CN111735993A

CN111735993A - Triaxial probe clamp for wafer

Info

Publication number: CN111735993A
Application number: CN202010846685.7A
Authority: CN
Inventors: 刘世文; 陈亮
Original assignee: Shenzhen Senmei Xieer Technology Co ltd
Current assignee: Shenzhen Senmei Xieer Technology Co ltd
Priority date: 2020-08-21
Filing date: 2020-08-21
Publication date: 2020-10-02

Abstract

The invention relates to the technical field of triaxial probe clamps, in particular to a triaxial probe clamp for a wafer, which comprises a connecting fixing block and an extension rod, wherein the first end of the extension rod is fixedly connected with the connecting fixing block, the second end of the extension rod is fixedly provided with a triaxial line, a signal line rod and a probe, the first end of the signal line rod is fixedly connected with the triaxial line, the second end of the signal line rod is fixedly connected with the probe, the signal line rod is clamped at the second end of the extension rod through a clamping device, and an anti-creeping device is sleeved on the outer layer of the triaxial line. By adopting the structure, the first end of the signal wire rod is fixedly connected with the three axes, the second end of the signal wire rod is fixedly connected with the probe, the signal wire rod is clamped at the second end of the extension rod through the clamping device, and the outer layer of the three axes is sleeved with the anti-creeping device. The three-axis probe clamp can be well used for point probe operation of a probe station, can replace other three-axis probe clamps, and is suitable for being used on semiconductor testing equipment.

Description

Triaxial probe clamp for wafer

Technical Field

The invention relates to the technical field of triaxial probe clamps, in particular to a triaxial probe clamp for a wafer.

Background

The existing triaxial probe clamp has poor electric leakage precision, and some probe clamps have the situation that the clamping probe is not tight, so that the probe rotates or slides easily when the point is pointed.

Therefore, there is a need for a three-axis probe fixture that solves the above problems.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides a triaxial probe clamp for a wafer, which can be well used for the point needle operation of a probe station, can replace other triaxial probe clamps and is suitable for being used on semiconductor test equipment.

In order to achieve the purpose, the technical scheme applied by the invention is as follows:

the utility model provides a triaxial probe anchor clamps for wafer, is including connecting fixed block and extension bar, extension bar first end with be connected fixed block fixed connection, extension bar second end is fixed with triaxial, signal line pole and probe, signal line pole first end and triaxial fixed connection, signal line pole second end and probe fixed connection, the signal line pole passes through clamping device and presss from both sides tightly in extension bar second end, the outer cover of triaxial is equipped with anticreeper.

According to the scheme, the second end of the extension rod is provided with an opening, the clamping device comprises a locking sleeve and a tensioning block, the first end of the tensioning block is arranged in the opening, the second end of the tensioning block is exposed out of the opening, the signal wire rod penetrates through the tensioning block to be fixedly connected with the three axes, and the locking sleeve is fixed at the end part of the second end of the extension rod and locks the tensioning block.

According to the scheme, the outer wall of the end part of the second end of the extension rod is provided with an external thread, and the inner wall of the locking sleeve is provided with an internal thread which is matched with the external thread and is in threaded connection.

According to the scheme, the outer wall of the tensioning block is attached to the inner wall of the opening of the second end of the extension rod, and the tensioning block is provided with a through hole through which the signal wire rod can pass conveniently.

According to the above scheme, anticreep device includes copper pipe, No. two copper pipes, a teflon pipe, No. two teflon pipes and No. three teflon pipes, and No. two copper pipe casings are outside in the triaxial, and a teflon pipe casing is outside in No. two copper pipes, and No. two teflon pipe casings are outside in a teflon pipe, and No. three teflon pipe casings are outside in No. two teflon pipes, and a copper pipe casing is outside in No. three teflon pipes to with the shielding layer welding that is equipped with on the triaxial.

According to the scheme, the first end of the signal wire rod is fixedly welded with the signal wire of the three-axis, and the second end of the signal wire rod is fixedly connected with the probe through the screw.

According to the scheme, the signal line rod is provided with a through hole corresponding to the probe and a screw hole corresponding to the screw, and the screw hole is perpendicular to the through hole.

