CN111762750A - Micro device integrating mechanical energy collection and vibration detection functions and preparation method thereof - Google Patents

Abstract

The invention discloses a micro device integrating mechanical energy collection and vibration detection functions, which comprises: the substrate layer is provided with a crack structure, the crack structure penetrates through the substrate layer along the thickness direction of the substrate layer, and the crack structure is provided with a closed tip part; the vibration detection structure is arranged on the substrate layer and partially covers the crack structure, and is used for detecting a vibration signal; and the electromechanical conversion structure is embedded in the basal layer on one side of the tip part of the crack structure and can collect and convert mechanical energy into electric energy. The invention also discloses a method for integrating the micro device with the functions of mechanical energy collection and vibration detection. The invention has the advantages that the crack structure is arranged, so that the high-efficiency collection of mechanical energy can be realized, and the high-precision detection of weak vibration signals can also be realized.

Description

Micro device integrating mechanical energy collection and vibration detection functions and preparation method thereof

technical field

The invention belongs to the technical field of micro-intelligent electronics, and in particular relates to a micro-device integrating mechanical energy collection and vibration detection functions and a preparation method thereof.

Background technique

Micro-devices integrating high-precision detection of vibration signals and efficient capture of mechanical energy are the key to improving the overall perception and endurance of micro-intelligent electronic equipment. The existing design principles and preparation methods are difficult to achieve.

Therefore, in view of the above technical problems, it is necessary to provide a micro-device integrating mechanical energy collection and vibration detection functions and a preparation method thereof.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a micro-device integrating mechanical energy collection and vibration detection functions and a preparation method thereof, aiming to solve the problem that existing intelligent electronic equipment cannot realize high-precision detection of vibration signals and efficient collection of mechanical energy while taking into account the micro-scale .

In order to achieve the above purpose, the technical solution provided by an embodiment of the present invention is as follows:

In one embodiment, a micro-device integrating mechanical energy collection and vibration detection functions is provided, including:

a base layer, on which a crack structure is opened, the crack structure penetrates the base layer along the thickness direction of the base layer, and the crack structure has a closed tip;

a vibration detection structure, disposed on the base layer and partially covering the crack structure, the vibration detection structure is used to detect vibration signals;

The electromechanical conversion structure is embedded in the base layer on one side of the tip of the crack structure, and the electromechanical conversion structure can collect and convert mechanical energy into electrical energy.

As a further improvement of the present invention, the vibration detection structure includes a flexible film base layer attached to the base layer, a conductive layer disposed on the flexible film base layer, and a signal exporting signal disposed on the conductive layer electrode.

As a further improvement of the present invention, the electromechanical conversion structure includes a first conductive film, a transducer material layer and a second conductive film in order from near to far from the tip portion, wherein the first conductive film and the second conductive film The electric energy lead-out electrodes are respectively arranged on them.

In the above technical solution, the electromechanical conversion structure is provided on the base layer on one side of the tip portion of the crack structure, so that the electromechanical conversion structure is located in the stress field of the tip portion of the crack structure, when the external stimulus containing mechanical energy When acting on the micro-device, the energy concentration effect at the tip of the crack structure will make the mechanical energy efficiently gather into the stress field at the tip and convert it into electrical energy through the electromechanical conversion structure and transmit it to subsequent circuits or storage devices; the vibration detection structure is located in the The base layer covers and partially covers the crack structure. When a vibration signal acts on the base layer, the flexible film base layer will bend and deform as the width of the crack structure changes, thereby triggering the conductive layer to detect the signal.

As a further improvement of the present invention, the crack width of the crack structure is 5-50 μm.

As a further improvement of the present invention, the crack structure is formed by concave inward from one side of the base layer, and has an opening portion opposite to the tip portion.

As a further improvement of the present invention, the vibration detection structure covers the opening portion.

As a further improvement of the present invention, a nanoscale crack microstructure is formed on the conductive layer of the flexible film base layer.

As a further improvement of the present invention, the nano-scale crack microstructure can be prepared and formed by mechanical bending, organic solvent-induced expansion or light-induced expansion.

