CN111725081A - A SOP preparation method of different sizes for plastic packaged flip-chip substrates - Google Patents
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H01L2224/1111—Shaping
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1131—Manufacturing methods by local deposition of the material of the bump connector in liquid form
- H01L2224/1132—Screen printing, i.e. using a stencil
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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- H01L2224/13001—Core members of the bump connector
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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Abstract
本发明一种针对塑封倒装焊基板的不同尺寸SOP制备方法,包括如下步骤:步骤1、对所有焊盘进行助焊剂印刷;步骤2、根据焊盘尺寸,选择需要的焊球尺寸,将焊盘分为多组;对于一组焊盘,将印刷完助焊剂的基板置于与该组焊盘对应的置球网板下,将该组焊盘对应的焊球通过对应的置球网板漏置于该组焊盘上;步骤3、在焊球漏置于焊盘上后,将基板置于回流炉中进行回流焊,形成球形焊点;步骤4、重复步骤1至3,直至遍历各组焊盘,各组焊盘上均形成对应的球形焊点;步骤5、对制备完焊点的基板进行清洗,以去除残留助焊剂;步骤6、对所有球形焊点进行整平处理。本发明的方法提升高密度塑封倒装焊工艺的焊接质量,保证塑封倒装焊器件的长期可靠性。
The present invention provides a method for preparing SOPs of different sizes for plastic-encapsulated flip-chip soldering substrates, comprising the following steps: step 1, performing flux printing on all pads; step 2, selecting the required size of solder balls according to the size of the pads, The pads are divided into multiple groups; for a group of pads, place the substrate with the printed flux under the ball-mounting stencil corresponding to the group of pads, and pass the solder balls corresponding to the group of pads through the corresponding ball-mounting stencil Leakage is placed on the set of pads; Step 3, after the solder balls are leaked and placed on the pads, place the substrate in a reflow oven for reflow soldering to form spherical solder joints; Step 4, Repeat steps 1 to 3 until traversed For each group of pads, corresponding spherical solder joints are formed on each group of pads; step 5, cleaning the substrate on which the solder joints are prepared to remove residual flux; step 6, leveling all spherical solder joints. The method of the invention improves the welding quality of the high-density plastic packaging flip-chip welding process, and ensures the long-term reliability of the plastic packaging flip-chip welding device.
Description
技术领域technical field
本发明涉及一种封装基板SOP制备方法,具体涉及一种塑封倒装焊基板的倒装焊焊盘上的SOP制备方法,属于半导体封装技术领域。The invention relates to a method for preparing an SOP of a packaging substrate, in particular to a method for preparing an SOP on a flip-chip soldering pad of a plastic-encapsulated flip-chip soldering substrate, and belongs to the technical field of semiconductor packaging.
背景技术Background technique
倒装焊技术是在芯片有源面制备互连凸点,凸点呈面阵列排布,具有互连密度高、可靠性高等一系列优点,已在电力、军工、宇航等具有高可靠要求的领域实现大规模应用。随着塑封倒装焊器件的性能不断提高,互连凸点的密度急剧提升,单个芯片凸点总数将达到10000个以上,在回流焊过程中凸点的焊接质量和焊接一致性难以得到保证,极易出现虚焊现象,给塑封倒装焊器件的长期可靠性带来严重隐患。Flip-chip soldering technology is to prepare interconnect bumps on the active surface of the chip. The bumps are arranged in a surface array, which has a series of advantages of high interconnect density and high reliability. It has been used in electric power, military industry, aerospace, etc. large-scale application in the field. With the continuous improvement of the performance of plastic packaged flip-chip devices, the density of interconnect bumps has increased sharply, and the total number of bumps on a single chip will reach more than 10,000. It is difficult to guarantee the soldering quality and soldering consistency of the bumps during the reflow soldering process. The phenomenon of virtual soldering is very easy to occur, which brings serious hidden dangers to the long-term reliability of plastic packaged flip-chip devices.
