CN111690896B - Mask plate supporting device - Google Patents
Mask plate supporting device Download PDFInfo
- Publication number
- CN111690896B CN111690896B CN202010587308.6A CN202010587308A CN111690896B CN 111690896 B CN111690896 B CN 111690896B CN 202010587308 A CN202010587308 A CN 202010587308A CN 111690896 B CN111690896 B CN 111690896B
- Authority
- CN
- China
- Prior art keywords
- support
- bracket
- mask plate
- threaded holes
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003466 welding Methods 0.000 claims description 10
- 238000005498 polishing Methods 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 230000000149 penetrating effect Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229920001621 AMOLED Polymers 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of display equipment, and discloses a mask plate supporting device, which comprises: the bracket fixing seats are sequentially connected end to form a closed annular structure; the support with every support fixing base one-to-one, every to in the support and the support fixing base of one-to-one, the support is installed in the support fixing base adjustably along the direction of height position of support fixing base, the top surface of every support forms the mask plate face of weld, when changing the mask plate, need to polish the new mask plate of rewelding after the mask plate face of weld, can cause the support to reduce along the thickness of mask plate strutting arrangement's direction of height after repeatedly polishing, thereby make mask plate strutting arrangement's whole height reduce, can be through adjusting the mounting height of support on the support fixing base this moment, thereby adjust mask plate strutting arrangement's whole height in order to satisfy the requirement. The number of times of recycling of the mask plate supporting device is increased, so that the cost can be saved, and the resource waste can be avoided.
Description
Technical Field
The invention relates to the technical field of display equipment, in particular to a mask plate supporting device.
Background
The flat panel display includes LCD display, OLED display, PDP display, electronic ink display, and the like, and the OLED display has advantages of lightness, thinness, low power consumption, high contrast, high color gamut, and can implement flexible display, and is a development trend of next-generation displays. The OLED display comprises a PMOLED display and an AMOLED display, wherein the AMOLED display is realized in the following two modes, the first mode adopts an LTPS (low-temperature polysilicon) backboard and an FMM Mask (fine metal Mask) process, and the second mode adopts an Oxide backboard, a WOLED (white organic electroluminescent device) and a color film. The first implementation mode is mainly applied to small-size panels, corresponding to mobile phones and mobile applications; the second implementation is mainly applied to large-size panels, corresponding to televisions and the like. Now. The first implementation is already mature initially, and mass production is realized.
The FMM Mask (fine metal Mask) process is to evaporate an organic electroluminescent material onto an LTPS (low temperature polysilicon) backplane according to a predetermined procedure by an evaporation method, and form a red, green, and blue device by using a pattern on the Mask. Under the same generation, frames used by Open masks are all designed in the same size, the difference is only that a Cover (shielding layer) welded on the upper surface of the Frame is different, the Cover and the upper surface of the Frame are welded and fixed, the upper surface of the Frame needs to be polished after the Cover is replaced, but after polishing is carried out for multiple times, the overall height of the Frame is reduced too much, so that the Frame cannot be used continuously, a new Frame needs to be replaced, and the Frame in the prior art is low in reuse rate and serious in resource waste.
Disclosure of Invention
The invention provides a mask plate supporting device, which increases the recycling times, thereby saving the cost and avoiding the waste of resources.
In order to achieve the purpose, the invention provides the following technical scheme:
a mask supporting device, comprising:
the bracket fixing seats are sequentially connected end to form a closed annular structure;
the supports correspond to the support fixing seats one by one, and in each pair of the supports and the support fixing seats which correspond to one by one, the supports are arranged on the support fixing seats in a position adjustable along the height direction of the support fixing seats, and a mask plate welding surface is formed on the top surface of each support.
The mask plate supporting device comprises a plurality of pairs of supports and support fixing seats, wherein after the supports are fixed on the support fixing seats, the height between the top surfaces of the supports and the bottom surfaces of the support fixing seats is the overall height of the mask plate supporting device, a mask plate welding surface is formed on the top surface of each support, and the mask plates are welded on the mask plate welding surfaces.
Preferably, each pair of the corresponding bracket fixing seats is fixed with the bracket through a screw.
