CN111785665A - a mounting head - Google Patents

Abstract

The invention discloses a mounting head, comprising a base and a plurality of springs, the base is provided with a main shaft that can be lifted and lowered, the end of the main shaft is provided with a suction nozzle, and the spring is connected to the base and the main shaft , the expansion and contraction direction of the spring is the same as the axis direction of the main shaft. A liftable spindle is set on the base of the placement head. The spindle and the base are connected by a spring. The expansion and contraction direction of the spring is the same as the axial direction of the spindle. The end of the spindle is provided with a suction nozzle. The pressure of the spindle is the gravity of the spindle. As the placement head moves down, the spring is gradually tensioned, and the pressure of the suction nozzle on the chip gradually increases. The mounting accuracy of the chip, and at the same time prevent the chip from being damaged due to excessive pressure on the chip by the spindle and the suction nozzle.

Description

a mounting head

technical field

The present invention relates to the technical field of semiconductor packaging, in particular to a mounting head.

Background technique

With the miniaturization and integration of semiconductor circuits, higher requirements are placed on high-density three-dimensional mounting technology. Existing multi-function assembly systems are generally used to automatically mount bare chips on substrates. For example, VCSEL chips are mounted on ceramic multilayer substrates according to the pressure that the chips can withstand, and thin and brittle chips such as GaAs, SiC, and GaN are mounted. The precise control of the mounting pressure during chip mounting is particularly important. Improper mounting pressure will cause damage such as chip cracks and edge chipping. Therefore, precise control of the pressure during the pick-up and placement process of bare chips is to achieve high quality VCSEL chips. , the key to high-precision placement. Therefore, there is a need for a placement head to achieve precise pressure control during bare chip placement.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide a high-precision placement head.

In order to solve the above technical problems, the technical solution adopted in the present invention is as follows: a mounting head includes a base and a plurality of springs, the base is provided with a main shaft that can be lifted and lowered, and the end of the main shaft is provided with a suction nozzle, so The spring is connected to the base and the main shaft, and the expansion and contraction direction of the spring is the same as the axial direction of the main shaft.

The beneficial effect of the present invention is that a liftable main shaft is arranged on the base of the placement head, the main shaft and the base are connected by a spring, the expansion and contraction direction of the spring is the same as the axial direction of the main shaft, and the end of the main shaft is provided with a suction nozzle. In the free state, the pressure of the suction nozzle on the chip is the gravity of the spindle. As the patch head moves down, the spring is gradually tightened, and then the pressure of the suction nozzle on the chip gradually increases. The precise control of the chip pressure improves the placement accuracy of the chip, and at the same time prevents the chip from being damaged due to excessive pressure on the chip by the spindle and the suction nozzle.

Description of drawings

1 is a schematic structural diagram of a placement head according to Embodiment 1 of the present invention;

2 is a front view of the placement head according to the first embodiment of the present invention;

3 is an exploded view of the placement head according to Embodiment 1 of the present invention;

FIG. 4 is a partial structural schematic diagram of the placement head according to the first embodiment of the present invention;

FIG. 5 is a schematic structural diagram of a spindle in a placement head according to Embodiment 1 of the present invention.

Label description:

1. Base; 11. Installation position; 12. Rotating shaft; 13. Third spring rod; 14. Bottom plate; 15. Contact; 2. Spring; 21. Pull-up spring; 22. Pull-down spring; 3. Spindle; 31. 32, the second spring rod; 33, the first through hole; 34, the second through hole; 35, the fixing hole; 4, the clamping wheel; 5, the clamping plate; 6, the pressure plate; 7, the mounting seat 8. Intake pipe; 81. First intake pipe; 82. Second intake pipe; 83. Air inlet.

Detailed ways

In order to describe in detail the technical content, achieved objects and effects of the present invention, the following descriptions are given with reference to the embodiments and the accompanying drawings.

The key idea of the present invention is that a liftable main shaft is arranged on the base of the placement head, the main shaft and the base are connected by a spring, and the expansion and contraction direction of the spring is the same as the axial direction of the main shaft.

Referring to FIGS. 1 to 5, a mounting head includes a base 1 and a plurality of springs 2. The base 1 is provided with a main shaft 3 that can be raised and lowered, and the end of the main shaft 3 is provided with a suction nozzle. The spring 2 is connected to the base 1 and the main shaft 3 , and the expansion and contraction direction of the spring 2 is the same as the axial direction of the main shaft 3 .

The structural principle of the present invention is briefly described as follows: a main shaft 3 that can be raised and lowered is set on the base 1 of the placement head, the main shaft 3 and the base 1 are connected by a spring 2, the expansion and contraction direction of the spring 2 is the same as the axial direction of the main shaft 3, and the There is a suction nozzle at the end. When the spindle 3 is in a free state, the pressure of the suction nozzle on the chip is the gravity of the spindle 3. As the patch head moves down, the spring 2 is gradually tightened, and then the pressure of the suction nozzle on the chip gradually increases. big.