此外,互连密度的提升必将导致凸点的尺寸急剧下降,而小尺寸的凸点在互连后将面临更为严重的可靠性问题。一方面,凸点尺寸缩小会导致凸点焊接强度下降,影响芯片整体的焊接质量,尤其在器件边角处应力应变集中区域,小尺寸凸点发生疲劳开裂的概率极大,会影响器件的长期可靠性;另一方面,凸点尺寸的下降会使得尺寸效应凸显,焊接界面处的IMC占凸点的比重急剧上升,尤其在高温存储等热学环境下有可能使得焊点全部转换为IMC,也会严重影响凸点的长期可靠性。In addition, the increase in interconnect density will inevitably lead to a sharp decrease in the size of bumps, and bumps with small dimensions will face more serious reliability problems after interconnection. On the one hand, the shrinking bump size will lead to a decrease in the soldering strength of the bumps, which will affect the overall soldering quality of the chip, especially in the areas where the stress and strain are concentrated at the corners of the device. Reliability; on the other hand, the decrease in bump size will make the size effect prominent, and the proportion of IMC at the solder interface to the bump will increase sharply, especially in thermal environments such as high temperature storage, which may cause all solder joints to be converted to IMC. It will seriously affect the long-term reliability of bumps.
目前业界通常采用丝网印刷方式在塑封基板倒装焊焊盘上制备SOP,使得芯片凸点与SOP进行焊接,以降低工艺难度,提升焊接质量。但是丝网印刷方式无法制备不同尺寸的SOP,无法解决个别区域小尺寸凸点可靠性低的问题,因此研发一种针对倒装焊基板的不同尺寸SOP制备方法对于提升塑封倒装焊器件工艺质量及长期可靠性有着极为重要的意义。At present, the industry usually uses screen printing to prepare the SOP on the flip-chip bonding pads of the plastic packaging substrate, so that the chip bumps and the SOP are welded, so as to reduce the difficulty of the process and improve the welding quality. However, the screen printing method cannot prepare SOPs of different sizes, and it cannot solve the problem of low reliability of small-sized bumps in individual areas. Therefore, developing a method for preparing SOPs of different sizes for flip-chip substrates can improve the process quality of plastic-encapsulated flip-chip devices. and long-term reliability is extremely important.
发明内容SUMMARY OF THE INVENTION
本发明解决的技术问题为:克服上述现有技术的不足,提供一种针对塑封倒装焊基板的不同尺寸SOP制备方法,适用于塑封倒装焊封装工艺,可兼容各种不同封装尺寸、不同SOP材料的倒装焊封装外壳,具有工艺简单、尺寸精确度高等特点,可以显著提升高密度倒装焊工艺的焊接质量,解决小尺寸凸点焊接强度较低、可靠性较差等问题,进而保证倒装焊器件的长期可靠性。The technical problem solved by the present invention is: to overcome the above-mentioned deficiencies of the prior art, and to provide a different size SOP preparation method for plastic packaging flip-chip soldering substrates, which is suitable for the plastic packaging flip-chip soldering packaging process, and is compatible with various package sizes, different The flip-chip packaging shell of SOP material has the characteristics of simple process and high dimensional accuracy, which can significantly improve the welding quality of high-density flip-chip welding process, solve the problems of low welding strength and poor reliability of small-sized bumps, and then Long-term reliability of flip-chip devices is guaranteed.
