CN111702750A - A vacuum coating machine workpiece fixture transfer manipulator - Google Patents

Abstract

The invention discloses a vacuum coating machine workpiece fixture rotary cabin manipulator, which is characterized in that the manipulator provides powerful support and the bearing of a main frame and a base thereof through the self motion functions of back and forth stretching, up and down lifting, rotation and translation along a guide rail, bayonets of an upper claw hand and a lower claw hand, fixture design corresponding to a fixture block on an inserted link, and a support plate between the upper claw hand and the lower claw hand, so that the clamping of a single large fixture is realized, the fixture can be accurately transferred to a functional cabin for installation and then returned for clamping of a next fixture, the manipulator of the vacuum coating machine is suitable for the fixture with larger volume or weight, and the coating machine does not need to integrally convey the whole workpiece rack, so that a cabin door with an overlarge size is not needed to be specially designed, the manufacturing cost is reduced, the cabin rotating method of the fixture effectively reduces the times of vacuum breaking, and the coating of different film systems is simultaneously carried out by heating the fixture in a heating cabin and then distributing the coating cabins of different film systems, the processing efficiency is greatly improved.

Description

A vacuum coating machine workpiece fixture transfer manipulator

technical field

The invention relates to a manipulator, in particular to a multi-chamber type vacuum coating machine workpiece fixture transfer manipulator.

Background technique

The traditional single-cabin vertical vacuum coating machine needs to manually mount and hang the workpiece to be plated on the fixture (or the mounting plate or hanging rod of the workpiece rack) outside the furnace, and then manually hang the fixture into the furnace piece by piece. Coating is carried out on the workpiece holder.

In recent years, in order to improve the coating efficiency, a multi-chamber vacuum coating machine has appeared. The layout of its chambers includes the following two types: the first one is a linear conveyor guide cabin in the center, and the front and rear ends are the feed cabin and the discharge cabin, respectively. Multiple functional cabins are arranged on its left and right sides; the other is a centrally symmetric satellite layout, with multiple functional cabins radially distributed around the central turnover cabin. Each chamber of the multi-chamber coating machine can perform the functions of different stages of the coating process at the same time, which improves the production capacity and saves the auxiliary time for vacuum breaking and vacuuming. Influence, improve coating quality and stability.

In order to improve the coating efficiency of the above-mentioned multi-chamber vacuum coating machine, the diameter of the workpiece rack in the coating chamber is larger, reaching more than 1500mm, and it needs to accommodate up to 20 or more fixtures, and each fixture is more than one meter high and nearly 150mm wide. -200mm, a fixture weighs dozens of kilograms after loading, and the overall workpiece frame diameter is more than 1500mm. The tools of the above-mentioned multi-chamber coating machine should be transferred in a vacuum state. There are two ways to transfer cabins: one is to transfer the stencils of the entire workpiece rack together as a whole, and the other is to transfer the stencils on the workpiece rack one by one. The former method mostly uses the whole vehicle transfer of the workpiece rack, which is faster and more efficient. However, for large workpiece racks, due to their large size and weight, the structural design requirements are higher; the biggest difficulty is the requirements of the vacuum door of each cabin. The larger the size, the more difficult and expensive it is to design and manufacture. The latter method can avoid the problem of large-sized vacuum chamber doors, but it must be equipped with a manipulator device that transfers the chambers one by one with the fixture in the furnace.

SUMMARY OF THE INVENTION

The technical problem to be solved by the invention is to provide a vacuum coating machine workpiece fixture transfer manipulator, which can adapt to various types of coating production lines, and has a simple and compact structure, which can correspond to smaller coating cabin doors to reduce costs. .

The technical solutions to solve the above technical problems are as follows:

A vacuum coating machine workpiece jig transfer chamber manipulator, the workpiece jig is provided with an upper insertion rod located on the upper end face of the jig and a lower insertion rod located on the lower end face of the jig, and is characterized in that:

It includes a clamping mechanism for clamping the jig, a telescopic mechanism and a lifting mechanism that respectively control the telescopic and lifting of the clamping mechanism, and a rotation mechanism and a translation mechanism for controlling the rotation of the clamping mechanism, wherein:

The clamping mechanism includes a support plate and a claw hand, the claw hand includes an upper claw hand arranged at the top of the support plate and used to clamp the upper insertion rod, and a claw hand arranged at the bottom of the support plate The lower claw hand is parallel to the upper claw hand and is used to clamp the lower insertion rod; the front ends of the upper claw hand and the lower claw hand are provided with bayonet for clamping the upper and lower claw hands of the clamping tool. Lower plunger.