Preferably, in each pair of the corresponding bracket fixing seats and the corresponding bracket, the bracket is fixed on the surface of the bracket fixing seat facing the inner side of the closed ring-shaped structure, the surface of each bracket fixing seat facing the inner side of the closed ring-shaped structure is provided with a plurality of rows of threaded holes, the plurality of rows of threaded holes are arranged along the height direction of the bracket, and each row of threaded holes comprises at least two threaded holes located at the same height; and the bracket corresponding to the bracket fixing seat is provided with a plurality of rows of threaded holes in one-to-one correspondence with the plurality of rows of threaded holes on the bracket fixing seat, or is provided with a groove corresponding to the row of threaded holes on the bracket fixing seat.
Preferably, in each bracket fixing seat, the threaded holes in every two adjacent rows of threaded holes are arranged in a staggered manner.
Preferably, in each pair of support fixing base and the support that corresponds to each other, the support fixing base is including the stair structure that is used for the installing support, the surface of stair structure with the bottom surface of support fixing base is parallel, the stair structure towards the closed loop structure that a plurality of support fixing bases are constituteed is inboard, lower surface forms the loading face that is used for bearing the support among the stair structure, the support set up in the loading face and through running through the support and perpendicular to the locking screw fastening of loading face, the loading face with be provided with the altitude mixture control board subassembly between the support, be provided with the multiunit screw hole of one-to-one on the loading face, support and the altitude mixture control board subassembly.
Preferably, the height adjustment plate assembly includes a plurality of adjustment plates having different heights or a plurality of adjustment plates having the same height.
Preferably, in each pair of support fixing base and the support that corresponds each other, the support fixing base includes the opening orientation the inboard support holding tank of the closed loop structure that a plurality of support fixing bases are constituteed, the support holding tank include lateral wall, lower lateral wall and set up in left side wall and right side wall between last lateral wall and the lower lateral wall, it is provided with a plurality of running through to go up the lateral wall first screw hole of lateral wall thickness direction, the support includes the stiff end, the stiff end includes along the perpendicular to go up the lateral wall direction extend and with the second screw hole of first screw hole one-to-one, the stiff end stretches into in the support holding tank and through being fixed in the altitude mixture control screw of first screw hole and second screw hole install in go up the lateral wall.
Preferably, in each pair of support fixing base and the support that corresponds each other, the support fixing base includes the opening orientation the inboard support holding tank of the closed loop configuration that a plurality of support fixing bases are constituteed, the support holding tank includes lateral wall, left side wall and right side wall, it is provided with a plurality of runs through to go up the lateral wall thickness direction the first screw hole, the support includes the stiff end, the stiff end includes along the perpendicular to go up the lateral wall direction extend and with the second screw hole of first screw hole one-to-one, the stiff end stretches into in the support holding tank and through being fixed in the altitude mixture control screw of first screw hole and second screw hole install in go up the lateral wall.
Preferably, left side wall and right side wall orientation the surface of support holding tank inboard is formed with along the perpendicular to go up the spacing arch that the lateral wall direction extends, the stiff end of support include with spacing recess of spacing complex.
Preferably, in each pair of mutual support fixing base and support that corresponds, the support fixing base includes and is on a parallel with the support fixed wall of support fixing base bottom surface, the support includes the stiff end, the stiff end install in the support fixed wall orientation one side of support fixing base bottom surface, the support fixed wall is including running through a plurality of first screw holes of support fixed wall thickness direction, the stiff end be provided with the second screw hole of first screw hole one-to-one, the stiff end through be fixed in the altitude mixture control screw of first screw hole and second screw hole install in the support fixed wall.
