CN111796482A - Photosensitive resin composition, method for producing patterned cured film, and patterned cured film - Google Patents
Photosensitive resin composition, method for producing patterned cured film, and patterned cured film Download PDFInfo
- Publication number
- CN111796482A CN111796482A CN202010198720.9A CN202010198720A CN111796482A CN 111796482 A CN111796482 A CN 111796482A CN 202010198720 A CN202010198720 A CN 202010198720A CN 111796482 A CN111796482 A CN 111796482A
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- group
- bis
- anthracene
- resin composition
- photosensitive resin
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 161
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 229920005989 resin Polymers 0.000 claims abstract description 105
- 239000011347 resin Substances 0.000 claims abstract description 105
- 239000000178 monomer Substances 0.000 claims abstract description 89
- 238000000034 method Methods 0.000 claims abstract description 88
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 59
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000011737 fluorine Substances 0.000 claims abstract description 52
- 239000003999 initiator Substances 0.000 claims abstract description 51
- 230000003287 optical effect Effects 0.000 claims abstract description 49
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 14
- 125000004432 carbon atom Chemical group C* 0.000 claims description 168
- 125000000217 alkyl group Chemical group 0.000 claims description 123
- 125000001424 substituent group Chemical group 0.000 claims description 104
- 125000000962 organic group Chemical group 0.000 claims description 92
- 125000003118 aryl group Chemical group 0.000 claims description 79
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 72
- 238000000576 coating method Methods 0.000 claims description 57
- 239000011248 coating agent Substances 0.000 claims description 54
- 239000003086 colorant Substances 0.000 claims description 28
- 238000011161 development Methods 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 7
- 125000005647 linker group Chemical group 0.000 claims description 6
- 239000002096 quantum dot Substances 0.000 claims description 6
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 claims description 5
- -1 oxime ester compound Chemical class 0.000 abstract description 298
- 239000007788 liquid Substances 0.000 abstract description 21
- 239000000049 pigment Substances 0.000 description 117
- 239000010408 film Substances 0.000 description 105
- 150000001875 compounds Chemical class 0.000 description 102
- 239000000126 substance Substances 0.000 description 59
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 58
- 239000000976 ink Substances 0.000 description 56
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 55
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 44
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 43
- 125000003545 alkoxy group Chemical group 0.000 description 41
- 239000004593 Epoxy Substances 0.000 description 38
- 125000002947 alkylene group Chemical group 0.000 description 38
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 33
- 239000012860 organic pigment Substances 0.000 description 33
- 239000006229 carbon black Substances 0.000 description 32
- 235000019241 carbon black Nutrition 0.000 description 32
- 125000004122 cyclic group Chemical group 0.000 description 32
- 125000000623 heterocyclic group Chemical group 0.000 description 30
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 29
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 29
- 125000001931 aliphatic group Chemical group 0.000 description 27
- 125000005843 halogen group Chemical group 0.000 description 26
- 125000003277 amino group Chemical group 0.000 description 25
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 23
- 239000002585 base Substances 0.000 description 21
- 125000001183 hydrocarbyl group Chemical group 0.000 description 21
- 239000003960 organic solvent Substances 0.000 description 21
- 125000002252 acyl group Chemical group 0.000 description 20
- 239000003822 epoxy resin Substances 0.000 description 20
- 229920000647 polyepoxide Polymers 0.000 description 20
- 239000004925 Acrylic resin Substances 0.000 description 19
- 229920000178 Acrylic resin Polymers 0.000 description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 19
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 19
- 230000002378 acidificating effect Effects 0.000 description 19
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 18
- 125000005842 heteroatom Chemical group 0.000 description 18
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 18
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 17
- 239000000975 dye Substances 0.000 description 17
- 239000000203 mixture Substances 0.000 description 17
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 17
- 125000000101 thioether group Chemical group 0.000 description 16
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 15
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical group C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 15
- 125000001624 naphthyl group Chemical group 0.000 description 15
- 229910017750 AgSn Inorganic materials 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 14
- 125000003700 epoxy group Chemical group 0.000 description 14
- 125000001153 fluoro group Chemical group F* 0.000 description 14
- 229920003986 novolac Polymers 0.000 description 14
- 239000000956 alloy Substances 0.000 description 13
- 229910045601 alloy Inorganic materials 0.000 description 13
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 13
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 12
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 12
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 12
- 150000008065 acid anhydrides Chemical class 0.000 description 12
- 125000002723 alicyclic group Chemical group 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 12
- 125000004093 cyano group Chemical group *C#N 0.000 description 12
- 125000000753 cycloalkyl group Chemical group 0.000 description 12
- 150000002148 esters Chemical class 0.000 description 12
- 125000001072 heteroaryl group Chemical group 0.000 description 12
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 12
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 12
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 12
- 239000007787 solid Substances 0.000 description 12
- 125000003396 thiol group Chemical group [H]S* 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 11
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 11
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 11
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 11
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 10
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 10
- 239000002270 dispersing agent Substances 0.000 description 10
- 230000002349 favourable effect Effects 0.000 description 10
- 150000007519 polyprotic acids Polymers 0.000 description 10
- 239000000047 product Substances 0.000 description 10
- 125000005372 silanol group Chemical group 0.000 description 10
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 10
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 9
- XSCHRSMBECNVNS-UHFFFAOYSA-N benzopyrazine Natural products N1=CC=NC2=CC=CC=C21 XSCHRSMBECNVNS-UHFFFAOYSA-N 0.000 description 9
- 239000004305 biphenyl Substances 0.000 description 9
- 235000010290 biphenyl Nutrition 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 125000002950 monocyclic group Chemical group 0.000 description 9
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 9
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 9
- 125000000018 nitroso group Chemical group N(=O)* 0.000 description 9
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 9
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 9
- OGRAOKJKVGDSFR-UHFFFAOYSA-N 2,3,5-trimethylphenol Chemical compound CC1=CC(C)=C(C)C(O)=C1 OGRAOKJKVGDSFR-UHFFFAOYSA-N 0.000 description 8
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 8
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 8
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 8
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 8
- 125000004423 acyloxy group Chemical group 0.000 description 8
- 125000006615 aromatic heterocyclic group Chemical group 0.000 description 8
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 8
- 239000010419 fine particle Substances 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 8
- 125000001326 naphthylalkyl group Chemical group 0.000 description 8
- 125000003884 phenylalkyl group Chemical group 0.000 description 8
- 125000005328 phosphinyl group Chemical group [PH2](=O)* 0.000 description 8
- 125000005575 polycyclic aromatic hydrocarbon group Chemical group 0.000 description 8
- 125000005708 carbonyloxy group Chemical group [*:2]OC([*:1])=O 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 125000000475 sulfinyl group Chemical group [*:2]S([*:1])=O 0.000 description 7
- 125000000542 sulfonic acid group Chemical group 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N toluene Substances CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 7
- FCEHBMOGCRZNNI-UHFFFAOYSA-N 1-benzothiophene Chemical compound C1=CC=C2SC=CC2=C1 FCEHBMOGCRZNNI-UHFFFAOYSA-N 0.000 description 6
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- KDCGOANMDULRCW-UHFFFAOYSA-N 7H-purine Chemical compound N1=CNC2=NC=NC2=C1 KDCGOANMDULRCW-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 6
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical group OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 6
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 6
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 150000003926 acrylamides Chemical class 0.000 description 6
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 6
- 125000003710 aryl alkyl group Chemical group 0.000 description 6
- 125000004104 aryloxy group Chemical group 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 6
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 6
- 125000001231 benzoyloxy group Chemical group C(C1=CC=CC=C1)(=O)O* 0.000 description 6
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 6
- 229920001577 copolymer Polymers 0.000 description 6
- 125000000000 cycloalkoxy group Chemical group 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 6
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 6
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 235000013824 polyphenols Nutrition 0.000 description 6
- 230000001846 repelling effect Effects 0.000 description 6
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 6
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Natural products CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 5
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical class OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- 125000004018 acid anhydride group Chemical group 0.000 description 5
- 238000003491 array Methods 0.000 description 5
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 5
- 150000001721 carbon Chemical group 0.000 description 5
- 125000001316 cycloalkyl alkyl group Chemical group 0.000 description 5
- 125000004663 dialkyl amino group Chemical group 0.000 description 5
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 5
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 5
- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 5
- 150000002894 organic compounds Chemical class 0.000 description 5
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical group C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 5
- 125000001476 phosphono group Chemical group [H]OP(*)(=O)O[H] 0.000 description 5
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- 230000008569 process Effects 0.000 description 5
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 5
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 description 5
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- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical group C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 4
- QQOMQLYQAXGHSU-UHFFFAOYSA-N 236TMPh Natural products CC1=CC=C(C)C(O)=C1C QQOMQLYQAXGHSU-UHFFFAOYSA-N 0.000 description 4
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 4
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- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000003377 acid catalyst Substances 0.000 description 4
- 150000001299 aldehydes Chemical class 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-O ammonium group Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 230000001588 bifunctional effect Effects 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 125000001309 chloro group Chemical group Cl* 0.000 description 4
- 125000000392 cycloalkenyl group Chemical group 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 125000006575 electron-withdrawing group Chemical group 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 4
- 150000003951 lactams Chemical class 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 125000005322 morpholin-1-yl group Chemical group 0.000 description 4
- 125000001038 naphthoyl group Chemical group C1(=CC=CC2=CC=CC=C12)C(=O)* 0.000 description 4
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 150000002989 phenols Chemical class 0.000 description 4
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 4
- 239000001294 propane Substances 0.000 description 4
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nonlinear Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Epoxy Resins (AREA)
- Optical Filters (AREA)
- Ink Jet Recording Methods And Recording Media Thereof (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
本发明涉及感光性树脂组合物、经图案化的固化膜的制造方法、及经图案化的固化膜。提供可形成能抑制非图案部斥液化的经图案化的固化膜的感光性树脂组合物;使用该感光性树脂组合物的经图案化的固化膜的制造方法;由上述感光性树脂组合物的固化物形成的经图案化的固化膜;由上述感光性树脂组合物的固化膜形成的隔堤;具备该隔堤的用于制造光学元件的带隔堤的基板;具备该带隔堤的基板的光学元件;具备该光学元件的显示装置;使用上述感光性树脂组合物的隔堤的形成方法;和光学元件的制造方法。包含碱溶性树脂、光聚合性单体、光聚合引发剂、和氟系树脂的感光性树脂组合物使用包含两个或三个N‑取代咔唑骨架的规定结构肟酯化合物作为光聚合引发剂。The present invention relates to a photosensitive resin composition, a method for producing a patterned cured film, and a patterned cured film. To provide a photosensitive resin composition capable of forming a patterned cured film capable of suppressing liquid repellency of non-patterned parts; a method for producing a patterned cured film using the photosensitive resin composition; from the above-mentioned photosensitive resin composition A patterned cured film formed of a cured product; a bank formed from a cured film of the photosensitive resin composition described above; a banked substrate for manufacturing an optical element including the bank; a banked substrate including the bank The optical element of ; the display device provided with this optical element; the formation method of the bank using the said photosensitive resin composition; and the manufacturing method of the optical element. A photosensitive resin composition containing an alkali-soluble resin, a photopolymerizable monomer, a photopolymerization initiator, and a fluorine-based resin uses an oxime ester compound of a predetermined structure containing two or three N-substituted carbazole skeletons as a photopolymerization initiator .
Description
技术领域technical field
本发明涉及感光性树脂组合物、经图案化的固化膜的制造方法、及经图案化的固化膜。另外,本发明涉及由上述感光性树脂组合物的固化膜形成的隔堤、具备该隔堤的用于制造光学元件的带隔堤的基板、具备该带隔堤的基板的光学元件、具备该光学元件的显示装置、使用上述感光性树脂组合物的隔堤的形成方法、及光学元件的制造方法。The present invention relates to a photosensitive resin composition, a method for producing a patterned cured film, and a patterned cured film. In addition, the present invention relates to a bank formed of a cured film of the photosensitive resin composition, a banked substrate for producing an optical element including the bank, an optical element including the banked substrate, and an optical element including the bank. The display apparatus of an optical element, the formation method of the bank using the said photosensitive resin composition, and the manufacturing method of an optical element.
背景技术Background technique
一直以来,有机EL显示元件、滤色器、有机TFT阵列等光学元件以下述方式制造:在基板上形成对像素进行包围的隔堤(间隔壁),然后在由隔堤围成的区域内层叠各种功能层。作为容易地形成这样的隔堤的方法,利用使用感光性树脂组合物的光刻法来形成隔堤的方法是已知的(专利文献1)。Conventionally, optical elements such as organic EL display elements, color filters, and organic TFT arrays have been manufactured by forming banks (partitions) surrounding pixels on a substrate, and then stacking each of them in a region surrounded by the banks. functional layer. As a method of easily forming such a bank, a method of forming a bank by a photolithography method using a photosensitive resin composition is known (Patent Document 1).
另外,作为在由隔堤围成的区域内层叠各种功能层的方法,已知下述方法:制备包含构成功能层的材料的油墨,并将制备的油墨注入由隔堤围成的区域内。该方法中,从容易将规定量的油墨准确地注入至规定部位的方面考虑,大多采用喷墨法。In addition, as a method of laminating various functional layers in a region surrounded by banks, there is known a method of preparing ink containing a material constituting the functional layer, and injecting the prepared ink into the region surrounded by banks. In this method, the ink jet method is often used because it is easy to accurately inject a predetermined amount of ink to a predetermined portion.
此外,在使用油墨形成像素的情况下,出于预防油墨附着于隔堤、防止注入至相邻像素间的油墨混合的目的等,要求对隔堤赋予斥油墨性。作为对隔堤赋予斥油墨性的方法,例如,已知使隔堤中含有氟系树脂的方法(专利文献2)。In addition, when forming a pixel using ink, it is required to impart ink repellency to the bank for the purpose of preventing the ink from adhering to the bank, preventing the ink injected between adjacent pixels from being mixed, and the like. As a method of imparting ink repellency to the bank, for example, a method of including a fluorine-based resin in the bank is known (Patent Document 2).
现有技术文献prior art literature
专利文献Patent Literature
专利文献1:日本特开2010-262940号公报Patent Document 1: Japanese Patent Application Laid-Open No. 2010-262940
专利文献2:国际公开第2008-149498号Patent Document 2: International Publication No. 2008-149498
发明内容SUMMARY OF THE INVENTION
但是,本申请的发明人进行了研究,结果确认到,在为了对形成的隔堤赋予斥油墨性而在用于形成隔堤的感光性树脂组合物中配合氟系树脂时,存在下述情况:在具备使用该感光性树脂组合物形成的经图案化的固化膜的基板上,于未被感光性树脂组合物覆盖的非图案部也呈现出斥液性。However, the inventors of the present application have conducted studies and found that when a fluorine-based resin is blended in a photosensitive resin composition for bank formation in order to impart ink repellency to the bank to be formed, the following cases exist. : On the board|substrate provided with the patterned cured film formed using this photosensitive resin composition, liquid repellency is exhibited also in the non-pattern part which is not covered with the photosensitive resin composition.
在将该经图案化的固化膜用作上述光学元件的隔堤的情况下,若在上述这样的非图案部处呈现出斥液性,则会存在下述问题:用于形成像素的油墨在由隔堤围成的区域内被排斥,无法将充分量的油墨注入由隔堤围成的区域内。When the patterned cured film is used as a bank of the above-mentioned optical element, if liquid repellency is exhibited in the non-patterned portion as described above, there is a problem that the ink for forming the pixel is The area enclosed by the bank is repelled, and a sufficient amount of ink cannot be injected into the area enclosed by the bank.
该问题在利用喷墨法将油墨注入由隔堤围成的区域内的情况下显著。其原因在于,喷墨法中,油墨以液滴的形式从喷墨头喷出至由隔堤围成的区域内,但若由隔堤围成的区域内具有斥油墨性,则液滴容易被排斥至由隔堤围成的区域外。This problem is remarkable when the ink is injected into the region surrounded by the bank by the ink jet method. The reason for this is that, in the inkjet method, the ink is ejected from the inkjet head in the form of droplets into the region surrounded by the banks, but if the region surrounded by the banks has ink repellency, the droplets are easily repelled. outside the area enclosed by the dike.
本发明是鉴于上述课题而作出的,其目的在于提供:可形成能够抑制非图案部的斥液化的经图案化的固化膜的感光性树脂组合物;使用该感光性树脂组合物的经图案化的固化膜的制造方法;由上述感光性树脂组合物的固化物形成的经图案化的固化膜;由上述感光性树脂组合物的固化膜形成的隔堤;具备该隔堤的用于制造光学元件的带隔堤的基板;具备该带隔堤的基板的光学元件;具备该光学元件的显示装置;使用上述感光性树脂组合物的隔堤的形成方法;和光学元件的制造方法。The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a photosensitive resin composition capable of forming a patterned cured film capable of suppressing liquid repellency of non-patterned portions; A method for producing a cured film of A banked substrate of an element; an optical element including the banked substrate; a display device including the optical element; a method for forming a bank using the above-mentioned photosensitive resin composition; and a method for producing an optical element.
[用于解决课题的手段][Means for solving problems]
本申请的发明人发现,通过在包含碱溶性树脂(A)、光聚合性单体(B)、光聚合引发剂(C)、和氟系树脂(D)的感光性树脂组合物中,使用包含两个或三个N-取代咔唑骨架的规定结构的肟酯化合物作为光聚合引发剂(C),从而能够解决上述课题,由此完成了本发明。更具体而言,本发明提供以下的方案。The inventors of the present application found that, by using a photosensitive resin composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and a fluorine-based resin (D), using The oxime ester compound of the predetermined structure containing two or three N-substituted carbazole skeletons can solve the said subject as a photoinitiator (C), and completed this invention. More specifically, the present invention provides the following aspects.
本发明的第1方式为感光性树脂组合物,其包含碱溶性树脂(A)、光聚合性单体(B)、光聚合引发剂(C)、和氟系树脂(D),The first aspect of the present invention is a photosensitive resin composition comprising an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and a fluorine-based resin (D),
其中,光聚合引发剂(C)包含下述式(C1)表示的光聚合引发剂(C-I),Among them, the photopolymerization initiator (C) includes a photopolymerization initiator (C-I) represented by the following formula (C1),
[化学式1][Chemical formula 1]
(式(C1)中,Xc1为二价或三价的连接基团,多个Rc1各自独立地为一价的有机基团,多个Rc2各自独立地为氢原子、可具有取代基的碳原子数为1以上且11以下的烷基、或可具有取代基的芳基,多个Rc3各自独立地为通过C-N键与咔唑环中的氮原子键合的一价的有机基团,t1为0或1。)。(In formula (C1), X c1 is a divalent or trivalent linking group, a plurality of R c1 are each independently a monovalent organic group, and a plurality of R c2 are each independently a hydrogen atom, which may have a substituent An alkyl group having 1 or more and 11 or less carbon atoms, or an aryl group which may have a substituent, each of a plurality of R c3 is independently a monovalent organic group bonded to a nitrogen atom in a carbazole ring through a CN bond group, t1 is 0 or 1.).
本发明的第2方式为经图案化的固化膜的制造方法,其包括下述工序:A second aspect of the present invention is a method for producing a patterned cured film, which includes the following steps:
将第1方式涉及的感光性树脂组合物涂布于基板上从而形成涂布膜的工序;和a step of applying the photosensitive resin composition according to the first aspect on a substrate to form a coating film; and
对涂布膜进行曝光的工序,The process of exposing the coating film,
其中,涂布膜进行图案化,或者wherein the coating film is patterned, or
对涂布膜进行位置选择性的曝光,接着,进行针对经曝光的涂布膜的显影。The coating film is subjected to position-selective exposure, and then, development of the exposed coating film is performed.
本发明的第3方式为经图案化的固化膜,其由第1方式涉及的感光性树脂组合物的固化物形成。The 3rd aspect of this invention is a patterned cured film formed from the hardened|cured material of the photosensitive resin composition which concerns on 1st aspect.
本发明的第4方式为隔堤,其由用于形成隔堤的第1方式涉及的感光性树脂组合物的固化物形成。A fourth aspect of the present invention is a bank formed from a cured product of the photosensitive resin composition according to the first aspect for forming the bank.
本发明的第5方式为用于制造光学元件的带隔堤的基板,其具备第4方式涉及的隔堤。A fifth aspect of the present invention is a banked substrate for manufacturing an optical element, which is provided with the bank according to the fourth aspect.
本发明的第6方式为光学元件,其具备第5方式涉及的用于制造光学元件的带隔堤的基板。A sixth aspect of the present invention is an optical element including the banked substrate for manufacturing the optical element according to the fifth aspect.
本发明的第7方式为显示装置,其具备第6方式涉及的光学元件。A seventh aspect of the present invention is a display device including the optical element according to the sixth aspect.
本发明的第8方式为隔堤的形成方法,其包括下述工序:An eighth aspect of the present invention is a method for forming a bank, comprising the following steps:
将用于形成隔堤的第1方式涉及的感光性树脂组合物涂布于基板上从而形成涂布膜的工序;和a step of applying the photosensitive resin composition according to the first aspect for forming a bank on a substrate to form a coating film; and
对涂布膜进行曝光的工序,The process of exposing the coating film,
其中,涂布膜进行图案化,或者wherein the coating film is patterned, or
对涂布膜进行位置选择性的曝光,接着,进行针对经曝光的涂布膜的显影。The coating film is subjected to position-selective exposure, and then, development of the exposed coating film is performed.
本发明的第9方式为光学元件的制造方法,其包括向由利用第8方式涉及的方法在基板上形成的隔堤围成的区域内注入油墨而形成像素的工序。A ninth aspect of the present invention is a method of manufacturing an optical element including the step of injecting ink into a region surrounded by banks formed on a substrate by the method according to the eighth aspect to form pixels.
[发明的效果][Effect of invention]
根据本发明,能够提供:可形成能够抑制非图案部的斥液化的经图案化的固化膜的感光性树脂组合物;使用该感光性树脂组合物的经图案化的固化膜的制造方法;由上述感光性树脂组合物的固化物形成的经图案化的固化膜;由上述感光性树脂组合物的固化膜形成的隔堤;具备该隔堤的用于制造光学元件的带隔堤的基板;具备该带隔堤的基板的光学元件;具备该光学元件的显示装置;使用上述感光性树脂组合物的隔堤的形成方法;和光学元件的制造方法。According to the present invention, there can be provided: a photosensitive resin composition capable of forming a patterned cured film capable of suppressing liquid repellency of a non-patterned portion; a method for producing a patterned cured film using the photosensitive resin composition; A patterned cured film formed from a cured product of the photosensitive resin composition; a bank formed from a cured film of the photosensitive resin composition; a banked substrate for producing an optical element including the bank; An optical element including the banked substrate; a display device including the optical element; a method for forming a bank using the above-mentioned photosensitive resin composition; and a method for producing an optical element.
具体实施方式Detailed ways
《感光性树脂组合物》"Photosensitive resin composition"
为包含碱溶性树脂(A)、光聚合性单体(B)、光聚合引发剂(C)、和氟系树脂(D)的感光性树脂组合物。光聚合引发剂(C)包含下述式(C1)表示的肟酯化合物作为光聚合引发剂(C-I)。It is a photosensitive resin composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and a fluorine-based resin (D). The photopolymerization initiator (C) contains an oxime ester compound represented by the following formula (C1) as the photopolymerization initiator (C-I).
[化学式2][Chemical formula 2]
式(C1)中,Xc1为二价或三价的连接基团,多个Rc1各自独立地为一价的有机基团,多个Rc2各自独立地为氢原子、可具有取代基的碳原子数为1以上且11以下的烷基、或可具有取代基的芳基,多个Rc3各自独立地为通过C-N键与咔唑环中的氮原子键合的一价的有机基团,t1为0或1。In formula (C1), X c1 is a divalent or trivalent linking group, a plurality of R c1 are each independently a monovalent organic group, and a plurality of R c2 are each independently a hydrogen atom, which may have a substituent. An alkyl group having 1 or more and 11 or less carbon atoms, or an aryl group which may have a substituent, and each of a plurality of R c3 is independently a monovalent organic group bonded to a nitrogen atom in a carbazole ring through a CN bond , t1 is 0 or 1.
感光性树脂组合物包含碱溶性树脂(A)及光聚合性单体(B),同时组合包含氟系树脂(D)和光聚合引发剂(C-I),由此能够使用感光性树脂组合物来形成能够抑制非图案部的斥液化的经图案化的固化膜。The photosensitive resin composition can be formed using the photosensitive resin composition by including the alkali-soluble resin (A) and the photopolymerizable monomer (B), and simultaneously including the fluorine-based resin (D) and the photopolymerization initiator (C-I) in combination. A patterned cured film capable of suppressing liquid repellency of the non-patterned portion.
该经图案化的固化膜可合适地用于形成隔堤,所述隔堤在滤色器、有机EL显示元件、量子点显示器、或有机TFT阵列等中对像素进行划分。其原因在于,通过抑制由隔堤围成的区域内的斥液化,从而当向由隔堤围成的区域内注入用于形成像素的油墨时,不易发生排斥油墨这样的油墨注入不良。The patterned cured film can be suitably used to form banks that divide pixels in color filters, organic EL display elements, quantum dot displays, or organic TFT arrays and the like. This is because, by suppressing the liquid repellency in the region surrounded by the banks, when the ink for forming the pixels is injected into the region surrounded by the banks, the ink injection failure such as the repelling ink is less likely to occur.
另外,若使用上述的感光性树脂组合物,则在利用包括位置选择性曝光和显影的光刻法形成隔堤时,容易同时实现:作为用于防止油墨(其用于形成像素)向相邻的像素区域渗入的间隔壁的充分的功能;和理想的光线透过性。In addition, when the above-mentioned photosensitive resin composition is used, when banks are formed by a photolithography method including position-selective exposure and development, it is easy to simultaneously realize: as a function for preventing ink (which is used for forming pixels) from adjoining adjacent ones sufficient function of the partition walls infiltrated by the pixel area; and ideal light transmittance.
以下,针对感光性树脂组合物所包含的必需或任选的成分、和感光性树脂组合物的制造方法依次进行说明。Hereinafter, the essential or optional components contained in the photosensitive resin composition and the manufacturing method of the photosensitive resin composition will be described in order.
<碱溶性树脂(A)><Alkali-soluble resin (A)>
感光性树脂组合物包含碱溶性树脂(A)。作为碱溶性树脂(A),没有特别限定,可以从以往配合于各种感光性树脂组合物中的碱溶性树脂中适当选择。The photosensitive resin composition contains alkali-soluble resin (A). It does not specifically limit as an alkali-soluble resin (A), It can select suitably from the alkali-soluble resin compounded in various photosensitive resin compositions conventionally.
此处,本说明书中,所谓碱溶性树脂(A),是指在分子内包含具有碱溶性的官能团(例如,酚式羟基、羧基、磺酸基等)的树脂。Here, in this specification, the alkali-soluble resin (A) means a resin containing an alkali-soluble functional group (for example, a phenolic hydroxyl group, a carboxyl group, a sulfonic acid group, etc.) in the molecule.
关于作为碱溶性树脂(A)合适的树脂,可举出具有Cardo结构的树脂(a-1)(以下,也记载为“Cardo树脂(a-1)”。)。Resin (a-1) which has a Cardo structure is mentioned as resin suitable as an alkali-soluble resin (A) (it is also described as "Cardo resin (a-1)" below.).
使用具有Cardo结构的树脂(a-1)作为碱溶性树脂时,容易得到分辨率优异的感光性树脂组合物,使用感光性树脂组合物容易形成不易因加热而过度流动(flow)的固化膜。因此,容易形成形状良好的固化膜。When the resin (a-1) having a Cardo structure is used as the alkali-soluble resin, a photosensitive resin composition excellent in resolution is easily obtained, and a cured film that is less likely to flow excessively by heating is easily formed by using the photosensitive resin composition. Therefore, it becomes easy to form a cured film with a favorable shape.
〔具有Cardo结构的树脂(a-1)〕[Resin (a-1) having a Cardo structure]
作为具有Cardo结构的树脂(a-1),可以使用在其结构中具有Cardo骨架、具有规定的碱溶性的树脂。所谓Cardo骨架,是指在构成第1环状结构的1个环碳原子上键合第2环状结构和第3环状结构而成的骨架。需要说明的是,第2环状结构与第3环状结构可以为相同的结构,也可以为不同的结构。As the resin (a-1) having a Cardo structure, a resin having a Cardo skeleton in the structure and having predetermined alkali solubility can be used. The Cardo skeleton refers to a skeleton in which a second cyclic structure and a third cyclic structure are bonded to one ring carbon atom constituting the first cyclic structure. In addition, the 2nd cyclic structure and the 3rd cyclic structure may be the same structure, and may be a different structure.
作为Cardo骨架的代表例,可举出在芴环的9位碳原子上键合2个芳香环(例如苯环)而成的骨架。A typical example of the Cardo skeleton includes a skeleton in which two aromatic rings (eg, benzene rings) are bonded to the carbon atom at the 9-position of the fluorene ring.
作为Cardo树脂(a-1),没有特别限定,可以使用现有已知的树脂。其中,优选下述式(a-1)表示的树脂。It does not specifically limit as Cardo resin (a-1), A conventionally known resin can be used. Among them, the resin represented by the following formula (a-1) is preferable.
[化学式3][Chemical formula 3]
式(a-1)中,Xa表示下述式(a-2)表示的基团。m1表示0以上且20以下的整数。In the formula (a-1), X a represents a group represented by the following formula (a-2). m1 represents an integer of 0 or more and 20 or less.
[化学式4][Chemical formula 4]
上述式(a-2)中,Ra1各自独立地表示氢原子、碳原子数为1以上且6以下的烃基、或卤素原子,Ra2各自独立地表示氢原子或甲基,Ra3各自独立地表示直链或支链的亚烷基,m2表示0或1,Wa表示下述式(a-3)表示的基团。In the above formula (a-2), R a1 each independently represents a hydrogen atom, a hydrocarbon group having 1 to 6 carbon atoms, or a halogen atom, R a2 each independently represents a hydrogen atom or a methyl group, and R a3 each independently A represents a linear or branched alkylene group, m2 represents 0 or 1, and W a represents a group represented by the following formula (a-3).
[化学式5][Chemical formula 5]
式(a-2)中,作为Ra3,优选碳原子数为1以上且20以下的亚烷基,更优选碳原子数为1以上且10以下的亚烷基,尤其优选碳原子数为1以上且6以下的亚烷基,最优选乙烷-1,2-二基、丙烷-1,2-二基、及丙烷-1,3-二基。In formula (a-2), as R a3 , an alkylene group having 1 or more and 20 or less carbon atoms is preferable, an alkylene group having 1 or more and 10 or less carbon atoms is more preferable, and an alkylene group having 1 or more carbon atoms is particularly preferable. The alkylene group of more than 6 and less than 6 is most preferably ethane-1,2-diyl, propane-1,2-diyl, and propane-1,3-diyl.
式(a-3)中的环A表示可以与芳香族环稠合的可具有取代基的脂肪族环。脂肪族环可以为脂肪族烃环,也可以为脂肪族杂环。Ring A in formula (a-3) represents an optionally substituted aliphatic ring which may be condensed with an aromatic ring. The aliphatic ring may be an aliphatic hydrocarbon ring or an aliphatic heterocyclic ring.
作为脂肪族环,可举出单环烷烃、双环烷烃、三环烷烃、四环烷烃等。As an aliphatic ring, a monocycloalkane, a bicycloalkane, a tricycloalkane, a tetracycloalkane, etc. are mentioned.
具体而言,可举出环戊烷、环己烷、环庚烷、环辛烷等单环烷烃、金刚烷、降冰片烷、异冰片烷、三环癸烷、四环十二烷。Specifically, monocycloalkanes such as cyclopentane, cyclohexane, cycloheptane, and cyclooctane, adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane can be mentioned.
可以与脂肪族环稠合的芳香族环可以为芳香族烃环,也可以为芳香族杂环,优选芳香族烃环。具体而言,优选苯环、及萘环。The aromatic ring which may be condensed with the aliphatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring, but an aromatic hydrocarbon ring is preferable. Specifically, a benzene ring and a naphthalene ring are preferable.
作为式(a-3)表示的二价基团的优选例,可举出下述基团。Preferred examples of the divalent group represented by the formula (a-3) include the following groups.
[化学式6][Chemical formula 6]
式(a-1)中的二价基团Xa可通过使提供残基Za的四羧酸二酐与下式(a-2a)表示的二醇化合物反应从而被导入至Cardo树脂(a-1)中。The divalent group X a in the formula (a-1) can be introduced into the Cardo resin (a) by reacting the tetracarboxylic dianhydride providing the residue Z a with a diol compound represented by the following formula (a-2a). -1).
[化学式7][Chemical formula 7]
式(a-2a)中,Ra1、Ra2、Ra3、及m2如针对式(a-2)的说明所示。关于式(a-2a)中的环A,如针对式(a-3)的说明所示。In formula (a-2a), R a1 , R a2 , R a3 , and m2 are as shown in the description for formula (a-2). The ring A in the formula (a-2a) is as described in the description for the formula (a-3).
式(a-2a)表示的二醇化合物例如可利用以下的方法制造。The diol compound represented by formula (a-2a) can be produced, for example, by the following method.
首先,根据需要,利用常规方法,将下述式(a-2b)表示的二醇化合物所具有的酚式羟基中的氢原子替换为-Ra3-OH表示的基团,然后,使用表氯醇等进行缩水甘油化,从而得到下述式(a-2c)表示的环氧化合物。First, if necessary, the hydrogen atom in the phenolic hydroxyl group of the diol compound represented by the following formula (a-2b) is replaced by a group represented by -R a3 -OH by a conventional method, and then, using epichlorohydrin An epoxy compound represented by the following formula (a-2c) is obtained by glycidylation of an alcohol or the like.
接着,通过使式(a-2c)表示的环氧化合物与丙烯酸或甲基丙烯酸反应,从而得到式(a-2a)表示的二醇化合物。Next, by reacting the epoxy compound represented by formula (a-2c) with acrylic acid or methacrylic acid, the diol compound represented by formula (a-2a) is obtained.
式(a-2b)及式(a-2c)中,Ra1、Ra3、及m2如针对式(a-2)的说明所示。关于式(a-2b)及式(a-2c)中的环A,如针对式(a-3)的说明所示。In the formula (a-2b) and the formula (a-2c), R a1 , R a3 , and m2 are as shown in the description for the formula (a-2). The ring A in the formula (a-2b) and the formula (a-2c) is as described in the description for the formula (a-3).
需要说明的是,式(a-2a)表示的二醇化合物的制造方法不限于上述方法。In addition, the manufacturing method of the diol compound represented by Formula (a-2a) is not limited to the said method.
[化学式8][Chemical formula 8]
作为式(a-2b)表示的二醇化合物的优选例,可举出以下的二醇化合物。Preferred examples of the diol compound represented by the formula (a-2b) include the following diol compounds.
[化学式9][Chemical formula 9]
上述式(a-1)中,Ra0为氢原子或-CO-Ya-COOH表示的基团。此处,Ya表示从二羧酸酐中除去酸酐基(-CO-O-CO-)而成的残基。作为二羧酸酐的例子,可举出马来酸酐、琥珀酸酐、衣康酸酐、邻苯二甲酸酐、四氢邻苯二甲酸酐、六氢邻苯二甲酸酐、甲基内亚甲基四氢邻苯二甲酸酐、氯菌酸酐、甲基四氢邻苯二甲酸酐、戊二酸酐等。In the above formula (a-1), R a0 is a hydrogen atom or a group represented by -CO-Y a -COOH. Here, Y a represents a residue obtained by removing an acid anhydride group (-CO-O-CO-) from a dicarboxylic acid anhydride. Examples of dicarboxylic anhydrides include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylendomethylenetetramine Hydrogen phthalic anhydride, chloroplastic anhydride, methyltetrahydrophthalic anhydride, glutaric anhydride, etc.
另外,上述式(a-1)中,Za表示从四羧酸二酐除去2个酸酐基而成的残基。作为四羧酸二酐的例子,可举出下述式(a-4)表示的四甲酸二酐、均苯四甲酸二酐、二苯甲酮四甲酸二酐、联苯四甲酸二酐、联苯醚四甲酸二酐等。Moreover, in said formula (a-1), Z a represents the residue which removed two acid anhydride groups from tetracarboxylic dianhydride. Examples of tetracarboxylic dianhydrides include tetracarboxylic dianhydrides represented by the following formula (a-4), pyromellitic dianhydrides, benzophenone tetracarboxylic dianhydrides, biphenyltetracarboxylic dianhydrides, Diphenyl ether tetracarboxylic dianhydride, etc.
另外,上述式(a-1)中,m表示0以上且20以下的整数。Moreover, in said Formula (a-1), m represents the integer of 0 or more and 20 or less.
[化学式10][Chemical formula 10]
(式(a-4)中,Ra4、Ra5、及Ra6各自独立地表示选自由氢原子、碳原子数为1以上且10以下的烷基及氟原子组成的组中的一种,m3表示0以上且12以下的整数。)(In formula (a-4), R a4 , R a5 , and R a6 each independently represent one selected from the group consisting of a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, and a fluorine atom, m3 represents an integer of 0 or more and 12 or less.)
可被选作式(a-4)中的Ra4的烷基是碳原子数为1以上且10以下的烷基。通过将烷基所具备的碳原子数设定在该范围内,从而能够使得到的羧酸酯的耐热性进一步提高。Ra4为烷基时,从容易得到耐热性优异的Cardo树脂的方面考虑,其碳原子数优选为1以上且6以下,更优选为1以上且5以下,进一步优选为1以上且4以下,尤其优选为1以上且3以下。The alkyl group that can be selected as R a4 in the formula (a-4) is an alkyl group having 1 or more and 10 or less carbon atoms. By setting the number of carbon atoms in the alkyl group within this range, the heat resistance of the obtained carboxylate can be further improved. When R a4 is an alkyl group, the number of carbon atoms is preferably 1 or more and 6 or less, more preferably 1 or more and 5 or less, further preferably 1 or more and 4 or less, from the viewpoint of easily obtaining a Cardo resin excellent in heat resistance. , particularly preferably 1 or more and 3 or less.
Ra4为烷基的情况下,该烷基可以为直链状,也可以为支链状。When R a4 is an alkyl group, the alkyl group may be linear or branched.
作为式(a-4)中的Ra4,从容易得到耐热性优异的Cardo树脂的方面考虑,各自独立地更优选为氢原子或碳原子数为1以上且10以下的烷基。式(a-4)中的Ra4更优选为氢原子、甲基、乙基、正丙基或异丙基,尤其优选为氢原子或甲基。R a4 in the formula (a-4) is more preferably a hydrogen atom or an alkyl group having 1 or more and 10 or less carbon atoms each independently from the viewpoint of easily obtaining a Cardo resin excellent in heat resistance. R a4 in the formula (a-4) is more preferably a hydrogen atom, a methyl group, an ethyl group, an n-propyl group or an isopropyl group, and particularly preferably a hydrogen atom or a methyl group.
从容易制备高纯度的四羧酸二酐的方面考虑,式(a-4)中的多个Ra4优选为相同的基团。From the viewpoint of easy production of high-purity tetracarboxylic dianhydride, it is preferable that a plurality of R a4 in the formula (a-4) are the same group.
式(a-4)中的m3表示0以上且12以下的整数。通过使m3的值为12以下,从而能够使四羧酸二酐的纯化容易。m3 in formula (a-4) represents an integer of 0 or more and 12 or less. Purification of tetracarboxylic dianhydride can be made easy by making the value of m3 12 or less.
从四羧酸二酐的纯化容易的方面考虑,m3的上限优选为5,更优选为3。The upper limit of m3 is preferably 5, and more preferably 3, from the viewpoint of easy purification of the tetracarboxylic dianhydride.
从四羧酸二酐的化学稳定性的方面考虑,m3的下限优选为1,更优选为2。The lower limit of m3 is preferably 1, and more preferably 2, from the viewpoint of the chemical stability of the tetracarboxylic dianhydride.
式(a-4)中的m3尤其优选为2或3。m3 in formula (a-4) is particularly preferably 2 or 3.
作为式(a-4)中的Ra5及Ra6可选择的碳原子数为1以上且10以下的烷基与作为Ra4可选择的碳原子数为1以上且10以下的烷基同样。The alkyl group having 1 or more and 10 or less carbon atoms that can be selected as R a5 and R a6 in formula (a-4) is the same as the alkyl group having 1 or more and 10 or less carbon atoms that can be selected as R a4 .
从四羧酸二酐的纯化容易的方面考虑,Ra5及Ra6优选为氢原子、或碳原子数为1以上且10以下(优选为1以上且6以下,更优选为1以上且5以下,进一步优选为1以上且4以下,尤其优选为1以上且3以下)的烷基,尤其优选为氢原子或甲基。From the viewpoint of easy purification of tetracarboxylic dianhydride, R a5 and R a6 are preferably hydrogen atoms, or have 1 or more and 10 or less carbon atoms (preferably 1 or more and 6 or less, more preferably 1 or more and 5 or less) , more preferably 1 or more and 4 or less, particularly preferably 1 or more and 3 or less) alkyl groups, particularly preferably a hydrogen atom or a methyl group.
作为式(a-4)表示的四羧酸二酐,例如,可举出降冰片烷-2-螺-α-环戊酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐(别名为“降冰片烷-2-螺-2’-环戊酮-5’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐”)、甲基降冰片烷-2-螺-α-环戊酮-α’-螺-2”-(甲基降冰片烷)-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环己酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐(别名为“降冰片烷-2-螺-2’-环己酮-6’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐”)、甲基降冰片烷-2-螺-α-环己酮-α’-螺-2”-(甲基降冰片烷)-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环丙酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环丁酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环庚酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环辛酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环壬酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环癸酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环十一烷酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环十二烷酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环十三烷酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环十四烷酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-环十五烷酮-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-(甲基环戊酮)-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐、降冰片烷-2-螺-α-(甲基环己酮)-α’-螺-2”-降冰片烷-5,5”,6,6”-四甲酸二酐等。Examples of the tetracarboxylic dianhydride represented by the formula (a-4) include norbornane-2-spiro-α-cyclopentanone-α'-spiro-2"-norbornane-5,5" , 6,6"-tetracarboxylic dianhydride (alias is "norbornane-2-spiro-2'-cyclopentanone-5'-spiro-2"-norbornane-5,5",6,6" -Tetracarboxylic dianhydride"), methylnorbornane-2-spiro-α-cyclopentanone-α'-spiro-2"-(methylnorbornane)-5,5",6,6"- Tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclohexanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride (alias "norbornane" Bornane-2-spiro-2'-cyclohexanone-6'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride"), methyl norbornane-2 -Spiro-α-cyclohexanone-α'-spiro-2"-(methylnorbornane)-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α- Cycloacetone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclobutanone-α'-spiro-2 "-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cycloheptanone-α'-spiro-2"-norbornane-5,5 ",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclooctanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic acid Dianhydride, norbornane-2-spiro-α-cyclononanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2- Spiro-α-cyclodecanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cycloundecanone -α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclododecanone-α'-spiro-2 "-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclotridecone-α'-spiro-2"-norbornane-5 , 5",6,6"-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclotetradecanone-α'-spiro-2"-norbornane-5,5",6,6 "-tetracarboxylic dianhydride, norbornane-2-spiro-α-cyclopentadecanone-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, Norbornane-2-spiro-α-(methylcyclopentanone)-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, norbornane-2 -Spiro-α-(methylcyclohexanone)-α'-spiro-2"-norbornane-5,5",6,6"-tetracarboxylic dianhydride, etc.
Cardo树脂(a-1)的重均分子量优选为1000以上且40000以下,更优选为1500以上且30000以下,进一步优选为2000以上且10000以下。通过使其在上述范围内,从而不仅能够得到良好的显影性,对于使用感光性树脂组合物形成的固化膜而言还能够得到充分的耐热性和机械强度。The weight average molecular weight of the Cardo resin (a-1) is preferably 1,000 or more and 40,000 or less, more preferably 1,500 or more and 30,000 or less, and further preferably 2,000 or more and 10,000 or less. By making it into the said range, not only favorable developability but also sufficient heat resistance and mechanical strength can be obtained with respect to the cured film formed using the photosensitive resin composition.
