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CN111809245A - A kind of high-purity powder continuous purification device and method - Google Patents

A kind of high-purity powder continuous purification device and method Download PDF

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Publication number
CN111809245A
CN111809245A CN202010718278.8A CN202010718278A CN111809245A CN 111809245 A CN111809245 A CN 111809245A CN 202010718278 A CN202010718278 A CN 202010718278A CN 111809245 A CN111809245 A CN 111809245A
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powder
rotating disk
purification
continuous purification
purity
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CN111809245B (en
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周社柱
冯光志
张军彦
王慧明
刘晓鹏
梁林飞
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Shanxi Zhongdian Electronic Equipment Co.,Ltd.
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Cetc Shanxi Branch Of New Energy Co
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/007Apparatus for preparing, pre-treating the source material to be used for crystal growth

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  • Crystallography & Structural Chemistry (AREA)
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Abstract

The invention relates to a continuous purification device and a continuous purification method for high-purity powder, belonging to the technical field of crystal material purification; the problems of low purification rate and low purification efficiency of the existing high-purity powder are solved; the technical scheme is as follows: the powder to be purified falls into a rotating disc connected with a driving device through a feeding device, a plurality of arc-shaped partition plates are arranged on the surface of the rotating disc in a radial mode and are sequentially arranged in a radial mode at the center of the rotating disc, a heater is located below the rotating disc, the rotating disc rotates automatically to enable the falling powder to fall into a material receiving groove through the edge of the rotating disc under the action of centrifugal force, and the heater is used for heating all the time in the whole process; the invention can realize the continuous production of the powder, increase the contact area of the powder with the process gas and the heating surface, reduce the time for the powder to enter and exit the furnace and raise the temperature, and obviously improve the purification efficiency and the purification effect.

Description

一种高纯粉体连续纯化装置及方法A kind of high-purity powder continuous purification device and method

技术领域technical field

本发明属于晶体材料纯化技术领域,具体涉及一种高纯粉体连续纯化装置及方法。The invention belongs to the technical field of crystal material purification, in particular to a high-purity powder continuous purification device and method.

背景技术Background technique

随着科技进步,高端制造行业的高速发展,高端材料的需求越来越多,其中包括各种高纯粉体,如高纯多晶硅是太阳能光伏电池和半导体集成电路的原材料。而由于产品的需求,对高纯粉体的纯度要求越来越高,杂质总含量已达到PPM级别,现有粉体纯化方式是将粉体放入坩埚中,再将坩埚和粉体一起放入高温炉中纯化,而这种方式纯化粉体的效率很低,难以满足生产的需要。With the advancement of science and technology and the rapid development of the high-end manufacturing industry, the demand for high-end materials is increasing, including various high-purity powders, such as high-purity polysilicon, which is the raw material for solar photovoltaic cells and semiconductor integrated circuits. However, due to the demand for products, the requirements for the purity of high-purity powder are getting higher and higher, and the total impurity content has reached the PPM level. The existing powder purification method is to put the powder into a crucible, and then put the crucible and the powder together. It is purified in a high temperature furnace, and the efficiency of purifying powder in this way is very low, and it is difficult to meet the needs of production.

发明内容SUMMARY OF THE INVENTION

本发明克服了现有技术的不足,提出一种高纯粉体连续纯化装置及方法。解决现有高纯粉体纯化率低,纯化效率慢的问题。The invention overcomes the deficiencies of the prior art, and provides a continuous purification device and method for high-purity powder. The problem of low purification rate and slow purification efficiency of the existing high-purity powder is solved.

为了达到上述目的,本发明是通过如下技术方案实现的。In order to achieve the above objects, the present invention is achieved through the following technical solutions.

一种高纯粉体连续纯化装置,包括送料装置、旋转盘、加热器和接料槽,所述送料装置位于旋转盘的上方,待纯化的粉体经送料装置落入旋转盘,所述旋转盘的表面设置有若干弧形隔板,弧形隔板以旋转盘的中心呈放射状依次排列,所述加热器位于旋转盘的下方,旋转盘连接有驱动装置用于对旋转盘产生自转的驱动力,旋转盘的外边缘下方设置所述的接料槽。A high-purity powder continuous purification device includes a feeding device, a rotating disc, a heater and a feeding chute, the feeding device is located above the rotating disc, and the powder to be purified falls into the rotating disc through the feeding device, and the rotating The surface of the disk is provided with a number of arc-shaped partitions, and the arc-shaped partitions are arranged radially from the center of the rotating disk. The heater is located below the rotating disk. The rotating disk is connected with a driving device for driving the rotating disk to rotate. force, and the feeding chute is provided below the outer edge of the rotating disc.