Drawings
Fig. 1 is a schematic front view of a first or second mask supporting device according to an embodiment of the present invention;
FIG. 2 isbase:Sub>A schematic view of the surface of FIG. 1 taken along the direction A-A;
fig. 3 is a schematic view of a surface on which a holder and a holder fixing base are fixed in a first mask supporting apparatus according to an embodiment of the present invention;
fig. 4 is a schematic view of a surface on which a holder and a holder fixing base are fixed in a second mask supporting device according to an embodiment of the present invention;
fig. 5 is a schematic top view of a mask supporting device according to an embodiment of the present invention;
fig. 6 and 7 are schematic front views of third mask supporting devices according to embodiments of the present invention;
fig. 8 is a schematic front view of a fourth mask supporting device according to an embodiment of the present invention;
FIG. 9 is a schematic view of the surface of FIG. 8 taken along the direction B-B;
fig. 10 is a schematic side view of a holder fixing base of a fifth mask supporting device according to an embodiment of the present invention;
fig. 11 is a schematic side view of a holder fixing base of a sixth mask supporting device according to an embodiment of the present invention;
fig. 12 is a schematic top view of a holder fixing seat of a sixth mask supporting device according to an embodiment of the present invention;
fig. 13 is a schematic side view of a holder fixing base of a seventh mask supporting device according to an embodiment of the present invention.
Icon:
1-bracket fixing seat; 2-a support; 3, masking the film plate; 4-screws; 5-a threaded hole; 6-slotting; 7-a bearing surface; 8-a height adjustment plate; 9-a stent-receiving groove; 10-an upper side wall; 11-lower side wall; 12-left side wall; 13-right side wall; 14-a fixed end; 15-height adjustment screws; 16-a limit bump; 17-locking screws.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1, 5, 6, 7, 8 and 13, the present invention provides a mask supporting apparatus, including:
a plurality of bracket fixing seats 1 which are sequentially connected end to form a closed annular structure;
the supports 2 correspond to the support fixing seats 1 one by one, in each pair of the supports 2 and the support fixing seats 1 which correspond to one another, the supports 2 are arranged on the support fixing seats 1 in a position adjustable along the height direction of the support fixing seats 1, and the top surface of each support 2 forms a mask plate welding surface.
The mask plate supporting device comprises a plurality of pairs of supports 2 and support fixing seats 1, after the supports 2 are fixed on the support fixing seats 1, the height between the top surfaces of the supports 2 and the bottom surfaces of the support fixing seats 1 is the overall height of the mask plate supporting device, a mask plate welding surface is formed on the top surface of each support 2, the mask plate 3 is welded on the mask plate welding surface, when the mask plate 3 is replaced, a new mask plate 3 needs to be welded after the mask plate welding surface is polished, after repeated polishing, the thickness of the support along the height direction of the mask plate supporting device is reduced, so that the overall height of the mask plate supporting device is reduced, at the moment, the support is adjustably installed on the support fixing seats 1 along the height direction of the support fixing seats 1, the installation height of the support on the support fixing seats 1 can be adjusted, the distance between the top surfaces of the supports 2 and the bottom surfaces of the support fixing seats 1 is adjusted, namely the overall height of the mask plate supporting device is adjusted, and the overall height of the mask plate supporting device meets the requirements.
Specifically, as shown in fig. 1, each pair of the corresponding bracket holders 1 and the corresponding bracket 2 are fixed by screws 4.
In the mask plate supporting device provided by the invention, the bracket fixing seat 1 and the bracket are fixed through the screw 4, so that the fixing mode is simple, the fixing effect is good, and the cost is low.
The first implementation mode is as follows: as shown in fig. 1, 2 and 3, in each pair of the corresponding bracket fixing seat 1 and the corresponding bracket, the bracket 2 is fixed on the surface of the bracket fixing seat 1 facing the inner side of the closed ring-shaped structure, the surface of each bracket fixing seat 1 facing the inner side of the closed ring-shaped structure is provided with a plurality of rows of threaded holes, the plurality of rows of threaded holes are arranged along the height direction of the bracket, and each row of threaded holes comprises at least two threaded holes located at the same height; the support that corresponds with every support fixing base 1 all is provided with the multirow screw hole 5 with the multiunit row screw hole one-to-one on the support fixing base 1.