The telescopic mechanism includes a transverse cylinder parallel to the horizontal plane, a transverse cylinder fixing seat for fixing the transverse cylinder, and a transverse rail arranged on the upper and lower ends of the transverse cylinder fixing seat and extending in the same direction as the gripper. The fixing plate is arranged on the horizontal rail on the side of the horizontal rail fixing plate facing the gripper, and is used to connect the horizontal rail and the horizontal rail slider of the gripper. The end of the horizontal piston push rod of the horizontal cylinder is connected to the the support plate is fixedly connected;

The lifting mechanism includes a main frame fixing seat, a main frame fixed on the main frame fixing seat and a longitudinal cylinder fixing seat arranged on the upper end face of the main frame fixing seat, and a longitudinal cylinder arranged on the upper end face of the longitudinal cylinder fixing seat, The longitudinal rail arranged on the inner side wall of the main frame is used to connect the longitudinal rail and the longitudinal rail slider on the telescopic mechanism. The longitudinal piston push rod of the longitudinal cylinder extends vertically upward, and the longitudinal piston The end of the push rod is fixedly connected with the bottom of the telescopic mechanism;

The rotating mechanism includes a moving base plate arranged below the main frame fixing seat, a cross roller bearing used to connect the main frame fixing seat and the moving base plate, and a rotating device arranged on the lower end surface of the moving base plate, the rotating The rotating shaft of the device runs through the movable bottom plate and is fixedly connected with the main frame fixing seat, so that the main frame fixing seat can rotate with the rotation of the rotating shaft;

The translation mechanism includes a pair of translation guide rails arranged on the lower end surface of the moving base plate, a sliding table fixing plate arranged on the outer side of the translation guide rail, and a sliding table fixed on the sliding table fixing plate and parallel to the translation guide rail. Assembly, connecting block for connecting the moving base plate and the sliding table fixed plate.

Further, the support plate is a T-shaped plate, and the web of the T-shaped support plate is oriented in the same direction as the extension direction of the upper claw hand and the lower claw hand, and is located in the middle of the extension direction of the upper claw hand and the lower claw hand. on the axis.

Further, the end of the transverse piston push rod of the transverse cylinder and the support plate are fixedly connected by bolts, and the web plate of the support plate excavates a gap for accommodating the head of the bolt at the position of the bolt.

Further, the horizontal rail fixing plates are two pieces, which are respectively arranged on the top and bottom of the horizontal cylinder fixing seat, and are respectively an upper horizontal rail fixing plate and a lower horizontal rail fixing plate, and the horizontal rail fixing plate is located on the The side walls of the horizontal rail fixing plate in the direction of both sides of the support plate are provided with vertical plates for connecting with the vertical rail sliders, and the upper horizontal rail fixing plate and the lower horizontal rail fixing plate are facing. A groove is excavated in the side wall of the upper and lower claw-hand directions for allowing the upper and lower insertion rods to pass through; The lower horizontal rail is fixed on the lower horizontal rail on the upper surface of the upper plate; The lower rail slider of the claw hand.

Further, a stepped through hole is excavated at the center of the upper end face of the main frame fixing seat, and the rotating shaft and the main frame fixing seat are fixedly connected through a connecting seat, and the connecting seat is provided with protrusions on both sides of the upper end. The sleeve of the shoulder, the connecting seat is sleeved on the rotating shaft and connected by a flat key, the shoulder corresponds to the step of the stepped through hole, and the connecting seat and the main Connection of frame mounts.

Further, the main frame includes side plates located on both sides of the support plate, a top plate located at the top of the two side plates and connecting the two side plates, and at least one plate located on the side where the transverse cylinder is located for connecting the two sides. The connecting plate of the plate, the side plate, the top plate and the connecting plate are all provided with at least one circular hole.

The present invention has the following technical effects:

(1) The vacuum coating machine workpiece fixture transfer manipulator, through its own motion function of forward and backward, up and down, up and down, the bayonet of the upper and lower grippers and the fixture design correspond to the clamps on the insert rod, and the upper and lower jaws. The support plate between the grippers provides strong support and the bearing of the main frame and its base, realizing the clamping of a single large-scale fixture;

(2) Combined with the front and rear telescopic, up and down lifting functions of the manipulator itself, and the overall rotation and translation movement functions of the support system of the telescopic and lifting mechanism, the workpiece fixtures distributed in each compartment can be clamped one by one and realized one by one. The transfer cabin does not need to transport the entire workpiece rack as a whole, so the size of the door of the vacuum coating machine is not too high, so it avoids the high technical requirements caused by the design and manufacture of large-sized vacuum cabin doors, reducing The processing difficulty and cost are reduced, and the operation reliability of the multi-chamber vacuum coating machine is improved and the operation cost is reduced.

