CN111733385A - Ti-TiN-TiSiAlN composite coating and preparation method and application thereof - Google Patents
Ti-TiN-TiSiAlN composite coating and preparation method and application thereof Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 87
- 239000011248 coating agent Substances 0.000 title claims abstract description 86
- 239000002131 composite material Substances 0.000 title claims abstract description 40
- 238000002360 preparation method Methods 0.000 title abstract description 13
- 239000011159 matrix material Substances 0.000 claims abstract description 17
- 230000007704 transition Effects 0.000 claims description 50
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical group [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 37
- 238000000151 deposition Methods 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 10
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 5
- 239000010962 carbon steel Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 claims 17
- 239000011247 coating layer Substances 0.000 claims 1
- 230000007797 corrosion Effects 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 12
- 239000002184 metal Substances 0.000 abstract description 8
- 229910052751 metal Inorganic materials 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000007935 neutral effect Effects 0.000 abstract description 4
- 239000012266 salt solution Substances 0.000 abstract description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000002585 base Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- -1 argon ions Chemical class 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 239000002114 nanocomposite Substances 0.000 description 3
- 239000010953 base metal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a Ti-TiN-TiSiAlN composite coating, a preparation method and an application thereof. The critical load Lc of the Ti-TiN-TiSiAlN coating and the matrix is more than or equal to 45N, the surface microhardness HV is more than or equal to 3200, the bonding strength can reach 49N, and the Ti-TiN-TiSiAlN coating does not corrode after accelerated corrosion for 144 hours in 15% neutral salt solution. The invention has low preparation cost, is suitable for mass production, is suitable for manufacturing corrosion-resistant and wear-resistant workpieces, and can be applied to the fields of outdoor metal structures, automobiles, aerospace and the like.
Description
Technical Field
The invention relates to the technical field of electric transmission line hardware fitting coating materials, in particular to a Ti-TiN-TiSiAlN composite coating and a preparation method and application thereof.
Background
The transmission line is exposed outdoors and can be influenced by atmosphere and various environment media, each part can be corroded, and surface galvanization treatment is usually carried out by considering multiple reasons such as processing difficulty, resources, economy and the like. However, on one hand, the adhesion between the zinc coating and the base metal is not good, which easily causes the zinc coating to crack and fall off, on the other hand, zinc as an amphoteric metal can be dissolved in acid and alkali, has poor corrosion resistance in a moist non-neutral soil environment, cannot well protect the base metal, and the zinc coating is damaged to lose the protection effect, which causes the disconnection or disconnection of the connection circuit, even tower collapse, and causes power failure trip and major safety production accidents.
Chinese patent CN101698363A discloses a TiN/(TiN + CrN)/CrAlN nanocomposite coating, which deposits a transition layer TiN film, (TiN + CrN) nanocomposite multilayer and a CrAlN nanocomposite multilayer on a substrate material in sequence, improves the bonding force between the coating and the substrate by designing the coating material of the multilayer structure, and maintains the high hardness property of the coating. But the corrosion resistance of the coating still needs to be improved.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defect and the defect that the corrosion resistance of the existing coating material is not high enough, and provides a Ti-TiN-TiSiAlN composite coating, which comprises a Ti transition layer as an inner layer, a TiN transition layer as an intermediate layer and a TiSiAlN coating as an outer layer, wherein the corrosion resistance of a matrix is improved, the bonding performance and the wear resistance of the coating and the matrix are enhanced, and the service life of the matrix is prolonged.
The invention also aims to provide a preparation method of the Ti-TiN-TiSiAlN composite coating.
The invention further aims to provide application of the Ti-TiN-TiSiAlN composite coating.
The above purpose of the invention is realized by the following technical scheme:
a Ti-TiN-TiSiAlN composite coating comprises an inner layer, an intermediate layer and an outer layer from inside to outside, wherein the inner layer is a Ti transition layer, the intermediate layer is a TiN transition layer, and the outer layer is a TiSiAlN coating, wherein the total thickness of the Ti-TiN-TiSiAlN composite coating is 5-8 mu m; in the TiSiAlN coating, the atomic percent of Si is 4-7%, the atomic percent of Al is 9-12%, the atomic percent of Ti is 31-36%, and the atomic percent of N is 50-57%.
The Ti-TiN-TiSiAlN composite coating has a three-layer structure, wherein the Ti-TiN-TiSiAlN composite coating comprises a Ti and TiN transition layer, the outer layer is the TiSiAlN coating, the inner layer is directly contacted with a metal matrix, and the structure of each layer is optimized, so that the bonding strength between the coating and the matrix is improved, and the wear resistance and the corrosion resistance of the coating are improved.