本发明解决的技术方案为:一种针对塑封倒装焊基板的不同尺寸SOP制备方法,步骤如下:The technical solution solved by the present invention is: a method for preparing SOPs of different sizes for plastic packaging flip-chip substrates, the steps are as follows:
(1)将基板置于助焊剂印刷网板下,基板上设置有不同规格的大量焊盘,在助焊剂印刷网板上涂覆助焊剂,对所有焊盘进行助焊剂印刷;(1) Place the substrate under the flux printing screen, a large number of pads of different specifications are arranged on the substrate, apply flux on the flux printing screen, and perform flux printing on all the pads;
(2)根据焊盘尺寸,选择需要的焊球尺寸,将焊盘分为多组;每组焊盘为同一规格,其上设置同一尺寸的焊球,每种规格的焊盘对应一块置球网板;对于一组焊盘,将印刷完助焊剂的基板置于与该组焊盘对应的置球网板下,将该组焊盘对应的焊球通过对应的置球网板漏置于该组焊盘上;(2) According to the pad size, select the required solder ball size, and divide the pads into multiple groups; each group of pads is of the same specification, and the solder balls of the same size are set on it, and each specification pad corresponds to a set of balls Stencil; for a set of pads, place the substrate with the printed flux under the stencil corresponding to the set of pads, and place the solder balls corresponding to the set of pads through the corresponding stencil. on the set of pads;
(3)在焊球漏置于焊盘上后,将基板置于回流炉中进行回流焊,形成球形焊点;(3) After the solder balls are leaked and placed on the pads, the substrate is placed in a reflow furnace for reflow soldering to form spherical solder joints;
(4)重复步骤(1)~(3),直至遍历各组焊盘,各组焊盘上均形成对应的球形焊点;(4) Repeat steps (1) to (3) until each group of pads is traversed, and corresponding spherical solder joints are formed on each group of pads;
(5)对制备完焊点的基板进行清洗,以去除残留助焊剂。(5) Clean the substrate on which the solder joints are prepared to remove the residual flux.
(6)对所有球形焊点进行整平处理。(6) Flatten all spherical solder joints.
优选的,基板上设置有不同规格的大量焊盘,具体为:基板上设置有圆形焊盘,焊盘采用镍金或镍钯金的化镀方式制备,焊盘直径范围优选为70μm~150μm,焊盘间距范围优选为120μm~150μm,进一步提高制备效果。Preferably, a large number of pads of different specifications are arranged on the substrate, specifically: circular pads are arranged on the substrate, the pads are prepared by electroless plating of nickel-gold or nickel-palladium-gold, and the diameter of the pads is preferably 70 μm to 150 μm , the pad spacing is preferably in the range of 120 μm to 150 μm, which further improves the preparation effect.
优选的,每块助焊剂印刷网板上设有统一规格的多个圆孔,能够将助焊剂漏至焊盘上。Preferably, each flux printing screen is provided with a plurality of circular holes of uniform specifications, which can leak the flux to the pads.
优选的,所述基板为多层复合结构有机倒装焊基板,包括芯板、布线层以及阻焊层;芯板厚度范围优选为400μm~800μm,芯板上为布线层,布线层的层数为3~6层,每层厚度优选为15μm~30μm,布线层上为阻焊层,阻焊层高度优选为30~50μm,阻焊层上设置有焊盘的开孔,开孔形状为圆形,直径优选为50~80μm,进一步提高制备效果。Preferably, the substrate is a multilayer composite structure organic flip-chip substrate, including a core board, a wiring layer and a solder resist layer; the thickness of the core board is preferably in the range of 400 μm to 800 μm, the core board is a wiring layer, and the number of layers of the wiring layer is There are 3 to 6 layers, the thickness of each layer is preferably 15 μm to 30 μm, the wiring layer is a solder mask layer, the height of the solder mask layer is preferably 30 to 50 μm, and the solder mask layer is provided with an opening for a pad, and the shape of the opening is a circle. The diameter is preferably 50-80 μm, which further improves the preparation effect.
优选的,所述焊盘为Ni-Au结构,包括Ni层和Au层,采用电镀工艺制备,Ni层上为Au层,Ni层厚度优选为2.54μm以上,Au层厚度优选为0.02μm~0.3μm,进一步提高制备效果。Preferably, the pad has a Ni-Au structure, including a Ni layer and an Au layer, and is prepared by an electroplating process, the Ni layer is an Au layer, the thickness of the Ni layer is preferably more than 2.54 μm, and the thickness of the Au layer is preferably 0.02 μm to 0.3 μm. μm to further improve the preparation effect.