In the above embodiment, each pair of the corresponding bracket 2 and the corresponding bracket fixing seat 1 are fixed by the screw 4, each pair of the corresponding bracket and the corresponding bracket fixing seat 1 is provided with a plurality of rows of threaded holes with different heights on the surface of the inner side of the closed ring structure, the bracket is provided with a plurality of rows of threaded holes corresponding to the plurality of racket fixing seats on the bracket fixing seat 1 one by one, so that in the process of adjusting the position of the bracket, the bracket is moved to one side away from the bottom surface of the bracket fixing seat 1 along the height direction of the mask plate supporting device, and the screw 4 is fixed in the rows of threaded holes with different heights, so that the adjustment of the position of the bracket along the height direction of the bracket fixing seat 1 is realized, the height of the mask plate supporting device is kept in the repeated use process, and the repeated utilization rate of the mask plate supporting device is improved.
Specifically, as shown in fig. 2, a row of threaded holes 5 is indicated in a dashed line frame, and in each bracket fixing seat 1, the threaded holes 5 in every two adjacent rows of threaded holes 5 are arranged in a staggered manner.
The threaded holes in every two adjacent rows of threaded holes 5 are arranged in a staggered mode, and the adjacent threaded holes 5 cannot be influenced mutually in the height direction, so that the adjustment of more heights is facilitated, the support fixing seat 1 and the support can be punched in the adjusting process according to actual needs, the accuracy is higher, or the threaded holes 5 with different heights can be set in advance, and the threaded holes can be directly used in the subsequent adjusting process.
The second embodiment is as follows: as shown in fig. 1, fig. 2 and fig. 4, in each pair of the corresponding bracket fixing seats 1 and bracket 2, the bracket is fixed on the surface of the bracket fixing seat 1 facing the inside of the closed ring-shaped structure, the surface of each bracket fixing seat 1 facing the inside of the closed ring-shaped structure is provided with a plurality of rows of threaded holes 5, the threaded holes 5 in the rows are arranged along the height direction of the bracket, and each row of threaded holes 5 includes at least two threaded holes located at the same height; the support that corresponds with every support fixing base 1 all is provided with the fluting 6 that corresponds with one row of screw hole 5 on the support fixing base 1.
In the embodiment, only the bracket fixing seat 1 is provided with the multiple rows of threaded holes with different heights, the bracket is provided with the slotted groove 6 corresponding to the one row of threaded holes fixed on the bracket, and when the height is adjusted, the slotted groove 6 on the bracket corresponds to the group of threaded holes with different heights on the bracket fixing seat 1 and is fixed by the screw 4.
The third embodiment is: as shown in fig. 6 and 7, in each pair of the corresponding holder fixing bases 1 and the corresponding holder 2, the holder fixing base 1 includes a stepped structure for mounting the holder, a surface of the stepped structure is parallel to a bottom surface of the holder fixing base 1, the stepped structure faces an inner side of a closed ring structure formed by the holder fixing bases 1, a lower surface of the stepped structure forms a bearing surface 7 for bearing the holder, the holder is disposed on the bearing surface 7 and fastened by a locking screw 17 penetrating through the holder and perpendicular to the bearing surface 7, a height adjusting plate assembly is disposed between the bearing surface 7 and the holder, and a plurality of screw holes are disposed on the bearing surface 7, the holder, and the height adjusting plate assembly in a one-to-one correspondence manner.
In this embodiment, in each pair of the corresponding holder fixing base 1 and the corresponding holder, the holder is fixed on the bearing surface 7 of the stepped structure in the holder fixing base 1, the height adjusting device is disposed between the bearing surface 7 and the holder, and the distance between the surface of the holder departing from the bottom surface of the holder fixing base 1 and the bottom surface of the holder fixing base 1 is adjusted by the height adjusting device, that is, the overall height of the mask plate supporting device is adjusted, the holder and the height adjusting plate assembly are fastened to the holder fixing base 1 by the locking screw 17 penetrating through the holder and the height adjusting plate assembly, when the mask plate supporting device is used for the first time, the thickness of the holder in the height direction of the mask plate supporting device can be set to meet the height requirement without the height adjusting plate assembly, when the mask plate supporting device is used repeatedly, the welding surface of the holder is polished, so that the thickness of the holder in the height direction of the mask plate supporting device is reduced, at this time, the fixing between the holder and the holder fixing base 1 can be released by the adjusting locking screw 17, and the height adjusting plate assembly of an appropriate height is disposed between the holder and the holder fixing base 1 by the locking screw 17.