As a further improvement of the present invention, the electromechanical conversion structure is arranged in an arc shape, and the inner arc surface thereof is arranged opposite to the tip portion.

As a further improvement of the present invention, the conductive layer in the vibration detection structure is disposed on the flexible film base layer by means of deposition, evaporation, sputtering or brushing.

As a further improvement of the present invention, the first conductive film and the second conductive film in the electromechanical conversion structure are disposed on the transducer material layer by means of deposition, evaporation, sputtering or brushing.

As a further improvement of the present invention, the conductive material in the conductive layer, the first conductive film and the second conductive film may be one of gold, silver, copper, platinum, and graphite.

As a further improvement of the present invention, the transducer material of the transducer material layer may be one of piezoelectric ceramics, piezoelectric films, and composite piezoelectric materials;

As a further improvement of the present invention, the flexible film base layer may be one of polyimide, polyethylene, and vinyl chloride.

An embodiment of the present application also provides a preparation method for preparing the above-mentioned micro-device integrating mechanical energy collection and vibration detection functions, including the following steps:

Place the arc-shaped metal strip at one end in the liquid solidified material;

After the cured material reaches a semi-cured state, the electromechanical conversion structure is placed in the cured material at the arc-shaped end of the metal strip at a certain distance from the arc-shaped end of the metal strip;

The metal strip is removed by the corrosive liquid to form a crack structure;

The vibration detection structure is laid on the end of the crack structure away from the arc-shaped end, and the cured material is further cured.

As a further improvement of the present invention, the base layer is cured by a curing material selected from epoxy resin, silica gel, polyurethane, polydimethylsiloxane and photoresist.

As a further improvement of the present invention, the solution used for corrosion removal of metal strips can be one of ferric chloride solution, hydrochloric acid solution, and sulfuric acid solution.

Compared with the prior art, the advantages of the present invention are:

Since the electromechanical conversion structure is located in the stress field at the tip of the crack structure, the scattered mechanical energy can be efficiently collected and converted into electrical energy based on the energy concentration effect at the crack tip, thereby improving the efficiency of mechanical energy collection. Since the flexible film base layer is attached to the crack tail, the deformation phenomenon of the crack tail can be used to make the flexible film base layer bend and deform, so that the resistance of the conductive layer on the flexible film base layer changes, and high-precision detection of weak vibration signals can be realized. To sum up, opening a crack structure on the base layer and arranging an electromechanical conversion structure and an electromechanical conversion structure can not only achieve efficient collection of mechanical energy, but also achieve high-precision detection of weak vibration signals.

Description of drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in this application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

1 is a top-down effect view of a micro-device integrating mechanical energy collection and vibration detection functions in an embodiment of the present application;

2 is a partial front view of a micro device integrating mechanical energy collection and vibration detection functions in an embodiment of the present application;

FIG. 3 is a schematic diagram of the details of the vibration detection structure in one embodiment;

FIG. 4 is a schematic diagram of the details of the electromechanical conversion structure in one embodiment;

FIG. 5 is a schematic diagram illustrating the data description of the metal strip and the crack structure and the base layer in one embodiment.

Detailed ways

The present invention will be described in detail below with reference to the various embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and the structural, method, or functional transformations made by those of ordinary skill in the art based on these embodiments are all included in the protection scope of the present invention.

Referring to FIG. 1 and FIG. 2, an embodiment of the present application provides a micro-device integrating mechanical energy collection and vibration detection functions, including a base layer 1, a crack structure 2, a vibration detection structure 3 and an electromechanical conversion structure 4; wherein, The crack structure 2 is opened on the base layer 1 and is arranged through the base layer 1 along the thickness direction. The crack structure 2 has a closed tip portion 21. The vibration detection structure 3 covers the crack structure 2 and is arranged away from the tip portion 21. Electromechanical conversion The structure 4 is embedded in the base layer 1 and has a certain distance from the tip portion 21 of the crack structure 2 .

The base layer 1 is formed by curing a curing material, and the curing material may be one of epoxy resin, silica gel, polyurethane, polydimethylsiloxane, and photoresist, and in this embodiment, epoxy resin is preferred.