The invention has the beneficial effects that:

according to the invention, the structure is adopted, the first end of the signal wire rod is fixedly connected with the three axes, the second end of the signal wire rod is fixedly connected with the probe, the signal wire rod is clamped at the second end of the extension rod through the clamping device, and the outer layer of the three axes is sleeved with the anti-creeping device. The three-axis probe clamp can be well used for point probe operation of a probe station, can replace other three-axis probe clamps, and is suitable for being used on semiconductor testing equipment.

Drawings

FIG. 1 is an exploded view of the overall structure of the present invention;

FIG. 2 is a cross-sectional view of the overall construction of the present invention;

FIG. 3 is an enlarged view of the location A in FIG. 2;

FIG. 4 is an assembly view of the clamping assembly of the present invention;

FIG. 5 is a view of a first copper tube welded to a triaxial wire shield according to the present invention;

fig. 6 is a structural view of a signal wire pole of the present invention.

1. Connecting a fixed block; 2. an extension bar; 20. an opening; 21. an external thread; 3. three axes; 30. a signal line; 31. a shielding layer; 4. a first copper tube; 5. a second copper pipe; 6. a signal wire rod; 60. a through hole; 61. a screw hole; 7. a screw; 8. a probe; 9. a locking sleeve; 10. a tensioning block; 100. perforating; 11. a first Teflon tube; 12. a second Teflon tube; 13. a third Teflon tube.

Detailed Description

The technical solution of the present invention is described below with reference to the accompanying drawings and examples.

As shown in fig. 1 to 6, the triaxial probe clamp for a wafer according to the present invention includes a connection fixing block 1 and an extension bar 2, a first end of the extension bar 2 is fixedly connected to the connection fixing block 1, a second end of the extension bar 2 is fixed with a triaxial line 3, a signal line bar 6 and a probe 8, a first end of the signal line bar 6 is fixedly connected to the triaxial line 3, a second end of the signal line bar 6 is fixedly connected to the probe 8, the signal line bar 6 is clamped to the second end of the extension bar 2 by a clamping device, and an anti-creeping device is sleeved on an outer layer of the triaxial line 3. The above constitutes the basic structure of the present invention.

According to the invention, the structure is adopted, the first end of the signal wire rod 6 is fixedly connected with the three-axis 3, the second end of the signal wire rod 6 is fixedly connected with the probe 8, the signal wire rod 6 is clamped at the second end of the extension rod 2 through the clamping device, and the outer layer of the three-axis 3 is sleeved with the anti-creeping device. The three-axis probe clamp can be well used for point probe operation of a probe station, can replace other three-axis probe clamps, and is suitable for being used on semiconductor testing equipment.

In this embodiment, the second end of the extension bar 2 is provided with an opening 20, the clamping device includes a locking sleeve 9 and a tensioning block 10, the first end of the tensioning block 10 is disposed in the opening 20, the second end of the tensioning block 10 is exposed out of the opening 20, the signal line rod 6 passes through the tensioning block 10 and is fixedly connected with the three axis line 3, and the locking sleeve 9 is fixed to the end of the second end of the extension bar 2 and locks the tensioning block 10. With the adoption of the structure, the signal wire rod 6 is tensioned at the opening 20 of the second end of the extension bar 2 through the tensioning block 10, and then the tensioning block 10 is locked and fixed through the locking sleeve 9, so that the signal wire rod 6 and the fixedly connected probe 8 are clamped and fixed at the second end of the extension bar 2.

In this embodiment, the outer wall of the end portion of the second end of the extension rod 2 is provided with an external thread 21, and the inner wall of the locking sleeve 9 is provided with an internal thread which is in threaded connection with the external thread 21. By adopting the structure, the locking sleeve 9 is spirally connected with the second end of the extension rod 2, and the assembly and the disassembly are very convenient.

In this embodiment, the outer wall of the tensioning block 10 abuts against the inner wall of the opening 20 at the second end of the extension bar 2, and the tensioning block 10 is provided with a through hole 100 for the signal wire rod 6 to pass through. With this arrangement, the signal wire rod 6 can pass through the tension block 10 conveniently through the through hole 100, so that when the locking sleeve 9 locks and fastens the tension block 10, the signal wire rod 6 is clamped and fixed.