(3) The movement of the gripper of the manipulator in the directions of X, Y and Z axes is realized by the guide rail, so that the workpiece jig can move smoothly during the transfer process, avoiding the shaking or collision of the workpiece in the jig. Moreover, the structure is simple and compact, the maintenance cost is low, and the reliability is high.

(4) This manipulator solution is suitable for a layout coating machine in which multiple functional cabins are distributed at the front and rear ends and the left and right sides of the central translation guide rail. It is also suitable for a multi-cabin layout coating machine with radial distribution from the center to the periphery.

Description of drawings

Fig. 1 is the top view of the manipulator;

Fig. 2 is A-A in Fig. 1 sectional view;

Fig. 3 is the side view of the direction B in Fig. 1;

Fig. 4 is an enlarged view of the region at C in Fig. 2;

Fig. 5 is an enlarged view of the area at D in Fig. 3;

Figure 6 is an enlarged view of the region at E in Figure 3;

Fig. 7 is the axonometric view of one of the angles of the manipulator;

Fig. 8 is the axonometric view of another angle of the manipulator;

Among them: fixture 1; upper insertion rod 1-2; lower insertion rod 1-3; chuck 1-4; 2-1 support plate; 2-11 web plate; 2-12 notch; 2-22 lower gripper; 2-23 bayonet; 2-3 transverse cylinder; 2-31 transverse piston push rod; 2-4 transverse cylinder holder; 2-51 upper rail fixing plate; 2-52 lower rail Fixed plate; 2-53U-shaped groove; 2-54 vertical plate; 2-61 upper rail; 2-62 lower rail; 2-71 upper rail slider; 2-72 lower rail slider; 3- 1 main frame fixing seat; 3-21 side plate; 3-22 top plate; 3-23 connecting plate; 3-3 round hole; 3-4 longitudinal cylinder fixing seat; 3-5 longitudinal cylinder; 3-51 longitudinal piston push rod ;3-6 longitudinal rail; 3-7 longitudinal rail slider; 4-1 mobile bottom plate; 4-2 cross roller bearing; 4-3 rotating device; 4-31 rotating shaft; 4-4 connecting seat; 4-41 convex Shoulder; 4-5 flat key; 4-6 fastening bolt; 5-1 translation guide rail; 5-2 guide rail fixing plate; 5-3 sliding table fixing plate; 5-4 sliding table assembly; 5-5 connecting block.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

It should be noted that if there are directional indications (such as up, down, left, right, front, back, top, bottom, inside, outside, vertical, horizontal, vertical, counterclockwise, clockwise, circumferential direction, radial direction, axial direction, etc.), the directional indication is only used to explain the relative positional relationship, movement situation, etc. When a change occurs, the directional indication also changes accordingly.

The invention provides a vacuum coating machine workpiece fixture transfer manipulator.

As shown in FIG. 1 to FIG. 8 , the workpiece jig transfer manipulator includes a clamping mechanism for clamping the jig 1, and a telescopic mechanism and a lifting mechanism for controlling the expansion, lifting and rotation of the clamping mechanism respectively, and Control the rotation mechanism and translation mechanism of the clamping mechanism. The fixture 1 clamped by the manipulator is provided with an upper insertion rod 1-2 located on the upper end surface of the fixture 1 and a lower insertion rod 1-3 located on the lower end surface of the fixture 1. , a clamping head 1-4 is respectively set in the middle position of the upper insertion rod 1-2 and the lower insertion rod 1-3.

The clamping mechanism includes a support plate 2-1, a claw hand arranged on the support plate 2-1, the claw hand includes an upper claw hand 2-21 for clamping the upper insertion rod 1-2, and a claw hand 2-21 for clamping the lower rod. The lower claw hand 2-22 of the insertion rod 1-3, the upper claw hand 2-21 and the lower claw hand 2-22 are respectively arranged on the top and bottom ends of the support plate 2-1, the upper and lower claw hands 2-21, 2 -22 is correspondingly provided with a bayonet 2-23 corresponding to the chuck 1-4, the support plate 2-1 is a T-shaped plate, and the orientation of the web 2-11 is the same as that of the upper and lower grippers 2-21, 2-22 The extension directions of the upper and lower grippers 2-21 and 2-22 are the same, and the web 2-11 is located on the central axis of the extension direction of the upper and lower grippers 2-21 and 2-22.