It can be seen from the above description that the beneficial effects of the present invention are: the placement head provided by the present invention realizes the precise control of the pressure of the suction nozzle on the chip through the control of the spindle 3 by the spring 2, improves the placement accuracy of the chip, and prevents the spindle 3 and suction at the same time. Excessive pressure on the chip by the mouth causes chip damage.

Further, a plurality of clamping wheels 4 are also included, the clamping wheels 4 are rotatably arranged on the base 1 , and the plurality of clamping wheels 4 abut the main shaft 3 from different directions.

It can be seen from the above description that the direction of movement of the main shaft 3 is restricted by the clamping wheel 4, so as to prevent the displacement of the main shaft 3 in the horizontal direction during the lifting and lowering of the main shaft 3, resulting in the deflection of the suction nozzle arranged at the end of the main shaft 3. At the same time, the clamping wheel 4 and the main shaft 3 The static friction force between them is extremely small, and the clamping wheel 4 has little influence on the movement of the main shaft 3 in the vertical direction, which ensures the accuracy of the placement head.

Further, the base 1 is provided with an installation position 11 for the clamping wheel 4 to be installed, and the installation position 11 is provided with a rotating shaft 12 matched with the clamping wheel 4 .

Further, it further includes a clamping plate 5 , the clamping plate 5 respectively abuts both ends of the rotating shaft 12 , and the clamping plate 5 is connected with the base 1 .

Further, it also includes a pressure plate 6 arranged on the base 1 , the pressure plate 6 is located on the side of the main shaft 3 away from the base 1 , and a mounting seat 7 is provided on the side of the pressure plate 6 close to the main shaft 3 . , the mounting seat 7 is provided with the clamping wheel 4 .

It can be seen from the above description that the plurality of clamping wheels 4 contact the main shaft 3 from different directions to ensure that there is no horizontal displacement during the lifting of the main shaft 3, and the clamping wheels 4 can be rotatably arranged on the base 1, which further reduces the number of clamping wheels 4. Influence on the movement of the spindle 3 in the vertical direction.

Further, the main shaft 3 is provided with a first spring pull rod 31 and a second spring pull rod 32, the spring 2 includes a pull-up spring 21 and a pull-down spring 22, the first spring pull rod 31 and the pull-up spring 21 connected, the second spring pull rod 32 is connected with the pressing spring 2 .

It can be seen from the above description that the main shaft 3 is provided with a spring tie rod connected to the spring 2, and the spring tie rod is driven by the expansion and contraction of the spring 2 to drive the main shaft 3 to rise and fall in the vertical direction, so as to improve the control accuracy of the position of the main shaft 3 and realize the suction nozzle pairing. Precise control of the pressure generated by the chip.

Further, the first spring pull rod 31 and the second spring pull rod 32 are disposed in the main shaft 3 , and the main shaft 3 is provided with a first through hole 33 for the pull-up spring 21 to extend into and a The second through hole 34 protruding from the second spring pull rod 32 .

It can be seen from the above description that the spring pull rod is arranged in the main shaft 3, which reduces the overall volume of the labeling head and facilitates the installation of the labeling head on the machine tool. In turn, the pressure generated by the suction nozzle on the chip is reduced.

Further, the base 1 is provided with a third spring pull rod 13 connected to the pull-up spring 21 .

It can be seen from the above description that a third spring pull rod 13 is provided on the base 1 , and the third spring pull rod 13 is connected to the pull-up spring 21 to achieve precise control of the pull-up spring 21 , thereby improving the control accuracy of the main shaft 3 .

Further, the main shaft 3 is also provided with a fixing hole 35 for installing the suction nozzle and an air inlet pipe 8 communicating with the fixing hole 35. The air pipe 82, the end of the first air intake pipe 81 away from the second air intake pipe 82 extends into the main shaft 3, and the end of the second air intake pipe 82 away from the first air intake pipe 81 is provided with an air inlet 83.

It can be seen from the above description that the suction nozzle is connected to the fixing hole 35 at the end of the main shaft 3, the fixing hole 35 is connected to the air inlet pipe 8, and the air inlet pipe 8 is connected to the pneumatic device on the machine tool equipment, so that the suction nozzle can adsorb the chip, and the air inlet pipe is connected. 8 includes a first intake pipe 81 and a second intake pipe 82, the first intake pipe 81 extends into the main shaft 3, the second intake pipe 82 and the first intake pipe 81 are at a certain angle, and the end of the second intake pipe 82 is set. There is an air inlet 83, which is convenient for connecting the air inlet pipe 8 with the pneumatic device.