优选的,所述助焊剂为水溶性松香基助焊剂;Preferably, the flux is a water-soluble rosin-based flux;
优选的,所述助焊剂印刷网板采用电铸工艺制备,在网板上加工有一定尺寸的相同圆孔,圆孔位置与基板上需要进行助焊剂印刷的焊盘位置一一对应,圆孔直径优选为焊盘直径的70%~90%;Preferably, the flux printing screen is prepared by an electroforming process, and the screen is machined with the same circular holes of a certain size. The diameter is preferably 70% to 90% of the diameter of the pad;
优选的,所述焊球成分优选包括:PbSn、SnAg、SnAgCu这些锡基材料,焊球直径优选为焊盘直径的80%~120%,进一步提高制备效果。Preferably, the components of the solder balls preferably include tin-based materials such as PbSn, SnAg, and SnAgCu, and the diameter of the solder balls is preferably 80% to 120% of the diameter of the pads to further improve the preparation effect.
优选的,所述置球网板采用电铸工艺制备,面向基板的一侧涂覆保护涂层,在网板上加工有一定尺寸的相同圆孔,圆孔位置与基板上需要进行漏置焊球的焊盘位置一一对应,圆孔直径为焊球直径的110%~130%,置球时需调节置球装置压力以及置球网板与基板之间的距离,置球装置压力优选为0.1MPa~0.5MPa,置球网板与基板之间的距离优选为30~50μm,进一步提高制备效果。Preferably, the ball stencil is prepared by an electroforming process, the side facing the substrate is coated with a protective coating, and the stencil is machined with the same circular hole of a certain size, and the position of the circular hole needs to be soldered on the substrate. The pad positions of the balls correspond one by one. The diameter of the round hole is 110% to 130% of the diameter of the solder ball. When placing the ball, the pressure of the ball placement device and the distance between the ball placement screen and the substrate should be adjusted. The ball placement device pressure is preferably 0.1 MPa to 0.5 MPa, and the distance between the ball screen and the substrate is preferably 30 to 50 μm, which further improves the preparation effect.
本发明与现有技术相比的优点在于:The advantages of the present invention compared with the prior art are:
(1)本发明采用“助焊剂印刷-置球-回流-整平”的工艺进行SOP制备,工艺简单,成熟度高;(1) The present invention adopts the process of "flux printing-ball placement-reflow-leveling" to prepare SOP, with simple process and high maturity;
(2)本发明采用不同规格的网板进行置球,置球网板与基板之间距离可调,通过重复置球的方式实现不同尺寸SOP制备,不会对已有尺寸SOP造成影响。(2) In the present invention, stencils of different specifications are used to place the balls, the distance between the stencils and the base plate for placing the balls is adjustable, and the preparation of SOPs of different sizes is realized by repeatedly placing the balls, without affecting the existing size SOPs.
(3)本发明采用整平方式对SOP表面进行处理,确保不同尺寸SOP的共面性满足工艺指标要求。(3) The present invention uses a leveling method to process the surface of the SOP to ensure that the coplanarity of the SOPs of different sizes meets the requirements of the process index.