优选的,所述的旋转盘为表面水平的圆形结构。Preferably, the rotating disk is a circular structure with a horizontal surface.

优选的,所述弧形隔板以旋转盘的中心呈螺旋放射状依次排列,相邻两个弧形隔板之间形成两端开口的加热纯化槽。Preferably, the arc-shaped partitions are arranged in a spiral radial shape at the center of the rotating disk, and a heating purification tank with openings at both ends is formed between two adjacent arc-shaped partitions.

优选的,所述的送料装置包括进料漏斗。Preferably, the feeding device includes a feeding funnel.

优选的,所述进料漏斗底部管口位于旋转盘中心的正上方。Preferably, the nozzle at the bottom of the feeding funnel is located just above the center of the rotating disc.

优选的,所述旋转盘中心设置有锥形的分料头。Preferably, the center of the rotating disc is provided with a conical material distribution head.

优选的,所述驱动装置包括与旋转盘相连接的旋转轴,所述旋转轴通过电机带动旋转。Preferably, the driving device includes a rotating shaft connected with the rotating disk, and the rotating shaft is driven to rotate by a motor.

优选的,所述旋转轴与分料头相连接。Preferably, the rotating shaft is connected with the material distribution head.

优选的,所述加热器设置在旋转盘的下表面。Preferably, the heater is arranged on the lower surface of the rotating disk.

一种使用所述高纯粉体连续纯化装置的高纯粉体连续纯化方法,包括以下步骤:待纯化的粉体经送料装置落入旋转盘,所述旋转盘在驱动装置的带动下做自转运动,落入旋转盘的粉体在离心力的作用下,经相邻两个弧形隔板之间形成的加热纯化槽流至旋转盘边缘并落入接料槽,所述粉体在经过加热纯化槽时被下方的加热器加热并纯化,所述高纯粉体连续纯化装置处于粉体纯化的工艺温度及真空度下。A high-purity powder continuous purification method using the high-purity powder continuous purification device, comprising the following steps: the powder to be purified falls into a rotating disk through a feeding device, and the rotating disk is driven by a driving device to rotate Under the action of centrifugal force, the powder falling into the rotating disk flows to the edge of the rotating disk through the heating and purification tank formed between the two adjacent arc-shaped partitions and falls into the receiving tank. The purification tank is heated and purified by the heater below, and the high-purity powder continuous purification device is under the process temperature and vacuum degree of powder purification.

本发明相对于现有技术所产生的有益效果为。The beneficial effects of the present invention relative to the prior art are as follows.

本发明所述的装置可以实现粉体的连续生产,减少粉体进出炉和升温降温时间,提升效率。加热器紧靠在旋转盘下部设置,热能利用率更高。粉体在旋转盘上纯化,旋转盘将热量传导至粉体,接触面积很大,粉体在旋转盘上面很薄,和工艺气体接触面积大,提升纯化效果。根据粉体纯化的纯度要求可以调节落料量和旋转速度,实现工艺的可调性。纯化过程由体系纯化向面系过渡,便于杂质的挥发排除,纯化效率和纯化效果均明显提升。The device of the present invention can realize the continuous production of powder, reduce the time of powder entering and leaving the furnace and heating and cooling time, and improve the efficiency. The heater is arranged close to the lower part of the rotating disk, and the utilization rate of heat energy is higher. The powder is purified on the rotating disk, the rotating disk conducts heat to the powder, the contact area is large, the powder is very thin on the rotating disk, and the contact area with the process gas is large, which improves the purification effect. According to the purity requirements of powder purification, the blanking amount and rotation speed can be adjusted to realize the adjustability of the process. The purification process transitions from system purification to face system, which is convenient for the volatilization and elimination of impurities, and the purification efficiency and purification effect are significantly improved.

附图说明Description of drawings

图1是本发明实施例所述高纯粉体连续纯化装置的结构示意图。FIG. 1 is a schematic structural diagram of the high-purity powder continuous purification device according to the embodiment of the present invention.