The formation of the crack structure 2 can be obtained by adding metal strips to the solidified material, and by removing the metal strips fixed in the solidified material by corrosion, wherein the solution used for the corrosion and removal of the metal strips can be ferric chloride solution, hydrochloric acid. One of the solution and sulfuric acid solution. The crack structure 2 is formed concavely inward from one side of the base layer 1, and it has an open part (covered by the vibration detection structure 3 in FIG. 1) opposite to the tip part 21, and the vibration detection structure 3 covers the open part, and the crack The crack width of the structure is 5 to 50 μm.

Referring to FIG. 3, the vibration detection structure 3 is composed of a flexible film base layer 33, a conductive layer 32, and a signal lead-out electrode 31. The flexible film base layer 33 is provided on the base layer 1, and the conductive layer 32 is deposited, evaporated, and sputtered. Or the method of brushing is provided on the flexible film base layer 33 , and the signal lead-out electrode 31 is provided on the conductive layer 32 . The flexible film base layer 33 may be one of polyimide, polyethylene, and vinyl chloride. The conductive material of the conductive layer 32 can be one of gold, silver, copper, platinum, and graphite, and the conductive layer 32 is provided with a nanoscale crack microstructure, which can be mechanically bent, organic solvent-induced expansion or Light-induced expansion and other methods to prepare and form.

Referring to FIG. 4 , the electromechanical conversion structure 4 is arranged in an arc shape, and its inner arc surface is arranged opposite to the tip portion 21 . The electromechanical conversion structure 4 includes a first conductive film 41 , a transducing material layer 42 and a second conductive film 43 in order from near to far from the tip portion 21 , wherein the first conductive film 41 and the second conductive film 43 are respectively provided with an electrical energy outlet. electrode 44 . The first conductive film 41 and the second conductive film 43 are disposed on the transducer material layer 42 by means of deposition, evaporation, sputtering or brushing, and the conductive materials in the first conductive film 41 and the second conductive film 43 can be One of gold, silver, copper, platinum, and graphite. The transducer material of the transducer material layer 42 may be one of piezoelectric ceramics, piezoelectric thin films, and composite piezoelectric materials.

The working principle of the micro-device of the present invention can be summarized as follows: when the vibration signal is detected, the vibration signal acts on the base layer 1, so that the width of the crack structure 2 changes, and the flexible film base layer 33 in the vibration detection structure 3 is induced. The change occurs, so that the resistance in the conductive layer 32 on the flexible film base layer 33 changes, and the output of the resistance signal is further realized through the signal derivation electrode 31, so as to achieve the function of vibration signal detection; when the energy is collected, the external excitation acts on On the base layer 1, due to the energy concentration effect at the tip of the crack structure 2, the mechanical energy is efficiently concentrated at the tip and converted into electrical energy by the transducer material layer 42 in the electromechanical conversion structure 4, and passes through the first conductive film 41, the second conductive film 41, the second conductive film The membrane 43 and the electrical energy discharge electrodes 44 are transported to subsequent processing modules.

The invention also discloses a preparation method of a micro-device integrating mechanical energy collection and vibration detection functions, comprising the following steps:

Step S1, placing the metal strip with one end in an arc shape in a petri dish containing a liquid solidified material for moderate solidification;

Step S2, place the pre-fabricated circular arc-shaped electromechanical conversion structure at the end point of the arc-shaped end of the metal strip, the inner arc surface of which is facing the arc-shaped end of the metal strip, and convert the electromechanical conversion structure through the semi-solidified substance in the petri dish. at a distance from the endpoint of the arcuate end of the metal strip;

Step S3, removing the metal strip through an etching solution to form a base layer with a cracked structure;

Step S4, laying the pre-fabricated flexible vibration detection structure on the base layer of the open portion of the crack structure, with the side provided with the signal exporting electrode facing outward, and further curing the base layer;

Step S5 , cutting the prepared sample to finally obtain a micro-device integrating the functions of mechanical energy collection and vibration detection.

