CN111708174A - Spectroscopic lens group and spectroscopic probe - Google Patents
Spectroscopic lens group and spectroscopic probe Download PDFInfo
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- CN111708174A CN111708174A CN202010561922.5A CN202010561922A CN111708174A CN 111708174 A CN111708174 A CN 111708174A CN 202010561922 A CN202010561922 A CN 202010561922A CN 111708174 A CN111708174 A CN 111708174A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
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Abstract
The application provides a beam splitting lens group, including first prism, second prism and reflection material, the income plain noodles of second prism and/or set up the recess on the play plain noodles of first prism, the income plain noodles of second prism with the play plain noodles laminating of first prism, reflection material fills space in the recess, the part of incident beam is followed the play plain noodles of second prism jets out into the transmission beam, another part warp of incident beam reflection material becomes the reflected beam. The beam splitting lens group that this application embodiment provided divides incident beam into transmission light beam and reflected light beam through second prism and reflecting material, can support the incident beam of all wave bands to realize the light intensity beam splitting. The spectral detection device that this application embodiment provided includes above-mentioned beam splitting lens group.
Description
Technical Field
The application relates to the technical field of optical communication, in particular to a light splitting lens group and a light splitting detection device.
Background
In an optical communication system, optical signals are often required to be split, and a part of the split optical signals are detected, so that power of the optical signals is monitored, and power monitoring and management of the optical signals are achieved.
Disclosure of Invention
In view of this, embodiments of the present application are expected to provide a beam splitting lens group and a beam splitting detection apparatus, which can support incident beams of all bands to achieve light intensity splitting. In order to achieve the above beneficial effects, the technical solution of the embodiment of the present application is implemented as follows:
an aspect of an embodiment of the present application provides a light splitting lens assembly, including:
a first prism;
a groove is formed in the light incident surface of the second prism and/or the light emergent surface of the first prism, and the light incident surface of the second prism is attached to the light emergent surface of the first prism; and
the reflecting substance fills the space in the groove, part of the incident beam is emitted from the light-emitting surface of the second prism to form a transmission beam, and the other part of the incident beam is reflected to form a reflected beam by the reflecting substance.
Further, another part of the incident beam is totally reflected by the reflecting substance.
Further, the refractive index of the reflective substance is smaller than the refractive index of the first prism.
Further, the beam splitting lens group comprises a glue layer, the glue layer is used for bonding the light incident surface of the second prism and the light emergent surface of the first prism, and the refractive index of the glue layer, the refractive index of the first prism and the refractive index of the second prism are equal.
Furthermore, the light incident surface of the first prism and the light emergent surface of the first prism are arranged oppositely, and the light incident surface of the second prism and the light emergent surface of the second prism are arranged oppositely.
Further, the incident light beam is a collimated light beam, the incident light surface of the first prism is perpendicular to the optical axis of the incident light beam, the incident light surface of the second prism forms an angle of 45 degrees with the optical axis of the incident light beam, the emergent light surface of the first prism forms an angle of 45 degrees with the optical axis of the incident light beam, and the critical angle of the reflective substance is C, wherein C is not more than 45 degrees.
Further, the steepness of the side wall of the groove is 90 °;
and/or the projection area of the groove on the plane where the light-emitting surface of the first prism is located is S, wherein S is larger than the minimum wavelength of the incident light beam.
Further, the number of the grooves is multiple;
the areas of at least two grooves are not equal, or the areas of all the grooves are equal.
Further, a plurality of the grooves are distributed in an array.
Another aspect of the embodiments of the present application provides a spectroscopic probe apparatus, including:
the above-described spectroscope lens group; and
a receiver for converting the transmitted or reflected beams into electrical signals.
The beam splitting lens group that this application embodiment provided divides incident beam into transmission light beam and reflected light beam through second prism and reflecting material, can support the incident beam of all wave bands to realize the light intensity beam splitting, does not receive the influence and the restriction of the wavelength of incident beam, simple structure, the commonality is higher. The spectral detection device that this application embodiment provided includes above-mentioned spectral lens group, has the same beneficial effect with above-mentioned spectral lens group.