图2为图1的局部放大图。FIG. 2 is a partial enlarged view of FIG. 1 .

图3为图1的正向剖面图。FIG. 3 is a front sectional view of FIG. 1 .

其中,1为进料漏斗,2为旋转盘,3为加热器,4为接料槽,5为旋转轴,6为弧形隔板,7为加热纯化槽,8为分料头。Among them, 1 is a feeding funnel, 2 is a rotating disk, 3 is a heater, 4 is a feeding tank, 5 is a rotating shaft, 6 is an arc-shaped partition, 7 is a heating and purification tank, and 8 is a material distributor.

具体实施方式Detailed ways

为了使本发明所要解决的技术问题、技术方案及有益效果更加清楚明白,结合实施例和附图,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。下面结合实施例及附图详细说明本发明的技术方案,但保护范围不被此限制。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail with reference to the embodiments and the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. The technical solutions of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings, but the protection scope is not limited by this.

如图1和图3所示,是一种高纯粉体连续纯化装置,包括进料漏斗1、旋转盘2、加热器3和接料槽4,其中,旋转盘2为表面水平的圆形结构,旋转盘2的中心设置有锥形的分料头8,用于将落下的粉体分散开。如图2所示,旋转盘2的表面设有若干弧形隔板6,弧形隔板6以旋转盘2的中心呈螺旋放射状依次排列,相邻两个弧形隔板6之间形成两端开口的加热纯化槽7。进料漏斗1底部管口位于旋转盘2中心的正上方。加热器3紧贴在旋转盘2的下表面设置,加热器3的下方连接有接料槽4,接料槽4的外边缘超出旋转盘2的外边缘,以使从旋转盘2边缘落下的纯化后的粉料进入接料槽4,分料头8的底部连接有旋转轴5,旋转轴5通过电机带动旋转进而带动整个旋转盘2进行旋转。As shown in Figures 1 and 3, it is a continuous purification device for high-purity powder, including a feeding funnel 1, a rotating disc 2, a heater 3 and a feeding chute 4, wherein the rotating disc 2 is a circular shape with a horizontal surface Structure, the center of the rotating disk 2 is provided with a conical material distribution head 8, which is used to disperse the falling powder. As shown in FIG. 2 , the surface of the rotating disk 2 is provided with a number of arc-shaped partitions 6, and the arc-shaped partitions 6 are arranged in a spiral radial shape from the center of the rotating disk 2, and two adjacent arc-shaped partitions 6 form two Open-ended heating purification tank 7. The nozzle at the bottom of the feeding funnel 1 is located just above the center of the rotating disk 2 . The heater 3 is arranged close to the lower surface of the rotary disk 2, and a feeding chute 4 is connected below the heater 3. The outer edge of the feeding chute 4 exceeds the outer edge of the rotary disk 2, so that the The purified powder enters the feeding chute 4, and the bottom of the feeding head 8 is connected with a rotating shaft 5, which is driven to rotate by a motor, thereby driving the entire rotating disk 2 to rotate.

具体粉体纯化的过程为:将待纯化的粉体经进料漏斗1加入,使粉体通过进料漏斗1落入旋转盘2,粉体落下时先接触分料头8,进过分料头8分散进入弧形隔板6之间的加热纯化槽7内,旋转盘2底部连接的旋转轴5通过连接的电机(图中未示出)带动旋转盘2做圆周自转,粉体通过进料漏斗1按照工艺速度落至旋转盘2,粉体落至旋转盘2后,通过离心力缓慢流向落料槽4,整个过程中加热器3一直加热。整套系统是在高温高真空环境或者充满工艺气体的高温环境下运行。The specific powder purification process is as follows: the powder to be purified is added through the feeding funnel 1, and the powder falls into the rotating disk 2 through the feeding funnel 1. When the powder falls, it first contacts the feeding head 8, and then enters the feeding head. 8 dispersed into the heating and purification tank 7 between the arc-shaped partitions 6, the rotating shaft 5 connected to the bottom of the rotating disk 2 drives the rotating disk 2 to do a circular rotation through the connected motor (not shown in the figure), and the powder passes through the feeding The funnel 1 falls to the rotating disc 2 according to the process speed. After the powder falls to the rotating disc 2, it slowly flows to the blanking chute 4 by centrifugal force, and the heater 3 keeps heating during the whole process. The whole system operates in a high temperature and high vacuum environment or a high temperature environment filled with process gas.