附图说明Description of drawings
图1为塑封倒装焊基板结构示意图;FIG. 1 is a schematic diagram of the structure of a plastic-encapsulated flip-chip substrate;
图2为助焊剂印刷示意图;Figure 2 is a schematic diagram of flux printing;
图3为焊球漏置示意图;Figure 3 is a schematic diagram of solder ball leakage;
图4为焊球回流后示意图;Figure 4 is a schematic diagram of the solder balls after reflow;
图5为另一规格焊球漏置示意图;Figure 5 is a schematic diagram of another specification of solder ball leakage;
图6为另一规格焊球回流后示意图;FIG. 6 is a schematic diagram of another specification solder ball after reflow;
图7为整平后SOP示意图;Fig. 7 is the schematic diagram of SOP after leveling;
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明做进一步详细描述。The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
本发明一种针对塑封倒装焊基板的不同尺寸SOP制备方法,包括如下步骤:步骤1、将基板置于助焊剂印刷网板下,基板上设置有不同规格的大量焊盘,在助焊剂印刷网板上涂覆助焊剂,对所有焊盘进行助焊剂印刷;步骤2、根据焊盘尺寸,选择需要的焊球尺寸,将焊盘分为多组;每组焊盘为同一规格,其上设置同一尺寸的焊球,每种规格的焊盘对应一块置球网板;对于一组焊盘,将印刷完助焊剂的基板置于与该组焊盘对应的置球网板下,将该组焊盘对应的焊球通过对应的置球网板漏置于该组焊盘上;步骤3、在焊球漏置于焊盘上后,将基板置于回流炉中进行回流焊,形成球形焊点;步骤4、重复步骤2和3,直至遍历各组焊盘,各组焊盘上均形成对应的球形焊点;步骤5、对制备完焊点的基板进行清洗,以去除残留助焊剂;步骤6、对所有球形焊点进行整平处理。本发明的方法提升高密度塑封倒装焊工艺的焊接质量,保证塑封倒装焊器件的长期可靠性。The present invention provides a method for preparing SOPs of different sizes for plastic-encapsulated flip-chip soldering substrates, comprising the following steps:
本发明为一种塑封倒装焊基板的倒装焊焊盘上的SOP制备方法,用于实现倒装焊器件中芯片凸点与基板的互连。传统的丝网印刷方式只能制备同一种规格的SOP,采用本发明可以实现塑封基板上不同规格的SOP制备,制备工艺简单,成品率高,可以解决塑封倒装焊器件中个别区域小尺寸凸点可靠性低的问题,提升塑封倒装焊器件的工艺质量及长期可靠性。The invention is a SOP preparation method on the flip-chip welding pad of a plastic-packaged flip-chip welding substrate, which is used to realize the interconnection between the chip bump and the substrate in the flip-chip welding device. The traditional screen printing method can only prepare SOPs of the same specification, and the present invention can realize the preparation of SOPs of different specifications on the plastic packaging substrate, the preparation process is simple, the yield is high, and the small-sized protrusions in individual areas of the plastic packaging flip-chip devices can be solved. The problem of low point reliability is improved, and the process quality and long-term reliability of plastic packaged flip-chip devices are improved.
本发明一种针对塑封倒装焊基板的不同尺寸SOP制备方法,优选方案步骤如下:The present invention is a method for preparing SOPs of different sizes for plastic-encapsulated flip-chip soldering substrates, and the preferred solution steps are as follows:
(1)基板上设置有圆形焊盘,焊盘采用镍金或镍钯金等化镀方式制备,焊盘直径优选为70~150μm,焊盘间距优选为120~150μm,如图1所示。将基板置于助焊剂印刷网板下方,如图2所示,基板与助焊剂印刷网板的距离为30~50μm,然后将助焊剂涂覆在印刷网板表面,为保证涂覆质量以及一致性,助焊剂量优选大于100g,印刷压力优选为0.1~0.5MPa,印刷速度优选为10~20mm/s。(1) A circular pad is arranged on the substrate. The pad is prepared by chemical plating such as nickel-gold or nickel-palladium-gold. . Place the substrate under the flux printing stencil, as shown in Figure 2, the distance between the substrate and the flux printing stencil is 30-50 μm, and then apply the flux on the surface of the printing stencil to ensure the coating quality and consistency. The amount of flux is preferably greater than 100g, the printing pressure is preferably 0.1-0.5MPa, and the printing speed is preferably 10-20mm/s.