Further, the base 1 further includes a bottom plate 14 on which a contact 15 is disposed, and the contact 15 faces a side away from the base 1 .

It can be seen from the above description that the contact 15 facing the side away from the base 1 is arranged on the bottom plate 14 of the base 1. When the placement head descends to a certain position, the contact 15 is in contact with the object at the bottom of the placement head, so that the placement The head stops descending to avoid the placement head colliding with other objects during operation.

Example 1

Referring to FIGS. 1 to 5 , a first embodiment of the present invention is: a mounting head, comprising a base 1 , the base 1 is provided with a main shaft 3 that can be lifted and lowered, and the base 1 is provided with a connection to the main shaft The spring 2 of 3 and the clamping wheel 4 against the spindle 3. The lower end of the spindle 3 is provided with a suction nozzle. When the spindle 3 is in a free state, the pressure generated by the suction nozzle on the chip is the same as that of the spindle. The gravitational force received by 3 is equal. When the placement head moves downward, the spindle 3 moves downward, the suction nozzle collides with the chip, and the pressure generated by the suction nozzle on the chip gradually increases. The spring 2 is gradually tensioned, so as to achieve the effect of accurately controlling the pressure of the suction nozzle on the chip, and at the same time prevent the chip from being cracked or chipped due to the excessive pressure of the suction nozzle on the chip.

Further, the base 1 is provided with a plurality of air passages for connecting with the machine tool, so that the placement head is connected with the pneumatic device on the machine tool, and the placement head is driven by the pneumatic device arranged on the machine tool. The main shaft 3 on the upper part rises and falls to realize the automatic control of the suction nozzle.

As shown in FIG. 1 and FIG. 2 , in this embodiment, the number of the gripping wheels 4 is five, and the five gripping wheels 4 interfere with the main shaft 3 from different directions, and four of the gripping wheels 4 The clamping wheel 4 is arranged on the base 1, and the base 1 is provided with an installation position 11 for the clamping wheel 4 to be installed. Set on the rotating shaft 12 so that the clamping wheel 4 can be rotated in the installation position 11, the base 1 is also provided with a clamping plate 5 connected to the base 1, and the clamping plate 5 is provided with a clamping plate 5. There is a notch for avoiding the clamping wheel 4 , and both ends of the notch abut against the rotating shaft 12 to restrict the clamping wheel 4 in the installation position 11 . The base 1 is also provided with a pressure plate 6, the pressure plate 6 is located on the side of the main shaft 3 away from the base 1, and a mounting seat 7 is provided on the side of the pressure plate 6 close to the main shaft 3. A said clamping wheel 4 is arranged in the seat 7 . The five clamping wheels 4 abut against the main shaft 3 to limit the displacement of the main shaft 3 in the horizontal direction, so as to ensure that the suction nozzle will not be displaced when the main shaft 3 is raised and lowered in the vertical direction. The precision of the placement head adsorption and placement of chips, and the static friction between the spindle 3 and the clamping wheel 4 is extremely small, so as to reduce the influence of the clamping wheel 4 on the lifting motion of the spindle 3, The position of the main shaft 3 when it is raised and lowered can be precisely controlled to ensure the control accuracy of the placement head.

Further, the bottom of the base 1 is provided with a bottom plate 14 , and the bottom plate 14 is provided with holes for installing the contacts 15 . When the head descends to a certain position, the contact 15 touches the object located at the bottom of the placement head to stop the descending of the placement head, so as to avoid the drop of the placement head being too large and the suction nozzle to the chip If the pressure is too large or the base 1 collides with other objects, the placement head moves within a range that ensures the safety of the equipment. Preferably, an insulating sleeve wrapping the contacts 15 is arranged in the holes, so that the contacts 15 are stably arranged in the holes and at the same time reduce the impact when the contacts 15 are in contact with other objects.

As shown in FIGS. 3 and 4 , the spring 2 includes a pull-up spring 21 and a pull-down spring 22 . The pull-up spring 21 connects the upper end of the main shaft 3 in the vertical direction with the base 1 , and the pull-down spring 22 Connect the lower end of the main shaft 3 in the vertical direction with the base 1 , the main shaft 3 is provided with a first spring pull rod 31 connected with the upper pull spring 21 and a second spring pull rod connected with the pull down spring 22 32. Optionally, the base 1 is further provided with a third spring pull rod 13 connected to the pull-up spring 21 , and the third spring pull rod 13 is screwed to the base 1 .