〔Novolac树脂(a-2)〕[Novolac resin (a-2)]
从容易形成不易因加热而过度地流动的固化膜的方面考虑,也优选碱溶性树脂(A)包含Novolac树脂(a-2)。It is also preferable that the alkali-soluble resin (A) contains the Novolac resin (a-2) from the viewpoint of easily forming a cured film that does not easily flow excessively by heating.
作为Novolac树脂(a-2),可以使用一直以来在感光性树脂组合物中配合的各种Novolac树脂。作为Novolac树脂(a-2),优选通过在酸催化剂下使具有酚式羟基的芳香族化合物(以下,简称为“酚类”。)与醛类进行加成缩合而得到。As the Novolac resin (a-2), various Novolac resins conventionally blended in the photosensitive resin composition can be used. The Novolac resin (a-2) is preferably obtained by addition-condensing an aromatic compound having a phenolic hydroxyl group (hereinafter, simply referred to as "phenols") and aldehydes under an acid catalyst.
(酚类)(Phenolics)
作为制作Novolac树脂(a-2)时使用的酚类,例如,可举出:苯酚;邻甲酚、间甲酚、对甲酚等甲酚类;2,3-二甲苯酚、2,4-二甲苯酚、2,5-二甲苯酚、2,6-二甲苯酚、3,4-二甲苯酚、3,5-二甲苯酚等二甲苯酚类;邻乙基苯酚、间乙基苯酚、对乙基苯酚等乙基酚类;2-异丙基苯酚、3-异丙基苯酚、4-异丙基苯酚、邻丁基苯酚、间丁基苯酚、对丁基苯酚、以及对叔丁基苯酚等烷基酚类;2,3,5-三甲基苯酚、及3,4,5-三甲基苯酚等三烷基酚类;间苯二酚、邻苯二酚、对苯二酚、对苯二酚单甲基醚、连苯三酚、及间苯三酚等多元酚类;烷基间苯二酚、烷基邻苯二酚、及烷基对苯二酚等烷基多元酚类(所有烷基的碳原子数均为1以上且4以下。);α-萘酚;β-萘酚;羟基联苯;以及双酚A;等等。这些酚类可以单独使用,也可以组合两种以上而使用。Examples of phenols used in preparing Novolac resin (a-2) include: phenol; cresols such as o-cresol, m-cresol, and p-cresol; 2,3-xylenol, 2,4 -Xylenols such as xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, 3,5-xylenol; o-ethylphenol, m-ethyl Ethyl phenols such as phenol, p-ethylphenol; 2-isopropylphenol, 3-isopropylphenol, 4-isopropylphenol, o-butylphenol, m-butylphenol, p-butylphenol, and p- Alkylphenols such as tert-butylphenol; 2,3,5-trimethylphenol, and trialkylphenols such as 3,4,5-trimethylphenol; resorcinol, catechol, p- Hydroquinone, hydroquinone monomethyl ether, pyrogallol, and phloroglucinol and other polyphenols; alkyl resorcinol, alkyl catechol, and alkyl hydroquinone, etc. Alkyl polyphenols (all alkyl groups have 1 or more and 4 or less carbon atoms.); α-naphthol; β-naphthol; hydroxybiphenyl; and bisphenol A; and the like. These phenols may be used alone or in combination of two or more.
这些酚类中,优选间甲酚及对甲酚,更优选并用间甲酚和对甲酚。该情况下,通过调节两者的配合比例,从而能够对使用感光性树脂组合物形成的固化膜的耐热性等各种特性进行调节。Among these phenols, m-cresol and p-cresol are preferred, and m-cresol and p-cresol are more preferably used in combination. In this case, various characteristics, such as heat resistance of the cured film formed using the photosensitive resin composition, can be adjusted by adjusting the mixing ratio of both.
间甲酚与对甲酚的配合比例没有特别限定,以间甲酚/对甲酚的摩尔比计,优选为3/7以上且8/2以下。通过以该范围的比率使用间甲酚及对甲酚,从而容易得到能够形成耐热性优异的固化膜的感光性树脂组合物。The compounding ratio of m-cresol and p-cresol is not particularly limited, but is preferably 3/7 or more and 8/2 or less in terms of the molar ratio of m-cresol/p-cresol. By using m-cresol and p-cresol in the ratio of this range, it becomes easy to obtain the photosensitive resin composition which can form a cured film excellent in heat resistance.
另外,并用间甲酚和2,3,5-三甲基苯酚而制造的Novolac树脂也是优选的。使用该Novolac树脂的情况下,尤其容易得到能够形成耐热性优异的固化膜的感光性树脂组合物。In addition, Novolac resin produced by using m-cresol and 2,3,5-trimethylphenol in combination is also preferable. When this Novolac resin is used, it becomes easy to obtain especially the photosensitive resin composition which can form the cured film excellent in heat resistance.
间甲酚与2,3,5-三甲基苯酚的配合比例没有特别限定,以间甲酚/2,3,5-三甲基苯酚的摩尔比计,优选为70/30以上且95/5以下。The compounding ratio of m-cresol and 2,3,5-trimethylphenol is not particularly limited, but in terms of the molar ratio of m-cresol/2,3,5-trimethylphenol, it is preferably 70/30 or more and 95/ 5 or less.
(醛类)(Aldehydes)
作为制作Novolac树脂(a-2)时使用的醛类,例如,可举出甲醛、多聚甲醛、糠醛、苯甲醛、硝基苯甲醛、及乙醛等。这些醛类可以单独使用,也可以组合两种以上而使用。Examples of aldehydes used for preparing Novolac resin (a-2) include formaldehyde, paraformaldehyde, furfural, benzaldehyde, nitrobenzaldehyde, and acetaldehyde. These aldehydes may be used alone or in combination of two or more.
(酸催化剂)(acid catalyst)
作为制作Novolac树脂(a-2)时使用的酸催化剂,例如,可举出:盐酸、硫酸、硝酸、磷酸、及亚磷酸等无机酸类;甲酸、草酸、乙酸、二乙基硫酸、及对甲苯磺酸等有机酸类;以及乙酸锌等金属盐类;等等。这些酸催化剂可以单独使用,也可以组合两种以上而使用。Examples of acid catalysts used in the preparation of Novolac resin (a-2) include inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid, and phosphorous acid; formic acid, oxalic acid, acetic acid, diethylsulfuric acid, and parabens. Organic acids such as toluenesulfonic acid; and metal salts such as zinc acetate; etc. These acid catalysts may be used alone or in combination of two or more.
(分子量)(molecular weight)
就Novolac树脂(a-2)的按照聚苯乙烯换算的重均分子量(Mw;以下,也简称为“重均分子量”。)而言,从使用感光性树脂组合物形成的固化膜的耐热性的观点考虑,作为下限值,优选2000,更优选5000,尤其优选10000,进一步优选15000,最优选20000,作为上限值,优选50000,更优选45000,进一步优选40000,最优选35000。The weight average molecular weight (Mw; hereinafter, also simply referred to as "weight average molecular weight") in terms of polystyrene of Novolac resin (a-2), from the heat resistance of the cured film formed using the photosensitive resin composition From the viewpoint of properties, the lower limit is preferably 2,000, more preferably 5,000, particularly preferably 10,000, more preferably 15,000, and most preferably 20,000, and the upper limit is preferably 50,000, more preferably 45,000, still more preferably 40,000, and most preferably 35,000.
作为Novolac树脂(a-2),可以将按照聚苯乙烯换算的重均分子量不同的至少两种Novolac树脂组合而使用。通过将重均分子量大小不同的Novolac树脂组合使用,从而能够获得感光性树脂组合物的显影性、与使用感光性树脂组合物形成的固化膜的耐热性的均衡性。As the Novolac resin (a-2), at least two kinds of Novolac resins having different weight average molecular weights in terms of polystyrene can be used in combination. By using Novolac resins having different weight average molecular weights in combination, it is possible to obtain a balance between the developability of the photosensitive resin composition and the heat resistance of the cured film formed using the photosensitive resin composition.
〔改性环氧树脂(a-3)〕[Modified epoxy resin (a-3)]
碱溶性树脂(A)可以包含作为环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)的产物的、多元酸酐(a-3c)加成物(a-3)。关于该加成物,也记为“改性环氧树脂(a-3)”。The alkali-soluble resin (A) may contain a polybasic acid anhydride (a-3c) adduct (a-3) which is a product of an epoxy compound (a-3a) and an unsaturated group-containing carboxylic acid (a-3b) . This adduct is also described as "modified epoxy resin (a-3)".
需要说明的是,本申请的说明书及权利要求书中,将符合上述定义、但不属于上述的具有Cardo结构的树脂(a-1)的化合物作为改性环氧树脂(a-3)。It should be noted that, in the specification and claims of the present application, a compound that satisfies the above definition but does not belong to the above-mentioned resin (a-1) having a Cardo structure is referred to as a modified epoxy resin (a-3).
以下,对环氧化合物(a-3a)、含有不饱和基团的羧酸(a-3b)、及多元酸酐(a-3c)进行说明。Hereinafter, the epoxy compound (a-3a), the unsaturated group-containing carboxylic acid (a-3b), and the polybasic acid anhydride (a-3c) will be described.
<环氧化合物(a-3a)><Epoxy compound (a-3a)>
环氧化合物(a-3a)只要为具有环氧基的化合物,则没有特别限定,可以为具有芳香族基团的芳香族环氧化合物,也可以为不含芳香族基团的脂肪族环氧化合物,优选为具有芳香族基团的芳香族环氧化合物。The epoxy compound (a-3a) is not particularly limited as long as it is a compound having an epoxy group, and may be an aromatic epoxy compound having an aromatic group or an aliphatic epoxy compound not containing an aromatic group The compound is preferably an aromatic epoxy compound having an aromatic group.
环氧化合物(a-3a)可以为单官能环氧化合物,也可以为2官能以上的多官能环氧化合物,优选为多官能环氧化合物。The epoxy compound (a-3a) may be a monofunctional epoxy compound or a polyfunctional epoxy compound of bifunctional or more, but a polyfunctional epoxy compound is preferable.
作为环氧化合物(a-3a)的具体例,可举出双酚A型环氧树脂、双酚F型环氧树脂、双酚S型环氧树脂、双酚AD型环氧树脂、萘型环氧树脂、及联苯型环氧树脂等2官能环氧树脂;二聚酸缩水甘油酯、及三缩水甘油酯等缩水甘油酯型环氧树脂;四缩水甘油基氨基二苯基甲烷、三缩水甘油基对氨基苯酚、四缩水甘油基间苯二甲胺、及四缩水甘油基双氨基甲基环己烷等缩水甘油胺型环氧树脂;异氰脲酸三缩水甘油酯等杂环式环氧树脂;间苯三酚三缩水甘油醚、三羟基联苯三缩水甘油醚、三羟基苯基甲烷三缩水甘油醚、丙三醇三缩水甘油醚、2-[4-(2,3-环氧丙氧基)苯基]-2-[4-[1,1-双[4-(2,3-环氧丙氧基)苯基]乙基]苯基]丙烷、及1,3-双[4-[1-[4-(2,3-环氧丙氧基)苯基]-1-[4-[1-[4-(2,3-环氧丙氧基)苯基]-1-甲基乙基]苯基]乙基]苯氧基]-2-丙醇等3官能型环氧树脂;四羟基苯基乙烷四缩水甘油醚、四缩水甘油基二苯甲酮、双间苯二酚四缩水甘油醚、及四环氧丙氧基联苯等4官能型环氧树脂。Specific examples of the epoxy compound (a-3a) include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin, and naphthalene type epoxy resin. Epoxy resins, biphenyl type epoxy resins and other bifunctional epoxy resins; dimer acid glycidyl esters, triglycidyl esters and other glycidyl ester type epoxy resins; tetraglycidylaminodiphenylmethane, triglycidyl Glycidyl amine epoxy resins such as glycidyl p-aminophenol, tetraglycidyl m-xylylenediamine, and tetraglycidyl bisaminomethyl cyclohexane; heterocyclic epoxy resins such as triglycidyl isocyanurate Epoxy resins; phloroglucinol triglycidyl ether, trihydroxybiphenyl triglycidyl ether, trihydroxyphenylmethane triglycidyl ether, glycerol triglycidyl ether, 2-[4-(2,3- Glycidoxy)phenyl]-2-[4-[1,1-bis[4-(2,3-glycidoxy)phenyl]ethyl]phenyl]propane, and 1,3 -Bis[4-[1-[4-(2,3-glycidoxy)phenyl]-1-[4-[1-[4-(2,3-glycidoxy)phenyl ]-1-methylethyl]phenyl]ethyl]phenoxy]-2-propanol and other 3-functional epoxy resins; tetrahydroxyphenylethane tetraglycidyl ether, tetraglycidyl diphenylmethane Ketones, bis-resorcinol tetraglycidyl ether, and tetra-functional epoxy resins such as tetraglycidoxybiphenyl.
另外,作为环氧化合物(a-3a),优选具有联苯骨架的环氧化合物。Moreover, as an epoxy compound (a-3a), the epoxy compound which has a biphenyl skeleton is preferable.
具有联苯骨架的环氧化合物优选在主链具有至少一个以上的下述式(a-3a-1)表示的联苯骨架。The epoxy compound having a biphenyl skeleton preferably has at least one biphenyl skeleton represented by the following formula (a-3a-1) in the main chain.
具有联苯骨架的环氧化合物优选为具有2个以上的环氧基的多官能环氧化合物。The epoxy compound having a biphenyl skeleton is preferably a polyfunctional epoxy compound having two or more epoxy groups.
通过使用具有联苯骨架的环氧化合物,从而容易得到敏感度与显影性的均衡性优异、且能够形成与基板的密合性优异的固化膜的树脂组合物。By using the epoxy compound which has a biphenyl skeleton, it becomes easy to obtain the resin composition which is excellent in the balance of sensitivity and developability, and can form a cured film which is excellent in the adhesiveness with a board|substrate.
[化学式11][Chemical formula 11]
(式(a-3a-1)中,Ra7各自独立地为氢原子、碳原子数为1以上且12以下的烷基、卤素原子、或可具有取代基的苯基,j为1以上且4以下的整数。)(In formula (a-3a-1), R a7 is each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, a halogen atom, or an optionally substituted phenyl group, and j is 1 or more and an integer less than 4.)
Ra7为碳原子数为1以上且12以下的烷基时,作为烷基的具体例,可举出甲基、乙基、正丙基、异丙基、正丁基、异丁基、仲丁基、叔丁基、正戊基、异戊基、仲戊基、叔戊基、正己基、正庚基、正辛基、异辛基、仲辛基、叔辛基、正壬基、异壬基、正癸基、异癸基、正十一烷基、及正十二烷基。When R a7 is an alkyl group having 1 or more and 12 or less carbon atoms, specific examples of the alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec- Butyl, tert-butyl, n-pentyl, isopentyl, sec-pentyl, tert-amyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n-nonyl, Isononyl, n-decyl, isodecyl, n-undecyl, and n-dodecyl.
Ra7为卤素原子时,作为卤素原子的具体例,可举出氟原子、氯原子、溴原子、及碘原子。When R a7 is a halogen atom, specific examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Ra7为可具有取代基的苯基时,苯基上的取代基的数目没有特别限定。苯基上的取代基的数目为0以上且5以下,优选为0或1。When R a7 is an optionally substituted phenyl group, the number of substituents on the phenyl group is not particularly limited. The number of substituents on the phenyl group is 0 or more and 5 or less, preferably 0 or 1.
作为取代基的例子,可举出碳原子数为1以上且4以下的烷基、碳原子数为1以上且4以下的烷氧基、碳原子数为2以上且4以下的脂肪族酰基、卤素原子、氰基、及硝基。Examples of the substituent include an alkyl group having 1 or more and 4 or less carbon atoms, an alkoxy group having 1 or more and 4 or less carbon atoms, an aliphatic acyl group having 2 or more and 4 or less carbon atoms, Halogen atom, cyano group, and nitro group.
作为具有上述式(a-3a-1)表示的联苯骨架的环氧化合物(a-3a),没有特别限定,例如,可举出下述式(a-3a-2)表示的环氧化合物。Although it does not specifically limit as epoxy compound (a-3a) which has a biphenyl skeleton represented by said formula (a-3a-1), For example, the epoxy compound represented by following formula (a-3a-2) is mentioned .
[化学式12][Chemical formula 12]
(式(a-3a-2)中,对于Ra7及j而言,与式(a-3a-1)同样,k为括号内的结构单元的平均重复数,为0以上且10以下。)(In formula (a-3a-2), for R a7 and j, as in formula (a-3a-1), k is the average number of repetitions of the structural unit in the parentheses, and is 0 or more and 10 or less.)
式(a-3a-2)表示的环氧化合物中,从特别容易得到敏感度与显影性的均衡性优异的感光性树脂组合物的方面考虑,优选下述式(a-3a-3)表示的化合物。Among the epoxy compounds represented by the formula (a-3a-2), those represented by the following formula (a-3a-3) are preferred from the viewpoint of being particularly easy to obtain a photosensitive resin composition excellent in the balance of sensitivity and developability compound of.
[化学式13][Chemical formula 13]
(式(a-3a-3)中,就k而言,与式(a-3a-2)同样。)(In formula (a-3a-3), it is the same as formula (a-3a-2) with respect to k.)
(含有不饱和基团的羧酸(a-3b))(Carboxylic acid (a-3b) containing an unsaturated group)
在制备改性环氧化合物(a-3)时,使环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)反应。In preparing the modified epoxy compound (a-3), the epoxy compound (a-3a) is reacted with the unsaturated group-containing carboxylic acid (a-3b).
作为含有不饱和基团的羧酸(a-3b),优选在分子中含有丙烯酸系基团、甲基丙烯酸系基团等反应性的不饱和双键的一元羧酸。作为这样的含有不饱和基团的羧酸,例如,可举出丙烯酸、甲基丙烯酸、β-苯乙烯基丙烯酸、β-糠基丙烯酸、α-氰基肉桂酸、肉桂酸等。另外,含有不饱和基团的羧酸(a-3b)可以单独使用或组合两种以上而使用。The unsaturated group-containing carboxylic acid (a-3b) is preferably a monocarboxylic acid containing reactive unsaturated double bonds such as an acrylic group and a methacrylic group in the molecule. Examples of such unsaturated group-containing carboxylic acids include acrylic acid, methacrylic acid, β-styryl acrylic acid, β-furfuryl acrylic acid, α-cyanocinnamic acid, and cinnamic acid. In addition, the unsaturated group-containing carboxylic acid (a-3b) may be used alone or in combination of two or more.
可利用已知的方法使环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)反应。作为优选的反应方法,例如可举出下述方法:将三乙胺、苄基乙基胺等叔胺、十二烷基三甲基氯化铵、四甲基氯化铵、四乙基氯化铵、苄基三乙基氯化铵等季铵盐、吡啶、或三苯基膦等作为催化剂,在有机溶剂中,于50℃以上且150℃以下的反应温度,使环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)进行数小时以上且数十小时以下的反应。The epoxy compound (a-3a) can be reacted with the unsaturated group-containing carboxylic acid (a-3b) by a known method. Preferable reaction methods include, for example, a method in which tertiary amines such as triethylamine and benzylethylamine, dodecyltrimethylammonium chloride, tetramethylammonium chloride, tetraethylchloride A quaternary ammonium salt such as ammonium chloride, benzyltriethylammonium chloride, pyridine, or triphenylphosphine, etc., is used as a catalyst in an organic solvent at a reaction temperature of 50°C or higher and 150°C or lower, and the epoxy compound (a) -3a) Reaction with unsaturated group-containing carboxylic acid (a-3b) for several hours or more and several tens of hours or less.
就环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)的反应中的两者的使用量的比率而言,以环氧化合物(a-3a)的环氧当量、与含有不饱和基团的羧酸(a-3b)的羧酸当量之比计,通常优选为1∶0.5~1∶2,更优选为1∶0.8~1∶1.25,尤其优选为1∶0.9~1∶1.1。In terms of the ratio of the amount of use of both in the reaction of the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b), the epoxy equivalent of the epoxy compound (a-3a) , and the carboxylic acid equivalent ratio of the unsaturated group-containing carboxylic acid (a-3b), usually preferably 1:0.5 to 1:2, more preferably 1:0.8 to 1:1.25, especially preferably 1:1 0.9 to 1:1.1.
环氧化合物(a-3a)的使用量与含有不饱和基团的羧酸(a-3b)的使用量的比率以上述当量比计为1∶0.5~1∶2时,有交联效率提高的倾向,是优选的。When the ratio of the use amount of the epoxy compound (a-3a) to the use amount of the unsaturated group-containing carboxylic acid (a-3b) is 1:0.5 to 1:2 in terms of the above-mentioned equivalent ratio, the crosslinking efficiency is improved Tendency is preferred.
(多元酸酐(a-3c))(polybasic acid anhydride (a-3c))
多元酸酐(a-3c)为具有2个以上羧基的羧酸的酸酐。The polybasic acid anhydride (a-3c) is an acid anhydride of a carboxylic acid having two or more carboxyl groups.
作为多元酸酐(a-3c),没有特别限定,例如,可举出马来酸酐、琥珀酸酐、衣康酸酐、邻苯二甲酸酐、四氢邻苯二甲酸酐、六氢邻苯二甲酸酐、甲基六氢邻苯二甲酸酐、甲基四氢邻苯二甲酸酐、偏苯三酸酐、均苯四甲酸酐、二苯甲酮四甲酸二酐、3-甲基六氢邻苯二甲酸酐、4-甲基六氢邻苯二甲酸酐、3-乙基六氢邻苯二甲酸酐、4-乙基六氢邻苯二甲酸酐、四氢邻苯二甲酸酐、3-甲基四氢邻苯二甲酸酐、4-甲基四氢邻苯二甲酸酐、3-乙基四氢邻苯二甲酸酐、4-乙基四氢邻苯二甲酸酐、下述式(a-3c-1)表示的化合物、及下述式(a-3c-2)表示的化合物。另外,多元酸酐(a-3c)可以单独使用或组合两种以上而使用。Although it does not specifically limit as polybasic acid anhydride (a-3c), For example, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride can be mentioned , Methylhexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, 3-methylhexahydrophthalic anhydride, 4-Methylhexahydrophthalic anhydride, 3-ethylhexahydrophthalic anhydride, 4-ethylhexahydrophthalic anhydride, tetrahydrophthalic anhydride, 3-methyltetrahydrophthalic anhydride Phthalic anhydride, 4-methyltetrahydrophthalic anhydride, 3-ethyltetrahydrophthalic anhydride, 4-ethyltetrahydrophthalic anhydride, the following formula (a-3c- The compound represented by 1) and the compound represented by the following formula (a-3c-2). Moreover, polybasic acid anhydride (a-3c) can be used individually or in combination of 2 or more types.
[化学式14][Chemical formula 14]
(式(a-3c-2)中,Ra8表示碳原子数为1以上且10以下的可具有取代基的亚烷基。)(In formula (a-3c-2), R a8 represents an optionally substituted alkylene group having 1 or more and 10 or less carbon atoms.)
作为多元酸酐(a-3c),从容易得到敏感度与显影性的均衡性优异的感光性树脂组合物的方面考虑,优选具有2个以上苯环的化合物。另外,多元酸酐(a-3c)更优选包含上述式(a-3c-1)表示的化合物、及上述式(a-3c-2)表示的化合物中的至少一者。As the polybasic acid anhydride (a-3c), a compound having two or more benzene rings is preferable because it is easy to obtain a photosensitive resin composition having excellent balance between sensitivity and developability. Moreover, it is more preferable that the polybasic acid anhydride (a-3c) contains at least one of the compound represented by said formula (a-3c-1) and the compound represented by said formula (a-3c-2).
在使环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)反应后、使多元酸酐(a-3c)反应的方法可以从已知的方法中适当选择。After reacting the epoxy compound (a-3a) with the unsaturated group-containing carboxylic acid (a-3b), the method of reacting the polybasic acid anhydride (a-3c) can be appropriately selected from known methods.
另外,就使用量比而言,以环氧化合物(a-3a)与含有不饱和基团的羧酸(a-3b)的反应后的成分中的OH基的摩尔数、与多元酸酐(a-3c)的酸酐基的当量比计,通常为1∶1~1∶0.1,优选为1∶0.8~1∶0.2。通过使其在上述范围内,容易得到显影性良好的感光性树脂组合物。In addition, in terms of the usage ratio, the number of moles of the OH group in the component after the reaction of the epoxy compound (a-3a) and the unsaturated group-containing carboxylic acid (a-3b), and the number of moles of the polybasic acid anhydride (a-3b) The equivalent ratio of the acid anhydride group of -3c) is usually 1:1 to 1:0.1, preferably 1:0.8 to 1:0.2. By making it into the said range, it becomes easy to obtain the photosensitive resin composition with favorable developability.
另外,就改性环氧树脂(a-3)的酸值而言,以树脂固态成分计,优选为10mgKOH/g以上且150mgKOH/g以下,更优选为70mgKOH/g以上且110mgKOH/g以下。通过使树脂的酸值为10mgKOH/g以上,可获得在显影液中充分的溶解性,另外,通过使酸值为150mgKOH/g以下,能够获得充分的固化性,能够使表面性良好。In addition, the acid value of the modified epoxy resin (a-3) is preferably 10 mgKOH/g or more and 150 mgKOH/g or less, more preferably 70 mgKOH/g or more and 110 mgKOH/g or less, in terms of resin solid content. By making the acid value of the resin 10 mgKOH/g or more, sufficient solubility in a developer can be obtained, and by making the acid value 150 mgKOH/g or less, sufficient curability can be obtained and surface properties can be improved.
另外,改性环氧树脂(a-3)的重均分子量优选为1000以上且40000以下,更优选为2000以上且30000以下。通过使重均分子量为1000以上,容易形成耐热性及强度优异的固化膜。另外,通过使重均分子量为40000以下,容易得到显示在显影液中充分的溶解性的感光性树脂组合物。In addition, the weight average molecular weight of the modified epoxy resin (a-3) is preferably 1,000 or more and 40,000 or less, and more preferably 2,000 or more and 30,000 or less. By making the weight average molecular weight 1000 or more, it becomes easy to form a cured film excellent in heat resistance and strength. Moreover, by making a weight average molecular weight into 40000 or less, it becomes easy to obtain the photosensitive resin composition which shows sufficient solubility in a developing solution.
〔丙烯酸系树脂(a-4)〕[Acrylic resin (a-4)]
丙烯酸系树脂(a-4)也优选作为构成碱溶性树脂(A)的成分。The acrylic resin (a-4) is also preferable as a component constituting the alkali-soluble resin (A).
作为丙烯酸系树脂(a-4),可使用包含来自(甲基)丙烯酸的结构单元、及/或来自(甲基)丙烯酸酯等其他单体的结构单元的树脂。(甲基)丙烯酸为丙烯酸、或甲基丙烯酸。(甲基)丙烯酸酯为下述式(a-4-1)表示的物质,只要不妨碍本发明的目的则没有特别限定。As the acrylic resin (a-4), a resin containing a structural unit derived from (meth)acrylic acid and/or a structural unit derived from other monomers such as (meth)acrylate can be used. (Meth)acrylic acid is acrylic acid or methacrylic acid. The (meth)acrylate is represented by the following formula (a-4-1), and is not particularly limited unless the object of the present invention is inhibited.
[化学式15][Chemical formula 15]
上述式(a-4-1)中,Ra9为氢原子或甲基,Ra10为一价的有机基团。就该有机基团而言,可以在该有机基团中包含杂原子等除烃基以外的键、取代基。另外,该有机基团可以为直链状、支链状、环状中的任一种。In the above formula (a-4-1), R a9 is a hydrogen atom or a methyl group, and R a10 is a monovalent organic group. The organic group may contain a bond other than a hydrocarbon group such as a hetero atom or a substituent, in the organic group. In addition, the organic group may be linear, branched, or cyclic.
作为Ra10的有机基团中的除烃基以外的取代基,只要不损害本发明的效果,则没有特别限定,可举出卤素原子、羟基、巯基、硫醚基、氰基、异氰基、氰酸酯基、异氰酸酯基、硫氰酸酯基、异硫氰酸酯基、甲硅烷基、硅烷醇基、烷氧基、烷氧基羰基、氨基甲酰基、硫代氨基甲酰基、硝基、亚硝基、羧基、羧酸盐/酯基、酰基、酰氧基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、羟基亚氨基、烷基醚基、烷基硫醚基、芳基醚基、芳基硫醚基、氨基(-NH2、-NHR、-NRR’:R及R’各自独立地表示烃基)等。上述取代基中包含的氢原子可被烃基取代。另外,上述取代基中包含的烃基可以为直链状、支链状、及环状中的任一种。The substituents other than the hydrocarbon group in the organic group of R a10 are not particularly limited as long as the effects of the present invention are not impaired, and examples thereof include halogen atoms, hydroxyl groups, mercapto groups, thioether groups, cyano groups, isocyano groups, Cyanate group, isocyanate group, thiocyanate group, isothiocyanate group, silyl group, silanol group, alkoxy group, alkoxycarbonyl group, carbamoyl group, thiocarbamoyl group, nitro group , nitroso, carboxyl, carboxylate/ester, acyl, acyloxy, sulfinyl, sulfo, sulfonate/ester, phosphino, phosphinyl, phosphono, phosphonate/ester , hydroxyimino group, alkyl ether group, alkyl sulfide group, aryl ether group, aryl sulfide group, amino group (-NH 2 , -NHR, -NRR': R and R' each independently represent a hydrocarbon group) Wait. Hydrogen atoms contained in the above-mentioned substituents may be substituted with hydrocarbon groups. Moreover, the hydrocarbon group contained in the said substituent may be any of linear, branched, and cyclic.
另外,作为Ra10的有机基团可以具有丙烯酰氧基、甲基丙烯酰氧基、环氧基、氧杂环丁基等反应性官能团。In addition, the organic group as R a10 may have a reactive functional group such as an acryloyloxy group, a methacryloyloxy group, an epoxy group, and an oxetanyl group.
丙烯酰氧基、甲基丙烯酰氧基等具有不饱和双键等的酰基例如可通过下述方式制造:使不饱和羧酸(丙烯酸、甲基丙烯酸等)与包含具有环氧基的结构单元的丙烯酸系树脂(a-4)中的至少一部分环氧基反应。Acyl groups such as acryloyloxy groups and methacryloyloxy groups having unsaturated double bonds and the like can be produced, for example, by combining an unsaturated carboxylic acid (acrylic acid, methacrylic acid, etc.) with a structural unit including an epoxy group. At least a part of the epoxy groups in the acrylic resin (a-4) reacted.
另外,针对丙烯酸系树脂(a-4)所具有的、来自丙烯酸、甲基丙烯酸等不饱和羧酸的结构单元,使其与具有环氧基和不饱和双键的化合物反应,由此能够向丙烯酸系树脂(a-4)中导入不饱和双键。作为具有环氧基和不饱和双键的化合物,例如,可以使用(甲基)丙烯酸缩水甘油酯、后述的式(a-4-1a)~(a-4-1o)表示的化合物。In addition, the structural unit derived from unsaturated carboxylic acid such as acrylic acid and methacrylic acid, which is contained in the acrylic resin (a-4), can be reacted with a compound having an epoxy group and an unsaturated double bond. An unsaturated double bond is introduced into the acrylic resin (a-4). As a compound which has an epoxy group and an unsaturated double bond, the compound represented by glycidyl (meth)acrylate and formula (a-4-1a)-(a-4-1o) mentioned later can be used, for example.
作为Ra10,优选烷基、芳基、芳烷基、或杂环基,这些基团也可以被卤素原子、羟基、烷基、或杂环基取代。另外,在这些基团含有亚烷基部分的情况下,亚烷基部分可以被醚键、硫醚键、酯键中断。As R a10 , an alkyl group, an aryl group, an aralkyl group, or a heterocyclic group is preferable, and these groups may be substituted by a halogen atom, a hydroxyl group, an alkyl group, or a heterocyclic group. In addition, in the case where these groups contain an alkylene moiety, the alkylene moiety may be interrupted by an ether bond, a thioether bond, or an ester bond.
烷基为直链状或支链状时,其碳原子数优选为1以上且20以下,更优选为1以上且15以下,尤其优选为1以上且10以下。作为优选的烷基的例子,可举出甲基、乙基、正丙基、异丙基、正丁基、异丁基、仲丁基、叔丁基、正戊基、异戊基、仲戊基、叔戊基、正己基、正庚基、正辛基、异辛基、仲辛基、叔辛基、正壬基、异壬基、正癸基、异癸基等。When the alkyl group is linear or branched, the number of carbon atoms is preferably 1 or more and 20 or less, more preferably 1 or more and 15 or less, and particularly preferably 1 or more and 10 or less. Examples of preferable alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, isopentyl, sec- Amyl, tert-amyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n-nonyl, isononyl, n-decyl, isodecyl, etc.
烷基为脂环式基团、或包含脂环式基团的基团时,作为烷基中包含的优选的脂环式基团,可举出环戊基及环己基等单环脂环式基团、金刚烷基、降冰片基、异冰片基、三环壬基、三环癸基、及四环十二烷基等多环脂环式基团。When the alkyl group is an alicyclic group or a group containing an alicyclic group, preferable alicyclic groups included in the alkyl group include monocyclic alicyclic groups such as cyclopentyl and cyclohexyl. group, adamantyl, norbornyl, isobornyl, tricyclononyl, tricyclodecyl, and polycyclic alicyclic groups such as tetracyclododecyl.
关于式(a-4-1)表示的化合物包含具有环氧基的链状基团作为Ra10时的、式(a-4-1)表示的化合物的具体例,可举出(甲基)丙烯酸缩水甘油酯、(甲基)丙烯酸2-甲基缩水甘油酯、(甲基)丙烯酸3,4-环氧基丁酯、(甲基)丙烯酸6,7-环氧基庚酯等(甲基)丙烯酸环氧基烷基酯类。( Methyl ) Glycidyl acrylate, 2-methyl glycidyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, 6,7-epoxyheptyl (meth)acrylate, etc. (meth) base) epoxy alkyl acrylates.
另外,式(a-4-1)表示的化合物可以为含有脂环式环氧基的(甲基)丙烯酸酯。构成脂环式环氧基的脂环式基团可以为单环也可以为多环。作为单环脂环式基团,可举出环戊基、环己基等。另外,作为多环脂环式基团,可举出降冰片基、异冰片基、三环壬基、三环癸基、四环十二烷基等。In addition, the compound represented by formula (a-4-1) may be an alicyclic epoxy group-containing (meth)acrylate. The alicyclic group constituting the alicyclic epoxy group may be monocyclic or polycyclic. As a monocyclic alicyclic group, a cyclopentyl group, a cyclohexyl group, etc. are mentioned. Moreover, as a polycyclic alicyclic group, a norbornyl group, an isobornyl group, a tricyclononyl group, a tricyclodecyl group, a tetracyclododecyl group, etc. are mentioned.
作为式(a-4-1)表示的化合物为含有脂环式环氧基的(甲基)丙烯酸酯时的具体例,例如可举出下述式(a-4-1a)~(a-4-1o)表示的化合物。这些之中,为了使显影性适度,优选下述式(a-4-1a)~(a-4-1e)表示的化合物,更优选下述式(a-4-1a)~(a-4-1c)表示的化合物。Specific examples when the compound represented by the formula (a-4-1) is an alicyclic epoxy group-containing (meth)acrylate include the following formulae (a-4-1a) to (a- The compound represented by 4-1o). Among these, the compounds represented by the following formulae (a-4-1a) to (a-4-1e) are preferred, and the following formulae (a-4-1a) to (a-4) are more preferred in order to moderate the developability. A compound represented by -1c).
[化学式16][Chemical formula 16]
[化学式17][Chemical formula 17]
[化学式18][Chemical formula 18]
上述式中,Ra20表示氢原子或甲基,Ra21表示碳原子数为1以上且6以下的二价的脂肪族饱和烃基,Ra22表示碳原子数为1以上且10以下的二价的烃基,t表示0以上且1O以下的整数。作为Ra21,优选直链状或支链状的亚烷基,例如亚甲基、亚乙基、亚丙基、四亚甲基、乙基亚乙基、五亚甲基、六亚甲基。作为Ra22,例如优选亚甲基、亚乙基、亚丙基、四亚甲基、乙基亚乙基、五亚甲基、六亚甲基、亚苯基、亚环己基、-CH2-Ph-CH2-(Ph表示亚苯基)。In the above formula, R a20 represents a hydrogen atom or a methyl group, R a21 represents a divalent aliphatic saturated hydrocarbon group having 1 or more and 6 or less carbon atoms, and R a22 represents a divalent carbon number of 1 or more and 10 or less. In the hydrocarbon group, t represents an integer of 0 or more and 10 or less. As R a21 , linear or branched alkylene groups such as methylene, ethylene, propylene, tetramethylene, ethylethylene, pentamethylene, and hexamethylene are preferred . As R a22 , for example, a methylene group, an ethylene group, a propylene group, a tetramethylene group, an ethylethylene group, a pentamethylene group, a hexamethylene group, a phenylene group, a cyclohexylene group, and -CH 2 are preferable. -Ph-CH 2 - (Ph represents phenylene).
另外,丙烯酸系树脂(a-4)也可以是聚合有(甲基)丙烯酸酯以外的单体而得到的产物。作为这样的单体,可举出(甲基)丙烯酰胺类、不饱和羧酸类、烯丙基化合物、乙烯基醚类、乙烯酯类、苯乙烯类等。这些单体可以单独使用或组合两种以上而使用。In addition, the acrylic resin (a-4) may be obtained by polymerizing monomers other than (meth)acrylates. Examples of such monomers include (meth)acrylamides, unsaturated carboxylic acids, allyl compounds, vinyl ethers, vinyl esters, styrenes, and the like. These monomers can be used alone or in combination of two or more.
作为(甲基)丙烯酰胺类,可举出(甲基)丙烯酰胺、N-烷基(甲基)丙烯酰胺、N-芳基(甲基)丙烯酰胺、N,N-二烷基(甲基)丙烯酰胺、N,N-二芳基(甲基)丙烯酰胺、N-甲基-N-苯基(甲基)丙烯酰胺、N-羟基乙基-N-甲基(甲基)丙烯酰胺等。Examples of (meth)acrylamides include (meth)acrylamides, N-alkyl (meth)acrylamides, N-aryl (meth)acrylamides, N,N-dialkyl (meth)acrylamides yl) acrylamide, N,N-diaryl(meth)acrylamide, N-methyl-N-phenyl(meth)acrylamide, N-hydroxyethyl-N-methyl(meth)propene amide, etc.
作为不饱和羧酸类,可举出丁烯酸等一元羧酸;马来酸、富马酸、柠康酸、中康酸、衣康酸等二羧酸;这些二羧酸的酸酐;等等。Examples of unsaturated carboxylic acids include monocarboxylic acids such as crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; acid anhydrides of these dicarboxylic acids; Wait.
作为烯丙基化合物,可举出乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕榈酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙酰乙酸烯丙酯、乳酸烯丙酯等烯丙基酯类;烯丙基氧基乙醇;等等。Examples of the allyl compound include allyl acetate, allyl hexanoate, allyl octoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, Allyl esters such as allyl acetoacetate and allyl lactate; allyloxyethanol; and the like.
作为乙烯基醚类,可举出己基乙烯基醚、辛基乙烯基醚、癸基乙烯基醚、乙基己基乙烯基醚、甲氧基乙基乙烯基醚、乙氧基乙基乙烯基醚、氯乙基乙烯基醚、1-甲基-2,2-二甲基丙基乙烯基醚、2-乙基丁基乙烯基醚、羟基乙基乙烯基醚、二乙二醇乙烯基醚、二甲基氨基乙基乙烯基醚、二乙基氨基乙基乙烯基醚、丁基氨基乙基乙烯基醚、苄基乙烯基醚、四氢糠基乙烯基醚等烷基乙烯基醚;乙烯基苯基醚、乙烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等乙烯基芳基醚;等等。Examples of vinyl ethers include hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, and ethoxyethyl vinyl ether , chloroethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether , dimethylaminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether and other alkyl vinyl ethers; Vinyl phenyl ether, vinyl cresyl ether, vinyl chlorophenyl ether, vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether, vinyl anthracenyl ether and other vinyl aryl ethers; and many more.
作为乙烯基酯类,可举出丁酸乙烯酯、异丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯(vinyl valerate)、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙酰乙酸乙烯酯、乳酸乙烯酯、β-苯基丁酸乙烯酯、苯甲酸乙烯酯、水杨酸乙烯酯、氯苯甲酸乙烯酯、四氯苯甲酸乙烯酯、萘甲酸乙烯酯等。Examples of vinyl esters include vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, diethyl vinyl acetate, vinyl valerate, vinyl hexanoate, and chloroacetic acid. Vinyl Esters, Vinyl Dichloroacetate, Vinyl Methoxy Vinyl Acetate, Vinyl Butoxy Vinyl Acetate, Phenyl Vinyl Acetate, Vinyl Acetoacetate, Vinyl Lactate, Vinyl Beta-Phenyl Butyrate, Vinyl Benzoate ester, vinyl salicylate, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthoate, etc.
作为苯乙烯类,可举出苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、异丙基苯乙烯、丁基苯乙烯、己基苯乙烯、环己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙酰氧基甲基苯乙烯等烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等卤代苯乙烯;等等。Styrenes include styrene; methylstyrene, dimethylstyrene, trimethylstyrene, ethylstyrene, diethylstyrene, isopropylstyrene, butylstyrene, Alkyl such as hexylstyrene, cyclohexylstyrene, decylstyrene, benzylstyrene, chloromethylstyrene, trifluoromethylstyrene, ethoxymethylstyrene, acetoxymethylstyrene, etc. Styrene; alkoxystyrene such as methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene; chlorostyrene, dichlorostyrene, trichlorostyrene, tetrachlorostyrene Chlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodostyrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3- Halogenated styrenes such as trifluoromethylstyrene; etc.
就丙烯酸系树脂(a-4)中的来自(甲基)丙烯酸的结构单元的量、和来自其他单体的结构单元的量而言,在不妨碍本发明的目的的范围内即可,没有特别限定。相对于丙烯酸系树脂(a-4)的全部结构单元的摩尔数而言,丙烯酸系树脂(a-4)中的来自(甲基)丙烯酸的结构单元的量优选为5摩尔%以上且50摩尔%以下,更优选为10摩尔%以上且30摩尔%以下。The amount of the structural unit derived from (meth)acrylic acid and the amount of the structural unit derived from other monomers in the acrylic resin (a-4) may be within a range that does not hinder the purpose of the present invention, and there is no Specially limited. The amount of the structural unit derived from (meth)acrylic acid in the acrylic resin (a-4) is preferably 5 mol % or more and 50 mol with respect to the number of moles of the total structural units of the acrylic resin (a-4). % or less, more preferably 10 mol % or more and 30 mol % or less.
丙烯酸系树脂(a-4)含有具有不饱和双键的结构单元的情况下,相对于丙烯酸系树脂(a-4)的全部结构单元的摩尔数而言,丙烯酸系树脂(a-4)中的具有不饱和双键的结构单元的量优选为1摩尔%以上且50摩尔%以下,更优选为1摩尔%以上且30摩尔%以下,尤其优选为1摩尔%以上且20摩尔%以下。When the acrylic resin (a-4) contains a structural unit having an unsaturated double bond, in the acrylic resin (a-4), the number of moles of the total structural units of the acrylic resin (a-4) The amount of the structural unit having an unsaturated double bond is preferably 1 mol % or more and 50 mol % or less, more preferably 1 mol % or more and 30 mol % or less, and particularly preferably 1 mol % or more and 20 mol % or less.