Specifically, as shown in fig. 7, the height adjusting plate assembly includes a plurality of height adjusting plates having different heights or a plurality of height adjusting plates 8 having the same height.
The height adjusting plate assembly comprises a plurality of adjusting plates with different heights or a plurality of height adjusting plates 8 with the same height, after the welding surface of the support is repeatedly polished to reduce the thickness of the support, the height adjusting plates 8 with different heights can be selected according to the size of the thickness of the support after polishing, or different numbers of height adjusting plates 8 with the same height or different heights are superposed, so that the whole height of the mask plate supporting device meets the requirement.
The fourth embodiment is: as shown in fig. 8 and 9, in each pair of the corresponding bracket fixing bases 1 and the corresponding bracket, the bracket fixing base 1 includes a bracket receiving groove 9 having an opening facing the inside of the closed ring structure formed by the plurality of bracket fixing bases 1, the bracket receiving groove 9 includes an upper side wall 10, a lower side wall 11, and a left side wall 12 and a right side wall 13 disposed between the upper side wall 10 and the lower side wall 11, the upper side wall 10 is provided with a plurality of first threaded holes penetrating the thickness direction of the upper side wall 10, the bracket includes a fixing end 14, the fixing end 14 includes second threaded holes extending in the direction perpendicular to the upper side wall 10 and corresponding to the first threaded holes one to one, and the fixing end 14 extends into the bracket receiving groove 9 and is mounted on the upper side wall 10 through height adjusting screws 15 fixed to the first threaded holes and the second threaded holes.
In this embodiment, in each pair of the corresponding holder fixing base 1 and the corresponding holder, the holder fixing base 1 includes a holder receiving groove 9, the holder includes a fixing end 14 extending into the holder receiving groove 9 to be fixed to the holder fixing base 1, the fixing end 14 of the holder is fixed in the holder receiving groove 9 in the holder fixing base 1, a distance between an upper side wall 10 and a lower side wall 11 of the holder receiving groove 9 is greater than a thickness of the fixing end 14 in a direction perpendicular to the upper side wall 10, the fixing end 14 of the holder is fixed to the upper side wall 10 of the holder receiving groove 9 and fixed by a height adjusting screw 15 penetrating through a first screw hole in the upper side wall 10 and a second screw hole in the fixing end 14, a distance between the fixing end 14 and the upper side wall 10 of the holder can be adjusted by rotating the height adjusting screw 15, so as to adjust an overall height of the mask plate supporting device, and the adjustment method is simple and has high accuracy.
The fifth embodiment is as follows: as shown in fig. 10, in each pair of the mutually corresponding bracket fixing bases 1 and the bracket, the bracket fixing base 1 includes a bracket receiving groove 9 having an opening facing the inner side of the closed ring structure formed by the plurality of bracket fixing bases 1, the bracket receiving groove 9 includes an upper side wall 10, a left side wall 12 and a right side wall 13, the upper side wall 10 is provided with a plurality of first threaded holes penetrating the thickness direction of the upper side wall 10, the bracket includes a fixing end 14, the fixing end 14 includes second threaded holes extending along the direction of the upper side wall 10 perpendicular to the first threaded holes and corresponding to the first threaded holes one by one, and the fixing end 14 extends into the bracket receiving groove 9 and is mounted on the upper side wall 10 through height adjusting screws 15 fixed to the first threaded holes and the second threaded holes.
In this embodiment, in each pair of the holder fixing base 1 and the holder corresponding to each other, the holder fixing base 1 includes a holder receiving groove 9, the holder includes a fixing end 14 extending into the holder receiving groove 9 to be fixed to the holder fixing base 1, the fixing end 14 of the holder is fixed in the holder receiving groove 9 in the holder fixing base 1, a distance between an upper side wall 10 and a lower side wall 11 of the holder receiving groove 9 is greater than a thickness of the fixing end 14 in a direction perpendicular to the upper side wall 10, the fixing end 14 of the holder is fixed to the upper side wall 10 of the holder receiving groove 9 and fixed by a height adjusting screw 15 penetrating through the upper side wall 10 and the fixing end 14, the distance between the fixing end 14 and the upper side wall 10 of the holder can be adjusted by rotating the height adjusting screw 15, thereby adjusting the overall height of the mask plate supporting device, and the adjustment method is simple and has high accuracy.