Preferably, the atomic percent of Si in the TiSiAlN coating is 4-5%, the atomic percent of Al is 9-10%, the atomic percent of Ti is 31-33%, and the atomic percent of N is 50-55%.
More preferably, the tisian coating has 5 atomic percent of Si, 10 atomic percent of Al, 30 atomic percent of Ti, and 55 atomic percent of N.
Preferably, the total thickness of the Ti-TiN-TiSiAlN composite coating is 5-6 mu m.
More preferably, the total thickness of the Ti-TiN-TiSiAlN composite coating is 6 μm.
Preferably, the TiN transition layer comprises a gradient layer and a transition layer.
The invention also provides a preparation method of the Ti-TiN-TiSiAlN composite coating, which comprises the following steps:
s1, heating a substrate to 200-260 ℃, starting a Ti target for 5-7 min, and depositing a Ti transition layer;
s2, controlling the current of the Ti target to be 70-90A for 11-15 min, and depositing a TiN transition layer on the Ti transition layer in the step S1;
s3, controlling the Ti target current to be 70-90A, the Al target current to be 50-70A, the Si target current to be 60-80A, the matrix negative bias voltage to be 200-350V, and the time to be 90-120 min, and sputtering and depositing the TiSiAlN coating on the TiN transition layer in the step S2.
Preferably, step S2, the Ti target current is controlled to increase to 70-90A for 3-5 min, and a TiN gradient layer is deposited; and keeping the current of the Ti target unchanged, and continuously depositing the TiN transition layer for 8-10 min.
Preferably, the substrate of step S1 further comprises the following pretreatment steps:
the method comprises the steps of removing oil from a substrate, grinding and polishing the substrate, and then carrying out sputtering cleaning by using argon ions in an inert atmosphere under the action of an electric field for 8-10 min. The argon ion sputtering cleaning mainly has the functions of removing gas and impurity atoms adsorbed on the surface of a workpiece and activating the surface of a matrix so as to improve the binding force of other coatings.
Preferably, the base body in step S1 is carbon steel.
The invention also protects the application of the Ti-TiN-TiSiAlN composite coating in serving as a hardware coating material of a power transmission line.
Compared with the prior art, the invention has the beneficial effects that:
the Ti-TiN-TiSiAlN composite coating comprises a Ti and TiN transition layer and a TiSiAlN coating, realizes metallurgical bonding between a metal matrix and the coating, improves the bonding strength between the coating and the metal matrix, and simultaneously improves the wear resistance and the corrosion resistance of the coating. The critical load Lc of the TiSiAlN coating and the matrix is more than or equal to 45N, the surface microhardness HV is more than or equal to 3100, the bonding strength can reach 49N, and the TiSiAlN coating and the matrix are not corroded after accelerated corrosion for 144 hours in 15% neutral salt solution. The invention has low preparation cost, is suitable for mass production, is suitable for manufacturing corrosion-resistant and wear-resistant workpieces, and can be applied to the fields of outdoor metal structures, automobiles, aerospace and the like.
Drawings
FIG. 1 is a schematic structural view of the Ti-TiN-TiSiAlN composite coating prepared in example 1.
Detailed Description
The present invention will be further described with reference to specific embodiments, but the present invention is not limited to the examples in any way. The starting reagents employed in the examples of the present invention are, unless otherwise specified, those that are conventionally purchased.
Example 1
A Ti-TiN-TiSiAlN composite coating is characterized by comprising an inner layer, an intermediate layer and an outer layer from inside to outside, wherein the inner layer is a Ti transition layer, the intermediate layer is a TiN transition layer, and the outer layer is a TiSiAlN coating, wherein the total thickness of the Ti-TiN-TiSiAlN composite coating is 6.4 mu m; in the TiSiAlN coating, the atomic percent of Si is 4%, the atomic percent of Al is 9%, the atomic percent of Ti is 32%, and the atomic percent of N is 55%.
The preparation method of the Ti-TiN-TiSiAlN composite coating comprises the following steps:
s1, carrying out pretreatment such as oil removal, grinding, polishing and the like on the surface of a carbon steel substrate material;
charging the pretreated base material into a furnace, and evacuating (<2×10-2Pa), introducing argon to 8Pa, adding a negative bias of 700V to the substrate, and carrying out sputtering cleaning on the workpiece by high-energy argon ions under the action of an electric field for 8 min; heating the base material, and controlling the temperature at 200 ℃; starting a Ti target, and depositing a Ti transition layer for 6 min;
s2, introducing a proper amount of working gas, starting a main power supply, depositing a TiN transition layer on the Ti transition layer, gradually increasing the Ti target current to 70A within 3min before the start of deposition, depositing a TiN gradient layer between the Ti transition layer and the TiN transition layer, keeping the Ti target current unchanged, and continuing to deposit the TiN transition layer for 10 min;
s3, adopting multi-target simultaneous sputtering, wherein the Ti target current is 70A, the Al target current is 50A, the Si target current is 70A, the deposition temperature is 200 ℃, the matrix negative bias is 250V, the time is 90min, and N is2And Ar gas flow ratio of 8: 1, controlling the total pressure in the working chamber to be about 0.5Pa, and depositing a TiSiAlN coating on the TiN transition layer.