通过使丙烯酸系树脂(a-4)以上述范围内的量包含具有不饱和双键的结构单元,从而能够将丙烯酸系树脂引入抗蚀剂膜内的交联反应而进行均匀化,因此对于柱状间隔物的耐热性、机械特性的提高而言有效。By making the acrylic resin (a-4) contain a structural unit having an unsaturated double bond in an amount within the above range, the acrylic resin can be introduced into the resist film for a cross-linking reaction to be homogenized, so for columnar It is effective in improving the heat resistance and mechanical properties of the spacer.
丙烯酸系树脂(a-4)的重均分子量优选为2000以上且50000以下,更优选为3000以上且30000以下。通过使其为上述范围,从而有下述倾向:容易获得感光性树脂组合物的膜形成能力、曝光后的显影性的均衡性。The weight average molecular weight of the acrylic resin (a-4) is preferably 2,000 or more and 50,000 or less, and more preferably 3,000 or more and 30,000 or less. By making it into the said range, there exists a tendency for the balance of the film forming ability of the photosensitive resin composition and the developability after exposure to be easily obtained.
相对于除后述的有机溶剂(S)的质量外的感光性树脂组合物的质量(固态成分整体)而言,碱溶性树脂(A)的含量优选为20质量%以上且85质量%以下,更优选为25质量%以上且75质量%以下。通过使其为上述范围,从而容易得到显影性优异的感光性树脂组合物。The content of the alkali-soluble resin (A) is preferably 20% by mass or more and 85% by mass or less with respect to the mass of the photosensitive resin composition (the entire solid content) excluding the mass of the organic solvent (S) described later, More preferably, it is 25 mass % or more and 75 mass % or less. By making it into the said range, it becomes easy to obtain the photosensitive resin composition which is excellent in developability.
<光聚合性单体(B)><Photopolymerizable monomer (B)>
作为光聚合性单体(B),可优选使用具有烯键式不饱和基团的单体。该具有烯键式不饱和基团的单体包括单官能单体和多官能单体。As the photopolymerizable monomer (B), a monomer having an ethylenically unsaturated group can be preferably used. The monomers having ethylenically unsaturated groups include monofunctional monomers and polyfunctional monomers.
作为单官能单体,可举出(甲基)丙烯酰胺、羟甲基(甲基)丙烯酰胺、甲氧基甲基(甲基)丙烯酰胺、乙氧基甲基(甲基)丙烯酰胺、丙氧基甲基(甲基)丙烯酰胺、丁氧基甲氧基甲基(甲基)丙烯酰胺、N-羟甲基(甲基)丙烯酰胺、N-羟基甲基(甲基)丙烯酰胺、(甲基)丙烯酸、富马酸、马来酸、马来酸酐、衣康酸、衣康酸酐、柠康酸、柠康酸酐、丁烯酸、2-丙烯酰胺基-2-甲基丙磺酸、叔丁基丙烯酰胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸环己酯、(甲基)丙烯酸2-羟基乙酯、(甲基)丙烯酸2-羟基丙酯、(甲基)丙烯酸2-羟基丁酯、(甲基)丙烯酸2-苯氧基-2-羟基丙酯、邻苯二甲酸2-(甲基)丙烯酰基氧基-2-羟基丙酯、丙三醇单(甲基)丙烯酸酯、(甲基)丙烯酸四氢糠基酯、(甲基)丙烯酸二甲基氨基乙酯、(甲基)丙烯酸缩水甘油酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、邻苯二甲酸衍生物的(甲基)丙烯酸半酯等。这些单官能单体可以单独使用或组合两种以上而使用。As the monofunctional monomer, (meth)acrylamide, methylol (meth)acrylamide, methoxymethyl (meth)acrylamide, ethoxymethyl (meth)acrylamide, Propoxymethyl (meth)acrylamide, butoxymethoxymethyl (meth)acrylamide, N-methylol (meth)acrylamide, N-hydroxymethyl (meth)acrylamide , (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-acrylamido-2-methylpropane Sulfonic acid, tert-butylacrylamide sulfonic acid, methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, (meth)acrylate ) cyclohexyl acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxybutyl (meth)acrylate, 2-phenoxy (meth)acrylate- 2-Hydroxypropyl, 2-(meth)acryloyloxy-2-hydroxypropyl phthalate, glycerol mono(meth)acrylate, tetrahydrofurfuryl (meth)acrylate, ( Dimethylaminoethyl meth)acrylate, glycidyl (meth)acrylate, 2,2,2-trifluoroethyl (meth)acrylate, 2,2,3,3-tetrakis (meth)acrylate Fluoropropyl esters, (meth)acrylic acid half esters of phthalic acid derivatives, etc. These monofunctional monomers may be used alone or in combination of two or more.
另一方面,作为多官能单体,可举出乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羟甲基丙烷三(甲基)丙烯酸酯、丙三醇二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-双(4-(甲基)丙烯酰氧基二乙氧基苯基)丙烷、2,2-双(4-(甲基)丙烯酰氧基聚乙氧基苯基)丙烷、(甲基)丙烯酸2-羟基-3-(甲基)丙烯酰基氧基丙酯、乙二醇二缩水甘油醚二(甲基)丙烯酸酯、二乙二醇二缩水甘油醚二(甲基)丙烯酸酯、邻苯二甲酸二缩水甘油酯二(甲基)丙烯酸酯、丙三醇三丙烯酸酯、丙三醇聚缩水甘油醚聚(甲基)丙烯酸酯、氨基甲酸酯(甲基)丙烯酸酯(即,甲苯二异氰酸酯、三甲基六亚甲基二异氰酸酯、或六亚甲基二异氰酸酯等与(甲基)丙烯酸2-羟基乙酯的产物)、亚甲基双(甲基)丙烯酰胺、(甲基)丙烯酰胺亚甲基醚、多元醇与N-羟甲基(甲基)丙烯酰胺的缩合物等多官能单体、1,3,5-三丙烯酰基六氢-1,3,5-三嗪等。这些多官能单体可以单独使用或组合两种以上而使用。On the other hand, as a polyfunctional monomer, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, (Meth)acrylate, polypropylene glycol di(meth)acrylate, butanediol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate base) acrylate, trimethylolpropane tri(meth)acrylate, glycerol di(meth)acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate , pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2, 2-bis(4-(meth)acryloyloxydiethoxyphenyl)propane, 2,2-bis(4-(meth)acryloyloxypolyethoxyphenyl)propane, (methyl) base) 2-hydroxy-3-(meth)acryloyloxypropyl acrylate, ethylene glycol diglycidyl ether di(meth)acrylate, diethylene glycol diglycidyl ether di(meth)acrylate , diglycidyl phthalate di(meth)acrylate, glycerol triacrylate, glycerol polyglycidyl ether poly(meth)acrylate, urethane (meth)acrylate ( That is, tolylene diisocyanate, trimethylhexamethylene diisocyanate, or a product of hexamethylene diisocyanate and 2-hydroxyethyl (meth)acrylate), methylenebis(meth)acrylamide, Polyfunctional monomers such as (meth)acrylamide methylene ether, polyol and N-methylol (meth)acrylamide condensate, 1,3,5-triacryloylhexahydro-1,3, 5-triazine, etc. These polyfunctional monomers may be used alone or in combination of two or more.
在这些具有烯键式不饱和基团的单体中,从存在提高感光性树脂组合物与基板的密合性、感光性树脂组合物的固化后的强度的倾向的方面考虑,优选3官能以上的多官能单体,更优选4官能以上的多官能单体,进一步优选5官能以上的多官能单体。Among these monomers having an ethylenically unsaturated group, from the viewpoint of the tendency to improve the adhesiveness between the photosensitive resin composition and the substrate, and the strength of the photosensitive resin composition after curing, trifunctional or more are preferred The polyfunctional monomer of , more preferably a tetrafunctional or more multifunctional monomer, and further preferably a 5 functional or more functional monomer.
相对于除后述的有机溶剂(S)的质量外的感光性树脂组合物的质量(固态成分整体)而言,光聚合性单体(B)在感光性树脂组合物中的含量优选为1质量%以上且50质量%以下,更优选为5质量%以上且40质量%以下。通过使其为上述范围,从而有容易获得敏感度、显影性、分辨率的均衡性的倾向。The content of the photopolymerizable monomer (B) in the photosensitive resin composition is preferably 1 with respect to the mass of the photosensitive resin composition (the entire solid content) excluding the mass of the organic solvent (S) described later. The mass % or more and 50 mass % or less are more preferably 5 mass % or more and 40 mass % or less. By making it into the said range, there exists a tendency for the balance of sensitivity, developability, and resolution to be easily obtained.
<光聚合引发剂(C)><Photopolymerization initiator (C)>
感光性树脂组合物包含后述的式(C1)表示的光聚合引发剂(C-I)作为光聚合引发剂(C)。感光性树脂组合物通过组合包含作为光聚合引发剂(C)的光聚合引发剂(C-I)、和后述的氟系树脂(D),从而可形成能够抑制非图案部的斥液化的经图案化的固化膜。The photosensitive resin composition contains the photopolymerization initiator (C-I) represented by the formula (C1) described later as the photopolymerization initiator (C). The photosensitive resin composition contains a photopolymerization initiator (C-I) as a photopolymerization initiator (C) in combination with a fluorine-based resin (D) described later, whereby a patterned structure capable of suppressing liquid repellency of non-patterned portions can be formed. cured film.
〔光聚合引发剂(C1)〕[Photopolymerization initiator (C1)]
如前文所述,光聚合引发剂(C-I)为下述式(C1)表示的肟酯化合物。As described above, the photopolymerization initiator (C-I) is an oxime ester compound represented by the following formula (C1).
[化学式19][Chemical formula 19]
式(C1)中,Xc1为二价或三价的连接基团,多个Rc1各自独立地为一价的有机基团,多个Rc2各自独立地为氢原子、可具有取代基的碳原子数为1以上且11以下的烷基、或可具有取代基的芳基,多个Rc3各自独立地为通过C-N键与咔唑环中的氮原子键合的一价的有机基团,t1为0或1。In formula (C1), X c1 is a divalent or trivalent linking group, a plurality of R c1 are each independently a monovalent organic group, and a plurality of R c2 are each independently a hydrogen atom, which may have a substituent. An alkyl group having 1 or more and 11 or less carbon atoms, or an aryl group which may have a substituent, and each of a plurality of R c3 is independently a monovalent organic group bonded to a nitrogen atom in a carbazole ring through a CN bond , t1 is 0 or 1.
式(C1)中,Xc1优选为下述式(C2)表示的二价或三价的连接基团。Xc2为二价或三价的芳香族基团,多个Xc3各自独立地为-C(=O)-、-C(=S)-、或单键,当t1为0时t2为0,当t1为1时t2为1。In formula (C1), X c1 is preferably a divalent or trivalent linking group represented by the following formula (C2). X c2 is a divalent or trivalent aromatic group, a plurality of X c3 are each independently -C(=O)-, -C(=S)-, or a single bond, when t1 is 0, t2 is 0 , when t1 is 1, t2 is 1.
[化学式20][Chemical formula 20]
作为Xc2的芳香族基团可以为芳基也可以为杂芳基。作为杂芳基所具有的杂原子,可举出O、S、N、P、及Si。该芳香族基团可具有取代基。The aromatic group as X c2 may be an aryl group or a heteroaryl group. O, S, N, P, and Si are mentioned as a hetero atom which a heteroaryl group has. The aromatic group may have a substituent.
作为Xc2的芳香族基团的碳原子数没有特别限定。作为Xc2的芳香族基团的碳原子数例如优选为1以上且50以下,更优选为1以上且30以下,尤其优选为1以上且20以下。需要说明的是,芳香族基团的碳原子不包括在芳香族基团上进行取代的取代基的碳原子数。The number of carbon atoms of the aromatic group of X c2 is not particularly limited. The number of carbon atoms of the aromatic group as X c2 is, for example, preferably 1 or more and 50 or less, more preferably 1 or more and 30 or less, and particularly preferably 1 or more and 20 or less. In addition, the carbon atom of an aromatic group does not include the number of carbon atoms of the substituent which substitutes on an aromatic group.
关于构成作为Xc2的杂芳基的杂环,可举出呋喃、噻吩、吡咯、噁唑、异噁唑、噻唑、噻二唑、异噻唑、咪唑、吡唑、三唑、四唑、吡啶、吡嗪、嘧啶、哒嗪、苯并呋喃、苯并噻吩、吲哚、异吲哚、吲哚嗪、苯并咪唑、苯并三唑、苯并噁唑、苯并噻唑、咔唑、嘌呤、喹啉、异喹啉、喹唑啉、酞嗪、肉啉、及喹喔啉等。关于作为Xc2的杂芳基的优选例,可举出从这些杂环除去两个或三个氢原子而得到的基团。Furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, tetrazole, pyridine may be mentioned as the heterocycle constituting the heteroaryl group as X c2 , pyrazine, pyrimidine, pyridazine, benzofuran, benzothiophene, indole, isoindole, indoleazine, benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine , quinoline, isoquinoline, quinazoline, phthalazine, cinnoline, and quinoxaline, etc. Preferable examples of the heteroaryl group as X c2 include groups obtained by removing two or three hydrogen atoms from these heterocycles.
作为Xc2为芳基时的优选例,可举出从苯、联苯、萘、及蒽等中除去两个或三个氢原子而得到的基团。Preferable examples when X c2 is an aryl group include groups obtained by removing two or three hydrogen atoms from benzene, biphenyl, naphthalene, anthracene, and the like.
作为Xc2的芳香族基团可以具有取代基。关于作为Xc2的芳香族基团可具有的取代基的例子,可举出碳原子数为1以上且20以下的烷基、碳原子数为1以上且20以下的烷氧基、碳原子数为3以上且10以下的环烷基、碳原子数为3以上且10以下的环烷氧基、碳原子数为2以上且20以下的饱和脂肪族酰基、碳原子数为2以上且20以下的烷氧基羰基、碳原子数为2以上且20以下的饱和脂肪族酰基氧基、可具有取代基的苯基、可具有取代基的苯氧基、可具有取代基的苯基硫基、可具有取代基的苯甲酰基、可具有取代基的苯氧基羰基、可具有取代基的苯甲酰氧基、可具有取代基的碳原子数为7以上且20以下的苯基烷基、可具有取代基的萘基、可具有取代基的萘氧基、可具有取代基的萘甲酰基、可具有取代基的萘氧基羰基、可具有取代基的萘甲酰氧基、可具有取代基的碳原子数为11以上且20以下的萘基烷基、可具有取代基的杂环基、可具有取代基的杂环基羰基、氨基、经1个或2个有机基团取代的氨基、吗啉-1-基、及哌嗪-1-基、卤素、硝基、及氰基等。The aromatic group as X c2 may have a substituent. Examples of the substituent which the aromatic group of X c2 may have include an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, and an alkyl group having 1 to 20 carbon atoms. Cycloalkyl having 3 or more and 10 or less, cycloalkoxy having 3 or more and 10 or less carbon atoms, saturated aliphatic acyl group having 2 or more and 20 or less carbon atoms, or 2 or more and 20 or less carbon atoms alkoxycarbonyl, saturated aliphatic acyloxy having 2 or more and 20 or less carbon atoms, optionally substituted phenyl, optionally substituted phenoxy, optionally substituted phenylthio, An optionally substituted benzoyl group, an optionally substituted phenoxycarbonyl group, an optionally substituted benzoyloxy group, an optionally substituted phenylalkyl group having 7 to 20 carbon atoms, optionally substituted naphthyl, optionally substituted naphthyloxy, optionally substituted naphthoyl, optionally substituted naphthyloxycarbonyl, optionally substituted naphthoyloxy, optionally substituted Naphthyl alkyl group having 11 or more and 20 or less carbon atoms, optionally substituted heterocyclic group, optionally substituted heterocyclic carbonyl group, amino group, amino group substituted with one or two organic groups , morpholin-1-yl, and piperazin-1-yl, halogen, nitro, and cyano, etc.
作为Xc2的芳香族基团可具有的取代基的数目没有特别限定,可以为1也可以为2以上的多个。作为Xc2的芳香族基团具有多个取代基时,该多个取代基可以相同也可以不同。The number of substituents which the aromatic group of X c2 may have is not particularly limited, and may be one or two or more. When the aromatic group as X c2 has a plurality of substituents, the plurality of substituents may be the same or different.
作为Xc2的上述基团中,从光聚合引发剂(C-I)的合成及获得容易性等方面考虑,作为芳基,优选从苯、联苯、萘、及蒽等中除去2个氢原子而得到的基团,更优选从苯、及萘中除去2个氢原子而得到的基团,尤其优选从萘中除去2个氢原子而得到的基团。作为杂芳基,构成杂芳基的杂环优选呋喃、噻吩、及吡咯,更优选呋喃、及噻吩,尤其优选噻吩。Among the above-mentioned groups as X c2 , the aryl group is preferably obtained by removing two hydrogen atoms from benzene, biphenyl, naphthalene, anthracene, etc. from the viewpoints of synthesis and availability of a photopolymerization initiator (CI). The obtained group is more preferably a group obtained by removing two hydrogen atoms from benzene and naphthalene, and particularly preferably a group obtained by removing two hydrogen atoms from naphthalene. As the heteroaryl group, the heterocycle constituting the heteroaryl group is preferably furan, thiophene, and pyrrole, more preferably furan and thiophene, and particularly preferably thiophene.
作为Xc3的单键可以含有杂原子。该单键的碳原子数没有特别限定,优选碳原子数为1~20。The single bond as X c3 may contain a hetero atom. The number of carbon atoms in the single bond is not particularly limited, but preferably 1 to 20 carbon atoms.
式(C1)中,Rc1各自独立地为一价的有机基团。关于作为Rc1的优选有机基团的例子,可举出烷基、烷氧基、环烷基、环烷氧基、饱和脂肪族酰基、烷氧基羰基、饱和脂肪族酰基氧基、可具有取代基的苯基、可具有取代基的苯氧基、可具有取代基的苯甲酰基、可具有取代基的苯氧基羰基、可具有取代基的苯甲酰氧基、可具有取代基的苯基烷基、可具有取代基的萘基、可具有取代基的萘氧基、可具有取代基的萘甲酰基、可具有取代基的萘氧基羰基、可具有取代基的萘甲酰氧基、可具有取代基的萘基烷基、可具有取代基的杂环基、可具有取代基的杂环基羰基、经1个或2个有机基团取代的氨基、经氨基取代的烷基、被经1个或2个有机基团取代的氨基取代的烷基、吗啉-1-基、及哌嗪-1-基等。In formula (C1), R c1 is each independently a monovalent organic group. Examples of preferable organic groups for R c1 include an alkyl group, an alkoxy group, a cycloalkyl group, a cycloalkoxy group, a saturated aliphatic acyl group, an alkoxycarbonyl group, a saturated aliphatic acyloxy group, a group which may have Substituted phenyl, optionally substituted phenoxy, optionally substituted benzoyl, optionally substituted phenoxycarbonyl, optionally substituted benzoyloxy, optionally substituted Phenylalkyl, optionally substituted naphthyl, optionally substituted naphthoxy, optionally substituted naphthoyl, optionally substituted naphthyloxycarbonyl, optionally substituted naphthoyloxy group, optionally substituted naphthylalkyl, optionally substituted heterocyclyl, optionally substituted heterocyclylcarbonyl, amino substituted with 1 or 2 organic groups, alkyl substituted with amino , Alkyl, morpholin-1-yl, and piperazin-1-yl substituted by amino group substituted with one or two organic groups, and the like.
Rc1为烷基时,烷基的碳原子数优选为1以上且20以下,更优选为1以上且6以下。另外,Rc1为烷基时,可以为直链也可以为支链。作为Rc1为烷基时的具体例,可举出甲基、乙基、正丙基、异丙基、正丁基、异丁基、仲丁基、叔丁基、正戊基、异戊基、仲戊基、叔戊基、正己基、正庚基、正辛基、异辛基、仲辛基、叔辛基、正壬基、异壬基、正癸基、及异癸基等。另外,Rc1为烷基时,烷基可以在碳链中含有醚键(-O-)。作为在碳链中具有醚键的烷基的例子,可举出甲氧基乙基、乙氧基乙基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙基氧基乙氧基乙基、及甲氧基丙基等。When R c1 is an alkyl group, the number of carbon atoms of the alkyl group is preferably 1 or more and 20 or less, and more preferably 1 or more and 6 or less. In addition, when R c1 is an alkyl group, it may be a straight chain or a branched chain. Specific examples when R c1 is an alkyl group include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, isopentyl base, sec-pentyl, tert-amyl, n-hexyl, n-heptyl, n-octyl, isooctyl, sec-octyl, tert-octyl, n-nonyl, isononyl, n-decyl, and isodecyl, etc. . In addition, when R c1 is an alkyl group, the alkyl group may contain an ether bond (-O-) in the carbon chain. Examples of the alkyl group having an ether bond in the carbon chain include methoxyethyl, ethoxyethyl, methoxyethoxyethyl, ethoxyethoxyethyl, and propyloxy ethoxyethyl, and methoxypropyl.
Rc1为烷氧基时,烷氧基的碳原子数优选为1以上且20以下,更优选为1以上且6以下。另外,Rc1为烷氧基时,可以为直链也可以为支链。作为Rc1为烷氧基时的具体例,可举出甲氧基、乙氧基、正丙氧基、异丙氧基、正丁氧基、异丁氧基、仲丁氧基、叔丁氧基、正戊氧基、异戊氧基、仲戊氧基、叔戊氧基、正己氧基、正庚氧基、正辛氧基、异辛氧基、仲辛氧基、叔辛氧基、正壬氧基、异壬氧基、正癸氧基、及异癸氧基等。另外,Rc1为烷氧基时,烷氧基可以在碳链中含有醚键(-O-)。作为在碳链中具有醚键的烷氧基的例子,可举出甲氧基乙氧基、乙氧基乙氧基、甲氧基乙氧基乙氧基、乙氧基乙氧基乙氧基、丙氧基乙氧基乙氧基、及甲氧基丙氧基等。When R c1 is an alkoxy group, the number of carbon atoms of the alkoxy group is preferably 1 or more and 20 or less, and more preferably 1 or more and 6 or less. In addition, when R c1 is an alkoxy group, it may be a straight chain or a branched chain. Specific examples when R c1 is an alkoxy group include methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, sec-butoxy group, and tert-butoxy group. Oxy, n-pentyloxy, isopentyloxy, sec-pentyloxy, tert-amyloxy, n-hexyloxy, n-heptyloxy, n-octyloxy, isooctyloxy, sec-octyloxy, tert-octyloxy group, n-nonyloxy, isononyloxy, n-decyloxy, and isodecyloxy, etc. In addition, when R c1 is an alkoxy group, the alkoxy group may contain an ether bond (-O-) in the carbon chain. Examples of the alkoxy group having an ether bond in the carbon chain include methoxyethoxy, ethoxyethoxy, methoxyethoxyethoxy, and ethoxyethoxyethoxy group, propoxyethoxyethoxy, and methoxypropoxy, etc.
Rc1为环烷基或环烷氧基时,环烷基或环烷氧基的碳原子数优选为3以上且10以下,更优选为3以上且6以下。作为Rc1为环烷基时的具体例,可举出环丙基、环丁基、环戊基、环己基、环庚基、及环辛基等。作为Rc1为环烷氧基时的具体例,可举出环丙基氧基、环丁基氧基、环戊基氧基、环己基氧基、环庚基氧基、及环辛基氧基等。When R c1 is a cycloalkyl group or a cycloalkoxy group, the number of carbon atoms in the cycloalkyl group or cycloalkoxy group is preferably 3 or more and 10 or less, and more preferably 3 or more and 6 or less. Specific examples when R c1 is a cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, and the like. Specific examples when R c1 is cycloalkoxy include cyclopropyloxy, cyclobutyloxy, cyclopentyloxy, cyclohexyloxy, cycloheptyloxy, and cyclooctyloxy Base et al.
Rc1为饱和脂肪族酰基或饱和脂肪族酰基氧基时,饱和脂肪族酰基或饱和脂肪族酰基氧基的碳原子数优选为2以上且21以下,更优选为2以上且7以下。作为Rc1为饱和脂肪族酰基时的具体例,可举出乙酰基、丙酰基、正丁酰基、2-甲基丙酰基、正戊酰基、2,2-二甲基丙酰基、正己酰基、正庚酰基、正辛酰基、正壬酰基、正癸酰基、正十一烷酰基、正十二烷酰基、正十三烷酰基、正十四烷酰基、正十五烷酰基、及正十六烷酰基等。作为Rc1为饱和脂肪族酰基氧基时的具体例,可举出乙酰氧基、丙酰氧基、正丁酰氧基、2-甲基丙酰氧基、正戊酰氧基、2,2-二甲基丙酰氧基、正己酰氧基、正庚酰氧基、正辛酰氧基、正壬酰氧基、正癸酰氧基、正十一烷酰氧基、正十二烷酰氧基、正十三烷酰氧基、正十四烷酰氧基、正十五烷酰氧氧基、及正十六烷酰氧基等。When R c1 is a saturated aliphatic acyl group or a saturated aliphatic acyloxy group, the carbon number of the saturated aliphatic acyl group or saturated aliphatic acyloxy group is preferably 2 or more and 21 or less, and more preferably 2 or more and 7 or less. Specific examples when R c1 is a saturated aliphatic acyl group include acetyl, propionyl, n-butyryl, 2-methylpropionyl, n-valeryl, 2,2-dimethylpropionyl, n-hexanoyl, n-heptanoyl, n-octanoyl, n-nonanoyl, n-decanoyl, n-undecanoyl, n-dodecanoyl, n-tridecanoyl, n-tetradecanoyl, n-pentadecanoyl, and n-hexadecanoyl Alkanoyl, etc. Specific examples when R c1 is a saturated aliphatic acyloxy group include acetoxy, propionyloxy, n-butyryloxy, 2-methylpropionyloxy, n-valeryloxy, 2, 2-dimethylpropionyloxy, n-hexanoyloxy, n-heptanoyloxy, n-octanoyloxy, n-nonanoyloxy, n-decanoyloxy, n-undecanoyloxy, n-dodecanoyloxy Alkanoyloxy, n-tridecanoyloxy, n-tetradecanoyloxy, n-pentadecanoyloxy, n-hexadecanoyloxy and the like.
Rc1为烷氧基羰基时,烷氧基羰基的碳原子数优选为2以上且20以下,更优选为2以上且7以下。作为Rc1为烷氧基羰基时的具体例,可举出甲氧基羰基、乙氧基羰基、正丙氧基羰基、异丙氧基羰基、正丁氧基羰基、异丁氧基羰基、仲丁氧基羰基、叔丁氧基羰基、正戊氧基羰基、异戊氧基羰基、仲戊氧基羰基、叔戊氧基羰基、正己氧基羰基、正庚氧基羰基、正辛氧基羰基、异辛氧基羰基、仲辛氧基羰基、叔辛氧基羰基、正壬氧基羰基、异壬氧基羰基、正癸氧基羰基、及异癸氧基羰基等。When R c1 is an alkoxycarbonyl group, the number of carbon atoms in the alkoxycarbonyl group is preferably 2 or more and 20 or less, and more preferably 2 or more and 7 or less. Specific examples when R c1 is an alkoxycarbonyl group include methoxycarbonyl, ethoxycarbonyl, n-propoxycarbonyl, isopropoxycarbonyl, n-butoxycarbonyl, isobutoxycarbonyl, sec-butoxycarbonyl, tert-butoxycarbonyl, n-pentoxycarbonyl, isopentyloxycarbonyl, sec-pentoxycarbonyl, tert-amyloxycarbonyl, n-hexyloxycarbonyl, n-heptoxycarbonyl, n-octyloxy carbonyl, isooctyloxycarbonyl, sec-octyloxycarbonyl, tert-octyloxycarbonyl, n-nonyloxycarbonyl, isononyloxycarbonyl, n-decyloxycarbonyl, and isodecyloxycarbonyl, etc.
Rc1为苯基烷基时,苯基烷基的碳原子数优选为7以上且20以下,更优选7以上且10以下。另外,Rc1为萘基烷基时,萘基烷基的碳原子数优选为11以上且20以下,更优选为11以上且14以下。作为Rc1为苯基烷基时的具体例,可举出苄基、2-苯基乙基、3-苯基丙基、及4-苯基丁基。作为Rc1为萘基烷基时的具体例,可举出α-萘甲基、β-萘甲基、2-(α-萘基)乙基、及2-(β-萘基)乙基。Rc1为苯基烷基、或萘基烷基时,Rc1可以在苯基或萘基上进一步具有取代基。When R c1 is a phenylalkyl group, the number of carbon atoms of the phenylalkyl group is preferably 7 or more and 20 or less, and more preferably 7 or more and 10 or less. In addition, when R c1 is a naphthylalkyl group, the number of carbon atoms of the naphthylalkyl group is preferably 11 or more and 20 or less, and more preferably 11 or more and 14 or less. Specific examples when R c1 is a phenylalkyl group include a benzyl group, a 2-phenylethyl group, a 3-phenylpropyl group, and a 4-phenylbutyl group. Specific examples when R c1 is naphthylalkyl include α-naphthylmethyl, β-naphthylmethyl, 2-(α-naphthyl)ethyl, and 2-(β-naphthyl)ethyl . When R c1 is a phenylalkyl group or a naphthylalkyl group, R c1 may further have a substituent on the phenyl group or naphthyl group.
Rc1为杂环基时,杂环基为含有1个以上的N、S、O的5元或6元的单环,或者为所述单环彼此、或所述单环与苯环稠合而成的杂环基。杂环基为稠环时,构成该稠环的单环的数目为3以下。杂环基可以为芳香族基团(杂芳基),也可以为非芳香族基团。作为构成所述杂环基的杂环,可举出呋喃、噻吩、吡咯、噁唑、异噁唑、噻唑、噻二唑、异噻唑、咪唑、吡唑、三唑、吡啶、吡嗪、嘧啶、哒嗪、苯并呋喃、苯并噻吩、吲哚、异吲哚、吲哚嗪、苯并咪唑、苯并三唑、苯并噁唑、苯并噻唑、咔唑、嘌呤、喹啉、异喹啉、喹唑啉、酞嗪、肉啉、喹喔啉、哌啶、哌嗪、吗啉、哌啶、四氢吡喃、及四氢呋喃等。Rc7为杂环基时,杂环基可以进一步具有取代基。When R c1 is a heterocyclic group, the heterocyclic group is a 5- or 6-membered monocyclic ring containing at least one N, S, and O, or the monocyclic rings are condensed with each other, or the monocyclic rings are condensed with a benzene ring formed heterocyclic group. When the heterocyclic group is a condensed ring, the number of monocyclic rings constituting the condensed ring is 3 or less. The heterocyclic group may be an aromatic group (heteroaryl group) or a non-aromatic group. Examples of the heterocycle constituting the heterocyclic group include furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, pyridine, pyrazine, and pyrimidine , pyridazine, benzofuran, benzothiophene, indole, isoindole, indoleazine, benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine, quinoline, iso Quinoline, quinazoline, phthalazine, cinnoline, quinoxaline, piperidine, piperazine, morpholine, piperidine, tetrahydropyran, and tetrahydrofuran, etc. When R c7 is a heterocyclic group, the heterocyclic group may further have a substituent.
Rc1为杂环基羰基时,杂环基羰基中包含的杂环基与Rc1为杂环基时同样。When R c1 is a heterocyclic carbonyl group, the heterocyclic group included in the heterocyclic carbonyl group is the same as when R c1 is a heterocyclic group.
Rc1为经1个或2个有机基团取代的氨基时,有机基团的优选例可举出碳原子数为1以上且20以下的烷基、碳原子数为3以上且10以下的环烷基、碳原子数为2以上且21以下的饱和脂肪族酰基、碳原子数为2以上且21以下的饱和脂肪族酰基氧基、可具有取代基的苯基、可具有取代基的苯甲酰基、可具有取代基的碳原子数为7以上且20以下的苯基烷基、可具有取代基的萘基、可具有取代基的萘甲酰基、可具有取代基的碳原子数为11以上且20以下的萘基烷基、及杂环基等。这些优选的有机基团的具体例与Rc1同样。作为经1个或2个有机基团取代的氨基的具体例,可举出甲基氨基、乙基氨基、二乙基氨基、正丙基氨基、二正丙基氨基、异丙基氨基、正丁基氨基、二正丁基氨基、正戊基氨基、正己基氨基、正庚基氨基、正辛基氨基、正壬基氨基、正癸基氨基、苯基氨基、萘基氨基、乙酰氨基、丙酰氨基、正丁酰氨基、正戊酰氨基、正己酰氨基、正庚酰氨基、正辛酰氨基、正癸酰氨基、苯甲酰基氨基、α-萘甲酰氨基、β-萘甲酰氨基、N-乙酰基-N-乙酰氧基氨基、N-丙酰基-N-丙酰氧基氨基等。When R c1 is an amino group substituted with one or two organic groups, preferable examples of the organic group include an alkyl group having 1 to 20 carbon atoms, and a ring having 3 to 10 carbon atoms. Alkyl, saturated aliphatic acyl having 2 or more and 21 or less carbon atoms, saturated aliphatic acyloxy having 2 or more and 21 or less carbon atoms, optionally substituted phenyl, optionally substituted benzyl Acyl, optionally substituted phenylalkyl group having 7 to 20 carbon atoms, optionally substituted naphthyl, optionally substituted naphthoyl, optionally substituted with 11 or more carbon atoms and naphthyl alkyl groups of 20 or less, heterocyclic groups, and the like. Specific examples of these preferable organic groups are the same as those of R c1 . Specific examples of the amino group substituted with one or two organic groups include methylamino, ethylamino, diethylamino, n-propylamino, di-n-propylamino, isopropylamino, n-propylamino Butylamino, di-n-butylamino, n-pentylamino, n-hexylamino, n-heptylamino, n-octylamino, n-nonylamino, n-decylamino, phenylamino, naphthylamino, acetylamino, Propionylamino, n-butyrylamino, n-pentanoylamino, n-hexanoylamino, n-heptanoylamino, n-octanoylamino, n-decanoylamino, benzoylamino, α-naphthoylamino, β-naphthoyl Amino, N-acetyl-N-acetoxyamino, N-propionyl-N-propionyloxyamino and the like.
Rc1为经氨基取代的烷基、以及被经1个或2个有机基团取代的氨基取代的烷基时,优选关于Rc1为烷基时作为具体例所说明的烷基被氨基、或经1个或2个有机基团取代的氨基取代。When R c1 is an alkyl group substituted with an amino group, and an alkyl group substituted with an amino group substituted with one or two organic groups, it is preferable that the alkyl group described as a specific example when R c1 is an alkyl group is replaced by an amino group, or Amino substituted with 1 or 2 organic groups.
作为经氨基取代的烷基、以及被经1个或2个有机基团取代的氨基取代的烷基的优选具体例,可举出2-氨基乙基、3-氨基正丙基、2-氨基正丙基、4-氨基正丁基、2-(N,N-二甲基氨基)乙基、3-(N,N-二甲基氨基)正丙基、2-(N,N-二甲基氨基)正丙基、4-(N,N-二甲基氨基)正丁基、2-(N,N-二乙基氨基)乙基、3-(N,N-二乙基氨基)正丙基、2-(N,N-二乙基氨基)正丙基、4-(N,N-二乙基氨基)正丁基、2-(N-乙酰基-N-乙酰氧基氨基)乙基、3-(N-乙酰基-N-乙酰氧基氨基)正丙基、2-(N-乙酰基-N-乙酰氧基氨基)正丙基、及4-(N-乙酰基-N-乙酰氧基氨基)正丁基。Preferred specific examples of the alkyl group substituted with an amino group and the alkyl group substituted with an amino group substituted with one or two organic groups include 2-aminoethyl, 3-amino-n-propyl, 2-amino n-propyl, 4-amino-n-butyl, 2-(N,N-dimethylamino)ethyl, 3-(N,N-dimethylamino)n-propyl, 2-(N,N-diethylamino) Methylamino)n-propyl, 4-(N,N-dimethylamino)n-butyl, 2-(N,N-diethylamino)ethyl, 3-(N,N-diethylamino) ) n-propyl, 2-(N,N-diethylamino)n-propyl, 4-(N,N-diethylamino)n-butyl, 2-(N-acetyl-N-acetoxy Amino)ethyl, 3-(N-acetyl-N-acetoxyamino)n-propyl, 2-(N-acetyl-N-acetoxyamino)n-propyl, and 4-(N-acetyl yl-N-acetoxyamino) n-butyl.
作为Rc1所包含的、苯基、萘基、及杂环基进一步具有取代基时的取代基,可举出碳原子数为1以上且6以下的烷基、碳原子数为1以上且6以下的烷氧基、碳原子数为2以上且7以下的饱和脂肪族酰基、碳原子数为2以上且7以下的烷氧基羰基、碳原子数为2以上且7以下的饱和脂肪族酰基氧基、具有碳原子数为1以上且6以下的烷基的单烷基氨基、具有碳原子数为1以上且6以下的烷基的二烷基氨基、吗啉-1-基、哌嗪-1-基、卤素、硝基、及氰基等。Examples of substituents included in R c1 when the phenyl group, naphthyl group, and heterocyclic group further have a substituent include an alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms, and 1 to 6 carbon atoms. The following alkoxy groups, saturated aliphatic acyl groups having 2 to 7 carbon atoms, alkoxycarbonyl groups having 2 to 7 carbon atoms, and saturated aliphatic acyl groups having 2 to 7 carbon atoms Oxyl group, monoalkylamino group having an alkyl group having 1 to 6 carbon atoms, dialkylamino group having an alkyl group having 1 to 6 carbon atoms, morpholin-1-yl, piperazine -1-yl, halogen, nitro, and cyano, etc.
这些取代基为碳原子数为1以上且6以下的烷基、碳原子数为1以上且6以下的烷氧基、碳原子数为2以上且7以下的饱和脂肪族酰基、碳原子数为2以上且7以下的烷氧基羰基、碳原子数为2以上且7以下的饱和脂肪族酰基氧基、具有碳原子数为1以上且6以下的烷基的单烷基氨基、及具有碳原子数为1以上且6以下的烷基的二烷基氨基时,可以在这些取代基中的碳链中包含醚键(-O-)。These substituents are an alkyl group having 1 or more and 6 or less carbon atoms, an alkoxy group having 1 or more and 6 or less carbon atoms, a saturated aliphatic acyl group having 2 or more and 7 or less carbon atoms, and a carbon number of Alkoxycarbonyl having 2 or more and 7 or less, saturated aliphatic acyloxy having 2 or more and 7 or less carbon atoms, monoalkylamino having an alkyl group having 1 or more and 6 or less carbon atoms, and carbon In the case of the dialkylamino group of an alkyl group having 1 or more and 6 or less atoms, an ether bond (-O-) may be included in the carbon chain in these substituents.
Rc1所包含的、苯基、萘基、及杂环基进一步具有取代基时,该取代基的数目在不妨碍本发明的目的的范围内即可,没有限定,优选为1以上且4以下。Rc1所包含的、苯基、萘基、及杂环基具有多个取代基时,多个取代基可以相同也可以不同。When the phenyl group, naphthyl group, and heterocyclic group contained in R c1 further have a substituent, the number of such substituents is not limited within a range that does not hinder the purpose of the present invention, but is preferably 1 or more and 4 or less . When the phenyl group, the naphthyl group, and the heterocyclic group contained in R c1 have a plurality of substituents, the plurality of substituents may be the same or different.
作为Rc1,也优选环烷基烷基、可在芳香环上具有取代基的苯氧基烷基、可在芳香环上具有取代基的苯硫基烷基。苯氧基烷基、及苯硫基烷基可具有的取代基如作为苯基可具有的取代基而在上文中陈述的那样。As R c1 , a cycloalkylalkyl group, a phenoxyalkyl group which may have a substituent on the aromatic ring, and a phenylthioalkyl group which may have a substituent on the aromatic ring are also preferable. The substituent which the phenoxyalkyl group and the phenylthioalkyl group may have are as described above as the substituent which the phenyl group may have.
有机基团中,作为Rc1,优选烷基、环烷基、可具有取代基的苯基、或环烷基烷基、可在芳香环上具有取代基的苯硫基烷基。作为烷基,优选碳原子数为1以上且20以下的烷基,更优选碳原子数为1以上且8以下的烷基,尤其优选碳原子数为1以上且4以下的烷基,最优选甲基。可具有取代基的苯基中,优选甲基苯基,更优选2-甲基苯基。环烷基烷基所包含的环烷基的碳原子数优选为5以上且10以下,更优选为5以上且8以下,尤其优选为5或6。环烷基烷基所包含的亚烷基的碳原子数优选为1以上且8以下,更优选为1以上且4以下,尤其优选为2。环烷基烷基中,优选环戊基乙基。可在芳香环上具有取代基的苯硫基烷基所包含的亚烷基的碳原子数优选为1以上且8以下,更优选为1以上且4以下,尤其优选为2。可在芳香环上具有取代基的苯硫基烷基中,优选2-(4-氯苯基硫基)乙基。Among the organic groups, Rc1 is preferably an alkyl group, a cycloalkyl group, a phenyl group which may have a substituent, a cycloalkylalkyl group, or a phenylthioalkyl group which may have a substituent on an aromatic ring. The alkyl group is preferably an alkyl group having 1 or more and 20 or less carbon atoms, more preferably an alkyl group having 1 or more and 8 or less carbon atoms, particularly preferably an alkyl group having 1 or more and 4 or less carbon atoms, and most preferably methyl. Among the optionally substituted phenyl groups, methylphenyl groups are preferred, and 2-methylphenyl groups are more preferred. The number of carbon atoms in the cycloalkyl group contained in the cycloalkylalkyl group is preferably 5 or more and 10 or less, more preferably 5 or more and 8 or less, and particularly preferably 5 or 6. The number of carbon atoms of the alkylene group contained in the cycloalkylalkyl group is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the cycloalkylalkyl groups, cyclopentylethyl is preferred. The number of carbon atoms in the alkylene group contained in the phenylthioalkyl group which may have a substituent on the aromatic ring is preferably 1 or more and 8 or less, more preferably 1 or more and 4 or less, and particularly preferably 2. Among the phenylthioalkyl groups which may have a substituent on the aromatic ring, 2-(4-chlorophenylthio)ethyl is preferred.
另外,作为Rc1,也优选-A1-CO-O-A2表示的基团。A1为二价的有机基团,优选为二价的烃基,优选为亚烷基。A2为一价的有机基团,优选为一价的烃基。Moreover, as R c1 , a group represented by -A 1 -CO-OA 2 is also preferable. A 1 is a divalent organic group, preferably a divalent hydrocarbon group, preferably an alkylene group. A 2 is a monovalent organic group, preferably a monovalent hydrocarbon group.
A1为亚烷基时,亚烷基可以为直链状,也可以为支链状,优选为直链状。A1为亚烷基时,亚烷基的碳原子数优选为1以上且10以下,更优选为1以上且6以下,尤其优选为1以上且4以下。When A 1 is an alkylene group, the alkylene group may be straight-chain or branched, but straight-chain is preferred. When A 1 is an alkylene group, the number of carbon atoms of the alkylene group is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and particularly preferably 1 or more and 4 or less.
作为A2的优选例,可举出碳原子数为1以上且10以下的烷基、碳原子数为7以上且20以下的芳烷基、及碳原子数为6以上且20以下的芳香族烃基。作为A2的优选具体例,可举出甲基、乙基、正丙基、异丙基、正丁基、异丁基、仲丁基、叔丁基、正戊基、正己基、苯基、萘基、苄基、苯乙基、α-萘甲基、及β-萘甲基等。Preferable examples of A2 include an alkyl group having 1 to 10 carbon atoms, an aralkyl group having 7 to 20 carbon atoms, and an aromatic group having 6 to 20 carbon atoms. Hydrocarbyl. Preferable specific examples of A2 include methyl, ethyl, n - propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, n-hexyl, and phenyl , naphthyl, benzyl, phenethyl, α-naphthylmethyl, and β-naphthylmethyl, etc.