The sixth embodiment is as follows: as shown in fig. 11 and 12, the surfaces of the left and right side walls 12 and 13 facing the inside of the rack receiving groove are formed with a stopper protrusion 16 extending in a direction perpendicular to the upper side wall 10, and the fixed end 14 of the rack includes a stopper groove to be fitted with the stopper portion.
Spacing arch 16 in support receiving groove 9 cooperates with the spacing recess of stiff end 14 to inject the position of stiff end 14 in support receiving groove 9, make the fixed position of support more accurate, in this kind of embodiment, the support needs to slide stiff end 14 into support receiving groove 9 by support fixing base 1 bottom surface one side when the installation in, and through the height-adjusting screw 15 that runs through first screw hole in upper sidewall 10 and the second screw hole in stiff end 14 with the support fixed in support fixing base 1.
The seventh embodiment is: as shown in fig. 13, in each pair of the bracket fixing seat 1 and the bracket corresponding to each other, the bracket fixing seat 1 includes a bracket fixing wall parallel to the bottom surface of the bracket fixing seat 1, the bracket includes a fixing end 14, the fixing end 14 is installed on one side of the bracket fixing wall facing the bottom surface of the bracket fixing seat 1, the bracket fixing wall includes a plurality of first threaded holes penetrating the thickness direction of the bracket fixing wall, the fixing end 14 is provided with second threaded holes corresponding to the first threaded holes one to one, and the fixing end 14 is installed on the bracket fixing wall through height adjusting screws 15 fixed to the first threaded holes and the second threaded holes.
In this embodiment, in each pair of the corresponding holder fixing base 1 and the corresponding holder, the holder fixing base 1 includes a holder fixing wall, the holder includes a fixing end 14 fixed to the holder fixing wall, the fixing end 14 of the holder is fixed to a side of the holder fixing wall facing the bottom surface of the holder fixing base 1, a distance between the holder fixing wall and the bottom surface of the holder fixing base 1 is greater than a thickness of the fixing end 14 in a direction perpendicular to the holder fixing wall, the fixing end 14 of the holder is fixed by a height adjusting screw 15 penetrating through the holder fixing wall and the fixing end 14, and a distance between the fixing end 14 of the holder and the upper sidewall 10 can be adjusted by rotating the height adjusting screw 15, so as to adjust an overall height of the mask supporting device, and the adjustment method is simple and high in precision.
It will be apparent to those skilled in the art that various changes and modifications may be made in the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (1)
1. A mask plate supporting device is characterized by comprising:
the bracket fixing seats are sequentially connected end to form a closed annular structure;
the supports are in one-to-one correspondence with the support fixing seats, in each pair of the supports and the support fixing seats which are in one-to-one correspondence, the supports are arranged on the support fixing seats in a position-adjustable manner along the height direction of the support fixing seats, and the top surface of each support forms a mask plate welding surface;
each pair of the corresponding bracket fixing seats is fixed with the bracket through a screw;
in each pair of the corresponding bracket fixing seats and the corresponding bracket, the bracket is fixed on the surface of the bracket fixing seat facing the inner side of the closed annular structure, the surface of each bracket fixing seat facing the inner side of the closed annular structure is provided with a plurality of rows of threaded holes, the threaded holes in the rows are arranged along the height direction of the bracket, and each row of threaded holes comprises at least two threaded holes at the same height; the bracket corresponding to each bracket fixing seat is provided with a plurality of rows of threaded holes which correspond to the plurality of rows of threaded holes on the bracket fixing seat one by one, or the bracket corresponding to each bracket fixing seat is provided with a notch corresponding to the row of threaded holes on the bracket fixing seat;