Drawings
Fig. 1 is a schematic structural diagram of a light splitting lens group according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural view of a second prism and a groove in FIG. 1;
FIG. 3 is a schematic diagram of an optical path of an incident light beam passing through the beam splitter lens assembly of FIG. 1;
FIG. 4 is a schematic diagram of an incident light beam passing through the first groove of FIG. 2;
FIG. 5 is a schematic diagram of an incident light beam passing through a second groove in FIG. 2;
FIG. 6 is a schematic diagram of an incident light beam passing through a third groove in FIG. 2;
fig. 7 is a schematic structural diagram of a first prism and a fourth groove provided in an embodiment of the present application;
fig. 8 is a schematic structural diagram of a second prism and a fifth groove provided in an embodiment of the present application;
fig. 9 is a schematic diagram of an incident light beam passing through the fifth groove of fig. 8 at another position.
Description of the reference numerals
A first prism 10; the light incident surface 10a of the first prism; the light-emitting surface 10b of the first prism; a second prism 20; the light incident surface 20a of the second prism; the light-emitting surface 20b of the second prism; a recess 100.
Detailed Description
It should be noted that, in the present application, technical features in examples and embodiments may be combined with each other without conflict, and the detailed description in the specific embodiment should be understood as an explanation of the gist of the present application and should not be construed as an improper limitation to the present application. In the description of the examples of the present application, "μm" means the international unit of micrometers, "μm2"means international units square microns, and the present application is described in further detail below with reference to the figures and specific examples.
Referring to fig. 1 to 4, an aspect of the present disclosure provides a light splitting lens assembly, which includes a first prism 10, a second prism 20, and a reflective material. The light incident surface 20a of the second prism and/or the light emitting surface 10b of the first prism are provided with grooves 100. That is, the groove 100 may be disposed on the light incident surface 20a of the second prism, the groove 100 may be disposed on the light emitting surface 10b of the first prism, and the grooves 100 may be disposed on both the light incident surface 20a of the second prism and the light emitting surface 10b of the first prism. The light incident surface 20a of the second prism is attached to the light emergent surface 10b of the first prism. The reflective substance fills the space within the recess 100. Part of the incident light beam D is emitted from the light emitting surface 20b of the second prism as a transmitted light beam E (see fig. 3). Another part of the incident light beam D is reflected by the reflective material to form a reflected light beam F (see fig. 3).
The incident beam D is divided into the transmission beam E and the reflection beam F through the second prism 20 and the reflection substance, so that the incident beam D of all wave bands can be supported to realize light intensity splitting, the influence and the limitation of the wavelength of the incident beam D are avoided, different thin film filters are avoided when the incident beam D of different wavelengths is split, the structure is simple, and the universality is high.
In one embodiment, referring to fig. 3, another part of the incident beam D is totally reflected by the reflective material. The other part of the incident beam D is totally reflected by the reflecting substance, so that the incident beam D passing through the reflecting substance can be prevented from being reflected and refracted at the same time, and the splitting ratio can be controlled conveniently.
In an embodiment, referring to fig. 2, fig. 4, fig. 7 and fig. 8, a groove 100 may be formed on the light incident surface 20a of the second prism and/or the light emergent surface 10b of the first prism by photolithography and etching. Specifically, Etching processing is performed by Reactive Ion Etching (RIE), inductively coupled plasma Etching (ICP), or the like.
For example, a layer of photoresist may be coated on the light incident surface 20a of the second prism and/or the light emitting surface 10b of the first prism, a corresponding design pattern is processed by photolithography, and then etched perpendicular to the light incident surface 20a of the second prism and/or the light emitting surface 10b of the first prism by an inductively coupled ion beam etching (ICP) or reactive ion beam etching (RIE) process, wherein the conditions are controlled during the etching process such that the steepness of the inner wall of the groove 100 is 90 °, and then the photoresist is removed to obtain the set groove 100. The space of the groove 100 may also be filled with a reflective material by a coating technique, and then the reflective material is ground and thinned to prevent the reflective material from being coated on the light incident surface 20a of the second prism and/or the light emitting surface 10b of the first prism where the groove 100 is located.