作为-A1-CO-O-A2表示的基团的优选具体例,可举出2-甲氧基羰基乙基、2-乙氧基羰基乙基、2-正丙氧基羰基乙基、2-正丁氧基羰基乙基、2-正戊氧基羰基乙基、2-正己氧基羰基乙基、2-苄氧基羰基乙基、2-苯氧基羰基乙基、3-甲氧基羰基正丙基、3-乙氧基羰基正丙基、3-正丙氧基羰基正丙基、3-正丁氧基羰基正丙基、3-正戊氧基羰基正丙基、3-正己氧基羰基正丙基、3-苄氧基羰基正丙基、及3-苯氧基羰基正丙基等。Preferable specific examples of the group represented by -A 1 -CO-OA 2 include 2-methoxycarbonylethyl, 2-ethoxycarbonylethyl, 2-n-propoxycarbonylethyl, 2-n-propoxycarbonylethyl, -n-Butoxycarbonylethyl, 2-n-pentoxycarbonylethyl, 2-n-hexyloxycarbonylethyl, 2-benzyloxycarbonylethyl, 2-phenoxycarbonylethyl, 3-methoxy n-propyl carbonyl, 3-ethoxycarbonyl-n-propyl, 3-n-propoxycarbonyl-n-propyl, 3-n-butoxycarbonyl-n-propyl, 3-n-pentoxycarbonyl-n-propyl, 3 -n-hexyloxycarbonyl-n-propyl, 3-benzyloxycarbonyl-n-propyl, and 3-phenoxycarbonyl-n-propyl, etc.
以上对Rc1进行了说明,但作为Rc1,优选碳原子数为1以上且6以下的烷基、和下述式(C1a)或(C1b)表示的基团。Although R c1 has been described above, R c1 is preferably an alkyl group having 1 or more and 6 or less carbon atoms, and a group represented by the following formula (C1a) or (C1b).
[化学式21][Chemical formula 21]
式(C1a)及(C1b)中,Rc10及Rc11各自为有机基团。t3为0以上且4以下的整数。Rc10及Rc11存在于苯环上的相邻位置时,Rc10及Rc11可以彼此键合而形成环。t4为1以上且8以下的整数。t5为1以上且5以下的整数。t6为0以上且(t5+3)以下的整数。R012为有机基团。In formulas (C1a) and (C1b), R c10 and R c11 are each an organic group. t3 is an integer of 0 or more and 4 or less. When R c10 and R c11 are present at adjacent positions on the benzene ring, R c10 and R c11 may be bonded to each other to form a ring. t4 is an integer of 1 or more and 8 or less. t5 is an integer of 1 or more and 5 or less. t6 is an integer of 0 or more and (t5+3) or less. R 012 is an organic group.
对于式(C1a)中的Rc10及Rc11而言,有机基团的例子与Rc1同样。作为Rc10,优选烷基或苯基。Rc10为烷基时,其碳原子数优选为1以上且10以下,更优选为1以上且5以下,尤其优选为1以上且3以下,最优选为1。即,Rc10最优选为甲基。Rc10及Rc11键合而形成环时,该环可以为芳香族环,也可以为脂肪族环。作为由式(C1a)所示、且Rc10及Rc11形成环的基团的优选例,可举出萘-1-基、1,2,3,4-四氢萘-5-基等。上述式(C1a)中,t3为0以上且4以下的整数,优选为0或1,更优选为0。For R c10 and R c11 in the formula (C1a), examples of the organic group are the same as those of R c1 . As R c10 , an alkyl group or a phenyl group is preferable. When R c10 is an alkyl group, the number of carbon atoms is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, particularly preferably 1 or more and 3 or less, and most preferably 1. That is, R c10 is most preferably a methyl group. When R c10 and R c11 are bonded to form a ring, the ring may be an aromatic ring or an aliphatic ring. Preferable examples of the group represented by the formula (C1a) in which R c10 and R c11 form a ring include naphthalene-1-yl, 1,2,3,4-tetrahydronaphthalene-5-yl and the like. In the above formula (C1a), t3 is an integer of 0 or more and 4 or less, preferably 0 or 1, and more preferably 0.
上述式(C1b)中,Rc12为有机基团。作为有机基团,可举出与针对Rc1进行说明的有机基团同样的基团。有机基团中,优选烷基。烷基可以为直链状,也可以为支链状。烷基的碳原子数优选为1以上且10以下,更优选为1以上且5以下,尤其优选为1以上且3以下。作为Rc12,可优选示例甲基、乙基、丙基、异丙基、丁基等,这些之中,更优选甲基。In the above formula (C1b), R c12 is an organic group. As an organic group, the same group as the organic group demonstrated about R c1 is mentioned. Among the organic groups, alkyl groups are preferred. The alkyl group may be linear or branched. The number of carbon atoms of the alkyl group is preferably 1 or more and 10 or less, more preferably 1 or more and 5 or less, and particularly preferably 1 or more and 3 or less. As R c12 , a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, and the like can be preferably exemplified, and among these, a methyl group is more preferable.
上述式(C1b)中,t5为1以上且5以下的整数,优选为1以上且3以下的整数,更优选为1或2。上述式(C1b)中,t6为0以上且(t5+3)以下,优选为0以上且3以下的整数,更优选为0以上且2以下的整数,尤其优选0。上述式(C1b)中,t4为1以上且8以下的整数,优选为1以上且5以下的整数,更优选为1以上且3以下的整数,尤其优选为1或2。In the above formula (C1b), t5 is an integer of 1 or more and 5 or less, preferably 1 or more and 3 or less, and more preferably 1 or 2. In the above formula (C1b), t6 is 0 or more and (t5+3) or less, preferably an integer of 0 or more and 3 or less, more preferably an integer of 0 or more and 2 or less, and particularly preferably 0. In the above formula (C1b), t4 is an integer of 1 or more and 8 or less, preferably 1 or more and 5 or less, more preferably 1 or more and 3 or less, and particularly preferably 1 or 2.
式(C1)中,Rc2各自独立地为氢原子、可具有取代基的碳原子数为1以上且11以下的烷基、或可具有取代基的芳基。作为Rc2为烷基时可具有的取代基,优选示例苯基、萘基等。另外,作为Rc2为芳基时可具有的取代基,优选示例碳原子数为1以上且5以下的烷基、碳原子数为1以上且5以下的烷氧基、及卤素原子等。In formula (C1), R c2 is each independently a hydrogen atom, an optionally substituted alkyl group having 1 to 11 carbon atoms, or an optionally substituted aryl group. As a substituent which may be possessed when R c2 is an alkyl group, a phenyl group, a naphthyl group and the like are preferably exemplified. In addition, as a substituent which R c2 may have when it is an aryl group, an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 5 carbon atoms, a halogen atom, and the like are preferably exemplified.
式(C1)中,作为Rc2,可优选示例氢原子、甲基、乙基、正丙基、异丙基、正丁基、苯基、苄基、甲基苯基、萘基等,这些之中,更优选甲基或苯基。In formula (C1), as R c2 , hydrogen atom, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, phenyl group, benzyl group, methylphenyl group, naphthyl group and the like can be preferably exemplified, and these Among them, a methyl group or a phenyl group is more preferable.
式(C1)中,Rc3为通过C-N键与咔唑环中的氮原子键合的一价的可具有取代基的芳香族基团。该芳香族基团可以为芳基或杂芳基。作为杂芳基所具有的杂原子,可举出O、S、N、P、及Si等。In formula (C1), R c3 is a monovalent, optionally substituted aromatic group bonded to a nitrogen atom in a carbazole ring through a CN bond. The aromatic group can be aryl or heteroaryl. O, S, N, P, Si, etc. are mentioned as a hetero atom which a heteroaryl group has.
作为Rc3的、可具有取代基的芳香族基团的碳原子数没有特别限定。作为Rc3的可具有取代基的芳香族基团的碳原子数例如优选为1以上且50以下,更优选为1以上且30以下,尤其优选为1以上且20以下。需要说明的是,可具有取代基的芳香族基团的碳原子数不包括取代基的碳原子数。The number of carbon atoms of the aromatic group which may have a substituent as R c3 is not particularly limited. The number of carbon atoms of the optionally substituted aromatic group as R c3 is, for example, preferably 1 or more and 50 or less, more preferably 1 or more and 30 or less, and particularly preferably 1 or more and 20 or less. In addition, the carbon number of the aromatic group which may have a substituent does not include the carbon number of a substituent.
关于构成作为Rc3的杂芳基的杂环,可举出呋喃、噻吩、吡咯、噁唑、异噁唑、噻唑、噻二唑、异噻唑、咪唑、吡唑、三唑、四唑、吡啶、吡嗪、嘧啶、哒嗪、苯并呋喃、苯并噻吩、吲哚、异吲哚、吲哚嗪、苯并咪唑、苯并三唑、苯并噁唑、苯并噻唑、咔唑、嘌呤、喹啉、异喹啉、喹唑啉、酞嗪、肉啉、及喹喔啉等。Furan, thiophene, pyrrole, oxazole, isoxazole, thiazole, thiadiazole, isothiazole, imidazole, pyrazole, triazole, tetrazole, pyridine can be mentioned as the heterocycle constituting the heteroaryl group as R c3 , pyrazine, pyrimidine, pyridazine, benzofuran, benzothiophene, indole, isoindole, indoleazine, benzimidazole, benzotriazole, benzoxazole, benzothiazole, carbazole, purine , quinoline, isoquinoline, quinazoline, phthalazine, cinnoline, and quinoxaline, etc.
作为Rc3为芳基时的优选例,可举出苯基、萘-1-基、萘-2-基、2-苯基苯基、3-苯基苯基、及4-苯基苯基。Preferred examples when R c3 is an aryl group include a phenyl group, a naphthalene-1-yl group, a naphthalene-2-yl group, a 2-phenylphenyl group, a 3-phenylphenyl group, and a 4-phenylphenyl group. .
作为Rc3的芳香族基团可以具有取代基。关于作为Rc3的芳香族基团可具有的取代基的例子,可举出碳原子数为1以上且20以下的烷基、碳原子数为1以上且20以下的烷氧基、碳原子数为3以上且10以下的环烷基、碳原子数为3以上且10以下的环烷氧基、碳原子数为2以上且20以下的饱和脂肪族酰基、碳原子数为2以上且20以下的烷氧基羰基、碳原子数为2以上且20以下的饱和脂肪族酰基氧基、可具有取代基的苯基、可具有取代基的苯氧基、可具有取代基的苯基硫基、可具有取代基的苯甲酰基、可具有取代基的苯氧基羰基、可具有取代基的苯甲酰氧基、可具有取代基的碳原子数为7以上且20以下的苯基烷基、可具有取代基的萘基、可具有取代基的萘氧基、可具有取代基的萘甲酰基、可具有取代基的萘氧基羰基、可具有取代基的萘甲酰氧基、可具有取代基的碳原子数为11以上且20以下的萘基烷基、可具有取代基的杂环基、可具有取代基的杂环基羰基、氨基、经1个或2个有机基团取代的氨基、吗啉-1-基、及哌嗪-1-基、卤素、硝基、及氰基等。The aromatic group as R c3 may have a substituent. Examples of the substituent which the aromatic group of R c3 may have include an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, and an alkyl group having 1 to 20 carbon atoms. Cycloalkyl having 3 or more and 10 or less, cycloalkoxy having 3 or more and 10 or less carbon atoms, saturated aliphatic acyl group having 2 or more and 20 or less carbon atoms, or 2 or more and 20 or less carbon atoms alkoxycarbonyl, saturated aliphatic acyloxy having 2 or more and 20 or less carbon atoms, optionally substituted phenyl, optionally substituted phenoxy, optionally substituted phenylthio, An optionally substituted benzoyl group, an optionally substituted phenoxycarbonyl group, an optionally substituted benzoyloxy group, an optionally substituted phenylalkyl group having 7 to 20 carbon atoms, optionally substituted naphthyl, optionally substituted naphthyloxy, optionally substituted naphthoyl, optionally substituted naphthyloxycarbonyl, optionally substituted naphthoyloxy, optionally substituted Naphthyl alkyl group having 11 or more and 20 or less carbon atoms, optionally substituted heterocyclic group, optionally substituted heterocyclic carbonyl group, amino group, amino group substituted with one or two organic groups , morpholin-1-yl, and piperazin-1-yl, halogen, nitro, and cyano, etc.
作为Rc3的芳香族基团可具有的取代基的数目没有特别限定,可以为1个,也可以为2以上的多个。作为Rc3的芳香族基团具有多个取代基时,这些多个取代基可以相同也可以不同。The number of substituents which the aromatic group of R c3 may have is not particularly limited, and may be one or two or more. When the aromatic group as R c3 has a plurality of substituents, the plurality of substituents may be the same or different.
从容易合成、容易获得、容易形成截面形状良好的经图案化的固化膜的方面考虑,关于上文说明的式(C1)所示的肟酯化合物,优选t1为0、且t2为0。The oxime ester compound represented by the formula (C1) described above preferably has t1 of 0 and t2 of 0 from the viewpoints of easy synthesis, easy availability, and easy formation of a patterned cured film having a favorable cross-sectional shape.
如前文所述,作为Xc1,优选式(C2)表示的基团。As described above, as X c1 , a group represented by the formula (C2) is preferable.
作为Xc1为式(C2)表示的基团时的、式(C1)所示的肟酯化合物的优选具体例,可举出以下的化合物。Preferred specific examples of the oxime ester compound represented by formula (C1) when X c1 is a group represented by formula (C2) include the following compounds.
[化学式22][Chemical formula 22]
[化学式23][Chemical formula 23]
[化学式24][Chemical formula 24]
[化学式25][Chemical formula 25]
[化学式26][Chemical formula 26]
[化学式27][Chemical formula 27]
〔光聚合引发剂(C-II)〕[Photopolymerization initiator (C-II)]
就感光性树脂组合物而言,作为光聚合引发剂(C),可以与上述的光聚合引发剂(C-I)一同还包含光聚合引发剂(C-I)以外的其他光聚合引发剂(C-II)。作为其他光聚合引发剂(C-II),只要为不属于光聚合引发剂(C-I)的光聚合引发剂即可,没有特别限定。The photosensitive resin composition may contain, as the photopolymerization initiator (C), other photopolymerization initiators (C-II) other than the photopolymerization initiator (C-I) together with the above-mentioned photopolymerization initiator (C-I). ). The other photopolymerization initiator (C-II) is not particularly limited as long as it is a photopolymerization initiator that does not belong to the photopolymerization initiator (C-I).
作为光聚合引发剂(C-II)的优选例,可示例:具有不属于上述式(C1)的结构的肟酯化合物;2-苄基-2-二甲基氨基-1-(4-吗啉代苯基)1-丁酮、2-甲基-1-[4-(甲基硫基)苯基]-2-吗啉代-1-丙酮、2-苄基-2-二甲基氨基-1-(4-二甲基氨基苯基)1-丁酮、2-(4-甲基苄基)-2-二乙基氨基-1-(4-吗啉代苯基)1-丁酮、2-甲基-1-苯基-2-吗啉代-1-丙酮、2-甲基-1-[4-(己基)苯基]-2-吗啉代-1-丙酮、2-乙基-2-二甲基氨基-1-(4-吗啉代苯基)1-丁酮等α-氨基酮系化合物;1-苯基-2-羟基-2-甲基-1-丙酮、1-(4-异丙基苯基)-2-羟基-2-甲基-1-丙酮、4-(2-羟基乙氧基)苯基-(2-羟基-2-丙基)酮、1-羟基环己基苯基酮等α-羟基酮系光聚合引发剂;苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻丙基醚、苯偶酰甲基缩酮(benzil methyl ketal)等苯偶姻系光聚合引发剂;二苯甲酮、苯甲酰基苯甲酸、苯甲酰基苯甲酸甲酯、4-苯基二苯甲酮、羟基二苯甲酮、丙烯酰化二苯甲酮、4-苯甲酰基-4’-甲基二苯硫醚、4,4’-双二乙基氨基二苯甲酮等二苯甲酮系光聚合引发剂;噻吨酮、2-氯噻吨酮、2-甲基噻吨酮、异丙基噻吨酮、2,4-二异丙基噻吨酮等噻吨酮系光聚合引发剂;2,4,6-三氯均三嗪、2-苯基-4,6-双(三氯甲基)均三嗪、2-(对甲氧基苯基)-4,6-双(三氯甲基)均三嗪、2-(对甲苯基)-4,6-双(三氯甲基)均三嗪、2-胡椒基-4,6-双(三氯甲基)均三嗪、2,4-双(三氯甲基)-6-苯乙烯基均三嗪、2-(萘-1-基)-4,6-双(三氯甲基)均三嗪、2-(4-甲氧基-萘-1-基)-4,6-双(三氯甲基)均三嗪、2,4-三氯甲基-(胡椒基)-6-三嗪、2,4-三氯甲基-(4’-甲氧基苯乙烯基)-6-三嗪、2-[4-(4-甲氧基苯乙烯基)苯基]-4,6-双(三氯甲基)-1,3,5-三嗪等三嗪系光聚合引发剂;咔唑系光聚合引发剂;2,2’-双(2-氯苯基)-4,4’,5,5’-四(4-乙氧基羰基苯基)-1,2’-联咪唑、2,2’-双(2-溴苯基)-4,4’,5,5’-四(4-乙氧基羰基苯基)-1,2’-联咪唑、2,2’-双(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4-二氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4,6-三氯苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2-溴苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4-二溴苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑、2,2’-双(2,4,6-三溴苯基)-4,4’,5,5’-四苯基-1,2’-联咪唑等联咪唑系光聚合引发剂;下述式表示的这样的苯并咪唑啉系光聚合引发剂等。Preferred examples of the photopolymerization initiator (C-II) include: an oxime ester compound having a structure not belonging to the above formula (C1); Linophenyl) 1-butanone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholino-1-propanone, 2-benzyl-2-dimethyl Amino-1-(4-dimethylaminophenyl)1-butanone, 2-(4-methylbenzyl)-2-diethylamino-1-(4-morpholinophenyl)1- Butanone, 2-methyl-1-phenyl-2-morpholino-1-propanone, 2-methyl-1-[4-(hexyl)phenyl]-2-morpholino-1-propanone, α-Aminoketone compounds such as 2-ethyl-2-dimethylamino-1-(4-morpholinophenyl)1-butanone; 1-phenyl-2-hydroxy-2-methyl-1 - Acetone, 1-(4-Isopropylphenyl)-2-hydroxy-2-methyl-1-propanone, 4-(2-hydroxyethoxy)phenyl-(2-hydroxy-2-propyl) ) α-hydroxy ketone photopolymerization initiators such as ketone and 1-hydroxycyclohexyl phenyl ketone; benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, benzil Benzoin-based photopolymerization initiators such as benzil methyl ketal; benzophenone, benzoyl benzoic acid, methyl benzoyl benzoate, 4-phenylbenzophenone, hydroxydiphenyl Initiated by photopolymerization of benzophenones such as ketone, acrylated benzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, 4,4'-bisdiethylaminobenzophenone, etc. thioxanthone-based photopolymerization initiators such as thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, isopropylthioxanthone, 2,4-diisopropylthioxanthone, etc.; 2 , 4,6-trichloro-s-triazine, 2-phenyl-4,6-bis(trichloromethyl)-s-triazine, 2-(p-methoxyphenyl)-4,6-bis(trichloro) methyl)-s-triazine, 2-(p-tolyl)-4,6-bis(trichloromethyl)-s-triazine, 2-piperyl-4,6-bis(trichloromethyl)-s-triazine, 2,4-bis(trichloromethyl)-6-styryl-s-triazine, 2-(naphthalen-1-yl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4 -Methoxy-naphthalen-1-yl)-4,6-bis(trichloromethyl)s-triazine, 2,4-trichloromethyl-(piperonyl)-6-triazine, 2,4- Trichloromethyl-(4'-methoxystyryl)-6-triazine, 2-[4-(4-methoxystyryl)phenyl]-4,6-bis(trichloromethane base)-1,3,5-triazine and other triazine-based photopolymerization initiators; carbazole-based photopolymerization initiators; 2,2'-bis(2-chlorophenyl)-4,4',5,5 '-Tetrakis(4-ethoxycarbonylphenyl)-1,2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetrakis(4- Ethoxycarbonylphenyl)-1,2'-biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-bi Imidazole, 2,2'-bis(2,4-dichlorophenyl)- 4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6-trichlorophenyl)-4,4',5,5' -Tetraphenyl-1,2'-biimidazole, 2,2'-bis(2-bromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2 , 2'-bis(2,4-dibromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis(2,4,6 -Tribromophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole and other biimidazole-based photopolymerization initiators; such a benzimidazoline-based photopolymer represented by the following formula Polymerization initiators, etc.
[化学式28][Chemical formula 28]
光聚合引发剂(C-I)的质量相对光聚合引发剂(C)的质量而言的比率在不妨碍本发明的目的的范围内即可,没有特别限定。光聚合引发剂(C-I)的质量相对光聚合引发剂(C)的质量而言的比率优选为50质量%以上,更优选为70质量%以上,进一步优选为80质量%以上,进一步更优选为90质量%以上,尤其优选为100质量%。The ratio of the mass of the photopolymerization initiator (C-I) to the mass of the photopolymerization initiator (C) may be in a range that does not inhibit the purpose of the present invention, and is not particularly limited. The ratio of the mass of the photopolymerization initiator (C-I) to the mass of the photopolymerization initiator (C) is preferably 50% by mass or more, more preferably 70% by mass or more, still more preferably 80% by mass or more, still more preferably 90 mass % or more, 100 mass % is especially preferable.
相对感光性树脂组合物的固态成分整体的质量而言,光聚合引发剂(C)的含量优选为0.1质量%以上且30质量%以下,更优选为0.5质量%以上且20质量%以下。通过使光聚合引发剂(C)的含量在上述范围内,从而能够得到固化性良好、不易产生图案形状不良的感光性树脂组合物。The content of the photopolymerization initiator (C) is preferably 0.1 mass % or more and 30 mass % or less, more preferably 0.5 mass % or more and 20 mass % or less, with respect to the mass of the entire solid content of the photosensitive resin composition. By making content of a photoinitiator (C) into the said range, it becomes possible to obtain the photosensitive resin composition which is favorable in sclerosis|hardenability, and which is hard to produce a pattern shape defect.
<氟系树脂(D)><Fluorine resin (D)>
感光性树脂组合物含有氟系树脂(D)。感光性树脂组合物中含有氟系树脂(D)的情况下,在滤色器、有机EL显示元件、量子点显示器、或有机TFT阵列等中使用油墨来形成像素时,由感光性树脂组合物形成的隔堤容易排斥油墨。结果,能够防止:油墨向隔堤的附着;将油墨注入由隔堤围成的区域时的、相邻像素间的油墨的混合。The photosensitive resin composition contains the fluorine-based resin (D). When the photosensitive resin composition contains a fluorine-based resin (D), when ink is used to form pixels in color filters, organic EL display elements, quantum dot displays, or organic TFT arrays, etc., the photosensitive resin composition The formed banks tend to repel ink. As a result, it is possible to prevent the adhesion of the ink to the banks and the mixing of the inks between adjacent pixels when the ink is injected into the region surrounded by the banks.
氟系树脂(D)只要为含有氟原子、且能够对使用感光性树脂组合物形成的隔堤赋予针对各种油墨的斥油墨性的树脂即可,没有特别限定。氟系树脂(D)可以为含有氟原子的单体的均聚物、或者含有氟原子的单体与不含氟原子的单体的共聚物。The fluorine-based resin (D) is not particularly limited as long as it contains fluorine atoms and can impart ink repellency to various inks to banks formed using the photosensitive resin composition. The fluorine-based resin (D) may be a homopolymer of a fluorine atom-containing monomer, or a copolymer of a fluorine atom-containing monomer and a fluorine atom-free monomer.
作为氟系树脂(D)的优选例,可举出至少使(d1)具有烯键式不饱和基团及氟原子的单体、与(d2)(甲基)丙烯酸共聚而得到的共聚物。使用这样的氟系树脂(D)的情况下,容易使用感光性树脂组合物形成针对油墨(其用于形成像素)的斥液性优异的隔堤。Preferred examples of the fluorine-based resin (D) include copolymers obtained by copolymerizing at least (d1) a monomer having an ethylenically unsaturated group and a fluorine atom and (d2) (meth)acrylic acid. In the case of using such a fluorine-based resin (D), it is easy to form a bank excellent in liquid repellency to ink (which is used to form a pixel) using the photosensitive resin composition.
〔(d1)具有烯键式不饱和基团及氟原子的单体〕[(d1) Monomer having ethylenically unsaturated group and fluorine atom]
具有烯键式不饱和基团及氟原子的单体(以下,也记载为“(d1)单体”。)只要具有烯键式不饱和基团和氟原子即可,没有特别限定。作为这样的(d1)单体,可举出下式(d1-1)表示的化合物等。这些(d1)单体可以单独使用或组合两种以上而使用。The monomer having an ethylenically unsaturated group and a fluorine atom (hereinafter, also referred to as "(d1) monomer".) is not particularly limited as long as it has an ethylenically unsaturated group and a fluorine atom. As such a (d1) monomer, the compound etc. which are represented by following formula (d1-1) are mentioned. These (d1) monomers may be used alone or in combination of two or more.
[化学式29][Chemical formula 29]
式(d1-1)中,X1及X2各自独立地为氢原子或氟原子。X3为氢原子、氟原子、甲基、或全氟甲基。X4及X5各自独立地为氢原子、氟原子、或全氟甲基。Rf为碳原子数为1以上且40以下的含氟烷基、或碳原子数为2以上且100以下的具有醚键的含氟烷基。a为0以上且3以下的整数。b及c各自独立地为0或1。In formula (d1-1), X 1 and X 2 are each independently a hydrogen atom or a fluorine atom. X 3 is a hydrogen atom, a fluorine atom, a methyl group, or a perfluoromethyl group. X 4 and X 5 are each independently a hydrogen atom, a fluorine atom, or a perfluoromethyl group. Rf is a fluorine-containing alkyl group having 1 or more and 40 or less carbon atoms, or a fluorine-containing alkyl group having 2 or more and 100 or less carbon atoms and having an ether bond. a is an integer of 0 or more and 3 or less. b and c are each independently 0 or 1.
Rf为含氟烷基时,其碳原子数优选为2以上且20以下,更优选为3以上且10以下,尤其优选为4以上且6以下。Rf为具有醚键的含氟烷基时,其碳原子数优选为2以上且50以下,更优选为3以上且20以下,尤其优选为4以上且6以下。When Rf is a fluorine-containing alkyl group, the number of carbon atoms is preferably 2 or more and 20 or less, more preferably 3 or more and 10 or less, and particularly preferably 4 or more and 6 or less. When Rf is a fluorine-containing alkyl group having an ether bond, the number of carbon atoms is preferably 2 or more and 50 or less, more preferably 3 or more and 20 or less, and particularly preferably 4 or more and 6 or less.
相对于氟系树脂(D)的全部结构单元的摩尔数而言,衍生自(d1)单体的结构单元的含量优选为30摩尔%以上且80摩尔%以下,更优选为40摩尔%以上且60摩尔%以下。使氟系树脂(D)中的衍生自(d1)单体的结构单元的含量在上述范围内时,有下述倾向:容易使用感光性树脂组合物形成斥油墨性优异的隔堤,感光性树脂组合物中的、氟系树脂(D)与其他成分的相容性良好。The content of the structural unit derived from the monomer (d1) is preferably 30 mol % or more and 80 mol % or less, more preferably 40 mol % or more, with respect to the number of moles of the total structural units of the fluorine-based resin (D). 60 mol% or less. When the content of the structural unit derived from the monomer (d1) in the fluorine-based resin (D) is within the above range, there is a tendency that the photosensitive resin composition is used to easily form a bank excellent in ink repellency, and the photosensitivity In the resin composition, the fluorine-based resin (D) has good compatibility with other components.
(d1)单体优选具有-(CF2)tF表示的基团。t为1以上且10以下的整数,更优选为1以上且8以下的整数,进一步优选为2以上且6以下的整数。(d1)单体具有上述的基团时,容易使用感光性树脂组合物形成斥油墨性优异的隔堤。The (d1) monomer preferably has a group represented by -(CF 2 ) t F. t is an integer of 1 or more and 10 or less, more preferably an integer of 1 or more and 8 or less, and still more preferably an integer of 2 or more and 6 or less. When the monomer (d1) has the above-mentioned group, it is easy to form a bank excellent in ink repellency using the photosensitive resin composition.
〔(d2)(甲基)丙烯酸〕[(d2)(meth)acrylic acid]
为了提高感光性树脂组合物的显影性,氟系树脂(D)优选包含下述结构单元,所述结构单元来自作为具有羧基的单体的(d2)(甲基)丙烯酸。In order to improve the developability of the photosensitive resin composition, the fluorine-based resin (D) preferably contains a structural unit derived from (d2) (meth)acrylic acid which is a monomer having a carboxyl group.
相对于氟系树脂(D)的全部结构单元的摩尔数而言,来自(d2)(甲基)丙烯酸的结构单元的含量优选为0.1摩尔%以上且20摩尔%以下。氟系树脂(D)中的来自(d2)(甲基)丙烯酸的结构单元的含量在上述范围内时,容易得到显影性良好、能够形成斥油墨性优异的隔堤的感光性树脂组合物。The content of the structural unit derived from (d2) (meth)acrylic acid is preferably 0.1 mol % or more and 20 mol % or less with respect to the number of moles of all the structural units of the fluorine-based resin (D). When the content of the structural unit derived from (d2) (meth)acrylic acid in the fluorine-based resin (D) is within the above range, it is easy to obtain a photosensitive resin composition capable of forming a bank with excellent developability and excellent ink repellency.
氟系树脂(D)中,可根据需要共聚有除上述的(d1)单体及(d2)单体以外的其他单体。作为这样的其他单体,可举出以下记述的各种单体。In the fluorine-based resin (D), other monomers other than the above-mentioned (d1) monomer and (d2) monomer may be copolymerized as necessary. Examples of such other monomers include various monomers described below.
〔(d3)具有烯键式不饱和基团及环氧基的单体〕[(d3) Monomer having ethylenically unsaturated group and epoxy group]
氟系树脂(D)优选为还共聚有具有烯键式不饱和基团及环氧基的单体(以下,也称为“(d3)单体”。)的共聚物。通过使(d3)单体共聚,从而能够进一步提高由感光性树脂组合物形成的隔堤的斥油墨性。The fluorine-based resin (D) is preferably a copolymer in which a monomer (hereinafter, also referred to as "(d3) monomer") having an ethylenically unsaturated group and an epoxy group is further copolymerized. By copolymerizing the monomer (d3), the ink repellency of the bank formed of the photosensitive resin composition can be further improved.
作为(d3)单体,可举出:(甲基)丙烯酸缩水甘油酯;下述式(d3-1)~式(d3-3)表示的脂环式环氧化合物;使(甲基)丙烯酸的羧基与二官能以上的环氧化合物的环氧基反应而得到的单体;使在侧链具有羟基、羧基的丙烯酸系单体的羟基或羧基与二官能以上的环氧化合物的环氧基反应而得到的单体;等等。其中,优选(甲基)丙烯酸缩水甘油酯。这些(d3)单体可以单独使用或组合两种以上而使用。(d3) Monomers include: glycidyl (meth)acrylate; alicyclic epoxy compounds represented by the following formulae (d3-1) to (d3-3); (meth)acrylic acid A monomer obtained by reacting the carboxyl group of the acrylic monomer with the epoxy group of a bifunctional or higher epoxy compound; the hydroxyl group or carboxyl group of an acrylic monomer having a hydroxyl group or a carboxyl group in the side chain and the epoxy group of a bifunctional or higher epoxy compound The monomers obtained by the reaction; and so on. Among them, glycidyl (meth)acrylate is preferable. These (d3) monomers may be used alone or in combination of two or more.
[化学式30][Chemical formula 30]
式(d3-2)、及式(d3-3)中,R1d为氢原子或甲基。u为1以上且10以下的整数。v及w各自独立地为1以上且3以下的整数。In formula (d3-2) and formula (d3-3), R 1d is a hydrogen atom or a methyl group. u is an integer of 1 or more and 10 or less. v and w are each independently an integer of 1 or more and 3 or less.
氟系树脂包含来自(d3)单体的结构单元时,相对于氟系树脂(D)的全部结构单元的摩尔数而言,氟系树脂(D)中的该结构单元的含量优选为1摩尔%以上且40摩尔%以下,更优选为5摩尔%以上且15摩尔%以下。氟系树脂(D)中的来自(d3)单体的结构单元的含量在上述范围内时,容易得到能够形成斥油墨性良好的隔堤的感光性树脂组合物。When the fluorine-based resin contains a structural unit derived from the monomer (d3), the content of the structural unit in the fluorine-based resin (D) is preferably 1 mol with respect to the number of moles of all the structural units in the fluorine-based resin (D). % or more and 40 mol% or less, more preferably 5 mol% or more and 15 mol% or less. When the content of the structural unit derived from the monomer (d3) in the fluorine-based resin (D) is within the above range, it is easy to obtain a photosensitive resin composition capable of forming a bank with good ink repellency.
〔(d4)具有式(d4-1)所示的结构的单体〕[(d4) Monomer having a structure represented by formula (d4-1)]
氟系树脂(D)优选为还共聚有具有烯键式不饱和基团及下述式(d4-1)所示的结构的单体(以下,也称为“(d4)单体”。)的共聚物。通过使(d4)单体共聚,从而容易得到显影性优异的感光性树脂组合物,并能够提高感光性树脂组合物中的氟系树脂(D)与其他成分的相容性。It is preferable that the fluorine-based resin (D) is further copolymerized with a monomer having an ethylenically unsaturated group and a structure represented by the following formula (d4-1) (hereinafter, also referred to as "(d4) monomer".) the copolymer. By copolymerizing the monomer (d4), a photosensitive resin composition excellent in developability can be easily obtained, and the compatibility of the fluorine-based resin (D) and other components in the photosensitive resin composition can be improved.
[化学式31][Chemical formula 31]
(d4)单体更优选具有烯键式不饱和基团及下述式(d4-2)所示的结构。The monomer (d4) more preferably has an ethylenically unsaturated group and a structure represented by the following formula (d4-2).
[化学式32][Chemical formula 32]
式(d4-1)、及式(d4-2)中,R2d为碳原子数为1以上且5以下的亚烷基。该亚烷基可以为直链状也可以为支链状。作为该亚烷基,优选碳原子数为1以上且3以下的亚烷基,最优选亚乙基。R3d为氢原子、羟基、或可具有取代基的碳原子数为1以上且20以下的烷基。该烷基可以为直链状也可以为支链状。作为该烷基,优选碳原子数为1以上且3以下的烷基,最优选甲基。作为上述取代基,可举出羧基、羟基、碳原子数为1以上且5以下的烷氧基等。x为1以上的整数。作为x,优选1以上且60以下的整数,更优选1以上且12以下的整数。In formula (d4-1) and formula (d4-2), R 2d is an alkylene group having 1 or more and 5 or less carbon atoms. The alkylene group may be linear or branched. As the alkylene group, an alkylene group having 1 or more and 3 or less carbon atoms is preferable, and an ethylene group is most preferable. R 3d is a hydrogen atom, a hydroxyl group, or an optionally substituted alkyl group having 1 or more and 20 or less carbon atoms. The alkyl group may be linear or branched. As the alkyl group, an alkyl group having 1 or more and 3 or less carbon atoms is preferable, and a methyl group is most preferable. As said substituent, a carboxyl group, a hydroxyl group, an alkoxy group having 1 or more and 5 or less carbon atoms, etc. are mentioned. x is an integer of 1 or more. As x, an integer of 1 or more and 60 or less is preferable, and an integer of 1 or more and 12 or less is more preferable.
作为这样的(d4)单体,可举出下述式(d4-3)表示的化合物等。这些(d4)单体可以单独使用或组合两种以上而使用。As such a (d4) monomer, the compound etc. which are represented by following formula (d4-3) are mentioned. These (d4) monomers may be used alone or in combination of two or more.
[化学式33][Chemical formula 33]
式(d4-3)中,R4d为氢原子或甲基。R2d、R3d、及x与上述式(d4-1)、及(d4-2)中的含义相同。In formula (d4-3), R 4d is a hydrogen atom or a methyl group. R 2d , R 3d , and x have the same meanings as in the above formulas (d4-1) and (d4-2).
相对于氟系树脂(D)的全部结构单元的摩尔数而言,衍生自(d4)单体的结构单元的含量优选为1摩尔%以上且40摩尔%以下,更优选为5摩尔%以上且25摩尔%以下。衍生自(d4)单体的结构单元的含量在上述范围内时,有下述倾向:感光性树脂组合物的显影性、感光性树脂组合物中的(D)氟系树脂与其他成分的相容性良好。The content of the structural unit derived from the monomer (d4) is preferably 1 mol % or more and 40 mol % or less, more preferably 5 mol % or more, with respect to the number of moles of the total structural units of the fluorine-based resin (D). 25 mol% or less. When the content of the structural unit derived from the monomer (d4) is within the above range, the developability of the photosensitive resin composition and the phase relationship between the (D) fluorine-based resin and other components in the photosensitive resin composition tend to be Capacitance is good.
〔(d5)具有硅原子的单体〕[(d5) Monomer having silicon atom]
氟系树脂(D)优选为还共聚有具有硅原子的单体(以下,也称为“(d5)单体”。)的共聚物。(d5)单体只要具有烯键式不饱和基团及与硅原子键合的至少一个烷氧基即可,没有特别限定。通过使该(d5)单体共聚,从而能够进一步提高由感光性树脂组合物形成的隔堤的斥油墨性。The fluorine-based resin (D) is preferably a copolymer in which a monomer having a silicon atom (hereinafter, also referred to as "(d5) monomer") is further copolymerized. The monomer (d5) is not particularly limited as long as it has an ethylenically unsaturated group and at least one alkoxy group bonded to a silicon atom. By copolymerizing the monomer (d5), the ink repellency of the bank formed of the photosensitive resin composition can be further improved.
作为这样的(d5)单体,可举出下述式(d5-1)表示的化合物等。这些(d5)单体可以单独使用或组合两种以上而使用。As such a monomer (d5), the compound etc. which are represented by following formula (d5-1) are mentioned. These (d5) monomers may be used alone or in combination of two or more.
[化学式34][Chemical formula 34]
式(d5-1)中,R5d为氢原子或碳原子数为1以上且10以下的烷基,优选为氢原子或甲基。R6d为碳原子数为1以上且20以下的亚烷基或亚苯基,优选为碳原子数为1以上且10以下的亚烷基。R7d、及R8d各自独立地为碳原子数为1以上且10以下的烷基或苯基,优选为碳原子数为1以上且3以下的烷基。多个R7d与Si键合的情况下,该多个R7d可以相同也可以不同。多个(OR8d)与Si键合的情况下,该多个(OR8d)可以相同也可以不同。p为0或1,优选为1。q为1~3的整数,优选为2或3,更优选为3。In formula (d5-1), R 5d is a hydrogen atom or an alkyl group having 1 or more and 10 or less carbon atoms, preferably a hydrogen atom or a methyl group. R 6d is an alkylene group or a phenylene group having 1 to 20 carbon atoms, preferably an alkylene group having 1 to 10 carbon atoms. R 7d and R 8d are each independently an alkyl group or a phenyl group having 1 or more and 10 or less carbon atoms, preferably an alkyl group having 1 or more and 3 or less carbon atoms. When a plurality of R 7d is bonded to Si, the plurality of R 7d may be the same or different. When a plurality of (OR 8d ) are bonded to Si, the plurality of (OR 8d ) may be the same or different. p is 0 or 1, preferably 1. q is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.
相对于氟系树脂(D)的全部结构单元的摩尔数而言,衍生自(d5)单体的结构单元的含量优选为20摩尔%以下,更优选为10摩尔%以下。衍生自(d5)单体的结构单元的含量在上述范围内时,有下述倾向:斥油墨性以及与着色感光性树脂组合物的其他成分的相容性良好。The content of the structural unit derived from the monomer (d5) is preferably 20 mol % or less, more preferably 10 mol % or less, with respect to the number of moles of all the structural units of the fluorine-based resin (D). When the content of the structural unit derived from the monomer (d5) is within the above range, ink repellency and compatibility with other components of the colored photosensitive resin composition tend to be favorable.
作为上述单体以外的其他单体,可以使用具有烯键式不饱和基团的各种单体,其中,优选丙烯酸系单体。作为丙烯酸系单体的优选例,可举出甲基丙烯酸-2-羟基乙酯(HEMA)、N-羟基甲基丙烯酰胺(N-MAA)、甲基丙烯酸甲酯(MAA)、甲基丙烯酸环己酯(CHMA)、甲基丙烯酸异冰片酯(IBMA)等。相对于氟系树脂(D)的全部结构单元的摩尔数而言,氟系树脂(D)中的、来自这些其他单体的结构单元的含量优选为0摩尔%以上且25摩尔%以下。As other monomers other than the above-mentioned monomers, various monomers having an ethylenically unsaturated group can be used, and among them, acrylic monomers are preferred. Preferable examples of the acrylic monomer include 2-hydroxyethyl methacrylate (HEMA), N-hydroxymethacrylamide (N-MAA), methyl methacrylate (MAA), and methacrylic acid. Cyclohexyl ester (CHMA), isobornyl methacrylate (IBMA), etc. The content of the structural units derived from these other monomers in the fluorine-based resin (D) is preferably 0 mol % or more and 25 mol % or less with respect to the number of moles of all the structural units of the fluorine-based resin (D).
作为使(d1)单体及(d2)单体以及根据需要添加的其他单体反应而得到共聚物的方法,可以使用已知的方法。A known method can be used as a method of reacting the monomer (d1) and the monomer (d2) and other monomers added as necessary to obtain a copolymer.
氟系树脂(D)的重均分子量优选为2,000以上且50,000以下,更优选为5,000以上且20,000以下。通过使氟系树脂(D)的重均分子量为2,000以上,从而能够提高使用感光性树脂组合物形成的隔堤的耐热性及强度。通过使氟系树脂(D)的重均分子量为50,000以下,从而能够提高感光性树脂组合物的显影性。The weight average molecular weight of the fluorine-based resin (D) is preferably 2,000 or more and 50,000 or less, and more preferably 5,000 or more and 20,000 or less. By setting the weight average molecular weight of the fluorine-based resin (D) to be 2,000 or more, the heat resistance and strength of the bank formed using the photosensitive resin composition can be improved. The developability of the photosensitive resin composition can be improved by making the weight average molecular weight of a fluororesin (D) into 50,000 or less.
相对于感光性树脂组合物的固态成分而言,感光性树脂组合物中的氟系树脂(D)的含量优选为0.1质量%以上且10质量%以下,更优选为0.2质量%以上且5质量%以下。感光性树脂组合物以这样的量含有氟系树脂(D)时,能够对感光性树脂组合物赋予优异的敏感度、显影性、及分辨率,并且容易对使用感光性树脂组合物形成的隔堤赋予针对油墨(其用于形成像素)的良好的斥油墨性。The content of the fluorine-based resin (D) in the photosensitive resin composition is preferably 0.1 mass % or more and 10 mass % or less, more preferably 0.2 mass % or more and 5 mass % with respect to the solid content of the photosensitive resin composition. %the following. When the photosensitive resin composition contains the fluorine-based resin (D) in such an amount, excellent sensitivity, developability, and resolution can be imparted to the photosensitive resin composition, and the barrier formed using the photosensitive resin composition can be easily prevented. The banks impart good ink repellency to the ink used to form the pixels.