(2)根据焊盘尺寸,选择需要的焊球尺寸,并将焊盘分为多组,结合产品需求,优选为2~3组。每组焊盘为同一规格,其上设置同一尺寸的焊球,每种规格的焊盘对应一块置球网板;(2) According to the pad size, select the required solder ball size, and divide the pads into multiple groups, preferably 2 to 3 groups according to product requirements. Each group of pads is of the same specification, and the solder balls of the same size are set on it, and the pads of each specification correspond to a ball screen;
对于一组焊盘,将印刷完助焊剂的基板置于与该组焊盘对应的置球网板下,如图3所示,使置球网板开孔与基板上需要进行漏置焊球的焊盘位置一一对应,置球网板与基板之间的距离优选为30~50μm,置球装置压力优选为0.1MPa~0.5MPa,从而将该组焊盘对应的焊球通过对应的置球网板漏置于该组焊盘上,实现置球;For a group of pads, place the substrate with the printed flux under the ball screen corresponding to the group of pads, as shown in Figure 3, so that the holes on the ball screen and the substrate need to be leaked solder balls The positions of the pads correspond one-to-one, the distance between the ball screen and the substrate is preferably 30-50μm, and the pressure of the ball-setting device is preferably 0.1MPa-0.5MPa, so that the solder balls corresponding to the group of pads pass through the corresponding The ball mesh board is placed on the set of pads to achieve ball placement;
(3)在焊球漏置于焊盘上后,将基板置于回流炉中进行回流焊,对回流峰值温度、回流时间、回流气氛进行控制,结合焊球成分设置峰值温度,峰值温度优选高于焊球熔点30℃以上,回流时间优选为60~90s,以确保焊球充分熔化并与焊盘实现良好焊接,回流气氛为氮气,起到提高熔化后焊球与基板的润湿性的作用,回流后形成球形焊点,得到制备好的SOP(焊盘上球形焊点),高度为H,如图4所示;(3) After the solder balls are leaked on the pads, place the substrate in a reflow furnace for reflow soldering, control the reflow peak temperature, reflow time, and reflow atmosphere, and set the peak temperature according to the composition of the solder balls. The peak temperature is preferably high. When the melting point of the solder ball is above 30°C, the reflow time is preferably 60-90s to ensure that the solder ball is fully melted and soldered to the pad well. The reflow atmosphere is nitrogen, which improves the wettability of the solder ball and the substrate after melting. , after reflow, spherical solder joints are formed, and the prepared SOP (ball solder joints on pads) is obtained, and the height is H, as shown in Figure 4;
(4)重复步骤(1)~(3),在第二次助焊剂印刷以及置球时,应将助焊剂印刷网板和置球网板与基板之间的高度调节为已制备好SOP高度的3~5倍,以防止已制备好的SOP被助焊剂印刷网板或置球网板损伤,直至遍历各组焊盘,各组焊盘上均形成对应的球形焊点,如图5~图6所示;(4) Repeat steps (1) to (3). During the second flux printing and ball placement, the height between the flux printing stencil and the ball placement stencil and the substrate should be adjusted to the height of the prepared SOP. 3 to 5 times of the SOP to prevent the prepared SOP from being damaged by the flux printing stencil or the ball stencil, until each group of pads is traversed, and the corresponding spherical solder joints are formed on each group of pads, as shown in Figure 5- As shown in Figure 6;
(5)对制备完球形焊点的基板进行清洗,采用加热状态水基清洗液对基板进行喷淋,为保证水基清洗液活性,温度设置优选为50~70℃,在喷淋压力为30~50Psi,喷淋时间优选为10~15分钟,然后进行烘干,烘干温度优选为50~70℃,烘干时间优选为5~10分钟。(5) Clean the substrate on which the spherical solder joints have been prepared, and spray the substrate with a water-based cleaning solution in a heated state. ~50 Psi, the spraying time is preferably 10-15 minutes, and then drying is performed, the drying temperature is preferably 50-70 °C, and the drying time is preferably 5-10 minutes.