The telescopic mechanism includes a transverse cylinder 2-3 parallel to the horizontal plane, a transverse cylinder fixing base 2-4 for fixing the transverse cylinder 2-3, and a transverse cylinder fixed base 2-4 arranged on the transverse cylinder fixing base 2-4 and extending in the same direction as the gripper. Rail fixing plate, the transverse rail fixing plate is composed of two transverse rail fixing plates, which are respectively arranged on the top and bottom of the transverse cylinder fixing base 2-4, respectively the upper transverse rail fixing plate 2-51 and the lower transverse rail The fixing plate 2-52, the vertical plate 2-7 for connecting with the vertical rail slider 3-7 is arranged on the side wall of the horizontal rail fixing plate in the direction of the two sides of the horizontal rail fixing plate. 54. The upper and lower rail fixing plates 2-51, 2-52 excavate a U-shaped groove 2- 53. The upper and lower claw hands 2-21 and 2-22 are allowed to pass through when the upper and lower insertion rods 1-2 and 1-1 of the clamping tool are moved backward, and the upper and lower claw hands 2- The telescopic strokes of 21 and 2-22 enable the manipulator to work deeper into each compartment, thus adapting to the vacuum coating machine for large-capacity compartments.

The telescopic mechanism also includes horizontal rails arranged on both sides of the horizontal rail fixing plate surface facing the direction end of the claw hand. The horizontal rail includes a pair of upper horizontal rails 2 arranged on the lower end surface of the upper horizontal rail fixing plate 2-51. -61, and a pair of lower horizontal rails 2-62 arranged on the upper end surface of the lower horizontal rail fixing plate 2-52.

The telescopic mechanism also includes a horizontal rail slider for connecting the horizontal rail and the clamping device, and the horizontal rail slider includes an upper horizontal rail slider 2-71 for connecting the upper horizontal rail 2-61 and the upper gripper 2-21, And the lower rail slider 2-72 for connecting the lower rail 2-62 and the lower gripper 2-22, the end of the transverse piston push rod 2-31 of the transverse cylinder 2-3 passes through the support plate 2-1 Bolt fixed connection, the web 2-11 of the support plate 2-1 excavates a gap 2-12 for accommodating the head of the bolt at the position of the bolt, so as to facilitate the bolt connection of the transverse piston push rod 2-31 and the support plate 2- 1. It is also convenient to adjust the tightness of the bolts.

The lifting mechanism includes a main frame fixing base 3-1, a main frame fixed on the main frame fixing base 3-1, and a longitudinal cylinder fixing base 3-4 arranged on the upper end face of the main frame fixing base 3-1, which is arranged on the longitudinal cylinder fixing base 3-4 The vertical cylinder 3-5 on the upper end face, the vertical rail 3-6 arranged on the inner side wall of the main frame, is used to connect the vertical rail 3-6 with the vertical rail slider 3-7 of the telescopic mechanism, which is fixed on the horizontal rail 3-6. The outer side wall of the vertical plate 2-54 of the rail fixing plate, the longitudinal piston push rod 3-51 of the longitudinal cylinder 3-5 extends vertically upward, and the end of the longitudinal piston push rod 3-51 is fixedly connected with the lower horizontal rail fixing plate 2-52 .

The main frame fixed to the main frame fixing seat 3-1, specifically, includes side plates 3-21 located on both sides of the support plate 2-1, and a top plate 3-21 located at the top of the side plate 3-21 connecting the two side plates. 22. Five connecting plates 3-23 located on the side of the horizontal cylinder 2-3 for connecting the two side plates 3-21, the side plates 3-21, the top plate 3-22 and the connecting plates 3-23 are all open There are large-area round holes 3-3 to reduce the weight of the entire manipulator.

Specifically, the number of longitudinal rails 3-6 arranged on the inner side wall of the main frame is eight, and one pair is respectively provided at the bottom and the top of the inner side walls of the two side plates 3-21 of the main frame.