<着色剂(E)><Colorant (E)>
感光性树脂组合物还可以包含着色剂(E)。通过使感光性树脂组合物包含着色剂(E),从而可合适地用于例如液晶显示显示器的滤色器中的RGB等着色膜形成用途中。另外,感光性树脂组合物也优选包含遮光剂(E1)作为着色剂(E)。通过使用遮光剂(E1),从而能够形成在滤色器、有机EL显示元件、量子点显示器、或有机TFT阵列等中划分像素的遮光性的隔堤。需要说明的是,本申请中,将构成液晶显示器的滤色器的黑色矩阵也涵盖于隔堤中进行说明。The photosensitive resin composition may further contain a colorant (E). By making the photosensitive resin composition contain a coloring agent (E), it can be used suitably for coloring film formation applications, such as RGB in the color filter of a liquid crystal display display, for example. Moreover, it is also preferable that the photosensitive resin composition contains a light-shielding agent (E1) as a coloring agent (E). By using the light-shielding agent (E1), it is possible to form light-shielding banks that divide pixels in a color filter, an organic EL display element, a quantum dot display, an organic TFT array, or the like. In addition, in this application, the black matrix which comprises the color filter of a liquid crystal display is also included in a bank and demonstrated.
作为感光性树脂组合物中含有的着色剂(E),没有特别限定,例如,优选使用在染料索引(C.I.;The Society of Dyers and Colourists公司发行)中被分类为颜料(Pigment)的化合物,具体而言为附有下述染料索引(C.I.)编号的颜料。The colorant (E) contained in the photosensitive resin composition is not particularly limited. For example, compounds classified as pigments in the Dye Index (C.I.; issued by The Society of Dyers and Colourists) are preferably used. In terms of pigments, the following dye index (C.I.) numbers are attached.
作为可优选使用的黄色颜料的例子,可举出C.I.颜料黄1(以下,同样为“C.I.颜料黄”,仅记载编号。)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73,74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、151、152、153、154、155、156、166、167、168、175、180、及185。Examples of yellow pigments that can be preferably used include C.I. Pigment Yellow 1 (hereinafter, also referred to as "C.I. Pigment Yellow", and only numbers are described), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180, and 185.
作为可优选使用的橙色颜料的例子,可举出C.I.颜料橙1(以下,同样为“C.I.颜料橙”,仅记载编号。)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、及73。Examples of orange pigments that can be preferably used include C.I. Pigment Orange 1 (hereinafter, also referred to as "C.I. Pigment Orange", and only the numbers are described.), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61, 63, 64, 71, and 73.
作为可优选使用的紫色颜料的例子,可举出C.I.颜料紫1(以下,同样为“C.I.颜料紫”,仅记载编号。)、19、23、29、30、32、36、37、38、39、40、及50。Examples of violet pigments that can be preferably used include C.I. Pigment Violet 1 (hereinafter, also referred to as "C.I. Pigment Violet", and only the numbers are described.), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, and 50.
作为可优选使用的红色颜料的例子,可举出C.I.颜料红1(以下,同样为“C.I.颜料红”,仅记载编号。)2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、及265。Examples of red pigments that can be preferably used include C.I. Pigment Red 1 (hereinafter, also referred to as "C.I. Pigment Red", and only numbers are described.) 2, 3, 4, 5, 6, 7, 8, 9, 10 , 11, 12, 14, 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48:1, 48:2, 48:3 , 48:4, 49:1, 49:2, 50:1, 52:1, 53:1, 57, 57:1, 57:2, 58:2, 58:4, 60:1, 63:1 , 63:2, 64:1, 81:1, 83, 88, 90:1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149 , 150, 151, 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207 , 208, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, and 265.
作为可优选使用的蓝色颜料的例子,可举出C.I.颜料蓝1(以下,同样为“C.I.颜料蓝”,仅记载编号。)、2、15、15:3、15:4、15:6、16、22、60、64、及66。Examples of blue pigments that can be preferably used include C.I. Pigment Blue 1 (hereinafter, also referred to as "C.I. Pigment Blue", and only the numbers are described), 2, 15, 15:3, 15:4, 15:6 , 16, 22, 60, 64, and 66.
作为可优选使用的、上述以外的色相的颜料的例子,可举出C.I.颜料绿7、C.I.颜料绿36、C.I.颜料绿37等绿色颜料、C.I.颜料褐23、C.I.颜料褐25、C.I.颜料褐26、C.I.颜料褐28等褐色颜料、C.I.颜料黑1、C.I.颜料黑7等黑色颜料。Examples of pigments with hues other than the above that can be preferably used include green pigments such as C.I. Pigment Green 7, C.I. Pigment Green 36, and C.I. Pigment Green 37, C.I. Pigment Brown 23, C.I. Pigment Brown 25, and C.I. Pigment Brown 26 , C.I. Pigment Brown 28 and other brown pigments, C.I. Pigment Black 1, C.I. Pigment Black 7 and other black pigments.
另外,在对感光性树脂组合物赋予遮光性的情况下,感光性树脂组合物优选包含黑色颜料作为遮光剂(E1)。包含黑色颜料的感光性树脂组合物可合适地用于液晶显示面板中的黑色矩阵或黑色柱间隔物的形成、隔堤(其用于将有机EL元件中的发光层进行划区)的形成。Moreover, when providing light-shielding property to the photosensitive resin composition, it is preferable that the photosensitive resin composition contains a black pigment as a light-shielding agent (E1). The photosensitive resin composition containing a black pigment can be suitably used for formation of a black matrix or a black column spacer in a liquid crystal display panel, and formation of a bank (which divides the light-emitting layer in an organic EL element).
作为黑色颜料的例子,可举出炭黑、苝系颜料、内酰胺系颜料、钛黑、铜、铁、锰、钴、铬、镍、锌、钙、银等的金属氧化物、复合氧化物、金属硫化物、金属硫酸盐或金属碳酸盐等各种颜料(无论有机物、无机物均可)。这些黑色颜料中,从容易获得、容易形成遮光性优异且电阻高的固化膜的方面考虑,优选炭黑。Examples of black pigments include metal oxides and composite oxides such as carbon black, perylene-based pigments, lactam-based pigments, titanium black, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, and silver. , metal sulfides, metal sulfates or metal carbonates and other pigments (whether organic or inorganic). Among these black pigments, carbon black is preferable because it is easy to obtain, and is easy to form a cured film having excellent light-shielding properties and high electrical resistance.
需要说明的是,黑色颜料的色相不限于色彩学上的无彩色的黑色,也可以是发紫的黑色、发蓝的黑色、发红的黑色。It should be noted that the hue of the black pigment is not limited to achromatic black in terms of chromaticity, and may be purplish black, bluish black, or reddish black.
作为炭黑,可使用槽法炭黑(channel black)、炉法炭黑(furnace black)、热裂炭黑(thermal black)、灯黑(lamp black)等已知的炭黑,优选使用遮光性优异的槽法炭黑。另外,也可以使用经树脂被覆的炭黑。As the carbon black, known carbon blacks such as channel black, furnace black, thermal black, and lamp black can be used, and light-shielding properties are preferably used. Excellent channel black. In addition, resin-coated carbon black can also be used.
经树脂被覆的炭黑与未经树脂被覆的炭黑相比,导电性低,因此,在作为液晶显示器这样的液晶显示元件的黑色矩阵使用时,能够制造电流的泄露少、可靠性高的耗电低的显示器。Resin-coated carbon black has lower electrical conductivity than non-resin-coated carbon black, so when used as a black matrix of a liquid crystal display element such as a liquid crystal display, it is possible to produce a power consumption with less leakage of current and high reliability. Display with low battery.
作为炭黑,实施了导入酸性基团的处理的炭黑也是优选的。被导入至炭黑的酸性基团为显示基于布朗斯台德的定义的酸性的官能团。作为酸性基团的具体例,可举出羧基、磺酸基、磷酸基等。被导入至炭黑的酸性基团可以形成盐。与酸性基团形成盐的阳离子在不妨碍本发明的目的的范围内即可,没有特别限制。作为阳离子的例子,可举出各种金属离子、含氮化合物的阳离子、铵离子等,优选钠离子、钾离子、锂离子等碱金属离子、铵离子。As carbon black, the carbon black which performed the process to introduce|transduce an acidic group is also preferable. The acidic group introduced into carbon black is a functional group showing acidity based on Bronsted's definition. As a specific example of an acidic group, a carboxyl group, a sulfonic acid group, a phosphoric acid group, etc. are mentioned. The acidic groups introduced into carbon black can form salts. The cation that forms a salt with the acidic group is not particularly limited as long as it does not hinder the object of the present invention. Examples of cations include various metal ions, cations of nitrogen-containing compounds, ammonium ions, and the like, and preferred are alkali metal ions such as sodium ions, potassium ions, and lithium ions, and ammonium ions.
上文中说明的实施了导入酸性基团的处理的炭黑中,从达成使用感光性树脂组合物形成的遮光性的固化膜的高电阻的观点考虑,优选具有选自由羧酸基、羧酸盐基、磺酸基、及磺酸盐基组成的组中的1种以上官能团的炭黑。Among the carbon blacks that have been subjected to the treatment of introducing an acidic group as described above, from the viewpoint of achieving high resistance of the light-shielding cured film formed using the photosensitive resin composition, it is preferable to have a carbon black selected from the group consisting of carboxylic acid groups and carboxylate salts. Carbon black with one or more functional groups in the group consisting of a group consisting of a sulfonic acid group, a sulfonic acid group, and a sulfonic acid salt group.
向炭黑中导入酸性基团的方法没有特别限制。作为导入酸性基团的方法,例如可举出以下的方法。The method of introducing an acidic group into carbon black is not particularly limited. As a method of introducing an acidic group, the following method is mentioned, for example.
方法1),通过直接取代法(其使用浓硫酸、发烟硫酸、氯磺酸等)、间接取代法(其使用亚硫酸盐、亚硫酸氢盐等),向炭黑中导入磺酸基。In method 1), a sulfonic acid group is introduced into carbon black by a direct substitution method (which uses concentrated sulfuric acid, oleum, chlorosulfonic acid, etc.), an indirect substitution method (which uses sulfite, hydrogen sulfite, etc.).
方法2),使具有氨基和酸性基团的有机化合物与炭黑进行重氮偶联。In method 2), an organic compound having an amino group and an acidic group is subjected to diazo coupling with carbon black.
方法3),利用Williamson醚化法,使具有卤素原子和酸性基团的有机化合物、与具有羟基的炭黑反应。In method 3), an organic compound having a halogen atom and an acidic group is reacted with carbon black having a hydroxyl group by the Williamson etherification method.
方法4),使具有卤代羰基和被保护基保护的酸性基团的有机化合物、与具有羟基的炭黑反应。In method 4), an organic compound having a halogenated carbonyl group and an acidic group protected by a protecting group is reacted with carbon black having a hydroxyl group.
方法5),使用具有卤代羰基和被保护基保护的酸性基团的有机化合物,针对炭黑进行弗瑞德-克莱福特反应,然后进行脱保护。Method 5), using an organic compound having a halogenated carbonyl group and an acidic group protected by a protecting group, to carry out a Friedel-Clayford reaction on carbon black, followed by deprotection.
这些方法中,从导入酸性基团的处理容易进行并且安全的方面考虑,优选为方法2)。作为方法2)中使用的具有氨基和酸性基团的有机化合物,优选在芳香族基团上键合有氨基和酸性基团的化合物。作为这样的化合物的例子,可举出对氨基苯磺酸这样的氨基苯磺酸、4-氨基苯甲酸这样的氨基苯甲酸。Among these methods, method 2) is preferable from the viewpoint of easy and safe treatment of introducing an acidic group. As the organic compound having an amino group and an acidic group used in the method 2), a compound in which an amino group and an acidic group are bonded to an aromatic group is preferable. Examples of such compounds include aminobenzenesulfonic acid such as p-aminobenzenesulfonic acid, and aminobenzoic acid such as 4-aminobenzoic acid.
被导入至炭黑的酸性基团的摩尔数在不妨碍本发明的目的的范围内即可,没有特别限制。相对于炭黑100g而言,被导入至炭黑的酸性基团的摩尔数优选为1mmol以上且200mmol以下,更优选为5mmol以上且100mmol以下。The number of moles of acidic groups introduced into carbon black is not particularly limited as long as the number of moles of acidic groups does not hinder the object of the present invention. The number of moles of acidic groups introduced into carbon black is preferably 1 mmol or more and 200 mmol or less, and more preferably 5 mmol or more and 100 mmol or less, relative to 100 g of carbon black.
对于导入了酸性基团的炭黑,可实施利用树脂进行的被覆处理。Coating treatment with resin can be performed on the carbon black into which the acidic group is introduced.
在使用包含经树脂被覆的炭黑的感光性树脂组合物时,容易形成遮光性及绝缘性优异、表面反射率低的遮光性的固化膜。需要说明的是,通过利用树脂进行的被覆处理,不会特别地对使用感光性树脂组合物形成的遮光性的固化膜的介电常数产生不良影响。作为可用于被覆炭黑的树脂的例子,可举出酚醛树脂、三聚氰胺树脂、二甲苯树脂、邻苯二甲酸二烯丙酯树脂、甘酞(glyptal)树脂、环氧树脂、烷基苯树脂等热固性树脂、聚苯乙烯、聚碳酸酯、聚对苯二甲酸乙二醇酯、聚对苯二甲酸丁二醇酯、改性聚苯醚、聚砜、聚对苯二甲酰对苯二胺、聚酰胺酰亚胺、聚酰亚胺、聚氨基双马来酰亚胺、聚醚砜、聚亚苯基砜、聚芳酯、聚醚醚酮等热塑性树脂。相对于炭黑的质量和树脂的质量的总计而言,树脂对炭黑的被覆量优选为1质量%以上且30质量%以下。When the photosensitive resin composition containing resin-coated carbon black is used, it becomes easy to form a light-shielding cured film which is excellent in light-shielding property and insulating property, and has a low surface reflectance. In addition, by the coating process by resin, the dielectric constant of the light-shielding cured film formed using the photosensitive resin composition is not especially adversely affected. Examples of resins that can be used to coat carbon black include phenol resins, melamine resins, xylene resins, diallyl phthalate resins, glycerol resins, epoxy resins, and alkylbenzene resins. Thermosetting resin, polystyrene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, modified polyphenylene ether, polysulfone, polyparaphenylene terephthalate , Polyamideimide, Polyimide, Polyaminobismaleimide, Polyethersulfone, Polyphenylenesulfone, Polyarylate, Polyetheretherketone and other thermoplastic resins. The coating amount of the carbon black with the resin is preferably 1 mass % or more and 30 mass % or less with respect to the sum of the mass of the carbon black and the mass of the resin.
另外,作为黑色颜料,也可优选使用苝系颜料。作为苝系颜料的具体例,可举出下述式(e-1)表示的苝系颜料、下述式(e-2)表示的苝系颜料、及下述式(e-3)表示的苝系颜料。市售品中,可优选使用BASF公司制的制品名K0084、及K0086、颜料黑21、30、31、32、33、及34等作为苝系颜料。In addition, as the black pigment, a perylene-based pigment can also be preferably used. Specific examples of the perylene-based pigment include a perylene-based pigment represented by the following formula (e-1), a perylene-based pigment represented by the following formula (e-2), and a perylene-based pigment represented by the following formula (e-3). Perylene pigments. Among the commercial products, the product names K0084 and K0086, Pigment Black 21, 30, 31, 32, 33, and 34 manufactured by BASF Corporation can be preferably used as the perylene-based pigments.
[化学式35][Chemical formula 35]
式(e-1)中,Re1及Re2各自独立地表示碳原子数为1以上且3以下的亚烷基,Re3及Re4各自独立地表示氢原子、羟基、甲氧基、或乙酰基。In formula (e-1), R e1 and R e2 each independently represent an alkylene group having 1 to 3 carbon atoms, and R e3 and R e4 each independently represent a hydrogen atom, a hydroxyl group, a methoxy group, or Acetyl.
[化学式36][Chemical formula 36]
式(e-2)中,Re5及Re6各自独立地表示碳原子数为1以上且7以下的亚烷基。In formula (e-2), R e5 and R e6 each independently represent an alkylene group having 1 or more and 7 or less carbon atoms.
[化学式37][Chemical formula 37]
式(e-3)中,Re7及Re8各自独立地为氢原子、碳原子数为1以上且22以下的烷基,可以包含N、O、S、或P杂原子。Re7及Re8为烷基时,该烷基可以为直链状也可以为支链状。In formula (e-3), R e7 and R e8 are each independently a hydrogen atom, an alkyl group having 1 to 22 carbon atoms, and may contain N, O, S, or P hetero atoms. When R e7 and R e8 are alkyl groups, the alkyl groups may be linear or branched.
上述的式(e-1)表示的化合物、式(e-2)表示的化合物、及式(e-3)表示的化合物例如可利用日本特开昭62-1753号公报、日本特公昭63-26784号公报中记载的方法合成。即,将苝-3,5,9,10-四甲酸或其二酐和胺类作为原料,在水或有机溶剂中进行加热反应。而后,使得到的粗制物在硫酸中进行再沉淀,或者在水、有机溶剂或它们的混合溶剂中进行重结晶,由此可得到目标物。The compound represented by the above-mentioned formula (e-1), the compound represented by the formula (e-2), and the compound represented by the formula (e-3) can be used, for example, Japanese Patent Laid-Open No. 62-1753, Japanese Patent Laid-Open No. 63- It was synthesized by the method described in Gazette 26784. That is, perylene-3,5,9,10-tetracarboxylic acid or its dianhydride and amines are used as raw materials, and a heating reaction is performed in water or an organic solvent. Then, the target product can be obtained by reprecipitating the obtained crude product in sulfuric acid or recrystallization in water, an organic solvent, or a mixed solvent thereof.
为了使苝系颜料在感光性树脂组合物中良好地分散,苝系颜料的平均粒径优选为10nm以上且1000nm以下。In order to disperse the perylene-based pigment well in the photosensitive resin composition, the average particle diameter of the perylene-based pigment is preferably 10 nm or more and 1000 nm or less.
另外,作为遮光剂(E1),也包含内酰胺系颜料。作为内酰胺系颜料,例如,可举出下述式(e-4)表示的化合物。Moreover, as a light-shielding agent (E1), a lactam-type pigment is also contained. As a lactam-type pigment, the compound represented by following formula (e-4) is mentioned, for example.
[化学式38][Chemical formula 38]
式(e-4)中,Xe表示双键,作为几何异构体,各自独立地为E体或Z体,Re9各自独立地表示氢原子、甲基、硝基、甲氧基、溴原子、氯原子、氟原子、羧基、或磺基,Re10各自独立地表示氢原子、甲基、或苯基,Re11各自独立地表示氢原子、甲基、或氯原子。In the formula (e-4), X e represents a double bond, and as geometric isomers, each independently is an E or Z isomer, and R e9 each independently represents a hydrogen atom, a methyl group, a nitro group, a methoxy group, and a bromine group. Atom, chlorine atom, fluorine atom, carboxyl group, or sulfo group, R e10 each independently represents a hydrogen atom, methyl group, or phenyl group, and R e11 each independently represents a hydrogen atom, methyl group, or chlorine atom.
式(e-4)表示的化合物可以单独使用或组合两种以上而使用。The compound represented by formula (e-4) may be used alone or in combination of two or more.
从容易制造式(e-4)表示的化合物的方面考虑,Re9优选键合于二氢吲哚酮环的6位,Re11优选键合于二氢吲哚酮环的4位。从同样的观点考虑,Re9、Re10、及Re11优选为氢原子。From the viewpoint of easy production of the compound represented by the formula (e-4), R e9 is preferably bonded to the 6-position of the indolinone ring, and R e11 is preferably bonded to the 4-position of the indolinone ring. From the same viewpoint, R e9 , R e10 , and R e11 are preferably hydrogen atoms.
式(e-4)表示的化合物具有EE体、ZZ体、EZ体作为几何异构体,其可以是它们中任意的单一化合物,也可以是这些几何异构体的混合物。The compound represented by the formula (e-4) has an EE body, a ZZ body, and an EZ body as geometric isomers, and it may be any single compound among them, or a mixture of these geometric isomers.
式(e-4)表示的化合物例如可利用国际公开第2000/24736号、及国际公开第2010/081624号中记载的方法制造。The compound represented by formula (e-4) can be produced by the method described in, for example, International Publication No. 2000/24736 and International Publication No. 2010/081624.
为了使内酰胺系颜料在感光性树脂组合物中良好地分散,内酰胺系颜料的平均粒径优选为10nm以上且1000nm以下。In order to disperse the lactam-based pigment well in the photosensitive resin composition, the average particle diameter of the lactam-based pigment is preferably 10 nm or more and 1000 nm or less.
此外,还优选将以银锡(AgSn)合金为主成分的微粒(以下,称为“AgSn合金微粒”。)作为黑色颜料使用。对于该AgSn合金微粒而言,只要AgSn合金为主成分即可,也可包含例如Ni、Pd、Au等作为其他金属成分。In addition, it is also preferable to use fine particles mainly composed of a silver-tin (AgSn) alloy (hereinafter, referred to as "AgSn alloy fine particles") as the black pigment. The AgSn alloy fine particles may contain, for example, Ni, Pd, Au, and the like as other metal components as long as the AgSn alloy is the main component.
该AgSn合金微粒的平均粒径优选为1nm以上且300nm以下。The average particle diameter of the AgSn alloy fine particles is preferably 1 nm or more and 300 nm or less.
AgSn合金由化学式AgxSn表示时,能得到化学稳定的AgSn合金的x的范围为1≤x≤10,能同时得到化学稳定性和黑度的x的范围为3≤x≤4。When the AgSn alloy is represented by the chemical formula AgxSn, the range of x that can obtain chemically stable AgSn alloy is 1≤x≤10, and the range of x that can simultaneously obtain chemical stability and blackness is 3≤x≤4.
此处,在上述x的范围内,求出AgSn合金中的Ag的质量比,结果,Here, within the range of the above x, the mass ratio of Ag in the AgSn alloy was obtained, and as a result,
x=1时,Ag/AgSn=0.4762When x=1, Ag/AgSn=0.4762
x=3时,3·Ag/Ag3Sn=0.7317When x=3, 3·Ag/Ag3Sn=0.7317
x=4时,4·Ag/Ag4Sn=0.7843When x=4, 4·Ag/Ag4Sn=0.7843
x=10时,10·Ag/Ag10Sn=0.9008。When x=10, 10·Ag/Ag10Sn=0.9008.
因此,对于该AgSn合金而言,含有47.6质量%以上且90质量%以下的Ag时变得化学稳定,含有73.17质量%以上且78.43质量%以下的Ag时,能对应于Ag量而有效地得到化学稳定性和黑度。Therefore, when the AgSn alloy contains 47.6 mass % or more and 90 mass % or less of Ag, it becomes chemically stable, and when it contains 73.17 mass % or more and 78.43 mass % or less of Ag, it can be effectively obtained according to the amount of Ag. Chemical stability and blackness.
该AgSn合金微粒可利用通常的微粒合成法制作。作为微粒合成法,可举出气相反应法、喷雾热解法、喷散法、液相反应法、冷冻干燥法、水热合成法等。The AgSn alloy fine particles can be produced by a general particle synthesis method. Examples of the microparticle synthesis method include a gas phase reaction method, a spray pyrolysis method, a spray method, a liquid phase reaction method, a freeze drying method, a hydrothermal synthesis method, and the like.
AgSn合金微粒虽然绝缘性高,但根据感光性树脂组合物的用途,为了进一步提高绝缘性,也可用绝缘膜被覆表面。作为这样的绝缘膜的材料,优选金属氧化物或有机高分子化合物。Although AgSn alloy fine particles have high insulating properties, depending on the application of the photosensitive resin composition, in order to further improve the insulating properties, the surface may be covered with an insulating film. As a material of such an insulating film, a metal oxide or an organic polymer compound is preferable.
作为金属氧化物,可合适地使用具有绝缘性的金属氧化物,例如氧化硅(silica,二氧化硅)、氧化铝(alumina,三氧化二铝)、氧化锆(zirconia,二氧化锆)、氧化钇(yttria,三氧化二钇)、氧化钛(titania,二氧化钛)等。As the metal oxide, an insulating metal oxide such as silica (silica), alumina (alumina), zirconia (zirconia), Yttria (yttria, yttrium trioxide), titanium oxide (titania, titanium dioxide) and the like.
另外,作为有机高分子化合物,优选使用具有绝缘性的树脂,例如聚酰亚胺、聚醚、聚丙烯酸酯、聚胺化合物等。In addition, as the organic polymer compound, resins having insulating properties, such as polyimide, polyether, polyacrylate, polyamine compound, etc., are preferably used.
对于绝缘膜的膜厚而言,为了充分提高AgSn合金微粒的表面的绝缘性,优选为1nm以上且100nm以下的厚度,更优选为5nm以上且50nm以下。The thickness of the insulating film is preferably 1 nm or more and 100 nm or less, more preferably 5 nm or more and 50 nm or less, in order to sufficiently improve the insulating properties of the surfaces of the AgSn alloy fine particles.
绝缘膜可利用表面改性技术或表面的涂覆技术而容易地形成。尤其是,若使用四乙氧基硅烷、三乙醇铝等醇盐,则能在较低温度形成膜厚均匀的绝缘膜,因而优选。The insulating film can be easily formed using a surface modification technique or a surface coating technique. In particular, the use of alkoxides such as tetraethoxysilane and aluminum triethoxide is preferable because an insulating film with a uniform thickness can be formed at a relatively low temperature.
作为黑色颜料,可以单独使用上述的苝系颜料、内酰胺系颜料、AgSn合金微粒,也可将它们组合使用。As the black pigment, the above-mentioned perylene-based pigments, lactam-based pigments, and AgSn alloy fine particles may be used alone or in combination.
此外,出于调节色调的目的等,黑色颜料可以包含红、蓝、绿、黄等色相的色素。黑色颜料以外的色相的色素可以从已知的色素中适当选择。例如,作为黑色颜料以外的色相的色素,可使用上述的各种颜料。相对于黑色颜料的总质量而言,黑色颜料以外的色相的色素的使用量优选为15质量%以下,更优选为10质量%以下。In addition, the black pigment may contain pigments of hues such as red, blue, green, and yellow for the purpose of adjusting the color tone or the like. Colorants of hues other than black pigments can be appropriately selected from known colorants. For example, the above-mentioned various pigments can be used as pigments of hues other than black pigments. It is preferable that the usage-amount of the pigment|dye of the hue other than a black pigment is 15 mass % or less with respect to the total mass of a black pigment, and it is more preferable that it is 10 mass % or less.
可以与上文说明的黑色颜料一同、或者代替黑色颜料而使用黑色组合物,所述黑色组合物中组合包含两种以上的黑色或彩色的颜料及/或染料。A black composition containing two or more black or chromatic pigments and/or dyes in combination can be used together with or instead of the black pigment described above.
黑色组合物中的炭黑的含量优选为3质量%以下。通过使用炭黑的含量为3质量%以下的黑色组合物,从而容易抑制显影后的浮游物、显影残渣的产生。The content of carbon black in the black composition is preferably 3% by mass or less. By using the black composition whose content of carbon black is 3 mass % or less, it becomes easy to suppress generation|occurence|production of the float after image development, and image development residue.
黑色组合物中的炭黑的含量更优选为2质量%以下,进一步优选为1质量%以下,尤其优选为0质量%。The content of carbon black in the black composition is more preferably 2 mass % or less, still more preferably 1 mass % or less, and particularly preferably 0 mass %.
黑色组合物中包含的颜料及染料的色相没有特别限定。黑色组合物可以包含黑色的颜料及/或染料。黑色组合物可以为多种黑色着色剂的组合。该情况下,作为黑色着色剂,例如,可以使用苝黑、苯胺黑、及黑色偶氮化合物等。The hue of the pigment and dye contained in the black composition is not particularly limited. The black composition may contain black pigments and/or dyes. The black composition may be a combination of various black colorants. In this case, as the black colorant, for example, perylene black, nigrosine, black azo compounds, and the like can be used.
黑色组合物中,可以以组合物呈现黑色的方式,组合配合两种以上的除黑色以外的色相的颜料及/或染料。In the black composition, two or more pigments and/or dyes of hues other than black may be combined and blended so that the composition exhibits black.
从能够对黑色的色相进行精细调节、容易抑制显影后的浮游物、显影残渣的产生的方面考虑,就黑色组合物而言,与由单独一种着色剂构成的着色剂相比,更优选为多种彩色的着色剂的组合。From the viewpoints that the hue of black can be finely adjusted, and the occurrence of floating matter and development residues after development can be easily suppressed, the black composition is more preferable than a colorant composed of a single colorant. A combination of multiple colored colorants.
黑色组合物优选为从例如蓝色、紫色、黄色、红色、橙色五种颜色的有机颜料中选择的两种以上的有机颜料的组合。The black composition is preferably a combination of two or more organic pigments selected from, for example, five organic pigments of blue, violet, yellow, red, and orange.
通过从上述五种颜色的有机颜料中组合两种颜色以上的有机颜料,从而能够表达拟似黑色化的色相。此处所谓“拟似黑色”,理想地为色彩学上的黑色,但只要是使用黑色组合物形成的黑色膜的用途中允许的色相即可。By combining organic pigments of two or more colors from the organic pigments of the above-mentioned five colors, it is possible to express a hue similar to blackening. The term "pseudo black" here is ideally chromatic black, but it may be a hue acceptable for the application of the black film formed using the black composition.
就呈现拟似黑色的黑色组合物中的各色相的有机颜料的比率(质量比)而言,优选为(蓝色有机颜料)/(黄色有机颜料+橙色有机颜料)/(红色有机颜料+紫色有机颜料)=(30质量%以上且60质量%以下)/(0质量%以上且50质量%以下)/(5质量%以上且70质量%以下)。The ratio (mass ratio) of the organic pigments of the respective hues in the black composition that appears to be black is preferably (blue organic pigment)/(yellow organic pigment+orange organic pigment)/(red organic pigment+purple organic pigment) organic pigment)=(30 mass % or more and 60 mass % or less)/(0 mass % or more and 50 mass % or less)/(5 mass % or more and 70 mass % or less).
作为上述五种颜色的有机颜料,可以使用一直以来所使用的已知的有机颜料。As the organic pigments of the above-mentioned five colors, known organic pigments that have been conventionally used can be used.
作为蓝色有机颜料,可举出C.I.颜料蓝15:3、C.I.颜料蓝15:4、C.I.颜料蓝15:6、及C.I.颜料蓝60。The blue organic pigments include C.I. Pigment Blue 15:3, C.I. Pigment Blue 15:4, C.I. Pigment Blue 15:6, and C.I. Pigment Blue 60.
作为紫色有机颜料,可举出C.I.颜料紫19、及C.I.颜料紫23。Examples of the purple organic pigment include C.I. Pigment Violet 19 and C.I. Pigment Violet 23.
作为黄色有机颜料,可举出C.I.颜料黄83、C.I.颜料黄110、C.I.颜料黄128、C.I.颜料黄138、C.I.颜料黄139、C.I.颜料黄150、C.I.颜料黄151、C.I.颜料黄154、C.I.颜料黄155、C.I.颜料黄180、及C.I.颜料黄181。Examples of yellow organic pigments include C.I. Pigment Yellow 83, C.I. Pigment Yellow 110, C.I. Pigment Yellow 128, C.I. Pigment Yellow 138, C.I. Pigment Yellow 139, C.I. Pigment Yellow 150, C.I. Pigment Yellow 151, C.I. Pigment Yellow 154, C.I. Pigment Yellow 155, C.I. Pigment Yellow 180, and C.I. Pigment Yellow 181.
作为橙色有机颜料,可举出C.I.颜料橙38、C.I.颜料橙43、C.I.颜料橙64、C.I.颜料橙69、C.I.颜料橙71、及C.I.颜料橙73。Examples of the orange organic pigments include C.I. Pigment Orange 38, C.I. Pigment Orange 43, C.I. Pigment Orange 64, C.I. Pigment Orange 69, C.I. Pigment Orange 71, and C.I. Pigment Orange 73.
作为红色有机颜料,可举出C.I.颜料红122、C.I.颜料红166、C.I.颜料红177、C.I.颜料红179、C.I.颜料红242、C.I.颜料红224、C.I.颜料红254、C.I.颜料红256、C.I.颜料红264、及C.I.颜料红272。Examples of red organic pigments include C.I. Pigment Red 122, C.I. Pigment Red 166, C.I. Pigment Red 177, C.I. Pigment Red 179, C.I. Pigment Red 242, C.I. Pigment Red 224, C.I. Pigment Red 254, C.I. Pigment Red 256, C.I. Pigment Red 264, and C.I. Pigment Red 272.
其中,优选地,蓝色有机颜料为选自由C.I.颜料蓝15:3、C.I.颜料蓝15:4、及C.I.颜料蓝15:6组成的组中的至少一种,紫色有机颜料为C.I.颜料紫23,黄色有机颜料为C.I.颜料黄83及/或C.I.颜料黄139,橙色有机颜料为C.I.颜料橙43及/或C.I.颜料橙64,红色有机颜料为C.I.颜料红254及/或C.I.颜料红256。Wherein, preferably, the blue organic pigment is at least one selected from the group consisting of C.I. Pigment Blue 15:3, C.I. Pigment Blue 15:4, and C.I. Pigment Blue 15:6, and the purple organic pigment is C.I. Pigment Violet 23 , the yellow organic pigment is C.I. Pigment Yellow 83 and/or C.I. Pigment Yellow 139, the orange organic pigment is C.I. Pigment Orange 43 and/or C.I. Pigment Orange 64, and the red organic pigment is C.I. Pigment Red 254 and/or C.I. Pigment Red 256.
通过组合使用这些有机颜料,从而容易形成呈良好的黑色色相、光密度(OD值)优异的黑色固化膜。By using these organic pigments in combination, it becomes easy to form a black cured film which exhibits a favorable black hue and is excellent in optical density (OD value).
为了得到拟似黑色的黑色组合物,优选组合选自蓝色的有机颜料、黄色的有机颜料、及橙色的有机颜料中的至少一种,更优选进一步将这些有机颜料、与选自红色的有机颜料及紫色的有机颜料中的至少一种有机颜料组合。In order to obtain a black composition like black, at least one selected from the group consisting of blue organic pigments, yellow organic pigments, and orange organic pigments is preferably combined, and it is more preferable to further combine these organic pigments with red organic pigments A combination of at least one organic pigment in a pigment and a purple organic pigment.
作为属于具体的各色有机颜料的颜料的组合,例如,优选为As a combination of pigments belonging to specific organic pigments of various colors, for example, preferably
·C.I.颜料蓝15:4、C.I.颜料黄139与C.I.颜料红254的组合;Combination of C.I. Pigment Blue 15:4, C.I. Pigment Yellow 139 and C.I. Pigment Red 254;
·C.I.颜料蓝15:6、C.I.颜料橙64与C.I.颜料紫23的组合;Combination of C.I. Pigment Blue 15:6, C.I. Pigment Orange 64 and C.I. Pigment Violet 23;
·C.I.颜料蓝15:4或15:3、与C.I.颜料黄83、与C.I.颜料紫23与C.I.颜料红254的组合;及a combination of C.I. Pigment Blue 15:4 or 15:3, with C.I. Pigment Yellow 83, with C.I. Pigment Violet 23 and C.I. Pigment Red 254; and
·C.I.颜料蓝15:6、C.I.颜料紫23与C.I.颜料红256的组合;等等。· C.I. Pigment Blue 15:6, a combination of C.I. Pigment Violet 23 and C.I. Pigment Red 256; etc.
为了使上述着色剂(E)在感光性树脂组合物中均匀地分散,可以进一步使用分散剂。作为这样的分散剂,优选使用聚乙烯亚胺系、聚氨酯树脂系、丙烯酸树脂系的高分子分散剂。尤其是,使用炭黑作为着色剂(E)的情况下,作为分散剂,优选使用丙烯酸树脂系分散剂。In order to disperse the said coloring agent (E) uniformly in a photosensitive resin composition, a dispersing agent can be used further. As such a dispersant, polyethyleneimine-based, urethane resin-based, and acrylic resin-based polymer dispersants are preferably used. In particular, when carbon black is used as the colorant (E), it is preferable to use an acrylic resin-based dispersant as the dispersant.
需要说明的是,还存在从固化膜产生因分散剂而导致的腐蚀性气体的情况。因此,在不使用分散剂的情况下对颜料进行分散处理也是优选方式的一例。In addition, the corrosive gas by a dispersing agent may generate|occur|produce from a cured film. Therefore, dispersing the pigment without using a dispersant is also an example of a preferable form.
需要说明的是,可以在感光性树脂组合物中将颜料和染料组合使用。该染料从已知的材料中适当选择即可。In addition, a pigment and a dye can be used in combination in the photosensitive resin composition. The dye may be appropriately selected from known materials.
作为可应用于感光性树脂组合物的染料,例如,可举出偶氮染料、金属络盐偶氮染料、蒽醌染料、三苯基甲烷染料、呫吨染料、花菁染料、萘醌染料、醌亚胺染料、甲川(methine)染料、酞菁染料等。Examples of dyes applicable to the photosensitive resin composition include azo dyes, metal complex salt azo dyes, anthraquinone dyes, triphenylmethane dyes, xanthene dyes, cyanine dyes, naphthoquinone dyes, Quinoneimine dyes, methine dyes, phthalocyanine dyes, and the like.
另外,对于这些染料,可通过进行色淀化(成盐化)而使其分散于有机溶剂等中,从而将其作为着色剂(E)使用。In addition, these dyes can be used as colorants (E) by being laked (salified) and dispersed in an organic solvent or the like.
除了这些染料以外,例如,也可优选使用日本特开2013-225132号公报、日本特开2014-178477号公报、日本特开2013-137543号公报、日本特开2011-38085号公报、日本特开2014-197206号公报等中记载的染料等。In addition to these dyes, for example, JP 2013-225132 A, JP 2014-178477 A, JP 2013-137543 A, JP 2011-38085 A, JP 2011-38085 A can also be preferably used. Dyes and the like described in Gazette No. 2014-197206 and the like.
关于感光性树脂组合物中的着色剂(E)的使用量,可以在不妨碍本发明的目的的范围内适当选择。典型地,相对于感光性树脂组合物的固态成分整体的质量而言,着色剂(E)的使用量优选为2质量%以上且75质量%以下,更优选为3质量%以上且70质量%以下。About the usage-amount of the coloring agent (E) in the photosensitive resin composition, it can select suitably in the range which does not inhibit the objective of this invention. Typically, the usage-amount of the colorant (E) is preferably 2 mass % or more and 75 mass % or less, more preferably 3 mass % or more and 70 mass % with respect to the mass of the entire solid content of the photosensitive resin composition. the following.
尤其是,使用感光性树脂组合物形成黑色矩阵的情况下,优选以每1μm黑色矩阵被膜的OD值成为4以上的方式调节感光性树脂组合物中的遮光剂(E1)的量。若黑色矩阵中的每1μm被膜的OD值为4以上,则在用于液晶显示显示器的黑色矩阵时,能够得到充分的显示对比度。In particular, when forming a black matrix using the photosensitive resin composition, it is preferable to adjust the amount of the light-shielding agent (E1) in the photosensitive resin composition so that the OD value per 1 μm of the black matrix film becomes 4 or more. When the OD value per 1 μm of the film in the black matrix is 4 or more, when used for a black matrix of a liquid crystal display, a sufficient display contrast can be obtained.
使用颜料作为着色剂(E)时,优选的是,在存在或不存在分散剂的条件下以适当的浓度使颜料分散而制成分散液,然后添加至感光性树脂组合物中。When a pigment is used as the colorant (E), it is preferable to add the pigment to the photosensitive resin composition by dispersing the pigment at an appropriate concentration in the presence or absence of a dispersant to prepare a dispersion liquid.
需要说明的是,本说明书中,关于上述颜料的使用量,可以以该存在的分散剂也包含在内的值的形式进行定义。In addition, in this specification, the usage-amount of the said pigment can be defined as the value which also includes the dispersing agent which exists.
<咪唑产生剂(F)><imidazole generator (F)>
感光性树脂组合物可以包含咪唑产生剂(F),所述咪唑产生剂(F)通过曝光而产生下述式(F1)表示的咪唑化合物。感光性树脂组合物通过包含该咪唑产生剂(F),从而容易通过曝光而使感光性树脂组合物良好地固化,另外,容易形成截面形状良好的经图案化的固化膜。The photosensitive resin composition may contain an imidazole generator (F) that generates an imidazole compound represented by the following formula (F1) by exposure to light. When the photosensitive resin composition contains the imidazole generator (F), it becomes easy to cure the photosensitive resin composition favorably by exposure, and it becomes easy to form a patterned cured film having a favorable cross-sectional shape.
[化学式39][Chemical formula 39]
式(F1)中,Rf1、Rf2、及Rf3各自独立地为氢原子、卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、磺酸盐/酯基、膦基、氧膦基、膦酸盐/酯基、或有机基团。In formula (F1), R f1 , R f2 , and R f3 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group, a nitroso group, a sulfonic acid group A salt/ester group, a phosphino group, a phosphinyl group, a phosphonate/ester group, or an organic group.
式(F1)表示的咪唑化合物中,作为Rf1、Rf2、及Rf3的有机基团,可举出烷基、链烯基、环烷基、环烯基、芳基、及芳烷基等。该有机基团可以包含杂原子等烃基以外的键、取代基。另外,该有机基团可以为直链状、支链状、环状中的任一种。该有机基团通常为一价,在形成环状结构情况下等,可成为二价以上的有机基团。In the imidazole compound represented by the formula (F1), examples of the organic groups of R f1 , R f2 , and R f3 include an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, and an aralkyl group Wait. The organic group may contain a bond other than a hydrocarbon group such as a hetero atom or a substituent. In addition, the organic group may be linear, branched, or cyclic. This organic group is usually monovalent, and may be a divalent or more organic group when a cyclic structure is formed, for example.
就Rf1及Rf2而言,它们可以键合而形成环状结构,也可以进一步包含杂原子的键。作为环状结构,可举出杂环烷基、杂芳基等,也可以为稠环。R f1 and R f2 may be bonded to form a cyclic structure, or may further include a bond of a heteroatom. As a cyclic structure, a heterocycloalkyl group, a heteroaryl group, etc. are mentioned, and a condensed ring may be sufficient.
就Rf1、Rf2、及Rf3的有机基团中包含的键而言,只要不妨碍本发明的效果则没有特别限定,有机基团可以包含含有氧原子、氮原子、硅原子等杂原子的键。作为含有杂原子的键的具体例,可举出醚键、硫醚键、羰基键、硫代羰基键、酯键、酰胺键、氨基甲酸酯键、亚氨基键(-N=C(-R)-、-C(=NR)-:R表示氢原子或一价的有机基团)、碳酸酯键、磺酰基键、亚磺酰基键、及偶氮键等。The bonds contained in the organic groups of R f1 , R f2 , and R f3 are not particularly limited as long as the effects of the present invention are not hindered, and the organic groups may contain hetero atoms such as oxygen atoms, nitrogen atoms, and silicon atoms. key. Specific examples of the heteroatom-containing bond include an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, an amide bond, a urethane bond, an imino bond (-N=C(- R)-, -C(=NR)-: R represents a hydrogen atom or a monovalent organic group), a carbonate bond, a sulfonyl bond, a sulfinyl bond, an azo bond, and the like.
作为Rf1、Rf2、及Rf3的有机基团为烃基以外的取代基时,Rf1、Rf2、及Rf3只要不妨碍本发明的效果则没有特别限定。作为Rf1、Rf2、及Rf3的具体例,可举出卤素原子、羟基、巯基、硫醚基、氰基、异氰基、氰酸酯基、异氰酸酯基、硫氰酸酯基、异硫氰酸酯基、甲硅烷基、硅烷醇基、烷氧基、烷氧基羰基、氨基甲酰基、硫代氨基甲酰基、硝基、亚硝基、羧酸盐/酯基、酰基、酰氧基、亚磺基、磺酸盐/酯基、膦基、氧膦基、膦酸盐/酯基、烷基醚基、链烯基醚基、烷基硫醚基、链烯基硫醚基、芳基醚基、及芳基硫醚基等。上述取代基中包含的氢原子可以被烃基取代。另外,上述取代基中包含的烃基可以为直链状、支链状、及环状中的任一种。When the organic group as R f1 , R f2 , and R f3 is a substituent other than a hydrocarbon group, R f1 , R f2 , and R f3 are not particularly limited as long as they do not inhibit the effects of the present invention. Specific examples of R f1 , R f2 , and R f3 include a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a cyano group, an isocyano group, a cyanate group, an isocyanate group, a thiocyanate group, an isocyanato group Thiocyanate, silyl, silanol, alkoxy, alkoxycarbonyl, carbamoyl, thiocarbamoyl, nitro, nitroso, carboxylate/ester, acyl, acyl Oxy, sulfinyl, sulfonate/ester, phosphine, phosphinyl, phosphonate/ester, alkyl ether, alkenyl ether, alkyl sulfide, alkenyl sulfide group, aryl ether group, and aryl sulfide group, etc. The hydrogen atom contained in the above-mentioned substituent may be substituted with a hydrocarbon group. Moreover, the hydrocarbon group contained in the said substituent may be any of linear, branched, and cyclic.