In one embodiment, referring to fig. 3, the refractive index of the reflective material is smaller than the refractive index of the first prism 10. In this manner, the incident light beam D enters the optically thinner medium from the optically denser medium to enable total reflection at the interface of the first prism 10 and the reflective substance.
Specifically, the reflective substance may be air or another substance having a refractive index smaller than that of the first prism 10. When the reflecting substance is air, since the refractive index of air is generally smaller than that of the first prism 10, total reflection can be achieved at a low cost.
In an embodiment, referring to fig. 3, the light splitting lens assembly includes an adhesive layer for adhering the light incident surface 20a of the second prism and the light emitting surface 10b of the first prism. In this way, the first prism 10 and the second prism 20 are integrated. The refractive index of the glue layer, the refractive index of the first prism 10 and the refractive index of the second prism 20 are equal. Thus, the incident beam D has a constant optical path through the first prism 10, the adhesive layer and the second prism 20. The incident light beam D is prevented from deviating when entering the light incident surface 20a of the second prism from the light emitting surface 10b of the first prism.
In some embodiments, the refractive index of the glue layer may be approximately equal to the refractive index of the first prism 10 and the refractive index of the second prism 20, and the incident light beam D propagating between the first prism 10, the glue layer, and the second prism 20 may be slightly shifted.
In an embodiment, referring to fig. 1 and fig. 3, the light incident surface 10a of the first prism is disposed opposite to the light emitting surface 10b of the first prism, and the light incident surface 20a of the second prism is disposed opposite to the light emitting surface 20b of the second prism. Thus, the light incident surface 10a of the first prism, the light emitting surface 10b of the first prism, the light incident surface 20a of the second prism, and the light emitting surface 20b of the second prism may be distributed at intervals along the direction of the optical axis of the incident light beam D, so that the first prism 10 and the second prism 20 can be tightly matched, and the first prism 10 and the second prism 20 do not need to be coupled by a free space optical path, and occupy a smaller space.
In one embodiment, referring to fig. 3, the incident light beam D is a collimated light beam. I.e. the incident light beam D is parallel light. The light incident surface 10a of the first prism is perpendicular to the optical axis of the incident light beam D. That is, the incident light beam D enters the first prism 10 along the normal. Thus, the incident light beam D is not deflected when entering the first prism 10. The light incident surface 20a of the second prism makes an angle of 45 ° with the optical axis of the incident light beam D. The light emitting surface 10b of the first prism forms an angle of 45 ° with the optical axis of the incident light beam D. That is, the incident angle of the incident beam D is 45 °. The critical angle of the reflecting substance is C, wherein C is less than or equal to 45 degrees. Since the critical angle C of the reflective material is 45 ° or less, the incident angle of the incident beam D is 45 °, that is, the incident angle of the incident beam D is greater than the critical angle C of the reflective material, and thus, the incident beam D is totally reflected at the reflective material. In addition, the optical axis of the reflected beam F is 90 ° to the optical axis of the incident beam D. After the direction of the incident beam D is determined, other devices are arranged in the direction which forms an angle of 90 degrees with the optical axis of the incident beam D, and the assembling process between the light splitting lens group and the other devices is simplified.
Illustratively, the refractive index of the first prism 10 is 1.6, and the refractive index of the reflective substance is 1.1. The incident beam D enters the reflective material from the first prism 10, and as can be seen from the law of total reflection sinC being n1/n2, n1, i.e., the refractive index of the reflective material, is 1.1, and n2, i.e., the refractive index of the first prism 10, is 1.6, so the critical angle of total reflection C here is about 43.3 °, since the incident angle of the incident beam D is 45 °, the incident angle of the incident beam D is greater than 43.3 °, and the incident beam D is totally reflected at the interface between the first prism 10 and the reflective material.