本装置实现粉体连续生产,减少粉体进出炉和升温降温时间,提升效率。加热器3紧靠在旋转盘2下面,热能利用率更高。粉体在旋转盘2上纯化,旋转盘2将热量传导至粉体,接触面积很大,粉体在旋转盘2上面很薄,和工艺气体接触面积大,提升纯化效果。根据粉体纯化的纯度要求可以调节落料量和旋转速度,实现工艺的可调性。纯化过程由体系纯化向面系过渡,便于杂质的挥发排除,纯化效率和纯化效果均明显提升。The device realizes the continuous production of powder, reduces the time of powder entering and leaving the furnace, heating and cooling, and improves efficiency. The heater 3 is immediately below the rotating disk 2, and the utilization rate of heat energy is higher. The powder is purified on the rotating disk 2, the rotating disk 2 conducts heat to the powder, and the contact area is large, the powder is very thin on the rotating disk 2, and the contact area with the process gas is large, which improves the purification effect. According to the purity requirements of powder purification, the blanking amount and rotation speed can be adjusted to realize the adjustability of the process. The purification process transitions from system purification to face system, which is convenient for the volatilization and elimination of impurities, and the purification efficiency and purification effect are significantly improved.

以上内容是结合具体的优选实施方式对本发明所做的进一步详细说明,不能认定本发明的具体实施方式仅限于此,对于本发明所属技术领域的普通技术人员来说,在不脱离本发明的前提下,还可以做出若干简单的推演或替换,都应当视为属于本发明由所提交的权利要求书确定专利保护范围。The above content is a further detailed description of the present invention in combination with the specific preferred embodiments, and it cannot be considered that the specific embodiments of the present invention are limited to this. Below, some simple deductions or substitutions can also be made, all of which should be regarded as belonging to the invention and the scope of patent protection determined by the submitted claims.

Claims (10)