The rotating mechanism also includes a moving base plate 4-1 arranged below the main frame fixing base 3-1, and a cross roller bearing 4-2 for connecting the main frame fixing base 3-1 and the moving base plate 4-1, which is arranged on the moving base plate 4-1 The rotating device 4-3 on the lower end face, the rotating shaft 4-31 of the rotating device 4-3 penetrates through the moving base plate 4-1 and is fixedly connected with the main frame fixing seat 3-1, so that the main frame fixing seat 3-1 can follow the rotating shaft 4-31 turns while rotating.

The fixed connection between the rotating shaft 4-31 of the rotating device 4-3 and the main frame fixing seat 3-1, specifically, a stepped through hole is excavated at the center of the upper end face of the main frame fixing seat 3-1, and the rotating shaft 4-31 is connected to the main frame fixing seat 3-1. The main frame fixing seat 3-1 is fixedly connected through a connecting seat 4-4, the connecting seat 4-4 is a sleeve with shoulders 4-41 on both sides of the upper end, and the connecting seat 4-4 is sleeved with the rotating shaft 4-31 Afterwards, they are connected by flat keys 4-5. The shoulders 4-41 correspond to the steps of the stepped through holes, and the connecting seat 4-4 is fixed to the main frame by tightening bolts 4-6 at the steps. The connection of the seat 3-1, and the rotating device 4-3 can be a rotary cylinder or an electric motor.

The translation mechanism includes a pair of translation guide rails 5-1 (two translation guide rails 5-1 are located on both sides of the rotating device 4-3) arranged on the lower end surface of the moving base plate 4-1, and are arranged outside the pair of translation guide rails 5-1. The sliding table fixing plate 5-3, which is fixed on the sliding table fixing plate 5-3 and is parallel to the sliding table assembly 5-4 of the translation guide rail 5-1, is used to connect the moving base plate 4-1 and the sliding table fixing plate 5- 3 connection blocks 5-5;

The sliding table assembly 5-4, which is fixed on the sliding table fixing plate 5-3 and is parallel to the translation guide rail 5-1, can be a rodless cylinder sliding table, which is a stereotyped outsourcing part; or, the sliding table assembly 5-4 can be The module slide assembly 5-4 and the electric drive assembly are used, wherein the module slide is a complete set of outsourced parts.

Claims (6)

1. A rotating cabin manipulator of a workpiece jig of a vacuum coating machine is provided with an upper inserted rod (1-2) positioned on the upper end surface of the jig (1) and a lower inserted rod (1-1) positioned on the lower end surface of the jig (1),

including being used for the centre gripping fixture of tool (1), and control respectively fixture is flexible, the telescopic machanism, the elevating system that go up and down, and control fixture changes rotary mechanism and the translation mechanism in cabin, wherein:

the clamping mechanism comprises a supporting plate (2-1) and a claw, wherein the claw comprises an upper claw (2-21) which is arranged at the top end of the supporting plate (2-1) and is used for clamping the upper inserted link (1-2), and a lower claw (2-22) which is arranged at the bottom end of the supporting plate (2-1) and is used for clamping the lower inserted link (1-1) and is parallel to the upper claw (2-21); bayonets (2-23) are arranged at the front ends of the upper claw hand (2-21) and the lower claw hand (2-22) and used for clamping the upper and lower inserted rods (1-2, 1-3) of the clamping jig;

the telescopic mechanism comprises a transverse cylinder (2-3) parallel to a horizontal plane, a transverse cylinder fixing seat (2-4) used for fixing the transverse cylinder, a transverse rail fixing plate arranged at the upper end and the lower end of the transverse cylinder fixing seat (2-4) and extending in the same direction as the claw, a transverse rail arranged on one side of the transverse rail fixing plate facing the claw, and a transverse rail sliding block used for connecting the transverse rail and the claw, wherein the tail end of a transverse piston push rod (2-31) of the transverse cylinder (2-3) is fixedly connected with the supporting plate (2-1);

the lifting mechanism comprises a main frame fixing seat (3-1), a longitudinal cylinder fixing seat (3-4) which is fixed on the upper end surface of the main frame fixing seat (3-1) and is used for fixing a main frame of the main frame fixing seat (3-1), a longitudinal cylinder (3-5) which is arranged on the upper end surface of the longitudinal cylinder fixing seat (3-4), a longitudinal rail (3-6) which is arranged on the inner side wall of the main frame and is used for connecting the longitudinal rail (3-6) with a longitudinal rail sliding block (3-7) on the telescopic mechanism, a longitudinal piston push rod (3-51) of the longitudinal cylinder (3-5) vertically extends upwards, and the tail end of the longitudinal piston push rod (2-51) is fixedly connected with the bottom of the telescopic mechanism;