Further, the first spring pull rod 31 and the second spring pull rod 32 are arranged in the main shaft 3, and the main shaft 3 is provided with a first through hole 33 and a second through hole 34 that communicate with each other. A spring pull rod 31 is disposed in the first through hole 33 and the pull-up spring 21 extends into the first through hole 33 and is connected to the first spring pull rod 31 , and the second spring pull rod 32 is disposed at Inside the second through hole 34 and the head of the second spring pull rod 32 extends out of the second spring pull rod 32 and is connected to the pull-down spring 22 . The main shaft 3 is set to be hollow to reduce the overall weight of the main shaft 3 and reduce the pressure of the main shaft 3 on the chip in a free state. At the same time, the first pull rod and the second pull rod are arranged on the main shaft 3 In this case, the overall volume of the placement head is reduced, which facilitates the placement of the placement head on a machine tool with a relatively narrow moving space, and improves the versatility of the placement head.

Preferably, the first spring pull rod 31 is arranged on the axis of the main shaft 3 , and then the upper spring 21 and the axis of the main shaft 3 coincide, and the second spring pull rod 32 and the first spring pull rod 31 is vertical and connected, the pull-down spring 22 is parallel to the axis of the main shaft 3, so as to prevent the pull-up spring 21 and the pull-down spring 22 from extending and retracting to drive the main shaft 3 to lift and lower the main shaft 3 in the horizontal direction The shaking further improves the stability of the spindle 3 when it moves, so that the suction nozzle disposed at the end of the spindle 3 can be more accurately adsorbed to the target chip.

Please refer to FIG. 5 , one end of the spindle 3 close to the chip is provided with a fixing hole 35 for installing the suction nozzle and an air intake pipe 8 communicating with the fixing hole 35 , and the air intake pipe 8 includes a first air intake pipe 81 that communicates with each other. and the second intake pipe 82, the first intake pipe 81 is arranged in the main shaft 3, the main shaft 3 is provided with a hole for the installation of the first intake pipe 81, the second intake pipe 82 One end away from the first intake pipe 81 is provided with an intake hole for connecting the pneumatic device. Preferably, the first intake pipe 81 and the second intake pipe 82 are arranged at a certain angle to facilitate the connection between the pneumatic device and the intake pipe 8. .

To sum up, the mounting pressure provided by the present invention on the chip is small, the pressure generated by the suction nozzle on the chip can be precisely controlled, the chip is prevented from being cracked or chipped by the suction nozzle during the process of picking up and mounting the chip, and the chip is improved. The placement precision and chip placement quality, the overall installation of the placement head is convenient, and it is easy to connect with the machine tool.

The above descriptions are only examples of the present invention, and are not intended to limit the scope of the present invention. Any equivalent transformations made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in related technical fields, are similarly included in the within the scope of patent protection of the present invention.

Claims (10)

1. A mounting head, characterized in that: the lifting type spindle comprises a base and a plurality of springs, wherein a lifting spindle is arranged on the base, a suction nozzle is arranged at the end part of the spindle, the springs are connected with the base and the spindle, and the extension direction of the springs is the same as the axis direction of the spindle.

2. The head according to claim 1, wherein: still include a plurality of centre gripping wheels, the centre gripping wheel rotates to be set up on the base, and is a plurality of the centre gripping wheel is contradicted from different directions the main shaft.

3. The head according to claim 2, wherein: the base is provided with an installation position for installing the clamping wheel, and a rotating shaft matched with the clamping wheel is arranged in the installation position.

4. The head according to claim 3, wherein: the clamping plates are respectively abutted against two ends of the rotating shaft and are connected with the base.

5. The head according to claim 2, wherein: the clamping device is characterized by further comprising a pressing plate arranged on the base, the pressing plate is located on one side, away from the base, of the main shaft, a mounting seat is arranged on one side, close to the main shaft, of the pressing plate, and the clamping wheel is arranged on the mounting seat.

6. The head according to claim 1, wherein: the spindle is provided with a first spring pull rod and a second spring pull rod, the springs comprise an upward pull spring and a downward pull spring, the first spring pull rod is connected with the upward pull spring, and the second spring pull rod is connected with the downward pressing spring.

7. The head according to claim 6, wherein: the first spring pull rod and the second spring pull rod are arranged in the main shaft, and a first through hole for the upper pull spring to stretch into and a second through hole for the second spring pull rod to stretch out are formed in the main shaft.

8. The head according to claim 6, wherein: and a third spring pull rod connected with the pull-up spring is arranged on the base.

9. The head according to claim 1, wherein: the main shaft is further provided with a fixing hole for installing the suction nozzle and an air inlet pipe communicated with the fixing hole, the air inlet pipe comprises a first air inlet pipe and a second air inlet pipe which are communicated, the first air inlet pipe is far away from one end of the second air inlet pipe and extends into the main shaft, and the second air inlet pipe is far away from one end of the first air inlet pipe and is provided with an air inlet.

10. The head according to claim 1, wherein: the base further comprises a bottom plate, a contact is arranged on the bottom plate, and the contact faces to one side far away from the base.

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