作为Rf1、Rf2、及Rf3,优选氢原子、碳原子数为1以上且12以下的烷基、碳原子数为6以上且12以下的芳基、碳原子数为1以上且12以下的烷氧基、及卤素原子,更优选氢原子。R f1 , R f2 , and R f3 are preferably a hydrogen atom, an alkyl group having 1 or more and 12 or less carbon atoms, an aryl group having 6 or more and 12 or less carbon atoms, and 1 or more and 12 or less carbon atoms. alkoxy group and halogen atom, more preferably hydrogen atom.
咪唑产生剂(F)只要为能够通过曝光而产生式(F1)表示的咪唑化合物的化合物则没有特别限定。The imidazole generator (F) is not particularly limited as long as it is a compound capable of generating the imidazole compound represented by the formula (F1) by exposure.
作为咪唑产生剂(F),例如,可以使用在已知的感光性胺产生剂中将来自胺产生剂所产生的胺的基团替换为来自式(F1)表示的咪唑化合物的基团而成的化合物。As the imidazole generator (F), for example, in a known photosensitive amine generator, a group derived from an amine generated by the amine generator can be used and a group derived from an imidazole compound represented by the formula (F1) can be used. compound of.
从与感光性树脂组合物中包含的成分的相容性的方面考虑,作为优选的咪唑产生剂(F),可举出下述式(F1-1)表示的化合物。The compound represented by following formula (F1-1) is mentioned as a preferable imidazole generator (F) from the viewpoint of compatibility with the component contained in the photosensitive resin composition.
[化学式40][Chemical formula 40]
式(F1-1)中,Rf1、Rf2、及Rf3与式(F1)同样。In formula (F1-1), R f1 , R f2 , and R f3 are the same as those of formula (F1).
Rf11及Rf12各自独立地为氢原子、卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、或有机基团。Rf13、Rf14、Rf13、Rf16、及Rf17各自独立地为氢原子、卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、氨基、铵基、或有机基团。就Rf13、Rf14、Rf15、Rf16、及Rf17而言,它们中的2个以上可以键合而形成环状结构,也可以包含杂原子的键。R f11 and R f12 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group, a nitroso group, a sulfinyl group, a sulfo group, and a sulfonate/ester group, phosphino group, phosphinyl group, phosphono group, phosphonate group, or organic group. R f13 , Rf 14 , R f13 , R f16 , and R f17 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group, a nitroso group, and a sulfinyl group group, sulfo group, sulfonate/ester group, phosphino group, phosphinyl group, phosphono group, phosphonate/ester group, amino group, ammonium group, or organic group. As for R f13 , R f14 , R f15 , R f16 , and R f17 , two or more of them may be bonded to form a cyclic structure, or a bond of a heteroatom may be included.
作为Rf11及Rf12的有机基团,可举出针对式(F1)中的Rf1、Rf2、及Rf3所示例的有机基团。与Rf1、Rf2、及Rf3的情况同样地,作为Rf11、及Rf12的有机基团可以在该有机基团中包含杂原子。另外,该有机基团可以为直链状、支链状、环状中的任一种。As the organic group of R f11 and R f12 , the organic groups exemplified for R f1 , R f2 , and R f3 in the formula (F1) can be mentioned. As in the case of R f1 , R f2 , and R f3 , as the organic groups of R f11 and R f12 , a hetero atom may be included in the organic group. In addition, the organic group may be linear, branched, or cyclic.
上述之中,作为Rf11及Rf12,各自独立地优选为氢原子、碳原子数为1以上且10以下的烷基、碳原子数为4以上13以下的环烷基、碳原子数为4以上13以下的环烯基、碳原子数为7以上16以下的芳基氧基烷基、碳原子数为7以上且20以下的芳烷基、具有氰基的碳原子数为2以上且11以下的烷基、具有羟基的碳原子数为1以上且10以下的烷基、碳原子数为1以上且10以下的烷氧基、碳原子数为2以上且11以下的酰胺基、碳原子数为1以上且10以下的烷基硫基、碳原子数为1以上且10以下的酰基、碳原子数为2以上且11以下的酯基(-COOR、-OCOR:R表示烃基)、碳原子数为6以上且20以下的芳基、取代有供电子基团及/或吸电子基团的碳原子数为6以上且20以下的芳基、取代有供电子基团及/或吸电子基团的苄基、氰基、甲硫基。更优选的是,Rf11及Rf12两者为氢原子,或者Rf11为甲基、Rf12为氢原子。Among the above, as R f11 and R f12 , each independently is preferably a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, and 4 carbon atoms. Cycloalkenyl having 13 or more carbon atoms, aryloxyalkyl group having 7 to 16 carbon atoms, aralkyl group having 7 to 20 carbon atoms, cyano group having 2 to 11 carbon atoms The following alkyl groups, alkyl groups having a hydroxyl group with 1 to 10 carbon atoms, alkoxy groups with 1 to 10 carbon atoms, amide groups with 2 to 11 carbon atoms, carbon atoms Alkylthio group having 1 or more and 10 or less, acyl group having 1 or more and 10 or less carbon atoms, ester group having 2 or more and 11 or less carbon atoms (-COOR, -OCOR: R represents a hydrocarbon group), carbon Aryl group with 6 or more and 20 or less atoms, aryl group with 6 or more and 20 carbon atoms substituted with electron donating group and/or electron withdrawing group, substituted with electron donating group and/or electron withdrawing group group benzyl, cyano, methylthio. More preferably, both R f11 and R f12 are hydrogen atoms, or R f11 is a methyl group and R f12 is a hydrogen atom.
式(F1-1)中,Rf13、Rf14、Rf15、Rf16、及Rf17各自独立地为氢原子、卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、氨基、铵基、或有机基团。In formula (F1-1), R f13 , R f14 , R f15 , R f16 , and R f17 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group group, nitroso group, sulfinyl group, sulfo group, sulfonate group, phosphine group, phosphinyl group, phosphono group, phosphonate group, amino group, ammonium group, or organic group.
关于作为Rf13、Rf14、Rf15、Rf16、及Rf17的有机基团,可举出针对式(F1)中的Rf1、Rf2、及Rf3示例的有机基团。就作为Rf13、Rf14、Rf15、Rf16、及Rf17的有机基团而言,与Rf1、Rf2、及Rf3的情况同样,可以在该有机基团中包含杂原子。另外,该有机基团可以为直链状、支链状、环状中的任一种。As the organic group of R f13 , R f14 , R f15 , R f16 , and R f17 , the organic groups exemplified for R f1 , R f2 , and R f3 in the formula (F1) are exemplified. As for the organic groups of R f13 , Rf 14 , R f15 , R f16 , and R f17 , as in the case of R f1 , R f2 , and R f3 , a hetero atom may be included in the organic group. In addition, the organic group may be linear, branched, or cyclic.
就Rf13、Rf14、Rf15、Rf16、及Rf17而言,它们中的2个以上可以键合而形成环状结构,也可以包含杂原子的键。作为环状结构,可举出杂环烷基、杂芳基等,也可以为稠环。例如,对于Rf13、Rf14、Rf15、Rf16、及Rf17而言,它们中的2个以上可以键合,共有苯环(其键合有Rf13、Rf14、Rf15、Rf16、及Rf17)的原子,从而形成萘、蒽、菲、及茚等稠环。As for R f13 , R f14 , R f15 , R f16 , and R f17 , two or more of them may be bonded to form a cyclic structure, or a bond of a heteroatom may be included. As a cyclic structure, a heterocycloalkyl group, a heteroaryl group, etc. are mentioned, and a condensed ring may be sufficient. For example, for R f13 , R f14 , R f15 , R f16 , and R f17 , two or more of them may be bonded, and a benzene ring is shared (R f13 , R f14 , R f15 , and R f16 are bonded to each other). , and R f17 ) atoms to form fused rings such as naphthalene, anthracene, phenanthrene, and indene.
上述之中,作为Rf13、Rf14、Rf15、Rf16、及Rf17,各自独立地优选为氢原子、碳原子数为1以上且10以下的烷基、碳原子数为4以上13以下的环烷基、碳原子数为4以上13以下的环烯基、碳原子数为7以上16以下的芳基氧基烷基、碳原子数为7以上且20以下的芳烷基、具有氰基的碳原子数为2以上且11以下的烷基、具有羟基的碳原子数为1以上且10以下的烷基、碳原子数为1以上且10以下的烷氧基、碳原子数为2以上且11以下的酰胺基、碳原子数为1以上且10以下的烷基硫基、碳原子数为1以上且10以下的酰基、碳原子数为2以上且11以下的酯基、碳原子数为6以上且20以下的芳基、取代有供电子基团及/或吸电子基团的碳原子数为6以上且20以下的芳基、取代有供电子基团及/或吸电子基团的苄基、氰基、甲硫基、硝基。Among the above, as R f13 , R f14 , R f15 , R f16 , and R f17 , each independently preferably a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, and 4 to 13 carbon atoms. cycloalkyl group, cycloalkenyl group with 4 to 13 carbon atoms, aryloxyalkyl group with 7 to 16 carbon atoms, aralkyl group with 7 to 20 carbon atoms, cyano group An alkyl group having 2 or more and 11 or less carbon atoms, an alkyl group having a hydroxyl group having 1 or more and 10 or less carbon atoms, an alkoxy group having 1 or more and 10 or less carbon atoms, and 2 carbon atoms An amide group having 11 or more and 11 or less carbon atoms, an alkylthio group having 1 or more and 10 or less carbon atoms, an acyl group having 1 or more and 10 or less carbon atoms, an ester group having 2 or more and 11 or less carbon atoms, and carbon atoms Aryl group having 6 or more and 20 or less, aryl group substituted with electron donating group and/or electron withdrawing group and having 6 or more and 20 carbon atoms, substituted with electron donating group and/or electron withdrawing group group of benzyl, cyano, methylthio, nitro.
另外,作为Rf13、Rf14、Rf15、Rf16、及Rf17,下述情况也是优选的:它们中的2个以上键合,共有苯环(其键合有Rf13、Rf14、Rf15、Rf16、及Rf17)的原子,从而形成萘、蒽、菲、茚等稠环。In addition, as R f13 , R f14 , R f15 , R f16 , and R f17 , it is also preferable that two or more of them are bonded and share a benzene ring (which is bonded to R f13 , Rf 14 , R f17 , R f13 and R f17 ). f15 , R f16 , and R f17 ) atoms to form fused rings such as naphthalene, anthracene, phenanthrene, and indene.
上述式(F1-1)表示的化合物中,优选下述式(F1-1-1)表示的化合物。Among the compounds represented by the above formula (F1-1), the compounds represented by the following formula (F1-1-1) are preferable.
[化学式41][Chemical formula 41]
式(F1-1-1)中,Rf1、Rf2、及Rf3与式(F1)同样。Rf11~Rf16与式(F1-1)同样。Rf18表示氢原子或有机基团。式(F1-1-1)中,Rf13及Rf14不为羟基。就Rf13、Rf14、Rf15、及Rf16而言,它们中的2个以上可以键合而形成环状结构,也可以包含杂原子的键。In formula (F1-1-1), R f1 , R f2 , and R f3 are the same as those of formula (F1). R f11 to R f16 are the same as formula (F1-1). R f18 represents a hydrogen atom or an organic group. In formula (F1-1-1), R f13 and R f14 are not hydroxyl groups. As for R f13 , R f14 , R f15 , and R f16 , two or more of them may be bonded to form a cyclic structure, or a bond of a hetero atom may be included.
式(F1-1-1)表示的化合物具有取代基-O-Rf18,因此与感光性树脂组合物中包含的各成分的亲和性尤其优异。Since the compound represented by formula (F1-1-1) has a substituent -OR f18 , it is particularly excellent in affinity with each component contained in the photosensitive resin composition.
式(F1-1-1)中,Rf18为氢原子或有机基团。Rf18为有机基团时,作为有机基团,可举出针对式(F1)中的Rf1、Rf2、及Rf3示例的有机基团。就该有机基团而言,可以在该有机基团中含有杂原子。另外,该有机基团可以为直链状、支链状、环状中的任一种。作为Rf18,优选氢原子、或碳原子数为1以上且12以下的烷基,更优选甲基。In formula (F1-1-1), R f18 is a hydrogen atom or an organic group. When R f18 is an organic group, examples of the organic group include those exemplified for R f1 , R f2 , and R f3 in the formula (F1). In the case of the organic group, heteroatoms may be contained in the organic group. In addition, the organic group may be linear, branched, or cyclic. As R f18 , a hydrogen atom or an alkyl group having 1 or more and 12 or less carbon atoms is preferable, and a methyl group is more preferable.
作为式(F1-1)表示的化合物,以下示出尤其优选的化合物的具体例。Specific examples of particularly preferred compounds are shown below as the compound represented by the formula (F1-1).
[化学式42][Chemical formula 42]
以下的式(F1-2)表示的化合物也优选作为咪唑产生剂(F)。The compound represented by the following formula (F1-2) is also preferable as the imidazole generator (F).
[化学式43][Chemical formula 43]
式(F1-2)中,Rf1、Rf2、及Rf3与式(F1)同样。Rf21为氢原子、或一价的有机基团。Rf22为可具有取代基的芳香族基团。Rf21可以与另一Rf21或Rf22键合而形成环状结构。In formula (F1-2), R f1 , R f2 , and R f3 are the same as those of formula (F1). R f21 is a hydrogen atom or a monovalent organic group. R f22 is an aromatic group which may have a substituent. R f21 may bond with another R f21 or R f22 to form a cyclic structure.
式(F1-2)中,Rf21为氢原子或一价的有机基团。一价的有机基团没有特别限定,例如,可以为可具有取代基的烷基、可具有取代基的芳香族基团等。Rf21为烷基时,该烷基可以在链中具有酯键等。In formula (F1-2), R f21 is a hydrogen atom or a monovalent organic group. The monovalent organic group is not particularly limited, and may be, for example, an optionally substituted alkyl group, an optionally substituted aromatic group, or the like. When R f21 is an alkyl group, the alkyl group may have an ester bond or the like in the chain.
作为烷基,例如可以与后述的式(F1-2-1)中的Rf24等同样。烷基的碳原子数优选为1以上且40以下,更优选为1以上且30以下,尤其优选为1以上且20以下,最优选为1以上且10以下。As the alkyl group, for example, R f24 and the like in the formula (F1-2-1) described later may be the same. The number of carbon atoms of the alkyl group is preferably 1 or more and 40 or less, more preferably 1 or more and 30 or less, particularly preferably 1 or more and 20 or less, and most preferably 1 or more and 10 or less.
作为该烷基可具有的取代基,例如可以与作为后述的式(F1-2-1)中的Rf25的亚烷基可具有的取代基同样。As a substituent which this alkyl group may have, for example, it may be the same as a substituent which the alkylene group of R f25 in the formula (F1-2-1) mentioned later may have.
作为可具有取代基的芳香族基团,与后述的式(F1-2-1)中的Rf22同样,优选为芳基,更优选为苯基。作为Rf21的可具有取代基的芳香族基团可以与Rf22相同也可以不同。As an aromatic group which may have a substituent, like R f22 in formula (F1-2-1) mentioned later, an aryl group is preferable, and a phenyl group is more preferable. The aromatic group which may have a substituent as R f21 may be the same as or different from R f22 .
式(F1-2)中,优选一个Rf21为氢原子,更优选一个Rf21为氢原子且另一Rf21为可具有取代基的烷基或可具有取代基的芳香族基团。In the formula (F1-2), preferably one R f21 is a hydrogen atom, more preferably one R f21 is a hydrogen atom and the other R f21 is an optionally substituted alkyl group or an optionally substituted aromatic group.
式(F1-2)中,Rf21可以与另一Rf21或Rf22键合而形成环状结构。例如,至少一个Rf21为可具有取代基的烷基时,Rf21可以与另一Rf21或Rf22键合而形成环状结构。In formula (F1-2), R f21 may bond with another R f21 or R f22 to form a cyclic structure. For example, when at least one R f21 is an alkyl group which may have a substituent, R f21 may be bonded to another R f21 or R f22 to form a cyclic structure.
式(F1-2)表示的化合物可以为下述式(F1-2-1)表示的化合物。The compound represented by the formula (F1-2) may be a compound represented by the following formula (F1-2-1).
[化学式44][Chemical formula 44]
式(F1-2-1)中,Rf1、Rf2、及Rf3与式(F1)同样。Rf23为氢原子或烷基。Rf22为可具有取代基的芳香族基团。Rf24为可具有取代基的亚烷基。Rf24可以与Rf22键合而形成环状结构。In formula (F1-2-1), R f1 , R f2 , and R f3 are the same as those of formula (F1). R f23 is a hydrogen atom or an alkyl group. R f22 is an aromatic group which may have a substituent. R f24 is an alkylene group which may have a substituent. R f24 may bond with R f22 to form a cyclic structure.
式(F1-2-1)中,Rf23为氢原子或烷基。Rf23为烷基时,该烷基可以为直链烷基,也可以为支链烷基。该烷基的碳原子数没有特别限定,优选为1以上且20以下,优选为1以上且10以下,更优选为1以上且5以下。In formula ( F1-2-1 ), R f23 is a hydrogen atom or an alkyl group. When R f23 is an alkyl group, the alkyl group may be a straight-chain alkyl group or a branched-chain alkyl group. The number of carbon atoms of the alkyl group is not particularly limited, but is preferably 1 or more and 20 or less, preferably 1 or more and 10 or less, and more preferably 1 or more and 5 or less.
关于作为Rf23优选的烷基的具体例,可举出甲基、乙基、正丙基、异丙基、正丁基、异丁基、仲丁基、叔丁基、正戊基、异戊基、叔戊基、正己基、正庚基、正辛基、2-乙基正己基、正壬基、正癸基、正十一烷基、正十二烷基、正十三烷基、正十四烷基、正十五烷基、正十六烷基、正十七烷基、正十八烷基、正十九烷基、及正二十烷基。Specific examples of the preferred alkyl group for R f23 include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, n-pentyl, isopropyl Amyl, tert-amyl, n-hexyl, n-heptyl, n-octyl, 2-ethyl-n-hexyl, n-nonyl, n-decyl, n-undecyl, n-dodecyl, n-tridecyl , n-tetradecyl, n-pentadecyl, n-hexadecyl, n-heptadecyl, n-octadecyl, n-nonadecyl, and n-eicosyl.
式(F1-2-1)中,Rf22为可具有取代基的芳香族基团。可具有取代基的芳香族基团可以为可具有取代基的芳香族烃基,也可以为可具有取代基的芳香族杂环基。In formula (F1-2-1), R f22 is an aromatic group which may have a substituent. The aromatic group which may have a substituent may be an aromatic hydrocarbon group which may have a substituent, or an aromatic heterocyclic group which may have a substituent.
芳香族烃基的种类在不妨碍本发明的目的的范围内即可,没有特别限定。芳香族烃基可以为单环式芳香族基团,也可以为2个以上的芳香族烃基缩合而形成的基团,还可以为2个以上的芳香族烃基通过单键键合而形成的基团。作为芳香族烃基,优选苯基、萘基、联苯基、蒽基、菲基。The kind of the aromatic hydrocarbon group is not particularly limited as long as it does not hinder the purpose of the present invention. The aromatic hydrocarbon group may be a monocyclic aromatic group, a group formed by condensation of two or more aromatic hydrocarbon groups, or a group formed by bonding two or more aromatic hydrocarbon groups through a single bond . As the aromatic hydrocarbon group, a phenyl group, a naphthyl group, a biphenyl group, an anthracenyl group, and a phenanthryl group are preferable.
芳香族杂环基的种类在不妨碍本发明的目的的范围内即可,没有特别限定。芳香族杂环基可以为单环式基团,也可以为多环式基团。作为芳香族杂环基,优选吡啶基、呋喃基、噻吩基、咪唑基、吡唑基、噁唑基、噻唑基、异噁唑基、异噻唑基、苯并噁唑基、苯并噻唑基、及苯并咪唑基。The kind of the aromatic heterocyclic group is not particularly limited as long as it does not hinder the purpose of the present invention. The aromatic heterocyclic group may be a monocyclic group or a polycyclic group. As the aromatic heterocyclic group, pyridyl, furyl, thienyl, imidazolyl, pyrazolyl, oxazolyl, thiazolyl, isoxazolyl, isothiazolyl, benzoxazolyl, and benzothiazolyl are preferred , and benzimidazolyl.
作为苯基、多环芳香族烃基、或芳香族杂环基可具有的取代基,可举出卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、氨基、铵基、及有机基团。苯基、多环芳香族烃基、或芳香族杂环基具有多个取代基时,所述多个取代基可以相同也可以不同。Examples of substituents that a phenyl group, a polycyclic aromatic hydrocarbon group, or an aromatic heterocyclic group may have include a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group, and a nitroso group. , sulfinyl, sulfo, sulfonate, phosphine, phosphinyl, phosphono, phosphonate, amino, ammonium, and organic groups. When a phenyl group, a polycyclic aromatic hydrocarbon group, or an aromatic heterocyclic group has a plurality of substituents, the plurality of substituents may be the same or different.
芳香族基团所具有的取代基为有机基团时,作为该有机基团,可举出烷基、链烯基、环烷基、环烯基、芳基、及芳烷基等。就该有机基团而言,也可以在该有机基团中包含杂原子等烃基以外的键、取代基。另外,该有机基团可以为直链状、支链状、环状、及这些结构的组合中的任一种。该有机基团通常为一价,形成环状结构情况下等,可成为二价以上的有机基团。When the substituent which an aromatic group has is an organic group, an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, an aralkyl group, etc. are mentioned as this organic group. The organic group may contain a bond other than a hydrocarbon group such as a hetero atom or a substituent in the organic group. In addition, the organic group may be any of linear, branched, cyclic, and combinations of these structures. This organic group is usually monovalent, and when it forms a cyclic structure, it may become a divalent or more organic group.
芳香族基团在相邻的碳原子上具有取代基时,键合于相邻的碳原子上的2个取代基可以键合而形成环状结构。作为环状结构,可举出脂肪族烃环、含有杂原子的脂肪族环。When the aromatic group has a substituent on adjacent carbon atoms, two substituents bonded to adjacent carbon atoms may be bonded to form a cyclic structure. Examples of the cyclic structure include aliphatic hydrocarbon rings and heteroatom-containing aliphatic rings.
芳香族基团所具有的取代基为有机基团时,该有机基团中包含的键只要不妨碍本发明的效果则没有特别限定,有机基团可以包含含有氧原子、氮原子、硅原子等杂原子的键。作为含有杂原子的键的具体例,可举出醚键、硫醚键、羰基键、硫代羰基键、酯键、酰胺键、氨基甲酸酯键、亚氨基键(-N=C(-R)-、-C(=NR)-:R表示氢原子或有机基团)、碳酸酯键、磺酰基键、亚磺酰基键、偶氮键等。When the substituent of the aromatic group is an organic group, the bond contained in the organic group is not particularly limited as long as the effect of the present invention is not hindered, and the organic group may contain an oxygen atom, a nitrogen atom, a silicon atom, or the like. Heteroatom bonds. Specific examples of the heteroatom-containing bond include an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, an amide bond, a urethane bond, an imino bond (-N=C(- R)-, -C(=NR)-: R represents a hydrogen atom or an organic group), a carbonate bond, a sulfonyl bond, a sulfinyl bond, an azo bond, and the like.
有机基团为烃基以外的取代基时,烃基以外的取代基的种类在不妨碍本发明的目的的范围内即可,没有特别限定。作为烃基以外的取代基的具体例,可举出卤素原子、羟基、巯基、硫醚基、氰基、异氰基、氰酸酯基、异氰酸酯基、硫氰酸酯基、异硫氰酸酯基、甲硅烷基、硅烷醇基、烷氧基、烷氧基羰基、氨基、单烷基氨基、二烷基铝基、单芳基氨基、二芳基氨基、氨基甲酰基、硫代氨基甲酰基、硝基、亚硝基、羧酸盐/酯基、酰基、酰氧基、亚磺基、磺酸盐/酯基、膦基、氧膦基、膦酸盐/酯基、烷基醚基、链烯基醚基、烷基硫醚基、链烯基硫醚基、芳基醚基、芳基硫醚基等。上述取代基中包含的氢原子可以被烃基取代。另外,上述取代基中包含的烃基可以为直链状、支链状、及环状中的任一种。When the organic group is a substituent other than a hydrocarbon group, the kind of the substituent other than the hydrocarbon group may be in a range that does not inhibit the purpose of the present invention, and is not particularly limited. Specific examples of the substituents other than the hydrocarbon group include a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a cyano group, an isocyano group, a cyanate group, an isocyanate group, a thiocyanate group, and an isothiocyanate group. group, silyl group, silanol group, alkoxy group, alkoxycarbonyl group, amino group, monoalkylamino group, dialkylaluminum group, monoarylamino group, diarylamino group, carbamoyl group, thiocarbamoyl group Acyl, nitro, nitroso, carboxylate/ester, acyl, acyloxy, sulfinyl, sulfonate/ester, phosphino, phosphinyl, phosphonate/ester, alkyl ether group, alkenyl ether group, alkyl sulfide group, alkenyl sulfide group, aryl ether group, aryl sulfide group and the like. The hydrogen atom contained in the above-mentioned substituent may be substituted with a hydrocarbon group. Moreover, the hydrocarbon group contained in the said substituent may be any of linear, branched, and cyclic.
作为苯基、多环芳香族烃基、或芳香族杂环基所具有的取代基,优选碳原子数为1以上且12以下的烷基、碳原子数为1以上且12以下的芳基、碳原子数为1以上且12以下的烷氧基、碳原子数为1以上且12以下的芳基氧基、碳原子数为1以上且12以下的芳基氨基、及卤素原子。The substituent of the phenyl group, the polycyclic aromatic hydrocarbon group, or the aromatic heterocyclic group is preferably an alkyl group having 1 or more and 12 or less carbon atoms, an aryl group having 1 or more and 12 or less carbon atoms, and a carbon An alkoxy group having 1 or more and 12 or less atoms, an aryloxy group having 1 or more and 12 or less carbon atoms, an arylamino group having 1 or more and 12 or less carbon atoms, and a halogen atom.
作为Rf22,从能够廉价且容易地合成式(F1-2)或式(F1-2-1)表示的咪唑化合物、咪唑化合物在水、有机溶剂中的溶解性良好的方面考虑,优选各自可具有取代基的苯基、呋喃基、及噻吩基。As R f22 , the imidazole compound represented by the formula (F1-2) or the formula (F1-2-1) can be synthesized cheaply and easily, and the solubility of the imidazole compound in water and organic solvents is good, and each of them is preferably Substituted phenyl, furyl, and thienyl groups.
式(F1-2-1)中,Rf24为可具有取代基的亚烷基。亚烷基可具有的取代基在不妨碍本发明的目的的范围内即可,没有特别限定。作为亚烷基可具有的取代基的具体例,可举出羟基、烷氧基、氨基、氰基、及卤素原子等。亚烷基可以为直链亚烷基,也可以为支链亚烷基,优选直链亚烷基。亚烷基的碳原子数没有特别限定,优选为1以上且20以下,更优选为1以上且10以下,尤其优选为1以上且5以下。需要说明的是,亚烷基的碳原子数不包括与亚烷基键合的取代基的碳原子。In formula (F1-2-1), R f24 is an alkylene group which may have a substituent. The substituent which the alkylene group may have is not particularly limited as long as it does not inhibit the object of the present invention. As a specific example of the substituent which an alkylene group may have, a hydroxyl group, an alkoxy group, an amino group, a cyano group, a halogen atom, etc. are mentioned. The alkylene group may be a straight-chain alkylene group or a branched-chain alkylene group, and a straight-chain alkylene group is preferred. The number of carbon atoms of the alkylene group is not particularly limited, but is preferably 1 or more and 20 or less, more preferably 1 or more and 10 or less, and particularly preferably 1 or more and 5 or less. In addition, the carbon atom number of an alkylene group does not include the carbon atom of the substituent couple|bonded with an alkylene group.
作为与亚烷基键合的取代基的烷氧基可以为直链烷氧基,也可以为支链烷氧基。作为取代基的烷氧基的碳原子数没有特别限定,优选为1以上且10以下,更优选为1以上且6以下,尤其优选为1以上且3以下。The alkoxy group as the substituent bonded to the alkylene group may be a straight-chain alkoxy group or a branched-chain alkoxy group. The number of carbon atoms of the alkoxy group as a substituent is not particularly limited, but is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and particularly preferably 1 or more and 3 or less.
作为与亚烷基键合的取代基的氨基可以为单烷基氨基或二烷基氨基。单烷基氨基或二烷基氨基中包含的烷基可以为直链烷基也可以为支链烷基。单烷基氨基或二烷基氨基中包含的烷基的碳原子数没有特别限定,优选为1以上且10以下,更优选为1以上且6以下,尤其优选为1以上且3以下。The amino group as the substituent bonded to the alkylene group may be a monoalkylamino group or a dialkylamino group. The alkyl group contained in the monoalkylamino group or the dialkylamino group may be a straight-chain alkyl group or a branched-chain alkyl group. The number of carbon atoms of the alkyl group contained in the monoalkylamino group or the dialkylamino group is not particularly limited, but is preferably 1 or more and 10 or less, more preferably 1 or more and 6 or less, and particularly preferably 1 or more and 3 or less.
关于作为Rf24优选的亚烷基的具体例,可举出亚甲基、乙烷-1,2-二基、正丙烷-1,3-二基、正丙烷-2,2-二基、正丁烷-1,4-二基、正戊烷-1,5-二基、正己烷-1,6-二基、正庚烷-1,7-二基、正辛烷-1,8-二基、正壬烷-1,9-二基、正癸烷-1,10-二基、正十一烷-1,11-二基、正十二烷-1,12-二基、正十三烷-1,13-二基、正十四烷-1,14-二基、正十五烷-1,15-二基、正十六烷-1,16-二基、正十七烷-1,17-二基、正十八烷-1,18-二基、正十九烷-1,19-二基、及正二十烷-1,20-二基。Specific examples of the alkylene group preferable as R f24 include methylene, ethane-1,2-diyl, n-propane-1,3-diyl, n-propane-2,2-diyl, n-Butane-1,4-diyl, n-pentane-1,5-diyl, n-hexane-1,6-diyl, n-heptane-1,7-diyl, n-octane-1,8 -diyl, n-nonane-1,9-diyl, n-decane-1,10-diyl, n-undecane-1,11-diyl, n-dodecane-1,12-diyl, n-tridecane-1,13-diyl, n-tetradecane-1,14-diyl, n-pentadecan-1,15-diyl, n-hexadecane-1,16-diyl, n-decane Heptane-1,17-diyl, n-octadecane-1,18-diyl, n-nonadecan-1,19-diyl, and n-eicosane-1,20-diyl.
上述式(F1-2)表示的咪唑化合物中,从廉价且能够容易地合成的方面考虑,优选下述式(F1-2-2)表示的化合物。Among the imidazole compounds represented by the above formula (F1-2), the compounds represented by the following formula (F1-2-2) are preferred from the viewpoint of being inexpensive and easily synthesizable.
[化学式45][Chemical formula 45]
式(F1-2-2)中,Rf1、Rf2、及Rf3与式(F1)相同。Rf21与式(F1-2)同样,Rf25、Rf26、Rf27、Rf28、及Rf29各自独立地为氢原子、卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、氨基、铵基、或有机基团。其中,Rf25、Rf26、Rf27、Rf28、及Rf29中的至少一者为氢原子以外的基团。Rf25、Rf26、Rf27、Rf28、及Rf29中的至少2个可以键合而形成环状结构。Rf21可以与Rf27结合而形成环状结构。In formula (F1-2-2), R f1 , R f2 , and R f3 are the same as those in formula (F1). R f21 is the same as formula (F1-2), R f25 , R f26 , R f27 , R f28 , and R f29 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, and a silanol group, nitro, nitroso, sulfinyl, sulfo, sulfonate, phosphino, phosphinyl, phosphono, phosphonate, amino, ammonium, or organic. However, at least one of R f25 , R f26 , R f27 , R f28 , and R f29 is a group other than a hydrogen atom. At least two of R f25 , R f26 , R f27 , R f28 , and R f29 may be bonded to form a cyclic structure. R f21 can combine with R f27 to form a ring structure.
Rf25、Rf26、Rf27、Rf28、及Rf29与后述的式(F1-2-3)相同。式(F1-2-2)中,Rf21可以与Rf27结合而形成环状结构。例如,Rf21为可具有取代基的烷基时,Rf21可以与Rf27结合而形成环状结构。R f25 , R f26 , R f27 , R f28 , and R f29 are the same as the formula (F1-2-3) described later. In formula (F1-2-2), R f21 may combine with R f27 to form a cyclic structure. For example, when R f21 is an alkyl group which may have a substituent, R f21 may combine with R f27 to form a cyclic structure.
上述式(F1-2-1)或式(F1-2-2)表示的咪唑化合物中,从能够廉价且容易地合成、在水、有机溶剂中的溶解性优异的方面考虑,优选下述式(F1-2-3)表示的化合物,更优选式(F1-2-3)表示且Rf24为亚甲基的化合物。Among the imidazole compounds represented by the above formula (F1-2-1) or formula (F1-2-2), the following formulae are preferred in view of being inexpensive and easy to synthesize and having excellent solubility in water and organic solvents The compound represented by (F1-2-3) is more preferably a compound represented by the formula (F1-2-3) and R f24 is a methylene group.
[化学式46][Chemical formula 46]
式(F1-2-3)中,Rf1、Rf2、及Rf3与式(F1)同样。Rf23、及Rf24与式(F1-2-1)同样。Rf25、Rf26、Rf27、Rf28、及Rf29各自独立地为氢原子、卤素原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、氨基、铵基、或有机基团。其中,Rf25、Rf26、Rf27、Rf28、及Rf29中的至少一者为氢原子以外的基团。可以Rf25、Rf26、Rf27、Rf28、及Rf29中的至少2个键合而形成环状结构。Rf24可以与Rf27结合而形成环状结构。In formula (F1-2-3), R f1 , R f2 , and R f3 are the same as those of formula (F1). R f23 and R f24 are the same as formula (F1-2-1). R f25 , R f26 , R f27 , R f28 , and R f29 are each independently a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group, a nitroso group, and a sulfinic acid group group, sulfo group, sulfonate/ester group, phosphino group, phosphinyl group, phosphono group, phosphonate/ester group, amino group, ammonium group, or organic group. However, at least one of R f25 , R f26 , R f27 , R f28 , and R f29 is a group other than a hydrogen atom. At least two of R f25 , R f26 , R f27 , R f28 , and R f29 may be bonded to form a cyclic structure. R f24 can combine with R f27 to form a ring structure.
Rf25、Rf26、Rf27、Rf28、及Rf29为有机基团时,该有机基团与式(F1-2-1)中的Rf22作为取代基所具有的有机基团同样。Rf25、Rf26、Rf27、及Rf28优选为氢原子。When R f25 , R f26 , R f27 , R f28 , and R f29 are organic groups, the organic groups are the same as the organic groups that R f22 in formula (F1-2-1) has as a substituent. R f25 , R f26 , R f27 , and R f28 are preferably hydrogen atoms.
其中,优选Rf25、Rf26、Rf27、Rf28、及Rf29中的至少一者为下述取代基,尤其优选Rf29为下述取代基。Rf29为下述取代基时,优选Rf25、Rf26、Rf27、及Rf28为氢原子。Among them, at least one of R f25 , R f26 , R f27 , R f28 , and R f29 is preferably the following substituent, and R f29 is particularly preferably the following substituent. When R f29 is the following substituent, it is preferable that R f25 , R f26 , R f27 , and R f28 are hydrogen atoms.
-O-Rf30 -OR f30
(Rf30为氢原子或有机基团。)(R f30 is a hydrogen atom or an organic group.)
Rf30为有机基团时,该有机基团与式(F1-2-1)中的Rf22作为取代基所具有的有机基团同样。作为Rf30,优选烷基,更优选碳原子数为1以上且8以下的烷基,尤其优选碳原子数为1以上且3以下的烷基,最优选甲基。When R f30 is an organic group, the organic group is the same as the organic group that R f22 in the formula (F1-2-1) has as a substituent. R f30 is preferably an alkyl group, more preferably an alkyl group having 1 or more and 8 or less carbon atoms, particularly preferably an alkyl group having 1 or more and 3 or less carbon atoms, and most preferably a methyl group.
上述式(F1-2-3)表示的化合物中,优选下述式(F1-2-4)表示的化合物。Among the compounds represented by the above formula (F1-2-3), the compounds represented by the following formula (F1-2-4) are preferable.
[化学式47][Chemical formula 47]
式(F1-2-4)中,Rf1、Rf2、及Rf3与式(F1)同样。Rf23与式(F1-2-1)同样。Rf31、Rf32、Rf33、Rf34、及Rf35各自独立地为氢原子、羟基、巯基、硫醚基、甲硅烷基、硅烷醇基、硝基、亚硝基、亚磺基、磺基、磺酸盐/酯基、膦基、氧膦基、膦酰基、膦酸盐/酯基、氨基、铵基、或有机基团。其中,Rf31、Rf32、Rf33、Rf34、及Rf35中的至少一者为氢原子以外的基团。In formula (F1-2-4), R f1 , R f2 , and R f3 are the same as those of formula (F1). R f23 is the same as formula ( F1-2-1 ). R f31 , R f32 , R f33 , R f34 , and R f35 are each independently a hydrogen atom, a hydroxyl group, a mercapto group, a thioether group, a silyl group, a silanol group, a nitro group, a nitroso group, a sulfinyl group, a sulfonic group group, sulfonate/ester group, phosphino group, phosphinyl group, phosphono group, phosphonate/ester group, amino group, ammonium group, or organic group. However, at least one of R f31 , R f32 , R f33 , R f34 , and R f35 is a group other than a hydrogen atom.
式(F1-2-4)表示的化合物中,优选Rf31、Rf32、Rf33、Rf34、及Rf35中的至少一者为上述的-O-Rf30表示的基团,尤其优选Rf35为-O-Rf30表示的基团。Rf35为-O-Rf30表示的基团时,优选Rf32、Rf33、Rf34、及Rf35为氢原子。Among the compounds represented by the formula (F1-2-4), at least one of R f31 , R f32 , R f33 , R f34 , and R f35 is preferably a group represented by the above-mentioned -OR f30 , and it is particularly preferable that R f35 is A group represented by -OR f30 . When R f35 is a group represented by -OR f30 , R f32 , R f33 , R f34 , and R f35 are preferably hydrogen atoms.
作为式(F1-2)或式(F1-2-1)表示的咪唑化合物的优选具体例,可举出以下的化合物。Preferred specific examples of the imidazole compound represented by formula (F1-2) or formula (F1-2-1) include the following compounds.
[化学式48][Chemical formula 48]
感光性树脂组合物中的咪唑产生剂(F)的含量在不妨碍本发明的目的的范围内即可,没有特别限定。典型地,相对于碱溶性树脂(A)与光聚合性单体(B)的总量100质量份而言,咪唑产生剂(F)的含量优选为0.01质量份以上且2.5质量份以下,更优选为0.01~0.5质量份。感光性树脂组合物中的咪唑产生剂(F)的含量在上述范围内时,容易形成良好截面形状的经图案化的固化膜。Content of the imidazole generator (F) in the photosensitive resin composition should just be the range which does not inhibit the objective of this invention, and is not specifically limited. Typically, the content of the imidazole generator (F) is preferably 0.01 parts by mass or more and 2.5 parts by mass or less, relative to 100 parts by mass of the total amount of the alkali-soluble resin (A) and the photopolymerizable monomer (B). Preferably it is 0.01-0.5 mass part. When content of the imidazole generator (F) in the photosensitive resin composition is in the said range, it becomes easy to form the patterned cured film of a favorable cross-sectional shape.
<敏化剂(G)><Sensitizer (G)>
感光性树脂组合物可以与上述光聚合引发剂一同含有敏化剂(G)。感光性树脂组合物通过含有敏化剂(G),即使使用LED曝光等照射能量低的光源,也能够良好地固化。The photosensitive resin composition may contain a sensitizer (G) together with the above-mentioned photopolymerization initiator. By containing the sensitizer (G), the photosensitive resin composition can be cured favorably even when a light source with low irradiation energy such as LED exposure is used.
作为敏化剂(G),可以没有特别限制地使用以往在感光性树脂组合物中出于将光聚合引发剂敏化的目的而使用的化合物。As the sensitizer (G), a compound conventionally used for the purpose of sensitizing a photopolymerization initiator in a photosensitive resin composition can be used without any limitation.
作为敏化剂(G),优选具有选自由烷氧基、取代羰基氧基、及氧代基(=O)组成的组中的一种以上作为取代基的化合物。作为具有该取代基的化合物,优选稠合多环式芳香族烃化合物、或稠合多环式芳香族杂环化合物。As a sensitizer (G), the compound which has one or more types chosen from the group which consists of an alkoxy group, a substituted carbonyloxy group, and an oxo group (=O) as a substituent is preferable. As the compound having this substituent, a condensed polycyclic aromatic hydrocarbon compound or a condensed polycyclic aromatic heterocyclic compound is preferable.
稠合多环式芳香族烃化合物、或稠合多环式芳香族杂环化合物可以具有除烷氧基、取代羰基氧基、及氧代基(=O)以外的取代基。作为该取代基的例子,可举出碳原子数为1以上且20以下的烷基、碳原子数为1以上且20以下的卤代烷基、碳原子数为2以上且20以下的烷氧基烷基、碳原子数为2以上且20以下的脂肪族酰基、碳原子数为7以上且11以下的芳香族酰基(芳酰基)、氰基、硝基、亚硝基、卤素原子、羟基、及巯基等。The condensed polycyclic aromatic hydrocarbon compound or the condensed polycyclic aromatic heterocyclic compound may have a substituent other than an alkoxy group, a substituted carbonyloxy group, and an oxo group (=O). Examples of the substituent include an alkyl group having 1 or more and 20 or less carbon atoms, a haloalkyl group having 1 or more and 20 or less carbon atoms, and an alkoxyalkane having 2 or more and 20 or less carbon atoms. group, aliphatic acyl group having 2 or more and 20 or less carbon atoms, aromatic acyl group (aroyl group) having 7 or more and 11 or less carbon atoms, cyano group, nitro group, nitroso group, halogen atom, hydroxyl group, and Thiol, etc.
烷氧基可以为直链状也可以为支链状。烷氧基的碳原子数没有特别限定,优选为1以上且20以下,更优选为1以上且12以下,尤其优选为1以上且6以下。The alkoxy group may be linear or branched. The number of carbon atoms of the alkoxy group is not particularly limited, but is preferably 1 or more and 20 or less, more preferably 1 or more and 12 or less, and particularly preferably 1 or more and 6 or less.
作为烷氧基的优选例,可举出甲氧基、乙氧基、正丙氧基、异丙氧基、正丁氧基、异丁氧基、叔丁氧基、正戊氧基、正己氧基、正庚氧基、正辛氧基、2-乙基己基、正壬氧基、及正癸氧基等。Preferable examples of the alkoxy group include methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, tert-butoxy, n-pentoxy, n-hexyloxy oxy, n-heptyloxy, n-octyloxy, 2-ethylhexyl, n-nonyloxy, n-decyloxy and the like.