In a preferred embodiment of the present invention, the width D of the metal strip should be consistent with the width d of the crack structure, its length should be consistent with the length of the crack structure, and the end of the metal strip should be arc-shaped to facilitate the formation of the tip of the crack structure The thickness L of the metal strip should be greater than the thickness l of the base layer (the thickness of the crack structure), as shown in FIG. 5 .

In this embodiment, the length of the crack structure is 1000 μm, then the length of the metal strip is 1000 μm; the width d of the crack structure is 100 μm, the width D of the metal strip is 100 μm; the thickness l of the base layer formed by the cured material is 100 μm, then the The thickness L should be set between 100 μm and 1000 μm, preferably, set at 500 μm.

Metal strips can also be made of other common materials, such as aluminum, iron, copper, stainless steel or various alloys, as long as they are easy to remove by corrosion.

For the curing material mentioned in step S1 as the base layer, common epoxy resin materials can be used, and easily curable materials such as silica gel, polyurethane, polydimethylsiloxane, and photoresist can also be used.

In a preferred embodiment of the present invention, an epoxy resin material is used as an example for illustration. When an epoxy resin material is used, it can be heated at 30°C-50°C for 1-5 hours, so that the epoxy resin becomes semi-cured state. It should be noted that, in order to enable the vibration detection structure to better adhere to the opening of the crack structure, and to enable the electromechanical conversion structure to be further cured with the epoxy resin, the epoxy resin material is not required in this step of the test. completely melted.

It will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, but that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments are to be regarded in all respects as illustrative and not restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, which are therefore intended to fall within the scope of the appended claims. All changes within the meaning and range of the equivalents of , are included in the present invention. Any reference signs in the claims shall not be construed as limiting the involved claim.

In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims (10)

1. a micro-device integrating mechanical energy collection and vibration detection function, is characterized in that, comprising: a base layer, on which a crack structure is opened, the crack structure penetrates the base layer along the thickness direction of the base layer, and the crack structure has a closed tip; a vibration detection structure, disposed on the base layer and partially covering the crack structure, the vibration detection structure is used to detect vibration signals; The electromechanical conversion structure is embedded in the base layer on one side of the tip of the crack structure, and the electromechanical conversion structure can collect and convert mechanical energy into electrical energy. 2 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 1 , wherein the crack structure is formed by concave inward from one side of the base layer, and the crack structure is disposed opposite to the tip portion. 3 . the opening part, the vibration detection structure covers the opening part. 3 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 1 , wherein the vibration detection structure comprises a flexible film base layer attached to the base layer, which is arranged on the flexible film. 4 . A conductive layer on the base layer and a signal lead-out electrode provided on the conductive layer. 4 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 3 , wherein a nanoscale crack microstructure is formed on the conductive layer of the flexible film base layer. 5 . 5 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 3 , wherein the flexible film base layer can be one of polyimide, polyethylene, and vinyl chloride. 6 . 6 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 1 , wherein the electromechanical conversion structure comprises a first conductive film, a transducing material layer and a The second conductive film, wherein the first conductive film and the second conductive film are respectively provided with electric energy lead-out electrodes. 7 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 6 , wherein the transducing material layer is one of piezoelectric ceramics, piezoelectric thin films, and composite piezoelectric materials. 8 . 8 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 1 , wherein the electromechanical conversion structure is arranged in an arc shape, and its inner arc surface is opposite to the tip portion. 9 . 9 . The micro-device integrating mechanical energy collection and vibration detection functions according to claim 1 , wherein the base layer is formed by curing a curing material, and the curing material is epoxy resin, silica gel, polyurethane, polydiene One of methyl siloxane and photoresist. 10. A method for preparing a micro-device integrating mechanical energy collection and vibration detection functions according to any one of the above claims 1 to 9, characterized in that, comprising the following steps: Place the arc-shaped metal strip at one end in the liquid solidified material; After the cured material reaches a semi-cured state, the electromechanical conversion structure is placed in the cured material at the arc-shaped end of the metal strip at a certain distance from the arc-shaped end of the metal strip; The metal strip is removed by the corrosive liquid to form a crack structure; The vibration detection structure is laid on the end of the crack structure away from the arc-shaped end, and the cured material is further cured.

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