In an embodiment, referring to fig. 3, the refractive indexes of the first prism 10 and the second prism 20 are the same, and the light emitting surface 20b of the second prism is perpendicular to the optical axis of the incident light beam D. The incident beam D is a collimated beam. The light incident surface 10a of the first prism is perpendicular to the optical axis of the incident light beam D. The light incident surface 20a of the second prism makes an angle of 45 ° with the optical axis of the incident light beam D. The light emitting surface 10b of the first prism forms an angle of 45 ° with the optical axis of the incident light beam D. The critical angle of the reflecting substance is C, wherein C is less than or equal to 45 degrees. Then, the incident beam D enters the first prism 10 along the normal, a part of the incident beam D enters the second prism 20 through the light emitting surface 10b of the first prism and the light incident surface 20a of the second prism, and because the refractive indexes of the first prism 10 and the second prism 20 are the same, the light path of a part of the incident beam D entering the second prism 20 is unchanged, and then the incident beam D is emitted from the light emitting surface 20b of the second prism along the normal of the light emitting surface 20b of the second prism to form a transmitted beam E. Thus, the deviation displacement of the transmitted beam E is small, and the position of other devices is convenient to set when the beam splitting lens group is used for other optical devices.
In some embodiments, since the reflected light beam F may be required to have other optical path directions in actual production requirements, the critical angle of the reflective material may be changed by changing the reflective material according to the requirement for the optical path direction of the reflected light beam F. The light path direction of the reflected light beam F can also be adjusted by changing the angle between the light emitting surface 10b of the first prism and the optical axis of the incident light beam D, the angle between the light incident surface 20a of the second prism and the optical axis of the incident light beam D, and so on.
In one embodiment, referring to fig. 3, the steepness of the sidewall of the groove 100 is 90 °. Thus, diffraction of the incident light beam D in the groove 100 is avoided.
In an embodiment, referring to fig. 1 and fig. 2, a projection area of the groove 100 on a plane where the light emitting surface 10b of the first prism is located is S, where S is greater than the minimum wavelength of the incident light beam D. Thus, diffraction of the incident light beam D within the groove 100 is further avoided.
In one embodiment, referring to fig. 2, the number of the grooves 100 is plural. The areas of at least two grooves 100 are not equal. The area of the groove 100 is the area S of the projection of the groove 100 on the plane of the light incident surface 20a of the second prism. The areas of at least two grooves 100 are not equal, the areas of two grooves 100 may not be equal, the areas of three grooves 100 may not be equal, the areas of four grooves 100 may not be equal, and the areas of all grooves 100 may not be equal. In this manner, the splitting ratio of transmission and reflection can be controlled by controlling the area of the groove 100.
The spot size of incident light beam D is unrestricted in this application embodiment, can support the beam split ratio demand of the incident light beam D of different spot sizes. That is to say, the beam splitting lens group provided in the embodiment of the present application can realize intensity splitting of incident beams D with different wavelengths and different spot sizes through the same structure. The splitting ratio refers to the ratio between the transmitted beam E and the reflected beam F into which the incident beam D is split.
In another embodiment, referring to fig. 7 to 9, all the grooves 100 have the same area. In this manner, the splitting ratio can be controlled by controlling the number of grooves 100 through which the incident light beam D passes.
In one embodiment, referring to fig. 7, the plurality of grooves 100 are distributed in an array. Therefore, the process flow of design and production manufacturing is convenient to simplify.
In another embodiment, referring to fig. 8 and 9, the plurality of grooves 100 are distributed in an arithmetic progression according to a certain rule. The splitting ratio of the incident beam D can be controlled by controlling the number of grooves 100 through which the spot of the incident beam D passes and/or the total area of the grooves 100.
In some embodiments, the plurality of grooves 100 may also be irregularly distributed.
In some embodiments, the projection of the groove 100 on the plane where the light-emitting surface 10b of the first prism is located is circular. Of course, the projection of the groove 100 on the plane where the light-emitting surface 10b of the first prism is located may also be an ellipse or a polygon, such as a triangle, a quadrangle or a pentagon. The specific size of the area S of the projection of the groove 100 on the plane where the light-emitting surface 10b of the first prism is located can also be adjusted according to the actual requirement of the splitting ratio. The number of the grooves 100 and the arrangement rule of the grooves 100 can also be adjusted according to the actual requirement of the splitting ratio.