(6)对所有球形焊点进行整平处理,采用整平工装接触球形焊点,工装尺寸直径优选为30~50μm,接触压力优选为0.1~0.5MPa,如图7所示。(6) All spherical solder joints are leveled, and a leveling tool is used to contact the spherical solder joints. The diameter of the tool is preferably 30-50 μm, and the contact pressure is preferably 0.1-0.5 MPa, as shown in Figure 7.
通过以上步骤,实现了塑封基板上多种规格的SOP制备,SOP工艺一致性得到有效保证,制备工艺简单,成品率高。Through the above steps, SOP preparation of various specifications on the plastic packaging substrate is realized, the consistency of the SOP process is effectively guaranteed, the preparation process is simple, and the yield is high.
本发明实现SOP制备质量提高的进一步方案:步骤(4)中重复步骤(1)~(3)时,进行二次助焊剂印刷和置球时,设印刷网板或置球网板与基板(阻焊层表面)之间的距离为L,设已制备好的SOP的高度为H,置球压力为P(置球压力是指:焊球要通过夹带焊球的毛刷,输在置球网板上,毛刷向置球网板施加的压力定义为置球压力),优选满足P2×L<H/L<1,满足该优选约束条件,可以实现SOP制备质量的进一步提高,进一步提升倒装焊工艺质量及可靠性。The present invention achieves a further scheme for improving the quality of SOP preparation: when repeating steps (1) to (3) in step (4), when performing secondary flux printing and ball placement, a printing screen or a ball screen and a substrate ( The distance between the surface of the solder mask layer) is L, the height of the prepared SOP is H, and the ball setting pressure is P (the ball setting pressure means that the solder balls must pass through the brush that entrains the solder balls, and the balls are lost in the setting balls. On the screen, the pressure exerted by the brush on the ball-setting screen is defined as the ball-setting pressure), preferably satisfying P 2 ×L<H/L<1, and satisfying the optimal constraint condition can further improve the quality of SOP preparation, further Improve the quality and reliability of the flip-chip soldering process.
本发明的一种针对塑封倒装焊基板的不同尺寸SOP制备方法,进一步的优选方案步骤如下:In a method for preparing SOPs of different sizes for plastic-encapsulated flip-chip substrates of the present invention, the further preferred solution steps are as follows:
(1)如图1所示为本发明实施例中塑封基板结构示意图,其中1为基板的焊盘,采用化镀工艺制备,为Ni-Au结构,2为阻焊层,起保护焊盘的作用,3为基板整体;(1) As shown in FIG. 1 is a schematic diagram of the structure of the plastic packaging substrate in the embodiment of the present invention, wherein 1 is the pad of the substrate, which is prepared by an electroless plating process, and has a Ni-Au structure, and 2 is a solder resist layer, which protects the pad. Function, 3 is the whole of the substrate;
将基板3置于助焊剂印刷网板4的下方,使得助焊剂印刷网板4上的圆孔5与焊盘1的位置一一对应,调整基板3与助焊剂印刷网板4之间的距离,使得基板3上的所有焊盘1均匀涂覆助焊剂;Place the
(2)移去助焊剂印刷网板4,将印刷完助焊剂的基板3置于置球网板6的下方,使置球网板6上的圆孔7与焊盘1的位置一一对应,将一种尺寸规格的焊球8通过圆孔7漏置于焊盘1上;(2) Remove the flux printing stencil 4, place the
(3)将完成置球的基板3置于回流炉中进行回流焊,焊接完成后在焊盘1上形成球形的焊点9,设球形的焊点高度为H,(经高度检测焊点9高度为90μm;)(3) Place the ball-mounted
(4)重复步骤(1)~(3),直至遍历各组焊盘,各组焊盘上均形成对应的球形焊点,优选方案具体如下:(4) Repeat steps (1) to (3) until each group of pads is traversed, and corresponding spherical solder joints are formed on each group of pads. The preferred solution is as follows:
将形成焊点9的基板置于另一种规格的助焊剂印刷网板4的下方,使助焊剂印刷网板4上的圆孔5与另一规格的焊盘1的位置一一对应,将基板3与助焊剂印刷网板4之间的距离设置为400μm,将助焊剂印刷压力设置为0.1MPa,使得基板3上的另一规格的焊盘1均匀涂覆助焊剂;Place the substrate on which the
将基板3置于另一规格置球网板6下,使置球网板6上的圆孔7与另一规格的焊盘1的位置一一对应,设置基板3与置球网板6之间的距离为400μm,置球压力设置为0.1Mpa,将另一规格的焊球8通过置球网板6上的圆孔7漏置于焊盘1的上方。Place the
步骤(4)中重复步骤(1)~(3)时,进行二次以上助焊剂印刷和置球时,优选方案为:使焊点9的高度、助焊剂印刷网板4与基板3的距离、置球网板6与基板3的距离以及置球压力值满足优选公式P2×L<H/L<1,有效保证已制备的焊点9不被损伤,保证了SOP制备的质量和成品率。When repeating steps (1) to (3) in step (4), and performing more than two times of flux printing and ball placement, the preferred solution is: the height of the
对形成的焊点9进行外观及高度检测,与步骤(3)中球形焊点9高度一致,(焊点9的高度仍为90μm),证明焊点9未在第二次助焊剂印刷以及第二次置球过程中发生损伤现象;The appearance and height of the formed
直至遍历各组焊盘,各组焊盘上均形成对应的球形焊点;Until each group of pads is traversed, the corresponding spherical solder joints are formed on each group of pads;
(5)对制备完球形焊点的基板进行清洗,采用加热状态水基清洗液对基板进行喷淋,为保证水基清洗液活性,温度设置优选为50~70℃,在喷淋压力为30~50Psi,喷淋时间优选为10~15分钟,然后进行烘干,烘干温度优选为50~70℃,烘干时间优选为5~10分钟。(5) Clean the substrate on which the spherical solder joints have been prepared, and spray the substrate with a water-based cleaning solution in a heated state. ~50 Psi, the spraying time is preferably 10-15 minutes, and then drying is performed, the drying temperature is preferably 50-70°C, and the drying time is preferably 5-10 minutes.
(6)对所有球形焊点进行整平处理,采用整平工装接触球形焊点,工装尺寸直径优选为30~50μm,接触压力优选为0.1~0.5MPa,如图7所示,进一步提升倒装焊工艺质量及可靠性。(6) All spherical solder joints are leveled, and a leveling tool is used to contact the spherical solder joints. The diameter of the tool is preferably 30 to 50 μm, and the contact pressure is preferably 0.1 to 0.5 MPa. As shown in Figure 7, the flip chip is further improved. Welding quality and reliability.
凡是对本发明方案进行修改或等同替换,而不脱离本发明技术方案的精神和范围,均应涵盖在本发明的保护范围中。Any modification or equivalent replacement to the solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be included in the protection scope of the present invention.
本发明采用“助焊剂印刷-置球-回流-整平”的工艺进行SOP制备,工艺简单,成熟度高;且本发明采用不同规格的网板进行置球,置球网板与基板之间距离可调,通过重复置球的方式实现不同尺寸SOP制备,不会对已有尺寸SOP造成影响。而且本发明采用整平方式对SOP表面进行处理,确保不同尺寸SOP的共面性满足工艺指标要求。The present invention adopts the process of "flux printing-ball placement-reflow-leveling" for SOP preparation, the process is simple, and the maturity is high; The distance is adjustable, and the preparation of SOPs of different sizes can be realized by repeatedly placing the balls, which will not affect the existing size SOPs. In addition, the present invention uses a leveling method to process the surface of the SOP, so as to ensure that the coplanarity of the SOPs of different sizes meets the requirements of the process index.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114937604A (en) * | 2022-04-12 | 2022-08-23 | 华天科技(南京)有限公司 | Wafer level packaging method and wafer level packaging structure |
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