取代羰基氧基为-O-CO-Ag表示的基团。Ag没有特别限定,只要敏化剂(G)具有所期望的敏化作用即可,可以为各种有机基团。作为A,优选碳原子数为1以上且20以下的烷基、碳原子数为6以上且10以下的芳基、碳原子数为1以上且20以下的烷氧基、碳原子数为6以上且10以下的芳基氧基。The substituted carbonyloxy group is a group represented by -O-CO-A g . A g is not particularly limited as long as the sensitizer (G) has a desired sensitizing effect, and may be various organic groups. As A, an alkyl group having 1 or more and 20 or less carbon atoms, an aryl group having 6 or more and 10 or less carbon atoms, an alkoxy group having 1 or more and 20 or less carbon atoms, or an alkoxy group having 6 or more carbon atoms is preferable and 10 or less aryloxy groups.
芳基或芳基氧基可以具有一个或多个取代基。取代基的种类没有特别限定,只要不阻碍本发明的目的即可。芳基或芳基氧基具有多个取代基时,多个取代基可以相同也可以不同。An aryl or aryloxy group may have one or more substituents. The kind of the substituent is not particularly limited as long as it does not hinder the purpose of the present invention. When the aryl group or the aryloxy group has a plurality of substituents, the plurality of substituents may be the same or different.
作为取代基的优选例,可举出碳原子数为1以上且6以下的烷基、碳原子数为1以上且6以下的烷氧基、碳原子数为6以上且10以下的芳基氧基、碳原子数为6以上且10以下的芳基氧基、碳原子数为2以上且7以下的脂肪族酰基、碳原子数为7以上且11以下的芳香族酰基(芳酰基)、氰基、硝基、亚硝基、卤素原子、羟基、及巯基等。Preferable examples of the substituent include an alkyl group having 1 or more and 6 or less carbon atoms, an alkoxy group having 1 or more and 6 or less carbon atoms, and an aryloxy group having 6 or more and 10 or less carbon atoms. group, aryloxy group having 6 or more and 10 or less carbon atoms, aliphatic acyl group having 2 or more and 7 or less carbon atoms, aromatic acyl group (aroyl group) having 7 or more and 11 or less carbon atoms, cyano group, nitro group, nitroso group, halogen atom, hydroxyl group, and mercapto group, etc.
Ag为烷基或烷氧基时,这些基团可以为直链状也可以为支链状。When A g is an alkyl group or an alkoxy group, these groups may be linear or branched.
作为烷基的优选例,可举出甲基、乙基、正丙基、异丙基、正丁基、异丁基、叔丁基、正戊基、正己基、正庚基、正辛基、及2-乙基己基等。Preferred examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, and n-octyl group. , and 2-ethylhexyl, etc.
作为芳基的优选例,可举出苯基、邻甲苯基、间甲苯基、对甲苯基、α-萘基、β-萘基等。Preferable examples of the aryl group include a phenyl group, an o-tolyl group, a m-tolyl group, a p-tolyl group, an α-naphthyl group, a β-naphthyl group, and the like.
作为烷氧基的优选例,可举出甲氧基、乙氧基、正丙氧基、异丙氧基、正丁氧基、异丁氧基、叔丁氧基、正戊氧基、正己氧基、正庚氧基、正辛氧基、及2-乙基己基氧基等。Preferable examples of the alkoxy group include methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, tert-butoxy, n-pentoxy, n-hexyloxy oxy, n-heptyloxy, n-octyloxy, 2-ethylhexyloxy and the like.
被选自由烷氧基、取代羰基氧基、及氧代基(=O)组成的组中的一种以上取代的稠合多环式芳香族烃化合物、或稠合多环式芳香族杂环化合物中,构成稠环的环数没有特别限定,只要可获得所期望的敏化作用即可。环数优选为2以上,更优选为3以上,尤其优选为3以上且6以下,最优选为3或4。Condensed polycyclic aromatic hydrocarbon compound or condensed polycyclic aromatic heterocycle substituted with at least one selected from the group consisting of alkoxy, substituted carbonyloxy, and oxo (=O) In the compound, the number of rings constituting the condensed ring is not particularly limited as long as the desired sensitization effect can be obtained. The number of rings is preferably 2 or more, more preferably 3 or more, particularly preferably 3 or more and 6 or less, and most preferably 3 or 4.
需要说明的是,稠合多环式芳香族烃化合物、或稠合多环式芳香族杂环化合物具有芳香族性即可,形成稠合多环的单环可以不必是芳香环。It should be noted that the condensed polycyclic aromatic hydrocarbon compound or the condensed polycyclic aromatic heterocyclic compound only needs to have aromaticity, and the monocyclic ring forming the condensed polycycle need not necessarily be an aromatic ring.
作为稠合多环式芳香族烃化合物、或稠合多环式芳香族杂环化合物所包含的稠合多环的优选例,可举出苊烯环、菲环、蒽环、并四苯环、呫吨环、及噻吨环。这些环之中,优选蒽环、并四苯环、及噻吨环。Preferred examples of the condensed polycyclic ring contained in the condensed polycyclic aromatic hydrocarbon compound or the condensed polycyclic aromatic heterocyclic compound include an acenaphthene ring, a phenanthrene ring, an anthracene ring, and a tetracene ring. , xanthene ring, and thioxanthene ring. Among these rings, an anthracene ring, a naphthacene ring, and a thioxanthene ring are preferable.
关于包含蒽环且可合适地用作敏化剂(G)的化合物的具体例,可举出9,10-双(乙酰氧基)蒽、9,10-双(丙酰氧基)蒽、9,10-双(正丙基羰基氧基)蒽、9,10-双(异丙基羰基氧基)蒽、9,10-双(正丁基羰基氧基)蒽、9,10-双(异丁基羰基氧基)蒽、9,10-双(正戊基羰基氧基)蒽、9,10-双(正己基羰基氧基)蒽、9,10-双(正庚基羰基氧基)蒽、9,10-双(2-乙基己酰氧基)蒽、9,10-双(正辛基羰基氧基)蒽、9,10-双(正壬基羰基氧基)蒽、9,10-双(正癸基羰基氧基)蒽、9,10-双(苯甲酰基氧基)蒽、9,10-双(4-甲基苯甲酰基氧基)蒽、9,10-双(2-萘甲酰氧基)蒽、2-甲基-9,10-双(乙酰氧基)蒽、2-甲基-9,10-双(丙酰氧基)蒽、2-甲基-9,10-双(正丙基羰基氧基)蒽、2-甲基-9,10-双(异丙基羰基氧基)蒽、2-甲基-9,10-双(正丁基羰基氧基)蒽、2-甲基-9,10-双(异丁基羰基氧基)蒽、2-甲基-9,10-双(正戊基羰基氧基)蒽、2-甲基-9,10-双(正己基羰基氧基)蒽、2-甲基-9,10-双(苯甲酰基氧基)蒽、2-甲基-9,10-双(4-甲基苯甲酰基氧基)蒽、2-甲基-9,10-双(2-萘甲酰氧基)蒽、1-甲基-9,10-双(乙酰氧基)蒽、1-甲基-9,10-双(丙酰氧基)蒽、1-甲基-9,10-双(正丙基羰基氧基)蒽、1-甲基-9,10-双(异丙基羰基氧基)蒽、1-甲基-9,10-双(正丁基羰基氧基)蒽、1-甲基-9,10-双(异丁基羰基氧基)蒽、1-甲基-9,10-双(正戊基羰基氧基)蒽、1-甲基-9,10-双(正己基羰基氧基)蒽、1-甲基-9,10-双(苯甲酰基氧基)蒽、1-甲基-9,10-双(4-甲基苯甲酰基氧基)蒽、1-甲基-9,10-双(2-萘甲酰氧基)蒽、2-乙基-9,10-双(乙酰氧基)蒽、2-乙基-9,10-双(丙酰氧基)蒽、2-乙基-9,10-双(正丙基羰基氧基)蒽、2-乙基-9,10-双(异丁基羰基氧基)蒽、2-乙基-9,10-双(正丁基羰基氧基)蒽、2-乙基-9,10-双(异丁基羰基氧基)蒽、2-乙基-9,10-双(正戊基羰基氧基)蒽、2-乙基-9,10-双(正己基羰基氧基)蒽、2-乙基-9,10-双(苯甲酰基氧基)蒽、2-乙基-9,10-双(4-乙基-苯甲酰基氧基)蒽、2-乙基-9,10-双(2-萘甲酰氧基)蒽、1-乙基-9,10-双(乙酰氧基)蒽、1-乙基-9,10-双(丙酰氧基)蒽、1-乙基-9,10-双(正丙基羰基氧基)蒽、1-乙基-9,10-双(异丙基羰基氧基)蒽、1-乙基-9,10-双(正丁基羰基氧基)蒽、1-乙基-9,10-双(异丁基羰基氧基)蒽、1-乙基-9,10-双(正戊基羰基氧基)蒽、1-乙基-9,10-双(正己基羰基氧基)蒽、1-乙基-9,10-双(苯甲酰基氧基)蒽、1-乙基-9,10-双(4-乙基-苯甲酰基氧基)蒽、1-乙基-9,10-双(2-萘甲酰氧基)蒽、1-(叔丁基)-9,10-双(正丙基羰基氧基)蒽、1-(叔丁基)-9,10-双(异丙基羰基氧基)蒽、1-(叔丁基)-9,10-双(正丁基羰基氧基)蒽、1-(叔丁基)-9,10-双(异丁基羰基氧基)蒽、1-(叔丁基)-9,10-双(正戊基羰基氧基)蒽、1-(叔丁基)-9,10-双(正己基羰基氧基)蒽、1-(叔丁基)-9,10-双(苯甲酰基氧基)蒽、1-(叔丁基)-9,10-双(4-(叔丁基)-苯甲酰基氧基)蒽、1-(叔丁基)-9,10-双(2-萘甲酰氧基)蒽、2-(叔丁基)-9,10-双(正丙基羰基氧基)蒽、2-(叔丁基)-9,10-双(异丙基羰基氧基)蒽、2-(叔丁基)-9,10-双(正丁基羰基氧基)蒽、2-(叔丁基)-9,10-双(异丁基羰基氧基)蒽、2-(叔丁基)-9,10-双(正戊基羰基氧基)蒽、2-(叔丁基)-9,10-双(正己基羰基氧基)蒽、2-(叔丁基)-9,10-双(苯甲酰基氧基)蒽、2-(叔丁基)-9,10-双(4-(叔丁基)-苯甲酰基氧基)蒽、2-(叔丁基)-9,10-双(2-萘甲酰氧基)蒽、2-戊基-9,10-双(正丙基羰基氧基)蒽、2-戊基-9,10-双(异丙基羰基氧基)蒽、2-戊基-9,10-双(正丁基羰基氧基)蒽、2-戊基-9,10-双(异丁基羰基氧基)蒽、2-戊基-9,10-双(正戊基羰基氧基)蒽、2-戊基-9,10-双(正己基羰基氧基)蒽、2-戊基-9,10-双(苯甲酰基氧基)蒽、2-戊基-9,10-双(4-(叔丁基)-苯甲酰基氧基)蒽、及2-戊基-9,10-双(2-萘甲酰氧基)蒽等。Specific examples of the compound that contains an anthracene ring and can be suitably used as the sensitizer (G) include 9,10-bis(acetoxy)anthracene, 9,10-bis(propionyloxy)anthracene, 9,10-bis(n-propylcarbonyloxy)anthracene, 9,10-bis(isopropylcarbonyloxy)anthracene, 9,10-bis(n-butylcarbonyloxy)anthracene, 9,10-bis (isobutylcarbonyloxy)anthracene, 9,10-bis(n-pentylcarbonyloxy)anthracene, 9,10-bis(n-hexylcarbonyloxy)anthracene, 9,10-bis(n-heptylcarbonyloxy)anthracene base) anthracene, 9,10-bis(2-ethylhexanoyloxy)anthracene, 9,10-bis(n-octylcarbonyloxy)anthracene, 9,10-bis(n-nonylcarbonyloxy)anthracene , 9,10-bis(n-decylcarbonyloxy)anthracene, 9,10-bis(benzoyloxy)anthracene, 9,10-bis(4-methylbenzoyloxy)anthracene, 9, 10-bis(2-naphthoyloxy)anthracene, 2-methyl-9,10-bis(acetoxy)anthracene, 2-methyl-9,10-bis(propionyloxy)anthracene, 2 -Methyl-9,10-bis(n-propylcarbonyloxy)anthracene, 2-methyl-9,10-bis(isopropylcarbonyloxy)anthracene, 2-methyl-9,10-bis( n-Butylcarbonyloxy)anthracene, 2-methyl-9,10-bis(isobutylcarbonyloxy)anthracene, 2-methyl-9,10-bis(n-pentylcarbonyloxy)anthracene, 2 -Methyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-methyl-9,10-bis(benzoyloxy)anthracene, 2-methyl-9,10-bis(4- Methylbenzoyloxy)anthracene, 2-methyl-9,10-bis(2-naphthoyloxy)anthracene, 1-methyl-9,10-bis(acetoxy)anthracene, 1- Methyl-9,10-bis(propionyloxy)anthracene, 1-methyl-9,10-bis(n-propylcarbonyloxy)anthracene, 1-methyl-9,10-bis(isopropyl) Carbonyloxy)anthracene, 1-methyl-9,10-bis(n-butylcarbonyloxy)anthracene, 1-methyl-9,10-bis(isobutylcarbonyloxy)anthracene, 1-methyl -9,10-bis(n-pentylcarbonyloxy)anthracene, 1-methyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-methyl-9,10-bis(benzoyloxy) base) anthracene, 1-methyl-9,10-bis(4-methylbenzoyloxy)anthracene, 1-methyl-9,10-bis(2-naphthoyloxy)anthracene, 2- Ethyl-9,10-bis(acetoxy)anthracene, 2-ethyl-9,10-bis(propionyloxy)anthracene, 2-ethyl-9,10-bis(n-propylcarbonyloxy) ) anthracene, 2-ethyl-9,10-bis(isobutylcarbonyloxy)anthracene, 2-ethyl-9,10-bis(n-butylcarbonyloxy)anthracene, 2-ethyl-9, 10-Bis(isobutylcarbonyloxy)anthracene, 2-ethyl-9,10-bis(n-pentylcarbonyloxy)anthracene, 2-ethyl-9,10-bis(n-hexylcarbonyloxy) Anthracene, 2-ethyl-9,10-bis(benzoyloxy)anthracene, 2-ethyl-9,10-bis(4-ethyl-benzoyloxy)anthracene, 2-ethyl- 9, 10-bis(2-naphthoyloxy)anthracene, 1-ethyl-9,10-bis(acetoxy)anthracene, 1-ethyl-9,10-bis(propionyloxy)anthracene, 1 -Ethyl-9,10-bis(n-propylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(isopropylcarbonyloxy)anthracene, 1-ethyl-9,10-bis( n-Butylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(isobutylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(n-pentylcarbonyloxy)anthracene, 1 -Ethyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-ethyl-9,10-bis(benzoyloxy)anthracene, 1-ethyl-9,10-bis(4- Ethyl-benzoyloxy)anthracene, 1-ethyl-9,10-bis(2-naphthoyloxy)anthracene, 1-(tert-butyl)-9,10-bis(n-propylcarbonyl) Oxy)anthracene, 1-(tert-butyl)-9,10-bis(isopropylcarbonyloxy)anthracene, 1-(tert-butyl)-9,10-bis(n-butylcarbonyloxy)anthracene , 1-(tert-butyl)-9,10-bis(isobutylcarbonyloxy)anthracene, 1-(tert-butyl)-9,10-bis(n-pentylcarbonyloxy)anthracene, 1-( tert-butyl)-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-(tert-butyl)-9,10-bis(benzoyloxy)anthracene, 1-(tert-butyl)-9 , 10-bis(4-(tert-butyl)-benzoyloxy)anthracene, 1-(tert-butyl)-9,10-bis(2-naphthoyloxy)anthracene, 2-(tert-butyl) base)-9,10-bis(n-propylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis(isopropylcarbonyloxy)anthracene, 2-(tert-butyl)-9 , 10-bis(n-butylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis(isobutylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis (n-pentylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-(tert-butyl)-9,10-bis(benzoyloxy) base) anthracene, 2-(tert-butyl)-9,10-bis(4-(tert-butyl)-benzoyloxy)anthracene, 2-(tert-butyl)-9,10-bis(2- Naphthoyloxy)anthracene, 2-pentyl-9,10-bis(n-propylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(isopropylcarbonyloxy)anthracene, 2- Amyl-9,10-bis(n-butylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(isobutylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(n-butylcarbonyloxy)anthracene Amylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-pentyl-9,10-bis(benzoyloxy)anthracene, 2-pentyl -9,10-bis(4-(tert-butyl)-benzoyloxy)anthracene, 2-pentyl-9,10-bis(2-naphthoyloxy)anthracene, etc.
作为敏化剂(G),还优选被卤素原子取代的蒽化合物。作为卤素原子,可举出氟原子、氯原子、溴原子、或碘原子。As the sensitizer (G), an anthracene compound substituted by a halogen atom is also preferred. As a halogen atom, a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom is mentioned.
关于被卤素原子取代且优选作为敏化剂(G)的化合物的具体例,可举出2-氯-9,10-双(乙酰氧基)蒽、2-氯-9,10-双(丙酰氧基)蒽、2-氯-9,10-双(正丙基羰基氧基)蒽、2-氯-9,10-双(异丙基羰基氧基)蒽、2-氯-9,10-双(正丁基羰基氧基)蒽、2-氯-9,10-双(异丁基羰基氧基)蒽、2-氯-9,10-双(正戊基羰基氧基)蒽、2-氯-9,10-双(正己基羰基氧基)蒽、2-氯-9,10-双(苯甲酰基氧基)蒽、2-氯-9,10-双(4-甲基苯甲酰基氧基)蒽、2-氯-9,10-双(2-萘甲酰氧基)蒽、1-氯-9,10-双(乙酰氧基)蒽、1-氯-9,10-双(丙酰氧基)蒽、1-氯-9,10-双(正丙基羰基氧基)蒽、1-氯-9,10-双(异丙基羰基氧基)蒽、1-氯-9,10-双(正丁基羰基氧基)蒽、1-氯-9,10-双(异丁基羰基氧基)蒽、1-氯-9,10-双(正戊基羰基氧基)蒽、1-氯-9,10-双(正己基羰基氧基)蒽、1-氯-9,10-双(苯甲酰基氧基)蒽、1-氯-9,10-双(4-甲基苯甲酰基氧基)蒽、1-氯-9,10-双(2-萘甲酰氧基)蒽、2-氟-9,10-双(乙酰氧基)蒽、2-氟-9,10-双(丙酰氧基)蒽、2-氟-9,10-双(正丙基羰基氧基)蒽、2-氟-9,10-双(异丙基羰基氧基)蒽、2-氟-9,10-双(正丁基羰基氧基)蒽、2-氟-9,10-双(异丁基羰基氧基)蒽、2-氟-9,10-双(正戊基羰基氧基)蒽、2-氟-9,10-双(正己基羰基氧基)蒽、2-氟-9,10-双(苯甲酰基氧基)蒽、2-氟-9,10-双(4-甲基苯甲酰基氧基)蒽、2-氟-9,10-双(2-萘甲酰氧基)蒽、1-氟-9,10-双(乙酰氧基)蒽、1-氟-9,10-双(丙酰氧基)蒽、1-氟-9,10-双(正丙基羰基氧基)蒽、1-氟-9,10-双(异丙基羰基氧基)蒽、1-氟-9,10-双(正丁基羰基氧基)蒽、1-氟-9,10-双(异丁基羰基氧基)蒽、1-氟-9,10-双(正戊基羰基氧基)蒽、1-氟-9,10-双(正己基羰基氧基)蒽、1-氟-9,10-双(苯甲酰基氧基)蒽、1-氟-9,10-双(4-甲基苯甲酰基氧基)蒽、1-氟-9,10-双(2-萘甲酰氧基)蒽、2-溴-9,10-双(乙酰氧基)蒽、2-溴-9,10-双(丙酰氧基)蒽、2-溴-9,10-双(正丙基羰基氧基)蒽、2-溴-9,10-双(异丙基羰基氧基)蒽、2-溴-9,10-双(正丁基羰基氧基)蒽、2-溴-9,10-双(异丁基羰基氧基)蒽、2-溴-9,10-双(正戊基羰基氧基)蒽、2-溴-9,10-双(正己基羰基氧基)蒽、2-溴-9,10-双(苯甲酰基氧基)蒽、2-溴-9,10-双(4-甲基苯甲酰基氧基)蒽、2-溴-9,10-双(2-萘甲酰氧基)蒽、1-溴-9,10-双(乙酰氧基)蒽、1-溴-9,10-双(丙酰氧基)蒽、1-溴-9,10-双(正丙基羰基氧基)蒽、1-溴-9,10-双(异丙基羰基氧基)蒽、1-溴-9,10-双(正丁基羰基氧基)蒽、1-溴-9,10-双(异丁基羰基氧基)蒽、1-溴-9,10-双(正戊基羰基氧基)蒽、1-溴-9,10-双(正己基羰基氧基)蒽、1-溴-9,10-双(苯甲酰基氧基)蒽、1-溴-9,10-双(4-甲基苯甲酰基氧基)蒽、及1-溴-9,10-双(2-萘甲酰氧基)蒽等。Specific examples of compounds substituted by halogen atoms and preferably used as the sensitizer (G) include 2-chloro-9,10-bis(acetoxy)anthracene, 2-chloro-9,10-bis(propane) Acyloxy)anthracene, 2-chloro-9,10-bis(n-propylcarbonyloxy)anthracene, 2-chloro-9,10-bis(isopropylcarbonyloxy)anthracene, 2-chloro-9, 10-Bis(n-butylcarbonyloxy)anthracene, 2-chloro-9,10-bis(isobutylcarbonyloxy)anthracene, 2-chloro-9,10-bis(n-pentylcarbonyloxy)anthracene , 2-chloro-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-chloro-9,10-bis(benzoyloxy)anthracene, 2-chloro-9,10-bis(4-methyl) benzoyloxy)anthracene, 2-chloro-9,10-bis(2-naphthoyloxy)anthracene, 1-chloro-9,10-bis(acetoxy)anthracene, 1-chloro-9 , 10-bis(propionyloxy)anthracene, 1-chloro-9,10-bis(n-propylcarbonyloxy)anthracene, 1-chloro-9,10-bis(isopropylcarbonyloxy)anthracene, 1-Chloro-9,10-bis(n-butylcarbonyloxy)anthracene, 1-chloro-9,10-bis(isobutylcarbonyloxy)anthracene, 1-chloro-9,10-bis(n-pentyloxy)anthracene ylcarbonyloxy)anthracene, 1-chloro-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-chloro-9,10-bis(benzoyloxy)anthracene, 1-chloro-9,10 -Bis(4-methylbenzoyloxy)anthracene, 1-chloro-9,10-bis(2-naphthoyloxy)anthracene, 2-fluoro-9,10-bis(acetoxy)anthracene , 2-fluoro-9,10-bis(propionyloxy)anthracene, 2-fluoro-9,10-bis(n-propylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(isopropyl) Carbonyloxy)anthracene, 2-fluoro-9,10-bis(n-butylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(isobutylcarbonyloxy)anthracene, 2-fluoro-9, 10-bis(n-pentylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-fluoro-9,10-bis(benzoyloxy)anthracene, 2 -Fluoro-9,10-bis(4-methylbenzoyloxy)anthracene, 2-fluoro-9,10-bis(2-naphthoyloxy)anthracene, 1-fluoro-9,10-bis (acetoxy)anthracene, 1-fluoro-9,10-bis(propionyloxy)anthracene, 1-fluoro-9,10-bis(n-propylcarbonyloxy)anthracene, 1-fluoro-9,10 - bis(isopropylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(n-butylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(isobutylcarbonyloxy)anthracene, 1-Fluoro-9,10-bis(n-pentylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-fluoro-9,10-bis(benzoyl oxy)anthracene, 1-fluoro-9,10-bis(4-methylbenzoyloxy)anthracene, 1-fluoro-9,10-bis(2-naphthoyloxy)anthracene, 2-bromo -9,10-bis(acetoxy)anthracene, 2-bromo-9,10-bis(propionyloxy)anthracene, 2-bromo-9,10-bis(n-propylcarbonyloxy)anthracene, 2 -bromine -9,10-bis(isopropylcarbonyloxy)anthracene, 2-bromo-9,10-bis(n-butylcarbonyloxy)anthracene, 2-bromo-9,10-bis(isobutylcarbonyloxy)anthracene base) anthracene, 2-bromo-9,10-bis(n-pentylcarbonyloxy)anthracene, 2-bromo-9,10-bis(n-hexylcarbonyloxy)anthracene, 2-bromo-9,10-bis (benzoyloxy)anthracene, 2-bromo-9,10-bis(4-methylbenzoyloxy)anthracene, 2-bromo-9,10-bis(2-naphthoyloxy)anthracene , 1-bromo-9,10-bis(acetoxy)anthracene, 1-bromo-9,10-bis(propionyloxy)anthracene, 1-bromo-9,10-bis(n-propylcarbonyloxy) ) anthracene, 1-bromo-9,10-bis(isopropylcarbonyloxy)anthracene, 1-bromo-9,10-bis(n-butylcarbonyloxy)anthracene, 1-bromo-9,10-bis (Isobutylcarbonyloxy)anthracene, 1-bromo-9,10-bis(n-pentylcarbonyloxy)anthracene, 1-bromo-9,10-bis(n-hexylcarbonyloxy)anthracene, 1-bromo -9,10-bis(benzoyloxy)anthracene, 1-bromo-9,10-bis(4-methylbenzoyloxy)anthracene, and 1-bromo-9,10-bis(2- Naphthoyloxy) anthracene, etc.
作为敏化剂(G),还优选被烷氧基取代的蒽化合物。As the sensitizer (G), an anthracene compound substituted by an alkoxy group is also preferred.
关于被烷氧基取代且优选作为敏化剂(G)的蒽化合物的具体例,可举出9,10-二甲氧基蒽、9,10-二乙氧基蒽、9,10-双(正丙氧基)蒽、9,10-双(正丁氧基)蒽、9,10-双(正戊氧基)蒽、9,10-双(异戊基氧基)蒽、9,10-双(正己氧基)蒽、9,10-双(正庚基氧基)蒽、9,10-双(正辛基氧基)蒽、9,10-双(2-乙基己基氧基)蒽、9-甲氧基蒽、9-乙氧基蒽、9-(正丙氧基)蒽、9-(正丁氧基)蒽、9-(正戊氧基)蒽、9-(异戊基氧基)蒽、9-(正己氧基)蒽、9-(正庚基氧基)蒽、9-(正辛基氧基)蒽、9-(2-乙基己基氧基)蒽、2-甲基-9,10-二甲氧基蒽、2-甲基-9,10-二乙氧基蒽、2-甲基-9,10-双(正丙氧基)蒽、2-甲基-9,10-双(正丁氧基)蒽、2-甲基-9,10-双(正戊氧基)蒽、2-甲基-9,10-双(异戊基氧基)蒽、2-甲基-9,10-双(正己氧基)蒽、2-甲基-9,10-双(正庚基氧基)蒽、2-甲基-9,10-双(正辛基氧基)蒽、2-甲基-9,10-双(2-乙基己基氧基)蒽、2-乙基-9,10-二甲氧基蒽、2-乙基-9,10-二乙氧基蒽、2-乙基-9,10-双(正丙氧基)蒽、2-乙基-9,10-双(正丁氧基)蒽、2-乙基-9,10-双(正戊氧基)蒽、2-乙基-9,10-双(异戊基氧基)蒽、2-乙基-9,10-双(正己氧基)蒽、2-乙基-9,10-双(正庚基氧基)蒽、2-乙基-9,10-双(正辛基氧基)蒽、2-乙基-9,10-双(2-乙基己基氧基)蒽、2-甲基-9-甲氧基蒽、2-甲基-9-乙氧基蒽、2-甲基-9-(正丙氧基)蒽、2-甲基-9-(正丁氧基)蒽、2-甲基-9-(正戊氧基)蒽、2-甲基-9-(异戊基氧基)蒽、2-甲基-9-(正己氧基)蒽、2-甲基-9-(正庚基氧基)蒽、2-甲基-9-(正辛基氧基)蒽、2-甲基-9-(2-乙基己基氧基)蒽、2-乙基-9-甲氧基蒽、2-乙基-9-乙氧基蒽、2-乙基-9-(正丙氧基)蒽、2-乙基-9-(正丁氧基)蒽、2-乙基-9-(正戊氧基)蒽、2-乙基-9-(异戊基氧基)蒽、2-乙基-9-(正己氧基)蒽、2-乙基-9-(正庚基氧基)蒽、2-乙基-9-(正辛基氧基)蒽、2-乙基-9-(2-乙基己基氧基)蒽、2-氯-9,10-二甲氧基蒽、2-氯-9,10-二乙氧基蒽、2-氯-9,10-双(正丙氧基)蒽、2-氯-9,10-双(正丁氧基)蒽、2-氯-9,10-双(正戊氧基)蒽、2-氯-9,10-双(异戊基氧基)蒽、2-氯-9,10-双(正己氧基)蒽、2-氯-9,10-双(正庚基氧基)蒽、2-氯-9,10-双(正辛基氧基)蒽、2-氯-9,10-双(2-乙基己基氧基)蒽、2-溴-9,10-二甲氧基蒽、2-溴-9,10-二乙氧基蒽、2-溴-9,10-双(正丙氧基)蒽、2-溴-9,10-双(正丁氧基)蒽、2-溴-9,10-双(正戊氧基)蒽、2-溴-9,10-双(异戊基氧基)蒽、2-溴-9,10-双(正己氧基)蒽、2-溴-9,10-双(正庚基氧基)蒽、2-溴-9,10-双(正辛基氧基)蒽、2-溴-9,10-双(2-乙基己基氧基)蒽、2-氯-9-甲氧基蒽、2-氯-9-乙氧基蒽、2-氯-9-(正丙氧基)蒽、2-氯-9-(正丁氧基)蒽、2-氯-9-(正戊氧基)蒽、2-氯-9-(异戊基氧基)蒽、2-氯-9-(正己氧基)蒽、2-氯-9-(正庚基氧基)蒽、2-氯-9-(正辛基氧基)蒽、2-氯-9-(2-乙基己基氧基)蒽、2-溴-9-甲氧基蒽、2-溴-9-乙氧基蒽、2-溴-9-(正丙氧基)蒽、2-溴-9-(正丁氧基)蒽、2-溴-9-(正戊氧基)蒽、2-乙基-9-(异戊基氧基)蒽、2-溴-9-(正己氧基)蒽、2-溴-9-(正庚基氧基)蒽、2-溴-9-(正辛基氧基)蒽、及2-溴-9-(2-乙基己基氧基)蒽等。Specific examples of the anthracene compound substituted with an alkoxy group and preferably used as the sensitizer (G) include 9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, and 9,10-bis (n-propoxy)anthracene, 9,10-bis(n-butoxy)anthracene, 9,10-bis(n-pentoxy)anthracene, 9,10-bis(isoamyloxy)anthracene, 9, 10-bis(n-hexyloxy)anthracene, 9,10-bis(n-heptyloxy)anthracene, 9,10-bis(n-octyloxy)anthracene, 9,10-bis(2-ethylhexyloxy)anthracene base) anthracene, 9-methoxyanthracene, 9-ethoxyanthracene, 9-(n-propoxy)anthracene, 9-(n-butoxy)anthracene, 9-(n-pentoxy)anthracene, 9- (Isoamyloxy)anthracene, 9-(n-hexyloxy)anthracene, 9-(n-heptyloxy)anthracene, 9-(n-octyloxy)anthracene, 9-(2-ethylhexyloxy) ) anthracene, 2-methyl-9,10-dimethoxyanthracene, 2-methyl-9,10-diethoxyanthracene, 2-methyl-9,10-bis(n-propoxy)anthracene , 2-methyl-9,10-bis(n-butoxy)anthracene, 2-methyl-9,10-bis(n-pentoxy)anthracene, 2-methyl-9,10-bis(isoamyl) oxy)anthracene, 2-methyl-9,10-bis(n-hexyloxy)anthracene, 2-methyl-9,10-bis(n-heptyloxy)anthracene, 2-methyl-9,10 -Bis(n-octyloxy)anthracene, 2-methyl-9,10-bis(2-ethylhexyloxy)anthracene, 2-ethyl-9,10-dimethoxyanthracene, 2-ethyl base-9,10-diethoxyanthracene, 2-ethyl-9,10-bis(n-propoxy)anthracene, 2-ethyl-9,10-bis(n-butoxy)anthracene, 2- Ethyl-9,10-bis(n-pentyloxy)anthracene, 2-ethyl-9,10-bis(isoamyloxy)anthracene, 2-ethyl-9,10-bis(n-hexyloxy) Anthracene, 2-ethyl-9,10-bis(n-heptyloxy)anthracene, 2-ethyl-9,10-bis(n-octyloxy)anthracene, 2-ethyl-9,10-bis (2-ethylhexyloxy)anthracene, 2-methyl-9-methoxyanthracene, 2-methyl-9-ethoxyanthracene, 2-methyl-9-(n-propoxy)anthracene, 2-Methyl-9-(n-butoxy)anthracene, 2-methyl-9-(n-pentyloxy)anthracene, 2-methyl-9-(isoamyloxy)anthracene, 2-methyl -9-(n-hexyloxy)anthracene, 2-methyl-9-(n-heptyloxy)anthracene, 2-methyl-9-(n-octyloxy)anthracene, 2-methyl-9-( 2-ethylhexyloxy)anthracene, 2-ethyl-9-methoxyanthracene, 2-ethyl-9-ethoxyanthracene, 2-ethyl-9-(n-propoxy)anthracene, 2 -Ethyl-9-(n-butoxy)anthracene, 2-ethyl-9-(n-pentoxy)anthracene, 2-ethyl-9-(isoamyloxy)anthracene, 2-ethyl- 9-(n-hexyloxy)anthracene, 2-ethyl-9-(n-heptyloxy)anthracene, 2-ethyl-9-(n-octyloxy)anthracene, 2-ethyl-9-(2 -Ethylhexyloxy)anthracene, 2-chloro-9,10-dimethoxyanthracene, 2-chloro-9,10-diethoxyanthracene, 2-chloro-9,10-bis(n- Propoxy)anthracene, 2-chloro-9,10-bis(n-butoxy)anthracene, 2-chloro-9,10-bis(n-pentoxy)anthracene, 2-chloro-9,10-bis( Isopentyloxy)anthracene, 2-chloro-9,10-bis(n-hexyloxy)anthracene, 2-chloro-9,10-bis(n-heptyloxy)anthracene, 2-chloro-9,10- Bis(n-octyloxy)anthracene, 2-chloro-9,10-bis(2-ethylhexyloxy)anthracene, 2-bromo-9,10-dimethoxyanthracene, 2-bromo-9, 10-diethoxyanthracene, 2-bromo-9,10-bis(n-propoxy)anthracene, 2-bromo-9,10-bis(n-butoxy)anthracene, 2-bromo-9,10- Bis(n-pentyloxy)anthracene, 2-bromo-9,10-bis(isoamyloxy)anthracene, 2-bromo-9,10-bis(n-hexyloxy)anthracene, 2-bromo-9,10 -Bis(n-heptyloxy)anthracene, 2-bromo-9,10-bis(n-octyloxy)anthracene, 2-bromo-9,10-bis(2-ethylhexyloxy)anthracene, 2 -Chloro-9-methoxyanthracene, 2-chloro-9-ethoxyanthracene, 2-chloro-9-(n-propoxy)anthracene, 2-chloro-9-(n-butoxy)anthracene, 2 -Chloro-9-(n-pentyloxy)anthracene, 2-chloro-9-(isoamyloxy)anthracene, 2-chloro-9-(n-hexyloxy)anthracene, 2-chloro-9-(n-heptyloxy)anthracene oxy)anthracene, 2-chloro-9-(n-octyloxy)anthracene, 2-chloro-9-(2-ethylhexyloxy)anthracene, 2-bromo-9-methoxyanthracene, 2 -Bromo-9-ethoxyanthracene, 2-bromo-9-(n-propoxy)anthracene, 2-bromo-9-(n-butoxy)anthracene, 2-bromo-9-(n-pentoxy)anthracene Anthracene, 2-ethyl-9-(isoamyloxy)anthracene, 2-bromo-9-(n-hexyloxy)anthracene, 2-bromo-9-(n-heptyloxy)anthracene, 2-bromo- 9-(n-octyloxy)anthracene, 2-bromo-9-(2-ethylhexyloxy)anthracene, etc.
上文说明的蒽化合物中,从制造的容易性、和作为敏化剂(G)的性能的方面考虑,优选9,10-双(乙酰氧基)蒽、9,10-双(丙酰氧基)蒽、9,10-双(正丙基羰基氧基)蒽、9,10-双(异丙基羰基氧基)蒽、9,10-双(正丁基羰基氧基)蒽、9,10-双(异丁基羰基氧基)蒽、9,10-双(正己酰氧基)蒽、9,10-双(正庚酰氧基)蒽、9,10-双(正辛酰氧基)蒽、9,10-双(2-乙基己酰氧基)蒽、9,10-双(正壬酰氧基)蒽、9,10-二乙氧基蒽、9,10-二丙氧基蒽、及9,10-二丁氧基蒽。Among the anthracene compounds described above, 9,10-bis(acetoxy)anthracene, 9,10-bis(propionyloxy) are preferred from the viewpoint of ease of production and performance as a sensitizer (G). base) anthracene, 9,10-bis(n-propylcarbonyloxy)anthracene, 9,10-bis(isopropylcarbonyloxy)anthracene, 9,10-bis(n-butylcarbonyloxy)anthracene, 9 , 10-bis(isobutylcarbonyloxy)anthracene, 9,10-bis(n-hexanoyloxy)anthracene, 9,10-bis(n-heptanoyloxy)anthracene, 9,10-bis(n-octanoyl) oxy)anthracene, 9,10-bis(2-ethylhexanoyloxy)anthracene, 9,10-bis(n-nonanoyloxy)anthracene, 9,10-diethoxyanthracene, 9,10- Dipropoxyanthracene, and 9,10-dibutoxyanthracene.
作为包含并四苯环且可合适地用作敏化剂(G)的化合物的具体例,可举出:Specific examples of the compound containing a naphthacene ring and which can be suitably used as the sensitizer (G) include:
2-甲基-5,11-二氧代-6,12-双(乙酰氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(丙酰氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正丙基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(异丙基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正丁基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(异丁基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正戊基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正己基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正庚基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(乙酰氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(丙酰氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正丙基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(异丙基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正丁基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(异丁基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正戊基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正己基羰基氧基)并四苯、及2-乙基-5,11-二氧代-6,12-双(正庚基羰基氧基)并四苯等被烷基羰基氧基取代的并四苯化合物;2-Methyl-5,11-dioxo-6,12-bis(acetoxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(propionyloxy) ) tetracene, 2-methyl-5,11-dioxo-6,12-bis(n-propylcarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6, 12-bis(isopropylcarbonyloxy)tetracene, 2-methyl-5,11-dioxo-6,12-bis(n-butylcarbonyloxy)tetracene, 2-methyl- 5,11-dioxo-6,12-bis(isobutylcarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(n-pentylcarbonyloxy) ) tetracene, 2-methyl-5,11-dioxo-6,12-bis(n-hexylcarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12 -Bis(n-heptylcarbonyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(acetoxy)naphthacene, 2-ethyl-5,11- Dioxo-6,12-bis(propionyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(n-propylcarbonyloxy)tetracene, 2 -Ethyl-5,11-dioxo-6,12-bis(isopropylcarbonyloxy)naphthacene, 2-ethyl-5,11-dioxo-6,12-bis(n-butyl) carbonyloxy) tetracene, 2-methyl-5,11-dioxo-6,12-bis(isobutylcarbonyloxy)naphthacene, 2-ethyl-5,11-dioxo Substituted-6,12-bis(n-pentylcarbonyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(n-hexylcarbonyloxy)tetracene, and 2 -Ethyl-5,11-dioxo-6,12-bis(n-heptylcarbonyloxy)naphthacene and other tetracene compounds substituted by alkylcarbonyloxy groups;
2-甲基-5,11-二氧代-6,12-双(苯甲酰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(邻甲苯甲酰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(间甲苯甲酰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(对甲苯甲酰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(α-萘甲酰氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(β-萘甲酰氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(苯甲酰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(邻甲苯甲酰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(间甲苯甲酰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(对甲苯甲酰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(α-萘甲酰氧基)并四苯、及2-乙基-5,11-二氧代-6,12-双(β-萘甲酰氧基)并四苯等被芳酰基氧基取代的并四苯化合物;2-Methyl-5,11-dioxo-6,12-bis(benzoyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(o-toluene) formyloxy) tetracene, 2-methyl-5,11-dioxo-6,12-bis(m-toluoyloxy)naphthacene, 2-methyl-5,11-dioxo Substituted-6,12-bis(p-toluoyloxy)tetracene, 2-methyl-5,11-dioxo-6,12-bis(α-naphthoyloxy)naphthacene, 2-Methyl-5,11-dioxo-6,12-bis(β-naphthoyloxy)naphthacene, 2-ethyl-5,11-dioxo-6,12-bis( Benzoyloxy) tetracene, 2-ethyl-5,11-dioxo-6,12-bis(o-toluoyloxy)tetracene, 2-ethyl-5,11-di Oxo-6,12-bis(m-toluoyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(p-toluoyloxy)tetracene, 2-Ethyl-5,11-dioxo-6,12-bis(α-naphthoyloxy)naphthacene, and 2-ethyl-5,11-dioxo-6,12-bis (β-naphthoyloxy) naphthacene compounds substituted by aroyloxy groups such as naphthacene;
2-甲基-5,11-二氧代-6,12-双(甲氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(乙氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正丙氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(异丙氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正丁氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(异丁基氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正戊氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正己氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正庚基氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(正辛基氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(甲氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(乙氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正丙氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(异丙氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正丁氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(异丁基氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正戊氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正己氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(正庚基氧基羰基氧基)并四苯、及2-乙基-5,11-二氧代-6,12-双(正辛基氧基羰基氧基)并四苯等被烷氧基羰基氧基取代的并四苯化合物;以及2-Methyl-5,11-dioxo-6,12-bis(methoxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(ethyl) oxycarbonyloxy) tetracene, 2-methyl-5,11-dioxo-6,12-bis(n-propoxycarbonyloxy)naphthacene, 2-methyl-5,11- Dioxo-6,12-bis(isopropoxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(n-butoxycarbonyloxy)and Tetracene, 2-methyl-5,11-dioxo-6,12-bis(isobutyloxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6, 12-Bis(n-pentoxycarbonyloxy)tetracene, 2-methyl-5,11-dioxo-6,12-bis(n-hexyloxycarbonyloxy)tetracene, 2-methyl -5,11-dioxo-6,12-bis(n-heptyloxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(n-octyl) oxycarbonyloxy) tetracene, 2-ethyl-5,11-dioxo-6,12-bis(methoxycarbonyloxy)naphthacene, 2-ethyl-5,11-di Oxo-6,12-bis(ethoxycarbonyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(n-propoxycarbonyloxy)tetracene , 2-ethyl-5,11-dioxo-6,12-bis(isopropoxycarbonyloxy)naphthacene, 2-ethyl-5,11-dioxo-6,12-bis (n-Butoxycarbonyloxy)naphthalene, 2-ethyl-5,11-dioxo-6,12-bis(isobutyloxycarbonyloxy)naphthacene, 2-ethyl- 5,11-dioxo-6,12-bis(n-pentoxycarbonyloxy)naphthacene, 2-ethyl-5,11-dioxo-6,12-bis(n-hexyloxycarbonyloxy) base) tetracene, 2-ethyl-5,11-dioxo-6,12-bis(n-heptyloxycarbonyloxy)naphthacene, and 2-ethyl-5,11-dioxo Substituted-6,12-bis(n-octyloxycarbonyloxy)tetracene and other naphthacene compounds substituted by alkoxycarbonyloxy; and
2-甲基-5,11-二氧代-6,12-双(苯氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(邻甲苯氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(间甲苯氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(对甲苯氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(α-萘基氧基羰基氧基)并四苯、2-甲基-5,11-二氧代-6,12-双(β-萘基氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(苯氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(邻甲苯氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(间甲苯氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(对甲苯氧基羰基氧基)并四苯、2-乙基-5,11-二氧代-6,12-双(α-萘基氧基羰基氧基)并四苯、及2-乙基-5,11-二氧代-6,12-双(β-萘基氧基羰基氧基)并四苯等被芳基氧基羰基氧基取代的并四苯化合物。2-Methyl-5,11-dioxo-6,12-bis(phenoxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(o- Tolyloxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(m-tolyloxycarbonyloxy)naphthacene, 2-methyl-5,11 -Dioxo-6,12-bis(p-tolyloxycarbonyloxy)naphthacene, 2-methyl-5,11-dioxo-6,12-bis(α-naphthyloxycarbonyloxy) base) tetracene, 2-methyl-5,11-dioxo-6,12-bis(β-naphthyloxycarbonyloxy)naphthacene, 2-ethyl-5,11-dioxo Substituted-6,12-bis(phenoxycarbonyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(o-tolyloxycarbonyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(m-tolyloxycarbonyloxy)naphthacene, 2-ethyl-5,11-dioxo-6,12-bis( p-Tolyloxycarbonyloxy)tetracene, 2-ethyl-5,11-dioxo-6,12-bis(α-naphthyloxycarbonyloxy)tetracene, and 2-ethyl -5,11-dioxo-6,12-bis(β-naphthyloxycarbonyloxy)naphthacene compound substituted by aryloxycarbonyloxy, such as tetracene.