1.一种高纯粉体连续纯化装置,其特征在于,包括送料装置、旋转盘(2)、加热器(3)和接料槽(4),所述送料装置位于旋转盘(2)的上方,待纯化的粉体经送料装置落入旋转盘(2),所述旋转盘(2)的表面设置有若干弧形隔板(6),弧形隔板(6)以旋转盘(2)的中心呈放射状依次排列,所述加热器(3)位于旋转盘(2)的下方,旋转盘(2)连接有驱动装置用于对旋转盘(2)产生自转的驱动力,旋转盘(2)的外边缘下方设置所述的接料槽(4)。1. A high-purity powder continuous purification device, characterized in that it comprises a feeding device, a rotary disc (2), a heater (3) and a feeding chute (4), and the feeding device is located at the bottom of the rotary disc (2). Above, the powder to be purified falls into the rotating disk (2) through the feeding device. The surface of the rotating disk (2) is provided with several arc-shaped partitions (6), and the arc-shaped partitions (6) serve as the rotating disk (2). ) are radially arranged in their centers, the heaters (3) are located below the rotating disk (2), and the rotating disk (2) is connected with a driving device for generating a driving force for the rotation of the rotating disk (2). 2) The feeding chute (4) is provided below the outer edge. 2.根据权利要求1所述的一种高纯粉体连续纯化装置,其特征在于,所述的旋转盘(2)为表面水平的圆形结构。2 . The high-purity powder continuous purification device according to claim 1 , wherein the rotating disk ( 2 ) is a circular structure with a horizontal surface. 3 . 3.根据权利要求2所述的一种高纯粉体连续纯化装置,其特征在于,所述弧形隔板(6)以旋转盘(2)的中心呈螺旋放射状依次排列,相邻两个弧形隔板(6)之间形成两端开口的加热纯化槽(7)。3 . The device for continuous purification of high-purity powder according to claim 2 , wherein the arc-shaped partitions ( 6 ) are arranged in a spiral radial shape at the center of the rotating disk ( 2 ), and two adjacent ones are arranged in turn. 4 . A heating purification tank (7) with openings at both ends is formed between the arc-shaped partitions (6). 4.根据权利要求1-3任意一项所述的一种高纯粉体连续纯化装置,其特征在于,所述的送料装置为进料漏斗(1)。4. A continuous purification device for high-purity powder according to any one of claims 1-3, wherein the feeding device is a feeding funnel (1). 5.根据权利要求4所述的一种高纯粉体连续纯化装置,其特征在于,所述进料漏斗(1)底部管口位于旋转盘(2)中心的正上方。5 . The device for continuous purification of high-purity powder according to claim 4 , wherein the nozzle at the bottom of the feeding funnel ( 1 ) is located just above the center of the rotating disk ( 2 ). 6 . 6.根据权利要求5所述的一种高纯粉体连续纯化装置,其特征在于,所述旋转盘(2)中心设置有锥形的分料头(8)。6 . The device for continuous purification of high-purity powder according to claim 5 , wherein a conical material distribution head ( 8 ) is arranged in the center of the rotating disk ( 2 ). 7 . 7.根据权利要求6所述的一种高纯粉体连续纯化装置,其特征在于,所述驱动装置包括与旋转盘(2)相连接的旋转轴(5),所述旋转轴(5)通过电机带动旋转。7. A high-purity powder continuous purification device according to claim 6, characterized in that the driving device comprises a rotating shaft (5) connected to the rotating disk (2), the rotating shaft (5) Driven by the motor to rotate. 8.根据权利要求7所述的一种高纯粉体连续纯化装置,其特征在于,所述旋转轴(5)与分料头(8)相连接。8 . The device for continuous purification of high-purity powder according to claim 7 , wherein the rotating shaft ( 5 ) is connected with the material distribution head ( 8 ). 9 . 9.根据权利要求1或8所述的一种高纯粉体连续纯化装置,其特征在于,所述加热器(3)设置在旋转盘(2)的下表面。9 . The device for continuous purification of high-purity powder according to claim 1 or 8 , wherein the heater ( 3 ) is arranged on the lower surface of the rotating disk ( 2 ). 10 . 10.一种使用如权利要求1所述高纯粉体连续纯化装置的高纯粉体连续纯化方法,其特征在于,包括以下步骤:待纯化的粉体经送料装置落入旋转盘(2),所述旋转盘(2)在驱动装置的带动下做自转运动,落入旋转盘(2)的粉体在离心力的作用下,经相邻两个弧形隔板(6)之间形成的加热纯化槽(7)流至旋转盘边缘并落入接料槽(4),所述粉体在经过加热纯化槽(7)时被下方的加热器(3)加热并纯化,所述高纯粉体连续纯化装置处于粉体纯化的工艺温度及真空度下。10. A method for continuous purification of high-purity powder using the device for continuous purification of high-purity powder according to claim 1, characterized in that it comprises the following steps: the powder to be purified falls into the rotating disc (2) through the feeding device , the rotating disk (2) is driven by the driving device to rotate, and the powder falling into the rotating disk (2) is formed between two adjacent arc-shaped partitions (6) under the action of centrifugal force. The heating and purification tank (7) flows to the edge of the rotating disc and falls into the receiving tank (4). The powder is heated and purified by the heater (3) below when passing through the heating and purification tank (7). The powder continuous purification device is under the process temperature and vacuum degree of powder purification.
CN202010718278.8A 2020-07-23 2020-07-23 Continuous purification device for high-purity powder of crystalline material Active CN111809245B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102126726A (en) * 2011-01-29 2011-07-20 大连隆田科技有限公司 A method and equipment for efficiently purifying polysilicon powder by electron beam
CN102285657A (en) * 2010-06-17 2011-12-21 上海普罗新能源有限公司 Method for removing boron impurities in solid silicon
JP2013085997A (en) * 2011-10-14 2013-05-13 Funken Pautekkusu:Kk Device for continuously mixing powder with liquid
CN212404355U (en) * 2020-07-23 2021-01-26 山西中电科新能源技术有限公司 Continuous purification device of high-purity powder

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102285657A (en) * 2010-06-17 2011-12-21 上海普罗新能源有限公司 Method for removing boron impurities in solid silicon
CN102126726A (en) * 2011-01-29 2011-07-20 大连隆田科技有限公司 A method and equipment for efficiently purifying polysilicon powder by electron beam
JP2013085997A (en) * 2011-10-14 2013-05-13 Funken Pautekkusu:Kk Device for continuously mixing powder with liquid
CN212404355U (en) * 2020-07-23 2021-01-26 山西中电科新能源技术有限公司 Continuous purification device of high-purity powder

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