For example, in an embodiment, referring to fig. 8 and 9, the refractive index of the first prism 10, the refractive index of the adhesive layer, and the refractive index of the second prism 20 are all 1.6, and the refractive index of the reflective material may be 1.1. The spot area of the incident beam D was 2000 μm2The area of the groove 100 is 100 μm2In optical communication, the wavelength of the incident light beam D is usually less than 1.55 μm, where the wavelength of the incident light beam D is set to be 1.55 μm, and the size of the groove 100 is much larger than the wavelength of the incident light beam D, so as to avoid diffraction. All the grooves 100 have equal areas, and the grooves 100 are distributed in a regular arithmetic progression. In at leastThe splitting ratio is controlled by controlling the number of grooves 100 through which the light spot of the same incident light beam D passes. In fig. 8, the spot of the incident beam D passes through the 4 grooves 100, and the splitting ratio of the transmitted beam E and the reflected beam F is 4: 1. In fig. 9, the spot of the incident beam D passes through 8 grooves 100, and the splitting ratio of the transmitted beam E and the reflected beam F is 3: 2.
In another embodiment, referring to fig. 4 to 6, the refractive index of the first prism 10, the refractive index of the adhesive layer, and the refractive index of the second prism 20 are still 1.6, and the refractive index of the reflective material may still be 1.1. The spot area of the incident beam D was 400 μm2In optical communication, the wavelength of the incident light beam D is usually less than 1.55 μm, where the wavelength of the incident light beam D is set to be 1.55 μm, and the size of the groove 100 is much larger than the wavelength of the incident light beam D, so as to avoid diffraction. Three grooves 100 are formed in the light incident surface 20A of the second prism, the areas of the three grooves 100 are not equal, and for convenience of description, the three grooves 100 are respectively marked as 100A, 100B and 100C, wherein the area of 100A is 100 μm2100B has an area of 300. mu.m2100C area 200 μm2. In fig. 4, when the spot of the incident beam D passes through the groove 100A, the splitting ratio of the transmitted beam E and the reflected beam F is 3: 1. In fig. 5, when the spot of the incident beam D passes through the groove 100B, the splitting ratio of the transmitted beam E and the reflected beam F is 1: 3. In fig. 6, when the spot of the incident beam D passes through the groove 100C, the splitting ratio of the transmitted beam E and the reflected beam F is 1: 1. That is, the splitting ratio can be controlled by controlling the spot of the same incident beam D to pass through the grooves 100 of different areas.
Another aspect of the embodiments of the present application further provides a light splitting detection device, where the light splitting detection device includes the light splitting lens group and the receiver in any of the embodiments. The receiver is used to convert the transmitted beam E or the reflected beam F into an electrical signal.
That is, the transmitted beam E may be used as the probe beam and the reflected beam F for continued transmission. The reflected beam F can also be used as a probe beam and the transmitted beam E for continued transmission.
In particular, the receiving means may comprise a detector chip. For example, the detector chip is a PIN photo detector diode. The PIN photo-detection diode is used to convert the transmitted beam E or the reflected beam F into a current signal. The transmitted beam E or the reflected beam F is transmitted to the photosensitive surface of the PIN photoelectric detection diode, and the transmitted beam E or the reflected beam F is converted into a current signal.
The spectroscopic detection device provided by the embodiment of the application can be packaged by a COB (chips on Board). The chip on board is packaged without adopting a free space optical path coupling mode, so that the volume is small, the packaging is simple, and the cost is low.
The light splitting lens group provided by the embodiment of the present application can also be used for an optical device with specific requirements, for example, the light splitting lens group provided by the embodiment of the present application can be used for an optical attenuator, and light energy attenuation is performed on an incident light beam D emitted by a laser through light splitting.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A beam splitting lens assembly, comprising:
a first prism;
a groove is formed in the light incident surface of the second prism and/or the light emergent surface of the first prism, and the light incident surface of the second prism is attached to the light emergent surface of the first prism; and
the reflecting substance fills the space in the groove, part of the incident beam is emitted from the light-emitting surface of the second prism to form a transmission beam, and the other part of the incident beam is reflected to form a reflected beam by the reflecting substance.
2. The splitting lens assembly of claim 1 wherein another portion of said incident beam is totally reflected by said reflective material.