上述包含并四苯环的化合物中,优选5,11-二氧代-6,12-双(甲氧基羰基氧基)并四苯、5,11-二氧代-6,12-双(乙氧基羰基氧基)并四苯、5,11-二氧代-6,12-双(异丙氧基羰基氧基)并四苯、5,11-二氧代-6,12-双(异丁基氧基羰基氧基)并四苯、5,11-二氧代-6,12-双(正丁基羰基氧基)并四苯、5,11-二氧代-6,12-双(正戊基羰基氧基)并四苯、5,11-二氧代-6,12-双(正庚酰氧基)并四苯。Among the above-mentioned compounds containing a tetracene ring, 5,11-dioxo-6,12-bis(methoxycarbonyloxy)naphthacene, 5,11-dioxo-6,12-bis( Ethoxycarbonyloxy)naphthacene, 5,11-dioxo-6,12-bis(isopropoxycarbonyloxy)naphthacene, 5,11-dioxo-6,12-bis (isobutyloxycarbonyloxy)naphthacene, 5,11-dioxo-6,12-bis(n-butylcarbonyloxy)naphthacene, 5,11-dioxo-6,12 - bis(n-pentylcarbonyloxy)tetracene, 5,11-dioxo-6,12-bis(n-heptanoyloxy)tetracene.
作为可合适地用作敏化剂(G)的包含噻吨环的化合物的具体例,可举出噻吨-9-酮、2-甲基-9H-噻吨-9-酮、2-异丙基-9H-噻吨-9-酮、1,4-二甲基噻吨-9-酮、及3-甲基-9-氧代-9H-噻吨-2-基乙酸酯等。Specific examples of the compound containing a thioxanthene ring that can be suitably used as the sensitizer (G) include thioxanthene-9-one, 2-methyl-9H-thioxanthene-9-one, 2-isoxanthene-9-one Propyl-9H-thioxanthene-9-one, 1,4-dimethylthioxanthene-9-one, and 3-methyl-9-oxo-9H-thioxanthene-2-yl acetate, etc.
相对于感光性树脂组合物中的光聚合引发剂(C)100质量份而言,敏化剂(G)的含量优选为5质量份以上且60质量份以下,更优选为15质量份以上且50质量份以下。感光性树脂组合物在上述范围内含有敏化剂时,特别地,由曝光引起的固化反应均匀地进行,容易形成边缘的角度尤其良好的经图案化的固化膜。The content of the sensitizer (G) is preferably 5 parts by mass or more and 60 parts by mass or less with respect to 100 parts by mass of the photopolymerization initiator (C) in the photosensitive resin composition, more preferably 15 parts by mass or more and 50 parts by mass or less. When the photosensitive resin composition contains a sensitizer within the above range, in particular, the curing reaction by exposure proceeds uniformly, and a patterned cured film with a particularly favorable edge angle is easily formed.
<有机溶剂(S)><Organic solvent (S)>
出于调节涂布性的目的等,典型地,感光性树脂组合物可以包含有机溶剂(S)。作为有机溶剂(S),例如,可举出乙二醇单甲基醚、乙二醇单乙基醚、乙二醇正丙基醚、乙二醇单正丁基醚、二乙二醇单甲基醚、二乙二醇单乙基醚、二乙二醇单正丙基醚、二乙二醇单正丁基醚、三乙二醇单甲基醚、三乙二醇单乙基醚、丙二醇单甲基醚、丙二醇单乙基醚、丙二醇单正丙基醚、丙二醇单正丁基醚、二丙二醇单甲基醚、二丙二醇单乙基醚、二丙二醇单正丙基醚、二丙二醇单正丁基醚、三丙二醇单甲基醚、三丙二醇单乙基醚等(多)亚烷基二醇单烷基醚类;乙二醇单甲基醚乙酸酯、乙二醇单乙基醚乙酸酯、二乙二醇单甲基醚乙酸酯、二乙二醇单乙基醚乙酸酯、丙二醇单甲基醚乙酸酯、丙二醇单乙基醚乙酸酯等(聚)亚烷基二醇单烷基醚乙酸酯类;二乙二醇二甲基醚、二乙二醇甲基乙基醚、二乙二醇二乙基醚、四氢呋喃等其他醚类;甲基乙基酮、环己酮、2-庚酮、3-庚酮等酮类;2-羟基丙酸甲酯、2-羟基丙酸乙酯等乳酸烷基酯类;2-羟基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羟基乙酸乙酯、2-羟基-3-甲基丁酸甲酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸正丙酯、乙酸异丙酯、乙酸正丁酯、乙酸异丁酯、甲酸正戊酯、乙酸异戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸异丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙酰乙酸甲酯、乙酰乙酸乙酯、2-氧代丁酸乙酯等其他酯类;甲苯、二甲苯等芳香族烃类;N-甲基吡咯烷酮、N,N-二甲基甲酰胺、N,N-二甲基乙酰胺等酰胺类等。这些溶剂可以单独使用,也可以组合两种以上而使用。Typically, the photosensitive resin composition may contain an organic solvent (S) for the purpose of adjusting coatability or the like. Examples of the organic solvent (S) include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol n-propyl ether, ethylene glycol mono-n-butyl ether, and diethylene glycol monomethyl ether. base ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol Mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether and other (poly) alkylene glycol monoalkyl ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether Ethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, etc. (poly ) alkylene glycol monoalkyl ether acetates; diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol diethyl ether, tetrahydrofuran and other ethers; methyl Ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone and other ketones; methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate and other lactic acid alkyl esters; 2-hydroxy-2-methyl Ethyl propionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethoxyacetic acid Ethyl ester, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutyrate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3- Methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, propionic acid n-butyl, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoacetate, acetoacetate Ethyl ester, ethyl 2-oxobutyrate and other esters; Aromatic hydrocarbons such as toluene and xylene; N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylethyl acetate Amides such as amides, etc. These solvents may be used alone or in combination of two or more.
有机溶剂(S)的使用量可根据感光性树脂组合物的用途而适当确定。关于有机溶剂(S)的使用量,作为一例,可举出感光性树脂组合物的固态成分浓度成为1质量%以上且50质量%以下的范围的量。The usage-amount of an organic solvent (S) can be suitably determined according to the use of the photosensitive resin composition. As an example, the usage-amount of an organic solvent (S) is the quantity which the solid content concentration of the photosensitive resin composition becomes the range of 1 mass % or more and 50 mass % or less.
<其他成分><Other ingredients>
感光性树脂组合物中,根据需要,可以包含除上述以外的其他各种添加剂。具体而言,可示例分散助剂、填充剂、填料、密合促进剂、抗氧化剂、紫外线吸收剂、防凝聚剂、热阻聚剂、消泡剂、表面活性剂等。In the photosensitive resin composition, if necessary, other various additives other than the above may be contained. Specifically, dispersing aids, fillers, fillers, adhesion promoters, antioxidants, ultraviolet absorbers, anti-agglomeration agents, thermal polymerization inhibitors, antifoaming agents, surfactants, and the like can be exemplified.
作为感光性树脂组合物中使用的热阻聚剂,例如,可举出对苯二酚、对苯二酚单乙基醚等。另外,分别地,作为消泡剂,可示例有机硅系、氟系等化合物,作为表面活性剂,可示例阴离子系、阳离子系、非离子系等化合物。As a thermal polymerization inhibitor used for the photosensitive resin composition, hydroquinone, hydroquinone monoethyl ether, etc. are mentioned, for example. Moreover, as a defoaming agent, compounds, such as a silicone type and a fluorine type, can be illustrated, and as a surfactant, compounds, such as an anionic type, a cation type, and a nonionic type, can be illustrated, respectively.
<感光性树脂组合物的制备方法><Preparation method of photosensitive resin composition>
感光性树脂组合物通过将各自所期望的量的上述各成分均匀地混合而制备。需要说明的是,在制备的感光性树脂组合物不包含颜料等不溶性成分的情况下,可以使用过滤器进行过滤以使感光性树脂组合物变得均匀。The photosensitive resin composition is prepared by uniformly mixing each of the above-mentioned components in desired amounts. In addition, when the prepared photosensitive resin composition does not contain insoluble components, such as a pigment, it can filter using a filter to make the photosensitive resin composition uniform.
《经图案化的固化膜的制造方法》"Method for producing a patterned cured film"
通过使用上文说明的感光性树脂组合物,能够制造经图案化的固化膜。A patterned cured film can be produced by using the photosensitive resin composition demonstrated above.
典型地,经图案化的固化膜可通过下述方法制造,所述方法包括:Typically, a patterned cured film can be produced by a method comprising:
将上述感光性树脂组合物涂布于基板上从而形成涂布膜的工序;知The process of coating the above-mentioned photosensitive resin composition on a substrate to form a coating film;
对涂布膜进行曝光的工序,The process of exposing the coating film,
其中,涂布膜进行图案化,或者wherein the coating film is patterned, or
对涂布膜进行位置选择性的曝光,接着,进行针对经曝光的上述涂布膜的显影。Position-selective exposure is performed on the coating film, and then, development with respect to the exposed coating film is performed.
基材(基板或支承体)可根据各种用途进行选择,例如,不特别限于石英、玻璃、光学膜、陶瓷材料、蒸镀膜、磁性膜、反射膜、Ni、Cu、Cr、Fe等金属基板、纸、SOG(Spin OnGlass)、聚酯膜、聚碳酸酯膜、聚酰亚胺膜等聚合物基板、TFT阵列基板、PDP的电极板、玻璃、透明塑料基板、ITO、金属等导电性基材、绝缘性基材、硅、氮化硅、多晶硅、氧化硅、无定形硅等半导体制作基板等。此外,例如在基板上形成有层叠结构的情况下,已形成于基板上的成为下部结构的一些层也被涵盖于作为感光性树脂组合物所适用的基材的概念中。另外,基材的形状也没有特别限定,可以为板状,也可以为卷状。基材例如可通过各种图案而在表面具有凹凸。另外,作为上述基材,可选择透光性或非透光性的基材。The substrate (substrate or support) can be selected according to various applications, for example, not particularly limited to quartz, glass, optical film, ceramic material, vapor deposition film, magnetic film, reflective film, metal substrates such as Ni, Cu, Cr, Fe, etc. , paper, SOG (Spin OnGlass), polyester film, polycarbonate film, polyimide film and other polymer substrates, TFT array substrates, PDP electrode plates, glass, transparent plastic substrates, ITO, metal and other conductive substrates materials, insulating substrates, silicon, silicon nitride, polysilicon, silicon oxide, amorphous silicon and other semiconductor substrates, etc. Moreover, for example, when a laminated structure is formed on a board|substrate, some layers which become a lower structure already formed on a board|substrate are also included in the concept as a base material suitable for the photosensitive resin composition. In addition, the shape of the base material is not particularly limited, either, and may be a plate shape or a roll shape. The substrate may have irregularities on the surface by various patterns, for example. In addition, as the above-mentioned base material, a light-transmitting or non-light-transmitting base material can be selected.
在基板上形成经图案化的涂布膜的方法没有特别限定。在形成经图案化的涂布膜的情况下,典型地,利用喷墨法、丝网印刷法等印刷法,形成经图案化的涂布膜。The method of forming the patterned coating film on the substrate is not particularly limited. In the case of forming a patterned coating film, the patterned coating film is typically formed by a printing method such as an ink jet method and a screen printing method.
在利用印刷法形成经图案化的涂布膜的情况下,感光性树脂组合物的粘度优选被调节为与所选择的印刷方法相对应的最适粘度。作为粘度的调节方法,可举出利用有机溶剂(S)进行稀释、添加粘度调节剂等。In the case of forming a patterned coating film by a printing method, the viscosity of the photosensitive resin composition is preferably adjusted to an optimum viscosity corresponding to the selected printing method. As a method of adjusting the viscosity, dilution with an organic solvent (S), addition of a viscosity modifier, and the like are exemplified.
作为涂布膜的厚度,没有特别限定。作为涂布膜的厚度,优选为0.05μm以上,更优选为1μm以上,进一步优选为7μm以上,尤其优选为10μm以上。涂布膜的厚度的上限没有特别限定,例如为50μm以下,优选为20μm以下。The thickness of the coating film is not particularly limited. The thickness of the coating film is preferably 0.05 μm or more, more preferably 1 μm or more, still more preferably 7 μm or more, and particularly preferably 10 μm or more. Although the upper limit of the thickness of a coating film is not specifically limited, For example, it is 50 micrometers or less, Preferably it is 20 micrometers or less.
接着,根据需要使涂布膜干燥。干燥方法没有特别限定。作为干燥方法,例如,可举出:(1)用热板,于80℃以上且120℃以下、优选90℃以上且100℃以下的温度,干燥60秒以上且120秒以下的时间的方法;(2)于室温放置数小时至数天的方法;(3)放入热风加热器、红外线加热器中数十分钟至数小时来除去溶剂的方法;等等。Next, the coating film is dried as necessary. The drying method is not particularly limited. As a drying method, for example, (1) a method of drying for 60 seconds or more and 120 seconds or less using a hot plate at a temperature of 80°C or higher and 120°C or lower, preferably 90°C or higher and 100°C or lower; (2) A method of placing it at room temperature for several hours to several days; (3) A method of removing the solvent by placing it in a hot air heater or an infrared heater for tens of minutes to several hours; and so on.
通过对上述经图案化的涂布膜进行曝光,从而形成经图案化的固化膜。A patterned cured film is formed by exposing the above-mentioned patterned coating film to light.
曝光中,光源没有特别限定,例如,可举出高压汞灯、超高压汞灯、氙灯、碳弧灯、LED等。可使用这样的光源,对涂膜照射ArF准分子激光、KrF准分子激光、F2准分子激光、极紫外线(EUV)、真空紫外线(VUV)、电子射线、X射线、软X射线、g线、i线、h线、j线、k线等放射线、或电磁波而对涂布膜进行曝光。In exposure, the light source is not particularly limited, and examples thereof include high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, carbon arc lamps, and LEDs. ArF excimer laser, KrF excimer laser, F 2 excimer laser, extreme ultraviolet (EUV), vacuum ultraviolet (VUV), electron beam, X-ray, soft X-ray, g-ray can be irradiated to the coating film using such a light source. The coating film is exposed to radiation such as , i-line, h-line, j-line, and k-line, or electromagnetic waves.
曝光量根据感光性树脂组合物的组成而不同,例如优选为10mJ/cm2以上且2000mJ/cm2以下,更优选为100mJ/cm2以上且1500mJ/cm2以下,进一步优选为200mJ/cm2以上且1200mJ/cm2以下。曝光照度根据感光性树脂组合物的组成而不同,优选在1mW/cm2以上且50mW/cm2以下的范围内。The exposure amount varies depending on the composition of the photosensitive resin composition, but for example, it is preferably 10 mJ/cm 2 or more and 2000 mJ/cm 2 or less, more preferably 100 mJ/cm 2 or more and 1500 mJ/cm 2 or less, and still more preferably 200 mJ/cm 2 More than 1200mJ/cm 2 or less. The exposure illuminance varies depending on the composition of the photosensitive resin composition, but it is preferably within a range of 1 mW/cm 2 or more and 50 mW/cm 2 or less.
可以对通过曝光而固化的固化膜进行加热。进行加热时的温度没有特别限定,优选为180℃以上且280℃以下,更优选为200℃以上且260℃以下,尤其优选为220℃以上且250℃以下。加热时间典型地优选为1分钟以上且60分钟以下,更优选为10分钟以上且50分钟以下,尤其优选为20分钟以上且40分钟以下。The cured film cured by exposure may be heated. The temperature during heating is not particularly limited, but is preferably 180°C or higher and 280°C or lower, more preferably 200°C or higher and 260°C or lower, and particularly preferably 220°C or higher and 250°C or lower. The heating time is typically preferably 1 minute or more and 60 minutes or less, more preferably 10 minutes or more and 50 minutes or less, and particularly preferably 20 minutes or more and 40 minutes or less.
另一方面,在对涂布膜进行位置选择性的曝光的情况下,在基板表面形成未图案化的涂布膜。典型地,在基板表面的整面、或大致整面涂布感光性树脂组合物。On the other hand, in the case of subjecting the coating film to position-selective exposure, an unpatterned coating film is formed on the surface of the substrate. Typically, the photosensitive resin composition is applied to the entire surface or substantially the entire surface of the substrate surface.
涂布方法没有特别限定。作为优选的涂布方法,可举出使用辊涂机、逆式涂布机、棒涂机等接触转印型涂布装置、旋转器(旋转式涂布装置)、分配器、喷墨机、喷雾机、丝网印刷机、幕涂机等非接触型涂布装置的方法。The coating method is not particularly limited. As a preferable coating method, a contact transfer type coating apparatus using a roll coater, a reverse coater, a bar coater, etc., a spinner (rotary coater), a dispenser, an ink jet, Methods for non-contact coating devices such as sprayers, screen printers, and curtain coaters.
与经图案化的涂布膜同样,通过上述方式形成的涂布膜也可根据需要进行干燥。干燥方法与针对经图案化的涂布膜所说明的方法同样。Like the patterned coating film, the coating film formed in the above-described manner may be dried as necessary. The drying method is the same as that described for the patterned coating film.
针对通过上述方式形成的未图案化的涂布膜,隔着具有与固化膜的图案形状相对应的形状的透光部的负型掩模,位置选择性地进行曝光。With respect to the unpatterned coating film formed in the above-described manner, exposure is selectively performed through a negative mask having a light-transmitting portion having a shape corresponding to the pattern shape of the cured film.
除了使用负型掩模外,曝光方法与针对上述经图案化的涂布膜的曝光方法同样。The exposure method is the same as the exposure method for the patterned coating film described above, except that a negative mask is used.
接着,利用显影液对经曝光的涂布膜进行显影,由此形成经图案化的固化膜。显影方法没有特别限定,例如,可以利用浸渍法、喷雾法等。作为显影液,可举出单乙醇胺、二乙醇胺、三乙醇胺等有机系的显影液、氢氧化钠、氢氧化钾、碳酸钠、氨、季铵盐等的水溶液。Next, the exposed coating film is developed with a developing solution, thereby forming a patterned cured film. The development method is not particularly limited, and for example, a dipping method, a spray method, or the like can be used. Examples of the developer include organic developers such as monoethanolamine, diethanolamine, and triethanolamine, and aqueous solutions of sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and quaternary ammonium salts.
针对显影后得到的经图案化的固化膜,可以与对上述经图案化的涂布膜进行曝光方法的方法同样地进行加热。The patterned cured film obtained after development can be heated in the same manner as the method of exposing the above-mentioned patterned coating film.
《隔堤的形成方法》"Methods of Forming a Dike"
使用上文说明的感光性树脂组合物来形成隔堤的方法没有特别限定。隔堤通常在光学元件(滤色器、有机EL显示元件、量子点显示器、及有机TFT阵列等)中以划分像素的分隔物的形式形成。The method of forming a bank using the photosensitive resin composition demonstrated above is not specifically limited. Banks are generally formed in the form of spacers dividing pixels in optical elements (color filters, organic EL display elements, quantum dot displays, and organic TFT arrays, etc.).
因此,在隔堤的形成方法中,选择与各光学元件对应的基板。另外,隔堤通常优选为遮光性。因此,作为用于形成隔堤的感光性树脂组合物,优选含有遮光剂(E1)作为着色剂(E)的感光性树脂组合物。Therefore, in the method of forming the bank, the substrate corresponding to each optical element is selected. In addition, it is generally preferable that the bank is light-shielding. Therefore, as a photosensitive resin composition for bank formation, the photosensitive resin composition containing a light-shielding agent (E1) as a coloring agent (E) is preferable.
就隔堤的形成方法而言,除了选择与各光学元件对应的基板外,与上述经图案化的固化膜的制造方法同样。以这样的方式,在用于制造光学元件的基板上形成隔堤,由此可制造用于制造光学元件的带隔堤的基板。The formation method of a bank is the same as that of the manufacturing method of the patterned cured film mentioned above, except that the board|substrate corresponding to each optical element is selected. In this manner, banks are formed on the substrate for manufacturing the optical element, whereby the banked substrate for manufacturing the optical element can be manufactured.
《光学元件的制造方法》"Manufacturing method of optical element"
使用由上文说明的方法制造的用于制造光学元件的带隔堤的基板,制造各种光学元件。制造光学元件的方法没有特别限定。优选的是,在利用上述方法于基板上形成隔堤的图案后,向基板上的由隔堤围成的区域内注入油墨而形成像素,由此制造光学元件。Various optical elements were produced using the banked substrate for producing an optical element produced by the method described above. The method of manufacturing the optical element is not particularly limited. Preferably, after patterning the banks on the substrate by the above method, ink is injected into the regions surrounded by the banks on the substrate to form pixels, thereby manufacturing the optical element.
使用上文说明的感光性树脂组合物来形成隔堤时,可抑制由隔堤围成的区域内的斥液化。因此,能够通过用于形成像素的油墨将由隔堤围成的区域内充分地被覆。由此,能够解决例如有机EL显示元件中的光晕(halation)问题。When the bank is formed using the photosensitive resin composition described above, the liquid repellency in the region surrounded by the bank can be suppressed. Therefore, the area surrounded by the bank can be sufficiently covered with the ink for forming the pixel. Thereby, for example, the problem of halation in the organic EL display element can be solved.
作为形成油墨(其用于形成像素)时使用的溶剂,可以使用水、有机溶剂、及它们的混合溶剂。有机溶剂只要能够从注入油墨后所形成的被膜中除去,则没有特别限定。作为有机溶剂的具体例,可举出甲苯、二甲苯、苯甲醚、均三甲苯、四氢化萘、环己基苯、丙酮、甲基乙基酮、甲基异丁基酮、环己酮、甲醇、乙醇、异丙醇、乙酸乙酯、及乙酸丁酯等。另外,油墨中可添加表面活性剂、抗氧化剂、粘度调节剂、紫外线吸收剂等。As the solvent used in forming the ink for forming the pixel, water, an organic solvent, and a mixed solvent thereof can be used. The organic solvent is not particularly limited as long as it can be removed from the film formed after the ink is injected. Specific examples of the organic solvent include toluene, xylene, anisole, mesitylene, tetralin, cyclohexylbenzene, acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, Methanol, ethanol, isopropanol, ethyl acetate, and butyl acetate, etc. In addition, surfactants, antioxidants, viscosity modifiers, ultraviolet absorbers and the like may be added to the ink.
作为向由隔堤围成的区域内注入油墨的方法,从能够将少量的油墨容易地注入规定部位的方面考虑,优选喷墨法。像素的形成中使用的油墨可根据要制造的光学元件的种类进行适当选择。在利用喷墨法注入油墨的情况下,就油墨的粘度而言,只要能够将油墨从喷墨头良好地喷出,则没有特别限定,优选为4mPa·s以上且20mPa·s以下,更优选为5mPa·s以上且10mPa·s以下。油墨的粘度可通过油墨中的固态成分含量的调节、溶剂的变更、粘度调节剂的添加等来进行调节。As a method of injecting ink into the region surrounded by the banks, the ink jet method is preferable because a small amount of ink can be easily injected into a predetermined portion. The ink used for the formation of the pixel can be appropriately selected according to the type of the optical element to be manufactured. When the ink is injected by the ink jet method, the viscosity of the ink is not particularly limited as long as the ink can be discharged from the ink jet head satisfactorily, but it is preferably 4 mPa·s or more and 20 mPa·s or less, more preferably It is 5 mPa·s or more and 10 mPa·s or less. The viscosity of the ink can be adjusted by adjusting the solid content in the ink, changing the solvent, adding a viscosity modifier, and the like.
就光学元件的种类而言,只要为具备隔堤的光学元件,则没有特别限定。作为优选的光学元件,可举出滤色器、有机EL显示元件、量子点显示器或有机TFT阵列。The type of the optical element is not particularly limited as long as it is an optical element provided with a bank. Preferable optical elements include color filters, organic EL display elements, quantum dot displays, or organic TFT arrays.
使用由上文说明的方法制造的光学元件,按照已知的方法,可制造各种显示装置。Using the optical element produced by the method described above, various display devices can be produced according to a known method.
[实施例][Example]
以下,通过实施例来更详细地说明本发明,但本发明并不限定于这些实施例。Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.
〔实施例1~12及比较例1~9〕[Examples 1 to 12 and Comparative Examples 1 to 9]
实施例、及比较例中,作为碱溶性树脂(A)((A)成分),使用按照下述方法合成的作为Cardo树脂的RE1、和丙烯酸树脂RE2。RE2为使甲基丙烯酸12摩尔%、甲基丙烯酸二环戊酯17%、与丙烯酸3,4-环氧环己基甲酯(3,4-Epoxycyclohexylmethylacrylate)71摩尔%反应而得到的树脂。In the Examples and Comparative Examples, as the alkali-soluble resin (A) (component (A)), RE1, which is a Cardo resin, and acrylic resin RE2 synthesized by the following method were used. RE2 is a resin obtained by reacting 12 mol% of methacrylic acid, 17% of dicyclopentyl methacrylate, and 71 mol% of 3,4-epoxycyclohexylmethylacrylate (3,4-Epoxycyclohexylmethylacrylate).
以下,针对作为A-1的Cardo树脂的制造方法进行记述。Hereinafter, the manufacturing method of the Cardo resin as A-1 will be described.
首先,向500mL四颈烧瓶中,装入双酚芴型环氧树脂(环氧当量为235)235g、四甲基氯化铵110mg、2,6-二叔丁基-4-甲基苯酚100mg、及丙烯酸72.0g,一边向其中以25mL/分钟的速度吹入空气一边于90~100℃加热溶解。接着,溶液保持白浊的状态缓缓升温,加热至120℃而完全溶解。此时,溶液逐渐变得透明粘稠,在该状态下继续搅拌。在这期间测定酸值,持续加热搅拌至成为小于1.0mgKOH/g。酸值达到目标值需要12小时。然后,冷却至室温,得到无色透明且固体状的下述式表示的双酚芴型环氧丙烯酸酯。First, 235 g of bisphenol fluorene-type epoxy resin (epoxy equivalent: 235), 110 mg of tetramethylammonium chloride, and 100 mg of 2,6-di-tert-butyl-4-methylphenol were placed in a 500-mL four-necked flask. , and 72.0 g of acrylic acid, which were heated and dissolved at 90 to 100° C. while blowing in air at a rate of 25 mL/min. Next, the solution was gradually heated up while being cloudy, and was completely dissolved by heating to 120°C. At this time, the solution gradually became transparent and viscous, and stirring was continued in this state. During this period, the acid value was measured, and heating and stirring were continued until it became less than 1.0 mgKOH/g. It takes 12 hours for the acid value to reach the target value. Then, it cooled to room temperature, and obtained the bisphenol fluorene type epoxy acrylate represented by the following formula in a colorless, transparent and solid state.
[化学式49][Chemical formula 49]
接下来,向以上述方式得到的上述双酚芴型环氧丙烯酸酯307.0g中加入乙酸3-甲氧基丁基酯600g并溶解,然后混合联苯四甲酸二酐80.5g及四乙基溴化铵1g,缓缓地升温,使其于110~115℃反应4小时。在确认了酸酐基的消失后,将1,2,3,6-四氢邻苯二甲酸酐38.0g混合,于90℃反应6小时,得到Cardo树脂。通过IR光谱来确认酸酐基的消失。Next, 600 g of 3-methoxybutyl acetate was added to 307.0 g of the above-mentioned bisphenol fluorene-type epoxy acrylate obtained in the above-described manner and dissolved, and then 80.5 g of biphenyltetracarboxylic dianhydride and tetraethyl bromide were mixed. 1 g of ammonium chloride was gradually heated up and allowed to react at 110 to 115° C. for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90° C. for 6 hours to obtain a Cardo resin. The disappearance of the acid anhydride group was confirmed by IR spectrum.
实施例、及比较例中,作为光聚合性单体(B)((B)成分),使用二季戊四醇六丙烯酸酯。In Examples and Comparative Examples, dipentaerythritol hexaacrylate was used as the photopolymerizable monomer (B) (component (B)).
实施例及比较例中,作为光聚合引发剂(C)((C)成分),使用以下说明的化合物。实施例中,使用作为上述式(C1)表示的肟酯化合物的下述PI1~PI4。比较例中,使用作为不属于上述式(C1)表示的肟酯化合物的肟酯化合物的下述PI5~PI7。In Examples and Comparative Examples, the compounds described below were used as the photopolymerization initiator (C) (component (C)). In the examples, the following PI1 to PI4, which are the oxime ester compounds represented by the above formula (C1), were used. In the comparative example, the following PI5 to PI7, which are oxime ester compounds not belonging to the oxime ester compound represented by the above formula (C1), were used.
[化学式50][Chemical formula 50]
[化学式51][Chemical formula 51]
实施例、及比较例中,作为氟系树脂(D)((D)成分),使用以下述比率含有下述单元的氟系树脂。需要说明的是,下式中,各单元的右下的数字表示氟系树脂中的各单元的含量(摩尔%)。In Examples and Comparative Examples, as the fluorine-based resin (D) (component (D)), a fluorine-based resin containing the following units in the following ratios was used. In addition, in the following formula, the number in the lower right of each unit represents the content (mol%) of each unit in the fluorine-based resin.
[化学式52][Chemical formula 52]
实施例及比较例中,作为着色剂(E)((E)成分),使用属于遮光剂(E1)的有机颜料混合分散液(C.I.颜料蓝15:6/C.I.颜料紫23/C.I.颜料红256=40质量%/20质量%/40质量%,固态成分浓度15质量%)。需要说明的是,后述的表1所记载的着色剂(D)的量不是分散液的量,而是分散液中的固态成分量(颜料及分散剂的量)。In the examples and comparative examples, as the colorant (E) (component (E)), the organic pigment mixed dispersion liquid (C.I. Pigment Blue 15:6/C.I. Pigment Violet 23/C.I. =40 mass %/20 mass %/40 mass %, solid content concentration 15 mass %). In addition, the quantity of the coloring agent (D) described in Table 1 mentioned later is not the quantity of a dispersion liquid, but the solid content amount (amount of a pigment and a dispersing agent) in a dispersion liquid.
实施例及比较例中,作为咪唑产生剂(F),使用以下的化合物。In Examples and Comparative Examples, the following compounds were used as the imidazole generator (F).
[化学式53][Chemical formula 53]
以固态成分浓度成为15质量%的方式,在有机溶剂(S)中均匀地溶解、分散下述物质而得到各实施例及比较例的感光性树脂组合物,所述物质为:表1所记载的种类及量的碱溶性树脂(A);表1所记载的量的光聚合性单体(B);表1中记载的种类的光聚合引发剂(C)3.5质量份;表1所记载的量的氟系树脂(D)1质量份;表1所记载的量的着色剂(E);和咪唑产生剂(F)0.5质量份。作为有机溶剂(S),使用包含二乙二醇甲基乙基醚15质量%和丙二醇单甲基醚乙酸酯85质量%的混合溶剂。The photosensitive resin compositions of Examples and Comparative Examples were obtained by uniformly dissolving and dispersing the following substances in the organic solvent (S) so that the solid content concentration would be 15% by mass: the substances described in Table 1 The type and amount of alkali-soluble resin (A); the amount of photopolymerizable monomer (B) described in Table 1; the photopolymerization initiator (C) of the type described in Table 1 3.5 parts by mass; The amount of fluorine-based resin (D) 1 mass part; the colorant (E) of the amount described in Table 1; and the imidazole generator (F) 0.5 mass part. As the organic solvent (S), a mixed solvent containing 15% by mass of diethylene glycol methyl ethyl ether and 85% by mass of propylene glycol monomethyl ether acetate was used.
使用得到的各实施例、及比较例的感光性树脂组合物,按照以下的方法,对像素排斥(非图案部的斥液性)、截面形状、和甲氧基苯接触角(固化膜的斥液性)进行评价。Using the obtained photosensitive resin compositions of Examples and Comparative Examples, pixel repellency (liquid repellency of non-pattern part), cross-sectional shape, and methoxybenzene contact angle (repulsion of cured film) were measured by the following methods. liquid) were evaluated.
[像素排斥评价][Pixel exclusion evaluation]
将感光性树脂组合物旋涂于玻璃基板(10cm×10cm)上,于90℃加热120秒,由此在玻璃基板的表面形成厚度为1.0μm的涂布膜。之后,使用接近式曝光装置(制品名:TME-150RTO,株式会社Topcon制),隔着负型掩模(宽度为10μm,200μm见方的基体(matrix)图案),以100mJ/cm2的曝光量进行曝光。使用26℃的0.04质量%KOH水溶液对曝光后的膜显影50秒,然后于230℃进行30分钟烧成处理,形成基体图案。The photosensitive resin composition was spin-coated on a glass substrate (10 cm×10 cm) and heated at 90° C. for 120 seconds to form a coating film having a thickness of 1.0 μm on the surface of the glass substrate. Then, using a proximity exposure apparatus (product name: TME-150RTO, manufactured by Topcon Co., Ltd.), through a negative mask (a matrix pattern with a width of 10 μm and a square of 200 μm), the exposure amount was 100 mJ/cm 2 . Exposure. The exposed film was developed for 50 seconds using a 0.04 mass % KOH aqueous solution at 26°C, and then fired at 230°C for 30 minutes to form a base pattern.
在形成有基体图案的玻璃基板上滴加甲氧基苯,然后,用扫描电子显微镜对基体内部进行观察。接着,根据扫描电子显微镜图像,对基体内部的未涂布甲氧基苯的部分(排斥部)的面积(μm2)进行测定。算出排斥部的面积(μm2)相对于基体内部面积(200×200μm2)而言的比率(%),基于该比率(%),评价像素排斥的程度。像素排斥的评价基准如下所述。将像素排斥的评价结果示于表1。Methoxybenzene was dropped on the glass substrate on which the substrate pattern was formed, and then the inside of the substrate was observed with a scanning electron microscope. Next, based on the scanning electron microscope image, the area (μm 2 ) of the portion (repelling portion) inside the substrate to which methoxybenzene is not applied was measured. The ratio (%) of the area (μm 2 ) of the repelling portion to the area (200×200 μm 2 ) inside the substrate was calculated, and the degree of pixel rejection was evaluated based on the ratio (%). The evaluation criteria of pixel rejection are as follows. Table 1 shows the evaluation results of pixel rejection.
○:排斥部的面积相对于基体内部面积而言的比率为0%以上且小于5%。○: The ratio of the area of the repelling portion to the internal area of the substrate is 0% or more and less than 5%.
△:排斥部的面积相对于基体内部面积而言的比率为5%以上且小于20%。Δ: The ratio of the area of the repelling portion to the internal area of the base is 5% or more and less than 20%.
×:排斥部的面积相对于基体内部面积而言的比率为20%以上。×: The ratio of the area of the repelling portion to the internal area of the substrate is 20% or more.
[截面形状评价][Cross-sectional shape evaluation]
将感光性树脂组合物旋涂于玻璃基板(10cm×10cm)上,于90℃加热120秒,由此在玻璃基板的表面形成厚度为1.0μm的涂布膜。之后,使用接近式曝光装置(制品名:TME-150RTO,株式会社Topcon制),隔着负型掩模(宽度为10μm的线与间隙图案),以100mJ/cm2的曝光量进行曝光。使用26℃的0.04质量%KOH水溶液对曝光后的膜显影50秒后,于230℃进行30分钟烧成处理,用扫描电子显微镜对图案与基板之间的接合角度(锥角)进行测定。将测得的锥度示于表1。基于测得的锥度,按照以下的基准来评价截面形状。The photosensitive resin composition was spin-coated on a glass substrate (10 cm×10 cm) and heated at 90° C. for 120 seconds to form a coating film having a thickness of 1.0 μm on the surface of the glass substrate. Thereafter, exposure was performed at an exposure amount of 100 mJ/cm 2 through a negative mask (line and space pattern with a width of 10 μm) using a proximity exposure apparatus (product name: TME-150RTO, manufactured by Topcon Co., Ltd.). The exposed film was developed for 50 seconds using a 0.04 mass % KOH aqueous solution at 26°C, then fired at 230°C for 30 minutes, and the bonding angle (taper angle) between the pattern and the substrate was measured with a scanning electron microscope. The measured taper is shown in Table 1. Based on the measured taper, the cross-sectional shape was evaluated according to the following criteria.
○:45度以上且90度以下○: 45 degrees or more and 90 degrees or less
△:30度以上且44度以下△: 30 degrees or more and 44 degrees or less
×:29度以下或91度以上×: Below 29 degrees or above 91 degrees
[接触角][Contact angle]
将感光性树脂组合物旋涂于玻璃基板(10cm×10cm)上,于90℃加热120秒,由此在玻璃基板的表面形成厚度为1.0μm的涂布膜。之后,使用接近式曝光装置(制品名:TME-150RTO,株式会社Topcon制),以100mJ/cm2的曝光量进行曝光。在曝光后的膜的表面滴加甲氧基苯50μL,使用DROP MASTER-700测定接触角。将接触角为50℃以上的情况评价为○,将接触角小于50℃的情况评价为×。The photosensitive resin composition was spin-coated on a glass substrate (10 cm×10 cm) and heated at 90° C. for 120 seconds to form a coating film having a thickness of 1.0 μm on the surface of the glass substrate. Thereafter, exposure was performed at an exposure amount of 100 mJ/cm 2 using a proximity exposure apparatus (product name: TME-150RTO, manufactured by Topcon Co., Ltd.). 50 μL of methoxybenzene was dropped on the surface of the exposed film, and the contact angle was measured using DROP MASTER-700. The case where the contact angle was 50°C or more was evaluated as ○, and the case where the contact angle was less than 50°C was evaluated as ×.
[表1][Table 1]
根据表1可知,使用包含碱溶性树脂(A)、光聚合性单体(B)、光聚合引发剂(C)、和氟系树脂(D)、且包含光聚合引发剂(C-I)(其作为上述式(C1)所示的结构的肟酯化合物)作为光聚合引发剂(C)的实施例的感光性树脂组合物时,像素排斥少,能够抑制非图案部呈现斥液性。As can be seen from Table 1, an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), a fluorine-based resin (D), and a photopolymerization initiator (C-I) (which When the oxime ester compound having the structure represented by the above formula (C1) is used as the photosensitive resin composition of the examples of the photopolymerization initiator (C), the pixel rejection is small, and the non-pattern portion can be suppressed from exhibiting liquid repellency.
另外,就使用实施例的感光性树脂组合物形成的经图案化的固化膜而言,作为用于制造光学元件的隔堤而显示出处于适当范围内的锥度,另外,还具备对甲氧基苯这样的有机溶剂的斥液性。In addition, the patterned cured film formed using the photosensitive resin composition of the Example exhibited a taper within an appropriate range as a bank for producing an optical element, and further contained a p-methoxy group. Liquid repellency of organic solvents such as benzene.
另一方面可知,在使用包含作为斥液成分的氟系树脂(D)、但不包含光聚合引发剂(C-I)(其作为上述式(C1)所示的结构的肟酯化合物)作为光聚合引发剂(C)的比较例的感光性树脂组合物的情况下,像素排斥大量发生,难以抑制非图案部呈现斥液性。On the other hand, it was found that when the fluorine-based resin (D) was used as the liquid repellent component, but the photopolymerization initiator (C-I) (which was the oxime ester compound having the structure represented by the above formula (C1)) was not included as the photopolymerization In the case of the photosensitive resin composition of the comparative example of the initiator (C), pixel repellency occurred in a large amount, and it was difficult to suppress the non-pattern part from expressing liquid repellency.
另外,就使用比较例的感光性树脂组合物形成的经图案化的固化膜而言,存在下述情况:作为用于制造光学元件的隔堤而显示出不合适的低锥度,另外,对甲氧基苯这样的有机溶剂的斥液性低。In addition, the patterned cured film formed using the photosensitive resin composition of the comparative example may exhibit an unsuitable low taper as a bank for producing an optical element, and may Organic solvents such as oxybenzene have low liquid repellency.
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CN107643654A (en) * | 2016-07-22 | 2018-01-30 | 东京应化工业株式会社 | Photosensitive polymer combination, cured film, the manufacture method of colour filter and cured film |
CN107974101A (en) * | 2016-10-25 | 2018-05-01 | 东京应化工业株式会社 | Colorant dispersion, photosensitive polymer combination and its manufacture method, solidfied material, organic EL element and pattern formation method |
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US7923919B2 (en) | 2004-10-28 | 2011-04-12 | Sharp Kabushiki Kaisha | Organic electroluminescent panel and production method thereof, and color filter substrate and production method thereof |
JP2008149498A (en) | 2006-12-14 | 2008-07-03 | Fukuoka Technoken Kogyo:Kk | Image forming method |
JP5994782B2 (en) * | 2011-08-30 | 2016-09-21 | 旭硝子株式会社 | Negative photosensitive resin composition, partition, black matrix and optical element |
JP6743879B2 (en) * | 2016-03-02 | 2020-08-19 | Hdマイクロシステムズ株式会社 | Photosensitive resin composition, pattern forming method and circuit forming substrate using the same |
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JP2016065942A (en) * | 2014-09-24 | 2016-04-28 | 太陽インキ製造株式会社 | Curable composition, dry film, cured product, printed wiring board, and method for manufacturing printed wiring board |
CN107643654A (en) * | 2016-07-22 | 2018-01-30 | 东京应化工业株式会社 | Photosensitive polymer combination, cured film, the manufacture method of colour filter and cured film |
CN107974101A (en) * | 2016-10-25 | 2018-05-01 | 东京应化工业株式会社 | Colorant dispersion, photosensitive polymer combination and its manufacture method, solidfied material, organic EL element and pattern formation method |
Cited By (2)
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WO2023283915A1 (en) * | 2021-07-16 | 2023-01-19 | Showa Denko Materials Co., Ltd. | Photosensitive composition, photosensitive element, and method of producing wiring board |
WO2023284643A1 (en) * | 2021-07-16 | 2023-01-19 | Showa Denko Materials Co., Ltd. | Photosensitive composition, photosensitive element, and method of producing wiring board |
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KR20200117894A (en) | 2020-10-14 |
JP7297499B2 (en) | 2023-06-26 |
JP2020170120A (en) | 2020-10-15 |
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