the rotating mechanism comprises a moving bottom plate (4-1) arranged below the main frame fixing seat (3-1), a crossed roller bearing (4-2) used for connecting the main frame fixing seat (3-1) with the moving bottom plate (4-1), and a rotating device (4-3) arranged on the lower end face of the moving bottom plate (4-1), wherein a rotating shaft (4-31) of the rotating device (4-3) penetrates through the moving bottom plate (4-1) and is fixedly connected with the main frame fixing seat (3-1), so that the main frame fixing seat (3-1) can rotate along with the rotation of the rotating shaft (4-31);

the translation mechanism comprises a pair of translation guide rails (5-1) arranged on the lower end face of the moving bottom plate (4-1), a sliding table fixing plate (5-3) arranged on the outer side of the translation guide rails (5-1), a sliding table assembly (5-4) fixed on the sliding table fixing plate (5-3) and parallel to the translation guide rails (5-1), and a connecting block (5-5) used for connecting the moving bottom plate (4-1) and the sliding table fixing plate (5-3).

2. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 1, characterized in that: the supporting plate (2-1) is a T-shaped plate, and a web plate (2-11) of the T-shaped supporting plate (2-1) faces the same direction as the extending direction of the upper claw hand (2-21) and the lower claw hand (2-22) and is positioned on a central axis of the extending direction of the upper claw hand (2-21) and the lower claw hand (2-22).

3. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 2, characterized in that: the tail end of a transverse piston push rod (2-31) of the transverse cylinder (2-3) is fixedly connected with the supporting plate (2-1) through a bolt, and a gap (2-12) used for accommodating the head of the bolt is excavated at the position of the bolt of a web plate (2-11) of the supporting plate (2-1).

4. The vacuum coating machine workpiece fixture rotary cabin manipulator of any one of claims 1-3, characterized in that: the two transverse rail fixing plates are respectively arranged at the top and the bottom of the transverse cylinder fixing seat (2-4) and respectively comprise an upper transverse rail fixing plate (2-51) and a lower transverse rail fixing plate (2-52), vertical plates (2-54) used for being connected with the longitudinal rail sliding block (3-7) are respectively arranged on the transverse rail fixing plates in the direction of the two sides of the supporting plate (2-1) and on the side walls of the transverse rail fixing plates, and a groove (2-53) used for allowing the upper and lower insertion rods (1-2 and 1-3) to pass through is dug in the side walls of the upward and lower claw hands (2-21 and 2-22) of the upper transverse rail fixing plate (2-51) and the lower transverse rail fixing plates (2-52); the transverse rails comprise upper transverse rails (2-61) arranged on the lower end surfaces of the upper transverse rail fixing plates (2-51) and lower transverse rails (2-62) arranged on the upper end surfaces of the lower transverse rail fixing plates (-52); the transverse rail sliding blocks comprise upper transverse rail sliding blocks (2-71) used for connecting upper transverse rails (2-61) and the upper claws (2-21), and lower transverse rail sliding blocks (2-72) used for connecting lower transverse rails (2-62) and the lower claws (2-22).

5. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 4, characterized in that: the connecting structure is characterized in that a step-type through hole is dug in the center of the upper end face of the main frame fixing seat (3-1), the rotating shaft (4-31) is fixedly connected with the main frame fixing seat (3-1) through a connecting seat (4-4), the connecting seat (4-4) is a sleeve with convex shoulders (4-41) on two sides of the upper end of the connecting seat, the connecting seat (4-4) is connected with the rotating shaft (4-31) in a sleeved mode through a flat key (4-5), the convex shoulders (4-41) correspond to steps of the step-type through hole, and the connecting seat (4-4) is connected with the main frame fixing seat (3-1) through fastening bolts (4-6) in the step.

6. The vacuum coating machine workpiece fixture rotary cabin manipulator of claim 5, characterized in that: the main frame comprises side plates (3-21) positioned on two sides of the supporting plate (1-4), top plates (3-22) positioned at the top ends of the two side plates (3-21) and connected with the two side plates (3-21), and at least one connecting plate (3-23) positioned on one side of the transverse cylinder (2-3) and used for connecting the two side plates (3-21), wherein the side plates (3-21), the top plates (3-22) and the connecting plates (3-23) are all provided with at least one round hole (3-3).

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