography of the low temperature pyrolysis film after perforation by femtosecond laser, and Figure 3 shows the surface topography of the medium temperature treated film after perforation by femtosecond laser.
6.辐照后的薄膜接着在高温炉膛中,从室温以25℃升温速率升至780℃,保温120min,其中前60 min的保温时间内的气氛为氧含量为150 ppm的氮氧混合气(气压为1 atm),且混合气先通入35℃的水浴中再进入马弗炉炉膛;后60 min的保温时间的气氛为干的氮氧混合气。打孔的低温热解膜经高温晶化后的表面形貌图见图4,打孔的中温处理膜经高温晶化后的表面形貌图见图5。6. The irradiated film is then heated from room temperature to 780°C at a heating rate of 25°C in a high-temperature furnace, and kept for 120 minutes. The atmosphere during the first 60 minutes of holding time is a nitrogen-oxygen mixture with an oxygen content of 150 ppm ( The air pressure was 1 atm), and the mixed gas was first passed into a water bath at 35 °C and then into the muffle furnace; the atmosphere for the last 60 min of holding time was a dry nitrogen-oxygen mixture. The surface topography of the perforated low temperature pyrolysis film after high temperature crystallization is shown in Figure 4, and the surface topography of the perforated medium temperature treated film after high temperature crystallization is shown in Figure 5.
7. 在上述保温结束后,接着进行吸氧处理,即随炉降温至450℃,保温60 min,此过程反应气氛从氮氧混合气换成纯氧气氛(气压为1 atm);保温结束后随炉降温至室温,得到吸氧后的钇钡铜氧超导薄膜带材。7. After the above-mentioned heat preservation is completed, the oxygen absorption treatment is carried out, that is, the temperature is lowered to 450 ℃ with the furnace, and the heat preservation is carried out for 60 min. In this process, the reaction atmosphere is changed from a nitrogen-oxygen mixture to a pure oxygen atmosphere (the pressure is 1 atm); The temperature is lowered to room temperature with the furnace to obtain the yttrium barium copper oxide superconducting thin film strip after oxygen absorption.
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