Example 2
A Ti-TiN-TiSiAlN composite coating is characterized by comprising an inner layer, an intermediate layer and an outer layer from inside to outside, wherein the inner layer is a Ti transition layer, the intermediate layer is a TiN transition layer, and the outer layer is a TiSiAlN coating, wherein the total thickness of the Ti-TiN-TiSiAlN composite coating is 7.8 mu m; in the TiSiAlN coating, the atomic percent of Si is 7%, the atomic percent of Al is 12%, the atomic percent of Ti is 31% and the atomic percent of N is 50%.
The preparation method of the Ti-TiN-TiSiAlN composite coating comprises the following steps:
s1, carrying out pretreatment such as oil removal, grinding, polishing and the like on the surface of a carbon steel substrate material;
charging the pretreated base material into a furnace, and evacuating (<2×10-2Pa), introducing argon to 12Pa, adding 900V negative bias to the substrate, and carrying out sputtering cleaning on the workpiece by argon ions with high energy for 8min under the action of an electric field, wherein the main function is to remove gas and impurity atoms adsorbed on the surface of the workpiece and activate the surface of the substrate material to improve the binding force of the coating; heating the base material, and controlling the temperature at 260 ℃; starting a Ti target, and depositing a Ti transition layer for 7 min;
s2, introducing a proper amount of working gas, starting a main power supply, depositing a TiN transition layer on the Ti transition layer, gradually increasing the Ti target current to 80A within the first 35min after the start of deposition, depositing a thin TiN gradient layer between the Ti transition layer and the TiN transition layer, keeping the Ti target current unchanged, and continuing to deposit the TiN transition layer for 8 min;
s3, adopting multi-target simultaneous sputtering, wherein the Ti target current is 80A, the Al target current is 60A, the Si target current is 80A, the deposition temperature is 260 ℃, the matrix negative bias is 350V, the time is 120min, and N is2And Ar gas flow ratio of 7: 1, controlling the total pressure in the working chamber to be 0.5Pa, and depositing a TiSiAlN coating on the TiN transition layer.
Example 3
A Ti-TiN-TiSiAlN composite coating is characterized by comprising an inner layer, an intermediate layer and an outer layer from inside to outside, wherein the inner layer is a Ti transition layer, the intermediate layer is a TiN transition layer, and the outer layer is a TiSiAlN coating, wherein the total thickness of the Ti-TiN-TiSiAlN composite coating is 7.4 mu m; in the TiSiAlN coating, the atomic percent of Si is 5 percent, the atomic percent of Al is 10 percent, the atomic percent of Ti is 30 percent and the atomic percent of N is 55 percent.
The preparation method of the Ti-TiN-TiSiAlN composite coating comprises the following steps:
s1, carrying out pretreatment such as oil removal, grinding, polishing and the like on the surface of a carbon steel substrate material;
charging the pretreated base material into a furnace, and evacuating (<2×10-2Pa), introducing argon to 10Pa, adding 800V negative bias to the substrate, and carrying out sputtering cleaning on the workpiece by argon ions with high energy for 9min under the action of an electric field, wherein the main function is to remove gas and impurity atoms adsorbed on the surface of the workpiece and activate the surface of the substrate material to improve the binding force of the coating; heating the base material, and controlling the temperature at 300 ℃; then, starting a Ti target, and depositing a Ti transition layer for 5 min;
s2, introducing a proper amount of working gas, starting a main power supply, depositing a TiN transition layer on the Ti transition layer, gradually increasing the Ti target current to 90A within 4min before the start of deposition, depositing a thin TiN gradient layer between the Ti transition layer and the TiN transition layer, keeping the Ti target current unchanged, and continuously depositing the TiN transition layer for 9 min;
s3, adopting multi-target simultaneous sputtering, wherein the Ti target current is 90A, the Al target current is 60A, the Si target current is 70A, the deposition temperature is 300 ℃, the matrix negative bias is 200V, the time is 100min, and N is2And Ar gas flow ratio of 6: 1, controlling the total pressure in the working chamber to be about 0.5Pa, and depositing a TiSiAlN coating on the TiN transition layer.