In this embodiment, anticreep device includes copper pipe 4, No. two copper pipes 5, a teflon pipe 11, No. two teflon pipes 12 and No. three teflon pipes 13, and No. two copper pipes 5 overlap in No. 3 outsides of three-axis, No. one teflon pipe 11 overlaps in No. two copper pipe 5 outsides, and No. two teflon pipe 12 overlaps in No. one teflon pipe 11 outsides, and No. three teflon pipe 13 overlaps in No. two teflon pipe 12 outsides, and No. one copper pipe 4 overlaps in No. three teflon pipe 13 outsides to with the shielding layer 31 welding that is equipped with on the three-axis 3. By adopting the structure, the leakage precision of the three-axis probe clamp can reach below 100fA by laminating and coating the first copper pipe 4, the second copper pipe 5, the first Teflon pipe 11, the second Teflon pipe 12 and the third Teflon pipe 13 outside the three-axis wire 3, so that the three-axis probe clamp can completely meet the use requirement.

In this embodiment, a first end of the signal wire rod 6 is fixedly welded to the signal wire 30 of the triaxial cable 3, and a second end of the signal wire rod 6 is fixedly connected to the probe 8 through a screw 7. Adopt such structure setting, realize signal line pole 6 first end and triaxial line 3 fixed connection, signal line pole 6 second end and probe 8 fixed connection.

In this embodiment, the signal line rod 6 is provided with a through hole 60 corresponding to the probe 8 and a screw hole 61 corresponding to the screw 7, and the screw hole 61 is perpendicular to the through hole 60. By adopting the structure, the probe 8 is fixed in the signal wire rod 6 through the screw 7, and the assembly and the disassembly are very convenient.

While the embodiments of the present invention have been described, the present invention is not limited to the above-mentioned embodiments, which are only illustrative and not restrictive, and those skilled in the art can make various modifications without departing from the spirit and scope of the present invention as defined by the appended claims.

Claims

1. A triaxial probe clamp for a wafer is characterized in that: including connecting fixed block (1) and extension bar (2), extension bar (2) first end with be connected fixed block (1) fixed connection, extension bar (2) second end is fixed with triaxial (3), signal line pole (6) and probe (8), signal line pole (6) first end and triaxial (3) fixed connection, signal line pole (6) second end and probe (8) fixed connection, signal line pole (6) are pressed from both sides tightly in extension bar (2) second end through clamping device, the outer cover of triaxial (3) is equipped with anticreeper.

2. The tri-axial probe holder for wafers of claim 1, wherein: the utility model discloses a signal line pole, including extension bar (2), extension bar (2) second end, clamping device includes lock sleeve (9) and taut piece (10), in opening (20) were located to taut piece (10) first end, taut piece (10) second end was exposed in opening (20) and is set up, signal line pole (6) pass taut piece (10) and triaxial line (3) fixed connection, lock sleeve (9) are fixed in the tip of extension bar (2) second end to tight piece (10) locking will be drawn.

3. The tri-axial probe holder for wafers of claim 2, wherein: the outer wall of the end part of the second end of the extension rod (2) is provided with an external thread (21), and the inner wall of the locking sleeve (9) is provided with an internal thread which is in threaded connection with the external thread (21).

4. The tri-axial probe holder for wafers of claim 2, wherein: the outer wall of the tensioning block (10) is attached to the inner wall of the opening (20) at the second end of the extension rod (2), and a through hole (100) convenient for the signal wire rod (6) to penetrate through is formed in the tensioning block (10).

5. The tri-axial probe holder for wafers of claim 1, wherein: anticreep device includes copper pipe (4), No. two copper pipes (5), a teflon pipe (11), No. two teflon pipes (12) and No. three teflon pipes (13), No. two copper pipes (5) overlap in triaxial (3) outsidely, No. one teflon pipe (11) overlap in No. two copper pipes (5) outsidely, No. two teflon pipe (12) overlap in a teflon pipe (11) outsidely, No. three teflon pipe (13) overlap in No. two teflon pipe (12) outsidely, No. one copper pipe (4) overlap in No. three teflon pipe (13) outsidely to with shielding layer (31) welding that is equipped with on triaxial (3).

6. The tri-axial probe holder for wafers of claim 1, wherein: the first end of the signal wire rod (6) is fixedly welded with a signal wire (30) of the triaxial line (3), and the second end of the signal wire rod (6) is fixedly connected with the probe (8) through a screw (7).

7. The tri-axial probe holder for wafers of claim 6, wherein: the signal line pole (6) is provided with a through hole (60) corresponding to the probe (8) and a screw hole (61) corresponding to the screw (7), and the screw hole (61) is perpendicular to the through hole (60).