3. The splitting lens group of claim 2, wherein the refractive index of the reflective substance is less than the refractive index of the first prism.
4. The splitter lens assembly of claim 1, wherein the splitter lens assembly comprises a glue layer, the glue layer is used for bonding the light incident surface of the second prism and the light emitting surface of the first prism, and the refractive index of the glue layer, the refractive index of the first prism, and the refractive index of the second prism are equal.
5. The splitting lens assembly of claim 1, wherein the light incident surface of the first prism and the light exiting surface of the first prism are disposed opposite to each other, and the light incident surface of the second prism and the light exiting surface of the second prism are disposed opposite to each other.
6. The splitter lens assembly of claim 5, wherein the incident light beam is a collimated light beam, the incident surface of the first prism is perpendicular to the optical axis of the incident light beam, the incident surface of the second prism forms an angle of 45 ° with the optical axis of the incident light beam, the exit surface of the first prism forms an angle of 45 ° with the optical axis of the incident light beam, and the critical angle of the reflective material is C, wherein C is not greater than 45 °.
7. A beam splitting lens group according to any one of claims 1 to 6, wherein the steepness of the side wall of said groove is 90 °;
and/or the projection area of the groove on the plane where the light-emitting surface of the first prism is located is S, wherein S is larger than the minimum wavelength of the incident light beam.
8. The beam splitting lens assembly of any one of claims 1 to 6, wherein the number of the grooves is plural;
the areas of at least two grooves are not equal, or the areas of all the grooves are equal.
9. The beam splitting lens assembly of claim 8 wherein a plurality of said grooves are arranged in an array.
10. A spectroscopic probe apparatus, comprising:
a spectroscopical lens group according to any one of claims 1 to 9; and
a receiver for converting the transmitted or reflected beams into electrical signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010561922.5A CN111708174A (en) | 2020-06-18 | 2020-06-18 | Spectroscopic lens group and spectroscopic probe |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010561922.5A CN111708174A (en) | 2020-06-18 | 2020-06-18 | Spectroscopic lens group and spectroscopic probe |
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| CN111708174A true CN111708174A (en) | 2020-09-25 |
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| CN202010561922.5A Pending CN111708174A (en) | 2020-06-18 | 2020-06-18 | Spectroscopic lens group and spectroscopic probe |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1127472A (en) * | 1997-06-30 | 1999-01-29 | Dainippon Screen Mfg Co Ltd | Image recorder |
| US7023620B1 (en) * | 2003-07-03 | 2006-04-04 | Research Electro-Optics, Inc. | Beam array pitch controller |
| CN102636881A (en) * | 2012-05-03 | 2012-08-15 | 福州百讯光电有限公司 | Adjustable light splitter |
| CN102971671A (en) * | 2010-07-06 | 2013-03-13 | 精工爱普生株式会社 | Light source device and projector |
| CN105572881A (en) * | 2015-12-17 | 2016-05-11 | 中国人民解放军国防科学技术大学 | Free space light beam splitter adjustable in splitting ratio |
| CN111290087A (en) * | 2020-03-30 | 2020-06-16 | 武汉光谷信息光电子创新中心有限公司 | Light splitting detector |
-
2020
- 2020-06-18 CN CN202010561922.5A patent/CN111708174A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1127472A (en) * | 1997-06-30 | 1999-01-29 | Dainippon Screen Mfg Co Ltd | Image recorder |
| US7023620B1 (en) * | 2003-07-03 | 2006-04-04 | Research Electro-Optics, Inc. | Beam array pitch controller |
| CN102971671A (en) * | 2010-07-06 | 2013-03-13 | 精工爱普生株式会社 | Light source device and projector |
| CN102636881A (en) * | 2012-05-03 | 2012-08-15 | 福州百讯光电有限公司 | Adjustable light splitter |
| CN105572881A (en) * | 2015-12-17 | 2016-05-11 | 中国人民解放军国防科学技术大学 | Free space light beam splitter adjustable in splitting ratio |
| CN111290087A (en) * | 2020-03-30 | 2020-06-16 | 武汉光谷信息光电子创新中心有限公司 | Light splitting detector |
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Application publication date: 20200925 |