Performance testing
TABLE 1 coating Performance test results for the examples
As can be seen from Table 1, the critical load Lc of the Ti-TiN-TiSiAlN composite coating prepared by the invention and a metal matrix is more than or equal to 45N, the surface microhardness HV is more than or equal to 3200, and the Ti-TiN-TiSiAlN composite coating does not corrode after accelerated corrosion in 15% neutral salt solution for 144 hours. The preparation method has the characteristics of low preparation cost, suitability for mass production and the like, is suitable for manufacturing corrosion-resistant, wear-resistant and other workpieces, and can be suitable for the fields of metal structures, automobiles, aerospace and the like.
As can be seen from FIG. 1, the Ti-TiN-TiSiAlN composite coating prepared in example 1 has a thickness of approximately 6.4 μm or so.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. The Ti-TiN-TiSiAlN composite coating is characterized by comprising an inner layer, an intermediate layer and an outer layer from inside to outside, wherein the inner layer is a Ti transition layer, the intermediate layer is a TiN transition layer, and the outer layer is a TiSiAlN coating, wherein the total thickness of the Ti-TiN-TiSiAlN composite coating is 5-8 mu m; in the TiSiAlN coating, the atomic percent of Si is 4-7%, the atomic percent of Al is 9-12%, the atomic percent of Ti is 31-36%, and the atomic percent of N is 50-57%.
2. The Ti-TiN-TiSiAlN composite coating of claim 1, wherein the atomic percentage of Si in the TiSiAlN coating is 4% to 5%, the atomic percentage of Al is 9% to 10%, the atomic percentage of Ti is 31% to 33%, and the atomic percentage of N is 50% to 55%.
3. The Ti-TiN-TiSiAlN composite coating of claim 1 or 2, wherein the TiSiAlN coating comprises 5 atomic percent of Si, 10 atomic percent of Al, 30 atomic percent of Ti, and 55 atomic percent of N.
4. The Ti-TiN-TiSiAlN composite coating according to claim 1, wherein the total thickness of the Ti-TiN-TiSiAlN composite coating is 5 to 6 μm.
5. The Ti-TiN-TiSiAlN composite coating of claim 1, wherein the Ti-TiN-TiSiAlN composite coating has a total thickness of 6 μ ι η.
6. The Ti-TiN-tisian composite coating of claim 1, wherein the TiN transition layer comprises a gradient layer and a transition layer.
7. The method for preparing the Ti-TiN-TiSiAlN composite coating according to any one of claims 1 to 6, which is characterized by comprising the following steps:
s1, heating a substrate to 200-260 ℃, starting a Ti target for 5-7 min, and depositing a Ti transition layer;
s2, controlling the current of the Ti target to be 70-90A for 11-15 min, and depositing a TiN transition layer on the Ti transition layer in the step S1;
s3, controlling the Ti target current to be 70-90A, the Al target current to be 50-70A, the Si target current to be 60-80A, the matrix negative bias voltage to be 200-350V, and the time to be 90-120 min, and sputtering and depositing the TiSiAlN coating on the TiN transition layer in the step S2.
8. The method according to claim 7, wherein step S2 is performed by controlling the Ti target current to increase to 70-90A for 3-5 min, and depositing a TiN gradient layer; and keeping the current of the Ti target unchanged, and continuously depositing the TiN transition layer for 8-10 min.
9. The method of claim 7, wherein the substrate of step S1 is carbon steel.
10. The use of the Ti-TiN-TiSiAlN composite coating layer according to any one of claims 1 to 6 as a coating material for electric transmission line hardware.
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| CN102653855A (en) * | 2012-05-05 | 2012-09-05 | 马胜利 | Preparation method of abrasion-resistant and oxidation-resisting TiAlSiN nanometer composite superhard coating |
| CN104308204A (en) * | 2014-09-30 | 2015-01-28 | 洛阳理工学院 | Multi-coating turning blade |
| CN108690967A (en) * | 2018-05-04 | 2018-10-23 | 深圳市中科摩方科技有限公司 | Nitinol medical instrument with face coat and coating production |
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2020
- 2020-06-03 CN CN202010496340.3A patent/CN111733385A/en active Pending
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| CN101831608A (en) * | 2010-05-11 | 2010-09-15 | 广东工业大学 | Nano composite titanium-aluminum-silicon nitride cutter coating and preparation method thereof |
| CN102653855A (en) * | 2012-05-05 | 2012-09-05 | 马胜利 | Preparation method of abrasion-resistant and oxidation-resisting TiAlSiN nanometer composite superhard coating |
| CN104308204A (en) * | 2014-09-30 | 2015-01-28 | 洛阳理工学院 | Multi-coating turning blade |
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Non-Patent Citations (1)
| Title |
|---|
| 马璇 等: ""溅射工艺参数对TiAlSiN涂层硬度及膜基结合力的影响"", 《真空科学与技术学报》 * |
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