in each bracket fixing seat, the threaded holes in every two adjacent rows of threaded holes are arranged in a staggered mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010587308.6A CN111690896B (en) | 2020-06-24 | 2020-06-24 | Mask plate supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010587308.6A CN111690896B (en) | 2020-06-24 | 2020-06-24 | Mask plate supporting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111690896A CN111690896A (en) | 2020-09-22 |
| CN111690896B true CN111690896B (en) | 2022-12-13 |
Family
ID=72483189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010587308.6A Active CN111690896B (en) | 2020-06-24 | 2020-06-24 | Mask plate supporting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111690896B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088877A (en) * | 2021-04-08 | 2021-07-09 | 京东方科技集团股份有限公司 | Mask frame reusing method, mask frame and mask |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207159336U (en) * | 2017-09-15 | 2018-03-30 | 京东方科技集团股份有限公司 | A kind of mask plate |
| CN108149191A (en) * | 2017-12-25 | 2018-06-12 | 固安翌光科技有限公司 | A kind of novel mask and evaporation coating device |
| CN209722281U (en) * | 2019-03-29 | 2019-12-03 | 昆山国显光电有限公司 | Support component and the exposure mask board mount for using the support component |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2649218B1 (en) * | 2010-12-08 | 2017-08-23 | Evatec AG | Apparatus and method for depositing a layer onto a substrate |
| KR102354975B1 (en) * | 2015-06-18 | 2022-01-25 | 삼성디스플레이 주식회사 | Plasma enhanced chemical vapor deposition device and display apparatus using the same |
| JP6298110B2 (en) * | 2016-07-08 | 2018-03-20 | キヤノントッキ株式会社 | Mask support, film forming apparatus and film forming method |
-
2020
- 2020-06-24 CN CN202010587308.6A patent/CN111690896B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207159336U (en) * | 2017-09-15 | 2018-03-30 | 京东方科技集团股份有限公司 | A kind of mask plate |
| CN108149191A (en) * | 2017-12-25 | 2018-06-12 | 固安翌光科技有限公司 | A kind of novel mask and evaporation coating device |
| CN209722281U (en) * | 2019-03-29 | 2019-12-03 | 昆山国显光电有限公司 | Support component and the exposure mask board mount for using the support component |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111690896A (en) | 2020-09-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109487206B (en) | Mask and mask device adopting same | |
| CN104428439B (en) | Mask unit and evaporation coating device | |
| CN111584605B (en) | Array substrate, preparation method, display panel and display device | |
| CN111690896B (en) | Mask plate supporting device | |
| CN207159336U (en) | A kind of mask plate | |
| CN109750257A (en) | Mask plate and its manufacturing method | |
| CN110600532B (en) | Display panel and display device | |
| US20180261767A1 (en) | Pixel print structure, manufacturing method thereof, display device, inkjet printing method | |
| WO2020113751A1 (en) | Mask | |
| US11037998B2 (en) | Pixel defining layer, pixel structure, display panel and display device | |
| US9780304B2 (en) | Array substrate, method for ink jet printing thereon and related device | |
| WO2021138999A1 (en) | Ink-jet printing method, apparatus, device, and computer-readable storage medium | |
| US11588128B2 (en) | Electrode exhaust structure, electrode, display panel and manufacturing method therefor, and display apparatus | |
| CN110459690B (en) | Display substrate, preparation method thereof, display device and ink-jet printing method | |
| JP2020532652A (en) | FMM processing for high resolution FMM | |
| KR100764628B1 (en) | Chemical Vapor Deposition Equipment for Flat Panel Displays | |
| CN108710242B (en) | Display panel and display device | |
| CN108215533B (en) | A kind of base station system and its application method | |
| EP3617340A1 (en) | Mask sheet, mask plate and assembly method therefor | |
| CN112647046B (en) | Vapor deposition apparatus and vapor deposition method | |
| CN110610976B (en) | Display substrate, preparation method thereof and display device | |
| KR20040067053A (en) | Large size shadow mask set up structure | |
| KR20080002240A (en) | Plasma Chemical Vapor Deposition System | |
| KR20160023953A (en) | Apparatus for treating a large area substrate | |
| KR102670160B1 (en) | Apparatus for Processing Substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |